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Business Combinations (Details) - USD ($)
$ / shares in Units, $ in Millions
3 Months Ended 12 Months Ended
Mar. 31, 2018
Dec. 31, 2017
May 26, 2017
Ultratech      
Business Combinations      
Cash received by acquiree (in dollars per share)     $ 21.75
Number of shares received by acquiree     0.2675
Accrued Expenses and Other Current Liabilities      
Business Combinations      
Cash consideration, net of cash acquired of $229.4 million $ 2.7 $ 2.7