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Income Taxes - Operating Loss Carryforwards (Details) $ in Millions	12 Months Ended
	Dec. 31, 2017 USD ($)
Operating loss carryforwards disclosures
Increase (Decrease) in valuation allowance	$ (6.1)
Ultratech acquisition
Operating loss carryforwards disclosures
Net operating loss carryforwards	119.0
Capital losses
Operating loss carryforwards disclosures
Net operating loss carryforwards	3.5
Research and development tax credit carryforward
Operating loss carryforwards disclosures
Tax credit carry forwards	10.9
Federal
Operating loss carryforwards disclosures
Net operating loss carryforwards	301.6
Federal | Research and development tax credit carryforward
Operating loss carryforwards disclosures
Tax credit carry forwards	16.7
State and local
Operating loss carryforwards disclosures
Net operating loss carryforwards	127.4
Tax credit carry forwards	27.1
Net deferred tax asset	$ 7.6

X

- Definition

Amount before allocation of valuation allowances of deferred tax asset attributable to deductible operating loss carryforwards.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 740
-SubTopic 10
-Section 25
-Paragraph 20
-Subparagraph (b)
-URI http://asc.fasb.org/extlink&oid=68052875&loc=d3e28680-109314

Reference 2: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 740
-SubTopic 10
-Section 50
-Paragraph 6
-URI http://asc.fasb.org/extlink&oid=65882285&loc=d3e32621-109319

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-Publisher FASB
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-URI http://asc.fasb.org/extlink&oid=65882285&loc=d3e32632-109319

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Amount of operating loss carryforward, before tax effects, available to reduce future taxable income under enacted tax laws.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 740
-SubTopic 10
-Section 50
-Paragraph 3
-Subparagraph (a)
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The amount of the tax credit carryforward, before tax effects, available to reduce future taxable income under enacted tax laws.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 740
-SubTopic 10
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-Paragraph 3
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-URI http://asc.fasb.org/extlink&oid=65882285&loc=d3e32559-109319

Reference 2: http://www.xbrl.org/2003/role/presentationRef
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-Name Accounting Standards Codification
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-URI http://asc.fasb.org/extlink&oid=6506874

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+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef
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-Name Accounting Standards Codification
-Topic 740
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