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Business Combinations - ProForma (Details) - Ultratech
$ / shares in Units, $ in Thousands
3 Months Ended
Mar. 31, 2017
USD ($)
$ / shares
Pro forma consolidated statement of operations  
Net sales $ 151,908
Loss before income taxes $ (13,461)
Diluted earnings per share (in dollars per share) | $ / shares $ (0.07)