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Income Taxes - Operating Loss Carryforwards (Details) - USD ($)
$ in Thousands
12 Months Ended
Dec. 31, 2019
Dec. 31, 2018
Operating loss carryforwards disclosures    
Net deferred tax asset $ 63,342 $ 67,787
Domestic    
Operating loss carryforwards disclosures    
Net operating loss carryforwards 270,900  
Net operating loss carryforwards, Indefinite carryforward period 6,400  
Domestic | Ultratech    
Operating loss carryforwards disclosures    
Net operating loss carryforwards 120,800  
State and local    
Operating loss carryforwards disclosures    
Net operating loss carryforwards 127,500  
Net deferred tax asset $ 8,100