# Filing Detail

Form 10-Q - Quarterly report [Sections 13 or 15(d)]:
SEC Accession No. 0001558370-21-005719
Filing Date
2021-05-04
Accepted
2021-05-04 16:32:20
Documents
80
Period of Report
2021-03-31

Document Format Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
1 | 10-Q | veco-20210331x10q.htm iXBRL | 10-Q | 1717379
2 | EX-10.1 | veco-20210331xex10d1.htm | EX-10.1 | 99806
3 | EX-10.2 | veco-20210331xex10d2.htm | EX-10.2 | 92199
4 | EX-31.1 | veco-20210331xex31d1.htm | EX-31.1 | 16969
5 | EX-31.2 | veco-20210331xex31d2.htm | EX-31.2 | 13144
6 | EX-32.1 | veco-20210331xex32d1.htm | EX-32.1 | 8883
7 | EX-32.2 | veco-20210331xex32d2.htm | EX-32.2 | 8820
8 | GRAPHIC | veco-20210331xex10d1001.jpg | GRAPHIC | 3365
9 | GRAPHIC | veco-20210331xex10d2001.jpg | GRAPHIC | 3131
| Complete submission text file | 0001558370-21-005719.txt |  | 8611410

Data Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
10 | EX-101.SCH | veco-20210331.xsd | EX-101.SCH | 49984
11 | EX-101.CAL | veco-20210331_cal.xml | EX-101.CAL | 73926
12 | EX-101.DEF | veco-20210331_def.xml | EX-101.DEF | 167193
13 | EX-101.LAB | veco-20210331_lab.xml | EX-101.LAB | 522648
14 | EX-101.PRE | veco-20210331_pre.xml | EX-101.PRE | 366084
15 | EXTRACTED XBRL INSTANCE DOCUMENT | veco-20210331x10q_htm.xml | XML | 1826790

Mailing Address TERMINAL DRIVE PLAINVIEW NY 11803
Business Address TERMINAL DRIVE PLAINVIEW NY 11803 516 677-0200
VEECO INSTRUMENTS INC (Filer) CIK: 0000103145 (see all company filings)

EIN.: 112989601 | State of Incorp.: DE | Fiscal Year End: 1231
Type: 10-Q | Act: 34 | File No.: 000-16244 | Film No.: 21889054
SIC: 3559 Special Industry Machinery, NEC