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Business Combinations - Consideration (Details) - Ultratech - USD ($) $ in Thousands, shares in Millions | May 26, 2017 | Dec. 31, 2017
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Fair value of the consideration transferred |  |
Cash consideration, net of cash acquired | $ 404,490 |
Cash acquired | 229,400 |
Equity consideration (7.2 million shares issued) | $ 228,643 |
Shares issued (in shares) | 7.2 |
Replacement equity awards attributable to pre-acquisition service | $ 228 |
Acquisition date fair value | $ 633,361 |
Accrued expenses and other current liabilities |  |
Fair value of the consideration transferred |  |
Cash merger consideration |  | $ 2,700

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