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Income Taxes - Tax Credit Carryforwards (Details) - USD ($) $ in Millions	12 Months Ended
	Dec. 31, 2019	Dec. 31, 2018
Valuation allowance
Increase (decrease) in valuation allowance	$ 15.1
2017 Tax Act, Increase in deferred tax assets valuation allowance		$ 6.8
Domestic | Capital loss carryforward
Tax credit carryforward
Tax credit carry forwards	3.5
Domestic | Research and development tax credit carryforward
Tax credit carryforward
Tax credit carry forwards	29.8
Domestic | Research and development tax credit carryforward | Ultratech
Tax credit carryforward
Tax credit carry forwards	11.4
State and local
Tax credit carryforward
Tax credit carry forwards	28.4
Foreign tax
Tax credit carryforward
Tax credit carry forwards	$ 9.4

X

- Definition

The amount of the tax credit carryforward, before tax effects, available to reduce future taxable income under enacted tax laws.

+ References

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-Name Accounting Standards Codification
-Topic 740
-SubTopic 10
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- Definition

Amount of increase (decrease) in the valuation allowance for a specified deferred tax asset.

+ References

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-Name Accounting Standards Codification
-Topic 740
-SubTopic 10
-Section 45
-Paragraph 20
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Increase (decrease) in deferred tax assets valuation allowance pursuant to Tax Cuts and Jobs Act of 2017.

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