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Business Combinations - IPRD and other (Details) - USD ($) $ in Thousands |  | 12 Months Ended
--- | --- | ---
May 26, 2017 | Dec. 31, 2018 | Dec. 31, 2017 | Dec. 31, 2016
Business Combinations |  |  |  |
Acquisition related costs |  | $ 2,959 | $ 17,786 |
Non-cash charges related to share based compensation |  | 16,074 | 24,396 | $ 15,741
Amortization of intangible assets |  | 32,351 | 35,475 | 19,219
Restructuring Charges. |  | 8,556 | 11,851 | $ 5,640
Ultratech |  |  |  |
Business Combinations |  |  |  |
Intangible assets acquired, amount | $ 346,940 |  |  |
Portion of IPR&D related to lithography technologies (as a percent) | 50.00% |  |  |
Portion of IPR&D related to laser annealing technologies (as a percent) | 33.00% |  |  |
Acquisition related costs |  | $ 3,000 | 17,800 |
Non-cash charges related to share based compensation |  |  | 4,200 |
Net sales |  |  | 65,280 |
Loss before income taxes |  |  | (62,284) |
Inventory fair value step-up related to purchase accounting |  |  | 9,600 |
Amortization of intangible assets |  |  | 23,900 |
Restructuring Charges. |  |  | $ 3,300 |
In-process R&D | Ultratech |  |  |  |
Business Combinations |  |  |  |
Intangible assets acquired, amount | $ 43,340 |  |  |

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