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Business Combinations (Details) - USD ($)
$ / shares in Units, $ in Thousands
 3 Months Ended 9 Months Ended
May 26, 2017
Sep. 30, 2017
Sep. 30, 2016
Sep. 30, 2017
Sep. 30, 2016
Dec. 31, 2016
Summary of estimated fair values of the assets acquired and liabilities assumed            
Goodwill   $ 308,529   $ 308,529   $ 114,908
Intangible assets acquired and the estimated weighted-average useful life            
Acquisition related costs   783   16,277    
Non-cash charges related to share based compensation       19,976 $ 12,133  
Revenue and income (loss) from operations before income taxes            
Amortization expense on intangible assets   12,500 $ 5,261 21,722 15,785  
Restructuring charges   5,010 1,798 9,605 3,993  
Ultratech            
Business Combinations            
Cash received by acquiree (in dollars per share) $ 21.75          
Number of shares received by acquiree 0.2675          
Decrease in fair value of acquired inventory   4,100        
Decrease in fair value of property, plant and equipment   1,200        
Fair value of the consideration transferred            
Cash consideration, net of cash acquired $ 404,489          
Equity consideration (7.2 million shares issued) $ 228,644          
Number of shares in fair value of equity issuances (in shares) 7,200,000          
Replacement equity awards attributable to pre-acquisition service $ 228          
Acquisition date fair value 633,361          
Summary of estimated fair values of the assets acquired and liabilities assumed            
Short-term investments 47,161          
Account receivable 45,465          
Inventory and deferred cost of sales 57,570          
Prepaid expense and other current assets 7,217          
Property, plant, and equipment 18,332          
Intangible assets 346,940          
Other assets 6,442          
Total identifiable assets acquired 529,127          
Accounts payable and accrued expenses 40,123          
Customer deposits and deferred revenue 4,834          
Deferred income taxes 32,478          
Other liabilities 11,952          
Total liabilities assumed 89,387          
Net identifiable assets acquired 439,740          
Goodwill 193,621          
Net assets acquired 633,361          
Gross contractual value of accounts receivable 46,000          
Intangible assets acquired and the estimated weighted-average useful life            
Intangible assets acquired, amount 346,940          
Acquisition related costs   800   16,300    
Non-cash charges related to share based compensation       4,200    
Revenue and income (loss) from operations before income taxes            
Revenue   21,236   45,286    
Loss from operations before income taxes   (21,556)   (44,374)    
Inventory fair value step-up related to purchase accounting   1,900   9,200    
Amortization expense on intangible assets   9,600   13,100    
Restructuring charges   2,100   3,300    
Pro forma consolidated statement of operations            
Revenue   131,872 134,093 412,066 381,586  
Loss from operations   $ (14,957) $ (74,197) $ (45,309) $ (187,499)  
Diluted earnings per share (in dollars per share)   $ (0.40) $ (1.67) $ (1.01) $ (4.34)  
Ultratech | Technology            
Intangible assets acquired and the estimated weighted-average useful life            
Intangible assets acquired, amount $ 158,390          
Useful life 8 years          
Ultratech | Customer relationships            
Intangible assets acquired and the estimated weighted-average useful life            
Intangible assets acquired, amount $ 116,710          
Useful life 12 years          
Ultratech | Backlog            
Intangible assets acquired and the estimated weighted-average useful life            
Intangible assets acquired, amount $ 3,080          
Useful life 6 months          
Ultratech | In-process research and development            
Intangible assets acquired and the estimated weighted-average useful life            
Intangible assets acquired, amount $ 43,340          
Ultratech | Trademark and tradenames            
Intangible assets acquired and the estimated weighted-average useful life            
Intangible assets acquired, amount $ 25,420          
Useful life 7 years