<SEC-DOCUMENT>0001558370-22-001461.txt : 20220218
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<ACCEPTANCE-DATETIME>20220218165844
ACCESSION NUMBER:		0001558370-22-001461
CONFORMED SUBMISSION TYPE:	10-K
PUBLIC DOCUMENT COUNT:		127
CONFORMED PERIOD OF REPORT:	20211231
FILED AS OF DATE:		20220218
DATE AS OF CHANGE:		20220218

FILER:

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			VEECO INSTRUMENTS INC
		CENTRAL INDEX KEY:			0000103145
		STANDARD INDUSTRIAL CLASSIFICATION:	SPECIAL INDUSTRY MACHINERY, NEC [3559]
		IRS NUMBER:				112989601
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1231

	FILING VALUES:
		FORM TYPE:		10-K
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-16244
		FILM NUMBER:		22653634

	BUSINESS ADDRESS:	
		STREET 1:		TERMINAL DRIVE
		CITY:			PLAINVIEW
		STATE:			NY
		ZIP:			11803
		BUSINESS PHONE:		516 677-0200

	MAIL ADDRESS:	
		STREET 1:		TERMINAL DRIVE
		CITY:			PLAINVIEW
		STATE:			NY
		ZIP:			11803

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	VACUUM ELECTRONIC MANUFACTURING CORP
		DATE OF NAME CHANGE:	19700408
</SEC-HEADER>
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<TYPE>10-K
<SEQUENCE>1
<FILENAME>veco-20211231x10k.htm
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style="max-width:100%;padding-left:5.88%;padding-right:5.88%;position:relative;"><div style="margin-top:21.6pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;min-height:9.2pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-bottom:1pt;padding-top:1pt;border-bottom:1.0pt solid #000000;border-top:3.0pt solid #000000;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p><a id="_87a779af_17b9_4f56_8f25_c9fa416e6653"></a><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:4pt;font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><b style="font-size:13pt;font-weight:bold;">UNITED STATES</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><b style="font-size:13pt;font-weight:bold;">SECURITIES AND EXCHANGE COMMISSION</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Washington, D.C. 20549</b></p><div style="font-family:'Times New Roman','Times','serif';font-size:8.0pt;margin-bottom:2pt;margin-top:2pt;min-height:1.19em;position:relative;width:100%;"><div style="background-color:#000000;height:1pt;position:relative;top:0.6em;width:25.0%;border:none;margin:0 auto;"></div></div><p style="font-family:'Times New Roman','Times','serif';font-size:13pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">FORM&#160;</b><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" name="dei:DocumentType" id="Narr_8YqYwm97s0W0AOaNT82h0A"><b style="font-weight:bold;">10-K</b></ix:nonNumeric></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:4pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">(Mark One)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:4pt;visibility:hidden;">&#8203;</span></p><a id="_1cf6a3de_7495_4508_99a3_e8a1a051ed08"></a><a id="Tc_ozTJZthzeUiIRNj38wgkmA_1_1"></a><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:top;width:6%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:0pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:top;width:94%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:0pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:top;width:6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><ix:nonNumeric format="ixt-sec:boolballotbox" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" name="dei:DocumentAnnualReport" id="Tc_HIa8QEVEskOYLK_WCrxS4g_1_0"><b style="font-family:'Segoe UI 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name="dei:CurrentFiscalYearEndDate" id="Narr_QNShYetDXkKdpZwPY7oSxg"><b style="font-size:8pt;font-weight:bold;">December 31</b></ix:nonNumeric><b style="font-size:8pt;font-weight:bold;">, 2021</b></ix:nonNumeric></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:4pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">OR</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:4pt;visibility:hidden;">&#8203;</span></p><a id="_515478d6_fbb1_4388_b243_cb96a85e2831"></a><a id="Tc_0GT4bg9K-0y-qhLxKEGMcA_1_1"></a><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:top;width:6%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:0pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:top;width:94%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:0pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:top;width:6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><ix:nonNumeric format="ixt-sec:boolballotbox" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" name="dei:DocumentTransitionReport" 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style="font-family:'Times New Roman','Times','serif';font-size:8.0pt;margin-bottom:2pt;margin-top:2pt;min-height:1.19em;position:relative;width:100%;"><div style="background-color:#000000;height:1pt;position:relative;top:0.6em;width:25.0%;border:none;margin:0 auto;"></div></div><p style="font-family:'Times New Roman','Times','serif';font-size:13pt;text-align:center;margin:0pt;"><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" name="dei:EntityRegistrantName" id="Narr_wRn5olWCsk6HCWMbjevlQg"><b style="font-weight:bold;">VEECO INSTRUMENTS&#160;INC</b></ix:nonNumeric><b style="font-weight:bold;">.</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;">(Exact Name of Registrant as Specified in Its Charter)</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:4pt;visibility:hidden;">&#8203;</span></p><a 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style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><ix:nonNumeric format="ixt-sec:stateprovnameen" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" name="dei:EntityIncorporationStateCountryCode" id="Tc_PDsN_4fWbU-58WD7yBWjnA_1_0"><b style="font-size:8pt;font-weight:bold;">Delaware</b></ix:nonNumeric></p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" name="dei:EntityTaxIdentificationNumber" id="Tc_xaV5B5MFVEGgr_JhgMctGQ_1_1"><b style="font-size:8pt;font-weight:bold;">11-2989601</b></ix:nonNumeric></p></td></tr><tr><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;">(State or Other Jurisdiction of Incorporation or Organization)</p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;">(I.R.S. 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style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p><a id="_198c47f4_b42f_4ed4_8e3f_a346d6ab431d"></a><a id="Tc_AO6kjxBLTUOCehey0ysabw_0_0"></a><a id="Tc_m_bThpX2JEqHRHoHucbhaw_0_1"></a><a id="Tc_-HlnSn381k-t80bL8eR5WQ_0_2"></a><a id="Tc_K8JTsetHYUy2YHFAL0bHFA_1_0"></a><a id="Tc_XRjIstIR8EKN3O05X9LK4Q_1_2"></a><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:84.92%;"><tr><td style="vertical-align:top;width:35.83%;border-bottom:1px solid #000000;border-left:1px solid #000000;border-right:1px solid #000000;border-top:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Title of each class</b></p></td><td style="vertical-align:bottom;width:28.06%;border-bottom:1px solid #000000;border-left:1px solid #000000;border-right:1px solid #000000;border-top:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Trading Symbol(s)</b></p></td><td style="vertical-align:top;width:36.09%;border-bottom:1px solid #000000;border-left:1px solid #000000;border-right:1px solid #000000;border-top:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Name of each exchange on which registered</b></p></td></tr><tr><td style="vertical-align:top;width:35.83%;border-bottom:1px solid #000000;border-left:1px solid #000000;border-right:1px solid #000000;border-top:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" name="dei:Security12bTitle" id="Narr_jSOMTPuKY0W_eQp8_z989w"><b style="font-size:8pt;font-weight:bold;">Common Stock</b></ix:nonNumeric><b style="font-size:8pt;font-weight:bold;">, par value $0.01 per share</b></p></td><td style="vertical-align:bottom;width:28.06%;border-bottom:1px solid #000000;border-left:1px solid #000000;border-right:1px solid #000000;border-top:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" name="dei:TradingSymbol" id="Tc_6J7QOhWzYEeKyPncEr7jPw_1_1"><b style="font-size:8pt;font-weight:bold;">VECO</b></ix:nonNumeric></p></td><td style="vertical-align:top;width:36.09%;border-bottom:1px solid #000000;border-left:1px solid #000000;border-right:1px solid #000000;border-top:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><b style="font-size:8pt;font-weight:bold;">The </b><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" name="dei:SecurityExchangeName" id="Narr_bS5ca8VNZUa3tC-xkdfkLg"><b style="font-size:8pt;font-weight:bold;">NASDAQ</b></ix:nonNumeric><b style="font-size:8pt;font-weight:bold;"> Global Select Market</b></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:4pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;">Securities registered pursuant to Section&#160;12(g)&#160;of the Act: <b style="font-weight:bold;">None</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:4pt;font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-indent:18pt;margin:0pt;"><span style="font-size:8pt;white-space:pre-wrap;">Indicate by check mark if the registrant is a well-known seasoned issuer, as defined in Rule 405 of the Securities Act.  </span><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" name="dei:EntityWellKnownSeasonedIssuer" id="Narr_O8UiXRzHSkuLvzWDsXGCfg"><span style="font-size:8pt;">Yes</span></ix:nonNumeric><span style="font-size:8pt;"> </span><span style="font-family:'Segoe UI Symbol';font-size:8pt;">&#9746;</span><span style="font-size:8pt;"> No </span><span style="font-family:'Segoe UI Symbol';font-size:8pt;">&#9744;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-indent:18pt;margin:0pt;"><span style="font-size:4pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-indent:18pt;margin:0pt;"><span style="font-size:8pt;white-space:pre-wrap;">Indicate by check mark if the registrant is not required to file reports pursuant to Section 13 or Section 15(d) of the Act.  Yes </span><span style="font-family:'Segoe UI Symbol';font-size:8pt;">&#9744;</span><span style="font-size:8pt;white-space:pre-wrap;">  </span><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" name="dei:EntityVoluntaryFilers" id="Narr_gal2dp7PPU6vDeF3HQt5PA"><span style="font-size:8pt;">No</span></ix:nonNumeric><span style="font-size:8pt;"> </span><span style="font-family:'Segoe UI Symbol';font-size:8pt;">&#9746;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-indent:18pt;margin:0pt;"><span style="font-size:4pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-indent:18pt;margin:0pt;"><span style="font-size:8pt;">Indicate by check mark whether the registrant (1) has filed all reports required to be filed by Section 13 or 15(d) of the Securities Exchange Act of 1934 during the preceding 12 months (or for such shorter period that the registrant was required to file such reports), and (2) has been subject to such filing requirements for the past 90 days. </span><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" name="dei:EntityCurrentReportingStatus" id="Narr_ABZTdfCeN0i3cOYVOFK3IQ"><span style="font-size:8pt;">Yes</span></ix:nonNumeric><span style="font-size:8pt;"> </span><span style="font-family:'Segoe UI Symbol';font-size:8pt;">&#9746;</span><span style="font-size:8pt;white-space:pre-wrap;">  No </span><span style="font-family:'Segoe UI Symbol';font-size:8pt;">&#9744;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-indent:18pt;margin:0pt;"><span style="font-size:4pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-indent:18pt;margin:0pt;"><span style="font-size:8pt;">Indicate by check mark whether the registrant has submitted electronically every Interactive Data File required to be submitted pursuant to Rule 405 of Regulation S-T (&#167;232.405 of this chapter) during the preceding 12 months (or for such shorter period that the registrant was required to submit such files). </span><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" name="dei:EntityInteractiveDataCurrent" id="Narr_83d_thgfkUycOlKuL9_vKA"><span style="font-size:8pt;">Yes</span></ix:nonNumeric><span style="font-size:8pt;"> </span><span style="font-family:'Segoe UI Symbol';font-size:8pt;">&#9746;</span><span style="font-size:8pt;white-space:pre-wrap;">  No </span><span style="font-family:'Segoe UI Symbol';font-size:8pt;">&#9744;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-indent:18pt;margin:0pt;"><span style="font-size:4pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-indent:18pt;margin:0pt;"><span style="font-size:4pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-indent:18pt;margin:0pt;">Indicate by check mark whether the Registrant is a large accelerated filer, an accelerated filer, a non-accelerated filer, smaller reporting company, or an emerging growth company. See the definitions of &#8220;large accelerated filer,&#8221; &#8220;accelerated filer,&#8221; &#8220;smaller reporting company,&#8221; and &#8220;emerging growth company&#8221; in Rule 12b-2 of the Exchange Act.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:4pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:80%;"><tr style="height:1pt;"><td style="vertical-align:top;width:57.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:10.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:14.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:17.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:57.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><ix:nonNumeric format="ixt-sec:entityfilercategoryen" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" name="dei:EntityFilerCategory" id="Narr_a5Umm7LQCUuLTPQrygMyQw"><span style="font-size:8pt;">Large accelerated filer</span></ix:nonNumeric><span style="font-size:8pt;">&#160;</span><span style="font-family:'Segoe UI Symbol';font-size:7pt;letter-spacing:-0.1pt;">&#9746;</span></p></td><td style="vertical-align:top;width:10.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:top;width:31.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Accelerated filer <span style="font-family:'Segoe UI Symbol';">&#9744;</span></p></td></tr><tr><td style="vertical-align:top;width:57.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;padding-left:10pt;text-indent:-10pt;margin:0pt;">Non-accelerated filer&#160;<span style="font-family:'Segoe UI Symbol';">&#9744;</span> </p></td><td style="vertical-align:top;width:10.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:10pt;text-indent:-10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:top;width:31.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;">Smaller reporting company </span><ix:nonNumeric format="ixt-sec:boolballotbox" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" name="dei:EntitySmallBusiness" id="Narr_ctt_3i_2c0uM6IJxFw5P7w"><span style="font-family:'Segoe UI Symbol';font-size:8pt;">&#9744;</span></ix:nonNumeric></p></td></tr><tr><td style="vertical-align:top;width:57.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:10pt;text-indent:-10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:10.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:10pt;text-indent:-10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:top;width:31.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;">Emerging growth company </span><ix:nonNumeric format="ixt-sec:boolballotbox" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" name="dei:EntityEmergingGrowthCompany" id="Narr_fe6qrclOy02U81r6jHrHqA"><span style="font-family:'Segoe UI Symbol';font-size:8pt;">&#9744;</span></ix:nonNumeric></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:4pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-indent:18pt;margin:0pt;">If an emerging growth company, indicate by check mark if the registrant has elected not to use the extended transition period for complying with any new or revised financial accounting standards provided pursuant to Section 13(a) of the Exchange Act. <span style="font-family:'Segoe UI Symbol';">&#9744;</span> </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-indent:18pt;margin:0pt;"><span style="font-size:4pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-indent:18pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-indent:18pt;margin:0pt;"><span style="font-size:8pt;">Indicate by check mark whether the Registrant is a shell company (as defined in Rule&#160;12b-2 of the Act). </span><ix:nonNumeric format="ixt-sec:boolballotbox" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" name="dei:EntityShellCompany" id="Narr__aOy99fZTUK-ssilRjLGbQ"><span style="font-family:'Segoe UI Symbol';font-size:8pt;">&#9744;</span></ix:nonNumeric><span style="font-size:8pt;"> Yes </span><span style="font-family:'Segoe UI Symbol';font-size:8pt;">&#9746;</span><span style="font-size:8pt;"> No</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:justify;text-indent:18pt;margin:4pt 0pt 0pt 0pt;"><span style="font-size:8pt;">Indicate by check mark whether the registrant has filed a report on and attestation to its management&#8217;s assessment of the effectiveness of its internal control over financial reporting under Section 404(b) of the Sarbanes-Oxley Act (15 U.S.C. 7262(b)) by the registered public accounting firm that prepared or issued its audit report.&#160;&#160;</span><ix:nonNumeric format="ixt-sec:boolballotbox" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" name="dei:IcfrAuditorAttestationFlag" id="Narr_orzEWycM9kuqdIzVB3VP9A"><span style="font-family:'Segoe UI Symbol';font-size:8pt;">&#9746;</span></ix:nonNumeric></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:4pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-indent:18pt;margin:0pt;">The aggregate market value of the common stock held by non-affiliates of the registrant at July 2, 2021 (the last business day of the registrant&#8217;s most recently completed second quarter) was $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" format="ixt:numdotdecimal" scale="0" contextRef="As_Of_7_2_2021_keJk4uLKKU2O6leWfC1wrA" decimals="0" name="dei:EntityPublicFloat" id="Narr__Hy0tj_kDk-4RhTmGbxn7Q">1,150,234,164</ix:nonFraction> based on the closing price of $23.28 on the NASDAQ Global Select Market on that date.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-indent:18pt;margin:0pt;"><span style="font-size:4pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-indent:18pt;margin:0pt;">As of February 11, 2022, there were <ix:nonFraction unitRef="Unit_Standard_shares_CQLzaUKOXkqvj8CNr9pzfg" format="ixt:numdotdecimal" scale="0" contextRef="As_Of_2_11_2022_7BiboVpHpUGAy9tKysIOeg" decimals="INF" name="dei:EntityCommonStockSharesOutstanding" id="Narr_deNAWnSMz0SVPKRPcm7NUA">50,653,403</ix:nonFraction> shares of the registrant&#8217;s common stock, par value $0.01 per share, outstanding.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:4pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">DOCUMENTS INCORPORATED BY REFERENCE</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:4pt;font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Certain portions of the definitive Proxy Statement to be used in connection with the Registrant&#8217;s 2022 Annual Meeting of Stockholders are incorporated by reference into Part III of this Form 10-K.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:4pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;line-height:1pt;padding-bottom:1pt;padding-top:1pt;border-bottom:3.0pt solid #000000;border-top:1.0pt solid #000000;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:2pt;font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="display:none;font-size:12pt;line-height:0pt;text-align:center;margin:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:0pt;visibility:hidden;">&#8203;</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:88.24%;border:0;margin:30pt 5.88% 30pt 5.88%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><a id="_adc5a1b6_47bc_42e6_8241_3e053816ab62"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">VEECO INSTRUMENTS INC.</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p><a id="TOC"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">INDEX</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:0pt;width:100%;"></div></div></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"></div></div></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt;"><a style="font-size:10pt;" href="#PARTI_328685"><span style="font-style:normal;font-weight:normal;">PART&#160;I</span></a></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;">4</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:10pt;text-indent:-10pt;margin:0pt 0pt 0pt 10pt;"><a style="font-size:10pt;" href="#Item1Business_998801"><span style="font-style:normal;font-weight:normal;">Item 1. Business</span></a></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;">4</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:10pt;text-indent:-10pt;margin:0pt 0pt 0pt 10pt;"><span style="font-size:8pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:10pt;text-indent:-10pt;margin:0pt 0pt 0pt 10pt;"><a style="font-size:10pt;" href="#Item1A_RiskFactors"><span style="font-style:normal;font-weight:normal;">Item 1A. Risk Factors</span></a></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;">13</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:10pt;text-indent:-10pt;margin:0pt 0pt 0pt 10pt;"><span style="font-size:8pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:10pt;text-indent:-10pt;margin:0pt 0pt 0pt 10pt;"><a style="font-size:10pt;" href="#Item1BUnresolvedStaffComments_176632"><span style="font-style:normal;font-weight:normal;">Item 1B. Unresolved Staff Comments</span></a></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;">27</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:10pt;text-indent:-10pt;margin:0pt 0pt 0pt 10pt;"><span style="font-size:8pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:10pt;text-indent:-10pt;margin:0pt 0pt 0pt 10pt;"><a style="font-size:10pt;" href="#Item2Properties_244056"><span style="font-style:normal;font-weight:normal;">Item 2. Properties</span></a></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;">28</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:10pt;text-indent:-10pt;margin:0pt 0pt 0pt 10pt;"><span style="font-size:8pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:10pt;text-indent:-10pt;margin:0pt 0pt 0pt 10pt;"><a style="font-size:10pt;" href="#Item3LegalProceedings_521596"><span style="font-style:normal;font-weight:normal;">Item 3. Legal Proceedings</span></a></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;">28</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:10pt;text-indent:-10pt;margin:0pt 0pt 0pt 10pt;"><span style="font-size:8pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:10pt;text-indent:-10pt;margin:0pt 0pt 0pt 10pt;"><a style="font-size:10pt;" href="#Item4MineSafetyDisclosures_174326"><span style="font-style:normal;font-weight:normal;">Item 4. Mine Safety Disclosures</span></a></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;">28</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><a style="font-size:10pt;" href="#PARTII_53402"><span style="font-style:normal;font-weight:normal;">PART&#160;II</span></a></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;">29</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:10pt;text-indent:-10pt;margin:0pt 0pt 0pt 10pt;"><a style="font-size:10pt;" href="#Item5MarketforRegistrantsCommonEquity_72"><span style="font-style:normal;font-weight:normal;">Item 5. Market for Registrant&#8217;s Common Equity, Related Stockholder Matters and Issuer Purchases of Equity Securities</span></a></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;">29</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:10pt;text-indent:-10pt;margin:0pt 0pt 0pt 10pt;"><span style="font-size:8pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:10pt;text-indent:-10pt;margin:0pt 0pt 0pt 10pt;"><a style="font-size:10pt;" href="#StockPerformanceGraph_401970"><span style="font-style:normal;font-weight:normal;">Stock Performance Graph</span></a></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;">30</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:10pt;text-indent:-10pt;margin:0pt 0pt 0pt 10pt;"><span style="font-size:8pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:10pt;text-indent:-10pt;margin:0pt 0pt 0pt 10pt;"><a href="#Item6SelectedFinancialData_237384"><span style="font-style:normal;font-weight:normal;">Item 6. [Reserved</span></a>]</p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;">30</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:10pt;text-indent:-10pt;margin:0pt 0pt 0pt 10pt;"><span style="font-size:8pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:10pt;text-indent:-10pt;margin:0pt 0pt 0pt 10pt;"><a style="font-size:10pt;" href="#Item7ManagementsDiscussionandAnalysis_31"><span style="font-style:normal;font-weight:normal;">Item 7. Management&#8217;s Discussion and Analysis of Financial Condition and Results of Operations</span></a></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;">31</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:10pt;text-indent:-10pt;margin:0pt 0pt 0pt 10pt;"><span style="font-size:8pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:10pt;text-indent:-10pt;margin:0pt 0pt 0pt 10pt;"><a style="font-size:10pt;" href="#Item7AQuantitativeandQualitative_966516"><span style="font-style:normal;font-weight:normal;">Item 7A. Quantitative and Qualitative Disclosures about Market Risk</span></a></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;">41</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:10pt;text-indent:-10pt;margin:0pt 0pt 0pt 10pt;"><span style="font-size:8pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:10pt;text-indent:-10pt;margin:0pt 0pt 0pt 10pt;"><a style="font-size:10pt;" href="#Item8FinancialStatements_672804"><span style="font-style:normal;font-weight:normal;">Item 8. Financial Statements and Supplementary Data</span></a></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;">42</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:10pt;text-indent:-10pt;margin:0pt 0pt 0pt 10pt;"><span style="font-size:8pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:10pt;text-indent:-10pt;margin:0pt 0pt 0pt 10pt;"><a style="font-size:10pt;" href="#Item9ChangesinandDisagreements_657227"><span style="font-style:normal;font-weight:normal;">Item 9. Changes in and Disagreements with Accountants on Accounting and Financial Disclosure</span></a></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;">42</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:10pt;text-indent:-10pt;margin:0pt 0pt 0pt 10pt;"><span style="font-size:8pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:10pt;text-indent:-10pt;margin:0pt 0pt 0pt 10pt;"><a style="font-size:10pt;" href="#Item9AControlsandProcedures_188790"><span style="font-style:normal;font-weight:normal;">Item 9A. Controls and Procedures</span></a></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;">42</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:10pt;text-indent:-10pt;margin:0pt 0pt 0pt 10pt;"><span style="font-size:8pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:10pt;text-indent:-10pt;margin:0pt 0pt 0pt 10pt;"><a style="font-size:10pt;" href="#Item9BOtherInformation_74067"><span style="font-style:normal;font-weight:normal;">Item 9B. Other Information</span></a></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;">45</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><a style="font-size:10pt;" href="#PARTIII_80757"><span style="font-style:normal;font-weight:normal;">PART&#160;III</span></a></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;">45</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:10pt;text-indent:-10pt;margin:0pt 0pt 0pt 10pt;"><a style="font-size:10pt;" href="#Item10DirectorsExecutiveOfficers_819063"><span style="font-style:normal;font-weight:normal;">Item 10. Directors, Executive Officers and Corporate Governance</span></a></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;">45</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:10pt;text-indent:-10pt;margin:0pt 0pt 0pt 10pt;"><span style="font-size:8pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:10pt;text-indent:-10pt;margin:0pt 0pt 0pt 10pt;"><a style="font-size:10pt;" href="#Item11ExecutiveCompensation_872731"><span style="font-style:normal;font-weight:normal;">Item 11. Executive Compensation</span></a></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;">45</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:10pt;text-indent:-10pt;margin:0pt 0pt 0pt 10pt;"><span style="font-size:8pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:10pt;text-indent:-10pt;margin:0pt 0pt 0pt 10pt;"><a style="font-size:10pt;" href="#Item12SecurityOwnershipofCertain_4330"><span style="font-style:normal;font-weight:normal;">Item 12. Security Ownership of Certain Beneficial Owners and Management and Related Stockholder Matters</span></a></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;">45</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:10pt;text-indent:-10pt;margin:0pt 0pt 0pt 10pt;"><span style="font-size:8pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:10pt;text-indent:-10pt;margin:0pt 0pt 0pt 10pt;"><a style="font-size:10pt;" href="#Item13CertainRelationships_454398"><span style="font-style:normal;font-weight:normal;">Item 13. Certain Relationships and Related Transactions, and Director Independence</span></a></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;">45</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:10pt;text-indent:-10pt;margin:0pt 0pt 0pt 10pt;"><span style="font-size:8pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:10pt;text-indent:-10pt;margin:0pt 0pt 0pt 10pt;"><a style="font-size:10pt;" href="#Item14PrincipalAccounting_254066"><span style="font-style:normal;font-weight:normal;">Item 14. Principal Accounting Fees and Services</span></a></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;">45</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><a style="font-size:10pt;" href="#PARTIV_984349"><span style="font-style:normal;font-weight:normal;">PART&#160;IV</span></a></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;">46</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:10pt;text-indent:-10pt;margin:0pt 0pt 0pt 10pt;"><a style="font-size:10pt;" href="#Item15ExhibitsFinancialStatement_74184"><span style="font-style:normal;font-weight:normal;">Item 15. Exhibits, Financial Statement Schedules</span></a></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;">46</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><a style="font-size:10pt;" href="#SIGNATURES_944298"><span style="font-style:normal;font-weight:normal;">SIGNATURES</span></a></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;">50</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">2</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><a id="_dc4af9d3_3089_460a_87a2_ae4e5bcc32ce"></a><a id="_Hlk93649409"></a><a id="_Hlk63853809"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">This Annual Report on Form&#160;10-K (&#8220;Form&#160;10-K&#8221;) contains certain forward-looking statements within the meaning of the safe harbor provisions of the U.S. Private Securities Litigation Reform Act of 1995, as amended, relating to Veeco Instruments Inc. (together with its consolidated subsidiaries, &#8220;Veeco,&#8221; the &#8220;Company,&#8221; &#8220;Registrant,&#8221; &#8220;we,&#8221; &#8220;our,&#8221; or &#8220;us,&#8221; unless the context indicates otherwise) that are based on management&#8217;s expectations, estimates, projections, and assumptions. When used in this Form&#160;10-K, words such as &#8220;expects,&#8221; &#8220;anticipates,&#8221; &#8220;plans,&#8221; &#8220;believes,&#8221; &#8220;scheduled,&#8221; &#8220;estimates,&#8221; and variations of these words and similar expressions are intended to identify forward-looking statements. Discussions containing such forward-looking statements may be found in Part&#160;I,&#160;Items 1 and 3, Part&#160;II,&#160;Items 7 and 7A hereof, as well as within this Form&#160;10-K generally. Forward-looking statements in this discussion include, but are not limited to, those regarding anticipated growth and trends in our businesses and markets, industry outlooks and demand drivers, our investment and growth strategies, our development of new products and technologies, our business outlook for the current and future periods, the impact of the COVID-19 pandemic, our ongoing transformation initiative and the effects thereof on our operations and financial results, and other statements that are not historical facts. These statements and their underlying assumptions are subject to risks and uncertainties and are not guarantees of future performance. Factors that could cause actual results to differ materially from those expressed or implied by such statements include, without limitation: </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:4pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">the level of demand for our products; </span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 0pt 36pt;"><span style="font-size:10pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">industry and global economic conditions, including without limitation ongoing inflationary pressures and supply chain challenges;</span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> <span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">the effects of regional or global health epidemics, including the effects of the COVID-19 pandemic on the Company&#8217;s operations and on those of our customers and suppliers; </span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">global trade issues, including the ongoing trade disputes between the U.S. and China, and changes in trade and export license policies; </span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">our dependency on third-party suppliers and outsourcing partners; </span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">the timing of customer orders; </span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 0pt 36pt;"><span style="font-size:10pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">our ability to develop, deliver and support new products and technologies; </span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 0pt 36pt;"><span style="font-size:10pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">data security incidents, cyberattacks, and other disruptions in our information technology systems and/or those of our third party vendors and other partners;</span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">our ability to expand our current markets, increase market share and develop new markets; </span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">the concentrated nature of our customer base; </span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">our ability to obtain and protect intellectual property rights in key technologies; </span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">our ability to achieve the objectives of operational and strategic initiatives and attract, motivate and retain key employees; </span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">the variability of results among products and end-markets, and our ability to accurately forecast future results, market conditions, and customer requirements; </span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">the impact of our indebtedness, including our convertible senior notes and our capped call transactions; and</span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">other risks and uncertainties described in our SEC filings on Forms 10-K, 10-Q, and 8-K, including those included in Item 1A, &quot;Risk Factors&quot; of this Form 10-K, and from time-to-time in our other SEC reports. </span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">3</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">All forward-looking statements speak only to management&#8217;s expectations, estimates, projections and assumptions as of the date of this filing or, in the case of any document referenced herein or incorporated by reference, the date of that document. The Company does not undertake any obligation to update or publicly revise any forward-looking statements to reflect events, circumstances or changes in expectations after the date of this filing. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p><a id="PARTI_328685"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">PART&#160;I</b></p><a id="_Hlk31378240"></a><a id="Item1Business_998801"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Item 1. Business</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Business Description and Overview</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Headquartered in Plainview, New York, we were organized as a Delaware corporation in 1989. We are a manufacturer of advanced semiconductor process equipment that solves an array of challenging materials engineering problems for our customers. Our comprehensive collection of ion beam, laser annealing, metal organic chemical vapor deposition (&#8220;MOCVD&#8221;), advanced packaging lithography, single wafer wet processing, molecular beam epitaxy (&#8220;MBE&#8221;), and atomic layer deposition (&#8220;ALD&#8221;) technologies play an integral role in the fabrication of key devices that are enabling the 4th industrial revolution of all things connected. Such devices include leading advanced node application processors for mobile devices, thin film magnetic heads for hard disk drives in data storage, photonics devices for 3D sensing, advanced displays and high-speed data communications, and radio frequency (&#8220;RF&#8221;) filters and power amplifiers for fifth generation (&#8220;5G&#8221;) networks and mobile electronics. In close partnership with our customers, we combine decades of applications and materials know-how with leading-edge systems engineering to deliver high-volume manufacturing solutions with competitive cost of ownership. Serving a global and highly interconnected customer base, we have comprehensive sales and service operations across the Asia-Pacific, Europe, and North America regions to ensure real-time close collaboration and responsiveness.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Our 2022 priorities are:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">Protect: Safety is one of Veeco&#8217;s core values. We have taken many steps to protect our employees, customers, suppliers, and stakeholders, and operate safely and successfully throughout the COVID-19 pandemic, resulting in the overall resiliency of our business. We have been able to serve our customers without pause and expect to continue to do so while executing on our strategic growth plans. We understand that the culture of the Company can have a direct impact on our performance. We made significant improvements to our culture as measured by a culture survey in 2021 compared to a baseline measured in 2019, and we remain committed to working with employees to continue to strengthen our culture. With safety top of mind and an emphasis on improving our culture, we enter 2022 with a healthy backlog and an improved balance sheet; </span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 36pt;"> <span style="margin-left:0pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">Execute: We believe that our success depends on our ability to successfully execute in challenging environments, recognizing that our customers have high expectations. We are focused on the execution of multiple initiatives, including on-time deliveries, quality, and our on-going customer evaluation programs. We achieved significant revenue growth in 2021 despite a difficult supply chain environment. The Veeco United team worked through material shortages, lead time increases, and labor shortages in our factories as well as those of our suppliers. We are focused on continued execution throughout our entire supply chain in order to meet customer demand. Additionally, we continue to focus on improving the quality of our products and services, in line with our core value of our commitment to never stop improving. Finally, throughout 2021, we increased our emphasis on placing strategic evaluation systems with customers in the semiconductor and compound semiconductor markets, consistent with our growth plans. These systems are provided to customers after significant time spent demonstrating their capabilities in our factory, and represent one of the final stages in our customers&#8217; selection process. We invested in inventory, R&amp;D, and service capability to support these evaluation systems. We are focused on successful outcomes for these evaluations and in continuing the elevated level of evaluation system activity with existing and potential customers;</span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">Innovate and Invest: We are focused on completing the transition of our San Jose operations to our newly leased facility. This facility is designed for the manufacture of our semiconductor market products, and will double our manufacturing capacity compared to the existing facility. We are also focused on continuing to invest in our service capabilities. As we grow our business, and as our customers add capacity to their </span></td></tr></table></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">4</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;"></td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">manufacturing operations, additional investments in service engineers and inventory are required. Finally, we will continue our efforts in product innovation. We have exciting new solutions in our semiconductor and compound semiconductor product development pipeline, which we believe will solve our customers&#8217; difficult materials challenges and enable sustainable growth in the long term; and</span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 0pt 36pt;"><span style="font-size:10pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;white-space:pre-wrap;">Growth and Profitability: We view the semiconductor and compound semiconductor markets as significant growth opportunities in the near-term and long-term. We expect these markets to be the primary drivers of growth in 2022, driven by strong traction in laser annealing, advanced packaging lithography, EUV mask blank and MOCVD systems. We are focused on executing our backlog and winning additional orders to drive meaningful growth. While we expect expenses to increase as we continue to invest for growth, we are also focused on improving profitability through responsible management of our cost structure, with an emphasis on increasing gross margins.  </span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Markets</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Our products are purchased by customers in the following four end-markets: 1) Semiconductor; 2) Compound Semiconductor; 3) Data Storage; and 4) Scientific&#160;&amp; Other.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Our array of process equipment systems are used in the production of a broad range of microelectronic components, including logic, dynamic random-access memory (&#8220;DRAM&#8221;), photonics devices (including laser diodes and micro-LEDs), power electronics, RF filters and amplifiers, magnetic heads for hard disk drives, and other semiconductor devices. Many of our systems are used to deposit advanced materials critical to the operation of the device and some of our systems are used in cleaning and surface preparation as well as the precise removal of critical materials. We are also a leader in systems used in the advanced packaging process flow of microelectronic components such as flip chip, fan-out wafer level packaging (&#8220;FOWLP&#8221;), and other wafer level packaging approaches, such as heterogeneous integration, used in the modern integration of diverse semiconductor products, especially in consumer electronics. In general, our customers purchase our systems to both produce current-generation devices in volume and to develop next-generation products which deliver more efficient, cost-effective, and advanced technological solutions. We operate in several highly cyclical business environments, and our customers&#8217; buying patterns are dependent upon industry trends and buying patterns for consumer electronics. As our products are sold into multiple markets, the following table describes these markets and the applicable Veeco technologies.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><div style="margin-left:0pt;"><a id="_Hlk95405229"></a><a id="_Hlk62467166"></a><table style="border-collapse:collapse;font-size:16pt;height:max-content;width:100%;"><tr style="height:1pt;"><td style="vertical-align:top;width:16.08%;background:#ffffff;margin:0pt;padding:0pt 5.4pt 0pt 5.4pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:0pt;width:100%;"></div></div></td><td style="vertical-align:top;width:57.21%;background:#ffffff;margin:0pt;padding:0pt 5.4pt 0pt 5.4pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:0pt;width:100%;"></div></div></td><td style="vertical-align:top;width:26.7%;background:#ffffff;margin:0pt;padding:0pt 5.4pt 0pt 5.4pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:0pt;width:100%;"></div></div></td></tr><tr style="height:34.6pt;"><td style="vertical-align:top;width:16.08%;background:#dae3f3;border-bottom:1px solid #8faadc;border-right:1px solid #8faadc;border-top:1px solid #8faadc;margin:0pt;padding:0pt 5.27pt 0pt 5.4pt;"><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:10pt;font-weight:bold;text-align:center;margin:0pt;">Markets</p></td><td style="vertical-align:top;width:57.21%;background:#dae3f3;border-bottom:1px solid #8faadc;border-left:1px solid #8faadc;border-right:1px solid #8faadc;border-top:1px solid #8faadc;margin:0pt;padding:0pt 5.27pt 0pt 5.27pt;"><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Description</b></p></td><td style="vertical-align:top;width:26.7%;background:#dae3f3;border-bottom:1px solid #8faadc;border-left:1px solid #8faadc;border-top:1px solid #8faadc;margin:0pt;padding:0pt 5.4pt 0pt 5.27pt;"><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Applicable Veeco Technologies</b></p></td></tr><tr><td style="vertical-align:middle;width:16.08%;border-bottom:1px solid #8faadc;border-right:1px solid #8faadc;border-top:1px solid #8faadc;margin:0pt;padding:0pt 5.27pt 0pt 5.4pt;"><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:10pt;font-weight:bold;margin:0pt;">Semiconductor</p></td><td style="vertical-align:top;width:57.21%;border-bottom:1px solid #8faadc;border-left:1px solid #8faadc;border-right:1px solid #8faadc;border-top:1px solid #8faadc;margin:0pt;padding:0pt 5.27pt 0pt 5.27pt;"><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:10pt;margin:0pt;"><span style="font-family:'Times New Roman','Times','serif';white-space:pre-wrap;">The Semiconductor market refers to early process steps in logic and memory applications where silicon wafers are processed. There are many different process steps in forming patterned wafers, such as deposition, etching, masking, and doping, where the microchips are created but remain on the silicon wafer. As device architectures continue to shrink with advanced nodes, more precise process control is paramount to achieving high yields and competitive cost. One such process step is called Laser Annealing, which uses a very precise method to activate dopants, reduce contact resistance and modify material grain structure. The Veeco laser annealing technology enables our customers to have a lower thermal budget by annealing at higher temperatures over a shorter period of time. This market also includes mask blank production for extreme ultraviolet (&#8220;EUV&#8221;) lithography with Veeco&#8217;s Ion Beam Deposition technology.  </span></p><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:10pt;margin:0pt;"><span style="font-family:'Times New Roman','Times','serif';">Finally, this market also includes Advanced Packaging which refers to a portfolio of wafer-level assembly technologies that enable improved performance of electronic products, such as </span></p></td><td style="vertical-align:top;width:26.7%;border-bottom:1px solid #8faadc;border-left:1px solid #8faadc;border-top:1px solid #8faadc;margin:0pt;padding:0pt 5.4pt 0pt 5.27pt;"><div style="border-collapse:collapse;display:table;font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><div style="display:table-row;"><div style="width:18pt;display:table-cell;"></div><div style="display:table-cell;font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</div><div style="display:table-cell;padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">Laser Annealing</span></div></div></div><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin:0pt 0pt 0pt 18pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p><div style="border-collapse:collapse;display:table;font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><div style="display:table-row;"><div style="width:18pt;display:table-cell;"></div><div style="display:table-cell;font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</div><div style="display:table-cell;padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">Ion Beam Deposition (&#8220;IBD&#8221;)</span></div></div></div><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:10pt;margin:0pt;"><span style="font-family:'Times New Roman','Times','serif';"> </span><span style="font-family:'Times New Roman','Times','serif';visibility:hidden;">&#8203;</span></p><div style="border-collapse:collapse;display:table;font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><div style="display:table-row;"><div style="width:18pt;display:table-cell;"></div><div style="display:table-cell;font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</div><div style="display:table-cell;padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">Ion Beam Etch (&#8220;IBE&#8221;)</span></div></div></div><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin:0pt 0pt 0pt 36pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p><div style="border-collapse:collapse;display:table;font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><div style="display:table-row;"><div style="width:18pt;display:table-cell;"></div><div style="display:table-cell;font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</div><div style="display:table-cell;padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">Wet Processing </span></div></div></div><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;visibility:hidden;">&#8203;</span></p><div style="border-collapse:collapse;display:table;font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><div style="display:table-row;"><div style="width:18pt;display:table-cell;"></div><div style="display:table-cell;font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</div><div style="display:table-cell;padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">Advanced Packaging Lithography</span></div></div></div></td></tr></table></div></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">5</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><div style="margin-left:0pt;"><a id="_Hlk95404858"></a><table style="border-collapse:collapse;font-size:16pt;height:max-content;width:100%;"><tr><td style="vertical-align:middle;width:16.08%;border-bottom:1px solid #8faadc;border-right:1px solid #8faadc;border-top:1px solid #8faadc;margin:0pt;padding:0pt 5.27pt 0pt 5.4pt;"></td><td style="vertical-align:top;width:57.21%;border-bottom:1px solid #8faadc;border-left:1px solid #8faadc;border-right:1px solid #8faadc;border-top:1px solid #8faadc;margin:0pt;padding:0pt 5.27pt 0pt 5.27pt;"><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:10pt;margin:0pt;"><span style="font-family:'Times New Roman','Times','serif';">smartphones, high-end servers, and graphical processors. Demand for higher performance, smaller form factors, and lower power consumption in applications such as artificial intelligence, mobile devices, consumer electronics, and high-performance computing is driving the adoption of advanced packaging technologies.</span><span style="font-size:12pt;"> </span><span style="font-family:'Times New Roman','Times','serif';">Veeco serves the advanced packaging market with lithography as well as wet processing equipment.</span></p><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:26.7%;border-bottom:1px solid #8faadc;border-left:1px solid #8faadc;border-top:1px solid #8faadc;margin:0pt;padding:0pt 5.4pt 0pt 5.27pt;"></td></tr><tr><td style="vertical-align:middle;width:16.08%;background:#dae3f3;border-bottom:1px solid #8faadc;border-right:1px solid #8faadc;border-top:1px solid #8faadc;margin:0pt;padding:0pt 5.27pt 0pt 5.4pt;"><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:10pt;font-weight:bold;margin:0pt;">Compound Semiconductor</p></td><td style="vertical-align:top;width:57.21%;background:#dae3f3;border-bottom:1px solid #8faadc;border-left:1px solid #8faadc;border-right:1px solid #8faadc;border-top:1px solid #8faadc;margin:0pt;padding:0pt 5.27pt 0pt 5.27pt;"><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:10pt;margin:0pt;"><span style="font-family:'Times New Roman','Times','serif';">The Compound Semiconductor market includes Photonics, Power Electronics, RF Filters and Amplifiers, and Solar applications.</span></p><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:10pt;margin:0pt;"><span style="font-family:'Times New Roman','Times','serif';">Photonics refers to light source technologies and laser-based solutions for 3D sensing, datacom and telecom applications. This includes micro-LED, laser diodes, edge emitting lasers and vertical cavity surface emitting lasers (&#8220;VCSELs&#8221;).</span></p><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:10pt;margin:0pt;"><span style="font-family:'Times New Roman','Times','serif';white-space:pre-wrap;">Micro-LEDs may be used for next generation advanced displays. A micro-LED display is a new approach which uses an array of red, blue, and green micro-LEDs to directly display an image without motion blur or image retention, and with improved brightness, darker blacks, and wider viewing angles.  </span></p><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:10pt;margin:0pt;"><span style="font-family:'Times New Roman','Times','serif';">Power Electronics refers to semiconductor devices such as rectifiers, inverters and converters for the control and conversion of electric power in growing applications such as fast or wireless charging of consumer electronics and automotive applications.</span></p><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:10pt;margin:0pt;"><span style="font-family:'Times New Roman','Times','serif';white-space:pre-wrap;">RF power amplifiers and filters (including surface acoustic wave (&#8220;SAW&#8221;) and bulk acoustic wave (&#8220;BAW&#8221;) filters) are used in 5G communications infrastructure, smartphones, tablets, and mobile devices. They make use of radio waves for wireless broadcasting and/or communications.  </span></p><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:10pt;margin:0pt;"><span style="font-family:'Times New Roman','Times','serif';">Solar refers to power obtained by harnessing the energy of the sun through the use of compound semiconductor devices such as photovoltaics. </span></p></td><td style="vertical-align:top;width:26.7%;background:#dae3f3;border-bottom:1px solid #8faadc;border-left:1px solid #8faadc;border-top:1px solid #8faadc;margin:0pt;padding:0pt 5.4pt 0pt 5.27pt;"><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;visibility:hidden;">&#8203;</span></p><div style="border-collapse:collapse;display:table;font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><div style="display:table-row;"><div style="width:18pt;display:table-cell;"></div><div style="display:table-cell;font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</div><div style="display:table-cell;padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">Gallium Nitride (&#8220;GaN&#8221;) MOCVD</span></div></div></div><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin:0pt 0pt 0pt 36pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p><div style="border-collapse:collapse;display:table;font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><div style="display:table-row;"><div style="width:18pt;display:table-cell;"></div><div style="display:table-cell;font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</div><div style="display:table-cell;padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">Arsenides/ Phosphides (&#8220;As/P&#8221;) MOCVD</span></div></div></div><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;visibility:hidden;">&#8203;</span></p><div style="border-collapse:collapse;display:table;font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><div style="display:table-row;"><div style="width:18pt;display:table-cell;"></div><div style="display:table-cell;font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</div><div style="display:table-cell;padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">Wet Processing</span></div></div></div><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><div style="border-collapse:collapse;display:table;font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><div style="display:table-row;"><div style="width:18pt;display:table-cell;"></div><div style="display:table-cell;font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</div><div style="display:table-cell;padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">MBE</span></div></div></div><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><div style="border-collapse:collapse;display:table;font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><div style="display:table-row;"><div style="width:18pt;display:table-cell;"></div><div style="display:table-cell;font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</div><div style="display:table-cell;padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">ALD</span></div></div></div><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;visibility:hidden;">&#8203;</span></p><div style="border-collapse:collapse;display:table;font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><div style="display:table-row;"><div style="width:18pt;display:table-cell;"></div><div style="display:table-cell;font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</div><div style="display:table-cell;padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">IBE</span></div></div></div><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin:0pt 0pt 0pt 36pt;"><span style="font-size:10pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:middle;width:16.08%;border-bottom:1px solid #8faadc;border-right:1px solid #8faadc;border-top:1px solid #8faadc;margin:0pt;padding:0pt 5.27pt 0pt 5.4pt;"><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:10pt;font-weight:bold;margin:0pt;">Data Storage</p></td><td style="vertical-align:top;width:57.21%;border-bottom:1px solid #8faadc;border-left:1px solid #8faadc;border-right:1px solid #8faadc;border-top:1px solid #8faadc;margin:0pt;padding:0pt 5.27pt 0pt 5.27pt;"><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:10pt;margin:0pt;"><span style="font-family:'Times New Roman','Times','serif';">Data Storage refers to the HDD market which provides significant value for mass storage and is an important part of large capacity storage applications. Our systems enable customers to manufacture the magnetic heads for hard disk drives.</span></p><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:26.7%;border-bottom:1px solid #8faadc;border-left:1px solid #8faadc;border-top:1px solid #8faadc;margin:0pt;padding:0pt 5.4pt 0pt 5.27pt;"><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;visibility:hidden;">&#8203;</span></p><div style="border-collapse:collapse;display:table;font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><div style="display:table-row;"><div style="width:18pt;display:table-cell;"></div><div style="display:table-cell;font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</div><div style="display:table-cell;padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">IBD</span></div></div></div><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;visibility:hidden;">&#8203;</span></p><div style="border-collapse:collapse;display:table;font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><div style="display:table-row;"><div style="width:18pt;display:table-cell;"></div><div style="display:table-cell;font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</div><div style="display:table-cell;padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">IBE</span></div></div></div><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;visibility:hidden;">&#8203;</span></p><div style="border-collapse:collapse;display:table;font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><div style="display:table-row;"><div style="width:18pt;display:table-cell;"></div><div style="display:table-cell;font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</div><div style="display:table-cell;padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">Physical Vapor Deposition</span></div></div></div><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;visibility:hidden;">&#8203;</span></p><div style="border-collapse:collapse;display:table;font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><div style="display:table-row;"><div style="width:18pt;display:table-cell;"></div><div style="display:table-cell;font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</div><div style="display:table-cell;padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">Mechanical (Lapping and Dicing)</span></div></div></div><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin:0pt 0pt 0pt 36pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p><div style="border-collapse:collapse;display:table;font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><div style="display:table-row;"><div style="width:18pt;display:table-cell;"></div><div style="display:table-cell;font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</div><div style="display:table-cell;padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">Diamond Like Carbon Deposition</span></div></div></div><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin:0pt 0pt 0pt 36pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p><div style="border-collapse:collapse;display:table;font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><div style="display:table-row;"><div style="width:18pt;display:table-cell;"></div><div style="display:table-cell;font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</div><div style="display:table-cell;padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">Wet Processing</span></div></div></div><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr></table></div></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">6</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><div style="margin-left:0pt;"><table style="border-collapse:collapse;font-size:16pt;height:max-content;width:100%;"><tr><td style="vertical-align:middle;width:16.08%;background:#dae3f3;border-bottom:1px solid #8faadc;border-right:1px solid #8faadc;border-top:1px solid #8faadc;margin:0pt;padding:0pt 5.27pt 0pt 5.4pt;"><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:10pt;font-weight:bold;margin:0pt;">Scientific &amp; Other</p></td><td style="vertical-align:top;width:57.21%;background:#dae3f3;border-bottom:1px solid #8faadc;border-left:1px solid #8faadc;border-right:1px solid #8faadc;border-top:1px solid #8faadc;margin:0pt;padding:0pt 5.27pt 0pt 5.27pt;"><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:10pt;margin:0pt;"><span style="font-family:'Times New Roman','Times','serif';">Scientific &amp; Other refers to advanced materials research and a range of manufacturing applications including optical coatings (laser mirrors, optical filters, and anti-reflective coatings).</span></p><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:26.7%;background:#dae3f3;border-bottom:1px solid #8faadc;border-left:1px solid #8faadc;border-top:1px solid #8faadc;margin:0pt;padding:0pt 5.4pt 0pt 5.27pt;"><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;visibility:hidden;">&#8203;</span></p><div style="border-collapse:collapse;display:table;font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><div style="display:table-row;"><div style="width:18pt;display:table-cell;"></div><div style="display:table-cell;font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</div><div style="display:table-cell;padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">Ion Beam Sputtering for optical coatings</span></div></div></div><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;visibility:hidden;">&#8203;</span></p><div style="border-collapse:collapse;display:table;font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><div style="display:table-row;"><div style="width:18pt;display:table-cell;"></div><div style="display:table-cell;font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</div><div style="display:table-cell;padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">MBE for specialized laser and sensor devices</span></div></div></div><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin:0pt 0pt 0pt 36pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p><div style="border-collapse:collapse;display:table;font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><div style="display:table-row;"><div style="width:18pt;display:table-cell;"></div><div style="display:table-cell;font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</div><div style="display:table-cell;padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">Wet Processing for sensors</span></div></div></div><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin:0pt 0pt 0pt 36pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p><div style="border-collapse:collapse;display:table;font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><div style="display:table-row;"><div style="width:18pt;display:table-cell;"></div><div style="display:table-cell;font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</div><div style="display:table-cell;padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">ALD for a variety of applications </span></div></div></div><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr></table></div><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">System Products</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Laser Annealing Systems</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Our laser annealing systems meet the industry demand for ultra-short time-scale annealing, heating the wafer up to temperatures just below the silicon melting point over a range of timeframes (hundreds of microseconds), enabling thermal annealing solutions at the most advanced semiconductor process nodes.&#160;This unique annealing technology provides a solution to the difficult challenge of fabricating ultra-shallow junctions and highly activated source/drain contacts at advanced logic nodes. In addition, our proprietary hardware design enables outstanding temperature uniformity across the wafer and die, by minimizing the pattern-density effect, thus reducing absorption variations.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">We are also continuing to develop next generation melt anneal technology targeted for memory devices and annealing advanced logic devices at advanced nodes.&#160;As devices scale, achieving performance targets has become a challenge. To continue the roadmap, the industry is looking at new materials and the use of thermal processes that require nanosecond time-scale thermal annealing with temperatures exceeding the melting point. It is believed that nanosecond annealing will be required to meet the device targets at future nodes.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Ion Beam Deposition and Etch Systems</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Our NEXUS<sup style="font-size:7.5pt;line-height:100%;top:0pt;vertical-align:top;">&#174;</sup> Ion Beam systems are used to deposit and etch thin film layers for multiple end applications in the Semiconductor, Data Storage, RF and other various emerging markets. These systems utilize Veeco&#8217;s proven gridded ion source technology which delivers a charged ion beam directed at a substrate for the etch application and at a sputter target for the deposition application. Our NEXUS<sup style="font-size:7.5pt;line-height:100%;top:0pt;vertical-align:top;">&#174;</sup> IBD system has a leading position in multiple markets including EUV mask blank manufacturing in which it enables our customers to deposit multilayers with high precision and ultra-low defects which is essential for EUV lithography. Our ion sources and grid technology are incorporated into etch systems used to pattern magnetic materials for the 300mm Semiconductor STT-MRAM market. The IBD systems are also critical in the manufacture of hard disk drive magnetic heads where they are used to deposit various magnetic and oxide layers and deliver best-in-class film properties. Our NEXUS<sup style="font-size:7.5pt;line-height:100%;top:0pt;vertical-align:top;">&#174;</sup> IBE systems are used to precisely etch complex features on materials which are challenging to pattern by traditional reactive ion etching techniques. These systems are widely used in the data storage industry for patterning of magnetic and oxide materials and are essential for forming the precise shape of the magnetic head. The NEXUS<sup style="font-size:7.5pt;line-height:100%;top:0pt;vertical-align:top;">&#174;</sup> systems may be included on our cluster system platform to allow either parallel or sequential deposition/etch processes.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Our Lancer<sup style="font-size:7.5pt;line-height:100%;top:0pt;vertical-align:top;">TM</sup> IBE system is used for etching of SAW and BAW devices in the RF filter market and various waveguide patterning steps for AR/VR markets where their best-in-class film uniformity is a key advantage.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">7</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Our SPECTOR<sup style="font-size:8.25pt;line-height:100%;top:0pt;vertical-align:top;">&#174;</sup> Ion Beam Sputtering system was developed for high precision optical coatings and offers manufacturers state of the art optical thickness monitoring, improved productivity, and target material utilization, for cutting-edge optical interference coating applications. We also provide a broad array of ion beam sources. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Advanced Packaging Lithography</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">We have a leading position in the Advanced Packaging lithography equipment market for applications such as FOWLP, Flip Chip (including Copper Pillar), Fan In Wafer Lever Packaging, 3D stacking, interposers and embedded die. The Advanced Packaging market is driven by the need for improved performance, reduced power consumption, and the ability to image smaller geometries for mobile and automotive applications.&#160;These applications continue to demand increasingly complex packaging techniques and heterogeneous device integration from integrated device manufacturers (&#8220;IDMs,&#8221;), Foundries, and outsourced semiconductor assembly and test (&#8220;OSAT&#8221;) companies. Our Advanced Packaging tools are designed to optimize productivity for leading-edge 200mm and 300mm Advanced Packaging applications by delivering proven reliability and low cost of ownership in high-volume manufacturing environments. Our products are known for best-in-class yield coupled with outstanding resolution and depth of focus.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Single Wafer Wet Processing</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">We offer single wafer wet processing, and surface preparation systems which target growth opportunities in RF filters and amplifiers in the Compound Semiconductor market, as well as advanced packaging applications in the Semiconductor market. The WaferStorm<sup style="font-size:7.5pt;line-height:100%;top:0pt;vertical-align:top;">&#174;</sup> platform is based on our unique ImmJET&#8482; technology, which provides improved performance at a lower cost of ownership than conventional wet bench-only or spray-only approaches. This highly flexible platform targets solvent-based cleaning applications that require a significant level of process control and flexibility. The WaferEtch<sup style="font-size:7.5pt;line-height:100%;top:0pt;vertical-align:top;">&#174;</sup> platform provides highly uniform, selective etching with onboard end-point detection for improved process control and yield in bumping applications. In addition, we have developed a state-of-the-art solution with the WaferEtch<sup style="font-size:7.5pt;line-height:100%;top:0pt;vertical-align:top;">&#174;</sup> platform to address the requirements of wafer thinning. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Metal Organic Chemical Vapor Deposition Systems</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">MOCVD production systems are used to make GaN and As/P-based devices for applications including power electronics, RF devices, specialty LED, display, and many other photonics applications. Our proven TurboDisc<sup style="font-size:7.5pt;line-height:100%;top:0pt;vertical-align:top;">&#174;</sup> technology is at the heart of our MOCVD systems and is the key to enabling best-in-class deposition uniformity, yield performance and cost per wafer savings for our customers with a combined advantage of high operating uptime and low maintenance costs. Our Lumina<sup style="font-size:7.5pt;line-height:100%;top:0pt;vertical-align:top;">&#174;</sup> platform is used for As/P deposition, and features long campaigns and low defectivity for exceptional yield and flexibility. Our Propel<sup style="font-size:7.5pt;line-height:100%;top:0pt;vertical-align:top;">&#174;</sup> series enables the development of highly-efficient GaN-based power electronics, RF devices and advanced GaN-on-silicon micro-LEDs. The Propel<sup style="font-size:7.5pt;line-height:100%;top:0pt;vertical-align:top;">&#174;</sup> system offers 200mm and fully-automated 300mm technology and incorporates single-wafer reactor technology for outstanding film uniformity, yield, and device performance.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;background:#ffff00;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Molecular Beam Epitaxy Systems</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">MBE is the process of precisely depositing epitaxially-aligned atomically-thin crystalline layers, or epilayers, of elemental materials onto a substrate in an ultra-high vacuum environment. We are a leading supplier of MBE systems worldwide.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Our MBE systems, sources, and components are used to develop and manufacture compound semiconductor devices in a wide variety of applications such as high-power fiber lasers, infrared detectors, mobile phones, radar systems, high efficiency solar cells, and basic materials science research. The GENxplor<sup style="font-size:7.5pt;line-height:100%;top:0pt;vertical-align:top;">&#174;</sup> MBE system creates high quality epitaxial layers and is ideal for cutting-edge research on a wide variety of materials including GaAs, antimonides, nitrides, and oxides on 3&#8221; diameter substrates. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">8</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Atomic Layer Deposition Systems</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">ALD is a thin-film deposition method in which a film is deposited on a substrate uniformly with precise control down to the atomic scale. Veeco offers a full suite of ALD systems for non-semiconductor front-end production applications across a wide range of markets and applications such as energy, optical, electronics, micro-electro mechanical systems (&#8220;MEMS&#8221;), nanostructures, and biomedical. We have recently developed the Firebird<sup style="font-size:7.5pt;line-height:100%;top:0pt;vertical-align:top;">&#174;</sup> ALD system, a fully automated tool capable of managing fragile wafers in a continuous operational sequence. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Other Systems</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">We have other deposition systems including Physical Vapor Deposition, Diamond-Like Carbon Deposition, and Chemical Vapor Deposition Systems primarily sold to the data storage market. In addition, we have mechanical systems such as saws and lappers for the data storage industry as well as the power semiconductor market. Finally, we have Gas-mixing systems primarily sold to the semiconductor market. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Sales and Service</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><a id="_Hlk30583633"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">We sell our products and services worldwide through various strategically located facilities in the United States, Europe, and the Asia-Pacific region. We believe that our customer service organization is a significant factor in our success. We provide service and support on a warranty, service contract, and an individual service-call basis. We believe that offering timely support creates stronger relationships with customers. Revenue from the sales of parts, upgrades, service, and support represented approximately 28%, 30%, and 26% of our net sales for the years ended December&#160;31, 2021, 2020, and 2019, respectively. Parts and upgrade sales represented approximately 21%, 23%, and 19% of our net sales for those years, respectively, and service and support sales were 7%, 7%, and 7% respectively.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Customers</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><a id="_Hlk30583647"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">We sell our products to many of the world&#8217;s semiconductor IDMs and Foundries, OSAT, HDD, and photonics manufacturers, as well as research centers and universities. We rely on certain principal customers for a significant portion of our sales. Sales to Western Digital and TDK Headway each separately accounted for more than 10% of our total net sales in 2021; and sales to Seagate Technology accounted for more than 10% of our total net sales in 2020 and 2019. If any principal customer discontinues its relationship with us or suffers economic difficulties, our business prospects, financial condition, and operating results could be materially and adversely affected.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Research and Development</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Our research and development functions are focused on the timely creation of new products and enhancements to existing products, both of which are necessary to maintain our competitive position. We collaborate with our customers to align our technology and product roadmaps to customer requirements. Our research and development activities take place at our facilities in San Jose, California; Plainview, New York; Horsham, Pennsylvania; Somerset, New Jersey; St. Paul, Minnesota; and Waltham, Massachusetts.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Suppliers</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">We outsource certain functions to third parties, including the manufacture of several of our systems. While we rely on our outsourcing partners to perform their contracted functions, we maintain some level of internal manufacturing capability for these systems. Refer to Item 1A, &#8220;Risk Factors,&#8221; for a description of risks associated with our reliance on suppliers and outsourcing partners.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Backlog</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><a id="_Hlk30583662"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Our backlog consists of orders for which we received a firm purchase order, a customer-confirmed shipment date generally within twelve months, and a deposit, when required. Our backlog increased to $440.2 million at December&#160;31, 2021 from $366.0 million at December&#160;31, 2020. </p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">9</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Competition</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">In each of the markets that we serve, we face competition from established competitors, some of which have greater financial, engineering, and marketing resources than we do, as well as from smaller competitors. In addition, many of our products face competition from alternative technologies, some of which are more established than those used in our products. Significant factors for customer selection of our tools include system performance, accuracy, repeatability, ease of use, reliability, cost of ownership, and technical service and support. None of our competitors compete with us across all of our product lines.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Our principal competitors include: Aixtron; Applied Materials; Canon; Grand Plastics Technology Corporation; Mattson; Screen Semiconductor Solutions; and Shanghai Micro Electronics Equipment.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><a id="_Hlk535835733"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Intellectual Property</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><a id="_Hlk30583674"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Our success depends, in part, on our proprietary technology, and we have over 400 patents in the United States and other countries.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">We have patents and exclusive and non-exclusive licenses to patents owned by others covering certain of our products, which we believe provide us with a competitive advantage. We have a policy of seeking patents on inventions concerning new products and improvements as part of our ongoing research, development, and manufacturing activities. We believe that there is no single patent or exclusive or non-exclusive license to patents owned by others that is critical to our operations, as the success of our business depends primarily on the technical expertise, innovation, customer satisfaction, and experience of our employees. Refer to Item 1A, &#8220;Risk Factors,&#8221; for a description of risks associated with intellectual property.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><a id="_Hlk535835920"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">The Veeco United Team</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><a id="_Hlk63162046"></a><a id="_Hlk62803284"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Veeco&#8217;s global workforce spans twelve countries around the world. At the end of 2021, we had 1,091 employees with 240 located in the Asia-Pacific region, 40 in the EMEA region, and 811 in the United States. Approximately 24% of our employees are involved in research and development; 55% are involved in operations, manufacturing, service, and quality assurance; and 21% are involved in sales, order administration, marketing, finance, information technology, general management, and other administrative functions. Our success depends on our ability to attract, retain, and motivate employees. We compete for talent with other companies and organizations. We consider our relations with the Veeco United Team to be favorable. We are subject to various federal, state, and local regulations, and regularly monitor all key employment activities, such as hiring, termination, pay and working practices to ensure compliance with such regulations. In addition, we supplement the Veeco United Team with contractors and other temporary workers. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Our Core Values</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">All Veeco employees are expected to honor our core values, which define the way we conduct our business in everyday actions and choices and form the foundation of our culture:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">We will always put our CUSTOMERS first</span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">We will never compromise on SAFETY</span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">We will always demonstrate RESPECT</span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">We will never stop IMPROVING</span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">We will always be ACCOUNTABLE</span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">We will never forget that DIVERSITY and INCLUSION makes us stronger</span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Employment, Recruitment and Development</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Our recruitment programs are regionally focused, and hiring is done at a local level to ensure compliance with applicable regulations. To ensure diversity within our workforce, we advertise job openings and source candidates broadly to attract a diverse candidate pool. As a leader in our industry, we are able to attract a strong candidate pool and have been </p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">10</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">successful in filling vacancies. In fiscal 2021, we hired 223 employees, 181 of whom were within the United States, 41 of whom were in the Asia-Pacific region, and 4 of whom were in the EMEA region. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">We track and report key talent metrics including workforce demographics, talent pipeline and diversity. We invest in professional development programs to provide opportunities for individuals to advance their careers in either technical/individual contributor or leadership tracks. Many of our training and development programs are offered on-line for the benefit of employees located around the world. Additional focus is placed on the development of future leaders and we leverage a talent review process where high-potential and high-performing employees are assessed for future leadership roles as part of our succession management process. Since turnover is an important indicator of employee satisfaction, we closely monitor turnover statistics. Our 12-month rolling average for voluntary turnover at December 31, 2021 was approximately 9.2%. Our employee average tenure is more than 8 years.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Employee Engagement</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><a id="_Hlk93657622"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The engagement and satisfaction of the Veeco United Team is critical to our culture and our success. In 2019, we conducted a formal employee survey designed to assess global employee engagement, leadership, work environment and culture. 91% of our employees participated in the survey, itself an indicator of a high level of employee engagement. Participants provided over 2,000 responses to open-ended questions. The findings from this survey established an agenda for various initiatives designed to strengthen our Company. In 2021, we conducted a second formal employee survey, using the same survey instrument. Approximately 90% of employees participated in the survey and nearly 2,000 responses were provided to open-ended questions. We saw significant improvements across all survey areas, and we remain committed to working with employees to strengthen the Company&#8217;s culture. In addition, our executives conduct regular meetings with our global workforce enabling all employees to engage with senior leaders and ask questions in open Q&amp;A sessions. Finally, we maintain and regularly remind our employees about our confidential third-party hotline service that can be utilized to share their concerns. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> <span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Compensation Philosophy</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Our compensation philosophy is targeted to support our employees&#8217; financial, physical, and mental health and well-being. We utilize third-party benchmarking surveys to ensure that our total compensation packages are competitive. We help employees share in the success of the Company through various programs including an Employee Stock Purchase Plan (&#8220;ESPP&#8221;), equity compensation, profit sharing and bonus plans. In addition to providing our employees with competitive compensation packages, we offer benefits designed to meet the needs of employees and their families, including paid time off, medical, dental and vision coverage, disability income protection, life insurance, retirement savings contributions, and more.<span style="font-size:12pt;"> </span>Veeco pays the majority or all of the costs for many of these benefits.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Diversity and Inclusion</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">We are committed to building and sustaining a culture of diversity and inclusion where our people can be their authentic selves and are encouraged to reach their full potential. Our Veeco team, like the technologies we enable, is a rich combination of diverse individuals coming together as Veeco United to make a material difference for our people, our customers, and the world. As a global technology company, we recognize that a diverse employee population makes Veeco stronger, more innovative, and a more engaging place to work. We are always striving to attract talented individuals from a global candidate pool. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">In the second quarter of 2021, Veeco established a Diversity and Inclusion Council. The Council, composed of diverse Veeco colleagues from many different parts of the Company, represents Veeco&#8217;s ongoing commitment to inclusion of all genders, sexual orientations, races, ethnic origins, religions, and diversity of thought. The team has recently established Veeco&#8217;s Diversity and Inclusion Mission Statement and Charter. The charter affirms our commitment to building awareness, enhancing community partnerships, addressing diversity in our recruiting and hiring practices, empowering employees to promote D&amp;I initiatives, and identifying opportunities to have meaningful engagements with peers and the leadership team. We are excited to continue developing initiatives to promote and celebrate diversity at Veeco.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">11</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Employee Health and Safety, Pandemic Response</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">We are committed to providing a safe and healthy workplace for all employees. We accomplish this through strict compliance with applicable laws and regulations regarding workplace safety, including recognition and control of workplace hazards, tracking injury and illness rates, utilizing a global travel health program, and maintaining detailed emergency and disaster recovery plans.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Our highest priorities throughout the pandemic were, and continue to be, the health and well-being of our employees, customers, suppliers, and stakeholders. From the beginning of the pandemic, through the recent challenges posed by the acceleration of coronavirus variants, we have taken precautions to protect employees, visitors, and customers while minimizing disruption to our business. Our facilities remained operational as an &#8220;essential business&#8221; throughout the pandemic. However, we implemented rigorous health and safety protocols at our manufacturing facilities, including extensively and frequently disinfecting our facilities, limiting access to our facilities, checking temperatures of individuals entering our facilities, staggering shifts to minimize employee overlap in gowning areas, and providing protective equipment in order to minimize the risks to our employees. In addition, we required many of our employees to work from home wherever possible. We protected employees, customers, and stakeholders by providing remote meetings, demos, and service, whenever possible. Our Veeco United team was committed to remaining flexible and responsive throughout the pandemic. Our team monitored and responded quickly to local, state, and federal guidance related to the pandemic. We developed a COVID-19 Pledge to describe all the measures we implemented in our facilities to keep employees working on-site safe throughout the pandemic.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Available Information</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Our corporate website address is www.veeco.com. All filings we make with the Securities and Exchange Commission (&#8220;SEC&#8221;), including our Annual Report on Form&#160;10-K, our Quarterly Reports on Form&#160;10-Q, our Current Reports on Form&#160;8-K, our proxy statements and any amendments thereto filed or furnished pursuant to Section&#160;13(a)&#160;or 15(d)&#160;of the Securities Exchange Act of 1934, as amended, are available for free in the Investor Relations section of our website as soon as reasonably practicable after they are filed with or furnished to the SEC. The reference to our website address does not constitute inclusion or incorporation by reference of the information contained on our website in this Form&#160;10-K or other filings with the SEC, and the information contained on our website is not part of this document.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">12</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><a id="_515bec57_3a6e_4f71_977f_892d36693818"></a><a id="Item1A_RiskFactors"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Item 1A. Risk Factors</b><b style="font-weight:bold;"> </b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Key Risk Factors That May Impact Future Results </b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0.05pt 0pt 0pt 0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Stockholders should carefully consider the risk factors described below, many of which have been, and could be further, exacerbated by the COVID-19 pandemic and any further impact to the global business and economic environment which may result. Any of these factors, many of which are beyond our control, could materially and adversely affect our business, financial condition, operating results, cash flow, and stock price.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;text-decoration-color:#000000;text-decoration-line:underline;text-decoration-style:solid;">Risks Related to Our Business, Finance and Operations</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;font-weight:bold;">The effects of the COVID-19 pandemic have strained and have negatively impacted our businesses and operations, and the duration and extent to which COVID-19 may impact our future results of operations and overall financial performance remains uncertain.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The outbreak and continuing spread of COVID-19 and its variants have resulted in a substantial curtailment of business activities worldwide and has caused and is likely to continue to cause weakened economic conditions, both domestically and abroad, including in markets in Asia and Europe from which we derive the majority of our revenue. Government restrictions (such as stay-at-home orders), quarantines and worker absenteeism as a result of COVID-19 have led to a significant number of business closures and other slowdowns. These slowdowns have adversely impacted and will likely continue to adversely impact Veeco directly, as well as our customers, suppliers and other partners.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">While all of our global sites are currently operational, any local pandemic outbreaks could require us to temporarily curtail production levels or temporarily cease operations based on government mandates. Furthermore, the COVID-19 conditions have adversely impacted, and may continue to adversely impact, our ability to timely source critical parts and materials and to provide on-site services to our customers. Supply chain shortages, which have been and may continue to be exacerbated by shipping delays caused by transportation interruptions (associated with matters such as reduced availability of air transport, port closures, and increased border controls), could require us to purchase excess inventory with longer lead times, which could increase inventory obsolescence risk while negatively impacting our working capital. Shortages of critical parts have strained and may continue to strain our manufacturing capacity, threatening to adversely impact our ability to meet customer needs, which may negatively impact our revenues, results of operations and financial condition.<span style="font-size:12pt;"> </span>While we have been able to successfully mitigate these risks thus far, without material negative impact to our financial performance, our continued ability to do so remains uncertain.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">In addition, the conditions caused by COVID-19 could adversely affect our customers&#8217; ability or willingness to purchase our products or services or otherwise delay prospective customers&#8217; purchasing decisions. These conditions may delay the provisioning of our offerings, or lengthen payment terms, all of which could adversely affect our future sales, operating results and overall financial performance. In addition, adverse impacts on the creditworthiness of our customers and other counterparties may negatively affect their ability to pay amounts owed to us, which could materially and adversely affect our results of operations and financial condition.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The COVID-19 pandemic has resulted in significant disruption of global financial markets and could negatively impact our stock price, our access to capital, and our business and results of operations in the near and long-term. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;font-weight:bold;">Unfavorable market conditions have adversely affected, and may continue to adversely affect, our operating results.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0.05pt 0pt 0pt 0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Conditions of the markets in which we operate are volatile and may experience significant deterioration. Changing market conditions require that we continuously monitor and reassess our strategic resource allocation decisions. If we fail to properly adapt to changing business environments, we may lack the infrastructure and resources necessary to scale up our businesses to successfully compete during periods of growth, or we may incur excess fixed costs during periods of decreasing demand. Adverse market conditions relative to our products may result in:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:6pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;letter-spacing:-0.1pt;">reduced demand for our products, or the rescheduling or cancellation of orders for our products which may result in negative backlog adjustments; </span></td></tr></table></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">13</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:6pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;letter-spacing:-0.1pt;">asset impairments, including the impairment of goodwill and other intangible assets;</span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:6pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;letter-spacing:-0.1pt;">unfavorable changes in customer mix and product mix; </span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:6pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;letter-spacing:-0.1pt;">increased price competition for our products, or increased competition from sellers of used equipment or lower-priced alternatives to our products, which could lead to lower profit margins for our products; </span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:6pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;letter-spacing:-0.1pt;">increased inventory obsolescence; </span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:6pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;letter-spacing:-0.1pt;">disruptions in our supply chain; </span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:6pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;letter-spacing:-0.1pt;">higher operating costs, caused by matters including but not limited to macroeconomic inflationary pressures, which the Company is currently beginning to experience; and</span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;letter-spacing:-0.1pt;">an increase in uncollectable amounts due from our customers resulting in increased reserves for doubtful accounts and write-offs of accounts receivable. </span></td></tr></table><div style="margin-top:6pt;"></div><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="letter-spacing:-0.1pt;">If the markets in which we participate experience deteriorations or downturns, this could negatively impact our sales and revenue generation, margins, operating expenses, and profitability. </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;font-weight:bold;letter-spacing:-0.1pt;">The timing of our orders, shipments, and revenue recognition may cause our quarterly operating results to fluctuate significantly. </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">We derive a substantial portion of our net sales in any fiscal period from the sale of a relatively small number of high-priced systems. As a result, the timing for the recognition of revenue for a single transaction could have a material effect on our sales and operating results for a particular fiscal period. As is typical in our industry, orders and shipments often occur during the last few weeks of a quarter. As a result, a delay of only a week or two can impact which period revenue is reported and can cause volatility in our revenue for a given reporting period. Our quarterly results have fluctuated significantly in the past and we expect this trend to continue. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;font-weight:bold;letter-spacing:-0.1pt;">Our sales cycle is long and unpredictable. </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="white-space:pre-wrap;">Historically, we have experienced long and unpredictable sales cycles (the period between our initial contact with a potential customer and the time that we recognize revenue from resulting sales to that customer). It is not uncommon for our sales cycle to exceed twelve months. The timing of an order often depends on our customer&#8217;s capital expenditure budget, over which we have no control. In addition, the time it takes us to procure and build a product to customer specifications typically ranges from three to twelve months. When coupled with the fluctuating amount of time required for shipment, installation, and final acceptance, our sales cycles often vary widely, and these variations can cause fluctuations in our operating results. As a result of our lengthy sales cycles, we may incur significant research and development, selling, general, and administrative expenses before we generate revenue for these products. We may never generate the anticipated revenue if a customer cancels or otherwise changes its purchase plans, or if our evaluation systems do not satisfy customer requirements (which could result in working capital constraints, excess inventory or inventory obsolescence, and other harm to the Company). These risks are particularly prevalent in the semiconductor market, which is often characterized by long customer qualification times, typically twelve to eighteen months. Once qualified, the ramp to volume production can take an additional extended period of time, often twelve to twenty-four months. During these periods, little to no revenue will be recognized by us, while we will continue to incur research and development costs. Despite our efforts, our products may never be qualified and may never achieve design-tool-of-record (&#8220;DTOR&#8221;) or production-tool-of-record (&#8220;PTOR&#8221;) status, and our business, financial condition, and results of operations may be materially and adversely affected.     </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;font-weight:bold;letter-spacing:-0.1pt;">Our backlog is subject to customer cancellation or modification which could result in decreased sales, increased inventory obsolescence, and liabilities to our suppliers for products no longer needed.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Customer purchase orders may be cancelled or rescheduled by the customer, sometimes with limited or no penalties, which may result in increased or unrecoverable costs for the Company. We adjust our backlog for such cancellations and contract modifications, among other items. A downturn in one or more of our businesses could result in an increase in order cancellations and postponements. </p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">14</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">We write-off excess and obsolete inventory based on historical trends, future usage forecasts, and other factors including the amount of backlog we have on hand. If our backlog is canceled or modified, our estimates of future product demand may prove to be inaccurate, in which case we may have understated the write-off required for excess and obsolete inventory. In the future, if we determine that our inventory is overvalued, we will be required to recognize associated costs in our financial statements at the time of such determination. In addition, we place orders with our suppliers based on our customers&#8217; orders. If our customers cancel their orders with us, we may not be able to cancel our orders with our suppliers. Resulting charges could have a material adverse effect on our results of operations and financial condition. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;font-weight:bold;letter-spacing:-0.1pt;">We may be required to take impairment charges on assets. </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">We are required to assess goodwill and indefinite-lived intangible assets annually for impairment, or on an interim basis whenever certain events occur or circumstances change, such as an adverse change in business climate or a decline in the overall industry, that would more likely than not reduce the fair value below its carrying amount. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">As part of our long term strategy, we may pursue future acquisitions of, or investments in, other companies or assets which could potentially increase our assets. We are required to test certain of our assets, including acquired intangible assets, property, plant, and equipment, and equity investments without readily observable market prices, for recoverability and impairment whenever there are indicators of impairment such as an adverse change in business climate. Adverse changes in business conditions or worse-than-expected performance by these acquired companies could negatively impact our estimates of future operations and result in impairment charges to these assets. For example, in the fourth quarters of 2019 and 2021 we recorded non-cash impairment charges of $25.0 million and $1.0 million, respectively, primarily related to our equity investments without readily observable market prices. If our assets are further impaired, our financial condition and results of operations could be materially and adversely affected.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;font-weight:bold;letter-spacing:-0.1pt;">We are exposed to risks associated with business combinations, acquisitions, strategic investments and divestitures. </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 6pt 0pt;">We have completed several significant acquisitions and investments in the past and we will consider new opportunities in the future. Acquisitions and investments involve numerous risks, many of which are unpredictable and beyond our control, including the following:</p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:6pt;margin-top:0pt;table-layout:fixed;text-align:justify;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;letter-spacing:-0.1pt;">the failure to realize expected synergies and difficulties and costs, including the diversion of management&#8217;s attention, in integrating the personnel, operations, technologies, and products of acquired companies;</span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:6pt;margin-top:0pt;table-layout:fixed;text-align:justify;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;letter-spacing:-0.1pt;">the inability to complete proposed transactions as anticipated, resulting in obligations to pay professional and other expenses, including any applicable termination fees; </span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:6pt;margin-top:0pt;table-layout:fixed;text-align:justify;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;letter-spacing:-0.1pt;">unknown, underestimated, and undisclosed commitments or liabilities; </span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:6pt;margin-top:0pt;table-layout:fixed;text-align:justify;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;letter-spacing:-0.1pt;">increased amortization expenses relating to intangible assets; and </span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;letter-spacing:-0.1pt;">other adverse effects on our business, including the potential impairment and write-down of amounts capitalized as intangible assets and goodwill as part of the acquisition, as a result of such matters as technological advancements or worse-than-expected performance by the acquired company. </span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">If we issue equity securities to pay for an acquisition or investment, the ownership percentage of our then-current shareholders would be reduced and the value of the shares held by these shareholders could be diluted, which could adversely affect the price of our stock. If we use cash to pay for an acquisition or investment, the payment could significantly reduce the cash that would be available to fund our operations, pay our indebtedness, or be used for other purposes, which could have a negative effect on our business. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">In addition, we continually assess the strategic fit of our businesses and may from time to time seek to divest portions of our Company that no longer fit our strategic plan. Divestitures involve significant risks and uncertainties, including the ability to sell such businesses at satisfactory prices, on acceptable terms, and in a timely manner. Divestitures may also disrupt other parts of our businesses, distract the attention of our management, result in a loss of key employees or customers, and require that we allocate internal resources that would otherwise be devoted to operating our existing </p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">15</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">businesses. Divestitures may expose us to unanticipated liabilities (including those arising from representations and warranties made to a buyer regarding the businesses) and to ongoing obligations to support the businesses following such divestitures, any and all of which could adversely affect our business, financial condition, and results of operations.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;font-weight:bold;letter-spacing:-0.1pt;">We have adopted certain measures that may have anti-takeover effects which may make an acquisition of our Company by another company more difficult. </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 6pt 0pt;">We have adopted, and may in the future adopt, certain measures that may have the effect of delaying, deferring, or preventing a takeover or other change in control of our Company, which a holder of our common stock might not consider to be in the holder&#8217;s best interest. For example, our board of directors has the authority to issue up to 500,000 shares of preferred stock and to fix the rights (including voting rights), preferences and privileges of these shares (&#8220;blank check&#8221; preferred stock). Such preferred stock may have rights, including economic rights, senior to our common stock. As a result, the issuance of the preferred stock could have a material adverse effect on the price of our common stock and could make it more difficult for a third party to acquire a majority of our outstanding common stock. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">In addition, our board of directors is divided into three classes with each class serving a staggered three-year term. The existence of a classified board makes it more difficult for our shareholders to change the composition of our board of directors, and therefore the Company&#8217;s policies, in a relatively short period of time. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Furthermore, we have adopted certain certificate of incorporation and bylaws provisions which have anti-takeover effects. These include: (a) requiring certain actions to be taken at a meeting of shareholders rather than by written consent, (b) requiring a super-majority of shareholders to approve certain amendments to our bylaws, (c) limiting the maximum number of directors, and (d) providing that directors may be removed only for cause. These measures and those described above may have the effect of delaying, deferring, or preventing a takeover or other change in control of our Company that a holder of our common stock may not consider to be in the holder&#8217;s best interest. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">In addition, we are subject to the provisions of Section 203 of the General Corporation Law of the State of Delaware, which prohibits a Delaware corporation from engaging in any business combination, including mergers and asset sales, with an interested stockholder (generally, a 15% or greater stockholder) for a period of three years after the date of the transaction in which the person became an interested stockholder, unless the business combination is approved in a prescribed manner. The operation of Section 203 may have anti-takeover effects, which could delay, defer, or prevent a takeover attempt that a holder of our common stock may not consider to be in the holder&#8217;s best interest.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Despite the above measures, an activist shareholder could undertake action to implement governance, strategic, or other changes to the Company which a holder of our common stock may not consider to be in the holder&#8217;s best interest. Such activities could interfere with our ability to execute our strategic plans, be costly and time consuming, disrupt our operations, and divert the attention of management and our employees.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;font-weight:bold;">Our current debt facilities, including our 2.70% Convertible Senior Notes due 2023 (the &#8220;2023 Notes&#8221;), our 3.50% Convertible Senior Notes due 2025 (the &#8220;2025 Notes&#8221;), or our 3.75% Convertible Senior Notes due 2027 (the &#8220;2027 Notes&#8221;) (the 2023 Notes, 2025 Notes, and 2027 Notes, together, the &#8220;Notes&#8221;), and our revolving credit facility (the &#8220;Credit Facility&#8221;), may contain certain restrictions, covenants and repurchase provisions that may limit our ability to raise the funds necessary to meet our working capital needs, which may include the cash conversion of the Notes or repurchase of the Notes for cash upon a fundamental change.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">As of December 31, 2021, we had $20.2 million in principal amounts outstanding in 2023 Notes, $132.5 million in principal amounts outstanding in 2025 Notes, and $125.0 million in principal amounts outstanding in 2027 Notes. In addition, as of December 31, 2021, we had an undrawn senior secured revolving credit facility in an aggregate principal amount of $150.0 million, including a $15.0 million letter of credit sublimit. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">These debt facilities contain certain covenant and other restrictions that may limit our ability to, among other things, incur additional debt or create liens, sell certain assets, and merge or consolidate with third parties, which may, in turn, preclude us from responding to changes in business and economic conditions, engaging in transactions that might otherwise be beneficial to us, or obtaining additional financing. Our ability to comply with some of these covenants is dependent on our future performance, which will be subject to many factors, some of which are beyond our control such </p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">16</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="white-space:pre-wrap;">as prevailing economic conditions. In addition, our failure to comply with these covenants could result in a default under the Notes or Credit Facility, which could accelerate the debt.  If any of our debt is accelerated, we may not have sufficient funds available to repay such debt, which could materially and negatively affect our financial condition and results of operation.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">In addition, our ability to repurchase or to pay cash upon conversion of the Notes, or maturity of the Credit Facility, may be limited by law, by regulatory authority or by agreements governing our indebtedness that exist at the time of repurchase, conversion, or maturity. Our failure to settle the debt as required would constitute a default under the applicable debt facility and could also lead to a default under the other debt facilities. If the payment of the related indebtedness were to be accelerated after any applicable notice or grace periods, we may not have sufficient funds to repay the indebtedness.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Finally, holders of the Notes will have the right to require us to repurchase all or any portion of their Notes upon the occurrence of a fundamental change before the maturity date at a fundamental change repurchase price equal to 100% of the principal amount of the Notes to be repurchased, plus accrued and unpaid interest, if any, to, but excluding, the fundamental change repurchase date, as described in the applicable Notes and indenture. Additionally, upon conversion of the Notes, unless we elect to deliver solely shares of our common stock to settle such conversion (other than paying cash in lieu of delivering any fractional share), we will be required to make cash payments in respect of the Notes being converted. However, we may not have enough available cash or be able to obtain financing at the time we are required to make repurchases of the Notes surrendered therefor or pay cash with respect to the Notes being converted.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;font-weight:bold;">The conditional conversion features of the 2023 Notes, 2025 Notes, and 2027 Notes, if triggered, may materially and adversely affect our financial condition and operating results. </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">In the event the conditional conversion features of the 2023 Notes, 2025 Notes, and 2027 Notes are triggered, holders of Notes will be entitled to convert the Notes at any time during specified periods at their option. If one or more holders elect to convert the Notes, unless we elect to satisfy our conversion obligation by delivering solely shares of our common stock (other than paying cash in lieu of delivering any fractional share), we would be required to settle a portion or all of our conversion obligation through the payment of cash, which could adversely affect our liquidity. In addition, even if holders do not elect to convert the Notes, we could be required under applicable accounting rules to reclassify all or a portion of the outstanding principal of the Notes as a current rather than long-term liability, which could result in a material reduction of our net working capital.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;font-weight:bold;">The accounting method for convertible debt securities that may be settled in cash, such as the Notes, could have a material effect on our reported financial results. </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;font-weight:bold;"> </span><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">In August 2020, the FASB issued ASU 2020-06: <i style="font-style:italic;">Debt &#8211; Debt with Conversion and Other Options (Subtopic 470-20) and Derivatives and Hedging &#8211; Contracts in Entity&#8217;s Own Equity (Subtopic 815-40): Accounting for Convertible Instruments and Contracts in an Entity&#8217;s Own Equity</i>. Under the standard, which will be effective for our fiscal year 2022, an entity is no longer required to separately account for the liability and equity components of certain convertible debt instruments that may be settled entirely or partially in cash upon conversion, such as the Notes. As a result, entities will account for a convertible debt instrument wholly as debt, unless certain other conditions are met. The elimination of these separation models will reduce our non-cash interest expense, and thereby increasing net income (or reducing net loss). Additionally, ASU 2020-06&#160;requires the application of the if-converted method for calculating diluted earnings per share, and precludes the use of the treasury stock method for certain debt instruments, which will adversely affect our diluted shares outstanding. We cannot be sure whether other changes may be made to the current accounting standards related to the Notes, or otherwise, that could have an adverse impact on our financial statements.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> <span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;font-weight:bold;">Issuance of our common stock, if any, upon conversion of the Notes, as well as the capped call transactions and the hedging activities of the option counterparties, may impair or reduce our ability to utilize our net operating loss carryforwards or our research and development credits carryforwards in the future.</span><span style="white-space:pre-wrap;">  </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Pursuant to U.S. federal and state tax rules, a corporation is generally permitted to deduct from taxable income in any year net operating losses (&#8220;NOLs&#8221;) carried forward from prior years and to reduce from tax liabilities in any year R&amp;D </p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">17</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">credits carried forward from prior years.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="white-space:pre-wrap;">As of December 31, 2021, we had U.S. federal NOL carryforwards of approximately $165.8 million, of which $6.9 million have an indefinite carryforward period, with the remaining expiring in 2036, if not utilized. We also had U.S. federal R&amp;D credits carryforwards of approximately $32.1 million expiring in varying amounts between 2022 and 2041. If we were to experience a &#8220;change in ownership&#8221; under Section 382 of the Internal Revenue Code (&#8220;Section 382&#8221;), the NOL carry forward limitations under Section 382 would impose an annual limit on the amount of the future taxable income that may be offset by our NOLs generated prior to the change in ownership. The R&amp;D credits carry forward limitation under Section 383 of the Internal Revenue Code would impose an annual limit on the amount of tax liabilities that may be offset by R&amp;D credits generated prior to the change in ownership. If an ownership change were to occur, we may be unable to use a significant portion of our NOLs to offset future taxable income and/or a significant portion of R&amp;D credits to offset future tax liabilities.  </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The shares of common stock, if any, issued upon conversion of the Notes will, upon such issuance, be taken into account when determining the cumulative change in our ownership for Section 382 purposes. As a result, any conversion of the Notes that we elect to settle in shares may materially increase the risk that we could experience an ownership change for these purposes in the future.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;font-weight:bold;">The capped call transactions may affect the value of the 2027 Notes and our common stock.</span> </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">With respect to the 2027 Notes, we have entered into capped call transactions with certain option counterparties. The capped call transactions were expected generally to reduce the potential dilution upon conversion of the 2027 Notes and/or offset any cash payments we are required to make in excess of the principal amount of converted 2027 Notes, as the case may be, with such reduction and/or offset subject to a cap.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The option counterparties or their affiliates may enter into or modify hedge positions by entering into or unwinding various derivatives with respect to our common stock and/or purchasing or selling our common stock or other securities of ours in secondary market transactions prior to the maturity of the 2027 Notes (and are likely to do so during any observation period related to a conversion of the 2027 Notes). This activity could also cause or avoid an increase or a decrease in the market price of our common stock and the 2027 Notes, which could affect the ability of the noteholders to convert the 2027 Notes and, to the extent the activity occurs during any observation period related to a conversion of the 2027 Notes, it could affect the number of shares and value of the consideration that noteholders will receive upon conversion of the 2027 Notes.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;background:#ffffff;margin:0pt;"><b style="font-weight:bold;text-decoration-color:#000000;text-decoration-line:underline;text-decoration-style:solid;">Risks Associated with Operating a Global Business</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;font-weight:bold;letter-spacing:-0.1pt;">We are exposed to risks of operating businesses outside the United States. </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0.05pt 0pt 0pt 0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 6pt 0pt;">A majority of our sales are to customers located outside of the United States, which we expect to continue in the future. Our non-U.S. sales and operations are subject to risks inherent in conducting business outside the United States, many of which are beyond our control including:</p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:6pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;letter-spacing:-0.1pt;">political and social attitudes, laws, rules, regulations, and policies within countries that favor local companies over U.S. companies, including government-supported efforts to promote local competitors;</span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:6pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;letter-spacing:-0.1pt;">global trade issues and uncertainties with respect to trade policies, including tariffs, trade sanctions, and international trade disputes, and the ability to obtain required import and export licenses;</span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:6pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;letter-spacing:-0.1pt;">differing legal systems and standards of trade which may not honor our intellectual property rights and which may place us at a competitive disadvantage;</span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:6pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;letter-spacing:-0.1pt;">pressures from foreign customers and foreign governments for us to increase our operations and sourcing in the foreign country, which may necessitate the sharing of sensitive information and intellectual property rights;</span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:6pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;letter-spacing:-0.1pt;">multiple conflicting and changing governmental laws and regulations, including varying labor laws and tax regulations;</span></td></tr></table></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">18</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:6pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;letter-spacing:-0.1pt;">reliance on various information systems and information technology to conduct our business, making us vulnerable to cyberattacks by third parties or breaches due to employee error, misuse, or other causes, that could result in business disruptions, loss of or damage to our intellectual property and confidential information (and that of our customers and other business partners), reputational harm, transaction errors, processing inefficiencies, or other adverse consequences;</span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:6pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;letter-spacing:-0.1pt;">regional economic downturns, varying foreign government support, unstable political environments, and other changes in foreign economic conditions;</span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:6pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;letter-spacing:-0.1pt;">the impact of public health epidemics, such as the COVID-19 pandemic, on employees, suppliers, customers and the global economy; </span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:6pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;letter-spacing:-0.1pt;">difficulties in managing a global enterprise, including staffing, managing distributors and representatives, and repatriating cash; </span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:6pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;letter-spacing:-0.1pt;">longer sales cycles and difficulties in collecting accounts receivable; and</span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;letter-spacing:-0.1pt;">different customs and ways of doing business. </span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">These challenges, many of which are associated with sales into the Asia-Pacific region, have had and may continue to have a material adverse effect on our business. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;font-weight:bold;letter-spacing:-0.1pt;">Changes in U.S. trade policy and export controls and ongoing trade disputes between the U.S. and China have adversely affected, and may continue to adversely affect, our business, results of operations, and financial condition.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The U.S. government has enacted several changes in trade policy which have adversely affected the Company&#8217;s ability to sell and service its products to and for customers located in China and in certain other countries. These changes have included, without limitation, the elimination of license exception CIV, the implementation of new regulations governing the sale of equipment to defined &#8220;Military End Users&#8221; and for defined &#8220;Military End Uses&#8221;, and the addition of several companies to the U.S. Commerce Department&#8217;s Entity List (including Semiconductor Manufacturing International Corporation and its related entities). The effect of these changes, among others, is that U.S. companies are now required to obtain export licenses before providing commodities, software, and technology (which are<span style="letter-spacing:-0.1pt;"> </span>subject to the regulations) to customers for whom licensing requirements did not previously apply. These heightened export restrictions may also inhibit technical discussions with existing or prospective customers, negatively impacting our ability to pursue sales opportunities. The administrative processing, attendant delays and risk of ultimately not obtaining required export approvals pose a particular disadvantage to the Company relative to our non-U.S. competitors who are not required to comply with U.S. export controls. This difficulty and uncertainty has adversely affected our ability to compete for and win business from customers in China. Foreign customers affected by these and future U.S. government sanctions or threats of sanctions may respond by developing their own solutions to replace our products or by utilizing our foreign competitors&#8217; products. This &#8220;trade war&#8221; with China, together with the prospect of additional governmental action related to international sanctions and tariffs, has adversely affected, and is likely to continue to adversely affect, demand for our products and the results of our operations and financial condition.<span style="letter-spacing:-0.1pt;white-space:pre-wrap;">  </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The changes in U.S. trade policy and export controls, as well as sanctions imposed by the U.S. against certain Chinese companies, have triggered retaliatory action by China and could trigger further retaliation. In addition, China has provided, and is expected to continue to provide, significant assistance, financial and otherwise, to its domestic industries, including some of our competitors. We face increasing competition as a result of significant investment in the semiconductor industry by the Chinese government and various state-owned or affiliated entities that is intended to advance China&#39;s stated national policy objectives. In addition, the Chinese government may restrict us from participating in the China market or may prevent us from competing effectively with Chinese companies. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Further, we hold inventory of products that may be affected by the recent U.S. government actions, including potential order cancellations. While we continue to take steps to mitigate our exposure to this developing situation, if the sale of these products is delayed or we are unable to return or dispose of our inventory on favorable economic terms, we may incur additional carrying costs for the inventory or otherwise record charges associated with this inventory.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">19</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;font-weight:bold;letter-spacing:-0.1pt;">We may be unable to obtain required export licenses for the sale of our products.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Whether with respect to sales to customers located in China or otherwise, products which (i) are manufactured in the United States, (ii) incorporate controlled U.S. origin parts, technology, or software, or (iii) are based on U.S. technology, are subject to the U.S. Export Administration Regulations (&#8220;EAR&#8221;) when exported to and re-exported from international jurisdictions, in addition to the local jurisdiction&#8217;s export regulations applicable to individual shipments. Currently, our laser annealing, MOCVD, MBE and certain other systems and products are controlled for export under the EAR. Licenses or proper license exceptions may be required for the shipment of our products to certain customers or countries. Obtaining an export license or determining whether an export license exception exists often requires considerable effort by us and cooperation from the customer, which can add time to the order fulfillment process. We may be unable to obtain required export licenses or qualify for export license exceptions and, as a result, we may be unable to export products to our customers and/or meet their servicing needs. Non-compliance with the EAR or other applicable export regulations could result in a wide range of penalties including the denial of export privileges, fines, criminal penalties, and the seizure of commodities. In the event that an export regulatory body determines that any of our shipments violate applicable export regulations, we could be fined significant sums and our export capabilities could be restricted, which could have a material adverse impact on our business. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;font-weight:bold;letter-spacing:-0.1pt;">We are exposed to various risks associated with global regulatory requirements.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">As a public company with global operations, we are subject to the laws of the United States and multiple foreign jurisdictions, and the rules and regulations of various governing bodies, which may differ among jurisdictions. We are required to comply with legal and regulatory requirements pertaining to such matters as data privacy (including, for example, the European Union General Data Protection Regulation and similar laws), labor laws, immigration, customs, trade, taxes, corporate governance, conflict minerals and other social responsibility legislation, and antitrust regulations, among others. These laws and regulations, which are ever-evolving and at times complex and inconsistent, impose costs on our business and divert management time and attention from revenue-generating activities. Changes to or ambiguities in these laws and regulations may create uncertainty regarding our compliance requirements. While we intend to comply with these regulatory requirements, if we are found by a court or regulatory agency to have failed in these efforts, our business, financial condition, and results of operations could be adversely affected.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;font-weight:bold;letter-spacing:-0.1pt;">We may be exposed to liabilities under the Foreign Corrupt Practices Act and other similar laws. </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">We are subject to the Foreign Corrupt Practices Act of 1977 (&#8220;FCPA&#8221;) and other laws that prohibit improper payments or offers of payments to foreign government officials, as defined by the statute, for the purpose of obtaining or retaining business. Violations of the FCPA or similar laws or similar customer policies may result in severe criminal or civil sanctions or the loss of supplier privileges to a customer and we may be subject to other liabilities, which could negatively affect our business, financial condition, and results of operations. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;font-weight:bold;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;font-weight:bold;letter-spacing:-0.1pt;">Our operating results may be adversely affected by tightening credit markets. </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">As a global company with worldwide operations, we are subject to volatility and adverse consequences associated with economic downturns in different parts of the world. In the event of a downturn, many of our customers may delay or reduce their purchases of our products and services. If negative conditions in the credit markets prevent our customers from obtaining credit or necessary financing, product orders in these channels may decrease, which could result in lower revenue. In addition, we may experience cancellations of orders in backlog, rescheduling of customer deliveries, and attendant pricing pressures. If our suppliers face challenges in obtaining credit, in selling their products, or otherwise in operating their businesses, their ability to continue to supply materials to us may be negatively affected. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">In addition, we finance some of our sales through trade credit. In addition to ongoing credit evaluations of our customers&#8217; financial condition, we seek to mitigate our credit risk by obtaining deposits and letters of credit on certain of our sales arrangements. We could suffer significant losses if a customer whose accounts receivable we have not secured fails or is otherwise unable to pay us, or if financial institutions providing letters of credit become insolvent. A loss in collections on our accounts receivable would have a negative impact on our financial condition and results of operations. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">20</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;font-weight:bold;letter-spacing:-0.1pt;">We are subject to foreign currency exchange risks. </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">We are exposed to foreign currency exchange rate risks that are inherent in our anticipated sales, purchase commitments, and assets and liabilities that are denominated in currencies other than the U.S. dollar. Although we attempt to mitigate our exposure to fluctuations in currency exchange rates, hedging activities may not always be available or adequate to mitigate the impact of our exchange rate exposure. Failure to sufficiently hedge or otherwise manage foreign currency risks properly could materially and adversely affect our financial condition, results of operations, and liquidity.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;text-decoration-color:#000000;text-decoration-line:underline;text-decoration-style:solid;background:#ffffff;">Risks Related to Intellectual Property and Cybersecurity</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;font-weight:bold;letter-spacing:-0.1pt;">Disruptions in our information technology systems or data security incidents could result in significant financial, legal, regulatory, business, and reputational harm to us.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">We are increasingly dependent on information technology systems and infrastructure, including mobile technologies, to operate our business. In the ordinary course of our business, we collect, store, process and transmit significant amounts of sensitive information, including intellectual property, proprietary business information, personally-identifiable information of individuals, and other confidential information, including that of our customers and other business partners. It is critical that we do so in a secure manner to maintain the confidentiality, integrity, and availability of this sensitive information. We have also outsourced elements of our operations (including elements of our information technology infrastructure) to third parties, and as a result, we manage a number of third-party vendors who have access to our computer networks and our confidential information. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">All information systems are subject to disruption, breach, or failure. Potential vulnerabilities can be exploited from inadvertent or intentional actions of our employees, third-party vendors, business partners, or by malicious third parties. Attacks of this nature are increasing in their frequency, levels of persistence, sophistication, and intensity, and are being conducted by sophisticated and organized groups and individuals with a wide range of expertise and motives (including industrial espionage), including organized criminal groups, nation states, and others. In addition to the extraction of<span style="letter-spacing:-0.1pt;"> </span>sensitive information, attacks could include the deployment of harmful malware, ransomware, or other means which could affect service reliability and threaten the confidentiality, integrity, and availability of information. Significant disruptions in our information technology systems (or those of our key suppliers, contract manufacturers, distributors, sales agents and other partners) or other data security incidents could adversely affect our business operations and result in the loss or misappropriation of, and unauthorized access to, sensitive information, which could result in financial, legal, regulatory, business, and reputational harm to us. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">On November 1, 2018, we announced the discovery of an attack on our computer system by a highly-sophisticated actor. We notified law enforcement of the attack and retained forensic experts to assist with the investigation. We were not able to definitively determine the extent of the breach or the potential impact on our operations. We also were not able to definitively identify who was responsible for the attack. While we have engaged in remediation and implemented, and are continuing to implement, security measures intended to protect our information technology systems and infrastructure, there can be no assurance that such remediation and security measures will successfully prevent further security incidents. Additional information technology system disruptions, whether from attacks on our technology environment or from computer viruses, natural disasters, terrorism, war or other causes, could result in a material disruption in our business operations, force us to incur significant costs and engage in litigation, harm our reputation, and subject us to liability under laws, regulations, and contractual obligations. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;font-weight:bold;">We may be unable to effectively enforce and protect our intellectual property rights.</span><span style="font-style:italic;font-weight:bold;letter-spacing:-0.1pt;"> </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0.05pt 0pt 0pt 0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Our success as a company depends in part upon the protection of our intellectual property rights. We rely primarily on patent, copyright, trademark, and trade secret laws, as well as nondisclosure and confidentiality agreements and other methods, to protect our proprietary information, technologies, processes, and brand identity. We own various U.S. and international patents and have additional pending patent applications relating to certain of our products and technologies. The process of seeking patent protection is lengthy and expensive, and we cannot be certain that pending or future applications will result in issued patents or in patents which provide meaningful protection or commercial advantage. In addition, our intellectual property rights may be circumvented, invalidated, or rendered obsolete by the rapid pace of </p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">21</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">technological change, or through efforts by others to reverse engineer our products or design around patents that we own. Policing unauthorized use of our products and technologies is difficult and time consuming and the laws of other countries may not protect our proprietary rights as fully or as readily as U.S. laws. Given these limitations, our success will depend in part upon our ability to innovate ahead of our competitors. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">In addition, our outsourcing efforts require that we share certain portions of our technology with our outsourcing partners, which poses additional risks of infringement and trade secret misappropriation. Infringement of our rights by a third party, possibly for purposes of developing and selling competing products, could result in uncompensated lost market and revenue opportunities. Similar exposure could result in the event that former employees seek to compete with us through their unauthorized use of our intellectual property and proprietary information. We cannot be certain that the protective steps and measures we have taken will prevent the misappropriation or unauthorized use of our proprietary information and technologies, nor can we be certain that applicable intellectual property laws, regulations, and policies will not be changed in a manner detrimental to the sale or use of our products.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Litigation has been required in the past, is currently ongoing, and may be required in the future, to enforce our intellectual property rights, protect our trade secrets, and to determine the validity and scope of proprietary rights of others. As a result of any such litigation, we could lose our ability to enforce one or more patents, incur substantial costs, and jeopardize relationships with current or prospective customers or suppliers. Any action we take to enforce or defend our intellectual property rights could absorb significant management time and attention, and could otherwise negatively impact our operating results. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;font-weight:bold;">We may be subject to claims of intellectual property infringement by others. </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0.05pt 0pt 0pt 0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">We receive communications from time to time from other parties asserting the existence of patent or other rights which they believe cover certain of our products. We also periodically receive notices from customers who believe that we are required to indemnify them for damages they may incur related to infringement claims made against these customers by third parties. Our customary practice is to evaluate such assertions and to consider the available alternatives, including whether to seek a license, if appropriate. However, we cannot ensure that licenses can be obtained or, if obtained, will be on acceptable terms or that costly litigation or other administrative proceedings will not occur. If we are not able to resolve a claim, negotiate a settlement of the matter, obtain necessary licenses on commercially reasonable terms, or successfully prosecute and defend our position, our business, financial condition, and results of operations could be materially and adversely affected. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;text-decoration-line:underline;text-decoration-style:solid;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;text-decoration-color:#000000;text-decoration-line:underline;text-decoration-style:solid;">Risks Associated with Our Industry</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;font-weight:bold;">We face significant competition.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">We face significant competition throughout the world, which may increase as certain markets in which we operate continue to evolve. Some of our competitors have greater financial, engineering, manufacturing, and marketing resources than us. Other competitors are located in regions with lower labor costs and other reduced costs of operation. In addition, our ability to compete in foreign countries against local manufacturers may be hampered by nationalism, social attitudes, laws, regulations, and policies within such countries that favor local companies over U.S. companies or that are otherwise designed to promote the development and growth of local competitors. Furthermore, we face competition from smaller emerging equipment companies whose strategy is to provide a portion of the products and services we offer, with a focused approach on innovative technology for specialized markets. New product introductions or enhancements by us or our competitors could cause a decline in sales or loss of market acceptance of our existing or prior generation products. Increased competitive pressure could also lead to intensified price competition resulting in lower profit margins. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;font-weight:bold;letter-spacing:-0.1pt;">We operate in industries characterized by rapid technological change. </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Each of the industries in which we operate is subject to rapid technological change. Our ability to remain competitive depends on our ability to enhance existing products and develop and manufacture new products in a timely and cost effective manner and to accurately predict technology transitions. Our performance may be adversely affected if we are </p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">22</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">unable to accurately predict evolving market trends and related customer needs and to effectively allocate our resources among new and existing products and technologies.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The semiconductor industry, characterized by a high frequency and complexity of technology transitions and inflections (commonly referred to as &#8220;Moore&#8217;s Law&#8221;), poses unique risks and challenges. Our ability to successfully compete in this market will depend on our ability to address and manage a number of industry-specific risks, including and without limitation to the following:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:6pt;margin-top:0pt;table-layout:fixed;text-align:justify;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;letter-spacing:-0.1pt;">the heightened cost of research and development, associated with matters such as shrinking geometries, complex device structures, multiple applications and process steps, and the use of new materials; </span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:6pt;margin-top:0pt;table-layout:fixed;text-align:justify;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;letter-spacing:-0.1pt;">customer demands for shorter cycle times between order placements and product shipments, which will necessitate accurate forecasting of customer investment;</span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:6pt;margin-top:0pt;table-layout:fixed;text-align:justify;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;letter-spacing:-0.1pt;">customer demands for continuous reductions in the total cost of manufacturing system ownership, together with challenging equipment service demands and the resulting need for us to properly allocate our service resources;</span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:6pt;margin-top:0pt;table-layout:fixed;text-align:justify;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;letter-spacing:-0.1pt;">the number of types and varieties of semiconductors and number of applications across multiple substrate sizes;</span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:6pt;margin-top:0pt;table-layout:fixed;text-align:justify;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;letter-spacing:-0.1pt;">the need to reduce product development time, despite increasingly difficult technical challenges; and</span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;text-align:justify;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;letter-spacing:-0.1pt;">the importance of establishing market positions in segments with growing demand.</span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">If we fail to properly allocate appropriate resources, successfully develop and commercialize products to meet customer demand, and effectively anticipate industry trends, our business and results of operations may be adversely impacted.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="white-space:pre-wrap;">In addition, the semiconductor industry has experienced, and may continue to experience, significant consolidation, among both semiconductor manufacturers and manufacturing equipment suppliers.  Larger competitors resulting from consolidations may have certain advantages over us, including but not limited to more efficient cost structures, substantially greater financial and other resources, greater presence in key markets, and greater name recognition.  Consolidation among our competitors and integration among our customers could erode our market share, negatively impact our ability to compete, and have a material adverse effect on our business.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Whether in connection with the semiconductor industry or otherwise, we are also exposed to potential risks associated with unexpected product performance issues. Our product designs and manufacturing processes are complex and could contain unexpected product defects, especially when products are first introduced. Unexpected product performance issues could result in significant costs and damages, including increased service and warranty expenses, the need to provide product replacements or modifications, reimbursement for damages caused by our products, product recalls, related litigation, product write-offs, and disposal costs. Product defects could also result in personal injury or property damage, claims for which may exceed our existing insurance coverages. These and other costs could be substantial and our reputation could be harmed, resulting in a reduced demand for our products and a negative effect on our business, financial condition, and results of operations.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;font-weight:bold;">Certain of our sales are dependent on the demand for consumer electronic products and automobiles, which can experience significant volatility. </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The demand for semiconductors, HDDs and other devices is highly dependent on sales of consumer electronic products, such as tablets, smartphones, laptops and wearable devices. In addition, as a result of the growing automotive semiconductor market, semiconductor demand is also heavily influenced by the demand for automobiles. Factors that could affect the levels of spending on consumer electronic products and automobiles include consumer confidence, access to credit, volatility in fuel and other energy costs, conditions in the residential real estate and mortgage markets, labor and healthcare costs, and other macroeconomic factors affecting consumer spending behavior. The emergence of new or competing technologies may also affect demand for consumer electronic products. These and other factors have had and could continue to have an adverse effect on the demand for our customers&#8217; products and, in turn, on our customers&#8217; demand for our products and services. Furthermore, in the past, some of our customers have overestimated their potential for market share growth. If this growth is overestimated, we may experience cancellations of orders in </p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">23</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">backlog, rescheduling of customer deliveries, obsolete inventory, and liabilities to our suppliers for products no longer needed. <span style="letter-spacing:-0.1pt;">Alternatively, changes that result in sudden increases in demand for consumer electronic products and automobiles (for example, as a result of the reopening of the economy with the easing of COVID-19 related restrictions) may result in a shortage of parts and materials needed to manufacture our products, and attendant shipping delays (both to us and to our customers) and/or the cancellation of orders placed by our customers.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;font-weight:bold;">We have a concentrated customer base, located primarily in a limited number of regions, which operates in highly concentrated industries. </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Our customer base continues to be highly concentrated. Orders from a relatively limited number of customers have accounted for, and likely will continue to account for, a substantial portion of our net sales, which may allow customers to demand pricing and other terms less favorable to us (including extended warranties, indemnification commitments, and the obligation to continue production of older products). Customer consolidation activity involving some of our largest customers could result in an even greater concentration of our sales in the future. Management changes at key customer accounts could result in a loss of future sales due to vendor preferences or other reasons and may introduce new challenges in managing customer relationships. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">If a principal customer discontinues its relationship with us or suffers economic setbacks, our business, financial condition, and operating results could be materially and adversely affected. Our ability to increase sales in the future will depend in part upon our ability to obtain orders from new customers and we cannot be certain that we will be successful in these efforts. In addition, because a relatively small number of large manufacturers, many of whom are our customers, dominate the industries in which they operate, it may be especially difficult for us to replace these customers if we lose their business. A significant portion of orders in our backlog are orders from our principal customers. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">In addition, a substantial investment is required by customers to install and integrate capital equipment into a production line. As a result, once a manufacturer has selected a particular vendor to supply capital equipment, the manufacturer will often attempt to consolidate its other capital equipment requirements with the same vendor. Accordingly, if a customer selects a competitor&#8217;s product over ours, we could experience difficulty selling to that customer for a significant period of time. Furthermore, we typically do not have long-term contracts with our customers. As a result, our agreements with our customers do not provide assurance of future sales, and we are exposed to competitive price pressures on new orders we attempt to obtain. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Our customer base is also highly concentrated in terms of geography, and the majority of our sales are to customers located in a limited number of countries. Dependence upon sales emanating from a limited number of regions increases our risk of exposure to local difficulties and challenges, such as those associated with regional economic downturns, political instability, trade wars and other trade disruptions, fluctuating currency exchange rates, natural disasters, social unrest, pandemics, terrorism, and acts of war. Our reliance upon customer demand arising primarily from a limited number of countries could materially and adversely impact our future results of operations. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;font-weight:bold;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;font-weight:bold;letter-spacing:-0.1pt;">The cyclicality of the industries we serve directly affects our business. </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Our business depends in large part upon the capital expenditures of manufacturers in our four end-markets: Semiconductor; Compound Semiconductor; Data Storage; and Scientific&#160;&amp; Other. We are subject to the business cycles of these industries, the timing, length, and volatility of which are difficult to predict. These industries have historically been highly cyclical and have experienced significant economic downturns in the last decade. As a capital equipment provider, our revenue depends in large part on the spending patterns of these customers, who often delay expenditures or cancel or reschedule orders in reaction to variations in their businesses or general economic conditions. In downturns, we must be able to quickly and effectively align our costs with prevailing market conditions, as well as motivate and retain key employees. However, because a portion of our costs are fixed, our ability to reduce expenses quickly in response to revenue shortfalls may be limited. Downturns in one or more of these industries have had, and will likely have, a material adverse effect on our business, financial condition, and operating results. Alternatively, during periods of rapid growth, we must be able to acquire and develop sufficient manufacturing capacity to meet customer demand and attract, hire, assimilate, and retain a sufficient number of qualified people. Our net sales and operating results may be negatively affected if we fail to predict and effectively respond. </p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">24</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;font-weight:bold;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;font-weight:bold;letter-spacing:-0.1pt;">Our failure to estimate customer demand accurately could result in inventory obsolescence, liabilities to our suppliers for products no longer needed, and manufacturing interruptions or delays which could affect our ability to meet customer demand. </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The success of our business depends in part on our ability to accurately forecast and supply equipment and services that meet the rapidly changing technical and volume requirements of our customers. To meet these demands, we depend on the timely delivery of parts, components, and subassemblies from our suppliers. Uncertain worldwide economic conditions and market instabilities make it difficult for us (and our customers) to accurately forecast future product demand. If actual demand for our products is different than expected, we may purchase more or fewer parts than necessary or incur costs for canceling, postponing, or expediting delivery of parts. If we overestimate the demand for our products, excess inventory could result which could be subject to heavy price discounting, which could become obsolete, and which could subject us to liabilities to our suppliers for products no longer needed. Similarly, we may be harmed in the event that our competitors overestimate the demand for their products and engage in heavy price discounting practices as a result. In addition, the volatility of demand for capital equipment poses risks for companies in our supply chain, including challenges associated with inventory management and fluctuating working capital requirements. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><a id="_Hlk92814387"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 6pt 0pt;">Furthermore, certain key parts may be subject to long lead-times or may be obtainable only from a single supplier or limited group of suppliers, and some sourcing and assembly is provided by suppliers located in countries other than the United States. We may experience significant interruptions in our manufacturing operations, delays in our ability to timely deliver products or services, increased costs, or customer order cancellations as a result of:</p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:6pt;margin-top:0pt;table-layout:fixed;text-align:justify;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;letter-spacing:-0.1pt;">the failure or inability of our suppliers to timely deliver quality parts; </span></td></tr></table><a id="_Hlk92814261"></a><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:6pt;margin-top:0pt;table-layout:fixed;text-align:justify;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;letter-spacing:-0.1pt;">volatility in the availability </span><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;letter-spacing:-0.1pt;">and cost of materials; </span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:6pt;margin-top:0pt;table-layout:fixed;text-align:justify;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;letter-spacing:-0.1pt;">difficulties or delays in obtaining required import or export approvals; </span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:6pt;margin-top:0pt;table-layout:fixed;text-align:justify;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;letter-spacing:-0.1pt;">information technology or infrastructure failures; </span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:6pt;margin-top:0pt;table-layout:fixed;text-align:justify;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;letter-spacing:-0.1pt;">natural disasters such as earthquakes, tsunamis, fires, floods, or storms; or </span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;letter-spacing:-0.1pt;">other causes such as regional economic downturns, international trade disruptions, pandemics, political instability, terrorism, or acts of war, which could result in delayed deliveries, manufacturing inefficiencies, increased costs, or order cancellations. </span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">In addition, in the event of an unanticipated increase in demand for our products, our need to rapidly increase our business and manufacturing capacity may be limited by our working capital constraints and those of our suppliers, which may cause or exacerbate interruptions in our manufacturing and supply chain operations. Any or all of these factors could materially and adversely affect our business, financial condition, and results of operations. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;font-weight:bold;letter-spacing:-0.1pt;">We rely on a limited number of suppliers, some of whom are our sole source for particular components. </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><a id="_Hlk29565854"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="letter-spacing:-0.1pt;">Certain of the parts, components, and sub-assemblies included in our products are obtained from a single source or a limited group of suppliers. Our inability to develop alternative sources, as necessary, could result in a prolonged interruption in our ability to supply related products, a failure on our part to meet the demands our customers, and a significant increase in the price of related products, </span><span style="letter-spacing:-0.1pt;">which could adversely affect our business, financial condition, and results of operations</span><span style="letter-spacing:-0.1pt;">. </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;font-weight:bold;letter-spacing:-0.1pt;">Our failure to successfully manage our outsourcing activities or failure of our outsourcing partners to perform as anticipated could adversely affect our results of operations. </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">To better align our costs with market conditions, increase the percentage of variable costs relative to total costs, and to increase productivity and operational efficiency, we have outsourced certain functions to third parties, including the manufacture of several of our systems. While we maintain some level of internal manufacturing capability for these systems, we rely on our outsourcing partners to perform their contracted functions to allow us flexibility to adapt to changing market conditions, including periods of significantly diminished order volumes. If our outsourcing partners do not perform as required, or if our outsourcing efforts do not allow us to realize the intended cost savings and flexibility, </p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">25</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">our results of operations (and those of our third-party providers) may be adversely affected. Disputes and possibly litigation involving third party providers could result and we could suffer damage to our reputation. Dependence on contract manufacturing and outsourcing may also adversely affect our ability to bring new products to market. Although we attempt to select reputable providers, one or more of these providers could fail to perform as we expect. If we do not effectively manage our outsourcing efforts or if third party providers do not perform as anticipated, we may not realize the benefits of productivity improvements and we may experience operational difficulties, increased costs, manufacturing and installation interruptions or delays, inefficiencies in the structure and operation of our supply chain, loss of intellectual property rights, quality issues, increased product time-to-market, and an inefficient allocation of our human resources, any or all of which could materially and adversely affect our business, financial condition, and results of operations. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;text-decoration-color:#000000;text-decoration-line:underline;text-decoration-style:solid;">General Risk Factors</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;font-weight:bold;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;font-weight:bold;letter-spacing:-0.1pt;">The price of our common shares is volatile and could decrease. </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 6pt 0pt;">The stock market in general and the market for technology stocks in particular has experienced significant volatility. The trading price of our common shares has fluctuated significantly and could decline independent of the overall market, and shareholders could lose all or a substantial part of their investment. The market price of our common shares could continue to fluctuate in response to several factors, including among others:</p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:6pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;letter-spacing:-0.1pt;">difficult macroeconomic conditions, international trade disputes, unfavorable geopolitical events, and general stock market uncertainties, such as those occasioned by a global liquidity crisis and a failure of large financial institutions; </span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:6pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;letter-spacing:-0.1pt;">actual or anticipated variations in our results of operations;</span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:6pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;letter-spacing:-0.1pt;">issues associated with the performance of our products, or the performance of our internal systems such as our customer relationship management (&#8220;CRM&#8221;) system or our enterprise resource planning (&#8220;ERP&#8221;) system;</span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:6pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;letter-spacing:-0.1pt;">announcements of financial developments or technological innovations; </span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:6pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;letter-spacing:-0.1pt;">our failure to meet the performance estimates of investment research analysts; </span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:6pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;letter-spacing:-0.1pt;">changes in recommendations and financial estimates by investment research analysts, and decisions by investment research analysts to cease coverage of our Company;</span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:6pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;letter-spacing:-0.1pt;">margin trading, short sales, hedging and derivative transactions involving our common stock;</span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:6pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;letter-spacing:-0.1pt;">our failure to successfully implement cost reduction initiatives and restructuring activities, if and when required;</span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:6pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;letter-spacing:-0.1pt;">delays or difficulties in satisfying internal control evaluations and attestation requirements of Section 404 of the Sarbanes Oxley Act of 2002;</span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:6pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;letter-spacing:-0.1pt;">the commencement of, and rulings on, litigation and legal proceedings; and</span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;letter-spacing:-0.1pt;">the occurrence of major catastrophic events.</span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Securities class action litigation is often brought against a company following periods of volatility in the market price of its securities. We have defended security class actions lawsuits in the past, and are currently defending such a lawsuit now. These lawsuits, if and when brought, can result in substantial costs and a diversion of management&#8217;s attention and resources, which can adversely affect our financial condition, results of operations, and liquidity. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;font-weight:bold;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;font-weight:bold;letter-spacing:-0.1pt;">We are subject to risks of non-compliance with environmental, health, and safety regulations and sustainability requirements. </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">We are subject to environmental, health, and safety regulations in connection with our business operations, including but not limited to regulations related to the development, manufacture and use of our products, recycling and disposal of related materials, and the operation and use of our facilities and real property. Failure or inability to comply with existing or future environmental, health and safety regulations, including those relating to climate change, could result in </p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">26</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">significant remediation liabilities, the imposition of fines, the suspension or termination of research, development, or use of certain of our products, and other harm to the Company, which could have a material adverse effect on our business, financial condition, and results of operations.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">In addition to regulatory compliance, customer and investor sustainability requirements, as well as the Company&#8217;s own sustainability targets, could cause us from time to time to alter our manufacturing and other operations, potentially at significant cost to the Company as we strive to meet these requirements and targets. Any failure to meet these sustainability standards could negatively affect the demand for our products and our stock price, and&#160;may subject the Company to significant costs and liabilities and reputational harm. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">We are committed to ensuring safe working conditions, treating our employees with dignity and respect, and sourcing, manufacturing, and distributing our products in a responsible and environmentally friendly manner, and any failure on our part to do so may cause reputational and other harm for the Company. Furthermore, some of our operations involve the storage, handling, and use of hazardous materials that may pose a risk of fire, explosion, or environmental release. Such events could result from acts of terrorism, natural disasters, or operational failures and may result in injury or loss of life to our employees and others, local environmental contamination, and property damage. These events may cause a temporary shutdown of an affected facility, or portion thereof, and we could be subject to penalties or claims as a result. Each of these events could have a material adverse effect on our business, financial condition, and results of operations. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;font-weight:bold;letter-spacing:-0.1pt;">Our inability to attract, retain, and motivate employees could have a material adverse effect on our business. </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Our success depends largely on our ability to attract, retain, and motivate employees, including those in executive, managerial, engineering and marketing positions, as well as highly skilled and qualified technical personnel. Competition for qualified design and technical personnel is intense, particularly in the semiconductor industry and especially when business cycles are improving. Competitors may try to recruit, and may succeed in recruiting, our most valuable technical employees. To attract and retain key employees, we must provide competitive compensation packages, including cash and stock-based compensation, among other benefits. If the value of our stock-based incentive awards decreases, or if our total compensation packages are not viewed as competitive, our ability to attract and retain key employees could suffer. We do not have key person life insurance on any of our executives, and we may not be able to readily replace key departed employees. Our inability to attract, retain, and motivate key personnel could have a significant negative effect on our business, financial condition, and results of operations. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;font-weight:bold;letter-spacing:-0.1pt;">Changes in accounting pronouncements or taxation rules, practices, or rates may adversely affect our financial results. </span><span style="letter-spacing:-0.1pt;white-space:pre-wrap;">  </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Changes in, or newly enacted, accounting pronouncements or taxation rules, practices or rates can materially affect our revenue recognition practices, effective tax rates, results of operations, and our financial condition. In addition, varying interpretations of accounting pronouncements or taxation practices, and the questioning of our current or past practices, may adversely affect our reported financial results. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Furthermore, we are subject to income tax on a jurisdictional or legal entity basis and significant judgment is required in certain instances to allocate our taxable income to a jurisdiction and to determine the related income tax expense and benefits. Losses in one jurisdiction generally may not be used to offset profits in other jurisdictions. As a result, changes in the mix of our earnings (or losses) between jurisdictions, among other factors, could alter our overall effective income tax rate, possibly resulting in significant tax rate increases. In addition, our effective tax rate could increase if we determine that it is no longer more likely than not that we are able to realize our remaining net deferred tax assets, if we are unable to generate sufficient future taxable income in certain jurisdictions, or if we are otherwise required to increase our valuation allowances against our deferred tax assets. Furthermore, we are regularly audited by various tax authorities, and these audits may result in increased tax provisions which could negatively affect our operating results in the period or periods in which such determinations are made or changes occur.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><a id="_873154ee_2d17_4746_ad1d_5d05c7fc84f1"></a><a id="Item1BUnresolvedStaffComments_176632"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Item 1B. Unresolved Staff Comments</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">None.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">27</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;min-height:11.5pt;"><a id="_77158fcb_4a8a_4f47_9773_24dccc5463d2"></a><a id="Item2Properties_244056"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Item 2. Properties</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Our corporate headquarters and principal research and development, manufacturing, and sales and service facilities as of December 31, 2021 are as follows:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:99.82%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:26.66%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.66%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:11.02%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.66%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:56.98%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:26.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Approximate</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:56.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:26.66%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Owned&#160;Facilities&#160;Location</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.02%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Size&#160;(sq.&#160;ft.)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:56.98%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Use</b></p></td></tr><tr><td style="vertical-align:bottom;width:26.66%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Plainview, NY</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.66%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 80,000</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.66%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:56.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Corporate Headquarters; R&amp;D; Sales&#160;&amp; Service; Administration</p></td></tr><tr><td style="vertical-align:bottom;width:26.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Somerset, NJ</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 80,000</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:56.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">R&amp;D; Manufacturing; Sales&#160;&amp; Service; Administration</p></td></tr><tr><td style="vertical-align:bottom;width:26.66%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">St. Paul, MN</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.66%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 43,000</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.66%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:56.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">R&amp;D; Manufacturing; Sales&#160;&amp; Service; Administration</p></td></tr><tr><td style="vertical-align:bottom;width:26.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Somerset, NJ</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 38,000</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:56.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">R&amp;D; Sales&#160;&amp; Service; Administration</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:26.52%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:10.86%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:47.41%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.53%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.6%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:26.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Approximate</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:47.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Lease</b></p></td></tr><tr><td style="vertical-align:bottom;width:26.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Leased&#160;Facilities&#160;Location</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.86%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Size&#160;(sq.&#160;ft.)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:47.41%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Use</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.6%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Expiration</b></p></td></tr><tr><td style="vertical-align:bottom;width:26.52%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">San Jose, CA</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.86%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 100,000</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:47.41%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">R&amp;D; Manufacturing; Sales&#160;&amp; Service; Administration</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.53%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.6%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">2023</p></td></tr><tr><td style="vertical-align:bottom;width:26.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">San Jose, CA</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 100,000</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:47.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">R&amp;D; Manufacturing; Sales&#160;&amp; Service; Administration</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">2037</p></td></tr><tr><td style="vertical-align:bottom;width:26.52%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Somerset, NJ</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.86%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 57,000</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:47.41%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Warehouse</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.53%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.6%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">2027</p></td></tr><tr><td style="vertical-align:bottom;width:26.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Horsham, PA</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 49,000</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:47.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">R&amp;D; Manufacturing; Sales&#160;&amp; Service; Administration</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">2024</p></td></tr><tr><td style="vertical-align:bottom;width:26.52%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Waltham, MA</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.86%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 17,000</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:47.41%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">R&amp;D; Sales&#160;&amp; Service; Administration</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.53%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.6%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">2023</p></td></tr></table><div style="font-family:'Times New Roman','Times','serif';font-size:10.0pt;margin-bottom:0pt;margin-top:0pt;min-height:1.19em;position:relative;width:100%;"><div style="background-color:#000000;height:1pt;position:relative;top:0.6em;width:25.0%;border:none;margin:0 auto 0 0;"></div></div><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">In addition to the above, our foreign sales and service subsidiaries lease office space in China, Germany, Japan, Malaysia, Philippines, Singapore, South Korea, Thailand, Taiwan and the United Kingdom. Additionally, we are in a period of transition from our existing San Jose facility to a newly leased facility in San Jose, both of which are reflected in the table above. The new facility has approximately the same square footage as our existing San Jose, California facility, but expanded manufacturing capabilities for our laser annealing and lithography technologies. We will continue to transition to the new facility over the next few quarters. We believe our facilities are adequate to meet our current needs.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p><a id="_511a2574_1137_4097_b4c8_0b0d7068d1c8"></a><a id="Item3LegalProceedings_521596"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Item 3. Legal Proceedings</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;background:#ffff00;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The discussion under the heading <i style="font-style:italic;">Legal Proceedings</i> within Note 9, &#8220;Commitments and Contingencies&#8221; to the Consolidated Financial Statements is incorporated herein by reference.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><a id="_9d392f17_43ea_473c_a87a_55d583e0eca8"></a><a id="Item4MineSafetyDisclosures_174326"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Item 4. Mine Safety Disclosures</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Not Applicable.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">28</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><a id="_780940ab_fb67_4711_bf7e_ccfb2e69ff57"></a><a id="_Hlk535855197"></a><a id="PARTII_53402"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">PART&#160;II</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><a id="Item5MarketforRegistrantsCommonEquity_72"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:36pt;text-indent:-36pt;margin:0pt;"><b style="font-weight:bold;">Item 5. Market for Registrant&#8217;s Common Equity, Related Stockholder Matters and Issuer Purchases of Equity Securities</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Our common stock is quoted on The NASDAQ Global Select Market under the symbol &#8220;VECO.&#8221; As of February 11, 2022, there were approximately 129 stockholders of record of our common stock.<span style="font-family:'Arial','Helvetica','sans-serif';font-size:12pt;"> </span>Because many of our shares of common stock are held by brokers and other institutions on behalf of stockholders, we are unable to estimate the total number of stockholders represented by these record holders. We have not paid dividends on our common stock. The Board of Directors will determine future dividend policy based on our consolidated results of operations, financial condition, capital requirements, and other circumstances.</p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">29</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;min-height:313.51pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p><a id="StockPerformanceGraph_401970"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Stock Performance Graph</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><img src="veco-20211231x10k004.jpg" alt="Graphic" style="display:inline-block;height:313.51pt;left:0%;padding-bottom:0pt;position:relative;top:0pt;width:481.02pt;" /></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><img src="veco-20211231x10k005.jpg" alt="Graphic" style="display:inline-block;height:76.2pt;left:0%;padding-bottom:0.3pt;position:relative;top:0pt;width:431.49pt;" /></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">ASSUMES $100 INVESTED ON DEC. 31, 2016</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">ASSUMES DIVIDENDS REINVESTED</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">FISCAL YEAR ENDING DEC. 31</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:78%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:34.22%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.11%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.84%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.11%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.84%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.11%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.84%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.11%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.84%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.11%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.84%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.11%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.84%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:34.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2016</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2017</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2018</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2019</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td></tr><tr><td style="vertical-align:bottom;width:34.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Veeco Instruments Inc.</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 100.00</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 50.94</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 25.42</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 50.38</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 59.55</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 97.67</span></p></td></tr><tr><td style="vertical-align:bottom;width:34.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">S&amp;P Smallcap 600</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 100.00</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 113.23</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 103.63</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 127.24</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 141.60</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 179.58</span></p></td></tr><tr><td style="vertical-align:bottom;width:34.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">RDG MidCap Technology</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 100.00</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 99.98</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 84.06</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 104.84</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 133.78</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 112.72</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><a id="_35b93009_104c_4be0_997a_4154707f968e"></a><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p><a id="Item6SelectedFinancialData_237384"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Item 6. </b><b style="font-weight:bold;">[Reserved]</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:justify;margin:0pt 0pt 0pt 18pt;"><span style="font-size:8pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">30</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><a id="_388a0fc4_e91b_4b2a_ae4b_db397b78b2ac"></a><a id="Item7ManagementsDiscussionandAnalysis_31"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Item 7. Management&#8217;s Discussion and Analysis of Financial Condition and Results of Operations</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><a id="_Hlk93058082"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Executive Summary</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;background:#ffffff;margin:0pt;">We are an innovative manufacturer of semiconductor process equipment. Our proven ion beam, laser annealing, lithography, MOCVD and single wafer wet processing technologies play an integral role in the fabrication and packaging of advanced semiconductor devices. With equipment designed to optimize performance, yield and cost of ownership, Veeco holds leading technology positions in the markets we serve. To learn more about Veeco&#8217;s systems and service offerings, visit&#160;www.veeco.com.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="white-space:pre-wrap;">The Veeco United team executed well in a challenging environment during 2021, accomplishing a number of milestones, including:  </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">Significant progress on our San Jose capacity expansion project, including shipping the first systems out of this new facility; </span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 0pt 18pt;"><span style="font-size:10pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">Greatly increased our emphasis on placing evaluation systems with customers. We believe these evaluation systems are a final step in our customer&#8217;s selection process; </span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">Overall 28% revenue growth, led by the Semiconductor and Data Storage markets;</span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">Achieved $68 million in cash flow from operations;</span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 0pt 36pt;"><span style="font-size:10pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">Grew backlog by $74 million to $440 million;</span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">Improved our capital structure by repurchasing $112 million of our 2023 Senior Convertible Notes; </span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">Improved financial flexibility by entering into revolving credit facility of $150 million; and</span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">Improved our ESG efforts and disclosures, as reflected in our 2</span><sup style="font-family:'Times New Roman','Times','serif';font-size:7.5pt;font-style:normal;font-weight:normal;line-height:100%;top:0pt;vertical-align:top;">nd</sup><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"> Corporate Sustainability Report released in November 2021.</span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">These accomplishments enabled us to exit 2021 well positioned to execute on our growth plans for 2022.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">COVID-19 Update</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 0pt 18pt;"><span style="font-size:10pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="color:#212529;">As a result of the COVID-19 pandemic, governmental authorities have implemented and are continuing to implement numerous and constantly evolving measures to try to contain the virus, such as travel bans and restrictions, limits on gatherings, quarantines, shelter-in-place orders, vaccine mandates, and business shutdowns. We have important internal and third-party manufacturing operations in the U.S. and Singapore, and sales and support operations in China, Germany, Japan, Malaysia, Philippines, Singapore, South Korea, Thailand, Taiwan and the United Kingdom, all of which have been affected by the COVID-19 pandemic. </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="color:#212529;font-family:'&amp;quot';font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="color:#212529;">Measures providing for business shutdowns generally exclude certain essential services, and those essential services include critical infrastructure and the businesses that support that critical infrastructure. Our operations are considered part of the critical and essential infrastructure defined by applicable government authorities and, although governmental measures to contain the pandemic may be modified or extended, our manufacturing facilities remain open. </span>We believe our diverse product offerings and the critical nature of certain of our products for infrastructure insulate us, to some extent, from the adverse effects of the pandemic; however, a prolonged economic downturn will adversely affect our customers, which could have a material adverse effect on our revenues, particularly if customers from whom we derive a significant amount of revenue reduce or delay purchases to mitigate the impacts of the pandemic or fail to make payments to us on time or at all.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">31</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">We serve a global and highly interconnected customer base across the Asia-Pacific region, Europe, and North America. Our net sales to customers located outside of the United States represented approximately 62% of our total net sales for the year ended December 31, 2021, and 68% and 70% for the years ended December 31, 2020 and 2019, respectively, and we expect that net sales to customers outside the United States will continue to represent a significant percentage of our total net sales. As a result, our business will be adversely impacted by further deterioration in global economic conditions, particularly in markets in Asia and Europe. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;min-height:12.0pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">We are starting to see the effects of the macroeconomic inflationary cost environment and supply chain disruptions due to strained transportation capacity, labor shortages and absenteeism associated with COVID-19, and high global demand as markets reopen and economic stimulus drives growth. These effects include longer lead times and increased costs. We are taking proactive steps in an effort to manage the impact to our business, including buying in advance and re-sourcing components on a more frequent basis. We continue to monitor our global supply chain and may experience additional disruptions in future periods, which could cause a disruption in our ability to obtain raw materials or components required to manufacture our products.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 0pt 18pt;"><span style="font-size:10pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;background:#ffffff;margin:0pt;">Like many in our industry, we are managing through the effects of the COVID-19 pandemic. Although the full extent of the COVID-19 pandemic&#8217;s impact on our business, results of operations, supply chain, and growth can not be predicted or quantified, we proactively endeavor to identify potential challenges to our business and have been executing business continuity activities to manage disruptions in our business and continue to provide critical infrastructure to our customers. In response to the pandemic, we have taken, or intend to take, the following steps, among others, to keep our employees safe and minimize the spread of the virus, while continuing to serve our customers:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;background:#ffffff;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;background:#ffffff;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">implemented rigorous health and safety protocols at our manufacturing facilities, including extensively and frequently disinfecting our facilities, limiting access to our facilities, checking temperatures of individuals entering our facilities, staggering shifts to minimize employee overlap in gowning areas, and providing protective equipment;</span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;background:#ffffff;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;background:#ffffff;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">mandated remote working arrangements for employees who do not need to be physically present on the manufacturing floor or at customer facilities;</span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;background:#ffffff;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;background:#ffffff;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">implemented virtual meetings, customer demos, and factory acceptances to enable customers to review data and performance of their system in our factory remotely via live video;</span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;background:#ffffff;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;background:#ffffff;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">performing service and support activities remotely, when possible, to resolve customer issues and enable our customers to maintain their operations;</span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;background:#ffffff;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;background:#ffffff;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">proactively identified gaps in our supply chain and re-sourced a number of components in order to maintain our customer shipment commitments and mitigate single points of failure;</span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;background:#ffffff;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;background:#ffffff;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">monitoring our IT systems and implementing contingency and disaster recovery plans to support our IT infrastructure to ensure that our systems remain continuously operative; and</span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;background:#ffffff;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;background:#ffffff;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">continuing to monitor and, if necessary, reduce our operating expenses and capital expenditures to maintain financial flexibility and profit margins.</span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;background:#ffffff;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;background:#ffffff;margin:0pt;">While these steps have been effective so far, there could be additional challenges ahead that may impact either our operations or those of our customers, which could have a negative effect on our financial performance, including productivity and capacity impacts as a result of the ongoing pandemic. We expect to continue to implement these measures until we determine that the COVID-19 pandemic is adequately contained for purposes of our business, and we may take further actions as government authorities require or recommend or as we determine to be in the best interests of our employees, customers and suppliers. As a result, we may incur additional expenses in future periods in response to the pandemic, which could adversely affect our financial position, results of operations, or cash flows. In addition, we may revise our approach to these initiatives or take additional actions to meet the needs of our employees and customers, and mitigate the impact of the pandemic on our business.</p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">32</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;font-weight:bold;background:#ffffff;">Business Update</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;background:#ffffff;margin:0pt;">We categorize our revenue by the end-markets into which we sell.&#160;Our four end-markets are: Semiconductor; Compound Semiconductor; Data Storage; and Scientific&#160;&amp; Other.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;background:#ffffff;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;background:#ffffff;margin:0pt;"><span style="white-space:pre-wrap;">Sales in the Semiconductor market grew 49% in 2021 and were driven by our laser annealing systems for logic devices and lithography systems for Advanced Packaging. We continue to build momentum for our laser annealing solutions with advanced node logic customers. We have been winning additional application steps with leading manufacturers. We have evaluation systems at a DRAM manufacturer and are working with new and existing logic customers on their next manufacturing nodes. We also continue to deliver our laser annealing systems to trailing node logic manufacturers. Our lithography systems for Advanced Packaging are aligned with longer-term growth of FOWLP and other Advanced Packaging applications such as heterogeneous integration. Additionally, the ongoing adoption of EUV Lithography for advanced node, semiconductor manufacturing continues to drive demand for our mask blank systems. Overall, our technology and market strategy is well aligned with trends such as artificial intelligence, mobile connectivity and high performance computing that drive the Semiconductor market.  We expect continued growth in this market.</span><span style="font-size:12pt;"> </span>Finally, we have begun shipping systems from our new San Jose facility, and expect to fully transition to this new location in 2022.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;background:#ffffff;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">We address the Compound Semiconductor market with a broad portfolio of technologies including primarily Wet Processing and MOCVD, along with MBE and Ion Beam, all of which have been developed to support emerging applications such as 5G driven RF device/filter manufacturing, Gallium Nitride power electronics, and photonics applications including edge-emitting lasers and micro-LEDs. Sales in the Compound Semiconductor market were flat in 2021. However, we did experience strong growth in equipment shipments for RF Devices and we expect future growth to come from MOCVD and other system shipments in the Photonics market.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;background:#ffffff;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;background:#ffffff;margin:0pt;">Sales in the Data Storage market have been growing for several years, primarily driven by shipments of Ion Beam systems. Demand for our Ion Beam products was driven by cloud-based storage growth. In order to be successful, hard disk drive manufacturers are required to improve areal density of magnetic heads for hard disk drives and are manufacturing drives with an increasing number of heads. After multiple years of customers accelerating their capacity additions, contributing to growth in 2021 of 37%, we expect a period of slowing capacity adds by our data storage customers, resulting in an expected revenue decline in our data storage business in 2022 from recent levels. With data proliferation forecasted to continue to grow, however, we feel confident about the long-term prospects of our data storage business.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;background:#ffffff;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><a id="_Hlk62483458"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;background:#ffffff;margin:0pt;">Sales in the Scientific &amp; Other market are largely driven by sales to governments, universities, and research institutions. Revenue was slightly higher in 2021 compared to 2020, and we expect sales in this market to grow modestly in the long run, in line with GDP. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;background:#ffffff;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Overall, we enter 2022 with strong backlog in our semiconductor and compound semiconductor markets which, along with our customer engagements and order activity, lead us to expect revenue growth in the coming year as we make progress toward our long-term financial target model.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">33</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;min-height:11.5pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Results of Operations</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Years Ended December&#160;31, 2021 and 2020</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The following table presents revenue and expense line items reported in our Consolidated Statements of Operations for 2021 and 2020 and the period-over-period dollar and percentage changes for those line items. Our results of operations are reported as one business segment, represented by our single operating segment. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:50.18%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:4.32%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:4.32%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:4.98%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:50.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="7" style="vertical-align:bottom;white-space:nowrap;width:29.33%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">For&#160;the year ended&#160;December&#160;31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="3" style="vertical-align:bottom;white-space:nowrap;width:13.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Change</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;">&#160;</p></td></tr><tr><td style="vertical-align:bottom;width:50.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="3" style="vertical-align:bottom;white-space:nowrap;width:13.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="3" style="vertical-align:bottom;white-space:nowrap;width:13.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="3" style="vertical-align:bottom;white-space:nowrap;width:13.95%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Period&#160;to&#160;Period</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;">&#160;</p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="14" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:50.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:46.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(dollars&#160;in&#160;thousands)</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;">&#160;</p></td></tr><tr><td style="vertical-align:bottom;width:50.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Net sales</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 583,277</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 100</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 454,163</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 100</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 129,114</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 28</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%</p></td></tr><tr><td style="vertical-align:bottom;width:50.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Cost of sales</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 341,003</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 58</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 259,863</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 57</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 81,140</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 31</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%</p></td></tr><tr><td style="vertical-align:bottom;width:50.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Gross profit</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 242,274</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 42</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 194,300</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 43</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 47,974</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 25</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%</p></td></tr><tr><td style="vertical-align:bottom;width:50.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Operating expenses, net:</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:50.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Research and development</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 88,680</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 15</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 78,994</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 17</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 9,686</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 12</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%</p></td></tr><tr><td style="vertical-align:bottom;width:50.