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Commitments and Contingencies - Legal Proceedings (Details) | Sep. 21, 2017 shares
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Commitments and Contingencies |
Common stock held by purported beneficial owners | 440,100

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- References No definition available. + Details
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Namespace Prefix: | us-gaap_
Data Type: | xbrli:stringItemType
Balance Type: | na
Period Type: | duration

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- Definition The number of beneficial owners of Ultratech Inc. + References No definition available. + Details
Name: | veco_BeneficialOwnersShares
Namespace Prefix: | veco_
Data Type: | xbrli:sharesItemType
Balance Type: | na
Period Type: | duration