Exhibit 21.1
Subsidiaries of the Registrant
|
Subsidiary |
|
Jurisdiction of Organization |
|
Percentage Ownership(A) |
|
|
|
|
|
|
|
U.S. Subsidiaries |
|
|
|
|
|
Ultratech International Inc. |
|
DE |
|
100% |
|
Veeco APAC LLC |
|
DE |
|
100% |
|
Veeco Process Equipment Inc. |
|
DE |
|
100% |
|
|
|
|
|
|
|
Foreign Subsidiaries |
|
|
|
|
|
Veeco Asia Pte. Ltd. |
|
Singapore |
|
100% |
|
Veeco GmbH |
|
Germany |
|
100% |
|
Veeco Instruments Limited |
|
England |
|
100% |
|
Veeco Instruments (Shanghai) Co. Ltd. |
|
China |
|
100% |
|
Veeco Japan Ltd. |
|
Japan |
|
100% |
|
Veeco Korea LLC |
|
South Korea |
|
100% |
|
Veeco Malaysia Sdn. Bhd. |
|
Malaysia |
|
100% |
|
Veeco Netherlands BV |
|
Netherlands |
|
100% |
|
Veeco Taiwan Inc. |
|
Taiwan |
|
100% |
|
Ultra-Tech Technologies Israel Ltd. |
|
Israel |
|
100% |
|
Ultratech Thailand Co. Ltd. |
|
Thailand |
|
100% |
|
Ultratech Korea Holdings LLC |
|
Korea |
|
100% |
|
(A) |
Includes direct and indirect ownership. |