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Stock Plans - Ultratech Plan (Details) - Ultratech Plan - shares |  | 12 Months Ended |
--- | --- | --- | ---
May 17, 2017 | Dec. 31, 2017 | Dec. 31, 2020
Share-based compensation |  |  |
Shares that may be granted in future under Plan | 0 |  |
Restricted stock units |  |  |
Share-based compensation |  |  |
Awards converted (in shares) |  | 338,144 |
Vesting period |  | 50 months |
Number of awards outstanding (in shares) |  |  | 4,030

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- Definition Period over which grantee's right to exercise award under share-based payment arrangement is no longer contingent on satisfaction of service or performance condition, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents reported fact of one year, five months, and thirteen days. Includes, but is not limited to, combination of market, performance or service condition. + References Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef -Publisher FASB -Name Accounting Standards Codification -Topic 718 -SubTopic 10 -Section 50 -Paragraph 2 -Subparagraph (a)(1) -URI http://asc.fasb.org/extlink&oid=120381028&loc=d3e5070-113901 + Details
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- Definition Number of equity instruments other than options outstanding, including both vested and non-vested instruments. + References Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef -Publisher FASB -Name Accounting Standards Codification -Topic 718 -SubTopic 10 -Section 50 -Paragraph 2 -Subparagraph (c)(1)(ii) -URI http://asc.fasb.org/extlink&oid=120381028&loc=d3e5070-113901 Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef -Publisher FASB -Name Accounting Standards Codification -Topic 718 -SubTopic 10 -Section 50 -Paragraph 2 -Subparagraph (c)(1)(i) -URI http://asc.fasb.org/extlink&oid=120381028&loc=d3e5070-113901 + Details
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- Definition The number of awards on other than stock (or unit) option plans resulting from conversion of awards in connection with acquisition during the period. + References No definition available. + Details
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