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Stock Plans - RSAs, RSUs, PSAs and PSUs (Details) - RSAs, RSUs, PSAs and PSUs - USD ($) $ / shares in Units, shares in Thousands, $ in Millions	12 Months Ended
	Dec. 31, 2017	Dec. 31, 2016	Dec. 31, 2015
Number of Shares
Balance at the beginning of the period (in shares)	1,949	1,398	1,237
Granted (in shares)	674	1,166	672
Performance award adjustments (in shares)	(25)
Assumed from Ultratech (in shares)	338
Vested (in shares)	(831)	(349)	(389)
Forfeited (in shares)	(225)	(266)	(122)
Balance at the end of the period (in shares)	1,880	1,949	1,398
Weighted Average Grant Date Fair Value
Balance at the beginning of the period (in dollars per share)	$ 23.85	$ 31.97	$ 34.27
Granted (in dollars per share)	29.22	17.59	30.33
Performance award adjustments (in dollars per share)	20.95
Assumed from Ultratech (in dollars per share)	31.75
Vested (in dollars per share)	27.67	32.73	35.65
Forfeited (in dollars per share)	26.29	27.31	34.46
Balance at the end of the period (in dollars per share)	$ 25.41	$ 23.85	$ 31.97
Total fair value of shares vested	$ 22.3	$ 7.5	$ 9.6
Minimum
Weighted Average Grant Date Fair Value
Vesting period	1 year
Maximum
Weighted Average Grant Date Fair Value
Vesting period	5 years

X

- Definition

Period which an employee's right to exercise an award is no longer contingent on satisfaction of either a service condition, market condition or a performance condition, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 718
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-Section 50
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The number of equity-based payment instruments, excluding stock (or unit) options, that were forfeited during the reporting period.

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Weighted average fair value as of the grant date of equity-based award plans other than stock (unit) option plans that were not exercised or put into effect as a result of the occurrence of a terminating event.

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The number of grants made during the period on other than stock (or unit) option plans (for example, phantom stock or unit plan, stock or unit appreciation rights plan, performance target plan).

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The weighted average fair value at grant date for nonvested equity-based awards issued during the period on other than stock (or unit) option plans (for example, phantom stock or unit plan, stock or unit appreciation rights plan, performance target plan).

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- Definition

The number of non-vested equity-based payment instruments, excluding stock (or unit) options, that validly exist and are outstanding as of the balance sheet date.

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A roll forward is a reconciliation of a concept from the beginning of a period to the end of a period.

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The weighted average fair value of nonvested awards on equity-based plans excluding option plans (for example, phantom stock or unit plan, stock or unit appreciation rights plan, revenue or profit achievement stock award plan) for which the employer is contingently obligated to issue equity instruments or transfer assets to an employee who has not yet satisfied service or performance criteria necessary to gain title to proceeds from the sale of the award or underlying shares or units.

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Fair value of share-based awards for which the grantee gained the right by satisfying service and performance requirements, to receive or retain shares or units, other instruments, or cash.

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The number of equity-based payment instruments , excluding stock (or unit) options, that were assumed from acquisition.

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Weighted average fair value as of the grant date of equity-based award plans other than stock (unit) option plans that were assumed from acquisition.

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The number of performance award adjustments made during the period on other than stock (or unit) option plans.

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