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Equity - AOCI Rollforward (Details) - USD ($) $ in Thousands, shares in Millions	3 Months Ended		9 Months Ended
	Sep. 30, 2017	Sep. 30, 2016	Sep. 30, 2017	Sep. 30, 2016
Changes in the balances of each component of AOCI
Balance at the beginning of the period			$ 594,595
Other comprehensive income (loss)	$ 71	$ 852	35	$ 918
Balance at the end of the period	845,529		$ 845,529
Ultratech
Changes in the balances of each component of AOCI
Issuance of shares for merger consideration (in shares)			7.2
Accumulated Other Comprehensive Income
Changes in the balances of each component of AOCI
Balance at the beginning of the period			$ 1,777
Other comprehensive income (loss)			35
Balance at the end of the period	1,812		1,812
Foreign Currency Translation
Changes in the balances of each component of AOCI
Balance at the beginning of the period			1,797
Other comprehensive income (loss)			25
Balance at the end of the period	1,822		1,822
Unrealized Gains (Losses) on Available for Sale Securities
Changes in the balances of each component of AOCI
Balance at the beginning of the period			(20)
Other comprehensive income (loss)			10
Balance at the end of the period	$ (10)		(10)
Additional Paid-in Capital
Changes in the balances of each component of AOCI
Issuance of shares for merger consideration			228,800
Convertible Senior Notes including deferred tax impact			47,500
Convertible Senior Notes related to on-going share-based compensation activities			$ 11,400

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A roll forward is a reconciliation of a concept from the beginning of a period to the end of a period.

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Amount of increase (decrease) in additional paid in capital (APIC) resulting from recognition of deferred taxes for convertible debt with a beneficial conversion feature.

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- Definition

This element represents the amount of recognized equity-based compensation during the period, that is, the amount recognized as expense in the income statement (or as asset if compensation is capitalized). Alternate captions include the words "stock-based compensation".

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Amount after tax of other comprehensive income (loss) attributable to parent entity.

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Number of new stock issued during the period.

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Equity impact of the value of new stock issued during the period. Includes shares issued in an initial public offering or a secondary public offering.

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Total of all stockholders' equity (deficit) items, net of receivables from officers, directors, owners, and affiliates of the entity which are attributable to the parent. The amount of the economic entity's stockholders' equity attributable to the parent excludes the amount of stockholders' equity which is allocable to that ownership interest in subsidiary equity which is not attributable to the parent (noncontrolling interest, minority interest). This excludes temporary equity and is sometimes called permanent equity.

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