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Acquisitions and Dispositions - Consideration (Details) - Ultratech $ in Thousands, shares in Millions	May 26, 2017 USD ($) shares
Fair value of the consideration transferred
Cash consideration, net of cash acquired	$ 404,490
Equity consideration (7.2 million shares issued)	228,643
Replacement equity awards attributable to pre-acquisition service	228
Acquisition date fair value	633,361
Cash acquired	$ 229,400
Shares issued (in shares) | shares	7.2

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Number of shares of equity interests issued or issuable to acquire entity.

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