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Business Combinations (Details) - USD ($)
$ / shares in Units, $ in Thousands
 12 Months Ended
May 26, 2017
Dec. 31, 2017
Dec. 31, 2016
Dec. 31, 2015
Summary of estimated fair values of the assets acquired and liabilities assumed        
Goodwill   $ 307,131 $ 114,908  
Intangible assets acquired and the estimated weighted-average useful life        
Acquisition related costs   17,786    
Non-cash charges related to share based compensation   24,396 15,741 $ 17,986
Revenue and income (loss) from continuing operations before income taxes        
Amortization expense on intangible assets   35,475 19,219 27,634
Restructuring charges   11,851 5,640 $ 4,679
Ultratech        
Business Combinations        
Cash received by acquiree (in dollars per share) $ 21.75      
Number of shares received by acquiree 0.2675      
Fair value of the consideration transferred        
Cash consideration, net of cash acquired of $229.4 million $ 404,489      
Cash acquired from acquisition 229,400      
Equity consideration (7.2 million shares issued) $ 228,644      
Number of shares in fair value of equity issuances (in shares) 7,200,000      
Replacement equity awards attributable to pre-acquisition service $ 228      
Acquisition date fair value 633,361      
Summary of estimated fair values of the assets acquired and liabilities assumed        
Short-term investments 47,161      
Account receivable 45,465      
Inventories 59,100      
Deferred cost of sales 242      
Prepaid expense and other current assets 7,217      
Property, plant, and equipment 18,152      
Intangible assets 346,940      
Other assets 6,442      
Total identifiable assets acquired 530,719      
Accounts payable 24,291      
Accrued expenses and other current liabilities 16,356      
Customer deposits and deferred revenue 4,834      
Deferred income taxes 32,478      
Other liabilities 11,622      
Total liabilities assumed 89,581      
Net identifiable assets acquired 441,138      
Goodwill 192,223      
Net assets acquired 633,361      
Gross contractual value of accounts receivable 46,000      
Intangible assets acquired and the estimated weighted-average useful life        
Intangible assets acquired, amount 346,940      
Acquisition related costs   17,800    
Non-cash charges related to share based compensation   4,200    
Revenue and income (loss) from continuing operations before income taxes        
Net sales   65,530    
Loss before income taxes   (62,762)    
Inventory fair value step-up related to purchase accounting   9,600    
Amortization expense on intangible assets   23,900    
Restructuring charges   3,300    
Pro forma consolidated statement of operations        
Revenue   555,498 526,501  
Loss before income taxes   $ (81,910) $ (218,023)  
Diluted earnings per share (in dollars per share)   $ (1.24) $ (4.67)  
Ultratech | Accrued expenses and other current liabilities        
Fair value of the consideration transferred        
Cash merger consideration   $ 2,700    
Ultratech | Technology        
Intangible assets acquired and the estimated weighted-average useful life        
Intangible assets acquired, amount $ 158,390      
Useful life 9 years      
Ultratech | Customer relationships        
Intangible assets acquired and the estimated weighted-average useful life        
Intangible assets acquired, amount $ 116,710      
Useful life 12 years      
Ultratech | Backlog        
Intangible assets acquired and the estimated weighted-average useful life        
Intangible assets acquired, amount $ 3,080      
Useful life 6 months      
Ultratech | In-process R&D        
Intangible assets acquired and the estimated weighted-average useful life        
Intangible assets acquired, amount $ 43,340      
Ultratech | Trademark and tradenames        
Intangible assets acquired and the estimated weighted-average useful life        
Intangible assets acquired, amount $ 25,420      
Useful life 7 years