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Business Combinations - Ultratech (Details) - USD ($) $ / shares in Units, $ in Millions | 9 Months Ended | 12 Months Ended |
--- | --- | --- | ---
Sep. 30, 2018 | Dec. 31, 2017 | May 26, 2017
Ultratech |  |  |
Business Combinations |  |  |
Cash received by acquiree (in dollars per share) |  |  | $ 21.75
Number of shares received by acquiree |  |  | 0.2675
Accrued Expenses and Other Current Liabilities |  |  |
Business Combinations |  |  |
Cash consideration, net of cash acquired | $ 2.7 | $ 2.7 |

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