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Share-based compensation (Tables)

9 Months Ended

Sep. 30, 2017

Share-based compensation

Schedule of share-based compensation expense

		Three months ended September 30,						Nine months ended September 30,
		2017			2016			2017			2016
		(in thousands)
Cost of sales		$	740		$	607		$	1,898		$	1,639
Research and development		849			993			1,986			3,032
Selling, general, and administrative		3,714			2,143			10,182			7,462
Restructuring		867			—			1,707			—
Acquisition costs		—			—			4,203			—
Total		$	6,170		$	3,743		$	19,976		$	12,133

Summary of stock option activity

		Number of		Weighted Average
		Shares		Exercise Price
		(in thousands)
Balance - December 31, 2016		1,576		$	35.18
Granted		—		—
Exercised		(18	)	30.03
Expired or forfeited		(129	)	37.03
Balance - September 30, 2017		1,429		35.07

Summary of restricted and performance shares activity

				Weighted Average
		Number of		Grant Date
		Shares		Fair Value
		(in thousands)
Balance - December 31, 2016		1,949		$	23.85
Granted		642		29.35
Assumed from Ultratech		338		31.75
Vested		(695	)	27.12
Forfeited		(173	)	26.39
Balance - September 30, 2017		2,061		25.85

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- References

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- Definition

Tabular disclosure of the allocation of equity-based compensation costs to a given line item on the balance sheet and income statement for the period. This may include the reporting line for the costs and the amount capitalized and expensed.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 718
-SubTopic 10
-Section 50
-Paragraph 2
-Subparagraph (h)(1)
-URI http://asc.fasb.org/extlink&oid=6415400&loc=d3e5070-113901

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-Publisher FASB
-Name Accounting Standards Codification
-Topic 718
-SubTopic 10
-Section 50
-Paragraph 1
-Subparagraph (b)
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-Publisher FASB
-Name Accounting Standards Codification
-Topic 718
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-Subparagraph (SAB Topic 14.F)
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- Definition

Tabular disclosure of the number and weighted-average exercise prices (or conversion ratios) for share options (or share units) that were outstanding at the beginning and end of the year, vested and expected to vest, exercisable or convertible at the end of the year, and the number of share options or share units that were granted, exercised or converted, forfeited, and expired during the year.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 718
-SubTopic 10
-Section 50
-Paragraph 2
-Subparagraph (c)(1)
-URI http://asc.fasb.org/extlink&oid=6415400&loc=d3e5070-113901

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Disclosure of the number and weighted-average grant date fair value for restricted stock and restricted stock units that were outstanding at the beginning and end of the year, and the number of restricted stock and performance shares that were granted, vested, or forfeited during the year.

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