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Business Combinations - Ultratech (Details) - Ultratech $ / shares in Units, $ in Thousands | May 26, 2017 USD ($) $ / shares shares
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Business Combinations |
Cash received by acquiree (in dollars per share) | $ / shares | $ 21.75
Number of shares received by acquiree | shares | 0.2675
Acquisition date fair value, net of cash acquired | $ | $ 633,361

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