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Stock Plans - Recognized Share-based Compensation (Details) - USD ($)
$ in Thousands
12 Months Ended
Dec. 31, 2020
Dec. 31, 2019
Dec. 31, 2018
Recognized share-based compensation      
Share based Compensation $ 12,703 $ 15,270 $ 16,074
Total 12,703 15,270 16,074
Cost of sales      
Recognized share-based compensation      
Total 1,870 1,903 1,885
Research and development      
Recognized share-based compensation      
Total 2,900 3,340 3,611
Selling, general and administrative      
Recognized share-based compensation      
Total $ 7,933 9,630 9,417
Restructuring      
Recognized share-based compensation      
Share based Compensation   400 1,200
Total   $ 397 $ 1,161