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Selling, general, and administrative</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 84,536</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 14</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 76,251</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 17</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 8,285</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 11</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%</p></td></tr><tr><td style="vertical-align:bottom;width:50.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Amortization of intangible assets</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 12,280</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 2</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 15,333</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 3</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="white-space:pre-wrap;"> (3,053)</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="white-space:pre-wrap;"> (20)</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%</p></td></tr><tr><td style="vertical-align:bottom;width:50.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Restructuring</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> &#8212;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> &#8212;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 1,097</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> &#8212;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="white-space:pre-wrap;"> (1,097)</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:50.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Asset impairment</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> &#8212;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> &#8212;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 281</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> &#8212;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="white-space:pre-wrap;"> (281)</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:50.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Other operating expense (income), net</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 68</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> &#8212;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="white-space:pre-wrap;"> (221)</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> &#8212;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 289</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="white-space:pre-wrap;"> (131)</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%</p></td></tr><tr><td style="vertical-align:bottom;width:50.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Total operating expenses, net</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 185,564</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 32</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 171,735</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 38</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 13,829</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 8</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%</p></td></tr><tr><td style="vertical-align:bottom;width:50.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Operating income (loss)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 56,710</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 10</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 22,565</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 5</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 34,145</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 151</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%</p></td></tr><tr><td style="vertical-align:bottom;width:50.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Interest income (expense), net</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="white-space:pre-wrap;"> (26,020)</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="white-space:pre-wrap;"> (4)</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="white-space:pre-wrap;"> (23,188)</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="white-space:pre-wrap;"> (5)</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="white-space:pre-wrap;"> (2,832)</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 12</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%</p></td></tr><tr><td style="vertical-align:bottom;width:50.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Other income (expense), net</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="white-space:pre-wrap;"> (5,010)</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="white-space:pre-wrap;"> (1)</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="white-space:pre-wrap;"> (7,841)</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="white-space:pre-wrap;"> (2)</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 2,831</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="white-space:pre-wrap;"> (36)</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%</p></td></tr><tr><td style="vertical-align:bottom;width:50.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Income (loss) before income taxes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 25,680</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 4</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="white-space:pre-wrap;"> (8,464)</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="white-space:pre-wrap;"> (2)</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 34,144</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:50.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Income tax expense (benefit)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="white-space:pre-wrap;"> (358)</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> &#8212;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="white-space:pre-wrap;"> (73)</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> &#8212;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="white-space:pre-wrap;"> (285)</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:50.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Net income (loss)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 26,038</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 4</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="white-space:pre-wrap;"> (8,391)</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="white-space:pre-wrap;"> (2)</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 34,429</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr></table><div style="font-family:'Times New Roman','Times','serif';font-size:10.0pt;margin-bottom:0pt;margin-top:0pt;min-height:1.19em;position:relative;width:100%;"><div style="background-color:#000000;height:1pt;position:relative;top:0.6em;width:25.0%;border:none;margin:0 auto 0 0;"></div></div><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Symbol';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">*</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">Not meaningful</span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Net Sales</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The following is an analysis of sales by end-market and by region:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><a id="_Hlk62556127"></a><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:51.62%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:4.32%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:4.32%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:3.95%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:51.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="7" style="vertical-align:bottom;white-space:nowrap;width:29.33%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Year ended December&#160;31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="3" style="vertical-align:bottom;white-space:nowrap;width:12.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Change</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;">&#160;</p></td></tr><tr><td style="vertical-align:bottom;width:51.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="3" style="vertical-align:bottom;white-space:nowrap;width:13.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="3" style="vertical-align:bottom;white-space:nowrap;width:13.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="3" style="vertical-align:bottom;white-space:nowrap;width:12.91%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Period&#160;to&#160;Period</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;">&#160;</p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="14" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:51.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(dollars&#160;in&#160;thousands)</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;">&#160;</p></td></tr><tr><td style="vertical-align:bottom;width:51.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Sales by end-market</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:51.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Semiconductor</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 247,051</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 43</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 165,909</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 37</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 81,142</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 49</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%</p></td></tr><tr><td style="vertical-align:bottom;width:51.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Compound Semiconductor</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 106,972</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 18</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 107,922</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 24</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="white-space:pre-wrap;"> (950)</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="white-space:pre-wrap;"> (1)</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%</p></td></tr><tr><td style="vertical-align:bottom;width:51.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Data Storage</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 168,760</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 29</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 123,288</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 26</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 45,472</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 37</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%</p></td></tr><tr><td style="vertical-align:bottom;width:51.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Scientific &amp; Other</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 60,494</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 10</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 57,044</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 13</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 3,450</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 6</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%</p></td></tr><tr><td style="vertical-align:bottom;width:51.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 583,277</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 100</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 454,163</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 100</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 129,114</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 28</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%</p></td></tr><tr><td style="vertical-align:bottom;width:51.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Sales by geographic region</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:51.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">United States</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 217,209</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 38</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 145,353</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 32</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 71,856</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 49</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%</p></td></tr><tr><td style="vertical-align:bottom;width:51.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">EMEA</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 55,129</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 9</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 73,124</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 16</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="white-space:pre-wrap;"> (17,995)</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="white-space:pre-wrap;"> (25)</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%</p></td></tr><tr><td style="vertical-align:bottom;width:51.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">China</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 105,998</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 18</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 57,589</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 13</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 48,409</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 84</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%</p></td></tr><tr><td style="vertical-align:bottom;width:51.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Rest of APAC</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 204,633</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 35</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 177,569</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 39</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 27,064</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 15</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%</p></td></tr><tr><td style="vertical-align:bottom;width:51.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Rest of World</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 308</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> &#8212;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 528</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> &#8212;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="white-space:pre-wrap;"> (220)</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="white-space:pre-wrap;"> (42)</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%</p></td></tr><tr><td style="vertical-align:bottom;width:51.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 583,277</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 100</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 454,163</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 100</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 129,114</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 28</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Total sales increased for the year ended December&#160;31, 2021 against the comparable prior year period primarily in the Semiconductor and Data Storage markets.&#160;By geography, sales increased in the United States, China, and Rest of APAC </p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">34</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><a id="_Hlk93412998"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">regions, partially offset by decreases in the EMEA region. The increase in sales in the United States was primarily driven by shipments to Data Storage and Compound Semiconductor customers, while the increase in sales in the Rest of APAC region was primarily driven by shipments to Semiconductor and Data Storage customers. The increase in sales in the China region was primarily driven by shipments to Semiconductor customers. The decrease in sales in the EMEA region was primarily driven by a decrease in shipments to Data Storage customers. Included within the Rest of APAC region for the year ended December 31, 2021 were sales in Taiwan and South Korea of $65.2 million and $50.4 million, respectively, while sales within Rest of APAC region for the year ended December 31, 2020 included sales in Singapore and Taiwan of $49.4 million and $40.0 million, respectively.&#160;We expect there will continue to be year-to-year variations in our future sales distribution across markets and geographies. In light of the global nature of our business, we are impacted by conditions in the various countries in which we and our customers operate. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Gross Profit</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">In 2021, gross profit increased compared to 2020 primarily due to an increase in sales volume, partially offset by decreased gross margins. Gross margins decreased principally due to an increase in spending as we invested in service infrastructure and capacity expansion to meet the growing demands for our semiconductor product lines and supporting our evaluation systems at customers<span style="white-space:pre-wrap;">, as well as product and region mix of sales in the period. We expect our gross margins to fluctuate each period due to product mix and other factors, while we remain committed to increasing our overall gross margins.  </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Research and Development</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The markets we serve are characterized by continuous technological development and product innovation, and we invest in various research and development initiatives to maintain our competitive advantage and achieve our growth objectives. Research and development expenses increased in 2021 compared to 2020 primarily from <span style="background:#ffffff;">personnel-related expenses as we invest in new research and development and additional applications for our technology in order to be well positioned to capitalize on emerging global megatrends and support longer term growth in Semiconductor and Compound Semiconductor markets. However, expenses as a percentage of revenue have decreased when compared to the prior period.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Selling, General, and Administrative</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Selling, general, and administrative expenses increased in 2021 compared to 2020 primarily due to higher variable expenses associated with the increase in revenue, profitability, and order in-take. However, expenses as a percentage of revenue have decreased when compared to the prior year period. <span style="background:#ffffff;">Given the uncertainty regarding the impacts on our business resulting from the COVID-19 pandemic, we are focused on the proactive management of expenses. In future periods, we may incur additional selling, general and administrative expenses to support our responses to the COVID-19 pandemic. In addition, we are currently experiencing some duplicate operating expenses for the transition from our existing facility in San Jose, California to our new leased facility, and we expect to continue to do so until this transition is completed over the next several quarters.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Amortization Expense</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Amortization expense decreased in 2021 compared to 2020 <span style="background:#ffffff;">primarily due to changes in amortization expense to reflect expected cash flows of certain intangible assets, as well as certain other intangible assets becoming fully amortized in 2021.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p><a id="_Hlk31619107"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Interest Income (Expense)</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">For the year ended December&#160;31, 2021, we recorded net interest expense of $26.0 million, compared to $23.2 million for the comparable prior period. <span style="background:#ffffff;">The increase in interest expense was primarily related to the issuance of the 2027 Notes in May 2020 and the 2025 Notes in November 2020, partially offset by the partial repurchases and exchange of the 2023 Notes in 2020 and 2021, as well as an increase in interest income of approximately $0.8 million as compared to the prior period.</span> Included in interest expense for both of the years ended December&#160;31, 2021 and 2020 were non-cash charges of </p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">35</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$13.8 million related to the amortization of debt discount and transaction costs of the 2023 Notes, 2025 Notes, and 2027 Notes. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Other Income (Expense)</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;background:#ffffff;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;background:#ffffff;margin:0pt;">On November 5, 2021, we entered into a privately negotiated note purchase agreement with a holder of our outstanding 2023 Notes, under which we agreed to repurchase and retire approximately $111.5 million in aggregate original principal amount of the 2023 Notes, with a carrying amount of $105.5 million, for cash consideration of approximately $115.6 million, and approximately $1.0 million of accrued and unpaid interest. We accounted for the partial settlement of the 2023 Notes as an extinguishment, and as such, recorded a loss on extinguishment of approximately $4.0&#160;million for the year ended December 31, 2021. In addition, we recorded a non-cash impairment charge of approximately $1.0 million related to an equity investment without a readily observable market price.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;background:#ffffff;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 10pt 0pt;">On May 18, 2020, in connection with the completion of a private offering of $125 million aggregate principal amount of 3.75% convertible senior notes, we repurchased and retired approximately $88.3 million in aggregate principal amount of our outstanding 2023 Notes, with a carrying amount of $78.1 million, for approximately $81.2 million of cash. Additionally, on November 11, 2020, we entered into a privately negotiated exchange agreement with a holder of our outstanding 2023 Notes, under which we agreed to retire $125.0 million in aggregate original principal amount of the 2023 Notes, with a carrying amount of $113.1 million, in exchange for the issuance of $132.5 million in aggregate principal amount of new 3.50% convertible senior notes. We accounted for both transactions as an extinguishment of the 2023 Notes, and as such, recorded a loss on extinguishment of approximately $7.8&#160;million for the year ended December 31, 2020.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Income Taxes</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><a id="_Hlk94881629"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The 2021 income tax benefit of $0.4 million is comprised of a $0.7 million income tax benefit related to the reduction of uncertain tax positions based upon settlements with tax authorities, partially offset by a $0.3 million income tax expense attributable to the foreign income taxes and foreign withholding taxes.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The 2020 income tax benefit of $0.1 million is comprised of: (i) a $0.8 million income tax benefit related to the amortization and subsequent sale of certain intangible assets during the year, which was partially offset by (ii) a $0.5 million income tax expense attributed to the profitable non-U.S. operations, as well as withholding tax to repatriate certain foreign earnings as a result of changes in tax laws under the 2017 Tax Act, and (iii) a $0.2 million income tax expense related primarily to U.S. tax amortization of our indefinite-lived intangible assets that is not available to offset existing deferred tax assets, as well as state and local income taxes.<span style="white-space:pre-wrap;">  </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> <span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Years Ended December&#160;31, 2020 and 2019</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">See Part II, Item 7 of our Annual Report on Form 10-K for the fiscal year ended&#160;December 31, 2020, filed with the SEC on February 22, 2021, for Management&#8217;s Discussions and Analysis of Financial Condition and Results of Operations for the fiscal year ended&#160;December 31, 2019. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Liquidity and Capital Resources</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Our cash and cash equivalents, restricted cash, and short-term investments are as follows:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:67.93%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:12.67%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:12.67%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:67.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.97%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.97%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:67.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.97%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.97%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="7" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:67.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:30%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:67.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Cash and cash equivalents</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.67%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 119,747</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.67%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 129,625</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Restricted cash</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 725</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 658</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Short-term investments</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.67%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 104,181</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.67%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 189,771</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.67%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 224,653</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.67%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 320,054</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">36</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><a id="_Hlk1126737"></a><a id="_Hlk30593248"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">A portion of our cash and cash equivalents is held by our subsidiaries throughout the world, frequently in each subsidiary&#8217;s respective functional currency, which is typically the U.S. dollar. At December&#160;31, 2021 and 2020, cash and cash equivalents of $38.3 million and $40.2 million, respectively, were held outside the United States. As of December&#160;31, 2021, we had $12.8 million of accumulated undistributed earnings generated by our non-U.S. subsidiaries for which the U.S. repatriation tax has been provided. Approximately $5.3 million of undistributed earnings would be subject to foreign withholding taxes if distributed back to the United States. We believe that our projected cash flow from operations, combined with our cash and short-term investments, will be sufficient to meet our projected working capital requirements, contractual obligations, and other cash flow needs for the next twelve months, including scheduled interest payments on our convertible senior notes.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">A summary of the cash flow activity for the year ended December&#160;31, 2021 and 2020 is as follows:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Cash Flows from Operating Activities</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:68.75%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.71%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:11.5%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.78%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:11.48%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:68.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:29.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">For&#160;the year ended&#160;December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:68.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.21%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="7" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:68.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:29.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:68.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Net income (loss)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 26,038</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="white-space:pre-wrap;"> (8,391)</span></p></td></tr><tr><td style="vertical-align:bottom;width:68.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Non-cash items:</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:68.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Depreciation and amortization</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 26,058</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 30,697</span></p></td></tr><tr><td style="vertical-align:bottom;width:68.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Non-cash interest expense</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 13,819</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 13,792</span></p></td></tr><tr><td style="vertical-align:bottom;width:68.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Deferred income taxes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="white-space:pre-wrap;"> (651)</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="white-space:pre-wrap;"> (299)</span></p></td></tr><tr><td style="vertical-align:bottom;width:68.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Share-based compensation expense</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 15,249</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 12,703</span></p></td></tr><tr><td style="vertical-align:bottom;width:68.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Loss on extinguishment of debt</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 4,029</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 7,841</span></p></td></tr><tr><td style="vertical-align:bottom;width:68.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Asset impairment</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"><span style="white-space:pre-wrap;"> &#8212;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 281</span></p></td></tr><tr><td style="vertical-align:bottom;width:68.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Impairment of equity investment</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 980</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"><span style="white-space:pre-wrap;"> &#8212;</span></p></td></tr><tr><td style="vertical-align:bottom;width:68.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Provision for bad debts</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"><span style="white-space:pre-wrap;"> &#8212;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 140</span></p></td></tr><tr><td style="vertical-align:bottom;width:68.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Changes in operating assets and liabilities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.71%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.5%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="white-space:pre-wrap;"> (17,780)</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.48%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="white-space:pre-wrap;"> (13,743)</span></p></td></tr><tr><td style="vertical-align:bottom;width:68.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"><b style="font-weight:bold;">Net cash provided by (used in) operating activities</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.71%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.5%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 67,742</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.48%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 43,021</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Net cash provided by operating activities was $67.7 million for the year ended December 31, 2021 and was due to net income of $26.0 million and adjustments for non-cash items of $59.5 million, partially offset by a decline in cash flow from operating activities due to changes in operating assets and liabilities of $17.8 million. The changes in operating assets and liabilities was largely attributable to increases in accounts receivable and inventories and decreases in deferred revenue, partially offset by increases in accounts payable and cash received for landlord reimbursements for leasehold improvements. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Net cash provided by operating activities was $43.0 million for the year ended December 31, 2020 and was due to the net loss of $8.4 million plus a decline in cash flow from operating activities due to changes in operating assets and liabilities of $13.7 million, being more than offset by adjustments for non-cash items of $65.2 million. The changes in operating assets and liabilities was largely attributable to increases in accounts receivable and inventories and decreases in deferred revenue, partially offset by increases in accounts payable and customer deposits. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Cash Flows from Investing Activities</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:68.75%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:11.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:3.01%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.8%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:11.26%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:68.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:29.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">For&#160;the year ended&#160;December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:68.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.09%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.07%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="7" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:68.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:29.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:68.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Capital expenditures</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="white-space:pre-wrap;"> (40,643)</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="white-space:pre-wrap;"> (6,802)</span></p></td></tr><tr><td style="vertical-align:bottom;width:68.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Changes in investments, net</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 83,446</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="white-space:pre-wrap;"> (74,493)</span></p></td></tr><tr><td style="vertical-align:bottom;width:68.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Proceeds from held for sale assets, net of costs to sell</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 1,725</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.8%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.26%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 9,503</span></p></td></tr><tr><td style="vertical-align:bottom;width:68.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"><b style="font-weight:bold;">Net cash provided by (used in) investing activities</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 44,528</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.8%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.26%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="white-space:pre-wrap;"> (71,792)</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The net cash provided by investing activities during the year ended December&#160;31, 2021 was attributable to the net change in investments, partially offset by capital expenditures. We experienced increased capital expenditures associated </p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">37</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">with the build-out of our newly leased facility in San Jose, California during 2021, and expect to complete this build-out over the next several quarters. In addition, we expect a period of some duplicate operating expenses until the transition from our pre-existing facility to our new facility is completed. The net cash used in investing activities during the year ended December&#160;31, 2020 was attributable to net change in investments as well as capital expenditures, partially offset by the proceeds from the sale of a non-core product line.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Cash Flows from Financing Activities</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:89.99%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:72.22%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.83%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:10.02%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.65%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:10.01%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:72.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:25.94%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">For&#160;the year ended&#160;December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:72.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.65%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.63%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="7" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:72.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:25.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:72.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Proceeds from issuance of 2027 Notes, net of issuance costs</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"><span style="white-space:pre-wrap;"> &#8212;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.65%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 120,095</span></p></td></tr><tr><td style="vertical-align:bottom;width:72.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Purchase of capped calls</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"><span style="white-space:pre-wrap;"> &#8212;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="white-space:pre-wrap;"> (10,313)</span></p></td></tr><tr><td style="vertical-align:bottom;width:72.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Repurchase of 2023 Notes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="white-space:pre-wrap;"> (115,604)</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.65%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="white-space:pre-wrap;"> (81,240)</span></p></td></tr><tr><td style="vertical-align:bottom;width:72.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Debt issuance costs</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="white-space:pre-wrap;"> (835)</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"><span style="white-space:pre-wrap;"> &#8212;</span></p></td></tr><tr><td style="vertical-align:bottom;width:72.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Settlement of equity awards, net of withholding taxes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.02%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="white-space:pre-wrap;"> (5,590)</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.65%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.01%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 556</span></p></td></tr><tr><td style="vertical-align:bottom;width:72.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"><b style="font-weight:bold;">Net cash provided by (used in) financing activities</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.02%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="white-space:pre-wrap;"> (122,029)</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.01%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 29,098</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The net cash used in financing activities for the year ended December 31, 2021 was primarily related to the cash used to repurchase $111.5 million principal amount of our 2023 Notes as well as the settlement of equity awards. The net cash provided by financing activities for the year ended December 31, 2020 was primarily related to the net cash proceeds received from the issuance of the 2027 Notes, net of issuance costs, partially offset by the cash used to repurchase the 2023 Notes as well as the purchase of capped calls. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Convertible Senior Notes and Revolving Credit Facility</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">We have $20.2 million outstanding principal balance of 2.70% convertible senior notes that bear interest at a rate of 2.70% per year, payable semiannually in arrears on January&#160;15 and July&#160;15 of each year, and mature on January&#160;15, 2023, unless earlier purchased by the Company, redeemed, or converted. In addition, we have $132.5 million outstanding principal balance of 3.50% convertible senior notes that bear interest at a rate of 3.50% per year, payable semiannually in arrears on January&#160;15 and July&#160;15 of each year, and mature on January&#160;15, 2025, unless earlier purchased by the Company, redeemed, or converted. Finally, we have $125.0 million outstanding principal balance of 3.75% convertible senior notes that bear interest at a rate of 3.75% per year, payable semiannually in arrears on June&#160;1 and December&#160;1 of each year, and mature on June&#160;1, 2027, unless earlier purchased by the Company, redeemed, or converted. The 2027 Notes are currently convertible by shareholders until March 31, 2022.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">We believe that we have sufficient capital resources and cash flows from operations to support scheduled interest payments on these debts. In addition, we have access to a $150.0 million revolving credit facility (including an ability to request an additional $75.0 million, for a total commitment of no more than $225.0 million) to provide for our working capital needs and reimburse drawings under letters of credit and for other general corporate purposes. The Company has no immediate plans to draw down on the facility, which expires in December of 2026.<span style="font-size:12pt;"> </span>Interest under the Facility is variable based on the Company&#8217;s secured net leverage ratio and is expected to bear interest based on SOFR plus a range of 150 to 225 basis points, if drawn. There is a yearly commitment fee of 25 to 35 basis points, based on the Company&#8217;s secured net leverage ratio, charged on the unused portion of the Facility.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Contractual Obligations and Commitments</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">We have commitments under certain contractual arrangements to make future payments for goods and services. These contractual arrangements secure the rights to various assets and services to be used in the future in the normal course of business. We expect to fund these contractual arrangements with cash generated from operations in the normal course of business, as well as existing cash and cash equivalents and short-term investments. In addition, we have bank guarantees and letters of credit issued by a financial institution on our behalf as needed. At December 31, 2021, outstanding bank guarantees and letters of credit totaled $2.7 million and unused bank guarantees and letters of credit of $15.2 million were available to be drawn upon.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">38</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;min-height:11.5pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The following table summarizes our contractual arrangements at December&#160;31, 2021 and the timing and effect that those commitments are expected to have on our liquidity and cash flow in future periods.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:47.81%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.93%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:47.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="14" style="vertical-align:bottom;white-space:nowrap;width:50.53%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Payments&#160;due&#160;by&#160;period</b></p></td></tr><tr><td style="vertical-align:bottom;width:47.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Less&#160;than</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">1&#160;&#8211;&#160;3</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">3&#160;&#8211;&#160;5</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">More</b><b style="font-family:'Calibri','Helvetica','sans-serif';font-weight:bold;">&#160;</b><b style="font-weight:bold;">than</b></p></td></tr><tr><td style="vertical-align:bottom;width:47.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.99%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.99%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">1&#160;year</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">years</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.99%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">years</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.99%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">5&#160;years</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="16" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:47.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="14" style="vertical-align:bottom;white-space:nowrap;width:50.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">&#160;&#160;(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:47.81%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Principal payments on long-term debt</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 277,673</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"><span style="white-space:pre-wrap;"> &#8212;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 20,173</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 132,500</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 125,000</span></p></td></tr><tr><td style="vertical-align:bottom;width:47.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Cash interest on debt</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 42,821</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 9,861</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 18,922</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 11,694</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 2,344</span></p></td></tr><tr><td style="vertical-align:bottom;width:47.81%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Operating leases</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 55,414</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 4,901</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 7,748</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 6,805</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 35,960</span></p></td></tr><tr><td style="vertical-align:bottom;width:47.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Purchase commitments<sup style="font-size:7.5pt;line-height:100%;top:0pt;vertical-align:top;">(1)</sup></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 192,975</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 192,975</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"><span style="white-space:pre-wrap;"> &#8212;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"><span style="white-space:pre-wrap;"> &#8212;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"><span style="white-space:pre-wrap;"> &#8212;</span></p></td></tr><tr><td style="vertical-align:bottom;width:47.81%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Total</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 568,883</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 207,737</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.93%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 46,843</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 150,999</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 163,304</span></p></td></tr></table><div style="font-family:'Times New Roman','Times','serif';font-size:10.0pt;margin-bottom:0pt;margin-top:0pt;min-height:1.19em;position:relative;width:100%;"><div style="background-color:#000000;height:1pt;position:relative;top:0.6em;width:25.0%;border:none;margin:0 auto 0 0;"></div></div><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Times New Roman','Times','serif';font-size:9pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">(1)</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:9pt;font-style:normal;font-weight:normal;">Purchase commitments are generally for inventory used in the manufacturing of our products. We generally do not enter into purchase commitments extending beyond one year. At December 31, 2021, we have $3.9 million of offsetting supplier deposits that will be applied against these purchase commitments.</span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Critical Accounting Policies and Estimates</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Our discussion and analysis of our financial condition and results of operations are based upon our Consolidated Financial Statements, which have been prepared in accordance with accounting principles generally accepted in the United States. The preparation of these financial statements requires a high degree of judgment, either in the application and interpretation of existing accounting literature or in the development of estimates that affect the reported amounts of assets, liabilities, revenues, and expenses. We continuously evaluate our estimates and judgments based on historical experience, as well as other factors that we believe to be reasonable under the circumstances. The results of our evaluation form the basis for making judgments about the carrying values of assets and liabilities that are not readily apparent from other sources. These estimates may change in the future if underlying assumptions or factors change, and actual results may differ from these estimates.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">We consider the following significant accounting policies to be critical because of their complexity and the high degree of judgment involved in maintaining them.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Revenue Recognition</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">We recognize revenue upon the transfer of control of the promised product or service to the customer in an amount that reflects the consideration we expect to receive in exchange for such product or service. We perform the following five steps to determine when to recognize revenue: (1) identification of the contract(s) with customers, (2) identification of the performance obligations in the contract, (3) determination of the transaction price, (4) allocation of the transaction price to the performance obligations in the contract, and (5) recognition of revenue when, or as, a performance obligation is satisfied. Judgment is used in the following areas in the determination of when to recognize revenue:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><i style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:italic;font-weight:normal;">Identification of performance obligations and allocation of contract price:</i><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"> Our contracts with customers frequently contain multiple deliverables, such as systems, upgrades, components, spare parts, installation, maintenance, and service plans. We allocate revenue to each performance obligation on a relative stand-alone selling price basis. The stand-alone selling prices are determined based on the prices at which we separately sell the systems, upgrades, components, spare parts, installation, maintenance, and service plans. For items that are not sold separately, we estimate stand-alone selling prices generally using an expected cost plus margin approach. Judgment is required to properly identify the performance obligations within a contract and to determine how the revenue should be allocated among the performance obligations. </span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><i style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:italic;font-weight:normal;">Combination of contracts:</i><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"> Judgment is required when evaluating whether multiple transactions with the same customer or related parties should be considered part of a single contract. This evaluation includes an assessment of whether the contracts or agreements are negotiated or executed within a short time frame of each other or if there are indicators that the contracts are negotiated in contemplation of one another. </span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">39</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><i style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:italic;font-weight:normal;">Variable consideration:</i><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"> Our contracts with customers generally do not contain variable consideration. In the rare instances where variable consideration is included, we estimate the amount of variable consideration and determine what portion of that, if any, has a high probability of significant subsequent revenue reversal, and if so, that amount is excluded from the transaction price. </span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><i style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:italic;font-weight:normal;">Transfer of control:</i><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"> Judgment may be required in the determination of when transfer of control occurs. This judgment may include the interpretation of commercial terms and consideration of the customer&#8217;s post-delivery acceptance provisions. Our system sales arrangements, including certain upgrades, generally include field acceptance provisions that may include functional or mechanical test procedures. When we objectively demonstrate that the criteria specified in the contractual acceptance provisions are achieved prior to delivery either through customer testing or our historical experience of our tools meeting specifications, transfer of control of the product to the customer is considered to have occurred and revenue is recognized upon system delivery since there is no substantive contingency remaining related to the acceptance provisions at that date. For new products, new applications of existing products, or for products with substantive customer acceptance provisions where we cannot objectively demonstrate that the criteria specified in the contractual acceptance provisions have been achieved prior to delivery, revenue and the associated costs are deferred. We recognize such revenue and costs upon obtaining objective evidence that the acceptance provisions can be achieved, assuming all other revenue recognition criteria have been met.</span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Any material changes in the identification of performance obligations, determination and allocation of the transaction price to performance obligations, and determination of when transfer of control occurs to the customer, could impact the timing and amount of revenue recognition, which could have a material effect on our financial condition and results of operations.&#160; </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Inventory Valuation</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Inventories are stated at the lower of cost or net realizable value, with cost determined on a first-in, first-out basis. Each quarter we assess the valuation and recoverability of all inventories: materials (raw materials, spare parts, and service inventory); work-in-process; and finished goods. Obsolete inventory or inventory in excess of our estimated usage requirements is written down to its estimated net realizable value if less than cost. We evaluate usage requirements by analyzing historical usage, anticipated demand, alternative uses of materials, and other qualitative factors. Unanticipated changes in demand for our products may require a write down of inventory that could materially affect our operating results.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Goodwill and Intangible Assets</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Goodwill is tested for impairment at least annually in the beginning of the fourth quarter of our fiscal year, which may require significant judgment. We may first perform a qualitative assessment of whether it is more likely than not that the reporting unit&#8217;s fair value is less than its carrying amount, and, if so, we then quantitatively compare the fair value of our reporting unit to its carrying amount. If the fair value of the reporting unit exceeds its carrying amount, goodwill is not impaired. If the carrying amount of the reporting unit exceeds its fair value, we then record an impairment loss equal to the difference, up to the carrying value of goodwill.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">We determine the fair value of our reporting unit based on a reconciliation of the aggregate fair value of our reporting unit to our adjusted market capitalization. The adjusted market capitalization is calculated by multiplying the average share price of our common stock for the last ten trading days prior to the measurement date by the number of outstanding common shares and adding a control premium. The determination of a reasonable control premium may require significant judgment and is estimated using historical transactions in similar industries.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The carrying values of long-lived assets, including identifiable intangible assets, are reviewed for impairment whenever events or changes in circumstances indicate that the carrying amount of an asset may not be recoverable. If circumstances require a long-lived asset or asset group be tested for possible impairment, a recoverability test is performed utilizing undiscounted cash flows expected to be generated by that asset or asset group compared to its carrying amount. If the carrying amount of the long-lived asset or asset group is not recoverable on an undiscounted cash </p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">40</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">flow basis, impairment is recognized to the extent the carrying amount exceeds its fair value. Fair value is determined through various valuation techniques including discounted cash flow models or, when available, quoted market values and third-party appraisals. It is not possible for us to predict the likelihood of any possible future impairments or, if such an impairment were to occur, the magnitude of any impairment.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Intangible assets with finite useful lives, including purchased technology, customer-related intangible assets, patents, trademarks, backlog, and software licenses, are subject to amortization over the expected period of economic benefit to us. We evaluate whether events or circumstances have occurred that warrant a revision to the remaining useful lives of intangible assets. In cases where a revision is deemed appropriate, the remaining carrying amounts of the intangible assets are amortized over the revised remaining useful life. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Intangible assets related to in-process research and development (&#8220;IPR&amp;D&#8221;) projects are considered to be indefinite-lived until the completion or abandonment of the associated R&amp;D efforts. If and when development is complete, the associated assets would be deemed long-lived and would then be amortized based on their respective estimated useful lives at that point in time. Indefinite-lived intangible assets are tested for impairment at least annually in the beginning of the fourth quarter of our fiscal year. In testing indefinite-lived intangible assets for impairment, we may first perform a qualitative assessment of whether it is more likely than not that the fair value of the indefinite-lived intangible asset is less than its carrying amount, and, if so, we then quantitatively compare the fair value of the indefinite-lived intangible asset to its carrying amount. We determine the fair value of our indefinite-lived intangible assets using a discounted cash flow method.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Income Taxes</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">We estimate our income taxes in each of the jurisdictions in which we operate. Deferred income taxes reflect the net tax effect of temporary differences between the asset and liability balances recognized for financial reporting purposes and the balances used for income tax purposes, as well as the tax effect of carry forwards. We record a valuation allowance to reduce our deferred tax assets to the amount that is more likely than not to be realized. Realization of our net deferred tax assets is dependent on future taxable income.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">We recognize the effect of income tax positions for only those positions which are estimated to more likely than not be sustained if challenged. We reflect changes in recognition or measurement in the period in which our change in judgment occurs. We record interest and penalties related to uncertain tax positions in income tax expense. Income taxes related to the global intangible low-taxed income (&#8220;GILTI&#8221;) rules are expensed as incurred.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Recent Accounting Pronouncements</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;background:#ffff00;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">We adopted ASU 2019-12 in the second quarter of 2020. Additionally, we will adopt ASU 2020-06 effective January 1, 2022. Refer to Note 1, &#8220;Significant Accounting Policies,&#8221; for additional information.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;background:#ffff00;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">We are also evaluating other pronouncements recently issued but not yet adopted. The adoption of these pronouncements is not expected to have a material impact on our consolidated financial statements.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><a id="Item7AQuantitativeandQualitative_966516"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Item 7A. Quantitative and Qualitative Disclosures about Market Risk</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Interest Rate Risk</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Our exposure to market rate risk for changes in interest rates primarily relates to our investment portfolio. We centrally manage our investment portfolios considering investment opportunities and risks, tax consequences, and overall financing strategies. Our investment portfolio includes fixed-income securities with a fair value of approximately $104.2 million at December&#160;31, 2021. These securities are subject to interest rate risk and, based on our investment portfolio at December&#160;31, 2021, a 100 basis point increase in interest rates would result in a decrease in the fair value of the portfolio of $1.0 million. While an increase in interest rates may reduce the fair value of the investment portfolio, we will not realize the losses in the Consolidated Statements of Operations unless the individual fixed-income securities are sold prior to recovery or the loss is determined to be other-than-temporary.</p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">41</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Currency Exchange Risk</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">We conduct business on a worldwide basis and, as such, a portion of our revenues, earnings, and net investments in foreign affiliates is exposed to changes in currency exchange rates. The economic impact of currency exchange rate movements is complex because such changes are often linked to variability in real growth, inflation, interest rates, governmental actions, and other factors. These changes, if material, could cause us to adjust our financing and operating strategies. Consequently, isolating the effect of changes in currency does not incorporate these other important economic factors.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Changes in currency exchange rates could affect our foreign currency denominated monetary assets and liabilities and forecasted cash flows. We may enter into&#160;monthly forward derivative contracts with the intent of mitigating a portion of this risk. We only use derivative financial instruments in the context of hedging and not for speculative purposes and have not designated our foreign exchange derivatives as hedges. Accordingly, changes in fair value from these contracts are included in &#8220;Other operating expense (income), net&#8221; in our Consolidated Statements of Operations. We execute derivative transactions with highly rated financial institutions to mitigate counterparty risk.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Our net sales to customers located outside of the United States represented approximately 62%, 68%, and 70% of our total net sales in 2021, 2020, and 2019, respectively. We expect that net sales to customers outside the United States will continue to represent a large percentage of our total net sales. Our net sales denominated in currencies other than the U.S. dollar represented approximately 3%, 5%, and 4% of total net sales in 2021, 2020, and 2019, respectively.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">A 10% change in foreign exchange rates would have an immaterial impact on the consolidated results of operations since most of our sales outside the United States are denominated in U.S. dollars.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><a id="_4f4a4ed4_c966_4a03_be26_894246fc99de"></a><a id="Item8FinancialStatements_672804"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Item 8. Financial Statements and Supplementary Data</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Our Consolidated Financial Statements are listed in the Index to Consolidated Financial Statements and Financial Statement Schedule filed as part of this Form&#160;10-K.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><a id="_4018d574_6e61_483e_b6f7_fe0b22eef181"></a><a id="Item9ChangesinandDisagreements_657227"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Item 9. Changes in and Disagreements with Accountants on Accounting and Financial Disclosure</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">None.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><a id="_efd259d4_cc73_4382_9bf2_11b54e72c457"></a><a id="Item9AControlsandProcedures_188790"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Item 9A. Controls and Procedures</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Management&#8217;s Report on Internal Control over Financial Reporting</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Our principal executive and financial officers have evaluated and concluded that our disclosure controls and procedures are effective as of December&#160;31, 2021. The disclosure controls and procedures are designed to ensure that the information required to be disclosed in this report filed under the Securities Exchange Act of 1934 is recorded, processed, summarized, and reported within the time periods specified in the Securities and Exchange Commission&#8217;s rules&#160;and forms and is accumulated and communicated to our principal executive and financial officers as appropriate to allow timely decisions regarding required disclosure.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Our principal executive and financial officers are responsible for establishing and maintaining adequate internal control over financial reporting, which is a process designed and put into effect to provide reasonable assurance regarding the reliability of financial reporting and the preparation of financial statements for external purposes in accordance with generally accepted accounting principles. Using the criteria established in the Internal Control &#8212; Integrated Framework (2013) published by the Committee of Sponsoring Organizations of the Treadway Commission (&#8220;COSO&#8221;), Management has evaluated, assessed, and concluded that internal control over financial reporting is effective as of December&#160;31, 2021.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">42</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">KPMG LLP, an independent registered public accounting firm, has audited the consolidated financial statements included in this Annual Report on Form&#160;10-K and, as part of their audit, has issued their report, included herein, on the effectiveness of our internal control over financial reporting.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Changes in Internal Control over Financial Reporting</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">During the quarter ended December&#160;31, 2021, there were no changes in internal control that have materially affected or are reasonably likely to materially affect internal control over financial reporting.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">43</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><a id="_37258a0e_7a08_4f1d_88c6_5e260d41ee37"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Report of Independent Registered Public Accounting Firm</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">To the Stockholders and Board of Directors</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Veeco Instruments Inc.:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:11pt;margin:0pt;"><i style="font-style:italic;">Opinion on Internal Control Over Financial Reporting</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:11pt;margin:0pt;">We have audited Veeco Instruments Inc. and subsidiaries&#8217; (the Company) internal control over financial reporting as of December 31, 2021, based on criteria established in Internal Control &#8211; Integrated Framework (2013) issued by the Committee of Sponsoring Organizations of the Treadway Commission. In our opinion, the Company maintained, in all material respects, effective internal control over financial reporting as of December 31, 2021, based on criteria established in Internal Control &#8211; Integrated Framework (2013) issued by the Committee of Sponsoring Organizations of the Treadway Commission.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:11pt;margin:0pt;">We also have audited, in accordance with the standards of the Public Company Accounting Oversight Board (United States) (PCAOB), the consolidated balance sheets of the Company as of December 31, 2021 and 2020, the related consolidated statements of operations, comprehensive income (loss), stockholders&#8217; equity, and cash flows for each of the years in the three-year period ended December 31, 2021, and the related notes and financial statement schedule II &#8211; valuation and qualifying accounts (collectively, the consolidated financial statements), and our report dated February 18, 2022 expressed an unqualified opinion on those consolidated financial statements.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:11pt;margin:0pt;"><i style="font-style:italic;">Basis for Opinion</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:11pt;margin:0pt;">The Company&#8217;s management is responsible for maintaining effective internal control over financial reporting and for its assessment of the effectiveness of internal control over financial reporting, included in the accompanying Management&#8217;s Report on Internal Control over Financial Reporting. Our responsibility is to express an opinion on the Company&#8217;s internal control over financial reporting based on our audit. We are a public accounting firm registered with the PCAOB and are required to be independent with respect to the Company in accordance with the U.S. federal securities laws and the applicable rules and regulations of the Securities and Exchange Commission and the PCAOB.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:11pt;margin:0pt;">We conducted our audit in accordance with the standards of the PCAOB. Those standards require that we plan and perform the audit to obtain reasonable assurance about whether effective internal control over financial reporting was maintained in all material respects. Our audit of internal control over financial reporting included obtaining an understanding of internal control over financial reporting, assessing the risk that a material weakness exists, and testing and evaluating the design and operating effectiveness of internal control based on the assessed risk. Our audit also included performing such other procedures as we considered necessary in the circumstances. We believe that our audit provides a reasonable basis for our opinion.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:11pt;margin:0pt;"><i style="font-style:italic;">Definition and Limitations of Internal Control Over Financial Reporting</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:11pt;margin:0pt;">A company&#8217;s internal control over financial reporting is a process designed to provide reasonable assurance regarding the reliability of financial reporting and the preparation of financial statements for external purposes in accordance with generally accepted accounting principles. A company&#8217;s internal control over financial reporting includes those policies and procedures that (1) pertain to the maintenance of records that, in reasonable detail, accurately and fairly reflect the transactions and dispositions of the assets of the company; (2) provide reasonable assurance that transactions are recorded as necessary to permit preparation of financial statements in accordance with generally accepted accounting principles, and that receipts and expenditures of the company are being made only in accordance with authorizations of management and directors of the company; and (3) provide reasonable assurance regarding prevention or timely detection of unauthorized acquisition, use, or disposition of the company&#8217;s assets that could have a material effect on the financial statements.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:11pt;margin:0pt;">Because of its inherent limitations, internal control over financial reporting may not prevent or detect misstatements. Also, projections of any evaluation of effectiveness to future periods are subject to the risk that controls may become inadequate because of changes in conditions, or that the degree of compliance with the policies or procedures may deteriorate.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:11pt;margin:0pt;">/s/ KPMG LLP</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:11pt;margin:0pt;">Melville, New York<br />February&#160;18, 2022</p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">44</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><a id="_29ccd37e_33ff_4ad1_881b_21d7ef6452f9"></a><a id="Item9BOtherInformation_74067"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Item 9B. Other Information</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">None.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><a id="PARTIII_80757"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">PART&#160;III</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><a id="_9f05c9df_942e_4925_9631_208a27333b13"></a><a id="Item10DirectorsExecutiveOfficers_819063"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Item 10. Directors, Executive Officers and Corporate Governance</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Information required by this Item that will appear under the headings &#8220;Governance,&#8221; &#8220;Executive Officers,&#8221; and &#8220;Delinquent Section&#160;16(a)&#160;Reports&#8221; in the definitive proxy statement to be filed with the SEC relating to our 2022 Annual Meeting of Stockholders is incorporated herein by reference.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">We have adopted a Code of Ethics for Senior Officers (the &#8220;Code&#8221;) which applies to our principal executive officer, principal financial officer, principal accounting officer or controller, or persons performing similar functions. A copy of the Code can be found on our website (www.veeco.com). We intend to disclose on our website the nature of any future amendments to and waivers of the Code that apply to the chief executive officer, principal financial officer, principal accounting officer, or persons performing similar functions. We have also adopted a Code of Conduct which applies to all of our employees, including those listed above, as well as to our directors. A copy of the Code of Conduct can be found on our website (www.veeco.com). The website address above is intended to be an inactive, textual reference only. None of the material on this website is part of this report.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><a id="_fde509bb_9a7f_453a_8244_2ddb8dc7b9a0"></a><a id="Item11ExecutiveCompensation_872731"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Item 11. Executive Compensation</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Information required by this Item that will appear under the heading &#8220;Compensation&#8221; in the definitive proxy statement to be filed with the SEC relating to our 2022 Annual Meeting of Stockholders is incorporated herein by reference.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><a id="_1045ed3b_f565_4f32_8684_5150cdfac248"></a><a id="Item12SecurityOwnershipofCertain_4330"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Item 12. Security Ownership of Certain Beneficial Owners and Management and Related Stockholder Matters</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Information required by this Item that will appear under the headings &#8220;Security Ownership of Certain Beneficial Owners and Management&#8221; and &#8220;Equity Compensation Plan Information&#8221; in the definitive proxy statement to be filed with the SEC relating to our 2022 Annual Meeting of Stockholders is incorporated herein by reference.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><a id="_9dd6c74d_54c3_49e7_965d_c1604c6628df"></a><a id="Item13CertainRelationships_454398"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Item 13. Certain Relationships and Related Transactions, and Director Independence</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Information required by this Item that will appear under the headings &#8220;Certain Relationships and Related Transactions&#8221; and &#8220;Independence of Board&#8221; in the definitive proxy statement to be filed with the SEC relating to our 2022 Annual Meeting of Stockholders is incorporated herein by reference.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><a id="_c1ff6cd2_b67a_490f_97c3_31609cf176b1"></a><a id="Item14PrincipalAccounting_254066"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Item 14. Principal Accounting Fees and Services</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Information required by this Item that will appear under the heading &#8220;Independent Auditor Fees and Other Matters&#8221; in the definitive proxy statement to be filed with the SEC relating to our 2022 Annual Meeting of Stockholders is incorporated herein by reference.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">45</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><a id="_579ecdb4_2b60_47d6_9eec_bb2b162ebe23"></a><a id="PARTIV_984349"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">PART&#160;IV</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><a id="_Hlk63110965"></a><a id="Item15ExhibitsFinancialStatement_74184"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Item 15. Exhibits, Financial Statement Schedules</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;margin:0pt;">(a)&#160;&#160;&#160;(1)&#160;&#160;The Registrant&#8217;s financial statements together with a separate table of contents are annexed hereto</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;text-indent:18pt;margin:0pt;">(2)&#160;&#160;Financial Statement Schedules are listed in the separate table of contents annexed hereto.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;text-indent:18pt;margin:0pt;">(3)&#160;&#160;Exhibits</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;margin:0pt;">Unless otherwise indicated, each of the following exhibits has been previously filed with the Securities and Exchange Commission by the Company under File No.&#160;0-16244.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:-0.0978775%;padding-left:0pt;padding-right:0pt;table-layout:auto;width:100.19%;"><tr style="height:1pt;"><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:8.47%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.69%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:43.44%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.65%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:8.76%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.63%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:10.22%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.96%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:10.36%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.86%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:9.92%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"></div></div></th></tr><tr><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Filed&#160;or</b></p></th></tr><tr><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Exhibit</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th colspan="5" style="font-weight:normal;text-align:left;vertical-align:bottom;width:32.94%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Incorporated&#160;by&#160;Reference</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.86%;border-bottom:1px solid transparent;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:9.92%;border-bottom:1px solid transparent;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Furnished</b></p></th></tr><tr><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:8.47%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Number</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.69%;border-bottom:1px solid transparent;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:43.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Exhibit&#160;Description</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.65%;border-bottom:1px solid transparent;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:8.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Form</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.63%;border-bottom:1px solid transparent;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:10.22%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Exhibit</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.96%;border-bottom:1px solid transparent;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:10.36%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Filing&#160;Date</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.86%;border-bottom:1px solid transparent;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:9.92%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Herewith</b></p></th></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">1.1</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;font-size:10pt;" href="https://www.sec.gov/Archives/edgar/data/0000103145/000110465921074134/tm2117800d1_ex1-01.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Conflict Minerals Report of Veeco Instruments Inc.</span></a></p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:1pt;margin:0pt;">&#160;</p></td><td style="vertical-align:top;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:1pt;text-align:center;margin:0pt;">&#160;<span style="font-size:10pt;">SD</span></p></td><td style="vertical-align:top;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:1pt;text-align:center;margin:0pt;">&#160;</p></td><td style="vertical-align:top;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">1.01</p></td><td style="vertical-align:top;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:1pt;text-align:center;margin:0pt;">&#160;</p></td><td style="vertical-align:top;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">5/28/2021</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">3.1</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;font-size:10pt;" href="http://www.sec.gov/Archives/edgar/data/103145/0000912057-97-028036-index.html"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Amended and Restated Certificate of Incorporation of Veeco dated December&#160;1, 1994, as amended June&#160;2, 1997 and July&#160;25, 1997.</span></a></p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10-Q</p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">3.1</p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">8/14/1997</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">3.2</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;font-size:10pt;" href="http://www.sec.gov/Archives/edgar/data/103145/000091205701007608/a2041225zex-3_2.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Amendment to Certificate of Incorporation of Veeco dated May&#160;29, 1998.</span></a></p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10-K</p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">3.2</p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">3/14/2001</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">3.3</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;font-size:10pt;" href="http://www.sec.gov/Archives/edgar/data/103145/000091205700037406/ex-3_1.txt"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Amendment to Certificate of Incorporation of Veeco dated May&#160;5, 2000.</span></a></p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10-Q</p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">3.1</p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">8/14/2000</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">3.4</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;" href="http://www.sec.gov/Archives/edgar/data/103145/000110465909060352/a09-31211_1ex3d1.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Amendment to Certificate of Incorporation of Veeco dated May&#160;16, 2002</span></a>.</p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10-Q</p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">3.1</p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10/26/2009</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">3.5</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;font-size:10pt;" href="http://www.sec.gov/Archives/edgar/data/103145/000104746911001284/a2202112zex-3_8.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Amendment to Certificate of Incorporation of Veeco dated May&#160;18, 2010.</span></a></p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10-K</p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">3.8</p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">2/24/2011</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">3.6</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;font-size:10pt;" href="https://www.sec.gov/Archives/edgar/data/103145/000110465921006663/tm213806d1_ex3-1.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Sixth Amended and Restated Bylaws of Veeco effective January 22, 2021.</span></a></p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">8-K</p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">3.1</p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">1/22/2021</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">3.7</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;font-size:10pt;" href="http://www.sec.gov/Archives/edgar/data/103145/000100547701003069/0001005477-01-003069-0002.txt"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Certificate of Designation, Preferences, and Rights of Series&#160;A Junior Participating Preferred Stock of Veeco dated March 14, 2001.</span></a></p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10-Q</p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">3.1</p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">5/9/2001</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">4.1</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;font-size:10pt;" href="http://www.sec.gov/Archives/edgar/data/103145/000110465917002827/a17-2524_1ex4d1.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Indenture, dated as of January&#160;18, 2017, by and between Veeco Instruments Inc. and U.S. Bank National Association, as Trustee (relating to the 2.70% Convertible Notes due 2023).</span></a></p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">8-K</p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">4.1</p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">1/18/2017</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">4.2</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;font-size:10pt;" href="http://www.sec.gov/Archives/edgar/data/103145/000110465917002827/a17-2524_1ex4d2.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">First Supplemental Indenture, dated as of January&#160;18, 2017, by and between Veeco Instruments Inc. and U.S. Bank National Association, as Trustee (relating to the 2.70% Convertible Notes due 2023).</span></a></p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">8-K</p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">4.2</p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">1/18/2017</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">4.3</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;font-size:10pt;" href="https://www.sec.gov/Archives/edgar/data/103145/000110465920063205/tm2020001d1_ex4-1.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Indenture, dated as of May 18, 2020, between Veeco Instruments Inc. and U.S. Bank National Association, as trustee.</span></a></p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">8-K</p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">4.1</p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">5/18/2020</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">4.4</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;" href="https://www.sec.gov/Archives/edgar/data/103145/000110465920063205/tm2020001d1_ex4-1.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Form of 3.75% Convertible Senior Notes due 2027</span></a>.</p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">8-K</p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">4.1</p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">5/18/2020</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">4.5</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;" href="https://www.sec.gov/Archives/edgar/data/103145/000110465920126397/tm2036203d1_ex4-1.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Indenture, dated as of November 17, 2020, between Veeco Instruments Inc. and U.S. Bank National Association, as trustee</span></a>.</p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">8-K</p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">4.1</p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">11/17/2020</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">4.6</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;" href="https://www.sec.gov/Archives/edgar/data/103145/000110465920126397/tm2036203d1_ex4-1.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Form of 3.50% Convertible Senior Notes due 2025</span></a>.</p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">8-K</p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">4.1</p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">11/17/2020</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">4.7</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;" href="https://www.sec.gov/Archives/edgar/data/103145/000155837020001167/ex-4d3.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Description of the Registrant&#8217;s Securities Registered Pursuant to Section 12 of the Securities Exchange Act of 1934</span></a>.</p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10-K</p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">4.3</p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">2/21/2020</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10.1</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;font-size:10pt;" href="https://www.sec.gov/Archives/edgar/data/0000103145/000110465921027481/tm217343d1_ex10-1.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Lease dated February 18, 2021 between Veeco Instruments Inc. and Trimble-Junction Ventures LLC.</span></a></p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">8-K</p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10.1</p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">2/24/2021</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr></table></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">46</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:-0.0978775%;padding-left:0pt;padding-right:0pt;table-layout:auto;width:100.19%;"><tr style="height:1pt;"><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:8.47%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.69%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:43.44%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.65%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:8.76%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.63%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:10.22%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.96%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:10.36%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.86%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:9.92%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"></div></div></th></tr><tr><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Filed&#160;or</b></p></th></tr><tr><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Exhibit</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th colspan="5" style="font-weight:normal;text-align:left;vertical-align:bottom;width:32.94%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Incorporated&#160;by&#160;Reference</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.86%;border-bottom:1px solid transparent;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:9.92%;border-bottom:1px solid transparent;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Furnished</b></p></th></tr><tr><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:8.47%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Number</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.69%;border-bottom:1px solid transparent;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:43.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Exhibit&#160;Description</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.65%;border-bottom:1px solid transparent;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:8.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Form</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.63%;border-bottom:1px solid transparent;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:10.22%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Exhibit</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.96%;border-bottom:1px solid transparent;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:10.36%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Filing&#160;Date</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.86%;border-bottom:1px solid transparent;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:9.92%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Herewith</b></p></th></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10.2*</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;font-size:10pt;" href="https://www.sec.gov/Archives/edgar/data/103145/000155837021001358/veco-20201231xex10d1.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Veeco Severance Benefits Policy, effective May 1, 2009.</span></a></p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10-K</p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10.1</p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">2/22/2021</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10.3*</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;font-size:10pt;" href="http://www.sec.gov/Archives/edgar/data/103145/000110465916125106/a16-12597_1ex10d1.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Veeco Amended and Restated 2010 Stock Incentive Plan, effective May&#160;5, 2016.</span></a></p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">S-8</p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10.1</p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">6/2/2016</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10.4*</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;font-size:10pt;" href="http://www.sec.gov/Archives/edgar/data/103145/000110465917066095/a17-20621_1ex10d1.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Veeco Amended and Restated 2010 Stock Incentive Plan, effective March&#160;3, 2017.</span></a></p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10-Q</p></td><td style="vertical-align:top;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10.1</p></td><td style="vertical-align:top;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">11/3/2017</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10.5*</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;"> <span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;" href="https://www.sec.gov/Archives/edgar/data/0000103145/000155837019004295/ex-10d10.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Veeco Instruments Inc. 2019 Stock Incentive Plan</span></a>.</p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;"> <span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;"><span style="white-space:pre-wrap;"> S-8</span></p></td><td style="vertical-align:top;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;"> <span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10.1</p></td><td style="vertical-align:top;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;"> <span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">5/7/2019</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;"> <span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10.6*</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;font-size:10pt;" href="http://www.sec.gov/Archives/edgar/data/103145/000110465917035571/a17-13884_1ex10d1.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Ultratech,&#160;Inc. 1993 Stock Option/Stock Issuance Plan (as Amended and Restated as of May&#160;31, 2011).</span></a></p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">S-8</p></td><td style="vertical-align:top;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10.1</p></td><td style="vertical-align:top;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">5/26/2017</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10.7</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;font-size:10pt;" href="https://www.sec.gov/Archives/edgar/data/103145/000110465920063205/tm2020001d1_ex10-1.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Form of Capped Call Confirmation.</span></a><a style="-sec-extract:exhibit;" href="http://www.sec.gov/Archives/edgar/data/103145/000141057815000433/a15-11903_1ex10d1.htm"></a></p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">8-K</p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10.1</p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">5/18/2020</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10.8</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;" href="https://www.sec.gov/Archives/edgar/data/103145/000110465920126397/tm2036203d1_ex10-1.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Exchange Agreement</span></a>.</p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">8-K</p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10.1</p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">11/17/2020</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10.9</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;font-size:10pt;" href="https://www.sec.gov/Archives/edgar/data/103145/000110465921135409/tm2132183d1_ex10-1.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Note Purchase Agreement, dated as of November 5, 2021, by and between Veeco Instruments Inc. and Lynrock Lake LLP.</span></a> </p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">8-K</p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10.1</p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">11/8/2021</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10.10</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;font-size:10pt;" href="https://www.sec.gov/Archives/edgar/data/103145/000110465921151696/tm2135782d1_ex10-1.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Loan and Security Agreement, dated as of December 16, 2021, by and among Veeco Instruments Inc., as borrower, the guarantors party thereto, the lenders from time to time party thereto, HSBC Bank USA, National Association, as administrative agent, collateral agent, joint lead arranger, and joint bookrunner, Barclays bank PLC, as joint lead arranger and joint bookrunner, and Santander Bank, N.A.</span></a></p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">8-K</p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10.1</p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">12/20/2021</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10.11</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;" href="https://www.sec.gov/Archives/edgar/data/103145/000110465921151696/tm2135782d1_ex10-2.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Guaranty, dated as of December 16, 2021, by the guarantors, identified therin in favor of HSBC Bank USA, National Association, as agent.</span></a> </p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">8-K</p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10.2</p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">12/20/2021</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10.12*</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;font-size:10pt;" href="http://www.sec.gov/Archives/edgar/data/103145/000110465916153803/a16-17194_1ex10d1.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Form&#160;of Notice of Performance Share Award and related terms and conditions pursuant to the Veeco 2010 Stock Incentive Plan, effective June&#160;2016.</span></a></p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10-Q</p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10.1</p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">11/1/2016</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10.13*</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;font-size:10pt;" href="http://www.sec.gov/Archives/edgar/data/103145/000110465916153803/a16-17194_1ex10d2.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Form&#160;of Notice of Critical Priorities Performance Share Award and related terms and conditions pursuant to the Veeco 2010 Stock Incentive Plan, effective June&#160;2016.</span></a></p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10-Q</p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10.2</p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">11/1/2016</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10.14*</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;font-size:10pt;" href="http://www.sec.gov/Archives/edgar/data/103145/000110465918030941/a18-8649_1ex10d1.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Form of Notice of Performance Share Award and related terms and conditions pursuant to the Veeco 2010 Stock Incentive Plan, effective March 2018.</span></a></p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10-Q</p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10.1</p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">5/7/2018</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10.15*</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;font-size:10pt;" href="http://www.sec.gov/Archives/edgar/data/103145/000110465918030941/a18-8649_1ex10d2.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Form of Notice of Restricted Stock Award and related terms and conditions pursuant to the Veeco 2010 Stock Incentive Plan, effective March 2018.</span></a></p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10-Q</p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10.2</p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">5/7/2018</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10.16*</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;font-size:10pt;" href="http://www.sec.gov/Archives/edgar/data/103145/000155837019004101/veco-20190331ex101629dff.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Form of Notice of Performance Restricted Stock Unit Award and related terms and conditions pursuant to the Veeco 2010 Stock Incentive Plan, effective March 2019</span></a>.</p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10-Q</p></td><td style="vertical-align:top;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">&#160;</p></td><td style="vertical-align:top;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10.1</p></td><td style="vertical-align:top;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">&#160;</p></td><td style="vertical-align:top;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">5/7/2019</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10.17*</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;" href="http://www.sec.gov/Archives/edgar/data/103145/000155837019004101/veco-20190331ex102789a41.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Form of Notice of Restricted Stock Award and related terms and conditions pursuant to the Veeco 2010 Stock Incentive Plan, effective March 2019 (time-based version A)</span></a>.</p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10-Q</p></td><td style="vertical-align:top;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">&#160;</p></td><td style="vertical-align:top;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10.2</p></td><td style="vertical-align:top;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">&#160;</p></td><td style="vertical-align:top;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">5/7/2019</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr></table></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">47</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:-0.0978775%;padding-left:0pt;padding-right:0pt;table-layout:auto;width:100.19%;"><tr style="height:1pt;"><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:8.47%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.69%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:43.44%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.65%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:8.76%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.63%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:10.22%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.96%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:10.36%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.86%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:9.92%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"></div></div></th></tr><tr><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Filed&#160;or</b></p></th></tr><tr><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Exhibit</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th colspan="5" style="font-weight:normal;text-align:left;vertical-align:bottom;width:32.94%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Incorporated&#160;by&#160;Reference</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.86%;border-bottom:1px solid transparent;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:9.92%;border-bottom:1px solid transparent;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Furnished</b></p></th></tr><tr><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:8.47%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Number</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.69%;border-bottom:1px solid transparent;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:43.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Exhibit&#160;Description</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.65%;border-bottom:1px solid transparent;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:8.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Form</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.63%;border-bottom:1px solid transparent;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:10.22%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Exhibit</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.96%;border-bottom:1px solid transparent;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:10.36%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Filing&#160;Date</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.86%;border-bottom:1px solid transparent;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:9.92%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Herewith</b></p></th></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10.18*</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;" href="http://www.sec.gov/Archives/edgar/data/103145/000155837019004101/veco-20190331ex1038a7c7b.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Form of Notice of Restricted Stock Award and related terms and conditions pursuant to the Veeco 2010 Stock Incentive Plan, effective March 2019 (time-based version B)</span></a>.</p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10-Q</p></td><td style="vertical-align:top;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">&#160;</p></td><td style="vertical-align:top;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10.3</p></td><td style="vertical-align:top;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">&#160;</p></td><td style="vertical-align:top;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">5/7/2019</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10.19*</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;font-size:10pt;" href="https://www.sec.gov/Archives/edgar/data/103145/000155837021001358/veco-20201231xex10d16.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Form of Notice of Performance Restricted Stock Unit Award and related terms and conditions pursuant to the Veeco 2019 Stock Incentive Plan, effective March 2020.</span></a></p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10-K</p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10.16</p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">2/22/2021</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10.20*</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;font-size:10pt;" href="https://www.sec.gov/Archives/edgar/data/103145/000155837021001358/veco-20201231xex10d17.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Form of Notice of Restricted Stock Award and related terms and conditions pursuant to the Veeco 2019 Stock Incentive Plan, effective March 2020.</span></a></p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10-K</p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10.17</p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">2/22/2021</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10.21*</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;" href="https://www.sec.gov/Archives/edgar/data/103145/000155837021005719/veco-20210331xex10d1.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Form of Notice of Performance Restricted Stock Unit Award and related terms and conditions pursuant to the Veeco 2019 Stock Incentive Plan, effective March 2021.</span></a> </p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10-Q</p></td><td style="vertical-align:top;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10.1</p></td><td style="vertical-align:top;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">5/4/2021</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10.22*</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;" href="https://www.sec.gov/Archives/edgar/data/103145/000155837021005719/veco-20210331xex10d2.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Form of Notice of Restricted Stock Award and related terms and conditions pursuant to the Veeco 2019 Stock Incentive Plan, effective March 2021</span></a>.</p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10-Q</p></td><td style="vertical-align:top;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10.2</p></td><td style="vertical-align:top;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">5/4/2021</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10.23*</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;" href="https://www.sec.gov/Archives/edgar/data/103145/000110465913080263/a13-21652_1ex10d1.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Veeco 2013 Inducement Stock Incentive Plan, effective September 26, 2013</span></a>.</p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10-Q</p></td><td style="vertical-align:top;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10.1</p></td><td style="vertical-align:top;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">11/4/2013</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10.24*</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;" href="https://www.sec.gov/Archives/edgar/data/103145/000110465916125106/a16-12597_1ex10d9.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Veeco Instruments Inc. 2016 Employee Stock Purchase Plan</span></a>.</p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">S-8</p></td><td style="vertical-align:top;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10.9</p></td><td style="vertical-align:top;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">6/2/2016</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10.25*</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;font-size:10pt;" href="https://www.sec.gov/Archives/edgar/data/0000103145/000155837019004295/ex-10d11.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">First Amendment to Veeco Instruments Inc. 2016 Employee Stock Purchase Plan.</span></a></p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">S-8</p></td><td style="vertical-align:top;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10.11</p></td><td style="vertical-align:top;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">5/7/2019</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10.26*</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;" href="https://www.sec.gov/Archives/edgar/data/0000103145/000110465921064525/tm2115964d1_ex10-1.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Second Amendment to Veeco Instruments Inc. 2016 Employee Stock Purchase Plan</span></a>.</p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">S-8</p></td><td style="vertical-align:top;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10.1</p></td><td style="vertical-align:top;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">5/11/2021</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10.27*</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;font-size:10pt;" href="http://www.sec.gov/Archives/edgar/data/103145/000110465917049341/a17-13339_1ex10d2.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Form&#160;of Amended and Restated Indemnification Agreement entered into between Veeco and each of its directors and executive officers (August&#160;2017).</span></a></p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10-Q</p></td><td style="vertical-align:top;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10.2</p></td><td style="vertical-align:top;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">8/3/2017</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10.28*</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;font-size:10pt;" href="http://www.sec.gov/Archives/edgar/data/103145/000110465914014824/a14-4581_1ex10d22.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Veeco Amended and Restated Senior Executive Change in Control Policy, effective as of January&#160;1, 2014.</span></a></p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10-K</p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10.22</p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">2/28/2014</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10.29*</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;font-size:10pt;" href="http://www.sec.gov/Archives/edgar/data/103145/000104746912001286/a2207410zex-10_30.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Letter Agreement dated January 30, 2012 between Veeco and Dr. William J. Miller.</span></a></p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10-K</p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10.30</p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">2/22/2012</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10.30*</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;" href="http://www.sec.gov/Archives/edgar/data/103145/000110465918055060/a18-24158_1ex10d2.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Letter Agreement dated August 29, 2018 between Veeco and Dr. William J. Miller.</span></a> </p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">8-K</p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10.2</p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">9/4/2018</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10.31*</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;"> <span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;font-size:10pt;" href="http://www.sec.gov/Archives/edgar/data/103145/000155837019004101/veco-20190331ex104d337f0.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Amendment dated March 22, 2019 to the Letter Agreement between Veeco and William J. Miller, Ph.D.</span></a></p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10-Q</p></td><td style="vertical-align:top;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10.4</p></td><td style="vertical-align:top;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;"> <span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">5/7/2019</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10.32*</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;font-size:10pt;" href="http://www.sec.gov/Archives/edgar/data/103145/000104746904007698/a2130460zex-10_38.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Letter Agreement dated January&#160;21, 2004 between Veeco and John P. Kiernan.</span></a></p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10-K</p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10.38</p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">3/12/2004</p></td><td style="vertical-align:middle;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10.33*</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;font-size:10pt;" href="http://www.sec.gov/Archives/edgar/data/103145/000110465906051519/a06-15642_1ex10d3.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Amendment effective June&#160;9, 2006 to Letter Agreement between Veeco and John P. Kiernan.</span></a></p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10-Q</p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10.3</p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">8/4/2006</p></td><td style="vertical-align:middle;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10.34*</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;font-size:10pt;" href="http://www.sec.gov/Archives/edgar/data/103145/000104746909002094/a2191098zex-10_40.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Amendment effective December&#160;31, 2008 to Letter Agreement between Veeco and John P. Kiernan.</span></a></p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10-K</p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10.40</p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">3/2/2009</p></td><td style="vertical-align:middle;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10.35*</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;"> <span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;" href="http://www.sec.gov/Archives/edgar/data/103145/000110465920000110/tm1928325d1_ex99-2.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Letter dated January 1, 2020 from Veeco to John P. Kiernan.</span></a><span style="white-space:pre-wrap;">   </span></p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">8-K</p></td><td style="vertical-align:top;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">99.2</p></td><td style="vertical-align:top;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">1/2/2020</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;"> <span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10.36*</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;font-size:10pt;" href="https://www.sec.gov/Archives/edgar/data/103145/000155837021001358/veco-20201231xex10d30.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Letter Agreement dated March 20, 2019 between Veeco and Adrian Devasahayam.</span></a></p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10-K</p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10.30</p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">2/22/2021</p></td><td style="vertical-align:middle;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10.37*</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;font-size:10pt;" href="https://www.sec.gov/Archives/edgar/data/103145/000155837021001358/veco-20201231xex10d31.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Letter Agreement dated August 4, 2017 between Veeco and Peter Porshnev.</span></a></p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10-K</p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10.31</p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">2/22/2021</p></td><td style="vertical-align:middle;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr></table></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">48</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;min-height:12.65pt;"><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:-0.0978775%;padding-left:0pt;padding-right:0pt;table-layout:auto;width:100.19%;"><tr style="height:1pt;"><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:8.47%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.69%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:43.44%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.65%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:8.76%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.63%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:10.22%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.96%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:10.36%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.86%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:9.92%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"></div></div></th></tr><tr><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Filed&#160;or</b></p></th></tr><tr><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Exhibit</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th colspan="5" style="font-weight:normal;text-align:left;vertical-align:bottom;width:32.94%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Incorporated&#160;by&#160;Reference</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.86%;border-bottom:1px solid transparent;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:9.92%;border-bottom:1px solid transparent;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Furnished</b></p></th></tr><tr><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:8.47%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Number</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.69%;border-bottom:1px solid transparent;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:43.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Exhibit&#160;Description</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.65%;border-bottom:1px solid transparent;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:8.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Form</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.63%;border-bottom:1px solid transparent;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:10.22%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Exhibit</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.96%;border-bottom:1px solid transparent;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:10.36%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Filing&#160;Date</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.86%;border-bottom:1px solid transparent;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:9.92%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Herewith</b></p></th></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10.38*</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;font-size:10pt;" href="https://www.sec.gov/Archives/edgar/data/103145/000155837021001358/veco-20201231xex10d32.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Letter Agreement dated March 9, 2020 between Veeco and Susan Wilkerson.</span></a></p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10-K</p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10.32</p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">2/22/2021</p></td><td style="vertical-align:middle;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">21.1</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;font-size:10pt;" href="veco-20211231xex21d1.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Subsidiaries of the Registrant.</span></a></p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">X</p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">23.1</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;font-size:10pt;" href="veco-20211231xex23d1.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Consent of KPMG LLP.</span></a></p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">X</p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">31.1</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;font-size:10pt;" href="veco-20211231xex31d1.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Certification of Chief Executive Officer pursuant to Rule&#160;13a&#8212;14(a)&#160;or Rule&#160;15d&#8212;14(a)&#160;of the Securities and Exchange Act of 1934.</span></a></p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">X</p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">31.2</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;" href="veco-20211231xex31d2.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Certification of Chief Financial Officer pursuant to Rule&#160;13a&#8212;14(a)&#160;or Rule&#160;15d&#8212;14(a)&#160;of the</span></a> <a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;" href="veco-20211231xex31d2.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Securities and Exchange Act of 1934.</span></a></p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">X</p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">32.1</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;font-size:10pt;" href="veco-20211231xex32d1.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Certification of Chief Executive Officer pursuant to 18 U.S.C. Section&#160;1350, as adopted pursuant to Section&#160;906 of the Sarbanes - Oxley Act of 2002.</span></a></p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">X</p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">32.2</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;font-size:10pt;" href="veco-20211231xex32d2.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Certification of Chief Financial Officer pursuant to 18 U.S.C. Section&#160;1350, as adopted pursuant to Section&#160;906 of the Sarbanes - Oxley Act of 2002.</span></a></p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">X</p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">101.INS</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">XBRL Instance Document &#8211; the instance document does not appear in the Interactive Data File because its XBRL tags are embedded within the Inline. XBRL document.</p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">**</p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">101.XSD</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">XBRL Schema.</p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">**</p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">101.PRE</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">XBRL Presentation.</p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">**</p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">101.CAL</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">XBRL Calculation.</p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">**</p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">101.DEF</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">XBRL Definition.</p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">**</p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">101.LAB</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">XBRL Label.</p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">**</p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">104</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Cover Page Interactive Data File (formatted as Inline XBRL and contained in Exhibit 101).</p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">**</p></td></tr></table><div style="font-family:'Times New Roman','Times','serif';font-size:11.0pt;margin-bottom:0pt;margin-top:0pt;min-height:1.19em;position:relative;width:100%;"><div style="background-color:#000000;height:1pt;position:relative;top:0.6em;width:25.0%;border:none;margin:0 auto 0 0;"></div></div><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:18pt;text-indent:-18pt;margin:0pt;">*&#160;&#160;&#160;&#160;Indicates a management contract or compensatory plan or arrangement, as required by Item 15(a)&#160;(3)&#160;of Form&#160;10-K.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:18pt;text-indent:-18pt;margin:0pt;">**&#160;&#160;Filed herewith electronically</p><a id="_ce646277_716c_4d82_bd41_1220b1cb96ae"></a><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">49</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><a id="SIGNATURES_944298"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">SIGNATURES</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Pursuant to the requirements of Section&#160;13 or 15(d)&#160;of the Securities Exchange Act of 1934, as amended, the Registrant has duly caused this report to be signed on its behalf by the undersigned, thereunto duly authorized, on February&#160;18, 2022.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:0pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:top;width:4.16%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:0pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:top;width:45.83%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:0pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Veeco Instruments Inc.</p></td></tr><tr><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:4.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:45.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:4.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">By:</p></td><td style="vertical-align:top;width:45.83%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">/s/ WILLIAM J. MILLER, Ph.D.</p></td></tr><tr><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:4.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:45.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">William J. Miller, Ph.D.</p></td></tr><tr><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:4.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:45.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><i style="font-style:italic;">Chief Executive Officer</i></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Pursuant to the requirements of the Securities Exchange Act of 1934, as amended, this report has been signed below by the following persons on behalf of the Registrant and in the capacities indicated, on February&#160;18, 2022.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:top;width:47.3%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:0pt;width:100%;"></div></div></td><td style="vertical-align:top;width:2.69%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:0pt;width:100%;"></div></div></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:0pt;width:100%;"></div></div></td></tr><tr><td style="vertical-align:top;width:47.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Signature</b></p></td><td style="vertical-align:top;width:2.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:top;width:50%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Title</b></p></td></tr><tr><td style="vertical-align:top;width:47.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:2.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:47.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt;">/s/ WILLIAM J. MILLER, Ph.D.</p></td><td style="vertical-align:top;width:2.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Chief Executive Officer and Director</p></td></tr><tr><td style="vertical-align:top;width:47.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt 0pt 0pt 12.25pt;">William J. Miller, Ph.D.</p></td><td style="vertical-align:top;width:2.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">(principal executive officer)</p></td></tr><tr><td style="vertical-align:top;width:47.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:2.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr style="height:12.25pt;"><td style="vertical-align:bottom;width:47.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt;">/s/ JOHN P. KIERNAN</p></td><td style="vertical-align:top;width:2.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Senior Vice President and Chief Financial Officer</p></td></tr><tr><td style="vertical-align:top;width:47.3%;border-top:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt 0pt 0pt 12.25pt;">John P. Kiernan</p></td><td style="vertical-align:top;width:2.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">(principal financial &amp; accounting officer)</p></td></tr><tr><td style="vertical-align:top;width:47.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt 0pt 0pt 12.25pt;"><span style="font-size:10pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:2.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:47.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt;">/s/ RICHARD A. D&#8217;AMORE</p></td><td style="vertical-align:top;width:2.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Chairman</p></td></tr><tr><td style="vertical-align:top;width:47.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt 0pt 0pt 12.25pt;">Richard A. D&#8217;Amore</p></td><td style="vertical-align:top;width:2.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:47.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:2.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:47.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt;">/s/ KATHLEEN A. BAYLESS</p></td><td style="vertical-align:top;width:2.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Director</p></td></tr><tr><td style="vertical-align:top;width:47.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt 0pt 0pt 12.25pt;">Kathleen A. Bayless</p></td><td style="vertical-align:top;width:2.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:47.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-bottom:1pt;border-bottom:1px solid #000000;margin:0pt;"><span style="white-space:pre-wrap;">/s/ SUJEET CHAND                                                         </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="white-space:pre-wrap;">     Sujeet Chand</span></p></td><td style="vertical-align:top;width:2.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Director</p></td></tr><tr><td style="vertical-align:top;width:47.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:2.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:47.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt;">/s/ GORDON HUNTER</p></td><td style="vertical-align:top;width:2.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Director</p></td></tr><tr><td style="vertical-align:top;width:47.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt 0pt 0pt 12.25pt;">Gordon Hunter</p></td><td style="vertical-align:top;width:2.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:47.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:2.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:47.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt;">/s/ KEITH D. JACKSON</p></td><td style="vertical-align:top;width:2.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Director</p></td></tr><tr><td style="vertical-align:top;width:47.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt 0pt 0pt 12.25pt;">Keith D. Jackson</p></td><td style="vertical-align:top;width:2.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:47.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:2.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:47.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt;">/s/ MARY JANE RAYMOND</p></td><td style="vertical-align:top;width:2.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Director</p></td></tr><tr><td style="vertical-align:top;width:47.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt 0pt 0pt 12.25pt;">Mary Jane Raymond</p></td><td style="vertical-align:top;width:2.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:47.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:2.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:47.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt;">/s/ PETER J. SIMONE</p></td><td style="vertical-align:top;width:2.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Director</p></td></tr><tr><td style="vertical-align:top;width:47.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt 0pt 0pt 12.25pt;">Peter J. Simone</p></td><td style="vertical-align:top;width:2.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:47.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:2.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:47.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt;">/s/ THOMAS ST. DENNIS</p></td><td style="vertical-align:top;width:2.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Director</p></td></tr><tr><td style="vertical-align:top;width:47.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt 0pt 0pt 12.25pt;">Thomas St. Dennis</p></td><td style="vertical-align:top;width:2.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 10pt 0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="display:none;font-size:12pt;line-height:0pt;margin:0pt 0pt 10pt 0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:0pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">50</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><a id="_9c1b84d5_bd79_4ef3_ac8f_e375b8befd2d"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Veeco Instruments Inc. and Subsidiaries</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Index to Consolidated Financial Statements and Financial Statement Schedule</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr><td style="vertical-align:bottom;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:4.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Page</b></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt;"><a style="font-size:10pt;" href="#REPORTOFINDEPENDENT_45553"><span style="font-style:normal;font-weight:normal;">Report of Independent Registered Public Accounting Firm</span></a><span style="font-size:10pt;"> (PCAOB ID</span><span style="font-size:8pt;"> </span><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" name="dei:AuditorFirmId" id="Narr_OYYFIVYJG0WxHoFpKgi1qA"><span style="font-size:10pt;">185</span></ix:nonNumeric><span style="font-size:10pt;">)</span></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">F-2</p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt;"><a style="font-size:10pt;" href="#ConsolidatedBalanceSheets_50095"><span style="font-style:normal;font-weight:normal;">Consolidated Balance Sheets at December 31, 2021 and 2020</span></a></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">F-4</p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt;"><a style="font-size:10pt;" href="#StatementsofOperations_198983"><span style="font-style:normal;font-weight:normal;">Consolidated Statements of Operations for the years ended December&#160;31, 2021, 2020, and 2019</span></a></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">F-5</p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt;"><a style="font-size:10pt;" href="#ComprehensiveIncomeLoss_794066"><span style="font-style:normal;font-weight:normal;">Consolidated Statements of Comprehensive Income (Loss) for the years ended December&#160;31, 2021, 2020, and 2019</span></a></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">F-6</p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt;"><a style="font-size:10pt;" href="#StockholdersEquity_323287"><span style="font-style:normal;font-weight:normal;">Consolidated Statements of Stockholders&#8217; Equity for the years ended December&#160;31, 2021, 2020, and 2019</span></a></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">F-7</p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt;"><a style="font-size:10pt;" href="#CashFlows_488340"><span style="font-style:normal;font-weight:normal;">Consolidated Statements of Cash Flows for the years ended December&#160;31, 2021, 2020, and 2019</span></a></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">F-8</p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt;"><a style="font-size:10pt;" href="#Note1SignificantAccountingPolicies_23831"><span style="font-style:normal;font-weight:normal;">Notes to Consolidated Financial Statements</span></a></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">F-9</p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt;"><a style="font-size:10pt;" href="#ScheduleiivaluationAndQualifyingA_003634"><span style="font-style:normal;font-weight:normal;">Schedule II&#8212;Valuation and Qualifying Accounts</span></a></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">S-1</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">F-1</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><a id="_63e7fe65_12fd_4429_b40d_dbe2e75da8bb"></a><a id="REPORTOFINDEPENDENT_45553"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Report of Independent Registered Public Accounting F</b><b style="font-weight:bold;">irm</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">To the Stockholders and Board of Directors</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Veeco Instruments Inc.:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Opinion on the Consolidated Financial Statements</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">We have audited the accompanying consolidated balance sheets of Veeco Instruments Inc. and subsidiaries (the Company) as of December 31, 2021 and 2020, the related consolidated statements of operations, comprehensive income (loss), stockholders&#8217; equity, and cash flows for each of the years in the three-year period ended December 31, 2021, and the related notes and financial statement schedule II &#8211; valuation and qualifying accounts (collectively, the consolidated financial statements). In our opinion, the consolidated financial statements present fairly, in all material respects, the financial position of the Company as of December 31, 2021 and 2020, and the results of its operations and its cash flows for each of the years in the three-year period ended December 31, 2021, in conformity with U.S. generally accepted accounting principles.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">We also have audited, in accordance with the standards of the Public Company Accounting Oversight Board (United States) (PCAOB), the Company&#8217;s internal control over financial reporting as of December 31, 2021, based on criteria established in Internal Control &#8211; Integrated Framework (2013) issued by the Committee of Sponsoring Organizations of the Treadway Commission, and our report dated February 18, 2022 expressed an unqualified opinion on the effectiveness of the Company&#8217;s internal control over financial reporting. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Basis for Opinion</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">These consolidated financial statements are the responsibility of the Company&#8217;s management. Our responsibility is to express an opinion on these consolidated financial statements based on our audits. We are a public accounting firm registered with the PCAOB and are required to be independent with respect to the Company in accordance with the U.S. federal securities laws and the applicable rules and regulations of the Securities and Exchange Commission and the PCAOB.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">We conducted our audits in accordance with the standards of the PCAOB. Those standards require that we plan and perform the audit to obtain reasonable assurance about whether the consolidated financial statements are free of material misstatement, whether due to error or fraud. Our audits included performing procedures to assess the risks of material misstatement of the consolidated financial statements, whether due to error or fraud, and performing procedures that respond to those risks. Such procedures included examining, on a test basis, evidence regarding the amounts and disclosures in the consolidated financial statements. Our audits also included evaluating the accounting principles used and significant estimates made by management, as well as evaluating the overall presentation of the consolidated financial statements. We believe that our audits provide a reasonable basis for our opinion.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Critical Audit Matter</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The critical audit matter communicated below is a matter arising from the current period audit of the consolidated financial statements that was communicated or required to be communicated to the audit committee and that: (1) relates to accounts or disclosures that are material to the consolidated financial statements and (2) involved our especially challenging, subjective, or complex judgments. The communication of a critical audit matter does not alter in any way our opinion on the consolidated financial statements, taken as a whole, and we are not, by communicating the critical audit matter below, providing a separate opinion on the critical audit matter or on the accounts or disclosures to which it relates.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="display:inline-block;text-indent:0pt;width:9pt;"></span><i style="font-size:10pt;font-style:italic;">Assessment of the value of excess and obsolete inventory</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 9pt;">As discussed in Note 1 of the consolidated financial statements, the Company assesses the valuation of its inventories, including materials, work-in-process, and finished goods, each reporting period. Obsolete inventory or inventory in excess of the Company&#8217;s estimated usage requirement is written down to its estimated net realizable value if less than </p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">F-2</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 9pt;">cost. Estimates of usage include the Company&#8217;s analysis of anticipated demand, possible alternative uses of its inventory, as well as other qualitative factors. As of December 31, 2021, the Company&#8217;s inventories totaled $170.9 million.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 9pt;">We identified the assessment of the value of excess and obsolete inventory as a critical audit matter. Subjective auditor judgment was required to evaluate the Company&#8217;s estimates of anticipated demand, which can be affected by market and economic conditions outside the Company&#8217;s control.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 9pt;">The primary procedures we performed to address this critical audit matter included the following. We evaluated the design and tested the operating effectiveness of certain internal controls related to the Company&#8217;s inventory valuation process. This included controls related to the development of estimates of anticipated demand of inventory. We evaluated current year estimates of anticipated demand used to assess the value of excess and obsolete inventory by comparing them to historical sales volumes and inspecting documentation when they differed significantly. For certain inventory items, we compared the prior year estimate of anticipated demand to actual results to assess the Company&#8217;s ability to accurately forecast.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">/s/ </span><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" name="dei:AuditorName" id="Narr_ppaLf6MAeUO4ssIqIYe-ww"><span style="font-size:10pt;">KPMG LLP</span></ix:nonNumeric></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">We have served as the Company&#8217;s auditor since 2015.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" name="dei:AuditorLocation" id="Narr_giFxTEB8x0SXBq_0OpGOcQ"><span style="font-size:10pt;">Melville, New York</span></ix:nonNumeric></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">February&#160;18, 2022</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="display:none;font-size:12pt;line-height:0pt;text-align:center;margin:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:0pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">F-3</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><a id="_c899803a_0e61_435d_93a9_defd0a4e2feb"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Veeco Instruments Inc. and Subsidiaries</b></p><a id="ConsolidatedBalanceSheets_50095"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Consolidated Balance Sheets </b></p><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in thousands, except share amounts)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><a id="_b85bde41_9d4e_44ff_8b01_492828f70e84"></a><a id="Tc_reJge9fESUCoGR9BrIZX4A_1_2"></a><a id="Tc_h0BFT2qyWUyQaKQxnmutzA_1_5"></a><a id="Tc_a4LJybJ4zUqb1nD6Dt-09A_2_2"></a><a id="Tc_4-h1U4Ymmk-g5ma6EFMR-A_2_5"></a><a id="Tc_TEYyko_9vkyvwZpd5l0xog_3_0"></a><a id="Tc_ROZ2-MtcQ06T2ijS18QbcQ_4_0"></a><a id="Tc_jtNU5DBx_k--MjA2i89ZnA_5_0"></a><a id="Tc_Hm4paC5-GESJD1lXkBm_7g_5_2"></a><a id="Tc_tZe0IGoQoEaz6cGyjBaIuA_5_5"></a><a id="Tc_SsgQJAsSiE2JP0B8M2iDjg_6_0"></a><a id="Tc_HenzSPITXE2UCfFog7aPhw_7_0"></a><a id="Tc_9agyLSthVUW8peBmSgpr2A_8_0"></a><a id="Tc_dz9LJQPCxUidv8ue72eX-w_9_0"></a><a id="Tc_GZ0QbfOZTUezOBUnRhmgvA_10_0"></a><a 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id="Tc_chxgmeEti0eckAak5PX5CQ_31_0"></a><a id="Tc_zSDLN4KDHkiiyoDhxv92Ng_32_0"></a><a id="Tc_Iqi-fkWKTUy1cBgOZ7sNhQ_33_0"></a><a id="Tc_wxKKZCrZwkOauyVnEPcU8A_34_0"></a><a id="Tc_j12DI2MH5kGSKXTeM9Bicg_35_0"></a><a id="_aff283e7_7ee7_4b9b_ad33_0da1c997b134"></a><a id="_aff283e7_7ee7_4b9b_ad33_0da1c997b134_2"></a><a id="_aff283e7_7ee7_4b9b_ad33_0da1c997b134_3"></a><a id="Tc_4T3haL2Yj0yQn0W--J00SA_36_0"></a><a id="Tc_a4af-pd5Fk-S3Iuc_Tcp2w_37_0"></a><a id="Tc_voDj8Y1Dbk688v5Ckiv5UA_38_0"></a><a id="Tc_j4Zchowcxka50rBPOA5cvw_39_0"></a><a id="Tc_ig-lonRSKUG1v67FsD2Xxw_40_0"></a><a id="Tc_D5nWJScgDEaor25aYm3X-A_41_0"></a><a id="Tc_36jKL-e37kOH-bJpkJYmiQ_41_2"></a><a id="Tc_X1FkKHzfhEyCjT9N-U_apg_41_5"></a><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:74.49%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:74.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:74.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.67%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.67%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td></tr><tr><td style="vertical-align:bottom;width:74.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Assets</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.67%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:74.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Current assets:</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:74.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Cash and cash equivalents</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CashAndCashEquivalentsAtCarryingValue" scale="3" id="Tc_ehqgxvKyHEeqzKmRsunkAw_5_3">119,747</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CashAndCashEquivalentsAtCarryingValue" scale="3" id="Tc_1DyK7HOzFk24LpSbvcP5iA_5_6">129,625</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:74.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Restricted cash</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RestrictedCashAndCashEquivalentsAtCarryingValue" scale="3" id="Tc_C45tjNtd9UGlQsQWO6YICw_6_3">725</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RestrictedCashAndCashEquivalentsAtCarryingValue" scale="3" id="Tc_W5GWHz7Pb0GlSVPIj3O3tA_6_6">658</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:74.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Short-term investments</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AvailableForSaleSecuritiesDebtSecuritiesCurrent" scale="3" id="Tc_mWeQUu-cRE-0ZghNwfgbCQ_7_3">104,181</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AvailableForSaleSecuritiesDebtSecuritiesCurrent" scale="3" id="Tc_u7W-DtOybEKvAH-OYYYK0g_7_6">189,771</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:74.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Accounts receivable, net</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AccountsReceivableNetCurrent" scale="3" id="Tc_CnoZvWskoEajPNvt2Q3iIQ_8_3">109,609</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AccountsReceivableNetCurrent" scale="3" id="Tc_53MFndU5iUiFEckipaf31A_8_6">79,991</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:74.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Contract assets</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction 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style="vertical-align:bottom;white-space:nowrap;width:9.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InventoryNet" scale="3" id="Tc_Ysuy8jz110m87koRLsUOPw_10_3">170,858</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InventoryNet" scale="3" id="Tc_5kI1fGwg0UOyAieep1pKmw_10_6">145,906</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:74.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Deferred cost of sales</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredCostsCurrent" scale="3" id="Tc_Cu33_qtFPEmgdttS0BmLcA_11_3">346</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredCostsCurrent" scale="3" id="Tc_RW9bq-gDTE-X2-AcK49FnA_11_6">433</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:74.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Prepaid expenses and other current assets</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PrepaidExpenseAndOtherAssetsCurrent" scale="3" id="Tc_x2TfjtiYg0ifqVynqiAzOQ_12_3">25,628</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PrepaidExpenseAndOtherAssetsCurrent" scale="3" id="Tc_b9md889zxEC0Z4ruM_cBKg_12_6">19,301</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:74.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Total current assets</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AssetsCurrent" scale="3" id="Tc_b51l5QocrU-veKPTX-Vcnw_13_3">549,387</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" 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Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PropertyPlantAndEquipmentNet" scale="3" id="Tc_zltiDhAbckyf2e-QFSovWg_14_3">99,743</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PropertyPlantAndEquipmentNet" scale="3" id="Tc_zVpedd5-ckK5PQwq6vPffg_14_6">65,271</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:74.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Operating lease right-of-use assets</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingLeaseRightOfUseAsset" scale="3" id="Tc_EwiEsIzL70WxK62DfL67Rg_15_3">28,813</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingLeaseRightOfUseAsset" scale="3" id="Tc_Ts1yRN2Opkebrbkz5xKPRw_15_6">10,275</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:74.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Intangible assets, net</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IntangibleAssetsNetExcludingGoodwill" scale="3" id="Tc_IASrBqYyKk-D5hQtx4BIXw_16_3">33,905</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IntangibleAssetsNetExcludingGoodwill" scale="3" id="Tc_E8MXFEYlZkqMR5d9jpf5gw_16_6">46,185</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:74.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Goodwill</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:Goodwill" scale="3" id="Tc_U-mXFtwamECB12BjwuzCLw_17_3">181,943</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:Goodwill" scale="3" id="Tc_0TsTxVN8qUSvVs8K3iXzqA_17_6">181,943</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:74.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Deferred income taxes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredIncomeTaxAssetsNet" scale="3" id="Tc_FD-5w3ewhEmtViuRh2VrsA_18_3">1,639</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredIncomeTaxAssetsNet" scale="3" id="Tc_fDsoKMZELUGQocwHSkLOUQ_18_6">1,440</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:74.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Other assets</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherAssetsNoncurrent" scale="3" id="Tc_oHKkOQpAV0GZ5g4Ey8jUFw_19_3">3,546</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherAssetsNoncurrent" scale="3" id="Tc_PKM4aU9NGEurgLG_VjGk5A_19_6">6,019</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:74.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><b style="font-weight:bold;">Total assets</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:Assets" scale="3" id="Tc_ZRAhEzuaEE-v_O8QJsyoiA_20_3">898,976</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:Assets" scale="3" id="Tc_MWzA1Lr8SECHLCoH5FpZZQ_20_6">898,064</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:74.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 0pt 18pt;"><span style="font-size:10pt;font-weight:bold;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:74.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Liabilities and stockholders&#39; equity</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:74.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Current liabilities:</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:74.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Accounts payable</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AccountsPayableCurrent" scale="3" id="Tc_sLGjyNvkn0uAhnjLXpPQPA_24_3">44,456</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AccountsPayableCurrent" scale="3" id="Tc_P8UNYIaa-kGIDpUmLaQp-g_24_6">33,656</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:74.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Accrued expenses and other current liabilities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="veco:AccruedAndOtherLiabilitiesCurrent" scale="3" id="Tc_28SDLwMsa0GVYBZEiKdFJw_25_3">79,752</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-3" format="ixt:numdotdecimal" name="veco:AccruedAndOtherLiabilitiesCurrent" scale="3" id="Tc_yrf0KdiISk2koxoWtnqKrg_25_6">44,876</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:74.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Customer deposits and deferred revenue</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="veco:ContractWithCustomerLiabilityAndRefundLiabilityCurrent" scale="3" id="Tc_U_Oe_Nmj50aytL8MfChaCQ_26_3">63,136</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-3" format="ixt:numdotdecimal" name="veco:ContractWithCustomerLiabilityAndRefundLiabilityCurrent" scale="3" id="Tc_LwYAMsjnlEq5wCzA5BToQg_26_6">67,235</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:74.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Income taxes payable</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AccruedIncomeTaxesCurrent" scale="3" id="Tc_L3pjgfk7JEW0DXM8Ry4rhw_27_3">1,860</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AccruedIncomeTaxesCurrent" scale="3" id="Tc_udTDhPUPKkS77NZIalS88A_27_6">914</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:74.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Total current liabilities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:LiabilitiesCurrent" scale="3" id="Tc_y-sOXd1aqEGGNVMv_M73Sg_28_3">189,204</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:LiabilitiesCurrent" scale="3" id="Tc_mzMBZaGyo0WEpEaV8DAt-Q_28_6">146,681</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:74.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Deferred income taxes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredIncomeTaxLiabilitiesNet" scale="3" id="Tc_hqtK3UFvtESdwTzxw2OuhQ_29_3">4,792</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredIncomeTaxLiabilitiesNet" scale="3" id="Tc_UzpboKRJLECl-w5Mn6fPmQ_29_6">5,240</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:74.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Long-term debt</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:LongTermDebtNoncurrent" scale="3" id="Tc_QGEzvyI-uEOI7ms5Khgo6A_30_3">229,438</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:LongTermDebtNoncurrent" scale="3" id="Tc_pqmQ6zA5QUem8IJ1eJrCIg_30_6">321,115</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:74.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Long-term operating lease liabilities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingLeaseLiabilityNoncurrent" scale="3" id="Tc_E1cfZmm690SKnLrDFajvWA_31_3">32,834</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingLeaseLiabilityNoncurrent" scale="3" id="Tc_joiXKf017k6ybldpAfY4hw_31_6">6,305</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:74.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Other liabilities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherLiabilitiesNoncurrent" scale="3" id="Tc_QOwLoTYYi02ps2Zz6N2t1g_32_3">5,080</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherLiabilitiesNoncurrent" scale="3" id="Tc_es9QjYd04U2VeVGGRBJ7FQ_32_6">10,349</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:74.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><b style="font-weight:bold;">Total liabilities</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:Liabilities" scale="3" id="Tc__QYZHUxofU24GwjK1PKLRw_33_3">461,348</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:Liabilities" scale="3" id="Tc_jz3x6JEDXEOi9crfGQQJzw_33_6">489,690</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:74.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Stockholders&#39; equity:</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:74.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Preferred stock, $<ix:nonFraction unitRef="Unit_Divide_USD_shares_tlsv-okr1ESmAF6EktRdIg" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="INF" format="ixt:numdotdecimal" name="us-gaap:PreferredStockParOrStatedValuePerShare" scale="0" id="Narr_AdQxg926MUiInR10__-y2Q"><ix:nonFraction unitRef="Unit_Divide_USD_shares_tlsv-okr1ESmAF6EktRdIg" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="INF" format="ixt:numdotdecimal" name="us-gaap:PreferredStockParOrStatedValuePerShare" scale="0" id="Narr_V2a5n78Mf0Cb-42zaQbbTA">0.01</ix:nonFraction></ix:nonFraction> par value; <ix:nonFraction unitRef="Unit_Standard_shares_CQLzaUKOXkqvj8CNr9pzfg" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="INF" format="ixt:numdotdecimal" name="us-gaap:PreferredStockSharesAuthorized" scale="0" id="Narr_zH8EfgOn40-3z7IPumLMeg"><ix:nonFraction unitRef="Unit_Standard_shares_CQLzaUKOXkqvj8CNr9pzfg" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="INF" format="ixt:numdotdecimal" name="us-gaap:PreferredStockSharesAuthorized" scale="0" id="Narr_SCkhTia_jUC80YBPuClBeQ">500,000</ix:nonFraction></ix:nonFraction> shares authorized; <ix:nonFraction unitRef="Unit_Standard_shares_CQLzaUKOXkqvj8CNr9pzfg" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="INF" format="ixt-sec:numwordsen" name="us-gaap:PreferredStockSharesIssued" scale="0" id="Narr_X540pFhM30qNNXzl5d_gTQ"><ix:nonFraction unitRef="Unit_Standard_shares_CQLzaUKOXkqvj8CNr9pzfg" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="INF" format="ixt-sec:numwordsen" name="us-gaap:PreferredStockSharesIssued" scale="0" id="Narr__ZhmOiM8m0aTyPsT-UK3Qw">no</ix:nonFraction></ix:nonFraction> shares issued and outstanding.</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="-sec-ix-hidden:Hidden_xl6QCWm_30eNvsT2PLdmew;"><span style="font-family:'Times New Roman','Times','serif';font-size:9pt;font-style:normal;font-weight:normal;"> &#8212;</span></span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="-sec-ix-hidden:Hidden_ai4JkZsgI0i5Gb7pnsIA4g;"><span style="font-family:'Times New Roman','Times','serif';font-size:9pt;font-style:normal;font-weight:normal;"> &#8212;</span></span></p></td></tr><tr><td style="vertical-align:bottom;width:74.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">Common stock, </span><span style="font-size:10pt;">$<ix:nonFraction unitRef="Unit_Divide_USD_shares_tlsv-okr1ESmAF6EktRdIg" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="INF" format="ixt:numdotdecimal" name="us-gaap:CommonStockParOrStatedValuePerShare" scale="0" id="Narr_1c5GLoWmbUmpUaFQ71n3Tw"><ix:nonFraction unitRef="Unit_Divide_USD_shares_tlsv-okr1ESmAF6EktRdIg" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="INF" format="ixt:numdotdecimal" name="us-gaap:CommonStockParOrStatedValuePerShare" scale="0" id="Narr_mdSnqTYepkSFLcybWcqymw">0.01</ix:nonFraction></ix:nonFraction></span><span style="font-size:10pt;"> par value; </span><span style="font-size:10pt;"><ix:nonFraction unitRef="Unit_Standard_shares_CQLzaUKOXkqvj8CNr9pzfg" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="INF" format="ixt:numdotdecimal" name="us-gaap:CommonStockSharesAuthorized" scale="0" id="Narr_8SJ3_wqMhkqi9Ia4ZTa1fQ"><ix:nonFraction unitRef="Unit_Standard_shares_CQLzaUKOXkqvj8CNr9pzfg" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="INF" format="ixt:numdotdecimal" name="us-gaap:CommonStockSharesAuthorized" scale="0" id="Narr_w5TpLDgmiE6OemjaSu_QEQ">120,000,000</ix:nonFraction></ix:nonFraction></span><span style="font-size:10pt;"> shares authorized; </span><span style="font-size:10pt;"><ix:nonFraction unitRef="Unit_Standard_shares_CQLzaUKOXkqvj8CNr9pzfg" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="INF" format="ixt:numdotdecimal" name="us-gaap:CommonStockSharesIssued" scale="0" id="Narr_TU81tOt1S0K5RkxwMQVmoQ">50,652,864</ix:nonFraction></span><span style="font-size:10pt;"> shares </span><span style="-sec-ix-hidden:Hidden_-5DU1jp1c06I9mPfkdKJnQ;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">issued</span></span><span style="font-size:10pt;"> and outstanding at December&#160;31, 2021 and </span><span style="font-size:10pt;"><ix:nonFraction unitRef="Unit_Standard_shares_CQLzaUKOXkqvj8CNr9pzfg" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="INF" format="ixt:numdotdecimal" name="us-gaap:CommonStockSharesIssued" scale="0" id="Narr_hig8Cam4YU6fKMAAhUlV1Q">49,723,751</ix:nonFraction></span><span style="font-size:10pt;"> shares issued and </span><span style="-sec-ix-hidden:Hidden_IdO9n7Ek70mPqDO51ylRMg;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">outstanding</span></span><span style="font-size:10pt;"> at December&#160;31, 2020</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CommonStockValue" scale="3" id="Tc_PGvJhq7AskaFz4D241QITA_36_3">507</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CommonStockValue" scale="3" id="Tc_5ieeBmSyQEGMEUBbumGMpw_36_6">497</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:74.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Additional paid-in capital</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AdditionalPaidInCapitalCommonStock" scale="3" id="Tc_3FkvAknHWU-C8YSYwH9igA_37_3">1,116,921</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AdditionalPaidInCapitalCommonStock" scale="3" id="Tc_omDNlipDvUmsa0_kUsG_7Q_37_6">1,113,352</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:74.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Accumulated deficit</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RetainedEarningsAccumulatedDeficit" sign="-" scale="3" id="Tc_xMVijoOHXUGt4j78VJd4Lg_38_3">681,283</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RetainedEarningsAccumulatedDeficit" sign="-" scale="3" id="Tc_Lbbz_fN69E6Z5KDco50dXw_38_6">707,321</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:bottom;width:74.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Accumulated other comprehensive income</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AccumulatedOtherComprehensiveIncomeLossNetOfTax" scale="3" id="Tc_zas8HMYr1EGB0oZnoy_9zA_39_3">1,483</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AccumulatedOtherComprehensiveIncomeLossNetOfTax" scale="3" id="Tc_1sp6MoDSPUGCJYYHSRkDqg_39_6">1,846</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:74.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><b style="font-weight:bold;">Total stockholders&#39; equity</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" scale="3" id="Tc_Y42MTpZ6gkimkuXs6b_djA_40_3">437,628</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" scale="3" id="Tc_2WJwVejg1UWvkIKO59J3nA_40_6">408,374</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:74.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"><b style="font-weight:bold;">Total liabilities and stockholders&#39; equity</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:LiabilitiesAndStockholdersEquity" scale="3" id="Tc_aRfE75EHQkW-ALqAmgvy2g_41_3">898,976</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:LiabilitiesAndStockholdersEquity" scale="3" id="Tc_I0mQInDg2EmymnfHe9r02g_41_6">898,064</ix:nonFraction></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">See accompanying Notes to the Consolidated Financial Statements.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">F-4</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><a id="_5638ef1d_dc00_47a3_b12b_c8ce0c31e158"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Veeco Instruments&#160;Inc. and Subsidiaries</b></p><a id="StatementsofOperations_198983"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Consolidated Statements of Operations</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in thousands, except per share amounts)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><a id="_b2aa4534_afa7_48c1_a68e_48db4338c75f"></a><a id="Tc_j10B004cxEmCJ7HzKX_UVQ_1_3"></a><a id="Tc_ClGdvYy4h0izVslpH0fW8w_2_3"></a><a id="Tc_ZffZSoFRaUK1D4YxhHRnFw_2_6"></a><a id="Tc_6bdrrioRs0-u6z6AwQGvuA_2_9"></a><a id="Tc_sTVHJGmvz0-j5t02Bjc0GQ_3_0"></a><a id="Tc_yYk-VmbIZ0qByIjMRA1Zfw_3_3"></a><a id="Tc_Xh3ue29veki5d9oVjRGU1g_3_6"></a><a id="Tc_wVqpNnhN0k6hWvIQeBCIbA_3_9"></a><a id="Tc_MhRNwyfN_Ey4NyS1tMFPZw_4_0"></a><a id="Tc_1hlkVp8NOUy3sRCOHTxvqA_5_0"></a><a id="Tc_sYP4fWDmL06vbEmNfPOa3g_6_0"></a><a id="Tc_EdfMaxc67kOfANUIKv1Owg_7_0"></a><a id="Tc_zTp-8PVP3ECF8M8-Z9U4Og_8_0"></a><a id="Tc_vvvOuq6ksEiUROlG7lEIXg_9_0"></a><a id="Tc_loNJ4vqOrEWAjk2KIIJ5VA_10_0"></a><a id="Tc_uFguUNKwFkai8-PcsDgIMQ_10_4"></a><a id="Tc_l6zjnD51M06hSILqvDlZ_g_11_0"></a><a id="Tc_HPXA_uRl80WQnE2B35GZpw_11_4"></a><a id="Tc_8lWW81e0eU6n5rYwbCALSg_12_0"></a><a id="Tc_9yvT-k4f9kGWpEV5ei1t2w_13_0"></a><a id="Tc_g8StU0ATaEqLX6lbpON1tQ_14_0"></a><a id="Tc_kHsVE1cYu0mgdVoTocjD8w_15_0"></a><a id="Tc_kD2wZhKr3EW_iQJ9MayZeQ_16_0"></a><a id="Tc_qOnRj_Wey06Ss5WNV7Kq1A_17_0"></a><a id="Tc_7Ke19949IU2ZI8lKWGKxjw_18_0"></a><a id="Tc_62oCGq4MuUe0hNit_Y53Pg_19_0"></a><a id="Tc_z9xar-T5ake3Gap1ZDMoxQ_20_0"></a><a id="Tc_0yt7GE14xUalHsNM7A7JTA_20_3"></a><a id="Tc_RIVNmJd0-ki9kR7bYnO0RQ_20_6"></a><a id="Tc_ZBk1lQrZJU-BcjsZS1Ghxw_20_9"></a><a id="Tc_JNgoH_NaIUa93v08aGF7Gw_22_0"></a><a id="Tc_K4k7PXtf6kSmBq2pQHBnBA_23_0"></a><a id="Tc_NMZrclk5uE28KyJiG8fxNg_23_3"></a><a id="Tc_Tn0mdJs2Wkq74ZbyV743cA_23_6"></a><a id="Tc_tq6NLNtF_kGqJnFaY6Q2nw_23_9"></a><a id="Tc_LWUB9GlFrki1rNf6IbMpgg_24_0"></a><a id="Tc_ptUPsAGaYkiwSK490Ts52Q_24_3"></a><a id="Tc_XPHYhLjkoESfS69uofF0vA_24_6"></a><a id="Tc_7rxcbWE73EiE3pU20ZTz-g_24_9"></a><a id="Tc_K-PdEnHmFEqywId0k5ZfXg_26_0"></a><a id="Tc_jIFhGblOE0upAtWC_HlXlQ_27_0"></a><a id="Tc_IuHRZ-h2sUWEe3lzoRcp-Q_28_0"></a><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:54.49%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.85%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.85%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.74%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.86%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.74%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.86%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.74%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.6%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:54.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.85%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.85%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:39.8%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">For the year ended December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:54.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.85%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.85%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.36%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.36%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.34%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2019</b></p></td></tr><tr><td style="vertical-align:bottom;width:54.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Net sales </p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.85%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.85%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax" scale="3" id="Tc_xRGsHRk5oUinKI8T7KjEDg_3_4">583,277</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.86%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_irQajVZIkUmgjCJ-cxJ5AQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax" scale="3" id="Tc__JcXCZ3PpUOMaaIKHxehsg_3_7">454,163</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.86%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.6%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_ssAGFj6EXEiYqEtVZlyqxA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax" scale="3" id="Tc_rPjuU9OvWE2H1KHgQDL_Yw_3_10">419,349</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:54.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Cost of sales</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.85%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.85%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction 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style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:GrossProfit" scale="3" id="Tc_DWsnA-D8O0qxOy_cDRBVTA_5_4">242,274</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.86%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_irQajVZIkUmgjCJ-cxJ5AQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:GrossProfit" scale="3" id="Tc_URXE8wQ88U-r7ssl-fSYWg_5_7">194,300</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.86%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.6%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_ssAGFj6EXEiYqEtVZlyqxA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:GrossProfit" scale="3" id="Tc_ZF8mXVt9mECTybDG_Ditcg_5_10">158,194</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:54.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Operating expenses, net:</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.85%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.85%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:54.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Research and development</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.85%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.85%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ResearchAndDevelopmentExpense" scale="3" id="Tc_R6c6uMg3n0KeX3G3g5x0Ig_7_4">88,680</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.86%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_irQajVZIkUmgjCJ-cxJ5AQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ResearchAndDevelopmentExpense" scale="3" id="Tc_K7mXu6H-BUCcQUOtQtIkkw_7_7">78,994</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.86%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.6%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_ssAGFj6EXEiYqEtVZlyqxA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ResearchAndDevelopmentExpense" scale="3" id="Tc_4qUZgYNqLEKHKUdvMBaHhw_7_10">90,557</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:54.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Selling, general, and administrative</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.85%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.85%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:SellingGeneralAndAdministrativeExpense" scale="3" id="Tc_Fr0GKgBBfEiPeWWJ5DQblQ_8_4">84,536</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New 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style="vertical-align:bottom;white-space:nowrap;width:2.85%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AmortizationOfIntangibleAssets" scale="3" id="Tc_M4wxjyzaFUGlqwYDaE1wbw_9_4">12,280</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.86%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_irQajVZIkUmgjCJ-cxJ5AQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AmortizationOfIntangibleAssets" scale="3" id="Tc_Ey1KLZexNkqY_HoqcTJP_Q_9_7">15,333</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.86%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.6%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_ssAGFj6EXEiYqEtVZlyqxA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AmortizationOfIntangibleAssets" scale="3" 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style="vertical-align:bottom;white-space:nowrap;width:9.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_irQajVZIkUmgjCJ-cxJ5AQ" 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Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.86%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 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style="vertical-align:bottom;white-space:nowrap;width:1.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherOperatingIncomeExpenseNet" sign="-" scale="3" id="Tc_LXdrMmmL4EyTIYRRmgUqTQ_12_4">68</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_irQajVZIkUmgjCJ-cxJ5AQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherOperatingIncomeExpenseNet" scale="3" id="Tc_IXYV0EiUQU6gVJfQCbncUA_12_7">221</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.6%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_ssAGFj6EXEiYqEtVZlyqxA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherOperatingIncomeExpenseNet" scale="3" id="Tc_jlPCF3jC_k-FFLo_tlJhew_12_10">42</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:bottom;width:54.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Total operating expenses, net</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.85%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.85%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.74%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingExpenses" scale="3" id="Tc_XX0TO2BjJkSoK3-4jtxaYQ_13_4">185,564</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.86%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.74%;background:#cceeff;border-bottom:1px solid 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style="vertical-align:bottom;white-space:nowrap;width:1.74%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.6%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_ssAGFj6EXEiYqEtVZlyqxA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingExpenses" scale="3" id="Tc_k0yTPD7BdUSwIsGI606wng_13_10">197,772</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:54.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Operating income (loss)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.85%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.85%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingIncomeLoss" scale="3" id="Tc_ZmNC1rbymEGz_cf9pi1B5w_14_4">56,710</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_irQajVZIkUmgjCJ-cxJ5AQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingIncomeLoss" scale="3" id="Tc_bkEGu8V-o0e7wQ-OBTCSoQ_14_7">22,565</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_ssAGFj6EXEiYqEtVZlyqxA" decimals="-3" 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style="vertical-align:bottom;white-space:nowrap;width:1.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InvestmentIncomeInterest" scale="3" id="Tc_iLGdiQqvSUiiHhbpHrsN0A_15_4">2,340</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.86%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_irQajVZIkUmgjCJ-cxJ5AQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InvestmentIncomeInterest" scale="3" id="Tc_Zetx-HtfRkaJ_1OmyQNgvw_15_7">1,551</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.86%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.6%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_ssAGFj6EXEiYqEtVZlyqxA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InvestmentIncomeInterest" scale="3" id="Tc_NtQfp9M1WkK30rzmTz7RoA_15_10">4,680</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:54.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Interest expense</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.85%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.85%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" 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style="vertical-align:bottom;width:54.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Other income (expense), net</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.85%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.85%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.74%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherNonoperatingIncomeExpense" sign="-" scale="3" id="Tc_cpuTmg2ujkm0qRph5mKHYA_17_4">5,010</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.86%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.74%;background:#cceeff;border-bottom:1px solid 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style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.74%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxExpenseBenefit" sign="-" scale="3" id="Tc_xnySu6m8KE6YeuZeiRM_yQ_19_4">358</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.86%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.74%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_irQajVZIkUmgjCJ-cxJ5AQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxExpenseBenefit" sign="-" scale="3" 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Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetIncomeLoss" scale="3" id="Tc_kvGPQb7AYUquSp-YXnq4gA_20_4">26,038</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.74%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_irQajVZIkUmgjCJ-cxJ5AQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetIncomeLoss" sign="-" scale="3" id="Tc_VQNnozDtIUyQItJjMJY27Q_20_7">8,391</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.74%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.6%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_ssAGFj6EXEiYqEtVZlyqxA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetIncomeLoss" sign="-" scale="3" id="Tc_seus7HiugUmF0SGRAH-9ow_20_10">78,733</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:bottom;width:54.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.85%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.85%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.86%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.86%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.6%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:54.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Income (loss) per common share:</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.85%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.85%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:54.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Basic</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.85%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.85%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_tlsv-okr1ESmAF6EktRdIg" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="2" format="ixt:numdotdecimal" name="us-gaap:EarningsPerShareBasic" scale="0" id="Tc_Kd9NakBhLUuXTwUWKdPDZQ_23_4">0.53</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.86%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Divide_USD_shares_tlsv-okr1ESmAF6EktRdIg" contextRef="Duration_1_1_2020_To_12_31_2020_irQajVZIkUmgjCJ-cxJ5AQ" decimals="2" format="ixt:numdotdecimal" name="us-gaap:EarningsPerShareBasic" sign="-" scale="0" id="Tc_S6EBbDsa10CnJSV4gBJ3DQ_23_7">0.17</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.86%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.6%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Divide_USD_shares_tlsv-okr1ESmAF6EktRdIg" contextRef="Duration_1_1_2019_To_12_31_2019_ssAGFj6EXEiYqEtVZlyqxA" decimals="2" format="ixt:numdotdecimal" name="us-gaap:EarningsPerShareBasic" sign="-" scale="0" id="Tc_S76zEfIJt0KnfyuM2AOgjg_23_10">1.66</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:bottom;width:54.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Diluted </p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.85%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.85%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_tlsv-okr1ESmAF6EktRdIg" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="2" format="ixt:numdotdecimal" name="us-gaap:EarningsPerShareDiluted" scale="0" id="Tc_I39e6N6Y8k2JvJi3rflH8w_24_4">0.49</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Divide_USD_shares_tlsv-okr1ESmAF6EktRdIg" contextRef="Duration_1_1_2020_To_12_31_2020_irQajVZIkUmgjCJ-cxJ5AQ" decimals="2" format="ixt:numdotdecimal" name="us-gaap:EarningsPerShareDiluted" sign="-" scale="0" id="Tc_elN4yw6Ms062ZKPcy5XiqQ_24_7">0.17</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Divide_USD_shares_tlsv-okr1ESmAF6EktRdIg" contextRef="Duration_1_1_2019_To_12_31_2019_ssAGFj6EXEiYqEtVZlyqxA" decimals="2" format="ixt:numdotdecimal" name="us-gaap:EarningsPerShareDiluted" sign="-" scale="0" id="Tc_RgcBwTINM0CZ-F7cRoTIjg_24_10">1.66</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:bottom;width:54.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.85%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.85%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.86%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.86%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.6%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:54.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Weighted average number of shares:</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.85%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.85%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:54.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Basic</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.85%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.85%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_CQLzaUKOXkqvj8CNr9pzfg" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:WeightedAverageNumberOfSharesOutstandingBasic" scale="3" id="Tc_MxVrnBqt6UGT6qftKfJCng_27_4">49,073</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.86%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_CQLzaUKOXkqvj8CNr9pzfg" contextRef="Duration_1_1_2020_To_12_31_2020_irQajVZIkUmgjCJ-cxJ5AQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:WeightedAverageNumberOfSharesOutstandingBasic" scale="3" id="Tc_kMOk-souE02pvhRilOcJCA_27_7">48,362</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.86%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.6%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_CQLzaUKOXkqvj8CNr9pzfg" contextRef="Duration_1_1_2019_To_12_31_2019_ssAGFj6EXEiYqEtVZlyqxA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:WeightedAverageNumberOfSharesOutstandingBasic" scale="3" id="Tc_c9rS0MP39kaODa55LdMRDA_27_10">47,482</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:54.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Diluted</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.85%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.85%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_CQLzaUKOXkqvj8CNr9pzfg" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding" scale="3" id="Tc_-ajtSVlJN0ufdhQFDGi4tw_28_4">53,643</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_CQLzaUKOXkqvj8CNr9pzfg" contextRef="Duration_1_1_2020_To_12_31_2020_irQajVZIkUmgjCJ-cxJ5AQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding" scale="3" id="Tc_Oad3-Q_PFE-uKVKuAWvlFA_28_7">48,362</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_CQLzaUKOXkqvj8CNr9pzfg" contextRef="Duration_1_1_2019_To_12_31_2019_ssAGFj6EXEiYqEtVZlyqxA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding" scale="3" id="Tc_jx_HeLZZTU-u5xqkv2wJ0Q_28_10">47,482</ix:nonFraction></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">See accompanying Notes to the Consolidated Financial Statements.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">F-5</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><a id="_32a91606_440f_45af_90fb_18ad5e69b6de"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Veeco Instruments&#160;Inc. and Subsidiaries</b></p><a id="ComprehensiveIncomeLoss_794066"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Consolidated Statements of Comprehensive Income (Loss)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in thousands)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><a id="_58530e19_509a_4185_988a_9a3c63b01696"></a><a id="Tc_3rr4NcNma0-elIEuHZVqlQ_1_3"></a><a id="Tc_L_tZNj8bqUqnqe9cLzpDlg_2_3"></a><a id="Tc_PGyopz8aNU2S405z518QGA_2_6"></a><a id="Tc_6MbxMxMTfkqL7SDNZMJcCw_2_9"></a><a id="Tc_9PxtbUqz00KvqWZNHUW1Nw_3_0"></a><a id="Tc_-Vv-fN80SEawXPMGAiuPoQ_3_3"></a><a id="Tc_4f_6igEBbUatDr7Xs_Binw_3_6"></a><a id="Tc_-GnW2ZgIV0-LowEYCuzAeQ_3_9"></a><a id="Tc_I4WUAjqmgkiPmYvIytzfmg_4_0"></a><a id="Tc_IcLqBG3H_kqAjCKO9SQlig_5_0"></a><a id="Tc_2H8V3D2dTE-1uL9lYWrGaQ_6_0"></a><a id="Tc_IJJzwFMAb0WswaBlvrCNBw_7_0"></a><a id="Tc_lQpFZBJdhU2h0qBZyzDqWw_8_0"></a><a id="Tc_UwVPGBFwIU-6Yc1VATt0JA_9_0"></a><a id="Tc_rAD8wZwYRUGRpwyUiZYKug_10_0"></a><a id="Tc_w52l_uMJTkyN6s2sBbu6cw_10_4"></a><a id="Tc_r6HD2Au3RkWYdLQR5J2YWw_10_7"></a><a id="Tc_lSMjnU5Sc0KmCETnP6qoKw_11_0"></a><a id="Tc_j_pVQO6_WE2lM1XxX0ffSw_13_0"></a><a id="Tc_tbaHqrTorkqyFgm02FAQkg_15_0"></a><a id="Tc_jvjo1x30QkSYFpLc2Uef4w_15_3"></a><a id="Tc_iovrnNdKakO_wpI2pMYy6Q_15_6"></a><a id="Tc_JfyN5YKCakCln7dYISYnEA_15_9"></a><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:middle;width:66.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:50%;transform:translate(0,-50%);width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.05%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.05%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.58%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:66.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:29.73%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">For the year ended December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:66.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.33%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.33%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.86%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2019</b></p></td></tr><tr><td style="vertical-align:middle;width:66.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Net income (loss)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetIncomeLoss" scale="3" id="Tc_NsepYncy90SHIZl9tPHcNg_3_4">26,038</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_irQajVZIkUmgjCJ-cxJ5AQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetIncomeLoss" sign="-" scale="3" id="Tc_yPqPRycT4EubZJvsjb_mnw_3_7">8,391</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.58%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_ssAGFj6EXEiYqEtVZlyqxA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetIncomeLoss" sign="-" scale="3" id="Tc_y8ufdfKCLkizKFJefLb5EA_3_10">78,733</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:middle;width:66.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Other comprehensive income (loss), net of tax:</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:middle;width:66.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Available-for-sale securities:</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td 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style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.58%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:66.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 24pt;">Change in net unrealized gains or losses</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New 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style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.05%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeAvailableforsaleSecuritiesAdjustmentNetOfTaxPortionAttributableToParent" sign="-" scale="3" 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style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:middle;width:66.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 24pt;">Change in currency translation adjustments</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationGainLossArisingDuringPeriodNetOfTax" sign="-" scale="3" id="Tc_u1j9gAInTUq_gLx__yV6KA_9_4">52</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span 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style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 24pt;">Reclassification adjustments for net (gains) losses included in net income</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.05%;border-bottom:1px solid 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New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.58%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_ssAGFj6EXEiYqEtVZlyqxA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeLossForeignCurrencyTransactionAndTranslationReclassificationAdjustmentFromAOCIRealizedUponSaleOrLiquidationNetOfTax" sign="-" scale="3" 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style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.05%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent" sign="-" scale="3" id="Tc_jNPm99JJUUm-ltTBXw3Dcw_11_4">52</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.05%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_irQajVZIkUmgjCJ-cxJ5AQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent" scale="3" id="Tc_WMY0R8Cu1UC6f4Ip1fwnmw_11_7">5</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times 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style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:middle;width:66.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Total other comprehensive income (loss), net of tax</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.05%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent" sign="-" scale="3" id="Tc_pEGwkzZjHEW0by1Uz-BgOQ_13_4">363</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.05%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_irQajVZIkUmgjCJ-cxJ5AQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent" sign="-" scale="3" id="Tc_uSJk5ObXgEuWKnqYkLo8wQ_13_7">48</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.58%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_ssAGFj6EXEiYqEtVZlyqxA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent" scale="3" id="Tc_oWtRtvxYrUGxstFpKhIPrg_13_10">74</ix:nonFraction></p></td></tr><tr><td style="vertical-align:middle;width:66.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 0pt 6pt;"><span style="font-size:10pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:middle;width:66.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Total comprehensive income (loss)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.05%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ComprehensiveIncomeNetOfTax" scale="3" id="Tc_dKjzg1f1dkWQmT4GWiqzMA_15_4">25,675</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.05%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_irQajVZIkUmgjCJ-cxJ5AQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ComprehensiveIncomeNetOfTax" sign="-" scale="3" id="Tc_0fIjHe4-i0CtYpY7_ctbVA_15_7">8,439</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.58%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_ssAGFj6EXEiYqEtVZlyqxA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ComprehensiveIncomeNetOfTax" sign="-" scale="3" id="Tc_IowwoJhU5U-TZgygM7PgbA_15_10">78,659</ix:nonFraction>)</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">See accompanying Notes to the Consolidated Financial Statements.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">F-6</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><a id="_c0293692_b01e_477d_8b49_b6f48b7941e3"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Veeco Instruments&#160;Inc. and Subsidiaries</b></p><a id="StockholdersEquity_323287"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Consolidated Statements of Stockholders&#39; Equity</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in thousands)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><a id="_8712fd10_d26a_494e_85ed_9cc8f427e501"></a><a id="Tc_7gz00wR3tkaqHfmrF_UITA_1_19"></a><a id="Tc_u5uyR0Hmt0Cz4_UY-RXifg_2_13"></a><a id="Tc_FIvM4PbDJEawma4pU02bng_2_19"></a><a id="Tc_EqPXEJMdyUGBRcRy0Tu3xg_3_2"></a><a id="Tc_lMWelgf-nUS73bF5UKSSVQ_3_7"></a><a id="Tc_uCq72KBrN0ychSfxbky0lA_3_13"></a><a id="Tc_9HJlJtoRYEiYWOGba7MLVA_3_16"></a><a id="Tc__PKP__IUyE-lac_CUeeQcA_3_19"></a><a id="Tc_zLSKspEIQU2RQ4pEugx2FQ_4_2"></a><a id="Tc_k7EqXHhN20Kf0YpxLrszvQ_4_4"></a><a id="Tc_8MUnxP3HEkOnIJW4sG4MkA_4_7"></a><a id="Tc_BHAzAdrYsUiwFNxItkFDJQ_4_10"></a><a id="Tc_lrtqdKzdG0y-DyNNhJU0ow_4_13"></a><a id="Tc_hiduBs3oB0GtrbpzOYcy5g_4_16"></a><a id="Tc_2Mr2cyKn50-0YSbBgdf3Nw_4_19"></a><a id="Tc_RAxCogM5t0-abidQKXc-TA_4_22"></a><a id="Tc_ZG9bh8_Z90GkqgM5jeWvWA_5_0"></a><a id="Tc_3m5FTXaC_k-bTLDDAJYF-g_5_4"></a><a id="Tc_tywZU9WrfEGfWsCN1RPPyA_5_10"></a><a id="Tc_SxJx2Q9Tc0-FLGv66C7vnw_5_13"></a><a id="Tc_90gIBvsK3USda5rhapqtsA_5_16"></a><a id="Tc_5q0iR6uFjkGjExRt1KNkcw_5_19"></a><a id="Tc_8VTNZaUv1kqg9QHJxXca3A_5_22"></a><a id="Tc_Ww2DIsHJlUaxUuiKFFEmlA_6_0"></a><a id="Tc_LFtvITvdykmygH5kCOGffA_6_2"></a><a id="Tc_OUJ_86o1C0ihHacgvKaaRQ_6_5"></a><a id="Tc_MyJc0XgywkKkbHeqRq1obg_6_8"></a><a id="Tc_S37NiC7BFEymDribA9Wwgg_6_11"></a><a id="Tc_Qu9q6JrgQEGeSAp2-l81Yw_6_14"></a><a id="Tc_U7vQtXRPOU2qh3ALMpIarg_6_20"></a><a id="Tc_Q-xIhMmFVUajpo8aBn8BpA_7_0"></a><a id="Tc_fmQUjq2HWUyM2RZT6WbV3w_7_2"></a><a id="Tc_M6cXvtDaFUqOH9SIH8P8lw_7_5"></a><a id="Tc_rvGvYA1EmUm4kSQRqqzw7w_7_8"></a><a id="Tc_ovN8NwKW3ESL1oQRM58XIg_7_11"></a><a id="Tc_NQ83_OKJUkupT4w-OsudDw_7_14"></a><a 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style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:29.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Accumulated</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:29.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Additional</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Other</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:29.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="4" style="vertical-align:bottom;white-space:nowrap;width:12.86%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Common&#160;Stock</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:12.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Treasury Stock</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Paid-in</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Accumulated </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Comprehensive</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:29.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Shares</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:5.78%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Amount</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:4.77%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Shares</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:6.04%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Amount</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.32%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Capital</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.34%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Deficit</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.99%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Income</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.08%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Total</b></p></td></tr><tr><td style="vertical-align:bottom;width:29.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Balance at December&#160;31, 2018</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.44%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_CQLzaUKOXkqvj8CNr9pzfg" contextRef="As_Of_12_31_2018_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_XCkssqE9AES0tcpv0w9XQQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:SharesOutstanding" scale="3" id="Tc_f8I_wdtfL0G18cl9NoWD5g_5_2">48,547</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2018_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_XCkssqE9AES0tcpv0w9XQQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" scale="3" id="Tc_EjGHjj5vqE6MWiBecJWHhQ_5_5">485</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.65%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_CQLzaUKOXkqvj8CNr9pzfg" contextRef="As_Of_12_31_2018_us-gaap_StatementEquityComponentsAxis_us-gaap_TreasuryStockMember_2QxiduHxhkSkE-yYICFJWg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:SharesOutstanding" scale="3" id="Tc_4EXEkC2RSUKfH8wfmebQ1w_5_8">523</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2018_us-gaap_StatementEquityComponentsAxis_us-gaap_TreasuryStockMember_2QxiduHxhkSkE-yYICFJWg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" sign="-" scale="3" id="Tc_eZoNKFa3TkiGmGhlMHgjVg_5_11">5,872</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2018_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_qETuVLa760OUuohJVHdyyg" decimals="-3" format="ixt:numdotdecimal" 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contextRef="As_Of_12_31_2018_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_M4RG9e6dBUi1enPPhE0DEw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" scale="3" id="Tc_HIBNQNiBJUSN6FC9ivCfXQ_5_20">1,820</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> <ix:nonFraction 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Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_e73TPmCrTk6gFWFuQGH_XA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetIncomeLoss" sign="-" scale="3" id="Tc_KCpQAunRYECoo0_2KqgNsQ_6_17">78,733</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_ssAGFj6EXEiYqEtVZlyqxA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetIncomeLoss" sign="-" scale="3" id="Tc_5h4tce3e3UifdtpK9bNTLQ_6_23">78,733</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:bottom;width:29.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Other comprehensive income (loss), net of tax</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.44%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.65%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.59%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_kqDfUcea40W7vDtI8f4Saw" decimals="-3" format="ixt:numdotdecimal" name="veco:OtherComprehensiveIncomeLossIncludingForeignCurrencyGainsLossesOnTransactionsIncludedInOperatingResultsNetOfTax" scale="3" id="Tc_zfJJ7JGolkqVk8VMYRtuCw_7_20">74</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_ssAGFj6EXEiYqEtVZlyqxA" decimals="-3" format="ixt:numdotdecimal" name="veco:OtherComprehensiveIncomeLossIncludingForeignCurrencyGainsLossesOnTransactionsIncludedInOperatingResultsNetOfTax" scale="3" id="Tc_mCDEx_KpF0CvQ5h5qshL-Q_7_23">74</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:29.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Share-based compensation 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Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_0_uD7UzZQUmfxcubSCKHLg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue" scale="3" id="Tc_5CSko73rmUmbHK2GknzHlQ_8_14">15,270</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_ssAGFj6EXEiYqEtVZlyqxA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue" scale="3" id="Tc_p3umBJtcTEWpnAW7uC7_JA_8_23">15,270</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:29.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Net issuance under employee stock plans</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.44%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_CQLzaUKOXkqvj8CNr9pzfg" contextRef="Duration_1_1_2019_To_12_31_2019_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_5XL26-0PGEy_WnlTASqaeg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodSharesShareBasedCompensation" scale="3" 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style="vertical-align:bottom;white-space:nowrap;width:4.11%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.22%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2019_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_yOUMnKp3DUiqVTpmT7gYbw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" scale="3" id="Tc_SgkbD6dFEk-hzS7ycTy0Ng_10_14">1,071,058</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" 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Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2019_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_SNp8iWru0UiilNFX8-AHMw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" scale="3" id="Tc_l7NGojLa9EKfK3JXkl2WZQ_10_20">1,894</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2019_V3OJMQUyh0CQkfB0kHJGFg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" scale="3" id="Tc_9CFWEN3ZmECS86ZlpMp1Fw_10_23">374,512</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:29.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Net income (loss)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.44%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.65%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_JGtyzqqN80yX3ggr1oMQ-w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetIncomeLoss" sign="-" scale="3" id="Tc_N2kvPPKxKEmzjirbwTEpgQ_11_17">8,391</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.59%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" 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Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_ItCRkrV7xEO5VmvjQsomVw" decimals="-3" format="ixt:numdotdecimal" name="veco:OtherComprehensiveIncomeLossIncludingForeignCurrencyGainsLossesOnTransactionsIncludedInOperatingResultsNetOfTax" sign="-" scale="3" id="Tc_-Z42kxORi06eonpGhwJV_w_12_20">48</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_irQajVZIkUmgjCJ-cxJ5AQ" decimals="-3" format="ixt:numdotdecimal" name="veco:OtherComprehensiveIncomeLossIncludingForeignCurrencyGainsLossesOnTransactionsIncludedInOperatingResultsNetOfTax" sign="-" scale="3" id="Tc_2NbyWg7zgUWeZj4eUhHWTw_12_23">48</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:bottom;width:29.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Share-based compensation expense</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.44%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.65%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_HGDohwdVbEq3CdKilXgG4w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue" scale="3" id="Tc_UdC5QC_euEiZXSGmPgQD2g_13_14">12,703</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.59%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_irQajVZIkUmgjCJ-cxJ5AQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue" scale="3" id="Tc_ctPFF7CXI0aUfFK3FoPLfg_13_23">12,703</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:29.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Net issuance under employee stock plans</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_CQLzaUKOXkqvj8CNr9pzfg" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_HvwjKSXs4UWhr5k_T3vB_w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodSharesShareBasedCompensation" scale="3" id="Tc_wnyvzsPV6kCQSuBK-VrMFw_14_2">730</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_HvwjKSXs4UWhr5k_T3vB_w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodValueShareBasedCompensation" scale="3" id="Tc_4JzJw9AQd0S1RDcxuCcu7A_14_5">7</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_HGDohwdVbEq3CdKilXgG4w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodValueShareBasedCompensation" scale="3" id="Tc_q1ZqJaNXeE6641tQrmtYTQ_14_14">549</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_irQajVZIkUmgjCJ-cxJ5AQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodValueShareBasedCompensation" scale="3" id="Tc_v_Vl5udybUajvszyEUZLzA_14_23">556</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:29.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Extinguishment of equity component of repurchased/exchanged 2023 Notes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.44%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.65%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_HGDohwdVbEq3CdKilXgG4w" decimals="-3" format="ixt:numdotdecimal" name="veco:AdjustmentsToAdditionalPaidInCapitalExtinguishmentEquityComponentOfNotesRepurchased" scale="3" id="Tc_ufspmzH5okKl3lAVM1Ny1w_15_14">14,714</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.59%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_irQajVZIkUmgjCJ-cxJ5AQ" decimals="-3" format="ixt:numdotdecimal" name="veco:AdjustmentsToAdditionalPaidInCapitalExtinguishmentEquityComponentOfNotesRepurchased" scale="3" id="Tc_KKCKo0ZJnkS8eHJAexskqw_15_23">14,714</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:bottom;width:29.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Equity component of 2025 Notes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_y2Djn-zodU6kLI8YpQPZSA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AdjustmentsToAdditionalPaidInCapitalEquityComponentOfConvertibleDebt" scale="3" id="Tc_XpFsJiHbJUm88Se1hpnwQQ_16_14">20,706</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_T9-ARJMRhUGbaSFGoASMgA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AdjustmentsToAdditionalPaidInCapitalEquityComponentOfConvertibleDebt" scale="3" id="Tc_Vvsv2SUE4UmRPiMfeJ4UJg_16_23">20,706</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:29.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Equity component of 2027 Notes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.44%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.65%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_hVXAD0rJmk-881CmlOdgpg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AdjustmentsToAdditionalPaidInCapitalEquityComponentOfConvertibleDebt" scale="3" id="Tc_12tkhPw-VEWuQk5kyNRdEQ_17_14">33,363</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.59%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_DG5pVo9FnECoGWDPcCNpmA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AdjustmentsToAdditionalPaidInCapitalEquityComponentOfConvertibleDebt" scale="3" id="Tc_uiUO0ugFu0OYDGFdcsieaw_17_23">33,363</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:29.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Purchase of capped calls</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.65%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.11%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.22%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_HGDohwdVbEq3CdKilXgG4w" decimals="-3" format="ixt:numdotdecimal" name="veco:AdjustmentsToAdditionalPaidInCapitalPurchaseOfDerivativeInstrument" scale="3" id="Tc_dOemztBd1EqlYZUJC_G9Lg_18_14">10,313</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.59%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_irQajVZIkUmgjCJ-cxJ5AQ" decimals="-3" format="ixt:numdotdecimal" name="veco:AdjustmentsToAdditionalPaidInCapitalPurchaseOfDerivativeInstrument" scale="3" id="Tc_Ih6eINd_X0OJQ_4mkdJumw_18_23">10,313</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:bottom;width:29.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Balance at December&#160;31, 2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.44%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_CQLzaUKOXkqvj8CNr9pzfg" contextRef="As_Of_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_emju3aneGUSYrS0fiMWxzA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:SharesOutstanding" scale="3" id="Tc_k_hmaHSzdk-5Fy9ajUjHtA_19_2">49,724</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.84%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.93%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_emju3aneGUSYrS0fiMWxzA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" scale="3" id="Tc_N7Iw8lYg5ECc5bflSa4YQg_19_5">497</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.65%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.11%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.22%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.5%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" 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style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_BV6GJIQCAkSkLzUdw_o--g" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" sign="-" scale="3" id="Tc_30pglv6iCk-iVtrCJMjMFg_19_17">707,321</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.59%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_uRdtD3j7UkS_me8rVUe_DQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" scale="3" id="Tc_yn3J_QBJNkO227wstZEvFQ_19_20">1,846</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" scale="3" id="Tc_QYt2W7YT20O-kDCYS_7ajg_19_23">408,374</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:29.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Net income 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style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_GtkeqpppoUm0X2EdqzLPXQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetIncomeLoss" scale="3" id="Tc_f9qkt4Bcg0exWyTA2_XWZw_20_17">26,038</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetIncomeLoss" scale="3" id="Tc_sFDZ9csz80CsCrrLXIBt1w_20_23">26,038</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:29.