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Commitments and Contingencies - Warranty (Details) - USD ($)
$ in Thousands
12 Months Ended
Dec. 31, 2017
Dec. 31, 2016
Dec. 31, 2015
Commitments and Contingencies      
Warranty period of products purchased 1 year    
Product warranty reserves:      
Balance, beginning of the year $ 4,217 $ 8,159 $ 5,411
Warranties issued 5,817 3,916 7,873
Addition from Ultratech acquisition 1,889    
Consumption of reserves (6,330) (6,433) (3,551)
Changes in estimate 939 (1,425) (1,574)
Balance, end of the year $ 6,532 $ 4,217 $ 8,159