    <SEC-DOCUMENT>0001104659-21-037687-index.html : 20210317
    <SEC-HEADER>0001104659-21-037687.hdr.sgml : 20210317
    <ACCEPTANCE-DATETIME>20210317160712
    ACCESSION NUMBER:		0001104659-21-037687
    CONFORMED SUBMISSION TYPE:	DEFA14A
    PUBLIC DOCUMENT COUNT:		3
    FILED AS OF DATE:		20210317
    DATE AS OF CHANGE:		20210317

    FILER:

    	COMPANY DATA:
    		COMPANY CONFORMED NAME:			VEECO INSTRUMENTS INC
    		CENTRAL INDEX KEY:			0000103145
    		STANDARD INDUSTRIAL CLASSIFICATION:	SPECIAL INDUSTRY MACHINERY, NEC [3559]
    		IRS NUMBER:				112989601
    		STATE OF INCORPORATION:			DE
    		FISCAL YEAR END:			1231

    	FILING VALUES:
    		FORM TYPE:		DEFA14A
    		SEC ACT:		1934 Act
    		SEC FILE NUMBER:	000-16244
    		FILM NUMBER:		21750607

    	BUSINESS ADDRESS:
    		STREET 1:		TERMINAL DRIVE
    		CITY:			PLAINVIEW
    		STATE:			NY
    		ZIP:			11803
    		BUSINESS PHONE:		516 677-0200

    	MAIL ADDRESS:
    		STREET 1:		TERMINAL DRIVE
    		CITY:			PLAINVIEW
    		STATE:			NY
    		ZIP:			11803

    	FORMER COMPANY:
    		FORMER CONFORMED NAME:	VACUUM ELECTRONIC MANUFACTURING CORP
    		DATE OF NAME CHANGE:	19700408
    </SEC-HEADER>
    <DOCUMENT>
    <TYPE>DEFA14A
    <SEQUENCE>1
    <FILENAME>tm212521d2_defa14a.htm
    <DESCRIPTION>DEFA14A
    <TEXT>
    Document 1 - file: tm212521d2_defa14a.htm

    </DOCUMENT>
    <DOCUMENT>
    <TYPE>GRAPHIC
    <SEQUENCE>2
    <FILENAME>tm212521d2_defa14aimg001.jpg
    <DESCRIPTION>GRAPHIC
    <TEXT>
    Document 2 - file: tm212521d2_defa14aimg001.jpg

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    <DOCUMENT>
    <TYPE>GRAPHIC
    <SEQUENCE>3
    <FILENAME>tm212521d2_defa14aimg002.jpg
    <DESCRIPTION>GRAPHIC
    <TEXT>
    Document 3 - file: tm212521d2_defa14aimg002.jpg

    </DOCUMENT>
    </SEC-DOCUMENT>