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Other comprehensive income (loss), net of tax</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.44%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.65%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.59%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_-7unTY5R2kqeHNw_kxX_EA" decimals="-3" format="ixt:numdotdecimal" name="veco:OtherComprehensiveIncomeLossIncludingForeignCurrencyGainsLossesOnTransactionsIncludedInOperatingResultsNetOfTax" sign="-" scale="3" id="Tc_jVRYl1GNBEWc9YdANzPNVg_21_20">363</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="-3" format="ixt:numdotdecimal" 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style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_z3JjsHcqJ0m1ssVK9R1nKw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue" scale="3" id="Tc_W19Wc5mAkkCJO70jh9dybQ_22_14">15,249</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue" scale="3" id="Tc_T2E_W4sFtUGuAnJdoMWEKA_22_23">15,249</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:29.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Net issuance under employee stock plans</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.44%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_CQLzaUKOXkqvj8CNr9pzfg" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_4VV1eaTaeUK2ih_8PNZajw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodSharesShareBasedCompensation" scale="3" id="Tc_nMwLquvHCk2t-YNBRiok8Q_23_2">929</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_4VV1eaTaeUK2ih_8PNZajw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodValueShareBasedCompensation" scale="3" id="Tc_MRluuy1dxEyctor2KqqSyQ_23_5">10</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.65%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_z3JjsHcqJ0m1ssVK9R1nKw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodValueShareBasedCompensation" sign="-" scale="3" id="Tc_icX3ln3oREaAAMBglGfU4g_23_14">5,600</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.59%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodValueShareBasedCompensation" sign="-" scale="3" id="Tc_jxOLvrFVwk-B8_Zqh9FS9Q_23_23">5,590</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:bottom;width:29.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Extinguishment of equity component of repurchased 2023 Notes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.65%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.11%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.22%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_z3JjsHcqJ0m1ssVK9R1nKw" decimals="-3" format="ixt:numdotdecimal" name="veco:AdjustmentsToAdditionalPaidInCapitalExtinguishmentEquityComponentOfNotesRepurchased" scale="3" id="Tc_G5sPFjRTMkO0o6QBXoFfaQ_24_14">6,080</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.59%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="-3" format="ixt:numdotdecimal" name="veco:AdjustmentsToAdditionalPaidInCapitalExtinguishmentEquityComponentOfNotesRepurchased" scale="3" id="Tc_S6Z6DFxpe0KxxHgeJY6lgw_24_23">6,080</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:bottom;width:29.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Balance at December&#160;31, 2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.44%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_CQLzaUKOXkqvj8CNr9pzfg" contextRef="As_Of_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_aCX-RHE-KkeBBnw-NsVIMw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:SharesOutstanding" scale="3" id="Tc_RIP0ZfkI10KzddJXyW0Icw_25_2">50,653</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.84%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.93%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_aCX-RHE-KkeBBnw-NsVIMw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" scale="3" id="Tc_-83difO6O06ceeDzC3U7ag_25_5">507</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.65%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.11%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.22%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.5%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_5cTRat84k0agvx5z8Xr5yA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" scale="3" id="Tc_AenTw9V2ZU-BVOWUMcBl_A_25_14">1,116,921</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_vEaWf_ZLzkWBOs5gBIgq8w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" sign="-" scale="3" id="Tc_0tFHxmjQB0mhFOE1c_nKZA_25_17">681,283</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.59%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_jUHOf6dSwkC4m9UBLc25Ig" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" scale="3" id="Tc_CTka-ciTJk22SitwlfOLEQ_25_20">1,483</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" scale="3" id="Tc_LV_mRu8JsEGsGXypWTvyYg_25_23">437,628</ix:nonFraction></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">See accompanying Notes to the Consolidated Financial Statements.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">F-7</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><a id="_56aaf3f6_0f5a_4716_aef5_d6c955c7f810"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Veeco Instruments&#160;Inc. and Subsidiaries</b></p><a id="CashFlows_488340"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Consolidated Statements of Cash Flows</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in thousands)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><a id="_d3155a60_bd77_440a_80ac_39f78b40d0ce"></a><a id="Tc_a_rUxy0xPUmbVFxrl5urKQ_1_2"></a><a id="Tc_rt6JIJzk8UqkjS7qf1lGgA_2_2"></a><a id="Tc_vkOccztB0k2Mh0qov8gW9g_2_5"></a><a id="Tc_TFm4DLqSN06gCwScIWQF4Q_2_8"></a><a id="Tc_iNlNqZxv50Gfj1nD18mToQ_3_0"></a><a id="Tc_ixm1BJKUGky5J4pLDQG5qw_4_0"></a><a id="Tc_vfq4ZF0-0UO1W7XSsViXYQ_4_2"></a><a id="Tc_V4rfPvsHm0qt89TwOeNxUA_4_5"></a><a id="Tc_eoQy7kJsVUWZbDUdvt3USg_4_8"></a><a id="Tc_JbM1DEo34UKMjNJmllyrWA_5_0"></a><a id="Tc_vAK1Sh365UWmENBAX6VQ0w_6_0"></a><a id="Tc_FAuDnCYkh0-dlSjrvZm9Gw_7_0"></a><a id="Tc_QJzhudO1k0WUOszopC4t2Q_8_0"></a><a id="Tc_mfaWrtlKBkGNuicl_F0YEQ_9_0"></a><a 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id="Tc_635TMhWicEmXlRxY2DJ01A_45_0"></a><a id="Tc_w_9y_rg9BkKyDQbuReFzew_45_2"></a><a id="Tc_O7ksQqw3N0-sFns-Dsh3Xw_45_5"></a><a id="Tc_7Ssc3iEa4EaIiLwXfXufgw_45_8"></a><a id="Tc_IyBVg5gYVUWlUXQfvb4fNg_46_0"></a><a id="Tc_2xZ7HfLEUUS990t0l5wsJQ_47_0"></a><a id="Tc_tRnSgFPHmkSDXjCLfczCHw_48_0"></a><a id="Tc_b_RYMZmxUka1xqIJuqhQSQ_49_0"></a><a id="Tc_zMHK5HIi0E-mBu8fhXqfqA_50_0"></a><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:63.31%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:63.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:34.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">For the year ended December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:63.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.75%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.78%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2019</b></p></td></tr><tr><td style="vertical-align:bottom;width:63.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><b style="font-weight:bold;">Cash Flows from Operating Activities</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:63.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Net income (loss)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction 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contextRef="Duration_1_1_2020_To_12_31_2020_irQajVZIkUmgjCJ-cxJ5AQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProfitLoss" sign="-" scale="3" id="Tc_xks_ErIn5EmIRCmgNupxYA_4_6">8,391</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_ssAGFj6EXEiYqEtVZlyqxA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProfitLoss" sign="-" scale="3" id="Tc_Yg5AjWHDEk-j6UWqi152LQ_4_9">78,733</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:bottom;width:63.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Adjustments to reconcile net income (loss) to net cash provided by (used in) operating activities:</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:63.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 6pt;">Depreciation and amortization</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DepreciationDepletionAndAmortization" scale="3" id="Tc_LAQ3WOSQ1EuW-W1wIuEB8w_6_3">26,058</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_irQajVZIkUmgjCJ-cxJ5AQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DepreciationDepletionAndAmortization" scale="3" id="Tc_QRiMKQsWDUu9Hoelth1fJA_6_6">30,697</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_ssAGFj6EXEiYqEtVZlyqxA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DepreciationDepletionAndAmortization" scale="3" id="Tc_dGG6S3QZ9kOeAu5pGKeIcg_6_9">34,399</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:63.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 6pt;">Non-cash interest expense</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AmortizationOfFinancingCostsAndDiscounts" scale="3" id="Tc_5yD2FUPyAUKPaIr6-hqNVQ_7_3">13,819</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_irQajVZIkUmgjCJ-cxJ5AQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AmortizationOfFinancingCostsAndDiscounts" scale="3" id="Tc_y9cJe1YFfUuYktpg37mfiA_7_6">13,792</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_ssAGFj6EXEiYqEtVZlyqxA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AmortizationOfFinancingCostsAndDiscounts" scale="3" id="Tc_viw9pz9tr0uB1M2-8-mD1A_7_9">12,676</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:63.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 6pt;">Deferred income taxes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredIncomeTaxExpenseBenefit" sign="-" scale="3" id="Tc_1NR8egE2LU2iPBDxl794Lw_8_3">651</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_irQajVZIkUmgjCJ-cxJ5AQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredIncomeTaxExpenseBenefit" sign="-" scale="3" id="Tc_1nWWb3XMp0C5UF17ULiGOw_8_6">299</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_ssAGFj6EXEiYqEtVZlyqxA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredIncomeTaxExpenseBenefit" scale="3" id="Tc_ob-1zqlwC06sQe6jHiHsig_8_9">360</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:63.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 6pt;">Share-based compensation expense</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensation" scale="3" id="Tc_N9sFknwtaU2dzG7RuIfoZQ_9_3">15,249</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_irQajVZIkUmgjCJ-cxJ5AQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensation" scale="3" id="Tc_1hne7SvyrUW3mMC0kHzsdw_9_6">12,703</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_ssAGFj6EXEiYqEtVZlyqxA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensation" scale="3" id="Tc_ay1gxHVubkCycDhBiFlaoA_9_9">15,270</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:63.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 6pt;">Loss on extinguishment of debt</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:GainsLossesOnExtinguishmentOfDebt" sign="-" scale="3" id="Tc_j3nryDdxfUCmLdYgMGe64w_10_3">4,029</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" 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style="vertical-align:bottom;width:63.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 6pt;">Asset impairment</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_irQajVZIkUmgjCJ-cxJ5AQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AssetImpairmentCharges" scale="3" id="Tc_cfY4kiRrCk-y41XbyOp_yg_11_6">281</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_ssAGFj6EXEiYqEtVZlyqxA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AssetImpairmentCharges" scale="3" id="Tc_5qdeZMLqHEmBjqB7zc2FNg_11_9">4,020</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:63.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 6pt;">Impairment of equity investments</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ImpairmentOfInvestments" scale="3" id="Tc_-wHH1kcWQEy58ZwtdltILQ_12_3">980</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_ssAGFj6EXEiYqEtVZlyqxA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ImpairmentOfInvestments" scale="3" id="Tc_iR7ZChyRl0mTPr3PaQv7RA_12_9">20,973</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:63.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 6pt;">Provision for bad debts</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_irQajVZIkUmgjCJ-cxJ5AQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProvisionForDoubtfulAccounts" scale="3" id="Tc_XHQgMB2BsEqDPkmT9Syvwg_13_6">140</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_ssAGFj6EXEiYqEtVZlyqxA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProvisionForDoubtfulAccounts" scale="3" id="Tc_K9XKRISrRk65Jde_Hqjkew_13_9">392</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:63.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Changes in operating assets and liabilities:</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:63.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 6pt;">Accounts receivable and contract assets</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="-3" format="ixt:numdotdecimal" name="veco:IncreaseDecreaseInAccountsReceivableAndContractAssets" scale="3" id="Tc_NNO5aRZXoUmcCLNPA9I-0g_15_3">26,664</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_irQajVZIkUmgjCJ-cxJ5AQ" decimals="-3" format="ixt:numdotdecimal" name="veco:IncreaseDecreaseInAccountsReceivableAndContractAssets" scale="3" 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Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_ssAGFj6EXEiYqEtVZlyqxA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncreaseDecreaseInAccountsPayableAndAccruedLiabilities" sign="-" scale="3" id="Tc_ygTkJineSUma-EVBFFP55Q_18_9">26,945</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:bottom;width:63.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 6pt;">Customer deposits and deferred revenue</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="-3" format="ixt:numdotdecimal" name="veco:IncreaseDecreaseInCustomerDepositsAndDeferredRevenue" sign="-" scale="3" id="Tc_lK9u3StczkmXH9FVNQ-iIg_19_3">4,099</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p 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style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncreaseDecreaseInOtherOperatingCapitalNet" sign="-" scale="3" id="Tc_OeS4qR14lEWootBw4xOVtA_21_3">8,993</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times 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0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_irQajVZIkUmgjCJ-cxJ5AQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProceedsFromSaleOfPropertyPlantAndEquipment" scale="3" id="Tc_j5zzv_2hRU6X-5kKACsnBg_28_6">9,503</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_ssAGFj6EXEiYqEtVZlyqxA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProceedsFromSaleOfPropertyPlantAndEquipment" scale="3" id="Tc_BkAj4EdAckKmNCdChyRhGQ_28_9">645</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:63.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Net cash provided by (used in) investing activities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetCashProvidedByUsedInInvestingActivities" scale="3" id="Tc_8ftFxf-UE06jkSWKHnv2PQ_29_3">44,528</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_irQajVZIkUmgjCJ-cxJ5AQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetCashProvidedByUsedInInvestingActivities" sign="-" scale="3" id="Tc_8DAU1Y2lm0aRaKwFYRQmQw_29_6">71,792</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_ssAGFj6EXEiYqEtVZlyqxA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetCashProvidedByUsedInInvestingActivities" sign="-" scale="3" id="Tc_U8s_voEmdEWnJjdS4mxJ8w_29_9">75,867</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:bottom;width:63.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:63.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><b style="font-weight:bold;">Cash Flows from Financing Activities</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:63.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Proceeds from issuance of 2027 Notes, net of issuance costs</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_irQajVZIkUmgjCJ-cxJ5AQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProceedsFromConvertibleDebt" scale="3" id="Tc_mYzUNSLkJku8OWKmBamojQ_32_6">120,095</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td></tr><tr><td style="vertical-align:bottom;width:63.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Purchase of capped calls</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_irQajVZIkUmgjCJ-cxJ5AQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PaymentsForDerivativeInstrumentFinancingActivities" scale="3" id="Tc_nLpX4MUsHkCxMcM-OmpQTg_33_6">10,313</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td></tr><tr><td style="vertical-align:bottom;width:63.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Repurchase of 2023 Notes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RepaymentsOfUnsecuredDebt" scale="3" id="Tc_IET6_V0XXUq0vdVndoM7MA_34_3">115,604</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_irQajVZIkUmgjCJ-cxJ5AQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RepaymentsOfUnsecuredDebt" scale="3" 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style="vertical-align:bottom;white-space:nowrap;width:2.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PaymentsOfDebtIssuanceCosts" scale="3" 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style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_ssAGFj6EXEiYqEtVZlyqxA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetCashProvidedByUsedInFinancingActivities" scale="3" id="Tc_paH6LpsVtU-oTl1lkVKyRg_38_9">126</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:63.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Effect of exchange rate changes on cash and cash equivalents</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;background:#cceeff;margin:0pt;padding:0pt;"><p 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style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_ssAGFj6EXEiYqEtVZlyqxA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect" sign="-" scale="3" id="Tc_Nd7Ml0VL4kujt0EiJET_BA_40_9">83,131</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:bottom;width:63.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Cash, cash equivalents, and restricted cash - beginning of period</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents" scale="3" id="Tc_2f5ZG-XZHkygE-mfmx7RKA_41_3">130,283</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2019_V3OJMQUyh0CQkfB0kHJGFg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents" scale="3" id="Tc_hD5atn87W0iQZQK8an4qbA_41_6">129,951</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2018_q0edxy1rfUy1tPk-85jsFQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents" scale="3" id="Tc_iStLlb9at0SxLdOgX_FvJw_41_9">213,082</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:63.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Cash, cash equivalents, and restricted cash - end of period</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents" scale="3" id="Tc_6bqh6qvEQEK0B9IoJNEsJg_42_3">120,472</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents" scale="3" id="Tc_-t0KSppaDEi9WsUVCP5oEg_42_6">130,283</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2019_V3OJMQUyh0CQkfB0kHJGFg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents" scale="3" id="Tc_h2jvagHqS0yBLRx91tVC1A_42_9">129,951</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:63.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:63.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><b style="font-weight:bold;">Supplemental Disclosure of Cash Flow Information</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:63.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 6pt;">Interest paid</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InterestPaidNet" scale="3" id="Tc_efc0-e5H6UakemlJfshlDw_45_3">12,551</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_irQajVZIkUmgjCJ-cxJ5AQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InterestPaidNet" scale="3" id="Tc_kvO4Bdbb50W7hbGEbLHrjQ_45_6">12,700</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_ssAGFj6EXEiYqEtVZlyqxA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InterestPaidNet" scale="3" id="Tc_4L3LjQVi40umJ4NCpc5hog_45_9">9,408</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:63.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 6pt;">Net income taxes paid (refunds received)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxesPaidNet" sign="-" scale="3" id="Tc_NkI3kU79tk-b574j6-4Iqw_46_3">139</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_irQajVZIkUmgjCJ-cxJ5AQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxesPaidNet" scale="3" id="Tc_i6JKwfLkNkapVCBHAEPFMw_46_6">329</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_ssAGFj6EXEiYqEtVZlyqxA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxesPaidNet" scale="3" id="Tc_qFroVs1YdECu-6gmVjSx3g_46_9">2,931</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:63.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><b style="font-weight:bold;">Non-cash activities</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:63.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 6pt;">Capital expenditures included in accounts payable and accrued expenses</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CapitalExpendituresIncurredButNotYetPaid" scale="3" id="Tc_0CPfodjfFE-hfo9zsmjN-g_48_3">9,096</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_irQajVZIkUmgjCJ-cxJ5AQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CapitalExpendituresIncurredButNotYetPaid" scale="3" id="Tc_zkDVIykTb0OsVzABAU_udA_48_6">687</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_ssAGFj6EXEiYqEtVZlyqxA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CapitalExpendituresIncurredButNotYetPaid" scale="3" id="Tc_VPlXjDw7G0ugmQRon4Tjzg_48_9">249</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:63.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 6pt;">Net transfer of property, plant and equipment to inventory</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="-3" format="ixt:numdotdecimal" name="veco:TransferToInventories" scale="3" id="Tc_oGWqgB_Rfk-rMiCwHXHvAg_49_3">63</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_irQajVZIkUmgjCJ-cxJ5AQ" decimals="-3" format="ixt:numdotdecimal" name="veco:TransferToInventories" scale="3" id="Tc_vRBmIdt_ykCFCPOpE20n2g_49_6">1,624</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_ssAGFj6EXEiYqEtVZlyqxA" decimals="-3" format="ixt:numdotdecimal" name="veco:TransferToInventories" sign="-" scale="3" id="Tc_4mp6aFDZ_0acQA0FVomK9g_49_9">4,916</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:bottom;width:63.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 6pt;">Right-of-use assets obtained in exchange for lease obligations</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RightOfUseAssetObtainedInExchangeForOperatingLeaseLiability" scale="3" id="Tc_EEGcYMk55UaI-Mpl8b88Rw_50_3">23,777</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_irQajVZIkUmgjCJ-cxJ5AQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RightOfUseAssetObtainedInExchangeForOperatingLeaseLiability" scale="3" id="Tc_h54m8-ffYECX_ZJ8pqPZdA_50_6">1,741</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_ssAGFj6EXEiYqEtVZlyqxA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RightOfUseAssetObtainedInExchangeForOperatingLeaseLiability" scale="3" id="Tc__MPvHJQt8k25SdwefGl2DA_50_9">5,576</ix:nonFraction></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">See accompanying Notes to the Consolidated Financial Statements.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="display:none;font-size:12pt;line-height:0pt;margin:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:0pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">F-8</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 10pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Veeco Instruments Inc. and Subsidiaries</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Notes to Consolidated Financial Statements</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;max-width:100%;position:relative;"><a id="Note1SignificantAccountingPolicies_23831"></a><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" name="us-gaap:OrganizationConsolidationBasisOfPresentationBusinessDescriptionAndAccountingPoliciesTextBlock" id="Tb_74Ye32wcL0KnWzB_jM7GZQ" continuedAt="Tb_74Ye32wcL0KnWzB_jM7GZQ_cont1" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note 1 &#8212; Significant Accounting Policies</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(a) Description of Business</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">Veeco Instruments Inc. (together with its consolidated subsidiaries, &#8220;Veeco,&#8221; or the &#8220;Company&#8221;) operates in a </span><span style="-sec-ix-hidden:Hidden_GMHOS9YmP0ixHp5ywkdWDQ;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">single</span></span><span style="font-size:10pt;"> segment: the development, manufacture, sales, and support of semiconductor and thin film process equipment primarily sold to make electronic devices.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" name="us-gaap:FiscalPeriod" id="Tb_VsMVltRv3kKZmdDquzPrKg" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(b) Basis of Presentation</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">The accompanying audited Consolidated Financial Statements of the Company have been prepared in accordance with United States generally accepted accounting principles (&#8220;GAAP&#8221;). The Company reports interim quarters on a </span><ix:nonNumeric contextRef="Duration_1_1_2021_To_3_31_2021_I2RoWjdXk0ipbexIg4A-Rw" format="ixt-sec:durweek" name="us-gaap:FiscalPeriodDuration" id="Narr_KKXk67X6fkqy1KDZs4x6iw"><ix:nonNumeric contextRef="Duration_4_1_2021_To_6_30_2021_uCMt0aDIzEGsDz1ItpwqIA" format="ixt-sec:durweek" name="us-gaap:FiscalPeriodDuration" id="Narr_NojpqIytw0CXSpZfQXXJTQ"><ix:nonNumeric contextRef="Duration_7_1_2021_To_9_30_2021_a1DAB8yD5kaKegC4u-KltQ" format="ixt-sec:durweek" name="us-gaap:FiscalPeriodDuration" id="Narr__WX_udIyikS8EwkhLynS9g"><ix:nonNumeric contextRef="Duration_10_1_2021_To_12_31_2021_XxJz8ZdZyU-XvGyi85uM5A" format="ixt-sec:durweek" name="us-gaap:FiscalPeriodDuration" id="Narr_9qB7OzzlBk2FcSfQtp2xbA"><span style="font-size:10pt;">13</span></ix:nonNumeric></ix:nonNumeric></ix:nonNumeric></ix:nonNumeric><span style="font-size:10pt;">-week basis ending on the last Sunday of each period, which is determined at the start of each year. The Company&#8217;s fourth quarter always ends on the last day of the calendar year, December 31. During 2021 the interim quarters ended on April 4, July 4, and October 3, and during 2020 the interim quarters ended on March 29, June 28, and September 27. The Company reports these interim quarters as March 31, June 30, and September 30 in its interim consolidated financial statements.</span></p></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" name="us-gaap:UseOfEstimates" id="Tb_Dci6Z84ZdE2gpSO1FhN8vw" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(c) Use of Estimates</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The preparation of financial statements in conformity with GAAP requires management to make estimates and assumptions that affect the amounts reported in the financial statements and accompanying notes. Although these estimates are based on management&#8217;s knowledge of current events and actions it may undertake in the future, these estimates may ultimately differ from actual results. Significant items subject to such estimates and assumptions include: (i) stand-alone selling prices for the Company&#8217;s products and services; (ii) allowances for doubtful accounts; (iii) inventory obsolescence; (iv) the useful lives and expected future cash flows of property, plant, and equipment and identifiable intangible assets; (v) the fair value of the Company&#8217;s reporting unit and related goodwill; (vi) investment valuations and the valuation of derivatives, deferred tax assets, and assets acquired in business combinations; (vii) the recoverability of long-lived assets; (viii) liabilities for product warranty and legal contingencies; (ix) share-based compensation; (x) lease term and incremental borrowing rates used in determining operating lease assets and liabilities; and (xi) income tax uncertainties.</p></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" name="us-gaap:ConsolidationPolicyTextBlock" id="Tb_VYABYNSopUKW6OZ7uEMwMA" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(d) Principles of Consolidation</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Consolidated Financial Statements include the accounts of the Company and its subsidiaries. Intercompany balances and transactions have been eliminated in consolidation. Companies acquired during each reporting period are reflected in the results of the Company effective from their respective dates of acquisition through the end of the reporting period.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></ix:nonNumeric><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" name="us-gaap:ForeignCurrencyTransactionsAndTranslationsPolicyTextBlock" id="Tb_xxauJVrI-0eAg-kKK8g_cw" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(e) Foreign Currencies</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Assets and liabilities of the Company&#8217;s foreign subsidiaries that operate using functional currencies other than the U.S. dollar are translated using the exchange rates in effect at the balance sheet date. Results of operations are translated using monthly average exchange rates. Adjustments arising from the translation of the foreign currency financial statements of the Company&#8217;s subsidiaries into U.S. dollars, including intercompany transactions of a long-term nature, are reported as currency translation adjustments in &#8220;Accumulated other comprehensive income&#8221; in the Consolidated Balance Sheets. Foreign currency transaction gains or losses are included in &#8220;Other operating expense (income), net&#8221; in the Consolidated Statements of Operations.</p></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" name="us-gaap:RevenueFromContractWithCustomerPolicyTextBlock" id="Tb_bNV8b6_Fj0SlbEGivwwNxA" continuedAt="Tb_bNV8b6_Fj0SlbEGivwwNxA_cont1" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(f) Revenue Recognition</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Revenue is recognized upon the transfer of control of the promised product or service to the customer in an amount that reflects the consideration the Company expects to receive in exchange for such product or service. The Company&#8217;s contracts with customers generally do not contain variable consideration. In the rare instances where variable </p></ix:nonNumeric></ix:nonNumeric></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">F-9</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Veeco Instruments&#160;Inc. and Subsidiaries</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Notes to Consolidated Financial Statements (Continued)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;max-width:100%;position:relative;"><ix:continuation id="Tb_74Ye32wcL0KnWzB_jM7GZQ_cont1" continuedAt="Tb_74Ye32wcL0KnWzB_jM7GZQ_cont2"><ix:continuation id="Tb_bNV8b6_Fj0SlbEGivwwNxA_cont1" continuedAt="Tb_bNV8b6_Fj0SlbEGivwwNxA_cont2"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">consideration is included, the Company estimates the amount of variable consideration and determines what portion of that, if any, has a high probability of significant subsequent revenue reversal, and if so, that amount is excluded from the transaction price. The Company&#8217;s contracts with customers frequently contain multiple deliverables, such as systems, upgrades, components, spare parts, installation, maintenance, and service plans. Judgment is required to properly identify the performance obligations within a contract and to determine how the revenue should be allocated among the performance obligations. The Company also evaluates whether multiple transactions with the same customer or related parties should be considered part of a single contract based on an assessment of whether the contracts or agreements are negotiated or executed within a short time frame of each other or if there are indicators that the contracts are negotiated in contemplation of one another. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160; </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">When there are separate units of accounting, the Company allocates revenue to each performance obligation on a relative stand-alone selling price basis. The stand-alone selling prices are determined based on the prices at which the Company separately sells the systems, upgrades, components, spare parts, installation, maintenance, and service plans. For items that are not sold separately, the Company estimates stand-alone selling prices generally using an expected cost plus margin approach. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160; </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Most of the Company&#8217;s revenue is recognized at a point in time when the performance obligation is satisfied. The Company considers many facts when evaluating each of its sales arrangements to determine the timing of revenue recognition, including its contractual obligations and the nature of the customer&#8217;s post-delivery acceptance provisions. The Company&#8217;s system sales arrangements, including certain upgrades, generally include field acceptance provisions that may include functional or mechanical test procedures. For many of these arrangements, a customer source inspection of the system is performed in the Company&#8217;s facility, test data is sent to the customer documenting that the system is functioning to the agreed upon specifications prior to delivery, or other quality assurance testing is performed internally to ensure system functionality prior to shipment. Historically, such source inspection or test data replicates the field acceptance provisions that are performed at the customer&#8217;s site prior to final acceptance of the system. When the Company objectively demonstrates that the criteria specified in the contractual acceptance provisions are achieved prior to delivery either through customer testing or the Company&#8217;s historical experience of its tools meeting specifications, transfer of control of the product to the customer is considered to have occurred and revenue is recognized upon system delivery since there is no substantive contingency remaining related to the acceptance provisions at that date. For new products, new applications of existing products, or for products with substantive customer acceptance provisions where the Company cannot objectively demonstrate that the criteria specified in the contractual acceptance provisions have been achieved prior to delivery, revenue and the associated costs are deferred. The Company recognizes such revenue and costs upon obtaining objective evidence that the acceptance provisions can be achieved, assuming all other revenue recognition criteria have been met. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160; </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">In certain cases, the Company&#8217;s contracts with customers contain a billing retention, which is billed by the Company and payable by the customer when field acceptance provisions are completed. Revenue recognized in advance of the amount that has been billed is recorded as a contract asset on the Consolidated Balance Sheets. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160; </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company recognizes revenue related to maintenance and service contracts over time based upon the respective contract term. Installation revenue is recognized over time as the installation services are performed. The Company recognizes revenue from the sales of components, spare parts, and specified service engagements at a point in time, which is typically consistent with the time of delivery in accordance with the terms of the applicable sales arrangement. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160; </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">The Company may receive customer deposits on system transactions. The timing of the transfer of goods or services related to the deposits is either at the discretion of the customer or expected to be within one year from the deposit receipt. As such, the Company does not adjust transaction prices for the time value of money. Incremental direct costs incurred related to the acquisition of a customer contract, such as sales commissions, are expensed as incurred since the expected performance period is </span><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" format="ixt:booleantrue" name="us-gaap:RevenuePracticalExpedientIncrementalCostOfObtainingContract" id="Narr_KIdcAdZku0iY1haw2gU15g"><span style="font-size:10pt;">one</span></ix:nonNumeric><span style="font-size:10pt;"> year or less. </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160; </p></ix:continuation></ix:continuation></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">F-10</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Veeco Instruments&#160;Inc. and Subsidiaries</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Notes to Consolidated Financial Statements (Continued)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;max-width:100%;position:relative;"><ix:continuation id="Tb_74Ye32wcL0KnWzB_jM7GZQ_cont2" continuedAt="Tb_74Ye32wcL0KnWzB_jM7GZQ_cont3"><ix:continuation id="Tb_bNV8b6_Fj0SlbEGivwwNxA_cont2"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company has elected to treat shipping and handling costs, including those costs incurred to move, package, and prepare the Company&#8217;s products for shipment and to move the products to a customer&#8217;s designated location, as a fulfillment activity, and the Company includes such costs in &#8220;Cost of sales&#8221; in the Consolidated Statements of Operations as incurred. These costs are generally comprised of payments to third-party shippers. Taxes assessed by governmental authorities that are collected by the Company from a customer are excluded from revenue. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></ix:continuation><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" name="us-gaap:StandardProductWarrantyPolicy" id="Tb_Ru7iY59iwEiLygxsRqd9xA" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(g) Warranty Costs</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">The Company typically provides standard warranty coverage on its systems for </span><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" format="ixt-sec:durwordsen" name="veco:ProductWarrantyPeriod" id="Narr_jCk9IcWoMkmxZE17PaCD6g"><span style="font-size:10pt;">one year</span></ix:nonNumeric><span style="font-size:10pt;"> from the date of final acceptance by providing labor and parts necessary to repair the systems during the warranty period. The Company records the estimated warranty cost when revenue is recognized on the related system. Warranty cost is included in &#8220;Cost of sales&#8221; in the Consolidated Statements of Operations. The estimated warranty cost is based on the Company&#8217;s historical experience with its systems and regional labor costs. The Company calculates the average service hours by region and parts expense per system utilizing actual service records to determine the estimated warranty charge. The Company updates its warranty estimates on a quarterly basis when the actual product performance or field expense differs from original estimates.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></ix:nonNumeric><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" name="us-gaap:ResearchAndDevelopmentExpensePolicy" id="Tb_RaXoMjGETUCxzoC7cs7JQA" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(h) Research and Development Costs</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Research and development costs are expensed as incurred and include charges for the development of new technology and the transition of existing technology into new products or services.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></ix:nonNumeric><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" name="us-gaap:AdvertisingCostsPolicyTextBlock" id="Tb_vcyeUrz1iUygNfJj44-fnA" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(i) Advertising Expense</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The cost of advertising is expensed as incurred and totaled $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:AdvertisingExpense" scale="6" id="Narr_F81J5YsD60aLhSIZDxQ6Eg">0.3</ix:nonFraction> million, $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_irQajVZIkUmgjCJ-cxJ5AQ" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:AdvertisingExpense" scale="6" id="Narr_qbAzH21pykOe85qU7RBY4g">0.4</ix:nonFraction> million, and $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_ssAGFj6EXEiYqEtVZlyqxA" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:AdvertisingExpense" scale="6" id="Narr_EIeYshBluE-ohL84JSHBxg">0.5</ix:nonFraction> million for the years ended December 31, 2021, 2020, and 2019, respectively.</p></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" name="us-gaap:ShareBasedCompensationOptionAndIncentivePlansPolicy" id="Tb_lRt__98nx0CI0sFUBkhhLg" continuedAt="Tb_lRt__98nx0CI0sFUBkhhLg_cont1" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(j) Accounting for Share-based Compensation</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Share-based awards exchanged for employee services are accounted for under the fair value method. Accordingly, share-based compensation cost is measured at the grant date based on the estimated fair value of the award. The expense for awards is recognized over the employee&#8217;s requisite service period (generally the vesting period of the award). The Company has elected to treat awards with only service conditions and with graded vesting as <ix:nonFraction unitRef="Unit_Standard_item_Nx6z-4zfJUqwPafRGtV0RA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="INF" format="ixt-sec:numwordsen" name="veco:ShareBasedCompensationArrangementByShareBasedPaymentAwardServiceConditionsAndGradedVestingNumberOfAwards" scale="0" id="Narr_Vo6gpkfxXE6Kq9JDnOsGfA">one</ix:nonFraction> award. Consequently, the total compensation expense is recognized straight-line over the entire vesting period, so long as the compensation cost recognized at any date at least equals the portion of the grant date fair value of the award that is vested at that date.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">In addition to stock options, restricted share awards (&#8220;RSAs&#8221;) and restricted stock units (&#8220;RSUs&#8221;) with time-based vesting, the Company grants performance share units and awards (&#8220;PSUs&#8221; and &#8220;PSAs&#8221;) that have either performance or market conditions. Compensation cost for PSUs and PSAs with performance conditions is recognized over the requisite service period based on the timing and expected level of achievement of the performance targets. A change in the assessment of performance attainment prior to the conclusion of the performance period is recognized in the period of the change in estimate. Compensation cost for PSUs and PSAs with market conditions is recognized over the requisite service period regardless of the expected level of achievement. For all PSUs and PSAs, the number of shares issued to the employee at the conclusion of the service period may vary from the original target based upon the level of attainment of the performance or market conditions.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company uses the Black-Scholes option-pricing model to compute the estimated fair value of option awards and purchase rights under the Employee Stock Purchase Plan. The Company uses a Monte Carlo simulation to compute the estimated fair value of awards with market conditions. The Black-Scholes model and Monte Carlo simulation include assumptions regarding dividend yields, expected volatility, expected option term, and risk-free interest rates. See Note 13, &#8220;Stock Plans,&#8221; for additional information. </p></ix:nonNumeric></ix:continuation></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">F-11</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Veeco Instruments&#160;Inc. and Subsidiaries</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Notes to Consolidated Financial Statements (Continued)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;max-width:100%;position:relative;"><ix:continuation id="Tb_74Ye32wcL0KnWzB_jM7GZQ_cont3" continuedAt="Tb_74Ye32wcL0KnWzB_jM7GZQ_cont4"><ix:continuation id="Tb_lRt__98nx0CI0sFUBkhhLg_cont1"></ix:continuation><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" name="us-gaap:IncomeTaxPolicyTextBlock" id="Tb_Q3pLf96YQUaxByeaukObGw" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(k) Income Taxes</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Income taxes are accounted for under the asset and liability method. Deferred tax assets and liabilities are recognized for the future tax consequences attributable to differences between the financial statement carrying amounts of existing assets and liabilities and their respective tax bases and operating loss and tax credit carryforwards. Deferred tax assets and liabilities are measured using enacted tax rates expected to apply to taxable income in the years in which those temporary differences are expected to be recovered or settled. The effect on deferred tax assets and liabilities from a change in tax rate is recognized in income in the period that includes the enactment date. </p></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" name="us-gaap:ConcentrationRiskCreditRisk" id="Tb_ArnD36ypLkiJ6UrOAwz5qw" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(l) Concentration of Credit Risk</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Financial instruments that potentially subject the Company to concentrations of credit risk consist primarily of cash and cash equivalents, investments, derivative financial instruments used in hedging activities, and accounts receivable. The Company invests in a variety of financial instruments and, by policy, limits the amount of credit exposure with any one financial institution or commercial issuer. Historically, the Company has not experienced any material credit losses on its investments. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company maintains an allowance reserve for potentially uncollectible accounts for estimated losses resulting from the inability of its customers to make required payments. The Company evaluates its allowance for doubtful accounts based on a combination of factors. In circumstances where specific invoices are deemed to be uncollectible, the Company provides a specific allowance for bad debt against the amount due to reduce the net recognized receivable to the amount reasonably expected to be collected. The Company also provides allowances based on its write-off history. Finally, the Company also considers its current expectations of future economic conditions, including the impact of COVID-19, when estimating its allowance for doubtful accounts. The allowance for doubtful accounts totaled $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:AllowanceForDoubtfulAccountsReceivableCurrent" scale="6" id="Narr_dIUy16j5BkWnO3ikW9mELA"><ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:AllowanceForDoubtfulAccountsReceivableCurrent" scale="6" id="Narr_kesJwGLa70aVZfCNvY-FBw">0.7</ix:nonFraction></ix:nonFraction> million at both December 31, 2021 and 2020.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">To further mitigate the Company&#8217;s exposure to uncollectable accounts, the Company may request certain customers provide a negotiable irrevocable letter of credit drawn on a reputable financial institution. These irrevocable letters of credit are typically issued to mature between </span><span style="-sec-ix-hidden:Hidden_lLLL67cC-kS_kJateyYGvg;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">zero</span></span><span style="font-size:10pt;"> and </span><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" format="ixt-sec:durwordsen" name="veco:IrrevocableLettersOfCreditMaturityPeriodMaximum" id="Narr_dUOyWF3slUmY_Ss0bKQjAA"><span style="font-size:10pt;">90 days</span></ix:nonNumeric><span style="font-size:10pt;"> from the date the documentation requirements are met, typically when a system ships or upon receipt of final acceptance from the customer. The Company, at its discretion, may monetize these letters of credit on a non-recourse basis after they become negotiable but before maturity. The fees associated with the monetization are included in &#8220;Selling, general, and administrative&#8221; in the Consolidated Statements of Operations and were immaterial for the years ended December 31, 2021, 2020, and 2019.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></ix:nonNumeric><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" name="us-gaap:FairValueOfFinancialInstrumentsPolicy" id="Tb_zg8dr-B9VkS-_uHPFiQ2TA" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(m) Fair Value of Financial Instruments</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The carrying amounts of financial instruments, including cash equivalents, accounts receivable, accounts payable, and accrued expenses reflected in the consolidated financial statements approximate fair value due to their short-term maturities. The fair value of debt for footnote disclosure purposes, including current maturities, if any, is estimated using recently quoted market prices of the instrument, or if not available, a discounted cash flow analysis based on the estimated current incremental borrowing rates for similar types of instruments.</p></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" name="veco:CashCashEquivalentsAndShortTermInvestmentsPolicyTextBlock" id="Tb_E5lQhRb5yUuf-yyzeLrbyw" continuedAt="Tb_E5lQhRb5yUuf-yyzeLrbyw_cont1" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(n) Cash, Cash Equivalents, and Short-term Investments</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">All financial instruments purchased with an original maturity of three months or less at the time of purchase are considered cash equivalents. Such items may include liquid money market funds, certificate of deposit and time deposit accounts, U.S. treasuries, government agency securities, and corporate debt. Investments that are classified as cash equivalents are carried at cost, which approximates fair value. The Company&#8217;s cash and cash equivalents includes $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:CashEquivalentsAtCarryingValue" scale="6" id="Narr_rYw-lqsKhkmwvr-EWI-3KA">41.7</ix:nonFraction> million and $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:CashEquivalentsAtCarryingValue" scale="6" id="Narr_mbBMf7a98EGxkNtnJiXSsQ">86.2</ix:nonFraction> million of cash equivalents at December 31, 2021 and 2020, respectively.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></ix:nonNumeric></ix:continuation></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">F-12</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Veeco Instruments&#160;Inc. and Subsidiaries</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Notes to Consolidated Financial Statements (Continued)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;max-width:100%;position:relative;"><a id="_Hlk533770"></a><ix:continuation id="Tb_74Ye32wcL0KnWzB_jM7GZQ_cont4" continuedAt="Tb_74Ye32wcL0KnWzB_jM7GZQ_cont5"><ix:continuation id="Tb_E5lQhRb5yUuf-yyzeLrbyw_cont1"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">A portion of the Company&#8217;s cash and cash equivalents is held by its subsidiaries throughout the world, frequently in each subsidiary&#8217;s respective functional currency, which is typically the U.S. dollar. Approximately <ix:nonFraction unitRef="Unit_Standard_pure_60KFN_p23EC7YcClApV5TA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="2" format="ixt:numdotdecimal" name="veco:CashAndCashEquivalentsMaintainedOutsideBySubsidiariesAsPercent" scale="-2" id="Narr_t2WMgPYL4EixRdrBxExVug">32</ix:nonFraction>% and <ix:nonFraction unitRef="Unit_Standard_pure_60KFN_p23EC7YcClApV5TA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="2" format="ixt:numdotdecimal" name="veco:CashAndCashEquivalentsMaintainedOutsideBySubsidiariesAsPercent" scale="-2" id="Narr_9osycae5AEGh6nTvC6Odew">31</ix:nonFraction>% of cash and cash equivalents were maintained outside the United States at December 31, 2021 and 2020, respectively.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Short-term investments consist of marketable debt securities, and are generally classified as available-for-sale for use in current operations, if required, and are reported at fair value, with unrealized gains and losses, net of tax, presented as a separate component of stockholders&#8217; equity under the caption &#8220;Accumulated other comprehensive income&#8221; on the Consolidated Balance Sheets. These securities can include U.S. treasuries, government agency securities, corporate debt, and commercial paper, all with maturities of greater than three months when purchased. All realized gains and losses and unrealized losses resulting from declines in fair value that are other than temporary are included in &#8220;Other operating expense (income), net&#8221; in the Consolidated Statements of Operations. The specific identification method is used to determine the realized gains and losses on investments. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Non-marketable equity securities are equity securities without readily observable market prices and are included in &#8220;Other assets&#8221; in the Consolidated Balance Sheets. Non-marketable securities are measured at cost, adjusted for changes in observable prices minus impairment. Changes in fair value and impairment charges are included in &#8220;Other income (expense), net&#8221; in the Consolidated Statements of Operations.</p></ix:continuation><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" name="us-gaap:InventoryPolicyTextBlock" id="Tb_7dxXr1StikKXQf150pgFyg" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(o) Inventories</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Inventories are stated at the lower of cost or net realizable value, with cost determined on a first-in, first-out basis. Each quarter the Company assesses the valuation and recoverability of all inventories: materials (raw materials, spare parts, and service inventory); work-in-process; and finished goods. Obsolete inventory or inventory in excess of management&#8217;s estimated usage requirement is written down to its estimated net realizable value if less than cost. The Company evaluates usage requirements by analyzing historical usage, anticipated demand, alternative uses of materials, and other qualitative factors. Unanticipated changes in demand for the Company&#8217;s products may require a write down of inventory, which would be reflected in cost of sales in the period the revision is made. Inventory acquired as part of a business combination is recorded at fair value on the date of acquisition.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></ix:nonNumeric><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" name="us-gaap:BusinessCombinationsPolicy" id="Tb_QtoS7IgEsEe264FHpIxL8w" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(p) Business Combinations</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company allocates the fair value of the purchase consideration of the Company&#8217;s acquisitions to the tangible assets, intangible assets, including in-process research and development (&#8220;IPR&amp;D&#8221;), if any, and liabilities assumed, based on estimated fair values. The excess of the fair value of purchase consideration over the fair values of these identifiable assets and liabilities is recorded as goodwill. Acquisition-related expenses are recognized separately from the business combination and are expensed as incurred. </p></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" name="us-gaap:GoodwillAndIntangibleAssetsIntangibleAssetsIndefiniteLivedPolicy" id="Tb_IUeTSNCt90qiukWt-rSzog" continuedAt="Tb_IUeTSNCt90qiukWt-rSzog_cont1" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(q) Goodwill and Indefinite-Lived Intangible Assets</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Goodwill is an asset representing the future economic benefits arising from assets acquired in a business combination that are not individually identified and separately recognized. Goodwill is measured as the excess of the consideration transferred over the net fair value of identifiable assets acquired and liabilities assumed. Intangible assets with indefinite useful lives are measured at their respective fair values on the acquisition date. Intangible assets related to IPR&amp;D projects are considered to be indefinite-lived until the completion or abandonment of the associated research and development (&#8220;R&amp;D&#8221;) efforts. If and when development is complete, the associated assets would be deemed long-lived and would then be amortized based on their respective estimated useful lives at that point in time. Goodwill and indefinite-lived intangibles are not amortized into results of operations but instead are evaluated for impairment. The Company performs the evaluation in the beginning of the fourth quarter of each year or more frequently if impairment indicators arise.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></ix:nonNumeric></ix:continuation></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">F-13</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Veeco Instruments&#160;Inc. and Subsidiaries</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Notes to Consolidated Financial Statements (Continued)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;max-width:100%;position:relative;"><ix:continuation id="Tb_74Ye32wcL0KnWzB_jM7GZQ_cont5" continuedAt="Tb_74Ye32wcL0KnWzB_jM7GZQ_cont6"><ix:continuation id="Tb_IUeTSNCt90qiukWt-rSzog_cont1"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">In testing goodwill for impairment, the Company may first perform a qualitative assessment of whether it is more likely than not that the reporting unit&#8217;s fair value is less than its carrying amount, and, if so, the Company then quantitatively compares the fair value of the reporting unit to its carrying amount. If the fair value exceeds the carrying amount, goodwill is not impaired. If the carrying amount exceeds fair value, the Company then records an impairment loss equal to the difference, up to the carrying value of goodwill.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">The Company determines the fair value of its reporting unit based on a reconciliation of the fair value of the reporting unit to the Company&#8217;s adjusted market capitalization. The adjusted market capitalization is calculated by multiplying the average share price of the Company&#8217;s common stock for the last </span><span style="-sec-ix-hidden:Hidden_zAaerYZD70-O1b7vxibxZA;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">ten</span></span><span style="font-size:10pt;"> trading days prior to the measurement date by the number of outstanding common shares and adding a control premium. The control premium is estimated using historical transactions in similar industries.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">In testing indefinite-lived intangible assets for impairment, the Company may first perform a qualitative assessment of whether it is more likely than not that the fair value of the indefinite-lived intangible asset is less than its carrying amount, and, if so, the Company then quantitatively compares the fair value of the indefinite-lived intangible asset to its carrying amount. The Company determines the fair value of its indefinite-lived intangible assets using a discounted cash flow method.</p></ix:continuation><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" name="veco:LongLivedAssetsAndCostMethodInvestmentsPolicyTextBlock" id="Tb_tzQBPaL3JkWDz7KbrGvybg" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(r) Long-lived Assets</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Long-lived intangible assets consist of purchased technology, customer relationships, patents, trademarks and tradenames, and backlog and are initially recorded at fair value. Long-lived intangible assets are amortized over their estimated useful lives in a method reflecting the pattern in which the economic benefits are consumed or straight-lined if such pattern cannot be reliably determined.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Property, plant, and equipment are recorded at cost. Depreciation expense is calculated based on the estimated useful lives of the assets by using the straight-line method. Amortization of leasehold improvements is recognized using the straight-line method over the shorter of the remaining lease term or the estimated useful lives of the improvements.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Long-lived assets are reviewed for impairment whenever events or changes in circumstances indicate that the carrying amount of an asset may not be recoverable. If circumstances require a long-lived asset or asset group be tested for possible impairment, a recoverability test is performed utilizing undiscounted cash flows expected to be generated by that asset or asset group compared to its carrying amount. If the carrying amount of the long-lived asset or asset group is not recoverable on an undiscounted cash flow basis, impairment is recognized to the extent the carrying amount exceeds its fair value. Fair value is determined through various valuation techniques including discounted cash flow models or, when available, quoted market values and third-party appraisals.</p></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" name="us-gaap:LesseeLeasesPolicyTextBlock" id="Tb_u10Y4UJ-zUCONfqR5X2RYw" continuedAt="Tb_u10Y4UJ-zUCONfqR5X2RYw_cont1" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(s) Leases</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Upon the adoption of ASC Topic 842, <i style="font-style:italic;">Leases</i> (&#8220;ASC 842&#8221;) as of January 1, 2019, the Company determines at contract inception if an arrangement is a lease, or contains a lease, of an identified asset for which the Company has the right to obtain substantially all of the economic benefits from its use and the right to direct its use. Right-of-use (&#8220;ROU&#8221;) assets represent the Company&#8217;s right to use an underlying asset for the lease term, while lease liabilities represent the Company&#8217;s obligation to make lease payments arising from the lease. Operating lease ROU assets and liabilities are recognized at lease commencement date based on the present value of lease payments over the lease term. The implicit discount rate in the Company&#8217;s leases generally cannot readily be determined, and therefore the Company uses its incremental borrowing rate based on information available at lease commencement date in determining the present value of future payments. The Company has options to renew or terminate certain leases. These options are included in the determination of lease term when it is reasonably certain that the Company will exercise such options. The Company does not separate lease and non-lease components in determining ROU assets or lease liabilities for real estate leases. </p></ix:nonNumeric></ix:continuation></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">F-14</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Veeco Instruments&#160;Inc. and Subsidiaries</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Notes to Consolidated Financial Statements (Continued)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;max-width:100%;position:relative;"><ix:continuation id="Tb_74Ye32wcL0KnWzB_jM7GZQ_cont6"><ix:continuation id="Tb_u10Y4UJ-zUCONfqR5X2RYw_cont1"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Additionally, the Company does not recognize ROU assets or lease liabilities for leases with original terms or renewals of one year or less.</p></ix:continuation><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" name="us-gaap:NewAccountingPronouncementsPolicyPolicyTextBlock" id="Tb_zfe3sEOdM0qbYgHp5cux7w" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(t) Recently Adopted Accounting Standards</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">The Company </span><ix:nonNumeric contextRef="As_Of_4_1_2020_us-gaap_AdjustmentsForNewAccountingPronouncementsAxis_us-gaap_AccountingStandardsUpdate201912Member_fzouU-j8T0aURN-1E2xvCw" format="ixt:booleantrue" name="us-gaap:ChangeInAccountingPrincipleAccountingStandardsUpdateAdopted" id="Narr_XvVQ_0NyZkufEEIAUwr5iw"><span style="font-size:10pt;">adopted</span></ix:nonNumeric><span style="font-size:10pt;"> ASU 2019-12:&#160;</span><i style="font-size:10pt;font-style:italic;">Income Taxes (Topic 740): Simplifying the Accounting for Income Taxes </i><span style="font-size:10pt;">in the second quarter of 2020, effective as of the beginning of fiscal year 2020. This ASU simplifies the accounting for income taxes by eliminating certain exceptions to the general principles and simplifying several aspects of ASC 740,&#160;</span><i style="font-size:10pt;font-style:italic;">Income Taxes,&#160;</i><span style="font-size:10pt;">including, but not limited to, requirements related to the following: a) exception to the incremental approach for intraperiod tax allocation; b) the tax basis step-up in goodwill obtained in a transaction that is not a business combination; c) ownership changes in investments - changes from a subsidiary to an equity method investment; d) separate financial statements of entities not subject to tax; e) interim-period accounting for enacted changes in tax law; and f) the year-to-date loss limitation in interim-period tax accounting. The adoption did not have a material impact on the Company&#8217;s consolidated financial statements as of the date of adoption.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(u) Recent Accounting Pronouncements Not Yet Adopted</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">In August 2020, the FASB issued ASU 2020-06:&#160;</span><i style="font-size:10pt;font-style:italic;">Debt &#8211; Debt with Conversion and Other Options (Subtopic 470-20) and Derivatives and Hedging &#8211; Contracts in Entity&#8217;s Own Equity (Subtopic 815-40): Accounting for Convertible Instruments and Contracts in an Entity&#8217;s Own Equity</i><span style="font-size:10pt;">. This standard simplifies the accounting for convertible debt instruments by removing the separation models for convertible debt with a cash conversion feature, as well as convertible instruments with a beneficial conversion feature. As a result, entities will account for a convertible debt instrument wholly as debt, unless certain other conditions are met. The elimination of these models will reduce non-cash interest expense for entities that have issued a convertible instrument that was within the scope of those models before the adoption of ASU 2020-06. Additionally, ASU 2020-06&#160;requires the application of the if-converted method for calculating diluted earnings per share, and precludes the use of the treasury stock method for certain debt instruments. The provisions of ASU 2020-06&#160;are applicable for fiscal years beginning after December 15, 2021.</span><span style="font-size:10pt;"> </span><span style="font-size:10pt;">The Company&#8217;s 2023 Notes, 2025 Notes, and 2027 Notes all are currently accounted for using the separation models for convertible debt with a cash conversion feature, and therefore upon </span><ix:nonNumeric contextRef="As_Of_1_1_2022_us-gaap_AdjustmentsForNewAccountingPronouncementsAxis_us-gaap_AccountingStandardsUpdate202006Member_X77-eX7Xt0ivdawnGLpmKA" format="ixt:booleantrue" name="us-gaap:ChangeInAccountingPrincipleAccountingStandardsUpdateAdopted" id="Narr_Ci5bvfga60OA5rYWPcEwpQ"><span style="font-size:10pt;">adoption</span></ix:nonNumeric><span style="font-size:10pt;"> of ASU 2020-06 in the first quarter of 2022, the Company expects a decrease in non-cash interest expense. Additionally, the Company will be required to use the if-converted method for its current convertible debt when calculating diluted earnings (loss) per share, which will result in an increase in income available to common shareholders, as well as an increase in diluted shares outstanding. The Company expects to use the modified retrospective method of adoption, which will result in an increase in the carrying value of long-term debt of approximately </span><span style="font-size:10pt;">$<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_srt_CumulativeEffectPeriodOfAdoptionAxis_srt_CumulativeEffectPeriodOfAdoptionAdjustmentMember_srt_StatementScenarioAxis_srt_ProFormaMember_us-gaap_AdjustmentsForNewAccountingPronouncementsAxis_us-gaap_AccountingStandardsUpdate202006Member_Y11gVutE8kGPEf8XvuB8zg" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:LongTermDebt" scale="6" id="Narr_36i9_a7CIE-Ze22Xxrqd0A">44.3</ix:nonFraction></span><span style="font-size:10pt;"> million as of January 1, 2022, with a corresponding decrease in </span><span style="-sec-ix-hidden:Hidden_4-EcM48rokawiYfmorI9eQ;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">stockholders&#8217; equity</span></span><span style="font-size:10pt;">.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company is evaluating other pronouncements recently issued but not yet adopted. The adoption of these pronouncements is not expected to have a material impact on our consolidated financial statements.</p></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></ix:continuation><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" name="us-gaap:EarningsPerShareTextBlock" id="Tb_TRT1ITtaNkaj_unZQ2OAvg" continuedAt="Tb_TRT1ITtaNkaj_unZQ2OAvg_cont1" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note 2 &#8212; Income (Loss) Per Share</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Basic income (loss) per share is calculated by dividing net income (loss) by the weighted average number of shares outstanding during the period. Diluted income per share is calculated by dividing net income by the weighted average number of shares used to calculate basic income per share plus the weighted average number of common share equivalents outstanding during the period. The dilutive effect of outstanding options to purchase common stock and non-participating share-based awards is considered in diluted income per share by application of the treasury stock method. The dilutive effect of performance share units is included in diluted income per common share in the periods the performance targets have been achieved, or would have been achieved if the reporting date was the end of the contingency period. The Company has determined that it has the ability and intent to settle the principal amount of its convertible senior notes in cash, and the excess of the principal portion in shares of its common stock. As such, the Company accounts for the conversion spread using the treasury stock method, and the shares issuable upon conversion of the Notes are not included in the calculation of diluted earnings per share except to the extent that the conversion </p></ix:nonNumeric></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">F-15</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Veeco Instruments&#160;Inc. and Subsidiaries</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Notes to Consolidated Financial Statements (Continued)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;max-width:100%;position:relative;"><a id="Tc_NYlkX2PLN0yuVY8fxzObww_1_3"></a><a id="Tc_XXtcTQ6FX0a74sKU_SICaw_2_3"></a><a id="Tc_QrR6hOKHCU-UFlpBzGWpFg_2_6"></a><a id="Tc_hVROaiH2FkyXpO1yRb19nQ_2_9"></a><a id="Tc_SQeVnQCr_kqVxgpvS-mBuA_3_3"></a><a id="Tc_upgvkps4VkGTgIW8tiEVbw_4_0"></a><a id="Tc_WTNkCWx_mUKyi6tdyYNMiQ_5_0"></a><a id="Tc_CVyIre9mv06Uh5tnJTOYqA_6_0"></a><a id="Tc_JxH0lTZXOUaFtD1r95iouA_6_3"></a><a id="Tc_FqdnfXlBs0eCUXnq2kdizQ_6_6"></a><a id="Tc_A1PRtYFy80yUAs_Z1orDLg_6_9"></a><a id="Tc_GQLqlkBc-kmqAyfZBSyeMA_7_0"></a><a id="Tc_Ai0G4-2SA0KMYOOBn1Ig-w_7_3"></a><a id="Tc_9ua6xrM2hkCxSJh_d3fvDQ_7_6"></a><a id="Tc_Bj5sYUcLwk2GgGk2lhHljw_7_9"></a><a id="Tc_IOehqUxcSUmudSv4XBa9Yw_9_0"></a><a id="Tc_5U8wXqxO10iPiy4IzXR2ow_10_0"></a><a id="Tc_MpBI5ZiTIEWKeYNEdJGtMQ_10_7"></a><a id="Tc_wkXRaKr6REScaqpAKyMDSw_10_10"></a><a id="Tc_VWdjpuF7JUu1_hyGPUCxDw_11_0"></a><a 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name="us-gaap:ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock" id="Tb_B5yXtaxfZkKy88irDkMyew" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:61.83%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:61.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:33.36%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">For the year ended December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:61.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.51%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.51%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.51%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2019</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="11" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:61.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:33.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands, except per share amounts)</i></p></td></tr><tr><td style="vertical-align:bottom;width:61.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Net income (loss)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="-sec-ix-hidden:Hidden_Qk9Z5GG2gU2eiypiuu7Caw;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">$</span></span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic" scale="3" id="Tc_m4bJHjO8lkaaNdvTLPAg2Q_4_4">26,038</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="-sec-ix-hidden:Hidden_E-eaVTHWMk6C3GCtkGb3ZA;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">$</span></span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_irQajVZIkUmgjCJ-cxJ5AQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic" sign="-" scale="3" id="Tc_7XUtSWtiCUOkjxYfy_vmRg_4_7">8,391</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="-sec-ix-hidden:Hidden_PpBtoGgI3k6DXC5KpPJQgw;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">$</span></span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_ssAGFj6EXEiYqEtVZlyqxA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic" sign="-" scale="3" id="Tc_bN-p_S-ffk-walMK7eQR1w_4_10">78,733</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:bottom;width:61.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Net income (loss) per common share:</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:61.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Basic</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_tlsv-okr1ESmAF6EktRdIg" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="2" format="ixt:numdotdecimal" name="us-gaap:EarningsPerShareBasic" scale="0" id="Tc_IaU-exqOsEW2g-A_oe83Fw_6_4">0.53</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Divide_USD_shares_tlsv-okr1ESmAF6EktRdIg" contextRef="Duration_1_1_2020_To_12_31_2020_irQajVZIkUmgjCJ-cxJ5AQ" decimals="2" format="ixt:numdotdecimal" name="us-gaap:EarningsPerShareBasic" sign="-" scale="0" id="Tc_AKAzhaVIa0Ca85ssQfVZOw_6_7">0.17</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Divide_USD_shares_tlsv-okr1ESmAF6EktRdIg" contextRef="Duration_1_1_2019_To_12_31_2019_ssAGFj6EXEiYqEtVZlyqxA" decimals="2" format="ixt:numdotdecimal" name="us-gaap:EarningsPerShareBasic" sign="-" scale="0" id="Tc_5FdiFfJP2kOXrgVkHON_vA_6_10">1.66</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:bottom;width:61.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Diluted</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_tlsv-okr1ESmAF6EktRdIg" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="2" format="ixt:numdotdecimal" name="us-gaap:EarningsPerShareDiluted" scale="0" id="Tc_AdjbDm30x0CIer5Fe99fpg_7_4">0.49</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Divide_USD_shares_tlsv-okr1ESmAF6EktRdIg" contextRef="Duration_1_1_2020_To_12_31_2020_irQajVZIkUmgjCJ-cxJ5AQ" decimals="2" format="ixt:numdotdecimal" name="us-gaap:EarningsPerShareDiluted" sign="-" scale="0" id="Tc_haQ5rSrNVk-Rge_jYWzckw_7_7">0.17</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Divide_USD_shares_tlsv-okr1ESmAF6EktRdIg" contextRef="Duration_1_1_2019_To_12_31_2019_ssAGFj6EXEiYqEtVZlyqxA" decimals="2" format="ixt:numdotdecimal" name="us-gaap:EarningsPerShareDiluted" sign="-" scale="0" id="Tc_pEYPcYATb0GlqmX3_C9Q4w_7_10">1.66</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:bottom;width:61.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:61.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Basic weighted average shares outstanding</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_CQLzaUKOXkqvj8CNr9pzfg" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:WeightedAverageNumberOfSharesOutstandingBasic" scale="3" id="Tc_Jv-8NQ56_USH8EPrIJeRJw_9_4">49,073</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_CQLzaUKOXkqvj8CNr9pzfg" contextRef="Duration_1_1_2020_To_12_31_2020_irQajVZIkUmgjCJ-cxJ5AQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:WeightedAverageNumberOfSharesOutstandingBasic" scale="3" id="Tc_V6--2FvU-EC3cBe_aRO66g_9_7">48,362</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_CQLzaUKOXkqvj8CNr9pzfg" contextRef="Duration_1_1_2019_To_12_31_2019_ssAGFj6EXEiYqEtVZlyqxA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:WeightedAverageNumberOfSharesOutstandingBasic" scale="3" id="Tc_bQP7A89mYUa_Qa2KbRay5w_9_10">47,482</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:61.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Effect of potentially dilutive share-based awards</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_CQLzaUKOXkqvj8CNr9pzfg" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="-3" format="ixt:numdotdecimal" 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Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td></tr><tr><td style="vertical-align:bottom;width:61.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Diluted weighted average shares outstanding</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_CQLzaUKOXkqvj8CNr9pzfg" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding" scale="3" id="Tc_0IYp4BCcI0WbPbCiDvlWPQ_12_4">53,643</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_CQLzaUKOXkqvj8CNr9pzfg" contextRef="Duration_1_1_2020_To_12_31_2020_irQajVZIkUmgjCJ-cxJ5AQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding" scale="3" id="Tc_nNsWywIYQke5efX8KPNIfA_12_7">48,362</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_CQLzaUKOXkqvj8CNr9pzfg" contextRef="Duration_1_1_2019_To_12_31_2019_ssAGFj6EXEiYqEtVZlyqxA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding" scale="3" id="Tc_MVHbF7msLU2lx0LKXi_0ug_12_10">47,482</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:61.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:middle;width:61.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Common share equivalents excluded from the diluted weighted average shares outstanding since the Company incurred a net loss and their effect would be antidilutive</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_CQLzaUKOXkqvj8CNr9pzfg" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis_veco_CommonStockEquivalentsMember_zwO9EqJI1kufw81b8hxnvQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount" scale="3" id="Tc_xlLb-wCFW0CvBGpuZqcqZQ_14_7">947</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_CQLzaUKOXkqvj8CNr9pzfg" contextRef="Duration_1_1_2019_To_12_31_2019_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis_veco_CommonStockEquivalentsMember_9BXicZ2IyU2Y17_CgZlj_Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount" scale="3" id="Tc_mJtkuL5kwUC_VBDP8NBzmQ_14_10">531</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:61.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Potentially dilutive shares excluded from the diluted calculation as their effect would be antidilutive</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_CQLzaUKOXkqvj8CNr9pzfg" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis_veco_PotentiallyDilutiveSharesMember_NbG5it2Suk-F_TTw25QMHg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount" scale="3" id="Tc_ZU24OR40WkSGbw-48TkVZQ_15_4">456</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_CQLzaUKOXkqvj8CNr9pzfg" 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Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_CQLzaUKOXkqvj8CNr9pzfg" contextRef="Duration_1_1_2019_To_12_31_2019_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis_us-gaap_ConvertibleDebtMember_zA9VKJp9AU6yxfgMd_Y88g" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount" scale="3" id="Tc_3VVV3XPFZUaIgz0PTZpBog_16_10">8,618</ix:nonFraction></p></td></tr></table></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></ix:continuation><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" name="us-gaap:FairValueDisclosuresTextBlock" id="Tb__oD41Z9BdkuC5kiKVFQKIw" continuedAt="Tb__oD41Z9BdkuC5kiKVFQKIw_cont1" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note 3 &#8212; Fair Value Measurements</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Fair value is the price that would be received for an asset or the amount paid to transfer a liability in an orderly transaction between market participants. The Company is required to classify certain assets and liabilities based on the following fair value hierarchy:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">Level 1: Quoted prices in active markets that are unadjusted and accessible at the measurement date for identical, unrestricted assets or liabilities;</span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">Level 2: Quoted prices for identical assets and liabilities in markets that are not active, quoted prices for similar assets and liabilities in active markets or financial instruments for which significant inputs are observable, either directly or indirectly; and</span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">Level 3: Prices or valuations that require inputs that are both significant to the fair value measurement and unobservable.</span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">A financial instrument&#8217;s level within the fair value hierarchy is based on the lowest level of any input that is significant to the fair value measurement. The Company has evaluated the estimated fair value of financial instruments using available market information and valuations as provided by third-party sources. The use of different market assumptions or estimation methodologies could have a significant effect on the estimated fair value amounts.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></ix:nonNumeric></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">F-16</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Veeco Instruments&#160;Inc. and Subsidiaries</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Notes to Consolidated Financial Statements (Continued)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span 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style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:57.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;width:9.17%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Level&#160;1</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Level&#160;2</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.75%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Level&#160;3</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.19%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Total</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="13" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:57.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:40.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:57.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">December&#160;31, 2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:57.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"><b style="font-weight:bold;">Cash equivalents</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:57.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Certificate of deposits and time deposits</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_us-gaap_CashAndCashEquivalentsAxis_veco_CertificateOfDepositsAndTimeDepositsMember_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel1Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_FUg0nyDSgEGrpTBM3wHeqA" decimals="-3" format="ixt:numdotdecimal" name="veco:CashEquivalentsFairValueDisclosure" scale="3" id="Tc_AgtRKQuTlkKd9VY_rTHG7g_5_3">41,544</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_us-gaap_CashAndCashEquivalentsAxis_veco_CertificateOfDepositsAndTimeDepositsMember_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_TVVuii27nkqnBRFARPM-IA" decimals="-3" format="ixt:numdotdecimal" name="veco:CashEquivalentsFairValueDisclosure" scale="3" id="Tc_POFctfwQHECIVhwFE8kb-Q_5_12">41,544</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:57.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Money market cash</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_us-gaap_CashAndCashEquivalentsAxis_us-gaap_MoneyMarketFundsMember_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel1Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_T7Ioe7OqcU21NgJurOUJgA" decimals="-3" format="ixt:numdotdecimal" name="veco:CashEquivalentsFairValueDisclosure" scale="3" id="Tc_DvyCZGTXIkC-UqEvV8n7mA_6_3">121</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_us-gaap_CashAndCashEquivalentsAxis_us-gaap_MoneyMarketFundsMember_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_fYSBTL-vhU2djcc8nHxiMA" decimals="-3" format="ixt:numdotdecimal" name="veco:CashEquivalentsFairValueDisclosure" scale="3" id="Tc_LTKau63vr0-DCbosSlwF0A_6_12">121</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:57.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel1Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_8rbUPpYyyUCm9cRaxrZ8hQ" decimals="-3" format="ixt:numdotdecimal" name="veco:CashEquivalentsFairValueDisclosure" scale="3" id="Tc_0kaW5H2LrUunVJ0yDyoQIQ_7_3">41,665</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_aYJwEK8h4EKorRgC0sjIow" decimals="-3" format="ixt:numdotdecimal" name="veco:CashEquivalentsFairValueDisclosure" scale="3" id="Tc_cu_y0yxpuEKRD52d-Ya26g_7_12">41,665</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:57.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"><b style="font-weight:bold;">Short-term investments</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:57.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">U.S. treasuries</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel1Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_us-gaap_FinancialInstrumentAxis_us-gaap_USTreasurySecuritiesMember_c-Sh28qrJ0GrdkslAXRSSA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InvestmentsFairValueDisclosure" scale="3" id="Tc_ddU71IGoBUqCltjy96C49Q_9_3">51,095</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_us-gaap_FinancialInstrumentAxis_us-gaap_USTreasurySecuritiesMember_vH7wcDcRaECedAeS5qFNBQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InvestmentsFairValueDisclosure" scale="3" id="Tc_x9YtIHKvy0eoj15k1Dx3LQ_9_12">51,095</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:57.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Government agency securities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel2Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_us-gaap_FinancialInstrumentAxis_us-gaap_USGovernmentCorporationsAndAgenciesSecuritiesMember_h7H-FHlAWEGM2xtygOHqKA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InvestmentsFairValueDisclosure" scale="3" id="Tc_Eqbn22IPs0W9_ALtZgLOZQ_10_6">12,052</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_us-gaap_FinancialInstrumentAxis_us-gaap_USGovernmentCorporationsAndAgenciesSecuritiesMember_Q13sNxhO2Ei_8_6GiNUi_w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InvestmentsFairValueDisclosure" scale="3" id="Tc_9aYYqUNJWEOH8P0Ene0PvA_10_12">12,052</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:57.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Corporate debt</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel2Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_us-gaap_FinancialInstrumentAxis_us-gaap_CorporateDebtSecuritiesMember_4gbdE-0ZxkKa3KTk82x5XA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InvestmentsFairValueDisclosure" scale="3" id="Tc_TTuozGTjk0KuTFwMW5fl1g_11_6">40,035</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_us-gaap_FinancialInstrumentAxis_us-gaap_CorporateDebtSecuritiesMember_DsRUMPMiGkeAcljZx_45yw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InvestmentsFairValueDisclosure" scale="3" id="Tc_P6A-j3U3FkS72hqypQFFAA_11_12">40,035</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:57.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Commercial paper</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel2Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_us-gaap_FinancialInstrumentAxis_us-gaap_CommercialPaperMember_xb3TqfROKE6TO-NicAApFA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InvestmentsFairValueDisclosure" scale="3" id="Tc_It8UKoyj30m-A0smV9amMw_12_6">999</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_us-gaap_FinancialInstrumentAxis_us-gaap_CommercialPaperMember_xmkFSg4gC0GKJIPX3F7WWg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InvestmentsFairValueDisclosure" scale="3" id="Tc_aao_cPXSWUScJIRqJ8bfCA_12_12">999</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:57.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel1Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_8rbUPpYyyUCm9cRaxrZ8hQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InvestmentsFairValueDisclosure" scale="3" id="Tc_S5XLCZan_kOPhkY6y7YEMA_13_3">51,095</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel2Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_a7JT3w4P3kigg4eRS9aPpg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InvestmentsFairValueDisclosure" scale="3" id="Tc_woNTeuQpokSimbqvO-ri1w_13_6">53,086</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_aYJwEK8h4EKorRgC0sjIow" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InvestmentsFairValueDisclosure" scale="3" id="Tc_pcF6e9gwyU-nTN-X6ZlMnw_13_12">104,181</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:57.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 0pt 18pt;"><span style="font-size:10pt;font-weight:bold;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:57.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">December&#160;31, 2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:57.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"><b style="font-weight:bold;">Cash equivalents</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:57.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Certificate of deposits and time deposits</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_us-gaap_CashAndCashEquivalentsAxis_veco_CertificateOfDepositsAndTimeDepositsMember_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel1Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_o0Pe8LTp6Eq54wD1G2Ibng" decimals="-3" format="ixt:numdotdecimal" name="veco:CashEquivalentsFairValueDisclosure" scale="3" id="Tc_p5s22PdG4U-p0VcnpPjRCw_17_3">59,168</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_us-gaap_CashAndCashEquivalentsAxis_veco_CertificateOfDepositsAndTimeDepositsMember_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_TKfctH6x0kur3-5nNvjhZw" decimals="-3" format="ixt:numdotdecimal" name="veco:CashEquivalentsFairValueDisclosure" scale="3" id="Tc_TgBwKVkcTUGS-rEcfBkIkg_17_12">59,168</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:57.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Commercial paper</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_us-gaap_CashAndCashEquivalentsAxis_us-gaap_CommercialPaperMember_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel2Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_8vnS-F9lIE2YbJivrSVDOg" decimals="-3" format="ixt:numdotdecimal" name="veco:CashEquivalentsFairValueDisclosure" scale="3" id="Tc_i2ZXEiY2OEOUshahr50PrA_18_6">2,000</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_us-gaap_CashAndCashEquivalentsAxis_us-gaap_CommercialPaperMember_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_ENksfkq-HkScKqdMWbCEuw" decimals="-3" format="ixt:numdotdecimal" name="veco:CashEquivalentsFairValueDisclosure" scale="3" id="Tc_btGzgzUfQUePMYme4FhhPw_18_12">2,000</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:57.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">U.S. treasuries</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_us-gaap_CashAndCashEquivalentsAxis_us-gaap_USTreasurySecuritiesMember_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel1Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_oxx6gVaLp0yWDTEZlAwYug" decimals="-3" format="ixt:numdotdecimal" name="veco:CashEquivalentsFairValueDisclosure" scale="3" id="Tc_B_naxv_1-k-eoO-cBAejEg_19_3">24,997</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_us-gaap_CashAndCashEquivalentsAxis_us-gaap_USTreasurySecuritiesMember_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_CHqkdLMZlEqcbS9i4rf2_Q" decimals="-3" format="ixt:numdotdecimal" name="veco:CashEquivalentsFairValueDisclosure" scale="3" id="Tc_wHbg57XpkEu9b6KsmAWnfw_19_12">24,997</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:57.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel1Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_HBAK0uk1w02I1J1FbyLCiw" decimals="-3" format="ixt:numdotdecimal" name="veco:CashEquivalentsFairValueDisclosure" scale="3" id="Tc_Cc4_X_uR1EWwnAMQK-KHJA_20_3">84,165</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel2Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_jBMGuVgN5kCbsT5dG77E5w" decimals="-3" format="ixt:numdotdecimal" name="veco:CashEquivalentsFairValueDisclosure" scale="3" id="Tc_ZggdwHddh0GL6uyYWgzLPA_20_6">2,000</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_Nr66VxLb5EaQbGzAJkypug" decimals="-3" format="ixt:numdotdecimal" name="veco:CashEquivalentsFairValueDisclosure" scale="3" id="Tc_10vEFhkrhECMg7cwYWx5CQ_20_12">86,165</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:57.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"><b style="font-weight:bold;">Short-term investments</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:57.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">U.S. treasuries</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel1Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_us-gaap_FinancialInstrumentAxis_us-gaap_USTreasurySecuritiesMember_uukwLK2eyUKpdjTKybth4g" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InvestmentsFairValueDisclosure" scale="3" id="Tc_6QwqnzUAgkWpq4LfL8LlFg_22_3">149,219</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_us-gaap_FinancialInstrumentAxis_us-gaap_USTreasurySecuritiesMember_xj0ElJ93UE6pMf3IcI1BdA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InvestmentsFairValueDisclosure" scale="3" id="Tc_oiQghXlf_EmkgtOQpYJk5A_22_12">149,219</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:57.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Corporate debt</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel2Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_us-gaap_FinancialInstrumentAxis_us-gaap_CorporateDebtSecuritiesMember_FVRVCXBD1EGAgUHrZjUZtA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InvestmentsFairValueDisclosure" scale="3" id="Tc_O41b-rDWOUmP9_l7U2Ne_g_23_6">32,554</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_us-gaap_FinancialInstrumentAxis_us-gaap_CorporateDebtSecuritiesMember_pa0ivN7dX0WLwOed30l-0A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InvestmentsFairValueDisclosure" scale="3" id="Tc_r_N9wlvrCUGsD9dYhg8uTA_23_12">32,554</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:57.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Commercial paper</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel2Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_us-gaap_FinancialInstrumentAxis_us-gaap_CommercialPaperMember_ee4M2R8mOUW7gDe9FKok6g" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InvestmentsFairValueDisclosure" scale="3" id="Tc_4CGvre0aWEueeuYXjXk1Ng_24_6">7,998</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_us-gaap_FinancialInstrumentAxis_us-gaap_CommercialPaperMember_UhV-9CnFTEicXxNJ7iRPjQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InvestmentsFairValueDisclosure" scale="3" id="Tc_l7lCQTKdukGIjOSUouMrSg_24_12">7,998</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:57.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel1Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_HBAK0uk1w02I1J1FbyLCiw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InvestmentsFairValueDisclosure" scale="3" id="Tc_4eFiCSlJukGDoFkufcbBpw_25_3">149,219</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel2Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_jBMGuVgN5kCbsT5dG77E5w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InvestmentsFairValueDisclosure" scale="3" id="Tc_FakRHwyKLUqSY5v1DrrbXg_25_6">40,552</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_Nr66VxLb5EaQbGzAJkypug" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InvestmentsFairValueDisclosure" scale="3" id="Tc_I-78L1JzJki6Y9o7bKWSyg_25_12">189,771</ix:nonFraction></p></td></tr></table></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company&#8217;s investments classified as Level 1 are based on quoted prices that are available in active markets, as well as certificates of deposits and time deposits that are classified as Level 1 due to their short-term nature. The Company&#8217;s investments classified as Level 2 are valued using observable inputs to quoted market prices, benchmark yields, reported trades, broker/dealer quotes, or alternative pricing sources with reasonable levels of price transparency.</p></ix:continuation><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">F-17</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Veeco Instruments&#160;Inc. and Subsidiaries</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Notes to Consolidated Financial Statements (Continued)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;max-width:100%;position:relative;"><a id="Tc_wvnRO-4aIEa61XIvZ63kqQ_1_5"></a><a id="Tc_lkMi9dUPF0WyoeAm-WnEjQ_1_8"></a><a id="Tc_55aj35dQuUiAFjk-xU3_CQ_2_2"></a><a id="Tc_2dl0aYajd0qrn3uo8u5xwA_2_5"></a><a id="Tc_9WiA_a3o00msnQTv8x0eeg_2_8"></a><a id="Tc_Xfm-6fcCh0WXTc4qJtwyWQ_2_11"></a><a id="Tc_1pO8iFF5yUKkuYgDRqR_mg_3_2"></a><a id="Tc_Gkn6vL23WE-vO4hwxwkviQ_3_5"></a><a id="Tc_hrnrKQfZC0mby38_Ps7rTg_3_8"></a><a id="Tc_6DK6n7RIZEKTl_QX2dJu4w_3_11"></a><a id="Tc_Vn18F_f9xkC1pXzRdzlsuw_4_2"></a><a id="Tc_431HhSh6lkeAEqOGx_uOgw_5_0"></a><a id="Tc_hCPZoiUWUkCkbnxAn6WI6g_6_0"></a><a id="Tc_als9x5q4IECpKEsFBiC6Dw_6_2"></a><a id="Tc_Dlm1sIHO9EWdDpUq8n6S4g_6_5"></a><a id="Tc_XRimgHc4-0CSeZ1q5cdtlQ_6_6"></a><a id="Tc_6ucCESOvo0KNPW5J6bRE7A_6_8"></a><a id="Tc_OpnpzCJsHUOJj-BU3rJcwA_6_11"></a><a id="Tc_3vSYygyQw06Iq2JZg68QBQ_7_0"></a><a id="Tc_4TNe1BipCUSYQajWx54zKw_7_6"></a><a 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name="us-gaap:InvestmentsInDebtAndMarketableEquitySecuritiesAndCertainTradingAssetsDisclosureTextBlock" id="Tb_AzoJG4sweUeLbO0x9Uddnw" continuedAt="Tb_AzoJG4sweUeLbO0x9Uddnw_cont1" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note 4 &#8212; Investments</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">At December 31, 2021 and 2020 the amortized cost and fair value of marketable securities, which are included in &#8220;Short-term investments&#8221; on the Consolidated Balance Sheets, were as follows:</p><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" name="us-gaap:ScheduleOfAvailableForSaleSecuritiesReconciliationTableTextBlock" id="Tb_qWE4OTT9dUeI9s2Ug4WQzw" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Gross</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Gross</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Amortized</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Unrealized</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Unrealized</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Estimated</b></p></td></tr><tr><td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.19%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Cost</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Gains</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Losses</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Fair&#160;Value</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="13" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:41.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:55.91%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">December&#160;31, 2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">U.S. treasuries</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_us-gaap_FinancialInstrumentAxis_us-gaap_USTreasurySecuritiesMember_rTP7zLZbAEKMQk03bbufHg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AvailableForSaleDebtSecuritiesAmortizedCostBasis" scale="3" id="Tc_W_a0ej0lZ0qd4D89m_RZtw_6_3">51,269</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_us-gaap_FinancialInstrumentAxis_us-gaap_USTreasurySecuritiesMember_rTP7zLZbAEKMQk03bbufHg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AvailableForSaleDebtSecuritiesAccumulatedGrossUnrealizedLossBeforeTax" scale="3" id="Tc_WejuGEwhTUayo5IcureuOg_6_9">174</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_us-gaap_FinancialInstrumentAxis_us-gaap_USTreasurySecuritiesMember_rTP7zLZbAEKMQk03bbufHg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AvailableForSaleSecuritiesDebtSecurities" scale="3" id="Tc_s2lrGbYFV0yUUQIw6XJlzQ_6_12">51,095</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:55.91%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Government agency securities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_us-gaap_FinancialInstrumentAxis_us-gaap_USGovernmentCorporationsAndAgenciesSecuritiesMember_b1mvdCETN0K0kL5XfxbYFg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AvailableForSaleDebtSecuritiesAmortizedCostBasis" scale="3" id="Tc_DGO-4DkNUku7NZ4lblI33g_7_3">12,075</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_us-gaap_FinancialInstrumentAxis_us-gaap_USGovernmentCorporationsAndAgenciesSecuritiesMember_b1mvdCETN0K0kL5XfxbYFg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AvailableForSaleDebtSecuritiesAccumulatedGrossUnrealizedLossBeforeTax" scale="3" id="Tc_0MT6Aoeefkq8t2LdH1v-NQ_7_9">23</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_us-gaap_FinancialInstrumentAxis_us-gaap_USGovernmentCorporationsAndAgenciesSecuritiesMember_b1mvdCETN0K0kL5XfxbYFg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AvailableForSaleSecuritiesDebtSecurities" scale="3" id="Tc_TYuEzNYhA0mh9y2BeQS1nQ_7_12">12,052</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Corporate debt</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_us-gaap_FinancialInstrumentAxis_us-gaap_CorporateDebtSecuritiesMember_JNqFFbilsUOMTjDVpkgivA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AvailableForSaleDebtSecuritiesAmortizedCostBasis" scale="3" id="Tc_b0WMMomldEKQ4e2tvcn9Cw_8_3">40,169</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_us-gaap_FinancialInstrumentAxis_us-gaap_CorporateDebtSecuritiesMember_JNqFFbilsUOMTjDVpkgivA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AvailableForSaleDebtSecuritiesAccumulatedGrossUnrealizedLossBeforeTax" scale="3" id="Tc_N8G0K_GRjE2GUV888vxaSg_8_9">134</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_us-gaap_FinancialInstrumentAxis_us-gaap_CorporateDebtSecuritiesMember_JNqFFbilsUOMTjDVpkgivA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AvailableForSaleSecuritiesDebtSecurities" scale="3" id="Tc_WdsHdtnOdE-mWC7k6SwAfA_8_12">40,035</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:55.91%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Commercial paper</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_us-gaap_FinancialInstrumentAxis_us-gaap_CommercialPaperMember_K9lvZImN2Uef5eBGikUMsg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AvailableForSaleDebtSecuritiesAmortizedCostBasis" scale="3" id="Tc_FOUG8nXvYE-PwnYvERs9FA_9_3">999</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_us-gaap_FinancialInstrumentAxis_us-gaap_CommercialPaperMember_K9lvZImN2Uef5eBGikUMsg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AvailableForSaleSecuritiesDebtSecurities" scale="3" id="Tc_YVkewfQ3gUCo2tSF319xdA_9_12">999</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:55.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><b style="font-weight:bold;">Total </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AvailableForSaleDebtSecuritiesAmortizedCostBasis" scale="3" id="Tc_RHGbRY1Om0yGwMnhbhGb_g_10_3">104,512</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AvailableForSaleDebtSecuritiesAccumulatedGrossUnrealizedLossBeforeTax" scale="3" id="Tc_nf8tETpRqEe5rKJHtvsJxQ_10_9">331</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AvailableForSaleSecuritiesDebtSecurities" scale="3" id="Tc_wwbP2fg2mE--VoZEaOBXDA_10_12">104,181</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:55.91%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 0pt 12pt;"><span style="font-size:10pt;font-weight:bold;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">December&#160;31, 2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:55.91%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">U.S. treasuries</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_us-gaap_FinancialInstrumentAxis_us-gaap_USTreasurySecuritiesMember_tVGmylBmtUyioMltS2k1kg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AvailableForSaleDebtSecuritiesAmortizedCostBasis" scale="3" id="Tc_wOE7mn9bZkOs14maNgY9dg_13_3">149,206</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_us-gaap_FinancialInstrumentAxis_us-gaap_USTreasurySecuritiesMember_tVGmylBmtUyioMltS2k1kg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AvailableForSaleDebtSecuritiesAccumulatedGrossUnrealizedGainBeforeTax" scale="3" id="Tc_6NjiEjyugUa6huVrEtlO8g_13_6">14</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_us-gaap_FinancialInstrumentAxis_us-gaap_USTreasurySecuritiesMember_tVGmylBmtUyioMltS2k1kg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AvailableForSaleDebtSecuritiesAccumulatedGrossUnrealizedLossBeforeTax" scale="3" id="Tc_4vTnoervdUCfTxMYzTgp-w_13_9">1</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_us-gaap_FinancialInstrumentAxis_us-gaap_USTreasurySecuritiesMember_tVGmylBmtUyioMltS2k1kg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AvailableForSaleSecuritiesDebtSecurities" scale="3" id="Tc_h-f7DhVS_UmXM4FjRTzqCg_13_12">149,219</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Corporate debt</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_us-gaap_FinancialInstrumentAxis_us-gaap_CorporateDebtSecuritiesMember_-25td_Av8UuQTwjFKN_BDQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AvailableForSaleDebtSecuritiesAmortizedCostBasis" scale="3" id="Tc_C9WQWHEsukifTL_P1UdJ7g_14_3">32,588</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_us-gaap_FinancialInstrumentAxis_us-gaap_CorporateDebtSecuritiesMember_-25td_Av8UuQTwjFKN_BDQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AvailableForSaleDebtSecuritiesAccumulatedGrossUnrealizedLossBeforeTax" scale="3" id="Tc_fyEwoSJTu0KJdWdnVURL4A_14_9">34</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_us-gaap_FinancialInstrumentAxis_us-gaap_CorporateDebtSecuritiesMember_-25td_Av8UuQTwjFKN_BDQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AvailableForSaleSecuritiesDebtSecurities" scale="3" id="Tc_9r15ULMQGEWS3E-w64Ul8w_14_12">32,554</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:55.91%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Commercial paper</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_us-gaap_FinancialInstrumentAxis_us-gaap_CommercialPaperMember_pMObJdFG1UuxSIaSXjYDoQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AvailableForSaleDebtSecuritiesAmortizedCostBasis" scale="3" id="Tc_BfRYaKG3VEO0nT23InFL3Q_15_3">7,997</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_us-gaap_FinancialInstrumentAxis_us-gaap_CommercialPaperMember_pMObJdFG1UuxSIaSXjYDoQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AvailableForSaleDebtSecuritiesAccumulatedGrossUnrealizedGainBeforeTax" scale="3" id="Tc_k3nvpdW-UEiYIJBj83B4SQ_15_6">1</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_us-gaap_FinancialInstrumentAxis_us-gaap_CommercialPaperMember_pMObJdFG1UuxSIaSXjYDoQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AvailableForSaleSecuritiesDebtSecurities" scale="3" id="Tc_UaOsFjwzg0a4lWZg9FSWSg_15_12">7,998</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:55.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AvailableForSaleDebtSecuritiesAmortizedCostBasis" scale="3" id="Tc_lk1O8B-xLUeXyRMZJUoVIw_16_3">189,791</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AvailableForSaleDebtSecuritiesAccumulatedGrossUnrealizedGainBeforeTax" scale="3" id="Tc_l7bnd2XB2ku5tdis23X_mQ_16_6">15</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AvailableForSaleDebtSecuritiesAccumulatedGrossUnrealizedLossBeforeTax" scale="3" id="Tc_jAyI-gXHBkyPPNr2KQ7IHw_16_9">35</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AvailableForSaleSecuritiesDebtSecurities" scale="3" id="Tc_uRke3nY6pkWxaHxHZm3nVA_16_12">189,771</ix:nonFraction></p></td></tr></table></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Available-for-sale securities in a loss position at December 31, 2021 and 2020 were as follows:</p><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" name="us-gaap:DebtSecuritiesAvailableForSaleUnrealizedLossPositionFairValueTableTextBlock" id="Tb_-vi_vBHevkeP6k8bbNJfjg" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:56.39%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.31%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.31%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.24%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:56.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:19.97%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, 2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:19.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, 2020</b></p></td></tr><tr><td style="vertical-align:bottom;width:56.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Gross</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Gross</b></p></td></tr><tr><td style="vertical-align:bottom;width:56.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Estimated</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Unrealized</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Estimated</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Unrealized</b></p></td></tr><tr><td style="vertical-align:bottom;width:56.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.22%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Fair&#160;Value</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.59%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Losses</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.59%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Fair Value</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.54%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Losses</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="13" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:56.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="10" style="vertical-align:bottom;white-space:nowrap;width:40.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:56.39%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">U.S. treasuries</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_us-gaap_FinancialInstrumentAxis_us-gaap_USTreasurySecuritiesMember_rTP7zLZbAEKMQk03bbufHg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DebtSecuritiesAvailableForSaleUnrealizedLossPosition" scale="3" id="Tc_adD-bfzUQk-qyHqwKPVjjw_6_3">51,095</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_us-gaap_FinancialInstrumentAxis_us-gaap_USTreasurySecuritiesMember_rTP7zLZbAEKMQk03bbufHg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DebtSecuritiesAvailableForSaleUnrealizedLossPositionAccumulatedLoss" scale="3" id="Tc_Uta-QMQpTk6bjDU_gu35zA_6_6">174</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_us-gaap_FinancialInstrumentAxis_us-gaap_USTreasurySecuritiesMember_tVGmylBmtUyioMltS2k1kg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DebtSecuritiesAvailableForSaleUnrealizedLossPosition" scale="3" id="Tc_2cNoCJJYoECPyGppzC821w_6_9">19,991</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.24%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_us-gaap_FinancialInstrumentAxis_us-gaap_USTreasurySecuritiesMember_tVGmylBmtUyioMltS2k1kg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DebtSecuritiesAvailableForSaleUnrealizedLossPositionAccumulatedLoss" scale="3" id="Tc_wKmyw0f5QEeYfr407LYT8Q_6_12">1</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:bottom;width:56.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Government agency securities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_us-gaap_FinancialInstrumentAxis_us-gaap_USGovernmentCorporationsAndAgenciesSecuritiesMember_b1mvdCETN0K0kL5XfxbYFg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DebtSecuritiesAvailableForSaleUnrealizedLossPosition" scale="3" id="Tc_seanSf6-j0OKbzsPPTPyCA_7_3">12,052</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_us-gaap_FinancialInstrumentAxis_us-gaap_USGovernmentCorporationsAndAgenciesSecuritiesMember_b1mvdCETN0K0kL5XfxbYFg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DebtSecuritiesAvailableForSaleUnrealizedLossPositionAccumulatedLoss" scale="3" id="Tc_mIbXAixL9EWAQMAKzVBu9g_7_6">23</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td></tr><tr><td style="vertical-align:bottom;width:56.39%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Corporate debt</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_us-gaap_FinancialInstrumentAxis_us-gaap_CorporateDebtSecuritiesMember_JNqFFbilsUOMTjDVpkgivA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DebtSecuritiesAvailableForSaleUnrealizedLossPosition" scale="3" id="Tc_0OjTP1oHtUmhK8qGuZpBPw_8_3">40,035</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.31%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_us-gaap_FinancialInstrumentAxis_us-gaap_CorporateDebtSecuritiesMember_JNqFFbilsUOMTjDVpkgivA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DebtSecuritiesAvailableForSaleUnrealizedLossPositionAccumulatedLoss" scale="3" id="Tc_Ih-c52CsaUC35e6rp8t36g_8_6">134</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.31%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_us-gaap_FinancialInstrumentAxis_us-gaap_CorporateDebtSecuritiesMember_-25td_Av8UuQTwjFKN_BDQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DebtSecuritiesAvailableForSaleUnrealizedLossPosition" scale="3" id="Tc_-J1nfP2QnkuDU9-q9xoMNw_8_9">32,554</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.24%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_us-gaap_FinancialInstrumentAxis_us-gaap_CorporateDebtSecuritiesMember_-25td_Av8UuQTwjFKN_BDQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DebtSecuritiesAvailableForSaleUnrealizedLossPositionAccumulatedLoss" scale="3" id="Tc_8CtgBp6p5UCARrc7TPVXig_8_12">34</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:bottom;width:56.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DebtSecuritiesAvailableForSaleUnrealizedLossPosition" scale="3" id="Tc_V32A5xjJ4kuv5v7PgDtcqw_9_3">103,182</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.31%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DebtSecuritiesAvailableForSaleUnrealizedLossPositionAccumulatedLoss" scale="3" id="Tc_V6S3wjbg906IePe3Kegwqw_9_6">331</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.31%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DebtSecuritiesAvailableForSaleUnrealizedLossPosition" scale="3" id="Tc_nGJ4d6sxv0S6HAQlIbKWCQ_9_9">52,545</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.24%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DebtSecuritiesAvailableForSaleUnrealizedLossPositionAccumulatedLoss" scale="3" id="Tc_sJL7iQw1yEaULVLAs3JN2g_9_12">35</ix:nonFraction>)</p></td></tr></table></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">At December 31, 2021 and 2020, there were <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-5" format="ixt-sec:numwordsen" name="us-gaap:DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPosition12MonthsOrLonger" scale="6" id="Narr_ftIM1KjL2Um20cFjLAUfNQ"><ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-5" format="ixt-sec:numwordsen" name="us-gaap:DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPosition12MonthsOrLonger" scale="6" id="Narr_-iuHy8r3oUCuVn25RHgPiQ">no</ix:nonFraction></ix:nonFraction> short-term investments that had been in a continuous loss position for more than 12 months.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;background:#ffff00;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="background:#ffffff;">The contractual maturities of securities classified as available-for-sale at December 31, 2021 were as follows:</span></p><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" name="us-gaap:InvestmentsClassifiedByContractualMaturityDateTableTextBlock" id="Tb_o8IOR0WpZE64HKlWEZEHag" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;background:#ffffff;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:72.18%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.41%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.39%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:72.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:25.01%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, 2021</b></p></td></tr><tr><td style="vertical-align:bottom;width:72.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Amortized</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Estimated</b></p></td></tr><tr><td style="vertical-align:bottom;width:72.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.11%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Cost</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.09%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Fair&#160;Value</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="7" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:72.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="4" style="vertical-align:bottom;white-space:nowrap;width:23.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:72.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Due in one year or less</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.41%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AvailableForSaleSecuritiesDebtMaturitiesNextRollingTwelveMonthsAmortizedCostBasis" scale="3" id="Tc_L89b44BqK0GQGKOOFwZrWQ_5_3">53,617</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.39%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AvailableForSaleSecuritiesDebtMaturitiesNextRollingTwelveMonthsFairValue" scale="3" id="Tc_9kziAH6We02Nodri7P0UIg_5_6">53,550</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:72.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Due after one year through two years</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.41%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="veco:DebtSecuritiesAvailableForSaleMaturityAllocatedAndSingleMaturityDateRollingAfterOneThroughTwoYearsAmortizedCost" scale="3" id="Tc_cmWpzB4GP0eC4ODYMrUVDQ_6_3">50,895</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.39%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="veco:DebtSecuritiesAvailableForSaleMaturityAllocatedAndSingleMaturityDateRollingAfterOneThroughTwoYearsFairValue" scale="3" id="Tc_B1f5b77VtUmT-eXMmYQ-Gw_6_6">50,631</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:72.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.41%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AvailableForSaleDebtSecuritiesAmortizedCostBasis" scale="3" id="Tc_c6SbXUhxSEqRaOfF5q7xiQ_7_3">104,512</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.39%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AvailableForSaleSecuritiesDebtSecurities" scale="3" id="Tc_r4TM7dV-OEG9iL1eD28zfA_7_6">104,181</ix:nonFraction></p></td></tr></table></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;background:#ffffff;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;background:#ffffff;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Actual maturities may differ from contractual maturities because borrowers may have the right to call or prepay obligations with or without call or prepayment penalties. The realized gains or losses for the years ended December 31, 2021, 2020, and 2019 were immaterial.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></ix:nonNumeric></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">F-18</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Veeco Instruments&#160;Inc. and Subsidiaries</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Notes to Consolidated Financial Statements (Continued)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;max-width:100%;position:relative;min-height:10.35pt;"><ix:continuation id="Tb_AzoJG4sweUeLbO0x9Uddnw_cont1"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Other Investments</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Veeco has an ownership interest of less than <ix:nonFraction unitRef="Unit_Standard_pure_60KFN_p23EC7YcClApV5TA" contextRef="As_Of_12_31_2021_srt_RangeAxis_srt_MaximumMember_srt_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_veco_KateevaIncMember__dUJfQ3cdEyX9QcnudWqlQ" decimals="2" format="ixt:numdotdecimal" name="veco:CostMethodInvestmentsOwnershipPercentage" scale="-2" id="Narr_oDu3dxDobU-fc1DkaZdOLw">20</ix:nonFraction>% in a non-marketable investment, Kateeva, Inc. (&#8220;Kateeva&#8221;), over which Veeco does not exert significant influence. Additionally, the Company has a separate, non-marketable investment in another entity, with a carrying value of $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_srt_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_veco_OtherNonMarketableInvestmentMember__-ajhJh9d0KPzM9DXvN5fw" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:EquitySecuritiesWithoutReadilyDeterminableFairValueAmount" scale="6" id="Narr_kTKlaaODpESAIZ23K2Ii1A">2.0</ix:nonFraction> million at December 31, 2021. The Company does not exert significant influence over this investment and its ownership interest is also less than <ix:nonFraction unitRef="Unit_Standard_pure_60KFN_p23EC7YcClApV5TA" contextRef="As_Of_12_31_2021_srt_RangeAxis_srt_MaximumMember_srt_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_veco_OtherNonMarketableInvestmentMember_qA5u-MwSDkKR-Xpsghytdw" decimals="INF" format="ixt:numdotdecimal" name="veco:CostMethodInvestmentsOwnershipPercentage" scale="-2" id="Narr_ztReoD4b6k63pkDNqfhXCA">20</ix:nonFraction>%. Neither equity investment has a readily observable market price, and therefore the Company has elected to measure these investments at cost, adjusted for changes in observable market prices minus impairment. The investments are included in &#8220;Other assets&#8221; on the Consolidated Balance Sheets. These investments are subject to periodic impairment reviews which require judgment. The analyses include assessments of the companies&#8217; financial condition, the business outlooks for their products and technologies, their projected results and cash flows, business valuation indications from recent rounds of financing, the likelihood of obtaining subsequent rounds of financing, and the impact of equity preferences held by Veeco relative to other investors. During the year ended December 31, 2019, the Company identified impairment indicators on the Company&#8217;s investment in Kateeva, and as a result of a valuation analysis, concluded that its investment in Kateeva is fully impaired, and recorded a non-cash impairment charge of $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_10_1_2019_To_12_31_2019_srt_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_veco_KateevaIncMember_us-gaap_IncomeStatementLocationAxis_us-gaap_OtherNonoperatingIncomeExpenseMember_lp_2m53NgU6NbkbuGe43UQ" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:ImpairmentOfInvestments" scale="6" id="Narr_p9hkdq89JUmL87Qyc9_PBw">21.0</ix:nonFraction> million. During the year ended December 31, 2021, the Company identified impairment indicators on the Company&#8217;s other investment, and recorded a non-cash impairment charge of $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_srt_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_veco_OtherNonMarketableInvestmentMember_us-gaap_IncomeStatementLocationAxis_us-gaap_OtherNonoperatingIncomeExpenseMember_qIPxI3sZX0yKCYqSFA5dwg" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:ImpairmentOfInvestments" scale="6" id="Narr_fhqH0hYSpkKe_hCZaUIdPA">1.0</ix:nonFraction> million. 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Inventories consist of the following:</p><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" name="us-gaap:ScheduleOfInventoryCurrentTableTextBlock" id="Tb_Q1RvXtw9Tki7Xo9EQg89cA" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:81.99%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:65.08%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.54%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:13.35%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.54%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:13.41%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:65.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:65.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="7" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:65.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:32.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:65.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Materials</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.54%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.35%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InventoryRawMaterialsNetOfReserves" scale="3" id="Tc_ufOrbVHW5kSGVb2IRxfWRA_4_3">96,027</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.54%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.41%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InventoryRawMaterialsNetOfReserves" scale="3" id="Tc_gkTBxQr0Lk6RDcO0ydKknA_4_6">82,679</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:65.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Work-in-process</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InventoryWorkInProcessNetOfReserves" scale="3" id="Tc__nC2Q1ZTKEmSyTum_PqfZA_5_3">54,128</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InventoryWorkInProcessNetOfReserves" scale="3" id="Tc_tR95Be4NgUW56ZGRGPWjOw_5_6">53,979</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:65.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Finished goods</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.54%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.35%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InventoryFinishedGoodsNetOfReserves" scale="3" id="Tc_p0a-SXmlMU6qt5bJ5xIosg_6_3">20,703</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.54%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.41%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InventoryFinishedGoodsNetOfReserves" scale="3" id="Tc_29cmhFPB4kyslXsyXkGKrg_6_6">9,248</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:65.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.54%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.35%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InventoryNet" scale="3" id="Tc_IH2KAXlkI0ClAEOKZftMOA_7_3">170,858</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.54%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.41%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InventoryNet" scale="3" id="Tc_JDgyeF-T7EqFWMoxzrnrGA_7_6">145,906</ix:nonFraction></p></td></tr></table></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><a id="_10fda21b_be82_4303_8880_09f4646f7036"></a><a id="Tc_xhKYzHnh_UCQqduPvZy_QQ_1_2"></a><a id="Tc_zhxgjme-wU-ioYK0PnfxMQ_1_5"></a><a id="Tc_SC7GWbuUGkqOsr_jfj-MxQ_2_2"></a><a id="Tc_Kn7RzUGLdUGY0knBeGtZUw_2_5"></a><a id="Tc_CSyi0aoUpESr-_mBNHRSpw_2_8"></a><a id="Tc_XJv3Lml9Kk6PCAbZeD8iEQ_3_2"></a><a id="Tc_FrpYMegzVEOyVnZqV8C3LQ_4_0"></a><a id="Tc_Db73Q4MwAUmoozMAn6kvQw_4_2"></a><a id="Tc_Jds8hmnrGkCUvUrpRa1Cug_4_5"></a><a id="Tc_rvxAEK8qr0ScfA1NzuC60w_4_8"></a><a id="Tc_hgQZ0Z0kLUS-FpdG88LZ5A_5_0"></a><a id="Tc_joJuWc0gJ0i0C_qjOK0MrA_5_8"></a><a id="Tc_0wPAdJXMvUyA2pMyh3ubWQ_6_0"></a><a id="Tc_ih_CQktuJUmdfksARW41EQ_6_8"></a><a id="Tc_RuWBgBvsCU28nSXm5sB0Tw_7_0"></a><a id="Tc_VjsgV04EZU6A58ZP6pBqew_7_8"></a><a id="Tc_UwvEKyke8k6OjtR1DT7Exg_8_0"></a><a id="Tc_e7pSEJYt3US9fPWBdgCLzg_9_0"></a><a id="Tc_RbhbWwKp4UKwMhYX7bvYFg_10_0"></a><a id="Tc_pQadjQGOqEKxPlqawrmy5A_10_2"></a><a id="Tc_LcXoApBI00aibmJ2HdHHeg_10_5"></a><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" name="us-gaap:PropertyPlantAndEquipmentDisclosureTextBlock" id="Tb_ZWOP0yHEX0CQ4F5V-KzE1w" continuedAt="Tb_ZWOP0yHEX0CQ4F5V-KzE1w_cont1" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note 6 &#8212; Property, Plant, and Equipment</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Property, plant, and equipment, net, consist of the following:</p><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" name="us-gaap:PropertyPlantAndEquipmentTextBlock" id="Tb_zOClGA3Td0q4I_VyibNOqg" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:55.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:11.17%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:middle;width:14.02%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:50%;transform:translate(0,-50%);width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:55.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.36%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.4%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:55.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.36%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.4%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.02%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Average&#160;Useful&#160;Life</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="9" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:55.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:26.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:55.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Land</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_LandMember_bBjxkNZ65kaBLsPiLqk5nA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PropertyPlantAndEquipmentGross" scale="3" id="Tc_DOfkD6L6l0q_-Cav97jkMw_4_3">5,061</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_LandMember_ZQgbBPhMb02gb1GpOq1vEA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PropertyPlantAndEquipmentGross" scale="3" id="Tc_tmJ6b3x2rU-BgLTDzcBXdg_4_6">5,061</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:14.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">N/A</p></td></tr><tr><td style="vertical-align:bottom;width:55.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Building and improvements</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_BuildingAndBuildingImprovementsMember_5jcnQY9hakOJVHQyxdsHNw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PropertyPlantAndEquipmentGross" scale="3" id="Tc_EUpquCvzKE-2DLWcgk1BJw_5_3">63,946</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_BuildingAndBuildingImprovementsMember_AMb7HyOXfE6qL5TN8PtPCA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PropertyPlantAndEquipmentGross" scale="3" id="Tc_aTXfh2TRVUKsMmHWBxlAeg_5_6">62,865</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:14.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="-sec-ix-hidden:Hidden_nSraNxv3HkCjw8_FEiVHAA;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">10</span></span><span style="font-size:10pt;"> &#8211; </span><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_srt_RangeAxis_srt_MaximumMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_BuildingAndBuildingImprovementsMember_YcZrdj3fH0G-O3ccRXiWjg" format="ixt-sec:durwordsen" name="us-gaap:PropertyPlantAndEquipmentUsefulLife" id="Narr_Uu5tpjK1pUWMGzMd3eifSQ"><span style="font-size:10pt;">40 years</span></ix:nonNumeric></p></td></tr><tr><td style="vertical-align:bottom;width:55.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Machinery and equipment <sup style="font-size:7.5pt;line-height:100%;top:0pt;vertical-align:top;">(1)</sup></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_MachineryAndEquipmentMember_VrW27z6LFkmFuV6-jkGoWA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PropertyPlantAndEquipmentGross" scale="3" id="Tc_Wtpai7Vd30K9CpgpCBy8aA_6_3">145,656</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_MachineryAndEquipmentMember_KXQjFzS1iUWnA_6YpFgWrQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PropertyPlantAndEquipmentGross" scale="3" id="Tc_j_AGFsjjB0S-wo5O61RidA_6_6">140,493</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times 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style="vertical-align:bottom;width:55.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Leasehold improvements</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.17%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" 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style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PropertyPlantAndEquipmentGross" scale="3" id="Tc_KLlp3MTaLUyjllhZ9abbIw_8_3">260,642</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PropertyPlantAndEquipmentGross" scale="3" id="Tc_G_Pf7UiJXU66H9wpEar81w_8_6">215,090</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:55.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Less: accumulated depreciation and amortization</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.17%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment" scale="3" id="Tc_N1Gwf6x5-k--C69v9loItw_9_3">160,899</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment" scale="3" id="Tc_xTGK1iODmkKVvsLv7Qy6_A_9_6">149,819</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:55.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"><b style="font-weight:bold;">Net property, plant, and equipment</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.17%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PropertyPlantAndEquipmentNet" scale="3" id="Tc_upX6TXbZ8E6I1Ebhi7v3YQ_10_3">99,743</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PropertyPlantAndEquipmentNet" scale="3" id="Tc__8nmsgC4x0SLpHDMZKVNkw_10_6">65,271</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr></table><div style="font-family:'Times New Roman','Times','serif';font-size:9.0pt;margin-bottom:0pt;margin-top:0pt;min-height:1.19em;position:relative;width:100%;"><div style="background-color:#000000;height:1pt;position:relative;top:0.6em;width:25.0%;border:none;margin:0 auto 0 0;"></div></div><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Times New Roman','Times','serif';font-size:9pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">(1)</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:9pt;font-style:normal;font-weight:normal;">Machinery and equipment also includes software, furniture, and fixtures</span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Depreciation expense was $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:Depreciation" scale="6" id="Narr_2K6YworesUil5igjKe7hug">13.8</ix:nonFraction> million, $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_irQajVZIkUmgjCJ-cxJ5AQ" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:Depreciation" scale="6" id="Narr_2Uk2zzLV7ka98uVsSs_0jQ">15.4</ix:nonFraction> million, and $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_ssAGFj6EXEiYqEtVZlyqxA" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:Depreciation" scale="6" id="Narr_4UvnEIgw4UuNPUORs331Gw">17.3</ix:nonFraction> million for the years ended December 31, 2021, 2020, and 2019, respectively. <span style="background:#ffffff;">During the year ended December 31, 2019, the Company classified vacant land in St. Paul, </span></p></ix:nonNumeric></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">F-19</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Veeco Instruments&#160;Inc. and Subsidiaries</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Notes to Consolidated Financial Statements (Continued)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;max-width:100%;position:relative;"><ix:continuation id="Tb_ZWOP0yHEX0CQ4F5V-KzE1w_cont1"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="background:#ffffff;">Minnesota as held for sale, and subsequently sold the land for approximately </span><span style="background:#ffffff;">$<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_ssAGFj6EXEiYqEtVZlyqxA" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:ProceedsFromSaleOfLandHeldForUse" scale="6" id="Narr_eQtL0Xsmbkq7gEAStCCRXg">0.6</ix:nonFraction></span><span style="background:#ffffff;">&#160;million, which approximated its carrying value.</span></p></ix:continuation><a id="Tc_UR6U6yN-qk6Q-kwMWkoUfA_1_2"></a><a id="Tc_z_xECbLK2U2g5ljGU5-9DA_1_5"></a><a id="Tc_SkRYr8ZTmUaV5B0mNByb0Q_2_2"></a><a id="Tc_ggkxQYsFWkqPhKT9aGdMUw_2_5"></a><a id="Tc_uAdWw8ryb0Wf8TWEMIiFcA_2_8"></a><a id="Tc_fgFpWlwskkah98oAOKPrMA_3_2"></a><a id="Tc_lIErIfXO0ky1tUXZx9wAbw_4_0"></a><a id="Tc_QxjKoMbAUk6YysF-XLVBeg_4_2"></a><a id="Tc_r3V_o6ZsFUK6qxGyVbXcuA_4_5"></a><a id="Tc_X6ir_6JZYkuwssVSmJdFLg_4_8"></a><a id="_Hlk337494"></a><a id="Tc_21X5Jr9DWE2bvl3XyPBltQ_1_4"></a><a id="Tc_Y6zGanIwo0SsBFoN-g6Gyg_1_13"></a><a id="Tc_gevKs2xBVUykw3m8CjUv8w_2_2"></a><a id="Tc_qpieqqnMGE26GBd9k09RMQ_2_7"></a><a id="Tc_vkUpi3Wpi0am7h6wulh4JQ_2_16"></a><a id="Tc_isuAx9GVEEWsRgLIZxUVOg_3_2"></a><a id="Tc_Br_oP2oY7E6DsycA-vgowg_3_4"></a><a id="Tc_n5-BqfyF20ud0lS7_FaWlg_3_7"></a><a id="Tc_Waib3FyeJ0GID5g2Q919NQ_3_13"></a><a id="Tc_zvmnVJJ-506Xrv7X1BiLaQ_3_16"></a><a id="Tc_FBQH_ArRREWaLjar1ix7Yw_4_2"></a><a id="Tc_zmJiOhbC5kKY82wClnwimw_4_4"></a><a id="Tc_ms7fq6XQ7EeamUsglpKrVQ_4_7"></a><a id="Tc_7bnfAYc-1kmvtqVHieisMA_4_10"></a><a id="Tc_heINlrCcZ0iLyJwDTopwfA_4_13"></a><a id="Tc_vvWH_V3eI0mCUHSAVESejQ_4_16"></a><a id="Tc_dpReBaNHXE2iwntXqtkXXw_4_19"></a><a id="Tc_ilYornLcyU6Uk48WBLmhDg_5_2"></a><a id="Tc_XLe8nIZsO0ukYci52pQ7ww_5_4"></a><a id="Tc__lXuH8IUDEKc8dxV1o449w_5_7"></a><a id="Tc_W-KPQJo68Eegf2yAq10_Wg_5_10"></a><a id="Tc_G3UIgbirckqpw75mDlHGcQ_5_13"></a><a id="Tc_WAMN78YbcUyRZakdy3DEJg_5_16"></a><a id="Tc_z3m68YKAc06d92lNNPSBOw_5_19"></a><a id="Tc_hu_46h0f40-w7wwBXIZzDg_6_2"></a><a id="Tc_5BTu1OYZ0kqb1CwxWximGQ_6_4"></a><a id="Tc_cdHQTXRPtESVisIrFWOjIA_7_0"></a><a id="Tc_49_Fpo6HWkaYuN3g4wfMvQ_7_4"></a><a id="Tc_5QJlv21mLk2fKtPE9UWumQ_7_7"></a><a id="Tc_q-FchVe-9kyegWmC2EX_yQ_7_10"></a><a id="Tc_r3OA9GcUDUWuyaLWlIY8VA_7_13"></a><a id="Tc_QVhyVSf_G0OmqHIsMZcDmQ_7_16"></a><a id="Tc_ttDt-z-DgEqnHXHUmLEbIQ_7_19"></a><a id="Tc_Um440GO7aE6F_3WnA2R5Mw_8_0"></a><a id="Tc_D6TLc9mv8E6clK3OQCP8jg_9_0"></a><a id="Tc_X80TaPhQbkS0dPbSAapsOA_10_0"></a><a id="Tc_VY5OsYIc1EOo0ZQB0Eix-A_10_2"></a><a id="Tc_Yq85s5f5g0K-vY3Kv7Hyjg_10_11"></a><a id="Tc_p6SEfbRIu0yazwY12xMbCw_11_0"></a><a id="Tc_6HG9nVhfl0qK3dGiw5yGmw_11_4"></a><a id="Tc_8BAx_F61ckuj0T6P-JFOLg_11_7"></a><a id="Tc_3uu_kCEVKUuvNMdi3bk5rg_11_10"></a><a id="Tc_2uOsbjA3lkGJFn4y6wOWfw_11_13"></a><a id="Tc_QBHuBz9mAE2i0FWlTaw0lg_11_16"></a><a id="Tc_Z3BFicxvpEuQtfQW2-o-qQ_11_19"></a><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" name="us-gaap:GoodwillAndIntangibleAssetsDisclosureTextBlock" id="Tb_xrgFvKf6OkGCXAkDJLiQqQ" continuedAt="Tb_xrgFvKf6OkGCXAkDJLiQqQ_cont1" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note 7 &#8212; Goodwill and Intangible Assets</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Goodwill represents the future economic benefits arising from assets acquired in a business combination that are not individually identified and separately recognized. There were <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2011_To_12_31_2011_jBN_l4183kSOd7630yFuWA" decimals="-3" format="ixt-sec:numwordsen" name="us-gaap:GoodwillPeriodIncreaseDecrease" scale="0" id="Narr_dQag9iSjNUqHAxzrM5kuRg"><ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_irQajVZIkUmgjCJ-cxJ5AQ" decimals="-3" format="ixt-sec:numwordsen" name="us-gaap:GoodwillPeriodIncreaseDecrease" scale="0" id="Narr_LarosdYsskCHQCKfwTYPcw">no</ix:nonFraction></ix:nonFraction> changes in goodwill balances during the years ended December 31, 2021 or 2020, while the below table reflects the gross carrying amounts and accumulated impairments as of the respective periods:</p><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" name="us-gaap:ScheduleOfGoodwillTextBlock" id="Tb_h7OtpKxAWEyhCUL2OfjIMg" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:52.19%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:2.45%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:11.94%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:2.46%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:11.94%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:2.46%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:12.04%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:52.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Gross&#160;carrying</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;width:13.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Accumulated</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;width:13.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:52.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">amount</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">impairment</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.54%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Net amount</b></p></td></tr><tr><td style="vertical-align:bottom;width:52.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:45.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:52.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Balance at December&#160;31, 2021 and 2020</p></td><td style="vertical-align:bottom;width:2.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:GoodwillGross" scale="3" id="Tc_MD3ZD1fEekinmlz0kHNRPg_4_3">430,331</ix:nonFraction></p></td><td style="vertical-align:bottom;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:GoodwillImpairedAccumulatedImpairmentLoss" scale="3" id="Tc_cE8izyz1LEOw39uypCI5xg_4_6">248,388</ix:nonFraction></p></td><td style="vertical-align:bottom;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:Goodwill" scale="3" id="Tc_eDxOeE0CoEKUqI8etUF4QQ_4_9">181,943</ix:nonFraction></p></td></tr></table></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company performs its annual goodwill impairment test at the beginning of the fourth quarter each year. As the Company maintains a single goodwill reporting unit, it determines the fair value of its reporting unit based upon the Company&#8217;s adjusted market capitalization. The annual test performed at the beginning of the fourth quarter of fiscal 2021, 2020, and 2019 did not result in any potential impairment as the fair value of the reporting unit was determined to exceed the carrying amount of the reporting unit.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The valuation of goodwill will continue to be subject to changes in the Company&#8217;s market capitalization and observable market control premiums. This analysis is sensitive to changes in the Company&#8217;s stock price and absent other qualitative factors, the Company may be required to record goodwill impairment charges in future periods if the stock price declines and remains depressed for an extended period of time.&#160; </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The components of purchased intangible assets were as follows:</p><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" name="veco:ScheduleOfIntangibleAssetsExcludingGoodwillTableTextBlock" id="Tb_qj_TA_lOiUKa2E95HvQy3A" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:26.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;white-space:nowrap;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:26.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:29.63%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, 2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:29.63%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, 2020</b></p></td></tr><tr><td style="vertical-align:bottom;width:26.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Average</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Accumulated</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Accumulated</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:26.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Remaining</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Gross</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Amortization</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Gross</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Amortization</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:26.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Amortization</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Carrying</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">and</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Net </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Carrying</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">and</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Net</b></p></td></tr><tr><td style="vertical-align:bottom;width:26.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:9.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Period</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Amount</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:9.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Impairment</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Amount</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Amount</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:9.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Impairment</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Amount</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="21" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:26.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in years)</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="17" style="vertical-align:bottom;white-space:nowrap;width:60.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:26.35%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Technology</p></td><td style="vertical-align:middle;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;white-space:nowrap;width:9.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_TechnologyBasedIntangibleAssetsMember_TvFIcMAltkiMrzl9UX8FCQ" format="ixt-sec:duryear" name="us-gaap:FiniteLivedIntangibleAssetsRemainingAmortizationPeriod1" id="Tc_M0CLV3qTM0ySmN65XGO8ZQ_7_2"><span style="font-size:10pt;"> 3.6</span></ix:nonNumeric></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_TechnologyBasedIntangibleAssetsMember_necacvPtWE-ggGEIZm8C0A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FiniteLivedIntangibleAssetsGross" scale="3" id="Tc_7vDsW6EhxEiNn-8OBwaAhg_7_5">327,908</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_TechnologyBasedIntangibleAssetsMember_necacvPtWE-ggGEIZm8C0A" decimals="-3" format="ixt:numdotdecimal" name="veco:FiniteLivedIntangibleAssetsAccumulatedAmortizationAndImpairment" scale="3" id="Tc_R-FKv4C_6U2Nv2lRLSvnbg_7_8">310,551</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_TechnologyBasedIntangibleAssetsMember_necacvPtWE-ggGEIZm8C0A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FiniteLivedIntangibleAssetsNet" scale="3" id="Tc_YE5Mg3WIykaL4mlFQleovg_7_11">17,357</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_TechnologyBasedIntangibleAssetsMember_EP9QvMLz_E-xj64thqp7qA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FiniteLivedIntangibleAssetsGross" scale="3" id="Tc_Xpu1VPFA_EyZW5jTwen4YA_7_14">327,908</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_TechnologyBasedIntangibleAssetsMember_EP9QvMLz_E-xj64thqp7qA" decimals="-3" format="ixt:numdotdecimal" name="veco:FiniteLivedIntangibleAssetsAccumulatedAmortizationAndImpairment" scale="3" id="Tc_nPalnhRdvU-fl8Lcp6F88g_7_17">302,358</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_TechnologyBasedIntangibleAssetsMember_EP9QvMLz_E-xj64thqp7qA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FiniteLivedIntangibleAssetsNet" scale="3" id="Tc_W-PopUcaq0qijKxv5SAIdg_7_20">25,550</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:26.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Customer relationships</p></td><td style="vertical-align:bottom;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;white-space:nowrap;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_CustomerRelationshipsMember_79iSIFdKHEOgKgkrUkQQlA" format="ixt-sec:duryear" name="us-gaap:FiniteLivedIntangibleAssetsRemainingAmortizationPeriod1" id="Tc_nV8A1uKzPUafDTuIzEYNlw_8_2"><span style="font-size:10pt;"> 7.3</span></ix:nonNumeric></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_CustomerRelationshipsMember_yPs0Pou8lUqqQZEin1H9ZQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FiniteLivedIntangibleAssetsGross" scale="3" id="Tc_jNlp10WaoUeF2WPfwi7PSA_8_5">146,465</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_CustomerRelationshipsMember_yPs0Pou8lUqqQZEin1H9ZQ" decimals="-3" format="ixt:numdotdecimal" name="veco:FiniteLivedIntangibleAssetsAccumulatedAmortizationAndImpairment" scale="3" id="Tc_QpE9I-q9WkWS_lXU-Q8rCA_8_8">132,970</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_CustomerRelationshipsMember_yPs0Pou8lUqqQZEin1H9ZQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FiniteLivedIntangibleAssetsNet" scale="3" id="Tc_nhbIWcp6fUO-6KX7ZBaz2g_8_11">13,495</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_CustomerRelationshipsMember_ZruZmMW_dUOKyDn92hskBg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FiniteLivedIntangibleAssetsGross" scale="3" id="Tc_w5hQrNTOw0CSxHya8BCeVA_8_14">146,465</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_CustomerRelationshipsMember_ZruZmMW_dUOKyDn92hskBg" decimals="-3" format="ixt:numdotdecimal" name="veco:FiniteLivedIntangibleAssetsAccumulatedAmortizationAndImpairment" scale="3" id="Tc_zCvXoBo3kkmBS3qOYI8-Nw_8_17">130,131</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_CustomerRelationshipsMember_ZruZmMW_dUOKyDn92hskBg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FiniteLivedIntangibleAssetsNet" scale="3" id="Tc_W2PyGqh_8kaOyfKYkHAhWA_8_20">16,334</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:26.35%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Trademarks and tradenames</p></td><td style="vertical-align:bottom;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;white-space:nowrap;width:9.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_TrademarksAndTradeNamesMember_ZGsrH0hGMUeGCLqIeiNohQ" format="ixt-sec:duryear" name="us-gaap:FiniteLivedIntangibleAssetsRemainingAmortizationPeriod1" id="Tc_M9uswSoA30SXE89iGa_dag_9_2"><span style="font-size:10pt;"> 2.5</span></ix:nonNumeric></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_TrademarksAndTradeNamesMember_8FWYoxNsCUG56RQbn13tdQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FiniteLivedIntangibleAssetsGross" scale="3" id="Tc_E2ZVrjonxEWQh_IWCgZPUQ_9_5">30,910</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_TrademarksAndTradeNamesMember_8FWYoxNsCUG56RQbn13tdQ" decimals="-3" format="ixt:numdotdecimal" name="veco:FiniteLivedIntangibleAssetsAccumulatedAmortizationAndImpairment" scale="3" id="Tc_VdbB3W8utEu0sDBeCvf1lQ_9_8">27,857</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_TrademarksAndTradeNamesMember_8FWYoxNsCUG56RQbn13tdQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FiniteLivedIntangibleAssetsNet" scale="3" id="Tc__ZGBr1m2EUaKPGGT00g2Xw_9_11">3,053</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_TrademarksAndTradeNamesMember_3n1XHRVZZ0y9MVtV-Jsuxg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FiniteLivedIntangibleAssetsGross" scale="3" id="Tc_kFf2IUanakW9qQc9ea3elw_9_14">30,910</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_TrademarksAndTradeNamesMember_3n1XHRVZZ0y9MVtV-Jsuxg" decimals="-3" format="ixt:numdotdecimal" name="veco:FiniteLivedIntangibleAssetsAccumulatedAmortizationAndImpairment" scale="3" id="Tc_frKHqZLK-UuIlCQzGwttmQ_9_17">26,614</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_TrademarksAndTradeNamesMember_3n1XHRVZZ0y9MVtV-Jsuxg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FiniteLivedIntangibleAssetsNet" scale="3" id="Tc_Z_p-39ARY0ONLvW-_YUYCg_9_20">4,296</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:26.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Other</p></td><td style="vertical-align:bottom;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;white-space:nowrap;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"> -</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_OtherIntangibleAssetsMember_Y-vo8HGZ6kKv1USDEYP3jg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FiniteLivedIntangibleAssetsGross" scale="3" id="Tc_rrSBZ59CYk-YhFOpTRXm3A_10_5">3,686</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.1%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_OtherIntangibleAssetsMember_Y-vo8HGZ6kKv1USDEYP3jg" decimals="-3" format="ixt:numdotdecimal" name="veco:FiniteLivedIntangibleAssetsAccumulatedAmortizationAndImpairment" scale="3" id="Tc_FtXF8PpVQkWH26WatddO-w_10_8">3,686</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_OtherIntangibleAssetsMember_aMPfibA32UOlGkC8AeSvBQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FiniteLivedIntangibleAssetsGross" scale="3" id="Tc_iyFeI3TDSEuG_0pt_vE3Gg_10_14">3,686</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.1%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_OtherIntangibleAssetsMember_aMPfibA32UOlGkC8AeSvBQ" decimals="-3" format="ixt:numdotdecimal" name="veco:FiniteLivedIntangibleAssetsAccumulatedAmortizationAndImpairment" scale="3" id="Tc_hsIp5TEC00-gdeytuKsYtg_10_17">3,681</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_OtherIntangibleAssetsMember_aMPfibA32UOlGkC8AeSvBQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FiniteLivedIntangibleAssetsNet" scale="3" id="Tc_vXSRmW0ctUSXFubQiyfTHQ_10_20">5</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:26.35%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 0pt 12pt;"><span style="font-size:10pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;white-space:nowrap;width:9.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" format="ixt-sec:duryear" name="us-gaap:FiniteLivedIntangibleAssetsRemainingAmortizationPeriod1" id="Tc_mcqOMngOck2Q3EKrSpHpZg_11_2"><span style="font-size:10pt;"> 5.0</span></ix:nonNumeric></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IntangibleAssetsGrossExcludingGoodwill" scale="3" id="Tc_Q-JXB2riC0Gu36CNAnxHww_11_5">508,969</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.1%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="veco:IntangibleAssetsExcludingGoodwillAccumulatedAmortizationAndImpairment" scale="3" id="Tc_zdiY1WYzAEC7c-yu0N2UOg_11_8">475,064</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IntangibleAssetsNetExcludingGoodwill" scale="3" id="Tc_1GOLqSAq3U6z6oojip5chA_11_11">33,905</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IntangibleAssetsGrossExcludingGoodwill" scale="3" id="Tc_8k0hsoCnOkuzXmdnaIjq4g_11_14">508,969</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.1%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-3" format="ixt:numdotdecimal" name="veco:IntangibleAssetsExcludingGoodwillAccumulatedAmortizationAndImpairment" scale="3" id="Tc_rVHGWZJC50GhN36mEVoypA_11_17">462,784</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IntangibleAssetsNetExcludingGoodwill" scale="3" id="Tc_36yfBde7ikG0_CGKkJMZzw_11_20">46,185</ix:nonFraction></p></td></tr></table></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Other intangible assets primarily consist of patents, licenses, and backlog.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></ix:nonNumeric></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">F-20</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Veeco Instruments&#160;Inc. and Subsidiaries</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Notes to Consolidated Financial Statements (Continued)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;max-width:100%;position:relative;"><a id="Tc_JJro2QpoYUumxGOgifc_gA_1_2"></a><a id="Tc_kVd64B1XnE-RW2k1Xq0GrQ_2_2"></a><a id="Tc_JiOD7OW-R0KaMn94ErulWA_3_0"></a><a id="Tc_ARL4imrS0km72bjRMAPdfQ_3_2"></a><a id="Tc_kVtk59XUFU-WwyVRqMbcaw_4_0"></a><a id="Tc_j1AqtozEs0-1jj03gih3xg_5_0"></a><a id="Tc_HDLDCUCPAUKI3MxgEmigcg_6_0"></a><a id="Tc_K8niuZO8oUmO3RSkl8PfoQ_7_0"></a><a id="Tc_HOxyjarY7ES3FUOVnfEm3A_8_0"></a><a id="Tc_ymy8r2Pw50m8Shumxo6DQQ_9_0"></a><a id="Tc_lwDLM0lgq0umdSUZlWvauQ_9_2"></a><ix:continuation id="Tb_xrgFvKf6OkGCXAkDJLiQqQ_cont1"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Based on the intangible assets recorded at December 31, 2021, and assuming no subsequent additions to or impairment of the underlying assets, the remaining estimated annual amortization expense, is expected to be as follows:</p><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" name="us-gaap:ScheduleofFiniteLivedIntangibleAssetsFutureAmortizationExpenseTableTextBlock" id="Tb_ldrIo0D7TUariY5m8zn4ug" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:46%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:75.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:17.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:75.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:20.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Amortization</b></p></td></tr><tr><td style="vertical-align:bottom;width:75.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:20.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:75.65%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2022</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.58%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.65%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:17.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FiniteLivedIntangibleAssetsAmortizationExpenseNextTwelveMonths" scale="3" id="Tc_TX-4eCOiWkeSgh3eRrScvQ_3_3">10,018</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:75.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2023</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:17.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FiniteLivedIntangibleAssetsAmortizationExpenseYearTwo" scale="3" id="Tc_tE4oE5HHl0SQwlEKv8IBAg_4_3">8,347</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:75.65%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2024</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.58%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.65%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:17.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FiniteLivedIntangibleAssetsAmortizationExpenseYearThree" scale="3" id="Tc_zvVONSBo20CPPwFT3NTF5w_5_3">6,708</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:75.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2025</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:17.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FiniteLivedIntangibleAssetsAmortizationExpenseYearFour" scale="3" id="Tc_HlrYurq7-UeATfm25hbGpg_6_3">3,136</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:75.65%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2026</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.58%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.65%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:17.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FiniteLivedIntangibleAssetsAmortizationExpenseYearFive" scale="3" id="Tc_ABDgbSEXmU2VuCDY5yAU4g_7_3">2,134</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:75.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Thereafter</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.65%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:17.11%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FiniteLivedIntangibleAssetsAmortizationExpenseAfterYearFive" scale="3" id="Tc_Fc3cHcQeCEu6aDua91HHTA_8_3">3,562</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:75.65%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Total</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.58%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.65%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:17.11%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FiniteLivedIntangibleAssetsNet" scale="3" id="Tc_sG81e9-XAkipdvggJfvIIQ_9_3">33,905</ix:nonFraction></p></td></tr></table></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></ix:continuation><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><a id="Tc_rIXFbFYOJkyJieJXX7hKHQ_1_2"></a><a id="Tc_nLZFshFh902LYxNAycAW0A_1_5"></a><a id="Tc_ha4L56aMnUOuIyYWM-7uMg_2_2"></a><a id="Tc_OajTzzdX7kuSqtDJzlTpwg_2_5"></a><a id="Tc_OPkUOlNLXUSIp2uKSoC1ag_3_2"></a><a id="Tc_Na9hLD7mVEG1HvVHrDLWKw_4_0"></a><a id="Tc_t-ajXbSp6E6tarBFqdE2Nw_4_2"></a><a id="Tc_wqfhw-qdvkGCCpRWL3CQ3Q_4_5"></a><a id="Tc_uqLuVCmvukGOCX3D1zB83A_5_0"></a><a id="Tc_6ozAa7QahkaiR5jMz-4n3A_7_0"></a><a id="Tc_UxijOj67xkyLOJ2QMypXJw_8_0"></a><a id="Tc_dVVuSYz1LkmU5ei40ls38w_9_0"></a><a id="Tc_xYakrBFO3ESX957Yovj_6A_9_6"></a><a id="Tc_TsD79uoos0avjV3JXNMlgw_10_0"></a><a id="Tc_X4sjiNdCD0idpCh24eBzCQ_11_0"></a><a id="Tc_4UzL8r8PRku_WW3mLDGQuw_12_0"></a><a id="Tc_0tInZ_q3R0mzRs1o1Ob_yg_12_2"></a><a id="Tc_Q2ydok9T_UuS6-mM9y744Q_12_5"></a><a id="Tc_V01itGQBKUWwbbBwfKopVA_1_2"></a><a id="Tc_dHreHaMPqU2cnlSWH_OGMw_2_0"></a><a id="Tc_6MTqOYeQHkSxjSY1QDZZZw_2_2"></a><a id="Tc_wjBHDTwrIkGoEuYhqGyclg_3_0"></a><a id="Tc_Nso-jRcOsUSqZj87Y67WJQ_4_0"></a><a id="Tc_yIMMZBoD90-pSuUbD1xEfA_5_0"></a><a id="Tc_nI4li_rP2Ui_BIhuLQNgkQ_5_2"></a><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" name="us-gaap:AccountsPayableAndAccruedLiabilitiesDisclosureTextBlock" id="Tb_iz2WE_1hnU2Ke_A6umshsQ" continuedAt="Tb_iz2WE_1hnU2Ke_A6umshsQ_cont1" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note 8 &#8212; Accrued Expenses and Other Liabilities</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The components of accrued expenses and other current liabilities were as follows:</p><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" name="us-gaap:ScheduleOfAccruedLiabilitiesTableTextBlock" id="Tb_fsw7Vk6cfUaouPcOydy6Fw" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:70.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:70.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.49%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.49%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:70.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.49%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.49%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="7" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:70.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:27.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:70.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Payroll and related benefits</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:EmployeeRelatedLiabilitiesCurrent" scale="3" id="Tc_YFwiM8UIikG4zAFVaNjlhQ_4_3">35,712</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:EmployeeRelatedLiabilitiesCurrent" scale="3" id="Tc_Je8x30JDr0uMTx97MYOmXg_4_6">26,630</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:70.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Warranty</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProductWarrantyAccrualClassifiedCurrent" scale="3" id="Tc_WWa80EyqoEa-xP6QI5dfPw_5_3">7,878</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProductWarrantyAccrualClassifiedCurrent" scale="3" id="Tc_Ug2vutjLbEirimGQmiOgug_5_6">5,058</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:70.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="-sec-ix-hidden:Hidden_F6hpkcy7sk2smVu90Wpo7g;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">Operating lease liabilities</span></span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingLeaseLiabilityCurrent" scale="3" id="Tc_YEiz1scxMUiypS6Iio4ZBA_6_3">4,437</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingLeaseLiabilityCurrent" scale="3" id="Tc_I9ri9rY8b0O-WotxmKLuuA_6_6">4,148</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:70.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Interest</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InterestPayableCurrent" scale="3" id="Tc__Kc2GAqjUEmtY-smPaBXlQ_7_3">2,757</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InterestPayableCurrent" scale="3" id="Tc_h6yJwp1QEE-5LL6a2LZunw_7_6">2,574</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:70.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Professional fees</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AccruedProfessionalFeesCurrent" scale="3" id="Tc_jAXGI3EjWEaE0Jn3-yZBEg_8_3">1,467</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AccruedProfessionalFeesCurrent" scale="3" id="Tc_PENCswShmUSQC3fjxpCpFQ_8_6">1,112</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:70.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Legal settlement</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:LossContingencyAccrualCarryingValueCurrent" scale="3" id="Tc_8de4Lsp-uE2eHynZMy65sA_9_3">15,000</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td></tr><tr><td style="vertical-align:bottom;width:70.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Sales, use, and other taxes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:TaxesPayableCurrent" scale="3" id="Tc_A3gKENVkMEmnuDAiYEKYoA_10_3">4,889</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:TaxesPayableCurrent" scale="3" id="Tc_Od7as4TU5EGYhp92qyfCYg_10_6">2,658</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:70.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Other</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherAccruedLiabilitiesCurrent" scale="3" id="Tc_RvHOHZ_JjkyFYC4IiqgG1w_11_3">7,612</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherAccruedLiabilitiesCurrent" scale="3" id="Tc_2g-TYBSy9UO-zeh5rBj2MA_11_6">2,696</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:70.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;border-bottom:3px double 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style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-3" format="ixt:numdotdecimal" name="veco:AccruedAndOtherLiabilitiesCurrent" scale="3" id="Tc_HUR2KYypWECAWBIm59oIuw_12_6">44,876</ix:nonFraction></p></td></tr></table></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Customer deposits and deferred revenue</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Customer deposits totaled $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:ContractWithCustomerRefundLiabilityCurrent" scale="6" id="Narr_3xEOV4dncEmQ3_JuDiC-6Q">46.9</ix:nonFraction> million and $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:ContractWithCustomerRefundLiabilityCurrent" scale="6" id="Narr_ih5zlA6FpUS4-S0nu6gARw">49.3</ix:nonFraction> million at December 31, 2021 and 2020, respectively, which are included in &#8220;Customer deposits and deferred revenue&#8221; in the Consolidated Balance Sheets. 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December&#160;31, 2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.57%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.57%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.7%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ContractWithCustomerLiability" scale="3" id="Tc_DkA_FnS_Sku6iTJo6x4lgg_2_3">17,985</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:80.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Deferral of revenue</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.57%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.57%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncreaseDecreaseInContractWithCustomerLiability" sign="-" scale="3" id="Tc_OrSbzXpnVk2OIDPWdDKVXw_3_3">6,782</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:80.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Recognition of unearned revenue</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.57%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.57%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.7%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ContractWithCustomerLiabilityRevenueRecognized" sign="-" scale="3" id="Tc_xHWG5NEz60mf76n7iRF0iA_4_3">8,491</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:bottom;width:80.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Balance - December&#160;31, 2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.57%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.57%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.7%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ContractWithCustomerLiability" scale="3" id="Tc_XMPBKM_p-0-jHjk_JdeQZQ_5_3">16,276</ix:nonFraction></p></td></tr></table></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">As of December&#160;31, 2021, the Company has approximately </span><span style="font-size:10pt;">$<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:RevenueRemainingPerformanceObligation" scale="6" id="Narr_ooWPGgRfKE-JDo6DqaDuHg">33.6</ix:nonFraction></span><span style="font-size:10pt;"> million of remaining performance obligations on contracts with an original estimated duration of </span><ix:nonNumeric contextRef="As_Of_12_31_2021_srt_RangeAxis_srt_MinimumMember_jzKfWeisOkuy0Ksm_Kfk6w" format="ixt-sec:durwordsen" name="us-gaap:RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionPeriod1" id="Narr_i7D2bz7JGEqxXD19JF8Vfw"><span style="font-size:10pt;">one year</span></ix:nonNumeric><span style="font-size:10pt;"> or more, of which approximately </span><span style="font-size:10pt;"><ix:nonFraction unitRef="Unit_Standard_pure_60KFN_p23EC7YcClApV5TA" contextRef="As_Of_12_31_2021_us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionStartDateAxis_veco_cnst_2022-01-01_q0ASsfy38kSrloJs8RZShw" decimals="2" format="ixt:numdotdecimal" name="veco:RevenueRemainingPerformanceObligationExpectedTimingPercentage" scale="-2" id="Narr_bk8kBmzIgE-4eGE_N8BSuQ">94</ix:nonFraction>%</span><span style="font-size:10pt;"> is expected to be recognized within </span><ix:nonNumeric contextRef="As_Of_12_31_2021_us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionStartDateAxis_veco_cnst_2022-01-01_q0ASsfy38kSrloJs8RZShw" format="ixt-sec:durwordsen" name="us-gaap:RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionPeriod1" id="Narr_TCOKfVZTakyKpEiBpb_0vg"><span style="font-size:10pt;">one year</span></ix:nonNumeric><span style="font-size:10pt;">, with the remaining amounts expected to be recognized between </span><span style="-sec-ix-hidden:Hidden_T3SVPFAPMEGRt2ljwcbEMQ;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">one to three years</span></span><span style="font-size:10pt;">. The Company has elected to exclude disclosures regarding remaining performance obligations that have an original expected duration of </span><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" format="ixt:booleantrue" name="us-gaap:RevenuePracticalExpedientRemainingPerformanceObligation" id="Narr_88LcPSoTTEaXS1MXJVG9bQ"><span style="font-size:10pt;">one</span></ix:nonNumeric><span style="font-size:10pt;"> year or less.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></ix:nonNumeric></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">F-21</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Veeco Instruments&#160;Inc. and Subsidiaries</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Notes to Consolidated Financial Statements (Continued)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;max-width:100%;position:relative;"><ix:continuation id="Tb_iz2WE_1hnU2Ke_A6umshsQ_cont1"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Other liabilities</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">As part of a prior acquisition, the Company assumed an executive non-qualified deferred compensation plan that allowed qualifying executives to defer cash compensation. The plan was frozen at the time of acquisition and no further contributions have been made. <span style="background:#ffffff;">The plan was terminated and fully liquidated during 2021.</span> At December 31, 2020, plan assets approximated $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_us-gaap_BalanceSheetLocationAxis_us-gaap_OtherAssetsMember_sEOy7kcya0q3Y-xdm6bLpA" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:DeferredCompensationPlanAssets" scale="6" id="Narr_FMlRCejiVUapEA4zNRZ2Pw">2.4</ix:nonFraction> million, representing the cash surrender value of life insurance policies and is included within &#8220;Other assets&#8221; in the Consolidated Balance Sheets, while plan liabilities approximated $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_us-gaap_BalanceSheetLocationAxis_us-gaap_OtherLiabilitiesMember_Eb7DlI4X6UiL9ZFXqZRyqA" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:DeferredCompensationLiabilityClassifiedNoncurrent" scale="6" id="Narr_h6GFbSBMBk2XsAxK0JePlg">2.5</ix:nonFraction><span style="white-space:pre-wrap;"> million  and is included within &#8220;Other liabilities&#8221; in the Consolidated Balance Sheets. </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">At December 31, 2021 and 2020, other liabilities also included (i) asset retirement obligations of $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_us-gaap_BalanceSheetLocationAxis_us-gaap_OtherLiabilitiesMember_movXVKOf5UODvEe-nmHvdQ" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:AssetRetirementObligationsNoncurrent" scale="6" id="Narr_2XRRwQn2wkmsH9PQZvZ63g">2.8</ix:nonFraction> million and $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_us-gaap_BalanceSheetLocationAxis_us-gaap_OtherLiabilitiesMember_Eb7DlI4X6UiL9ZFXqZRyqA" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:AssetRetirementObligationsNoncurrent" scale="6" id="Narr_ON5tdtpPOE2KvWef-tZ5jg">2.7</ix:nonFraction> million, respectively; (ii) income tax payables of $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_us-gaap_BalanceSheetLocationAxis_us-gaap_OtherLiabilitiesMember_movXVKOf5UODvEe-nmHvdQ" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:AccruedIncomeTaxesNoncurrent" scale="6" id="Narr_DB510VirSky-c2YQZA4j1A">0.4</ix:nonFraction> million and $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_us-gaap_BalanceSheetLocationAxis_us-gaap_OtherLiabilitiesMember_Eb7DlI4X6UiL9ZFXqZRyqA" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:AccruedIncomeTaxesNoncurrent" scale="6" id="Narr_5WD2amEINUySbGNLc8w0Eg">1.4</ix:nonFraction> million, respectively; and (iii) medical and dental benefits for former executives of $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_us-gaap_BalanceSheetLocationAxis_us-gaap_OtherLiabilitiesMember_movXVKOf5UODvEe-nmHvdQ" decimals="-5" format="ixt:numdotdecimal" name="veco:MedicalAndDentalBenefitLiabilitiesNoncurrent" scale="6" id="Narr_JWAuG1oah0K5g6GEzXQj4Q">1.8</ix:nonFraction> million and $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_us-gaap_BalanceSheetLocationAxis_us-gaap_OtherLiabilitiesMember_Eb7DlI4X6UiL9ZFXqZRyqA" decimals="-5" format="ixt:numdotdecimal" name="veco:MedicalAndDentalBenefitLiabilitiesNoncurrent" scale="6" id="Narr_ia5xdcq2YkORJ1BWaVJSDw">1.9</ix:nonFraction> million, respectively. Additionally, as a result of the Coronavirus, Aid, Relief, and Economic Security Act, the Company has accrued for and deferred the deposit and payment of its share of social security taxes, resulting in a liability of $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:DepositLiabilitiesAccruedInterest" scale="6" id="Narr_9rMo_lgfQES01WMNWh9EIQ">3.6</ix:nonFraction> million at December 31, 2020, of which $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_us-gaap_BalanceSheetLocationAxis_veco_AccruedExpensesAndOtherCurrentLiabilitiesMember_wDU9WSXSREC9RrSQtX4fKw" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:DepositLiabilitiesAccruedInterest" scale="6" id="Narr_fdDBvpizs02YmSS9XjibKA">1.8</ix:nonFraction> million is included within &#8220;Accrued expenses and other current liabilities&#8221;, and $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_us-gaap_BalanceSheetLocationAxis_us-gaap_OtherLiabilitiesMember_Eb7DlI4X6UiL9ZFXqZRyqA" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:DepositLiabilitiesAccruedInterest" scale="6" id="Narr_zlwolwtenUWQ_blkHNUbQA">1.8</ix:nonFraction> million is included within &#8220;Other liabilities&#8221; in the Consolidated Balance Sheets. At December 31, 2021, a $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_us-gaap_BalanceSheetLocationAxis_veco_AccruedExpensesAndOtherCurrentLiabilitiesMember_Zl9x6DOnL0mqzEhVTf3F_A" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:AccruedPayrollTaxesCurrent" scale="6" id="Narr_wdfb2adDj02943LnlLSRLA">1.7</ix:nonFraction> million liability remains for these deferred payroll taxes, which is included within &#8220;Accrued expenses and other current liabilities.&#8221;</p></ix:continuation><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p><a id="Tc_k0b_H5eMo0aZLm1ZG6hCFA_1_2"></a><a id="Tc_ueRniNSbgkiW-BJE3AFQlg_2_2"></a><a id="Tc_VEGVAiuRakCpTHOqvoObRQ_2_5"></a><a id="Tc_Wn3THPujF0CVvAv-IQ1WJw_2_8"></a><a id="Tc_fyOb9Vw-C0ytYzafAn0bKg_3_3"></a><a id="Tc_ut8xDSkQ4U27qLaVRLoM4g_4_0"></a><a id="Tc_iDP00HYNIESCDrzhPYGCLw_4_2"></a><a id="Tc_FUGZY7RGEUat3uI--U1XIg_4_5"></a><a id="Tc_50xD4fYa9UisImKTRqZVoQ_4_8"></a><a id="Tc_XR74eLfgFUG2WbWbbzwtGw_5_0"></a><a id="Tc_F7ze6vFW2ESX31FKfgutkA_6_0"></a><a id="Tc_elhbNaU0t0u7F70ZvJ4vdg_7_0"></a><a id="Tc_BsicxSyXlUa6LCzKvYywmQ_8_0"></a><a id="Tc_y2GAPgr_2EOMtcty8OrQvA_8_2"></a><a id="Tc_ZeVxRNKDnUGoLDY_jOidzg_8_5"></a><a id="Tc_PpX3fyVAsk-BlBBPHVkg9w_8_8"></a><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" name="us-gaap:CommitmentsAndContingenciesDisclosureTextBlock" id="Tb_-kF6sSUt8kG92s23V3MiJQ" continuedAt="Tb_-kF6sSUt8kG92s23V3MiJQ_cont1" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note 9 &#8212; Commitments and Contingencies</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Warranty</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Changes in the Company&#8217;s product warranty reserves were as follows:</p><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" name="us-gaap:ScheduleOfProductWarrantyLiabilityTableTextBlock" id="Tb_-68chTRDBEikISfEOWPvJA" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:61.6%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.43%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.45%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.45%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:61.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:36.32%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:61.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.72%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2019</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="10" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:61.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="7" style="vertical-align:bottom;white-space:nowrap;width:35.04%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:61.6%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Balance - beginning of the year</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProductWarrantyAccrual" scale="3" id="Tc_b0Yj2ay1Ek64rSH08UrIxA_4_3">5,058</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2019_V3OJMQUyh0CQkfB0kHJGFg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProductWarrantyAccrual" scale="3" id="Tc_HPnRO5jQ30-1z_AAm9eYWA_4_6">7,067</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" 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Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProductWarrantyAccrualWarrantiesIssued" scale="3" id="Tc_dqBNBoH-z0m4Urxpaip7Bg_5_3">7,102</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_irQajVZIkUmgjCJ-cxJ5AQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProductWarrantyAccrualWarrantiesIssued" scale="3" id="Tc_9ry3Y1LJukSs55Mj4tIteA_5_6">4,626</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New 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style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProductWarrantyAccrualPayments" scale="3" id="Tc_kFPRS0IW7kGxGW70qR1trw_6_3">5,784</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_irQajVZIkUmgjCJ-cxJ5AQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProductWarrantyAccrualPayments" scale="3" id="Tc_v01iPVlPpU6Op43PBG-0Xg_6_6">6,691</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_ssAGFj6EXEiYqEtVZlyqxA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProductWarrantyAccrualPayments" scale="3" id="Tc_UD1nKvZRoE24Hqj2rnhlMg_6_9">6,242</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:bottom;width:61.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Changes in estimate</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProductWarrantyAccrualPreexistingIncreaseDecrease" scale="3" id="Tc_gicDYm_iTUWt656gQVhgpA_7_3">1,502</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.45%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_irQajVZIkUmgjCJ-cxJ5AQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProductWarrantyAccrualPreexistingIncreaseDecrease" scale="3" id="Tc_5umKtzgHgEyBOPAXT0ngTQ_7_6">56</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.45%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_ssAGFj6EXEiYqEtVZlyqxA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProductWarrantyAccrualPreexistingIncreaseDecrease" sign="-" scale="3" id="Tc_MFrEVJHoa02wdEvKx0A--w_7_9">408</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:bottom;width:61.6%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Balance - end of the year</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.43%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProductWarrantyAccrual" scale="3" id="Tc_qXOAoIJj-0uZQUzO3V034w_8_3">7,878</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.45%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProductWarrantyAccrual" scale="3" id="Tc_T4HZZn0OrEKzJrX9Ve95vw_8_6">5,058</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.45%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2019_V3OJMQUyh0CQkfB0kHJGFg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProductWarrantyAccrual" scale="3" id="Tc_a4siiPIILUGdNwjsG9aPNw_8_9">7,067</ix:nonFraction></p></td></tr></table></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Minimum Lease Commitments</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">The Company&#8217;s operating leases primarily include real estate leases for properties used for manufacturing, R&amp;D activities, sales and service, and administration, as well as certain equipment leases. Some leases may include options to renew for a period of up to&#160;</span><ix:nonNumeric contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" format="ixt-sec:durwordsen" name="us-gaap:LesseeOperatingLeaseRenewalTerm" id="Narr_MRkoD_4bwkG_V_V7SrYi1Q"><span style="font-size:10pt;">5 years</span></ix:nonNumeric><span style="font-size:10pt;">, while others may include options to terminate the lease. The weighted average remaining lease term of the Company&#8217;s operating leases as of December 31, 2021 was&#160;</span><ix:nonNumeric contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" format="ixt-sec:durwordsen" name="us-gaap:OperatingLeaseWeightedAverageRemainingLeaseTerm1" id="Narr_21BSgDNWUECL4VQYLdzRCg"><span style="font-size:10pt;">12 years</span></ix:nonNumeric><span style="font-size:10pt;">, and the weighted average discount rate used in determining the present value of future lease payments was&#160;</span><span style="font-size:10pt;"><ix:nonFraction unitRef="Unit_Standard_pure_60KFN_p23EC7YcClApV5TA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="3" format="ixt:numdotdecimal" name="us-gaap:LesseeOperatingLeaseDiscountRate" scale="-2" id="Narr_AoXhbFg3J0KYuWF1Utb1oA">5.7</ix:nonFraction>%</span><span style="font-size:10pt;">.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></ix:nonNumeric></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">F-22</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Veeco Instruments&#160;Inc. and Subsidiaries</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Notes to Consolidated Financial Statements (Continued)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;max-width:100%;position:relative;"><a id="Tc_vrvAwIrmYUSUqZ3bT6eutg_1_2"></a><a id="Tc_OzPfyisnhEOKl9SHlAXkQw_2_2"></a><a id="Tc_-x57nXiUzUCjmS6Xjn3fag_3_2"></a><a id="Tc_syyUXHBNSkWebPilXd7heQ_4_0"></a><a id="Tc_0a0_m7yYoESGun7XVu8a9A_5_0"></a><a id="Tc_KmA_3vv34kqoQCsBmVYgpQ_5_2"></a><a id="Tc_LLlurQ-I2Uy52fsB1azonA_6_0"></a><a id="Tc_7ymM3DvRBEuiOLbmAyuP0g_7_0"></a><a id="Tc_a34u0zF4IUa5QcZ1Q4VY8Q_8_0"></a><a id="Tc_dRR14vl6g0KMODRvmk6rVg_9_0"></a><a id="Tc_t1rqtXbzV0iDCq6fXQwgDA_10_0"></a><a id="Tc_r4PuKeD4MUCatEaKNkFxvw_11_0"></a><a id="Tc_T9bzvnP_UEOu5wH6_61ccQ_12_0"></a><a id="Tc_1GDj1Vw8LkWqrKIKcdKQEg_13_0"></a><a id="Tc_TKq2WhfRw0KKFMkssrfgPw_13_2"></a><a id="Tc_V94-rEGLakWeQKMJrFS9Bg_15_0"></a><a id="Tc_ce5dLdMN_0G5_WeM-nFTKA_16_2"></a><a id="Tc_vJ_SL8tSjE6B--ptxcxU7w_17_0"></a><a id="Tc_je3bRkgLHEO7Wtfmv6MkUQ_18_2"></a><ix:continuation id="Tb_-kF6sSUt8kG92s23V3MiJQ_cont1" continuedAt="Tb_-kF6sSUt8kG92s23V3MiJQ_cont2"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The following table provides the maturities of lease liabilities at December 31, 2021: </p><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" name="us-gaap:LesseeOperatingLeaseLiabilityMaturityTableTextBlock" id="Tb_zdMJ061Lokm61R66cV7WXw" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:15.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Operating</b></p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:15.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Leases</b></p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:15.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Payments due by period:</b></p></td><td style="vertical-align:bottom;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2022</p></td><td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths" scale="3" id="Tc_SGqyR2iTLEyEbu4qOHHrWw_5_3">4,901</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2023</p></td><td style="vertical-align:bottom;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:LesseeOperatingLeaseLiabilityPaymentsDueYearTwo" scale="3" id="Tc_01f_xU2FMEmTxJrPQJPScg_6_3">3,979</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2024</p></td><td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:LesseeOperatingLeaseLiabilityPaymentsDueYearThree" scale="3" id="Tc_9Wg4HQuk8EK-6Y-bmXq78A_7_3">3,769</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2025</p></td><td style="vertical-align:bottom;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:LesseeOperatingLeaseLiabilityPaymentsDueYearFour" scale="3" id="Tc_eMn5wCrTikaWA8YMtJQNYA_8_3">3,309</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2026</p></td><td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:LesseeOperatingLeaseLiabilityPaymentsDueYearFive" scale="3" id="Tc_scj5_m4F70K76wEWoxZunA_9_3">3,496</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Thereafter</p></td><td style="vertical-align:bottom;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFive" scale="3" id="Tc_UzU3Bh1BDkyrs8Dcoq9wOQ_10_3">35,960</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Total future minimum lease payments</p></td><td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:LesseeOperatingLeaseLiabilityPaymentsDue" scale="3" id="Tc_iR8lWs2Cw06jDQl1aHM5EA_11_3">55,414</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Less: Imputed interest</p></td><td style="vertical-align:bottom;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:LesseeOperatingLeaseLiabilityUndiscountedExcessAmount" scale="3" id="Tc_2GinaU41PUWGrH4OHun8Dg_12_3">18,143</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Total</p></td><td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingLeaseLiability" scale="3" id="Tc_VQpbzyPwZ02Xq7TiJy7Z_A_13_3">37,271</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:82.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Reported as of December&#160;31, 2021</b></p></td><td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="-sec-ix-hidden:Hidden_SwFqQXYgBEak5kXP8askZQ;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">Accrued expenses and other current liabilities</span></span></p></td><td style="vertical-align:bottom;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingLeaseLiabilityCurrent" scale="3" id="Tc_2FeFs5DuBU2oc9gWq2K2Sw_16_3">4,437</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Long-term operating lease liabilities</p></td><td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingLeaseLiabilityNoncurrent" scale="3" id="Tc_j-Wrt2ffUUej9PTKKWTZug_17_3">32,834</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 0pt 12pt;"><span style="-sec-ix-hidden:Hidden_zFxbRdmFCE2TWUV1wQrYUA;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">Total</span></span></p></td><td style="vertical-align:bottom;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingLeaseLiability" scale="3" id="Tc_1f57CrRKLkyAZDBD9v9_nA_18_3">37,271</ix:nonFraction></p></td></tr></table></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Operating lease cost for the years ended December 31, 2021, 2020, and 2019 was $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:OperatingLeaseCost" scale="6" id="Narr__1wFmX-KmECIrDU986mL0w">6.6</ix:nonFraction> million, $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_irQajVZIkUmgjCJ-cxJ5AQ" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:OperatingLeaseCost" scale="6" id="Narr_enmMrZNePUWsNj5R9tgzbw">5.4</ix:nonFraction> million, and $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_ssAGFj6EXEiYqEtVZlyqxA" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:OperatingLeaseCost" scale="6" id="Narr__96OtJARSkyEm9CY5o_c6w">5.5</ix:nonFraction> million, respectively. Variable lease cost for all years ended December 31, 2021, 2020, and 2019 was $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:VariableLeaseCost" scale="6" id="Narr_xZDnQ4P5xEiZJ8CylNNR1w"><ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_ssAGFj6EXEiYqEtVZlyqxA" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:VariableLeaseCost" scale="6" id="Narr_TKfCllLRukiAql97axzMFQ"><ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_irQajVZIkUmgjCJ-cxJ5AQ" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:VariableLeaseCost" scale="6" id="Narr_kz30SMtntUKl7CNuy-Ga3A">1.7</ix:nonFraction></ix:nonFraction></ix:nonFraction> million. Additionally, the Company has an immaterial amount of short-term leases. Lease expense, which includes operating lease costs and variable lease costs, was $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:LeaseCost" scale="6" id="Narr_kKkK3OlxREaP38LKJENoOA">8.4</ix:nonFraction>&#160;million, $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_irQajVZIkUmgjCJ-cxJ5AQ" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:LeaseCost" scale="6" id="Narr_P2ddp01VrEWgGniVUdscHg">7.1</ix:nonFraction>&#160;million, and $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_ssAGFj6EXEiYqEtVZlyqxA" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:LeaseCost" scale="6" id="Narr_ziidv1XK-UuWUUlEjRcNKA">7.2</ix:nonFraction>&#160;million for the years ended December 31, 2021, 2020, and 2019, respectively. In addition, the Company is obligated under such leases for certain other expenses, including real estate taxes and insurance. Operating cash outflows from operating leases for the year ended December 31, 2021, 2020, and 2019 were $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:OperatingLeasePayments" scale="6" id="Narr_WbGhI-7NZESgHM3ffmDx3A">6.6</ix:nonFraction>&#160;million (excluding landlord reimbursements for leasehold improvements of $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="-5" format="ixt:numdotdecimal" name="veco:ReimbursementForLeaseholdImprovements" scale="6" id="Narr_6pwN1GydHkqA1_Frg-rUgA">6.1</ix:nonFraction> million included within &#8220;Other, net&#8221; in the Consolidated Statements of Cash Flows), $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_irQajVZIkUmgjCJ-cxJ5AQ" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:OperatingLeasePayments" scale="6" id="Narr_x3E-2KbL1EeSo0NYx7JSvw">6.9</ix:nonFraction> million, and $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_ssAGFj6EXEiYqEtVZlyqxA" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:OperatingLeasePayments" scale="6" id="Narr_xT9qZKE3VUWjDsFq_nCjrg">7.2</ix:nonFraction>&#160;million, respectively.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Legal Proceedings</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">On June 8, 2018, an Ultratech shareholder who received Veeco stock as part of the consideration for the Ultratech acquisition filed a purported class action complaint in the Superior Court of the State of California, County of Santa Clara, captioned Wolther v. Maheshwari et al., Case No. 18CV329690, on behalf of himself and others who purchased or acquired shares of Veeco pursuant to the registration statement and prospectus which Veeco filed with the SEC in connection with the Ultratech acquisition (the &#8220;Wolther Action&#8221;). On August 2 and August 8, 2018, <ix:nonFraction unitRef="Unit_Standard_case_INAg1NWqZUqeVF3Px9SOSg" contextRef="Duration_8_2_2018_To_8_8_2018_srt_LitigationCaseAxis_veco_UltratechAcquisitionLitigationMember_PCulsQcRd0m39_P1kpHp2g" decimals="INF" format="ixt-sec:numwordsen" name="us-gaap:LossContingencyNewClaimsFiledNumber" scale="0" id="Narr_EfsdoFL-u0mipMt-S6jTmA">two</ix:nonFraction> purported class action complaints substantially similar to the Wolther Action were filed on behalf of different plaintiffs in the same court as the Wolther Action. These cases have been consolidated with the Wolther Action, and a consolidated complaint was filed on December 11, 2018. The consolidated complaint seeks to recover damages and fees under Sections 11, 12, and 15 of the Securities Act of 1933 for, among other things, alleged false/misleading statements in the registration statement and prospectus relating to the Ultratech acquisition, relating primarily to the alleged failure to disclose delays in the advanced packaging business, increased MOCVD competition in China, and an intellectual property dispute. In October 2021, Veeco and the court-appointed class representatives signed an agreement to settle the Wolther Action on a class-wide basis for $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_10_1_2021_To_10_31_2021_srt_LitigationCaseAxis_veco_WoltherActionMember_zvIbSu7pIUihr6glIwx8UQ" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:LitigationSettlementAmountAwardedToOtherParty" scale="6" id="Narr_5CJURrJ6WkC6rZgpEQCmxQ">15.0</ix:nonFraction><span style="white-space:pre-wrap;"> million, subject to court approval and class members&#8217; opportunity to object and opt-out, which is included within &#8220;Accrued expenses and other current liabilities&#8221; in the Consolidated Balance Sheets as of December 31, 2021. The settlement amount will be funded by insurance carriers, the receivable for which is included in &#8220;Prepaid expenses and other current assets&#8221; in the Consolidated Balance Sheets as of December 31, 2021.  </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></ix:continuation></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">F-23</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Veeco Instruments&#160;Inc. and Subsidiaries</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Notes to Consolidated Financial Statements (Continued)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;max-width:100%;position:relative;min-height:10.35pt;"><a id="_Hlk93568433"></a><a id="_134dc9fb_e564_406c_97fa_9b319b158e8b"></a><a id="Tc_Dn6fTFq7tUKVGtYGv1EwNw_1_2"></a><a id="Tc_xYpeI34EWUGL2Xkmt0rBsg_1_6"></a><a id="Tc_Jb2py2ERnUefC_01yPEIag_2_2"></a><a id="Tc_ZXGsrJdgTkiuMA4XdQW0xw_2_6"></a><a id="Tc_W8vemcZye0qKKobXADGFUw_3_0"></a><a id="Tc_N7HlfgkKYESQ_sZzOOynMQ_3_2"></a><a id="Tc_AOUGBdujsUmG9lV8oCB5_g_3_4"></a><a id="Tc_4ZWQxktETEOWlgFZApvtaA_3_6"></a><a id="Tc_khRW_uhl9E6hXAZS1CHSrg_3_8"></a><a id="Tc_609r4o0790uthvJzKHXehQ_3_10"></a><a id="Tc_-qJqYqnFc0yumoUybwqMkg_4_0"></a><a id="Tc_3gzzt_IKEUaRqxRaGaBUBg_4_3"></a><a id="Tc_OufsHPJ5DkO2KSFv4eNPQg_4_4"></a><a id="Tc_TakNBMk2N0WMs_qHUXSaHg_4_7"></a><a id="Tc_TZwRZk_qz0-xJdz4n-010g_4_8"></a><a id="Tc_Npx4nlA93k6KJm0HbTxA9g_4_10"></a><a id="Tc_B1A9O3JsakSz2QdUWRc_og_5_0"></a><a id="Tc_plz_nrfdZk-EJCQ_QsD6dA_5_2"></a><a id="Tc_UjK8j-vtBES-kaD728Yk5Q_5_4"></a><a id="Tc_qgSTgtoxGUWEU0b3SqiW4A_5_7"></a><a id="Tc_AqJTXT-52EWFtG46c0axew_5_8"></a><a id="Tc_w5ujgq-hKUaXciMPVf6VgQ_5_10"></a><a id="Tc_ZyHWaRJLoEe3pHCb6mObkg_6_0"></a><a id="Tc_VxiP1V4VykWQN6kjsKreuA_6_3"></a><a id="Tc_z6qo_xFwvk6HQzQwT4pXFw_6_4"></a><a id="Tc_K5ZHDOLBkkOll74b5gqShQ_6_6"></a><a id="Tc_0RaOgnM3f0W-h3ZZGMMNvQ_6_8"></a><a id="Tc_tWmeNo4Uu0CybGSK3E_uLg_6_10"></a><a id="Tc_0op8U1ZhAk6bODsn__s4pw_7_0"></a><a id="Tc_a1rYjNtnNkelbuBFNtemYw_7_3"></a><a id="Tc_Zdmkd0OyBk6lyoRvFUWnZQ_7_4"></a><a id="Tc_rQcpozFtqkWPmOvLFUA3CA_7_6"></a><a id="Tc_wbKmYtzFtESbNKg2U636ww_7_8"></a><a id="Tc_fDcwXjESSUSOnsP-FD7kEg_7_10"></a><a id="Tc_bRQlJ8gUaUSvVFDPGTugMg_8_0"></a><a id="Tc_lNXYWIPc-0Gd5_JuF3VdIA_8_2"></a><a id="Tc__rzeo4MGNEOOuz9I3xEqIw_8_4"></a><a id="Tc_cdrZTVAOZEKFS5yCRqIVzQ_8_6"></a><a id="Tc_dgQ6_IpvZkiKkQ05IzGMgg_8_9"></a><a id="Tc_qdngLLhZikaXeYDolGpVsw_8_11"></a><ix:continuation id="Tb_-kF6sSUt8kG92s23V3MiJQ_cont2" continuedAt="Tb_-kF6sSUt8kG92s23V3MiJQ_cont3"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">On December 21, 2018, a purported Veeco stockholder filed a derivative action in the Superior Court of the State of California, County of Santa Clara, captioned Vladimir Gusinsky Revocable Trust v. Peeler, et al., Case No. 18CV339925, on behalf of nominal defendant Veeco. The complaint seeks to assert claims for breach of fiduciary duty, waste of corporate assets, and unjust enrichment against current and former Veeco directors premised on purported misstatements and omissions in the registration statement relating to the Ultratech acquisition. Veeco is defending this matter vigorously. On January 25, 2021, the court granted the defendants&#8217; demurrer without leave to amend effecting the dismissal of the case. Plaintiff is appealing the dismissal of its case. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company is involved in various other legal proceedings arising in the normal course of business. The Company does not believe that the ultimate resolution of these matters will have a material adverse effect on its consolidated financial position, results of operations, or cash flows.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Concentrations of Credit Risk</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company depends on purchases from its <ix:nonFraction unitRef="Unit_Standard_customer_BDj-9p0OR0Wr2Gv7NoqUDQ" contextRef="Duration_1_1_2021_To_12_31_2021_srt_MajorCustomersAxis_veco_TopTenCustomersMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CreditConcentrationRiskMember_qYwrTySss0yqoNdBJXbdWQ" decimals="INF" format="ixt-sec:numwordsen" name="veco:NumberOfCustomers" scale="0" id="Narr_mG45H-0G5EyzUx8o3j1FGA"><ix:nonFraction unitRef="Unit_Standard_customer_BDj-9p0OR0Wr2Gv7NoqUDQ" contextRef="Duration_1_1_2020_To_12_31_2020_srt_MajorCustomersAxis_veco_TopTenCustomersMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CreditConcentrationRiskMember_b96IGrx0yUatWXL_xtwmdw" decimals="INF" format="ixt-sec:numwordsen" name="veco:NumberOfCustomers" scale="0" id="Narr_WMFHPjgsX0yWdM8NarxYwg">ten</ix:nonFraction></ix:nonFraction> largest customers, which accounted for <ix:nonFraction unitRef="Unit_Standard_pure_60KFN_p23EC7YcClApV5TA" contextRef="Duration_1_1_2021_To_12_31_2021_srt_MajorCustomersAxis_veco_TopTenCustomersMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CreditConcentrationRiskMember_qYwrTySss0yqoNdBJXbdWQ" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ConcentrationRiskPercentage1" scale="-2" id="Narr_3tH-xUS9QU6DKTi83eQKhw">65</ix:nonFraction>% and <ix:nonFraction unitRef="Unit_Standard_pure_60KFN_p23EC7YcClApV5TA" contextRef="Duration_1_1_2020_To_12_31_2020_srt_MajorCustomersAxis_veco_TopTenCustomersMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CreditConcentrationRiskMember_b96IGrx0yUatWXL_xtwmdw" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ConcentrationRiskPercentage1" scale="-2" id="Narr_NCj5I568pEmTKB1r9FA37A">62</ix:nonFraction>% of net accounts receivable at December 31, 2021 and 2020, respectively.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Customers who accounted for more than 10% of net accounts receivable or net sales are as follows:</p><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" name="us-gaap:ScheduleOfRevenueByMajorCustomersByReportingSegmentsTableTextBlock" id="Tb_YvMQJMxTo0-OjyyJ6MV0ag" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:40.97%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.47%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.49%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:40.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="3" style="vertical-align:bottom;white-space:nowrap;width:19.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Accounts&#160;Receivable</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:31.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Net&#160;Sales&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:40.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="3" style="vertical-align:bottom;white-space:nowrap;width:19.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:31.37%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">For the Year Ended December&#160;31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:40.97%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Customer</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2019</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:40.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Customer A</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.47%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_pure_60KFN_p23EC7YcClApV5TA" contextRef="Duration_1_1_2021_To_12_31_2021_srt_MajorCustomersAxis_veco_CustomerAMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CreditConcentrationRiskMember_ylCb2qZ7qEWaA039qBOMdg" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ConcentrationRiskPercentage1" scale="-2" id="Tc_RrmhO-GbYUmEg-WQ5-qLYw_4_2">14</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_pure_60KFN_p23EC7YcClApV5TA" contextRef="Duration_1_1_2021_To_12_31_2021_srt_MajorCustomersAxis_veco_CustomerAMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_45yHDlK-8kaKMV5ZRIQcaQ" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ConcentrationRiskPercentage1" scale="-2" id="Tc_jqQdP9p9506IUkZrrQgE0Q_4_6">15</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:40.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Customer B</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_pure_60KFN_p23EC7YcClApV5TA" contextRef="Duration_1_1_2021_To_12_31_2021_srt_MajorCustomersAxis_veco_CustomerBMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_hGRkMXH740uucG_Csk9-QA" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ConcentrationRiskPercentage1" scale="-2" id="Tc_VujvYmQQyUKt_dQow_PjBg_5_6">10</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:40.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Customer C</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.47%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_pure_60KFN_p23EC7YcClApV5TA" contextRef="Duration_1_1_2021_To_12_31_2021_srt_MajorCustomersAxis_veco_CustomerCMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CreditConcentrationRiskMember_E0sp1fv8WEKkKQZCT4h06g" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ConcentrationRiskPercentage1" scale="-2" id="Tc_3J3IzwYcq0GvkH8XmBahtA_6_2">12</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:40.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Customer D</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_pure_60KFN_p23EC7YcClApV5TA" contextRef="Duration_1_1_2021_To_12_31_2021_srt_MajorCustomersAxis_veco_CustomerDMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CreditConcentrationRiskMember_BdlT-OHK2kK-LAtI-VJy6w" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ConcentrationRiskPercentage1" scale="-2" id="Tc_w9nJZ__5kE-B7zPVpPUxAw_7_2">10</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New 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style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:40.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Customer E</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.47%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_pure_60KFN_p23EC7YcClApV5TA" contextRef="Duration_1_1_2020_To_12_31_2020_srt_MajorCustomersAxis_veco_CustomerEMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_XGc7rVYq4U-1cNzYRGsC-A" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ConcentrationRiskPercentage1" scale="-2" id="Tc_oPjYmkFWG0mKbyMZ-WmOrA_8_8">13</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_pure_60KFN_p23EC7YcClApV5TA" contextRef="Duration_1_1_2019_To_12_31_2019_srt_MajorCustomersAxis_veco_CustomerEMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_z7cBqKDkB0iKqCgnxW4qVw" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ConcentrationRiskPercentage1" scale="-2" id="Tc_9LCQ1DVFz0GhaNSfodFNDA_8_10">11</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td></tr></table><div style="font-family:'Times New Roman','Times','serif';font-size:9.0pt;margin-bottom:0pt;margin-top:0pt;min-height:1.19em;position:relative;width:100%;"><div style="background-color:#000000;height:1pt;position:relative;top:0.6em;width:25.0%;border:none;margin:0 auto 0 0;"></div></div><table style="border-collapse:collapse;border:0;"><tr><td style="vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;"><span style="font-size:10pt;">*</span></p></td><td style="padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;"><span style="font-size:9pt;">Less than 10% of aggregate accounts receivable or net sales</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">The Company manufactures and sells its products to companies in different geographic locations. Refer to Note 17, &#8220;Segment Reporting and Geographic Information,&#8221; for additional information. In certain instances, the Company requires deposits from its customers for a portion of the sales price in advance of shipment and performs periodic credit evaluations on its customers. Where appropriate, the Company requires letters of credit on certain non-U.S. sales arrangements. Receivables generally are due within </span><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_srt_RangeAxis_srt_MinimumMember_srt_StatementGeographicalAxis_veco_GeographicLocationOneMember_RdVa9Hjsn0W6XlQNdRPsYw" format="ixt-sec:durday" name="veco:AccountsReceivableCreditPeriod" id="Narr_KhMJzbM4h0CN4WvT3yG5Xw"><span style="font-size:10pt;">30</span></ix:nonNumeric><span style="font-size:10pt;"> to </span><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_srt_RangeAxis_srt_MaximumMember_srt_StatementGeographicalAxis_veco_GeographicLocationOneMember_tkCyIpYKlkeyBnSQzrqZBA" format="ixt-sec:durwordsen" name="veco:AccountsReceivableCreditPeriod" id="Narr_8wYnlxVEbkWUBS9YYR6kDQ"><span style="font-size:10pt;">90 days</span></ix:nonNumeric><span style="font-size:10pt;"> from the date of invoice.</span><span style="font-size:10pt;"> </span><span style="font-size:10pt;">In some geographies, receivables may be payable up to </span><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_srt_RangeAxis_srt_MaximumMember_srt_StatementGeographicalAxis_veco_GeographicLocationTwoMember_Kp4il_4T2UCIDtnxwWD8nw" format="ixt-sec:durwordsen" name="veco:AccountsReceivableCreditPeriod" id="Narr_ZtptVuM06UuLyEWJLrJL1A"><span style="font-size:10pt;">150 days</span></ix:nonNumeric><span style="font-size:10pt;"> from the date of the invoice.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Receivable Purchase Agreement</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">In December&#160;2020, the Company entered into a receivable purchase agreement with a financial institution to sell certain of its trade receivables from customers without recourse, up to $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-5" format="ixt:numdotdecimal" name="veco:ReceivablePurchaseAgreementMaximumAmount" scale="6" id="Narr_VH-N7xLM90WRVlc4FpSu-Q">15.0</ix:nonFraction> million at any point in time. Pursuant to this agreement, the Company sold $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_irQajVZIkUmgjCJ-cxJ5AQ" decimals="-5" format="ixt:numdotdecimal" name="veco:TradeReceivablesSoldUnderReceivablePurchaseAgreement" scale="6" id="Narr_kZNuAvWmhEawkQ6ReOGglw">11.6</ix:nonFraction>&#160;million of receivables during the year ended December&#160;31, 2020, of which $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-5" format="ixt:numdotdecimal" name="veco:TradeReceivablesUnderReceivablePurchaseAgreementOutstanding" scale="6" id="Narr_LT0_8k-BZ0mwifGL91cfXA">5.9</ix:nonFraction> million was outstanding at December 31, 2020, and subsequently settled during 2021. There were no further sales of receivables under this agreement during 2021, and therefore the full $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-5" format="ixt:numdotdecimal" name="veco:ReceivablePurchaseAgreementAmountAvailable" scale="6" id="Narr_2VJj0Hv-qkyStEz2PoS-UA">15.0</ix:nonFraction> million is available under the agreement for additional sales of receivables as of December&#160;31, 2021. The Company did not sell any receivables under this agreement during 2021. The net sale of accounts receivable under the agreement is reflected as a reduction of accounts receivable in the Company&#8217;s Consolidated Balance Sheet at the time of sale and any fees for the sale of trade receivables were not material for the periods presented.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></ix:continuation></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">F-24</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Veeco Instruments&#160;Inc. and Subsidiaries</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Notes to Consolidated Financial Statements (Continued)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;max-width:100%;position:relative;"><ix:continuation id="Tb_-kF6sSUt8kG92s23V3MiJQ_cont3"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Suppliers</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company outsources certain functions to third parties, including the manufacture of several of its systems. While the Company relies on its outsourcing partners to perform their contracted functions, the Company maintains some level of internal manufacturing capability for these systems. In addition, certain of the components and sub-assemblies included in the Company&#8217;s products are obtained from a single source or a limited group of suppliers. The failure of the Company&#8217;s present outsourcing partners and suppliers to meet their contractual obligations and the Company&#8217;s inability to make alternative arrangements or resume the manufacture of these systems could have a material adverse effect on the Company&#8217;s revenues, profitability, cash flows, and relationships with its customers.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company had deposits with its suppliers of $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:DepositAssets" scale="6" id="Narr_8tNsvXuiJkS_OBPjtHKv9w">3.9</ix:nonFraction> million and $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:DepositAssets" scale="6" id="Narr_wN8zy5ifjUisR6Y5dd_2MA">7.2</ix:nonFraction> million at December 31, 2021 and 2020, respectively, that were included in &#8220;Prepaid expenses and other current assets&#8221; on the Consolidated Balance Sheets.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Purchase Commitments</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company had purchase commitments of $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:UnrecordedUnconditionalPurchaseObligationDueInNextRollingTwelveMonths" scale="6" id="Narr_s9HSBnWjxEaArlL6ir_zwg">193.0</ix:nonFraction> million at December 31, 2021, substantially all of which will come due within one year. Purchase commitments are primarily for inventory used in manufacturing products and are partially offset by existing deposits with suppliers. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Bank Guarantees</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company has bank guarantees and letters of credit issued by a financial institution on its behalf as needed. At December 31, 2021, outstanding bank guarantees and letters of credit totaled $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:GuaranteeObligationsCurrentCarryingValue" scale="6" id="Narr_Ji4kckneok6q0hcEAlzpuQ">2.7</ix:nonFraction>&#160;million and unused bank guarantees and letters of credit of $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:LineOfCreditFacilityRemainingBorrowingCapacity" scale="6" id="Narr_p9dLHzykqUCI6hfYEC5oYA">15.2</ix:nonFraction><span style="font-size:12pt;"> </span>million were available to be drawn upon.</p></ix:continuation><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" name="us-gaap:DebtDisclosureTextBlock" id="Tb_igQg8xi23Eqb4U9ihDlqtA" continuedAt="Tb_igQg8xi23Eqb4U9ihDlqtA_cont1" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note 10 &#8212; Debt</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Convertible Senior Notes</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">2023 Notes</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">On January 10, 2017, the Company issued $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_1_10_2017_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_HlS5IX79aES7WBfyIiesiA" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentFaceAmount" scale="6" id="Narr_q_DKTzCsYkagM6_iQVN4wg">345.0</ix:nonFraction> million of <ix:nonFraction unitRef="Unit_Standard_pure_60KFN_p23EC7YcClApV5TA" contextRef="As_Of_1_10_2017_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_HlS5IX79aES7WBfyIiesiA" decimals="INF" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentInterestRateStatedPercentage" scale="-2" id="Narr_VQXZPRqqQUuFLbvSa4VJ4w">2.70</ix:nonFraction>% convertible senior unsecured notes due 2023 (the &#8220;2023 Notes&#8221;). The Company received net proceeds, after deducting underwriting discounts and fees and expenses payable by the Company, of approximately $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_10_2017_To_1_10_2017_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_I24bPDojnEmtEdJUx8dJ8g" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:ProceedsFromConvertibleDebt" scale="6" id="Narr_2eBxrCTLNEyW8EVRveDtZw">335.8</ix:nonFraction> million. The 2023 Notes bear interest at a rate of <ix:nonFraction unitRef="Unit_Standard_pure_60KFN_p23EC7YcClApV5TA" contextRef="As_Of_1_10_2017_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_HlS5IX79aES7WBfyIiesiA" decimals="INF" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentInterestRateStatedPercentage" scale="-2" id="Narr_SGpZnTjW3keNUyZf1mDFVQ">2.70</ix:nonFraction>% per year, payable semiannually in arrears on January 15 and July 15 of each year, commencing on July 15, 2017. The 2023 Notes mature on January 15, 2023, unless earlier purchased by the Company, redeemed, or converted.