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Stock Plans - Ultratech Plan (Details) - Ultratech Plan - shares		12 Months Ended
	May 17, 2017	Dec. 31, 2017	Dec. 31, 2020
Share-based compensation
Shares that may be granted in future under Plan	0
Restricted stock units
Share-based compensation
Awards converted (in shares)		338,144
Vesting period		50 months
Number of awards outstanding (in shares)			4,030

X

- Definition

Period over which grantee's right to exercise award under share-based payment arrangement is no longer contingent on satisfaction of service or performance condition, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents reported fact of one year, five months, and thirteen days. Includes, but is not limited to, combination of market, performance or service condition.

+ References

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-Publisher FASB
-Name Accounting Standards Codification
-Topic 718
-SubTopic 10
-Section 50
-Paragraph 2
-Subparagraph (a)(1)
-URI http://asc.fasb.org/extlink&oid=120381028&loc=d3e5070-113901

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- Definition

Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.

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- Definition

Number of equity instruments other than options outstanding, including both vested and non-vested instruments.

+ References

Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 718
-SubTopic 10
-Section 50
-Paragraph 2
-Subparagraph (c)(1)(ii)
-URI http://asc.fasb.org/extlink&oid=120381028&loc=d3e5070-113901

Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef
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-Topic 718
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X

- Definition

The number of awards on other than stock (or unit) option plans resulting from conversion of awards in connection with acquisition during the period.

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X

- Definition

The number shares that may be granted in the future under the Plan.

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