Aggregate number of common shares reserved for future issuance.

Reference 1: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 210
-SubTopic 10
-Section S99
-Paragraph 1
-Subparagraph (SX 210.5-02.29)
-URI http://asc.fasb.org/extlink&oid=6877327&loc=d3e13212-122682

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- Definition

Period which an employee's right to exercise an award is no longer contingent on satisfaction of either a service condition, market condition or a performance condition, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days.

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- Definition

The number of grants made during the period on other than stock (or unit) option plans (for example, phantom stock or unit plan, stock or unit appreciation rights plan, performance target plan).

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- Definition

Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.

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No definition available.

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- Definition

Number of equity instruments other than options outstanding, including both vested and non-vested instruments.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 718
-SubTopic 10
-Section 50
-Paragraph 2
-Subparagraph (c)(1)(i)
-URI http://asc.fasb.org/extlink&oid=6415400&loc=d3e5070-113901

Reference 2: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 718
-SubTopic 10
-Section 50
-Paragraph 2
-Subparagraph (c)(1)(ii)
-URI http://asc.fasb.org/extlink&oid=6415400&loc=d3e5070-113901

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- Definition

The maximum number of shares (or other type of equity) originally approved (usually by shareholders and board of directors), net of any subsequent amendments and adjustments, for awards under the equity-based compensation plan. As stock or unit options and equity instruments other than options are awarded to participants, the shares or units remain authorized and become reserved for issuance under outstanding awards (not necessarily vested).

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- Definition

The difference between the maximum number of shares (or other type of equity) authorized for issuance under the plan (including the effects of amendments and adjustments), and the sum of: 1) the number of shares (or other type of equity) already issued upon exercise of options or other equity-based awards under the plan; and 2) shares (or other type of equity) reserved for issuance on granting of outstanding awards, net of cancellations and forfeitures, if applicable.

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- Definition

Net number of share options (or share units) granted during the period.

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- Definition

Number of options outstanding, including both vested and non-vested options.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 718
-SubTopic 10
-Section 50
-Paragraph 2
-URI http://asc.fasb.org/extlink&oid=6415400&loc=d3e5070-113901

Reference 2: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 718
-SubTopic 10
-Section 50
-Paragraph 2
-Subparagraph (c)(1)(i)-(ii)
-URI http://asc.fasb.org/extlink&oid=6415400&loc=d3e5070-113901

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- Definition

Period from grant date that an equity-based award expires, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days.

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- Definition

Purchase price of common stock expressed as a percentage of its fair value.

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No definition available.

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- Definition

Shares Reserved For Future Issuance

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Stock Plans - Plans and Awards (Details) - shares	12 Months Ended
Stock Plans - Plans and Awards (Details) - shares	Dec. 31, 2017	Dec. 31, 2016	Dec. 31, 2013	Dec. 31, 2015	Dec. 31, 2014
Inducement Plan
Stock plans disclosures
Common stock available for issuance (in shares)			0
2010 Stock Incentive Plan
Stock plans disclosures
Maximum number of shares authorized to be issued	10,600,000
Shares reserved for future issuance
Total shares reserved	5,700,000
2016 Employee Stock Purchase Plan
Stock plans disclosures
Common stock available for issuance (in shares)		750,000
Share price (as a percent)		85.00%
Shares reserved for future issuance
Total shares reserved	500,000
Stock option Awards
Stock plans disclosures
Vesting period	3 years
Number of options outstanding (in shares)	1,394,000	1,576,000		2,064,000	2,391,000
Stock option Awards \| Inducement Plan
Stock plans disclosures
Awards granted (in shares)			124,500
Vesting period			3 years
Expiration term			10 years
Number of options outstanding (in shares)	2,000
Stock option Awards \| 2010 Stock Incentive Plan \| Minimum
Stock plans disclosures
Expiration term	7 years
Stock option Awards \| 2010 Stock Incentive Plan \| Maximum
Stock plans disclosures
Expiration term	10 years
Restricted Stock Awards and Restricted Stock Units \| 2010 Stock Incentive Plan \| Minimum
Stock plans disclosures
Vesting period	1 year
Restricted Stock Awards and Restricted Stock Units \| 2010 Stock Incentive Plan \| Maximum
Stock plans disclosures
Vesting period	5 years
Restricted stock units \| Inducement Plan
Stock plans disclosures
Awards granted (in shares)			87,000
Number of awards other than options outstanding (in shares)	0
Restricted stock units \| Inducement Plan \| Minimum
Stock plans disclosures
Vesting period			2 years
Restricted stock units \| Inducement Plan \| Maximum
Stock plans disclosures
Vesting period			4 years
Restricted stock units \| Ultratech Plan
Stock plans disclosures
Awards granted (in shares)	338,144
Vesting period	50 months
Restricted Stock Awards \| Ultratech Plan
Stock plans disclosures
Awards granted (in shares)	100,000
RSUs and PSUs \| 2010 Stock Incentive Plan
Stock plans disclosures
Number of awards other than options outstanding (in shares)	600,000