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;background:#ffffff;margin:0pt;">On May 18, 2020, in connection with the completion of a private offering of $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_5_18_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_Hysx7R2wtUuFCfCiHvJi7w" decimals="-6" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentFaceAmount" scale="6" id="Narr_kI_QPhh9BUOUjT--h0aZIQ">125.0</ix:nonFraction>&#160;million aggregate principal amount of&#160;<ix:nonFraction unitRef="Unit_Standard_pure_60KFN_p23EC7YcClApV5TA" contextRef="As_Of_5_18_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_Hysx7R2wtUuFCfCiHvJi7w" decimals="INF" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentInterestRateStatedPercentage" scale="-2" id="Narr_wnyX4vILbEacxHUXXtDVyA">3.75</ix:nonFraction>% convertible senior notes due 2027 described below, the Company repurchased and retired approximately $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_5_18_2020_To_5_18_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_Jb5BG4OaW0yR9H-IT5tWEQ" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:ExtinguishmentOfDebtAmount" scale="6" id="Narr_-EPbeUjlvU2_MrwskTi32Q">88.3</ix:nonFraction>&#160;million in aggregate principal amount of its outstanding 2023 Notes, with a carrying amount of $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_5_18_2020_To_5_18_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_Jb5BG4OaW0yR9H-IT5tWEQ" decimals="-5" format="ixt:numdotdecimal" name="veco:DebtInstrumentCarryingAmountDebtExtinguished" scale="6" id="Narr_osaNwcWwWE60-lowbV6LzA">78.1</ix:nonFraction>&#160;million, for approximately $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_5_18_2020_To_5_18_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_Jb5BG4OaW0yR9H-IT5tWEQ" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:RepaymentsOfUnsecuredDebt" scale="6" id="Narr_8xnYz6cE4kyvYyToAXWvqQ">81.2</ix:nonFraction>&#160;million of cash. The Company accounted for the partial settlement of the 2023 Notes as an extinguishment, and as such, recorded a loss on extinguishment of approximately $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_5_18_2020_To_5_18_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_us-gaap_IncomeStatementLocationAxis_us-gaap_OtherNonoperatingIncomeExpenseMember_6WukLvoB9UeaKvh0h8rWjg" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:GainsLossesOnExtinguishmentOfDebt" scale="6" id="Narr_sCKhmc5QcEWCTeONu7wuLg">3.0</ix:nonFraction>&#160;million for the year ended December 31, 2020, which is included in &#8220;Other income (expense), net&#8221; in the Consolidated Statements of Operations, as well as a reduction of additional paid-in capital of $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_5_18_2020_To_5_18_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_Jb5BG4OaW0yR9H-IT5tWEQ" decimals="-5" format="ixt:numdotdecimal" name="veco:AdjustmentsToAdditionalPaidInCapitalExtinguishmentEquityComponentOfNotesRepurchased" scale="6" id="Narr_p_mzm2dxCk-cr89qzExT9A">0.1</ix:nonFraction> million for the repurchase of the conversion feature.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;background:#ffffff;margin:0pt;">Additionally, on November 11, 2020, the Company entered into a privately negotiated exchange agreement with a holder of its outstanding 2023 Notes, under which the Company agreed to retire $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_11_11_2020_To_11_11_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_Ldr1zVEkd0OGQCWKkiUQvA" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:ExtinguishmentOfDebtAmount" scale="6" id="Narr_YqS1BZotbE-gBdiFdl_irQ">125.0</ix:nonFraction> million in aggregate original principal amount of the 2023 Notes, with a carrying amount of $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_11_11_2020_To_11_11_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_Ldr1zVEkd0OGQCWKkiUQvA" decimals="-5" format="ixt:numdotdecimal" name="veco:DebtInstrumentCarryingAmountDebtExtinguished" scale="6" id="Narr_kNFp6LqKQ0CM4UQ5F6Z5Uw">113.1</ix:nonFraction> million, in exchange for the issuance of $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_11_17_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_iSCQ57gBKU-i0JoX6qSAkQ" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentFaceAmount" scale="6" id="Narr_XShBiADFj0KDzvqbfbJerQ">132.5</ix:nonFraction> million in aggregate principal amount of new <ix:nonFraction unitRef="Unit_Standard_pure_60KFN_p23EC7YcClApV5TA" contextRef="As_Of_11_17_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_iSCQ57gBKU-i0JoX6qSAkQ" decimals="INF" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentInterestRateStatedPercentage" scale="-2" id="Narr_hgcwIHg5okeIxT_OAZe_3Q">3.50</ix:nonFraction>% convertible senior notes due 2025 described below, which had a fair value that approximated the principal amount of notes issued. The Company accounted for the partial settlement of the 2023 Notes as an extinguishment, and as such, recorded a loss on extinguishment of approximately $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_11_11_2020_To_11_11_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_us-gaap_IncomeStatementLocationAxis_us-gaap_OtherNonoperatingIncomeExpenseMember_IuLqBojEbEiz_3MrP6-pqQ" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:GainsLossesOnExtinguishmentOfDebt" scale="6" id="Narr_Nx42CgqVKEiagXgIkPkpXg">4.8</ix:nonFraction>&#160;million for the year ended </p></ix:nonNumeric></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">F-25</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Veeco Instruments&#160;Inc. and Subsidiaries</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Notes to Consolidated Financial Statements (Continued)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;max-width:100%;position:relative;"><ix:continuation id="Tb_igQg8xi23Eqb4U9ihDlqtA_cont1" continuedAt="Tb_igQg8xi23Eqb4U9ihDlqtA_cont2"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;background:#ffffff;margin:0pt;">December 31, 2020, which is included in &#8220;Other income (expense), net&#8221; in the Consolidated Statements of Operations, as well as a reduction of additional paid-in capital of $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_11_11_2020_To_11_11_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_Ldr1zVEkd0OGQCWKkiUQvA" decimals="-5" format="ixt:numdotdecimal" name="veco:AdjustmentsToAdditionalPaidInCapitalExtinguishmentEquityComponentOfNotesRepurchased" scale="6" id="Narr_dT0ZHpDYY0SOZh0QlT10cA">14.6</ix:nonFraction> million for the exchange of the conversion feature.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;background:#ffffff;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;background:#ffffff;margin:0pt;">Finally, on November 5, 2021, the Company entered into a privately negotiated note purchase agreement with a holder of its outstanding 2023 Notes, under which the Company agreed to repurchase and retire approximately $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_11_5_2021_To_11_5_2021_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_pD983cYnfUOSOB6ibCYAhQ" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:ExtinguishmentOfDebtAmount" scale="6" id="Narr_vdQ3u76Nk0qXxM9ROzQ1Ug">111.5</ix:nonFraction> million in aggregate original principal amount of the 2023 Notes, with a carrying amount of $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_11_5_2021_To_11_5_2021_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_pD983cYnfUOSOB6ibCYAhQ" decimals="-5" format="ixt:numdotdecimal" name="veco:DebtInstrumentCarryingAmountDebtExtinguished" scale="6" id="Narr_s3F_f6PJwEOUc2_MijHlNg">105.5</ix:nonFraction> million, for cash consideration of approximately $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_11_5_2021_To_11_5_2021_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_pD983cYnfUOSOB6ibCYAhQ" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:RepaymentsOfUnsecuredDebt" scale="6" id="Narr_I2Ci1VE5dUifGdK98AeFaw">115.6</ix:nonFraction> million, and approximately $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_11_5_2021_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_YARAyECgrE2BNb3A-qEUeg" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:InterestPayableCurrentAndNoncurrent" scale="6" id="Narr_6zhdzGeYBU2-69L1qPejBQ">1.0</ix:nonFraction> million of accrued and unpaid interest. The Company accounted for the partial settlement of the 2023 Notes as an extinguishment, and as such, recorded a loss on extinguishment of approximately $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_11_5_2021_To_11_5_2021_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_us-gaap_IncomeStatementLocationAxis_us-gaap_OtherNonoperatingIncomeExpenseMember_XKDOIptlFEOZNUD7197_3Q" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:GainsLossesOnExtinguishmentOfDebt" scale="6" id="Narr_zNVUUAsWd0S_4ceGurlQyg">4.0</ix:nonFraction>&#160;million for the year ended December 31, 2021, which is included in &#8220;Other income (expense), net&#8221; in the Consolidated Statements of Operations, as well as a reduction of additional paid-in capital of $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_11_5_2021_To_11_5_2021_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_pD983cYnfUOSOB6ibCYAhQ" decimals="-5" format="ixt:numdotdecimal" name="veco:AdjustmentsToAdditionalPaidInCapitalExtinguishmentEquityComponentOfNotesRepurchased" scale="6" id="Narr_nuDTQq8wz0qHSpdhY_qO6w">6.1</ix:nonFraction> million for the repurchase of the conversion feature.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">2025 Notes</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;background:#ffffff;margin:0pt;">On November 17, 2020, as part of the privately negotiated exchange agreement described above, the Company issued $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_11_17_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_iSCQ57gBKU-i0JoX6qSAkQ" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentFaceAmount" scale="6" id="Narr_-3P1UJGrCkSv9A0dB1oi9w">132.5</ix:nonFraction> million of <ix:nonFraction unitRef="Unit_Standard_pure_60KFN_p23EC7YcClApV5TA" contextRef="As_Of_11_17_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_iSCQ57gBKU-i0JoX6qSAkQ" decimals="INF" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentInterestRateStatedPercentage" scale="-2" id="Narr_1bYVA5ZTxkCiHTCP9nnDQw">3.50</ix:nonFraction>% convertible senior notes due 2025 (the &#8220;2025 Notes&#8221;). The 2025 Notes bear interest at a rate of&#160;<ix:nonFraction unitRef="Unit_Standard_pure_60KFN_p23EC7YcClApV5TA" contextRef="As_Of_11_17_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_iSCQ57gBKU-i0JoX6qSAkQ" decimals="INF" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentInterestRateStatedPercentage" scale="-2" id="Narr_2s7idajvJEqBTC6VMlmR5w">3.50</ix:nonFraction>% per year, payable semiannually in arrears on January 15 and July 15 of each year, commencing on July 15, 2021. The 2025 Notes mature on January 15, 2025, unless earlier purchased by the Company, redeemed, or converted.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;background:#ffffff;margin:0pt;"><i style="font-style:italic;">2027 Notes</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;background:#ffffff;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;background:#ffffff;margin:0pt;">On May 18, 2020, the Company completed a private offering of $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_5_18_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_Hysx7R2wtUuFCfCiHvJi7w" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentFaceAmount" scale="6" id="Narr_GItGwyUYqUaIgn7wCC5aOw">125.0</ix:nonFraction>&#160;million of&#160;<ix:nonFraction unitRef="Unit_Standard_pure_60KFN_p23EC7YcClApV5TA" contextRef="As_Of_5_18_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_Hysx7R2wtUuFCfCiHvJi7w" decimals="INF" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentInterestRateStatedPercentage" scale="-2" id="Narr_yK4JFbetI0qn3D-74yAIWg">3.75</ix:nonFraction>% convertible senior notes due 2027 (the &#8220;2027 Notes&#8221;). The Company received net proceeds of approximately $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_5_18_2020_To_5_18_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_UESoulyBVEGGZvq80sMdnA" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:ProceedsFromConvertibleDebt" scale="6" id="Narr_iK2flTg5dkCgZqC7YqmIyw">121.9</ix:nonFraction>&#160;million, after deducting underwriting discounts and fees and expenses payable by the Company. Additionally, the Company used approximately $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_5_18_2020_To_5_18_2020_VT6wQOL9DEe71-_WpP0C7Q" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:PaymentsForDerivativeInstrumentFinancingActivities" scale="6" id="Narr_Wz3SFbT_iU24PPiLY1fNFQ">10.3</ix:nonFraction>&#160;million of cash to purchase capped calls, discussed below. The 2027 Notes bear interest at a rate of&#160;<ix:nonFraction unitRef="Unit_Standard_pure_60KFN_p23EC7YcClApV5TA" contextRef="As_Of_5_18_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_Hysx7R2wtUuFCfCiHvJi7w" decimals="INF" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentInterestRateStatedPercentage" scale="-2" id="Narr_mNw4qDfSM0-0lNYsA8q8sg">3.75</ix:nonFraction>% per year, payable semiannually in arrears on June 1 and December 1 of each year, commencing on December 1, 2020. The 2027 Notes mature on June 1, 2027, unless earlier purchased by the Company, redeemed, or converted.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The 2023 Notes, 2025 Notes, and 2027 Notes (collectively, the &#8220;Notes&#8221;) are unsecured obligations of Veeco and rank senior in right of payment to any of Veeco&#8217;s subordinated indebtedness; equal in right of payment to all of Veeco&#8217;s unsecured indebtedness that is not subordinated; effectively subordinated in right of payment to any of Veeco&#8217;s secured indebtedness to the extent of the value of the assets securing such indebtedness; and structurally subordinated to all indebtedness and other liabilities (including trade payables) of Veeco&#8217;s subsidiaries.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Notes are convertible into cash, shares of the Company&#8217;s common stock, or a combination thereof, at the Company&#8217;s election, upon the satisfaction of specified conditions and during certain periods as described below. The initial conversion rates are <ix:nonFraction unitRef="Unit_Standard_pure_60KFN_p23EC7YcClApV5TA" contextRef="Duration_1_10_2017_To_1_10_2017_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_I24bPDojnEmtEdJUx8dJ8g" decimals="7" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentConvertibleConversionRatio1" scale="-3" id="Narr_BCuOmAWxAUC9NNI_QcZaVA">24.9800</ix:nonFraction>, <ix:nonFraction unitRef="Unit_Standard_pure_60KFN_p23EC7YcClApV5TA" contextRef="Duration_11_17_2020_To_11_17_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_iF7xDLfj4UqXeonL1_Ex8g" decimals="7" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentConvertibleConversionRatio1" scale="-3" id="Narr_-hBa9MO_1E2i3Z4P-XLn5A">41.6667</ix:nonFraction>, and <ix:nonFraction unitRef="Unit_Standard_pure_60KFN_p23EC7YcClApV5TA" contextRef="Duration_5_18_2020_To_5_18_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_UESoulyBVEGGZvq80sMdnA" decimals="7" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentConvertibleConversionRatio1" scale="-3" id="Narr_z6SN-1RGo0KsTwPYus49vw">71.5372</ix:nonFraction> shares of the Company&#8217;s common stock per $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_DebtInstrumentAxis_us-gaap_ConvertibleDebtMember_xa00QncdxES71l_yapsGaw" decimals="-3" format="ixt:numdotdecimal" name="veco:DebtInstrumentPrincipalAmountDenominationForConversionIntoCommonStock" scale="0" id="Narr_BOdkExkgKU-DWhKsvHJSjw">1,000</ix:nonFraction> principal amount of the 2023 Notes, 2025 Notes, and 2027 Notes, respectively, representing initial effective conversion prices of $<ix:nonFraction unitRef="Unit_Divide_USD_shares_tlsv-okr1ESmAF6EktRdIg" contextRef="As_Of_1_10_2017_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_HlS5IX79aES7WBfyIiesiA" decimals="2" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentConvertibleConversionPrice1" scale="0" id="Narr_RLFhaU0NV0uWdJNM8IZDNQ">40.03</ix:nonFraction>, $<ix:nonFraction unitRef="Unit_Divide_USD_shares_tlsv-okr1ESmAF6EktRdIg" contextRef="As_Of_11_17_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_iSCQ57gBKU-i0JoX6qSAkQ" decimals="2" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentConvertibleConversionPrice1" scale="0" id="Narr_vvykRY2vVEqPyR6D_Sshkw">24.00</ix:nonFraction>, and $<ix:nonFraction unitRef="Unit_Divide_USD_shares_tlsv-okr1ESmAF6EktRdIg" contextRef="As_Of_5_18_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_Hysx7R2wtUuFCfCiHvJi7w" decimals="2" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentConvertibleConversionPrice1" scale="0" id="Narr_o3OnSVX0qEKYFVbTudWTFg">13.98</ix:nonFraction> per share of common stock, respectively. The conversion rates may be subject to adjustment upon the occurrence of certain specified events.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Holders may convert all or any portion of their notes, in multiples of <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_DebtInstrumentAxis_us-gaap_ConvertibleDebtMember_xa00QncdxES71l_yapsGaw" decimals="-3" format="ixt-sec:numwordsen" name="veco:DebtInstrumentPrincipalAmountDenominationForConversionIntoCommonStock" scale="3" id="Narr_YrcUjbAwZES8n-x31cwoQQ">one</ix:nonFraction> thousand dollar principal amount, at their option at any time prior to the close of business on the business day immediately preceding October 15, 2022 with respect to the 2023 Notes, October 15, 2024 with respect to the 2025 Notes, and October 1, 2027 with respect to the 2027 Notes, only under the following circumstances: </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:36pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:25.2pt;padding:0pt;">(i)</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">During any calendar quarter (and only during such calendar quarter), if the last reported sale price of the common stock for at least </span><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"><ix:nonFraction unitRef="Unit_Standard_D_y7Rp8-ryvUSIEgExFQHy-Q" contextRef="Duration_1_1_2021_To_12_31_2021_srt_RangeAxis_srt_MinimumMember_us-gaap_DebtInstrumentAxis_us-gaap_ConvertibleDebtMember_jiWXBWZA8E6l0UEe0RPMlg" decimals="INF" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentConvertibleThresholdTradingDays" scale="0" id="Narr_2uSuhcjaNEeON72GuAKkOA">20</ix:nonFraction></span><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"> trading days (whether or not consecutive) during a period of </span><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"><ix:nonFraction unitRef="Unit_Standard_D_y7Rp8-ryvUSIEgExFQHy-Q" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_DebtInstrumentAxis_us-gaap_ConvertibleDebtMember_xa00QncdxES71l_yapsGaw" decimals="INF" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentConvertibleThresholdConsecutiveTradingDays1" scale="0" id="Narr_Sq_UIhoqe0OQBZLoEcyV8g">30</ix:nonFraction></span><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"> consecutive trading days ending on the last trading day of the immediately preceding calendar quarter is greater than or equal to </span><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"><ix:nonFraction unitRef="Unit_Standard_pure_60KFN_p23EC7YcClApV5TA" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_DebtInstrumentAxis_us-gaap_ConvertibleDebtMember_xa00QncdxES71l_yapsGaw" decimals="2" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentConvertibleThresholdPercentageOfStockPriceTrigger" scale="-2" id="Narr_Yy53OuokX0uo-FsbD-zkpQ">130</ix:nonFraction>%</span><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"> of the conversion price on each applicable trading day;</span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:25.2pt;text-indent:-25.2pt;margin:0pt 0pt 0pt 36pt;"><span style="font-size:10pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p></ix:continuation></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">F-26</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Veeco Instruments&#160;Inc. and Subsidiaries</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Notes to Consolidated Financial Statements (Continued)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;max-width:100%;position:relative;"><ix:continuation id="Tb_igQg8xi23Eqb4U9ihDlqtA_cont2" continuedAt="Tb_igQg8xi23Eqb4U9ihDlqtA_cont3"><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:36pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:25.2pt;padding:0pt;">(ii)</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">During the </span><span style="-sec-ix-hidden:Hidden_MoI4F52lpkK6zktkVWVp9Q;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">five</span></span><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"> consecutive business day period after any </span><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"><ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_DebtInstrumentAxis_us-gaap_ConvertibleDebtMember_xa00QncdxES71l_yapsGaw" decimals="INF" format="ixt-sec:numwordsen" name="us-gaap:DebtInstrumentConvertibleThresholdTradingDays" scale="0" id="Narr_ptZ_2GKprE6uSlGFCl_FMg">five</ix:nonFraction></span><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"> consecutive trading day period (the &#8220;measurement period&#8221;) in which the trading price per </span><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"><ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_DebtInstrumentAxis_us-gaap_ConvertibleDebtMember_xa00QncdxES71l_yapsGaw" decimals="-3" format="ixt-sec:numwordsen" name="veco:DebtInstrumentPrincipalAmountDenominationForConversionIntoCommonStock" scale="3" id="Narr_f_7cak2fBESZ7bwZuGrzIg">one</ix:nonFraction></span><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"> thousand dollar principal amount of Notes for each trading day of the measurement period was less than </span><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"><ix:nonFraction unitRef="Unit_Standard_pure_60KFN_p23EC7YcClApV5TA" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_DebtInstrumentAxis_us-gaap_ConvertibleDebtMember_xa00QncdxES71l_yapsGaw" decimals="2" format="ixt:numdotdecimal" name="veco:DebtInstrumentsConvertibleFeaturesMaximumPercentageOfCommonStockCouldBeConverted" scale="-2" id="Narr_IQB8ytwdVEO7P_8zqIUyig">98</ix:nonFraction>%</span><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"> of the product of the last reported sale price of Veeco&#8217;s common stock and the conversion rate on each such trading day;</span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:25.2pt;text-indent:-25.2pt;margin:0pt 0pt 0pt 36pt;"><span style="font-size:10pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:36pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:25.2pt;padding:0pt;">(iii)</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">If the Company calls any or all of applicable series of the Notes for redemption at any time prior to the close of business on the scheduled trading day immediately preceding the redemption date; or</span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:25.2pt;text-indent:-25.2pt;margin:0pt 0pt 0pt 36pt;"><span style="font-size:10pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:36pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:25.2pt;padding:0pt;">(iv)</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">Upon the occurrence of specified corporate events. </span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">For the calendar quarter ended December 31, 2021, the last reported sales price of common stock during the <ix:nonFraction unitRef="Unit_Standard_D_y7Rp8-ryvUSIEgExFQHy-Q" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_DebtInstrumentAxis_us-gaap_ConvertibleDebtMember_xa00QncdxES71l_yapsGaw" decimals="INF" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentConvertibleThresholdConsecutiveTradingDays1" scale="0" id="Narr_wnGOp1pW3kuI5m8iO5tU7g">30</ix:nonFraction> consecutive trading days, based on the criteria outlined in (i) above, was greater than <ix:nonFraction unitRef="Unit_Standard_pure_60KFN_p23EC7YcClApV5TA" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_DebtInstrumentAxis_us-gaap_ConvertibleDebtMember_xa00QncdxES71l_yapsGaw" decimals="2" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentConvertibleThresholdPercentageOfStockPriceTrigger" scale="-2" id="Narr_fPJ7C_mni06ZON3vwTsauA">130</ix:nonFraction>% of the conversion price of the 2027 Notes, and as such the 2027 Notes are convertible by the holders until March 31, 2022.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Holders may convert their notes at any time, regardless of the foregoing circumstances, on or after October 15, 2022 with respect to the 2023 Notes, October 15, 2024 with respect to the 2025 Notes, and October 1, 2026 with respect to the 2027 Notes, until the close of business on the business day immediately preceding the respective maturity date. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">Upon conversion by the holders, the Company may elect to settle such conversion in shares of its common stock, cash, or a combination thereof. As a result of its cash conversion options, the Company segregated the liability component of the instruments from the equity components. The liability components were measured by estimating the fair value of a non-convertible debt instrument that is similar in its terms to the Notes. The calculation of the fair value of the debt components required the use of Level 3 inputs, including utilization of convertible investors&#8217; credit assumptions and high yield bond indices. Fair value was estimated through discounting future interest and principal payments, an income approach, due under the Notes at a discount rate equal to the estimated borrowing rate for similar non-convertible debt, or </span><span style="font-size:10pt;"><ix:nonFraction unitRef="Unit_Standard_pure_60KFN_p23EC7YcClApV5TA" contextRef="As_Of_1_10_2017_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_HlS5IX79aES7WBfyIiesiA" decimals="1" format="ixt:numdotdecimal" name="us-gaap:LongTermDebtMeasurementInput" scale="0" id="Narr_xfugvZIBM0OfBlpf_hb2Jg">7.0</ix:nonFraction>%</span><span style="font-size:10pt;">, </span><span style="font-size:10pt;"><ix:nonFraction unitRef="Unit_Standard_pure_60KFN_p23EC7YcClApV5TA" contextRef="As_Of_11_17_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_iSCQ57gBKU-i0JoX6qSAkQ" decimals="1" format="ixt:numdotdecimal" name="us-gaap:LongTermDebtMeasurementInput" scale="0" id="Narr_n7eN_VapR0mnzFhTk5cV1A">8.0</ix:nonFraction>%</span><span style="font-size:10pt;">, and </span><span style="font-size:10pt;"><ix:nonFraction unitRef="Unit_Standard_pure_60KFN_p23EC7YcClApV5TA" contextRef="As_Of_5_18_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_Hysx7R2wtUuFCfCiHvJi7w" decimals="1" format="ixt:numdotdecimal" name="us-gaap:LongTermDebtMeasurementInput" scale="0" id="Narr_obe-smflWU6aLA_aqUsqWg">9.1</ix:nonFraction>%</span><span style="font-size:10pt;"> with respect to the </span><span style="-sec-ix-hidden:Hidden_MKg7QyI-Vkiu_E8BwX71ww;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">2023</span></span><span style="font-size:10pt;"> Notes, </span><span style="-sec-ix-hidden:Hidden_rTmcThG5O0-ZHrYEBDPNfA;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">2025</span></span><span style="font-size:10pt;"> Notes, and </span><span style="-sec-ix-hidden:Hidden_KBc9K9UzVkSijqFS6jnqXQ;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">2027</span></span><span style="font-size:10pt;"> Notes, respectively. The excess of the aggregate face values of the Notes over the estimated fair values of the liability components of </span><span style="font-size:10pt;">$<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_1_10_2017_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_HlS5IX79aES7WBfyIiesiA" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentUnamortizedDiscount" scale="6" id="Narr_gi0qKF90P0uhEFaJk2uvkQ">72.5</ix:nonFraction></span><span style="font-size:10pt;"> million, </span><span style="font-size:10pt;">$<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_11_17_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_iSCQ57gBKU-i0JoX6qSAkQ" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentUnamortizedDiscount" scale="6" id="Narr_bdMW3KunGEqf8UmmDxiTcA">21.0</ix:nonFraction></span><span style="font-size:10pt;"> million, and </span><span style="font-size:10pt;">$<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_5_18_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_Hysx7R2wtUuFCfCiHvJi7w" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentUnamortizedDiscount" scale="6" id="Narr_vB3czs2KwEWjo7tK0t19zw">34.2</ix:nonFraction></span><span style="font-size:10pt;"> million with respect to the 2023 Notes, 2025 Notes, and 2027 Notes, respectively, were recognized as debt discounts and recorded as an increase to additional paid-in capital and will be amortized over the expected lives of the Notes using the effective interest rate method. Amortization of the debt discounts are recognized as non-cash interest expense.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The transaction costs of $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_10_2017_To_1_10_2017_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_I24bPDojnEmtEdJUx8dJ8g" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:PaymentsOfDebtIssuanceCosts" scale="6" id="Narr_TCSkJZrZT0uHPSV10GA-wg">9.2</ix:nonFraction> million, $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_11_17_2020_To_11_17_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_iF7xDLfj4UqXeonL1_Ex8g" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:PaymentsOfDebtIssuanceCosts" scale="6" id="Narr_XGzLJBsEREOOR9srLKrkBQ">1.9</ix:nonFraction> million, and $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_5_18_2020_To_5_18_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_UESoulyBVEGGZvq80sMdnA" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:PaymentsOfDebtIssuanceCosts" scale="6" id="Narr_xvTFWDH39kuqy-1nkjW5EA">3.1</ix:nonFraction> million incurred in connection with the issuance of the 2023 Notes, 2025 Notes, and 2027 Notes, respectively, were allocated to the liability and equity components based on their relative values. Transaction costs allocated to the liability component are being amortized using the effective interest rate method and recognized as non-cash interest expense over the expected terms of the Notes. Transaction costs allocated to the equity component of $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_10_2017_To_1_10_2017_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_I24bPDojnEmtEdJUx8dJ8g" decimals="-5" format="ixt:numdotdecimal" name="veco:DebtIssuanceCostsTransactionCostsAllocatedToEquityComponent" scale="6" id="Narr_jGPEWoaqzEGvLVyFa63yQg">1.9</ix:nonFraction> million, $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_11_17_2020_To_11_17_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_iF7xDLfj4UqXeonL1_Ex8g" decimals="-5" format="ixt:numdotdecimal" name="veco:DebtIssuanceCostsTransactionCostsAllocatedToEquityComponent" scale="6" id="Narr_o0ogme3WY0mjJEf2l2Tudg">0.3</ix:nonFraction> million, and $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_5_18_2020_To_5_18_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_UESoulyBVEGGZvq80sMdnA" decimals="-5" format="ixt:numdotdecimal" name="veco:DebtIssuanceCostsTransactionCostsAllocatedToEquityComponent" scale="6" id="Narr_T9ApOLpd5kWynb84fJCfuQ">0.8</ix:nonFraction> million with respect to the 2023 Notes, 2025 Notes, and 2027 Notes, respectively, reduced the value of the equity components recognized in stockholders&#39; equity.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;background:#ffffff;margin:0pt;">In connection with the offering of the 2027 Notes, on May&#160;13, 2020, the Company entered into privately negotiated capped call transactions (the &#8220;Capped Call Transactions&#8221;), pursuant to capped call confirmations, covering the total principal amount of the 2027 Notes for an aggregate premium of $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_5_13_2020_us-gaap_DerivativeInstrumentRiskAxis_veco_DerivativeContractCappedCallMember_36Yu734PAEOQbeiCD5P9IA" decimals="-5" format="ixt:numdotdecimal" name="veco:CappedCallTransactionsPrice" scale="6" id="Narr_3owOf0NKX0eFGdYvONzZzA">10.3</ix:nonFraction>&#160;million. The Capped Call Transactions are expected generally to reduce the potential dilution to the Company&#8217;s common stock upon any conversion of the 2027 Notes and/or offset any cash payments the Company is required to make in excess of the aggregate principal amount of converted 2027 Notes, as the case may be, with such reduction and/or offset subject to a cap based on the capped price of the Capped Call Transactions. The Capped Call Transactions exercise price is equal to the initial conversion price of the 2027 Notes, and the capped price of the Capped Call Transactions is approximately $<ix:nonFraction unitRef="Unit_Divide_USD_shares_tlsv-okr1ESmAF6EktRdIg" contextRef="Duration_5_13_2020_To_5_13_2020_us-gaap_DerivativeInstrumentRiskAxis_veco_DerivativeContractCappedCallMember_azQRNSvzIEWz_O5pEj83dg" decimals="2" format="ixt:numdotdecimal" name="veco:CappedCallTransactionsCapPrice" scale="0" id="Narr_PRkUbXHg30ST6wBI4LlmcA">18.46</ix:nonFraction>&#160;per share and is subject to certain adjustments under the terms of the capped call confirmations.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;background:#ffffff;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;background:#ffffff;margin:0pt;">The Capped Call Transactions are separate transactions entered into by the Company with the capped call counterparties, are not part of the terms of the 2027 Notes and do not change the holders&#8217; rights under the 2027 Notes. Holders of the </p></ix:continuation></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">F-27</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Veeco Instruments&#160;Inc. and Subsidiaries</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Notes to Consolidated Financial Statements (Continued)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;max-width:100%;position:relative;"><a id="Tc_XGApdBQPJUSHW1uzYQukeQ_1_3"></a><a id="Tc_E_RE1LEJWUKaDMWgYI0hvA_1_12"></a><a id="Tc_irkibpVsF0a6hMzhuTKnZA_2_3"></a><a id="Tc_u7JTFfh85kGr759SCEE6qg_2_6"></a><a id="Tc_jQ1hAWqU8U-lWD0Gnpz0jQ_2_9"></a><a id="Tc_6S8dwAbnU0eZBFro78Zf3w_2_12"></a><a id="Tc_A4NkIVCckkKXA-aTkbwlAg_2_15"></a><a id="Tc_DJHgKy-kuUyLsH37h5Vtgg_2_18"></a><a id="Tc_KyuHAeUPv0al9kFAFrDFMw_3_3"></a><a id="Tc_WPwNJWSq8kaDxX4-aD__BA_4_0"></a><a id="Tc_wkISxzrBrUSNO0st6O2gag_4_2"></a><a id="Tc_QRefx_NDfUa2fSC-gBob4Q_4_5"></a><a id="Tc_bzN1J6t7EUayoMo4t9cwsg_4_8"></a><a id="Tc_TWhYYGTeQEyfswJBRtGDqQ_4_11"></a><a id="Tc_PIeopu7Rv02yjbeY_nqjjw_4_14"></a><a id="Tc_Y42NiE0ggU-wfyCOcD9-eg_4_17"></a><a id="Tc_hluDVytLsEGD5u_CoL9cZA_5_0"></a><a id="Tc_sjJhZUWuY0C6ZYjriGGfnw_6_0"></a><a id="Tc_UE5w1UrXoEOv5xHGOZhAfQ_7_0"></a><a id="Tc_fOIXmw4bLkerBgzozch7sA_7_2"></a><a id="Tc_G_BkjLo8s0GF4BejNeW_fA_7_5"></a><a id="Tc_axTHmsUpj0SveFZ2vYsLCg_7_8"></a><a id="Tc_34OipQMtw0-MqLEqFfDDBw_7_11"></a><a id="Tc_tP8M2pXlCEadgb0NLl4BtQ_7_14"></a><a id="Tc_cIOhWWIpjkKF8NBZf-gxtA_7_17"></a><a id="Tc_N5Ql9reciUGii-Hy_080jw_1_3"></a><a id="Tc_iZXRWCN0F0KdpHXWq70RPA_2_3"></a><a id="Tc_ndXwknEqb0mO5vpIPGqfmg_2_6"></a><a id="Tc_NimMUn4UT0SAKOVXlFz0JA_2_9"></a><a id="Tc__hqlsOgl_UyZ0xCbLN1ZzQ_3_3"></a><a id="Tc_QTOeRJtlhUSECWbTOuWESg_4_0"></a><a id="Tc_Ih3Fj0BKxEmBrXucoYdhsg_5_0"></a><a id="Tc_1fzIK99fg02zPOvyBf8t_Q_5_3"></a><a id="Tc_eP5R9YT0xEWMrPH-QD4fPQ_5_6"></a><a id="Tc_1xYn_YIFc0-eokUCEfTagg_5_9"></a><a id="Tc_N87cgbu7XUCvXVcTBeH3zg_6_0"></a><a id="Tc_JswEBhiSs06zYw01FQiyOg_6_10"></a><a id="Tc_3YdDvfLW0kaAqSrb2obg-w_7_0"></a><a id="Tc_kg956zOPCU6W-RBi0TG8wA_7_10"></a><a id="Tc_g1zr0PPLF0uV0PCJZ-sGDA_8_0"></a><a id="Tc_JyhwL-uhx0-8nUEdIn55mQ_9_0"></a><a id="Tc_tYCrzIFEK06nsZ900Aj7Fg_10_0"></a><a id="Tc_Kq69W7MBM0qrfebI3ed2MQ_10_10"></a><a id="Tc_ffIw8jHka0-4GP49Q1sfzQ_11_0"></a><a id="Tc_DBHFLOxmAUSH4wf8oe2TSg_11_10"></a><a id="Tc_wiM_ucx7IUKCl4KeZL3IGw_12_0"></a><a id="Tc_yU8fjviZsUunWOXz7OQb-Q_12_3"></a><a id="Tc_BRA7eH8Lpk68JDrit4p_Jw_12_6"></a><a id="Tc_SesV6XQZAE6XGXAh-7pdOg_12_9"></a><a id="_Hlk94797112"></a><ix:continuation id="Tb_igQg8xi23Eqb4U9ihDlqtA_cont3" continuedAt="Tb_igQg8xi23Eqb4U9ihDlqtA_cont4"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;background:#ffffff;margin:0pt;">2027 Notes do not have any rights with respect to the Capped Call Transactions. The cost of the Capped Call Transactions is not expected to be tax-deductible as the Company did not elect to integrate the Capped Call Transactions into the 2027 Notes for tax purposes. The Company used a portion of the net proceeds from the offering of the 2027 Notes to pay for the Capped Call Transactions, and the cost of the Capped Call Transactions was recorded as a reduction of the Company&#8217;s additional paid-in capital in the accompanying consolidated financial statements.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The carrying values of the Notes are as follows:</p><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" name="us-gaap:ConvertibleDebtTableTextBlock" id="Tb_oMTm_1z6AEClM5JCOKx-Pw" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table 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Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:10.88%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:10.83%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:21.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="7" style="vertical-align:bottom;white-space:nowrap;width:37.22%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, 2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="7" style="vertical-align:bottom;white-space:nowrap;width:37.11%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, 2020</b></p></td></tr><tr><td style="vertical-align:bottom;width:21.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-family:'Calibri','Helvetica','sans-serif';font-weight:bold;">&#160;&#160;</b></p></td><td style="vertical-align:bottom;width:1.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:10.77%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Principal Amount</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:10.88%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Unamortized </b><b style="font-weight:bold;"><br /></b><b style="font-weight:bold;">debt discount/</b><b style="font-weight:bold;"><br /></b><b style="font-weight:bold;">transaction costs</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:11.05%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Net carrying value</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:10.88%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Principal Amount</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:10.88%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Unamortized </b><b style="font-weight:bold;"><br /></b><b style="font-weight:bold;">debt discount/</b><b style="font-weight:bold;"><br /></b><b style="font-weight:bold;">transaction costs</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:10.83%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Net carrying value</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="19" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:21.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="16" style="vertical-align:bottom;white-space:nowrap;width:76.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:21.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2023 Notes</p></td><td style="vertical-align:bottom;width:1.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.77%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_bcx6cNbxyUKXL6PXHAIM1A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentFaceAmount" scale="3" id="Tc_ApGbmnRvX0qk7cOK3gZyCg_4_3">20,173</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.88%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_bcx6cNbxyUKXL6PXHAIM1A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentUnamortizedDiscountPremiumAndDebtIssuanceCostsNet" scale="3" id="Tc_7CbOCaoEAUGMmPxx25UkuQ_4_6">967</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_bcx6cNbxyUKXL6PXHAIM1A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:LongTermDebt" scale="3" id="Tc_9154bRohKkycpERORNS7og_4_9">19,206</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.88%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_CKGmYV4DQ06G1u_NH-7AhA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentFaceAmount" scale="3" id="Tc_InwsY3qjgEyxO4iKgHTR_w_4_12">131,695</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.88%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_CKGmYV4DQ06G1u_NH-7AhA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentUnamortizedDiscountPremiumAndDebtIssuanceCostsNet" scale="3" id="Tc_GK_KY8l0Tk-lE_nT1EjUtg_4_15">11,925</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_CKGmYV4DQ06G1u_NH-7AhA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:LongTermDebt" scale="3" id="Tc_-riFfDjAuEGupbXNbzazEQ_4_18">119,770</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:21.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2025 Notes</p></td><td style="vertical-align:bottom;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_M4bkEG486U6a1LGy0Co-kw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentFaceAmount" scale="3" id="Tc_O7giZsjSfE6z_8OJuZYQfQ_5_3">132,500</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_M4bkEG486U6a1LGy0Co-kw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentUnamortizedDiscountPremiumAndDebtIssuanceCostsNet" scale="3" id="Tc_0Czu9GxfBU6e9P0nxwQ8hg_5_6">17,302</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_M4bkEG486U6a1LGy0Co-kw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:LongTermDebt" scale="3" id="Tc_j3xyCFi8QU2fLoLxCIxE1g_5_9">115,198</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_B2vS-w0D60SmwlezDCfAEg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentFaceAmount" scale="3" id="Tc_hYo44xCPD0GE76XpTCnKyA_5_12">132,500</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_B2vS-w0D60SmwlezDCfAEg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentUnamortizedDiscountPremiumAndDebtIssuanceCostsNet" scale="3" id="Tc_-Gzveab_xk-r6Pzg2GPA0w_5_15">22,097</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_B2vS-w0D60SmwlezDCfAEg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:LongTermDebt" scale="3" id="Tc_m5Tv6xcJLEmdgoAUwZx1ig_5_18">110,403</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:21.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2027 Notes</p></td><td style="vertical-align:bottom;width:1.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.77%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_DZnppmd700Klg-YhdruyGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentFaceAmount" scale="3" id="Tc_JT6D-GDCyE2pTUWrdfMKMw_6_3">125,000</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.88%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_DZnppmd700Klg-YhdruyGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentUnamortizedDiscountPremiumAndDebtIssuanceCostsNet" scale="3" id="Tc_iYo2kvxfAkaSLKKJyvTRsQ_6_6">29,966</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.05%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_DZnppmd700Klg-YhdruyGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:LongTermDebt" scale="3" id="Tc_FUfoVkYs6U-VRuR8GxXwEg_6_9">95,034</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.88%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_cgC_4PbG_ka3qRYEYImzrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentFaceAmount" scale="3" id="Tc_RvgKppxLW0qpfXarhM2Ihw_6_12">125,000</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.88%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_cgC_4PbG_ka3qRYEYImzrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentUnamortizedDiscountPremiumAndDebtIssuanceCostsNet" scale="3" id="Tc_CI0-wnX9I0GPRbCwMUFpRA_6_15">34,058</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.83%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_cgC_4PbG_ka3qRYEYImzrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:LongTermDebt" scale="3" id="Tc_fxoWiOi1jUeFZoWBrekYXg_6_18">90,942</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:21.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><b style="font-weight:bold;">Net carrying value</b></p></td><td style="vertical-align:bottom;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 0pt 12pt;"><span style="font-size:10pt;font-weight:bold;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.77%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentFaceAmount" scale="3" id="Tc_g6BP2LbZ6UWBGhFcpMFYMg_7_3">277,673</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.88%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentUnamortizedDiscountPremiumAndDebtIssuanceCostsNet" scale="3" id="Tc_Xc0JacneMU-GOA5BGzYX-g_7_6">48,235</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.05%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:LongTermDebt" scale="3" id="Tc_sKOaugI4L0iFUI2vnciQ8g_7_9">229,438</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.88%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentFaceAmount" scale="3" id="Tc_ZgtHsRdLg0yOsIGXrNu1lw_7_12">389,195</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.88%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentUnamortizedDiscountPremiumAndDebtIssuanceCostsNet" scale="3" id="Tc_kPkPPyGQpUmgVLQ4IpY6ag_7_15">68,080</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.83%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:LongTermDebt" scale="3" id="Tc_3SgQHIg7CUKrtO9XHKyIMw_7_18">321,115</ix:nonFraction></p></td></tr></table></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Total interest expense related to the Notes is as follows:</p><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" name="us-gaap:InterestIncomeAndInterestExpenseDisclosureTableTextBlock" id="Tb_48Q_7fsOtEmEL3mOM5qwPA" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:52.87%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:12.68%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:12.68%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:12.68%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:52.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:43.94%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">For&#160;the year ended&#160;December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:52.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.71%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.71%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.71%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2019</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="11" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:52.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:43.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:52.87%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Cash Interest Expense</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.68%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.68%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.68%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:52.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Coupon interest expense - 2023 Notes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.68%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_wT4JJmGJekmD3OtO7l-o0w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InterestExpenseDebtExcludingAmortization" scale="3" id="Tc_M8TZs4TiOkOMmNXKPRszbA_5_4">3,138</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.68%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_YAwZBZOLCkyjK2mt34ZhfQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InterestExpenseDebtExcludingAmortization" scale="3" id="Tc_SIxFjYvE1U6SxJcAjCBKsQ_5_7">7,390</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.68%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_zFjZhyR4OUK_RqzLnkE5MA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InterestExpenseDebtExcludingAmortization" scale="3" id="Tc_kwJ1ZDPLDEeRrCM7Dk9LLw_5_10">9,315</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:52.87%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Coupon interest expense - 2025 Notes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.68%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_V7EX1m4jVUiMmRbDwhJA6g" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InterestExpenseDebtExcludingAmortization" scale="3" id="Tc_3nKBH2qSQE2_91ps-gxvdA_6_4">4,637</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.68%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_T9-ARJMRhUGbaSFGoASMgA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InterestExpenseDebtExcludingAmortization" scale="3" id="Tc_-wnBK_cKYkGLsCklykRzXA_6_7">554</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.68%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td></tr><tr><td style="vertical-align:bottom;width:52.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Coupon interest expense - 2027 Notes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.68%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_W4I75OPYJEiQYM8PjVoZZw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InterestExpenseDebtExcludingAmortization" scale="3" id="Tc_lcr2mazWVk2f2ippW42e6g_7_4">4,688</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.68%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_DG5pVo9FnECoGWDPcCNpmA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InterestExpenseDebtExcludingAmortization" scale="3" id="Tc_Kr-QgK3rcE2_XGulyw4gcQ_7_7">2,904</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.68%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td></tr><tr><td style="vertical-align:bottom;width:52.87%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Non-cash Interest Expense</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.68%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.68%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.68%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:52.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Amortization of debt discount/transaction costs- 2023 Notes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.68%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_wT4JJmGJekmD3OtO7l-o0w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AmortizationOfFinancingCostsAndDiscounts" scale="3" id="Tc_8smyo4rC1UajcFc5Mz3uLg_9_4">4,932</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.68%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction 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Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_zFjZhyR4OUK_RqzLnkE5MA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AmortizationOfFinancingCostsAndDiscounts" scale="3" id="Tc_SLptZmLopUCGlGls8NnUqA_9_10">12,676</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:52.87%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Amortization of debt discount/transaction costs- 2025 Notes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.68%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_V7EX1m4jVUiMmRbDwhJA6g" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AmortizationOfFinancingCostsAndDiscounts" scale="3" id="Tc_beGuKZv4sEW5wxFxIz1qcA_10_4">4,795</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.68%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_T9-ARJMRhUGbaSFGoASMgA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AmortizationOfFinancingCostsAndDiscounts" scale="3" id="Tc_M2c9TMnl5Ees_3AEK6TnCw_10_7">546</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.68%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td></tr><tr><td style="vertical-align:bottom;width:52.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Amortization of debt discount/transaction costs- 2027 Notes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.68%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_W4I75OPYJEiQYM8PjVoZZw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AmortizationOfFinancingCostsAndDiscounts" scale="3" id="Tc_dbyPL6cvu0qoZWNKHc4Xmw_11_4">4,092</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.68%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_DG5pVo9FnECoGWDPcCNpmA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AmortizationOfFinancingCostsAndDiscounts" scale="3" id="Tc_GpcYRc_WRUa1_P4d6ItRxA_11_7">2,359</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.68%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td></tr><tr><td style="vertical-align:bottom;width:52.87%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><b style="font-weight:bold;">Total Interest Expense</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.68%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InterestExpenseDebt" scale="3" id="Tc_fDMq0ob8zEO_U1TBpkWOWQ_12_4">26,282</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.68%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_irQajVZIkUmgjCJ-cxJ5AQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InterestExpenseDebt" scale="3" id="Tc_48bKgsFuuESCNDjsOcQdjA_12_7">24,640</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.68%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_ssAGFj6EXEiYqEtVZlyqxA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InterestExpenseDebt" scale="3" id="Tc_hYPJncfOFUa76A9FbO1GUQ_12_10">21,991</ix:nonFraction></p></td></tr></table></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">The Company determined the Notes are Level 2 liabilities in the fair value hierarchy and estimated their fair values as </span><span style="font-size:10pt;">$<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_bcx6cNbxyUKXL6PXHAIM1A" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:ConvertibleDebtFairValueDisclosures" scale="6" id="Narr_llgxTD8lxUumtoP2qiEcwQ">20.4</ix:nonFraction></span><span style="font-size:10pt;"> million, </span><span style="font-size:10pt;">$<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_M4bkEG486U6a1LGy0Co-kw" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:ConvertibleDebtFairValueDisclosures" scale="6" id="Narr_-bwM_k0AmEOKFz3vXiesxw">175.0</ix:nonFraction></span><span style="font-size:10pt;"> million, and </span><span style="font-size:10pt;">$<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_DZnppmd700Klg-YhdruyGA" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:ConvertibleDebtFairValueDisclosures" scale="6" id="Narr_ytVwZec_pEOorIp55XVfQQ">258.9</ix:nonFraction></span><span style="font-size:10pt;"> million at December 31, 2021 for the </span><span style="-sec-ix-hidden:Hidden_v7FrO6gR5k6m5-7DQ1kckQ;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">2023</span></span><span style="font-size:10pt;"> Notes, </span><span style="-sec-ix-hidden:Hidden_iDUGabx5SEm91tvdRE9icA;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">2025</span></span><span style="font-size:10pt;"> Notes, and </span><span style="-sec-ix-hidden:Hidden_vVG8kbaS3Euyrx-tkSC52A;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">2027</span></span><span style="font-size:10pt;"> Notes, respectively.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Revolving Credit Facility</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">On December 16, 2021, the Company entered into a loan and security agreement providing for a senior secured revolving credit facility in an aggregate principal amount of </span><span style="font-size:10pt;">$<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_16_2021_us-gaap_DebtInstrumentAxis_veco_RevolvingCreditFacilityDecember2021Member_xwNu7hB_5kWsg1vzO16NAA" decimals="-6" format="ixt:numdotdecimal" name="us-gaap:LineOfCreditFacilityMaximumBorrowingCapacity" scale="6" id="Narr_m74i4Szr_0q9U8MRYdheVA">150</ix:nonFraction></span><span style="font-size:10pt;"> million (the &#8220;Credit Facility&#8221;), including a </span><span style="font-size:10pt;">$<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_16_2021_us-gaap_DebtInstrumentAxis_veco_RevolvingCreditFacilityDecember2021LetterOfCreditMember_V3zLpJHyjU6aWXZ886aOVw" decimals="-6" format="ixt:numdotdecimal" name="us-gaap:LineOfCreditFacilityMaximumBorrowingCapacity" scale="6" id="Narr_btdTLw4pwkiC9Zovq02Hyw">15</ix:nonFraction></span><span style="font-size:10pt;"> million letter of credit sublimit. The Credit Facility is guaranteed by the Company&#8217;s direct material U.S. subsidiaries, subject to customary exceptions. Borrowings under the Credit Facility are secured by a first-priority lien on substantially all of the assets of the Company, subject to customary exceptions. </span><span style="font-size:10pt;">The Credit Facility has a term of </span><ix:nonNumeric contextRef="Duration_12_16_2021_To_12_16_2021_us-gaap_DebtInstrumentAxis_veco_RevolvingCreditFacilityDecember2021Member_HLKwKjTKKkuR6QPFusorwQ" format="ixt-sec:durwordsen" name="us-gaap:DebtInstrumentTerm" id="Narr_RMNPTOABwk2zr-PwwT6Rtg"><span style="font-size:10pt;">five years</span></ix:nonNumeric><span style="font-size:10pt;">, maturing on December 16, 2026, or earlier if certain liquidity measures are not met prior to the 2025 Notes maturing. </span><span style="font-size:10pt;">Subject to certain conditions and the receipt of commitments from the lenders, the Loan and Security Agreement allows for revolving commitments under the Credit Facility to be increased by up to </span><span style="font-size:10pt;">$<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_12_16_2021_To_12_16_2021_us-gaap_DebtInstrumentAxis_veco_RevolvingCreditFacilityDecember2021Member_HLKwKjTKKkuR6QPFusorwQ" decimals="-6" format="ixt:numdotdecimal" name="veco:LineOfCreditFacilityContingentIncreaseAdditionalBorrowingCapacity" scale="6" id="Narr_ODNK1thfzE22-VVVDZJhEQ">75</ix:nonFraction></span><span style="font-size:10pt;"> million. The existing lenders under the Credit Facility are entitled, but not obligated, to provide such incremental commitments.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Borrowings will bear interest at a floating rate which can be, at the Company&#8217;s option, either (a) an alternate base rate plus an applicable rate ranging from <ix:nonFraction unitRef="Unit_Standard_pure_60KFN_p23EC7YcClApV5TA" contextRef="Duration_12_16_2021_To_12_16_2021_srt_RangeAxis_srt_MinimumMember_us-gaap_DebtInstrumentAxis_veco_RevolvingCreditFacilityDecember2021Member_us-gaap_VariableRateAxis_us-gaap_BaseRateMember_ymRgHQ06YkmBMloam4gIYg" decimals="4" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentBasisSpreadOnVariableRate1" scale="-2" id="Narr_z3XHqczov0iMx5oHA6B9Cw">0.50</ix:nonFraction>% to <ix:nonFraction unitRef="Unit_Standard_pure_60KFN_p23EC7YcClApV5TA" contextRef="Duration_12_16_2021_To_12_16_2021_srt_RangeAxis_srt_MaximumMember_us-gaap_DebtInstrumentAxis_veco_RevolvingCreditFacilityDecember2021Member_us-gaap_VariableRateAxis_us-gaap_BaseRateMember_5Rye3thcuUqXFhujMj9sfA" decimals="4" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentBasisSpreadOnVariableRate1" scale="-2" id="Narr_i_LTaZrz1UyMOYRr7j-0uQ">1.25</ix:nonFraction>% or (b) a SOFR rate (with a floor of <ix:nonFraction unitRef="Unit_Standard_pure_60KFN_p23EC7YcClApV5TA" contextRef="As_Of_12_16_2021_us-gaap_DebtInstrumentAxis_veco_RevolvingCreditFacilityDecember2021Member_us-gaap_VariableRateAxis_us-gaap_SecuredOvernightFinancingRateSofrOvernightIndexSwapRateMember_jQ4tmDoU0E2MXLgZa3l3XA" decimals="4" format="ixt:numdotdecimal" name="veco:DebtInstrumentFloorRate" scale="-2" id="Narr_w9pcSttxhkOPT0ueGu3nWg">0.00</ix:nonFraction>%) for the specified interest </p></ix:continuation></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">F-28</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Veeco Instruments&#160;Inc. and Subsidiaries</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Notes to Consolidated Financial Statements (Continued)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;max-width:100%;position:relative;"><a id="_Hlk94797365"></a><ix:continuation id="Tb_igQg8xi23Eqb4U9ihDlqtA_cont4"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">period plus an applicable rate ranging from <ix:nonFraction unitRef="Unit_Standard_pure_60KFN_p23EC7YcClApV5TA" contextRef="Duration_12_16_2021_To_12_16_2021_srt_RangeAxis_srt_MinimumMember_us-gaap_DebtInstrumentAxis_veco_RevolvingCreditFacilityDecember2021Member_us-gaap_VariableRateAxis_us-gaap_SecuredOvernightFinancingRateSofrOvernightIndexSwapRateMember_v5Ev16nS80apY3eXBv8keg" decimals="4" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentBasisSpreadOnVariableRate1" scale="-2" id="Narr_P-QzWJYJjU-uhWdphGeBFg">1.50</ix:nonFraction>% to <ix:nonFraction unitRef="Unit_Standard_pure_60KFN_p23EC7YcClApV5TA" contextRef="Duration_12_16_2021_To_12_16_2021_srt_RangeAxis_srt_MaximumMember_us-gaap_DebtInstrumentAxis_veco_RevolvingCreditFacilityDecember2021Member_us-gaap_VariableRateAxis_us-gaap_SecuredOvernightFinancingRateSofrOvernightIndexSwapRateMember_ZHduN3Rrh0aN3LpxxYkO0w" decimals="4" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentBasisSpreadOnVariableRate1" scale="-2" id="Narr_gFzJpq7FI0ee5qXHlCNkeA">2.25</ix:nonFraction>%, in each case, depending on the Company&#8217;s Secured Net Leverage Ratio (as defined in the Loan and Security Agreement). The Company will pay an unused commitment fee ranging from <ix:nonFraction unitRef="Unit_Standard_pure_60KFN_p23EC7YcClApV5TA" contextRef="Duration_12_16_2021_To_12_16_2021_srt_RangeAxis_srt_MinimumMember_us-gaap_DebtInstrumentAxis_veco_RevolvingCreditFacilityDecember2021Member_ipgfMY8CIEimdCcv7GX_vw" decimals="4" format="ixt:numdotdecimal" name="us-gaap:LineOfCreditFacilityUnusedCapacityCommitmentFeePercentage" scale="-2" id="Narr_O5Aag_V9tkWu3jdMNA8cJA">0.25</ix:nonFraction>% to <ix:nonFraction unitRef="Unit_Standard_pure_60KFN_p23EC7YcClApV5TA" contextRef="Duration_12_16_2021_To_12_16_2021_srt_RangeAxis_srt_MaximumMember_us-gaap_DebtInstrumentAxis_veco_RevolvingCreditFacilityDecember2021Member_PEZJX5dIJUOKEOmy-4Hokw" decimals="4" format="ixt:numdotdecimal" name="us-gaap:LineOfCreditFacilityUnusedCapacityCommitmentFeePercentage" scale="-2" id="Narr_TTMFrwSowEmFEt0Yx8jiYg">0.35</ix:nonFraction>% based on unused capacity under the Credit Facility and the Company&#8217;s Secured Net Leverage Ratio. The Company may use the proceeds of borrowings under the Credit Facility to pay transaction fees and expenses, provide for its working capital needs and reimburse drawings under letters of credit and for other general corporate purposes.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Loan and Security Agreement contains customary affirmative covenants for transactions of this type, including, among others, the provision of financial and other information to the administrative agent, notice to the administrative agent upon the occurrence of certain material events, preservation of existence, maintenance of properties and insurance, compliance with laws, including environmental laws, the provision of additional guarantees, and an affiliate transactions covenant, subject to certain exceptions. The Loan and Security Agreement contains customary negative covenants, including, among others, restrictions on the ability to merge and consolidate with other companies, incur indebtedness, refinance our existing convertible notes, grant liens or security interests on assets, make investments, acquisitions, loans, or advances, pay dividends, and sell or otherwise transfer assets.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Loan and Security Agreement contains financial maintenance covenants that require the Borrower to maintain an Interest Coverage Ratio (as defined in the Loan and Security Agreement) of not less than <ix:nonFraction unitRef="Unit_Standard_pure_60KFN_p23EC7YcClApV5TA" contextRef="Duration_12_16_2021_To_12_16_2021_srt_RangeAxis_srt_MinimumMember_us-gaap_DebtInstrumentAxis_veco_RevolvingCreditFacilityDecember2021Member_ipgfMY8CIEimdCcv7GX_vw" decimals="INF" format="ixt:numdotdecimal" name="veco:DebtInstrumentInterestCoverageRatio" scale="0" id="Narr_WP4wy7wnOE2ueJXcPL4dhg">3.00</ix:nonFraction> to 1.00, a Total Net Leverage Ratio (as defined in the Loan and Security Agreement) of not more than <ix:nonFraction unitRef="Unit_Standard_pure_60KFN_p23EC7YcClApV5TA" contextRef="As_Of_12_16_2021_srt_RangeAxis_srt_MaximumMember_us-gaap_DebtInstrumentAxis_veco_RevolvingCreditFacilityDecember2021Member_6vAun9d4-Eeyeq0Ryvh8Hg" decimals="INF" format="ixt:numdotdecimal" name="veco:DebtInstrumentTotalNetLeverageRatio" scale="0" id="Narr_Suzj34ZaVE-VsJz-V4vsVw">4.50</ix:nonFraction> to 1.00, and a Secured Net Leverage Ratio (as defined in the Loan and Security Agreement) of not more than <ix:nonFraction unitRef="Unit_Standard_pure_60KFN_p23EC7YcClApV5TA" contextRef="As_Of_12_16_2021_srt_RangeAxis_srt_MaximumMember_us-gaap_DebtInstrumentAxis_veco_RevolvingCreditFacilityDecember2021Member_6vAun9d4-Eeyeq0Ryvh8Hg" decimals="INF" format="ixt:numdotdecimal" name="veco:DebtInstrumentSecuredNetLeverageRatio" scale="0" id="Narr_JJmA1XgqoUKUUby7yO0u6w">2.50</ix:nonFraction> to 1.00, in each case, tested at the end of each fiscal quarter commencing with the fiscal quarter ending March 31, 2022. The Loan and Security Agreement also provides for a number of customary events of default, including, among others: payment defaults to the lenders&#894; voluntary and involuntary bankruptcy proceedings&#894; covenant defaults&#894; material inaccuracies of representations and warranties&#894; certain change of control events&#894; material money judgments&#894; and other customary events of default. The occurrence of an event of default could result in the acceleration of obligations and the termination of lending commitments under the Loan and Security Agreement.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_DebtInstrumentAxis_veco_RevolvingCreditFacilityDecember2021Member_VCSkt23tgEW7pbnnfLYuUg" decimals="-3" format="ixt-sec:numwordsen" name="us-gaap:LineOfCreditFacilityMaximumAmountOutstandingDuringPeriod" scale="3" id="Narr_tS1Lnk8CWk2jrB9Se4v2DA">No</ix:nonFraction> amounts were outstanding under the Credit Facility as of December 31, 2021.</p></ix:continuation><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" name="us-gaap:DerivativeInstrumentsAndHedgingActivitiesDisclosureTextBlock" id="Tb_BXXLll_iOU-NnVEyJJjy0A" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note 11 &#8212; Derivative Financial Instruments</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company is exposed to financial market risks arising from changes in currency exchange rates. Changes in currency exchange rates could affect the Company&#8217;s foreign currency denominated monetary assets and liabilities and forecasted cash flows. The Company sometimes enters into monthly forward derivative contracts with the intent of mitigating a portion of this risk. The Company only used derivative financial instruments in the context of hedging and not for speculative purposes and had not designated its foreign exchange derivatives as hedges. Accordingly, changes in fair value from these contracts were recorded as &#8220;Other operating expense (income), net&#8221; in the Company&#8217;s Consolidated Statements of Operations. The Company executed derivative transactions with highly rated financial institutions to mitigate counterparty risk.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:1pt;margin:0pt;"><span style="font-size:10pt;">The Company did not have any outstanding derivative contracts at December 31, 2021 and 2020. </span> </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">F-29</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Veeco Instruments&#160;Inc. and Subsidiaries</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Notes to Consolidated Financial Statements (Continued)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;max-width:100%;position:relative;"><a id="Tc_MGnJwqtbY0-kIJqmxRo7-Q_1_5"></a><a id="Tc_ddHUWLa2GkSqw2WhxzVB7Q_2_5"></a><a id="Tc_VH4lNHaKC0uYIF-LC-o_fw_3_2"></a><a id="Tc_kLT4jMxXg0eiuo6vDsFWFQ_3_5"></a><a id="Tc_bR8n_DtN6EqOoVrZtBUWig_4_2"></a><a id="Tc_esZq1NyQgUKM4sCj7GUd8g_4_5"></a><a id="Tc_-8Tqqb7wDUu_rqsc7W8GVg_5_2"></a><a id="Tc_DKlq_obiVUmong1vIsv77Q_5_5"></a><a id="Tc_qNYc8HcxA02V8FLiKEvTIQ_5_8"></a><a id="Tc_egLBC9MRAEiuDmVxYUc4SA_6_2"></a><a id="Tc_RYuVIMd6n0W-lQISJs1dfA_7_0"></a><a id="Tc_R0xK3lpKLkOa7S7Nso2bZQ_7_2"></a><a id="Tc_WUKxnkPb8kCJ1_sBStnkUA_7_5"></a><a id="Tc_B8R_6ii2fkG_stUK2fyTsw_7_8"></a><a id="Tc_pK838ZlD6kKIenvhVmJGtA_8_0"></a><a id="Tc_ppYfEyGh80mJ9GNoBzeRrg_9_0"></a><a id="Tc_jq47maMcyUCFDwsqMTOa5Q_10_0"></a><a id="Tc_BlWx0oNwUEmC-1a1zflAKw_11_0"></a><a id="Tc_vQSqRh1NhEqd24MRN5KqKA_12_0"></a><a id="Tc_KfkNeFvQvkCXYKUfp-l3VA_13_0"></a><a id="Tc_95RzmNdhekq5WWg0z4g1yw_13_2"></a><a id="Tc_4a3Hj2dpJ0a5-qsXRlD7xg_13_5"></a><a id="Tc_7IJpY_GCuk6tVk3yHnGBpQ_13_8"></a><a id="_Hlk535912860"></a><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" name="us-gaap:StockholdersEquityNoteDisclosureTextBlock" id="Tb_715HRdJwWkCII1iopvcuxg" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note 12 &#8212; Stockholders&#8217; Equity</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Accumulated Other Comprehensive Income (&#8220;AOCI&#8221;)</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The following table presents the changes in the balances of each component of AOCI, net of tax:</p><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" name="us-gaap:ScheduleOfAccumulatedOtherComprehensiveIncomeLossTableTextBlock" id="Tb_-M_11h5tnUqpUYMqkqzmJA" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:63.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.57%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:63.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Unrealized</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:63.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Gains&#160;(Losses)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:63.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Foreign</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">on Available</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:63.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Currency</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">for&#160;Sale&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:63.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.64%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Translation</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Securities</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.6%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Total</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="10" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:63.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:34.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:63.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Balance - December&#160;31, 2018</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.44%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2018_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedTranslationAdjustmentMember_UFO8g2WYfk6u97ClEoVfug" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" scale="3" id="Tc_FK2kAR8GQkG_bTycdLv1Dw_7_3">1,836</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.57%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.67%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2018_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedNetUnrealizedInvestmentGainLossMember_pgoaBRcuB0CNVris89ap9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" sign="-" scale="3" id="Tc__Z2ZakHkdUWxO2PGoKPmbA_7_6">16</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.44%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2018_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_M4RG9e6dBUi1enPPhE0DEw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" scale="3" id="Tc_X30RFeQxYk2-_-yXWSFOpA_7_9">1,820</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:63.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Other comprehensive income (loss)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedTranslationAdjustmentMember_E5IZRXvSr0aWNM_YI1vc2A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent" scale="3" id="Tc_pOdmm0_9MUOjTrDTVLq2-Q_8_3">25</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.57%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.67%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedNetUnrealizedInvestmentGainLossMember_ug-8ubQ4HE6p3iHYIIxiNA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent" scale="3" id="Tc_K6fQUCL2EEyFlfTF9qYexw_8_6">49</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_kqDfUcea40W7vDtI8f4Saw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent" scale="3" id="Tc_rUVjElmyiEObN379Rhi8lg_8_9">74</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:63.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Balance - December&#160;31, 2019</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.44%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2019_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedTranslationAdjustmentMember_b7rhRP_wxU2M6RsK-2LVNg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" scale="3" id="Tc_AG8B-owevky9vB8QvC_7Tw_9_3">1,861</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.57%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.67%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2019_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedNetUnrealizedInvestmentGainLossMember_725oEd6noEaL-eSHRbmSSQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" scale="3" id="Tc_TrE0Rg3nNkmwntf0NItfeg_9_6">33</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.44%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2019_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_SNp8iWru0UiilNFX8-AHMw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" scale="3" id="Tc_sUsVPNtzxEGm7nONRzJsvg_9_9">1,894</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:63.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Other comprehensive income (loss)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.44%;border-bottom:1px solid 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Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.57%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.67%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedNetUnrealizedInvestmentGainLossMember_kId4_e7gN0WehtI1SXa3PQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent" sign="-" scale="3" id="Tc_MB1s7OdhFEi2ryDNlTSvOg_10_6">53</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" 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style="vertical-align:bottom;white-space:nowrap;width:1.57%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.67%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedNetUnrealizedInvestmentGainLossMember_7rJQZ3KQ-E2MoBrWzQnp5w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" sign="-" scale="3" id="Tc_udH8uRdOtUug87Q60E-Yqw_11_6">20</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New 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style="vertical-align:bottom;width:63.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Other comprehensive income (loss)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" 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Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedNetUnrealizedInvestmentGainLossMember_lWDxe-kiBkeCplGOf-gwgA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent" sign="-" scale="3" id="Tc_wBlUuSZ8jEO_9JyFpCHrqw_12_6">311</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_-7unTY5R2kqeHNw_kxX_EA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent" sign="-" scale="3" id="Tc_roqwasgB1kejyoI2fS8TzA_12_9">363</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:bottom;width:63.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Balance - December&#160;31, 2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.44%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedTranslationAdjustmentMember_V4ygQGQ_1EqS4uHsWoZqGw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" scale="3" id="Tc_jbmAo8CCJESmInjdAoXBAg_13_3">1,814</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.57%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.67%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedNetUnrealizedInvestmentGainLossMember_iKnDNxEm1kG4tmCMfIGwEQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" sign="-" scale="3" id="Tc_bcD-fyT4_Uq8C-0bg17wug_13_6">331</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.44%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_jUHOf6dSwkC4m9UBLc25Ig" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" scale="3" id="Tc_CRdnoxRTekuyDfGEAibQWA_13_9">1,483</ix:nonFraction></p></td></tr></table></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company did not allocate additional tax expense (benefit) to other comprehensive income (loss) for all years presented as the Company is in a full valuation allowance position such that a deferred tax asset related to amounts recognized in other comprehensive income is not regarded as realizable on a more-likely-than-not basis.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Preferred Stock</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Board of Directors has authority under the Company&#8217;s Certificate of Incorporation to issue shares of preferred stock, par value $<ix:nonFraction unitRef="Unit_Divide_USD_shares_tlsv-okr1ESmAF6EktRdIg" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="INF" format="ixt:numdotdecimal" name="us-gaap:PreferredStockParOrStatedValuePerShare" scale="0" id="Narr_hddwfKV_QkOSnsnOKeBvtw">0.01</ix:nonFraction>, with voting and economic rights to be determined by the Board of Directors. As of December 31, 2021, <ix:nonFraction unitRef="Unit_Standard_shares_CQLzaUKOXkqvj8CNr9pzfg" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="INF" format="ixt-sec:numwordsen" name="us-gaap:PreferredStockSharesIssued" scale="0" id="Narr_UypzABNIdEeGaqY90p5qUQ">no</ix:nonFraction> preferred shares have been issued.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Treasury Stock</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">On December 11, 2017, the Company&#8217;s Board of Directors authorized a program to repurchase up to $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_11_2017_AD6UwQE9eECNcaakS0D37Q" decimals="-6" format="ixt:numdotdecimal" name="us-gaap:StockRepurchaseProgramAuthorizedAmount1" scale="6" id="Narr_R8YAtlAtd0yMiAzYxRpMUg">100</ix:nonFraction> million of the Company&#8217;s common stock to be completed through December 11, 2019. At the end of the program, $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_12_11_2017_To_12_11_2019_S-M8Qa2Lj0m19vIh0vJ15Q" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:TreasuryStockValueAcquiredCostMethod" scale="6" id="Narr_YwJlq9Xoj0G2c2UtPvVy9w">14.3</ix:nonFraction> million of the $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_11_2017_AD6UwQE9eECNcaakS0D37Q" decimals="-6" format="ixt:numdotdecimal" name="us-gaap:StockRepurchaseProgramAuthorizedAmount1" scale="6" id="Narr_cSbMl94j4EKR87cRcsZ6ww">100</ix:nonFraction> million had been utilized. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company records treasury stock purchases under the cost method using the first-in, first-out (&#8220;FIFO&#8221;) method. Upon reissuance of treasury stock, amounts in excess of the acquisition cost are credited to additional paid-in capital. If the Company reissues treasury stock at an amount below its acquisition cost and if additional paid-in capital associated with prior treasury stock transactions is insufficient to cover the difference between the acquisition cost and the reissue price, this difference is charged to accumulated deficit.</p></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;background:#ffff00;">&#8203;</span></p><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" name="us-gaap:DisclosureOfCompensationRelatedCostsShareBasedPaymentsTextBlock" id="Tb_eC9sVnwayUW0ayuz_6WYMw" continuedAt="Tb_eC9sVnwayUW0ayuz_6WYMw_cont1" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note 13 &#8212; Stock Plans</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Share-based incentive awards are provided to employees under the terms of the Company&#8217;s equity incentive compensation plans (the &#8220;Plans&#8221;), which are administered by the Compensation Committee of the Board of Directors. The 2019 Plan originated as the 2010 Stock Incentive Plan and was originally approved by the Company&#8217;s shareholders in May 2010. This Plan was subsequently amended, as approved by shareholders, in 2013, 2016, and 2019 (at which time the Plan was renamed the 2019 Stock Incentive Plan (as amended to date, the &#8220;2019 Plan&#8221;)). The Company&#8217;s employees, non-employee directors, and consultants are eligible to receive awards under the 2019 Plan, which can include non-qualified stock options, incentive stock options, RSAs, RSUs, PSAs, PSUs, share appreciation rights, </p></ix:nonNumeric></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">F-30</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Veeco Instruments&#160;Inc. and Subsidiaries</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Notes to Consolidated Financial Statements (Continued)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;max-width:100%;position:relative;"><a id="Tc_BbTBPPKCu0-BwRewsJTBVg_1_3"></a><a id="Tc_E2jY2BmRMkCQYqpbemmkYQ_2_3"></a><a id="Tc_2a-eTforSEu8H1T9XKozkQ_2_6"></a><a id="Tc_W7AWUgOtNU-Trnf3byxUFA_2_9"></a><a id="Tc_kapisAKh30K1k56l9-xKkQ_3_3"></a><a id="Tc_kG2mzeS5R02xCXbEPU4Kiw_4_0"></a><a id="Tc_1RqO-cWcIES3-maiK-U2-Q_4_3"></a><a id="Tc_9FU3fDVCQEiudGoq-kh6oA_4_6"></a><a id="Tc_V5DdDQMlrEq1pl95BRqS3g_4_9"></a><a id="Tc_wRzayvBe9UyeAxEeoEmEdg_5_0"></a><a id="Tc_ITlbN1tq20ibdNU10zZdYw_6_0"></a><a id="Tc_yt4hlIVlAk6rpp7F352JBg_7_0"></a><a id="Tc_eQF3-0dAJEStfPZpzwVKjg_7_4"></a><a id="Tc_sMSqCHAgCEyFo8UPFf8xTg_7_7"></a><a id="Tc_kQkWLdTiHUy0I_icmCZ1Jw_8_0"></a><a id="Tc_U9Iihv2AZ0-o_xi2sgeAww_8_3"></a><a id="Tc_3vadjnHxH0CdM9lxRqJN5Q_8_6"></a><a id="Tc_mD8pssUULEW6O8WmHAVeZA_8_9"></a><ix:continuation id="Tb_eC9sVnwayUW0ayuz_6WYMw_cont1" continuedAt="Tb_eC9sVnwayUW0ayuz_6WYMw_cont2"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">dividend equivalent rights, or any combination thereof. The Company settles awards under the Plans with newly issued shares or with shares held in treasury.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">In 2013, the Board of Directors granted equity awards to certain employees under the Company&#8217;s 2013 Inducement Stock Incentive Plan (the &#8220;Inducement Plan&#8221;). The Company issued </span><span style="font-size:10pt;"><ix:nonFraction unitRef="Unit_Standard_shares_CQLzaUKOXkqvj8CNr9pzfg" contextRef="Duration_1_1_2013_To_12_31_2013_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember_us-gaap_PlanNameAxis_veco_InducementStockIncentivePlan2013Member_ylMJbfHW-EOvLniiRLP10A" decimals="INF" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriod" scale="0" id="Narr_Efe05H2HNk6M2iNNZwWZ6A">124,500</ix:nonFraction></span><span style="font-size:10pt;"> stock option shares and </span><span style="font-size:10pt;"><ix:nonFraction unitRef="Unit_Standard_shares_CQLzaUKOXkqvj8CNr9pzfg" contextRef="Duration_1_1_2013_To_12_31_2013_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockUnitsRSUMember_us-gaap_PlanNameAxis_veco_InducementStockIncentivePlan2013Member_1efdTFhLwU-DrISbJQza4A" decimals="INF" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod" scale="0" id="Narr_tbCKgh15SU-Ws0D_KBQzeA">87,000</ix:nonFraction></span><span style="font-size:10pt;"> RSUs under this plan. Stock options under this plan vest over a </span><ix:nonNumeric contextRef="Duration_1_1_2013_To_12_31_2013_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember_us-gaap_PlanNameAxis_veco_InducementStockIncentivePlan2013Member_ylMJbfHW-EOvLniiRLP10A" format="ixt-sec:durwordsen" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1" id="Narr_OVmXXZafy0WMlroRkoLTBg"><span style="font-size:10pt;">three year</span></ix:nonNumeric><span style="font-size:10pt;"> period and have a </span><ix:nonNumeric contextRef="Duration_1_1_2013_To_12_31_2013_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember_us-gaap_PlanNameAxis_veco_InducementStockIncentivePlan2013Member_ylMJbfHW-EOvLniiRLP10A" format="ixt-sec:durwordsen" name="us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod" id="Narr_c31cpiFSkkyn5Kjud0bbLA"><span style="font-size:10pt;">10-year</span></ix:nonNumeric><span style="font-size:10pt;"> term, and RSUs under this plan vest over a </span><span style="-sec-ix-hidden:Hidden_djJaia4sV0eMPU_iBjU1ow;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">two</span></span><span style="font-size:10pt;"> or </span><ix:nonNumeric contextRef="Duration_1_1_2013_To_12_31_2013_srt_RangeAxis_srt_MaximumMember_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockUnitsRSUMember_us-gaap_PlanNameAxis_veco_InducementStockIncentivePlan2013Member_BeM-S2HsrEWKknHM5_74cQ" format="ixt-sec:durwordsen" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1" id="Narr_1txvFujmNE2ygReV35jtiw"><span style="font-size:10pt;">four year</span></ix:nonNumeric><span style="font-size:10pt;"> period. At December 31, 2013, the Inducement Plan was merged into the 2019 Plan and is considered an inactive plan with </span><span style="font-size:10pt;"><ix:nonFraction unitRef="Unit_Standard_shares_CQLzaUKOXkqvj8CNr9pzfg" contextRef="As_Of_12_31_2013_us-gaap_PlanNameAxis_veco_InducementStockIncentivePlan2013Member_wYStvxEsG0262Owl24oK3Q" decimals="INF" format="ixt-sec:numwordsen" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAvailableForGrant" scale="0" id="Narr_TNfsbXEPYEuVxhVEjxQy3g">no</ix:nonFraction></span><span style="font-size:10pt;"> further shares available for grant. At December 31, 2021, there are </span><span style="font-size:10pt;"><ix:nonFraction unitRef="Unit_Standard_shares_CQLzaUKOXkqvj8CNr9pzfg" contextRef="As_Of_12_31_2021_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember_us-gaap_PlanNameAxis_veco_InducementStockIncentivePlan2013Member_eOhll0AuMkGWIL6OjiwVFA" decimals="INF" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber" scale="0" id="Narr_RauvtjpqG0mpxPVoliceyA">2,000</ix:nonFraction></span><span style="font-size:10pt;"> option shares and </span><span style="font-size:10pt;"><ix:nonFraction unitRef="Unit_Standard_shares_CQLzaUKOXkqvj8CNr9pzfg" contextRef="As_Of_12_31_2021_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockUnitsRSUMember_us-gaap_PlanNameAxis_veco_InducementStockIncentivePlan2013Member_zGZJvMlZiEiVUJczv3HTEg" decimals="INF" format="ixt-sec:numwordsen" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardNonOptionEquityInstrumentsOutstandingNumber" scale="0" id="Narr_Od0HrMXLX0K-4Wzc6PZ9nQ">no</ix:nonFraction></span><span style="font-size:10pt;"> RSUs outstanding under the Inducement Plan.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">The Company is authorized to issue up to </span><span style="font-size:10pt;"><ix:nonFraction unitRef="Unit_Standard_shares_CQLzaUKOXkqvj8CNr9pzfg" contextRef="As_Of_12_31_2021_us-gaap_PlanNameAxis_veco_StockIncentivePlan2010Member_GAlG4L1DrUyDFDkrI9YJbA" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAuthorized" scale="6" id="Narr_Tz4TeUc3rkOYCnhoQT5mOQ">13.3</ix:nonFraction></span><span style="font-size:10pt;"> million shares under the 2019 Plan. Option awards are granted with an exercise price equal to the closing price of the Company&#8217;s common stock on the trading day prior to the date of grant; option awards generally vest over a </span><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember_us-gaap_PlanNameAxis_veco_StockIncentivePlan2010Member_ugk8f5wVE0yXTw59WhfdCQ" format="ixt-sec:durwordsen" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1" id="Narr_Ojsq-L8Kpk-3cEqllxF8ow"><span style="font-size:10pt;">three year</span></ix:nonNumeric><span style="font-size:10pt;"> period and have a </span><span style="-sec-ix-hidden:Hidden_MjZTm5D10UiD7Ewg4_02Ew;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">seven</span></span><span style="font-size:10pt;"> or </span><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_srt_RangeAxis_srt_MaximumMember_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember_us-gaap_PlanNameAxis_veco_StockIncentivePlan2010Member_SgAMgaUCSkmi4Rz3wHJHYQ" format="ixt-sec:durwordsen" name="us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod" id="Narr_wOSIz6mHM0yCWKeSzcOOwA"><span style="font-size:10pt;">ten year</span></ix:nonNumeric><span style="font-size:10pt;"> term. RSAs and RSUs generally vest over </span><span style="-sec-ix-hidden:Hidden_xrGOZ4M_GkODaWr_-MAcEg;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">one</span></span><span style="font-size:10pt;"> to </span><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_srt_RangeAxis_srt_MaximumMember_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsAndRestrictedStockUnitsMember_us-gaap_PlanNameAxis_veco_StockIncentivePlan2010Member_XN0suXGhpU60IsTsLBRKWw" format="ixt-sec:durwordsen" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1" id="Narr_iF2o21qyPEy0HJXm3XZECA"><span style="font-size:10pt;">five years</span></ix:nonNumeric><span style="font-size:10pt;">. Certain option and share awards provide for accelerated vesting if there is a change in control, as defined in the 2019 Plan. At December 31, 2021, there are </span><span style="font-size:10pt;"><ix:nonFraction unitRef="Unit_Standard_shares_CQLzaUKOXkqvj8CNr9pzfg" contextRef="As_Of_12_31_2021_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember_us-gaap_PlanNameAxis_veco_StockIncentivePlan2010Member_DIWGcPSbBUytHCLLhBebqQ" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber" scale="6" id="Narr_DL5vqbuADkGsarKm9YvRQg">0.4</ix:nonFraction></span><span style="font-size:10pt;"> million option shares and </span><span style="font-size:10pt;"><ix:nonFraction unitRef="Unit_Standard_shares_CQLzaUKOXkqvj8CNr9pzfg" contextRef="As_Of_12_31_2021_us-gaap_AwardTypeAxis_veco_RsuAndPsuAwardsMember_us-gaap_PlanNameAxis_veco_StockIncentivePlan2010Member_x_QioyTSRUSTk8WPMF3sPg" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardNonOptionEquityInstrumentsOutstandingNumber" scale="6" id="Narr_J7ktFRARbUmUh1zw99yh2w">0.7</ix:nonFraction></span><span style="font-size:10pt;"> million RSUs and PSUs outstanding under the 2019 Plan.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">The Company is authorized to issue up to </span><span style="font-size:10pt;"><ix:nonFraction unitRef="Unit_Standard_shares_CQLzaUKOXkqvj8CNr9pzfg" contextRef="As_Of_12_31_2016_us-gaap_PlanNameAxis_veco_EmployeeStockPurchasePlan2016Member__T8u8X2gPEmRrjuPyI34wA" decimals="-4" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAuthorized" scale="6" id="Narr_3yd3_v2IJEKeXjElOvzG3A">2.25</ix:nonFraction></span><span style="font-size:10pt;"> million shares under the approved 2016 employee stock purchase plan (&#8220;ESPP&#8221;), including additional shares authorized under plan amendments approved by shareholders in 2019 and 2021. Under the ESPP, substantially all employees in the U.S. may purchase the Company&#8217;s common stock through payroll deductions at a price equal to </span><span style="font-size:10pt;"><ix:nonFraction unitRef="Unit_Standard_pure_60KFN_p23EC7YcClApV5TA" contextRef="Duration_1_1_2016_To_12_31_2016_us-gaap_PlanNameAxis_veco_EmployeeStockPurchasePlan2016Member_roA4VH7KfEiHN-h80G88vw" decimals="INF" format="ixt:numdotdecimal" name="us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardPurchasePriceOfCommonStockPercent" scale="-2" id="Narr_zDlDm_X0dEe2qi2JlddX5g">85</ix:nonFraction></span><span style="font-size:10pt;"> percent of the lower of the fair market value of the Company&#8217;s common stock at the beginning or end of each </span><ix:nonNumeric contextRef="Duration_1_1_2016_To_12_31_2016_us-gaap_PlanNameAxis_veco_EmployeeStockPurchasePlan2016Member_roA4VH7KfEiHN-h80G88vw" format="ixt-sec:durwordsen" name="veco:ShareBasedCompensationArrangementByShareBasedPaymentAwardOfferPeriod" id="Narr_IwJ7aKRrrUmF81KQ4j4p1w"><span style="font-size:10pt;">six-month</span></ix:nonNumeric><span style="font-size:10pt;"> offer period, as defined in the ESPP, and subject to certain limits. The ESPP was approved by the Company&#8217;s shareholders. </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Shares Reserved for Future Issuance</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">At December 31, 2021, the Company has <ix:nonFraction unitRef="Unit_Standard_shares_CQLzaUKOXkqvj8CNr9pzfg" contextRef="As_Of_12_31_2021_us-gaap_PlanNameAxis_veco_StockIncentivePlan2010Member_GAlG4L1DrUyDFDkrI9YJbA" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:CommonStockCapitalSharesReservedForFutureIssuance" scale="6" id="Narr_nXtrocCsiUC0rJIunFaIWw">3.4</ix:nonFraction> million shares reserved to cover exercises of outstanding stock options, vesting of RSUs, and additional grants under the 2019 Plan.<span style="font-size:12pt;"> </span>At December 31, 2021, the Company has <ix:nonFraction unitRef="Unit_Standard_shares_CQLzaUKOXkqvj8CNr9pzfg" contextRef="As_Of_12_31_2021_us-gaap_PlanNameAxis_veco_EmployeeStockPurchasePlan2016Member_zaYpnkR9e0C0OEN97q1RzQ" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:CommonStockCapitalSharesReservedForFutureIssuance" scale="6" id="Narr_O5AJSJ6s2UGfFWQxXctK6g">0.8</ix:nonFraction> million shares reserved to cover future issuances under the ESPP Plan.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Share-Based Compensation</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company recognized share-based compensation in the following line items in the Consolidated Statements of Operations for the periods indicated:</p><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" name="us-gaap:ScheduleOfEmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsTextBlock" id="Tb_y3cYukCf7ECG6H5ZRrGmOg" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:61.97%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.62%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.65%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:61.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:33.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">For the year ended December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:61.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.91%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.92%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.94%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2019</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="11" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:61.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:33.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:61.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Cost of sales</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_IncomeStatementLocationAxis_us-gaap_CostOfSalesMember_sjvPLpB22UOb4MN9cUnoQw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AllocatedShareBasedCompensationExpense" scale="3" id="Tc_ADb5Dv_kSkOoPz1ngCTobA_4_4">2,373</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_IncomeStatementLocationAxis_us-gaap_CostOfSalesMember_4pdHqWFUZES-tAuGO6QYuA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AllocatedShareBasedCompensationExpense" scale="3" id="Tc_UeIrLYSNjUC0ZHtg3FiaoQ_4_7">1,870</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.65%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_us-gaap_IncomeStatementLocationAxis_us-gaap_CostOfSalesMember_4Up4wlwnzEi45RgWOa773A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AllocatedShareBasedCompensationExpense" scale="3" id="Tc_Z9-R3NhS8U6jGs25kKd1UQ_4_10">1,903</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:61.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Research and development</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_IncomeStatementLocationAxis_us-gaap_ResearchAndDevelopmentExpenseMember_8vVnHGlKCk2H4dtX1fER0w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AllocatedShareBasedCompensationExpense" scale="3" id="Tc_DMwqST0quEWNyjxifwHzSQ_5_4">3,850</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_IncomeStatementLocationAxis_us-gaap_ResearchAndDevelopmentExpenseMember_o6GpS3wZtUSqtMK6U9X2XA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AllocatedShareBasedCompensationExpense" scale="3" id="Tc_cpIfbTe0qUWxNHWPVw4A_g_5_7">2,900</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_us-gaap_IncomeStatementLocationAxis_us-gaap_ResearchAndDevelopmentExpenseMember_j6sUSseGc0-kekJynpWKDA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AllocatedShareBasedCompensationExpense" scale="3" id="Tc_NeSZgoIBAE-zBPzuc0ahkg_5_10">3,340</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:61.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Selling, general, and administrative</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_IncomeStatementLocationAxis_us-gaap_SellingGeneralAndAdministrativeExpensesMember_EH_ZZeTKg0yUeKkMiLl_ew" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AllocatedShareBasedCompensationExpense" scale="3" id="Tc_cKWoh-dluUmX2YI_gP9zaQ_6_4">9,026</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_IncomeStatementLocationAxis_us-gaap_SellingGeneralAndAdministrativeExpensesMember_GBVzCU-Q8U-peO4SfPiI_w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AllocatedShareBasedCompensationExpense" scale="3" id="Tc_p9-HkOJd2E208Hhj-I1fzQ_6_7">7,933</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.65%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_us-gaap_IncomeStatementLocationAxis_us-gaap_SellingGeneralAndAdministrativeExpensesMember_fgqE6GQv30GRpnL_nnRtbQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AllocatedShareBasedCompensationExpense" scale="3" id="Tc_9cpDJSwc6UKNiIvGqv88Jw_6_10">9,630</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:61.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Restructuring</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.62%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.64%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.65%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_us-gaap_IncomeStatementLocationAxis_us-gaap_RestructuringChargesMember_7KRnTJG8JEaYevw5uciY1Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AllocatedShareBasedCompensationExpense" scale="3" id="Tc_oiNaEiJJZUiKlr8v67qhVA_7_10">397</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:61.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.62%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AllocatedShareBasedCompensationExpense" scale="3" id="Tc_wT0aAkFOpky0FniCQgy7Jg_8_4">15,249</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.64%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_irQajVZIkUmgjCJ-cxJ5AQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AllocatedShareBasedCompensationExpense" scale="3" id="Tc_SP6Natb64UC8rdGCoM8AOg_8_7">12,703</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.65%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_ssAGFj6EXEiYqEtVZlyqxA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AllocatedShareBasedCompensationExpense" scale="3" id="Tc_gF-Xa3ftj02tDZ3yiT25gw_8_10">15,270</ix:nonFraction></p></td></tr></table></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company did not realize any tax benefits associated with share-based compensation for the years ended December 31, 2021, 2020, and 2019 due to the full valuation allowance on its U.S. deferred tax assets. See Note 16, &#8220;Income Taxes&#8221; for additional information. The Company capitalized an immaterial amount of share-based compensation into inventory for the years ended December 31, 2021, 2020, and 2019.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></ix:continuation></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">F-31</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Veeco Instruments&#160;Inc. and Subsidiaries</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Notes to Consolidated Financial Statements (Continued)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;max-width:100%;position:relative;"><a id="Tc_PBvEAjcXwEqr4r0T6kSHxw_1_2"></a><a id="Tc_tRr6mj2KUUqw3s5u0L-WrA_1_5"></a><a id="Tc_u-njyOX44UqMk2eVx029DA_2_2"></a><a id="Tc_qIOKo7aJGEqhfmZUqrUmZw_2_5"></a><a id="Tc_-maIexoKCk2o5zGP_rc42Q_3_2"></a><a id="Tc_pCZc1fkrdkKR3-mCRgXEDg_3_5"></a><a id="Tc_U2LdQSw4_EeP39OJcORBUA_4_2"></a><a id="Tc_f7UnaTovnECdhXtVOuccYQ_4_5"></a><a id="Tc_2qNRNHRVPESs3UghAk5pWA_5_2"></a><a id="Tc_hxOGgMzw1EO60OQV-TakFA_5_5"></a><a id="Tc_drKTHL5ASky-g__qBt-aEA_6_0"></a><a id="Tc_DkMSYRmBck-9BSbcE-MP-g_6_2"></a><a id="Tc_Uqb8DOvrl0u4yn_MAmLNlA_7_0"></a><a id="Tc_zl_4Dhhs8Eqm5aj6g_W84A_8_0"></a><a id="Tc_aVaaiK4RE0CzCcACwh8nhg_9_0"></a><a id="Tc_-Mr8tfizJkCCa1lK4XzZIA_9_2"></a><a id="Tc_7ji76uvfs0i_HH2-3f5QPw_1_4"></a><a id="Tc_O5s9YLmGSUSm2S734kwGsA_2_2"></a><a id="Tc_qT8B6uapxUy5M5LXHw_wPw_2_4"></a><a id="Tc_w2P70GI8r0CNC3wJJwkL2w_3_2"></a><a 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id="Tc_JG4x7VL01UO9PxxDFjH69w_5_2"></a><a id="Tc_W1p9i49_OEeB9yh6garMuw_5_5"></a><a id="Tc_OgL1qBhhLEeO6FlzIZF3kg_5_6"></a><a id="Tc_BpdYYi7mBE6YJPmpkKPeKQ_5_8"></a><a id="Tc_Mz0c2kSvPkmEDpocBVUseQ_5_9"></a><ix:continuation id="Tb_eC9sVnwayUW0ayuz_6WYMw_cont2" continuedAt="Tb_eC9sVnwayUW0ayuz_6WYMw_cont3"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Unrecognized share-based compensation costs at December 31, 2021 are summarized below:</p><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" name="us-gaap:ScheduleOfUnrecognizedCompensationCostNonvestedAwardsTableTextBlock" id="Tb_3G7HNXUKDEWFPXXIlyLtSA" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:69.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Unrecognized</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Weighted</b></p></td></tr><tr><td style="vertical-align:bottom;width:69.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Share-Based</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Average&#160;Period</b></p></td></tr><tr><td style="vertical-align:bottom;width:69.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Compensation</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Expected&#160;to&#160;be</b></p></td></tr><tr><td style="vertical-align:bottom;width:69.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.71%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Costs</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.67%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Recognized</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="6" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:69.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="3" style="vertical-align:bottom;white-space:nowrap;width:14.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in years)</i></p></td></tr><tr><td style="vertical-align:bottom;width:69.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Restricted stock units</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockUnitsRSUMember_j1I4QTIYTE6R1-HMppANtg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognized" scale="3" id="Tc_P5ZrEI4ln0m9mIRjv4MiuA_6_3">2,064</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.67%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockUnitsRSUMember_tCh1vdWZvUqrFV_jIpDVmg" format="ixt-sec:duryear" name="us-gaap:EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1" id="Tc_Kcz74WLMVEmAtDbxUQLh7A_6_5"><span style="font-size:10pt;"> 1.9</span></ix:nonNumeric></p></td></tr><tr><td style="vertical-align:bottom;width:69.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Restricted stock awards</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardMember_PR42I3KRq0Kyh7RKSMIdUA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognized" scale="3" id="Tc_k-k3Xzc6z0eZQtzzYNr3og_7_3">16,791</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardMember_Y0zNKl1Pg0eI_eln3y8FUQ" format="ixt-sec:duryear" name="us-gaap:EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1" id="Tc_t7do8GC88EmEJLSoSGAsAA_7_5"><span style="font-size:10pt;"> 1.9</span></ix:nonNumeric></p></td></tr><tr><td style="vertical-align:bottom;width:69.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Performance share units</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.3%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_us-gaap_AwardTypeAxis_veco_PerformanceShareUnitsMember_VmfMwWQ-G06uNFUv9n26pg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognized" scale="3" id="Tc_YUkszF3FHUSTqeTGY9aQPw_8_3">5,363</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.67%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_AwardTypeAxis_veco_PerformanceShareUnitsMember_7PHgxvL5uUuA5AYo21ihPw" format="ixt-sec:duryear" name="us-gaap:EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1" id="Tc_dLxT2HMEVEWQD9WbSxFHDw_8_5"><span style="font-size:10pt;"> 2.1</span></ix:nonNumeric></p></td></tr><tr><td style="vertical-align:bottom;width:69.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Total unrecognized share-based compensation cost</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.3%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognized" scale="3" id="Tc_VarFhdixS0yO-fFmDz6O7A_9_3">24,218</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" format="ixt-sec:duryear" name="us-gaap:EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1" id="Tc_WkjuGBaM7UmdFKRdLERHIA_9_5"><span style="font-size:10pt;"> 1.9</span></ix:nonNumeric></p></td></tr></table></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Stock Option Awards</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Stock options are awards issued to employees that entitle the holder to purchase shares of the Company&#8217;s stock at a fixed price. The following table summarizes the equity activity related to stock options:</p><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" name="us-gaap:ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock" id="Tb_YLet7F5zdEKE_Abdq44W6Q" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:71.5%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.6%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:10.92%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:71.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Weighted&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:71.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Number&#160;of</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Average</b></p></td></tr><tr><td style="vertical-align:bottom;width:71.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Shares</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.53%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Exercise&#160;Price</b></p></td></tr><tr><td style="vertical-align:bottom;width:71.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:71.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;white-space:pre-wrap;">Balance -  December&#160;31, 2018</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_CQLzaUKOXkqvj8CNr9pzfg" contextRef="As_Of_12_31_2018_q0edxy1rfUy1tPk-85jsFQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber" scale="3" id="Tc_FLrg61XOEEe-NNuZjbMNPg_5_2">1,222</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.6%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.92%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_tlsv-okr1ESmAF6EktRdIg" contextRef="As_Of_12_31_2018_q0edxy1rfUy1tPk-85jsFQ" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice" scale="0" id="Tc_anaC6PmzoUyeQhZ-f55gOw_5_5">34.80</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:71.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Expired</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_shares_CQLzaUKOXkqvj8CNr9pzfg" contextRef="Duration_1_1_2019_To_12_31_2019_ssAGFj6EXEiYqEtVZlyqxA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresAndExpirationsInPeriod" scale="3" id="Tc_McnUE15WrUWdu0aKXx5rgQ_6_2">103</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_tlsv-okr1ESmAF6EktRdIg" contextRef="Duration_1_1_2019_To_12_31_2019_ssAGFj6EXEiYqEtVZlyqxA" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresAndExpirationsInPeriodWeightedAverageExercisePrice" scale="0" id="Tc_AZZhioR6vEGkxvk1gn6FDw_6_5">33.97</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:71.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;white-space:pre-wrap;">Balance -  December&#160;31, 2019</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_CQLzaUKOXkqvj8CNr9pzfg" contextRef="As_Of_12_31_2019_V3OJMQUyh0CQkfB0kHJGFg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber" scale="3" id="Tc_dZhs3YD13U2pg0T_yVFBPQ_7_2">1,119</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.6%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.92%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_tlsv-okr1ESmAF6EktRdIg" contextRef="As_Of_12_31_2019_V3OJMQUyh0CQkfB0kHJGFg" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice" scale="0" id="Tc_hw6V37-cLEmZ_3Yz3ts8GA_7_5">34.88</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:71.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Expired</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_shares_CQLzaUKOXkqvj8CNr9pzfg" contextRef="Duration_1_1_2020_To_12_31_2020_irQajVZIkUmgjCJ-cxJ5AQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresAndExpirationsInPeriod" scale="3" id="Tc_HPRr4nil2kOgUShMNsbyRg_8_2">389</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_tlsv-okr1ESmAF6EktRdIg" contextRef="Duration_1_1_2020_To_12_31_2020_irQajVZIkUmgjCJ-cxJ5AQ" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresAndExpirationsInPeriodWeightedAverageExercisePrice" scale="0" id="Tc_jMbZVp18YUmMnhMmaT5ioQ_8_5">34.15</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:71.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;white-space:pre-wrap;">Balance -  December&#160;31, 2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_CQLzaUKOXkqvj8CNr9pzfg" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber" scale="3" id="Tc_E-hZoRiw6kea8bVuToheuA_9_2">730</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.6%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.92%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_tlsv-okr1ESmAF6EktRdIg" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice" scale="0" id="Tc_LHxrp0srGEq1cX_t6rgeFg_9_5">35.26</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:71.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Exercised</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_shares_CQLzaUKOXkqvj8CNr9pzfg" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodSharesStockOptionsExercised" scale="3" id="Tc_8iOn0t8qsU6fCmnUf1AnnA_10_2">2</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_tlsv-okr1ESmAF6EktRdIg" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice" scale="0" id="Tc_c_NL03bAb0Gk0hR7QwMm5g_10_5">23.36</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:71.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Expired</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_shares_CQLzaUKOXkqvj8CNr9pzfg" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresAndExpirationsInPeriod" scale="3" id="Tc_1s5BZzZNk0iRFIoPdEaU0A_11_2">285</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.6%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.92%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_tlsv-okr1ESmAF6EktRdIg" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresAndExpirationsInPeriodWeightedAverageExercisePrice" scale="0" id="Tc_7G7Jx0nXI0Wv_wrKrNie9A_11_5">40.16</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:71.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;white-space:pre-wrap;">Balance -  December&#160;31, 2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_CQLzaUKOXkqvj8CNr9pzfg" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber" scale="3" id="Tc_x_afeuZrMEWAf5TJfAxvFg_12_2">443</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_tlsv-okr1ESmAF6EktRdIg" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice" scale="0" id="Tc_SSb6uoNDOEm8hNkuaGokbg_12_5">32.15</ix:nonFraction></p></td></tr></table></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The following table summarizes stock option information at December 31, 2021:</p><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" name="us-gaap:ScheduleOfShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeTextBlock" id="Tb_-rDSWn9eekaSy8dcQHhxxA" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:25.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.79%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:16.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:25.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="9" style="vertical-align:bottom;white-space:nowrap;width:71.09%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Options&#160;Outstanding and Exercisable</b></p></td></tr><tr><td style="vertical-align:bottom;width:25.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.79%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:16.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Weighted</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:15.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:25.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Aggregate</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:16.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Average</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:15.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Weighted</b></p></td></tr><tr><td style="vertical-align:bottom;width:25.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Intrinsic</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:16.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Remaining</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:15.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Average</b></p></td></tr><tr><td style="vertical-align:bottom;width:25.48%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;margin:0pt;"><b style="font-weight:bold;">Range&#160;of&#160;Exercise&#160;Prices</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Shares</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.87%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Value</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:16.7%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Contractual&#160;Life</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:15.48%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Exercise&#160;Price</b></p></td></tr><tr><td style="vertical-align:bottom;width:25.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:16.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;years)</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:15.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:25.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$<ix:nonFraction unitRef="Unit_Divide_USD_shares_tlsv-okr1ESmAF6EktRdIg" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis_veco_RangeOfExercisePricesRangeOneMember_s38v1__Q40W2Rh3FNx9nOw" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeLowerRangeLimit" scale="0" id="Narr_bhw2-BjEPUaLXemovHF0Rg">20.00</ix:nonFraction> - $<ix:nonFraction unitRef="Unit_Divide_USD_shares_tlsv-okr1ESmAF6EktRdIg" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis_veco_RangeOfExercisePricesRangeOneMember_s38v1__Q40W2Rh3FNx9nOw" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeUpperRangeLimit" scale="0" id="Narr_UDwFLjHKi0-BHyr2_P7Nrg">30.00</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_CQLzaUKOXkqvj8CNr9pzfg" contextRef="As_Of_12_31_2021_us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis_veco_RangeOfExercisePricesRangeOneMember_9Y_qB-_mJkiShLX9dKoPag" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfOutstandingOptions" scale="3" id="Tc_YiAnTX9DQkGlmU9abfmsCg_7_2">12</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.79%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:16.7%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis_veco_RangeOfExercisePricesRangeOneMember_s38v1__Q40W2Rh3FNx9nOw" format="ixt-sec:duryear" name="us-gaap:SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsWeightedAverageRemainingContractualTerm2" id="Tc_BKZocTMVlkO4LhtYUEhCRA_7_7"><span style="font-size:8pt;"> 1.6</span></ix:nonNumeric></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="-sec-ix-hidden:Hidden_fJ7s2Z2xnEqsdcmd3aYg7g;"><span style="font-family:'Times New Roman','Times','serif';font-size:8pt;font-style:normal;font-weight:normal;">$</span></span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_tlsv-okr1ESmAF6EktRdIg" contextRef="As_Of_12_31_2021_us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis_veco_RangeOfExercisePricesRangeOneMember_9Y_qB-_mJkiShLX9dKoPag" decimals="2" format="ixt:numdotdecimal" name="us-gaap:SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsWeightedAverageExercisePriceBeginningBalance1" scale="0" id="Tc_96ZCrSPfkUS22qKI_ggvcw_7_10">29.26</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:25.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$<ix:nonFraction unitRef="Unit_Divide_USD_shares_tlsv-okr1ESmAF6EktRdIg" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis_veco_RangeOfExercisePricesRangeTwoMember_7LkXJjnc70KkxI_DhP1QEw" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeLowerRangeLimit" scale="0" id="Narr_XdLNeO7byU6xHrq3QiBsLw">30.01</ix:nonFraction> - $<ix:nonFraction unitRef="Unit_Divide_USD_shares_tlsv-okr1ESmAF6EktRdIg" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis_veco_RangeOfExercisePricesRangeTwoMember_7LkXJjnc70KkxI_DhP1QEw" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeUpperRangeLimit" scale="0" id="Narr_pThYtvpMokWtNrr2iqGTNA">40.00</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_CQLzaUKOXkqvj8CNr9pzfg" contextRef="As_Of_12_31_2021_us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis_veco_RangeOfExercisePricesRangeTwoMember_jUvNUmzyFUizfovXE7WAxg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfOutstandingOptions" scale="3" id="Tc_iP5tGXWn5Ee4VfQj3lA73w_8_2">431</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.79%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:16.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"><span style="-sec-ix-hidden:Hidden_Od6T0xFOwEWWIugp-IBsQQ;"><span style="font-family:'Times New Roman','Times','serif';font-size:8pt;font-style:normal;font-weight:normal;"> 0.9</span></span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_tlsv-okr1ESmAF6EktRdIg" contextRef="As_Of_12_31_2021_us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis_veco_RangeOfExercisePricesRangeTwoMember_jUvNUmzyFUizfovXE7WAxg" decimals="2" format="ixt:numdotdecimal" name="us-gaap:SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsWeightedAverageExercisePriceBeginningBalance1" scale="0" id="Tc_xeGEpW5XKUyAckw3wR-tLw_8_10">32.22</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:25.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.13%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_CQLzaUKOXkqvj8CNr9pzfg" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfOutstandingOptions" scale="3" id="Tc_dnlUtRjyHkONb4Ed4njyzg_9_2">443</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.79%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:16.7%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"><span style="-sec-ix-hidden:Hidden_wySSYfbG00Wt32ljky0kfw;"><span style="font-family:'Times New Roman','Times','serif';font-size:8pt;font-style:normal;font-weight:normal;"> 1.0</span></span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_tlsv-okr1ESmAF6EktRdIg" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="2" format="ixt:numdotdecimal" name="us-gaap:SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsWeightedAverageExercisePriceBeginningBalance1" scale="0" id="Tc_5irFNBFUBEChe6quZTwWgQ_9_10">32.15</ix:nonFraction></p></td></tr></table></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="background:#ffffff;">There were&#160;</span><span style="background:#ffffff;"><ix:nonFraction unitRef="Unit_Standard_shares_CQLzaUKOXkqvj8CNr9pzfg" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt-sec:numwordsen" name="us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsNonvestedNumberOfShares" scale="3" id="Narr_9NvuaUZ4gUGOt32-cjaZ4w">no</ix:nonFraction></span><span style="background:#ffffff;">&#160;unvested options outstanding as of December 31, 2021.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;background:#ffffff;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The following table summarizes information on options exercised for the periods indicated:</p><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" name="veco:ScheduleOfStockOptionExercisedTableTextBlock" id="Tb_cg9mdV4Yn0mGVLJkUeuUfA" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:69.29%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:69.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:28.64%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Year ended December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:69.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.17%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.17%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2019</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="10" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:69.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:28.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:69.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Cash received from options exercised</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProceedsFromStockOptionsExercised" scale="3" id="Tc_lEn79VL8VEGUp7PyA03HmQ_4_3">37</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td></tr><tr><td style="vertical-align:bottom;width:69.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Intrinsic value of options exercised</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisesInPeriodTotalIntrinsicValue" scale="3" id="Tc_EDgMxTdZHUOlJruZmvpbug_5_3">6</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td></tr></table></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></ix:continuation></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">F-32</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Veeco Instruments&#160;Inc. and Subsidiaries</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Notes to Consolidated Financial Statements (Continued)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;max-width:100%;position:relative;"><a id="_Hlk356917"></a><a id="Tc_Pkk7LqjBD0Gfj1_rEdSHgg_1_4"></a><a id="Tc_zH7PK12OCUuKvOs-s2RAjg_2_4"></a><a id="Tc_a9cSycpccEiSxTAByvd4fA_3_2"></a><a id="Tc_fwPEhDp5kEmNm9aiVHFoSA_3_4"></a><a id="Tc_Y4imZXygTkeBBOuDzBERLA_4_2"></a><a id="Tc_nBz0LG15w0urxlncjHXJHQ_4_4"></a><a id="Tc_tXKTg4dHMECCLcWXqBGpzQ_5_2"></a><a id="Tc_Phg997hPWUqsmR0bkYSHKg_6_0"></a><a id="Tc_5ivJHHzrKkSw-M_sJZ2jdw_6_4"></a><a id="Tc_8S9RSBwJtEC2i6OHTeidFQ_7_0"></a><a id="Tc_zvFFBPKf1E2jpWrWrBj9zQ_8_0"></a><a id="Tc_Z8HgjRm-dUmoE7nLmUc25Q_9_0"></a><a id="Tc_8ZpOaLgr5U21fI1JCcCnYw_10_0"></a><a id="Tc_crYxpDP4NES78LsF62nivw_11_0"></a><a id="Tc_YOclZ8TupE6Uy4fOUTiyEA_12_0"></a><a id="Tc_yLY7BErJz0KtUfK0SHQXBQ_13_0"></a><a id="Tc_QIvR979ge0OO-N3sxvVviQ_14_0"></a><a id="Tc_44Fqy8OiXk6e1Peydxhp-g_15_0"></a><a id="Tc_kkB_QJSlL06GsAlKqFD5eg_16_0"></a><a id="Tc_4-VmgpRqY0aIQ81g7pVXtA_17_0"></a><a id="Tc_VJFCT8H6VkaWHmpSURos1A_18_0"></a><a id="Tc_n-yV3SKwy0-x0KwyEi8mjw_19_0"></a><a id="Tc_jo0eWxeO4kio4tkrclKd3g_20_0"></a><a id="Tc_uQZwudoosUOqBYfyCUpQ3A_21_0"></a><a id="_fcb603da_f288_4ee0_b34d_33a0693fae28"></a><a id="Tc_rZiJHy7JBUya9VmtOHudYw_1_2"></a><a id="Tc_Cch1-fTBaECkBED8HoIjbg_2_2"></a><a id="Tc_Bv3FD0xtHUe5IceLP9nY-w_2_5"></a><a id="Tc_UkeyBJMvdEiImvSsVlfYTg_2_8"></a><a id="Tc_-GyqtVk0ZEWd7QQj-Te1Qw_3_0"></a><a id="Tc_r_7iY61920a6bt6uLlP7CQ_3_2"></a><a id="Tc_AbS4cP_Cd06VdYq98ofLAA_3_5"></a><a id="Tc_Io87mIIguEi31LQH2isfsA_3_8"></a><a id="Tc_YzZh28CNNEKI-UEPOon6jQ_4_0"></a><a id="Tc_GjJhuWMIZkGSuMHRSDHvcA_4_4"></a><a id="Tc_rKXtxRt2mE6-Xj3hEJTDgQ_4_7"></a><a id="Tc_pKLByx6W2EK-Qezj2D-H0A_4_10"></a><a id="Tc_oyYwKojEhkiOrM-E63fMXw_5_0"></a><a id="Tc_60Jz6Ky8mE6SKIrKLTrWGw_5_4"></a><a id="Tc_64IDcQI8rUmGmxCKtETCzg_5_7"></a><a id="Tc_StzfBCd-9Eqduz9HVsxoeA_5_10"></a><ix:continuation id="Tb_eC9sVnwayUW0ayuz_6WYMw_cont3" continuedAt="Tb_eC9sVnwayUW0ayuz_6WYMw_cont4"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">RSAs, RSUs, PSAs, PSUs</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">RSAs are stock awards issued to employees and directors that are subject to specified restrictions and a risk of forfeiture. RSUs are stock awards issued to employees that entitle the holder to receive shares of common stock as the awards vest. PSAs and PSUs are awards that result in an issuance of shares of common stock to employees if certain performance or market conditions are achieved. All of these awards typically vest over </span><span style="-sec-ix-hidden:Hidden_4XeCJSX0U0my8ezkiVd-YA;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">one</span></span><span style="font-size:10pt;"> to </span><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_srt_RangeAxis_srt_MaximumMember_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_fLJuIdvXdE-vgWEPH1PhEw" format="ixt-sec:durwordsen" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1" id="Narr_UFyd65dFKEyFLNfNNg2q2g"><span style="font-size:10pt;">four years</span></ix:nonNumeric><span style="font-size:10pt;"> and vesting is subject to the employee&#39;s continued service with the Company and, in the case of performance awards, meeting certain performance or market conditions. The fair value of the awards is determined and fixed based on the closing price of the Company&#8217;s common stock on the trading day prior to the date of grant, or, in the case of performance awards with market conditions, fair value is determined using a Monte Carlo simulation. </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The following table summarizes the equity activity of non-vested restricted shares and performance shares:</p><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" name="us-gaap:ScheduleOfSharebasedCompensationRestrictedStockAndRestrictedStockUnitsActivityTableTextBlock" id="Tb_ajD_tX9aM0CZhYtTsVnGBA" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:74.01%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.71%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:74.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Weighted</b></p></td></tr><tr><td style="vertical-align:bottom;width:74.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Average</b></p></td></tr><tr><td style="vertical-align:bottom;width:74.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Number&#160;of</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Grant&#160;Date</b></p></td></tr><tr><td style="vertical-align:bottom;width:74.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Shares</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.01%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Fair&#160;Value</b></p></td></tr><tr><td style="vertical-align:bottom;width:74.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:74.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;white-space:pre-wrap;">Balance -  December&#160;31, 2018</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_CQLzaUKOXkqvj8CNr9pzfg" contextRef="As_Of_12_31_2018_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_IlsbHmXmjEGwXMPlNCG3xA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber" scale="3" id="Tc_scKcdDIwW0ywxjplpA6a1w_6_2">2,218</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_tlsv-okr1ESmAF6EktRdIg" contextRef="As_Of_12_31_2018_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_IlsbHmXmjEGwXMPlNCG3xA" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue" scale="0" id="Tc_skrjuQZbkEO8ABEeMgDupQ_6_5">20.74</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:74.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Granted</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_CQLzaUKOXkqvj8CNr9pzfg" contextRef="Duration_1_1_2019_To_12_31_2019_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_uxmJbYsoy0q_x2Q6JkFcFA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod" scale="3" id="Tc_IS6kKV2mJk-1Gqviko0pmg_7_2">1,107</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_tlsv-okr1ESmAF6EktRdIg" contextRef="Duration_1_1_2019_To_12_31_2019_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_uxmJbYsoy0q_x2Q6JkFcFA" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue" scale="0" id="Tc_GBULFiMfLkius-ymfFTj-A_7_5">11.53</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:74.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Performance award adjustments</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_shares_CQLzaUKOXkqvj8CNr9pzfg" contextRef="Duration_1_1_2019_To_12_31_2019_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_uxmJbYsoy0q_x2Q6JkFcFA" decimals="-3" format="ixt:numdotdecimal" name="veco:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsPerformanceAwardAdjustmentsInPeriod" scale="3" id="Tc_WMNs7_2IzEusceGFDffj9A_8_2">25</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_tlsv-okr1ESmAF6EktRdIg" contextRef="Duration_1_1_2019_To_12_31_2019_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_uxmJbYsoy0q_x2Q6JkFcFA" decimals="2" format="ixt:numdotdecimal" name="veco:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsPerformanceAwardAdjustmentsWeightedAverageGrantDateFairValue" scale="0" id="Tc_uxWS2LnHrkS3HFLh_x6J0w_8_5">28.91</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:74.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Vested</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_shares_CQLzaUKOXkqvj8CNr9pzfg" contextRef="Duration_1_1_2019_To_12_31_2019_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_uxmJbYsoy0q_x2Q6JkFcFA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod" scale="3" id="Tc_DeyxoNTZ1kizz7LuNoBP7g_9_2">768</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_tlsv-okr1ESmAF6EktRdIg" contextRef="Duration_1_1_2019_To_12_31_2019_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_uxmJbYsoy0q_x2Q6JkFcFA" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue" scale="0" id="Tc_YvdWgzCj2kKJc_hraJXZrQ_9_5">21.77</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:74.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Forfeited</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_shares_CQLzaUKOXkqvj8CNr9pzfg" contextRef="Duration_1_1_2019_To_12_31_2019_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_uxmJbYsoy0q_x2Q6JkFcFA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeitedInPeriod" scale="3" id="Tc_J7SDtg4wwU-FB534t4hoOg_10_2">275</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_tlsv-okr1ESmAF6EktRdIg" contextRef="Duration_1_1_2019_To_12_31_2019_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_uxmJbYsoy0q_x2Q6JkFcFA" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeituresWeightedAverageGrantDateFairValue" scale="0" id="Tc_IRcEw8Qb3UK43k4BW2xmKw_10_5">18.48</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:74.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;white-space:pre-wrap;">Balance -  December&#160;31, 2019</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_CQLzaUKOXkqvj8CNr9pzfg" contextRef="As_Of_12_31_2019_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_Ghca504sGUuv7zB0ZNuzuA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber" scale="3" id="Tc_c8pgI7qTWEu65N2fVHZ45A_11_2">2,257</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_tlsv-okr1ESmAF6EktRdIg" contextRef="As_Of_12_31_2019_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_Ghca504sGUuv7zB0ZNuzuA" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue" scale="0" id="Tc_0a-KlcLuvEGFsy3b9S6eDA_11_5">16.20</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:74.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Granted</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_CQLzaUKOXkqvj8CNr9pzfg" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember__qg2LgTAZ0iyjie4l78A5Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod" scale="3" id="Tc_BNI7_sPL-EeQzli26IgslQ_12_2">1,054</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_tlsv-okr1ESmAF6EktRdIg" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember__qg2LgTAZ0iyjie4l78A5Q" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue" scale="0" id="Tc_AMZ0F2Zzh0K9ZG3faGg_MQ_12_5">9.53</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:74.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Performance award adjustments</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_shares_CQLzaUKOXkqvj8CNr9pzfg" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember__qg2LgTAZ0iyjie4l78A5Q" decimals="-3" format="ixt:numdotdecimal" name="veco:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsPerformanceAwardAdjustmentsInPeriod" scale="3" id="Tc_w6J-abZMW0i4EPpUHzxNuw_13_2">51</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_tlsv-okr1ESmAF6EktRdIg" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember__qg2LgTAZ0iyjie4l78A5Q" decimals="2" format="ixt:numdotdecimal" name="veco:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsPerformanceAwardAdjustmentsWeightedAverageGrantDateFairValue" scale="0" id="Tc_-p6IRikzw0yJN9R0T8l0zQ_13_5">30.94</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:74.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Vested</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_shares_CQLzaUKOXkqvj8CNr9pzfg" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember__qg2LgTAZ0iyjie4l78A5Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod" scale="3" id="Tc_6nhbGdv-5kCfTLUQu3M3FQ_14_2">798</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_tlsv-okr1ESmAF6EktRdIg" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember__qg2LgTAZ0iyjie4l78A5Q" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue" scale="0" id="Tc_dJHR5mfTqUCEybGQFTH0Mw_14_5">16.01</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:74.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Forfeited</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_shares_CQLzaUKOXkqvj8CNr9pzfg" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember__qg2LgTAZ0iyjie4l78A5Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeitedInPeriod" scale="3" id="Tc_9iomxFb5uEiQ90steJj2Og_15_2">422</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_tlsv-okr1ESmAF6EktRdIg" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember__qg2LgTAZ0iyjie4l78A5Q" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeituresWeightedAverageGrantDateFairValue" scale="0" id="Tc_9QYHkEnZ60CiiRHwn8aOvg_15_5">14.87</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:74.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;white-space:pre-wrap;">Balance -  December&#160;31, 2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_CQLzaUKOXkqvj8CNr9pzfg" contextRef="As_Of_12_31_2020_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_ApLyfGPsIkazj8LB9YTC8Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber" scale="3" id="Tc_ksSKJxWtuUa4uCwKov6JaQ_16_2">2,040</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_tlsv-okr1ESmAF6EktRdIg" contextRef="As_Of_12_31_2020_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_ApLyfGPsIkazj8LB9YTC8Q" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue" scale="0" id="Tc_Rxx-PRqsLkiuHtB5fTZyoA_16_5">12.73</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:74.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Granted</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_CQLzaUKOXkqvj8CNr9pzfg" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_NJFuYf7EPUKFvdxPFi13Fg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod" scale="3" id="Tc_AweRHXsNs0iZwTxU48MOCg_17_2">1,031</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_tlsv-okr1ESmAF6EktRdIg" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_NJFuYf7EPUKFvdxPFi13Fg" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue" scale="0" id="Tc_8VZcoe6ujEefCjQJNcahxA_17_5">24.26</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:74.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Performance award adjustments</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_CQLzaUKOXkqvj8CNr9pzfg" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_NJFuYf7EPUKFvdxPFi13Fg" decimals="-3" format="ixt:numdotdecimal" name="veco:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsPerformanceAwardAdjustmentsInPeriod" sign="-" scale="3" id="Tc_DuX3H9x3jEe_YNgPsZlcPg_18_2">159</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_tlsv-okr1ESmAF6EktRdIg" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_NJFuYf7EPUKFvdxPFi13Fg" decimals="2" format="ixt:numdotdecimal" name="veco:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsPerformanceAwardAdjustmentsWeightedAverageGrantDateFairValue" scale="0" id="Tc_BvyyzoEwSUaOhSFbhpUihA_18_5">18.38</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:74.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Vested</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_shares_CQLzaUKOXkqvj8CNr9pzfg" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_NJFuYf7EPUKFvdxPFi13Fg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod" scale="3" id="Tc_tezee4SlJUqExEsM87p0EQ_19_2">1,014</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_tlsv-okr1ESmAF6EktRdIg" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_NJFuYf7EPUKFvdxPFi13Fg" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue" scale="0" id="Tc_iUCs30tcuE2NTh9DwcUTrA_19_5">15.50</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:74.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Forfeited</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_shares_CQLzaUKOXkqvj8CNr9pzfg" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_NJFuYf7EPUKFvdxPFi13Fg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeitedInPeriod" scale="3" id="Tc__zOeohvD4k6UpsuSP3OrmA_20_2">133</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_tlsv-okr1ESmAF6EktRdIg" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_NJFuYf7EPUKFvdxPFi13Fg" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeituresWeightedAverageGrantDateFairValue" scale="0" id="Tc_dCuojSGo0ECV_TEmIWaHkQ_20_5">15.08</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:74.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;white-space:pre-wrap;">Balance -  December&#160;31, 2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_CQLzaUKOXkqvj8CNr9pzfg" contextRef="As_Of_12_31_2021_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_5ie5es1NVUKxpvSFiAjKCA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber" scale="3" id="Tc_SQqkU8QUykK3ENwV3Mm6WQ_21_2">2,083</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_tlsv-okr1ESmAF6EktRdIg" contextRef="As_Of_12_31_2021_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_5ie5es1NVUKxpvSFiAjKCA" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue" scale="0" id="Tc_Joq01SxpikebLcrWKmStrw_21_5">17.33</ix:nonFraction></p></td></tr></table></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The total fair value of shares that vested during the years ended December 31, 2021, 2020, and 2019 was $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_NJFuYf7EPUKFvdxPFi13Fg" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodTotalFairValue" scale="6" id="Narr_7AasN0jUjU62hGVJYTmH3A">22.8</ix:nonFraction> million, $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember__qg2LgTAZ0iyjie4l78A5Q" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodTotalFairValue" scale="6" id="Narr_B9iUZCuBuE-BmjLK-O0ASA">9.0</ix:nonFraction> million, and $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_uxmJbYsoy0q_x2Q6JkFcFA" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodTotalFairValue" scale="6" id="Narr_Nurx869hyUG4n7NfFkio5Q">8.8</ix:nonFraction> million, respectively. For performance awards, the final number of shares earned will vary depending on the achievement of the actual results relative to the performance or market conditions. Each performance award is included in the table above at the grant date target share amount until the end of the performance period if not previously forfeited. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The fair value of performance awards with market conditions is estimated on the date of grant using a Monte Carlo simulation. Estimates of fair value are not intended to predict actual future events or the value ultimately realized by employees who receive these awards. The weighted average fair value and the assumptions used in calculating such values during fiscal years 2021, 2020, and 2019 for performance awards with market conditions were based on estimates at the date of grant as follows:</p><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" name="veco:ScheduleOfShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsValuationAssumptionsTableTextBlock" id="Tb_0jW8lHodt0iBeAtlT7Oeeg" continuedAt="Tb_0jW8lHodt0iBeAtlT7Oeeg_cont1" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:67.07%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.71%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:6.33%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:6.33%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:6.48%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:67.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:28.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Year ended December&#160;31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:7.36%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;width:7.37%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;width:8.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2019</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Weighted average fair value</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;width:6.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_tlsv-okr1ESmAF6EktRdIg" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_AwardTypeAxis_veco_PerformanceShareUnitsMarketConditionsMember_13vj9jKkdkC4zILkbhTzvQ" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue" scale="0" id="Tc_oVL6OYauIEqGuKzhuGA4vA_3_3">27.81</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;width:6.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_tlsv-okr1ESmAF6EktRdIg" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_AwardTypeAxis_veco_PerformanceShareUnitsMarketConditionsMember_VN3skmDmUUSUqmk9Q7ISnA" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue" scale="0" id="Tc_EJnZVUgNnkC56EsA0KfIAQ_3_6">10.59</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;width:6.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_tlsv-okr1ESmAF6EktRdIg" contextRef="Duration_1_1_2019_To_12_31_2019_us-gaap_AwardTypeAxis_veco_PerformanceShareUnitsMarketConditionsMember_caWddgkI6E698AR1Llx39g" decimals="2" 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style="vertical-align:bottom;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_pure_60KFN_p23EC7YcClApV5TA" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_AwardTypeAxis_veco_PerformanceShareUnitsMarketConditionsMember_13vj9jKkdkC4zILkbhTzvQ" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate" scale="-2" id="Tc_ec5G9GuyFkytnVgjA4dFig_4_3">0</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_pure_60KFN_p23EC7YcClApV5TA" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_AwardTypeAxis_veco_PerformanceShareUnitsMarketConditionsMember_VN3skmDmUUSUqmk9Q7ISnA" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate" scale="-2" id="Tc_siIHyi3hbkiYUOplHl_H7g_4_6">0</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_pure_60KFN_p23EC7YcClApV5TA" contextRef="Duration_1_1_2019_To_12_31_2019_us-gaap_AwardTypeAxis_veco_PerformanceShareUnitsMarketConditionsMember_caWddgkI6E698AR1Llx39g" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate" scale="-2" id="Tc_-Tkejjhy002KszuHf7Cf7A_4_9">0</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td></tr><tr><td style="vertical-align:bottom;width:67.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Expected volatility factor<sup style="font-family:'Calibri','Helvetica','sans-serif';font-size:8.25pt;line-height:100%;top:0pt;vertical-align:top;">(1)</sup></p></td><td style="vertical-align:bottom;width:1.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_pure_60KFN_p23EC7YcClApV5TA" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_AwardTypeAxis_veco_PerformanceShareUnitsMarketConditionsMember_13vj9jKkdkC4zILkbhTzvQ" decimals="4" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsWeightedAverageVolatilityRate" scale="-2" id="Tc_BQ-XTN0BcEGaaRJPIswTnA_5_3">63</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_pure_60KFN_p23EC7YcClApV5TA" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_AwardTypeAxis_veco_PerformanceShareUnitsMarketConditionsMember_VN3skmDmUUSUqmk9Q7ISnA" decimals="4" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsWeightedAverageVolatilityRate" scale="-2" id="Tc_Zgm6XBkbIEyunmASpn39wA_5_6">60</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;width:1.72%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_pure_60KFN_p23EC7YcClApV5TA" contextRef="Duration_1_1_2019_To_12_31_2019_us-gaap_AwardTypeAxis_veco_PerformanceShareUnitsMarketConditionsMember_caWddgkI6E698AR1Llx39g" decimals="4" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsWeightedAverageVolatilityRate" scale="-2" id="Tc_k5Hc3Zr3pUCSjsXhuGfW3g_5_9">53</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td></tr></table></ix:nonNumeric></ix:continuation></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">F-33</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Veeco Instruments&#160;Inc. and Subsidiaries</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Notes to Consolidated Financial Statements (Continued)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;max-width:100%;position:relative;min-height:10.35pt;"><a id="Tc_lT6gJbaJ2UeefOaEeSzk3Q_6_0"></a><a id="Tc_CFXkxh4rOEi2jlihkUhMrw_6_4"></a><a id="Tc_QHsurGuUSU2wouEl8BGFMQ_6_7"></a><a id="Tc_2IG1BD10-kasb2Qm0pxvpA_6_10"></a><a id="Tc_vci4CRvo2kOdJZaKedWVJw_7_0"></a><a id="Tc_UgL_UMF6YU6BQ_WauGlC7g_1_2"></a><a id="Tc_BIBXH26nCkWdhoMsmXYalA_2_2"></a><a id="Tc_dB1i5uQiXEe0o8w-zyIhUg_2_5"></a><a id="Tc_g0G3uAbuP0W5GMuip6eCUQ_2_8"></a><a id="Tc_vos6XQHirUCIP94rUHUzCA_3_0"></a><a id="Tc_9uCSJ1aFf0atFw4jrGETIg_3_2"></a><a id="Tc_bf_WTw0Okk6Ib9unNy0ZXw_3_5"></a><a id="Tc_B58KPXZw3kKNCdqEmEEDsA_3_8"></a><a id="Tc_2QEShSsW5EGjF-nSZOAIhg_4_0"></a><a id="Tc_tnpDcTU9vUGqgkvG4Ee2eQ_4_4"></a><a id="Tc_IH5R70LUeUuEpERDayTgkg_4_7"></a><a id="Tc_UeTGWBv9wUWyN1OUZRcxrA_4_10"></a><a id="Tc_mbaxENz_Xke9x1RFs0sd7w_5_0"></a><a id="Tc_s_Lu6W2ic0iED0WlFV6F-w_5_4"></a><a id="Tc_87UxGUkVWEizBPkqH7JGMg_5_7"></a><a id="Tc_kMdDZy8ppUqAUtmnvqimgg_5_10"></a><a id="Tc_EHWPXLDNck-c7sauVgSPKA_6_0"></a><a id="Tc_EEJV5IBrmEids_t8Nz6V4g_6_4"></a><a id="Tc_PxJl6lfomESWtiekYZcQSA_6_7"></a><a id="Tc_Ho9Btb1T-UyRol05RtkPsg_6_10"></a><a id="Tc_rJAQBxXr0EGe856MgTCRKQ_7_0"></a><ix:continuation id="Tb_eC9sVnwayUW0ayuz_6WYMw_cont4"><ix:continuation id="Tb_0jW8lHodt0iBeAtlT7Oeeg_cont1"><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr><td style="vertical-align:bottom;width:67.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Risk-free interest rate<sup style="font-family:'Calibri','Helvetica','sans-serif';font-size:8.25pt;line-height:100%;top:0pt;vertical-align:top;">(2)</sup></p></td><td style="vertical-align:bottom;width:1.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_pure_60KFN_p23EC7YcClApV5TA" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_AwardTypeAxis_veco_PerformanceShareUnitsMarketConditionsMember_13vj9jKkdkC4zILkbhTzvQ" decimals="4" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate" scale="-2" id="Tc_FlDXynlwLEqPuzrWz1Ax3w_6_3">0.34</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_pure_60KFN_p23EC7YcClApV5TA" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_AwardTypeAxis_veco_PerformanceShareUnitsMarketConditionsMember_VN3skmDmUUSUqmk9Q7ISnA" decimals="4" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate" scale="-2" id="Tc_VC7rPQUIFEi4nQnJUaqO0Q_6_6">0.54</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_pure_60KFN_p23EC7YcClApV5TA" contextRef="Duration_1_1_2019_To_12_31_2019_us-gaap_AwardTypeAxis_veco_PerformanceShareUnitsMarketConditionsMember_caWddgkI6E698AR1Llx39g" decimals="4" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate" scale="-2" id="Tc_nfU8SJ3sCEqxG1V1BAt7Ng_6_9">2.37</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td></tr><tr><td style="vertical-align:bottom;width:67.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Expected life (in years)<sup style="font-family:'Calibri','Helvetica','sans-serif';font-size:8.25pt;line-height:100%;top:0pt;vertical-align:top;">(3)</sup></p></td><td style="vertical-align:bottom;width:1.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_AwardTypeAxis_veco_PerformanceShareUnitsMarketConditionsMember_13vj9jKkdkC4zILkbhTzvQ" format="ixt-sec:duryear" name="us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1" id="Tc_Wu9LtzncAEi8QzW0eBcTcg_7_3"><span style="font-size:10pt;"> 3.0</span></ix:nonNumeric></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><ix:nonNumeric contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_AwardTypeAxis_veco_PerformanceShareUnitsMarketConditionsMember_VN3skmDmUUSUqmk9Q7ISnA" format="ixt-sec:duryear" name="us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1" id="Tc_zDZHLSM7EEeKTL3LOj60rA_7_6"><span style="font-size:10pt;"> 3.0</span></ix:nonNumeric></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;width:1.72%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><ix:nonNumeric contextRef="Duration_1_1_2019_To_12_31_2019_us-gaap_AwardTypeAxis_veco_PerformanceShareUnitsMarketConditionsMember_caWddgkI6E698AR1Llx39g" format="ixt-sec:duryear" name="us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1" id="Tc_09NdpRuDW0Ku9c-EIjwf2w_7_9"><span style="font-size:10pt;"> 2.8</span></ix:nonNumeric></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr></table><div style="font-family:'Times New Roman','Times','serif';font-size:9.0pt;margin-bottom:0pt;margin-top:0pt;min-height:1.19em;position:relative;width:100%;"><div style="background-color:#000000;height:1pt;position:relative;top:0.6em;width:25.0%;border:none;margin:0 auto 0 0;"></div></div><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Times New Roman','Times','serif';font-size:9pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">(1)</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:9pt;font-style:normal;font-weight:normal;">Expected volatility is measured using historical daily price changes of the Company&#8217;s stock over the respective expected term.</span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Times New Roman','Times','serif';font-size:9pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">(2)</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:9pt;font-style:normal;font-weight:normal;">The risk-free rate for periods within the contractual term is based on the U.S. Treasury yield curve in effect at the time of grant.</span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Times New Roman','Times','serif';font-size:9pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">(3)</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:9pt;font-style:normal;font-weight:normal;">The expected life is the number of years the Company estimates that the awards will be outstanding prior to exercise. </span></td></tr></table></ix:continuation><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Employee Stock Purchase Plan</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">For the years ended December 31, 2021, 2020, and 2019 the Company received cash proceeds of $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_PlanNameAxis_veco_EmployeeStockPurchasePlan2016Member_eKYYF2jwTEK6g6G0g_iUxw" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:ProceedsFromIssuanceOfSharesUnderIncentiveAndShareBasedCompensationPlans" scale="6" id="Narr_Q77JWfegx0CgEgsVALKByg">3.4</ix:nonFraction> million, $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_PlanNameAxis_veco_EmployeeStockPurchasePlan2016Member_FjJYqVty4EqHVzWIJjeLyQ" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:ProceedsFromIssuanceOfSharesUnderIncentiveAndShareBasedCompensationPlans" scale="6" id="Narr_KWefSuCY6Uakkk20Y6HsPg">2.9</ix:nonFraction> million, and $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_us-gaap_PlanNameAxis_veco_EmployeeStockPurchasePlan2016Member_U9cx9mi0wkyBvVpYmbSfng" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:ProceedsFromIssuanceOfSharesUnderIncentiveAndShareBasedCompensationPlans" scale="6" id="Narr_9Ydv9q6YxkS9Rn45gmn9Zg">3.1</ix:nonFraction> million, and issued shares of <ix:nonFraction unitRef="Unit_Standard_shares_CQLzaUKOXkqvj8CNr9pzfg" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_PlanNameAxis_veco_EmployeeStockPurchasePlan2016Member_eKYYF2jwTEK6g6G0g_iUxw" decimals="INF" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans" scale="0" id="Narr_ScoKdG9Hq0OZTPm1rJCQDw">196,024</ix:nonFraction>, <ix:nonFraction unitRef="Unit_Standard_shares_CQLzaUKOXkqvj8CNr9pzfg" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_PlanNameAxis_veco_EmployeeStockPurchasePlan2016Member_FjJYqVty4EqHVzWIJjeLyQ" decimals="INF" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans" scale="0" id="Narr_BWdYTgIJd0yR0xVCD_lcww">254,703</ix:nonFraction>, and <ix:nonFraction unitRef="Unit_Standard_shares_CQLzaUKOXkqvj8CNr9pzfg" contextRef="Duration_1_1_2019_To_12_31_2019_us-gaap_PlanNameAxis_veco_EmployeeStockPurchasePlan2016Member_U9cx9mi0wkyBvVpYmbSfng" decimals="INF" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans" scale="0" id="Narr_jaA5MyREH0aVweW1DOh81A">395,941</ix:nonFraction>, respectively, under the ESPP Plan. The weighted average estimated values of employee purchase rights as well as the weighted average assumptions that were used in calculating such values during fiscal years 2021, 2020, and 2019 were based on estimates at the date of grant as follows:</p><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" name="us-gaap:ScheduleOfShareBasedPaymentAwardEmployeeStockPurchasePlanValuationAssumptionsTableTextBlock" id="Tb_1PTGysE0A0KheMyR7NqBsg" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;min-height:0.0pt;margin:0pt;"><span style="font-size:0pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:67.21%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.35%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:6.14%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:3.43%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:6.15%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:3.43%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:6.15%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:67.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:29.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Year ended December&#160;31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:67.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:7.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;width:7.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;width:7.53%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2019</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:67.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Weighted average fair value</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.35%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;width:6.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_tlsv-okr1ESmAF6EktRdIg" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_PlanNameAxis_veco_EmployeeStockPurchasePlan2016Member_eKYYF2jwTEK6g6G0g_iUxw" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue" scale="0" id="Tc_ze5ZJuon0EmnmwmXwbfxmA_3_3">5.90</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;width:6.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_tlsv-okr1ESmAF6EktRdIg" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_PlanNameAxis_veco_EmployeeStockPurchasePlan2016Member_FjJYqVty4EqHVzWIJjeLyQ" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue" scale="0" id="Tc_hpNUxs2nk064gj6N574hew_3_6">4.81</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.37%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;width:6.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_tlsv-okr1ESmAF6EktRdIg" contextRef="Duration_1_1_2019_To_12_31_2019_us-gaap_PlanNameAxis_veco_EmployeeStockPurchasePlan2016Member_U9cx9mi0wkyBvVpYmbSfng" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue" scale="0" id="Tc__2axp8yipEiX_dDpkbj3CQ_3_9">2.96</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Dividend yield</p></td><td style="vertical-align:bottom;width:1.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_pure_60KFN_p23EC7YcClApV5TA" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_PlanNameAxis_veco_EmployeeStockPurchasePlan2016Member_eKYYF2jwTEK6g6G0g_iUxw" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate" scale="-2" id="Tc_himMVnOG9UuF1f-vLXQNzQ_4_3">0</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_pure_60KFN_p23EC7YcClApV5TA" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_PlanNameAxis_veco_EmployeeStockPurchasePlan2016Member_FjJYqVty4EqHVzWIJjeLyQ" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate" scale="-2" id="Tc_J_sHYi8SlUmBwNX6oALxHQ_4_6">0</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;width:1.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_pure_60KFN_p23EC7YcClApV5TA" contextRef="Duration_1_1_2019_To_12_31_2019_us-gaap_PlanNameAxis_veco_EmployeeStockPurchasePlan2016Member_U9cx9mi0wkyBvVpYmbSfng" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate" scale="-2" id="Tc_olJIfZtehUGsGuNxnw98vQ_4_9">0</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%</p></td></tr><tr><td style="vertical-align:bottom;width:67.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Expected volatility factor<sup style="font-size:7.5pt;line-height:100%;top:0pt;vertical-align:top;">(1)</sup></p></td><td style="vertical-align:bottom;width:1.35%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times 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style="vertical-align:bottom;width:6.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_pure_60KFN_p23EC7YcClApV5TA" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_PlanNameAxis_veco_EmployeeStockPurchasePlan2016Member_FjJYqVty4EqHVzWIJjeLyQ" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsWeightedAverageVolatilityRate" scale="-2" id="Tc_wkk7gVMroky-PYeXPLMsjw_5_6">70</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;width:1.37%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_pure_60KFN_p23EC7YcClApV5TA" contextRef="Duration_1_1_2019_To_12_31_2019_us-gaap_PlanNameAxis_veco_EmployeeStockPurchasePlan2016Member_U9cx9mi0wkyBvVpYmbSfng" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsWeightedAverageVolatilityRate" scale="-2" id="Tc__IUlaSRXO0GVINEoIqElaw_5_9">60</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%</p></td></tr><tr><td style="vertical-align:bottom;width:67.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Risk-free interest rate<sup style="font-size:7.5pt;line-height:100%;top:0pt;vertical-align:top;">(2)</sup></p></td><td style="vertical-align:bottom;width:1.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_pure_60KFN_p23EC7YcClApV5TA" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_PlanNameAxis_veco_EmployeeStockPurchasePlan2016Member_eKYYF2jwTEK6g6G0g_iUxw" decimals="4" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate" scale="-2" id="Tc_ET7yVi1eG0uw22qZhK-JkQ_6_3">0.07</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_pure_60KFN_p23EC7YcClApV5TA" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_PlanNameAxis_veco_EmployeeStockPurchasePlan2016Member_FjJYqVty4EqHVzWIJjeLyQ" decimals="4" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate" scale="-2" id="Tc_EVrC0coZEEKxkJSPEjzDpQ_6_6">0.95</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;width:1.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_pure_60KFN_p23EC7YcClApV5TA" contextRef="Duration_1_1_2019_To_12_31_2019_us-gaap_PlanNameAxis_veco_EmployeeStockPurchasePlan2016Member_U9cx9mi0wkyBvVpYmbSfng" decimals="4" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate" scale="-2" id="Tc_O-rp30LXv0ynEIs5HX3S9Q_6_9">2.41</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%</p></td></tr><tr><td style="vertical-align:bottom;width:67.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Expected life (in years)<sup style="font-size:7.5pt;line-height:100%;top:0pt;vertical-align:top;">(3)</sup></p></td><td style="vertical-align:bottom;width:1.35%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_PlanNameAxis_veco_EmployeeStockPurchasePlan2016Member_eKYYF2jwTEK6g6G0g_iUxw" format="ixt-sec:duryear" name="us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1" id="Tc_p2s8S04sZkiCbfO7UMZvow_7_3"><span style="font-size:10pt;"> 0.5</span></ix:nonNumeric></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><ix:nonNumeric contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_PlanNameAxis_veco_EmployeeStockPurchasePlan2016Member_FjJYqVty4EqHVzWIJjeLyQ" format="ixt-sec:duryear" name="us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1" id="Tc_OqCuuvcxnE25tZ1Ns2UmWQ_7_6"><span style="font-size:10pt;"> 0.5</span></ix:nonNumeric></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;width:1.37%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><ix:nonNumeric 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During the second quarter of 2020, the Company completed the sale of this product line for approximately </span><span style="font-size:10pt;">$<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_6_30_2020_us-gaap_DisposalGroupClassificationAxis_us-gaap_DisposalGroupDisposedOfBySaleNotDiscontinuedOperationsMember_us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsAxis_veco_OneNonCoreProductLineMember_1W_Sk4RRp0y9FYxrPesEPA" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:DisposalGroupIncludingDiscontinuedOperationConsideration" scale="6" id="Narr_WusmUe52PUS9ocG-FHkOIg">11.4</ix:nonFraction></span><span style="font-size:10pt;"> million, with approximately </span><span style="font-size:10pt;"><ix:nonFraction unitRef="Unit_Standard_pure_60KFN_p23EC7YcClApV5TA" contextRef="Duration_4_1_2020_To_6_30_2020_us-gaap_DisposalGroupClassificationAxis_us-gaap_DisposalGroupDisposedOfBySaleNotDiscontinuedOperationsMember_us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsAxis_veco_OneNonCoreProductLineMember_E_Hoa4TLYUeFEyooKL-HCA" decimals="2" format="ixt:numdotdecimal" name="veco:PercentageOfTransactionPrice" scale="-2" id="Narr_dgkIcGkJ8UGWXWBMO3LuTA">85</ix:nonFraction>%</span><span style="font-size:10pt;"> of the transaction price received upon closing, and </span><span style="font-size:10pt;"><ix:nonFraction unitRef="Unit_Standard_pure_60KFN_p23EC7YcClApV5TA" contextRef="Duration_4_1_2020_To_6_30_2020_us-gaap_DisposalGroupClassificationAxis_us-gaap_DisposalGroupDisposedOfBySaleNotDiscontinuedOperationsMember_us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsAxis_veco_OneNonCoreProductLineMember_E_Hoa4TLYUeFEyooKL-HCA" decimals="2" format="ixt:numdotdecimal" name="veco:PercentageOfAmountHeldInEscrow" scale="-2" id="Narr_T3C61hbMrkmeOsLRdpFndg">15</ix:nonFraction>%</span><span style="font-size:10pt;"> held in escrow for a period of </span><ix:nonNumeric contextRef="Duration_4_1_2020_To_6_30_2020_us-gaap_DisposalGroupClassificationAxis_us-gaap_DisposalGroupDisposedOfBySaleNotDiscontinuedOperationsMember_us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsAxis_veco_OneNonCoreProductLineMember_E_Hoa4TLYUeFEyooKL-HCA" format="ixt-sec:durwordsen" name="veco:TermOfAmountToBeHeldInEscrow" id="Narr_bPwtx-kCJkeadinVhrJ-hg"><span style="font-size:10pt;">18 months</span></ix:nonNumeric><span style="font-size:10pt;"> and included within &#8220;Prepaid expenses and other current assets&#8221; in the Consolidated Balance Sheet as of December 31, 2020 and subsequently collected in 2021. Long-lived assets and definite-lived intangible assets were not depreciated or amortized while classified as held for sale. The sale of this disposal group did not represent a strategic shift that will have a material effect on the Company&#8217;s operations and financial results, nor is it considered a component of the Company, and as such it did not meet the criteria to be reported as discontinued operations. </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">For the year ended December 31, 2019, the Company recorded a non-cash impairment charge on these assets held for sale of $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_us-gaap_DisposalGroupClassificationAxis_us-gaap_DisposalGroupHeldforsaleNotDiscontinuedOperationsMember_us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsAxis_veco_OneNonCoreProductLineMember_4mBXnVd5skWSFKyoDQXvfQ" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:AssetImpairmentCharges" scale="6" id="Narr_PUG7NjQI80-Pej5CxSCWhA">4.0</ix:nonFraction> million, included in &#8220;Asset impairment&#8221; in the Consolidated Statements of Operations, in order to measure the disposal group at the lower of its carrying value or fair value less costs to sell, which resulted in a corresponding held </p></ix:nonNumeric></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">F-34</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Veeco Instruments&#160;Inc. and Subsidiaries</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Notes to Consolidated Financial Statements (Continued)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;max-width:100%;position:relative;"><a id="Tc_WYzGamgGSEqyCXMfO3b68w_2_0"></a><a id="Tc_HSE1fLZLmU6QL3KyTpSvwg_2_2"></a><a id="Tc_ZXecN9FBFkyG8a2XE3gXwA_3_0"></a><a id="Tc_lLCKcuBApk2p_XJRHEDUtw_3_2"></a><a id="Tc_iI5rTnJ-wkSAMUKbQxly7g_4_0"></a><a id="Tc_A8vPqyLLkUi4t5K9TYwdMg_5_0"></a><a id="Tc_waVi0xx0VEivAcbcEzKzVQ_6_0"></a><a id="Tc_Ra1jX8qxvky_QqSB5HWj5A_7_0"></a><a id="Tc_9zdC5vx-pUmGDmJv892IOg_8_0"></a><a id="Tc_0K6zMD6Ysk6GbePlH_Uxog_8_2"></a><a id="Tc_cp6xsuDZnkSXo3iQkH-HwA_9_0"></a><a id="Tc_XgV71ajgyU6n5eaOQxthqw_10_0"></a><a id="Tc_ApMcve2a60qW-90aRHohXg_10_2"></a><ix:continuation id="Tb_M89jzWXqX0uhCC_7NaJJ6Q_cont1"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">for sale valuation allowance on its assets held for sale in the Consolidated Balance Sheet. During the second quarter of 2020, the Company recorded additional impairment charges of $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_4_1_2020_To_6_30_2020_us-gaap_DisposalGroupClassificationAxis_us-gaap_DisposalGroupDisposedOfBySaleNotDiscontinuedOperationsMember_us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsAxis_veco_OneNonCoreProductLineMember_E_Hoa4TLYUeFEyooKL-HCA" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:AssetImpairmentCharges" scale="6" id="Narr_YDq4nJcXw0mTg-rKOR27AA">0.3</ix:nonFraction>&#160;million related to the finalization of the sale of this disposal group.&#160;</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The major classes of assets that were sold are as follows:</p><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" name="us-gaap:ScheduleOfDisposalGroupsIncludingDiscontinuedOperationsIncomeStatementBalanceSheetAndAdditionalDisclosuresTextBlock" id="Tb_BTzHQwUGUE-9PXw8jYMsyQ" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;min-height:0.0pt;margin:0pt;"><span style="font-size:0pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:85.52%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:80.53%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.05%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:14.02%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:80.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:80.53%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Net assets sold:</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';">&#160;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:16.08%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td></tr><tr><td style="vertical-align:top;width:80.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Inventories</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_us-gaap_DisposalGroupClassificationAxis_us-gaap_DisposalGroupDisposedOfBySaleNotDiscontinuedOperationsMember_us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsAxis_veco_OneNonCoreProductLineMember_p85DBSGOOkuOfaxrpEjwgQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DisposalGroupIncludingDiscontinuedOperationInventory1" scale="3" id="Tc_uyNEb6EsI0awW8b6tNGbUg_3_3">6,311</ix:nonFraction></p></td></tr><tr><td style="vertical-align:top;width:80.53%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Property, plant, and equipment, net</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_us-gaap_DisposalGroupClassificationAxis_us-gaap_DisposalGroupDisposedOfBySaleNotDiscontinuedOperationsMember_us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsAxis_veco_OneNonCoreProductLineMember_p85DBSGOOkuOfaxrpEjwgQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DisposalGroupIncludingDiscontinuedOperationPropertyPlantAndEquipment" scale="3" id="Tc_2Hu2ZMPgVkKy14m1Yf5ROg_4_3">372</ix:nonFraction></p></td></tr><tr><td style="vertical-align:top;width:80.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Intangible assets, net</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_us-gaap_DisposalGroupClassificationAxis_us-gaap_DisposalGroupDisposedOfBySaleNotDiscontinuedOperationsMember_us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsAxis_veco_OneNonCoreProductLineMember_p85DBSGOOkuOfaxrpEjwgQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DisposalGroupIncludingDiscontinuedOperationIntangibleAssets" scale="3" id="Tc_sL6oQ0jwhE2yeFOFEpEtgg_5_3">6,546</ix:nonFraction></p></td></tr><tr><td style="vertical-align:top;width:80.53%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Goodwill</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_us-gaap_DisposalGroupClassificationAxis_us-gaap_DisposalGroupDisposedOfBySaleNotDiscontinuedOperationsMember_us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsAxis_veco_OneNonCoreProductLineMember_p85DBSGOOkuOfaxrpEjwgQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DisposalGroupIncludingDiscontinuedOperationGoodwill1" scale="3" id="Tc_BjLSZS-GhkekwxYzf-D2cg_6_3">2,359</ix:nonFraction></p></td></tr><tr><td style="vertical-align:top;width:80.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Deferred revenue</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.05%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.02%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_us-gaap_DisposalGroupClassificationAxis_us-gaap_DisposalGroupDisposedOfBySaleNotDiscontinuedOperationsMember_us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsAxis_veco_OneNonCoreProductLineMember_p85DBSGOOkuOfaxrpEjwgQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DisposalGroupIncludingDiscontinuedOperationDeferredRevenue" scale="3" id="Tc_iURtFR5knkqR0-86q80WDQ_7_3">59</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:top;width:80.53%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;white-space:pre-wrap;">    Total net assets sold</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_us-gaap_DisposalGroupClassificationAxis_us-gaap_DisposalGroupDisposedOfBySaleNotDiscontinuedOperationsMember_us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsAxis_veco_OneNonCoreProductLineMember_p85DBSGOOkuOfaxrpEjwgQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AssetsOfDisposalGroupIncludingDiscontinuedOperation" scale="3" id="Tc_K-DPul3z6ECZ5iQ6h44qOQ_8_3">15,529</ix:nonFraction></p></td></tr><tr><td style="vertical-align:top;width:80.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Net proceeds after costs to sell</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.05%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.02%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_us-gaap_DisposalGroupClassificationAxis_us-gaap_DisposalGroupDisposedOfBySaleNotDiscontinuedOperationsMember_us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsAxis_veco_OneNonCoreProductLineMember_p85DBSGOOkuOfaxrpEjwgQ" decimals="-3" format="ixt:numdotdecimal" name="veco:DisposalGroupIncludingDiscontinuedOperationConsiderationNet" scale="3" id="Tc__Hwvem6qsEWtzHpiDJOSsA_9_3">11,228</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:top;width:80.53%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;white-space:pre-wrap;">    Total impairment on sale of disposal group</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.05%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.02%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2020_us-gaap_DisposalGroupClassificationAxis_us-gaap_DisposalGroupDisposedOfBySaleNotDiscontinuedOperationsMember_us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsAxis_veco_OneNonCoreProductLineMember_dljekOvvREiGqVRcX0nVCQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DisposalGroupNotDiscontinuedOperationLossGainOnWriteDown" scale="3" id="Tc_wyf-se-hwUa_rvwixCmeWQ_10_3">4,301</ix:nonFraction></p></td></tr></table></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></ix:continuation><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><a id="Tc_NytsmCN3EkK8cgMqj6kCew_1_2"></a><a id="Tc_r4xPwx6QHEKxAMK_MQP9Nw_2_2"></a><a id="Tc_ssv-m_jcBkScJWEpVgKQNQ_2_5"></a><a id="Tc_R9t95csFhU-31uQMOHH5Lw_2_8"></a><a id="Tc_n3JjfQLwzUyLDbM2ArH2aQ_3_2"></a><a id="Tc_eYTJqrxWjkecQpYIO5hTbA_4_0"></a><a id="Tc_IOIyzjTuRkOp6w5UEL7pgw_4_2"></a><a id="Tc_Sdx-0Bu9AkinUrVmK4rZSg_4_5"></a><a id="Tc_ouLUAAEuW0ugQEHpa1FuHA_4_8"></a><a id="Tc_0n8dKMtXA0StD2MfFeLUKg_5_0"></a><a id="Tc_85W_krU6ZUizLPWGAfLr9Q_6_0"></a><a id="Tc_RWYlXvLrcEGMrWc4AhZ4HA_6_2"></a><a id="Tc_-ZdNcYQJekedf9VJtJ8wGA_6_5"></a><a id="Tc_-iu7u5htBEG8D8XttnKepA_6_8"></a><a id="Tc_eBUAwUvnwkaodq5mzGHmRQ_1_2"></a><a id="Tc_nBok8nXwMkWggYRbzzYAFA_2_2"></a><a id="Tc_y3a7KGs6XUifAfNMWJhuCA_2_5"></a><a id="Tc_zg_uyLb2q0qKCYqSIlODMQ_2_8"></a><a id="Tc_TnB1MKyxMUafk6WgvG5Sgg_3_2"></a><a id="Tc_tGinJ8pPYUCz8msZTMSljQ_4_0"></a><a id="Tc_43gq28W6w0uFmNb6F9QGZQ_5_0"></a><a id="Tc_3EGAe9eewE-whSOVSf0RVA_5_2"></a><a id="Tc_c9UqG_qlv0isgJg3RY8rrw_5_3"></a><a id="Tc_KGdU12z9PkeOnmxMuSkVSQ_5_5"></a><a id="Tc_0kpJ8FnNqE-s4gqfyWWPmg_5_6"></a><a id="Tc_ZY1offFR5k-OLmRsNu18ag_5_8"></a><a id="Tc_avel7KUHU0i_1SCQT0nXMQ_5_9"></a><a id="Tc_ocLdlvziaU2qe4MXeQlvVw_6_0"></a><a id="Tc_8dOTIxztFkiVk5QhL5lkFA_7_0"></a><a id="Tc_XAc1pW2lr0Kht_gtHlhncQ_8_0"></a><a id="Tc_cXqJIBQSA0ynuFW9xaadqA_9_0"></a><a id="Tc_zC8VO96X6EiZANa0d4441A_10_0"></a><a id="Tc_8hcjZQC71EGZ391vFqbWNA_11_0"></a><a id="Tc_SELTtKA3XUCiLpLip2MsUA_12_0"></a><a id="Tc_u8g5El2QbE2vM4KdO3JLSQ_13_0"></a><a id="Tc_kwDCDTvxjEGJ5nXoNSaNlg_14_0"></a><a id="Tc_LNHaKeTOnUypJa8tBQwBaw_14_2"></a><a id="Tc_0GNKCsVCkEqQ1POtLkl7Ew_14_5"></a><a id="Tc_2GdMP_-V-0Se9wcMjveLMQ_14_8"></a><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" name="us-gaap:IncomeTaxDisclosureTextBlock" id="Tb_hP3MUG3gOE6N7pz9Oh1ATw" continuedAt="Tb_hP3MUG3gOE6N7pz9Oh1ATw_cont1" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note 16 &#8212; Income Taxes </b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The amounts of income (loss) before income taxes attributable to domestic and foreign operations were as follows:</p><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" name="us-gaap:ScheduleOfIncomeBeforeIncomeTaxDomesticAndForeignTableTextBlock" id="Tb_1Gsrr9Ti5kmxUaflejltKg" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:62.38%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.45%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.45%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:62.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:35.55%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Year ended December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:62.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.95%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2019</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="10" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:62.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:35.55%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:62.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Domestic</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic" scale="3" id="Tc_vkYfOFGKNUipyyFMq0FxKw_4_3">23,561</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_irQajVZIkUmgjCJ-cxJ5AQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic" sign="-" scale="3" id="Tc_R3YfKNufB0a1En3VVNSLJg_4_6">10,292</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_ssAGFj6EXEiYqEtVZlyqxA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic" sign="-" scale="3" id="Tc_yIH_bZuGeUS8eHxkzhgn9g_4_9">78,486</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:bottom;width:62.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Foreign</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesForeign" scale="3" id="Tc_LYW3YIAouUOZRuvdqU6iMw_5_3">2,119</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.45%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_irQajVZIkUmgjCJ-cxJ5AQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesForeign" scale="3" id="Tc_RH9VN7IYK0CjOKYP6y-4wg_5_6">1,828</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.45%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_ssAGFj6EXEiYqEtVZlyqxA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesForeign" scale="3" id="Tc_IeDyuaNtVEiyio0UvgMw8A_5_9">530</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:62.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Total</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest" scale="3" id="Tc_Q7fOqT7gNEmvc9nl0QsdJg_6_3">25,680</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.45%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_irQajVZIkUmgjCJ-cxJ5AQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest" sign="-" scale="3" id="Tc_vLxj7wcHVE6ioYeGsOVaOQ_6_6">8,464</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.45%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_ssAGFj6EXEiYqEtVZlyqxA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest" sign="-" scale="3" id="Tc_-dF6OaZleUWbBU1GNI_uGg_6_9">77,956</ix:nonFraction>)</p></td></tr></table></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Significant components of the expense (benefit) for income taxes consisted of the following:</p><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" name="us-gaap:ScheduleOfComponentsOfIncomeTaxExpenseBenefitTableTextBlock" id="Tb_1W4l_6I55E2uJWcsKHyhqg" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:69.23%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.89%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:69.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:28.7%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Year ended December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:69.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.17%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.19%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.21%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2019</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="10" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:69.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:28.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:69.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Current:</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.89%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Federal</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td></tr><tr><td style="vertical-align:bottom;width:69.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Foreign</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.89%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CurrentForeignTaxExpenseBenefit" scale="3" id="Tc_WUxO3RYMHUCDZWRrFsBBIA_6_3">183</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_irQajVZIkUmgjCJ-cxJ5AQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CurrentForeignTaxExpenseBenefit" scale="3" id="Tc_Eg7RZrYxRUmvSqev6SkOZw_6_6">22</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_ssAGFj6EXEiYqEtVZlyqxA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CurrentForeignTaxExpenseBenefit" scale="3" id="Tc_R2OUYX4A50KyWW-gPSdlLQ_6_9">304</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:69.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">State and local</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CurrentStateAndLocalTaxExpenseBenefit" scale="3" id="Tc_ZI3Airc4CkGB5Opt_U1o6w_7_3">110</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_irQajVZIkUmgjCJ-cxJ5AQ" decimals="-3" 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Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_irQajVZIkUmgjCJ-cxJ5AQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CurrentIncomeTaxExpenseBenefit" scale="3" id="Tc_AHrZFgYql0-vq-ygMoY8GA_8_6">226</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid 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Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Federal</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.89%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredFederalIncomeTaxExpenseBenefit" scale="3" id="Tc_sfOCO1eFvUKXPr4RVevObQ_10_3">119</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_irQajVZIkUmgjCJ-cxJ5AQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredFederalIncomeTaxExpenseBenefit" scale="3" id="Tc_sWLNSirD0U6woNBKhQdwbw_10_6">136</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_ssAGFj6EXEiYqEtVZlyqxA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredFederalIncomeTaxExpenseBenefit" scale="3" id="Tc_0iEAgrHT60-UN69b-HwLVA_10_9">162</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:69.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Foreign</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredForeignIncomeTaxExpenseBenefit" sign="-" scale="3" id="Tc_NvWvROGVekauXzlV11p3Jg_11_3">507</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_irQajVZIkUmgjCJ-cxJ5AQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredForeignIncomeTaxExpenseBenefit" sign="-" scale="3" id="Tc_iFb2u6mAwE-G2RqSe0sj7w_11_6">320</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_ssAGFj6EXEiYqEtVZlyqxA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredForeignIncomeTaxExpenseBenefit" scale="3" id="Tc_l62atWs8nEW9x7aRUK7CQQ_11_9">116</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:69.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">State and local</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.89%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredStateAndLocalIncomeTaxExpenseBenefit" sign="-" scale="3" id="Tc_QUCw9nAuVkmCbDkGqJk6GA_12_3">263</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_irQajVZIkUmgjCJ-cxJ5AQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredStateAndLocalIncomeTaxExpenseBenefit" sign="-" scale="3" id="Tc_uLXeOWlUukmtbE3AnWCh6A_12_6">115</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_ssAGFj6EXEiYqEtVZlyqxA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredStateAndLocalIncomeTaxExpenseBenefit" scale="3" 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(<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredIncomeTaxExpenseBenefit" sign="-" scale="3" id="Tc_K2fKtxzl5USVRcQm490OZw_13_3">651</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_irQajVZIkUmgjCJ-cxJ5AQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredIncomeTaxExpenseBenefit" sign="-" scale="3" id="Tc_JtRFaBSlyUihsL8-vvhFmA_13_6">299</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_ssAGFj6EXEiYqEtVZlyqxA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredIncomeTaxExpenseBenefit" scale="3" id="Tc_kB4Q1IgWhkqj85f8-GCTng_13_9">360</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:69.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Total expense (benefit) for income taxes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.89%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxExpenseBenefit" sign="-" scale="3" id="Tc_fFipW7TbUkGBAzTRA1jK3A_14_3">358</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_irQajVZIkUmgjCJ-cxJ5AQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxExpenseBenefit" sign="-" scale="3" id="Tc_s5UNPT68D02Z0EJCaM-qUQ_14_6">73</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_ssAGFj6EXEiYqEtVZlyqxA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxExpenseBenefit" scale="3" id="Tc_tA15wBtIUUOArB687hJ2kA_14_9">777</ix:nonFraction></p></td></tr></table></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></ix:nonNumeric></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">F-35</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Veeco Instruments&#160;Inc. and Subsidiaries</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Notes to Consolidated Financial Statements (Continued)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;max-width:100%;position:relative;"><a id="Tc_N1riP3hGyUappnuRaE1PMg_1_2"></a><a id="Tc_PTP9cf1RTEaTeIm-Mf-tsw_2_2"></a><a id="Tc_7wE0jKSLDUG_mHbpr5681w_2_5"></a><a id="Tc_2Fid-tAvS0G7ooErJ6tb2w_2_8"></a><a id="Tc_mCJzOaQic02ny_1rANwvcQ_3_2"></a><a id="Tc_T8QSYHs-zEKIU9qx3LNvdQ_4_0"></a><a id="Tc_DoHl0O32jkqnTADu2ZobQQ_4_2"></a><a id="Tc_kKdnJ6SiOkKKZ9xM6LgQrw_4_5"></a><a id="Tc_DY_b-BNtcU-NoIcl4QBqPg_4_8"></a><a id="Tc_gRKBc8l6NUekl5Sq4isbgg_5_0"></a><a id="Tc_e4urtrvBx02Tqvo7jhEZCw_6_0"></a><a id="Tc_xSe_3gXebE2SPJcbGa1XVA_7_0"></a><a id="Tc_v5madpAYrkSrhWK5dJQ7RQ_8_0"></a><a id="Tc_WyHy4M7QAEeK5WNxUWYkuQ_9_0"></a><a id="Tc_ziEPy_oFrUSyfMDKLffbdw_10_0"></a><a id="Tc_BO_rYDu0lEi9NbX_MYz5Bg_11_0"></a><a id="Tc_zNIdG08nEEKVCsH6_kUdvw_11_3"></a><a id="Tc_46MC-GkJrkWtwm9B7CiEjQ_12_0"></a><a id="Tc_VbqIg5ThCE-pvwBBFIb5XQ_12_9"></a><a id="Tc_SsAYB8TdzEqIsfHN-PRBtQ_13_0"></a><a id="Tc_M04Vymi4cUagQMY7230p6A_14_0"></a><a id="Tc_elRWck_PFESVll6gWeewHg_14_2"></a><a id="Tc_jFjHNXZPwkOGObnonanLaw_14_5"></a><a id="Tc_HN0pqAiJykKtzb_iBqkF1Q_14_8"></a><a id="Tc_B6ZJL2SEA0abd_PeejFiVA_1_2"></a><a id="Tc_Mravu9Wk8Eqj0g-UAs0mxA_2_2"></a><a id="Tc_KGy-QbyfWk6jLhyPdNdoDg_2_5"></a><a id="Tc_v4bzXJfyBkuQXrD4SGB4Qg_3_2"></a><a id="Tc_jAMbxR6zREy0Q9M9ebZkag_4_0"></a><a id="Tc_WRSxsD1nrEeigeeUUwZiPg_5_0"></a><a id="Tc_91S2QHbI7kawovbXtohJAQ_5_2"></a><a id="Tc_yMXtqMqKyUKX2uNBJnY1kw_5_5"></a><a id="Tc_sqDf4zAH8k-7tHWl38hXBw_6_0"></a><a id="Tc_XtO1VEhn1Ea-Lw699n1WPQ_7_0"></a><a id="Tc_weiOrbqAUEq13Yk1VzwYNw_8_0"></a><a id="Tc_66N8E3-TdEGx50zGHP1R-Q_9_0"></a><a id="Tc_sNk4CFPMwUOqcZB9haDjVA_10_0"></a><a id="Tc_St6hAIw6YkCeltRa1VQ2EQ_11_0"></a><a id="Tc_ZXBVzVuu8EKcDkVjPBUaJg_12_0"></a><a id="Tc_62BKaJPTdUWb4MYkRAJFHQ_13_0"></a><a id="Tc_zAMta3QXE0WA0MYCtGaFWw_14_0"></a><a id="Tc_D_k0L0nLikeQhTsnNFm31Q_15_0"></a><a id="Tc_5GI_wBX4KEWKZRFXXI1spA_17_0"></a><a id="Tc_XStUjrVZzky9pahrjS_gPQ_18_0"></a><a id="Tc_XkSN3cXOSUOcGAKzRGSjiw_19_0"></a><a id="Tc_GCnCbWMBXEqKjiIY5hG2SA_20_0"></a><a id="Tc_MNuTYm-6p0u_TfhfIxGtdQ_21_0"></a><a id="Tc_aUItUS0ym0m-FhoxuwZJMQ_22_0"></a><a id="Tc_L7LrsH5u-UCxc_1FsIRi6A_23_0"></a><a id="Tc_roKmpzOK6UGP61v5N8hzsw_23_2"></a><a id="Tc_ab3UlFUorEmMxiAAPe75Ew_23_5"></a><ix:continuation id="Tb_hP3MUG3gOE6N7pz9Oh1ATw_cont1" continuedAt="Tb_hP3MUG3gOE6N7pz9Oh1ATw_cont2"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The income tax expense (benefit) was reconciled to the tax expense computed at the U.S. federal statutory tax rate as follows:</p><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" name="us-gaap:ScheduleOfEffectiveIncomeTaxRateReconciliationTableTextBlock" id="Tb_nu5e-nf2_k-Oyni2ctHhDQ" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;min-height:0.0pt;margin:0pt;"><span style="font-size:0pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"><tr style="height:1pt;"><td style="vertical-align:middle;width:64.17%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:50%;transform:translate(0,-50%);width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.45%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:64.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:33.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Year ended December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:64.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.45%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.45%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2019</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="10" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:64.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:33.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:middle;width:64.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Income tax expense (benefit) at U.S. statutory rates</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="-3" format="ixt:numdotdecimal" 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style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="-3" format="ixt:numdotdecimal" name="veco:IncomeTaxReconciliationChangeInAccrualForUnrecognizedTaxBenefits" sign="-" scale="3" id="Tc_alVth__L4E-Kf_u-VYJTVA_9_3">398</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td 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style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_ssAGFj6EXEiYqEtVZlyqxA" decimals="-3" format="ixt:numdotdecimal" name="veco:IncomeTaxReconciliationChangeInAccrualForUnrecognizedTaxBenefits" sign="-" scale="3" id="Tc_1TokcCVwfEi-UQTUcr3izQ_9_9">1,232</ix:nonFraction></p></td></tr><tr><td style="vertical-align:middle;width:64.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Share-based compensation</p></td><td 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name="us-gaap:IncomeTaxReconciliationNondeductibleExpenseShareBasedCompensationCost" scale="3" id="Tc_TtbqLg90a0WAXBFjHYnUvg_10_3">1,208</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_irQajVZIkUmgjCJ-cxJ5AQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxReconciliationNondeductibleExpenseShareBasedCompensationCost" scale="3" id="Tc_RAz60b2EakOhdSn8-m-8RA_10_6">2,248</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_ssAGFj6EXEiYqEtVZlyqxA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxReconciliationNondeductibleExpenseShareBasedCompensationCost" scale="3" id="Tc_l3FexTNwx06oSfvcPDkkaQ_10_9">1,947</ix:nonFraction></p></td></tr><tr><td style="vertical-align:middle;width:64.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Asset impairment</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_irQajVZIkUmgjCJ-cxJ5AQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxReconciliationNondeductibleExpenseImpairmentLosses" scale="3" id="Tc_1KJP7eOHkkOW7jk-cOej4Q_11_6">728</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_ssAGFj6EXEiYqEtVZlyqxA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxReconciliationNondeductibleExpenseImpairmentLosses" scale="3" id="Tc_c7GtvqCDaUG4glYWHmJ1-Q_11_9">495</ix:nonFraction></p></td></tr><tr><td style="vertical-align:middle;width:64.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Partial extinguishment of 2023 Notes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="-3" format="ixt:numdotdecimal" name="veco:EffectiveIncomeTaxRateReconciliationPartialExtinguishmentOfDebtAmount" sign="-" scale="3" id="Tc_as80grwYe06pjW-YMtGUZg_12_3">1,090</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_irQajVZIkUmgjCJ-cxJ5AQ" decimals="-3" format="ixt:numdotdecimal" name="veco:EffectiveIncomeTaxRateReconciliationPartialExtinguishmentOfDebtAmount" sign="-" scale="3" id="Tc_hIPKujLX1UCJFSdBR82ukA_12_6">2,292</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td></tr><tr><td style="vertical-align:middle;width:64.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Other</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxReconciliationOtherAdjustments" scale="3" id="Tc_tSuaPSjntEG8NkkDTXztug_13_3">84</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_irQajVZIkUmgjCJ-cxJ5AQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxReconciliationOtherAdjustments" scale="3" id="Tc_hZfNhpOCXUSq0sQP27iOaQ_13_6">164</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.45%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_ssAGFj6EXEiYqEtVZlyqxA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxReconciliationOtherAdjustments" scale="3" id="Tc_N7VL0-BNhkG5jFO8xLg2ZQ_13_9">143</ix:nonFraction></p></td></tr><tr><td style="vertical-align:middle;width:64.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Total expense (benefit) for income taxes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxExpenseBenefit" sign="-" scale="3" id="Tc_6xqA1W4dEU-0hQREJMiiBQ_14_3">358</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_irQajVZIkUmgjCJ-cxJ5AQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxExpenseBenefit" sign="-" scale="3" id="Tc_ckqYqWLozUmNwo3wQvLyvw_14_6">73</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.45%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_ssAGFj6EXEiYqEtVZlyqxA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxExpenseBenefit" scale="3" id="Tc_3v1gDlIyuU2FYxM69-h0ZQ_14_9">777</ix:nonFraction></p></td></tr></table></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Deferred income taxes reflect the effect of temporary differences between the carrying amounts of assets and liabilities recognized for financial reporting purposes and the amounts recognized for tax purposes. The tax effects of the temporary differences were as follows:</p><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" name="us-gaap:ScheduleOfDeferredTaxAssetsAndLiabilitiesTableTextBlock" id="Tb_J8OXsoNZ5UyEYwo6oWRSsQ" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;min-height:0.0pt;margin:0pt;"><span style="font-size:0pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"><tr style="height:1pt;"><td style="vertical-align:middle;width:71.8%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:50%;transform:translate(0,-50%);width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:71.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:26.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:71.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.02%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.04%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="7" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:71.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:26.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td></tr><tr><td style="vertical-align:middle;width:71.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Deferred tax assets:&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:middle;width:71.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Inventory valuation</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredTaxAssetsInventory" scale="3" id="Tc_OMA9drGvO0uS0icMv60EBg_5_3">11,822</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredTaxAssetsInventory" scale="3" id="Tc_wYGHwAQVb0ixRRRrI9mF4w_5_6">10,949</ix:nonFraction></p></td></tr><tr><td style="vertical-align:middle;width:71.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Net operating losses</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredTaxAssetsOperatingLossCarryforwards" scale="3" id="Tc_GPx2n-hJ7kSkgxQCT6GX_w_6_3">38,816</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredTaxAssetsOperatingLossCarryforwards" scale="3" id="Tc_TFZmerDYRkm7t32SgJ08fg_6_6">51,260</ix:nonFraction></p></td></tr><tr><td style="vertical-align:middle;width:71.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Credit carry forwards</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredTaxAssetsTaxCreditCarryforwards" scale="3" id="Tc_NWPzBfARq06toaVrtnfq4w_7_3">57,810</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredTaxAssetsTaxCreditCarryforwards" scale="3" id="Tc_GjUxGdd3KUyWOX8G1laD8Q_7_6">54,160</ix:nonFraction></p></td></tr><tr><td style="vertical-align:middle;width:71.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Warranty and installation accruals</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReserves" scale="3" id="Tc_5abTswENdUmu7Ix5MTo3fg_8_3">1,730</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReserves" scale="3" id="Tc_4b8tLwJVbE6G2bXhVKi0Vg_8_6">1,045</ix:nonFraction></p></td></tr><tr><td style="vertical-align:middle;width:71.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Share-based compensation</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsShareBasedCompensationCost" scale="3" id="Tc_Kbf3NJYiSU2sWSHWsdfQsg_9_3">4,033</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsShareBasedCompensationCost" scale="3" id="Tc_obGPp7fxzEiWxiWCbAefIg_9_6">4,587</ix:nonFraction></p></td></tr><tr><td style="vertical-align:middle;width:71.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Customer deposits and deferred revenue</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredTaxAssetsDeferredIncome" scale="3" id="Tc_hCxaxd-Iz0GBARGc2a1QjA_10_3">9,908</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredTaxAssetsDeferredIncome" scale="3" id="Tc_UFsJyiZDbE6gPUDoZoVnMg_10_6">10,982</ix:nonFraction></p></td></tr><tr><td style="vertical-align:middle;width:71.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Operating leases</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="veco:DeferredTaxAssetsOperatingLeases" scale="3" id="Tc_RUvgna5elESHJye2lMaDPQ_11_3">8,464</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-3" format="ixt:numdotdecimal" name="veco:DeferredTaxAssetsOperatingLeases" scale="3" id="Tc_JtUppNcNuU2z1KAP0rAtdQ_11_6">2,281</ix:nonFraction></p></td></tr><tr><td style="vertical-align:middle;width:71.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Other</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredTaxAssetsOther" scale="3" id="Tc_ibYYvOXxjEK2-4_ZtIPx7w_12_3">5,880</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredTaxAssetsOther" scale="3" id="Tc_HVG6halqhUW9ufRkGLPZkw_12_6">4,741</ix:nonFraction></p></td></tr><tr><td style="vertical-align:middle;width:71.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Total deferred tax assets</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredTaxAssetsGross" scale="3" id="Tc_D3vgLAL0lkyS_XsyGzOaQQ_13_3">138,463</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredTaxAssetsGross" scale="3" id="Tc_2Wio6VYSQkGi1d_4xkstDQ_13_6">140,005</ix:nonFraction></p></td></tr><tr><td style="vertical-align:middle;width:71.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Valuation allowance</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredTaxAssetsValuationAllowance" scale="3" id="Tc_utnw8u1q8kCfoDcwJXFvBw_14_3">116,054</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredTaxAssetsValuationAllowance" scale="3" id="Tc_pk4VaAjX9UOrthFumwnjyA_14_6">118,443</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:middle;width:71.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Net deferred tax assets</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredTaxAssetsNet" scale="3" id="Tc_l0OR98LanEOn3Z_DKeAXLg_15_3">22,409</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredTaxAssetsNet" scale="3" id="Tc_-BdEsXTyyk6zPRO9asifNg_15_6">21,562</ix:nonFraction></p></td></tr><tr><td style="vertical-align:middle;width:71.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:middle;width:71.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Deferred tax liabilities:&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:middle;width:71.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Purchased intangible assets</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredTaxLiabilitiesGoodwillAndIntangibleAssetsIntangibleAssets" scale="3" id="Tc_8MohBZe1rk6JpVTmj1ofvQ_18_3">6,633</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredTaxLiabilitiesGoodwillAndIntangibleAssetsIntangibleAssets" scale="3" id="Tc_0OPJ-BPs5Uu8TS6KXBhMJA_18_6">7,227</ix:nonFraction></p></td></tr><tr><td style="vertical-align:middle;width:71.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Convertible Senior Notes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredTaxLiabilitiesFinancingArrangements" scale="3" id="Tc_4ZmeazKWoEGVhpM8BQfpCQ_19_3">10,018</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredTaxLiabilitiesFinancingArrangements" scale="3" id="Tc_W2O1a-MIOEmsGUC7FcqwVQ_19_6">13,674</ix:nonFraction></p></td></tr><tr><td style="vertical-align:middle;width:71.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Operating leases</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredTaxLiabilitiesLeasingArrangements" scale="3" id="Tc_xDxSW7JsxU6cHuWVKz5P5w_20_3">6,539</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredTaxLiabilitiesLeasingArrangements" scale="3" id="Tc_ojbM09J4mkOqfL7bEuDBLw_20_6">2,241</ix:nonFraction></p></td></tr><tr><td style="vertical-align:middle;width:71.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Depreciation</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredTaxLiabilitiesPropertyPlantAndEquipment" scale="3" id="Tc_0VJqnACacUyPbmeJcJuZrw_21_3">2,372</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredTaxLiabilitiesPropertyPlantAndEquipment" scale="3" id="Tc_sLwLYr2tUkudwP_HKNgybA_21_6">2,220</ix:nonFraction></p></td></tr><tr><td style="vertical-align:middle;width:71.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Total deferred tax liabilities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredIncomeTaxLiabilities" scale="3" id="Tc_NgpP7eVb8kOrDkEd7xrcnw_22_3">25,562</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredIncomeTaxLiabilities" scale="3" id="Tc_wqIi1_oAKESI8FAveoFf9Q_22_6">25,362</ix:nonFraction></p></td></tr><tr><td style="vertical-align:middle;width:71.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Net deferred taxes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredTaxLiabilities" scale="3" id="Tc_LCGT3qHObEeMg_Wv2Q66wg_23_3">3,153</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredTaxLiabilities" scale="3" id="Tc_LHpgDiSry0OscQF9qsfIjg_23_6">3,800</ix:nonFraction>)</p></td></tr></table></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company is no longer permanently reinvesting future earnings from certain foreign jurisdictions and has accrued for foreign tax withholdings of $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:UndistributedEarningsOfForeignSubsidiaries" scale="6" id="Narr_HFn-02NU7UyuHAGGLC2Edg">0.8</ix:nonFraction> million on its unremitted earnings as of December 31, 2021.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">At December 31, 2021, the Company had U.S. federal NOL carryforwards of approximately $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_us-gaap_IncomeTaxAuthorityAxis_us-gaap_DomesticCountryMember_TttWn5eJH0KPdJcBwwAtkg" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:OperatingLossCarryforwards" scale="6" id="Narr_zC6UR0H5aU6wbweNgKCCgA">165.8</ix:nonFraction> million, of which $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_IncomeTaxAuthorityAxis_us-gaap_DomesticCountryMember_zP99jOdArUaFijjLIylxAg" decimals="-5" format="ixt:numdotdecimal" name="veco:OperatingLossCarryforwardsIndefinite" scale="6" id="Narr_6aWx1UNX0EiM4xmY0UzqcQ">6.9</ix:nonFraction> million have an indefinite carryforward period, with the remaining expiring in 2036, if not utilized. At December 31, 2021, the Company had U.S. federal research and development credits of $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_us-gaap_IncomeTaxAuthorityAxis_us-gaap_DomesticCountryMember_us-gaap_TaxCreditCarryforwardAxis_us-gaap_ResearchMember_YavrFt1AYUC9hpIbxe5Alg" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:TaxCreditCarryforwardAmount" scale="6" id="Narr_WOhuPB2viE-xSAtT7aAfjg">32.1</ix:nonFraction> million that will expire between 2022 and 2041. The Company also has $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_us-gaap_IncomeTaxAuthorityAxis_us-gaap_ForeignCountryMember_Pk1NHS8LGEGq_AP_Ek0ymg" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:TaxCreditCarryforwardAmount" scale="6" id="Narr_4A8xlc6aC0uLSQGdZHSXIA">9.4</ix:nonFraction> million of foreign tax credits that expire in 2027. Additionally, the Company has state and local NOL carryforwards of approximately $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_us-gaap_IncomeTaxAuthorityAxis_us-gaap_StateAndLocalJurisdictionMember_d8FdBuF-0E2bKmMlkvVADQ" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:OperatingLossCarryforwards" scale="6" id="Narr_riBgRLR1HkCdjCrGhPtDnQ">104.7</ix:nonFraction> million (a net deferred tax asset of $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_us-gaap_IncomeTaxAuthorityAxis_us-gaap_StateAndLocalJurisdictionMember_d8FdBuF-0E2bKmMlkvVADQ" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:DeferredTaxAssetsOperatingLossCarryforwards" scale="6" id="Narr_mDKoxJWssEaWDXQ7TBbnCg">6.8</ix:nonFraction> million, net of </p></ix:continuation></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">F-36</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Veeco Instruments&#160;Inc. and Subsidiaries</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Notes to Consolidated Financial Statements (Continued)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;max-width:100%;position:relative;"><a id="Tc_qF4XayssrEe3PNl2kKtXSg_1_2"></a><a id="Tc_sVw5lnXaXEefCLgDWiqGWQ_2_2"></a><a id="Tc_hp38bA7bwUyUHquTyluRBA_2_5"></a><a id="Tc_ufWL53pT7kmET4OhpPoXDg_2_8"></a><a id="Tc_D4uoM4NRRkGD_WlK_pGnUw_3_2"></a><a id="Tc_Lm_nIMnHkEeKSvCuWZlEGA_4_0"></a><a id="Tc_qfDKWRPkV0-h-KybrjVZYQ_4_2"></a><a id="Tc_INVF0ZvnGUChw5g0FvW0iQ_4_5"></a><a id="Tc_N2NU-WKH4EeTyJ6_5t9O_g_4_8"></a><a id="Tc_0xkuItC8f0GmEacxpcMD8w_5_0"></a><a id="Tc_9DAinG9gBUikuvDlM1Dg9g_6_0"></a><a id="Tc_xMJ35GwNiUuH3KtMmOKuRQ_7_0"></a><a id="Tc_9PRUmkSa30eg8gDHG9Q95g_8_0"></a><a id="Tc_5qwvGr8KAUG4pr4dpkOB4w_8_3"></a><a id="Tc_HmnrgYpjRk-7JlOxQLNR_g_8_6"></a><a id="Tc_SNJJPOfwFkmpROro1GZiXg_8_9"></a><a id="Tc_N9Sb5sxm0kOIVg12ePbL2w_9_0"></a><a id="Tc_Z9yZdw-8TEiCoiqzGG7FxQ_10_0"></a><a id="Tc_CR1xuwMlrUilfwBg9Yqerg_10_2"></a><a id="Tc_fONBfxIFj0uy9H4BhbmLbg_10_5"></a><a id="Tc_jqiieScC0kGMn1tG8tKX8Q_10_8"></a><ix:continuation id="Tb_hP3MUG3gOE6N7pz9Oh1ATw_cont2"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">federal tax benefits and before the valuation allowance) that will expire between 2022 and 2040. Finally, the Company has state credits of $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_us-gaap_IncomeTaxAuthorityAxis_us-gaap_StateAndLocalJurisdictionMember_d8FdBuF-0E2bKmMlkvVADQ" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:TaxCreditCarryforwardAmount" scale="6" id="Narr_xPoz0StZUECxdr6JLbL1Nw">30.6</ix:nonFraction> million, some of which are indefinite and others that will expire between 2024 and 2036.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company makes assessments to estimate if sufficient taxable income will be generated in the future to use existing deferred tax assets. As of December 31, 2021, the Company continued to have a cumulative loss in recent years with respect to its U.S. operations. Based on this negative objective evidence, the Company continues to maintain a valuation allowance against its U.S. deferred tax assets. During 2021, the Company&#8217;s valuation allowance decreased by approximately $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:ValuationAllowanceDeferredTaxAssetChangeInAmount" sign="-" scale="6" id="Narr_yiLyfi76d0m4NTRYzujyrw">2.4</ix:nonFraction> million.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">A roll-forward of the Company&#8217;s uncertain tax positions for all U.S. federal, state, and foreign tax jurisdictions was as follows:</p><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" name="us-gaap:SummaryOfIncomeTaxContingenciesTextBlock" id="Tb_ZbynEfGg0UaL9i6pujDTeA" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;min-height:0.0pt;margin:0pt;"><span style="font-size:0pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:63.94%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.67%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:63.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:33.99%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:63.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.95%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.95%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2019</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="10" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:63.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:33.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:63.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Balance at beginning of year</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" 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Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:UnrecognizedTaxBenefitsIncreasesResultingFromCurrentPeriodTaxPositions" scale="3" id="Tc_g_XU22SLo0OsW-ONI4kVqA_5_3">2,642</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_irQajVZIkUmgjCJ-cxJ5AQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:UnrecognizedTaxBenefitsIncreasesResultingFromCurrentPeriodTaxPositions" scale="3" id="Tc_T7-GZ7Bf-ECz8D8yZ1X5LQ_5_6">1,217</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_ssAGFj6EXEiYqEtVZlyqxA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:UnrecognizedTaxBenefitsIncreasesResultingFromCurrentPeriodTaxPositions" scale="3" id="Tc_1QVus5qIAUSKhtcadbfv6Q_5_9">3,075</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:63.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Additions for tax positions related to prior years</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:UnrecognizedTaxBenefitsIncreasesResultingFromPriorPeriodTaxPositions" scale="3" id="Tc_fnNTb3IkLkWNNxnOufFbzQ_6_3">50</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.67%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_irQajVZIkUmgjCJ-cxJ5AQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:UnrecognizedTaxBenefitsIncreasesResultingFromPriorPeriodTaxPositions" scale="3" id="Tc_vXduE6cOi0qm3M6jc3CHeg_6_6">47</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_ssAGFj6EXEiYqEtVZlyqxA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:UnrecognizedTaxBenefitsIncreasesResultingFromPriorPeriodTaxPositions" scale="3" id="Tc_OdPyFWJBVkKI2v2ZaHhVDA_6_9">21</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:63.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Reductions for tax positions related to prior years</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="-3" format="ixt:numdotdecimal" 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style="vertical-align:bottom;white-space:nowrap;width:8.66%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.67%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td></tr><tr><td style="vertical-align:bottom;width:63.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Settlements</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:UnrecognizedTaxBenefitsDecreasesResultingFromSettlementsWithTaxingAuthorities" scale="3" id="Tc_QkF5f9kLuECuZ2l6z7_d3g_9_3">1,098</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.67%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_irQajVZIkUmgjCJ-cxJ5AQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:UnrecognizedTaxBenefitsDecreasesResultingFromSettlementsWithTaxingAuthorities" scale="3" id="Tc_jOfmFcprPkSczVQ_q4J_lw_9_6">104</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_ssAGFj6EXEiYqEtVZlyqxA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:UnrecognizedTaxBenefitsDecreasesResultingFromSettlementsWithTaxingAuthorities" scale="3" id="Tc_5JcvDfzlq0erXcOYe4ufIw_9_9">50</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:bottom;width:63.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Balance at end of year</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:UnrecognizedTaxBenefits" scale="3" id="Tc_itmbrVPzPEq4wIe-isOLaQ_10_3">12,761</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.67%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:UnrecognizedTaxBenefits" scale="3" id="Tc_51QFTqqLHkq7alNBfk3YkA_10_6">12,363</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2019_V3OJMQUyh0CQkfB0kHJGFg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:UnrecognizedTaxBenefits" scale="3" id="Tc_H0Q0rHGScEelE-xYTKzmdQ_10_9">12,369</ix:nonFraction></p></td></tr></table></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">If the amount of unrecognized tax benefits at December 31, 2021 were recognized, the Company&#8217;s income tax provision would decrease by $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:UnrecognizedTaxBenefitsThatWouldImpactEffectiveTaxRate" scale="6" id="Narr_b6MwsN8_IEmcn4Rv1jFzmQ">0.4</ix:nonFraction> million. The gross amount of interest and penalties accrued in income tax payable in the Consolidated Balance Sheets was approximately $<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestAccrued" scale="6" id="Narr_p5jMgzEtiEWg1bfsC6j2HA"><ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestAccrued" scale="6" id="Narr_O05w74gGFEW1jy7S7yw2Zw">0.4</ix:nonFraction></ix:nonFraction> million at both December 31, 2021 and 2020.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company, or one of its subsidiaries, files income tax returns in the United States federal jurisdiction, and various state, local, and foreign jurisdictions. All material consolidated federal income tax matters have been concluded for years through 2017 subject to subsequent utilization of NOLs generated in such years. All material state and local income tax matters have been reviewed through 2012. The majority of the Company&#8217;s foreign jurisdictions have been reviewed through 2015. The Company&#8217;s major foreign jurisdictions&#8217; statutes of limitation remain open with respect to the tax years 2015 through 2020 for Germany, 2017 through 2020 for China, and 2020 for Taiwan and Singapore. The Company does not anticipate that its uncertain tax position will change significantly within the next twelve months subject to the completion of the ongoing tax audits and any resultant settlement. </p></ix:continuation><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><a id="_Hlk535574252"></a><a id="_Hlk535418796"></a><a id="_Hlk535418683"></a><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" name="us-gaap:SegmentReportingDisclosureTextBlock" id="Tb_LoJcQvWFYU6NIN8FqHauLA" continuedAt="Tb_LoJcQvWFYU6NIN8FqHauLA_cont1" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note 17 &#8212; Segment Reporting and Geographic Information</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company operates and measures its results in <ix:nonFraction unitRef="Unit_Standard_segment_U-xkEXVHfEaMhLVw48NMwA" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="INF" format="ixt-sec:numwordsen" name="us-gaap:NumberOfOperatingSegments" scale="0" id="Narr_HVBO_sLyRUebwmZJajSvFA">one</ix:nonFraction> operating segment and therefore has <ix:nonFraction unitRef="Unit_Standard_segment_U-xkEXVHfEaMhLVw48NMwA" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="INF" format="ixt-sec:numwordsen" name="us-gaap:NumberOfReportableSegments" scale="0" id="Narr_wXP5vM8Bv0mppXbpcpNA9Q">one</ix:nonFraction> reportable segment: the development, manufacture, sales, and support of semiconductor and thin film process equipment primarily sold to make electronic devices. The Company&#8217;s Chief Operating Decision Maker, the Chief Executive Officer, evaluates performance of the Company and makes decisions regarding the allocation of resources based on total Company results.