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Liabilities - Accrued Expenses and Warranty (Details) - USD ($) $ in Thousands	9 Months Ended
	Sep. 30, 2017	Dec. 31, 2016
Accrued expenses and other current liabilities
Payroll and related benefits	$ 27,816	$ 18,780
Merger consideration payable	17,844
Warranty	6,555	4,217
Professional fees	3,349	1,827
Installation	1,418	1,382
Sales, use, and other taxes	1,961	1,282
Restructuring liability	1,893	1,796
Interest	2,307
Other	2,585	3,917
Total	$ 65,728	$ 33,201
Accrued Warranty
Warranty period	1 year
Balance, beginning of the year	$ 4,217
Warranties issued	4,314
Addition from Ultratech acquisition	1,889
Consumption of reserves	(4,741)
Changes in estimate	876
Balance, end of the year	$ 6,555

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Carrying value as of the balance sheet date of obligations incurred and payable, pertaining to costs that are statutory in nature, are incurred on contractual obligations, or accumulate over time and for which invoices have not yet been received or will not be rendered. Examples include taxes, interest, rent and utilities. Used to reflect the current portion of the liabilities (due within one year or within the normal operating cycle if longer).

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