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Income Taxes - Operating Loss Carryforwards (Details) - USD ($)
$ in Thousands
12 Months Ended
Dec. 31, 2018
Dec. 31, 2017
Operating loss carryforwards disclosures    
Net deferred tax asset $ 67,787 $ 73,458
Federal    
Operating loss carryforwards disclosures    
Net operating loss carryforwards 281,400  
Net operating loss carryforwards, Indefinite carryforward period 16,000  
Federal | Ultratech    
Operating loss carryforwards disclosures    
Net operating loss carryforwards 119,000  
State and local    
Operating loss carryforwards disclosures    
Net operating loss carryforwards 147,600  
Net deferred tax asset $ 9,000