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></ix:nonNumeric></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">F-37</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Veeco Instruments&#160;Inc. and Subsidiaries</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Notes to Consolidated Financial Statements (Continued)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;max-width:100%;position:relative;min-height:10.35pt;"><a id="Tc_GbW1sE6EikCyglpG_mU3Cw_1_3"></a><a id="Tc_PqbbwJcNVkGUamdOZCHQxQ_2_3"></a><a id="Tc_OGJ9cTy_kEWvohb9IdKdgQ_2_6"></a><a id="Tc_ldM9jj0BAEWnc_mKQhW_kw_2_9"></a><a id="Tc_7vQ5-D2-wUOWSLhHRktLxg_3_3"></a><a id="Tc_Uo5DeJ59lESOwb6KbHeNBA_4_0"></a><a id="Tc_l7tNWlm6eEuDomOhuZqorA_5_0"></a><a id="Tc_TZXdIv2_zkmM-UV51W2QBg_5_3"></a><a id="Tc_vZUFUDTnF0a89kVIX8yzdw_5_6"></a><a id="Tc_I7R9VJX3EE2WIy_j6IjLKA_5_9"></a><a id="Tc_o14o-XEzy0WTluLrlQFK3w_6_0"></a><a id="Tc_cCxfSAJe2UupLTS-Y5FnPA_7_0"></a><a id="Tc_vg_ghmsz2UeDRFbTTabuzQ_8_0"></a><a id="Tc__hiCKIcyQEODs4f9IAqIEg_9_0"></a><a id="Tc_bmSjovVVBk2NCdhTDiFMSQ_9_3"></a><a id="Tc_RTraDK3d3U2M_bjzU9X7Nw_9_6"></a><a id="Tc_sVsCubOrU0u2I7y8MR_rbA_9_9"></a><a id="_2c930715_33c1_42ba_ac2b_20dd66adfc50"></a><a id="Tc_MDfJj4o3Vk-QQ4y-z_2BaA_1_2"></a><a id="Tc_Ikog-Bo8CEapr2Zd2i29xA_1_11"></a><a id="Tc_unH2MYoFjkWrqui6ESf6xA_2_2"></a><a id="Tc_KD6ti6DkSUmTfzDU0n7kdQ_2_5"></a><a id="Tc_VSQlUgX9QE-sVIl3-W9UfA_2_8"></a><a id="Tc_rfZE91nInUaDDAZzSRxUFg_2_11"></a><a id="Tc_sJvwi9I_xECaO1B8gtxu5g_2_14"></a><a id="Tc_TjnVvHGq3kCajVGRA1ZDaQ_2_17"></a><a id="Tc_2T2kOeZuxESUueK-ruJbrw_3_2"></a><a id="Tc_6AA8XEkOMUK9lRSBQ5__uQ_4_0"></a><a id="Tc_KSty9tjfWkenV5n9F_Z4hw_4_2"></a><a id="Tc_HDFUEFyFU0O9_V3fnHOYJg_4_5"></a><a id="Tc_LozIQA0r30C_5_9dyKR1vg_4_8"></a><a id="Tc_nmr95sow802HH-RXf2NI_A_4_11"></a><a id="Tc_wVyRII6YYUCHYUlTGej7EQ_4_14"></a><a id="Tc_fA60GUJ6Ck-W6YivBCyR0w_4_17"></a><a id="Tc_Qi49r2o3akWyR6Sf667Cjw_5_0"></a><a id="Tc_72Ah-wpvKUKOtD2PRmiu6Q_6_0"></a><a id="Tc_5GWUfHI9aU6BIMimZWhTyQ_7_0"></a><a id="Tc_yQ-2eIa-gkCz329TBlWkrg_8_0"></a><a id="Tc_A-kHWSX7RkKFQnaJ-vuvbQ_8_12"></a><a id="Tc_5tAUJrs5nkihIHVyovwayw_8_15"></a><a id="Tc_fq8lUhE7okCv4Dxd6ImW_A_8_18"></a><a id="Tc_3IMA5z0fBEyfq5AvNgiuhg_9_0"></a><a id="Tc__t89DImdiUO7xYT3r57zjw_9_2"></a><a id="Tc_YgW5_o-C0kqdlOY8UuJybw_9_5"></a><a id="Tc__w1g8mg5c0mDOHnVy79_pQ_9_8"></a><a id="Tc_rcAqBFvk_UWaulwLN4rWGw_9_11"></a><a id="Tc__ClZmEpztEKyXxE-K9ZuPA_9_14"></a><a id="Tc_sKV1AUEQsE-KbVdFlrwkBw_9_17"></a><ix:continuation id="Tb_LoJcQvWFYU6NIN8FqHauLA_cont1"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Sales by end-market is as follows:</p><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" name="us-gaap:ScheduleOfEntityWideInformationRevenueFromExternalCustomersByProductsAndServicesTextBlock" id="Tb_IiZAF5LTSk-18q1umv013A" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;min-height:0.0pt;margin:0pt;"><span style="font-size:0pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80.72%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:58.5%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.82%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.82%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.84%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:58.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:37.4%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">For&#160;the year ended December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:58.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.1%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.1%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.11%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2019</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="11" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:58.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:37.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:58.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Sales by end-market</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:58.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Semiconductor</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_srt_ProductOrServiceAxis_veco_SemiconductorMember_RhlLTS3_YUinLNbhNyEW8w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax" scale="3" id="Tc_bCuY-WgqEU65Lr9Bt8AM8Q_5_4">247,051</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_srt_ProductOrServiceAxis_veco_SemiconductorMember_7qYIaM4v2kWYAbcPPg4JQA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax" scale="3" id="Tc_grc6M3s0ck-h_Rp2-5bU9g_5_7">165,909</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_srt_ProductOrServiceAxis_veco_SemiconductorMember_4BIEv8aySUWJI0XxSiT13w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax" scale="3" id="Tc_3qMMZPfraECEDD_VFAEXYg_5_10">175,608</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:58.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Compound Semiconductor</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_srt_ProductOrServiceAxis_veco_CompoundSemiconductorMember_IB0eBBlfWUmdKnDQ43qzpQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax" scale="3" id="Tc_i3fp9--mDUm_tTr79ZdHEg_6_4">106,972</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_srt_ProductOrServiceAxis_veco_CompoundSemiconductorMember_7H-1HJhXx0WbksdOsjT-7g" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax" scale="3" id="Tc_w3_AUL-8Tk2KBC8fCHscsQ_6_7">107,922</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_srt_ProductOrServiceAxis_veco_CompoundSemiconductorMember_dZJ84sdjhEa4cTsZepJ4KA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax" scale="3" id="Tc_gmVyoGW3uEaKFtwL6fLUYw_6_10">85,877</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:58.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Data Storage</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_srt_ProductOrServiceAxis_veco_DataStorageMember_3GYRa4tniEKTlxPHMXjNMQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax" scale="3" id="Tc_ByGXS9UPrk2dTX1UCJgvFQ_7_4">168,760</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_srt_ProductOrServiceAxis_veco_DataStorageMember_XF3TabhR1kOQHQet0uW3EA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax" scale="3" id="Tc_WXxkefk7jEeki6uI8Luxdw_7_7">123,288</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_srt_ProductOrServiceAxis_veco_DataStorageMember_bMtZI7RCgU-_uHjrEfAeaA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax" scale="3" id="Tc_Gf0z6lZtTU6UkHF4NnETew_7_10">84,075</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:58.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Scientific &amp; Other</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.82%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_srt_ProductOrServiceAxis_veco_ScientificAndOtherMember_dPBeefbFu0upuPSVtQV31w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax" scale="3" id="Tc_yQIw8SIoQU6QNpZKKk3e7w_8_4">60,494</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.82%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_srt_ProductOrServiceAxis_veco_ScientificAndOtherMember_sK-284pwvUyhsFbKF6-Plw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax" scale="3" id="Tc_aImm-d0gCky26xo2-HJY3w_8_7">57,044</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.84%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_srt_ProductOrServiceAxis_veco_ScientificAndOtherMember_6p6wTF8Z4Eyx5HHJdz80oA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax" scale="3" id="Tc_YHLvILuMKka9Tc85VgZ_yA_8_10">73,789</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:58.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.82%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax" scale="3" id="Tc_a4KkPugeMkOLPMqEbM-eiQ_9_4">583,277</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.82%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_irQajVZIkUmgjCJ-cxJ5AQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax" scale="3" id="Tc_iX50DnXw4kita21gkzrnYg_9_7">454,163</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.84%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_ssAGFj6EXEiYqEtVZlyqxA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax" scale="3" id="Tc_W0YxgACFjEK3Si3TVnjfXg_9_10">419,349</ix:nonFraction></p></td></tr></table></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company&#8217;s significant operations outside the United States include sales and service offices in China, Europe, and Rest of APAC. For geographic reporting, sales are attributed to the location in which the customer facility is located. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Sales and long-lived tangible assets by geographic region are as follows:</p><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" name="us-gaap:ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsByGeographicalAreasTableTextBlock" id="Tb_KNcfufnkrE-33y-eTxVT7g" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:39.34%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.94%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:39.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:30.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Net&#160;Sales&#160;to&#160;Unaffiliated Customers</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:27.16%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Long-lived&#160;Tangible&#160;Assets</b></p></td></tr><tr><td style="vertical-align:bottom;width:39.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2019</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.98%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2019</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="19" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:39.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="17" style="vertical-align:bottom;white-space:nowrap;width:59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:39.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">United States</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_srt_StatementGeographicalAxis_country_US_wT0kc_CHHkK5LOu3XjEhsA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax" scale="3" id="Tc_Q3wlrcWnTU-XKbxsSv137Q_4_3">217,209</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_srt_StatementGeographicalAxis_country_US_t1d3iwmNTkyJq5wd9MhWDg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax" scale="3" id="Tc_ZW9ARBjy9UyoJ4fft_a4MQ_4_6">145,353</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_srt_StatementGeographicalAxis_country_US_c1pz48aDeU6u1fq_aowSzg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax" scale="3" id="Tc_VeMqk3ISkUK-AQAeLs6daA_4_9">126,160</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_srt_StatementGeographicalAxis_country_US_ZzqCMN74k0aV7C3evyddVg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PropertyPlantAndEquipmentNet" scale="3" id="Tc_VagCrzEGakCZUI5AFHnORg_4_12">99,220</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_srt_StatementGeographicalAxis_country_US_TQGlRstnrU-KwZ1nqDSzzA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PropertyPlantAndEquipmentNet" scale="3" id="Tc_KBDNYhL92U6UcZWB0f7ChQ_4_15">64,967</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2019_srt_StatementGeographicalAxis_country_US_Zn39EvTl0USlmVNb7oYnTA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PropertyPlantAndEquipmentNet" scale="3" id="Tc_KfE9Qo19S0-cz56amCswqw_4_18">75,187</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:39.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">EMEA<sup style="font-family:'Calibri','Helvetica','sans-serif';font-size:8.25pt;line-height:100%;top:0pt;vertical-align:top;">(1)</sup></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_srt_StatementGeographicalAxis_us-gaap_EMEAMember_ffLglRxigUi-_7ZySHqiMQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax" scale="3" id="Tc_qOulsmIAvkeMuz9XzWHtiQ_5_3">55,129</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_srt_StatementGeographicalAxis_us-gaap_EMEAMember_NZ55XxIoI0-K38_b5d5nNg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax" scale="3" id="Tc_w8tn-8JI5EiBiut6yUhl6Q_5_6">73,124</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_srt_StatementGeographicalAxis_us-gaap_EMEAMember_J2PohzYxuEOWtImogomCIA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax" scale="3" id="Tc_2xN-aCmYyEyp_kjiush-fQ_5_9">57,351</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_srt_StatementGeographicalAxis_us-gaap_EMEAMember_NMWTnqa8X0aqAnLFWbSOvQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PropertyPlantAndEquipmentNet" scale="3" id="Tc_US_CAVIaj0ugg0uYUb1WSw_5_12">94</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_srt_StatementGeographicalAxis_us-gaap_EMEAMember_ce2T0lX_Kk6n9cjMh4ui3A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PropertyPlantAndEquipmentNet" scale="3" id="Tc_y20VfHF36EqXvCf56Ra6vA_5_15">120</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2019_srt_StatementGeographicalAxis_us-gaap_EMEAMember_dydiepjk_Uq2h21H1IjErg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PropertyPlantAndEquipmentNet" scale="3" id="Tc_L6x79HqkiEyYQ-e9DF9aWg_5_18">143</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:39.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">China</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_srt_StatementGeographicalAxis_country_CN_FETvYXzDGEKAJwB9GPv8Vg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax" scale="3" id="Tc_YVr7FO6MsUKDwYvOTghv6g_6_3">105,998</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_srt_StatementGeographicalAxis_country_CN_L1S8VK3j_02jL-U-k4TToQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax" scale="3" id="Tc_lVDyQxJXtECSHvB4CmRBzw_6_6">57,589</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_srt_StatementGeographicalAxis_country_CN_mSqscwtb90G4hHlDPK6j-g" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax" scale="3" id="Tc_AL94rkV4wUmDADALxAwMkw_6_9">71,078</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_srt_StatementGeographicalAxis_country_CN_kuPD_eRNG0msTaGif0d6jg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PropertyPlantAndEquipmentNet" scale="3" id="Tc_FnOLnSga6kismY0_HhCdog_6_12">67</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_srt_StatementGeographicalAxis_country_CN_YihKbcKVV0CaJUj7OIVaDg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PropertyPlantAndEquipmentNet" scale="3" id="Tc_nrbYkNR5bUyKsV11qhM2cg_6_15">84</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2019_srt_StatementGeographicalAxis_country_CN_Pidk0ngOo02zgyvBYfHNvg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PropertyPlantAndEquipmentNet" scale="3" id="Tc_xAeusyOo_EOBXsG6tj3tQg_6_18">130</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:39.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Rest of APAC</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_srt_StatementGeographicalAxis_veco_AsiaPacificExcludingChinaMember_edu3nJ0elUyz_h0EAEB1oQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax" scale="3" id="Tc_3bfuGPdTpUmaipWdGhSOMQ_7_3">204,633</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_srt_StatementGeographicalAxis_veco_AsiaPacificExcludingChinaMember_XvnWtM3EDEma61-X5IP4HA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax" scale="3" id="Tc_RR17hOPNRE-HosOohtuczA_7_6">177,569</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_srt_StatementGeographicalAxis_veco_AsiaPacificExcludingChinaMember_8X27c2Z0C0agdVAmILxQvw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax" scale="3" id="Tc_vsTlJ_62dUG77wzOdqZB9A_7_9">164,363</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_srt_StatementGeographicalAxis_veco_AsiaPacificExcludingChinaMember_oAbhLAknV0uzb8fN-4fDBw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PropertyPlantAndEquipmentNet" scale="3" id="Tc_hO0x3t_qlEi-iSExIwtWDA_7_12">362</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_srt_StatementGeographicalAxis_veco_AsiaPacificExcludingChinaMember_sVcAoXe-YEaNnC8-lJqwFw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PropertyPlantAndEquipmentNet" scale="3" id="Tc_ytPoYSv1ek2ijlstviwZ8g_7_15">100</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2019_srt_StatementGeographicalAxis_veco_AsiaPacificExcludingChinaMember_S5qL8eGsB0G67X8tHbPkvA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PropertyPlantAndEquipmentNet" scale="3" id="Tc_GLMlgKjtSEqgz_UnCwZ_qQ_7_18">251</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:39.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Rest of World</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_srt_StatementGeographicalAxis_veco_RestOfWorldMember_EJ8FpYlaqECvCBX7NKl2fg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax" scale="3" id="Tc_uUnZj2HRKEyaVvGck8_tWg_8_3">308</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_srt_StatementGeographicalAxis_veco_RestOfWorldMember_mbpu-dUBwUSzsbgy3shrtw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax" scale="3" id="Tc_RZ6cBahBYkmZ4kSvA_o-Rg_8_6">528</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_srt_StatementGeographicalAxis_veco_RestOfWorldMember_Ix_C13aHJEmNhV7WNc1TuA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax" scale="3" id="Tc_aYpj0KIPVU-CD3Qmd33oNw_8_9">397</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.94%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td></tr><tr><td style="vertical-align:bottom;width:39.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Total </p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax" scale="3" id="Tc_fpRVff4DJU2ugKggluY82A_9_3">583,277</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_irQajVZIkUmgjCJ-cxJ5AQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax" scale="3" id="Tc_rA-QyHSBQUyTXl2UTd-XlA_9_6">454,163</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_ssAGFj6EXEiYqEtVZlyqxA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax" scale="3" id="Tc_cqofCxA600OZWXXp_BzsKQ_9_9">419,349</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PropertyPlantAndEquipmentNet" scale="3" id="Tc_-uygs30al0KY-49pXTXwlA_9_12">99,743</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PropertyPlantAndEquipmentNet" scale="3" id="Tc__TmYJR0lWUWmsFRCLHL9Mg_9_15">65,271</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.94%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2019_V3OJMQUyh0CQkfB0kHJGFg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PropertyPlantAndEquipmentNet" scale="3" id="Tc_o2LkY7C8K0G2wDSQ6pPedw_9_18">75,711</ix:nonFraction></p></td></tr></table><div style="font-family:'Times New Roman','Times','serif';font-size:9.0pt;margin-bottom:0pt;margin-top:0pt;min-height:1.19em;position:relative;width:100%;"><div style="background-color:#000000;height:1pt;position:relative;top:0.6em;width:25.0%;border:none;margin:0 auto 0 0;"></div></div><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Times New Roman','Times','serif';font-size:9pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">(1)</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:9pt;font-style:normal;font-weight:normal;">EMEA consists of Europe, the Middle East, and Africa</span></td></tr></table></ix:nonNumeric></ix:continuation><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 0pt 18pt;"><span style="font-size:1pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 0pt 18pt;"><span style="font-size:1pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;background:#ffffff;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> <span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="display:none;font-size:12pt;line-height:0pt;margin:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:0pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">F-38</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;max-width:100%;position:relative;"><a id="ScheduleiivaluationAndQualifyingA_003634"></a><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;"> </b><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p><a id="_094e1ba0_44a9_4492_b686_6ca9690e22dd"></a><a id="Tc_Cqwmg1dpq0uoSaFAFhYTkg_1_5"></a><a id="Tc_mLpVJCSFgUWN2dbyAflMaA_2_5"></a><a id="Tc_rn0MWftVOUu-uow4aPb4Hw_3_2"></a><a id="Tc_3N7PWLysh0uvpFpLcS257w_3_5"></a><a id="Tc_HG8j_kCi-k64f6g82XVdjQ_3_8"></a><a id="Tc_Utzq0rHBFEucYv4ATi_1TQ_3_14"></a><a id="Tc_raFhsx9ry0KC6fB69uqMQg_4_2"></a><a id="Tc_RzBs1rcIrEiNZ5YO3-0Ihw_4_5"></a><a id="Tc_VphCTrEg-kCsW2ARPj1PaQ_4_8"></a><a id="Tc_PvRl-7rPlkqAuzxD9eYbSQ_4_14"></a><a id="Tc_3JII3rQCYE-uqTlOiJZFLg_5_0"></a><a id="Tc_X6ks-5izaUa1DoGMvt8Gww_5_2"></a><a id="Tc_b4nvi3FdO0maXn81WFLDRw_5_5"></a><a id="Tc_0UH2AfBUtkuZWWEaIJXLuQ_5_8"></a><a 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id="Tc_x56zHLuDvkO6LVe7dSf4_g_18_14"></a><a id="Tc_7P7cSiWp8EKUbZ_clHp14g_19_0"></a><a id="Tc_kA7N5Fj3CE2IDegSOgwE9w_19_9"></a><a id="Tc_zQjS6Tq_o0eLrkcfwq3Taw_19_12"></a><a id="Tc_RECh3tirnE-MavOnzlagBg_20_2"></a><a id="Tc_bFYdYhmU30CcXni_kUErjQ_20_5"></a><a id="Tc_8x3OCPr1WUOfoHGNkWu3bQ_20_8"></a><a id="Tc_8E8AqN8qUU2iQDf65ZydyA_20_9"></a><a id="Tc_kJefd3BkNEKWFnhSNUe7RQ_20_11"></a><a id="Tc_qvZyDZCr5kySevKGDjunhw_20_14"></a><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" name="srt:ScheduleOfValuationAndQualifyingAccountsDisclosureTextBlock" id="Tb_3pAi-pjA30CpdwLAnWlxEA" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Schedule II &#8212; Valuation and Qualifying Accounts</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:45.33%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.22%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.24%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.83%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.67%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:45.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:19.22%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Additions</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:45.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Charged </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:45.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Balance&#160;at</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(Credited)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Charged&#160;to</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Balance&#160;at</b></p></td></tr><tr><td style="vertical-align:bottom;width:45.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Beginning</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;to&#160;Costs&#160;and</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Other</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">End&#160;of</b></p></td></tr><tr><td style="vertical-align:bottom;width:45.33%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Deducted from asset accounts:</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.19%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">of&#160;Period</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.11%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Expenses</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.07%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Accounts</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.91%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Deductions</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Period</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="16" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:45.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="14" style="vertical-align:bottom;white-space:nowrap;width:52.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:45.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Year ended December&#160;31, 2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.24%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.67%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:45.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Allowance for doubtful accounts</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_AllowanceForCreditLossMember_AYfkyMOum0WrI_iTRusFVA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ValuationAllowancesAndReservesBalance" scale="3" id="Tc_vUByh5MeGUeBVCnW41y9LA_8_3">736</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_AllowanceForCreditLossMember_2t-zTeuRe0agmaAnvDb8ng" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ValuationAllowancesAndReservesBalance" scale="3" id="Tc_1J28Rw8i6k6jlPwTj8fAMQ_8_15">736</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:45.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Valuation allowance in net deferred tax assets</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.22%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember_vfST0wOXIkqRPG4NhiKpDg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ValuationAllowancesAndReservesBalance" scale="3" id="Tc_6g45pkc5rUSC4kBdZCxrYg_9_3">118,443</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.24%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.83%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.67%;background:#cceeff;border-bottom:1px solid 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Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember_zMzf-aQDMEGvNC0oxdJG3g" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ValuationAllowancesAndReservesBalance" scale="3" id="Tc_g81bp-E-Ik6PRKE42IVLQA_9_15">116,054</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:45.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.22%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ValuationAllowancesAndReservesBalance" scale="3" id="Tc_FVAY9ezXVUO9ZTgi6aHQmw_10_3">119,179</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.24%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.83%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.67%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ValuationAllowancesAndReservesDeductions" scale="3" id="Tc_HBZy5pn1-0CM21Byo609bw_10_12">2,389</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2021_X_XxWbSxEkeCHZObbEFyaw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ValuationAllowancesAndReservesBalance" scale="3" id="Tc_2JFVO2HezEKFYH1wL3s6Ig_10_15">116,790</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:45.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.24%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.67%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:45.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Year ended December&#160;31, 2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:45.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Allowance for doubtful accounts</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2019_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_AllowanceForCreditLossMember_inxQUNdOBEibsJjPZsREDA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ValuationAllowancesAndReservesBalance" scale="3" id="Tc_fy83m-3XREC0tdi4y739gA_13_3">602</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New 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style="vertical-align:bottom;white-space:nowrap;width:6.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.67%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_AllowanceForCreditLossMember_uN8fgoRcfUqDYfF1JaVPvQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ValuationAllowancesAndReservesDeductions" scale="3" id="Tc_4NI07tFxwU6VoXPbn_s8pg_13_12">6</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_AllowanceForCreditLossMember_AYfkyMOum0WrI_iTRusFVA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ValuationAllowancesAndReservesBalance" scale="3" id="Tc_DbeEUUplF0-aBDJvdilQfQ_13_15">736</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:45.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Valuation allowance in net deferred tax assets</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.22%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2019_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember_G3oiV3HMjEib5AAKfQhtWQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ValuationAllowancesAndReservesBalance" scale="3" id="Tc_hOotjpjORESRP8ootAolgw_14_3">130,053</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember_j3AqHeGz30yxfzjf7iLm1Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ValuationAllowancesAndReservesChargedToCostAndExpense" scale="3" id="Tc_2q82h8D8sUqJcNyQ8ULl_A_14_6">513</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.24%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.83%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.67%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember_j3AqHeGz30yxfzjf7iLm1Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ValuationAllowancesAndReservesDeductions" scale="3" id="Tc_r87zi5P_S0GfIEWR1-ikDw_14_12">12,123</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2020_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember_vfST0wOXIkqRPG4NhiKpDg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ValuationAllowancesAndReservesBalance" scale="3" id="Tc_snABYk0wlkyZ6VzRjdiqbw_14_15">118,443</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:45.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.22%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2019_V3OJMQUyh0CQkfB0kHJGFg" 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contextRef="Duration_1_1_2020_To_12_31_2020_irQajVZIkUmgjCJ-cxJ5AQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ValuationAllowancesAndReservesChargedToCostAndExpense" scale="3" id="Tc__nhi1qMN2kO1SlCkKbWMAA_15_6">653</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.24%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.83%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.67%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2020_To_12_31_2020_irQajVZIkUmgjCJ-cxJ5AQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ValuationAllowancesAndReservesDeductions" 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style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:45.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Year ended December&#160;31, 2019</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.24%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.67%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:45.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Allowance for doubtful accounts</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2018_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_AllowanceForCreditLossMember_Oj0DkR-N1UyEOl3UM17YDw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ValuationAllowancesAndReservesBalance" scale="3" id="Tc_JH4ZeFyHWU69vpv4hwmLRw_18_3">270</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_AllowanceForCreditLossMember_j6DJyQYWkkeO5IyssQfJsQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ValuationAllowancesAndReservesChargedToCostAndExpense" scale="3" id="Tc_NpQKnKIGREuUcFyNqFri1w_18_6">392</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_AllowanceForCreditLossMember_j6DJyQYWkkeO5IyssQfJsQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ValuationAllowancesAndReservesDeductions" scale="3" id="Tc_Vs0gDRGY7Ei6fNFVLiNakw_18_12">60</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2019_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_AllowanceForCreditLossMember_inxQUNdOBEibsJjPZsREDA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ValuationAllowancesAndReservesBalance" scale="3" id="Tc_sx38r4ksvkuS58gidMkQMg_18_15">602</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:45.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Valuation allowance in net deferred tax assets</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.22%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2018_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember_Eu0YKoVg6EuBQxrB8HGt-Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ValuationAllowancesAndReservesBalance" scale="3" id="Tc_QQJngXYZa0G13o6OyrJJkw_19_3">114,955</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember_VgHGS2vGHka7UyZKwXs23Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ValuationAllowancesAndReservesChargedToCostAndExpense" scale="3" id="Tc_bX6dbmx83UGs2aXneWA-Kw_19_6">15,098</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.24%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.83%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.67%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2019_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember_G3oiV3HMjEib5AAKfQhtWQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ValuationAllowancesAndReservesBalance" scale="3" id="Tc_nbWYb1s8BUCB6BU4f6kbuA_19_15">130,053</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:45.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.22%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2018_q0edxy1rfUy1tPk-85jsFQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ValuationAllowancesAndReservesBalance" scale="3" id="Tc_58wN2D46nE6Ds-eJJW46oQ_20_3">115,225</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_ssAGFj6EXEiYqEtVZlyqxA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ValuationAllowancesAndReservesChargedToCostAndExpense" scale="3" id="Tc_weWiuN5sSkOxMGly77limw_20_6">15,490</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.24%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.83%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.67%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="Duration_1_1_2019_To_12_31_2019_ssAGFj6EXEiYqEtVZlyqxA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ValuationAllowancesAndReservesDeductions" scale="3" id="Tc_6xhYhxMKG06zJ_xNYUxiUA_20_12">60</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA" contextRef="As_Of_12_31_2019_V3OJMQUyh0CQkfB0kHJGFg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ValuationAllowancesAndReservesBalance" scale="3" id="Tc__8iq1ZXbHUufFOWJOV1fCQ_20_15">130,655</ix:nonFraction></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">S-1</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;margin-left:10.35%;margin-right:10.35%;margin-top:30pt;page-break-after:avoid;width:79.3%;border:0;"></div></body></html>
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<DOCUMENT>
<TYPE>EX-21.1
<SEQUENCE>2
<FILENAME>veco-20211231xex21d1.htm
<DESCRIPTION>EX-21.1
<TEXT>
<!--Enhanced HTML document created with Toppan Merrill Bridge  9.11.0.85--><!--Created on: 2/17/2022 11:12:58 PM (UTC)--><!DOCTYPE HTML PUBLIC "-//W3C//DTD HTML 4.01 Transitional//EN" "http://www.w3.org/TR/html4/loose.dtd"><html><head><meta charset="UTF-8"><title></title></head><body><div style="margin-top:30pt;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="clear:both;max-width:100%;position:relative;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><b style="font-weight:bold;">Exhibit&#160;21.1</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;text-decoration:underline;text-decoration-color:#000000;">Subsidiaries of the Registrant</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;text-decoration:underline;text-decoration-color:#000000;">As of December 31, 2021</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><div><table style="background-color:#ffffff;border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;" align="center"><tr style="height:1pt;"><td style="vertical-align:bottom;width:54.71%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="font-size:1pt;visibility:hidden;">&#8203;</font></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.8%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="font-size:1pt;visibility:hidden;">&#8203;</font></p></div></div></td><td style="vertical-align:bottom;width:21.78%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="font-size:1pt;visibility:hidden;">&#8203;</font></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.8%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="font-size:1pt;visibility:hidden;">&#8203;</font></p></div></div></td><td style="vertical-align:bottom;width:19.89%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="font-size:1pt;visibility:hidden;">&#8203;</font></p></div></div></td></tr><tr><td style="background-color:#ffffff;vertical-align:bottom;width:54.71%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt;"><b style="font-weight:bold;">Subsidiary</b></p></td><td style="background-color:#ffffff;vertical-align:bottom;white-space:nowrap;width:1.8%;border-bottom:1px solid transparent;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="background-color:#ffffff;vertical-align:bottom;width:21.78%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Jurisdiction&#160;of&#160;Organization</b></p></td><td style="background-color:#ffffff;vertical-align:bottom;white-space:nowrap;width:1.8%;border-bottom:1px solid transparent;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="background-color:#ffffff;vertical-align:bottom;width:19.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Percentage&#160;Ownership(A)</b></p></td></tr><tr><td style="background-color:#ffffff;vertical-align:top;width:54.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:10.1pt;text-indent:-10.1pt;margin:0pt;"><font style="text-decoration:underline;visibility:hidden;">&#8203;</font></p></td><td style="background-color:#ffffff;vertical-align:bottom;width:1.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="background-color:#ffffff;vertical-align:bottom;width:21.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="background-color:#ffffff;vertical-align:bottom;width:1.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="background-color:#ffffff;vertical-align:bottom;width:19.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:top;width:54.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:10.1pt;text-indent:-10.1pt;margin:0pt;"><u style="text-decoration:underline;text-decoration-color:#000000;">U.S. Subsidiaries</u></p></td><td style="background-color:#cceeff;vertical-align:bottom;width:1.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="background-color:#cceeff;vertical-align:bottom;width:21.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="background-color:#cceeff;vertical-align:bottom;width:1.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="background-color:#cceeff;vertical-align:bottom;width:19.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td></tr><tr><td style="vertical-align:top;width:54.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:10pt;text-indent:-10pt;margin:0pt;">Ultratech International&#160;Inc.</p></td><td style="vertical-align:bottom;width:1.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:bottom;width:21.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">DE</p></td><td style="vertical-align:bottom;width:1.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:bottom;width:19.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">100%</p></td></tr><tr><td style="background-color:#cceeff;vertical-align:top;width:54.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:10pt;text-indent:-10pt;margin:0pt;">Veeco APAC LLC</p></td><td style="background-color:#cceeff;vertical-align:bottom;width:1.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="background-color:#cceeff;vertical-align:bottom;width:21.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">DE</p></td><td style="background-color:#cceeff;vertical-align:bottom;width:1.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="background-color:#cceeff;vertical-align:bottom;width:19.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">100%</p></td></tr><tr><td style="vertical-align:top;width:54.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:10pt;text-indent:-10pt;margin:0pt;">Veeco Process Equipment Inc.</p></td><td style="vertical-align:bottom;width:1.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:bottom;width:21.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">DE</p></td><td style="vertical-align:bottom;width:1.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:bottom;width:19.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">100%</p></td></tr><tr><td style="background-color:#cceeff;vertical-align:top;width:54.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:10pt;text-indent:-10pt;margin:0pt;"><font style="text-decoration:underline;visibility:hidden;">&#8203;</font></p></td><td style="background-color:#cceeff;vertical-align:bottom;width:1.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="background-color:#cceeff;vertical-align:bottom;width:21.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="background-color:#cceeff;vertical-align:bottom;width:1.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="background-color:#cceeff;vertical-align:bottom;width:19.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td></tr><tr><td style="vertical-align:top;width:54.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:10pt;text-indent:-10pt;margin:0pt;"><u style="text-decoration:underline;text-decoration-color:#000000;">Foreign Subsidiaries</u></p></td><td style="vertical-align:bottom;width:1.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:bottom;width:21.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:bottom;width:1.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:bottom;width:19.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:top;width:54.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:10pt;text-indent:-10pt;margin:0pt;">Veeco Asia Pte. Ltd.</p></td><td style="background-color:#cceeff;vertical-align:bottom;width:1.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="background-color:#cceeff;vertical-align:bottom;width:21.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">Singapore</p></td><td style="background-color:#cceeff;vertical-align:bottom;width:1.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="background-color:#cceeff;vertical-align:bottom;width:19.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">100%</p></td></tr><tr><td style="vertical-align:top;width:54.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:10pt;text-indent:-10pt;margin:0pt;">Veeco GmbH</p></td><td style="vertical-align:bottom;width:1.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:bottom;width:21.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">Germany</p></td><td style="vertical-align:bottom;width:1.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:bottom;width:19.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">100%</p></td></tr><tr><td style="background-color:#cceeff;vertical-align:top;width:54.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:10pt;text-indent:-10pt;margin:0pt;">Veeco Instruments Limited</p></td><td style="background-color:#cceeff;vertical-align:bottom;width:1.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="background-color:#cceeff;vertical-align:bottom;width:21.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">England</p></td><td style="background-color:#cceeff;vertical-align:bottom;width:1.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="background-color:#cceeff;vertical-align:bottom;width:19.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">100%</p></td></tr><tr><td style="vertical-align:top;width:54.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:10pt;text-indent:-10pt;margin:0pt;">Veeco Instruments (Shanghai) Co. Ltd.</p></td><td style="vertical-align:bottom;width:1.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:bottom;width:21.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">China</p></td><td style="vertical-align:bottom;width:1.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:bottom;width:19.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">100%</p></td></tr><tr><td style="background-color:#cceeff;vertical-align:top;width:54.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:10pt;text-indent:-10pt;margin:0pt;">Veeco Japan Ltd.</p></td><td style="background-color:#cceeff;vertical-align:bottom;width:1.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="background-color:#cceeff;vertical-align:bottom;width:21.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">Japan</p></td><td style="background-color:#cceeff;vertical-align:bottom;width:1.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="background-color:#cceeff;vertical-align:bottom;width:19.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">100%</p></td></tr><tr><td style="vertical-align:top;width:54.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:10pt;text-indent:-10pt;margin:0pt;">Veeco Korea LLC</p></td><td style="vertical-align:bottom;width:1.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:bottom;width:21.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">South Korea</p></td><td style="vertical-align:bottom;width:1.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:bottom;width:19.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">100%</p></td></tr><tr><td style="background-color:#cceeff;vertical-align:top;width:54.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:10pt;text-indent:-10pt;margin:0pt;">Veeco Malaysia Sdn. Bhd.</p></td><td style="background-color:#cceeff;vertical-align:bottom;width:1.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="background-color:#cceeff;vertical-align:bottom;width:21.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">Malaysia</p></td><td style="background-color:#cceeff;vertical-align:bottom;width:1.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="background-color:#cceeff;vertical-align:bottom;width:19.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">100%</p></td></tr><tr><td style="vertical-align:top;width:54.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:10pt;text-indent:-10pt;margin:0pt;">Veeco Netherlands BV</p></td><td style="vertical-align:bottom;width:1.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:bottom;width:21.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">Netherlands</p></td><td style="vertical-align:bottom;width:1.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:bottom;width:19.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">100%</p></td></tr><tr><td style="background-color:#cceeff;vertical-align:top;width:54.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:10pt;text-indent:-10pt;margin:0pt;">Veeco Taiwan Inc.</p></td><td style="background-color:#cceeff;vertical-align:bottom;width:1.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="background-color:#cceeff;vertical-align:bottom;width:21.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">Taiwan</p></td><td style="background-color:#cceeff;vertical-align:bottom;width:1.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="background-color:#cceeff;vertical-align:bottom;width:19.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">100%</p></td></tr><tr><td style="vertical-align:top;width:54.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:10pt;text-indent:-10pt;margin:0pt;">Ultra-Tech Technologies Israel Ltd.</p></td><td style="vertical-align:bottom;width:1.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:bottom;width:21.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">Israel</p></td><td style="vertical-align:bottom;width:1.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:bottom;width:19.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">100%</p></td></tr></table></div><div style="font-family:'Times New Roman','Times','serif';font-size:10.0pt;margin-bottom:0pt;margin-top:0pt;min-height:1.19em;position:relative;width:100%;"><hr noshade="true" color="#000000" size="1" width="25.0%" style="background-color:#000000;color:#000000;height:1pt;position:relative;top:0.6em;border:none;margin:0pt;" align="left"></div><table border="0" cellpadding="0" cellspacing="0" style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Times New Roman';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">(A)</td><td style="padding:0pt;"><font style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;text-align:left;">Includes direct and indirect ownership.</font></td></tr></table></div></div><hr style="background-color:#000000;clear:both;color:#000000;height:2pt;line-height:0;margin-left:10.35%;margin-right:10.35%;margin-top:30pt;page-break-after:avoid;width:79.3%;border-width:0;"></body></html>
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<DOCUMENT>
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<!--Enhanced HTML document created with Toppan Merrill Bridge  9.11.0.85--><!--Created on: 2/17/2022 11:13:01 PM (UTC)--><!DOCTYPE HTML PUBLIC "-//W3C//DTD HTML 4.01 Transitional//EN" "http://www.w3.org/TR/html4/loose.dtd"><html><head><meta charset="UTF-8"><title></title></head><body><div style="margin-top:30pt;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="clear:both;max-width:100%;position:relative;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><b style="font-weight:bold;">Exhibit&#160;23.1</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Consent of Independent Registered Public Accounting Firm</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Board of Directors<br>Veeco Instruments Inc.:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">We consent to the incorporation by reference in the registration statements listed below of our reports, dated February 18, 2022, with respect to the consolidated financial statements and financial statement schedule II &#8211; valuation and qualifying accounts of Veeco Instruments Inc. and the effectiveness of internal control over financial reporting.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><div><table style="background-color:#ffffff;border-collapse:collapse;font-size:16pt;height:max-content;margin-left:-0.010307312%;padding-left:0pt;padding-right:0pt;width:100.02%;" align="center"><tr style="height:1pt;"><td style="vertical-align:bottom;width:12.01%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="font-size:1pt;visibility:hidden;">&#8203;</font></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="font-size:1pt;visibility:hidden;">&#8203;</font></p></div></div></td><td style="vertical-align:bottom;width:7.71%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="font-size:1pt;visibility:hidden;">&#8203;</font></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.8%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="font-size:1pt;visibility:hidden;">&#8203;</font></p></div></div></td><td style="vertical-align:bottom;width:76.82%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="font-size:1pt;visibility:hidden;">&#8203;</font></p></div></div></td></tr><tr><td style="background-color:#ffffff;vertical-align:bottom;width:12.01%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Registration No.</b></p></td><td style="background-color:#ffffff;vertical-align:bottom;white-space:nowrap;width:1.64%;border-bottom:1px solid transparent;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="background-color:#ffffff;vertical-align:bottom;width:7.71%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Form</b></p></td><td style="background-color:#ffffff;vertical-align:bottom;white-space:nowrap;width:1.8%;border-bottom:1px solid transparent;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="background-color:#ffffff;vertical-align:bottom;width:76.82%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Plan</b></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:top;width:12.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt;">333-166852</p></td><td style="background-color:#cceeff;vertical-align:top;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="background-color:#cceeff;vertical-align:top;width:7.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">S-8</p></td><td style="background-color:#cceeff;vertical-align:top;width:1.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="background-color:#cceeff;vertical-align:top;width:76.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Veeco Instruments Inc. 2010 Stock Incentive Plan</p></td></tr><tr><td style="vertical-align:top;width:12.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt;">333-194737</p></td><td style="vertical-align:top;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:top;width:7.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">S-8</p></td><td style="vertical-align:top;width:1.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:top;width:76.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Veeco Instruments Inc. 2010 Stock Incentive Plan, Veeco Instruments Inc. 2013 Inducement Stock Incentive Plan</p></td></tr><tr><td style="background-color:#cceeff;vertical-align:top;width:12.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt;">333-211781</p></td><td style="background-color:#cceeff;vertical-align:top;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="background-color:#cceeff;vertical-align:top;width:7.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">S-8</p></td><td style="background-color:#cceeff;vertical-align:top;width:1.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="background-color:#cceeff;vertical-align:top;width:76.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Veeco Instruments Inc. Amended and Restated 2010 Stock Incentive Plan, Veeco Instruments Inc. 2016 Employee Stock Purchase Plan</p></td></tr><tr><td style="vertical-align:top;width:12.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt;">333-218256</p></td><td style="vertical-align:top;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:top;width:7.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">S-8</p></td><td style="vertical-align:top;width:1.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:top;width:76.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Ultratech, Inc. 1993 Stock Option/Stock Issuance Plan as amended and restated May 31, 2017</p></td></tr><tr><td style="background-color:#cceeff;vertical-align:top;width:12.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt;">333-231266</p></td><td style="background-color:#cceeff;vertical-align:top;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="background-color:#cceeff;vertical-align:top;width:7.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">S-8</p></td><td style="background-color:#cceeff;vertical-align:top;width:1.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="background-color:#cceeff;vertical-align:top;width:76.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Veeco Instruments Inc. 2019 Stock Incentive Plan; First Amendment to Veeco Instruments Inc. 2016 Employee Stock Purchase Plan</p></td></tr><tr><td style="vertical-align:top;width:12.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt;">333-242450</p></td><td style="vertical-align:top;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:top;width:7.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">S-3</p></td><td style="vertical-align:top;width:1.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:top;width:76.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Veeco Instruments Inc. Shelf Registration Statement</p></td></tr><tr><td style="background-color:#cceeff;vertical-align:top;width:12.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt;">333-256004</p></td><td style="background-color:#cceeff;vertical-align:top;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="background-color:#cceeff;vertical-align:top;width:7.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">S-8</p></td><td style="background-color:#cceeff;vertical-align:top;width:1.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="background-color:#cceeff;vertical-align:top;width:76.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Second Amendment to Veeco Instruments Inc. 2016 Employee Stock Purchase Plan</p></td></tr></table></div><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">/s/ KPMG LLP</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Melville, New York <br>February&#160;18, 2022</p></div></div><hr style="background-color:#000000;clear:both;color:#000000;height:2pt;line-height:0;margin-left:10.35%;margin-right:10.35%;margin-top:30pt;page-break-after:avoid;width:79.3%;border-width:0;"></body></html>
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<TYPE>EX-31.1
<SEQUENCE>4
<FILENAME>veco-20211231xex31d1.htm
<DESCRIPTION>EX-31.1
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<!--Enhanced HTML document created with Toppan Merrill Bridge  9.11.0.85--><!--Created on: 2/17/2022 11:13:03 PM (UTC)--><!DOCTYPE HTML PUBLIC "-//W3C//DTD HTML 4.01 Transitional//EN" "http://www.w3.org/TR/html4/loose.dtd"><html><head><meta charset="UTF-8"><title></title></head><body><div style="margin-top:30pt;"></div><div style="max-width:100%;padding-left:4.47%;padding-right:4.47%;position:relative;"><div style="clear:both;max-width:100%;position:relative;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><b style="font-weight:bold;">Exhibit&#160;31.1</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">CERTIFICATION PURSUANT TO</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">RULE 13a&#8212;14(a)&#160;or RULE 15d&#8212;14(a)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">OF THE SECURITIES EXCHANGE ACT OF 1934</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:18pt;margin:0pt;">I, William J. Miller, Ph.D., certify that:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><table border="0" cellpadding="0" cellspacing="0" style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Times New Roman';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">1.</td><td style="padding:0pt;"><font style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;text-align:left;">I have reviewed this annual report on Form&#160;10-K for the year ended December&#160;31, 2021 (the &#8220;Report&#8221;) of the Company;</font></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:18pt;text-indent:-18pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><table border="0" cellpadding="0" cellspacing="0" style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Times New Roman';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">2.</td><td style="padding:0pt;"><font style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;text-align:left;">Based on my knowledge, this report does not contain any untrue statement of a material fact or omit to state a material fact necessary to make the statements made, in light of the circumstances under which such statements were made, not misleading with respect to the period covered by this report;</font></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:18pt;text-indent:-18pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><table border="0" cellpadding="0" cellspacing="0" style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Times New Roman';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">3.</td><td style="padding:0pt;"><font style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;text-align:left;">Based on my knowledge, the financial statements, and other financial information included in this report, fairly present in all material respects the financial condition, results of operations and cash flows of the registrant as of, and for, the periods presented in this report;</font></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:18pt;text-indent:-18pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><table border="0" cellpadding="0" cellspacing="0" style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Times New Roman';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">4.</td><td style="padding:0pt;"><font style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;text-align:left;">The registrant&#8217;s other certifying officer and I are responsible for establishing and maintaining disclosure controls and procedures (as defined in Exchange Act Rules&#160;13a-15(e)&#160;and 15d-15(e)) and internal control over financial reporting (as defined in Exchange Act Rules&#160;13a-15(f)&#160;and 15d-15(f)) for the registrant and have:</font></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><table border="0" cellpadding="0" cellspacing="0" style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">(a)</td><td style="padding:0pt;"><font style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;text-align:left;">designed such disclosure controls and procedures, or caused such disclosure controls and procedures to be designed under our supervision, to ensure that material information relating to the registrant, including its consolidated subsidiaries, is made known to us by others within those entities, particularly during the period in which this report is being prepared;</font></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><table border="0" cellpadding="0" cellspacing="0" style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">(b)</td><td style="padding:0pt;"><font style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;text-align:left;">designed such internal control over financial reporting, or caused such internal control over financial reporting to be designed under our supervision, to provide reasonable assurance regarding the reliability of financial reporting and the preparation of financial statements for external purposes in accordance with generally accepted accounting principles;</font></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><table border="0" cellpadding="0" cellspacing="0" style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">(c)</td><td style="padding:0pt;"><font style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;text-align:left;">evaluated the effectiveness of the registrant&#8217;s disclosure controls and procedures and presented in this report our conclusions about the effectiveness of the disclosure controls and procedures, as of the end of the period covered by this report based on such evaluation; and</font></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><table border="0" cellpadding="0" cellspacing="0" style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">(d)</td><td style="padding:0pt;"><font style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;text-align:left;">disclosed in this report any change in the registrant&#8217;s internal control over financial reporting that occurred during the registrant&#8217;s most recent fiscal quarter (the registrant&#8217;s fourth fiscal quarter in the case of an annual report) that has materially affected, or is reasonably likely to materially affect, the registrant&#8217;s internal control over financial reporting; and</font></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><table border="0" cellpadding="0" cellspacing="0" style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Times New Roman';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">5.</td><td style="padding:0pt;"><font style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;text-align:left;">The registrant&#8217;s other certifying officer and I have disclosed, based on our most recent evaluation of internal control over financial reporting, to the registrant&#8217;s auditors and the audit committee of the registrant&#8217;s board of directors (or persons performing the equivalent functions):</font></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><table border="0" cellpadding="0" cellspacing="0" style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">(a)</td><td style="padding:0pt;"><font style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;text-align:left;">all significant deficiencies and material weaknesses in the design or operation of internal control over financial reporting which are reasonably likely to adversely affect the registrant&#8217;s ability to record, process, summarize and report financial information; and</font></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><table border="0" cellpadding="0" cellspacing="0" style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">(b)</td><td style="padding:0pt;"><font style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;text-align:left;">any fraud, whether or not material, that involves management or other employees who have a significant role in the registrant&#8217;s internal control over financial reporting.</font></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><div><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;table-layout:auto;width:100%;" align="center"><tr style="height:1pt;"><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:0pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="font-size:1pt;visibility:hidden;">&#8203;</font></p></div></div></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:0pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="font-size:1pt;visibility:hidden;">&#8203;</font></p></div></div></td></tr><tr><td style="vertical-align:top;width:50%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt;">/s/ WILLIAM J. MILLER, Ph.D.</p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td></tr><tr><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt;">William J. Miller, Ph.D.</p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td></tr><tr><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt;">Chief Executive Officer and Director</p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td></tr><tr><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt;">Veeco Instruments Inc.</p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td></tr><tr><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt;">February&#160;18, 2022</p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td></tr></table></div><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></div></div><hr style="background-color:#000000;clear:both;color:#000000;height:2pt;line-height:0;margin-left:4.47%;margin-right:4.47%;margin-top:30pt;page-break-after:avoid;width:91.06%;border-width:0;"></body></html>
</TEXT>
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<DOCUMENT>
<TYPE>EX-31.2
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<!--Enhanced HTML document created with Toppan Merrill Bridge  9.11.0.85--><!--Created on: 2/17/2022 11:13:06 PM (UTC)--><!DOCTYPE HTML PUBLIC "-//W3C//DTD HTML 4.01 Transitional//EN" "http://www.w3.org/TR/html4/loose.dtd"><html><head><meta charset="UTF-8"><title></title></head><body><div style="margin-top:30pt;"></div><div style="max-width:100%;padding-left:4.47%;padding-right:4.47%;position:relative;"><div style="clear:both;max-width:100%;position:relative;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><b style="font-weight:bold;">Exhibit&#160;31.2</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">CERTIFICATION PURSUANT TO</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">RULE 13a&#8212;14(a)&#160;or RULE 15d&#8212;14(a)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">OF THE SECURITIES EXCHANGE ACT OF 1934</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:18pt;margin:0pt;">I, John P. Kiernan, certify that:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><table border="0" cellpadding="0" cellspacing="0" style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Times New Roman';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">1.</td><td style="padding:0pt;"><font style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;text-align:left;">I have reviewed this annual report on Form&#160;10-K for the year ended December&#160;31, 2021 (the &#8220;Report&#8221;) of the Company;</font></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:18pt;text-indent:-18pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><table border="0" cellpadding="0" cellspacing="0" style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Times New Roman';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">2.</td><td style="padding:0pt;"><font style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;text-align:left;">Based on my knowledge, this report does not contain any untrue statement of a material fact or omit to state a material fact necessary to make the statements made, in light of the circumstances under which such statements were made, not misleading with respect to the period covered by this report;</font></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:18pt;text-indent:-18pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><table border="0" cellpadding="0" cellspacing="0" style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Times New Roman';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">3.</td><td style="padding:0pt;"><font style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;text-align:left;">Based on my knowledge, the financial statements, and other financial information included in this report, fairly present in all material respects the financial condition, results of operations and cash flows of the registrant as of, and for, the periods presented in this report;</font></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:18pt;text-indent:-18pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><table border="0" cellpadding="0" cellspacing="0" style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Times New Roman';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">4.</td><td style="padding:0pt;"><font style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;text-align:left;">The registrant&#8217;s other certifying officer and I are responsible for establishing and maintaining disclosure controls and procedures (as defined in Exchange Act Rules&#160;13a-15(e)&#160;and 15d-15(e)) and internal control over financial reporting (as defined in Exchange Act Rules&#160;13a-15(f)&#160;and 15d-15(f)) for the registrant and have:</font></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><table border="0" cellpadding="0" cellspacing="0" style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">(a)</td><td style="padding:0pt;"><font style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;text-align:left;">designed such disclosure controls and procedures, or caused such disclosure controls and procedures to be designed under our supervision, to ensure that material information relating to the registrant, including its consolidated subsidiaries, is made known to us by others within those entities, particularly during the period in which this report is being prepared;</font></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><table border="0" cellpadding="0" cellspacing="0" style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">(b)</td><td style="padding:0pt;"><font style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;text-align:left;">designed such internal control over financial reporting, or caused such internal control over financial reporting to be designed under our supervision, to provide reasonable assurance regarding the reliability of financial reporting and the preparation of financial statements for external purposes in accordance with generally accepted accounting principles;</font></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><table border="0" cellpadding="0" cellspacing="0" style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">(c)</td><td style="padding:0pt;"><font style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;text-align:left;">evaluated the effectiveness of the registrant&#8217;s disclosure controls and procedures and presented in this report our conclusions about the effectiveness of the disclosure controls and procedures, as of the end of the period covered by this report based on such evaluation; and</font></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><table border="0" cellpadding="0" cellspacing="0" style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">(d)</td><td style="padding:0pt;"><font style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;text-align:left;">disclosed in this report any change in the registrant&#8217;s internal control over financial reporting that occurred during the registrant&#8217;s most recent fiscal quarter (the registrant&#8217;s fourth fiscal quarter in the case of an annual report) that has materially affected, or is reasonably likely to materially affect, the registrant&#8217;s internal control over financial reporting; and</font></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><table border="0" cellpadding="0" cellspacing="0" style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Times New Roman';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">5.</td><td style="padding:0pt;"><font style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;text-align:left;">The registrant&#8217;s other certifying officer and I have disclosed, based on our most recent evaluation of internal control over financial reporting, to the registrant&#8217;s auditors and the audit committee of the registrant&#8217;s board of directors (or persons performing the equivalent functions):</font></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><table border="0" cellpadding="0" cellspacing="0" style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">(a)</td><td style="padding:0pt;"><font style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;text-align:left;">all significant deficiencies and material weaknesses in the design or operation of internal control over financial reporting which are reasonably likely to adversely affect the registrant&#8217;s ability to record, process, summarize and report financial information; and</font></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><table border="0" cellpadding="0" cellspacing="0" style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">(b)</td><td style="padding:0pt;"><font style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;text-align:left;">any fraud, whether or not material, that involves management or other employees who have a significant role in the registrant&#8217;s internal control over financial reporting.</font></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><div><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;table-layout:auto;width:100%;" align="center"><tr style="height:1pt;"><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:0pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="font-size:1pt;visibility:hidden;">&#8203;</font></p></div></div></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:0pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="font-size:1pt;visibility:hidden;">&#8203;</font></p></div></div></td></tr><tr><td style="vertical-align:top;width:50%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">/s/ John P. Kiernan</p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td></tr><tr><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt;">John P. Kiernan</p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td></tr><tr><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt;">Senior Vice President and Chief Financial Officer</p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td></tr><tr><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt;">Veeco Instruments Inc.</p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td></tr><tr><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt;">February&#160;18, 2022</p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td></tr></table></div><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></div></div><hr style="background-color:#000000;clear:both;color:#000000;height:2pt;line-height:0;margin-left:4.47%;margin-right:4.47%;margin-top:30pt;page-break-after:avoid;width:91.06%;border-width:0;"></body></html>
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<DOCUMENT>
<TYPE>EX-32.1
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<DESCRIPTION>EX-32.1
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<!--Enhanced HTML document created with Toppan Merrill Bridge  9.11.0.85--><!--Created on: 2/17/2022 11:13:08 PM (UTC)--><!DOCTYPE HTML PUBLIC "-//W3C//DTD HTML 4.01 Transitional//EN" "http://www.w3.org/TR/html4/loose.dtd"><html><head><meta charset="UTF-8"><title></title></head><body><div style="margin-top:30pt;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="clear:both;max-width:100%;position:relative;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><b style="font-weight:bold;">Exhibit&#160;32.1</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">CERTIFICATION PURSUANT TO</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">18 U.S.C. SECTION&#160;1350,</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">AS ADOPTED PURSUANT TO</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">SECTION&#160;906 OF THE SARBANES-OXLEY ACT OF 2002</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:18pt;margin:0pt;">In connection with the Annual Report of Veeco Instruments Inc. (the &#8220;Company&#8221;) on Form&#160;10-K for the year ended December&#160;31, 2021 as filed with the Securities and Exchange Commission on the date hereof (the &#8220;Report&#8221;),&#160;I, William J. Miller, Ph.D., Chief Executive Officer of the Company, certify, pursuant to 18 U.S.C. 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MILLER, Ph.D.</p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td></tr><tr><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt;">William J. Miller, Ph.D.</p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td></tr><tr><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt;">Chief Executive Officer and Director</p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td></tr><tr><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt;">Veeco Instruments Inc.</p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td></tr><tr><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt;">February&#160;18, 2022</p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td></tr></table></div><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">A signed original of this written statement required by Section&#160;906 has been provided to Veeco Instruments Inc. and will be retained by Veeco Instruments Inc. and furnished to the Securities and Exchange Commission or its staff upon request.</p></div></div><hr style="background-color:#000000;clear:both;color:#000000;height:2pt;line-height:0;margin-left:10.35%;margin-right:10.35%;margin-top:30pt;page-break-after:avoid;width:79.3%;border-width:0;"></body></html>
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<!--Enhanced HTML document created with Toppan Merrill Bridge  9.11.0.85--><!--Created on: 2/17/2022 11:13:11 PM (UTC)--><!DOCTYPE HTML PUBLIC "-//W3C//DTD HTML 4.01 Transitional//EN" "http://www.w3.org/TR/html4/loose.dtd"><html><head><meta charset="UTF-8"><title></title></head><body><div style="margin-top:30pt;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="clear:both;max-width:100%;position:relative;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><b style="font-weight:bold;">Exhibit&#160;32.2</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">CERTIFICATION PURSUANT TO</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">18 U.S.C. SECTION&#160;1350,</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">AS ADOPTED PURSUANT TO</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">SECTION&#160;906 OF THE SARBANES-OXLEY ACT OF 2002</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:18pt;margin:0pt;">In connection with the Annual Report of Veeco Instruments Inc. (the &#8220;Company&#8221;) on Form&#160;10-K for the year ended December&#160;31, 2021 as filed with the Securities and Exchange Commission on the date hereof (the &#8220;Report&#8221;),&#160;I, John P. Kiernan, Senior Vice President and Chief Financial Officer of the Company, certify, pursuant to 18 U.S.C. 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Kiernan</p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td></tr><tr><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt;">Senior Vice President and Chief Financial Officer</p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td></tr><tr><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt;">Veeco Instruments Inc.</p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td></tr><tr><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt;">February&#160;18, 2022</p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td></tr></table></div><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">A signed original of this written statement required by Section&#160;906 has been provided to Veeco Instruments Inc. and will be retained by Veeco Instruments Inc. and furnished to the Securities and Exchange Commission or its staff upon request.</p></div></div><hr style="background-color:#000000;clear:both;color:#000000;height:2pt;line-height:0;margin-left:10.35%;margin-right:10.35%;margin-top:30pt;page-break-after:avoid;width:79.3%;border-width:0;"></body></html>
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<DOCUMENT>
<TYPE>EX-101.CAL
<SEQUENCE>11
<FILENAME>veco-20211231_cal.xml
<DESCRIPTION>EX-101.CAL
<TEXT>
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<SEQUENCE>13
<FILENAME>veco-20211231_lab.xml
<DESCRIPTION>EX-101.LAB
<TEXT>
<XBRL>
<?xml version="1.0" encoding="us-ascii"?>
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<!--Based on XBRL 2.1-->
<!--Created on: 2/17/2022 11:12:21 PM-->
<!--Modified on: 2/17/2022 11:12:21 PM-->
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    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_DocumentTransitionReport" xlink:to="dei_DocumentTransitionReport_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
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    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_EntityFileNumber" xlink:label="dei_EntityFileNumber" xmlns="http://www.xbrl.org/2003/linkbase" />
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    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_EntityRegistrantName" xlink:label="dei_EntityRegistrantName" xmlns="http://www.xbrl.org/2003/linkbase" />
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    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityIncorporationStateCountryCode" xlink:to="dei_EntityIncorporationStateCountryCode_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
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    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_EntityAddressAddressLine1" xlink:label="dei_EntityAddressAddressLine1" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityAddressAddressLine1" xlink:to="dei_EntityAddressAddressLine1_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
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    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityAddressCityOrTown" xlink:to="dei_EntityAddressCityOrTown_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
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    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityAddressStateOrProvince" xlink:to="dei_EntityAddressStateOrProvince_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
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    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_EntityAddressPostalZipCode" xlink:label="dei_EntityAddressPostalZipCode" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityAddressPostalZipCode" xlink:to="dei_EntityAddressPostalZipCode_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
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    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_CityAreaCode" xlink:to="dei_CityAreaCode_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
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    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_LocalPhoneNumber" xlink:label="dei_LocalPhoneNumber" xmlns="http://www.xbrl.org/2003/linkbase" />
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    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_Security12bTitle" xlink:label="dei_Security12bTitle" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_Security12bTitle" xlink:to="dei_Security12bTitle_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
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    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_SecurityExchangeName" xlink:label="dei_SecurityExchangeName" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_SecurityExchangeName" xlink:to="dei_SecurityExchangeName_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
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    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_EntityWellKnownSeasonedIssuer" xlink:label="dei_EntityWellKnownSeasonedIssuer" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityWellKnownSeasonedIssuer" xlink:to="dei_EntityWellKnownSeasonedIssuer_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
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    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_EntityVoluntaryFilers" xlink:label="dei_EntityVoluntaryFilers" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityVoluntaryFilers" xlink:to="dei_EntityVoluntaryFilers_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
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    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_EntityCurrentReportingStatus" xlink:label="dei_EntityCurrentReportingStatus" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityCurrentReportingStatus" xlink:to="dei_EntityCurrentReportingStatus_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
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    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_EntityInteractiveDataCurrent" xlink:label="dei_EntityInteractiveDataCurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityInteractiveDataCurrent" xlink:to="dei_EntityInteractiveDataCurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
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    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_EntityFilerCategory" xlink:label="dei_EntityFilerCategory" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityFilerCategory" xlink:to="dei_EntityFilerCategory_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
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    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_EntitySmallBusiness" xlink:label="dei_EntitySmallBusiness" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntitySmallBusiness" xlink:to="dei_EntitySmallBusiness_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_EntitySmallBusiness_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Entity Small Business</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_EntityEmergingGrowthCompany" xlink:label="dei_EntityEmergingGrowthCompany" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityEmergingGrowthCompany" xlink:to="dei_EntityEmergingGrowthCompany_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_EntityEmergingGrowthCompany_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Entity Emerging Growth Company</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_EntityShellCompany" xlink:label="dei_EntityShellCompany" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityShellCompany" xlink:to="dei_EntityShellCompany_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_EntityShellCompany_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Entity Shell Company</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_IcfrAuditorAttestationFlag" xlink:label="dei_IcfrAuditorAttestationFlag" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_IcfrAuditorAttestationFlag" xlink:to="dei_IcfrAuditorAttestationFlag_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_IcfrAuditorAttestationFlag_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">ICFR Auditor Attestation Flag</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_EntityPublicFloat" xlink:label="dei_EntityPublicFloat" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityPublicFloat" xlink:to="dei_EntityPublicFloat_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
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    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_EntityCommonStockSharesOutstanding" xlink:label="dei_EntityCommonStockSharesOutstanding" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityCommonStockSharesOutstanding" xlink:to="dei_EntityCommonStockSharesOutstanding_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
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    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_AuditorName" xlink:label="dei_AuditorName" xmlns="http://www.xbrl.org/2003/linkbase" />
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    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AssetsAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Assets [ Abstract ]</label>
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    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AssetsCurrentAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Assets, Current [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_AssetsCurrentAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Current assets:</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_CashAndCashEquivalentsAtCarryingValue" xlink:label="us-gaap_CashAndCashEquivalentsAtCarryingValue" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CashAndCashEquivalentsAtCarryingValue" xlink:to="us-gaap_CashAndCashEquivalentsAtCarryingValue_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_CashAndCashEquivalentsAtCarryingValue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cash and Cash Equivalents, at Carrying Value</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_CashAndCashEquivalentsAtCarryingValue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cash and cash equivalents</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_RestrictedCashAndCashEquivalentsAtCarryingValue" xlink:label="us-gaap_RestrictedCashAndCashEquivalentsAtCarryingValue" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_RestrictedCashAndCashEquivalentsAtCarryingValue" xlink:to="us-gaap_RestrictedCashAndCashEquivalentsAtCarryingValue_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_RestrictedCashAndCashEquivalentsAtCarryingValue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Restricted Cash and Cash Equivalents, Current</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_RestrictedCashAndCashEquivalentsAtCarryingValue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Restricted cash</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_AvailableForSaleSecuritiesDebtSecuritiesCurrent" xlink:label="us-gaap_AvailableForSaleSecuritiesDebtSecuritiesCurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AvailableForSaleSecuritiesDebtSecuritiesCurrent" xlink:to="us-gaap_AvailableForSaleSecuritiesDebtSecuritiesCurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AvailableForSaleSecuritiesDebtSecuritiesCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Available-for-sale Securities, Debt Securities, Current</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_AvailableForSaleSecuritiesDebtSecuritiesCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Short-term investments</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_AccountsReceivableNetCurrent" xlink:label="us-gaap_AccountsReceivableNetCurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AccountsReceivableNetCurrent" xlink:to="us-gaap_AccountsReceivableNetCurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AccountsReceivableNetCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accounts Receivable, Net, Current</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_AccountsReceivableNetCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accounts receivable, net</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_UnbilledContractsReceivable" xlink:label="us-gaap_UnbilledContractsReceivable" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_UnbilledContractsReceivable" xlink:to="us-gaap_UnbilledContractsReceivable_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_UnbilledContractsReceivable_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Unbilled Contracts Receivable</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_UnbilledContractsReceivable_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Contract assets</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_InventoryNet" xlink:label="us-gaap_InventoryNet" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_InventoryNet" xlink:to="us-gaap_InventoryNet_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_InventoryNet_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Inventory, Net</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_InventoryNet_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Inventories</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_InventoryNet_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_DeferredCostsCurrent" xlink:label="us-gaap_DeferredCostsCurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DeferredCostsCurrent" xlink:to="us-gaap_DeferredCostsCurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DeferredCostsCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred Costs, Current</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_DeferredCostsCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred cost of sales</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_PrepaidExpenseAndOtherAssetsCurrent" xlink:label="us-gaap_PrepaidExpenseAndOtherAssetsCurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PrepaidExpenseAndOtherAssetsCurrent" xlink:to="us-gaap_PrepaidExpenseAndOtherAssetsCurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_PrepaidExpenseAndOtherAssetsCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Prepaid Expense and Other Assets, Current</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_PrepaidExpenseAndOtherAssetsCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Prepaid expenses and other current assets</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_AssetsCurrent" xlink:label="us-gaap_AssetsCurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AssetsCurrent" xlink:to="us-gaap_AssetsCurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AssetsCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Assets, Current</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_AssetsCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total current assets</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_PropertyPlantAndEquipmentNet" xlink:label="us-gaap_PropertyPlantAndEquipmentNet" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PropertyPlantAndEquipmentNet" xlink:to="us-gaap_PropertyPlantAndEquipmentNet_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_PropertyPlantAndEquipmentNet_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Property, Plant and Equipment, Net</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_PropertyPlantAndEquipmentNet_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Property, plant, and equipment, net</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_PropertyPlantAndEquipmentNet_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Net property, plant, and equipment</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_PropertyPlantAndEquipmentNet_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Long-lived tangible assets</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_OperatingLeaseRightOfUseAsset" xlink:label="us-gaap_OperatingLeaseRightOfUseAsset" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OperatingLeaseRightOfUseAsset" xlink:to="us-gaap_OperatingLeaseRightOfUseAsset_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OperatingLeaseRightOfUseAsset_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating Lease, Right-of-Use Asset</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_OperatingLeaseRightOfUseAsset_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating lease right-of-use assets</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_IntangibleAssetsNetExcludingGoodwill" xlink:label="us-gaap_IntangibleAssetsNetExcludingGoodwill" xmlns="http://www.xbrl.org/2003/linkbase" />
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    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_IntangibleAssetsNetExcludingGoodwill_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Intangible assets, net</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_IntangibleAssetsNetExcludingGoodwill_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total Net Intangible Assets</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_Goodwill" xlink:label="us-gaap_Goodwill" xmlns="http://www.xbrl.org/2003/linkbase" />
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    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_Goodwill_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Goodwill</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_Goodwill_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Goodwill</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_Goodwill_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Net amount</label>
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    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DeferredIncomeTaxAssetsNet" xlink:to="us-gaap_DeferredIncomeTaxAssetsNet_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DeferredIncomeTaxAssetsNet_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred Income Tax Assets, Net</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_DeferredIncomeTaxAssetsNet_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred income taxes</label>
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    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OtherAssetsNoncurrent" xlink:to="us-gaap_OtherAssetsNoncurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
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    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_OtherAssetsNoncurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Other assets</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_Assets" xlink:label="us-gaap_Assets" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_Assets" xlink:to="us-gaap_Assets_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_Assets_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Assets.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_Assets_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total assets</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_LiabilitiesAndStockholdersEquityAbstract" xlink:label="us-gaap_LiabilitiesAndStockholdersEquityAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LiabilitiesAndStockholdersEquityAbstract" xlink:to="us-gaap_LiabilitiesAndStockholdersEquityAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LiabilitiesAndStockholdersEquityAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Liabilities and Equity [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_LiabilitiesAndStockholdersEquityAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Liabilities and stockholders' equity</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_LiabilitiesCurrentAbstract" xlink:label="us-gaap_LiabilitiesCurrentAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LiabilitiesCurrentAbstract" xlink:to="us-gaap_LiabilitiesCurrentAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LiabilitiesCurrentAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Liabilities, Current [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_LiabilitiesCurrentAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Current liabilities:</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_AccountsPayableCurrent" xlink:label="us-gaap_AccountsPayableCurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AccountsPayableCurrent" xlink:to="us-gaap_AccountsPayableCurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AccountsPayableCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accounts Payable, Current</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_AccountsPayableCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accounts payable</label>
    <loc xlink:type="locator" xlink:href="veco-20211231.xsd#veco_AccruedAndOtherLiabilitiesCurrent" xlink:label="veco_AccruedAndOtherLiabilitiesCurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_AccruedAndOtherLiabilitiesCurrent" xlink:to="veco_AccruedAndOtherLiabilitiesCurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_AccruedAndOtherLiabilitiesCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Carrying value as of the balance sheet date of obligations incurred and payable, pertaining to costs that are statutory in nature, are incurred on contractual obligations, or accumulate over time and for which invoices have not yet been received or will not be rendered. Examples include taxes, interest, rent and utilities. Used to reflect the current portion of the liabilities (due within one year or within the normal operating cycle if longer). Also includes amount of liabilities classified as other, due within one year or the normal operating cycle, if longer.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_AccruedAndOtherLiabilitiesCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accrued and Other Liabilities, Current</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_AccruedAndOtherLiabilitiesCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accrued expenses and other current liabilities</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="veco_AccruedAndOtherLiabilitiesCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total</label>
    <loc xlink:type="locator" xlink:href="veco-20211231.xsd#veco_ContractWithCustomerLiabilityAndRefundLiabilityCurrent" xlink:label="veco_ContractWithCustomerLiabilityAndRefundLiabilityCurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_ContractWithCustomerLiabilityAndRefundLiabilityCurrent" xlink:to="veco_ContractWithCustomerLiabilityAndRefundLiabilityCurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_ContractWithCustomerLiabilityAndRefundLiabilityCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Amount of obligation to transfer good or service to customer for which consideration has been received or is receivable. Also includes amount of liability for consideration received or receivable from customer which is not included in transaction price, when consideration is expected to be refunded to customer, classified as current.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_ContractWithCustomerLiabilityAndRefundLiabilityCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Contract with Customer, Liability and Refund Liability, Current</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_ContractWithCustomerLiabilityAndRefundLiabilityCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Customer deposits and deferred revenue</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_AccruedIncomeTaxesCurrent" xlink:label="us-gaap_AccruedIncomeTaxesCurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AccruedIncomeTaxesCurrent" xlink:to="us-gaap_AccruedIncomeTaxesCurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AccruedIncomeTaxesCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accrued Income Taxes, Current</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_AccruedIncomeTaxesCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Income taxes payable</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_LiabilitiesCurrent" xlink:label="us-gaap_LiabilitiesCurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LiabilitiesCurrent" xlink:to="us-gaap_LiabilitiesCurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LiabilitiesCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Liabilities, Current</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_LiabilitiesCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total current liabilities</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_DeferredIncomeTaxLiabilitiesNet" xlink:label="us-gaap_DeferredIncomeTaxLiabilitiesNet" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DeferredIncomeTaxLiabilitiesNet" xlink:to="us-gaap_DeferredIncomeTaxLiabilitiesNet_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DeferredIncomeTaxLiabilitiesNet_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred Income Tax Liabilities, Net</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_DeferredIncomeTaxLiabilitiesNet_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred income taxes</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_LongTermDebtNoncurrent" xlink:label="us-gaap_LongTermDebtNoncurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LongTermDebtNoncurrent" xlink:to="us-gaap_LongTermDebtNoncurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LongTermDebtNoncurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Long-term Debt, Excluding Current Maturities</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_LongTermDebtNoncurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Long-term debt</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_OperatingLeaseLiabilityNoncurrent" xlink:label="us-gaap_OperatingLeaseLiabilityNoncurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OperatingLeaseLiabilityNoncurrent" xlink:to="us-gaap_OperatingLeaseLiabilityNoncurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OperatingLeaseLiabilityNoncurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating Lease, Liability, Noncurrent</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_OperatingLeaseLiabilityNoncurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Long-term operating lease liabilities</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_OtherLiabilitiesNoncurrent" xlink:label="us-gaap_OtherLiabilitiesNoncurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OtherLiabilitiesNoncurrent" xlink:to="us-gaap_OtherLiabilitiesNoncurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OtherLiabilitiesNoncurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Other Liabilities, Noncurrent</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_OtherLiabilitiesNoncurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Other liabilities</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_Liabilities" xlink:label="us-gaap_Liabilities" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_Liabilities" xlink:to="us-gaap_Liabilities_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_Liabilities_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Liabilities.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_Liabilities_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total liabilities</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_StockholdersEquityAbstract" xlink:label="us-gaap_StockholdersEquityAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_StockholdersEquityAbstract" xlink:to="us-gaap_StockholdersEquityAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_StockholdersEquityAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Stockholders' Equity Attributable to Parent [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_StockholdersEquityAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Stockholders' equity:</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_PreferredStockValue" xlink:label="us-gaap_PreferredStockValue" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PreferredStockValue" xlink:to="us-gaap_PreferredStockValue_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_PreferredStockValue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Preferred Stock, Value, Issued</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_PreferredStockValue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Preferred stock, $0.01 par value; 500,000 shares authorized; no shares issued and outstanding.</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_CommonStockValue" xlink:label="us-gaap_CommonStockValue" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CommonStockValue" xlink:to="us-gaap_CommonStockValue_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_CommonStockValue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Common Stock, Value, Issued</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_CommonStockValue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Common stock, $0.01 par value; 120,000,000 shares authorized; 50,652,864 shares issued and outstanding at December 31, 2021 and 49,723,751 shares issued and outstanding at December 31, 2020</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_AdditionalPaidInCapitalCommonStock" xlink:label="us-gaap_AdditionalPaidInCapitalCommonStock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AdditionalPaidInCapitalCommonStock" xlink:to="us-gaap_AdditionalPaidInCapitalCommonStock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AdditionalPaidInCapitalCommonStock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Additional Paid in Capital, Common Stock</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_AdditionalPaidInCapitalCommonStock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Additional paid-in capital</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_RetainedEarningsAccumulatedDeficit" xlink:label="us-gaap_RetainedEarningsAccumulatedDeficit" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_RetainedEarningsAccumulatedDeficit" xlink:to="us-gaap_RetainedEarningsAccumulatedDeficit_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_RetainedEarningsAccumulatedDeficit_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Retained Earnings (Accumulated Deficit).</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_RetainedEarningsAccumulatedDeficit_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accumulated deficit</label>
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    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_StockholdersEquity" xlink:to="us-gaap_StockholdersEquity_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_StockholdersEquity_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Stockholders' Equity Attributable to Parent</label>
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    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_StockholdersEquity_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total stockholders' equity</label>
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    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LiabilitiesAndStockholdersEquity" xlink:to="us-gaap_LiabilitiesAndStockholdersEquity_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LiabilitiesAndStockholdersEquity_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Liabilities and Equity</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_LiabilitiesAndStockholdersEquity_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total liabilities and stockholders' equity</label>
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    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_PreferredStockParOrStatedValuePerShare_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Preferred Stock, Par or Stated Value Per Share</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_PreferredStockParOrStatedValuePerShare_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Preferred stock, par value (in dollars per share)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_PreferredStockSharesAuthorized" xlink:label="us-gaap_PreferredStockSharesAuthorized" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PreferredStockSharesAuthorized" xlink:to="us-gaap_PreferredStockSharesAuthorized_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_PreferredStockSharesAuthorized_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Preferred Stock, Shares Authorized</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_PreferredStockSharesAuthorized_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Preferred stock, shares authorized</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_PreferredStockSharesIssued" xlink:label="us-gaap_PreferredStockSharesIssued" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PreferredStockSharesIssued" xlink:to="us-gaap_PreferredStockSharesIssued_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_PreferredStockSharesIssued_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Preferred Stock, Shares Issued</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_PreferredStockSharesIssued_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Preferred stock, shares issued</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_PreferredStockSharesOutstanding" xlink:label="us-gaap_PreferredStockSharesOutstanding" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PreferredStockSharesOutstanding" xlink:to="us-gaap_PreferredStockSharesOutstanding_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_PreferredStockSharesOutstanding_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Preferred Stock, Shares Outstanding</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_PreferredStockSharesOutstanding_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Preferred stock, shares outstanding</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_CommonStockParOrStatedValuePerShare" xlink:label="us-gaap_CommonStockParOrStatedValuePerShare" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CommonStockParOrStatedValuePerShare" xlink:to="us-gaap_CommonStockParOrStatedValuePerShare_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_CommonStockParOrStatedValuePerShare_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Common Stock, Par or Stated Value Per Share</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_CommonStockParOrStatedValuePerShare_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Common stock, par value (in dollars per share)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_CommonStockSharesAuthorized" xlink:label="us-gaap_CommonStockSharesAuthorized" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CommonStockSharesAuthorized" xlink:to="us-gaap_CommonStockSharesAuthorized_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_CommonStockSharesAuthorized_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Common Stock, Shares Authorized</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_CommonStockSharesAuthorized_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Common stock, authorized shares</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_CommonStockSharesIssued" xlink:label="us-gaap_CommonStockSharesIssued" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CommonStockSharesIssued" xlink:to="us-gaap_CommonStockSharesIssued_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_CommonStockSharesIssued_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Common Stock, Shares, Issued</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_CommonStockSharesIssued_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Common stock, shares issued</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_CommonStockSharesOutstanding" xlink:label="us-gaap_CommonStockSharesOutstanding" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CommonStockSharesOutstanding" xlink:to="us-gaap_CommonStockSharesOutstanding_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_CommonStockSharesOutstanding_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Common Stock, Shares, Outstanding</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_CommonStockSharesOutstanding_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Common stock, shares outstanding</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_IncomeStatementAbstract" xlink:label="us-gaap_IncomeStatementAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeStatementAbstract" xlink:to="us-gaap_IncomeStatementAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncomeStatementAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Consolidated Statements of Operations</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_RevenueFromContractWithCustomerIncludingAssessedTax" xlink:label="us-gaap_RevenueFromContractWithCustomerIncludingAssessedTax" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_RevenueFromContractWithCustomerIncludingAssessedTax" xlink:to="us-gaap_RevenueFromContractWithCustomerIncludingAssessedTax_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_RevenueFromContractWithCustomerIncludingAssessedTax_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Revenue from Contract with Customer, Including Assessed Tax</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_RevenueFromContractWithCustomerIncludingAssessedTax_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Net sales</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_CostOfGoodsAndServicesSold" xlink:label="us-gaap_CostOfGoodsAndServicesSold" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CostOfGoodsAndServicesSold" xlink:to="us-gaap_CostOfGoodsAndServicesSold_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_CostOfGoodsAndServicesSold_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cost of Goods and Services Sold</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_CostOfGoodsAndServicesSold_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cost of sales</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_GrossProfit" xlink:label="us-gaap_GrossProfit" xmlns="http://www.xbrl.org/2003/linkbase" />
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    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_GrossProfit_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Gross Profit</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_GrossProfit_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Gross profit</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_OperatingExpensesAbstract" xlink:label="us-gaap_OperatingExpensesAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OperatingExpensesAbstract" xlink:to="us-gaap_OperatingExpensesAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OperatingExpensesAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating Expenses [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_OperatingExpensesAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating expenses, net:</label>
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    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ResearchAndDevelopmentExpense_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Research and Development Expense.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ResearchAndDevelopmentExpense_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Research and development</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_SellingGeneralAndAdministrativeExpense" xlink:label="us-gaap_SellingGeneralAndAdministrativeExpense" xmlns="http://www.xbrl.org/2003/linkbase" />
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    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_SellingGeneralAndAdministrativeExpense_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Selling, general, and administrative</label>
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    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_AmortizationOfIntangibleAssets_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Amortization of intangible assets</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_RestructuringCharges" xlink:label="us-gaap_RestructuringCharges" xmlns="http://www.xbrl.org/2003/linkbase" />
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    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_RestructuringCharges_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Restructuring Charges.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_RestructuringCharges_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Restructuring</label>
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    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_WeightedAverageNumberOfSharesOutstandingBasic_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Basic (in shares)</label>
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    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Diluted (in shares)</label>
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    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensation" xlink:to="us-gaap_ShareBasedCompensation_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShareBasedCompensation_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share based Compensation</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ShareBasedCompensation_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based compensation expense</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_GainsLossesOnExtinguishmentOfDebt" xlink:label="us-gaap_GainsLossesOnExtinguishmentOfDebt" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_GainsLossesOnExtinguishmentOfDebt" xlink:to="us-gaap_GainsLossesOnExtinguishmentOfDebt_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_GainsLossesOnExtinguishmentOfDebt_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Gain (Loss) on Extinguishment of Debt</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="us-gaap_GainsLossesOnExtinguishmentOfDebt_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Loss on extinguishment of debt</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_GainsLossesOnExtinguishmentOfDebt_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Loss on extinguishment of debt</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_ImpairmentOfInvestments" xlink:label="us-gaap_ImpairmentOfInvestments" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ImpairmentOfInvestments" xlink:to="us-gaap_ImpairmentOfInvestments_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ImpairmentOfInvestments_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Other than Temporary Impairment Losses, Investments</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ImpairmentOfInvestments_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Impairment of equity investments</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_ProvisionForDoubtfulAccounts" xlink:label="us-gaap_ProvisionForDoubtfulAccounts" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ProvisionForDoubtfulAccounts" xlink:to="us-gaap_ProvisionForDoubtfulAccounts_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ProvisionForDoubtfulAccounts_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Provision for Doubtful Accounts</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ProvisionForDoubtfulAccounts_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Provision for bad debts</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_IncreaseDecreaseInOperatingCapitalAbstract" xlink:label="us-gaap_IncreaseDecreaseInOperatingCapitalAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncreaseDecreaseInOperatingCapitalAbstract" xlink:to="us-gaap_IncreaseDecreaseInOperatingCapitalAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncreaseDecreaseInOperatingCapitalAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Increase (Decrease) in Operating Capital [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_IncreaseDecreaseInOperatingCapitalAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Changes in operating assets and liabilities:</label>
    <loc xlink:type="locator" xlink:href="veco-20211231.xsd#veco_IncreaseDecreaseInAccountsReceivableAndContractAssets" xlink:label="veco_IncreaseDecreaseInAccountsReceivableAndContractAssets" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_IncreaseDecreaseInAccountsReceivableAndContractAssets" xlink:to="veco_IncreaseDecreaseInAccountsReceivableAndContractAssets_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_IncreaseDecreaseInAccountsReceivableAndContractAssets_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">The increase (decrease) during the reporting period in amount due within one year (or one business cycle) from customers for the credit sale of goods and services and contract assets.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_IncreaseDecreaseInAccountsReceivableAndContractAssets_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Increase Decrease in Accounts Receivable and Contract Assets</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="veco_IncreaseDecreaseInAccountsReceivableAndContractAssets_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accounts receivable and contract assets</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_IncreaseDecreaseInInventories" xlink:label="us-gaap_IncreaseDecreaseInInventories" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncreaseDecreaseInInventories" xlink:to="us-gaap_IncreaseDecreaseInInventories_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncreaseDecreaseInInventories_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Increase (Decrease) in Inventories</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="us-gaap_IncreaseDecreaseInInventories_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Inventories and deferred cost of sales</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets" xlink:label="us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets" xlink:to="us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Increase (Decrease) in Prepaid Expense and Other Assets</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Prepaid expenses and other current assets</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_IncreaseDecreaseInAccountsPayableAndAccruedLiabilities" xlink:label="us-gaap_IncreaseDecreaseInAccountsPayableAndAccruedLiabilities" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncreaseDecreaseInAccountsPayableAndAccruedLiabilities" xlink:to="us-gaap_IncreaseDecreaseInAccountsPayableAndAccruedLiabilities_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncreaseDecreaseInAccountsPayableAndAccruedLiabilities_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Increase (Decrease) in Accounts Payable and Accrued Liabilities</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_IncreaseDecreaseInAccountsPayableAndAccruedLiabilities_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accounts payable and accrued expenses</label>
    <loc xlink:type="locator" xlink:href="veco-20211231.xsd#veco_IncreaseDecreaseInCustomerDepositsAndDeferredRevenue" xlink:label="veco_IncreaseDecreaseInCustomerDepositsAndDeferredRevenue" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_IncreaseDecreaseInCustomerDepositsAndDeferredRevenue" xlink:to="veco_IncreaseDecreaseInCustomerDepositsAndDeferredRevenue_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_IncreaseDecreaseInCustomerDepositsAndDeferredRevenue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Amount of increase decrease in customer deposits and deferred revenue.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_IncreaseDecreaseInCustomerDepositsAndDeferredRevenue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Increase Decrease In Customer Deposits And Deferred Revenue</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_IncreaseDecreaseInCustomerDepositsAndDeferredRevenue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Customer deposits and deferred revenue</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_IncreaseDecreaseInIncomeTaxesPayableNetOfIncomeTaxesReceivable" xlink:label="us-gaap_IncreaseDecreaseInIncomeTaxesPayableNetOfIncomeTaxesReceivable" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncreaseDecreaseInIncomeTaxesPayableNetOfIncomeTaxesReceivable" xlink:to="us-gaap_IncreaseDecreaseInIncomeTaxesPayableNetOfIncomeTaxesReceivable_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncreaseDecreaseInIncomeTaxesPayableNetOfIncomeTaxesReceivable_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Increase (Decrease) in Income Taxes Payable, Net of Income Taxes Receivable</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_IncreaseDecreaseInIncomeTaxesPayableNetOfIncomeTaxesReceivable_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Income taxes receivable and payable, net</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_IncreaseDecreaseInOtherOperatingCapitalNet" xlink:label="us-gaap_IncreaseDecreaseInOtherOperatingCapitalNet" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncreaseDecreaseInOtherOperatingCapitalNet" xlink:to="us-gaap_IncreaseDecreaseInOtherOperatingCapitalNet_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncreaseDecreaseInOtherOperatingCapitalNet_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Increase (Decrease) in Other Operating Assets and Liabilities, Net</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="us-gaap_IncreaseDecreaseInOtherOperatingCapitalNet_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Other, net</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_NetCashProvidedByUsedInOperatingActivities" xlink:label="us-gaap_NetCashProvidedByUsedInOperatingActivities" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities" xlink:to="us-gaap_NetCashProvidedByUsedInOperatingActivities_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_NetCashProvidedByUsedInOperatingActivities_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Net Cash Provided by (Used in) Operating Activities, Continuing Operations</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_NetCashProvidedByUsedInOperatingActivities_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Net cash provided by (used in) operating activities</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_NetCashProvidedByUsedInInvestingActivitiesContinuingOperationsAbstract" xlink:label="us-gaap_NetCashProvidedByUsedInInvestingActivitiesContinuingOperationsAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_NetCashProvidedByUsedInInvestingActivitiesContinuingOperationsAbstract" xlink:to="us-gaap_NetCashProvidedByUsedInInvestingActivitiesContinuingOperationsAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_NetCashProvidedByUsedInInvestingActivitiesContinuingOperationsAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Net Cash Provided by (Used in) Investing Activities, Continuing Operations [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_NetCashProvidedByUsedInInvestingActivitiesContinuingOperationsAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cash Flows from Investing Activities</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_PaymentsToAcquirePropertyPlantAndEquipment" xlink:label="us-gaap_PaymentsToAcquirePropertyPlantAndEquipment" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PaymentsToAcquirePropertyPlantAndEquipment" xlink:to="us-gaap_PaymentsToAcquirePropertyPlantAndEquipment_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_PaymentsToAcquirePropertyPlantAndEquipment_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Payments to Acquire Property, Plant, and Equipment</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="us-gaap_PaymentsToAcquirePropertyPlantAndEquipment_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Capital expenditures</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_ProceedsFromSaleAndMaturityOfAvailableForSaleSecurities" xlink:label="us-gaap_ProceedsFromSaleAndMaturityOfAvailableForSaleSecurities" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ProceedsFromSaleAndMaturityOfAvailableForSaleSecurities" xlink:to="us-gaap_ProceedsFromSaleAndMaturityOfAvailableForSaleSecurities_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ProceedsFromSaleAndMaturityOfAvailableForSaleSecurities_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Proceeds from Sale and Maturity of Available-for-sale Securities</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ProceedsFromSaleAndMaturityOfAvailableForSaleSecurities_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Proceeds from the sale of investments</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_PaymentsToAcquireAvailableForSaleSecuritiesDebt" xlink:label="us-gaap_PaymentsToAcquireAvailableForSaleSecuritiesDebt" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PaymentsToAcquireAvailableForSaleSecuritiesDebt" xlink:to="us-gaap_PaymentsToAcquireAvailableForSaleSecuritiesDebt_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_PaymentsToAcquireAvailableForSaleSecuritiesDebt_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Payments to Acquire Available-for-sale Securities, Debt</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="us-gaap_PaymentsToAcquireAvailableForSaleSecuritiesDebt_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Payments for purchases of investments</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_ProceedsFromSaleOfPropertyPlantAndEquipment" xlink:label="us-gaap_ProceedsFromSaleOfPropertyPlantAndEquipment" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ProceedsFromSaleOfPropertyPlantAndEquipment" xlink:to="us-gaap_ProceedsFromSaleOfPropertyPlantAndEquipment_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ProceedsFromSaleOfPropertyPlantAndEquipment_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Proceeds from Sale of Property, Plant, and Equipment</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ProceedsFromSaleOfPropertyPlantAndEquipment_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Proceeds from held for sale assets, net of costs to sell</label>
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    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_PaymentsOfDebtIssuanceCosts" xlink:label="us-gaap_PaymentsOfDebtIssuanceCosts" xmlns="http://www.xbrl.org/2003/linkbase" />
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    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_PaymentsOfDebtIssuanceCosts_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Payments of Debt Issuance Costs</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="us-gaap_PaymentsOfDebtIssuanceCosts_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Debt issuance costs</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_PaymentsOfDebtIssuanceCosts_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Transaction costs</label>
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    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ProceedsFromIssuanceOrSaleOfEquity" xlink:to="us-gaap_ProceedsFromIssuanceOrSaleOfEquity_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ProceedsFromIssuanceOrSaleOfEquity_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Proceeds from Issuance or Sale of Equity</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ProceedsFromIssuanceOrSaleOfEquity_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Proceeds (net of tax withholdings) from option exercises and employee stock purchase plan</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_PaymentsRelatedToTaxWithholdingForShareBasedCompensation" xlink:label="us-gaap_PaymentsRelatedToTaxWithholdingForShareBasedCompensation" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PaymentsRelatedToTaxWithholdingForShareBasedCompensation" xlink:to="us-gaap_PaymentsRelatedToTaxWithholdingForShareBasedCompensation_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_PaymentsRelatedToTaxWithholdingForShareBasedCompensation_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Payments Related to Tax Withholding for Share-based Compensation</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedTerseLabel" xlink:label="us-gaap_PaymentsRelatedToTaxWithholdingForShareBasedCompensation_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Restricted stock tax withholdings</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_NetCashProvidedByUsedInFinancingActivities" xlink:label="us-gaap_NetCashProvidedByUsedInFinancingActivities" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_NetCashProvidedByUsedInFinancingActivities" xlink:to="us-gaap_NetCashProvidedByUsedInFinancingActivities_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_NetCashProvidedByUsedInFinancingActivities_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Net Cash Provided by (Used in) Financing Activities, Continuing Operations</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_NetCashProvidedByUsedInFinancingActivities_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Net cash provided by (used in) financing activities</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations" xlink:label="us-gaap_EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations" xlink:to="us-gaap_EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
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    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect" xlink:label="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect" xmlns="http://www.xbrl.org/2003/linkbase" />
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    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cash, Cash Equivalents, Restricted Cash and Restricted Cash Equivalents, Period Increase (Decrease), Including Exchange Rate Effect</label>
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    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents" xlink:label="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents" xmlns="http://www.xbrl.org/2003/linkbase" />
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    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cash, Cash Equivalents, Restricted Cash and Restricted Cash Equivalents</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/periodEndLabel" xlink:label="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cash, cash equivalents, and restricted cash - end of period</label>
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    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_SupplementalCashFlowInformationAbstract" xlink:label="us-gaap_SupplementalCashFlowInformationAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
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    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_IncomeTaxesPaidNet" xlink:label="us-gaap_IncomeTaxesPaidNet" xmlns="http://www.xbrl.org/2003/linkbase" />
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    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_IncomeTaxesPaidNet_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Net income taxes paid (refunds received)</label>
    <loc xlink:type="locator" xlink:href="veco-20211231.xsd#veco_NonCashOperatingAndFinancingActivitiesAbstract" xlink:label="veco_NonCashOperatingAndFinancingActivitiesAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
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    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_CapitalExpendituresIncurredButNotYetPaid_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Capital expenditures included in accounts payable and accrued expenses</label>
    <loc xlink:type="locator" xlink:href="veco-20211231.xsd#veco_TransferToInventories" xlink:label="veco_TransferToInventories" xmlns="http://www.xbrl.org/2003/linkbase" />
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    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_InventoryPolicyTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Inventories</label>
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    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_BusinessCombinationsPolicy_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Business Combinations</label>
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    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_LongLivedAssetsAndCostMethodInvestmentsPolicyTextBlock" xlink:to="veco_LongLivedAssetsAndCostMethodInvestmentsPolicyTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
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    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LesseeLeasesPolicyTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lessee, Leases [Policy Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_LesseeLeasesPolicyTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Leases</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_NewAccountingPronouncementsPolicyPolicyTextBlock" xlink:label="us-gaap_NewAccountingPronouncementsPolicyPolicyTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
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    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_NewAccountingPronouncementsPolicyPolicyTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Recently Adopted Accounting Standards</label>
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    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock" xlink:to="us-gaap_ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
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    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of basic and diluted income (loss) per share and weighted average shares</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_FairValueAssetsMeasuredOnRecurringBasisTextBlock" xlink:label="us-gaap_FairValueAssetsMeasuredOnRecurringBasisTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
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    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_FairValueAssetsMeasuredOnRecurringBasisTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of assets measured on a recurring basis at fair value</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_ScheduleOfAvailableForSaleSecuritiesReconciliationTableTextBlock" xlink:label="us-gaap_ScheduleOfAvailableForSaleSecuritiesReconciliationTableTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfAvailableForSaleSecuritiesReconciliationTableTextBlock" xlink:to="us-gaap_ScheduleOfAvailableForSaleSecuritiesReconciliationTableTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ScheduleOfAvailableForSaleSecuritiesReconciliationTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of Available-for-sale Securities Reconciliation [Table Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ScheduleOfAvailableForSaleSecuritiesReconciliationTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of amortized cost and fair value of available-for-sale securities</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_DebtSecuritiesAvailableForSaleUnrealizedLossPositionFairValueTableTextBlock" xlink:label="us-gaap_DebtSecuritiesAvailableForSaleUnrealizedLossPositionFairValueTableTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
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    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DebtSecuritiesAvailableForSaleUnrealizedLossPositionFairValueTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Debt Securities Available For Sale Unrealized Loss Position Fair Value Table Text Block</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_DebtSecuritiesAvailableForSaleUnrealizedLossPositionFairValueTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of fair value and unrealized losses of available-for-sale securities in a loss position</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_InvestmentsClassifiedByContractualMaturityDateTableTextBlock" xlink:label="us-gaap_InvestmentsClassifiedByContractualMaturityDateTableTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
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    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ScheduleOfAccruedLiabilitiesTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of accrued expenses and other current liabilities</label>
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    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_ScheduleOfProductWarrantyLiabilityTableTextBlock" xlink:label="us-gaap_ScheduleOfProductWarrantyLiabilityTableTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
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    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ScheduleOfProductWarrantyLiabilityTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of changes in product warranty reserves</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_LesseeOperatingLeaseLiabilityMaturityTableTextBlock" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityMaturityTableTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LesseeOperatingLeaseLiabilityMaturityTableTextBlock" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityMaturityTableTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityMaturityTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lessee, Operating Lease, Liability, Maturity [Table Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityMaturityTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of maturities of lease liabilities 2020</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_ScheduleOfRevenueByMajorCustomersByReportingSegmentsTableTextBlock" xlink:label="us-gaap_ScheduleOfRevenueByMajorCustomersByReportingSegmentsTableTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfRevenueByMajorCustomersByReportingSegmentsTableTextBlock" xlink:to="us-gaap_ScheduleOfRevenueByMajorCustomersByReportingSegmentsTableTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ScheduleOfRevenueByMajorCustomersByReportingSegmentsTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of Revenue by Major Customers by Reporting Segments [Table Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ScheduleOfRevenueByMajorCustomersByReportingSegmentsTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of customers who accounted for more than 10% of our aggregate accounts receivable or net sales</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_ConvertibleDebtTableTextBlock" xlink:label="us-gaap_ConvertibleDebtTableTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
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    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ConvertibleDebtTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of carrying value of Convertible Senior Notes</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_InterestIncomeAndInterestExpenseDisclosureTableTextBlock" xlink:label="us-gaap_InterestIncomeAndInterestExpenseDisclosureTableTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
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    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_InterestIncomeAndInterestExpenseDisclosureTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Interest Income and Interest Expense Disclosure [Table Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_InterestIncomeAndInterestExpenseDisclosureTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of interest expense related to Convertible Senior Notes</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_ScheduleOfAccumulatedOtherComprehensiveIncomeLossTableTextBlock" xlink:label="us-gaap_ScheduleOfAccumulatedOtherComprehensiveIncomeLossTableTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
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    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ScheduleOfAccumulatedOtherComprehensiveIncomeLossTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of the changes in the balances of each component of AOCI, net of tax</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_ScheduleOfEmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsTextBlock" xlink:label="us-gaap_ScheduleOfEmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfEmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsTextBlock" xlink:to="us-gaap_ScheduleOfEmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ScheduleOfEmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of Employee Service Share-based Compensation, Allocation of Recognized Period Costs [Table Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ScheduleOfEmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of share-based compensation expense</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_ScheduleOfUnrecognizedCompensationCostNonvestedAwardsTableTextBlock" xlink:label="us-gaap_ScheduleOfUnrecognizedCompensationCostNonvestedAwardsTableTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
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    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ScheduleOfUnrecognizedCompensationCostNonvestedAwardsTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Summary of unrecognized share-based compensation costs</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock" xlink:label="us-gaap_ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
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    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of Share-based Compensation, Stock Options, Activity [Table Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Summary of stock option activity</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_ScheduleOfShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeTextBlock" xlink:label="us-gaap_ScheduleOfShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
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    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ScheduleOfShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Summary of information about stock option information</label>
    <loc xlink:type="locator" xlink:href="veco-20211231.xsd#veco_ScheduleOfStockOptionExercisedTableTextBlock" xlink:label="veco_ScheduleOfStockOptionExercisedTableTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
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    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_ScheduleOfStockOptionExercisedTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Tabular disclosure of stock option exercised.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_ScheduleOfStockOptionExercisedTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of Stock Option Exercised [Table Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_ScheduleOfStockOptionExercisedTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Summary of stock options exercised</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_ScheduleOfSharebasedCompensationRestrictedStockAndRestrictedStockUnitsActivityTableTextBlock" xlink:label="us-gaap_ScheduleOfSharebasedCompensationRestrictedStockAndRestrictedStockUnitsActivityTableTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
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    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ScheduleOfSharebasedCompensationRestrictedStockAndRestrictedStockUnitsActivityTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Summary of non-vested restricted and performance shares activity</label>
    <loc xlink:type="locator" xlink:href="veco-20211231.xsd#veco_ScheduleOfShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsValuationAssumptionsTableTextBlock" xlink:label="veco_ScheduleOfShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsValuationAssumptionsTableTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
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    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_ScheduleOfShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsValuationAssumptionsTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of Share-based Payment Award, Equity Instruments Other Than Options, Valuation Assumptions [Table Text Block]</label>
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    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_ScheduleOfShareBasedPaymentAwardEmployeeStockPurchasePlanValuationAssumptionsTableTextBlock" xlink:label="us-gaap_ScheduleOfShareBasedPaymentAwardEmployeeStockPurchasePlanValuationAssumptionsTableTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
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    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_ScheduleOfDisposalGroupsIncludingDiscontinuedOperationsIncomeStatementBalanceSheetAndAdditionalDisclosuresTextBlock" xlink:label="us-gaap_ScheduleOfDisposalGroupsIncludingDiscontinuedOperationsIncomeStatementBalanceSheetAndAdditionalDisclosuresTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
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    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ScheduleOfDisposalGroupsIncludingDiscontinuedOperationsIncomeStatementBalanceSheetAndAdditionalDisclosuresTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of major classes of assets sold</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_ScheduleOfIncomeBeforeIncomeTaxDomesticAndForeignTableTextBlock" xlink:label="us-gaap_ScheduleOfIncomeBeforeIncomeTaxDomesticAndForeignTableTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
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    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ScheduleOfIncomeBeforeIncomeTaxDomesticAndForeignTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of Income before Income Tax, Domestic and Foreign [Table Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ScheduleOfIncomeBeforeIncomeTaxDomesticAndForeignTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of income (loss) from continuing operations before income taxes</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_ScheduleOfComponentsOfIncomeTaxExpenseBenefitTableTextBlock" xlink:label="us-gaap_ScheduleOfComponentsOfIncomeTaxExpenseBenefitTableTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfComponentsOfIncomeTaxExpenseBenefitTableTextBlock" xlink:to="us-gaap_ScheduleOfComponentsOfIncomeTaxExpenseBenefitTableTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ScheduleOfComponentsOfIncomeTaxExpenseBenefitTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of Components of Income Tax Expense (Benefit) [Table Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ScheduleOfComponentsOfIncomeTaxExpenseBenefitTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of components of the expense (benefit) for income taxes</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_ScheduleOfEffectiveIncomeTaxRateReconciliationTableTextBlock" xlink:label="us-gaap_ScheduleOfEffectiveIncomeTaxRateReconciliationTableTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfEffectiveIncomeTaxRateReconciliationTableTextBlock" xlink:to="us-gaap_ScheduleOfEffectiveIncomeTaxRateReconciliationTableTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ScheduleOfEffectiveIncomeTaxRateReconciliationTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of Effective Income Tax Rate Reconciliation [Table Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ScheduleOfEffectiveIncomeTaxRateReconciliationTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of reconciliation of the income tax expense computed using the Federal statutory rate to actual income tax provision</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_ScheduleOfDeferredTaxAssetsAndLiabilitiesTableTextBlock" xlink:label="us-gaap_ScheduleOfDeferredTaxAssetsAndLiabilitiesTableTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfDeferredTaxAssetsAndLiabilitiesTableTextBlock" xlink:to="us-gaap_ScheduleOfDeferredTaxAssetsAndLiabilitiesTableTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ScheduleOfDeferredTaxAssetsAndLiabilitiesTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of Deferred Tax Assets and Liabilities [Table Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ScheduleOfDeferredTaxAssetsAndLiabilitiesTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of deferred tax assets and liabilities</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_SummaryOfIncomeTaxContingenciesTextBlock" xlink:label="us-gaap_SummaryOfIncomeTaxContingenciesTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_SummaryOfIncomeTaxContingenciesTextBlock" xlink:to="us-gaap_SummaryOfIncomeTaxContingenciesTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_SummaryOfIncomeTaxContingenciesTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Summary of Income Tax Contingencies [Table Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_SummaryOfIncomeTaxContingenciesTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of reconciliation of beginning and ending amount of uncertain tax positions</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_ScheduleOfEntityWideInformationRevenueFromExternalCustomersByProductsAndServicesTextBlock" xlink:label="us-gaap_ScheduleOfEntityWideInformationRevenueFromExternalCustomersByProductsAndServicesTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfEntityWideInformationRevenueFromExternalCustomersByProductsAndServicesTextBlock" xlink:to="us-gaap_ScheduleOfEntityWideInformationRevenueFromExternalCustomersByProductsAndServicesTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ScheduleOfEntityWideInformationRevenueFromExternalCustomersByProductsAndServicesTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Revenue from External Customers by Products and Services [Table Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_ScheduleOfEntityWideInformationRevenueFromExternalCustomersByProductsAndServicesTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of sales by end-market</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsByGeographicalAreasTableTextBlock" xlink:label="us-gaap_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsByGeographicalAreasTableTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsByGeographicalAreasTableTextBlock" xlink:to="us-gaap_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsByGeographicalAreasTableTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsByGeographicalAreasTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of Revenue from External Customers and Long-Lived Assets, by Geographical Areas [Table Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsByGeographicalAreasTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of sales by geographic region</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_NumberOfOperatingSegments" xlink:label="us-gaap_NumberOfOperatingSegments" xmlns="http://www.xbrl.org/2003/linkbase" />
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    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_NumberOfOperatingSegments_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Number of Operating Segments</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_NumberOfOperatingSegments_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Number of operating segments</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_FiscalPeriodDuration" xlink:label="us-gaap_FiscalPeriodDuration" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FiscalPeriodDuration" xlink:to="us-gaap_FiscalPeriodDuration_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FiscalPeriodDuration_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Fiscal Period Duration</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_FiscalPeriodDuration_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Fiscal period duration (in days)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_RevenuePracticalExpedientIncrementalCostOfObtainingContract" xlink:label="us-gaap_RevenuePracticalExpedientIncrementalCostOfObtainingContract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_RevenuePracticalExpedientIncrementalCostOfObtainingContract" xlink:to="us-gaap_RevenuePracticalExpedientIncrementalCostOfObtainingContract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_RevenuePracticalExpedientIncrementalCostOfObtainingContract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Revenue, Practical Expedient, Incremental Cost of Obtaining Contract [true false]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_RevenuePracticalExpedientIncrementalCostOfObtainingContract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Revenue, practical expedient, incremental cost of obtaining contract</label>
    <loc xlink:type="locator" xlink:href="veco-20211231.xsd#veco_ProductWarrantyPeriod" xlink:label="veco_ProductWarrantyPeriod" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_ProductWarrantyPeriod" xlink:to="veco_ProductWarrantyPeriod_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_ProductWarrantyPeriod_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents the warranty period from the date of final acceptance on the products purchased by customers.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_ProductWarrantyPeriod_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Product Warranty Period</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_ProductWarrantyPeriod_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Warranty period</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_AdvertisingExpense" xlink:label="us-gaap_AdvertisingExpense" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AdvertisingExpense" xlink:to="us-gaap_AdvertisingExpense_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AdvertisingExpense_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Advertising Expense</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_AdvertisingExpense_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Advertising expense</label>
    <loc xlink:type="locator" xlink:href="veco-20211231.xsd#veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardServiceConditionsAndGradedVestingNumberOfAwards" xlink:label="veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardServiceConditionsAndGradedVestingNumberOfAwards" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardServiceConditionsAndGradedVestingNumberOfAwards" xlink:to="veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardServiceConditionsAndGradedVestingNumberOfAwards_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardServiceConditionsAndGradedVestingNumberOfAwards_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Number of awards with which entity has elected to treat awards with only service conditions and with graded vesting.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardServiceConditionsAndGradedVestingNumberOfAwards_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Service Conditions and Graded Vesting, Number of Awards</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardServiceConditionsAndGradedVestingNumberOfAwards_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Number of awards with which entity has elected to treat awards with only service conditions and with graded vesting</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent" xlink:label="us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent" xlink:to="us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Allowance for Doubtful Accounts Receivable, Current</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Allowance for doubtful accounts receivable</label>
    <loc xlink:type="locator" xlink:href="veco-20211231.xsd#veco_IrrevocableLettersOfCreditMaturityPeriodMinimum" xlink:label="veco_IrrevocableLettersOfCreditMaturityPeriodMinimum" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_IrrevocableLettersOfCreditMaturityPeriodMinimum" xlink:to="veco_IrrevocableLettersOfCreditMaturityPeriodMinimum_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_IrrevocableLettersOfCreditMaturityPeriodMinimum_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents the minimum period over which irrevocable letters of credit mature.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_IrrevocableLettersOfCreditMaturityPeriodMinimum_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Irrevocable Letters of Credit Maturity Period Minimum</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_IrrevocableLettersOfCreditMaturityPeriodMinimum_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Maturity period of irrevocable letters of credit, minimum</label>
    <loc xlink:type="locator" xlink:href="veco-20211231.xsd#veco_IrrevocableLettersOfCreditMaturityPeriodMaximum" xlink:label="veco_IrrevocableLettersOfCreditMaturityPeriodMaximum" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_IrrevocableLettersOfCreditMaturityPeriodMaximum" xlink:to="veco_IrrevocableLettersOfCreditMaturityPeriodMaximum_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_IrrevocableLettersOfCreditMaturityPeriodMaximum_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents the maximum period over which irrevocable letters of credit mature.</label>
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    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_ChangeInAccountingPrincipleAccountingStandardsUpdateAdopted" xlink:label="us-gaap_ChangeInAccountingPrincipleAccountingStandardsUpdateAdopted" xmlns="http://www.xbrl.org/2003/linkbase" />
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    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_AccountingStandardsUpdate202006Member" xlink:label="us-gaap_AccountingStandardsUpdate202006Member" xmlns="http://www.xbrl.org/2003/linkbase" />
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    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="srt_CumulativeEffectPeriodOfAdoptionAxis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cumulative Effect, Period of Adoption [Axis]</label>
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    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2021/elts/srt-2021-01-31.xsd#srt_CumulativeEffectPeriodOfAdoptionAdjustmentMember" xlink:label="srt_CumulativeEffectPeriodOfAdoptionAdjustmentMember" xmlns="http://www.xbrl.org/2003/linkbase" />
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    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="srt_CumulativeEffectPeriodOfAdoptionAdjustmentMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cumulative Effect, Period of Adoption, Adjustment</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2021/elts/srt-2021-01-31.xsd#srt_StatementScenarioAxis" xlink:label="srt_StatementScenarioAxis" xmlns="http://www.xbrl.org/2003/linkbase" />
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    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LongTermDebt" xlink:to="us-gaap_LongTermDebt_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
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    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_AvailableForSaleSecuritiesDebtMaturitiesNextRollingTwelveMonthsAmortizedCostBasis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Amortized Cost, Due in one year or less</label>
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    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_DebtSecuritiesAvailableForSaleMaturityAllocatedAndSingleMaturityDateRollingAfterOneThroughTwoYearsAmortizedCost_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Amortized cost of investment in debt security measured at fair value with change in fair value recognized in other comprehensive income (available-for-sale), with single maturity date and allocated without single maturity date, maturing in next rolling fiscal year through second year following latest fiscal year. For interim and annual periods when interim period is reported on rolling approach, from latest statement of financial position date.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_DebtSecuritiesAvailableForSaleMaturityAllocatedAndSingleMaturityDateRollingAfterOneThroughTwoYearsAmortizedCost_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Debt Securities, Available-for-sale, Maturity, Allocated and Single Maturity Date, Rolling after One Through Two Years, Amortized Cost</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_DebtSecuritiesAvailableForSaleMaturityAllocatedAndSingleMaturityDateRollingAfterOneThroughTwoYearsAmortizedCost_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Amortized Cost, Due after one year through two years</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_AvailableForSaleSecuritiesDebtMaturitiesSingleMaturityDateRollingMaturityAbstract" xlink:label="us-gaap_AvailableForSaleSecuritiesDebtMaturitiesSingleMaturityDateRollingMaturityAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
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    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AvailableForSaleSecuritiesDebtMaturitiesSingleMaturityDateRollingMaturityAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Debt Securities, Available-for-sale, Maturity, Allocated and Single Maturity Date, Rolling Maturity, Fair Value [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_AvailableForSaleSecuritiesDebtMaturitiesSingleMaturityDateRollingMaturityAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Contractual maturities - Estimated Fair Value</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_AvailableForSaleSecuritiesDebtMaturitiesNextRollingTwelveMonthsFairValue" xlink:label="us-gaap_AvailableForSaleSecuritiesDebtMaturitiesNextRollingTwelveMonthsFairValue" xmlns="http://www.xbrl.org/2003/linkbase" />
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    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AvailableForSaleSecuritiesDebtMaturitiesNextRollingTwelveMonthsFairValue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Debt Securities, Available-for-sale, Maturity, Allocated and Single Maturity Date, Rolling within One Year, Fair Value</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_AvailableForSaleSecuritiesDebtMaturitiesNextRollingTwelveMonthsFairValue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Estimated Fair Value, Due in one year or less</label>
    <loc xlink:type="locator" xlink:href="veco-20211231.xsd#veco_DebtSecuritiesAvailableForSaleMaturityAllocatedAndSingleMaturityDateRollingAfterOneThroughTwoYearsFairValue" xlink:label="veco_DebtSecuritiesAvailableForSaleMaturityAllocatedAndSingleMaturityDateRollingAfterOneThroughTwoYearsFairValue" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_DebtSecuritiesAvailableForSaleMaturityAllocatedAndSingleMaturityDateRollingAfterOneThroughTwoYearsFairValue" xlink:to="veco_DebtSecuritiesAvailableForSaleMaturityAllocatedAndSingleMaturityDateRollingAfterOneThroughTwoYearsFairValue_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_DebtSecuritiesAvailableForSaleMaturityAllocatedAndSingleMaturityDateRollingAfterOneThroughTwoYearsFairValue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Fair value of investment in debt security, measured at fair value with change in fair value recognized in other comprehensive income (available-for-sale), with single maturity date and allocated without single maturity date, maturing in rolling second through third year following latest fiscal year. For interim and annual periods when interim period is reported on rolling approach, from latest statement of financial position date.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_DebtSecuritiesAvailableForSaleMaturityAllocatedAndSingleMaturityDateRollingAfterOneThroughTwoYearsFairValue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Debt Securities, Available-for-sale, Maturity, Allocated and Single Maturity Date, Rolling after One Through Two Years, Fair Value</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_DebtSecuritiesAvailableForSaleMaturityAllocatedAndSingleMaturityDateRollingAfterOneThroughTwoYearsFairValue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Estimated Fair Value, Due after one year through two years</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_EquitySecuritiesWithoutReadilyDeterminableFairValueTable" xlink:label="us-gaap_EquitySecuritiesWithoutReadilyDeterminableFairValueTable" xmlns="http://www.xbrl.org/2003/linkbase" />
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    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_EquitySecuritiesWithoutReadilyDeterminableFairValueTable_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Equity Securities without Readily Determinable Fair Value [Table]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2021/elts/srt-2021-01-31.xsd#srt_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis" xlink:label="srt_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis" xmlns="http://www.xbrl.org/2003/linkbase" />
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    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2021/elts/srt-2021-01-31.xsd#srt_EquityMethodInvesteeNameDomain" xlink:label="srt_EquityMethodInvesteeNameDomain" xmlns="http://www.xbrl.org/2003/linkbase" />
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    <loc xlink:type="locator" xlink:href="veco-20211231.xsd#veco_KateevaIncMember" xlink:label="veco_KateevaIncMember" xmlns="http://www.xbrl.org/2003/linkbase" />
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    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_KateevaIncMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Kateeva, Inc. (Kateeva), a non-marketable investment.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_KateevaIncMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Kateeva</label>
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    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_OtherNonMarketableInvestmentMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Other non-marketable investment.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_OtherNonMarketableInvestmentMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Separate non-marketable investment</label>
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    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2021/elts/srt-2021-01-31.xsd#srt_RangeMember" xlink:label="srt_RangeMember" xmlns="http://www.xbrl.org/2003/linkbase" />
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    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_InventoryRawMaterialsNetOfReserves" xlink:to="us-gaap_InventoryRawMaterialsNetOfReserves_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_InventoryRawMaterialsNetOfReserves_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Inventory, Raw Materials, Net of Reserves</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_InventoryRawMaterialsNetOfReserves_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Materials</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_InventoryWorkInProcessNetOfReserves" xlink:label="us-gaap_InventoryWorkInProcessNetOfReserves" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_InventoryWorkInProcessNetOfReserves" xlink:to="us-gaap_InventoryWorkInProcessNetOfReserves_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_InventoryWorkInProcessNetOfReserves_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Inventory, Work in Process, Net of Reserves</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_InventoryWorkInProcessNetOfReserves_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Work-in-process</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_InventoryFinishedGoodsNetOfReserves" xlink:label="us-gaap_InventoryFinishedGoodsNetOfReserves" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_InventoryFinishedGoodsNetOfReserves" xlink:to="us-gaap_InventoryFinishedGoodsNetOfReserves_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_InventoryFinishedGoodsNetOfReserves_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Inventory, Finished Goods, Net of Reserves</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_InventoryFinishedGoodsNetOfReserves_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finished goods</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_ScheduleOfPropertyPlantAndEquipmentTable" xlink:label="us-gaap_ScheduleOfPropertyPlantAndEquipmentTable" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfPropertyPlantAndEquipmentTable" xlink:to="us-gaap_ScheduleOfPropertyPlantAndEquipmentTable_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ScheduleOfPropertyPlantAndEquipmentTable_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Property, Plant and Equipment [Table]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_PropertyPlantAndEquipmentByTypeAxis" xlink:label="us-gaap_PropertyPlantAndEquipmentByTypeAxis" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PropertyPlantAndEquipmentByTypeAxis" xlink:to="us-gaap_PropertyPlantAndEquipmentByTypeAxis_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_PropertyPlantAndEquipmentByTypeAxis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Property, Plant and Equipment, Type [Axis]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_PropertyPlantAndEquipmentTypeDomain" xlink:label="us-gaap_PropertyPlantAndEquipmentTypeDomain" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PropertyPlantAndEquipmentTypeDomain" xlink:to="us-gaap_PropertyPlantAndEquipmentTypeDomain_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_PropertyPlantAndEquipmentTypeDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Property, Plant and Equipment, Type [Domain]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_LandMember" xlink:label="us-gaap_LandMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LandMember" xlink:to="us-gaap_LandMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LandMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Land</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_BuildingAndBuildingImprovementsMember" xlink:label="us-gaap_BuildingAndBuildingImprovementsMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_BuildingAndBuildingImprovementsMember" xlink:to="us-gaap_BuildingAndBuildingImprovementsMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_BuildingAndBuildingImprovementsMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Building and improvements</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_MachineryAndEquipmentMember" xlink:label="us-gaap_MachineryAndEquipmentMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_MachineryAndEquipmentMember" xlink:to="us-gaap_MachineryAndEquipmentMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_MachineryAndEquipmentMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Machinery and equipment</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_LeaseholdImprovementsMember" xlink:label="us-gaap_LeaseholdImprovementsMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LeaseholdImprovementsMember" xlink:to="us-gaap_LeaseholdImprovementsMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LeaseholdImprovementsMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Leaseholds improvements</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2021/elts/srt-2021-01-31.xsd#srt_MinimumMember" xlink:label="srt_MinimumMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="srt_MinimumMember" xlink:to="srt_MinimumMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="srt_MinimumMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Minimum</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_PropertyPlantAndEquipmentLineItems" xlink:label="us-gaap_PropertyPlantAndEquipmentLineItems" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PropertyPlantAndEquipmentLineItems" xlink:to="us-gaap_PropertyPlantAndEquipmentLineItems_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_PropertyPlantAndEquipmentLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Property, Plant and Equipment [Line Items]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_PropertyPlantAndEquipmentLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Property, plant, and equipment</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_PropertyPlantAndEquipmentGross" xlink:label="us-gaap_PropertyPlantAndEquipmentGross" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PropertyPlantAndEquipmentGross" xlink:to="us-gaap_PropertyPlantAndEquipmentGross_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_PropertyPlantAndEquipmentGross_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Property, Plant and Equipment, Gross</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_PropertyPlantAndEquipmentGross_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Gross property, plant and equipment</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment" xlink:label="us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment" xlink:to="us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accumulated Depreciation, Depletion and Amortization, Property, Plant, and Equipment</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Less: accumulated depreciation and amortization</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_PropertyPlantAndEquipmentUsefulLife" xlink:label="us-gaap_PropertyPlantAndEquipmentUsefulLife" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PropertyPlantAndEquipmentUsefulLife" xlink:to="us-gaap_PropertyPlantAndEquipmentUsefulLife_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_PropertyPlantAndEquipmentUsefulLife_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Property, Plant and Equipment, Useful Life</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_PropertyPlantAndEquipmentUsefulLife_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Average Useful Life</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_Depreciation" xlink:label="us-gaap_Depreciation" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_Depreciation" xlink:to="us-gaap_Depreciation_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_Depreciation_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Depreciation</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_Depreciation_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Depreciation expense</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_ProceedsFromSaleOfLandHeldForUse" xlink:label="us-gaap_ProceedsFromSaleOfLandHeldForUse" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ProceedsFromSaleOfLandHeldForUse" xlink:to="us-gaap_ProceedsFromSaleOfLandHeldForUse_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ProceedsFromSaleOfLandHeldForUse_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Proceeds from Sale of Land Held-for-use</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ProceedsFromSaleOfLandHeldForUse_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Proceeds from sale of land</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_ScheduleOfGoodwillTable" xlink:label="us-gaap_ScheduleOfGoodwillTable" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfGoodwillTable" xlink:to="us-gaap_ScheduleOfGoodwillTable_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ScheduleOfGoodwillTable_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of Goodwill [Table]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_GoodwillLineItems" xlink:label="us-gaap_GoodwillLineItems" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_GoodwillLineItems" xlink:to="us-gaap_GoodwillLineItems_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_GoodwillLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Goodwill [Line Items]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_GoodwillLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Goodwill disclosures</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_GoodwillRollForward" xlink:label="us-gaap_GoodwillRollForward" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_GoodwillRollForward" xlink:to="us-gaap_GoodwillRollForward_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_GoodwillRollForward_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Goodwill [Roll Forward]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_GoodwillRollForward_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Goodwill</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_GoodwillPeriodIncreaseDecrease" xlink:label="us-gaap_GoodwillPeriodIncreaseDecrease" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_GoodwillPeriodIncreaseDecrease" xlink:to="us-gaap_GoodwillPeriodIncreaseDecrease_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_GoodwillPeriodIncreaseDecrease_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Goodwill, Period Increase (Decrease)</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_GoodwillPeriodIncreaseDecrease_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Change in goodwill</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_GoodwillGross" xlink:label="us-gaap_GoodwillGross" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_GoodwillGross" xlink:to="us-gaap_GoodwillGross_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_GoodwillGross_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Goodwill, Gross</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_GoodwillGross_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Gross carrying Amount</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_GoodwillImpairedAccumulatedImpairmentLoss" xlink:label="us-gaap_GoodwillImpairedAccumulatedImpairmentLoss" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_GoodwillImpairedAccumulatedImpairmentLoss" xlink:to="us-gaap_GoodwillImpairedAccumulatedImpairmentLoss_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
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    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_GoodwillImpairedAccumulatedImpairmentLoss_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accumulated Impairment</label>
    <loc xlink:type="locator" xlink:href="veco-20211231.xsd#veco_FiniteLivedAndIndefiniteLivedIntangibleAssetsByMajorClassTable" xlink:label="veco_FiniteLivedAndIndefiniteLivedIntangibleAssetsByMajorClassTable" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_FiniteLivedAndIndefiniteLivedIntangibleAssetsByMajorClassTable" xlink:to="veco_FiniteLivedAndIndefiniteLivedIntangibleAssetsByMajorClassTable_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_FiniteLivedAndIndefiniteLivedIntangibleAssetsByMajorClassTable_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Disclosure of finite-lived and indefinite-lived intangible assets, excluding goodwill, in total and by major class.</label>
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    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis" xlink:label="us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis" xlink:to="us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finite-Lived Intangible Assets by Major Class [Axis]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain" xlink:label="us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain" xlink:to="us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finite-Lived Intangible Assets, Major Class Name [Domain]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_TechnologyBasedIntangibleAssetsMember" xlink:label="us-gaap_TechnologyBasedIntangibleAssetsMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_TechnologyBasedIntangibleAssetsMember" xlink:to="us-gaap_TechnologyBasedIntangibleAssetsMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_TechnologyBasedIntangibleAssetsMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Technology</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_CustomerRelationshipsMember" xlink:label="us-gaap_CustomerRelationshipsMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CustomerRelationshipsMember" xlink:to="us-gaap_CustomerRelationshipsMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_CustomerRelationshipsMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Customer relationship</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_TrademarksAndTradeNamesMember" xlink:label="us-gaap_TrademarksAndTradeNamesMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_TrademarksAndTradeNamesMember" xlink:to="us-gaap_TrademarksAndTradeNamesMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_TrademarksAndTradeNamesMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Trademarks and tradenames</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_OtherIntangibleAssetsMember" xlink:label="us-gaap_OtherIntangibleAssetsMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OtherIntangibleAssetsMember" xlink:to="us-gaap_OtherIntangibleAssetsMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OtherIntangibleAssetsMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Other Intangible Assets</label>
    <loc xlink:type="locator" xlink:href="veco-20211231.xsd#veco_FiniteLivedAndIndefiniteLivedIntangibleAssetsByMajorClassLineItems" xlink:label="veco_FiniteLivedAndIndefiniteLivedIntangibleAssetsByMajorClassLineItems" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_FiniteLivedAndIndefiniteLivedIntangibleAssetsByMajorClassLineItems" xlink:to="veco_FiniteLivedAndIndefiniteLivedIntangibleAssetsByMajorClassLineItems_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_FiniteLivedAndIndefiniteLivedIntangibleAssetsByMajorClassLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">No definition available.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_FiniteLivedAndIndefiniteLivedIntangibleAssetsByMajorClassLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finite Lived and Indefinite Lived Intangible Assets By Major Class [Line Items]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_FiniteLivedAndIndefiniteLivedIntangibleAssetsByMajorClassLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Intangible assets</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_FiniteLivedIntangibleAssetsRemainingAmortizationPeriod1" xlink:label="us-gaap_FiniteLivedIntangibleAssetsRemainingAmortizationPeriod1" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FiniteLivedIntangibleAssetsRemainingAmortizationPeriod1" xlink:to="us-gaap_FiniteLivedIntangibleAssetsRemainingAmortizationPeriod1_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FiniteLivedIntangibleAssetsRemainingAmortizationPeriod1_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finite-Lived Intangible Assets, Remaining Amortization Period</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_FiniteLivedIntangibleAssetsRemainingAmortizationPeriod1_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Average Remaining Amortization Period</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_FiniteLivedIntangibleAssetsGross" xlink:label="us-gaap_FiniteLivedIntangibleAssetsGross" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FiniteLivedIntangibleAssetsGross" xlink:to="us-gaap_FiniteLivedIntangibleAssetsGross_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FiniteLivedIntangibleAssetsGross_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finite-Lived Intangible Assets, Gross</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_FiniteLivedIntangibleAssetsGross_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Gross Carrying Amount, Definite-lived intangible assets</label>
    <loc xlink:type="locator" xlink:href="veco-20211231.xsd#veco_FiniteLivedIntangibleAssetsAccumulatedAmortizationAndImpairment" xlink:label="veco_FiniteLivedIntangibleAssetsAccumulatedAmortizationAndImpairment" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_FiniteLivedIntangibleAssetsAccumulatedAmortizationAndImpairment" xlink:to="veco_FiniteLivedIntangibleAssetsAccumulatedAmortizationAndImpairment_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_FiniteLivedIntangibleAssetsAccumulatedAmortizationAndImpairment_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accumulated amount of amortization and impairment of assets, excluding financial assets and goodwill, lacking physical substance with a finite life.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_FiniteLivedIntangibleAssetsAccumulatedAmortizationAndImpairment_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finite-Lived Intangible Assets, Accumulated Amortization and Impairment</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_FiniteLivedIntangibleAssetsAccumulatedAmortizationAndImpairment_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accumulated Amortization and Impairment, Definite-lived intangible assets</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_FiniteLivedIntangibleAssetsNet" xlink:label="us-gaap_FiniteLivedIntangibleAssetsNet" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FiniteLivedIntangibleAssetsNet" xlink:to="us-gaap_FiniteLivedIntangibleAssetsNet_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FiniteLivedIntangibleAssetsNet_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finite-Lived Intangible Assets, Net</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_FiniteLivedIntangibleAssetsNet_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total definite-lived intangible assets</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_IntangibleAssetsGrossExcludingGoodwill" xlink:label="us-gaap_IntangibleAssetsGrossExcludingGoodwill" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IntangibleAssetsGrossExcludingGoodwill" xlink:to="us-gaap_IntangibleAssetsGrossExcludingGoodwill_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IntangibleAssetsGrossExcludingGoodwill_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Intangible Assets, Gross (Excluding Goodwill)</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_IntangibleAssetsGrossExcludingGoodwill_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total Gross Intangible Assets</label>
    <loc xlink:type="locator" xlink:href="veco-20211231.xsd#veco_IntangibleAssetsExcludingGoodwillAccumulatedAmortizationAndImpairment" xlink:label="veco_IntangibleAssetsExcludingGoodwillAccumulatedAmortizationAndImpairment" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_IntangibleAssetsExcludingGoodwillAccumulatedAmortizationAndImpairment" xlink:to="veco_IntangibleAssetsExcludingGoodwillAccumulatedAmortizationAndImpairment_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_IntangibleAssetsExcludingGoodwillAccumulatedAmortizationAndImpairment_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accumulated amount of amortization and impairment of assets, excluding financial assets and goodwill, lacking physical substance.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_IntangibleAssetsExcludingGoodwillAccumulatedAmortizationAndImpairment_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Intangible Assets, (Excluding Goodwill), Accumulated Amortization and Impairment</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="veco_IntangibleAssetsExcludingGoodwillAccumulatedAmortizationAndImpairment_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accumulated Amortization and Impairment</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_FiniteLivedIntangibleAssetsFutureAmortizationExpenseAbstract" xlink:label="us-gaap_FiniteLivedIntangibleAssetsFutureAmortizationExpenseAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FiniteLivedIntangibleAssetsFutureAmortizationExpenseAbstract" xlink:to="us-gaap_FiniteLivedIntangibleAssetsFutureAmortizationExpenseAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FiniteLivedIntangibleAssetsFutureAmortizationExpenseAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Estimated annual amortization expense</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_FiniteLivedIntangibleAssetsFutureAmortizationExpenseAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Estimated aggregate amortization expense</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseNextTwelveMonths" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseNextTwelveMonths" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseNextTwelveMonths" xlink:to="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseNextTwelveMonths_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseNextTwelveMonths_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finite-Lived Intangible Assets, Amortization Expense, Next Twelve Months</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseNextTwelveMonths_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">2022</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearTwo" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearTwo" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearTwo" xlink:to="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearTwo_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearTwo_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finite-Lived Intangible Assets, Amortization Expense, Year Two</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearTwo_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">2023</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearThree" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearThree" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearThree" xlink:to="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearThree_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearThree_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finite-Lived Intangible Assets, Amortization Expense, Year Three</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearThree_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">2024</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearFour" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearFour" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearFour" xlink:to="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearFour_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearFour_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finite-Lived Intangible Assets, Amortization Expense, Year Four</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearFour_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">2025</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearFive" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearFive" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearFive" xlink:to="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearFive_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearFive_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finite-Lived Intangible Assets, Amortization Expense, Year Five</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearFive_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">2026</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseAfterYearFive" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseAfterYearFive" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseAfterYearFive" xlink:to="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseAfterYearFive_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseAfterYearFive_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finite-Lived Intangible Assets, Amortization Expense, after Year Five</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseAfterYearFive_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Thereafter</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_AccruedLiabilitiesCurrentAbstract" xlink:label="us-gaap_AccruedLiabilitiesCurrentAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AccruedLiabilitiesCurrentAbstract" xlink:to="us-gaap_AccruedLiabilitiesCurrentAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AccruedLiabilitiesCurrentAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accrued Liabilities, Current [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_AccruedLiabilitiesCurrentAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accrued expenses and other current liabilities</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_EmployeeRelatedLiabilitiesCurrent" xlink:label="us-gaap_EmployeeRelatedLiabilitiesCurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EmployeeRelatedLiabilitiesCurrent" xlink:to="us-gaap_EmployeeRelatedLiabilitiesCurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_EmployeeRelatedLiabilitiesCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Employee-related Liabilities, Current</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_EmployeeRelatedLiabilitiesCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Payroll and related benefits</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_ProductWarrantyAccrualClassifiedCurrent" xlink:label="us-gaap_ProductWarrantyAccrualClassifiedCurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ProductWarrantyAccrualClassifiedCurrent" xlink:to="us-gaap_ProductWarrantyAccrualClassifiedCurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ProductWarrantyAccrualClassifiedCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Product Warranty Accrual, Current</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ProductWarrantyAccrualClassifiedCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Warranty</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_OperatingLeaseLiabilityCurrent" xlink:label="us-gaap_OperatingLeaseLiabilityCurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OperatingLeaseLiabilityCurrent" xlink:to="us-gaap_OperatingLeaseLiabilityCurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OperatingLeaseLiabilityCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating Lease, Liability, Current</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_OperatingLeaseLiabilityCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating lease liability, current</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_OperatingLeaseLiabilityCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating lease liabilities</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_InterestPayableCurrent" xlink:label="us-gaap_InterestPayableCurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_InterestPayableCurrent" xlink:to="us-gaap_InterestPayableCurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_InterestPayableCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Interest Payable, Current</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_InterestPayableCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Interest</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_AccruedProfessionalFeesCurrent" xlink:label="us-gaap_AccruedProfessionalFeesCurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AccruedProfessionalFeesCurrent" xlink:to="us-gaap_AccruedProfessionalFeesCurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AccruedProfessionalFeesCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accrued Professional Fees, Current</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_AccruedProfessionalFeesCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Professional fees</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_LossContingencyAccrualCarryingValueCurrent" xlink:label="us-gaap_LossContingencyAccrualCarryingValueCurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LossContingencyAccrualCarryingValueCurrent" xlink:to="us-gaap_LossContingencyAccrualCarryingValueCurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LossContingencyAccrualCarryingValueCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Loss Contingency, Accrual, Current</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_LossContingencyAccrualCarryingValueCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Legal settlement</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_TaxesPayableCurrent" xlink:label="us-gaap_TaxesPayableCurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_TaxesPayableCurrent" xlink:to="us-gaap_TaxesPayableCurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_TaxesPayableCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Taxes Payable, Current</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_TaxesPayableCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Sales, use, and other taxes</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_OtherAccruedLiabilitiesCurrent" xlink:label="us-gaap_OtherAccruedLiabilitiesCurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OtherAccruedLiabilitiesCurrent" xlink:to="us-gaap_OtherAccruedLiabilitiesCurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OtherAccruedLiabilitiesCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Other Accrued Liabilities, Current</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_OtherAccruedLiabilitiesCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Other</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_OperatingLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList" xlink:label="us-gaap_OperatingLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OperatingLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList" xlink:to="us-gaap_OperatingLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OperatingLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating Lease, Liability, Current, Statement of Financial Position [Extensible Enumeration]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_OperatingLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating Lease, Liability, Current, Statement of Financial Position</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_ContractWithCustomerRefundLiabilityAbstract" xlink:label="us-gaap_ContractWithCustomerRefundLiabilityAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ContractWithCustomerRefundLiabilityAbstract" xlink:to="us-gaap_ContractWithCustomerRefundLiabilityAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ContractWithCustomerRefundLiabilityAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Contract with Customer, Refund Liability [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ContractWithCustomerRefundLiabilityAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Customer deposits and deferred revenue</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_ContractWithCustomerRefundLiabilityCurrent" xlink:label="us-gaap_ContractWithCustomerRefundLiabilityCurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ContractWithCustomerRefundLiabilityCurrent" xlink:to="us-gaap_ContractWithCustomerRefundLiabilityCurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ContractWithCustomerRefundLiabilityCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Contract with Customer, Refund Liability, Current</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ContractWithCustomerRefundLiabilityCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Customer deposits and deferred revenue</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_MovementInDeferredRevenueRollForward" xlink:label="us-gaap_MovementInDeferredRevenueRollForward" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_MovementInDeferredRevenueRollForward" xlink:to="us-gaap_MovementInDeferredRevenueRollForward_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_MovementInDeferredRevenueRollForward_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Movement in Deferred Revenue [Roll Forward]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_MovementInDeferredRevenueRollForward_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Changes in deferred revenue</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_ContractWithCustomerLiability" xlink:label="us-gaap_ContractWithCustomerLiability" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ContractWithCustomerLiability" xlink:to="us-gaap_ContractWithCustomerLiability_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ContractWithCustomerLiability_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Contract with Customer, Liability</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/periodEndLabel" xlink:label="us-gaap_ContractWithCustomerLiability_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Ending balance</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/periodStartLabel" xlink:label="us-gaap_ContractWithCustomerLiability_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Beginning balance</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_IncreaseDecreaseInContractWithCustomerLiability" xlink:label="us-gaap_IncreaseDecreaseInContractWithCustomerLiability" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncreaseDecreaseInContractWithCustomerLiability" xlink:to="us-gaap_IncreaseDecreaseInContractWithCustomerLiability_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncreaseDecreaseInContractWithCustomerLiability_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Increase Decrease in Contract with Customer Liability</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="us-gaap_IncreaseDecreaseInContractWithCustomerLiability_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferral of revenue</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_ContractWithCustomerLiabilityRevenueRecognized" xlink:label="us-gaap_ContractWithCustomerLiabilityRevenueRecognized" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ContractWithCustomerLiabilityRevenueRecognized" xlink:to="us-gaap_ContractWithCustomerLiabilityRevenueRecognized_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ContractWithCustomerLiabilityRevenueRecognized_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Contract with Customer, Liability, Revenue Recognized</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ContractWithCustomerLiabilityRevenueRecognized_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Recognition of previously deferred revenue</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_RevenueRemainingPerformanceObligation" xlink:label="us-gaap_RevenueRemainingPerformanceObligation" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_RevenueRemainingPerformanceObligation" xlink:to="us-gaap_RevenueRemainingPerformanceObligation_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_RevenueRemainingPerformanceObligation_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Revenue, Remaining Performance Obligation</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_RevenueRemainingPerformanceObligation_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Remaining performance obligations</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionTable" xlink:label="us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionTable" xmlns="http://www.xbrl.org/2003/linkbase" />
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    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionTable_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Revenue, Remaining Performance Obligation, Expected Timing of Satisfaction [Table]</label>
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    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionStartDateAxis" xlink:to="us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionStartDateAxis_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
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    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionLineItems" xlink:label="us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionLineItems" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionLineItems" xlink:to="us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionLineItems_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Revenue, Remaining Performance Obligation, Expected Timing of Satisfaction</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Performance obligations</label>
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    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_RevenueRemainingPerformanceObligationExpectedTimingPercentage_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Revenue Remaining Performance Obligation Expected Timing Percentage</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_RevenueRemainingPerformanceObligationExpectedTimingPercentage_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Percentage of remaining performance obligation expected to be recognized</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_RevenuePracticalExpedientRemainingPerformanceObligation" xlink:label="us-gaap_RevenuePracticalExpedientRemainingPerformanceObligation" xmlns="http://www.xbrl.org/2003/linkbase" />
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    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_RevenuePracticalExpedientRemainingPerformanceObligation_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Revenue, Practical Expedient, Remaining Performance Obligation [true/false]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_RevenuePracticalExpedientRemainingPerformanceObligation_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Revenue, Practical Expedient, Remaining Performance Obligation</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionPeriod1" xlink:label="us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionPeriod1" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionPeriod1" xlink:to="us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionPeriod1_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionPeriod1_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Revenue, Remaining Performance Obligation, Expected Timing of Satisfaction, Period</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionPeriod1_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Remaining performance obligations, expected timing of satisfaction</label>
    <loc xlink:type="locator" xlink:href="veco-20211231.xsd#veco_LiabilitiesTable" xlink:label="veco_LiabilitiesTable" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_LiabilitiesTable" xlink:to="veco_LiabilitiesTable_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_LiabilitiesTable_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Table presenting the description of liabilities.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_LiabilitiesTable_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Liabilities [Table]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_BalanceSheetLocationAxis" xlink:label="us-gaap_BalanceSheetLocationAxis" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_BalanceSheetLocationAxis" xlink:to="us-gaap_BalanceSheetLocationAxis_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_BalanceSheetLocationAxis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Balance Sheet Location [Axis]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_BalanceSheetLocationDomain" xlink:label="us-gaap_BalanceSheetLocationDomain" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_BalanceSheetLocationDomain" xlink:to="us-gaap_BalanceSheetLocationDomain_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_BalanceSheetLocationDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Balance Sheet Location [Domain]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_OtherAssetsMember" xlink:label="us-gaap_OtherAssetsMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OtherAssetsMember" xlink:to="us-gaap_OtherAssetsMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OtherAssetsMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Other Assets</label>
    <loc xlink:type="locator" xlink:href="veco-20211231.xsd#veco_AccruedExpensesAndOtherCurrentLiabilitiesMember" xlink:label="veco_AccruedExpensesAndOtherCurrentLiabilitiesMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_AccruedExpensesAndOtherCurrentLiabilitiesMember" xlink:to="veco_AccruedExpensesAndOtherCurrentLiabilitiesMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_AccruedExpensesAndOtherCurrentLiabilitiesMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Primary financial statement caption encompassing accrued expenses and other current liabilities.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_AccruedExpensesAndOtherCurrentLiabilitiesMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accrued Expenses and Other Current Liabilities</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_OtherLiabilitiesMember" xlink:label="us-gaap_OtherLiabilitiesMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OtherLiabilitiesMember" xlink:to="us-gaap_OtherLiabilitiesMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OtherLiabilitiesMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Other Liabilities</label>
    <loc xlink:type="locator" xlink:href="veco-20211231.xsd#veco_LiabilitiesLineItems" xlink:label="veco_LiabilitiesLineItems" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_LiabilitiesLineItems" xlink:to="veco_LiabilitiesLineItems_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_LiabilitiesLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_LiabilitiesLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Liabilities [Line Items]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_OtherLiabilitiesAbstract" xlink:label="us-gaap_OtherLiabilitiesAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OtherLiabilitiesAbstract" xlink:to="us-gaap_OtherLiabilitiesAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OtherLiabilitiesAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Other Liabilities [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_OtherLiabilitiesAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Other liabilities</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_DeferredCompensationPlanAssets" xlink:label="us-gaap_DeferredCompensationPlanAssets" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DeferredCompensationPlanAssets" xlink:to="us-gaap_DeferredCompensationPlanAssets_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DeferredCompensationPlanAssets_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred Compensation Plan Assets</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_DeferredCompensationPlanAssets_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred compensation plan assets</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_DeferredCompensationLiabilityClassifiedNoncurrent" xlink:label="us-gaap_DeferredCompensationLiabilityClassifiedNoncurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DeferredCompensationLiabilityClassifiedNoncurrent" xlink:to="us-gaap_DeferredCompensationLiabilityClassifiedNoncurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DeferredCompensationLiabilityClassifiedNoncurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred Compensation Liability, Classified, Noncurrent</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_DeferredCompensationLiabilityClassifiedNoncurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred compensation plan liabilities</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_AssetRetirementObligationsNoncurrent" xlink:label="us-gaap_AssetRetirementObligationsNoncurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AssetRetirementObligationsNoncurrent" xlink:to="us-gaap_AssetRetirementObligationsNoncurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AssetRetirementObligationsNoncurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Asset Retirement Obligations, Noncurrent</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_AssetRetirementObligationsNoncurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Asset retirement obligations</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_AccruedIncomeTaxesNoncurrent" xlink:label="us-gaap_AccruedIncomeTaxesNoncurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AccruedIncomeTaxesNoncurrent" xlink:to="us-gaap_AccruedIncomeTaxesNoncurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AccruedIncomeTaxesNoncurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accrued Income Taxes, Noncurrent</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_AccruedIncomeTaxesNoncurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Income taxes payable</label>
