EX-21.1 2 a18-1089_1ex21d1.htm EX-21.1

Exhibit 21.1

Subsidiaries of the Registrant

Subsidiary |  | Jurisdiction of Organization |  | Percentage Ownership(A) |
U.S. Subsidiaries |  |  |  |  |
Veeco APAC Inc. |  | DE |  | 100% |
Veeco Precision Surface Processing LLC |  | DE |  | 100% |
Veeco Process Equipment Inc. |  | DE |  | 100% |
Veeco PSP Blocker A Corp. |  | DE |  | 100% |
Ultratech Inc. |  | DE |  | 100% |
Ultratech Korea Holding, LLC. |  | DE |  | 100% |
Ultratech International, Inc. |  | DE |  | 100% |
Ultratech Stepper East, Inc. |  | DE |  | 100% |
Ultratech Corporation |  | NV |  | 100% |
Foreign Subsidiaries |  |  |  |  |
Veeco Asia Pte. Ltd. |  | Singapore |  | 100% |
Veeco Instruments GmbH |  | Germany |  | 100% |
Veeco Instruments Limited |  | England |  | 100% |
Veeco Instruments (Shanghai) Co. Ltd. |  | China |  | 100% |
Veeco Korea LLC |  | South Korea |  | 100% |
Veeco Malaysia Sdn. Bhd. |  | Malaysia |  | 100% |
Veeco Netherlands BV |  | Netherlands |  | 100% |
Veeco Taiwan Inc. |  | Taiwan |  | 100% |
Ultratech GmbH |  | Germany |  | 100% |
Ultra-Tech Technologies Israel Ltd. |  | Israel |  | 100% |
Ultratech Kabushiki Kaisha |  | Japan |  | 100% |
Ultratech Thailand Co. Ltd. |  | Thailand |  | 100% |
Ultratech (Shanghai) Co. Ltd |  | China |  | 100% |
Ultratech Technology Holding B.V. |  | Netherlands |  | 100% |
Ultratech SE Asia PTE Ltd. |  | Singapore |  | 100% |
Ultratech Technologies Sdn Bhd |  | Malaysia |  | 100% |

(A) Includes direct and indirect ownership.