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Liabilities (Tables)

9 Months Ended

Sep. 30, 2017

Liabilities

Schedule of accrued expenses and other current liabilities

		September 30,			December 31,
		2017			2016
		(in thousands)
Payroll and related benefits		$	27,816		$	18,780
Merger consideration payable		17,844			—
Warranty		6,555			4,217
Professional fees		3,349			1,827
Installation		1,418			1,382
Sales, use, and other taxes		1,961			1,282
Restructuring liability		1,893			1,796
Interest		2,307			—
Other		2,585			3,917
Total		$	65,728		$	33,201

Schedule of changes in product warranty reserves

		(in thousands)
Balance - December 31, 2016		$	4,217
Warranties issued		4,314
Addition from Ultratech acquisition		1,889
Consumption of reserves		(4,741		)
Changes in estimate		876
Balance - September 30, 2017		$	6,555

Schedule of restructuring accrual activities

		Personnel
		Severance and			Facility
		Related Costs			Closing Costs			Total
		(in thousands)
Balance - December 31, 2016		$	1,796		$	—		$	1,796
Provision		3,628			4,269			7,897
Payments		(3,531		)	(4,269		)	(7,800		)
Balance - September 30, 2017		$	1,893		$	—		$	1,893

Schedule of carrying value of Convertible Senior Notes

		September 30,
		2017
		(in thousands)
Principal amount		$	345,000
Unamortized debt discount		(65,570		)
Unamortized transaction costs		(6,605		)
Net carrying value		$	272,825

Summary of interest expense related to Convertible Senior Notes

		Three months ended September 30,			Nine months ended September 30,
		2017			2017
		(in thousands)
Cash Interest Expense
Coupon interest expense		$	2,329		$	6,573
Non-Cash Interest Expense
Amortization of debt discount		2,502			6,942
Amortization of transaction costs		252			699
Total Interest Expense		$	5,083		$	14,214

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