    <loc xlink:type="locator" xlink:href="veco-20211231.xsd#veco_MedicalAndDentalBenefitLiabilitiesNoncurrent" xlink:label="veco_MedicalAndDentalBenefitLiabilitiesNoncurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_MedicalAndDentalBenefitLiabilitiesNoncurrent" xlink:to="veco_MedicalAndDentalBenefitLiabilitiesNoncurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_MedicalAndDentalBenefitLiabilitiesNoncurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Amount of liabilities for medical and dental benefits classified as other, due after one year or the normal operating cycle, if longer</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_MedicalAndDentalBenefitLiabilitiesNoncurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Medical and Dental Benefit Liabilities, Noncurrent</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_MedicalAndDentalBenefitLiabilitiesNoncurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Medical and dental benefits</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_DepositLiabilitiesAccruedInterest" xlink:label="us-gaap_DepositLiabilitiesAccruedInterest" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DepositLiabilitiesAccruedInterest" xlink:to="us-gaap_DepositLiabilitiesAccruedInterest_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DepositLiabilitiesAccruedInterest_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deposit Liabilities, Accrued Interest</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_DepositLiabilitiesAccruedInterest_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accrued and deferred deposit payments</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_AccruedPayrollTaxesCurrent" xlink:label="us-gaap_AccruedPayrollTaxesCurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AccruedPayrollTaxesCurrent" xlink:to="us-gaap_AccruedPayrollTaxesCurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AccruedPayrollTaxesCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accrued Payroll Taxes, Current</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_AccruedPayrollTaxesCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred payroll taxes</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_ProductWarrantiesDisclosuresAbstract" xlink:label="us-gaap_ProductWarrantiesDisclosuresAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ProductWarrantiesDisclosuresAbstract" xlink:to="us-gaap_ProductWarrantiesDisclosuresAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ProductWarrantiesDisclosuresAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Product Warranties Disclosures [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ProductWarrantiesDisclosuresAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Warranty</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_ProductWarrantyAccrual" xlink:label="us-gaap_ProductWarrantyAccrual" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ProductWarrantyAccrual" xlink:to="us-gaap_ProductWarrantyAccrual_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ProductWarrantyAccrual_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Product Warranty Accrual</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/periodEndLabel" xlink:label="us-gaap_ProductWarrantyAccrual_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Balance, end of the period</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/periodStartLabel" xlink:label="us-gaap_ProductWarrantyAccrual_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Balance, beginning of the period</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_ProductWarrantyAccrualWarrantiesIssued" xlink:label="us-gaap_ProductWarrantyAccrualWarrantiesIssued" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ProductWarrantyAccrualWarrantiesIssued" xlink:to="us-gaap_ProductWarrantyAccrualWarrantiesIssued_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ProductWarrantyAccrualWarrantiesIssued_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Product Warranty Accrual, Warranties Issued</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ProductWarrantyAccrualWarrantiesIssued_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Warranties issued</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_ProductWarrantyAccrualPayments" xlink:label="us-gaap_ProductWarrantyAccrualPayments" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ProductWarrantyAccrualPayments" xlink:to="us-gaap_ProductWarrantyAccrualPayments_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ProductWarrantyAccrualPayments_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Product Warranty Accrual, Payments</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="us-gaap_ProductWarrantyAccrualPayments_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Consumption of reserves</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_ProductWarrantyAccrualPreexistingIncreaseDecrease" xlink:label="us-gaap_ProductWarrantyAccrualPreexistingIncreaseDecrease" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ProductWarrantyAccrualPreexistingIncreaseDecrease" xlink:to="us-gaap_ProductWarrantyAccrualPreexistingIncreaseDecrease_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ProductWarrantyAccrualPreexistingIncreaseDecrease_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Product Warranty Accrual, Preexisting, Increase (Decrease)</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ProductWarrantyAccrualPreexistingIncreaseDecrease_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Changes in estimate</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_LesseeOperatingLeaseDescriptionAbstract" xlink:label="us-gaap_LesseeOperatingLeaseDescriptionAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LesseeOperatingLeaseDescriptionAbstract" xlink:to="us-gaap_LesseeOperatingLeaseDescriptionAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LesseeOperatingLeaseDescriptionAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lessee, Operating Lease, Description [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_LesseeOperatingLeaseDescriptionAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Leases</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_LesseeOperatingLeaseRenewalTerm" xlink:label="us-gaap_LesseeOperatingLeaseRenewalTerm" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LesseeOperatingLeaseRenewalTerm" xlink:to="us-gaap_LesseeOperatingLeaseRenewalTerm_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LesseeOperatingLeaseRenewalTerm_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lessee, Operating Lease, Renewal Term</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_LesseeOperatingLeaseRenewalTerm_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lease renewal term</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_OperatingLeaseWeightedAverageRemainingLeaseTerm1" xlink:label="us-gaap_OperatingLeaseWeightedAverageRemainingLeaseTerm1" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OperatingLeaseWeightedAverageRemainingLeaseTerm1" xlink:to="us-gaap_OperatingLeaseWeightedAverageRemainingLeaseTerm1_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OperatingLeaseWeightedAverageRemainingLeaseTerm1_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating Lease, Weighted Average Remaining Lease Term</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_OperatingLeaseWeightedAverageRemainingLeaseTerm1_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Remaining lease term</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_LesseeOperatingLeaseDiscountRate" xlink:label="us-gaap_LesseeOperatingLeaseDiscountRate" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LesseeOperatingLeaseDiscountRate" xlink:to="us-gaap_LesseeOperatingLeaseDiscountRate_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LesseeOperatingLeaseDiscountRate_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lessee, Operating Lease, Discount Rate</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_LesseeOperatingLeaseDiscountRate_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Weighted average discount rate (as a percent)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract" xlink:label="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract" xlink:to="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating Lease Liabilities, Payments Due [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Minimum lease commitments, Payments due by period:</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lessee, Operating Lease, Liability, Payments, Due Next Twelve Months</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">2022</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearTwo" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearTwo" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearTwo" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearTwo_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearTwo_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lessee, Operating Lease, Liability, Payments, Due Year Two</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearTwo_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">2023</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearThree" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearThree" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearThree" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearThree_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearThree_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lessee, Operating Lease, Liability, Payments, Due Year Three</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearThree_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">2024</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFour" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFour" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFour" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFour_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFour_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lessee, Operating Lease, Liability, Payments, Due Year Four</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFour_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">2025</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFive" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFive" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFive" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFive_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFive_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lessee, Operating Lease, Liability, Payments, Due Year Five</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFive_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">2026</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFive" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFive" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFive" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFive_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFive_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lessee, Operating Lease, Liability, Payments, Due after Year Five</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFive_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Thereafter</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lessee, Operating Lease, Liability, Payments, Due</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total future minimum lease payments</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_LesseeOperatingLeaseLiabilityUndiscountedExcessAmount" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityUndiscountedExcessAmount" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LesseeOperatingLeaseLiabilityUndiscountedExcessAmount" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityUndiscountedExcessAmount_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityUndiscountedExcessAmount_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lessee, Operating Lease, Liability, Undiscounted Excess Amount</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityUndiscountedExcessAmount_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Less: Imputed interest</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_OperatingLeaseLiability" xlink:label="us-gaap_OperatingLeaseLiability" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OperatingLeaseLiability" xlink:to="us-gaap_OperatingLeaseLiability_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OperatingLeaseLiability_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating Lease, Liability</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_OperatingLeaseLiability_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total operating lease liabilities</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_OperatingLeaseLiability_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total operating lease liabilities</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_OperatingLeaseLiabilityStatementOfFinancialPositionExtensibleList" xlink:label="us-gaap_OperatingLeaseLiabilityStatementOfFinancialPositionExtensibleList" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OperatingLeaseLiabilityStatementOfFinancialPositionExtensibleList" xlink:to="us-gaap_OperatingLeaseLiabilityStatementOfFinancialPositionExtensibleList_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OperatingLeaseLiabilityStatementOfFinancialPositionExtensibleList_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating Lease, Liability, Statement of Financial Position [Extensible Enumeration]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_OperatingLeaseLiabilityStatementOfFinancialPositionExtensibleList_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating Lease, Liability, Statement of Financial Position</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_LeaseCostAbstract" xlink:label="us-gaap_LeaseCostAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
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    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OperatingLeaseCost_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating Lease, Cost</label>
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    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OperatingLeasePayments_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating Lease, Payments</label>
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    <loc xlink:type="locator" xlink:href="veco-20211231.xsd#veco_UltratechAcquisitionLitigationMember" xlink:label="veco_UltratechAcquisitionLitigationMember" xmlns="http://www.xbrl.org/2003/linkbase" />
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    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_UltratechAcquisitionLitigationMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Ultratech acquisition litigation</label>
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    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ConcentrationRiskTable" xlink:to="us-gaap_ConcentrationRiskTable_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ConcentrationRiskTable_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Concentration Risk [Table]</label>
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    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_ConcentrationRiskBenchmarkDomain" xlink:label="us-gaap_ConcentrationRiskBenchmarkDomain" xmlns="http://www.xbrl.org/2003/linkbase" />
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    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_AccountsReceivableMember" xlink:label="us-gaap_AccountsReceivableMember" xmlns="http://www.xbrl.org/2003/linkbase" />
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    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2021/elts/srt-2021-01-31.xsd#srt_NameOfMajorCustomerDomain" xlink:label="srt_NameOfMajorCustomerDomain" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="srt_NameOfMajorCustomerDomain" xlink:to="srt_NameOfMajorCustomerDomain_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="srt_NameOfMajorCustomerDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Customer [Domain]</label>
    <loc xlink:type="locator" xlink:href="veco-20211231.xsd#veco_TopTenCustomersMember" xlink:label="veco_TopTenCustomersMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_TopTenCustomersMember" xlink:to="veco_TopTenCustomersMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_TopTenCustomersMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents the top ten customers of the entity for that respective year in terms of percentage of total accounts receivable.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_TopTenCustomersMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Top Ten Customers</label>
    <loc xlink:type="locator" xlink:href="veco-20211231.xsd#veco_CustomerAMember" xlink:label="veco_CustomerAMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_CustomerAMember" xlink:to="veco_CustomerAMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_CustomerAMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents the customer A.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_CustomerAMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Customer A</label>
    <loc xlink:type="locator" xlink:href="veco-20211231.xsd#veco_CustomerBMember" xlink:label="veco_CustomerBMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_CustomerBMember" xlink:to="veco_CustomerBMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_CustomerBMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents the customer B.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_CustomerBMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Customer B</label>
    <loc xlink:type="locator" xlink:href="veco-20211231.xsd#veco_CustomerCMember" xlink:label="veco_CustomerCMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_CustomerCMember" xlink:to="veco_CustomerCMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_CustomerCMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents the customer C.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_CustomerCMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Customer C</label>
    <loc xlink:type="locator" xlink:href="veco-20211231.xsd#veco_CustomerDMember" xlink:label="veco_CustomerDMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_CustomerDMember" xlink:to="veco_CustomerDMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_CustomerDMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents the customer D.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_CustomerDMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Customer D</label>
    <loc xlink:type="locator" xlink:href="veco-20211231.xsd#veco_CustomerEMember" xlink:label="veco_CustomerEMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_CustomerEMember" xlink:to="veco_CustomerEMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_CustomerEMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents the customer E.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_CustomerEMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Customer E</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_ConcentrationRiskLineItems" xlink:label="us-gaap_ConcentrationRiskLineItems" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ConcentrationRiskLineItems" xlink:to="us-gaap_ConcentrationRiskLineItems_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ConcentrationRiskLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Concentration Risk [Line Items]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ConcentrationRiskLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Concentration of Credit Risk</label>
    <loc xlink:type="locator" xlink:href="veco-20211231.xsd#veco_NumberOfCustomers" xlink:label="veco_NumberOfCustomers" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_NumberOfCustomers" xlink:to="veco_NumberOfCustomers_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_NumberOfCustomers_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Number of customers.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_NumberOfCustomers_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Number of Customers</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_NumberOfCustomers_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Number of customers</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_ConcentrationRiskPercentage1" xlink:label="us-gaap_ConcentrationRiskPercentage1" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ConcentrationRiskPercentage1" xlink:to="us-gaap_ConcentrationRiskPercentage1_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ConcentrationRiskPercentage1_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Concentration Risk, Percentage</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ConcentrationRiskPercentage1_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Concentration Risk (as a percent)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2021/elts/srt-2021-01-31.xsd#srt_StatementGeographicalAxis" xlink:label="srt_StatementGeographicalAxis" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="srt_StatementGeographicalAxis" xlink:to="srt_StatementGeographicalAxis_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="srt_StatementGeographicalAxis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Geographical [Axis]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2021/elts/srt-2021-01-31.xsd#srt_SegmentGeographicalDomain" xlink:label="srt_SegmentGeographicalDomain" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="srt_SegmentGeographicalDomain" xlink:to="srt_SegmentGeographicalDomain_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="srt_SegmentGeographicalDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Geographical [Domain]</label>
    <loc xlink:type="locator" xlink:href="veco-20211231.xsd#veco_GeographicLocationOneMember" xlink:label="veco_GeographicLocationOneMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_GeographicLocationOneMember" xlink:to="veco_GeographicLocationOneMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_GeographicLocationOneMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Geographic location with specified receivable payments periods, one.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_GeographicLocationOneMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Geographic location, One</label>
    <loc xlink:type="locator" xlink:href="veco-20211231.xsd#veco_GeographicLocationTwoMember" xlink:label="veco_GeographicLocationTwoMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_GeographicLocationTwoMember" xlink:to="veco_GeographicLocationTwoMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_GeographicLocationTwoMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Geographic location with specified receivable payments periods, two.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_GeographicLocationTwoMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Geographic location, Two</label>
    <loc xlink:type="locator" xlink:href="veco-20211231.xsd#veco_AccountsReceivableCreditPeriod" xlink:label="veco_AccountsReceivableCreditPeriod" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_AccountsReceivableCreditPeriod" xlink:to="veco_AccountsReceivableCreditPeriod_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_AccountsReceivableCreditPeriod_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">The credit period for accounts receivable.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_AccountsReceivableCreditPeriod_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accounts Receivable Credit Period</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_AccountsReceivableCreditPeriod_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Credit period for accounts receivable</label>
    <loc xlink:type="locator" xlink:href="veco-20211231.xsd#veco_ReceivablePurchaseAgreementMaximumAmount" xlink:label="veco_ReceivablePurchaseAgreementMaximumAmount" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_ReceivablePurchaseAgreementMaximumAmount" xlink:to="veco_ReceivablePurchaseAgreementMaximumAmount_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_ReceivablePurchaseAgreementMaximumAmount_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Maximum amount of trade receivables from customers to be sold without recourse under the terms of the receivable purchase agreement.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_ReceivablePurchaseAgreementMaximumAmount_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Receivable Purchase Agreement, Maximum Amount</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_ReceivablePurchaseAgreementMaximumAmount_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Maximum amount of trade receivables to be sold under agreement</label>
    <loc xlink:type="locator" xlink:href="veco-20211231.xsd#veco_TradeReceivablesSoldUnderReceivablePurchaseAgreement" xlink:label="veco_TradeReceivablesSoldUnderReceivablePurchaseAgreement" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_TradeReceivablesSoldUnderReceivablePurchaseAgreement" xlink:to="veco_TradeReceivablesSoldUnderReceivablePurchaseAgreement_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_TradeReceivablesSoldUnderReceivablePurchaseAgreement_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Amount of accounts receivable that has been sold to other entities.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_TradeReceivablesSoldUnderReceivablePurchaseAgreement_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Trade Receivables Sold Under Receivable Purchase Agreement</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_TradeReceivablesSoldUnderReceivablePurchaseAgreement_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Receivables sold</label>
    <loc xlink:type="locator" xlink:href="veco-20211231.xsd#veco_TradeReceivablesUnderReceivablePurchaseAgreementOutstanding" xlink:label="veco_TradeReceivablesUnderReceivablePurchaseAgreementOutstanding" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_TradeReceivablesUnderReceivablePurchaseAgreementOutstanding" xlink:to="veco_TradeReceivablesUnderReceivablePurchaseAgreementOutstanding_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_TradeReceivablesUnderReceivablePurchaseAgreementOutstanding_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Amount of accounts receivable sold under receivable purchase agreement that remains outstanding.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_TradeReceivablesUnderReceivablePurchaseAgreementOutstanding_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Trade Receivables Under Receivable Purchase Agreement, Outstanding</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_TradeReceivablesUnderReceivablePurchaseAgreementOutstanding_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Receivables sold remaining outstanding</label>
    <loc xlink:type="locator" xlink:href="veco-20211231.xsd#veco_ReceivablePurchaseAgreementAmountAvailable" xlink:label="veco_ReceivablePurchaseAgreementAmountAvailable" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_ReceivablePurchaseAgreementAmountAvailable" xlink:to="veco_ReceivablePurchaseAgreementAmountAvailable_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_ReceivablePurchaseAgreementAmountAvailable_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Amount of trade receivables available to be sold from customers without recourse under the terms of the receivable purchase agreement.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_ReceivablePurchaseAgreementAmountAvailable_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Receivable Purchase Agreement, Amount Available</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_ReceivablePurchaseAgreementAmountAvailable_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Amount of trade receivables available to be sold under agreement</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_PurchaseObligationFiscalYearMaturityAbstract" xlink:label="us-gaap_PurchaseObligationFiscalYearMaturityAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PurchaseObligationFiscalYearMaturityAbstract" xlink:to="us-gaap_PurchaseObligationFiscalYearMaturityAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_PurchaseObligationFiscalYearMaturityAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Purchase Obligation, Fiscal Year Maturity [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_PurchaseObligationFiscalYearMaturityAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Purchase Commitments</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_PurchaseObligationFiscalYearMaturityAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Purchase commitments</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_DepositAssets" xlink:label="us-gaap_DepositAssets" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DepositAssets" xlink:to="us-gaap_DepositAssets_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DepositAssets_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deposit Assets</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_DepositAssets_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deposits with suppliers</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_UnrecordedUnconditionalPurchaseObligationDueInNextRollingTwelveMonths" xlink:label="us-gaap_UnrecordedUnconditionalPurchaseObligationDueInNextRollingTwelveMonths" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_UnrecordedUnconditionalPurchaseObligationDueInNextRollingTwelveMonths" xlink:to="us-gaap_UnrecordedUnconditionalPurchaseObligationDueInNextRollingTwelveMonths_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_UnrecordedUnconditionalPurchaseObligationDueInNextRollingTwelveMonths_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Unrecorded Unconditional Purchase Obligation, Due in Next Rolling Twelve Months</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_UnrecordedUnconditionalPurchaseObligationDueInNextRollingTwelveMonths_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Purchase commitments due within one year</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_GuaranteesAbstract" xlink:label="us-gaap_GuaranteesAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_GuaranteesAbstract" xlink:to="us-gaap_GuaranteesAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_GuaranteesAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Guarantees [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_GuaranteesAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Bank guarantees</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_GuaranteeObligationsCurrentCarryingValue" xlink:label="us-gaap_GuaranteeObligationsCurrentCarryingValue" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_GuaranteeObligationsCurrentCarryingValue" xlink:to="us-gaap_GuaranteeObligationsCurrentCarryingValue_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_GuaranteeObligationsCurrentCarryingValue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Guarantor Obligations, Current Carrying Value</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_GuaranteeObligationsCurrentCarryingValue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Bank guarantees and letters of credit outstanding</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_LineOfCreditFacilityRemainingBorrowingCapacity" xlink:label="us-gaap_LineOfCreditFacilityRemainingBorrowingCapacity" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LineOfCreditFacilityRemainingBorrowingCapacity" xlink:to="us-gaap_LineOfCreditFacilityRemainingBorrowingCapacity_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LineOfCreditFacilityRemainingBorrowingCapacity_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Line of Credit Facility, Remaining Borrowing Capacity</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_LineOfCreditFacilityRemainingBorrowingCapacity_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Unused bank guarantees and letters of credit</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_DebtInstrumentTable" xlink:label="us-gaap_DebtInstrumentTable" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DebtInstrumentTable" xlink:to="us-gaap_DebtInstrumentTable_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DebtInstrumentTable_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of Long-term Debt Instruments [Table]</label>
    <loc xlink:type="locator" xlink:href="veco-20211231.xsd#veco_ConvertibleSeniorUnsecuredNotesDue2023Member" xlink:label="veco_ConvertibleSeniorUnsecuredNotesDue2023Member" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_ConvertibleSeniorUnsecuredNotesDue2023Member" xlink:to="veco_ConvertibleSeniorUnsecuredNotesDue2023Member_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_ConvertibleSeniorUnsecuredNotesDue2023Member_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Convertible Senior Unsecured Notes, Due 2023 (2023 Notes).</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_ConvertibleSeniorUnsecuredNotesDue2023Member_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">2023 Notes</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_DebtInstrumentLineItems" xlink:label="us-gaap_DebtInstrumentLineItems" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_DebtInstrumentLineItems_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DebtInstrumentLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Debt Instrument [Line Items]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_DebtInstrumentLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Debt</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_DebtInstrumentFaceAmount" xlink:label="us-gaap_DebtInstrumentFaceAmount" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DebtInstrumentFaceAmount" xlink:to="us-gaap_DebtInstrumentFaceAmount_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DebtInstrumentFaceAmount_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Debt Instrument, Face Amount</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_DebtInstrumentFaceAmount_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Principal amount</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_DebtInstrumentInterestRateStatedPercentage" xlink:label="us-gaap_DebtInstrumentInterestRateStatedPercentage" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DebtInstrumentInterestRateStatedPercentage" xlink:to="us-gaap_DebtInstrumentInterestRateStatedPercentage_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DebtInstrumentInterestRateStatedPercentage_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Debt Instrument, Interest Rate, Stated Percentage</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_DebtInstrumentInterestRateStatedPercentage_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Interest rate (as a percent)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_ExtinguishmentOfDebtAmount" xlink:label="us-gaap_ExtinguishmentOfDebtAmount" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ExtinguishmentOfDebtAmount" xlink:to="us-gaap_ExtinguishmentOfDebtAmount_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ExtinguishmentOfDebtAmount_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Extinguishment of Debt, Amount</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ExtinguishmentOfDebtAmount_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Repurchased and retired amount</label>
    <loc xlink:type="locator" xlink:href="veco-20211231.xsd#veco_DebtInstrumentCarryingAmountDebtExtinguished" xlink:label="veco_DebtInstrumentCarryingAmountDebtExtinguished" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_DebtInstrumentCarryingAmountDebtExtinguished" xlink:to="veco_DebtInstrumentCarryingAmountDebtExtinguished_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_DebtInstrumentCarryingAmountDebtExtinguished_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Carrying amount of debt extinguished (decrease in carrying amount of debt).</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_DebtInstrumentCarryingAmountDebtExtinguished_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Debt Instrument Carrying Amount, Debt Extinguished</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_DebtInstrumentCarryingAmountDebtExtinguished_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Carrying amount of debt extinguished</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_InterestPayableCurrentAndNoncurrent" xlink:label="us-gaap_InterestPayableCurrentAndNoncurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_InterestPayableCurrentAndNoncurrent" xlink:to="us-gaap_InterestPayableCurrentAndNoncurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_InterestPayableCurrentAndNoncurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Interest Payable</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_InterestPayableCurrentAndNoncurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accrued and unpaid interest</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_DerivativeInstrumentRiskAxis" xlink:label="us-gaap_DerivativeInstrumentRiskAxis" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DerivativeInstrumentRiskAxis" xlink:to="us-gaap_DerivativeInstrumentRiskAxis_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DerivativeInstrumentRiskAxis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Derivative Instrument [Axis]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_DerivativeContractTypeDomain" xlink:label="us-gaap_DerivativeContractTypeDomain" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DerivativeContractTypeDomain" xlink:to="us-gaap_DerivativeContractTypeDomain_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DerivativeContractTypeDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Derivative Contract [Domain]</label>
    <loc xlink:type="locator" xlink:href="veco-20211231.xsd#veco_DerivativeContractCappedCallMember" xlink:label="veco_DerivativeContractCappedCallMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_DerivativeContractCappedCallMember" xlink:to="veco_DerivativeContractCappedCallMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_DerivativeContractCappedCallMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Capped call contract.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_DerivativeContractCappedCallMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Capped Call Transactions</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_DebtInstrumentConvertibleConversionRatio1" xlink:label="us-gaap_DebtInstrumentConvertibleConversionRatio1" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DebtInstrumentConvertibleConversionRatio1" xlink:to="us-gaap_DebtInstrumentConvertibleConversionRatio1_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DebtInstrumentConvertibleConversionRatio1_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Debt Instrument, Convertible, Conversion Ratio</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_DebtInstrumentConvertibleConversionRatio1_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Conversion rate</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_DebtInstrumentConvertibleConversionPrice1" xlink:label="us-gaap_DebtInstrumentConvertibleConversionPrice1" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DebtInstrumentConvertibleConversionPrice1" xlink:to="us-gaap_DebtInstrumentConvertibleConversionPrice1_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DebtInstrumentConvertibleConversionPrice1_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Debt Instrument, Convertible, Conversion Price</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_DebtInstrumentConvertibleConversionPrice1_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Conversion price (in dollars per share)</label>
    <loc xlink:type="locator" xlink:href="veco-20211231.xsd#veco_DebtInstrumentPrincipalAmountDenominationForConversionIntoCommonStock" xlink:label="veco_DebtInstrumentPrincipalAmountDenominationForConversionIntoCommonStock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_DebtInstrumentPrincipalAmountDenominationForConversionIntoCommonStock" xlink:to="veco_DebtInstrumentPrincipalAmountDenominationForConversionIntoCommonStock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_DebtInstrumentPrincipalAmountDenominationForConversionIntoCommonStock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents the multiples of the principal amount of debt that holders may convert at their option under circumstances specified under the agreement.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_DebtInstrumentPrincipalAmountDenominationForConversionIntoCommonStock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Debt Instrument Principal Amount Denomination For Conversion Into Common Stock</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_DebtInstrumentPrincipalAmountDenominationForConversionIntoCommonStock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Multiples of principal holders may convert</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_DebtInstrumentConvertibleThresholdConsecutiveTradingDays1" xlink:label="us-gaap_DebtInstrumentConvertibleThresholdConsecutiveTradingDays1" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DebtInstrumentConvertibleThresholdConsecutiveTradingDays1" xlink:to="us-gaap_DebtInstrumentConvertibleThresholdConsecutiveTradingDays1_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DebtInstrumentConvertibleThresholdConsecutiveTradingDays1_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Debt Instrument, Convertible, Threshold Consecutive Trading Days</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_DebtInstrumentConvertibleThresholdConsecutiveTradingDays1_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Consecutive trading days</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_DebtInstrumentConvertibleThresholdPercentageOfStockPriceTrigger" xlink:label="us-gaap_DebtInstrumentConvertibleThresholdPercentageOfStockPriceTrigger" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DebtInstrumentConvertibleThresholdPercentageOfStockPriceTrigger" xlink:to="us-gaap_DebtInstrumentConvertibleThresholdPercentageOfStockPriceTrigger_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DebtInstrumentConvertibleThresholdPercentageOfStockPriceTrigger_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Debt Instrument, Convertible, Threshold Percentage of Stock Price Trigger</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_DebtInstrumentConvertibleThresholdPercentageOfStockPriceTrigger_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Stock price trigger (as a percent)</label>
    <loc xlink:type="locator" xlink:href="veco-20211231.xsd#veco_DebtInstrumentNumberOfConsecutiveBusinessDays" xlink:label="veco_DebtInstrumentNumberOfConsecutiveBusinessDays" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_DebtInstrumentNumberOfConsecutiveBusinessDays" xlink:to="veco_DebtInstrumentNumberOfConsecutiveBusinessDays_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_DebtInstrumentNumberOfConsecutiveBusinessDays_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Period of time between issuance and maturity of debt instrument, in PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_DebtInstrumentNumberOfConsecutiveBusinessDays_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Debt Instrument, Number of Consecutive Business Days</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_DebtInstrumentNumberOfConsecutiveBusinessDays_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Number of consecutive business days</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_DebtInstrumentConvertibleThresholdTradingDays" xlink:label="us-gaap_DebtInstrumentConvertibleThresholdTradingDays" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DebtInstrumentConvertibleThresholdTradingDays" xlink:to="us-gaap_DebtInstrumentConvertibleThresholdTradingDays_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DebtInstrumentConvertibleThresholdTradingDays_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Debt Instrument, Convertible, Threshold Trading Days</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_DebtInstrumentConvertibleThresholdTradingDays_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Trading days</label>
    <loc xlink:type="locator" xlink:href="veco-20211231.xsd#veco_DebtInstrumentsConvertibleFeaturesMaximumPercentageOfCommonStockCouldBeConverted" xlink:label="veco_DebtInstrumentsConvertibleFeaturesMaximumPercentageOfCommonStockCouldBeConverted" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_DebtInstrumentsConvertibleFeaturesMaximumPercentageOfCommonStockCouldBeConverted" xlink:to="veco_DebtInstrumentsConvertibleFeaturesMaximumPercentageOfCommonStockCouldBeConverted_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_DebtInstrumentsConvertibleFeaturesMaximumPercentageOfCommonStockCouldBeConverted_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Maximum percentage of common stock converted.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_DebtInstrumentsConvertibleFeaturesMaximumPercentageOfCommonStockCouldBeConverted_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Debt Instruments, Convertible Features , Maximum Percentage of Common Stock could be Converted</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_DebtInstrumentsConvertibleFeaturesMaximumPercentageOfCommonStockCouldBeConverted_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Maximum percentage of common stock conversion</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_LongTermDebtMeasurementInput" xlink:label="us-gaap_LongTermDebtMeasurementInput" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LongTermDebtMeasurementInput" xlink:to="us-gaap_LongTermDebtMeasurementInput_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LongTermDebtMeasurementInput_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Long-Term Debt, Measurement Input [Extensible Enumeration]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_LongTermDebtMeasurementInput_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Measurement input</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_LongTermDebtMeasurementInputExtensibleList" xlink:label="us-gaap_LongTermDebtMeasurementInputExtensibleList" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LongTermDebtMeasurementInputExtensibleList" xlink:to="us-gaap_LongTermDebtMeasurementInputExtensibleList_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LongTermDebtMeasurementInputExtensibleList_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Long-term Debt, Measurement Input [Extensible List]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_LongTermDebtMeasurementInputExtensibleList_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Long-term Debt, Measurement Input</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_DebtInstrumentUnamortizedDiscount" xlink:label="us-gaap_DebtInstrumentUnamortizedDiscount" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DebtInstrumentUnamortizedDiscount" xlink:to="us-gaap_DebtInstrumentUnamortizedDiscount_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DebtInstrumentUnamortizedDiscount_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Debt Instrument, Unamortized Discount</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_DebtInstrumentUnamortizedDiscount_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Debt discount</label>
    <loc xlink:type="locator" xlink:href="veco-20211231.xsd#veco_DebtIssuanceCostsTransactionCostsAllocatedToEquityComponent" xlink:label="veco_DebtIssuanceCostsTransactionCostsAllocatedToEquityComponent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_DebtIssuanceCostsTransactionCostsAllocatedToEquityComponent" xlink:to="veco_DebtIssuanceCostsTransactionCostsAllocatedToEquityComponent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_DebtIssuanceCostsTransactionCostsAllocatedToEquityComponent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">The amount of Transaction costs allocated to the equity component .</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_DebtIssuanceCostsTransactionCostsAllocatedToEquityComponent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Debt Issuance Costs , Transaction Costs Allocated to The Equity Component</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_DebtIssuanceCostsTransactionCostsAllocatedToEquityComponent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Transaction costs allocated to the equity component</label>
    <loc xlink:type="locator" xlink:href="veco-20211231.xsd#veco_CappedCallTransactionsPrice" xlink:label="veco_CappedCallTransactionsPrice" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_CappedCallTransactionsPrice" xlink:to="veco_CappedCallTransactionsPrice_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_CappedCallTransactionsPrice_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Aggregate price of capped call transaction.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_CappedCallTransactionsPrice_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Capped Call Transactions, Price</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_CappedCallTransactionsPrice_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Aggregate price of capped call transaction</label>
    <loc xlink:type="locator" xlink:href="veco-20211231.xsd#veco_CappedCallTransactionsCapPrice" xlink:label="veco_CappedCallTransactionsCapPrice" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_CappedCallTransactionsCapPrice" xlink:to="veco_CappedCallTransactionsCapPrice_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_CappedCallTransactionsCapPrice_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cap price of the capped call transactions.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_CappedCallTransactionsCapPrice_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Capped Call Transactions, Cap Price</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_CappedCallTransactionsCapPrice_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cap price of the capped call transactions (in dollars per share)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_DebtInstrumentUnamortizedDiscountPremiumAndDebtIssuanceCostsNet" xlink:label="us-gaap_DebtInstrumentUnamortizedDiscountPremiumAndDebtIssuanceCostsNet" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DebtInstrumentUnamortizedDiscountPremiumAndDebtIssuanceCostsNet" xlink:to="us-gaap_DebtInstrumentUnamortizedDiscountPremiumAndDebtIssuanceCostsNet_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DebtInstrumentUnamortizedDiscountPremiumAndDebtIssuanceCostsNet_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Debt Instrument, Unamortized Discount (Premium) and Debt Issuance Costs, Net</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="us-gaap_DebtInstrumentUnamortizedDiscountPremiumAndDebtIssuanceCostsNet_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Unamortized debt discount/transaction costs</label>
    <loc xlink:type="locator" xlink:href="veco-20211231.xsd#veco_CashInterestExpenseAbstract" xlink:label="veco_CashInterestExpenseAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_CashInterestExpenseAbstract" xlink:to="veco_CashInterestExpenseAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_CashInterestExpenseAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">No definition available.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_CashInterestExpenseAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cash Interest Expense</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_InterestExpenseDebtExcludingAmortization" xlink:label="us-gaap_InterestExpenseDebtExcludingAmortization" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_InterestExpenseDebtExcludingAmortization" xlink:to="us-gaap_InterestExpenseDebtExcludingAmortization_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_InterestExpenseDebtExcludingAmortization_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Interest Expense, Debt, Excluding Amortization</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_InterestExpenseDebtExcludingAmortization_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Coupon interest expense</label>
    <loc xlink:type="locator" xlink:href="veco-20211231.xsd#veco_NonCashInterestExpenseAbstract" xlink:label="veco_NonCashInterestExpenseAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_NonCashInterestExpenseAbstract" xlink:to="veco_NonCashInterestExpenseAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_NonCashInterestExpenseAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">No definition available.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_NonCashInterestExpenseAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Non-Cash Interest Expense</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_InterestExpenseDebt" xlink:label="us-gaap_InterestExpenseDebt" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_InterestExpenseDebt" xlink:to="us-gaap_InterestExpenseDebt_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_InterestExpenseDebt_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Interest Expense, Debt</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_InterestExpenseDebt_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total Interest Expense</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_ConvertibleDebtFairValueDisclosures" xlink:label="us-gaap_ConvertibleDebtFairValueDisclosures" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ConvertibleDebtFairValueDisclosures" xlink:to="us-gaap_ConvertibleDebtFairValueDisclosures_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ConvertibleDebtFairValueDisclosures_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Convertible Debt, Fair Value Disclosures</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ConvertibleDebtFairValueDisclosures_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Estimated fair value</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_ConvertibleDebtFairValueByFairValueHierarchyLevelExtensibleList" xlink:label="us-gaap_ConvertibleDebtFairValueByFairValueHierarchyLevelExtensibleList" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ConvertibleDebtFairValueByFairValueHierarchyLevelExtensibleList" xlink:to="us-gaap_ConvertibleDebtFairValueByFairValueHierarchyLevelExtensibleList_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ConvertibleDebtFairValueByFairValueHierarchyLevelExtensibleList_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Debt Instrument, Convertible, Fair Value by Fair Value Hierarchy Level [Extensible Enumeration]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ConvertibleDebtFairValueByFairValueHierarchyLevelExtensibleList_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Convertible Debt, Fair Value by Fair Value Hierarchy Level</label>
    <loc xlink:type="locator" xlink:href="veco-20211231.xsd#veco_RevolvingCreditFacilityDecember2021Member" xlink:label="veco_RevolvingCreditFacilityDecember2021Member" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_RevolvingCreditFacilityDecember2021Member" xlink:to="veco_RevolvingCreditFacilityDecember2021Member_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_RevolvingCreditFacilityDecember2021Member_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Revolving Credit Facility, entered into December 16, 2021.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_RevolvingCreditFacilityDecember2021Member_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Credit Facility</label>
    <loc xlink:type="locator" xlink:href="veco-20211231.xsd#veco_RevolvingCreditFacilityDecember2021LetterOfCreditMember" xlink:label="veco_RevolvingCreditFacilityDecember2021LetterOfCreditMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_RevolvingCreditFacilityDecember2021LetterOfCreditMember" xlink:to="veco_RevolvingCreditFacilityDecember2021LetterOfCreditMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_RevolvingCreditFacilityDecember2021LetterOfCreditMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Revolving Credit Facility Letter of Credit, entered into December 16, 2021.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_RevolvingCreditFacilityDecember2021LetterOfCreditMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Credit Facility, Letter of Credit</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_VariableRateAxis" xlink:label="us-gaap_VariableRateAxis" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_VariableRateAxis" xlink:to="us-gaap_VariableRateAxis_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_VariableRateAxis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Variable Rate [Axis]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_VariableRateDomain" xlink:label="us-gaap_VariableRateDomain" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_VariableRateDomain" xlink:to="us-gaap_VariableRateDomain_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_VariableRateDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Variable Rate [Domain]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_BaseRateMember" xlink:label="us-gaap_BaseRateMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_BaseRateMember" xlink:to="us-gaap_BaseRateMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_BaseRateMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Base rate</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_SecuredOvernightFinancingRateSofrOvernightIndexSwapRateMember" xlink:label="us-gaap_SecuredOvernightFinancingRateSofrOvernightIndexSwapRateMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_SecuredOvernightFinancingRateSofrOvernightIndexSwapRateMember" xlink:to="us-gaap_SecuredOvernightFinancingRateSofrOvernightIndexSwapRateMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_SecuredOvernightFinancingRateSofrOvernightIndexSwapRateMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">SOFR Overnight Index Swap Rate</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_LineOfCreditFacilityMaximumBorrowingCapacity" xlink:label="us-gaap_LineOfCreditFacilityMaximumBorrowingCapacity" xmlns="http://www.xbrl.org/2003/linkbase" />
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    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LineOfCreditFacilityMaximumBorrowingCapacity_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Line of Credit Facility, Maximum Borrowing Capacity</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_LineOfCreditFacilityMaximumBorrowingCapacity_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Borrowing capacity</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_DebtInstrumentTerm" xlink:label="us-gaap_DebtInstrumentTerm" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DebtInstrumentTerm" xlink:to="us-gaap_DebtInstrumentTerm_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DebtInstrumentTerm_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Debt Instrument, Term</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_DebtInstrumentTerm_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Debt instrument term</label>
    <loc xlink:type="locator" xlink:href="veco-20211231.xsd#veco_LineOfCreditFacilityContingentIncreaseAdditionalBorrowingCapacity" xlink:label="veco_LineOfCreditFacilityContingentIncreaseAdditionalBorrowingCapacity" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_LineOfCreditFacilityContingentIncreaseAdditionalBorrowingCapacity" xlink:to="veco_LineOfCreditFacilityContingentIncreaseAdditionalBorrowingCapacity_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_LineOfCreditFacilityContingentIncreaseAdditionalBorrowingCapacity_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">The contingent increase above the maximum borrowing capacity under the credit facility, if any one or more of the existing banks or new banks agree to provide such increased commitment amount.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_LineOfCreditFacilityContingentIncreaseAdditionalBorrowingCapacity_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Line of Credit Facility Contingent Increase, Additional Borrowing Capacity</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_LineOfCreditFacilityContingentIncreaseAdditionalBorrowingCapacity_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Additional increase in borrowing subject to certain conditions</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_DebtInstrumentBasisSpreadOnVariableRate1" xlink:label="us-gaap_DebtInstrumentBasisSpreadOnVariableRate1" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DebtInstrumentBasisSpreadOnVariableRate1" xlink:to="us-gaap_DebtInstrumentBasisSpreadOnVariableRate1_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DebtInstrumentBasisSpreadOnVariableRate1_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Debt Instrument, Basis Spread on Variable Rate</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_DebtInstrumentBasisSpreadOnVariableRate1_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Basis spread on base rate (as a percent)</label>
    <loc xlink:type="locator" xlink:href="veco-20211231.xsd#veco_DebtInstrumentFloorRate" xlink:label="veco_DebtInstrumentFloorRate" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_DebtInstrumentFloorRate" xlink:to="veco_DebtInstrumentFloorRate_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_DebtInstrumentFloorRate_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Floor rate on debt instrument.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_DebtInstrumentFloorRate_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Debt Instrument Floor Rate</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_DebtInstrumentFloorRate_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Floor rate on debt instrument (as a percent)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_LineOfCreditFacilityUnusedCapacityCommitmentFeePercentage" xlink:label="us-gaap_LineOfCreditFacilityUnusedCapacityCommitmentFeePercentage" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LineOfCreditFacilityUnusedCapacityCommitmentFeePercentage" xlink:to="us-gaap_LineOfCreditFacilityUnusedCapacityCommitmentFeePercentage_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LineOfCreditFacilityUnusedCapacityCommitmentFeePercentage_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Line of Credit Facility, Unused Capacity, Commitment Fee Percentage</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_LineOfCreditFacilityUnusedCapacityCommitmentFeePercentage_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Unused commitment fee percentage (as a percent)</label>
    <loc xlink:type="locator" xlink:href="veco-20211231.xsd#veco_DebtInstrumentInterestCoverageRatio" xlink:label="veco_DebtInstrumentInterestCoverageRatio" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_DebtInstrumentInterestCoverageRatio" xlink:to="veco_DebtInstrumentInterestCoverageRatio_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_DebtInstrumentInterestCoverageRatio_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Interest coverage ratio, as defined by the agreement.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_DebtInstrumentInterestCoverageRatio_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Debt Instrument, Interest Coverage Ratio</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_DebtInstrumentInterestCoverageRatio_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Interest coverage ratio</label>
    <loc xlink:type="locator" xlink:href="veco-20211231.xsd#veco_DebtInstrumentTotalNetLeverageRatio" xlink:label="veco_DebtInstrumentTotalNetLeverageRatio" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_DebtInstrumentTotalNetLeverageRatio" xlink:to="veco_DebtInstrumentTotalNetLeverageRatio_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_DebtInstrumentTotalNetLeverageRatio_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total net leverage ratio, as defined by the agreement.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_DebtInstrumentTotalNetLeverageRatio_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Debt Instrument, Total Net Leverage Ratio</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_DebtInstrumentTotalNetLeverageRatio_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total net leverage ratio</label>
    <loc xlink:type="locator" xlink:href="veco-20211231.xsd#veco_DebtInstrumentSecuredNetLeverageRatio" xlink:label="veco_DebtInstrumentSecuredNetLeverageRatio" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_DebtInstrumentSecuredNetLeverageRatio" xlink:to="veco_DebtInstrumentSecuredNetLeverageRatio_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_DebtInstrumentSecuredNetLeverageRatio_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Secured net leverage ratio, as defined by the agreement.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_DebtInstrumentSecuredNetLeverageRatio_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Debt Instrument, Secured Net Leverage Ratio</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_DebtInstrumentSecuredNetLeverageRatio_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Secured net leverage ratio</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_LineOfCreditFacilityMaximumAmountOutstandingDuringPeriod" xlink:label="us-gaap_LineOfCreditFacilityMaximumAmountOutstandingDuringPeriod" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LineOfCreditFacilityMaximumAmountOutstandingDuringPeriod" xlink:to="us-gaap_LineOfCreditFacilityMaximumAmountOutstandingDuringPeriod_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LineOfCreditFacilityMaximumAmountOutstandingDuringPeriod_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Line of Credit Facility, Maximum Amount Outstanding During Period</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_LineOfCreditFacilityMaximumAmountOutstandingDuringPeriod_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Outstanding amount</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_AccumulatedOtherComprehensiveIncomeLossTable" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossTable" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AccumulatedOtherComprehensiveIncomeLossTable" xlink:to="us-gaap_AccumulatedOtherComprehensiveIncomeLossTable_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossTable_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accumulated Other Comprehensive Income (Loss) [Table]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_AccumulatedTranslationAdjustmentMember" xlink:label="us-gaap_AccumulatedTranslationAdjustmentMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AccumulatedTranslationAdjustmentMember" xlink:to="us-gaap_AccumulatedTranslationAdjustmentMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AccumulatedTranslationAdjustmentMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Translation adjustment</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_AccumulatedNetUnrealizedInvestmentGainLossMember" xlink:label="us-gaap_AccumulatedNetUnrealizedInvestmentGainLossMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AccumulatedNetUnrealizedInvestmentGainLossMember" xlink:to="us-gaap_AccumulatedNetUnrealizedInvestmentGainLossMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AccumulatedNetUnrealizedInvestmentGainLossMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Unrealized gain on available for sale securities</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_AccumulatedOtherComprehensiveIncomeLossLineItems" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossLineItems" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AccumulatedOtherComprehensiveIncomeLossLineItems" xlink:to="us-gaap_AccumulatedOtherComprehensiveIncomeLossLineItems_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accumulated Other Comprehensive Income (Loss) [Line Items]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accumulated Other Comprehensive Income</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_AOCIAttributableToParentNetOfTaxRollForward" xlink:label="us-gaap_AOCIAttributableToParentNetOfTaxRollForward" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AOCIAttributableToParentNetOfTaxRollForward" xlink:to="us-gaap_AOCIAttributableToParentNetOfTaxRollForward_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AOCIAttributableToParentNetOfTaxRollForward_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accumulated Other Comprehensive Income (Loss), Net of Tax [Roll Forward]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_AOCIAttributableToParentNetOfTaxRollForward_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Changes in the balances of each component of AOCI</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_ClassOfTreasuryStockTable" xlink:label="us-gaap_ClassOfTreasuryStockTable" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ClassOfTreasuryStockTable" xlink:to="us-gaap_ClassOfTreasuryStockTable_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ClassOfTreasuryStockTable_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Class of Treasury Stock [Table]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_EquityClassOfTreasuryStockLineItems" xlink:label="us-gaap_EquityClassOfTreasuryStockLineItems" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EquityClassOfTreasuryStockLineItems" xlink:to="us-gaap_EquityClassOfTreasuryStockLineItems_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_EquityClassOfTreasuryStockLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Equity, Class of Treasury Stock [Line Items]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_EquityClassOfTreasuryStockLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Treasury stock disclosures</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_TreasuryStockTransactionsExcludingValueOfSharesReissuedAbstract" xlink:label="us-gaap_TreasuryStockTransactionsExcludingValueOfSharesReissuedAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_TreasuryStockTransactionsExcludingValueOfSharesReissuedAbstract" xlink:to="us-gaap_TreasuryStockTransactionsExcludingValueOfSharesReissuedAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_TreasuryStockTransactionsExcludingValueOfSharesReissuedAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Treasury Stock Transactions, Excluding Value of Shares Reissued [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_TreasuryStockTransactionsExcludingValueOfSharesReissuedAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Treasury Stock</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_StockRepurchaseProgramAuthorizedAmount1" xlink:label="us-gaap_StockRepurchaseProgramAuthorizedAmount1" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_StockRepurchaseProgramAuthorizedAmount1" xlink:to="us-gaap_StockRepurchaseProgramAuthorizedAmount1_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_StockRepurchaseProgramAuthorizedAmount1_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Stock Repurchase Program, Authorized Amount</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_StockRepurchaseProgramAuthorizedAmount1_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Authorized amount of common stock repurchase (in dollars)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" xlink:label="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" xlink:to="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of Share-based Compensation Arrangements by Share-based Payment Award [Table]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_AwardTypeAxis" xlink:label="us-gaap_AwardTypeAxis" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AwardTypeAxis" xlink:to="us-gaap_AwardTypeAxis_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AwardTypeAxis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Award Type [Axis]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" xlink:label="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" xlink:to="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Equity Award [Domain]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_EmployeeStockOptionMember" xlink:label="us-gaap_EmployeeStockOptionMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EmployeeStockOptionMember" xlink:to="us-gaap_EmployeeStockOptionMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_EmployeeStockOptionMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Stock options</label>
    <loc xlink:type="locator" xlink:href="veco-20211231.xsd#veco_RestrictedStockAwardsAndRestrictedStockUnitsMember" xlink:label="veco_RestrictedStockAwardsAndRestrictedStockUnitsMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_RestrictedStockAwardsAndRestrictedStockUnitsMember" xlink:to="veco_RestrictedStockAwardsAndRestrictedStockUnitsMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_RestrictedStockAwardsAndRestrictedStockUnitsMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Restricted stock awards and restricted stock units awarded by a company to their employees as a form of incentive compensation.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_RestrictedStockAwardsAndRestrictedStockUnitsMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Restricted Stock Awards and Restricted Stock Units</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_RestrictedStockUnitsRSUMember" xlink:label="us-gaap_RestrictedStockUnitsRSUMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_RestrictedStockUnitsRSUMember" xlink:to="us-gaap_RestrictedStockUnitsRSUMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_RestrictedStockUnitsRSUMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Restricted stock units</label>
    <loc xlink:type="locator" xlink:href="veco-20211231.xsd#veco_RsuAndPsuAwardsMember" xlink:label="veco_RsuAndPsuAwardsMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_RsuAndPsuAwardsMember" xlink:to="veco_RsuAndPsuAwardsMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_RsuAndPsuAwardsMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">RSU and PSU awards.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_RsuAndPsuAwardsMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">RSUs and PSUs</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_PlanNameAxis" xlink:label="us-gaap_PlanNameAxis" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PlanNameAxis" xlink:to="us-gaap_PlanNameAxis_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_PlanNameAxis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Plan Name [Axis]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_PlanNameDomain" xlink:label="us-gaap_PlanNameDomain" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PlanNameDomain" xlink:to="us-gaap_PlanNameDomain_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_PlanNameDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Plan Name [Domain]</label>
    <loc xlink:type="locator" xlink:href="veco-20211231.xsd#veco_InducementStockIncentivePlan2013Member" xlink:label="veco_InducementStockIncentivePlan2013Member" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_InducementStockIncentivePlan2013Member" xlink:to="veco_InducementStockIncentivePlan2013Member_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_InducementStockIncentivePlan2013Member_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents the details pertaining to the entity's 2013 Inducement Stock Incentive Plan.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_InducementStockIncentivePlan2013Member_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Inducement Plan</label>
    <loc xlink:type="locator" xlink:href="veco-20211231.xsd#veco_StockIncentivePlan2010Member" xlink:label="veco_StockIncentivePlan2010Member" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_StockIncentivePlan2010Member" xlink:to="veco_StockIncentivePlan2010Member_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_StockIncentivePlan2010Member_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents the details pertaining to the entity's 2010 stock incentive plan that replaced the 2000 stock incentive plan, as the entity's active stock plan which, following the 2019 amendment, was renamed the 2019 Stock Incentive Plan.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_StockIncentivePlan2010Member_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">2019 Plan</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award [Line Items]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based compensation</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriod" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriod" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriod" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriod_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriod_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Options, Grants in Period, Net of Forfeitures</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriod_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Awards granted (in shares)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Grants in Period</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Granted (in shares)</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Awards granted (in shares)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Award Vesting Period</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Vesting period</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod" xlink:label="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod" xlink:to="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Expiration Period</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Expiration term</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAvailableForGrant" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAvailableForGrant" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAvailableForGrant" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAvailableForGrant_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAvailableForGrant_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Number of Shares Available for Grant</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAvailableForGrant_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Awards available for grant (in shares)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Number</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/periodEndLabel" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Outstanding at the end of the period (in shares)</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/periodStartLabel" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Outstanding at the beginning of the period (in shares)</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Number of options outstanding (in shares)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNonOptionEquityInstrumentsOutstandingNumber" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNonOptionEquityInstrumentsOutstandingNumber" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNonOptionEquityInstrumentsOutstandingNumber" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNonOptionEquityInstrumentsOutstandingNumber_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNonOptionEquityInstrumentsOutstandingNumber_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Non-Option Equity Instruments, Outstanding, Number</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNonOptionEquityInstrumentsOutstandingNumber_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Number of awards outstanding (in shares)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAuthorized" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAuthorized" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAuthorized" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAuthorized_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAuthorized_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Number of Shares Authorized</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAuthorized_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Number of shares authorized</label>
    <loc xlink:type="locator" xlink:href="veco-20211231.xsd#veco_EmployeeStockPurchasePlan2016Member" xlink:label="veco_EmployeeStockPurchasePlan2016Member" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_EmployeeStockPurchasePlan2016Member" xlink:to="veco_EmployeeStockPurchasePlan2016Member_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_EmployeeStockPurchasePlan2016Member_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents the details pertaining the entity's 2016 employee stock purchase plan.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_EmployeeStockPurchasePlan2016Member_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">ESPP</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardPurchasePriceOfCommonStockPercent" xlink:label="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardPurchasePriceOfCommonStockPercent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardPurchasePriceOfCommonStockPercent" xlink:to="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardPurchasePriceOfCommonStockPercent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardPurchasePriceOfCommonStockPercent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Purchase Price of Common Stock, Percent</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardPurchasePriceOfCommonStockPercent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share price (as a percent)</label>
    <loc xlink:type="locator" xlink:href="veco-20211231.xsd#veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardOfferPeriod" xlink:label="veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardOfferPeriod" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardOfferPeriod" xlink:to="veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardOfferPeriod_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardOfferPeriod_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Duration of offer period under the plan, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days. Includes, but not limited to, weeks in a year or quarter.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardOfferPeriod_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Offer Period</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardOfferPeriod_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Offer period</label>
    <loc xlink:type="locator" xlink:href="veco-20211231.xsd#veco_SharesReservedForFutureIssuanceAbstract" xlink:label="veco_SharesReservedForFutureIssuanceAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_SharesReservedForFutureIssuanceAbstract" xlink:to="veco_SharesReservedForFutureIssuanceAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_SharesReservedForFutureIssuanceAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Shares Reserved For Future Issuance</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_SharesReservedForFutureIssuanceAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Shares Reserved For Future Issuance Abstract</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_SharesReservedForFutureIssuanceAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Shares reserved for future issuance</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_CommonStockCapitalSharesReservedForFutureIssuance" xlink:label="us-gaap_CommonStockCapitalSharesReservedForFutureIssuance" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CommonStockCapitalSharesReservedForFutureIssuance" xlink:to="us-gaap_CommonStockCapitalSharesReservedForFutureIssuance_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_CommonStockCapitalSharesReservedForFutureIssuance_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Common Stock, Capital Shares Reserved for Future Issuance</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_CommonStockCapitalSharesReservedForFutureIssuance_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total shares reserved</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_CostOfSalesMember" xlink:label="us-gaap_CostOfSalesMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CostOfSalesMember" xlink:to="us-gaap_CostOfSalesMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_CostOfSalesMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cost of sales</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_ResearchAndDevelopmentExpenseMember" xlink:label="us-gaap_ResearchAndDevelopmentExpenseMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ResearchAndDevelopmentExpenseMember" xlink:to="us-gaap_ResearchAndDevelopmentExpenseMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ResearchAndDevelopmentExpenseMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Research and development</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_SellingGeneralAndAdministrativeExpensesMember" xlink:label="us-gaap_SellingGeneralAndAdministrativeExpensesMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_SellingGeneralAndAdministrativeExpensesMember" xlink:to="us-gaap_SellingGeneralAndAdministrativeExpensesMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_SellingGeneralAndAdministrativeExpensesMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Selling, general and administrative</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_RestructuringChargesMember" xlink:label="us-gaap_RestructuringChargesMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_RestructuringChargesMember" xlink:to="us-gaap_RestructuringChargesMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_RestructuringChargesMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Restructuring</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_EmployeeServiceShareBasedCompensationAggregateDisclosuresAbstract" xlink:label="us-gaap_EmployeeServiceShareBasedCompensationAggregateDisclosuresAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EmployeeServiceShareBasedCompensationAggregateDisclosuresAbstract" xlink:to="us-gaap_EmployeeServiceShareBasedCompensationAggregateDisclosuresAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_EmployeeServiceShareBasedCompensationAggregateDisclosuresAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Employee Service Share-based Compensation, Aggregate Disclosures [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_EmployeeServiceShareBasedCompensationAggregateDisclosuresAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Recognized share-based compensation</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_AllocatedShareBasedCompensationExpense" xlink:label="us-gaap_AllocatedShareBasedCompensationExpense" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AllocatedShareBasedCompensationExpense" xlink:to="us-gaap_AllocatedShareBasedCompensationExpense_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AllocatedShareBasedCompensationExpense_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Allocated Share-based Compensation Expense</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_AllocatedShareBasedCompensationExpense_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total share-based compensation expense</label>
    <loc xlink:type="locator" xlink:href="veco-20211231.xsd#veco_RestrictedStockAwardMember" xlink:label="veco_RestrictedStockAwardMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_RestrictedStockAwardMember" xlink:to="veco_RestrictedStockAwardMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_RestrictedStockAwardMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents the information pertaining to restricted stock awards member.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_RestrictedStockAwardMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Restricted Stock Awards</label>
    <loc xlink:type="locator" xlink:href="veco-20211231.xsd#veco_PerformanceShareUnitsMember" xlink:label="veco_PerformanceShareUnitsMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_PerformanceShareUnitsMember" xlink:to="veco_PerformanceShareUnitsMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_PerformanceShareUnitsMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents the information pertaining to performance share units member.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_PerformanceShareUnitsMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Performance Share Units</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedAbstract" xlink:label="us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedAbstract" xlink:to="us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Employee Service Share-based Compensation, Nonvested Awards, Compensation Cost Not yet Recognized [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Unrecognized share-based compensation costs</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognized" xlink:label="us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognized" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognized" xlink:to="us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognized_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognized_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Employee Service Share-based Compensation, Nonvested Awards, Compensation Cost Not yet Recognized</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognized_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Unrecognized Share-Based Compensation Costs</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1" xlink:label="us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1" xlink:to="us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Employee Service Share-based Compensation, Nonvested Awards, Compensation Cost Not yet Recognized, Period for Recognition</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Weighted Average Period Expected to be Recognized</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding [Roll Forward]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Number of Shares</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised" xlink:label="us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised" xlink:to="us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Options, Exercises in Period</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Exercised (in shares)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresAndExpirationsInPeriod" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresAndExpirationsInPeriod" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresAndExpirationsInPeriod" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresAndExpirationsInPeriod_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresAndExpirationsInPeriod_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Options, Forfeitures and Expirations in Period</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresAndExpirationsInPeriod_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Expired (in shares)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAdditionalDisclosuresAbstract" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAdditionalDisclosuresAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAdditionalDisclosuresAbstract" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAdditionalDisclosuresAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAdditionalDisclosuresAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Options, Additional Disclosures [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAdditionalDisclosuresAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Weighted Average Exercise Price</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice" xmlns="http://www.xbrl.org/2003/linkbase" />
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    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Weighted Average Exercise Price</label>
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    <loc xlink:type="locator" xlink:href="veco-20211231.xsd#veco_OneNonCoreProductLineMember" xlink:label="veco_OneNonCoreProductLineMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_OneNonCoreProductLineMember" xlink:to="veco_OneNonCoreProductLineMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_OneNonCoreProductLineMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">One Non-core product line of the entity.</label>
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    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DisposalGroupDisposedOfBySaleNotDiscontinuedOperationsMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Assets sold</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_DisposalGroupHeldforsaleNotDiscontinuedOperationsMember" xlink:label="us-gaap_DisposalGroupHeldforsaleNotDiscontinuedOperationsMember" xmlns="http://www.xbrl.org/2003/linkbase" />
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    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DisposalGroupHeldforsaleNotDiscontinuedOperationsMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Asset held for sale</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsLineItems" xlink:label="us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsLineItems" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsLineItems" xlink:to="us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsLineItems_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Income Statement, Balance Sheet and Additional Disclosures by Disposal Groups, Including Discontinued Operations [Line Items]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Dispositions</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_DisposalGroupIncludingDiscontinuedOperationConsideration" xlink:label="us-gaap_DisposalGroupIncludingDiscontinuedOperationConsideration" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DisposalGroupIncludingDiscontinuedOperationConsideration" xlink:to="us-gaap_DisposalGroupIncludingDiscontinuedOperationConsideration_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DisposalGroupIncludingDiscontinuedOperationConsideration_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Disposal Group, Including Discontinued Operation, Consideration</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_DisposalGroupIncludingDiscontinuedOperationConsideration_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Consideration</label>
    <loc xlink:type="locator" xlink:href="veco-20211231.xsd#veco_PercentageOfTransactionPrice" xlink:label="veco_PercentageOfTransactionPrice" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_PercentageOfTransactionPrice" xlink:to="veco_PercentageOfTransactionPrice_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_PercentageOfTransactionPrice_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Percentage of transaction price due upon closing.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_PercentageOfTransactionPrice_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Percentage Of Transaction Price</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_PercentageOfTransactionPrice_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Transaction price due upon closing (as a percent)</label>
    <loc xlink:type="locator" xlink:href="veco-20211231.xsd#veco_PercentageOfAmountHeldInEscrow" xlink:label="veco_PercentageOfAmountHeldInEscrow" xmlns="http://www.xbrl.org/2003/linkbase" />
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    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_PercentageOfAmountHeldInEscrow_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Percentage of amount held in escrow.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_PercentageOfAmountHeldInEscrow_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Percentage Of Amount Held In Escrow</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_PercentageOfAmountHeldInEscrow_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Amount held in escrow (as a percent)</label>
    <loc xlink:type="locator" xlink:href="veco-20211231.xsd#veco_TermOfAmountToBeHeldInEscrow" xlink:label="veco_TermOfAmountToBeHeldInEscrow" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_TermOfAmountToBeHeldInEscrow" xlink:to="veco_TermOfAmountToBeHeldInEscrow_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_TermOfAmountToBeHeldInEscrow_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Period over which portion of transaction price is held in escrow.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_TermOfAmountToBeHeldInEscrow_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Term Of Amount To Be Held In Escrow</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_TermOfAmountToBeHeldInEscrow_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Period over which portion of transaction price is held in escrow</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_AssetsOfDisposalGroupIncludingDiscontinuedOperationAbstract" xlink:label="us-gaap_AssetsOfDisposalGroupIncludingDiscontinuedOperationAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AssetsOfDisposalGroupIncludingDiscontinuedOperationAbstract" xlink:to="us-gaap_AssetsOfDisposalGroupIncludingDiscontinuedOperationAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AssetsOfDisposalGroupIncludingDiscontinuedOperationAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Disposal Group, Including Discontinued Operation, Assets [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_AssetsOfDisposalGroupIncludingDiscontinuedOperationAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Major classes of assets sold</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_DisposalGroupIncludingDiscontinuedOperationInventory1" xlink:label="us-gaap_DisposalGroupIncludingDiscontinuedOperationInventory1" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DisposalGroupIncludingDiscontinuedOperationInventory1" xlink:to="us-gaap_DisposalGroupIncludingDiscontinuedOperationInventory1_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DisposalGroupIncludingDiscontinuedOperationInventory1_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Disposal Group, Including Discontinued Operation, Inventory</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_DisposalGroupIncludingDiscontinuedOperationInventory1_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Inventories</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_DisposalGroupIncludingDiscontinuedOperationPropertyPlantAndEquipment" xlink:label="us-gaap_DisposalGroupIncludingDiscontinuedOperationPropertyPlantAndEquipment" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DisposalGroupIncludingDiscontinuedOperationPropertyPlantAndEquipment" xlink:to="us-gaap_DisposalGroupIncludingDiscontinuedOperationPropertyPlantAndEquipment_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DisposalGroupIncludingDiscontinuedOperationPropertyPlantAndEquipment_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Disposal Group, Including Discontinued Operation, Property, Plant and Equipment</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_DisposalGroupIncludingDiscontinuedOperationPropertyPlantAndEquipment_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Property, plant, and equipment, net</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_DisposalGroupIncludingDiscontinuedOperationIntangibleAssets" xlink:label="us-gaap_DisposalGroupIncludingDiscontinuedOperationIntangibleAssets" xmlns="http://www.xbrl.org/2003/linkbase" />
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    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DisposalGroupIncludingDiscontinuedOperationIntangibleAssets_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Disposal Group, Including Discontinued Operation, Intangible Assets</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_DisposalGroupIncludingDiscontinuedOperationIntangibleAssets_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Intangible assets, net</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_DisposalGroupIncludingDiscontinuedOperationGoodwill1" xlink:label="us-gaap_DisposalGroupIncludingDiscontinuedOperationGoodwill1" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DisposalGroupIncludingDiscontinuedOperationGoodwill1" xlink:to="us-gaap_DisposalGroupIncludingDiscontinuedOperationGoodwill1_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DisposalGroupIncludingDiscontinuedOperationGoodwill1_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Disposal Group, Including Discontinued Operation, Goodwill</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_DisposalGroupIncludingDiscontinuedOperationGoodwill1_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Goodwill</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_DisposalGroupIncludingDiscontinuedOperationDeferredRevenue" xlink:label="us-gaap_DisposalGroupIncludingDiscontinuedOperationDeferredRevenue" xmlns="http://www.xbrl.org/2003/linkbase" />
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    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DisposalGroupIncludingDiscontinuedOperationDeferredRevenue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Disposal Group, Including Discontinued Operation, Deferred Revenue</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="us-gaap_DisposalGroupIncludingDiscontinuedOperationDeferredRevenue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred revenue</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd#us-gaap_AssetsOfDisposalGroupIncludingDiscontinuedOperation" xlink:label="us-gaap_AssetsOfDisposalGroupIncludingDiscontinuedOperation" xmlns="http://www.xbrl.org/2003/linkbase" />
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    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AssetsOfDisposalGroupIncludingDiscontinuedOperation_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Disposal Group, Including Discontinued Operation, Assets</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_AssetsOfDisposalGroupIncludingDiscontinuedOperation_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total net assets sold</label>
    <loc xlink:type="locator" xlink:href="veco-20211231.xsd#veco_DisposalGroupIncludingDiscontinuedOperationConsiderationNet" xlink:label="veco_DisposalGroupIncludingDiscontinuedOperationConsiderationNet" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_DisposalGroupIncludingDiscontinuedOperationConsiderationNet" xlink:to="veco_DisposalGroupIncludingDiscontinuedOperationConsiderationNet_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
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<DOCUMENT>
<TYPE>EX-101.PRE
<SEQUENCE>14
<FILENAME>veco-20211231_pre.xml
<DESCRIPTION>EX-101.PRE
<TEXT>
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<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674063667000">
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<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Document and Entity Information - USD ($)<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
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<th class="th"><div>Dec. 31, 2021</div></th>
<th class="th"><div>Feb. 11, 2022</div></th>
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<td class="text">&#160;<span></span>
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<td class="text">&#160;<span></span>
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<td class="text">&#160;<span></span>
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<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_DocumentType', window );">Document Type</a></td>
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<td class="text">true<span></span>
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<td class="text">Dec. 31,  2021<span></span>
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<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_DocumentTransitionReport', window );">Document Transition Report</a></td>
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<td class="text">0-16244<span></span>
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<td class="text">&#160;<span></span>
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<td class="text">&#160;<span></span>
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<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_EntityRegistrantName', window );">Entity Registrant Name</a></td>
<td class="text">VEECO INSTRUMENTS&#160;INC<span></span>
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<td class="text">&#160;<span></span>
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<td class="text">11-2989601<span></span>
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<td class="text">Terminal Drive<span></span>
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<td class="text">&#160;<span></span>
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<td class="text">&#160;<span></span>
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<td class="text">Plainview<span></span>
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<td class="text">&#160;<span></span>
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<td class="text">&#160;<span></span>
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<td class="text">&#160;<span></span>
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<td class="text">516<span></span>
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<td class="text">VECO<span></span>
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<td class="text">NASDAQ<span></span>
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<td class="text">&#160;<span></span>
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<td class="text">Large Accelerated Filer<span></span>
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<td class="text">false<span></span>
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<td class="text">&#160;<span></span>
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<td class="text">&#160;<span></span>
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<td class="text">false<span></span>
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<td class="text">&#160;<span></span>
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<td class="text">&#160;<span></span>
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<td class="text">&#160;<span></span>
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<td class="text">&#160;<span></span>
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<td class="text">&#160;<span></span>
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<td class="nump">$ 1,150,234,164<span></span>
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<td class="text">&#160;<span></span>
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<td class="nump">50,653,403<span></span>
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<td class="text">&#160;<span></span>
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<td class="text">KPMG LLP<span></span>
</td>
<td class="text">&#160;<span></span>
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<td class="text">&#160;<span></span>
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<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_AuditorFirmId', window );">Auditor Firm ID</a></td>
<td class="text">185<span></span>
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<td class="text">&#160;<span></span>
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<td class="text">&#160;<span></span>
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<td class="text">Melville, New York<span></span>
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<td class="text">&#160;<span></span>
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<td class="text">&#160;<span></span>
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<td class="text">0000103145<span></span>
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<td class="text">&#160;<span></span>
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<td class="text">&#160;<span></span>
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<td class="text">--12-31<span></span>
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<td class="text">&#160;<span></span>
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<td class="text">&#160;<span></span>
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<td class="text">2021<span></span>
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<td class="text">&#160;<span></span>
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<td class="text">&#160;<span></span>
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<td class="text">FY<span></span>
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<td class="text">&#160;<span></span>
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<td class="text">&#160;<span></span>
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<td class="text">false<span></span>
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<td class="text">&#160;<span></span>
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<td class="text">&#160;<span></span>
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<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_AmendmentFlag">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Boolean flag that is true when the XBRL content amends previously-filed or accepted submission.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_AmendmentFlag</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:booleanItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_AuditorFirmId">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>PCAOB issued Audit Firm Identifier</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Form 10-K<br> -Number 249<br> -Section 310<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Form 20-F<br> -Number 249<br> -Section 220<br> -Subsection f<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Form 40-F<br> -Number 249<br> -Section 240<br> -Subsection f<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_AuditorFirmId</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:nonemptySequenceNumberItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_AuditorLocation">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Form 10-K<br> -Number 249<br> -Section 310<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Form 20-F<br> -Number 249<br> -Section 220<br> -Subsection f<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Form 40-F<br> -Number 249<br> -Section 240<br> -Subsection f<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_AuditorLocation</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:internationalNameItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_AuditorName">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Form 10-K<br> -Number 249<br> -Section 310<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Form 20-F<br> -Number 249<br> -Section 220<br> -Subsection f<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Form 40-F<br> -Number 249<br> -Section 240<br> -Subsection f<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_AuditorName</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:internationalNameItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_CityAreaCode">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Area code of city</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_CityAreaCode</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:normalizedStringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_CoverAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Cover page.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_CoverAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_CurrentFiscalYearEndDate">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>End date of current fiscal year in the format --MM-DD.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_CurrentFiscalYearEndDate</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:gMonthDayItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_DocumentAnnualReport">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Boolean flag that is true only for a form used as an annual report.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Form 10-K<br> -Number 249<br> -Section 310<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Form 20-F<br> -Number 249<br> -Section 220<br> -Subsection f<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Form 40-F<br> -Number 249<br> -Section 240<br> -Subsection f<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_DocumentAnnualReport</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:booleanItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_DocumentFiscalPeriodFocus">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Fiscal period values are FY, Q1, Q2, and Q3.  1st, 2nd and 3rd quarter 10-Q or 10-QT statements have value Q1, Q2, and Q3 respectively, with 10-K, 10-KT or other fiscal year statements having FY.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_DocumentFiscalPeriodFocus</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:fiscalPeriodItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_DocumentFiscalYearFocus">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>This is focus fiscal year of the document report in YYYY format. For a 2006 annual report, which may also provide financial information from prior periods, fiscal 2006 should be given as the fiscal year focus. Example: 2006.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_DocumentFiscalYearFocus</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:gYearItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_DocumentPeriodEndDate">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>For the EDGAR submission types of Form 8-K: the date of the report, the date of the earliest event reported; for the EDGAR submission types of Form N-1A: the filing date; for all other submission types: the end of the reporting or transition period.  The format of the date is YYYY-MM-DD.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_DocumentPeriodEndDate</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:dateItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_DocumentTransitionReport">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Boolean flag that is true only for a form used as a transition report.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Forms 10-K, 10-Q, 20-F<br> -Number 240<br> -Section 13<br> -Subsection a-1<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_DocumentTransitionReport</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:booleanItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_DocumentType">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The type of document being provided (such as 10-K, 10-Q, 485BPOS, etc). The document type is limited to the same value as the supporting SEC submission type, or the word 'Other'.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_DocumentType</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:submissionTypeItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityAddressAddressLine1">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Address Line 1 such as Attn, Building Name, Street Name</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityAddressAddressLine1</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:normalizedStringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityAddressCityOrTown">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Name of the City or Town</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityAddressCityOrTown</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:normalizedStringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityAddressPostalZipCode">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Code for the postal or zip code</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityAddressPostalZipCode</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:normalizedStringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityAddressStateOrProvince">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Name of the state or province.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityAddressStateOrProvince</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:stateOrProvinceItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityCentralIndexKey">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>A unique 10-digit SEC-issued value to identify entities that have filed disclosures with the SEC. It is commonly abbreviated as CIK.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Exchange Act<br> -Number 240<br> -Section 12<br> -Subsection b-2<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityCentralIndexKey</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:centralIndexKeyItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityCommonStockSharesOutstanding">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Indicate number of shares or other units outstanding of each of registrant's classes of capital or common stock or other ownership interests, if and as stated on cover of related periodic report. Where multiple classes or units exist define each class/interest by adding class of stock items such as Common Class A [Member], Common Class B [Member] or Partnership Interest [Member] onto the Instrument [Domain] of the Entity Listings, Instrument.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityCommonStockSharesOutstanding</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityCurrentReportingStatus">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Indicate 'Yes' or 'No' whether registrants (1) have filed all reports required to be filed by Section 13 or 15(d) of the Securities Exchange Act of 1934 during the preceding 12 months (or for such shorter period that registrants were required to file such reports), and (2) have been subject to such filing requirements for the past 90 days. This information should be based on the registrant's current or most recent filing containing the related disclosure.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityCurrentReportingStatus</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:yesNoItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityEmergingGrowthCompany">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Indicate if registrant meets the emerging growth company criteria.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Exchange Act<br> -Number 240<br> -Section 12<br> -Subsection b-2<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityEmergingGrowthCompany</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:booleanItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityFileNumber">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Commission file number. The field allows up to 17 characters. The prefix may contain 1-3 digits, the sequence number may contain 1-8 digits, the optional suffix may contain 1-4 characters, and the fields are separated with a hyphen.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityFileNumber</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:fileNumberItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityFilerCategory">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Indicate whether the registrant is one of the following: Large Accelerated Filer, Accelerated Filer, Non-accelerated Filer. Definitions of these categories are stated in Rule 12b-2 of the Exchange Act. This information should be based on the registrant's current or most recent filing containing the related disclosure.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Exchange Act<br> -Number 240<br> -Section 12<br> -Subsection b-2<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityFilerCategory</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:filerCategoryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityIncorporationStateCountryCode">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Two-character EDGAR code representing the state or country of incorporation.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityIncorporationStateCountryCode</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:edgarStateCountryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityInteractiveDataCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Boolean flag that is true when the registrant has submitted electronically every Interactive Data File required to be submitted pursuant to Rule 405 of Regulation S-T during the preceding 12 months (or for such shorter period that the registrant was required to submit such files).</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Regulation S-T<br> -Number 232<br> -Section 405<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityInteractiveDataCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:yesNoItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityPublicFloat">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The aggregate market value of the voting and non-voting common equity held by non-affiliates computed by reference to the price at which the common equity was last sold, or the average bid and asked price of such common equity, as of the last business day of the registrant's most recently completed second fiscal quarter.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityPublicFloat</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityRegistrantName">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The exact name of the entity filing the report as specified in its charter, which is required by forms filed with the SEC.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Exchange Act<br> -Number 240<br> -Section 12<br> -Subsection b-2<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityRegistrantName</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:normalizedStringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityShellCompany">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Boolean flag that is true when the registrant is a shell company as defined in Rule 12b-2 of the Exchange Act.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Exchange Act<br> -Number 240<br> -Section 12<br> -Subsection b-2<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityShellCompany</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:booleanItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntitySmallBusiness">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Indicates that the company is a Smaller Reporting Company (SRC).</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Exchange Act<br> -Number 240<br> -Section 12<br> -Subsection b-2<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntitySmallBusiness</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:booleanItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityTaxIdentificationNumber">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The Tax Identification Number (TIN), also known as an Employer Identification Number (EIN), is a unique 9-digit value assigned by the IRS.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Exchange Act<br> -Number 240<br> -Section 12<br> -Subsection b-2<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityTaxIdentificationNumber</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:employerIdItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityVoluntaryFilers">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Indicate 'Yes' or 'No' if the registrant is not required to file reports pursuant to Section 13 or Section 15(d) of the Act.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityVoluntaryFilers</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:yesNoItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityWellKnownSeasonedIssuer">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Indicate 'Yes' or 'No' if the registrant is a well-known seasoned issuer, as defined in Rule 405 of the Securities Act. Is used on Form Type: 10-K, 10-Q, 8-K, 20-F, 6-K, 10-K/A, 10-Q/A, 20-F/A, 6-K/A, N-CSR, N-Q, N-1A.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Securities Act<br> -Number 230<br> -Section 405<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityWellKnownSeasonedIssuer</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:yesNoItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_IcfrAuditorAttestationFlag">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Form 10-K<br> -Number 249<br> -Section 310<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Form 20-F<br> -Number 249<br> -Section 220<br> -Subsection f<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Form 40-F<br> -Number 249<br> -Section 240<br> -Subsection f<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_IcfrAuditorAttestationFlag</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:booleanItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_LocalPhoneNumber">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Local phone number for entity.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_LocalPhoneNumber</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:normalizedStringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_Security12bTitle">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Title of a 12(b) registered security.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Exchange Act<br> -Number 240<br> -Section 12<br> -Subsection b<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_Security12bTitle</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:securityTitleItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_SecurityExchangeName">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Name of the Exchange on which a security is registered.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Exchange Act<br> -Number 240<br> -Section 12<br> -Subsection d1-1<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_SecurityExchangeName</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:edgarExchangeCodeItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_TradingSymbol">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Trading symbol of an instrument as listed on an exchange.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_TradingSymbol</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:tradingSymbolItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>16
<FILENAME>R2.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
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<body>
<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674063285912">
<tr>
<th class="tl" colspan="1" rowspan="1"><div style="width: 200px;"><strong>Consolidated Balance Sheets - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
<th class="th"><div>Dec. 31, 2020</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AssetsCurrentAbstract', window );"><strong>Current assets:</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CashAndCashEquivalentsAtCarryingValue', window );">Cash and cash equivalents</a></td>
<td class="nump">$ 119,747<span></span>
</td>
<td class="nump">$ 129,625<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_RestrictedCashAndCashEquivalentsAtCarryingValue', window );">Restricted cash</a></td>
<td class="nump">725<span></span>
</td>
<td class="nump">658<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AvailableForSaleSecuritiesDebtSecuritiesCurrent', window );">Short-term investments</a></td>
<td class="nump">104,181<span></span>
</td>
<td class="nump">189,771<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AccountsReceivableNetCurrent', window );">Accounts receivable, net</a></td>
<td class="nump">109,609<span></span>
</td>
<td class="nump">79,991<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_UnbilledContractsReceivable', window );">Contract assets</a></td>
<td class="nump">18,293<span></span>
</td>
<td class="nump">21,246<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_InventoryNet', window );">Inventories</a></td>
<td class="nump">170,858<span></span>
</td>
<td class="nump">145,906<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DeferredCostsCurrent', window );">Deferred cost of sales</a></td>
<td class="nump">346<span></span>
</td>
<td class="nump">433<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PrepaidExpenseAndOtherAssetsCurrent', window );">Prepaid expenses and other current assets</a></td>
<td class="nump">25,628<span></span>
</td>
<td class="nump">19,301<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AssetsCurrent', window );">Total current assets</a></td>
<td class="nump">549,387<span></span>
</td>
<td class="nump">586,931<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentNet', window );">Property, plant, and equipment, net</a></td>
<td class="nump">99,743<span></span>
</td>
<td class="nump">65,271<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OperatingLeaseRightOfUseAsset', window );">Operating lease right-of-use assets</a></td>
<td class="nump">28,813<span></span>
</td>
<td class="nump">10,275<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IntangibleAssetsNetExcludingGoodwill', window );">Intangible assets, net</a></td>
<td class="nump">33,905<span></span>
</td>
<td class="nump">46,185<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_Goodwill', window );">Goodwill</a></td>
<td class="nump">181,943<span></span>
</td>
<td class="nump">181,943<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DeferredIncomeTaxAssetsNet', window );">Deferred income taxes</a></td>
<td class="nump">1,639<span></span>
</td>
<td class="nump">1,440<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OtherAssetsNoncurrent', window );">Other assets</a></td>
<td class="nump">3,546<span></span>
</td>
<td class="nump">6,019<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_Assets', window );">Total assets</a></td>
<td class="nump">898,976<span></span>
</td>
<td class="nump">898,064<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LiabilitiesCurrentAbstract', window );"><strong>Current liabilities:</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AccountsPayableCurrent', window );">Accounts payable</a></td>
<td class="nump">44,456<span></span>
</td>
<td class="nump">33,656<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_AccruedAndOtherLiabilitiesCurrent', window );">Accrued expenses and other current liabilities</a></td>
<td class="nump">79,752<span></span>
</td>
<td class="nump">44,876<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_ContractWithCustomerLiabilityAndRefundLiabilityCurrent', window );">Customer deposits and deferred revenue</a></td>
<td class="nump">63,136<span></span>
</td>
<td class="nump">67,235<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AccruedIncomeTaxesCurrent', window );">Income taxes payable</a></td>
<td class="nump">1,860<span></span>
</td>
<td class="nump">914<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LiabilitiesCurrent', window );">Total current liabilities</a></td>
<td class="nump">189,204<span></span>
</td>
<td class="nump">146,681<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DeferredIncomeTaxLiabilitiesNet', window );">Deferred income taxes</a></td>
<td class="nump">4,792<span></span>
</td>
<td class="nump">5,240<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LongTermDebtNoncurrent', window );">Long-term debt</a></td>
<td class="nump">229,438<span></span>
</td>
<td class="nump">321,115<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OperatingLeaseLiabilityNoncurrent', window );">Long-term operating lease liabilities</a></td>
<td class="nump">32,834<span></span>
</td>
<td class="nump">6,305<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OtherLiabilitiesNoncurrent', window );">Other liabilities</a></td>
<td class="nump">5,080<span></span>
</td>
<td class="nump">10,349<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_Liabilities', window );">Total liabilities</a></td>
<td class="nump">461,348<span></span>
</td>
<td class="nump">489,690<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockholdersEquityAbstract', window );"><strong>Stockholders' equity:</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PreferredStockValue', window );">Preferred stock, $0.01 par value; 500,000 shares authorized; no shares issued and outstanding.</a></td>
<td class="text"> <span></span>
</td>
<td class="text"> <span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CommonStockValue', window );">Common stock, $0.01 par value; 120,000,000 shares authorized; 50,652,864 shares issued and outstanding at December 31, 2021 and 49,723,751 shares issued and outstanding at December 31, 2020</a></td>
<td class="nump">507<span></span>
</td>
<td class="nump">497<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AdditionalPaidInCapitalCommonStock', window );">Additional paid-in capital</a></td>
<td class="nump">1,116,921<span></span>
</td>
<td class="nump">1,113,352<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_RetainedEarningsAccumulatedDeficit', window );">Accumulated deficit</a></td>
<td class="num">(681,283)<span></span>
</td>
<td class="num">(707,321)<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax', window );">Accumulated other comprehensive income</a></td>
<td class="nump">1,483<span></span>
</td>
<td class="nump">1,846<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockholdersEquity', window );">Total stockholders' equity</a></td>
<td class="nump">437,628<span></span>
</td>
<td class="nump">408,374<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LiabilitiesAndStockholdersEquity', window );">Total liabilities and stockholders' equity</a></td>
<td class="nump">$ 898,976<span></span>
</td>
<td class="nump">$ 898,064<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AccountsPayableCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Carrying value as of the balance sheet date of liabilities incurred (and for which invoices have typically been received) and payable to vendors for goods and services received that are used in an entity's business. Used to reflect the current portion of the liabilities (due within one year or within the normal operating cycle if longer).</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.19(a))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 2: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 852<br> -SubTopic 10<br> -Section 55<br> -Paragraph 10<br> -URI http://asc.fasb.org/extlink&amp;oid=84165509&amp;loc=d3e56426-112766<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AccountsPayableCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AccountsReceivableNetCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount, after allowance for credit loss, of right to consideration from customer for product sold and service rendered in normal course of business, classified as current.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 310<br> -SubTopic 10<br> -Section 45<br> -Paragraph 2<br> -URI http://asc.fasb.org/extlink&amp;oid=124259787&amp;loc=d3e4428-111522<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(3))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 3: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section 45<br> -Paragraph 1<br> -Subparagraph (c)<br> -URI http://asc.fasb.org/extlink&amp;oid=124098289&amp;loc=d3e6676-107765<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 310<br> -SubTopic 10<br> -Section 45<br> -Paragraph 9<br> -URI http://asc.fasb.org/extlink&amp;oid=124259787&amp;loc=d3e4531-111522<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AccountsReceivableNetCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AccruedIncomeTaxesCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Carrying amount as of the balance sheet date of the unpaid sum of the known and estimated amounts payable to satisfy all currently due domestic and foreign income tax obligations.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 210<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-03(a)(15)(b)(1))<br> -URI http://asc.fasb.org/extlink&amp;oid=120400017&amp;loc=d3e572229-122910<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 942<br> -SubTopic 210<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-03(15)(1))<br> -URI http://asc.fasb.org/extlink&amp;oid=120398452&amp;loc=d3e534808-122878<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(20))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AccruedIncomeTaxesCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Accumulated change in equity from transactions and other events and circumstances from non-owner sources, net of tax effect, at period end. Excludes Net Income (Loss), and accumulated changes in equity from transactions resulting from investments by owners and distributions to owners. Includes foreign currency translation items, certain pension adjustments, unrealized gains and losses on certain investments in debt and equity securities, other than temporary impairment (OTTI) losses related to factors other than credit losses on available-for-sale and held-to-maturity debt securities that an entity does not intend to sell and it is not more likely than not that the entity will be required to sell before recovery of the amortized cost basis, as well as changes in the fair value of derivatives related to the effective portion of a designated cash flow hedge.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(30)(a)(4))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section 45<br> -Paragraph 11<br> -URI http://asc.fasb.org/extlink&amp;oid=124509347&amp;loc=d3e637-108580<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 210<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-03(a)(23)(a)(3))<br> -URI http://asc.fasb.org/extlink&amp;oid=120400017&amp;loc=d3e572229-122910<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section 45<br> -Paragraph 14A<br> -URI http://asc.fasb.org/extlink&amp;oid=124509347&amp;loc=SL7669686-108580<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 40<br> -Section 65<br> -Paragraph 2<br> -Subparagraph (h)(2)<br> -URI http://asc.fasb.org/extlink&amp;oid=124501264&amp;loc=SL117420844-207641<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 40<br> -Section 65<br> -Paragraph 2<br> -Subparagraph (g)(2)(ii)<br> -URI http://asc.fasb.org/extlink&amp;oid=124501264&amp;loc=SL117420844-207641<br><br>Reference 7: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section 45<br> -Paragraph 14<br> -URI http://asc.fasb.org/extlink&amp;oid=124509347&amp;loc=d3e681-108580<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AdditionalPaidInCapitalCommonStock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Value received from shareholders in common stock-related transactions that are in excess of par value or stated value and amounts received from other stock-related transactions. Includes only common stock transactions (excludes preferred stock transactions). May be called contributed capital, capital in excess of par, capital surplus, or paid-in capital.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(30)(a)(1))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AdditionalPaidInCapitalCommonStock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_Assets">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Sum of the carrying amounts as of the balance sheet date of all assets that are recognized. Assets are probable future economic benefits obtained or controlled by an entity as a result of past transactions or events.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 942<br> -SubTopic 210<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-03(11))<br> -URI http://asc.fasb.org/extlink&amp;oid=120398452&amp;loc=d3e534808-122878<br><br>Reference 2: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 852<br> -SubTopic 10<br> -Section 55<br> -Paragraph 10<br> -URI http://asc.fasb.org/extlink&amp;oid=84165509&amp;loc=d3e56426-112766<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(4)(iii)(A))<br> -URI 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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
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<tr>
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<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Sum of the carrying amounts as of the balance sheet date of all assets that are expected to be realized in cash, sold, or consumed within one year (or the normal operating cycle, if longer). Assets are probable future economic benefits obtained or controlled by an entity as a result of past transactions or events.</p></div>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AssetsCurrent</td>
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<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
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<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
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<td><strong> Balance Type:</strong></td>
<td>debit</td>
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<td><strong> Period Type:</strong></td>
<td>instant</td>
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</table></div>
</div></td></tr>
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<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AssetsCurrentAbstract">
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<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
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<td><strong> Data Type:</strong></td>
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<td><strong> Balance Type:</strong></td>
<td>na</td>
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<td><strong> Period Type:</strong></td>
<td>duration</td>
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</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AvailableForSaleSecuritiesDebtSecuritiesCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of investment in debt security measured at fair value with change in fair value recognized in other comprehensive income (available-for-sale), classified as current.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 326<br> -SubTopic 30<br> -Section 45<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=124258926&amp;loc=SL82898722-210454<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 320<br> -SubTopic 10<br> -Section 45<br> -Paragraph 2<br> -URI http://asc.fasb.org/extlink&amp;oid=124260329&amp;loc=d3e26626-111562<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AvailableForSaleSecuritiesDebtSecuritiesCurrent</td>
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<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
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<td><strong> Data Type:</strong></td>
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<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
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<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
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<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CashAndCashEquivalentsAtCarryingValue">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of currency on hand as well as demand deposits with banks or financial institutions. Includes other kinds of accounts that have the general characteristics of demand deposits. Also includes short-term, highly liquid investments that are both readily convertible to known amounts of cash and so near their maturity that they present insignificant risk of changes in value because of changes in interest rates. Excludes cash and cash equivalents within disposal group and discontinued operation.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 4<br> -URI http://asc.fasb.org/extlink&amp;oid=123570139&amp;loc=d3e3044-108585<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section 45<br> -Paragraph 1<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=124098289&amp;loc=d3e6676-107765<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.1)<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CashAndCashEquivalentsAtCarryingValue</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
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<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
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</table></div>
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<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CommonStockValue">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Aggregate par or stated value of issued nonredeemable common stock (or common stock redeemable solely at the option of the issuer). This item includes treasury stock repurchased by the entity. Note: elements for number of nonredeemable common shares, par value and other disclosure concepts are in another section within stockholders' equity.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 852<br> -SubTopic 10<br> -Section 55<br> -Paragraph 10<br> -URI http://asc.fasb.org/extlink&amp;oid=84165509&amp;loc=d3e56426-112766<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(29))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CommonStockValue</td>
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<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
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<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
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<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
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</div></td></tr>
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<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredCostsCurrent">
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Sum of the carrying amounts as of the balance sheet date of deferred costs capitalized at the end of the reporting period that are expected to be charged against earnings within one year or the normal operating cycle, if longer.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.8)<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DeferredCostsCurrent</td>
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<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredIncomeTaxAssetsNet">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount, after allocation of valuation allowances and deferred tax liability, of deferred tax asset attributable to deductible differences and carryforwards, with jurisdictional netting.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 45<br> -Paragraph 6<br> -URI http://asc.fasb.org/extlink&amp;oid=123427490&amp;loc=d3e31931-109318<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 45<br> -Paragraph 4<br> -URI http://asc.fasb.org/extlink&amp;oid=123427490&amp;loc=d3e31917-109318<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DeferredIncomeTaxAssetsNet</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
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<tr>
<td><strong> Data Type:</strong></td>
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</tr>
<tr>
<td><strong> Balance Type:</strong></td>
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<tr>
<td><strong> Period Type:</strong></td>
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</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredIncomeTaxLiabilitiesNet">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount, after deferred tax asset, of deferred tax liability attributable to taxable differences with jurisdictional netting.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 45<br> -Paragraph 6<br> -URI http://asc.fasb.org/extlink&amp;oid=123427490&amp;loc=d3e31931-109318<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 45<br> -Paragraph 4<br> -URI http://asc.fasb.org/extlink&amp;oid=123427490&amp;loc=d3e31917-109318<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DeferredIncomeTaxLiabilitiesNet</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_Goodwill">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount after accumulated impairment loss of an asset representing future economic benefits arising from other assets acquired in a business combination that are not individually identified and separately recognized.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 942<br> -SubTopic 210<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-03(10)(1))<br> -URI http://asc.fasb.org/extlink&amp;oid=120398452&amp;loc=d3e534808-122878<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 350<br> -SubTopic 20<br> -Section 45<br> -Paragraph 5<br> -URI http://asc.fasb.org/extlink&amp;oid=120320667&amp;loc=SL49117168-202975<br><br>Reference 3: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 852<br> -SubTopic 10<br> -Section 55<br> -Paragraph 10<br> -URI http://asc.fasb.org/extlink&amp;oid=84165509&amp;loc=d3e56426-112766<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 350<br> -SubTopic 20<br> -Section 45<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=99380562&amp;loc=d3e13770-109266<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_Goodwill</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
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<tr>
<td><strong> Data Type:</strong></td>
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</tr>
<tr>
<td><strong> Balance Type:</strong></td>
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</tr>
<tr>
<td><strong> Period Type:</strong></td>
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</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IntangibleAssetsNetExcludingGoodwill">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Sum of the carrying amounts of all intangible assets, excluding goodwill, as of the balance sheet date, net of accumulated amortization and impairment charges.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 350<br> -SubTopic 30<br> -Section 50<br> -Paragraph 2<br> -Subparagraph ((a)(1),(b))<br> -URI http://asc.fasb.org/extlink&amp;oid=66006027&amp;loc=d3e16323-109275<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 350<br> -SubTopic 30<br> -Section 45<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=6388964&amp;loc=d3e16212-109274<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IntangibleAssetsNetExcludingGoodwill</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
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<tr>
<td><strong> Data Type:</strong></td>
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</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
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</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_InventoryNet">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount after valuation and LIFO reserves of inventory expected to be sold, or consumed within one year or operating cycle, if longer.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section 45<br> -Paragraph 1<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=124098289&amp;loc=d3e6676-107765<br><br>Reference 2: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 852<br> -SubTopic 10<br> -Section 55<br> -Paragraph 10<br> -URI http://asc.fasb.org/extlink&amp;oid=84165509&amp;loc=d3e56426-112766<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.6(a))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_InventoryNet</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
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</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_Liabilities">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Sum of the carrying amounts as of the balance sheet date of all liabilities that are recognized. Liabilities are probable future sacrifices of economic benefits arising from present obligations of an entity to transfer assets or provide services to other entities in the future.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.19-26)<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 2: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 852<br> -SubTopic 10<br> -Section 50<br> -Paragraph 7<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=124433192&amp;loc=SL2890621-112765<br><br>Reference 3: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 30<br> -Subparagraph (d)<br> -URI 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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_Liabilities</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LiabilitiesAndStockholdersEquity">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of liabilities and equity items, including the portion of equity attributable to noncontrolling interests, if any.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 323<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (c)<br> -URI http://asc.fasb.org/extlink&amp;oid=114001798&amp;loc=d3e33918-111571<br><br>Reference 2: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 852<br> -SubTopic 10<br> -Section 55<br> -Paragraph 10<br> -URI http://asc.fasb.org/extlink&amp;oid=84165509&amp;loc=d3e56426-112766<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 942<br> -SubTopic 210<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-03(23))<br> -URI http://asc.fasb.org/extlink&amp;oid=120398452&amp;loc=d3e534808-122878<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 210<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-03(a)(25))<br> -URI http://asc.fasb.org/extlink&amp;oid=120400017&amp;loc=d3e572229-122910<br><br>Reference 5: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(g)(1)(ii))<br> -URI http://asc.fasb.org/extlink&amp;oid=120395691&amp;loc=d3e23780-122690<br><br>Reference 6: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(32))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 7: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 825<br> -SubTopic 10<br> -Section 50<br> -Paragraph 28<br> -Subparagraph (f)<br> -URI http://asc.fasb.org/extlink&amp;oid=123596393&amp;loc=d3e14064-108612<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LiabilitiesAndStockholdersEquity</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LiabilitiesCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Total obligations incurred as part of normal operations that are expected to be paid during the following twelve months or within one business cycle, if longer.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 852<br> -SubTopic 10<br> -Section 55<br> -Paragraph 10<br> -URI http://asc.fasb.org/extlink&amp;oid=84165509&amp;loc=d3e56426-112766<br><br>Reference 2: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 852<br> -SubTopic 10<br> -Section 50<br> -Paragraph 7<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=124433192&amp;loc=SL2890621-112765<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(4)(iii)(A))<br> -URI 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http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (c)<br> -URI http://asc.fasb.org/extlink&amp;oid=123419778&amp;loc=d3e5710-111685<br><br>Reference 11: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 323<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (c)<br> -URI http://asc.fasb.org/extlink&amp;oid=114001798&amp;loc=d3e33918-111571<br><br>Reference 12: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(4)(iii)(B))<br> -URI http://asc.fasb.org/extlink&amp;oid=124359900&amp;loc=SL124442552-122756<br><br>Reference 13: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(5))<br> -URI http://asc.fasb.org/extlink&amp;oid=124359900&amp;loc=SL124442526-122756<br><br>Reference 14: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (bb)<br> -URI http://asc.fasb.org/extlink&amp;oid=123419778&amp;loc=d3e5710-111685<br><br>Reference 15: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(5))<br> -URI http://asc.fasb.org/extlink&amp;oid=124359900&amp;loc=SL124442552-122756<br><br>Reference 16: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(4)(iii)(A))<br> -URI http://asc.fasb.org/extlink&amp;oid=124359900&amp;loc=SL124442526-122756<br><br>Reference 17: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(4)(i))<br> -URI http://asc.fasb.org/extlink&amp;oid=124359900&amp;loc=SL124442526-122756<br><br>Reference 18: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(4)(iv))<br> -URI http://asc.fasb.org/extlink&amp;oid=124359900&amp;loc=SL124442526-122756<br><br>Reference 19: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 825<br> -SubTopic 10<br> -Section 50<br> -Paragraph 28<br> -Subparagraph (f)<br> -URI http://asc.fasb.org/extlink&amp;oid=123596393&amp;loc=d3e14064-108612<br><br>Reference 20: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.21)<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LiabilitiesCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LiabilitiesCurrentAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LiabilitiesCurrentAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LongTermDebtNoncurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount after unamortized (discount) premium and debt issuance costs of long-term debt classified as noncurrent and excluding amounts to be repaid within one year or the normal operating cycle, if longer. Includes, but not limited to, notes payable, bonds payable, debentures, mortgage loans and commercial paper. Excludes capital lease obligations.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.22)<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LongTermDebtNoncurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OperatingLeaseLiabilityNoncurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Present value of lessee's discounted obligation for lease payments from operating lease, classified as noncurrent.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 45<br> -Paragraph 1<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=123391704&amp;loc=SL77918627-209977<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OperatingLeaseLiabilityNoncurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OperatingLeaseRightOfUseAsset">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of lessee's right to use underlying asset under operating lease.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 45<br> -Paragraph 1<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=123391704&amp;loc=SL77918627-209977<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OperatingLeaseRightOfUseAsset</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OtherAssetsNoncurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of noncurrent assets classified as other.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.17)<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OtherAssetsNoncurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OtherLiabilitiesNoncurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of liabilities classified as other, due after one year or the normal operating cycle, if longer.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.24)<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OtherLiabilitiesNoncurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PreferredStockValue">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Aggregate par or stated value of issued nonredeemable preferred stock (or preferred stock redeemable solely at the option of the issuer). This item includes treasury stock repurchased by the entity. Note: elements for number of nonredeemable preferred shares, par value and other disclosure concepts are in another section within stockholders' equity.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(28))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 2: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 852<br> -SubTopic 10<br> -Section 55<br> -Paragraph 10<br> -URI http://asc.fasb.org/extlink&amp;oid=84165509&amp;loc=d3e56426-112766<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PreferredStockValue</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PrepaidExpenseAndOtherAssetsCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of asset related to consideration paid in advance for costs that provide economic benefits in future periods, and amount of other assets that are expected to be realized or consumed within one year or the normal operating cycle, if longer.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(7))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section 45<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=124098289&amp;loc=d3e6676-107765<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(8))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PrepaidExpenseAndOtherAssetsCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PropertyPlantAndEquipmentNet">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount after accumulated depreciation, depletion and amortization of physical assets used in the normal conduct of business to produce goods and services and not intended for resale. Examples include, but are not limited to, land, buildings, machinery and equipment, office equipment, and furniture and fixtures.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(14))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 360<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=6391035&amp;loc=d3e2868-110229<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 210<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-03(a)(8))<br> -URI http://asc.fasb.org/extlink&amp;oid=120400017&amp;loc=d3e572229-122910<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 942<br> -SubTopic 360<br> -Section 50<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=124429447&amp;loc=SL124453093-239630<br><br>Reference 5: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(13))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 6: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 852<br> -SubTopic 10<br> -Section 55<br> -Paragraph 10<br> -URI http://asc.fasb.org/extlink&amp;oid=84165509&amp;loc=d3e56426-112766<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PropertyPlantAndEquipmentNet</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RestrictedCashAndCashEquivalentsAtCarryingValue">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of cash and cash equivalents restricted as to withdrawal or usage, classified as current. Cash includes, but is not limited to, currency on hand, demand deposits with banks or financial institutions, and other accounts with general characteristics of demand deposits. Cash equivalents include, but are not limited to, short-term, highly liquid investments that are both readily convertible to known amounts of cash and so near their maturity that they present insignificant risk of changes in value because of changes in interest rates.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section 45<br> -Paragraph 1<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=124098289&amp;loc=d3e6676-107765<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 4<br> -URI http://asc.fasb.org/extlink&amp;oid=123570139&amp;loc=d3e3044-108585<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(1))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -URI http://asc.fasb.org/extlink&amp;oid=123431023&amp;loc=SL98516268-108586<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RestrictedCashAndCashEquivalentsAtCarryingValue</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RetainedEarningsAccumulatedDeficit">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The cumulative amount of the reporting entity's undistributed earnings or deficit.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(30)(a)(3))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 2: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 852<br> -SubTopic 10<br> -Section 55<br> -Paragraph 10<br> -URI http://asc.fasb.org/extlink&amp;oid=84165509&amp;loc=d3e56426-112766<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 65<br> -Paragraph 15<br> -Subparagraph (g)(2)<br> -URI http://asc.fasb.org/extlink&amp;oid=121322162&amp;loc=SL121327923-165333<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 210<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-03(a)(23)(a)(4))<br> -URI http://asc.fasb.org/extlink&amp;oid=120400017&amp;loc=d3e572229-122910<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 40<br> -Section 65<br> -Paragraph 2<br> -Subparagraph (h)(2)<br> -URI http://asc.fasb.org/extlink&amp;oid=124501264&amp;loc=SL117420844-207641<br><br>Reference 6: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.3-04)<br> -URI http://asc.fasb.org/extlink&amp;oid=120397183&amp;loc=d3e187085-122770<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 40<br> -Section 65<br> -Paragraph 2<br> -Subparagraph (g)(2)(i)<br> -URI http://asc.fasb.org/extlink&amp;oid=124501264&amp;loc=SL117420844-207641<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RetainedEarningsAccumulatedDeficit</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StockholdersEquity">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Total of all stockholders' equity (deficit) items, net of receivables from officers, directors, owners, and affiliates of the entity which are attributable to the parent. The amount of the economic entity's stockholders' equity attributable to the parent excludes the amount of stockholders' equity which is allocable to that ownership interest in subsidiary equity which is not attributable to the parent (noncontrolling interest, minority interest). This excludes temporary equity and is sometimes called permanent equity.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(g)(1)(ii))<br> -URI http://asc.fasb.org/extlink&amp;oid=120395691&amp;loc=d3e23780-122690<br><br>Reference 2: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 852<br> -SubTopic 10<br> -Section 55<br> -Paragraph 10<br> -URI http://asc.fasb.org/extlink&amp;oid=84165509&amp;loc=d3e56426-112766<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 310<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SAB Topic 4.E)<br> -URI http://asc.fasb.org/extlink&amp;oid=122038336&amp;loc=d3e74512-122707<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(31))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 5: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(29))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 6: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(30))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 7: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 825<br> -SubTopic 10<br> -Section 50<br> -Paragraph 28<br> -Subparagraph (f)<br> -URI http://asc.fasb.org/extlink&amp;oid=123596393&amp;loc=d3e14064-108612<br><br>Reference 8: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 323<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (c)<br> -URI http://asc.fasb.org/extlink&amp;oid=114001798&amp;loc=d3e33918-111571<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StockholdersEquity</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StockholdersEquityAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StockholdersEquityAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_UnbilledContractsReceivable">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Unbilled amounts due for services rendered or to be rendered, actions taken or to be taken, or a promise to refrain from taking certain actions in accordance with the terms of a legally binding agreement between the entity and, at a minimum, one other party. An example would be amounts associated with contracts or programs where the recognized revenue for performance thereunder exceeds the amounts billed under the terms thereof as of the date of the balance sheet.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.3(c)(3))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 912<br> -SubTopic 310<br> -Section 45<br> -Paragraph 2<br> -URI http://asc.fasb.org/extlink&amp;oid=123371682&amp;loc=d3e55302-109406<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_UnbilledContractsReceivable</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_AccruedAndOtherLiabilitiesCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Carrying value as of the balance sheet date of obligations incurred and payable, pertaining to costs that are statutory in nature, are incurred on contractual obligations, or accumulate over time and for which invoices have not yet been received or will not be rendered. Examples include taxes, interest, rent and utilities. Used to reflect the current portion of the liabilities (due within one year or within the normal operating cycle if longer). Also includes amount of liabilities classified as other, due within one year or the normal operating cycle, if longer.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_AccruedAndOtherLiabilitiesCurrent</td>
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<td>xbrli:monetaryItemType</td>
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<td>credit</td>
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<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_ContractWithCustomerLiabilityAndRefundLiabilityCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of obligation to transfer good or service to customer for which consideration has been received or is receivable. Also includes amount of liability for consideration received or receivable from customer which is not included in transaction price, when consideration is expected to be refunded to customer, classified as current.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_ContractWithCustomerLiabilityAndRefundLiabilityCurrent</td>
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<td>veco_</td>
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<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
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<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
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<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674063797192">
<tr>
<th class="tl" colspan="1" rowspan="1"><div style="width: 200px;"><strong>Consolidated Balance Sheets (Parenthetical) - $ / shares<br></strong></div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
<th class="th"><div>Dec. 31, 2020</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StatementOfFinancialPositionAbstract', window );"><strong>Consolidated Balance Sheets</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PreferredStockParOrStatedValuePerShare', window );">Preferred stock, par value (in dollars per share)</a></td>
<td class="nump">$ 0.01<span></span>
</td>
<td class="nump">$ 0.01<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PreferredStockSharesAuthorized', window );">Preferred stock, shares authorized</a></td>
<td class="nump">500,000<span></span>
</td>
<td class="nump">500,000<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PreferredStockSharesIssued', window );">Preferred stock, shares issued</a></td>
<td class="nump">0<span></span>
</td>
<td class="nump">0<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PreferredStockSharesOutstanding', window );">Preferred stock, shares outstanding</a></td>
<td class="nump">0<span></span>
</td>
<td class="nump">0<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CommonStockParOrStatedValuePerShare', window );">Common stock, par value (in dollars per share)</a></td>
<td class="nump">$ 0.01<span></span>
</td>
<td class="nump">$ 0.01<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CommonStockSharesAuthorized', window );">Common stock, authorized shares</a></td>
<td class="nump">120,000,000<span></span>
</td>
<td class="nump">120,000,000<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CommonStockSharesIssued', window );">Common stock, shares issued</a></td>
<td class="nump">50,652,864<span></span>
</td>
<td class="nump">49,723,751<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CommonStockSharesOutstanding', window );">Common stock, shares outstanding</a></td>
<td class="nump">50,652,864<span></span>
</td>
<td class="nump">49,723,751<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CommonStockParOrStatedValuePerShare">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Face amount or stated value per share of common stock.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(29))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CommonStockParOrStatedValuePerShare</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CommonStockSharesAuthorized">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The maximum number of common shares permitted to be issued by an entity's charter and bylaws.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(29))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CommonStockSharesAuthorized</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CommonStockSharesIssued">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Total number of common shares of an entity that have been sold or granted to shareholders (includes common shares that were issued, repurchased and remain in the treasury). These shares represent capital invested by the firm's shareholders and owners, and may be all or only a portion of the number of shares authorized. Shares issued include shares outstanding and shares held in the treasury.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(29))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CommonStockSharesIssued</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CommonStockSharesOutstanding">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Number of shares of common stock outstanding. Common stock represent the ownership interest in a corporation.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -URI http://asc.fasb.org/extlink&amp;oid=123467817&amp;loc=d3e21463-112644<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(29))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CommonStockSharesOutstanding</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PreferredStockParOrStatedValuePerShare">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Face amount or stated value per share of preferred stock nonredeemable or redeemable solely at the option of the issuer.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(28))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section 50<br> -Paragraph 13<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=123467817&amp;loc=SL123496158-112644<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PreferredStockParOrStatedValuePerShare</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PreferredStockSharesAuthorized">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The maximum number of nonredeemable preferred shares (or preferred stock redeemable solely at the option of the issuer) permitted to be issued by an entity's charter and bylaws.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(28))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PreferredStockSharesAuthorized</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PreferredStockSharesIssued">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Total number of nonredeemable preferred shares (or preferred stock redeemable solely at the option of the issuer) issued to shareholders (includes related preferred shares that were issued, repurchased, and remain in the treasury). May be all or portion of the number of preferred shares authorized. Excludes preferred shares that are classified as debt.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(28))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section 50<br> -Paragraph 13<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=123467817&amp;loc=SL123496158-112644<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PreferredStockSharesIssued</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PreferredStockSharesOutstanding">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Aggregate share number for all nonredeemable preferred stock (or preferred stock redeemable solely at the option of the issuer) held by stockholders. Does not include preferred shares that have been repurchased.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(28))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PreferredStockSharesOutstanding</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StatementOfFinancialPositionAbstract</td>
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<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674064703000">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Consolidated Statements of Operations - USD ($)<br> shares in Thousands, $ in Thousands</strong></div></th>
<th class="th" colspan="3">12 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2021</div></th>
<th class="th"><div>Dec. 31, 2020</div></th>
<th class="th"><div>Dec. 31, 2019</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncomeStatementAbstract', window );"><strong>Consolidated Statements of Operations</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_RevenueFromContractWithCustomerIncludingAssessedTax', window );">Net sales</a></td>
<td class="nump">$ 583,277<span></span>
</td>
<td class="nump">$ 454,163<span></span>
</td>
<td class="nump">$ 419,349<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CostOfGoodsAndServicesSold', window );">Cost of sales</a></td>
<td class="nump">341,003<span></span>
</td>
<td class="nump">259,863<span></span>
</td>
<td class="nump">261,155<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_GrossProfit', window );">Gross profit</a></td>
<td class="nump">242,274<span></span>
</td>
<td class="nump">194,300<span></span>
</td>
<td class="nump">158,194<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OperatingExpensesAbstract', window );"><strong>Operating expenses, net:</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ResearchAndDevelopmentExpense', window );">Research and development</a></td>
<td class="nump">88,680<span></span>
</td>
<td class="nump">78,994<span></span>
</td>
<td class="nump">90,557<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SellingGeneralAndAdministrativeExpense', window );">Selling, general, and administrative</a></td>
<td class="nump">84,536<span></span>
</td>
<td class="nump">76,251<span></span>
</td>
<td class="nump">79,749<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AmortizationOfIntangibleAssets', window );">Amortization of intangible assets</a></td>
<td class="nump">12,280<span></span>
</td>
<td class="nump">15,333<span></span>
</td>
<td class="nump">17,085<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_RestructuringCharges', window );">Restructuring</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">1,097<span></span>
</td>
<td class="nump">6,403<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AssetImpairmentCharges', window );">Asset impairment</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">281<span></span>
</td>
<td class="nump">4,020<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OtherOperatingIncomeExpenseNet', window );">Other operating expense (income), net</a></td>
<td class="nump">68<span></span>
</td>
<td class="num">(221)<span></span>
</td>
<td class="num">(42)<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OperatingExpenses', window );">Total operating expenses, net</a></td>
<td class="nump">185,564<span></span>
</td>
<td class="nump">171,735<span></span>
</td>
<td class="nump">197,772<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OperatingIncomeLoss', window );">Operating income (loss)</a></td>
<td class="nump">56,710<span></span>
</td>
<td class="nump">22,565<span></span>
</td>
<td class="num">(39,578)<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_InvestmentIncomeInterest', window );">Interest income</a></td>
<td class="nump">2,340<span></span>
</td>
<td class="nump">1,551<span></span>
</td>
<td class="nump">4,680<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_InterestExpense', window );">Interest expense</a></td>
<td class="num">(28,360)<span></span>
</td>
<td class="num">(24,739)<span></span>
</td>
<td class="num">(22,085)<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OtherNonoperatingIncomeExpense', window );">Other income (expense), net</a></td>
<td class="num">(5,010)<span></span>
</td>
<td class="num">(7,841)<span></span>
</td>
<td class="num">(20,973)<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest', window );">Income (loss) before income taxes</a></td>
<td class="nump">25,680<span></span>
</td>
<td class="num">(8,464)<span></span>
</td>
<td class="num">(77,956)<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncomeTaxExpenseBenefit', window );">Income tax expense (benefit)</a></td>
<td class="num">(358)<span></span>
</td>
<td class="num">(73)<span></span>
</td>
<td class="nump">777<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_NetIncomeLoss', window );">Net income (loss)</a></td>
<td class="nump">$ 26,038<span></span>
</td>
<td class="num">$ (8,391)<span></span>
</td>
<td class="num">$ (78,733)<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EarningsPerShareAbstract', window );"><strong>Income (loss) per common share:</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EarningsPerShareBasic', window );">Basic (in dollars per share)</a></td>
<td class="nump">$ 0.53<span></span>
</td>
<td class="num">$ (0.17)<span></span>
</td>
<td class="num">$ (1.66)<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EarningsPerShareDiluted', window );">Diluted (in dollars per share)</a></td>
<td class="nump">$ 0.49<span></span>
</td>
<td class="num">$ (0.17)<span></span>
</td>
<td class="num">$ (1.66)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_WeightedAverageNumberOfSharesOutstandingAbstract', window );"><strong>Weighted average number of shares:</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_WeightedAverageNumberOfSharesOutstandingBasic', window );">Basic (in shares)</a></td>
<td class="nump">49,073<span></span>
</td>
<td class="nump">48,362<span></span>
</td>
<td class="nump">47,482<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding', window );">Diluted (in shares)</a></td>
<td class="nump">53,643<span></span>
</td>
<td class="nump">48,362<span></span>
</td>
<td class="nump">47,482<span></span>
</td>
</tr>
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<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AmortizationOfIntangibleAssets">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The aggregate expense charged against earnings to allocate the cost of intangible assets (nonphysical assets not used in production) in a systematic and rational manner to the periods expected to benefit from such assets. As a noncash expense, this element is added back to net income when calculating cash provided by or used in operations using the indirect method.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 28<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=123570139&amp;loc=d3e3602-108585<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 350<br> -SubTopic 30<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (a)(2)<br> -URI http://asc.fasb.org/extlink&amp;oid=66006027&amp;loc=d3e16323-109275<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 350<br> -SubTopic 30<br> -Section 45<br> -Paragraph 2<br> -URI http://asc.fasb.org/extlink&amp;oid=6388964&amp;loc=d3e16225-109274<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AmortizationOfIntangibleAssets</td>
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<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
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<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
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<tr>
<td><strong> Balance Type:</strong></td>
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<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
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<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AssetImpairmentCharges">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of write-down of assets recognized in the income statement. Includes, but is not limited to, losses from tangible assets, intangible assets and goodwill.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 28<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=123570139&amp;loc=d3e3602-108585<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 360<br> -SubTopic 10<br> -Section 45<br> -Paragraph 4<br> -URI http://asc.fasb.org/extlink&amp;oid=123351718&amp;loc=d3e2420-110228<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AssetImpairmentCharges</td>
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<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
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<tr>
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<td><strong> Balance Type:</strong></td>
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<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The aggregate costs related to goods produced and sold and services rendered by an entity during the reporting period. This excludes costs incurred during the reporting period related to financial services rendered and other revenue generating activities.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 924<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SAB Topic 11.L)<br> -URI http://asc.fasb.org/extlink&amp;oid=6472922&amp;loc=d3e499488-122856<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SX 210.5-03.2(a),(d))<br> -URI http://asc.fasb.org/extlink&amp;oid=123367319&amp;loc=SL114868664-224227<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CostOfGoodsAndServicesSold</td>
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<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
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<td><strong> Data Type:</strong></td>
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</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
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<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
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<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EarningsPerShareAbstract</td>
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<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
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<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
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</div></td></tr>
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<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EarningsPerShareBasic">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The amount of net income (loss) for the period per each share of common stock or unit outstanding during the reporting period.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 815<br> -SubTopic 40<br> -Section 65<br> -Paragraph 1<br> -Subparagraph (e)(4)<br> -URI http://asc.fasb.org/extlink&amp;oid=123482062&amp;loc=SL123482106-238011<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -URI http://asc.fasb.org/extlink&amp;oid=124431687&amp;loc=d3e22583-107794<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 11<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=124431687&amp;loc=d3e22694-107794<br><br>Reference 4: 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-Paragraph 7<br> -URI http://asc.fasb.org/extlink&amp;oid=125511455&amp;loc=d3e1337-109256<br><br>Reference 8: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 815<br> -SubTopic 40<br> -Section 65<br> -Paragraph 1<br> -Subparagraph (f)<br> -URI http://asc.fasb.org/extlink&amp;oid=123482062&amp;loc=SL123482106-238011<br><br>Reference 9: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 55<br> -Paragraph 52<br> -URI http://asc.fasb.org/extlink&amp;oid=125512782&amp;loc=d3e4984-109258<br><br>Reference 10: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 220<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-04(23))<br> -URI http://asc.fasb.org/extlink&amp;oid=120400993&amp;loc=SL114874131-224263<br><br>Reference 11: 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10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SX 210.5-03(25))<br> -URI http://asc.fasb.org/extlink&amp;oid=123367319&amp;loc=SL114868664-224227<br><br>Reference 15: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 2<br> -URI http://asc.fasb.org/extlink&amp;oid=125511455&amp;loc=d3e1252-109256<br><br>Reference 16: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 60B<br> -Subparagraph (d)<br> -URI http://asc.fasb.org/extlink&amp;oid=125511455&amp;loc=SL5780133-109256<br><br>Reference 17: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 942<br> -SubTopic 220<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-04(27))<br> -URI 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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EarningsPerShareBasic</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EarningsPerShareDiluted">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The amount of net income (loss) for the period available to each share of common stock or common unit outstanding during the reporting period and to each share or unit that would have been outstanding assuming the issuance of common shares or units for all dilutive potential common shares or units outstanding during the reporting period.</p></div>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EarningsPerShareDiluted</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_GrossProfit">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Aggregate revenue less cost of goods and services sold or operating expenses directly attributable to the revenue generation activity.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 31<br> -URI http://asc.fasb.org/extlink&amp;oid=123359005&amp;loc=d3e8924-108599<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 30<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=123359005&amp;loc=d3e8906-108599<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 22<br> -URI http://asc.fasb.org/extlink&amp;oid=123359005&amp;loc=d3e8736-108599<br><br>Reference 4: 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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_GrossProfit</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of income (loss) from continuing operations, including income (loss) from equity method investments, before deduction of income tax expense (benefit), and income (loss) attributable to noncontrolling interest.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 32<br> -Subparagraph (c)<br> -URI http://asc.fasb.org/extlink&amp;oid=123359005&amp;loc=d3e8933-108599<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 30<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=123359005&amp;loc=d3e8906-108599<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 32<br> -Subparagraph (f)<br> -URI http://asc.fasb.org/extlink&amp;oid=123359005&amp;loc=d3e8933-108599<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 940<br> -SubTopic 20<br> -Section 25<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=123384075&amp;loc=d3e41242-110953<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 22<br> -URI http://asc.fasb.org/extlink&amp;oid=123359005&amp;loc=d3e8736-108599<br><br>Reference 6: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SX 210.5-03(10))<br> -URI http://asc.fasb.org/extlink&amp;oid=123367319&amp;loc=SL114868664-224227<br><br>Reference 7: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 220<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-04(8))<br> -URI http://asc.fasb.org/extlink&amp;oid=120400993&amp;loc=SL114874131-224263<br><br>Reference 8: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 942<br> -SubTopic 235<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-05(b)(2))<br> -URI http://asc.fasb.org/extlink&amp;oid=120399901&amp;loc=d3e537907-122884<br><br>Reference 9: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 31<br> -URI http://asc.fasb.org/extlink&amp;oid=123359005&amp;loc=d3e8924-108599<br><br>Reference 10: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 942<br> -SubTopic 220<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-04(15))<br> -URI http://asc.fasb.org/extlink&amp;oid=120399700&amp;loc=SL114874048-224260<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeStatementAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeStatementAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeTaxExpenseBenefit">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of current income tax expense (benefit) and deferred income tax expense (benefit) pertaining to continuing operations.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SAB TOPIC 6.I.7)<br> -URI http://asc.fasb.org/extlink&amp;oid=122134291&amp;loc=d3e330036-122817<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 10<br> -URI http://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32672-109319<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 22<br> -Subparagraph (h)<br> -URI http://asc.fasb.org/extlink&amp;oid=123359005&amp;loc=d3e8736-108599<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(h))<br> -URI http://asc.fasb.org/extlink&amp;oid=120395691&amp;loc=d3e23780-122690<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 9<br> -URI http://asc.fasb.org/extlink&amp;oid=124431687&amp;loc=d3e22663-107794<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 20<br> -Section 45<br> -Paragraph 2<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=123586238&amp;loc=d3e38679-109324<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 220<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-04(9))<br> -URI http://asc.fasb.org/extlink&amp;oid=120400993&amp;loc=SL114874131-224263<br><br>Reference 8: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -URI http://asc.fasb.org/extlink&amp;oid=124431687&amp;loc=d3e22658-107794<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeTaxExpenseBenefit</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_InterestExpense">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of the cost of borrowed funds accounted for as interest expense.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 835<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=6450988&amp;loc=d3e26243-108391<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 835<br> -SubTopic 30<br> -Section 45<br> -Paragraph 3<br> -URI http://asc.fasb.org/extlink&amp;oid=124435984&amp;loc=d3e28555-108399<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 22<br> -Subparagraph (d)<br> -URI http://asc.fasb.org/extlink&amp;oid=123359005&amp;loc=d3e8736-108599<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (210.5-03(11))<br> -URI http://asc.fasb.org/extlink&amp;oid=123367319&amp;loc=SL114868664-224227<br><br>Reference 5: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 942<br> -SubTopic 220<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-04.9)<br> -URI http://asc.fasb.org/extlink&amp;oid=120399700&amp;loc=SL114874048-224260<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_InterestExpense</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_InvestmentIncomeInterest">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount before accretion (amortization) of purchase discount (premium) of interest income on nonoperating securities.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SX 210.5-03.7(b))<br> -URI http://asc.fasb.org/extlink&amp;oid=123367319&amp;loc=SL114868664-224227<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 22<br> -Subparagraph (c)<br> -URI http://asc.fasb.org/extlink&amp;oid=123359005&amp;loc=d3e8736-108599<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_InvestmentIncomeInterest</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_NetIncomeLoss">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The portion of profit or loss for the period, net of income taxes, which is attributable to the parent.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 942<br> -SubTopic 220<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-04(22))<br> -URI http://asc.fasb.org/extlink&amp;oid=120399700&amp;loc=SL114874048-224260<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 32<br> -Subparagraph (f)<br> -URI http://asc.fasb.org/extlink&amp;oid=123359005&amp;loc=d3e8933-108599<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 4<br> -URI 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Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(4)(iii)(A))<br> -URI http://asc.fasb.org/extlink&amp;oid=124359900&amp;loc=SL124442552-122756<br><br>Reference 34: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 30<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=123359005&amp;loc=d3e8906-108599<br><br>Reference 35: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 32<br> -Subparagraph (c)<br> -URI http://asc.fasb.org/extlink&amp;oid=123359005&amp;loc=d3e8933-108599<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_NetIncomeLoss</td>
</tr>
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<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
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<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Generally recurring costs associated with normal operations except for the portion of these expenses which can be clearly related to production and included in cost of sales or services. Includes selling, general and administrative expense.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OperatingExpenses</td>
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<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OperatingExpensesAbstract</td>
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<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
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<td><strong> Data Type:</strong></td>
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<tr>
<td><strong> Balance Type:</strong></td>
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</div></td></tr>
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<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The net result for the period of deducting operating expenses from operating revenues.</p></div>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OperatingIncomeLoss</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
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<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
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</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OtherNonoperatingIncomeExpense">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of income (expense) related to nonoperating activities, classified as other.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SX 210.5-03.9)<br> -URI http://asc.fasb.org/extlink&amp;oid=123367319&amp;loc=SL114868664-224227<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OtherNonoperatingIncomeExpense</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
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<tr>
<td><strong> Data Type:</strong></td>
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<tr>
<td><strong> Balance Type:</strong></td>
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<td><strong> Period Type:</strong></td>
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</tr>
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</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OtherOperatingIncomeExpenseNet">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The net amount of other operating income and expenses, the components of which are not separately disclosed on the income statement, from items that are associated with the entity's normal revenue producing operations.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OtherOperatingIncomeExpenseNet</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
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<tr>
<td><strong> Data Type:</strong></td>
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<tr>
<td><strong> Balance Type:</strong></td>
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<td><strong> Period Type:</strong></td>
<td>duration</td>
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<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The aggregate costs incurred (1) in a planned search or critical investigation aimed at discovery of new knowledge with the hope that such knowledge will be useful in developing a new product or service, a new process or technique, or in bringing about a significant improvement to an existing product or process; or (2) to translate research findings or other knowledge into a plan or design for a new product or process or for a significant improvement to an existing product or process whether intended for sale or the entity's use, during the reporting period charged to research and development projects, including the costs of developing computer software up to the point in time of achieving technological feasibility, and costs allocated in accounting for a business combination to in-process projects deemed to have no alternative future use.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 912<br> -SubTopic 730<br> -Section 25<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=6472174&amp;loc=d3e58812-109433<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 985<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=6501960&amp;loc=d3e128462-111756<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 730<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=6420194&amp;loc=d3e21568-108373<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ResearchAndDevelopmentExpense</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
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<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
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<tr>
<td><strong> Balance Type:</strong></td>
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<td><strong> Period Type:</strong></td>
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</div></td></tr>
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<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RestructuringCharges">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of expenses associated with exit or disposal activities pursuant to an authorized plan. Excludes expenses related to a discontinued operation or an asset retirement obligation.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 420<br> -SubTopic 10<br> -Section 45<br> -Paragraph 3<br> -URI http://asc.fasb.org/extlink&amp;oid=109237686&amp;loc=d3e17752-110868<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 420<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SAB Topic 5.P.3)<br> -URI http://asc.fasb.org/extlink&amp;oid=115931487&amp;loc=d3e140864-122747<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 28<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=123570139&amp;loc=d3e3602-108585<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 420<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SAB Topic 5.P.4(b)(1))<br> -URI http://asc.fasb.org/extlink&amp;oid=115931487&amp;loc=d3e140904-122747<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RestructuringCharges</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
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<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
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<tr>
<td><strong> Balance Type:</strong></td>
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<td><strong> Period Type:</strong></td>
<td>duration</td>
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</div></td></tr>
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<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RevenueFromContractWithCustomerIncludingAssessedTax">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount, including tax collected from customer, of revenue from satisfaction of performance obligation by transferring promised good or service to customer. Tax collected from customer is tax assessed by governmental authority that is both imposed on and concurrent with specific revenue-producing transaction, including, but not limited to, sales, use, value-added and excise.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 41<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=123359005&amp;loc=d3e9038-108599<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 606<br> -SubTopic 10<br> -Section 50<br> -Paragraph 5<br> -URI http://asc.fasb.org/extlink&amp;oid=123351226&amp;loc=SL49130545-203045<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 32<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=123359005&amp;loc=d3e8933-108599<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 32<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=123359005&amp;loc=d3e8933-108599<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 30<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=123359005&amp;loc=d3e8906-108599<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 22<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=123359005&amp;loc=d3e8736-108599<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 22<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=123359005&amp;loc=d3e8736-108599<br><br>Reference 8: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 606<br> -SubTopic 10<br> -Section 50<br> -Paragraph 4<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=123351226&amp;loc=SL49130543-203045<br><br>Reference 9: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 42<br> -URI http://asc.fasb.org/extlink&amp;oid=123359005&amp;loc=d3e9054-108599<br><br>Reference 10: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 40<br> -URI http://asc.fasb.org/extlink&amp;oid=123359005&amp;loc=d3e9031-108599<br><br>Reference 11: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 924<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SAB Topic 11.L)<br> -URI http://asc.fasb.org/extlink&amp;oid=6472922&amp;loc=d3e499488-122856<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RevenueFromContractWithCustomerIncludingAssessedTax</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
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<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
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<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
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<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_SellingGeneralAndAdministrativeExpense">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The aggregate total costs related to selling a firm's product and services, as well as all other general and administrative expenses. Direct selling expenses (for example, credit, warranty, and advertising) are expenses that can be directly linked to the sale of specific products. Indirect selling expenses are expenses that cannot be directly linked to the sale of specific products, for example telephone expenses, Internet, and postal charges. General and administrative expenses include salaries of non-sales personnel, rent, utilities, communication, etc.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SX 210.5-03.4)<br> -URI http://asc.fasb.org/extlink&amp;oid=123367319&amp;loc=SL114868664-224227<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_SellingGeneralAndAdministrativeExpense</td>
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<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
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<td><strong> Data Type:</strong></td>
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<td><strong> Balance Type:</strong></td>
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<td><strong> Period Type:</strong></td>
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<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The average number of shares or units issued and outstanding that are used in calculating diluted EPS or earnings per unit (EPU), determined based on the timing of issuance of shares or units in the period.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=124432515&amp;loc=d3e3550-109257<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 16<br> -URI http://asc.fasb.org/extlink&amp;oid=125511455&amp;loc=d3e1505-109256<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding</td>
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<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
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<td>na</td>
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<td><strong> Period Type:</strong></td>
<td>duration</td>
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<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_WeightedAverageNumberOfSharesOutstandingAbstract</td>
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<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Number of [basic] shares or units, after adjustment for contingently issuable shares or units and other shares or units not deemed outstanding, determined by relating the portion of time within a reporting period that common shares or units have been outstanding to the total time in that period.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=124432515&amp;loc=d3e3550-109257<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 10<br> -URI http://asc.fasb.org/extlink&amp;oid=125511455&amp;loc=d3e1448-109256<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_WeightedAverageNumberOfSharesOutstandingBasic</td>
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<td>us-gaap_</td>
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<td><strong> Period Type:</strong></td>
<td>duration</td>
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<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674063623048">
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<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Consolidated Statements of Comprehensive Income (Loss) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="3">12 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2021</div></th>
<th class="th"><div>Dec. 31, 2020</div></th>
<th class="th"><div>Dec. 31, 2019</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StatementOfIncomeAndComprehensiveIncomeAbstract', window );"><strong>Consolidated Statements of Comprehensive Income (Loss)</strong></a></td>
<td class="text">&#160;<span></span>
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<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
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<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_NetIncomeLoss', window );">Net income (loss)</a></td>
<td class="nump">$ 26,038<span></span>
</td>
<td class="num">$ (8,391)<span></span>
</td>
<td class="num">$ (78,733)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OtherComprehensiveIncomeAvailableforsaleSecuritiesAdjustmentNetOfTaxPortionAttributableToParentAbstract', window );"><strong>Available-for-sale securities:</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OtherComprehensiveIncomeUnrealizedHoldingGainLossOnSecuritiesArisingDuringPeriodNetOfTax', window );">Change in net unrealized gains or losses</a></td>
<td class="num">(311)<span></span>
</td>
<td class="num">(53)<span></span>
</td>
<td class="nump">49<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OtherComprehensiveIncomeAvailableforsaleSecuritiesAdjustmentNetOfTaxPortionAttributableToParent', window );">Unrealized gain (loss) on available-for-sale securities</a></td>
<td class="num">(311)<span></span>
</td>
<td class="num">(53)<span></span>
</td>
<td class="nump">49<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParentAbstract', window );"><strong>Currency translation adjustments:</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
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<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationGainLossArisingDuringPeriodNetOfTax', window );">Change in currency translation adjustments</a></td>
<td class="num">(52)<span></span>
</td>
<td class="nump">5<span></span>
</td>
<td class="num">(19)<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OtherComprehensiveIncomeLossForeignCurrencyTransactionAndTranslationReclassificationAdjustmentFromAOCIRealizedUponSaleOrLiquidationNetOfTax', window );">Reclassification adjustments for net (gains) losses included in net income</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">44<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent', window );">Net changes related to currency translation adjustments</a></td>
<td class="num">(52)<span></span>
</td>
<td class="nump">5<span></span>
</td>
<td class="nump">25<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent', window );">Total other comprehensive income (loss), net of tax</a></td>
<td class="num">(363)<span></span>
</td>
<td class="num">(48)<span></span>
</td>
<td class="nump">74<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ComprehensiveIncomeNetOfTax', window );">Total comprehensive income (loss)</a></td>
<td class="nump">$ 25,675<span></span>
</td>
<td class="num">$ (8,439)<span></span>
</td>
<td class="num">$ (78,659)<span></span>
</td>
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</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ComprehensiveIncomeNetOfTax">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount after tax of increase (decrease) in equity from transactions and other events and circumstances from net income and other comprehensive income, attributable to parent entity. Excludes changes in equity resulting from investments by owners and distributions to owners.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 220<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-04(22))<br> -URI http://asc.fasb.org/extlink&amp;oid=120400993&amp;loc=SL114874131-224263<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SX 210.5-03(24))<br> -URI http://asc.fasb.org/extlink&amp;oid=123367319&amp;loc=SL114868664-224227<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section 45<br> -Paragraph 5<br> -URI http://asc.fasb.org/extlink&amp;oid=124509347&amp;loc=d3e557-108580<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 942<br> -SubTopic 220<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-04(26))<br> -URI http://asc.fasb.org/extlink&amp;oid=120399700&amp;loc=SL114874048-224260<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section 45<br> -Paragraph 1B<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=124509347&amp;loc=SL7669625-108580<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section 45<br> -Paragraph 1A<br> -Subparagraph (c)<br> -URI http://asc.fasb.org/extlink&amp;oid=124509347&amp;loc=SL7669619-108580<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ComprehensiveIncomeNetOfTax</td>
</tr>
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<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
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<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
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<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
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<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
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<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_NetIncomeLoss">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The portion of profit or loss for the period, net of income taxes, which is attributable to the parent.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 942<br> -SubTopic 220<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-04(22))<br> -URI http://asc.fasb.org/extlink&amp;oid=120399700&amp;loc=SL114874048-224260<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 32<br> -Subparagraph (f)<br> -URI http://asc.fasb.org/extlink&amp;oid=123359005&amp;loc=d3e8933-108599<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 4<br> -URI 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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_NetIncomeLoss</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
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<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
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<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
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<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
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</div></td></tr>
</table>
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<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount after tax and reclassification adjustments, of appreciation (loss) in value of unsold available-for-sale securities, attributable to parent entity. Excludes amounts related to other than temporary impairment (OTTI) loss.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1A<br> -Subparagraph (c)(3)<br> -URI http://asc.fasb.org/extlink&amp;oid=109239629&amp;loc=SL4573702-111684<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 45<br> -Paragraph 19<br> -URI http://asc.fasb.org/extlink&amp;oid=123454820&amp;loc=SL4569616-111683<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 45<br> -Paragraph 20<br> -URI http://asc.fasb.org/extlink&amp;oid=123454820&amp;loc=SL4569643-111683<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OtherComprehensiveIncomeAvailableforsaleSecuritiesAdjustmentNetOfTaxPortionAttributableToParent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
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<td><strong> Data Type:</strong></td>
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<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
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<td><strong> Period Type:</strong></td>
<td>duration</td>
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<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OtherComprehensiveIncomeAvailableforsaleSecuritiesAdjustmentNetOfTaxPortionAttributableToParentAbstract</td>
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<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
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<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
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<td><strong> Balance Type:</strong></td>
<td>na</td>
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<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
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</div></td></tr>
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<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount after tax and reclassification adjustments of gain (loss) on foreign currency translation adjustments, foreign currency transactions designated and effective as economic hedges of a net investment in a foreign entity and intra-entity foreign currency transactions that are of a long-term-investment nature, attributable to parent entity.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 45<br> -Paragraph 20<br> -URI http://asc.fasb.org/extlink&amp;oid=123454820&amp;loc=SL4569643-111683<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1A<br> -Subparagraph (c)(3)<br> -URI http://asc.fasb.org/extlink&amp;oid=109239629&amp;loc=SL4573702-111684<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 45<br> -Paragraph 19<br> -URI http://asc.fasb.org/extlink&amp;oid=123454820&amp;loc=SL4569616-111683<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
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<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
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<td><strong> Balance Type:</strong></td>
<td>credit</td>
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<td><strong> Period Type:</strong></td>
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<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
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<td><strong> Balance Type:</strong></td>
<td>na</td>
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<td><strong> Period Type:</strong></td>
<td>duration</td>
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</table></div>
</div></td></tr>
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<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationGainLossArisingDuringPeriodNetOfTax">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount after tax, before reclassification adjustments of gain (loss) on foreign currency translation adjustments, foreign currency transactions designated and effective as economic hedges of a net investment in a foreign entity and intra-entity foreign currency transactions that are of a long-term-investment nature.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 830<br> -SubTopic 20<br> -Section 35<br> -Paragraph 3<br> -URI http://asc.fasb.org/extlink&amp;oid=123602790&amp;loc=d3e30304-110892<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 830<br> -SubTopic 10<br> -Section 45<br> -Paragraph 9<br> -URI http://asc.fasb.org/extlink&amp;oid=120253306&amp;loc=d3e28129-110885<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 830<br> -SubTopic 30<br> -Section 45<br> -Paragraph 12<br> -URI http://asc.fasb.org/extlink&amp;oid=118261656&amp;loc=d3e32022-110900<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section 45<br> -Paragraph 10A<br> -Subparagraph (a-c)<br> -URI http://asc.fasb.org/extlink&amp;oid=124509347&amp;loc=SL7669646-108580<br><br>Reference 5: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section 45<br> -Paragraph 11<br> -URI http://asc.fasb.org/extlink&amp;oid=124509347&amp;loc=d3e637-108580<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationGainLossArisingDuringPeriodNetOfTax</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
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<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
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<td><strong> Balance Type:</strong></td>
<td>credit</td>
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<td><strong> Period Type:</strong></td>
<td>duration</td>
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<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OtherComprehensiveIncomeLossForeignCurrencyTransactionAndTranslationReclassificationAdjustmentFromAOCIRealizedUponSaleOrLiquidationNetOfTax">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount after tax of reclassification adjustment from accumulated other comprehensive income for translation gain (loss) realized upon the sale or liquidation of an investment in a foreign entity and foreign currency hedges that are designated and qualified as hedging instruments for hedges of the foreign currency exposure of a net investment in a foreign operation.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section 45<br> -Paragraph 17A<br> -URI http://asc.fasb.org/extlink&amp;oid=124509347&amp;loc=SL34724391-108580<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section 45<br> -Paragraph 16<br> -URI http://asc.fasb.org/extlink&amp;oid=124509347&amp;loc=d3e709-108580<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 830<br> -SubTopic 30<br> -Section 40<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=116633155&amp;loc=d3e31531-110899<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section 45<br> -Paragraph 15<br> -URI http://asc.fasb.org/extlink&amp;oid=124509347&amp;loc=d3e689-108580<br><br>Reference 5: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section 45<br> -Paragraph 11<br> -URI http://asc.fasb.org/extlink&amp;oid=124509347&amp;loc=d3e637-108580<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OtherComprehensiveIncomeLossForeignCurrencyTransactionAndTranslationReclassificationAdjustmentFromAOCIRealizedUponSaleOrLiquidationNetOfTax</td>
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<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
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<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
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<td><strong> Balance Type:</strong></td>
<td>debit</td>
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<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount after tax of other comprehensive income (loss) attributable to parent entity.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section 45<br> -Paragraph 1B<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=124509347&amp;loc=SL7669625-108580<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1A<br> -Subparagraph (c)(3)<br> -URI http://asc.fasb.org/extlink&amp;oid=109239629&amp;loc=SL4573702-111684<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 45<br> -Paragraph 20<br> -URI http://asc.fasb.org/extlink&amp;oid=123454820&amp;loc=SL4569643-111683<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section 45<br> -Paragraph 1A<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=124509347&amp;loc=SL7669619-108580<br><br>Reference 5: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 45<br> -Paragraph 19<br> -URI http://asc.fasb.org/extlink&amp;oid=123454820&amp;loc=SL4569616-111683<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
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<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount, after tax and before adjustment, of unrealized holding gain (loss) on investment in debt security measured at fair value with change in fair value recognized in other comprehensive income (available-for-sale). Excludes unrealized gain (loss) on investment in debt security measured at amortized cost (held-to-maturity) from transfer to available-for-sale.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section 45<br> -Paragraph 10A<br> -Subparagraph (e)<br> -URI http://asc.fasb.org/extlink&amp;oid=124509347&amp;loc=SL7669646-108580<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section 45<br> -Paragraph 11<br> -URI http://asc.fasb.org/extlink&amp;oid=124509347&amp;loc=d3e637-108580<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OtherComprehensiveIncomeUnrealizedHoldingGainLossOnSecuritiesArisingDuringPeriodNetOfTax</td>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
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<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674060420184">
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<th class="tl" colspan="1" rowspan="1"><div style="width: 200px;"><strong>Consolidated Statements of Stockholders' Equity - USD ($)<br> shares in Thousands, $ in Thousands</strong></div></th>
<th class="th"><div>Common Stock</div></th>
<th class="th"><div>Treasury Stock</div></th>
<th class="th">
<div>Additional Paid-in Capital </div>
<div>2025 Notes</div>
</th>
<th class="th">
<div>Additional Paid-in Capital </div>
<div>2027 Notes</div>
</th>
<th class="th"><div>Additional Paid-in Capital</div></th>
<th class="th"><div>Retained Earnings</div></th>
<th class="th"><div>Accumulated Other Comprehensive Income</div></th>
<th class="th"><div>2025 Notes</div></th>
<th class="th"><div>2027 Notes</div></th>
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<td class="nump">$ 485<span></span>
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<td class="num">$ (5,872)<span></span>
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<td class="text">&#160;<span></span>
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<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 1,061,325<span></span>
</td>
<td class="num">$ (619,983)<span></span>
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<td class="nump">$ 1,820<span></span>
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<td class="text">&#160;<span></span>
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<td class="text">&#160;<span></span>
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<td class="nump">$ 437,775<span></span>
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<tr class="rc">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SharesOutstanding', window );">Balance (in shares) at Dec. 31, 2018</a></td>
<td class="nump">48,547<span></span>
</td>
<td class="nump">523<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
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<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncreaseDecreaseInStockholdersEquityRollForward', window );"><strong>Increase (Decrease) in Stockholders' Equity</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
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<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
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<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_NetIncomeLoss', window );">Net income (loss)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(78,733)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
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<td class="num">(78,733)<span></span>
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<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_OtherComprehensiveIncomeLossIncludingForeignCurrencyGainsLossesOnTransactionsIncludedInOperatingResultsNetOfTax', window );">Other comprehensive income (loss), net of tax</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">74<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">74<span></span>
</td>
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<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue', window );">Share-based compensation expense</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">15,270<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">15,270<span></span>
</td>
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<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockIssuedDuringPeriodValueShareBasedCompensation', window );">Net issuance under employee stock plans</a></td>
<td class="nump">$ 5<span></span>
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<td class="nump">$ 5,872<span></span>
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<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(5,537)<span></span>
</td>
<td class="num">(214)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">126<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockIssuedDuringPeriodSharesShareBasedCompensation', window );">Net issuance under employee stock plans (in shares)</a></td>
<td class="nump">447<span></span>
</td>
<td class="num">(523)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
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<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockholdersEquity', window );">Balance at the end of the period at Dec. 31, 2019</a></td>
<td class="nump">$ 490<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">1,071,058<span></span>
</td>
<td class="num">(698,930)<span></span>
</td>
<td class="nump">1,894<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">374,512<span></span>
</td>
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<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SharesOutstanding', window );">Balance (in shares) at Dec. 31, 2019</a></td>
<td class="nump">48,994<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
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<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncreaseDecreaseInStockholdersEquityRollForward', window );"><strong>Increase (Decrease) in Stockholders' Equity</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_NetIncomeLoss', window );">Net income (loss)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(8,391)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(8,391)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_OtherComprehensiveIncomeLossIncludingForeignCurrencyGainsLossesOnTransactionsIncludedInOperatingResultsNetOfTax', window );">Other comprehensive income (loss), net of tax</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(48)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(48)<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue', window );">Share-based compensation expense</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">12,703<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">12,703<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockIssuedDuringPeriodValueShareBasedCompensation', window );">Net issuance under employee stock plans</a></td>
<td class="nump">$ 7<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">549<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">556<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockIssuedDuringPeriodSharesShareBasedCompensation', window );">Net issuance under employee stock plans (in shares)</a></td>
<td class="nump">730<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_AdjustmentsToAdditionalPaidInCapitalExtinguishmentEquityComponentOfNotesRepurchased', window );">Extinguishment of equity component of repurchased/exchanged 2023 Notes</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(14,714)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(14,714)<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AdjustmentsToAdditionalPaidInCapitalEquityComponentOfConvertibleDebt', window );">Equity component of Notes</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 20,706<span></span>
</td>
<td class="nump">$ 33,363<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 20,706<span></span>
</td>
<td class="nump">$ 33,363<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_AdjustmentsToAdditionalPaidInCapitalPurchaseOfDerivativeInstrument', window );">Purchase of capped calls</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(10,313)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(10,313)<span></span>
</td>
</tr>
<tr class="rc">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockholdersEquity', window );">Balance at the end of the period at Dec. 31, 2020</a></td>
<td class="nump">$ 497<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">1,113,352<span></span>
</td>
<td class="num">(707,321)<span></span>
</td>
<td class="nump">1,846<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">408,374<span></span>
</td>
</tr>
<tr class="rc">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SharesOutstanding', window );">Balance (in shares) at Dec. 31, 2020</a></td>
<td class="nump">49,724<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncreaseDecreaseInStockholdersEquityRollForward', window );"><strong>Increase (Decrease) in Stockholders' Equity</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_NetIncomeLoss', window );">Net income (loss)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">26,038<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">26,038<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_OtherComprehensiveIncomeLossIncludingForeignCurrencyGainsLossesOnTransactionsIncludedInOperatingResultsNetOfTax', window );">Other comprehensive income (loss), net of tax</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(363)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(363)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue', window );">Share-based compensation expense</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">15,249<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">15,249<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockIssuedDuringPeriodValueShareBasedCompensation', window );">Net issuance under employee stock plans</a></td>
<td class="nump">$ 10<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(5,600)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(5,590)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockIssuedDuringPeriodSharesShareBasedCompensation', window );">Net issuance under employee stock plans (in shares)</a></td>
<td class="nump">929<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_AdjustmentsToAdditionalPaidInCapitalExtinguishmentEquityComponentOfNotesRepurchased', window );">Extinguishment of equity component of repurchased/exchanged 2023 Notes</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(6,080)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(6,080)<span></span>
</td>
</tr>
<tr class="rc">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockholdersEquity', window );">Balance at the end of the period at Dec. 31, 2021</a></td>
<td class="nump">$ 507<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 1,116,921<span></span>
</td>
<td class="num">$ (681,283)<span></span>
</td>
<td class="nump">$ 1,483<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 437,628<span></span>
</td>
</tr>
<tr class="rc">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SharesOutstanding', window );">Balance (in shares) at Dec. 31, 2021</a></td>
<td class="nump">50,653<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AdjustmentsToAdditionalPaidInCapitalEquityComponentOfConvertibleDebt">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Adjustment to additional paid in capital resulting from the recognition of convertible debt instruments as two separate components - a debt component and an equity component. This bifurcation may result in a basis difference associated with the liability component that represents a temporary difference for purposes of applying accounting for income taxes. The initial recognition of deferred taxes for the tax effect of that temporary difference is as an adjustment to additional paid in capital.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 20<br> -Section 25<br> -Paragraph 22<br> -URI http://asc.fasb.org/extlink&amp;oid=123466103&amp;loc=SL6014347-161799<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AdjustmentsToAdditionalPaidInCapitalEquityComponentOfConvertibleDebt</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of increase to additional paid-in capital (APIC) for recognition of cost for award under share-based payment arrangement.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 20<br> -Section 55<br> -Paragraph 12<br> -URI http://asc.fasb.org/extlink&amp;oid=122142933&amp;loc=d3e11149-113907<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=120381028&amp;loc=d3e5047-113901<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 20<br> -Section 55<br> -Paragraph 13<br> -URI http://asc.fasb.org/extlink&amp;oid=122142933&amp;loc=d3e11178-113907<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 35<br> -Paragraph 2<br> -URI http://asc.fasb.org/extlink&amp;oid=123468992&amp;loc=d3e4534-113899<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
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<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncreaseDecreaseInStockholdersEquityRollForward">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>A roll forward is a reconciliation of a concept from the beginning of a period to the end of a period.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncreaseDecreaseInStockholdersEquityRollForward</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_NetIncomeLoss">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The portion of profit or loss for the period, net of income taxes, which is attributable to the parent.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 942<br> -SubTopic 220<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-04(22))<br> -URI http://asc.fasb.org/extlink&amp;oid=120399700&amp;loc=SL114874048-224260<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 32<br> -Subparagraph (f)<br> -URI http://asc.fasb.org/extlink&amp;oid=123359005&amp;loc=d3e8933-108599<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 4<br> -URI 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Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(4)(iii)(A))<br> -URI http://asc.fasb.org/extlink&amp;oid=124359900&amp;loc=SL124442552-122756<br><br>Reference 34: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 30<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=123359005&amp;loc=d3e8906-108599<br><br>Reference 35: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 32<br> -Subparagraph (c)<br> -URI http://asc.fasb.org/extlink&amp;oid=123359005&amp;loc=d3e8933-108599<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_NetIncomeLoss</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_SharesOutstanding">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Number of shares issued which are neither cancelled nor held in the treasury.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_SharesOutstanding</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StockIssuedDuringPeriodSharesShareBasedCompensation">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Number, after forfeiture, of shares or units issued under share-based payment arrangement. Excludes shares or units issued under employee stock ownership plan (ESOP).</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -URI http://asc.fasb.org/extlink&amp;oid=123467817&amp;loc=d3e21463-112644<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.3-04)<br> -URI http://asc.fasb.org/extlink&amp;oid=120397183&amp;loc=d3e187085-122770<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(28))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(29))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StockIssuedDuringPeriodSharesShareBasedCompensation</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StockIssuedDuringPeriodValueShareBasedCompensation">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Value, after forfeiture, of shares issued under share-based payment arrangement. Excludes employee stock ownership plan (ESOP).</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.3-04)<br> -URI http://asc.fasb.org/extlink&amp;oid=120397183&amp;loc=d3e187085-122770<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (c)<br> -URI http://asc.fasb.org/extlink&amp;oid=120381028&amp;loc=d3e5047-113901<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(28))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(29))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 5: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (d)(1)<br> -URI http://asc.fasb.org/extlink&amp;oid=120381028&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StockIssuedDuringPeriodValueShareBasedCompensation</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StockholdersEquity">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Total of all stockholders' equity (deficit) items, net of receivables from officers, directors, owners, and affiliates of the entity which are attributable to the parent. The amount of the economic entity's stockholders' equity attributable to the parent excludes the amount of stockholders' equity which is allocable to that ownership interest in subsidiary equity which is not attributable to the parent (noncontrolling interest, minority interest). This excludes temporary equity and is sometimes called permanent equity.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(g)(1)(ii))<br> -URI http://asc.fasb.org/extlink&amp;oid=120395691&amp;loc=d3e23780-122690<br><br>Reference 2: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 852<br> -SubTopic 10<br> -Section 55<br> -Paragraph 10<br> -URI http://asc.fasb.org/extlink&amp;oid=84165509&amp;loc=d3e56426-112766<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 310<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SAB Topic 4.E)<br> -URI http://asc.fasb.org/extlink&amp;oid=122038336&amp;loc=d3e74512-122707<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(31))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 5: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(29))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 6: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(30))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 7: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 825<br> -SubTopic 10<br> -Section 50<br> -Paragraph 28<br> -Subparagraph (f)<br> -URI http://asc.fasb.org/extlink&amp;oid=123596393&amp;loc=d3e14064-108612<br><br>Reference 8: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 323<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (c)<br> -URI http://asc.fasb.org/extlink&amp;oid=114001798&amp;loc=d3e33918-111571<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StockholdersEquity</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_AdjustmentsToAdditionalPaidInCapitalExtinguishmentEquityComponentOfNotesRepurchased">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of adjustment to additional paid in capital (APIC) resulting from extinguishment of equity component of repurchased or exchanged notes.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_AdjustmentsToAdditionalPaidInCapitalExtinguishmentEquityComponentOfNotesRepurchased</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_AdjustmentsToAdditionalPaidInCapitalPurchaseOfDerivativeInstrument">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of adjustment to additional paid in capital (APIC) resulting from purchase of derivative instruments.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_AdjustmentsToAdditionalPaidInCapitalPurchaseOfDerivativeInstrument</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
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<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_OtherComprehensiveIncomeLossIncludingForeignCurrencyGainsLossesOnTransactionsIncludedInOperatingResultsNetOfTax">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount after tax and reclassification adjustments of other comprehensive income (loss). Includes foreign currency gains (losses) on transactions included in operating results.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_OtherComprehensiveIncomeLossIncludingForeignCurrencyGainsLossesOnTransactionsIncludedInOperatingResultsNetOfTax</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
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<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674060510328">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Consolidated Statements of Cash Flows - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="3">12 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2021</div></th>
<th class="th"><div>Dec. 31, 2020</div></th>
<th class="th"><div>Dec. 31, 2019</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_NetCashProvidedByUsedInOperatingActivitiesContinuingOperationsAbstract', window );"><strong>Cash Flows from Operating Activities</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ProfitLoss', window );">Net income (loss)</a></td>
<td class="nump">$ 26,038<span></span>
</td>
<td class="num">$ (8,391)<span></span>
</td>
<td class="num">$ (78,733)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract', window );"><strong>Adjustments to reconcile net income (loss) to net cash provided by (used in) operating activities:</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DepreciationDepletionAndAmortization', window );">Depreciation and amortization</a></td>
<td class="nump">26,058<span></span>
</td>
<td class="nump">30,697<span></span>
</td>
<td class="nump">34,399<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AmortizationOfFinancingCostsAndDiscounts', window );">Non-cash interest expense</a></td>
<td class="nump">13,819<span></span>
</td>
<td class="nump">13,792<span></span>
</td>
<td class="nump">12,676<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DeferredIncomeTaxExpenseBenefit', window );">Deferred income taxes</a></td>
<td class="num">(651)<span></span>
</td>
<td class="num">(299)<span></span>
</td>
<td class="nump">360<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensation', window );">Share-based compensation expense</a></td>
<td class="nump">15,249<span></span>
</td>
<td class="nump">12,703<span></span>
</td>
<td class="nump">15,270<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_GainsLossesOnExtinguishmentOfDebt', window );">Loss on extinguishment of debt</a></td>
<td class="nump">4,029<span></span>
</td>
<td class="nump">7,841<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AssetImpairmentCharges', window );">Asset impairment</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">281<span></span>
</td>
<td class="nump">4,020<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ImpairmentOfInvestments', window );">Impairment of equity investments</a></td>
<td class="nump">980<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">20,973<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ProvisionForDoubtfulAccounts', window );">Provision for bad debts</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">140<span></span>
</td>
<td class="nump">392<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncreaseDecreaseInOperatingCapitalAbstract', window );"><strong>Changes in operating assets and liabilities:</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_IncreaseDecreaseInAccountsReceivableAndContractAssets', window );">Accounts receivable and contract assets</a></td>
<td class="num">(26,664)<span></span>
</td>
<td class="num">(30,361)<span></span>
</td>
<td class="nump">5,796<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncreaseDecreaseInInventories', window );">Inventories and deferred cost of sales</a></td>
<td class="num">(24,803)<span></span>
</td>
<td class="num">(11,528)<span></span>
</td>
<td class="nump">14,969<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets', window );">Prepaid expenses and other current assets</a></td>
<td class="nump">7,621<span></span>
</td>
<td class="num">(2,610)<span></span>
</td>
<td class="nump">7,520<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncreaseDecreaseInAccountsPayableAndAccruedLiabilities', window );">Accounts payable and accrued expenses</a></td>
<td class="nump">20,225<span></span>
</td>
<td class="nump">15,959<span></span>
</td>
<td class="num">(26,945)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_IncreaseDecreaseInCustomerDepositsAndDeferredRevenue', window );">Customer deposits and deferred revenue</a></td>
<td class="num">(4,099)<span></span>
</td>
<td class="nump">12,424<span></span>
</td>
<td class="num">(17,866)<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncreaseDecreaseInIncomeTaxesPayableNetOfIncomeTaxesReceivable', window );">Income taxes receivable and payable, net</a></td>
<td class="nump">947<span></span>
</td>
<td class="nump">86<span></span>
</td>
<td class="num">(655)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncreaseDecreaseInOtherOperatingCapitalNet', window );">Other, net</a></td>
<td class="nump">8,993<span></span>
</td>
<td class="nump">2,287<span></span>
</td>
<td class="nump">408<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_NetCashProvidedByUsedInOperatingActivities', window );">Net cash provided by (used in) operating activities</a></td>
<td class="nump">67,742<span></span>
</td>
<td class="nump">43,021<span></span>
</td>
<td class="num">(7,416)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_NetCashProvidedByUsedInInvestingActivitiesContinuingOperationsAbstract', window );"><strong>Cash Flows from Investing Activities</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PaymentsToAcquirePropertyPlantAndEquipment', window );">Capital expenditures</a></td>
<td class="num">(40,643)<span></span>
</td>
<td class="num">(6,802)<span></span>
</td>
<td class="num">(10,873)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ProceedsFromSaleAndMaturityOfAvailableForSaleSecurities', window );">Proceeds from the sale of investments</a></td>
<td class="nump">330,702<span></span>
</td>
<td class="nump">173,530<span></span>
</td>
<td class="nump">127,349<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PaymentsToAcquireAvailableForSaleSecuritiesDebt', window );">Payments for purchases of investments</a></td>
<td class="num">(247,256)<span></span>
</td>
<td class="num">(248,023)<span></span>
</td>
<td class="num">(192,988)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ProceedsFromSaleOfPropertyPlantAndEquipment', window );">Proceeds from held for sale assets, net of costs to sell</a></td>
<td class="nump">1,725<span></span>
</td>
<td class="nump">9,503<span></span>
</td>
<td class="nump">645<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_NetCashProvidedByUsedInInvestingActivities', window );">Net cash provided by (used in) investing activities</a></td>
<td class="nump">44,528<span></span>
</td>
<td class="num">(71,792)<span></span>
</td>
<td class="num">(75,867)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_NetCashProvidedByUsedInFinancingActivitiesContinuingOperationsAbstract', window );"><strong>Cash Flows from Financing Activities</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ProceedsFromConvertibleDebt', window );">Proceeds from issuance of 2027 Notes, net of issuance costs</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">120,095<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PaymentsForDerivativeInstrumentFinancingActivities', window );">Purchase of capped calls</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(10,313)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_RepaymentsOfUnsecuredDebt', window );">Repurchase of 2023 Notes</a></td>
<td class="num">(115,604)<span></span>
</td>
<td class="num">(81,240)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PaymentsOfDebtIssuanceCosts', window );">Debt issuance costs</a></td>
<td class="num">(835)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ProceedsFromIssuanceOrSaleOfEquity', window );">Proceeds (net of tax withholdings) from option exercises and employee stock purchase plan</a></td>
<td class="nump">3,402<span></span>
</td>
<td class="nump">2,878<span></span>
</td>
<td class="nump">3,106<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PaymentsRelatedToTaxWithholdingForShareBasedCompensation', window );">Restricted stock tax withholdings</a></td>
<td class="num">(8,992)<span></span>
</td>
<td class="num">(2,322)<span></span>
</td>
<td class="num">(2,980)<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_NetCashProvidedByUsedInFinancingActivities', window );">Net cash provided by (used in) financing activities</a></td>
<td class="num">(122,029)<span></span>
</td>
<td class="nump">29,098<span></span>
</td>
<td class="nump">126<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations', window );">Effect of exchange rate changes on cash and cash equivalents</a></td>
<td class="num">(52)<span></span>
</td>
<td class="nump">5<span></span>
</td>
<td class="nump">26<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect', window );">Net increase (decrease) in cash, cash equivalents, and restricted cash</a></td>
<td class="num">(9,811)<span></span>
</td>
<td class="nump">332<span></span>
</td>
<td class="num">(83,131)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents', window );">Cash, cash equivalents, and restricted cash - beginning of period</a></td>
<td class="nump">130,283<span></span>
</td>
<td class="nump">129,951<span></span>
</td>
<td class="nump">213,082<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents', window );">Cash, cash equivalents, and restricted cash - end of period</a></td>
<td class="nump">120,472<span></span>
</td>
<td class="nump">130,283<span></span>
</td>
<td class="nump">129,951<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SupplementalCashFlowInformationAbstract', window );"><strong>Supplemental Disclosure of Cash Flow Information</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_InterestPaidNet', window );">Interest paid</a></td>
<td class="nump">12,551<span></span>
</td>
<td class="nump">12,700<span></span>
</td>
<td class="nump">9,408<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncomeTaxesPaidNet', window );">Net income taxes paid (refunds received)</a></td>
<td class="num">(139)<span></span>
</td>
<td class="nump">329<span></span>
</td>
<td class="nump">2,931<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_NonCashOperatingAndFinancingActivitiesAbstract', window );"><strong>Non-cash activities</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CapitalExpendituresIncurredButNotYetPaid', window );">Capital expenditures included in accounts payable and accrued expenses</a></td>
<td class="nump">9,096<span></span>
</td>
<td class="nump">687<span></span>
</td>
<td class="nump">249<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_TransferToInventories', window );">Net transfer of property, plant and equipment to inventory</a></td>
<td class="nump">63<span></span>
</td>
<td class="nump">1,624<span></span>
</td>
<td class="num">(4,916)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_RightOfUseAssetObtainedInExchangeForOperatingLeaseLiability', window );">Right-of-use assets obtained in exchange for lease obligations</a></td>
<td class="nump">$ 23,777<span></span>
</td>
<td class="nump">$ 1,741<span></span>
</td>
<td class="nump">$ 5,576<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AmortizationOfFinancingCostsAndDiscounts">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of amortization expense attributable to debt discount (premium) and debt issuance costs.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 28<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=123570139&amp;loc=d3e3602-108585<br><br>Reference 2: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 20<br> -Section 55<br> -Paragraph 69E<br> -URI http://asc.fasb.org/extlink&amp;oid=123466577&amp;loc=SL123495743-112612<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 835<br> -SubTopic 30<br> -Section 45<br> -Paragraph 3<br> -URI http://asc.fasb.org/extlink&amp;oid=124435984&amp;loc=d3e28555-108399<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1F<br> -Subparagraph (b)(2)<br> -URI http://asc.fasb.org/extlink&amp;oid=123466505&amp;loc=SL123495355-112611<br><br>Reference 5: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 20<br> -Section 55<br> -Paragraph 69F<br> -URI http://asc.fasb.org/extlink&amp;oid=123466577&amp;loc=SL123495745-112612<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AmortizationOfFinancingCostsAndDiscounts</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AssetImpairmentCharges">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of write-down of assets recognized in the income statement. Includes, but is not limited to, losses from tangible assets, intangible assets and goodwill.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 28<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=123570139&amp;loc=d3e3602-108585<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 360<br> -SubTopic 10<br> -Section 45<br> -Paragraph 4<br> -URI http://asc.fasb.org/extlink&amp;oid=123351718&amp;loc=d3e2420-110228<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AssetImpairmentCharges</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CapitalExpendituresIncurredButNotYetPaid">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Future cash outflow to pay for purchases of fixed assets that have occurred.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 50<br> -Paragraph 5<br> -URI http://asc.fasb.org/extlink&amp;oid=123431023&amp;loc=d3e4332-108586<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 50<br> -Paragraph 4<br> -URI http://asc.fasb.org/extlink&amp;oid=123431023&amp;loc=d3e4313-108586<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -URI http://asc.fasb.org/extlink&amp;oid=123431023&amp;loc=d3e4304-108586<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CapitalExpendituresIncurredButNotYetPaid</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of cash and cash equivalents, and cash and cash equivalents restricted to withdrawal or usage. Excludes amount for disposal group and discontinued operations. Cash includes, but is not limited to, currency on hand, demand deposits with banks or financial institutions, and other accounts with general characteristics of demand deposits. Cash equivalents include, but are not limited to, short-term, highly liquid investments that are both readily convertible to known amounts of cash and so near their maturity that they present insignificant risk of changes in value because of changes in interest rates.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 24<br> -URI http://asc.fasb.org/extlink&amp;oid=123570139&amp;loc=d3e3521-108585<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 4<br> -URI http://asc.fasb.org/extlink&amp;oid=123570139&amp;loc=d3e3044-108585<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -URI http://asc.fasb.org/extlink&amp;oid=123431023&amp;loc=SL98516268-108586<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of increase (decrease) in cash, cash equivalents, and cash and cash equivalents restricted to withdrawal or usage; including effect from exchange rate change. Cash includes, but is not limited to, currency on hand, demand deposits with banks or financial institutions, and other accounts with general characteristics of demand deposits. Cash equivalents include, but are not limited to, short-term, highly liquid investments that are both readily convertible to known amounts of cash and so near their maturity that they present insignificant risk of changes in value because of changes in interest rates.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 830<br> -SubTopic 230<br> -Section 45<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=123444420&amp;loc=d3e33268-110906<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 24<br> -URI http://asc.fasb.org/extlink&amp;oid=123570139&amp;loc=d3e3521-108585<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredIncomeTaxExpenseBenefit">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of deferred income tax expense (benefit) pertaining to income (loss) from continuing operations.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SAB Topic 6.I.7)<br> -URI http://asc.fasb.org/extlink&amp;oid=122134291&amp;loc=d3e330036-122817<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SAB Topic 6.I.Fact.1)<br> -URI http://asc.fasb.org/extlink&amp;oid=122134291&amp;loc=d3e330036-122817<br><br>Reference 3: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(h)(1)(Note 1))<br> -URI http://asc.fasb.org/extlink&amp;oid=120395691&amp;loc=d3e23780-122690<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SAB Topic 6.I.Fact.2)<br> -URI http://asc.fasb.org/extlink&amp;oid=122134291&amp;loc=d3e330036-122817<br><br>Reference 5: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 28<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=123570139&amp;loc=d3e3602-108585<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 9<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32639-109319<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DeferredIncomeTaxExpenseBenefit</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DepreciationDepletionAndAmortization">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The aggregate expense recognized in the current period that allocates the cost of tangible assets, intangible assets, or depleting assets to periods that benefit from use of the assets.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 22<br> -Subparagraph (e)<br> -URI http://asc.fasb.org/extlink&amp;oid=123359005&amp;loc=d3e8736-108599<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 28<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=123570139&amp;loc=d3e3602-108585<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DepreciationDepletionAndAmortization</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of increase (decrease) from effect of exchange rate changes on cash and cash equivalents, and cash and cash equivalents restricted to withdrawal or usage; held in foreign currencies; including, but not limited to, disposal group and discontinued operations. Cash includes, but is not limited to, currency on hand, demand deposits with banks or financial institutions, and other accounts with general characteristics of demand deposits. Cash equivalents include, but are not limited to, short-term, highly liquid investments that are both readily convertible to known amounts of cash and so near their maturity that they present insignificant risk of changes in value because of changes in interest rates.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 830<br> -SubTopic 230<br> -Section 45<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=123444420&amp;loc=d3e33268-110906<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_GainsLossesOnExtinguishmentOfDebt">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Difference between the fair value of payments made and the carrying amount of debt which is extinguished prior to maturity.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 50<br> -Section 40<br> -Paragraph 4<br> -URI http://asc.fasb.org/extlink&amp;oid=123467658&amp;loc=d3e12355-112629<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 50<br> -Section 40<br> -Paragraph 2<br> -URI http://asc.fasb.org/extlink&amp;oid=123467658&amp;loc=d3e12317-112629<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 28<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=123570139&amp;loc=d3e3602-108585<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_GainsLossesOnExtinguishmentOfDebt</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ImpairmentOfInvestments">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The amount by which the fair value of an investment is less than the amortized cost basis or carrying amount of that investment at the balance sheet date and the decline in fair value is deemed to be other than temporary, before considering whether or not such amount is recognized in earnings or other comprehensive income.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 320<br> -SubTopic 10<br> -Section 45<br> -Paragraph 8A<br> -URI http://asc.fasb.org/extlink&amp;oid=124260329&amp;loc=SL6284422-111562<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ImpairmentOfInvestments</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeTaxesPaidNet">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The amount of cash paid during the current period to foreign, federal, state, and local authorities as taxes on income, net of any cash received during the current period as refunds for the overpayment of taxes.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -URI http://asc.fasb.org/extlink&amp;oid=123431023&amp;loc=d3e4297-108586<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeTaxesPaidNet</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncreaseDecreaseInAccountsPayableAndAccruedLiabilities">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The increase (decrease) during the reporting period in the amounts payable to vendors for goods and services received and the amount of obligations and expenses incurred but not paid.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 28<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=123570139&amp;loc=d3e3602-108585<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncreaseDecreaseInAccountsPayableAndAccruedLiabilities</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncreaseDecreaseInIncomeTaxesPayableNetOfIncomeTaxesReceivable">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The increase (decrease) during the reporting period in the amounts payable to taxing authorities for taxes that are based on the reporting entity's earnings, net of amounts receivable from taxing authorities for refunds of overpayments or recoveries of income taxes.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 28<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=123570139&amp;loc=d3e3602-108585<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncreaseDecreaseInIncomeTaxesPayableNetOfIncomeTaxesReceivable</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncreaseDecreaseInInventories">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The increase (decrease) during the reporting period in the aggregate value of all inventory held by the reporting entity, associated with underlying transactions that are classified as operating activities.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 28<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=123570139&amp;loc=d3e3602-108585<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncreaseDecreaseInInventories</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
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<tr>
<td><strong> Period Type:</strong></td>
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</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncreaseDecreaseInOperatingCapitalAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncreaseDecreaseInOperatingCapitalAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncreaseDecreaseInOtherOperatingCapitalNet">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of increase (decrease) in operating assets after deduction of operating liabilities classified as other.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 28<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=123570139&amp;loc=d3e3602-108585<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncreaseDecreaseInOtherOperatingCapitalNet</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of increase (decrease) in prepaid expenses, and assets classified as other.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 28<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=123570139&amp;loc=d3e3602-108585<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_InterestPaidNet">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of cash paid for interest, excluding capitalized interest, classified as operating activity. Includes, but is not limited to, payment to settle zero-coupon bond for accreted interest of debt discount and debt instrument with insignificant coupon interest rate in relation to effective interest rate of borrowing attributable to accreted interest of debt discount.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -URI http://asc.fasb.org/extlink&amp;oid=123431023&amp;loc=d3e4297-108586<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 17<br> -Subparagraph (d)<br> -URI http://asc.fasb.org/extlink&amp;oid=123570139&amp;loc=d3e3367-108585<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 25<br> -Subparagraph (e)<br> -URI http://asc.fasb.org/extlink&amp;oid=123570139&amp;loc=d3e3536-108585<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_InterestPaidNet</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_NetCashProvidedByUsedInFinancingActivities">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of cash inflow (outflow) from financing activities, including discontinued operations. Financing activity cash flows include obtaining resources from owners and providing them with a return on, and a return of, their investment; borrowing money and repaying amounts borrowed, or settling the obligation; and obtaining and paying for other resources obtained from creditors on long-term credit.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 24<br> -URI http://asc.fasb.org/extlink&amp;oid=123570139&amp;loc=d3e3521-108585<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_NetCashProvidedByUsedInFinancingActivities</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_NetCashProvidedByUsedInFinancingActivitiesContinuingOperationsAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_NetCashProvidedByUsedInFinancingActivitiesContinuingOperationsAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_NetCashProvidedByUsedInInvestingActivities">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of cash inflow (outflow) from investing activities, including discontinued operations. Investing activity cash flows include making and collecting loans and acquiring and disposing of debt or equity instruments and property, plant, and equipment and other productive assets.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 24<br> -URI http://asc.fasb.org/extlink&amp;oid=123570139&amp;loc=d3e3521-108585<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_NetCashProvidedByUsedInInvestingActivities</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_NetCashProvidedByUsedInInvestingActivitiesContinuingOperationsAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_NetCashProvidedByUsedInInvestingActivitiesContinuingOperationsAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_NetCashProvidedByUsedInOperatingActivities">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of cash inflow (outflow) from operating activities, including discontinued operations. Operating activity cash flows include transactions, adjustments, and changes in value not defined as investing or financing activities.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 25<br> -URI http://asc.fasb.org/extlink&amp;oid=123570139&amp;loc=d3e3536-108585<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 24<br> -URI http://asc.fasb.org/extlink&amp;oid=123570139&amp;loc=d3e3521-108585<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 28<br> -URI http://asc.fasb.org/extlink&amp;oid=123570139&amp;loc=d3e3602-108585<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_NetCashProvidedByUsedInOperatingActivities</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_NetCashProvidedByUsedInOperatingActivitiesContinuingOperationsAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_NetCashProvidedByUsedInOperatingActivitiesContinuingOperationsAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PaymentsForDerivativeInstrumentFinancingActivities">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The cash outflow for derivative instruments during the period, which are classified as financing activities, excluding those designated as hedging instruments.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 15<br> -Subparagraph (d)<br> -URI http://asc.fasb.org/extlink&amp;oid=123570139&amp;loc=d3e3291-108585<br><br>Reference 2: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 23<br> -URI http://asc.fasb.org/extlink&amp;oid=123570139&amp;loc=d3e3505-108585<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PaymentsForDerivativeInstrumentFinancingActivities</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PaymentsOfDebtIssuanceCosts">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The cash outflow paid to third parties in connection with debt origination, which will be amortized over the remaining maturity period of the associated long-term debt.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 15<br> -Subparagraph (e)<br> -URI http://asc.fasb.org/extlink&amp;oid=123570139&amp;loc=d3e3291-108585<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PaymentsOfDebtIssuanceCosts</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PaymentsRelatedToTaxWithholdingForShareBasedCompensation">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of cash outflow to satisfy grantee's tax withholding obligation for award under share-based payment arrangement.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 15<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=123570139&amp;loc=d3e3291-108585<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PaymentsRelatedToTaxWithholdingForShareBasedCompensation</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PaymentsToAcquireAvailableForSaleSecuritiesDebt">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of cash outflow to acquire investment in debt security measured at fair value with change in fair value recognized in other comprehensive income (available-for-sale).</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 13<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=123570139&amp;loc=d3e3213-108585<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 11<br> -URI http://asc.fasb.org/extlink&amp;oid=123570139&amp;loc=d3e3151-108585<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 320<br> -SubTopic 10<br> -Section 45<br> -Paragraph 11<br> -URI http://asc.fasb.org/extlink&amp;oid=124260329&amp;loc=d3e26853-111562<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PaymentsToAcquireAvailableForSaleSecuritiesDebt</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PaymentsToAcquirePropertyPlantAndEquipment">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The cash outflow associated with the acquisition of long-lived, physical assets that are used in the normal conduct of business to produce goods and services and not intended for resale; includes cash outflows to pay for construction of self-constructed assets.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 13<br> -Subparagraph (c)<br> -URI http://asc.fasb.org/extlink&amp;oid=123570139&amp;loc=d3e3213-108585<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PaymentsToAcquirePropertyPlantAndEquipment</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProceedsFromConvertibleDebt">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The cash inflow from the issuance of a long-term debt instrument which can be exchanged for a specified amount of another security, typically the entity's common stock, at the option of the issuer or the holder.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 14<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=123570139&amp;loc=d3e3255-108585<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ProceedsFromConvertibleDebt</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProceedsFromIssuanceOrSaleOfEquity">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The cash inflow from the issuance of common stock, preferred stock, treasury stock, stock options, and other types of equity.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 14<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=123570139&amp;loc=d3e3255-108585<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ProceedsFromIssuanceOrSaleOfEquity</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProceedsFromSaleAndMaturityOfAvailableForSaleSecurities">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of cash inflow from sale, maturity, prepayment and call of investment in debt security measured at fair value with change in fair value recognized in other comprehensive income (available-for-sale).</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 11<br> -URI http://asc.fasb.org/extlink&amp;oid=123570139&amp;loc=d3e3151-108585<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 12<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=123570139&amp;loc=d3e3179-108585<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 320<br> -SubTopic 10<br> -Section 45<br> -Paragraph 11<br> -URI http://asc.fasb.org/extlink&amp;oid=124260329&amp;loc=d3e26853-111562<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ProceedsFromSaleAndMaturityOfAvailableForSaleSecurities</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProceedsFromSaleOfPropertyPlantAndEquipment">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The cash inflow from the sale of long-lived, physical assets that are used in the normal conduct of business to produce goods and services and not intended for resale.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 12<br> -Subparagraph (c)<br> -URI http://asc.fasb.org/extlink&amp;oid=123570139&amp;loc=d3e3179-108585<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ProceedsFromSaleOfPropertyPlantAndEquipment</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProfitLoss">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The consolidated profit or loss for the period, net of income taxes, including the portion attributable to the noncontrolling interest.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(g)(1)(ii))<br> -URI http://asc.fasb.org/extlink&amp;oid=120395691&amp;loc=d3e23780-122690<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section 45<br> -Paragraph 1A<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=124509347&amp;loc=SL7669619-108580<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1A<br> -Subparagraph (a)(1)<br> -URI 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FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -URI http://asc.fasb.org/extlink&amp;oid=124431687&amp;loc=d3e22658-107794<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ProfitLoss</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProvisionForDoubtfulAccounts">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of expense (reversal of expense) for expected credit loss on accounts receivable.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 326<br> -SubTopic 20<br> -Section 50<br> -Paragraph 13<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=124255953&amp;loc=SL82919249-210447<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SX 210.5-03(5))<br> -URI http://asc.fasb.org/extlink&amp;oid=123367319&amp;loc=SL114868664-224227<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ProvisionForDoubtfulAccounts</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The cash outflow to repay long-term debt that is not secured by collateral. Excludes repayments of tax exempt unsecured debt.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 15<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=123570139&amp;loc=d3e3291-108585<br></p></div>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of increase in right-of-use asset obtained in exchange for operating lease liability.</p></div>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of noncash expense for share-based payment arrangement.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 28<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=123570139&amp;loc=d3e3602-108585<br></p></div>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The increase (decrease) during the reporting period in amount due within one year (or one business cycle) from customers for the credit sale of goods and services and contract assets.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of increase decrease in customer deposits and deferred revenue.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Net transfer of property, plant and equipment to inventory in non-cash transactions.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
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<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674062273256">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Significant Accounting Policies<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2021</div></th></tr>
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<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract', window );"><strong>Significant Accounting Policies</strong></a></td>
<td class="text">&#160;<span></span>
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<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OrganizationConsolidationBasisOfPresentationBusinessDescriptionAndAccountingPoliciesTextBlock', window );">Significant Accounting Policies</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note 1 &#8212; Significant Accounting Policies</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(a) Description of Business</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">Veeco Instruments Inc. (together with its consolidated subsidiaries, &#8220;Veeco,&#8221; or the &#8220;Company&#8221;) operates in a </span><span style="-sec-ix-hidden:Hidden_GMHOS9YmP0ixHp5ywkdWDQ;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">single</span></span><span style="font-size:10pt;"> segment: the development, manufacture, sales, and support of semiconductor and thin film process equipment primarily sold to make electronic devices.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(b) Basis of Presentation</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">The accompanying audited Consolidated Financial Statements of the Company have been prepared in accordance with United States generally accepted accounting principles (&#8220;GAAP&#8221;). The Company reports interim quarters on a </span><span style="font-size:10pt;">13</span><span style="font-size:10pt;">-week basis ending on the last Sunday of each period, which is determined at the start of each year. The Company&#8217;s fourth quarter always ends on the last day of the calendar year, December 31. During 2021 the interim quarters ended on April 4, July 4, and October 3, and during 2020 the interim quarters ended on March 29, June 28, and September 27. The Company reports these interim quarters as March 31, June 30, and September 30 in its interim consolidated financial statements.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(c) Use of Estimates</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The preparation of financial statements in conformity with GAAP requires management to make estimates and assumptions that affect the amounts reported in the financial statements and accompanying notes. Although these estimates are based on management&#8217;s knowledge of current events and actions it may undertake in the future, these estimates may ultimately differ from actual results. Significant items subject to such estimates and assumptions include: (i) stand-alone selling prices for the Company&#8217;s products and services; (ii) allowances for doubtful accounts; (iii) inventory obsolescence; (iv) the useful lives and expected future cash flows of property, plant, and equipment and identifiable intangible assets; (v) the fair value of the Company&#8217;s reporting unit and related goodwill; (vi) investment valuations and the valuation of derivatives, deferred tax assets, and assets acquired in business combinations; (vii) the recoverability of long-lived assets; (viii) liabilities for product warranty and legal contingencies; (ix) share-based compensation; (x) lease term and incremental borrowing rates used in determining operating lease assets and liabilities; and (xi) income tax uncertainties.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(d) Principles of Consolidation</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Consolidated Financial Statements include the accounts of the Company and its subsidiaries. Intercompany balances and transactions have been eliminated in consolidation. Companies acquired during each reporting period are reflected in the results of the Company effective from their respective dates of acquisition through the end of the reporting period.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(e) Foreign Currencies</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Assets and liabilities of the Company&#8217;s foreign subsidiaries that operate using functional currencies other than the U.S. dollar are translated using the exchange rates in effect at the balance sheet date. Results of operations are translated using monthly average exchange rates. Adjustments arising from the translation of the foreign currency financial statements of the Company&#8217;s subsidiaries into U.S. dollars, including intercompany transactions of a long-term nature, are reported as currency translation adjustments in &#8220;Accumulated other comprehensive income&#8221; in the Consolidated Balance Sheets. Foreign currency transaction gains or losses are included in &#8220;Other operating expense (income), net&#8221; in the Consolidated Statements of Operations.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(f) Revenue Recognition</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Revenue is recognized upon the transfer of control of the promised product or service to the customer in an amount that reflects the consideration the Company expects to receive in exchange for such product or service. The Company&#8217;s contracts with customers generally do not contain variable consideration. In the rare instances where variable </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">consideration is included, the Company estimates the amount of variable consideration and determines what portion of that, if any, has a high probability of significant subsequent revenue reversal, and if so, that amount is excluded from the transaction price. The Company&#8217;s contracts with customers frequently contain multiple deliverables, such as systems, upgrades, components, spare parts, installation, maintenance, and service plans. Judgment is required to properly identify the performance obligations within a contract and to determine how the revenue should be allocated among the performance obligations. The Company also evaluates whether multiple transactions with the same customer or related parties should be considered part of a single contract based on an assessment of whether the contracts or agreements are negotiated or executed within a short time frame of each other or if there are indicators that the contracts are negotiated in contemplation of one another. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160; </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">When there are separate units of accounting, the Company allocates revenue to each performance obligation on a relative stand-alone selling price basis. The stand-alone selling prices are determined based on the prices at which the Company separately sells the systems, upgrades, components, spare parts, installation, maintenance, and service plans. For items that are not sold separately, the Company estimates stand-alone selling prices generally using an expected cost plus margin approach. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160; </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Most of the Company&#8217;s revenue is recognized at a point in time when the performance obligation is satisfied. The Company considers many facts when evaluating each of its sales arrangements to determine the timing of revenue recognition, including its contractual obligations and the nature of the customer&#8217;s post-delivery acceptance provisions. The Company&#8217;s system sales arrangements, including certain upgrades, generally include field acceptance provisions that may include functional or mechanical test procedures. For many of these arrangements, a customer source inspection of the system is performed in the Company&#8217;s facility, test data is sent to the customer documenting that the system is functioning to the agreed upon specifications prior to delivery, or other quality assurance testing is performed internally to ensure system functionality prior to shipment. Historically, such source inspection or test data replicates the field acceptance provisions that are performed at the customer&#8217;s site prior to final acceptance of the system. When the Company objectively demonstrates that the criteria specified in the contractual acceptance provisions are achieved prior to delivery either through customer testing or the Company&#8217;s historical experience of its tools meeting specifications, transfer of control of the product to the customer is considered to have occurred and revenue is recognized upon system delivery since there is no substantive contingency remaining related to the acceptance provisions at that date. For new products, new applications of existing products, or for products with substantive customer acceptance provisions where the Company cannot objectively demonstrate that the criteria specified in the contractual acceptance provisions have been achieved prior to delivery, revenue and the associated costs are deferred. The Company recognizes such revenue and costs upon obtaining objective evidence that the acceptance provisions can be achieved, assuming all other revenue recognition criteria have been met. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160; </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">In certain cases, the Company&#8217;s contracts with customers contain a billing retention, which is billed by the Company and payable by the customer when field acceptance provisions are completed. Revenue recognized in advance of the amount that has been billed is recorded as a contract asset on the Consolidated Balance Sheets. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160; </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company recognizes revenue related to maintenance and service contracts over time based upon the respective contract term. Installation revenue is recognized over time as the installation services are performed. The Company recognizes revenue from the sales of components, spare parts, and specified service engagements at a point in time, which is typically consistent with the time of delivery in accordance with the terms of the applicable sales arrangement. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160; </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">The Company may receive customer deposits on system transactions. The timing of the transfer of goods or services related to the deposits is either at the discretion of the customer or expected to be within one year from the deposit receipt. As such, the Company does not adjust transaction prices for the time value of money. Incremental direct costs incurred related to the acquisition of a customer contract, such as sales commissions, are expensed as incurred since the expected performance period is </span><span style="font-size:10pt;">one</span><span style="font-size:10pt;"> year or less. </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160; </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company has elected to treat shipping and handling costs, including those costs incurred to move, package, and prepare the Company&#8217;s products for shipment and to move the products to a customer&#8217;s designated location, as a fulfillment activity, and the Company includes such costs in &#8220;Cost of sales&#8221; in the Consolidated Statements of Operations as incurred. These costs are generally comprised of payments to third-party shippers. Taxes assessed by governmental authorities that are collected by the Company from a customer are excluded from revenue. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(g) Warranty Costs</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">The Company typically provides standard warranty coverage on its systems for </span><span style="font-size:10pt;">one year</span><span style="font-size:10pt;"> from the date of final acceptance by providing labor and parts necessary to repair the systems during the warranty period. The Company records the estimated warranty cost when revenue is recognized on the related system. Warranty cost is included in &#8220;Cost of sales&#8221; in the Consolidated Statements of Operations. The estimated warranty cost is based on the Company&#8217;s historical experience with its systems and regional labor costs. The Company calculates the average service hours by region and parts expense per system utilizing actual service records to determine the estimated warranty charge. The Company updates its warranty estimates on a quarterly basis when the actual product performance or field expense differs from original estimates.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(h) Research and Development Costs</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Research and development costs are expensed as incurred and include charges for the development of new technology and the transition of existing technology into new products or services.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(i) Advertising Expense</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The cost of advertising is expensed as incurred and totaled $0.3 million, $0.4 million, and $0.5 million for the years ended December 31, 2021, 2020, and 2019, respectively.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(j) Accounting for Share-based Compensation</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Share-based awards exchanged for employee services are accounted for under the fair value method. Accordingly, share-based compensation cost is measured at the grant date based on the estimated fair value of the award. The expense for awards is recognized over the employee&#8217;s requisite service period (generally the vesting period of the award). The Company has elected to treat awards with only service conditions and with graded vesting as one award. Consequently, the total compensation expense is recognized straight-line over the entire vesting period, so long as the compensation cost recognized at any date at least equals the portion of the grant date fair value of the award that is vested at that date.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">In addition to stock options, restricted share awards (&#8220;RSAs&#8221;) and restricted stock units (&#8220;RSUs&#8221;) with time-based vesting, the Company grants performance share units and awards (&#8220;PSUs&#8221; and &#8220;PSAs&#8221;) that have either performance or market conditions. Compensation cost for PSUs and PSAs with performance conditions is recognized over the requisite service period based on the timing and expected level of achievement of the performance targets. A change in the assessment of performance attainment prior to the conclusion of the performance period is recognized in the period of the change in estimate. Compensation cost for PSUs and PSAs with market conditions is recognized over the requisite service period regardless of the expected level of achievement. For all PSUs and PSAs, the number of shares issued to the employee at the conclusion of the service period may vary from the original target based upon the level of attainment of the performance or market conditions.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company uses the Black-Scholes option-pricing model to compute the estimated fair value of option awards and purchase rights under the Employee Stock Purchase Plan. The Company uses a Monte Carlo simulation to compute the estimated fair value of awards with market conditions. The Black-Scholes model and Monte Carlo simulation include assumptions regarding dividend yields, expected volatility, expected option term, and risk-free interest rates. See Note 13, &#8220;Stock Plans,&#8221; for additional information. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(k) Income Taxes</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Income taxes are accounted for under the asset and liability method. Deferred tax assets and liabilities are recognized for the future tax consequences attributable to differences between the financial statement carrying amounts of existing assets and liabilities and their respective tax bases and operating loss and tax credit carryforwards. Deferred tax assets and liabilities are measured using enacted tax rates expected to apply to taxable income in the years in which those temporary differences are expected to be recovered or settled. The effect on deferred tax assets and liabilities from a change in tax rate is recognized in income in the period that includes the enactment date. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(l) Concentration of Credit Risk</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Financial instruments that potentially subject the Company to concentrations of credit risk consist primarily of cash and cash equivalents, investments, derivative financial instruments used in hedging activities, and accounts receivable. The Company invests in a variety of financial instruments and, by policy, limits the amount of credit exposure with any one financial institution or commercial issuer. Historically, the Company has not experienced any material credit losses on its investments. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company maintains an allowance reserve for potentially uncollectible accounts for estimated losses resulting from the inability of its customers to make required payments. The Company evaluates its allowance for doubtful accounts based on a combination of factors. In circumstances where specific invoices are deemed to be uncollectible, the Company provides a specific allowance for bad debt against the amount due to reduce the net recognized receivable to the amount reasonably expected to be collected. The Company also provides allowances based on its write-off history. Finally, the Company also considers its current expectations of future economic conditions, including the impact of COVID-19, when estimating its allowance for doubtful accounts. The allowance for doubtful accounts totaled $0.7 million at both December 31, 2021 and 2020.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">To further mitigate the Company&#8217;s exposure to uncollectable accounts, the Company may request certain customers provide a negotiable irrevocable letter of credit drawn on a reputable financial institution. These irrevocable letters of credit are typically issued to mature between </span><span style="-sec-ix-hidden:Hidden_lLLL67cC-kS_kJateyYGvg;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">zero</span></span><span style="font-size:10pt;"> and </span><span style="font-size:10pt;">90 days</span><span style="font-size:10pt;"> from the date the documentation requirements are met, typically when a system ships or upon receipt of final acceptance from the customer. The Company, at its discretion, may monetize these letters of credit on a non-recourse basis after they become negotiable but before maturity. The fees associated with the monetization are included in &#8220;Selling, general, and administrative&#8221; in the Consolidated Statements of Operations and were immaterial for the years ended December 31, 2021, 2020, and 2019.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(m) Fair Value of Financial Instruments</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The carrying amounts of financial instruments, including cash equivalents, accounts receivable, accounts payable, and accrued expenses reflected in the consolidated financial statements approximate fair value due to their short-term maturities. The fair value of debt for footnote disclosure purposes, including current maturities, if any, is estimated using recently quoted market prices of the instrument, or if not available, a discounted cash flow analysis based on the estimated current incremental borrowing rates for similar types of instruments.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(n) Cash, Cash Equivalents, and Short-term Investments</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">All financial instruments purchased with an original maturity of three months or less at the time of purchase are considered cash equivalents. Such items may include liquid money market funds, certificate of deposit and time deposit accounts, U.S. treasuries, government agency securities, and corporate debt. Investments that are classified as cash equivalents are carried at cost, which approximates fair value. The Company&#8217;s cash and cash equivalents includes $41.7 million and $86.2 million of cash equivalents at December 31, 2021 and 2020, respectively.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">A portion of the Company&#8217;s cash and cash equivalents is held by its subsidiaries throughout the world, frequently in each subsidiary&#8217;s respective functional currency, which is typically the U.S. dollar. Approximately 32% and 31% of cash and cash equivalents were maintained outside the United States at December 31, 2021 and 2020, respectively.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Short-term investments consist of marketable debt securities, and are generally classified as available-for-sale for use in current operations, if required, and are reported at fair value, with unrealized gains and losses, net of tax, presented as a separate component of stockholders&#8217; equity under the caption &#8220;Accumulated other comprehensive income&#8221; on the Consolidated Balance Sheets. These securities can include U.S. treasuries, government agency securities, corporate debt, and commercial paper, all with maturities of greater than three months when purchased. All realized gains and losses and unrealized losses resulting from declines in fair value that are other than temporary are included in &#8220;Other operating expense (income), net&#8221; in the Consolidated Statements of Operations. The specific identification method is used to determine the realized gains and losses on investments. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Non-marketable equity securities are equity securities without readily observable market prices and are included in &#8220;Other assets&#8221; in the Consolidated Balance Sheets. Non-marketable securities are measured at cost, adjusted for changes in observable prices minus impairment. Changes in fair value and impairment charges are included in &#8220;Other income (expense), net&#8221; in the Consolidated Statements of Operations.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(o) Inventories</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Inventories are stated at the lower of cost or net realizable value, with cost determined on a first-in, first-out basis. Each quarter the Company assesses the valuation and recoverability of all inventories: materials (raw materials, spare parts, and service inventory); work-in-process; and finished goods. Obsolete inventory or inventory in excess of management&#8217;s estimated usage requirement is written down to its estimated net realizable value if less than cost. The Company evaluates usage requirements by analyzing historical usage, anticipated demand, alternative uses of materials, and other qualitative factors. Unanticipated changes in demand for the Company&#8217;s products may require a write down of inventory, which would be reflected in cost of sales in the period the revision is made. Inventory acquired as part of a business combination is recorded at fair value on the date of acquisition.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(p) Business Combinations</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company allocates the fair value of the purchase consideration of the Company&#8217;s acquisitions to the tangible assets, intangible assets, including in-process research and development (&#8220;IPR&amp;D&#8221;), if any, and liabilities assumed, based on estimated fair values. The excess of the fair value of purchase consideration over the fair values of these identifiable assets and liabilities is recorded as goodwill. Acquisition-related expenses are recognized separately from the business combination and are expensed as incurred. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(q) Goodwill and Indefinite-Lived Intangible Assets</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Goodwill is an asset representing the future economic benefits arising from assets acquired in a business combination that are not individually identified and separately recognized. Goodwill is measured as the excess of the consideration transferred over the net fair value of identifiable assets acquired and liabilities assumed. Intangible assets with indefinite useful lives are measured at their respective fair values on the acquisition date. Intangible assets related to IPR&amp;D projects are considered to be indefinite-lived until the completion or abandonment of the associated research and development (&#8220;R&amp;D&#8221;) efforts. If and when development is complete, the associated assets would be deemed long-lived and would then be amortized based on their respective estimated useful lives at that point in time. Goodwill and indefinite-lived intangibles are not amortized into results of operations but instead are evaluated for impairment. The Company performs the evaluation in the beginning of the fourth quarter of each year or more frequently if impairment indicators arise.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">In testing goodwill for impairment, the Company may first perform a qualitative assessment of whether it is more likely than not that the reporting unit&#8217;s fair value is less than its carrying amount, and, if so, the Company then quantitatively compares the fair value of the reporting unit to its carrying amount. If the fair value exceeds the carrying amount, goodwill is not impaired. If the carrying amount exceeds fair value, the Company then records an impairment loss equal to the difference, up to the carrying value of goodwill.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">The Company determines the fair value of its reporting unit based on a reconciliation of the fair value of the reporting unit to the Company&#8217;s adjusted market capitalization. The adjusted market capitalization is calculated by multiplying the average share price of the Company&#8217;s common stock for the last </span><span style="-sec-ix-hidden:Hidden_zAaerYZD70-O1b7vxibxZA;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">ten</span></span><span style="font-size:10pt;"> trading days prior to the measurement date by the number of outstanding common shares and adding a control premium. The control premium is estimated using historical transactions in similar industries.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">In testing indefinite-lived intangible assets for impairment, the Company may first perform a qualitative assessment of whether it is more likely than not that the fair value of the indefinite-lived intangible asset is less than its carrying amount, and, if so, the Company then quantitatively compares the fair value of the indefinite-lived intangible asset to its carrying amount. The Company determines the fair value of its indefinite-lived intangible assets using a discounted cash flow method.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(r) Long-lived Assets</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Long-lived intangible assets consist of purchased technology, customer relationships, patents, trademarks and tradenames, and backlog and are initially recorded at fair value. 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If the carrying amount of the long-lived asset or asset group is not recoverable on an undiscounted cash flow basis, impairment is recognized to the extent the carrying amount exceeds its fair value. Fair value is determined through various valuation techniques including discounted cash flow models or, when available, quoted market values and third-party appraisals.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(s) Leases</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Upon the adoption of ASC Topic 842, <i style="font-style:italic;">Leases</i> (&#8220;ASC 842&#8221;) as of January 1, 2019, the Company determines at contract inception if an arrangement is a lease, or contains a lease, of an identified asset for which the Company has the right to obtain substantially all of the economic benefits from its use and the right to direct its use. Right-of-use (&#8220;ROU&#8221;) assets represent the Company&#8217;s right to use an underlying asset for the lease term, while lease liabilities represent the Company&#8217;s obligation to make lease payments arising from the lease. Operating lease ROU assets and liabilities are recognized at lease commencement date based on the present value of lease payments over the lease term. The implicit discount rate in the Company&#8217;s leases generally cannot readily be determined, and therefore the Company uses its incremental borrowing rate based on information available at lease commencement date in determining the present value of future payments. The Company has options to renew or terminate certain leases. These options are included in the determination of lease term when it is reasonably certain that the Company will exercise such options. The Company does not separate lease and non-lease components in determining ROU assets or lease liabilities for real estate leases. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Additionally, the Company does not recognize ROU assets or lease liabilities for leases with original terms or renewals of one year or less.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(t) Recently Adopted Accounting Standards</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">The Company </span><span style="font-size:10pt;">adopted</span><span style="font-size:10pt;"> ASU 2019-12:&#160;</span><i style="font-size:10pt;font-style:italic;">Income Taxes (Topic 740): Simplifying the Accounting for Income Taxes </i><span style="font-size:10pt;">in the second quarter of 2020, effective as of the beginning of fiscal year 2020. This ASU simplifies the accounting for income taxes by eliminating certain exceptions to the general principles and simplifying several aspects of ASC 740,&#160;</span><i style="font-size:10pt;font-style:italic;">Income Taxes,&#160;</i><span style="font-size:10pt;">including, but not limited to, requirements related to the following: a) exception to the incremental approach for intraperiod tax allocation; b) the tax basis step-up in goodwill obtained in a transaction that is not a business combination; c) ownership changes in investments - changes from a subsidiary to an equity method investment; d) separate financial statements of entities not subject to tax; e) interim-period accounting for enacted changes in tax law; and f) the year-to-date loss limitation in interim-period tax accounting. The adoption did not have a material impact on the Company&#8217;s consolidated financial statements as of the date of adoption.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(u) Recent Accounting Pronouncements Not Yet Adopted</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">In August 2020, the FASB issued ASU 2020-06:&#160;</span><i style="font-size:10pt;font-style:italic;">Debt &#8211; Debt with Conversion and Other Options (Subtopic 470-20) and Derivatives and Hedging &#8211; Contracts in Entity&#8217;s Own Equity (Subtopic 815-40): Accounting for Convertible Instruments and Contracts in an Entity&#8217;s Own Equity</i><span style="font-size:10pt;">. This standard simplifies the accounting for convertible debt instruments by removing the separation models for convertible debt with a cash conversion feature, as well as convertible instruments with a beneficial conversion feature. As a result, entities will account for a convertible debt instrument wholly as debt, unless certain other conditions are met. The elimination of these models will reduce non-cash interest expense for entities that have issued a convertible instrument that was within the scope of those models before the adoption of ASU 2020-06. Additionally, ASU 2020-06&#160;requires the application of the if-converted method for calculating diluted earnings per share, and precludes the use of the treasury stock method for certain debt instruments. The provisions of ASU 2020-06&#160;are applicable for fiscal years beginning after December 15, 2021.</span><span style="font-size:10pt;"> </span><span style="font-size:10pt;">The Company&#8217;s 2023 Notes, 2025 Notes, and 2027 Notes all are currently accounted for using the separation models for convertible debt with a cash conversion feature, and therefore upon </span><span style="font-size:10pt;">adoption</span><span style="font-size:10pt;"> of ASU 2020-06 in the first quarter of 2022, the Company expects a decrease in non-cash interest expense. Additionally, the Company will be required to use the if-converted method for its current convertible debt when calculating diluted earnings (loss) per share, which will result in an increase in income available to common shareholders, as well as an increase in diluted shares outstanding. The Company expects to use the modified retrospective method of adoption, which will result in an increase in the carrying value of long-term debt of approximately </span><span style="font-size:10pt;">$44.3</span><span style="font-size:10pt;"> million as of January 1, 2022, with a corresponding decrease in </span><span style="-sec-ix-hidden:Hidden_4-EcM48rokawiYfmorI9eQ;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">stockholders&#8217; equity</span></span><span style="font-size:10pt;">.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company is evaluating other pronouncements recently issued but not yet adopted. The adoption of these pronouncements is not expected to have a material impact on our consolidated financial statements.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p><span></span>
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<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674062423048">
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<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Income (Loss) Per Share<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2021</div></th></tr>
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<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EarningsPerShareAbstract', window );"><strong>Income (Loss) Per Share</strong></a></td>
<td class="text">&#160;<span></span>
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<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EarningsPerShareTextBlock', window );">Income (Loss) Per Share</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note 2 &#8212; Income (Loss) Per Share</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Basic income (loss) per share is calculated by dividing net income (loss) by the weighted average number of shares outstanding during the period. Diluted income per share is calculated by dividing net income by the weighted average number of shares used to calculate basic income per share plus the weighted average number of common share equivalents outstanding during the period. The dilutive effect of outstanding options to purchase common stock and non-participating share-based awards is considered in diluted income per share by application of the treasury stock method. The dilutive effect of performance share units is included in diluted income per common share in the periods the performance targets have been achieved, or would have been achieved if the reporting date was the end of the contingency period. The Company has determined that it has the ability and intent to settle the principal amount of its convertible senior notes in cash, and the excess of the principal portion in shares of its common stock. As such, the Company accounts for the conversion spread using the treasury stock method, and the shares issuable upon conversion of the Notes are not included in the calculation of diluted earnings per share except to the extent that the conversion </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">value of the Notes exceeds their principal amount and if the effect would be dilutive. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The computations of basic and diluted income (loss) per share for the years ended December 31, 2021, 2020, and 2019 are as follows:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:61.83%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:61.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:33.36%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">For the year ended December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:61.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.51%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.51%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.51%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2019</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="11" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:61.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:33.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands, except per share amounts)</i></p></td></tr><tr><td style="vertical-align:bottom;width:61.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Net income (loss)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="-sec-ix-hidden:Hidden_Qk9Z5GG2gU2eiypiuu7Caw;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">$</span></span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 26,038</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="-sec-ix-hidden:Hidden_E-eaVTHWMk6C3GCtkGb3ZA;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">$</span></span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (8,391)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="-sec-ix-hidden:Hidden_PpBtoGgI3k6DXC5KpPJQgw;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">$</span></span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (78,733)</p></td></tr><tr><td style="vertical-align:bottom;width:61.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Net income (loss) per common share:</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:61.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Basic</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 0.53</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (0.17)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (1.66)</p></td></tr><tr><td style="vertical-align:bottom;width:61.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Diluted</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 0.49</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (0.17)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (1.66)</p></td></tr><tr><td style="vertical-align:bottom;width:61.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:61.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Basic weighted average shares outstanding</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 49,073</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 48,362</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 47,482</p></td></tr><tr><td style="vertical-align:bottom;width:61.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Effect of potentially dilutive share-based awards</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 1,090</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td></tr><tr><td style="vertical-align:bottom;width:61.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Dilutive effect of convertible notes </p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 3,480</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td></tr><tr><td style="vertical-align:bottom;width:61.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Diluted weighted average shares outstanding</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 53,643</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 48,362</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 47,482</p></td></tr><tr><td style="vertical-align:bottom;width:61.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:middle;width:61.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Common share equivalents excluded from the diluted weighted average shares outstanding since the Company incurred a net loss and their effect would be antidilutive</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 947</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 531</p></td></tr><tr><td style="vertical-align:bottom;width:61.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Potentially dilutive shares excluded from the diluted calculation as their effect would be antidilutive</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 456</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 923</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 1,689</p></td></tr><tr><td style="vertical-align:middle;width:61.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Maximum potential shares to be issued for settlement of the 2023, 2025, and 2027 Notes excluded from the diluted calculation as their effect would be antidilutive due to a net loss or the fact that the conversion value of the Notes did not exceed their principal amount</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 8,421</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New 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style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 8,618</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p><span></span>
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<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674070175544">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Fair Value Measurements<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
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<tr><th class="th"><div>Dec. 31, 2021</div></th></tr>
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<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FairValueDisclosuresAbstract', window );"><strong>Fair Value Measurements</strong></a></td>
<td class="text">&#160;<span></span>
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<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FairValueDisclosuresTextBlock', window );">Fair Value Measurements</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note 3 &#8212; Fair Value Measurements</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Fair value is the price that would be received for an asset or the amount paid to transfer a liability in an orderly transaction between market participants. The Company is required to classify certain assets and liabilities based on the following fair value hierarchy:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"/><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">Level 1: Quoted prices in active markets that are unadjusted and accessible at the measurement date for identical, unrestricted assets or liabilities;</span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"/><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">Level 2: Quoted prices for identical assets and liabilities in markets that are not active, quoted prices for similar assets and liabilities in active markets or financial instruments for which significant inputs are observable, either directly or indirectly; and</span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"/><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">Level 3: Prices or valuations that require inputs that are both significant to the fair value measurement and unobservable.</span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">A financial instrument&#8217;s level within the fair value hierarchy is based on the lowest level of any input that is significant to the fair value measurement. The Company has evaluated the estimated fair value of financial instruments using available market information and valuations as provided by third-party sources. The use of different market assumptions or estimation methodologies could have a significant effect on the estimated fair value amounts.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The following table presents the Company&#8217;s assets that were measured at fair value on a recurring basis at December 31, 2021 and 2020:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:57.29%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:57.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;width:9.17%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Level&#160;1</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Level&#160;2</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.75%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Level&#160;3</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.19%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Total</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="13" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:57.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:40.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:57.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">December&#160;31, 2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:57.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"><b style="font-weight:bold;">Cash equivalents</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:57.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Certificate of deposits and time deposits</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 41,544</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 41,544</p></td></tr><tr><td style="vertical-align:bottom;width:57.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Money market cash</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 121</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 121</p></td></tr><tr><td style="vertical-align:bottom;width:57.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 41,665</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 41,665</p></td></tr><tr><td style="vertical-align:bottom;width:57.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"><b style="font-weight:bold;">Short-term investments</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:57.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">U.S. treasuries</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 51,095</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 51,095</p></td></tr><tr><td style="vertical-align:bottom;width:57.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Government agency securities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 12,052</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 12,052</p></td></tr><tr><td style="vertical-align:bottom;width:57.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Corporate debt</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 40,035</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 40,035</p></td></tr><tr><td style="vertical-align:bottom;width:57.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Commercial paper</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 999</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 999</p></td></tr><tr><td style="vertical-align:bottom;width:57.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 51,095</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 53,086</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 104,181</p></td></tr><tr><td style="vertical-align:bottom;width:57.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 0pt 18pt;"><span style="font-size:10pt;font-weight:bold;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:57.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">December&#160;31, 2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:57.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"><b style="font-weight:bold;">Cash equivalents</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:57.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Certificate of deposits and time deposits</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 59,168</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 59,168</p></td></tr><tr><td style="vertical-align:bottom;width:57.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Commercial paper</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 2,000</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 2,000</p></td></tr><tr><td style="vertical-align:bottom;width:57.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">U.S. treasuries</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 24,997</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 24,997</p></td></tr><tr><td style="vertical-align:bottom;width:57.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 84,165</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 2,000</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 86,165</p></td></tr><tr><td style="vertical-align:bottom;width:57.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"><b style="font-weight:bold;">Short-term investments</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:57.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">U.S. treasuries</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 149,219</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 149,219</p></td></tr><tr><td style="vertical-align:bottom;width:57.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Corporate debt</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 32,554</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 32,554</p></td></tr><tr><td style="vertical-align:bottom;width:57.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Commercial paper</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 7,998</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 7,998</p></td></tr><tr><td style="vertical-align:bottom;width:57.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 149,219</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 40,552</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 189,771</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company&#8217;s investments classified as Level 1 are based on quoted prices that are available in active markets, as well as certificates of deposits and time deposits that are classified as Level 1 due to their short-term nature. The Company&#8217;s investments classified as Level 2 are valued using observable inputs to quoted market prices, benchmark yields, reported trades, broker/dealer quotes, or alternative pricing sources with reasonable levels of price transparency.</p><span></span>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The entire disclosure for the fair value of financial instruments (as defined), including financial assets and financial liabilities (collectively, as defined), and the measurements of those instruments as well as disclosures related to the fair value of non-financial assets and liabilities. Such disclosures about the financial instruments, assets, and liabilities would include: (1) the fair value of the required items together with their carrying amounts (as appropriate); (2) for items for which it is not practicable to estimate fair value, disclosure would include: (a) information pertinent to estimating fair value (including, carrying amount, effective interest rate, and maturity, and (b) the reasons why it is not practicable to estimate fair value; (3) significant concentrations of credit risk including: (a) information about the activity, region, or economic characteristics identifying a concentration, (b) the maximum amount of loss the entity is exposed to based on the gross fair value of the related item, (c) policy for requiring collateral or other security and information as to accessing such collateral or security, and (d) the nature and brief description of such collateral or security; (4) quantitative information about market risks and how such risks are managed; (5) for items measured on both a recurring and nonrecurring basis information regarding the inputs used to develop the fair value measurement; and (6) for items presented in the financial statement for which fair value measurement is elected: (a) information necessary to understand the reasons for the election, (b) discussion of the effect of fair value changes on earnings, (c) a description of [similar groups] items for which the election is made and the relation thereof to the balance sheet, the aggregate carrying value of items included in the balance sheet that are not eligible for the election; (7) all other required (as defined) and desired information.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 820<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -URI http://asc.fasb.org/extlink&amp;oid=123874694&amp;loc=d3e19207-110258<br></p></div>
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<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FairValueDisclosuresTextBlock</td>
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<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674062445160">
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<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Investments<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2021</div></th></tr>
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<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_InvestmentsDebtAndEquitySecuritiesAbstract', window );"><strong>Investments</strong></a></td>
<td class="text">&#160;<span></span>
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<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_InvestmentsInDebtAndMarketableEquitySecuritiesAndCertainTradingAssetsDisclosureTextBlock', window );">Investments</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note 4 &#8212; Investments</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">At December 31, 2021 and 2020 the amortized cost and fair value of marketable securities, which are included in &#8220;Short-term investments&#8221; on the Consolidated Balance Sheets, were as follows:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Gross</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Gross</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Amortized</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Unrealized</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Unrealized</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Estimated</b></p></td></tr><tr><td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.19%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Cost</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Gains</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Losses</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Fair&#160;Value</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="13" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:41.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:55.91%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">December&#160;31, 2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">U.S. treasuries</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 51,269</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (174)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 51,095</p></td></tr><tr><td style="vertical-align:bottom;width:55.91%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Government agency securities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 12,075</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (23)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 12,052</p></td></tr><tr><td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Corporate debt</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 40,169</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (134)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 40,035</p></td></tr><tr><td style="vertical-align:bottom;width:55.91%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Commercial paper</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 999</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 999</p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:55.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><b style="font-weight:bold;">Total </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 104,512</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (331)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 104,181</p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:55.91%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 0pt 12pt;"><span style="font-size:10pt;font-weight:bold;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">December&#160;31, 2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:55.91%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">U.S. treasuries</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 149,206</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 14</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (1)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 149,219</p></td></tr><tr><td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Corporate debt</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 32,588</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (34)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 32,554</p></td></tr><tr><td style="vertical-align:bottom;width:55.91%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Commercial paper</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 7,997</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 1</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 7,998</p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:55.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 189,791</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 15</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (35)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 189,771</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Available-for-sale securities in a loss position at December 31, 2021 and 2020 were as follows:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:56.39%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.31%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.31%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.24%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:56.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:19.97%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, 2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:19.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, 2020</b></p></td></tr><tr><td style="vertical-align:bottom;width:56.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Gross</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Gross</b></p></td></tr><tr><td style="vertical-align:bottom;width:56.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Estimated</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Unrealized</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Estimated</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Unrealized</b></p></td></tr><tr><td style="vertical-align:bottom;width:56.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.22%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Fair&#160;Value</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.59%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Losses</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.59%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Fair Value</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.54%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Losses</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="13" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:56.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="10" style="vertical-align:bottom;white-space:nowrap;width:40.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:56.39%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">U.S. treasuries</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 51,095</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (174)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 19,991</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.24%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (1)</p></td></tr><tr><td style="vertical-align:bottom;width:56.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Government agency securities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 12,052</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (23)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td></tr><tr><td style="vertical-align:bottom;width:56.39%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Corporate debt</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 40,035</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.31%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (134)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.31%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 32,554</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.24%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (34)</p></td></tr><tr><td style="vertical-align:bottom;width:56.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 103,182</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.31%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (331)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.31%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 52,545</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.24%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (35)</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">At December 31, 2021 and 2020, there were no short-term investments that had been in a continuous loss position for more than 12 months.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;background:#ffff00;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="background:#ffffff;">The contractual maturities of securities classified as available-for-sale at December 31, 2021 were as follows:</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;background:#ffffff;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:72.18%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.41%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.39%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:72.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:25.01%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, 2021</b></p></td></tr><tr><td style="vertical-align:bottom;width:72.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Amortized</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Estimated</b></p></td></tr><tr><td style="vertical-align:bottom;width:72.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.11%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Cost</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.09%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Fair&#160;Value</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="7" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:72.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="4" style="vertical-align:bottom;white-space:nowrap;width:23.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:72.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Due in one year or less</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.41%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 53,617</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.39%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 53,550</p></td></tr><tr><td style="vertical-align:bottom;width:72.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Due after one year through two years</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.41%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 50,895</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.39%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 50,631</p></td></tr><tr><td style="vertical-align:bottom;width:72.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.41%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 104,512</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.39%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 104,181</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;background:#ffffff;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;background:#ffffff;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Actual maturities may differ from contractual maturities because borrowers may have the right to call or prepay obligations with or without call or prepayment penalties. The realized gains or losses for the years ended December 31, 2021, 2020, and 2019 were immaterial.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Other Investments</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Veeco has an ownership interest of less than 20% in a non-marketable investment, Kateeva, Inc. (&#8220;Kateeva&#8221;), over which Veeco does not exert significant influence. Additionally, the Company has a separate, non-marketable investment in another entity, with a carrying value of $2.0 million at December 31, 2021. The Company does not exert significant influence over this investment and its ownership interest is also less than 20%. Neither equity investment has a readily observable market price, and therefore the Company has elected to measure these investments at cost, adjusted for changes in observable market prices minus impairment. The investments are included in &#8220;Other assets&#8221; on the Consolidated Balance Sheets. These investments are subject to periodic impairment reviews which require judgment. The analyses include assessments of the companies&#8217; financial condition, the business outlooks for their products and technologies, their projected results and cash flows, business valuation indications from recent rounds of financing, the likelihood of obtaining subsequent rounds of financing, and the impact of equity preferences held by Veeco relative to other investors. During the year ended December 31, 2019, the Company identified impairment indicators on the Company&#8217;s investment in Kateeva, and as a result of a valuation analysis, concluded that its investment in Kateeva is fully impaired, and recorded a non-cash impairment charge of $21.0 million. During the year ended December 31, 2021, the Company identified impairment indicators on the Company&#8217;s other investment, and recorded a non-cash impairment charge of $1.0 million. Both impairment charges were included in &#8220;Other income (expense), net&#8221; in the Consolidated Statement of Operations. </p><span></span>
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<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674062367064">
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<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Inventories<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
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<tr><th class="th"><div>Dec. 31, 2021</div></th></tr>
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<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_InventoryDisclosureAbstract', window );"><strong>Inventories</strong></a></td>
<td class="text">&#160;<span></span>
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<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_InventoryDisclosureTextBlock', window );">Inventories</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note 5 &#8212; Inventories</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Inventories are stated at the lower of cost or net realizable value, with cost determined on a first-in, first-out basis. Inventories consist of the following:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:81.99%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:65.08%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.54%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:13.35%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.54%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:13.41%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:65.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:65.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="7" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:65.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:32.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:65.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Materials</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.54%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.35%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 96,027</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.54%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.41%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 82,679</p></td></tr><tr><td style="vertical-align:bottom;width:65.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Work-in-process</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 54,128</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 53,979</p></td></tr><tr><td style="vertical-align:bottom;width:65.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Finished goods</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.54%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.35%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 20,703</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.54%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.41%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 9,248</p></td></tr><tr><td style="vertical-align:bottom;width:65.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.54%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.35%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 170,858</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.54%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.41%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 145,906</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p><span></span>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The entire disclosure for inventory. Includes, but is not limited to, the basis of stating inventory, the method of determining inventory cost, the classes of inventory, and the nature of the cost elements included in inventory.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 330<br> -URI http://asc.fasb.org/topic&amp;trid=2126998<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
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<td><strong> Name:</strong></td>
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<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674067941048">
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<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Property, Plant, and Equipment<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2021</div></th></tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentAbstract', window );"><strong>Property, Plant, and Equipment</strong></a></td>
<td class="text">&#160;<span></span>
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<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentDisclosureTextBlock', window );">Property, Plant, and Equipment</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note 6 &#8212; Property, Plant, and Equipment</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Property, plant, and equipment, net, consist of the following:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:55.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:11.17%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:middle;width:14.02%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:50%;transform:translate(0,-50%);width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:55.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.36%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.4%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:55.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.36%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.4%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.02%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Average&#160;Useful&#160;Life</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="9" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:55.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:26.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:55.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Land</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 5,061</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 5,061</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:14.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">N/A</p></td></tr><tr><td style="vertical-align:bottom;width:55.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Building and improvements</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 63,946</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 62,865</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:14.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="-sec-ix-hidden:Hidden_nSraNxv3HkCjw8_FEiVHAA;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">10</span></span><span style="font-size:10pt;"> &#8211; </span><span style="font-size:10pt;">40 years</span></p></td></tr><tr><td style="vertical-align:bottom;width:55.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Machinery and equipment <sup style="font-size:7.5pt;line-height:100%;top:0pt;vertical-align:top;">(1)</sup></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 145,656</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 140,493</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:14.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="-sec-ix-hidden:Hidden_iMDzi6_cyUWyqGYEL7nS2g;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">3</span></span><span style="font-size:10pt;"> &#8211; </span><span style="font-size:10pt;">10 years</span></p></td></tr><tr><td style="vertical-align:bottom;width:55.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Leasehold improvements</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.17%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 45,979</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 6,671</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:14.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="-sec-ix-hidden:Hidden_j9fzviGGIkepS8REL9n-aQ;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">3</span></span><span style="font-size:10pt;"> &#8211; </span><span style="font-size:10pt;">17 years</span></p></td></tr><tr><td style="vertical-align:bottom;width:55.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Gross property, plant, and equipment</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 260,642</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 215,090</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:55.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Less: accumulated depreciation and amortization</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.17%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 160,899</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 149,819</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:55.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"><b style="font-weight:bold;">Net property, plant, and equipment</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.17%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 99,743</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 65,271</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr></table><div style="font-family:'Times New Roman','Times','serif';font-size:9.0pt;margin-bottom:0pt;margin-top:0pt;min-height:1.19em;position:relative;width:100%;"><div style="background-color:#000000;height:1pt;position:relative;top:0.6em;width:25.0%;border:none;margin:0 auto 0 0;"/></div><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Times New Roman','Times','serif';font-size:9pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">(1)</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:9pt;font-style:normal;font-weight:normal;">Machinery and equipment also includes software, furniture, and fixtures</span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Depreciation expense was $13.8 million, $15.4 million, and $17.3 million for the years ended December 31, 2021, 2020, and 2019, respectively. <span style="background:#ffffff;">During the year ended December 31, 2019, the Company classified vacant land in St. Paul, </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="background:#ffffff;">Minnesota as held for sale, and subsequently sold the land for approximately </span><span style="background:#ffffff;">$0.6</span><span style="background:#ffffff;">&#160;million, which approximated its carrying value.</span></p><span></span>
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<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674062427016">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Goodwill and Intangible Assets<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2021</div></th></tr>
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<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_GoodwillAndIntangibleAssetsDisclosureAbstract', window );"><strong>Goodwill and Intangible Assets</strong></a></td>
<td class="text">&#160;<span></span>
</td>
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<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_GoodwillAndIntangibleAssetsDisclosureTextBlock', window );">Goodwill and Intangible Assets</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note 7 &#8212; Goodwill and Intangible Assets</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Goodwill represents the future economic benefits arising from assets acquired in a business combination that are not individually identified and separately recognized. There were no changes in goodwill balances during the years ended December 31, 2021 or 2020, while the below table reflects the gross carrying amounts and accumulated impairments as of the respective periods:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:52.19%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:2.45%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:11.94%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:2.46%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:11.94%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:2.46%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:12.04%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:52.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Gross&#160;carrying</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;width:13.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Accumulated</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;width:13.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:52.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">amount</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">impairment</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.54%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Net amount</b></p></td></tr><tr><td style="vertical-align:bottom;width:52.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:45.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:52.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Balance at December&#160;31, 2021 and 2020</p></td><td style="vertical-align:bottom;width:2.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 430,331</p></td><td style="vertical-align:bottom;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 248,388</p></td><td style="vertical-align:bottom;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 181,943</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company performs its annual goodwill impairment test at the beginning of the fourth quarter each year. As the Company maintains a single goodwill reporting unit, it determines the fair value of its reporting unit based upon the Company&#8217;s adjusted market capitalization. The annual test performed at the beginning of the fourth quarter of fiscal 2021, 2020, and 2019 did not result in any potential impairment as the fair value of the reporting unit was determined to exceed the carrying amount of the reporting unit.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The valuation of goodwill will continue to be subject to changes in the Company&#8217;s market capitalization and observable market control premiums. This analysis is sensitive to changes in the Company&#8217;s stock price and absent other qualitative factors, the Company may be required to record goodwill impairment charges in future periods if the stock price declines and remains depressed for an extended period of time.&#160; </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The components of purchased intangible assets were as follows:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:26.35%;margin:0pt;padding:0pt;"><p 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Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:26.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:29.63%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, 2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:29.63%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, 2020</b></p></td></tr><tr><td style="vertical-align:bottom;width:26.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Average</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Accumulated</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Accumulated</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:26.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Remaining</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Gross</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Amortization</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Gross</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Amortization</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:26.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Amortization</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Carrying</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">and</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Net </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Carrying</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">and</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Net</b></p></td></tr><tr><td style="vertical-align:bottom;width:26.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:9.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Period</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Amount</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:9.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Impairment</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Amount</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Amount</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:9.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Impairment</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Amount</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="21" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:26.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in years)</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="17" style="vertical-align:bottom;white-space:nowrap;width:60.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:26.35%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Technology</p></td><td style="vertical-align:middle;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;white-space:nowrap;width:9.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;"> 3.6</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 327,908</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 310,551</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 17,357</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 327,908</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 302,358</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 25,550</p></td></tr><tr><td style="vertical-align:bottom;width:26.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Customer relationships</p></td><td style="vertical-align:bottom;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;white-space:nowrap;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;"> 7.3</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 146,465</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 132,970</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 13,495</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 146,465</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 130,131</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 16,334</p></td></tr><tr><td style="vertical-align:bottom;width:26.35%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Trademarks and tradenames</p></td><td style="vertical-align:bottom;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;white-space:nowrap;width:9.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;"> 2.5</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 30,910</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 27,857</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 3,053</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 30,910</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 26,614</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 4,296</p></td></tr><tr><td style="vertical-align:bottom;width:26.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Other</p></td><td style="vertical-align:bottom;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;white-space:nowrap;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"> -</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 3,686</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.1%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 3,686</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 3,686</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.1%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 3,681</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 5</p></td></tr><tr><td style="vertical-align:bottom;width:26.35%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 0pt 12pt;"><span style="font-size:10pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;white-space:nowrap;width:9.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;"> 5.0</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 508,969</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.1%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 475,064</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 33,905</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 508,969</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.1%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 462,784</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 46,185</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Other intangible assets primarily consist of patents, licenses, and backlog.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Based on the intangible assets recorded at December 31, 2021, and assuming no subsequent additions to or impairment of the underlying assets, the remaining estimated annual amortization expense, is expected to be as follows:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:46%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:75.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:17.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:75.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:20.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Amortization</b></p></td></tr><tr><td style="vertical-align:bottom;width:75.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:20.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:75.65%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2022</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.58%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.65%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:17.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 10,018</p></td></tr><tr><td style="vertical-align:bottom;width:75.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2023</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:17.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 8,347</p></td></tr><tr><td style="vertical-align:bottom;width:75.65%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2024</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.58%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.65%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:17.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 6,708</p></td></tr><tr><td style="vertical-align:bottom;width:75.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2025</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:17.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 3,136</p></td></tr><tr><td style="vertical-align:bottom;width:75.65%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2026</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.58%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.65%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:17.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 2,134</p></td></tr><tr><td style="vertical-align:bottom;width:75.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Thereafter</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.65%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:17.11%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 3,562</p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:75.65%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Total</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.58%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.65%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:17.11%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 33,905</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p><span></span>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The entire disclosure for goodwill and intangible assets.</p></div>
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<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Accrued Expenses and Other Liabilities<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
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<tr><th class="th"><div>Dec. 31, 2021</div></th></tr>
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<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note 8 &#8212; Accrued Expenses and Other Liabilities</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The components of accrued expenses and other current liabilities were as follows:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:70.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:70.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.49%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.49%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:70.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.49%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.49%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="7" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:70.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:27.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:70.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Payroll and related benefits</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 35,712</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 26,630</p></td></tr><tr><td style="vertical-align:bottom;width:70.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Warranty</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 7,878</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 5,058</p></td></tr><tr><td style="vertical-align:bottom;width:70.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="-sec-ix-hidden:Hidden_F6hpkcy7sk2smVu90Wpo7g;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">Operating lease liabilities</span></span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 4,437</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 4,148</p></td></tr><tr><td style="vertical-align:bottom;width:70.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Interest</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 2,757</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 2,574</p></td></tr><tr><td style="vertical-align:bottom;width:70.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Professional fees</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 1,467</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 1,112</p></td></tr><tr><td style="vertical-align:bottom;width:70.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Legal settlement</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 15,000</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td></tr><tr><td style="vertical-align:bottom;width:70.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Sales, use, and other taxes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 4,889</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 2,658</p></td></tr><tr><td style="vertical-align:bottom;width:70.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Other</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 7,612</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 2,696</p></td></tr><tr><td style="vertical-align:bottom;width:70.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 79,752</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 44,876</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Customer deposits and deferred revenue</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Customer deposits totaled $46.9 million and $49.3 million at December 31, 2021 and 2020, respectively, which are included in &#8220;Customer deposits and deferred revenue&#8221; in the Consolidated Balance Sheets. Deferred revenue represents amounts billed, other than deposits, in excess of the revenue that can be recognized on a particular contract at the balance sheet date. Changes in deferred revenue were as follows:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:80.14%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.57%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.57%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:14.7%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:80.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.57%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:17.27%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:80.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Balance - December&#160;31, 2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.57%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.57%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.7%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 17,985</p></td></tr><tr><td style="vertical-align:bottom;width:80.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Deferral of revenue</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.57%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.57%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 6,782</p></td></tr><tr><td style="vertical-align:bottom;width:80.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Recognition of unearned revenue</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.57%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.57%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.7%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (8,491)</p></td></tr><tr><td style="vertical-align:bottom;width:80.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Balance - December&#160;31, 2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.57%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.57%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.7%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 16,276</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">As of December&#160;31, 2021, the Company has approximately </span><span style="font-size:10pt;">$33.6</span><span style="font-size:10pt;"> million of remaining performance obligations on contracts with an original estimated duration of </span><span style="font-size:10pt;">one year</span><span style="font-size:10pt;"> or more, of which approximately </span><span style="font-size:10pt;">94%</span><span style="font-size:10pt;"> is expected to be recognized within </span><span style="font-size:10pt;">one year</span><span style="font-size:10pt;">, with the remaining amounts expected to be recognized between </span><span style="-sec-ix-hidden:Hidden_T3SVPFAPMEGRt2ljwcbEMQ;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">one to three years</span></span><span style="font-size:10pt;">. The Company has elected to exclude disclosures regarding remaining performance obligations that have an original expected duration of </span><span style="font-size:10pt;">one</span><span style="font-size:10pt;"> year or less.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Other liabilities</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">As part of a prior acquisition, the Company assumed an executive non-qualified deferred compensation plan that allowed qualifying executives to defer cash compensation. The plan was frozen at the time of acquisition and no further contributions have been made. <span style="background:#ffffff;">The plan was terminated and fully liquidated during 2021.</span> At December 31, 2020, plan assets approximated $2.4 million, representing the cash surrender value of life insurance policies and is included within &#8220;Other assets&#8221; in the Consolidated Balance Sheets, while plan liabilities approximated $2.5<span style="white-space:pre-wrap;"> million  and is included within &#8220;Other liabilities&#8221; in the Consolidated Balance Sheets. </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">At December 31, 2021 and 2020, other liabilities also included (i) asset retirement obligations of $2.8 million and $2.7 million, respectively; (ii) income tax payables of $0.4 million and $1.4 million, respectively; and (iii) medical and dental benefits for former executives of $1.8 million and $1.9 million, respectively. Additionally, as a result of the Coronavirus, Aid, Relief, and Economic Security Act, the Company has accrued for and deferred the deposit and payment of its share of social security taxes, resulting in a liability of $3.6 million at December 31, 2020, of which $1.8 million is included within &#8220;Accrued expenses and other current liabilities&#8221;, and $1.8 million is included within &#8220;Other liabilities&#8221; in the Consolidated Balance Sheets. At December 31, 2021, a $1.7 million liability remains for these deferred payroll taxes, which is included within &#8220;Accrued expenses and other current liabilities.&#8221;</p><span></span>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.19(a),20,24)<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
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<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674062441784">
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<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Commitments and Contingencies<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
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<tr><th class="th"><div>Dec. 31, 2021</div></th></tr>
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<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CommitmentsAndContingenciesDisclosureTextBlock', window );">Commitments and Contingencies</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note 9 &#8212; Commitments and Contingencies</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Warranty</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Changes in the Company&#8217;s product warranty reserves were as follows:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:61.6%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.43%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.45%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.45%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:61.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:36.32%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:61.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.72%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2019</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="10" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:61.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="7" style="vertical-align:bottom;white-space:nowrap;width:35.04%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:61.6%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Balance - beginning of the year</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 5,058</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 7,067</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 7,852</p></td></tr><tr><td style="vertical-align:bottom;width:61.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Warranties issued</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 7,102</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 4,626</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 5,865</p></td></tr><tr><td style="vertical-align:bottom;width:61.6%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Consumption of reserves</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (5,784)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (6,691)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (6,242)</p></td></tr><tr><td style="vertical-align:bottom;width:61.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Changes in estimate</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 1,502</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.45%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 56</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.45%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (408)</p></td></tr><tr><td style="vertical-align:bottom;width:61.6%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Balance - end of the year</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.43%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 7,878</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.45%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 5,058</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.45%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 7,067</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Minimum Lease Commitments</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">The Company&#8217;s operating leases primarily include real estate leases for properties used for manufacturing, R&amp;D activities, sales and service, and administration, as well as certain equipment leases. Some leases may include options to renew for a period of up to&#160;</span><span style="font-size:10pt;">5 years</span><span style="font-size:10pt;">, while others may include options to terminate the lease. The weighted average remaining lease term of the Company&#8217;s operating leases as of December 31, 2021 was&#160;</span><span style="font-size:10pt;">12 years</span><span style="font-size:10pt;">, and the weighted average discount rate used in determining the present value of future lease payments was&#160;</span><span style="font-size:10pt;">5.7%</span><span style="font-size:10pt;">.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The following table provides the maturities of lease liabilities at December 31, 2021: </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:15.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Operating</b></p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:15.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Leases</b></p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:15.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Payments due by period:</b></p></td><td style="vertical-align:bottom;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2022</p></td><td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 4,901</p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2023</p></td><td style="vertical-align:bottom;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 3,979</p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2024</p></td><td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 3,769</p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2025</p></td><td style="vertical-align:bottom;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 3,309</p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2026</p></td><td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 3,496</p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Thereafter</p></td><td style="vertical-align:bottom;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 35,960</p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Total future minimum lease payments</p></td><td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 55,414</p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Less: Imputed interest</p></td><td style="vertical-align:bottom;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (18,143)</p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Total</p></td><td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 37,271</p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:82.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Reported as of December&#160;31, 2021</b></p></td><td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="-sec-ix-hidden:Hidden_SwFqQXYgBEak5kXP8askZQ;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">Accrued expenses and other current liabilities</span></span></p></td><td style="vertical-align:bottom;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 4,437</p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Long-term operating lease liabilities</p></td><td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 32,834</p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 0pt 12pt;"><span style="-sec-ix-hidden:Hidden_zFxbRdmFCE2TWUV1wQrYUA;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">Total</span></span></p></td><td style="vertical-align:bottom;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 37,271</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Operating lease cost for the years ended December 31, 2021, 2020, and 2019 was $6.6 million, $5.4 million, and $5.5 million, respectively. Variable lease cost for all years ended December 31, 2021, 2020, and 2019 was $1.7 million. Additionally, the Company has an immaterial amount of short-term leases. Lease expense, which includes operating lease costs and variable lease costs, was $8.4&#160;million, $7.1&#160;million, and $7.2&#160;million for the years ended December 31, 2021, 2020, and 2019, respectively. In addition, the Company is obligated under such leases for certain other expenses, including real estate taxes and insurance. Operating cash outflows from operating leases for the year ended December 31, 2021, 2020, and 2019 were $6.6&#160;million (excluding landlord reimbursements for leasehold improvements of $6.1 million included within &#8220;Other, net&#8221; in the Consolidated Statements of Cash Flows), $6.9 million, and $7.2&#160;million, respectively.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Legal Proceedings</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">On June 8, 2018, an Ultratech shareholder who received Veeco stock as part of the consideration for the Ultratech acquisition filed a purported class action complaint in the Superior Court of the State of California, County of Santa Clara, captioned Wolther v. Maheshwari et al., Case No. 18CV329690, on behalf of himself and others who purchased or acquired shares of Veeco pursuant to the registration statement and prospectus which Veeco filed with the SEC in connection with the Ultratech acquisition (the &#8220;Wolther Action&#8221;). On August 2 and August 8, 2018, two purported class action complaints substantially similar to the Wolther Action were filed on behalf of different plaintiffs in the same court as the Wolther Action. These cases have been consolidated with the Wolther Action, and a consolidated complaint was filed on December 11, 2018. The consolidated complaint seeks to recover damages and fees under Sections 11, 12, and 15 of the Securities Act of 1933 for, among other things, alleged false/misleading statements in the registration statement and prospectus relating to the Ultratech acquisition, relating primarily to the alleged failure to disclose delays in the advanced packaging business, increased MOCVD competition in China, and an intellectual property dispute. In October 2021, Veeco and the court-appointed class representatives signed an agreement to settle the Wolther Action on a class-wide basis for $15.0<span style="white-space:pre-wrap;"> million, subject to court approval and class members&#8217; opportunity to object and opt-out, which is included within &#8220;Accrued expenses and other current liabilities&#8221; in the Consolidated Balance Sheets as of December 31, 2021. The settlement amount will be funded by insurance carriers, the receivable for which is included in &#8220;Prepaid expenses and other current assets&#8221; in the Consolidated Balance Sheets as of December 31, 2021.  </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">On December 21, 2018, a purported Veeco stockholder filed a derivative action in the Superior Court of the State of California, County of Santa Clara, captioned Vladimir Gusinsky Revocable Trust v. Peeler, et al., Case No. 18CV339925, on behalf of nominal defendant Veeco. The complaint seeks to assert claims for breach of fiduciary duty, waste of corporate assets, and unjust enrichment against current and former Veeco directors premised on purported misstatements and omissions in the registration statement relating to the Ultratech acquisition. Veeco is defending this matter vigorously. On January 25, 2021, the court granted the defendants&#8217; demurrer without leave to amend effecting the dismissal of the case. Plaintiff is appealing the dismissal of its case. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company is involved in various other legal proceedings arising in the normal course of business. The Company does not believe that the ultimate resolution of these matters will have a material adverse effect on its consolidated financial position, results of operations, or cash flows.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Concentrations of Credit Risk</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company depends on purchases from its ten largest customers, which accounted for 65% and 62% of net accounts receivable at December 31, 2021 and 2020, respectively.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Customers who accounted for more than 10% of net accounts receivable or net sales are as follows:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:40.97%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.47%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.49%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:40.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="3" style="vertical-align:bottom;white-space:nowrap;width:19.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Accounts&#160;Receivable</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:31.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Net&#160;Sales&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:40.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="3" style="vertical-align:bottom;white-space:nowrap;width:19.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:31.37%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">For the Year Ended December&#160;31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:40.97%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Customer</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2019</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:40.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Customer A</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.47%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 14</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 15</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:40.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Customer B</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 10</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:40.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Customer C</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.47%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 12</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:40.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Customer D</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 10</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:40.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Customer E</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.47%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 13</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 11</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td></tr></table><div style="font-family:'Times New Roman','Times','serif';font-size:9.0pt;margin-bottom:0pt;margin-top:0pt;min-height:1.19em;position:relative;width:100%;"><div style="background-color:#000000;height:1pt;position:relative;top:0.6em;width:25.0%;border:none;margin:0 auto 0 0;"/></div><table style="border-collapse:collapse;border:0;"><tr><td style="vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;"><span style="font-size:10pt;">*</span></p></td><td style="padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;"><span style="font-size:9pt;">Less than 10% of aggregate accounts receivable or net sales</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">The Company manufactures and sells its products to companies in different geographic locations. Refer to Note 17, &#8220;Segment Reporting and Geographic Information,&#8221; for additional information. In certain instances, the Company requires deposits from its customers for a portion of the sales price in advance of shipment and performs periodic credit evaluations on its customers. Where appropriate, the Company requires letters of credit on certain non-U.S. sales arrangements. Receivables generally are due within </span><span style="font-size:10pt;">30</span><span style="font-size:10pt;"> to </span><span style="font-size:10pt;">90 days</span><span style="font-size:10pt;"> from the date of invoice.</span><span style="font-size:10pt;"> </span><span style="font-size:10pt;">In some geographies, receivables may be payable up to </span><span style="font-size:10pt;">150 days</span><span style="font-size:10pt;"> from the date of the invoice.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Receivable Purchase Agreement</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">In December&#160;2020, the Company entered into a receivable purchase agreement with a financial institution to sell certain of its trade receivables from customers without recourse, up to $15.0 million at any point in time. Pursuant to this agreement, the Company sold $11.6&#160;million of receivables during the year ended December&#160;31, 2020, of which $5.9 million was outstanding at December 31, 2020, and subsequently settled during 2021. There were no further sales of receivables under this agreement during 2021, and therefore the full $15.0 million is available under the agreement for additional sales of receivables as of December&#160;31, 2021. The Company did not sell any receivables under this agreement during 2021. The net sale of accounts receivable under the agreement is reflected as a reduction of accounts receivable in the Company&#8217;s Consolidated Balance Sheet at the time of sale and any fees for the sale of trade receivables were not material for the periods presented.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Suppliers</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company outsources certain functions to third parties, including the manufacture of several of its systems. While the Company relies on its outsourcing partners to perform their contracted functions, the Company maintains some level of internal manufacturing capability for these systems. In addition, certain of the components and sub-assemblies included in the Company&#8217;s products are obtained from a single source or a limited group of suppliers. The failure of the Company&#8217;s present outsourcing partners and suppliers to meet their contractual obligations and the Company&#8217;s inability to make alternative arrangements or resume the manufacture of these systems could have a material adverse effect on the Company&#8217;s revenues, profitability, cash flows, and relationships with its customers.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company had deposits with its suppliers of $3.9 million and $7.2 million at December 31, 2021 and 2020, respectively, that were included in &#8220;Prepaid expenses and other current assets&#8221; on the Consolidated Balance Sheets.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Purchase Commitments</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company had purchase commitments of $193.0 million at December 31, 2021, substantially all of which will come due within one year. Purchase commitments are primarily for inventory used in manufacturing products and are partially offset by existing deposits with suppliers. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Bank Guarantees</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company has bank guarantees and letters of credit issued by a financial institution on its behalf as needed. 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<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674067923944">
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<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Debt<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
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<tr><th class="th"><div>Dec. 31, 2021</div></th></tr>
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<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtDisclosureAbstract', window );"><strong>Debt</strong></a></td>
<td class="text">&#160;<span></span>
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<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtDisclosureTextBlock', window );">Debt</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note 10 &#8212; Debt</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Convertible Senior Notes</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">2023 Notes</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">On January 10, 2017, the Company issued $345.0 million of 2.70% convertible senior unsecured notes due 2023 (the &#8220;2023 Notes&#8221;). The Company received net proceeds, after deducting underwriting discounts and fees and expenses payable by the Company, of approximately $335.8 million. The 2023 Notes bear interest at a rate of 2.70% per year, payable semiannually in arrears on January 15 and July 15 of each year, commencing on July 15, 2017. The 2023 Notes mature on January 15, 2023, unless earlier purchased by the Company, redeemed, or converted.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;background:#ffffff;margin:0pt;">On May 18, 2020, in connection with the completion of a private offering of $125.0&#160;million aggregate principal amount of&#160;3.75% convertible senior notes due 2027 described below, the Company repurchased and retired approximately $88.3&#160;million in aggregate principal amount of its outstanding 2023 Notes, with a carrying amount of $78.1&#160;million, for approximately $81.2&#160;million of cash. The Company accounted for the partial settlement of the 2023 Notes as an extinguishment, and as such, recorded a loss on extinguishment of approximately $3.0&#160;million for the year ended December 31, 2020, which is included in &#8220;Other income (expense), net&#8221; in the Consolidated Statements of Operations, as well as a reduction of additional paid-in capital of $0.1 million for the repurchase of the conversion feature.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;background:#ffffff;margin:0pt;">Additionally, on November 11, 2020, the Company entered into a privately negotiated exchange agreement with a holder of its outstanding 2023 Notes, under which the Company agreed to retire $125.0 million in aggregate original principal amount of the 2023 Notes, with a carrying amount of $113.1 million, in exchange for the issuance of $132.5 million in aggregate principal amount of new 3.50% convertible senior notes due 2025 described below, which had a fair value that approximated the principal amount of notes issued. The Company accounted for the partial settlement of the 2023 Notes as an extinguishment, and as such, recorded a loss on extinguishment of approximately $4.8&#160;million for the year ended </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;background:#ffffff;margin:0pt;">December 31, 2020, which is included in &#8220;Other income (expense), net&#8221; in the Consolidated Statements of Operations, as well as a reduction of additional paid-in capital of $14.6 million for the exchange of the conversion feature.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;background:#ffffff;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;background:#ffffff;margin:0pt;">Finally, on November 5, 2021, the Company entered into a privately negotiated note purchase agreement with a holder of its outstanding 2023 Notes, under which the Company agreed to repurchase and retire approximately $111.5 million in aggregate original principal amount of the 2023 Notes, with a carrying amount of $105.5 million, for cash consideration of approximately $115.6 million, and approximately $1.0 million of accrued and unpaid interest. The Company accounted for the partial settlement of the 2023 Notes as an extinguishment, and as such, recorded a loss on extinguishment of approximately $4.0&#160;million for the year ended December 31, 2021, which is included in &#8220;Other income (expense), net&#8221; in the Consolidated Statements of Operations, as well as a reduction of additional paid-in capital of $6.1 million for the repurchase of the conversion feature.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">2025 Notes</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;background:#ffffff;margin:0pt;">On November 17, 2020, as part of the privately negotiated exchange agreement described above, the Company issued $132.5 million of 3.50% convertible senior notes due 2025 (the &#8220;2025 Notes&#8221;). The 2025 Notes bear interest at a rate of&#160;3.50% per year, payable semiannually in arrears on January 15 and July 15 of each year, commencing on July 15, 2021. The 2025 Notes mature on January 15, 2025, unless earlier purchased by the Company, redeemed, or converted.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;background:#ffffff;margin:0pt;"><i style="font-style:italic;">2027 Notes</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;background:#ffffff;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;background:#ffffff;margin:0pt;">On May 18, 2020, the Company completed a private offering of $125.0&#160;million of&#160;3.75% convertible senior notes due 2027 (the &#8220;2027 Notes&#8221;). The Company received net proceeds of approximately $121.9&#160;million, after deducting underwriting discounts and fees and expenses payable by the Company. Additionally, the Company used approximately $10.3&#160;million of cash to purchase capped calls, discussed below. The 2027 Notes bear interest at a rate of&#160;3.75% per year, payable semiannually in arrears on June 1 and December 1 of each year, commencing on December 1, 2020. The 2027 Notes mature on June 1, 2027, unless earlier purchased by the Company, redeemed, or converted.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The 2023 Notes, 2025 Notes, and 2027 Notes (collectively, the &#8220;Notes&#8221;) are unsecured obligations of Veeco and rank senior in right of payment to any of Veeco&#8217;s subordinated indebtedness; equal in right of payment to all of Veeco&#8217;s unsecured indebtedness that is not subordinated; effectively subordinated in right of payment to any of Veeco&#8217;s secured indebtedness to the extent of the value of the assets securing such indebtedness; and structurally subordinated to all indebtedness and other liabilities (including trade payables) of Veeco&#8217;s subsidiaries.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Notes are convertible into cash, shares of the Company&#8217;s common stock, or a combination thereof, at the Company&#8217;s election, upon the satisfaction of specified conditions and during certain periods as described below. The initial conversion rates are 24.9800, 41.6667, and 71.5372 shares of the Company&#8217;s common stock per $1,000 principal amount of the 2023 Notes, 2025 Notes, and 2027 Notes, respectively, representing initial effective conversion prices of $40.03, $24.00, and $13.98 per share of common stock, respectively. The conversion rates may be subject to adjustment upon the occurrence of certain specified events.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Holders may convert all or any portion of their notes, in multiples of one thousand dollar principal amount, at their option at any time prior to the close of business on the business day immediately preceding October 15, 2022 with respect to the 2023 Notes, October 15, 2024 with respect to the 2025 Notes, and October 1, 2027 with respect to the 2027 Notes, only under the following circumstances: </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:36pt;"/><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:25.2pt;padding:0pt;">(i)</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">During any calendar quarter (and only during such calendar quarter), if the last reported sale price of the common stock for at least </span><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">20</span><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"> trading days (whether or not consecutive) during a period of </span><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">30</span><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"> consecutive trading days ending on the last trading day of the immediately preceding calendar quarter is greater than or equal to </span><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">130%</span><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"> of the conversion price on each applicable trading day;</span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:25.2pt;text-indent:-25.2pt;margin:0pt 0pt 0pt 36pt;"><span style="font-size:10pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:36pt;"/><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:25.2pt;padding:0pt;">(ii)</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">During the </span><span style="-sec-ix-hidden:Hidden_MoI4F52lpkK6zktkVWVp9Q;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">five</span></span><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"> consecutive business day period after any </span><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">five</span><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"> consecutive trading day period (the &#8220;measurement period&#8221;) in which the trading price per </span><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">one</span><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"> thousand dollar principal amount of Notes for each trading day of the measurement period was less than </span><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">98%</span><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"> of the product of the last reported sale price of Veeco&#8217;s common stock and the conversion rate on each such trading day;</span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:25.2pt;text-indent:-25.2pt;margin:0pt 0pt 0pt 36pt;"><span style="font-size:10pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:36pt;"/><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:25.2pt;padding:0pt;">(iii)</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">If the Company calls any or all of applicable series of the Notes for redemption at any time prior to the close of business on the scheduled trading day immediately preceding the redemption date; or</span></td></tr></table><p style="font-family:'Times New 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calendar quarter ended December 31, 2021, the last reported sales price of common stock during the 30 consecutive trading days, based on the criteria outlined in (i) above, was greater than 130% of the conversion price of the 2027 Notes, and as such the 2027 Notes are convertible by the holders until March 31, 2022.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Holders may convert their notes at any time, regardless of the foregoing circumstances, on or after October 15, 2022 with respect to the 2023 Notes, October 15, 2024 with respect to the 2025 Notes, and October 1, 2026 with respect to the 2027 Notes, until the close of business on the business day immediately preceding the respective maturity date. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">Upon conversion by the holders, the Company may elect to settle such conversion in shares of its common stock, cash, or a combination thereof. As a result of its cash conversion options, the Company segregated the liability component of the instruments from the equity components. The liability components were measured by estimating the fair value of a non-convertible debt instrument that is similar in its terms to the Notes. The calculation of the fair value of the debt components required the use of Level 3 inputs, including utilization of convertible investors&#8217; credit assumptions and high yield bond indices. Fair value was estimated through discounting future interest and principal payments, an income approach, due under the Notes at a discount rate equal to the estimated borrowing rate for similar non-convertible debt, or </span><span style="font-size:10pt;">7.0%</span><span style="font-size:10pt;">, </span><span style="font-size:10pt;">8.0%</span><span style="font-size:10pt;">, and </span><span style="font-size:10pt;">9.1%</span><span style="font-size:10pt;"> with respect to the </span><span style="-sec-ix-hidden:Hidden_MKg7QyI-Vkiu_E8BwX71ww;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">2023</span></span><span style="font-size:10pt;"> Notes, </span><span style="-sec-ix-hidden:Hidden_rTmcThG5O0-ZHrYEBDPNfA;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">2025</span></span><span style="font-size:10pt;"> Notes, and </span><span style="-sec-ix-hidden:Hidden_KBc9K9UzVkSijqFS6jnqXQ;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">2027</span></span><span style="font-size:10pt;"> Notes, respectively. The excess of the aggregate face values of the Notes over the estimated fair values of the liability components of </span><span style="font-size:10pt;">$72.5</span><span style="font-size:10pt;"> million, </span><span style="font-size:10pt;">$21.0</span><span style="font-size:10pt;"> million, and </span><span style="font-size:10pt;">$34.2</span><span style="font-size:10pt;"> million with respect to the 2023 Notes, 2025 Notes, and 2027 Notes, respectively, were recognized as debt discounts and recorded as an increase to additional paid-in capital and will be amortized over the expected lives of the Notes using the effective interest rate method. Amortization of the debt discounts are recognized as non-cash interest expense.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The transaction costs of $9.2 million, $1.9 million, and $3.1 million incurred in connection with the issuance of the 2023 Notes, 2025 Notes, and 2027 Notes, respectively, were allocated to the liability and equity components based on their relative values. Transaction costs allocated to the liability component are being amortized using the effective interest rate method and recognized as non-cash interest expense over the expected terms of the Notes. Transaction costs allocated to the equity component of $1.9 million, $0.3 million, and $0.8 million with respect to the 2023 Notes, 2025 Notes, and 2027 Notes, respectively, reduced the value of the equity components recognized in stockholders' equity.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;background:#ffffff;margin:0pt;">In connection with the offering of the 2027 Notes, on May&#160;13, 2020, the Company entered into privately negotiated capped call transactions (the &#8220;Capped Call Transactions&#8221;), pursuant to capped call confirmations, covering the total principal amount of the 2027 Notes for an aggregate premium of $10.3&#160;million. The Capped Call Transactions are expected generally to reduce the potential dilution to the Company&#8217;s common stock upon any conversion of the 2027 Notes and/or offset any cash payments the Company is required to make in excess of the aggregate principal amount of converted 2027 Notes, as the case may be, with such reduction and/or offset subject to a cap based on the capped price of the Capped Call Transactions. The Capped Call Transactions exercise price is equal to the initial conversion price of the 2027 Notes, and the capped price of the Capped Call Transactions is approximately $18.46&#160;per share and is subject to certain adjustments under the terms of the capped call confirmations.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;background:#ffffff;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;background:#ffffff;margin:0pt;">The Capped Call Transactions are separate transactions entered into by the Company with the capped call counterparties, are not part of the terms of the 2027 Notes and do not change the holders&#8217; rights under the 2027 Notes. Holders of the </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;background:#ffffff;margin:0pt;">2027 Notes do not have any rights with respect to the Capped Call Transactions. The cost of the Capped Call Transactions is not expected to be tax-deductible as the Company did not elect to integrate the Capped Call Transactions into the 2027 Notes for tax purposes. The Company used a portion of the net proceeds from the offering of the 2027 Notes to pay for the Capped Call Transactions, and the cost of the Capped Call Transactions was recorded as a reduction of the Company&#8217;s additional paid-in capital in the accompanying consolidated financial statements.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The carrying values of the Notes are as follows:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:21.23%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:1.13%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:1.07%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:10.77%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:10.88%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:11.05%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:10.88%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:10.88%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:10.83%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:21.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="7" style="vertical-align:bottom;white-space:nowrap;width:37.22%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, 2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="7" style="vertical-align:bottom;white-space:nowrap;width:37.11%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, 2020</b></p></td></tr><tr><td style="vertical-align:bottom;width:21.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-family:'Calibri','Helvetica','sans-serif';font-weight:bold;">&#160;&#160;</b></p></td><td style="vertical-align:bottom;width:1.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:10.77%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Principal Amount</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:10.88%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Unamortized </b><b style="font-weight:bold;"><br/></b><b style="font-weight:bold;">debt discount/</b><b style="font-weight:bold;"><br/></b><b style="font-weight:bold;">transaction costs</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:11.05%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Net carrying value</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:10.88%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Principal Amount</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:10.88%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Unamortized </b><b style="font-weight:bold;"><br/></b><b style="font-weight:bold;">debt discount/</b><b style="font-weight:bold;"><br/></b><b style="font-weight:bold;">transaction costs</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:10.83%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Net carrying value</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="19" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:21.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="16" style="vertical-align:bottom;white-space:nowrap;width:76.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:21.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2023 Notes</p></td><td style="vertical-align:bottom;width:1.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.77%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 20,173</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.88%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (967)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 19,206</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.88%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 131,695</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.88%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (11,925)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 119,770</p></td></tr><tr><td style="vertical-align:bottom;width:21.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2025 Notes</p></td><td style="vertical-align:bottom;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 132,500</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (17,302)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 115,198</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 132,500</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (22,097)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 110,403</p></td></tr><tr><td style="vertical-align:bottom;width:21.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2027 Notes</p></td><td style="vertical-align:bottom;width:1.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.77%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 125,000</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.88%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (29,966)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.05%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 95,034</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.88%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 125,000</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.88%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (34,058)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.83%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 90,942</p></td></tr><tr><td style="vertical-align:bottom;width:21.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><b style="font-weight:bold;">Net carrying value</b></p></td><td style="vertical-align:bottom;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 0pt 12pt;"><span style="font-size:10pt;font-weight:bold;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.77%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 277,673</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.88%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (48,235)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.05%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 229,438</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.88%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 389,195</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.88%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (68,080)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.83%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 321,115</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Total interest expense related to the Notes is as follows:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:52.87%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:12.68%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:12.68%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:12.68%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:52.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:43.94%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">For&#160;the year ended&#160;December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:52.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.71%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.71%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.71%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2019</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="11" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:52.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:43.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:52.87%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Cash Interest Expense</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.68%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.68%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.68%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:52.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Coupon interest expense - 2023 Notes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.68%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 3,138</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.68%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 7,390</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.68%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 9,315</p></td></tr><tr><td style="vertical-align:bottom;width:52.87%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Coupon interest expense - 2025 Notes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.68%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 4,637</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.68%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 554</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.68%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td></tr><tr><td style="vertical-align:bottom;width:52.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Coupon interest expense - 2027 Notes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.68%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 4,688</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.68%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 2,904</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.68%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td></tr><tr><td style="vertical-align:bottom;width:52.87%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Non-cash Interest Expense</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.68%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.68%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.68%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:52.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Amortization of debt discount/transaction costs- 2023 Notes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.68%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 4,932</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.68%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 10,887</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.68%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 12,676</p></td></tr><tr><td style="vertical-align:bottom;width:52.87%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Amortization of debt discount/transaction costs- 2025 Notes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.68%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 4,795</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New 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style="vertical-align:bottom;white-space:nowrap;width:12.68%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td></tr><tr><td style="vertical-align:bottom;width:52.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Amortization of debt discount/transaction costs- 2027 Notes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td 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style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.68%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 2,359</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.68%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td></tr><tr><td style="vertical-align:bottom;width:52.87%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><b style="font-weight:bold;">Total Interest Expense</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.68%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 26,282</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New 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style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 21,991</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">The Company determined the Notes are Level 2 liabilities in the fair value hierarchy and estimated their fair values as </span><span style="font-size:10pt;">$20.4</span><span style="font-size:10pt;"> million, </span><span style="font-size:10pt;">$175.0</span><span style="font-size:10pt;"> million, and </span><span style="font-size:10pt;">$258.9</span><span style="font-size:10pt;"> million at December 31, 2021 for the </span><span style="-sec-ix-hidden:Hidden_v7FrO6gR5k6m5-7DQ1kckQ;"><span style="font-family:'Times New 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The Credit Facility is guaranteed by the Company&#8217;s direct material U.S. subsidiaries, subject to customary exceptions. Borrowings under the Credit Facility are secured by a first-priority lien on substantially all of the assets of the Company, subject to customary exceptions. </span><span style="font-size:10pt;">The Credit Facility has a term of </span><span style="font-size:10pt;">five years</span><span style="font-size:10pt;">, maturing on December 16, 2026, or earlier if certain liquidity measures are not met prior to the 2025 Notes maturing. </span><span style="font-size:10pt;">Subject to certain conditions and the receipt of commitments from the lenders, the Loan and Security Agreement allows for revolving commitments under the Credit Facility to be increased by up to </span><span style="font-size:10pt;">$75</span><span style="font-size:10pt;"> million. 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The Company will pay an unused commitment fee ranging from 0.25% to 0.35% based on unused capacity under the Credit Facility and the Company&#8217;s Secured Net Leverage Ratio. The Company may use the proceeds of borrowings under the Credit Facility to pay transaction fees and expenses, provide for its working capital needs and reimburse drawings under letters of credit and for other general corporate purposes.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Loan and Security Agreement contains customary affirmative covenants for transactions of this type, including, among others, the provision of financial and other information to the administrative agent, notice to the administrative agent upon the occurrence of certain material events, preservation of existence, maintenance of properties and insurance, compliance with laws, including environmental laws, the provision of additional guarantees, and an affiliate transactions covenant, subject to certain exceptions. The Loan and Security Agreement contains customary negative covenants, including, among others, restrictions on the ability to merge and consolidate with other companies, incur indebtedness, refinance our existing convertible notes, grant liens or security interests on assets, make investments, acquisitions, loans, or advances, pay dividends, and sell or otherwise transfer assets.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Loan and Security Agreement contains financial maintenance covenants that require the Borrower to maintain an Interest Coverage Ratio (as defined in the Loan and Security Agreement) of not less than 3.00 to 1.00, a Total Net Leverage Ratio (as defined in the Loan and Security Agreement) of not more than 4.50 to 1.00, and a Secured Net Leverage Ratio (as defined in the Loan and Security Agreement) of not more than 2.50 to 1.00, in each case, tested at the end of each fiscal quarter commencing with the fiscal quarter ending March 31, 2022. The Loan and Security Agreement also provides for a number of customary events of default, including, among others: payment defaults to the lenders&#894; voluntary and involuntary bankruptcy proceedings&#894; covenant defaults&#894; material inaccuracies of representations and warranties&#894; certain change of control events&#894; material money judgments&#894; and other customary events of default. The occurrence of an event of default could result in the acceleration of obligations and the termination of lending commitments under the Loan and Security Agreement.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">No amounts were outstanding under the Credit Facility as of December 31, 2021.</p><span></span>
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<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674062431640">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Derivative Financial Instruments<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2021</div></th></tr>
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<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosureAbstract', window );"><strong>Derivative Financial Instruments</strong></a></td>
<td class="text">&#160;<span></span>
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<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosureTextBlock', window );">Derivative Financial Instruments</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note 11 &#8212; Derivative Financial Instruments</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company is exposed to financial market risks arising from changes in currency exchange rates. Changes in currency exchange rates could affect the Company&#8217;s foreign currency denominated monetary assets and liabilities and forecasted cash flows. The Company sometimes enters into monthly forward derivative contracts with the intent of mitigating a portion of this risk. The Company only used derivative financial instruments in the context of hedging and not for speculative purposes and had not designated its foreign exchange derivatives as hedges. Accordingly, changes in fair value from these contracts were recorded as &#8220;Other operating expense (income), net&#8221; in the Company&#8217;s Consolidated Statements of Operations. The Company executed derivative transactions with highly rated financial institutions to mitigate counterparty risk.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:1pt;margin:0pt;"><span style="font-size:10pt;">The Company did not have any outstanding derivative contracts at December 31, 2021 and 2020. </span> </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p><span></span>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The entire disclosure for derivative instruments and hedging activities including, but not limited to, risk management strategies, non-hedging derivative instruments, assets, liabilities, revenue and expenses, and methodologies and assumptions used in determining the amounts.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 815<br> -URI http://asc.fasb.org/topic&amp;trid=2229140<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 815<br> -SubTopic 40<br> -Section 50<br> -Paragraph 5<br> -Subparagraph (f)<br> -URI http://asc.fasb.org/extlink&amp;oid=123477628&amp;loc=d3e90205-114008<br></p></div>
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<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674062401672">
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<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Stockholders' Equity<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2021</div></th></tr>
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<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockholdersEquityNoteAbstract', window );"><strong>Stockholders' Equity</strong></a></td>
<td class="text">&#160;<span></span>
</td>
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<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockholdersEquityNoteDisclosureTextBlock', window );">Stockholders' Equity</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note 12 &#8212; Stockholders&#8217; Equity</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Accumulated Other Comprehensive Income (&#8220;AOCI&#8221;)</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The following table presents the changes in the balances of each component of AOCI, net of tax:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:63.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.57%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:63.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Unrealized</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:63.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Gains&#160;(Losses)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:63.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Foreign</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">on Available</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:63.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Currency</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">for&#160;Sale&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:63.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.64%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Translation</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Securities</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.6%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Total</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="10" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:63.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:34.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:63.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Balance - December&#160;31, 2018</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.44%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 1,836</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.57%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.67%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (16)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.44%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 1,820</p></td></tr><tr><td style="vertical-align:bottom;width:63.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Other comprehensive income (loss)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 25</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.57%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.67%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 49</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 74</p></td></tr><tr><td style="vertical-align:bottom;width:63.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Balance - December&#160;31, 2019</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.44%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 1,861</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.57%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.67%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 33</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.44%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 1,894</p></td></tr><tr><td style="vertical-align:bottom;width:63.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Other comprehensive income (loss)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 5</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.57%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.67%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (53)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (48)</p></td></tr><tr><td style="vertical-align:bottom;width:63.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Balance - December&#160;31, 2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.44%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 1,866</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.57%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.67%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (20)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.44%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 1,846</p></td></tr><tr><td style="vertical-align:bottom;width:63.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Other comprehensive income (loss)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (52)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.57%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.67%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (311)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (363)</p></td></tr><tr><td style="vertical-align:bottom;width:63.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Balance - December&#160;31, 2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.44%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 1,814</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.57%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.67%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (331)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.44%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 1,483</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company did not allocate additional tax expense (benefit) to other comprehensive income (loss) for all years presented as the Company is in a full valuation allowance position such that a deferred tax asset related to amounts recognized in other comprehensive income is not regarded as realizable on a more-likely-than-not basis.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Preferred Stock</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Board of Directors has authority under the Company&#8217;s Certificate of Incorporation to issue shares of preferred stock, par value $0.01, with voting and economic rights to be determined by the Board of Directors. As of December 31, 2021, no preferred shares have been issued.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Treasury Stock</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">On December 11, 2017, the Company&#8217;s Board of Directors authorized a program to repurchase up to $100 million of the Company&#8217;s common stock to be completed through December 11, 2019. At the end of the program, $14.3 million of the $100 million had been utilized. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company records treasury stock purchases under the cost method using the first-in, first-out (&#8220;FIFO&#8221;) method. Upon reissuance of treasury stock, amounts in excess of the acquisition cost are credited to additional paid-in capital. If the Company reissues treasury stock at an amount below its acquisition cost and if additional paid-in capital associated with prior treasury stock transactions is insufficient to cover the difference between the acquisition cost and the reissue price, this difference is charged to accumulated deficit.</p><span></span>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The entire disclosure for shareholders' equity comprised of portions attributable to the parent entity and noncontrolling interest, including other comprehensive income. Includes, but is not limited to, balances of common stock, preferred stock, additional paid-in capital, other capital and retained earnings, accumulated balance for each classification of other comprehensive income and amount of comprehensive income.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section 50<br> -Paragraph 13<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=123467817&amp;loc=SL123496158-112644<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section 50<br> -Paragraph 13<br> -URI http://asc.fasb.org/extlink&amp;oid=123467817&amp;loc=SL123496158-112644<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section 50<br> -Paragraph 14<br> -Subparagraph (c)<br> -URI http://asc.fasb.org/extlink&amp;oid=123467817&amp;loc=SL123496171-112644<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section 50<br> -Paragraph 14<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=123467817&amp;loc=SL123496171-112644<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.3-04)<br> -URI http://asc.fasb.org/extlink&amp;oid=120397183&amp;loc=d3e187085-122770<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section 50<br> -Paragraph 18<br> -Subparagraph (d)<br> -URI http://asc.fasb.org/extlink&amp;oid=123467817&amp;loc=SL123496189-112644<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section 50<br> -Paragraph 13<br> -Subparagraph (g)<br> -URI http://asc.fasb.org/extlink&amp;oid=123467817&amp;loc=SL123496158-112644<br><br>Reference 8: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -URI http://asc.fasb.org/topic&amp;trid=2208762<br><br>Reference 9: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section 50<br> -Paragraph 18<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=123467817&amp;loc=SL123496189-112644<br><br>Reference 10: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section 50<br> -Paragraph 13<br> -Subparagraph (h)<br> -URI http://asc.fasb.org/extlink&amp;oid=123467817&amp;loc=SL123496158-112644<br><br>Reference 11: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section 50<br> -Paragraph 14<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=123467817&amp;loc=SL123496171-112644<br><br>Reference 12: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section 50<br> -Paragraph 18<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=123467817&amp;loc=SL123496189-112644<br><br>Reference 13: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section 50<br> -Paragraph 16<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=123467817&amp;loc=SL123496180-112644<br><br>Reference 14: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section 50<br> -Paragraph 13<br> -Subparagraph (i)<br> -URI http://asc.fasb.org/extlink&amp;oid=123467817&amp;loc=SL123496158-112644<br><br>Reference 15: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(e)(1))<br> -URI http://asc.fasb.org/extlink&amp;oid=120395691&amp;loc=d3e23780-122690<br></p></div>
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<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674062477352">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Stock Plans<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2021</div></th></tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract', window );"><strong>Stock Plans</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DisclosureOfCompensationRelatedCostsShareBasedPaymentsTextBlock', window );">Stock Plans</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note 13 &#8212; Stock Plans</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Share-based incentive awards are provided to employees under the terms of the Company&#8217;s equity incentive compensation plans (the &#8220;Plans&#8221;), which are administered by the Compensation Committee of the Board of Directors. The 2019 Plan originated as the 2010 Stock Incentive Plan and was originally approved by the Company&#8217;s shareholders in May 2010. This Plan was subsequently amended, as approved by shareholders, in 2013, 2016, and 2019 (at which time the Plan was renamed the 2019 Stock Incentive Plan (as amended to date, the &#8220;2019 Plan&#8221;)). The Company&#8217;s employees, non-employee directors, and consultants are eligible to receive awards under the 2019 Plan, which can include non-qualified stock options, incentive stock options, RSAs, RSUs, PSAs, PSUs, share appreciation rights, </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">dividend equivalent rights, or any combination thereof. The Company settles awards under the Plans with newly issued shares or with shares held in treasury.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">In 2013, the Board of Directors granted equity awards to certain employees under the Company&#8217;s 2013 Inducement Stock Incentive Plan (the &#8220;Inducement Plan&#8221;). The Company issued </span><span style="font-size:10pt;">124,500</span><span style="font-size:10pt;"> stock option shares and </span><span style="font-size:10pt;">87,000</span><span style="font-size:10pt;"> RSUs under this plan. Stock options under this plan vest over a </span><span style="font-size:10pt;">three year</span><span style="font-size:10pt;"> period and have a </span><span style="font-size:10pt;">10-year</span><span style="font-size:10pt;"> term, and RSUs under this plan vest over a </span><span style="-sec-ix-hidden:Hidden_djJaia4sV0eMPU_iBjU1ow;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">two</span></span><span style="font-size:10pt;"> or </span><span style="font-size:10pt;">four year</span><span style="font-size:10pt;"> period. At December 31, 2013, the Inducement Plan was merged into the 2019 Plan and is considered an inactive plan with </span><span style="font-size:10pt;">no</span><span style="font-size:10pt;"> further shares available for grant. At December 31, 2021, there are </span><span style="font-size:10pt;">2,000</span><span style="font-size:10pt;"> option shares and </span><span style="font-size:10pt;">no</span><span style="font-size:10pt;"> RSUs outstanding under the Inducement Plan.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">The Company is authorized to issue up to </span><span style="font-size:10pt;">13.3</span><span style="font-size:10pt;"> million shares under the 2019 Plan. Option awards are granted with an exercise price equal to the closing price of the Company&#8217;s common stock on the trading day prior to the date of grant; option awards generally vest over a </span><span style="font-size:10pt;">three year</span><span style="font-size:10pt;"> period and have a </span><span style="-sec-ix-hidden:Hidden_MjZTm5D10UiD7Ewg4_02Ew;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">seven</span></span><span style="font-size:10pt;"> or </span><span style="font-size:10pt;">ten year</span><span style="font-size:10pt;"> term. RSAs and RSUs generally vest over </span><span style="-sec-ix-hidden:Hidden_xrGOZ4M_GkODaWr_-MAcEg;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">one</span></span><span style="font-size:10pt;"> to </span><span style="font-size:10pt;">five years</span><span style="font-size:10pt;">. Certain option and share awards provide for accelerated vesting if there is a change in control, as defined in the 2019 Plan. At December 31, 2021, there are </span><span style="font-size:10pt;">0.4</span><span style="font-size:10pt;"> million option shares and </span><span style="font-size:10pt;">0.7</span><span style="font-size:10pt;"> million RSUs and PSUs outstanding under the 2019 Plan.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">The Company is authorized to issue up to </span><span style="font-size:10pt;">2.25</span><span style="font-size:10pt;"> million shares under the approved 2016 employee stock purchase plan (&#8220;ESPP&#8221;), including additional shares authorized under plan amendments approved by shareholders in 2019 and 2021. Under the ESPP, substantially all employees in the U.S. may purchase the Company&#8217;s common stock through payroll deductions at a price equal to </span><span style="font-size:10pt;">85</span><span style="font-size:10pt;"> percent of the lower of the fair market value of the Company&#8217;s common stock at the beginning or end of each </span><span style="font-size:10pt;">six-month</span><span style="font-size:10pt;"> offer period, as defined in the ESPP, and subject to certain limits. The ESPP was approved by the Company&#8217;s shareholders. </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Shares Reserved for Future Issuance</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">At December 31, 2021, the Company has 3.4 million shares reserved to cover exercises of outstanding stock options, vesting of RSUs, and additional grants under the 2019 Plan.<span style="font-size:12pt;"> </span>At December 31, 2021, the Company has 0.8 million shares reserved to cover future issuances under the ESPP Plan.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Share-Based Compensation</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company recognized share-based compensation in the following line items in the Consolidated Statements of Operations for the periods indicated:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:61.97%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.62%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.65%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:61.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:33.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">For the year ended December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:61.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.91%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.92%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.94%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2019</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="11" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:61.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:33.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:61.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Cost of sales</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 2,373</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 1,870</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.65%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 1,903</p></td></tr><tr><td style="vertical-align:bottom;width:61.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Research and development</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 3,850</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 2,900</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 3,340</p></td></tr><tr><td style="vertical-align:bottom;width:61.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Selling, general, and administrative</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 9,026</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 7,933</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.65%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 9,630</p></td></tr><tr><td style="vertical-align:bottom;width:61.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Restructuring</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.62%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.64%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.65%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 397</p></td></tr><tr><td style="vertical-align:bottom;width:61.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.62%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 15,249</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.64%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 12,703</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.65%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 15,270</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company did not realize any tax benefits associated with share-based compensation for the years ended December 31, 2021, 2020, and 2019 due to the full valuation allowance on its U.S. deferred tax assets. See Note 16, &#8220;Income Taxes&#8221; for additional information. The Company capitalized an immaterial amount of share-based compensation into inventory for the years ended December 31, 2021, 2020, and 2019.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Unrecognized share-based compensation costs at December 31, 2021 are summarized below:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:69.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Unrecognized</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Weighted</b></p></td></tr><tr><td style="vertical-align:bottom;width:69.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Share-Based</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Average&#160;Period</b></p></td></tr><tr><td style="vertical-align:bottom;width:69.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Compensation</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Expected&#160;to&#160;be</b></p></td></tr><tr><td style="vertical-align:bottom;width:69.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.71%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Costs</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.67%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Recognized</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="6" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:69.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="3" style="vertical-align:bottom;white-space:nowrap;width:14.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in years)</i></p></td></tr><tr><td style="vertical-align:bottom;width:69.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Restricted stock units</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 2,064</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.67%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="font-size:10pt;"> 1.9</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Restricted stock awards</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 16,791</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="font-size:10pt;"> 1.9</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Performance share units</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.3%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 5,363</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.67%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="font-size:10pt;"> 2.1</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Total unrecognized share-based compensation cost</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.3%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 24,218</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="font-size:10pt;"> 1.9</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Stock Option Awards</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Stock options are awards issued to employees that entitle the holder to purchase shares of the Company&#8217;s stock at a fixed price. The following table summarizes the equity activity related to stock options:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:71.5%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.6%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:10.92%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:71.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Weighted&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:71.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Number&#160;of</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Average</b></p></td></tr><tr><td style="vertical-align:bottom;width:71.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Shares</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.53%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Exercise&#160;Price</b></p></td></tr><tr><td style="vertical-align:bottom;width:71.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:71.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;white-space:pre-wrap;">Balance -  December&#160;31, 2018</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 1,222</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.6%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.92%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 34.80</p></td></tr><tr><td style="vertical-align:bottom;width:71.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Expired</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (103)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 33.97</p></td></tr><tr><td style="vertical-align:bottom;width:71.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;white-space:pre-wrap;">Balance -  December&#160;31, 2019</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 1,119</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.6%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.92%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 34.88</p></td></tr><tr><td style="vertical-align:bottom;width:71.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Expired</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (389)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 34.15</p></td></tr><tr><td style="vertical-align:bottom;width:71.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;white-space:pre-wrap;">Balance -  December&#160;31, 2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 730</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.6%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.92%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 35.26</p></td></tr><tr><td style="vertical-align:bottom;width:71.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Exercised</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (2)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 23.36</p></td></tr><tr><td style="vertical-align:bottom;width:71.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Expired</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (285)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.6%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.92%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 40.16</p></td></tr><tr><td style="vertical-align:bottom;width:71.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;white-space:pre-wrap;">Balance -  December&#160;31, 2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 443</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 32.15</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The following table summarizes stock option information at December 31, 2021:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:25.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.79%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:16.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:25.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="9" style="vertical-align:bottom;white-space:nowrap;width:71.09%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Options&#160;Outstanding and Exercisable</b></p></td></tr><tr><td style="vertical-align:bottom;width:25.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.79%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:16.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Weighted</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:15.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:25.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Aggregate</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:16.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Average</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:15.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Weighted</b></p></td></tr><tr><td style="vertical-align:bottom;width:25.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Intrinsic</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:16.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Remaining</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:15.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Average</b></p></td></tr><tr><td style="vertical-align:bottom;width:25.48%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;margin:0pt;"><b style="font-weight:bold;">Range&#160;of&#160;Exercise&#160;Prices</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Shares</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.87%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Value</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:16.7%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Contractual&#160;Life</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:15.48%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Exercise&#160;Price</b></p></td></tr><tr><td style="vertical-align:bottom;width:25.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:16.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;years)</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:15.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:25.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$20.00 - $30.00</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 12</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.79%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:16.7%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"><span style="font-size:8pt;"> 1.6</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="-sec-ix-hidden:Hidden_fJ7s2Z2xnEqsdcmd3aYg7g;"><span style="font-family:'Times New Roman','Times','serif';font-size:8pt;font-style:normal;font-weight:normal;">$</span></span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 29.26</p></td></tr><tr><td style="vertical-align:bottom;width:25.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$30.01 - $40.00</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 431</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.79%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:16.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"><span style="-sec-ix-hidden:Hidden_Od6T0xFOwEWWIugp-IBsQQ;"><span style="font-family:'Times New Roman','Times','serif';font-size:8pt;font-style:normal;font-weight:normal;"> 0.9</span></span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 32.22</p></td></tr><tr><td style="vertical-align:bottom;width:25.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.13%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 443</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.79%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:16.7%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"><span style="-sec-ix-hidden:Hidden_wySSYfbG00Wt32ljky0kfw;"><span style="font-family:'Times New Roman','Times','serif';font-size:8pt;font-style:normal;font-weight:normal;"> 1.0</span></span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 32.15</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="background:#ffffff;">There were&#160;</span><span style="background:#ffffff;">no</span><span style="background:#ffffff;">&#160;unvested options outstanding as of December 31, 2021.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;background:#ffffff;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The following table summarizes information on options exercised for the periods indicated:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:69.29%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:69.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:28.64%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Year ended December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:69.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.17%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.17%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2019</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="10" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:69.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:28.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:69.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Cash received from options exercised</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 37</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td></tr><tr><td style="vertical-align:bottom;width:69.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Intrinsic value of options exercised</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 6</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">RSAs, RSUs, PSAs, PSUs</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">RSAs are stock awards issued to employees and directors that are subject to specified restrictions and a risk of forfeiture. RSUs are stock awards issued to employees that entitle the holder to receive shares of common stock as the awards vest. PSAs and PSUs are awards that result in an issuance of shares of common stock to employees if certain performance or market conditions are achieved. All of these awards typically vest over </span><span style="-sec-ix-hidden:Hidden_4XeCJSX0U0my8ezkiVd-YA;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">one</span></span><span style="font-size:10pt;"> to </span><span style="font-size:10pt;">four years</span><span style="font-size:10pt;"> and vesting is subject to the employee's continued service with the Company and, in the case of performance awards, meeting certain performance or market conditions. The fair value of the awards is determined and fixed based on the closing price of the Company&#8217;s common stock on the trading day prior to the date of grant, or, in the case of performance awards with market conditions, fair value is determined using a Monte Carlo simulation. </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The following table summarizes the equity activity of non-vested restricted shares and performance shares:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:74.01%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.71%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:74.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Weighted</b></p></td></tr><tr><td style="vertical-align:bottom;width:74.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Average</b></p></td></tr><tr><td style="vertical-align:bottom;width:74.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Number&#160;of</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Grant&#160;Date</b></p></td></tr><tr><td style="vertical-align:bottom;width:74.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Shares</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.01%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Fair&#160;Value</b></p></td></tr><tr><td style="vertical-align:bottom;width:74.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:74.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;white-space:pre-wrap;">Balance -  December&#160;31, 2018</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 2,218</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 20.74</p></td></tr><tr><td style="vertical-align:bottom;width:74.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Granted</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 1,107</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 11.53</p></td></tr><tr><td style="vertical-align:bottom;width:74.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Performance award adjustments</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (25)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 28.91</p></td></tr><tr><td style="vertical-align:bottom;width:74.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Vested</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (768)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 21.77</p></td></tr><tr><td style="vertical-align:bottom;width:74.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Forfeited</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (275)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 18.48</p></td></tr><tr><td style="vertical-align:bottom;width:74.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;white-space:pre-wrap;">Balance -  December&#160;31, 2019</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 2,257</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 16.20</p></td></tr><tr><td style="vertical-align:bottom;width:74.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Granted</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 1,054</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 9.53</p></td></tr><tr><td style="vertical-align:bottom;width:74.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Performance award adjustments</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (51)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 30.94</p></td></tr><tr><td style="vertical-align:bottom;width:74.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Vested</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (798)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 16.01</p></td></tr><tr><td style="vertical-align:bottom;width:74.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Forfeited</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (422)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 14.87</p></td></tr><tr><td style="vertical-align:bottom;width:74.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;white-space:pre-wrap;">Balance -  December&#160;31, 2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 2,040</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 12.73</p></td></tr><tr><td style="vertical-align:bottom;width:74.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Granted</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 1,031</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 24.26</p></td></tr><tr><td style="vertical-align:bottom;width:74.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Performance award adjustments</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 159</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 18.38</p></td></tr><tr><td style="vertical-align:bottom;width:74.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Vested</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (1,014)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 15.50</p></td></tr><tr><td style="vertical-align:bottom;width:74.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Forfeited</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (133)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 15.08</p></td></tr><tr><td style="vertical-align:bottom;width:74.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;white-space:pre-wrap;">Balance -  December&#160;31, 2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 2,083</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 17.33</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The total fair value of shares that vested during the years ended December 31, 2021, 2020, and 2019 was $22.8 million, $9.0 million, and $8.8 million, respectively. For performance awards, the final number of shares earned will vary depending on the achievement of the actual results relative to the performance or market conditions. Each performance award is included in the table above at the grant date target share amount until the end of the performance period if not previously forfeited. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The fair value of performance awards with market conditions is estimated on the date of grant using a Monte Carlo simulation. Estimates of fair value are not intended to predict actual future events or the value ultimately realized by employees who receive these awards. The weighted average fair value and the assumptions used in calculating such values during fiscal years 2021, 2020, and 2019 for performance awards with market conditions were based on estimates at the date of grant as follows:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:67.07%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.71%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:6.33%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:6.33%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:6.48%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:67.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:28.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Year ended December&#160;31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:7.36%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;width:7.37%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;width:8.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2019</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Weighted average fair value</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;width:6.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 27.81</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;width:6.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 10.59</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;width:6.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 16.45</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Dividend yield</p></td><td style="vertical-align:bottom;width:1.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 0</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 0</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 0</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td></tr><tr><td style="vertical-align:bottom;width:67.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Expected volatility factor<sup style="font-family:'Calibri','Helvetica','sans-serif';font-size:8.25pt;line-height:100%;top:0pt;vertical-align:top;">(1)</sup></p></td><td style="vertical-align:bottom;width:1.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 63</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 60</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;width:1.72%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 53</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td></tr></table><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr><td style="vertical-align:bottom;width:67.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Risk-free interest rate<sup style="font-family:'Calibri','Helvetica','sans-serif';font-size:8.25pt;line-height:100%;top:0pt;vertical-align:top;">(2)</sup></p></td><td style="vertical-align:bottom;width:1.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 0.34</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 0.54</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 2.37</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td></tr><tr><td style="vertical-align:bottom;width:67.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Expected life (in years)<sup style="font-family:'Calibri','Helvetica','sans-serif';font-size:8.25pt;line-height:100%;top:0pt;vertical-align:top;">(3)</sup></p></td><td style="vertical-align:bottom;width:1.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="font-size:10pt;"> 3.0</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="font-size:10pt;"> 3.0</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;width:1.72%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="font-size:10pt;"> 2.8</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr></table><div style="font-family:'Times New Roman','Times','serif';font-size:9.0pt;margin-bottom:0pt;margin-top:0pt;min-height:1.19em;position:relative;width:100%;"><div style="background-color:#000000;height:1pt;position:relative;top:0.6em;width:25.0%;border:none;margin:0 auto 0 0;"/></div><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Times New Roman','Times','serif';font-size:9pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">(1)</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:9pt;font-style:normal;font-weight:normal;">Expected volatility is measured using historical daily price changes of the Company&#8217;s stock over the respective expected term.</span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Times New Roman','Times','serif';font-size:9pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">(2)</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:9pt;font-style:normal;font-weight:normal;">The risk-free rate for periods within the contractual term is based on the U.S. Treasury yield curve in effect at the time of grant.</span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Times New Roman','Times','serif';font-size:9pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">(3)</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:9pt;font-style:normal;font-weight:normal;">The expected life is the number of years the Company estimates that the awards will be outstanding prior to exercise. </span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Employee Stock Purchase Plan</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">For the years ended December 31, 2021, 2020, and 2019 the Company received cash proceeds of $3.4 million, $2.9 million, and $3.1 million, and issued shares of 196,024, 254,703, and 395,941, respectively, under the ESPP Plan. The weighted average estimated values of employee purchase rights as well as the weighted average assumptions that were used in calculating such values during fiscal years 2021, 2020, and 2019 were based on estimates at the date of grant as follows:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;min-height:0.0pt;margin:0pt;"><span style="font-size:0pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:67.21%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.35%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:6.14%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:3.43%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:6.15%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:3.43%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:6.15%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:67.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:29.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Year ended December&#160;31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:67.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:7.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;width:7.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;width:7.53%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2019</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:67.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Weighted average fair value</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.35%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;width:6.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 5.90</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;width:6.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 4.81</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.37%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;width:6.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 2.96</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Dividend yield</p></td><td style="vertical-align:bottom;width:1.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 0</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 0</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;width:1.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 0</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%</p></td></tr><tr><td style="vertical-align:bottom;width:67.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Expected volatility factor<sup style="font-size:7.5pt;line-height:100%;top:0pt;vertical-align:top;">(1)</sup></p></td><td style="vertical-align:bottom;width:1.35%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 52</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 70</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;width:1.37%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 60</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%</p></td></tr><tr><td style="vertical-align:bottom;width:67.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Risk-free interest rate<sup style="font-size:7.5pt;line-height:100%;top:0pt;vertical-align:top;">(2)</sup></p></td><td style="vertical-align:bottom;width:1.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 0.07</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 0.95</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;width:1.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 2.41</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%</p></td></tr><tr><td style="vertical-align:bottom;width:67.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Expected life (in years)<sup style="font-size:7.5pt;line-height:100%;top:0pt;vertical-align:top;">(3)</sup></p></td><td style="vertical-align:bottom;width:1.35%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="font-size:10pt;"> 0.5</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="font-size:10pt;"> 0.5</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;width:1.37%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="font-size:10pt;"> 0.5</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr></table><div style="font-family:'Times New Roman','Times','serif';font-size:9.0pt;margin-bottom:0pt;margin-top:0pt;min-height:1.19em;position:relative;width:100%;"><div style="background-color:#000000;height:1pt;position:relative;top:0.6em;width:25.0%;border:none;margin:0 auto 0 0;"/></div><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Times New Roman','Times','serif';font-size:9pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">(1)</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:9pt;font-style:normal;font-weight:normal;">Expected volatility is measured using historical daily price changes of the Company&#8217;s stock over the respective expected term.</span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Times New Roman','Times','serif';font-size:9pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">(2)</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:9pt;font-style:normal;font-weight:normal;">The risk-free rate for periods within the contractual term is based on the U.S. Treasury yield curve in effect at the time of grant.</span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Times New Roman','Times','serif';font-size:9pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">(3)</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:9pt;font-style:normal;font-weight:normal;">The expected life is the number of years the Company estimates that the purchase rights will be outstanding prior to exercise. </span></td></tr></table><span></span>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The entire disclosure for share-based payment arrangement.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -URI http://asc.fasb.org/topic&amp;trid=2228938<br></p></div>
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<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674063635752">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Retirement Plans<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
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<tr><th class="th"><div>Dec. 31, 2021</div></th></tr>
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<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note 14 &#8212; Retirement Plans</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">The Company maintains a defined contribution plan for the benefit of its U.S. employees. The plan is intended to be tax qualified and contains a qualified cash or deferred arrangement as described under Section 401(k) of the Internal Revenue Code. Eligible participants may elect to contribute a percentage of their base compensation, and the Company may make matching contributions, generally equal to </span><span style="font-size:10pt;">fifty</span><span style="font-size:10pt;"> </span><span style="font-size:10pt;">cents for every dollar employees contribute, up to </span><span style="font-size:10pt;">three</span><span style="font-size:10pt;"> percent of the employee&#8217;s eligible compensation, as limited by current Internal Revenue Code regulations. Generally, the plan calls for vesting in the Company contributions over the initial </span><span style="font-size:10pt;">five years</span><span style="font-size:10pt;"> of a participant&#8217;s employment. The Company provided employer contributions associated with this plan of approximately </span><span style="font-size:10pt;">$2.6</span><span style="font-size:10pt;"> million, </span><span style="font-size:10pt;">$2.4</span><span style="font-size:10pt;"> million, and </span><span style="font-size:10pt;">$2.4</span><span style="font-size:10pt;">&#160;million for the years ended December 31, 2021, 2020, and 2019, respectively.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><span></span>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The entire disclosure for retirement benefits.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 715<br> -SubTopic 20<br> -Section 55<br> -Paragraph 17<br> -URI http://asc.fasb.org/extlink&amp;oid=123450688&amp;loc=d3e4179-114921<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 715<br> -SubTopic 20<br> -Section S99<br> -Paragraph 2<br> -URI http://asc.fasb.org/extlink&amp;oid=21916913&amp;loc=d3e273930-122802<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 715<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (d)(i)<br> -URI http://asc.fasb.org/extlink&amp;oid=123447040&amp;loc=d3e1928-114920<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 715<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (o)<br> -URI http://asc.fasb.org/extlink&amp;oid=123447040&amp;loc=d3e1928-114920<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 715<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (p)<br> -URI http://asc.fasb.org/extlink&amp;oid=123447040&amp;loc=d3e1928-114920<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 715<br> -SubTopic 70<br> -Section 50<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=49170846&amp;loc=d3e28014-114942<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 715<br> -URI http://asc.fasb.org/topic&amp;trid=2235017<br><br>Reference 8: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 715<br> -SubTopic 60<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (c)<br> -URI http://asc.fasb.org/extlink&amp;oid=6414203&amp;loc=d3e39689-114964<br><br>Reference 9: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 715<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (d)(iv)(03)<br> -URI http://asc.fasb.org/extlink&amp;oid=123447040&amp;loc=d3e1928-114920<br><br>Reference 10: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 715<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (q)<br> -URI http://asc.fasb.org/extlink&amp;oid=123447040&amp;loc=d3e1928-114920<br><br>Reference 11: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 715<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (r)(1)<br> -URI http://asc.fasb.org/extlink&amp;oid=123447040&amp;loc=d3e1928-114920<br><br>Reference 12: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 715<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (d)(iii)<br> -URI http://asc.fasb.org/extlink&amp;oid=123447040&amp;loc=d3e1928-114920<br><br>Reference 13: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 715<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (l)<br> -URI http://asc.fasb.org/extlink&amp;oid=123447040&amp;loc=d3e1928-114920<br><br>Reference 14: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 715<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (r)(2)<br> -URI http://asc.fasb.org/extlink&amp;oid=123447040&amp;loc=d3e1928-114920<br></p></div>
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<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674062407992">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Dispositions<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2021</div></th></tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DiscontinuedOperationsAndDisposalGroupsAbstract', window );"><strong>Dispositions</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DisposalGroupsIncludingDiscontinuedOperationsDisclosureTextBlock', window );">Dispositions</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note 15 &#8212; Dispositions</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">In the fourth quarter of 2019, the Company determined that one of its non-core product lines (the &#8220;disposal group&#8221;) met the held for sale criteria. During the second quarter of 2020, the Company completed the sale of this product line for approximately </span><span style="font-size:10pt;">$11.4</span><span style="font-size:10pt;"> million, with approximately </span><span style="font-size:10pt;">85%</span><span style="font-size:10pt;"> of the transaction price received upon closing, and </span><span style="font-size:10pt;">15%</span><span style="font-size:10pt;"> held in escrow for a period of </span><span style="font-size:10pt;">18 months</span><span style="font-size:10pt;"> and included within &#8220;Prepaid expenses and other current assets&#8221; in the Consolidated Balance Sheet as of December 31, 2020 and subsequently collected in 2021. Long-lived assets and definite-lived intangible assets were not depreciated or amortized while classified as held for sale. The sale of this disposal group did not represent a strategic shift that will have a material effect on the Company&#8217;s operations and financial results, nor is it considered a component of the Company, and as such it did not meet the criteria to be reported as discontinued operations. </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">For the year ended December 31, 2019, the Company recorded a non-cash impairment charge on these assets held for sale of $4.0 million, included in &#8220;Asset impairment&#8221; in the Consolidated Statements of Operations, in order to measure the disposal group at the lower of its carrying value or fair value less costs to sell, which resulted in a corresponding held </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">for sale valuation allowance on its assets held for sale in the Consolidated Balance Sheet. During the second quarter of 2020, the Company recorded additional impairment charges of $0.3&#160;million related to the finalization of the sale of this disposal group.&#160;</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The major classes of assets that were sold are as follows:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;min-height:0.0pt;margin:0pt;"><span style="font-size:0pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:85.52%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:80.53%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.05%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:14.02%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:80.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:80.53%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Net assets sold:</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';">&#160;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:16.08%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td></tr><tr><td style="vertical-align:top;width:80.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Inventories</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 6,311</p></td></tr><tr><td style="vertical-align:top;width:80.53%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Property, plant, and equipment, net</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 372</p></td></tr><tr><td style="vertical-align:top;width:80.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Intangible assets, net</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 6,546</p></td></tr><tr><td style="vertical-align:top;width:80.53%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Goodwill</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 2,359</p></td></tr><tr><td style="vertical-align:top;width:80.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Deferred revenue</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.05%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.02%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (59)</p></td></tr><tr><td style="vertical-align:top;width:80.53%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;white-space:pre-wrap;">    Total net assets sold</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 15,529</p></td></tr><tr><td style="vertical-align:top;width:80.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Net proceeds after costs to sell</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.05%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.02%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (11,228)</p></td></tr><tr><td style="vertical-align:top;width:80.53%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;white-space:pre-wrap;">    Total impairment on sale of disposal group</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.05%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.02%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 4,301</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p><span></span>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The entire disclosure related to a disposal group. Includes, but is not limited to, a discontinued operation, disposal classified as held-for-sale or disposed of by means other than sale or disposal of an individually significant component.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 360<br> -URI http://asc.fasb.org/topic&amp;trid=2155823<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 205<br> -SubTopic 20<br> -URI http://asc.fasb.org/subtopic&amp;trid=2122178<br></p></div>
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<td><strong> Name:</strong></td>
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<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
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<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674154799176">
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<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Income Taxes<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2021</div></th></tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncomeTaxDisclosureAbstract', window );"><strong>Income Taxes</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncomeTaxDisclosureTextBlock', window );">Income Taxes</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note 16 &#8212; Income Taxes </b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The amounts of income (loss) before income taxes attributable to domestic and foreign operations were as follows:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:62.38%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.45%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.45%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:62.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:35.55%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Year ended December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:62.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.95%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2019</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="10" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:62.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:35.55%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:62.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Domestic</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 23,561</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (10,292)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (78,486)</p></td></tr><tr><td style="vertical-align:bottom;width:62.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Foreign</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 2,119</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.45%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 1,828</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.45%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 530</p></td></tr><tr><td style="vertical-align:bottom;width:62.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Total</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 25,680</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.45%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (8,464)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.45%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (77,956)</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Significant components of the expense (benefit) for income taxes consisted of the following:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:69.23%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.89%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:69.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:28.7%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Year ended December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:69.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.17%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.19%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.21%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2019</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="10" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:69.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:28.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:69.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Current:</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.89%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Federal</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td></tr><tr><td style="vertical-align:bottom;width:69.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Foreign</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.89%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 183</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 22</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 304</p></td></tr><tr><td style="vertical-align:bottom;width:69.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">State and local</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 110</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 204</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 113</p></td></tr><tr><td style="vertical-align:bottom;width:69.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;">Total current expense (benefit) for income taxes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.89%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 293</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 226</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 417</p></td></tr><tr><td style="vertical-align:bottom;width:69.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Deferred:</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Federal</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.89%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 119</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 136</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 162</p></td></tr><tr><td style="vertical-align:bottom;width:69.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Foreign</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (507)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (320)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 116</p></td></tr><tr><td style="vertical-align:bottom;width:69.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">State and local</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.89%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (263)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (115)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 82</p></td></tr><tr><td style="vertical-align:bottom;width:69.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;">Total deferred expense (benefit) for income taxes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (651)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (299)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 360</p></td></tr><tr><td style="vertical-align:bottom;width:69.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Total expense (benefit) for income taxes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.89%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (358)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (73)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 777</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The income tax expense (benefit) was reconciled to the tax expense computed at the U.S. federal statutory tax rate as follows:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;min-height:0.0pt;margin:0pt;"><span style="font-size:0pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"><tr style="height:1pt;"><td style="vertical-align:middle;width:64.17%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:50%;transform:translate(0,-50%);width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.45%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:64.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:33.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Year ended December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:64.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.45%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.45%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2019</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="10" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:64.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:33.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:middle;width:64.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Income tax expense (benefit) at U.S. statutory rates</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 5,393</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (1,777)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (16,396)</p></td></tr><tr><td style="vertical-align:middle;width:64.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">State taxes, net of U.S. federal impact</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (607)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (121)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (835)</p></td></tr><tr><td style="vertical-align:middle;width:64.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Effect of international operations</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 609</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (131)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 785</p></td></tr><tr><td style="vertical-align:middle;width:64.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Research and development tax credit</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (3,964)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 726</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (1,692)</p></td></tr><tr><td style="vertical-align:middle;width:64.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Net change in valuation allowance</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (2,389)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 388</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 15,098</p></td></tr><tr><td style="vertical-align:middle;width:64.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Change in accrual for unrecognized tax benefits</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 398</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (6)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 1,232</p></td></tr><tr><td style="vertical-align:middle;width:64.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Share-based compensation</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 1,208</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 2,248</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 1,947</p></td></tr><tr><td style="vertical-align:middle;width:64.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Asset impairment</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 728</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 495</p></td></tr><tr><td style="vertical-align:middle;width:64.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Partial extinguishment of 2023 Notes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (1,090)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (2,292)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td></tr><tr><td style="vertical-align:middle;width:64.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Other</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 84</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 164</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.45%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 143</p></td></tr><tr><td style="vertical-align:middle;width:64.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Total expense (benefit) for income taxes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (358)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (73)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.45%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 777</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Deferred income taxes reflect the effect of temporary differences between the carrying amounts of assets and liabilities recognized for financial reporting purposes and the amounts recognized for tax purposes. The tax effects of the temporary differences were as follows:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;min-height:0.0pt;margin:0pt;"><span style="font-size:0pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"><tr style="height:1pt;"><td style="vertical-align:middle;width:71.8%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:50%;transform:translate(0,-50%);width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:71.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:26.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:71.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.02%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.04%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="7" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:71.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:26.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td></tr><tr><td style="vertical-align:middle;width:71.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Deferred tax assets:&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:middle;width:71.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Inventory valuation</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 11,822</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 10,949</p></td></tr><tr><td style="vertical-align:middle;width:71.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Net operating losses</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 38,816</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 51,260</p></td></tr><tr><td style="vertical-align:middle;width:71.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Credit carry forwards</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 57,810</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 54,160</p></td></tr><tr><td style="vertical-align:middle;width:71.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Warranty and installation accruals</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 1,730</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 1,045</p></td></tr><tr><td style="vertical-align:middle;width:71.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Share-based compensation</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 4,033</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 4,587</p></td></tr><tr><td style="vertical-align:middle;width:71.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Customer deposits and deferred revenue</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 9,908</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 10,982</p></td></tr><tr><td style="vertical-align:middle;width:71.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Operating leases</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 8,464</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 2,281</p></td></tr><tr><td style="vertical-align:middle;width:71.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Other</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 5,880</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 4,741</p></td></tr><tr><td style="vertical-align:middle;width:71.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Total deferred tax assets</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 138,463</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 140,005</p></td></tr><tr><td style="vertical-align:middle;width:71.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Valuation allowance</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (116,054)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (118,443)</p></td></tr><tr><td style="vertical-align:middle;width:71.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Net deferred tax assets</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 22,409</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 21,562</p></td></tr><tr><td style="vertical-align:middle;width:71.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:middle;width:71.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Deferred tax liabilities:&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:middle;width:71.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Purchased intangible assets</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 6,633</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 7,227</p></td></tr><tr><td style="vertical-align:middle;width:71.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Convertible Senior Notes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 10,018</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 13,674</p></td></tr><tr><td style="vertical-align:middle;width:71.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Operating leases</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 6,539</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 2,241</p></td></tr><tr><td style="vertical-align:middle;width:71.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Depreciation</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 2,372</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 2,220</p></td></tr><tr><td style="vertical-align:middle;width:71.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Total deferred tax liabilities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 25,562</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 25,362</p></td></tr><tr><td style="vertical-align:middle;width:71.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Net deferred taxes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (3,153)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (3,800)</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company is no longer permanently reinvesting future earnings from certain foreign jurisdictions and has accrued for foreign tax withholdings of $0.8 million on its unremitted earnings as of December 31, 2021.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">At December 31, 2021, the Company had U.S. federal NOL carryforwards of approximately $165.8 million, of which $6.9 million have an indefinite carryforward period, with the remaining expiring in 2036, if not utilized. At December 31, 2021, the Company had U.S. federal research and development credits of $32.1 million that will expire between 2022 and 2041. The Company also has $9.4 million of foreign tax credits that expire in 2027. Additionally, the Company has state and local NOL carryforwards of approximately $104.7 million (a net deferred tax asset of $6.8 million, net of </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">federal tax benefits and before the valuation allowance) that will expire between 2022 and 2040. Finally, the Company has state credits of $30.6 million, some of which are indefinite and others that will expire between 2024 and 2036.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company makes assessments to estimate if sufficient taxable income will be generated in the future to use existing deferred tax assets. As of December 31, 2021, the Company continued to have a cumulative loss in recent years with respect to its U.S. operations. Based on this negative objective evidence, the Company continues to maintain a valuation allowance against its U.S. deferred tax assets. During 2021, the Company&#8217;s valuation allowance decreased by approximately $2.4 million.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">A roll-forward of the Company&#8217;s uncertain tax positions for all U.S. federal, state, and foreign tax jurisdictions was as follows:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;min-height:0.0pt;margin:0pt;"><span style="font-size:0pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:63.94%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.67%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:63.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:33.99%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:63.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.95%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.95%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2019</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="10" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:63.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:33.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:63.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Balance at beginning of year</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 12,363</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.67%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 12,369</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 11,137</p></td></tr><tr><td style="vertical-align:bottom;width:63.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Additions for tax positions related to current year</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 2,642</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 1,217</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 3,075</p></td></tr><tr><td style="vertical-align:bottom;width:63.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Additions for tax positions related to prior years</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 50</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.67%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 47</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 21</p></td></tr><tr><td style="vertical-align:bottom;width:63.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Reductions for tax positions related to prior years</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (1,196)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (1,166)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (1,814)</p></td></tr><tr><td style="vertical-align:bottom;width:63.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Reductions due to the lapse of the statute of limitations</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.67%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td></tr><tr><td style="vertical-align:bottom;width:63.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Settlements</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (1,098)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.67%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (104)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (50)</p></td></tr><tr><td style="vertical-align:bottom;width:63.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Balance at end of year</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 12,761</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.67%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 12,363</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 12,369</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">If the amount of unrecognized tax benefits at December 31, 2021 were recognized, the Company&#8217;s income tax provision would decrease by $0.4 million. The gross amount of interest and penalties accrued in income tax payable in the Consolidated Balance Sheets was approximately $0.4 million at both December 31, 2021 and 2020.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company, or one of its subsidiaries, files income tax returns in the United States federal jurisdiction, and various state, local, and foreign jurisdictions. All material consolidated federal income tax matters have been concluded for years through 2017 subject to subsequent utilization of NOLs generated in such years. All material state and local income tax matters have been reviewed through 2012. The majority of the Company&#8217;s foreign jurisdictions have been reviewed through 2015. The Company&#8217;s major foreign jurisdictions&#8217; statutes of limitation remain open with respect to the tax years 2015 through 2020 for Germany, 2017 through 2020 for China, and 2020 for Taiwan and Singapore. The Company does not anticipate that its uncertain tax position will change significantly within the next twelve months subject to the completion of the ongoing tax audits and any resultant settlement. </p><span></span>
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<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674062383064">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Segment Reporting and Geographic Information<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2021</div></th></tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SegmentReportingAbstract', window );"><strong>Segment Reporting and Geographic Information</strong></a></td>
<td class="text">&#160;<span></span>
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<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SegmentReportingDisclosureTextBlock', window );">Segment Reporting and Geographic Information</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note 17 &#8212; Segment Reporting and Geographic Information</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company operates and measures its results in one operating segment and therefore has one reportable segment: the development, manufacture, sales, and support of semiconductor and thin film process equipment primarily sold to make electronic devices. The Company&#8217;s Chief Operating Decision Maker, the Chief Executive Officer, evaluates performance of the Company and makes decisions regarding the allocation of resources based on total Company results.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Sales by end-market is as follows:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;min-height:0.0pt;margin:0pt;"><span style="font-size:0pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80.72%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:58.5%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.82%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.82%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.84%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:58.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:37.4%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">For&#160;the year ended December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:58.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.1%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.1%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.11%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2019</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="11" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:58.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:37.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:58.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Sales by end-market</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:58.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Semiconductor</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 247,051</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 165,909</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 175,608</p></td></tr><tr><td style="vertical-align:bottom;width:58.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Compound Semiconductor</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 106,972</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 107,922</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 85,877</p></td></tr><tr><td style="vertical-align:bottom;width:58.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Data Storage</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 168,760</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 123,288</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 84,075</p></td></tr><tr><td style="vertical-align:bottom;width:58.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Scientific &amp; Other</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.82%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 60,494</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.82%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 57,044</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.84%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 73,789</p></td></tr><tr><td style="vertical-align:bottom;width:58.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.82%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 583,277</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.82%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 454,163</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.84%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 419,349</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company&#8217;s significant operations outside the United States include sales and service offices in China, Europe, and Rest of APAC. For geographic reporting, sales are attributed to the location in which the customer facility is located. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Sales and long-lived tangible assets by geographic region are as follows:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:39.34%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.94%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:39.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:30.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Net&#160;Sales&#160;to&#160;Unaffiliated Customers</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:27.16%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Long-lived&#160;Tangible&#160;Assets</b></p></td></tr><tr><td style="vertical-align:bottom;width:39.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2019</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.98%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2019</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="19" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:39.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="17" style="vertical-align:bottom;white-space:nowrap;width:59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:39.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">United States</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 217,209</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 145,353</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 126,160</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 99,220</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 64,967</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 75,187</p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:39.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">EMEA<sup style="font-family:'Calibri','Helvetica','sans-serif';font-size:8.25pt;line-height:100%;top:0pt;vertical-align:top;">(1)</sup></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 55,129</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 73,124</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 57,351</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 94</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 120</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 143</p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:39.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">China</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 105,998</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 57,589</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 71,078</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 67</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 84</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 130</p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:39.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Rest of APAC</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 204,633</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 177,569</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 164,363</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 362</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 100</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 251</p></td></tr><tr><td style="vertical-align:bottom;width:39.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Rest of World</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 308</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 528</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 397</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.94%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td></tr><tr><td style="vertical-align:bottom;width:39.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Total </p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 583,277</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 454,163</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 419,349</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 99,743</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 65,271</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.94%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 75,711</p></td></tr></table><div style="font-family:'Times New Roman','Times','serif';font-size:9.0pt;margin-bottom:0pt;margin-top:0pt;min-height:1.19em;position:relative;width:100%;"><div style="background-color:#000000;height:1pt;position:relative;top:0.6em;width:25.0%;border:none;margin:0 auto 0 0;"/></div><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Times New Roman','Times','serif';font-size:9pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">(1)</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:9pt;font-style:normal;font-weight:normal;">EMEA consists of Europe, the Middle East, and Africa</span></td></tr></table><span></span>
</td>
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</table>
<div style="display: none;">
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<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_SegmentReportingAbstract</td>
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<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
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<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
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<td><strong> Balance Type:</strong></td>
<td>na</td>
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<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
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</div></td></tr>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The entire disclosure for reporting segments including data and tables. Reportable segments include those that meet any of the following quantitative thresholds a) it's reported revenue, including sales to external customers and intersegment sales or transfers is 10 percent or more of the combined revenue, internal and external, of all operating segments b) the absolute amount of its reported profit or loss is 10 percent or more of the greater, in absolute amount of 1) the combined reported profit of all operating segments that did not report a loss or 2) the combined reported loss of all operating segments that did report a loss c) its assets are 10 percent or more of the combined assets of all operating segments.</p></div>
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<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674062433784">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Schedule II - Valuation and Qualifying Accounts<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2021</div></th></tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_srt_ValuationAndQualifyingAccountsAbstract', window );"><strong>Schedule II - Valuation and Qualifying Accounts</strong></a></td>
<td class="text">&#160;<span></span>
</td>
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<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_srt_ScheduleOfValuationAndQualifyingAccountsDisclosureTextBlock', window );">Schedule II - Valuation and Qualifying Accounts</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Schedule II &#8212; Valuation and Qualifying Accounts</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:45.33%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.22%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.24%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.83%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.67%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:45.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:19.22%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Additions</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:45.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b 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New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:45.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Balance&#160;at</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(Credited)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Charged&#160;to</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Balance&#160;at</b></p></td></tr><tr><td style="vertical-align:bottom;width:45.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Beginning</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;to&#160;Costs&#160;and</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Other</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">End&#160;of</b></p></td></tr><tr><td style="vertical-align:bottom;width:45.33%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Deducted from asset accounts:</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.19%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">of&#160;Period</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.11%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Expenses</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.07%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Accounts</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.91%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Deductions</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Period</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="16" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:45.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="14" style="vertical-align:bottom;white-space:nowrap;width:52.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:45.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Year ended December&#160;31, 2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.24%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.67%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:45.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Allowance for doubtful accounts</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 736</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 736</p></td></tr><tr><td style="vertical-align:bottom;width:45.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Valuation allowance in net deferred tax assets</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.22%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 118,443</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.24%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.83%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.67%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (2,389)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 116,054</p></td></tr><tr><td style="vertical-align:bottom;width:45.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.22%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 119,179</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.24%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.83%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.67%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (2,389)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 116,790</p></td></tr><tr><td style="vertical-align:bottom;width:45.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.24%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.67%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:45.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Year ended December&#160;31, 2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:45.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Allowance for doubtful accounts</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 602</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 140</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.24%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.67%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (6)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 736</p></td></tr><tr><td style="vertical-align:bottom;width:45.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Valuation allowance in net deferred tax assets</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.22%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 130,053</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 513</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.24%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.83%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.67%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (12,123)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 118,443</p></td></tr><tr><td style="vertical-align:bottom;width:45.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.22%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 130,655</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 653</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.24%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.83%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.67%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (12,129)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 119,179</p></td></tr><tr><td style="vertical-align:bottom;width:45.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:45.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Year ended December&#160;31, 2019</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.24%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.67%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:45.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Allowance for doubtful accounts</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 270</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 392</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (60)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 602</p></td></tr><tr><td style="vertical-align:bottom;width:45.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Valuation allowance in net deferred tax assets</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.22%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 114,955</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 15,098</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.24%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.83%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.67%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 130,053</p></td></tr><tr><td style="vertical-align:bottom;width:45.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.22%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 115,225</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 15,490</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.24%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.83%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.67%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (60)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 130,655</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p><span></span>
</td>
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</table>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The entire disclosure for valuation and qualifying accounts and reserves.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher SEC<br> -Name Regulation S-X (SX)<br> -Number 210<br> -Section 12<br> -Subsection 09<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section S99<br> -Paragraph 4<br> -Subparagraph (SX 210.12-09)<br> -URI http://asc.fasb.org/extlink&amp;oid=120395691&amp;loc=d3e24092-122690<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
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<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674067843896">
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<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Significant Accounting Policies (Policies)<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
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<tr><th class="th"><div>Dec. 31, 2021</div></th></tr>
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<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract', window );"><strong>Significant Accounting Policies</strong></a></td>
<td class="text">&#160;<span></span>
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<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiscalPeriod', window );">Basis of Presentation</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(b) Basis of Presentation</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">The accompanying audited Consolidated Financial Statements of the Company have been prepared in accordance with United States generally accepted accounting principles (&#8220;GAAP&#8221;). The Company reports interim quarters on a </span><span style="font-size:10pt;">13</span><span style="font-size:10pt;">-week basis ending on the last Sunday of each period, which is determined at the start of each year. The Company&#8217;s fourth quarter always ends on the last day of the calendar year, December 31. During 2021 the interim quarters ended on April 4, July 4, and October 3, and during 2020 the interim quarters ended on March 29, June 28, and September 27. The Company reports these interim quarters as March 31, June 30, and September 30 in its interim consolidated financial statements.</span></p><span></span>
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<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_UseOfEstimates', window );">Use of Estimates</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(c) Use of Estimates</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The preparation of financial statements in conformity with GAAP requires management to make estimates and assumptions that affect the amounts reported in the financial statements and accompanying notes. Although these estimates are based on management&#8217;s knowledge of current events and actions it may undertake in the future, these estimates may ultimately differ from actual results. Significant items subject to such estimates and assumptions include: (i) stand-alone selling prices for the Company&#8217;s products and services; (ii) allowances for doubtful accounts; (iii) inventory obsolescence; (iv) the useful lives and expected future cash flows of property, plant, and equipment and identifiable intangible assets; (v) the fair value of the Company&#8217;s reporting unit and related goodwill; (vi) investment valuations and the valuation of derivatives, deferred tax assets, and assets acquired in business combinations; (vii) the recoverability of long-lived assets; (viii) liabilities for product warranty and legal contingencies; (ix) share-based compensation; (x) lease term and incremental borrowing rates used in determining operating lease assets and liabilities; and (xi) income tax uncertainties.</p><span></span>
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<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConsolidationPolicyTextBlock', window );">Principles of Consolidation</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(d) Principles of Consolidation</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Consolidated Financial Statements include the accounts of the Company and its subsidiaries. Intercompany balances and transactions have been eliminated in consolidation. Companies acquired during each reporting period are reflected in the results of the Company effective from their respective dates of acquisition through the end of the reporting period.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><span></span>
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<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ForeignCurrencyTransactionsAndTranslationsPolicyTextBlock', window );">Foreign Currencies</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(e) Foreign Currencies</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Assets and liabilities of the Company&#8217;s foreign subsidiaries that operate using functional currencies other than the U.S. dollar are translated using the exchange rates in effect at the balance sheet date. Results of operations are translated using monthly average exchange rates. Adjustments arising from the translation of the foreign currency financial statements of the Company&#8217;s subsidiaries into U.S. dollars, including intercompany transactions of a long-term nature, are reported as currency translation adjustments in &#8220;Accumulated other comprehensive income&#8221; in the Consolidated Balance Sheets. Foreign currency transaction gains or losses are included in &#8220;Other operating expense (income), net&#8221; in the Consolidated Statements of Operations.</p><span></span>
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<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_RevenueFromContractWithCustomerPolicyTextBlock', window );">Revenue Recognition</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(f) Revenue Recognition</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Revenue is recognized upon the transfer of control of the promised product or service to the customer in an amount that reflects the consideration the Company expects to receive in exchange for such product or service. The Company&#8217;s contracts with customers generally do not contain variable consideration. In the rare instances where variable </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">consideration is included, the Company estimates the amount of variable consideration and determines what portion of that, if any, has a high probability of significant subsequent revenue reversal, and if so, that amount is excluded from the transaction price. The Company&#8217;s contracts with customers frequently contain multiple deliverables, such as systems, upgrades, components, spare parts, installation, maintenance, and service plans. Judgment is required to properly identify the performance obligations within a contract and to determine how the revenue should be allocated among the performance obligations. The Company also evaluates whether multiple transactions with the same customer or related parties should be considered part of a single contract based on an assessment of whether the contracts or agreements are negotiated or executed within a short time frame of each other or if there are indicators that the contracts are negotiated in contemplation of one another. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160; </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">When there are separate units of accounting, the Company allocates revenue to each performance obligation on a relative stand-alone selling price basis. The stand-alone selling prices are determined based on the prices at which the Company separately sells the systems, upgrades, components, spare parts, installation, maintenance, and service plans. For items that are not sold separately, the Company estimates stand-alone selling prices generally using an expected cost plus margin approach. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160; </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Most of the Company&#8217;s revenue is recognized at a point in time when the performance obligation is satisfied. The Company considers many facts when evaluating each of its sales arrangements to determine the timing of revenue recognition, including its contractual obligations and the nature of the customer&#8217;s post-delivery acceptance provisions. The Company&#8217;s system sales arrangements, including certain upgrades, generally include field acceptance provisions that may include functional or mechanical test procedures. For many of these arrangements, a customer source inspection of the system is performed in the Company&#8217;s facility, test data is sent to the customer documenting that the system is functioning to the agreed upon specifications prior to delivery, or other quality assurance testing is performed internally to ensure system functionality prior to shipment. Historically, such source inspection or test data replicates the field acceptance provisions that are performed at the customer&#8217;s site prior to final acceptance of the system. When the Company objectively demonstrates that the criteria specified in the contractual acceptance provisions are achieved prior to delivery either through customer testing or the Company&#8217;s historical experience of its tools meeting specifications, transfer of control of the product to the customer is considered to have occurred and revenue is recognized upon system delivery since there is no substantive contingency remaining related to the acceptance provisions at that date. For new products, new applications of existing products, or for products with substantive customer acceptance provisions where the Company cannot objectively demonstrate that the criteria specified in the contractual acceptance provisions have been achieved prior to delivery, revenue and the associated costs are deferred. The Company recognizes such revenue and costs upon obtaining objective evidence that the acceptance provisions can be achieved, assuming all other revenue recognition criteria have been met. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160; </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">In certain cases, the Company&#8217;s contracts with customers contain a billing retention, which is billed by the Company and payable by the customer when field acceptance provisions are completed. Revenue recognized in advance of the amount that has been billed is recorded as a contract asset on the Consolidated Balance Sheets. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160; </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company recognizes revenue related to maintenance and service contracts over time based upon the respective contract term. Installation revenue is recognized over time as the installation services are performed. The Company recognizes revenue from the sales of components, spare parts, and specified service engagements at a point in time, which is typically consistent with the time of delivery in accordance with the terms of the applicable sales arrangement. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160; </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">The Company may receive customer deposits on system transactions. The timing of the transfer of goods or services related to the deposits is either at the discretion of the customer or expected to be within one year from the deposit receipt. As such, the Company does not adjust transaction prices for the time value of money. Incremental direct costs incurred related to the acquisition of a customer contract, such as sales commissions, are expensed as incurred since the expected performance period is </span><span style="font-size:10pt;">one</span><span style="font-size:10pt;"> year or less. </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160; </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company has elected to treat shipping and handling costs, including those costs incurred to move, package, and prepare the Company&#8217;s products for shipment and to move the products to a customer&#8217;s designated location, as a fulfillment activity, and the Company includes such costs in &#8220;Cost of sales&#8221; in the Consolidated Statements of Operations as incurred. These costs are generally comprised of payments to third-party shippers. Taxes assessed by governmental authorities that are collected by the Company from a customer are excluded from revenue. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><span></span>
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<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StandardProductWarrantyPolicy', window );">Warranty Costs</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(g) Warranty Costs</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">The Company typically provides standard warranty coverage on its systems for </span><span style="font-size:10pt;">one year</span><span style="font-size:10pt;"> from the date of final acceptance by providing labor and parts necessary to repair the systems during the warranty period. The Company records the estimated warranty cost when revenue is recognized on the related system. Warranty cost is included in &#8220;Cost of sales&#8221; in the Consolidated Statements of Operations. The estimated warranty cost is based on the Company&#8217;s historical experience with its systems and regional labor costs. The Company calculates the average service hours by region and parts expense per system utilizing actual service records to determine the estimated warranty charge. The Company updates its warranty estimates on a quarterly basis when the actual product performance or field expense differs from original estimates.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><span></span>
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<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ResearchAndDevelopmentExpensePolicy', window );">Research and Development Costs</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(h) Research and Development Costs</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Research and development costs are expensed as incurred and include charges for the development of new technology and the transition of existing technology into new products or services.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><span></span>
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<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AdvertisingCostsPolicyTextBlock', window );">Advertising Expense</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(i) Advertising Expense</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The cost of advertising is expensed as incurred and totaled $0.3 million, $0.4 million, and $0.5 million for the years ended December 31, 2021, 2020, and 2019, respectively.</p><span></span>
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<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationOptionAndIncentivePlansPolicy', window );">Accounting for Share-Based Compensation</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(j) Accounting for Share-based Compensation</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Share-based awards exchanged for employee services are accounted for under the fair value method. Accordingly, share-based compensation cost is measured at the grant date based on the estimated fair value of the award. The expense for awards is recognized over the employee&#8217;s requisite service period (generally the vesting period of the award). The Company has elected to treat awards with only service conditions and with graded vesting as one award. Consequently, the total compensation expense is recognized straight-line over the entire vesting period, so long as the compensation cost recognized at any date at least equals the portion of the grant date fair value of the award that is vested at that date.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">In addition to stock options, restricted share awards (&#8220;RSAs&#8221;) and restricted stock units (&#8220;RSUs&#8221;) with time-based vesting, the Company grants performance share units and awards (&#8220;PSUs&#8221; and &#8220;PSAs&#8221;) that have either performance or market conditions. Compensation cost for PSUs and PSAs with performance conditions is recognized over the requisite service period based on the timing and expected level of achievement of the performance targets. A change in the assessment of performance attainment prior to the conclusion of the performance period is recognized in the period of the change in estimate. Compensation cost for PSUs and PSAs with market conditions is recognized over the requisite service period regardless of the expected level of achievement. For all PSUs and PSAs, the number of shares issued to the employee at the conclusion of the service period may vary from the original target based upon the level of attainment of the performance or market conditions.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company uses the Black-Scholes option-pricing model to compute the estimated fair value of option awards and purchase rights under the Employee Stock Purchase Plan. The Company uses a Monte Carlo simulation to compute the estimated fair value of awards with market conditions. The Black-Scholes model and Monte Carlo simulation include assumptions regarding dividend yields, expected volatility, expected option term, and risk-free interest rates. See Note 13, &#8220;Stock Plans,&#8221; for additional information. </p><span></span>
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<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncomeTaxPolicyTextBlock', window );">Income Taxes</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(k) Income Taxes</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Income taxes are accounted for under the asset and liability method. Deferred tax assets and liabilities are recognized for the future tax consequences attributable to differences between the financial statement carrying amounts of existing assets and liabilities and their respective tax bases and operating loss and tax credit carryforwards. Deferred tax assets and liabilities are measured using enacted tax rates expected to apply to taxable income in the years in which those temporary differences are expected to be recovered or settled. The effect on deferred tax assets and liabilities from a change in tax rate is recognized in income in the period that includes the enactment date. </p><span></span>
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<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskCreditRisk', window );">Concentration of Credit Risk</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(l) Concentration of Credit Risk</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Financial instruments that potentially subject the Company to concentrations of credit risk consist primarily of cash and cash equivalents, investments, derivative financial instruments used in hedging activities, and accounts receivable. The Company invests in a variety of financial instruments and, by policy, limits the amount of credit exposure with any one financial institution or commercial issuer. Historically, the Company has not experienced any material credit losses on its investments. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company maintains an allowance reserve for potentially uncollectible accounts for estimated losses resulting from the inability of its customers to make required payments. The Company evaluates its allowance for doubtful accounts based on a combination of factors. In circumstances where specific invoices are deemed to be uncollectible, the Company provides a specific allowance for bad debt against the amount due to reduce the net recognized receivable to the amount reasonably expected to be collected. The Company also provides allowances based on its write-off history. Finally, the Company also considers its current expectations of future economic conditions, including the impact of COVID-19, when estimating its allowance for doubtful accounts. The allowance for doubtful accounts totaled $0.7 million at both December 31, 2021 and 2020.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">To further mitigate the Company&#8217;s exposure to uncollectable accounts, the Company may request certain customers provide a negotiable irrevocable letter of credit drawn on a reputable financial institution. These irrevocable letters of credit are typically issued to mature between </span><span style="-sec-ix-hidden:Hidden_lLLL67cC-kS_kJateyYGvg;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">zero</span></span><span style="font-size:10pt;"> and </span><span style="font-size:10pt;">90 days</span><span style="font-size:10pt;"> from the date the documentation requirements are met, typically when a system ships or upon receipt of final acceptance from the customer. The Company, at its discretion, may monetize these letters of credit on a non-recourse basis after they become negotiable but before maturity. The fees associated with the monetization are included in &#8220;Selling, general, and administrative&#8221; in the Consolidated Statements of Operations and were immaterial for the years ended December 31, 2021, 2020, and 2019.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><span></span>
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<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FairValueOfFinancialInstrumentsPolicy', window );">Fair Value of Financial Instruments</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(m) Fair Value of Financial Instruments</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The carrying amounts of financial instruments, including cash equivalents, accounts receivable, accounts payable, and accrued expenses reflected in the consolidated financial statements approximate fair value due to their short-term maturities. The fair value of debt for footnote disclosure purposes, including current maturities, if any, is estimated using recently quoted market prices of the instrument, or if not available, a discounted cash flow analysis based on the estimated current incremental borrowing rates for similar types of instruments.</p><span></span>
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<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_CashCashEquivalentsAndShortTermInvestmentsPolicyTextBlock', window );">Cash, Cash Equivalents, and Short-term Investments</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(n) Cash, Cash Equivalents, and Short-term Investments</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">All financial instruments purchased with an original maturity of three months or less at the time of purchase are considered cash equivalents. Such items may include liquid money market funds, certificate of deposit and time deposit accounts, U.S. treasuries, government agency securities, and corporate debt. Investments that are classified as cash equivalents are carried at cost, which approximates fair value. The Company&#8217;s cash and cash equivalents includes $41.7 million and $86.2 million of cash equivalents at December 31, 2021 and 2020, respectively.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">A portion of the Company&#8217;s cash and cash equivalents is held by its subsidiaries throughout the world, frequently in each subsidiary&#8217;s respective functional currency, which is typically the U.S. dollar. Approximately 32% and 31% of cash and cash equivalents were maintained outside the United States at December 31, 2021 and 2020, respectively.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Short-term investments consist of marketable debt securities, and are generally classified as available-for-sale for use in current operations, if required, and are reported at fair value, with unrealized gains and losses, net of tax, presented as a separate component of stockholders&#8217; equity under the caption &#8220;Accumulated other comprehensive income&#8221; on the Consolidated Balance Sheets. These securities can include U.S. treasuries, government agency securities, corporate debt, and commercial paper, all with maturities of greater than three months when purchased. All realized gains and losses and unrealized losses resulting from declines in fair value that are other than temporary are included in &#8220;Other operating expense (income), net&#8221; in the Consolidated Statements of Operations. The specific identification method is used to determine the realized gains and losses on investments. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Non-marketable equity securities are equity securities without readily observable market prices and are included in &#8220;Other assets&#8221; in the Consolidated Balance Sheets. Non-marketable securities are measured at cost, adjusted for changes in observable prices minus impairment. Changes in fair value and impairment charges are included in &#8220;Other income (expense), net&#8221; in the Consolidated Statements of Operations.</p><span></span>
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<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_InventoryPolicyTextBlock', window );">Inventories</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(o) Inventories</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Inventories are stated at the lower of cost or net realizable value, with cost determined on a first-in, first-out basis. Each quarter the Company assesses the valuation and recoverability of all inventories: materials (raw materials, spare parts, and service inventory); work-in-process; and finished goods. Obsolete inventory or inventory in excess of management&#8217;s estimated usage requirement is written down to its estimated net realizable value if less than cost. The Company evaluates usage requirements by analyzing historical usage, anticipated demand, alternative uses of materials, and other qualitative factors. Unanticipated changes in demand for the Company&#8217;s products may require a write down of inventory, which would be reflected in cost of sales in the period the revision is made. Inventory acquired as part of a business combination is recorded at fair value on the date of acquisition.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><span></span>
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<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_BusinessCombinationsPolicy', window );">Business Combinations</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(p) Business Combinations</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company allocates the fair value of the purchase consideration of the Company&#8217;s acquisitions to the tangible assets, intangible assets, including in-process research and development (&#8220;IPR&amp;D&#8221;), if any, and liabilities assumed, based on estimated fair values. The excess of the fair value of purchase consideration over the fair values of these identifiable assets and liabilities is recorded as goodwill. Acquisition-related expenses are recognized separately from the business combination and are expensed as incurred. </p><span></span>
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<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_GoodwillAndIntangibleAssetsIntangibleAssetsIndefiniteLivedPolicy', window );">Goodwill and Indefinite-Lived Intangible Assets</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(q) Goodwill and Indefinite-Lived Intangible Assets</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Goodwill is an asset representing the future economic benefits arising from assets acquired in a business combination that are not individually identified and separately recognized. Goodwill is measured as the excess of the consideration transferred over the net fair value of identifiable assets acquired and liabilities assumed. Intangible assets with indefinite useful lives are measured at their respective fair values on the acquisition date. Intangible assets related to IPR&amp;D projects are considered to be indefinite-lived until the completion or abandonment of the associated research and development (&#8220;R&amp;D&#8221;) efforts. If and when development is complete, the associated assets would be deemed long-lived and would then be amortized based on their respective estimated useful lives at that point in time. Goodwill and indefinite-lived intangibles are not amortized into results of operations but instead are evaluated for impairment. The Company performs the evaluation in the beginning of the fourth quarter of each year or more frequently if impairment indicators arise.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">In testing goodwill for impairment, the Company may first perform a qualitative assessment of whether it is more likely than not that the reporting unit&#8217;s fair value is less than its carrying amount, and, if so, the Company then quantitatively compares the fair value of the reporting unit to its carrying amount. If the fair value exceeds the carrying amount, goodwill is not impaired. If the carrying amount exceeds fair value, the Company then records an impairment loss equal to the difference, up to the carrying value of goodwill.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">The Company determines the fair value of its reporting unit based on a reconciliation of the fair value of the reporting unit to the Company&#8217;s adjusted market capitalization. The adjusted market capitalization is calculated by multiplying the average share price of the Company&#8217;s common stock for the last </span><span style="-sec-ix-hidden:Hidden_zAaerYZD70-O1b7vxibxZA;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">ten</span></span><span style="font-size:10pt;"> trading days prior to the measurement date by the number of outstanding common shares and adding a control premium. The control premium is estimated using historical transactions in similar industries.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">In testing indefinite-lived intangible assets for impairment, the Company may first perform a qualitative assessment of whether it is more likely than not that the fair value of the indefinite-lived intangible asset is less than its carrying amount, and, if so, the Company then quantitatively compares the fair value of the indefinite-lived intangible asset to its carrying amount. The Company determines the fair value of its indefinite-lived intangible assets using a discounted cash flow method.</p><span></span>
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<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_LongLivedAssetsAndCostMethodInvestmentsPolicyTextBlock', window );">Long-lived Assets</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(r) Long-lived Assets</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Long-lived intangible assets consist of purchased technology, customer relationships, patents, trademarks and tradenames, and backlog and are initially recorded at fair value. Long-lived intangible assets are amortized over their estimated useful lives in a method reflecting the pattern in which the economic benefits are consumed or straight-lined if such pattern cannot be reliably determined.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Property, plant, and equipment are recorded at cost. Depreciation expense is calculated based on the estimated useful lives of the assets by using the straight-line method. Amortization of leasehold improvements is recognized using the straight-line method over the shorter of the remaining lease term or the estimated useful lives of the improvements.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Long-lived assets are reviewed for impairment whenever events or changes in circumstances indicate that the carrying amount of an asset may not be recoverable. If circumstances require a long-lived asset or asset group be tested for possible impairment, a recoverability test is performed utilizing undiscounted cash flows expected to be generated by that asset or asset group compared to its carrying amount. If the carrying amount of the long-lived asset or asset group is not recoverable on an undiscounted cash flow basis, impairment is recognized to the extent the carrying amount exceeds its fair value. Fair value is determined through various valuation techniques including discounted cash flow models or, when available, quoted market values and third-party appraisals.</p><span></span>
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<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LesseeLeasesPolicyTextBlock', window );">Leases</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(s) Leases</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Upon the adoption of ASC Topic 842, <i style="font-style:italic;">Leases</i> (&#8220;ASC 842&#8221;) as of January 1, 2019, the Company determines at contract inception if an arrangement is a lease, or contains a lease, of an identified asset for which the Company has the right to obtain substantially all of the economic benefits from its use and the right to direct its use. Right-of-use (&#8220;ROU&#8221;) assets represent the Company&#8217;s right to use an underlying asset for the lease term, while lease liabilities represent the Company&#8217;s obligation to make lease payments arising from the lease. Operating lease ROU assets and liabilities are recognized at lease commencement date based on the present value of lease payments over the lease term. The implicit discount rate in the Company&#8217;s leases generally cannot readily be determined, and therefore the Company uses its incremental borrowing rate based on information available at lease commencement date in determining the present value of future payments. The Company has options to renew or terminate certain leases. These options are included in the determination of lease term when it is reasonably certain that the Company will exercise such options. The Company does not separate lease and non-lease components in determining ROU assets or lease liabilities for real estate leases. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Additionally, the Company does not recognize ROU assets or lease liabilities for leases with original terms or renewals of one year or less.</p><span></span>
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<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_NewAccountingPronouncementsPolicyPolicyTextBlock', window );">Recently Adopted Accounting Standards</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(t) Recently Adopted Accounting Standards</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">The Company </span><span style="font-size:10pt;">adopted</span><span style="font-size:10pt;"> ASU 2019-12:&#160;</span><i style="font-size:10pt;font-style:italic;">Income Taxes (Topic 740): Simplifying the Accounting for Income Taxes </i><span style="font-size:10pt;">in the second quarter of 2020, effective as of the beginning of fiscal year 2020. This ASU simplifies the accounting for income taxes by eliminating certain exceptions to the general principles and simplifying several aspects of ASC 740,&#160;</span><i style="font-size:10pt;font-style:italic;">Income Taxes,&#160;</i><span style="font-size:10pt;">including, but not limited to, requirements related to the following: a) exception to the incremental approach for intraperiod tax allocation; b) the tax basis step-up in goodwill obtained in a transaction that is not a business combination; c) ownership changes in investments - changes from a subsidiary to an equity method investment; d) separate financial statements of entities not subject to tax; e) interim-period accounting for enacted changes in tax law; and f) the year-to-date loss limitation in interim-period tax accounting. The adoption did not have a material impact on the Company&#8217;s consolidated financial statements as of the date of adoption.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(u) Recent Accounting Pronouncements Not Yet Adopted</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">In August 2020, the FASB issued ASU 2020-06:&#160;</span><i style="font-size:10pt;font-style:italic;">Debt &#8211; Debt with Conversion and Other Options (Subtopic 470-20) and Derivatives and Hedging &#8211; Contracts in Entity&#8217;s Own Equity (Subtopic 815-40): Accounting for Convertible Instruments and Contracts in an Entity&#8217;s Own Equity</i><span style="font-size:10pt;">. This standard simplifies the accounting for convertible debt instruments by removing the separation models for convertible debt with a cash conversion feature, as well as convertible instruments with a beneficial conversion feature. As a result, entities will account for a convertible debt instrument wholly as debt, unless certain other conditions are met. The elimination of these models will reduce non-cash interest expense for entities that have issued a convertible instrument that was within the scope of those models before the adoption of ASU 2020-06. Additionally, ASU 2020-06&#160;requires the application of the if-converted method for calculating diluted earnings per share, and precludes the use of the treasury stock method for certain debt instruments. The provisions of ASU 2020-06&#160;are applicable for fiscal years beginning after December 15, 2021.</span><span style="font-size:10pt;"> </span><span style="font-size:10pt;">The Company&#8217;s 2023 Notes, 2025 Notes, and 2027 Notes all are currently accounted for using the separation models for convertible debt with a cash conversion feature, and therefore upon </span><span style="font-size:10pt;">adoption</span><span style="font-size:10pt;"> of ASU 2020-06 in the first quarter of 2022, the Company expects a decrease in non-cash interest expense. Additionally, the Company will be required to use the if-converted method for its current convertible debt when calculating diluted earnings (loss) per share, which will result in an increase in income available to common shareholders, as well as an increase in diluted shares outstanding. The Company expects to use the modified retrospective method of adoption, which will result in an increase in the carrying value of long-term debt of approximately </span><span style="font-size:10pt;">$44.3</span><span style="font-size:10pt;"> million as of January 1, 2022, with a corresponding decrease in </span><span style="-sec-ix-hidden:Hidden_4-EcM48rokawiYfmorI9eQ;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">stockholders&#8217; equity</span></span><span style="font-size:10pt;">.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company is evaluating other pronouncements recently issued but not yet adopted. The adoption of these pronouncements is not expected to have a material impact on our consolidated financial statements.</p><span></span>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Disclosure of accounting policy for advertising cost.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 720<br> -SubTopic 35<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=6420018&amp;loc=d3e36677-107848<br></p></div>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Disclosure of accounting policy for completed business combinations (purchase method, acquisition method or combination of entities under common control). This accounting policy may include a general discussion of the purchase method or acquisition method of accounting (including for example, the treatment accorded contingent consideration, the identification of assets and liabilities, the purchase price allocation process, how the fair values of acquired assets and liabilities are determined) and the entity's specific application thereof. An entity that acquires another entity in a leveraged buyout transaction generally discloses the accounting policy followed by the acquiring entity in determining the basis used to value its interest in the acquired entity, and the rationale for that accounting policy.</p></div>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Disclosure of accounting policy for credit risk.</p></div>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Disclosure of accounting policy regarding (1) the principles it follows in consolidating or combining the separate financial statements, including the principles followed in determining the inclusion or exclusion of subsidiaries or other entities in the consolidated or combined financial statements and (2) its treatment of interests (for example, common stock, a partnership interest or other means of exerting influence) in other entities, for example consolidation or use of the equity or cost methods of accounting.  The accounting policy may also address the accounting treatment for intercompany accounts and transactions, noncontrolling interest, and the income statement treatment in consolidation for issuances of stock by a subsidiary.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section 50<br> -Paragraph 4<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=123372394&amp;loc=d3e18823-107790<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=109239629&amp;loc=d3e5614-111684<br></p></div>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Disclosure of accounting policy for determining the fair value of financial instruments.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 820<br> -SubTopic 10<br> -Section 60<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=7493716&amp;loc=d3e21868-110260<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 825<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=123594938&amp;loc=d3e13279-108611<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Disclosure of accounting policy for determining an entity's fiscal year or other fiscal period. This disclosure may include identification of the fiscal period end-date, the length of the fiscal period, any reporting period lag between the entity and its subsidiaries, or equity investees. If a reporting lag exists, the closing date of the entity having a different period end is generally noted, along with an explanation of the necessity for using different closing dates. Any intervening events that materially affect the entity's financial position or results of operations are generally also disclosed.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 45<br> -Paragraph 12<br> -URI http://asc.fasb.org/extlink&amp;oid=123454820&amp;loc=d3e5291-111683<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
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<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Disclosure of accounting policy for (1) transactions denominated in a currency other than the reporting enterprise's functional currency, (2) translating foreign currency financial statements that are incorporated into the financial statements of the reporting enterprise by consolidation, combination, or the equity method of accounting, and (3) remeasurement of the financial statements of a foreign reporting enterprise in a hyperinflationary economy.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 830<br> -URI http://asc.fasb.org/topic&amp;trid=2175825<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
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<td><strong> Name:</strong></td>
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<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Disclosure of accounting policy for indefinite-lived intangible assets (that is, those intangible assets not subject to amortization). This accounting policy also may address how the entity assesses whether events and circumstances continue to support an indefinite useful life and how the entity assesses and measures impairment of such assets.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 350<br> -SubTopic 30<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=66006027&amp;loc=d3e16323-109275<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
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<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Disclosure of accounting policy for income taxes, which may include its accounting policies for recognizing and measuring deferred tax assets and liabilities and related valuation allowances, recognizing investment tax credits, operating loss carryforwards, tax credit carryforwards, and other carryforwards, methodologies for determining its effective income tax rate and the characterization of interest and penalties in the financial statements.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 45<br> -Paragraph 25<br> -URI http://asc.fasb.org/extlink&amp;oid=123427490&amp;loc=d3e32247-109318<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 20<br> -URI http://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32847-109319<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 19<br> -URI http://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32840-109319<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=124431353&amp;loc=SL116659661-227067<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 9<br> -URI http://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32639-109319<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 45<br> -Paragraph 28<br> -URI http://asc.fasb.org/extlink&amp;oid=123427490&amp;loc=d3e32280-109318<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 17<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32809-109319<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
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<td><strong> Name:</strong></td>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Disclosure of inventory accounting policy for inventory classes, including, but not limited to, basis for determining inventory amounts, methods by which amounts are added and removed from inventory classes, loss recognition on impairment of inventories, and situations in which inventories are stated above cost.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 330<br> -SubTopic 10<br> -Section 50<br> -Paragraph 4<br> -URI http://asc.fasb.org/extlink&amp;oid=116847112&amp;loc=d3e4556-108314<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=6361739&amp;loc=d3e7789-107766<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 912<br> -SubTopic 330<br> -Section 50<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=6471895&amp;loc=d3e55923-109411<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 330<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=116847112&amp;loc=d3e4492-108314<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 270<br> -SubTopic 10<br> -Section 45<br> -Paragraph 6<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=124437754&amp;loc=d3e543-108305<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 330<br> -URI http://asc.fasb.org/topic&amp;trid=2126998<br><br>Reference 7: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section 50<br> -Paragraph 4<br> -Subparagraph (d)<br> -URI http://asc.fasb.org/extlink&amp;oid=123372394&amp;loc=d3e18823-107790<br><br>Reference 8: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.6(b))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Disclosure of accounting policy for leasing arrangement entered into by lessee.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=123408670&amp;loc=SL77918666-209980<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Disclosure of accounting policy pertaining to new accounting pronouncements that may impact the entity's financial reporting. Includes, but is not limited to, quantification of the expected or actual impact.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Disclosure of accounting policy for costs it has incurred (1) in a planned search or critical investigation aimed at discovery of new knowledge with the hope that such knowledge will be useful in developing a new product or service, a new process or technique, or in bringing about a significant improvement to an existing product or process; or (2) to translate research findings or other knowledge into a plan or design for a new product or process or for a significant improvement to an existing product or process.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 730<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=6420194&amp;loc=d3e21568-108373<br></p></div>
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<tr>
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<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Disclosure of accounting policy for revenue from contract with customer.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 606<br> -SubTopic 10<br> -Section 50<br> -Paragraph 17<br> -URI http://asc.fasb.org/extlink&amp;oid=123351226&amp;loc=SL49130561-203045<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 606<br> -SubTopic 10<br> -Section 50<br> -Paragraph 20<br> -Subparagraph (d)<br> -URI http://asc.fasb.org/extlink&amp;oid=123351226&amp;loc=SL49130566-203045<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 606<br> -SubTopic 10<br> -Section 50<br> -Paragraph 18<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=123351226&amp;loc=SL49130563-203045<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 606<br> -URI http://asc.fasb.org/topic&amp;trid=49130388<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 606<br> -SubTopic 10<br> -Section 50<br> -Paragraph 20<br> -Subparagraph (c)<br> -URI http://asc.fasb.org/extlink&amp;oid=123351226&amp;loc=SL49130566-203045<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 606<br> -SubTopic 10<br> -Section 50<br> -Paragraph 18<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=123351226&amp;loc=SL49130563-203045<br><br>Reference 7: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section 50<br> -Paragraph 4<br> -Subparagraph (e)<br> -URI http://asc.fasb.org/extlink&amp;oid=123372394&amp;loc=d3e18823-107790<br><br>Reference 8: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 606<br> -SubTopic 10<br> -Section 50<br> -Paragraph 20<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=123351226&amp;loc=SL49130566-203045<br><br>Reference 9: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 606<br> -SubTopic 10<br> -Section 50<br> -Paragraph 19<br> -URI http://asc.fasb.org/extlink&amp;oid=123351226&amp;loc=SL49130564-203045<br><br>Reference 10: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 606<br> -SubTopic 10<br> -Section 50<br> -Paragraph 20<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=123351226&amp;loc=SL49130566-203045<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RevenueFromContractWithCustomerPolicyTextBlock</td>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Disclosure of accounting policy for award under share-based payment arrangement. Includes, but is not limited to, methodology and assumption used in measuring cost.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (b),(f)<br> -URI http://asc.fasb.org/extlink&amp;oid=120381028&amp;loc=d3e5070-113901<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=120381028&amp;loc=d3e5047-113901<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationOptionAndIncentivePlansPolicy</td>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Disclosure of accounting policy for standard warranties including the methodology for measuring the liability.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 460<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=123368208&amp;loc=d3e12565-110249<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StandardProductWarrantyPolicy</td>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Disclosure of accounting policy for the use of estimates in the preparation of financial statements in conformity with generally accepted accounting principles.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 275<br> -SubTopic 10<br> -Section 50<br> -Paragraph 12<br> -URI http://asc.fasb.org/extlink&amp;oid=99393423&amp;loc=d3e6191-108592<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 275<br> -SubTopic 10<br> -Section 50<br> -Paragraph 11<br> -URI http://asc.fasb.org/extlink&amp;oid=99393423&amp;loc=d3e6161-108592<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 275<br> -SubTopic 10<br> -Section 50<br> -Paragraph 9<br> -URI http://asc.fasb.org/extlink&amp;oid=99393423&amp;loc=d3e6143-108592<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 275<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=99393423&amp;loc=d3e5967-108592<br><br>Reference 5: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 275<br> -SubTopic 10<br> -Section 50<br> -Paragraph 4<br> -URI http://asc.fasb.org/extlink&amp;oid=99393423&amp;loc=d3e6061-108592<br><br>Reference 6: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 275<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -URI http://asc.fasb.org/extlink&amp;oid=99393423&amp;loc=d3e6132-108592<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 275<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (c)<br> -URI http://asc.fasb.org/extlink&amp;oid=99393423&amp;loc=d3e5967-108592<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Disclosure of accounting policy for cash and cash equivalents, including the policy for determining which items are treated as cash equivalents. Other information that may be disclosed includes (1) the nature of any restrictions on the entity's use of its cash and cash equivalents, (2) whether the entity's cash and cash equivalents are insured or expose the entity to credit risk, (3) the classification of any negative balance accounts (overdrafts), and (4) the carrying basis of cash equivalents (for example, at cost) and whether the carrying amount of cash equivalents approximates fair value. Disclosure of accounting policy for investments in debt and equity securities that are classified as available-for-sale. This policy also may describe the entity's accounting treatment for transfers between investment categories, how the entity determines whether impairments of available-for-sale securities are other than temporary, and how the fair values of such securities are determined.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Disclosure of the accounting policy for long-lived assets (those subject to amortization or depreciation) and cost method investments.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
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style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:61.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:33.36%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">For the year ended December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:61.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.51%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.51%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.51%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2019</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="11" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:61.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:33.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands, except per share amounts)</i></p></td></tr><tr><td style="vertical-align:bottom;width:61.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Net income (loss)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="-sec-ix-hidden:Hidden_Qk9Z5GG2gU2eiypiuu7Caw;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">$</span></span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 26,038</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="-sec-ix-hidden:Hidden_E-eaVTHWMk6C3GCtkGb3ZA;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">$</span></span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (8,391)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="-sec-ix-hidden:Hidden_PpBtoGgI3k6DXC5KpPJQgw;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">$</span></span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (78,733)</p></td></tr><tr><td style="vertical-align:bottom;width:61.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Net income (loss) per common share:</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:61.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Basic</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 0.53</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (0.17)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (1.66)</p></td></tr><tr><td style="vertical-align:bottom;width:61.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Diluted</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 0.49</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (0.17)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (1.66)</p></td></tr><tr><td style="vertical-align:bottom;width:61.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:61.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Basic weighted average shares outstanding</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 49,073</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 48,362</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 47,482</p></td></tr><tr><td style="vertical-align:bottom;width:61.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Effect of potentially dilutive share-based awards</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 1,090</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td></tr><tr><td style="vertical-align:bottom;width:61.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Dilutive effect of convertible notes </p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 3,480</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td></tr><tr><td style="vertical-align:bottom;width:61.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Diluted weighted average shares outstanding</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 53,643</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 48,362</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 47,482</p></td></tr><tr><td style="vertical-align:bottom;width:61.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:middle;width:61.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Common share equivalents excluded from the diluted weighted average shares outstanding since the Company incurred a net loss and their effect would be antidilutive</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 947</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 531</p></td></tr><tr><td style="vertical-align:bottom;width:61.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Potentially dilutive shares excluded from the diluted calculation as their effect would be antidilutive</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 456</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 923</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 1,689</p></td></tr><tr><td style="vertical-align:middle;width:61.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Maximum potential shares to be issued for settlement of the 2023, 2025, and 2027 Notes excluded from the diluted calculation as their effect would be antidilutive due to a net loss or the fact that the conversion value of the Notes did not exceed their principal amount</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 8,421</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 17,753</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New 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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of an entity's basic and diluted earnings per share calculations, including a reconciliation of numerators and denominators of the basic and diluted per-share computations for income from continuing operations.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=124432515&amp;loc=d3e3550-109257<br></p></div>
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<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674070139640">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Fair Value Measurements (Tables)<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2021</div></th></tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FairValueDisclosuresAbstract', window );"><strong>Fair Value Measurements</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FairValueAssetsMeasuredOnRecurringBasisTextBlock', window );">Schedule of assets measured on a recurring basis at fair value</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:57.29%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:57.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;width:9.17%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Level&#160;1</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Level&#160;2</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.75%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Level&#160;3</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.19%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Total</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="13" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:57.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:40.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:57.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">December&#160;31, 2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:57.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"><b style="font-weight:bold;">Cash equivalents</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:57.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Certificate of deposits and time deposits</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 41,544</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 41,544</p></td></tr><tr><td style="vertical-align:bottom;width:57.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Money market cash</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 121</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 121</p></td></tr><tr><td style="vertical-align:bottom;width:57.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 41,665</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 41,665</p></td></tr><tr><td style="vertical-align:bottom;width:57.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"><b style="font-weight:bold;">Short-term investments</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:57.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">U.S. treasuries</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 51,095</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 51,095</p></td></tr><tr><td style="vertical-align:bottom;width:57.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Government agency securities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 12,052</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 12,052</p></td></tr><tr><td style="vertical-align:bottom;width:57.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Corporate debt</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 40,035</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 40,035</p></td></tr><tr><td style="vertical-align:bottom;width:57.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Commercial paper</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 999</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 999</p></td></tr><tr><td style="vertical-align:bottom;width:57.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 51,095</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 53,086</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 104,181</p></td></tr><tr><td style="vertical-align:bottom;width:57.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 0pt 18pt;"><span style="font-size:10pt;font-weight:bold;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:57.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">December&#160;31, 2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:57.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"><b style="font-weight:bold;">Cash equivalents</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:57.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Certificate of deposits and time deposits</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 59,168</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 59,168</p></td></tr><tr><td style="vertical-align:bottom;width:57.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Commercial paper</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 2,000</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 2,000</p></td></tr><tr><td style="vertical-align:bottom;width:57.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">U.S. treasuries</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 24,997</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 24,997</p></td></tr><tr><td style="vertical-align:bottom;width:57.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 84,165</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 2,000</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 86,165</p></td></tr><tr><td style="vertical-align:bottom;width:57.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"><b style="font-weight:bold;">Short-term investments</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:57.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">U.S. treasuries</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 149,219</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 149,219</p></td></tr><tr><td style="vertical-align:bottom;width:57.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Corporate debt</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 32,554</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 32,554</p></td></tr><tr><td style="vertical-align:bottom;width:57.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Commercial paper</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 7,998</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 7,998</p></td></tr><tr><td style="vertical-align:bottom;width:57.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 149,219</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 40,552</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 189,771</p></td></tr></table><span></span>
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<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of assets, including [financial] instruments measured at fair value that are classified in stockholders' equity, if any, by class that are measured at fair value on a recurring basis. The disclosures contemplated herein include the fair value measurements at the reporting date by the level within the fair value hierarchy in which the fair value measurements in their entirety fall, segregating fair value measurements using quoted prices in active markets for identical assets (Level 1), significant other observable inputs (Level 2), and significant unobservable inputs (Level 3).</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 820<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=123874694&amp;loc=d3e19207-110258<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 820<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=123874694&amp;loc=d3e19207-110258<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
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<td style="white-space:nowrap;">us-gaap_FairValueDisclosuresAbstract</td>
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<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674068891352">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Investments (Tables)<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2021</div></th></tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_InvestmentsDebtAndEquitySecuritiesAbstract', window );"><strong>Investments</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ScheduleOfAvailableForSaleSecuritiesReconciliationTableTextBlock', window );">Schedule of amortized cost and fair value of available-for-sale securities</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Gross</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Gross</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Amortized</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Unrealized</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Unrealized</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Estimated</b></p></td></tr><tr><td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.19%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Cost</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Gains</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Losses</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Fair&#160;Value</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="13" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:41.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:55.91%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">December&#160;31, 2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">U.S. treasuries</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 51,269</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (174)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 51,095</p></td></tr><tr><td style="vertical-align:bottom;width:55.91%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Government agency securities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 12,075</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (23)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 12,052</p></td></tr><tr><td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Corporate debt</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 40,169</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (134)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 40,035</p></td></tr><tr><td style="vertical-align:bottom;width:55.91%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Commercial paper</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 999</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 999</p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:55.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><b style="font-weight:bold;">Total </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 104,512</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (331)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 104,181</p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:55.91%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 0pt 12pt;"><span style="font-size:10pt;font-weight:bold;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">December&#160;31, 2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:55.91%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">U.S. treasuries</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 149,206</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 14</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (1)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 149,219</p></td></tr><tr><td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Corporate debt</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 32,588</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (34)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 32,554</p></td></tr><tr><td style="vertical-align:bottom;width:55.91%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Commercial paper</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 7,997</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 1</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 7,998</p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:55.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 189,791</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 15</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (35)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 189,771</p></td></tr></table><span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtSecuritiesAvailableForSaleUnrealizedLossPositionFairValueTableTextBlock', window );">Schedule of fair value and unrealized losses of available-for-sale securities in a loss position</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:56.39%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.31%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.31%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.24%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:56.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:19.97%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, 2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:19.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, 2020</b></p></td></tr><tr><td style="vertical-align:bottom;width:56.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Gross</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Gross</b></p></td></tr><tr><td style="vertical-align:bottom;width:56.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Estimated</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Unrealized</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Estimated</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Unrealized</b></p></td></tr><tr><td style="vertical-align:bottom;width:56.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.22%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Fair&#160;Value</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.59%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Losses</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.59%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Fair Value</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.54%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Losses</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="13" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:56.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="10" style="vertical-align:bottom;white-space:nowrap;width:40.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:56.39%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">U.S. treasuries</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 51,095</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (174)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 19,991</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.24%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (1)</p></td></tr><tr><td style="vertical-align:bottom;width:56.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Government agency securities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 12,052</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (23)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td></tr><tr><td style="vertical-align:bottom;width:56.39%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Corporate debt</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 40,035</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.31%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (134)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.31%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 32,554</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.24%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (34)</p></td></tr><tr><td style="vertical-align:bottom;width:56.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 103,182</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.31%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (331)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.31%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 52,545</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.24%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (35)</p></td></tr></table><span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_InvestmentsClassifiedByContractualMaturityDateTableTextBlock', window );">Schedule of contractual maturities of securities classified as available-for-sale</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;background:#ffffff;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:72.18%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.41%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.39%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:72.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:25.01%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, 2021</b></p></td></tr><tr><td style="vertical-align:bottom;width:72.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Amortized</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Estimated</b></p></td></tr><tr><td style="vertical-align:bottom;width:72.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.11%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Cost</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.09%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Fair&#160;Value</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="7" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:72.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="4" style="vertical-align:bottom;white-space:nowrap;width:23.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:72.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Due in one year or less</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.41%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 53,617</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.39%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 53,550</p></td></tr><tr><td style="vertical-align:bottom;width:72.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Due after one year through two years</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.41%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 50,895</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.39%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 50,631</p></td></tr><tr><td style="vertical-align:bottom;width:72.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.41%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 104,512</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.39%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 104,181</p></td></tr></table><span></span>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of fair value of investment in debt security measured at fair value with change in fair value recognized in other comprehensive income (available-for-sale), in unrealized loss position, without allowance for credit loss. Includes beneficial interest in securitized financial asset.</p></div>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of maturities of an entity's investments as well as any other information pertinent to the investments.</p></div>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of the reconciliation of available-for-sale securities from cost basis to fair value.</p></div>
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<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Inventories (Tables)<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
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<tr><th class="th"><div>Dec. 31, 2021</div></th></tr>
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style="vertical-align:bottom;white-space:nowrap;width:2.52%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.54%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:13.41%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:65.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:65.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="7" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:65.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:32.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:65.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Materials</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.54%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.35%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 96,027</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.54%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.41%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 82,679</p></td></tr><tr><td style="vertical-align:bottom;width:65.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Work-in-process</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 54,128</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 53,979</p></td></tr><tr><td style="vertical-align:bottom;width:65.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Finished goods</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.54%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.35%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 20,703</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.54%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.41%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 9,248</p></td></tr><tr><td style="vertical-align:bottom;width:65.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.54%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.35%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 170,858</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.54%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.41%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 145,906</p></td></tr></table><span></span>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of the carrying amount as of the balance sheet date of merchandise, goods, commodities, or supplies held for future sale or to be used in manufacturing, servicing or production process.</p></div>
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<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674069538104">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Property, Plant, and Equipment (Tables)<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2021</div></th></tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentAbstract', window );"><strong>Property, Plant, and Equipment</strong></a></td>
<td class="text">&#160;<span></span>
</td>
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<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentTextBlock', window );">Schedule of property, plant, and equipment</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:55.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New 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style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:middle;width:14.02%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:50%;transform:translate(0,-50%);width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:55.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.36%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.4%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:55.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.36%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.4%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.02%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Average&#160;Useful&#160;Life</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="9" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:55.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:26.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:55.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Land</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 5,061</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 5,061</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:14.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">N/A</p></td></tr><tr><td style="vertical-align:bottom;width:55.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Building and improvements</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 63,946</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 62,865</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:14.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="-sec-ix-hidden:Hidden_nSraNxv3HkCjw8_FEiVHAA;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">10</span></span><span style="font-size:10pt;"> &#8211; </span><span style="font-size:10pt;">40 years</span></p></td></tr><tr><td style="vertical-align:bottom;width:55.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Machinery and equipment <sup style="font-size:7.5pt;line-height:100%;top:0pt;vertical-align:top;">(1)</sup></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 145,656</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 140,493</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:14.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="-sec-ix-hidden:Hidden_iMDzi6_cyUWyqGYEL7nS2g;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">3</span></span><span style="font-size:10pt;"> &#8211; </span><span style="font-size:10pt;">10 years</span></p></td></tr><tr><td style="vertical-align:bottom;width:55.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Leasehold improvements</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.17%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 45,979</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 6,671</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:14.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="-sec-ix-hidden:Hidden_j9fzviGGIkepS8REL9n-aQ;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">3</span></span><span style="font-size:10pt;"> &#8211; </span><span style="font-size:10pt;">17 years</span></p></td></tr><tr><td style="vertical-align:bottom;width:55.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Gross property, plant, and equipment</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 260,642</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 215,090</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:55.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Less: accumulated depreciation and amortization</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.17%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 160,899</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 149,819</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:55.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"><b style="font-weight:bold;">Net property, plant, and equipment</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.17%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 99,743</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 65,271</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr></table><div style="font-family:'Times New Roman','Times','serif';font-size:9.0pt;margin-bottom:0pt;margin-top:0pt;min-height:1.19em;position:relative;width:100%;"><div style="background-color:#000000;height:1pt;position:relative;top:0.6em;width:25.0%;border:none;margin:0 auto 0 0;"/></div><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Times New Roman','Times','serif';font-size:9pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">(1)</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:9pt;font-style:normal;font-weight:normal;">Machinery and equipment also includes software, furniture, and fixtures</span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><span></span>
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<td style="white-space:nowrap;">us-gaap_PropertyPlantAndEquipmentAbstract</td>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of physical assets used in the normal conduct of business and not intended for resale. Includes, but is not limited to, balances by class of assets, depreciation and depletion expense and method used, including composite depreciation, and accumulated deprecation.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(13))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 360<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=6391035&amp;loc=d3e2868-110229<br></p></div>
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<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674063536360">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Goodwill and Intangible Assets (Tables)<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2021</div></th></tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_GoodwillAndIntangibleAssetsDisclosureAbstract', window );"><strong>Goodwill and Intangible Assets</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ScheduleOfGoodwillTextBlock', window );">Schedule of changes in goodwill</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:52.19%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:2.45%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:11.94%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:2.46%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:11.94%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:2.46%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:12.04%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:52.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Gross&#160;carrying</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;width:13.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Accumulated</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;width:13.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:52.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">amount</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">impairment</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.54%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Net amount</b></p></td></tr><tr><td style="vertical-align:bottom;width:52.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:45.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:52.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Balance at December&#160;31, 2021 and 2020</p></td><td style="vertical-align:bottom;width:2.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 430,331</p></td><td style="vertical-align:bottom;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 248,388</p></td><td style="vertical-align:bottom;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 181,943</p></td></tr></table><span></span>
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<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:26.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;white-space:nowrap;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:26.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:29.63%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, 2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:29.63%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, 2020</b></p></td></tr><tr><td style="vertical-align:bottom;width:26.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Average</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Accumulated</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Accumulated</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:26.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Remaining</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Gross</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Amortization</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Gross</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Amortization</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:26.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Amortization</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Carrying</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">and</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Net </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Carrying</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">and</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Net</b></p></td></tr><tr><td style="vertical-align:bottom;width:26.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:9.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Period</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Amount</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:9.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Impairment</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Amount</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Amount</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:9.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Impairment</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Amount</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="21" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:26.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in years)</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="17" style="vertical-align:bottom;white-space:nowrap;width:60.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:26.35%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Technology</p></td><td style="vertical-align:middle;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;white-space:nowrap;width:9.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;"> 3.6</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 327,908</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 310,551</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 17,357</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 327,908</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 302,358</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 25,550</p></td></tr><tr><td style="vertical-align:bottom;width:26.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Customer relationships</p></td><td style="vertical-align:bottom;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;white-space:nowrap;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;"> 7.3</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 146,465</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 132,970</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 13,495</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 146,465</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 130,131</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 16,334</p></td></tr><tr><td style="vertical-align:bottom;width:26.35%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Trademarks and tradenames</p></td><td style="vertical-align:bottom;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;white-space:nowrap;width:9.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;"> 2.5</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 30,910</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 27,857</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 3,053</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 30,910</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 26,614</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 4,296</p></td></tr><tr><td style="vertical-align:bottom;width:26.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Other</p></td><td style="vertical-align:bottom;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;white-space:nowrap;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"> -</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 3,686</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.1%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 3,686</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 3,686</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.1%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 3,681</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 5</p></td></tr><tr><td style="vertical-align:bottom;width:26.35%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 0pt 12pt;"><span style="font-size:10pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;white-space:nowrap;width:9.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;"> 5.0</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 508,969</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.1%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 475,064</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 33,905</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 508,969</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.1%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 462,784</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 46,185</p></td></tr></table><span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ScheduleofFiniteLivedIntangibleAssetsFutureAmortizationExpenseTableTextBlock', window );">Schedule of estimated annual amortization expense, excluding in-process R&amp;D for intangible assets with definite useful lives</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:46%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:75.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:17.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:75.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:20.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Amortization</b></p></td></tr><tr><td style="vertical-align:bottom;width:75.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:20.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:75.65%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2022</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.58%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.65%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:17.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 10,018</p></td></tr><tr><td style="vertical-align:bottom;width:75.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2023</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:17.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 8,347</p></td></tr><tr><td style="vertical-align:bottom;width:75.65%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2024</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.58%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.65%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:17.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 6,708</p></td></tr><tr><td style="vertical-align:bottom;width:75.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2025</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:17.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 3,136</p></td></tr><tr><td style="vertical-align:bottom;width:75.65%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2026</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.58%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.65%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:17.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 2,134</p></td></tr><tr><td style="vertical-align:bottom;width:75.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Thereafter</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.65%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:17.11%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 3,562</p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:75.65%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Total</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.58%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.65%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:17.11%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 33,905</p></td></tr></table><span></span>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of goodwill by reportable segment and in total which includes a rollforward schedule.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 350<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=121556970&amp;loc=d3e13816-109267<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 350<br> -SubTopic 20<br> -Section 50<br> -Paragraph 2<br> -URI http://asc.fasb.org/extlink&amp;oid=121556970&amp;loc=d3e13854-109267<br></p></div>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of the amount of amortization expense expected to be recorded in succeeding fiscal years for finite-lived intangible assets.</p></div>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of assets, excluding financial assets and goodwill, which lack physical substance with a finite life or exist in perpetuity, by major class.</p></div>
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<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Accrued Expenses and Other Liabilities (Tables)<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
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<tr><th class="th"><div>Dec. 31, 2021</div></th></tr>
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style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:70.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.49%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.49%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:70.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.49%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.49%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="7" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:70.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:27.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:70.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Payroll and related benefits</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 35,712</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 26,630</p></td></tr><tr><td style="vertical-align:bottom;width:70.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Warranty</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 7,878</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 5,058</p></td></tr><tr><td style="vertical-align:bottom;width:70.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="-sec-ix-hidden:Hidden_F6hpkcy7sk2smVu90Wpo7g;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">Operating lease liabilities</span></span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 4,437</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 4,148</p></td></tr><tr><td style="vertical-align:bottom;width:70.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Interest</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 2,757</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 2,574</p></td></tr><tr><td style="vertical-align:bottom;width:70.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Professional fees</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 1,467</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 1,112</p></td></tr><tr><td style="vertical-align:bottom;width:70.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Legal settlement</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 15,000</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td></tr><tr><td style="vertical-align:bottom;width:70.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Sales, use, and other taxes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 4,889</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 2,658</p></td></tr><tr><td style="vertical-align:bottom;width:70.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Other</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 7,612</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 2,696</p></td></tr><tr><td style="vertical-align:bottom;width:70.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 79,752</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 44,876</p></td></tr></table><span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_ScheduleOfDeferredRevenueTableTextBlock', window );">Schedule of changes in deferred revenue</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:80.14%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.57%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.57%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:14.7%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:80.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.57%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:17.27%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:80.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Balance - December&#160;31, 2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.57%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.57%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.7%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 17,985</p></td></tr><tr><td style="vertical-align:bottom;width:80.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Deferral of revenue</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.57%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.57%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 6,782</p></td></tr><tr><td style="vertical-align:bottom;width:80.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Recognition of unearned revenue</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.57%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.57%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.7%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (8,491)</p></td></tr><tr><td style="vertical-align:bottom;width:80.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Balance - December&#160;31, 2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.57%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.57%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.7%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 16,276</p></td></tr></table><span></span>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of the components of accrued liabilities.</p></div>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The Tabular disclosure for deferred revenues at the end of the reporting period, and description and amounts of significant changes that occurred during the reporting period. Deferred revenue is a liability as of the balance sheet date related to a revenue producing activity for which revenue has not yet been recognized. Generally, an entity records deferred revenue when it receives consideration from a customer before achieving certain criteria that must be met for revenue to be recognized in conformity with GAAP.</p></div>
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<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674064086424">
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<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Commitments and Contingencies (Tables)<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2021</div></th></tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CommitmentsAndContingenciesDisclosureAbstract', window );"><strong>Commitments and Contingencies</strong></a></td>
<td class="text">&#160;<span></span>
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<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ScheduleOfProductWarrantyLiabilityTableTextBlock', window );">Schedule of changes in product warranty reserves</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:61.6%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.43%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.45%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.45%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:61.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:36.32%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:61.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.72%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2019</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="10" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:61.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="7" style="vertical-align:bottom;white-space:nowrap;width:35.04%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:61.6%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Balance - beginning of the year</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 5,058</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 7,067</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 7,852</p></td></tr><tr><td style="vertical-align:bottom;width:61.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Warranties issued</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 7,102</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 4,626</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 5,865</p></td></tr><tr><td style="vertical-align:bottom;width:61.6%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Consumption of reserves</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (5,784)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (6,691)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (6,242)</p></td></tr><tr><td style="vertical-align:bottom;width:61.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Changes in estimate</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 1,502</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.45%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 56</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.45%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (408)</p></td></tr><tr><td style="vertical-align:bottom;width:61.6%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Balance - end of the year</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.43%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 7,878</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.45%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 5,058</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.45%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 7,067</p></td></tr></table><span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LesseeOperatingLeaseLiabilityMaturityTableTextBlock', window );">Schedule of maturities of lease liabilities 2020</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:15.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Operating</b></p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:15.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Leases</b></p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:15.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Payments due by period:</b></p></td><td style="vertical-align:bottom;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2022</p></td><td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 4,901</p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2023</p></td><td style="vertical-align:bottom;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 3,979</p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2024</p></td><td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 3,769</p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2025</p></td><td style="vertical-align:bottom;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 3,309</p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2026</p></td><td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 3,496</p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Thereafter</p></td><td style="vertical-align:bottom;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 35,960</p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Total future minimum lease payments</p></td><td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 55,414</p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Less: Imputed interest</p></td><td style="vertical-align:bottom;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (18,143)</p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Total</p></td><td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 37,271</p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:82.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Reported as of December&#160;31, 2021</b></p></td><td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="-sec-ix-hidden:Hidden_SwFqQXYgBEak5kXP8askZQ;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">Accrued expenses and other current liabilities</span></span></p></td><td style="vertical-align:bottom;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 4,437</p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Long-term operating lease liabilities</p></td><td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 32,834</p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 0pt 12pt;"><span style="-sec-ix-hidden:Hidden_zFxbRdmFCE2TWUV1wQrYUA;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">Total</span></span></p></td><td style="vertical-align:bottom;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 37,271</p></td></tr></table><span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ScheduleOfRevenueByMajorCustomersByReportingSegmentsTableTextBlock', window );">Schedule of customers who accounted for more than 10% of our aggregate accounts receivable or net sales</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:40.97%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.47%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.49%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:40.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="3" style="vertical-align:bottom;white-space:nowrap;width:19.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Accounts&#160;Receivable</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:31.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Net&#160;Sales&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:40.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="3" style="vertical-align:bottom;white-space:nowrap;width:19.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:31.37%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">For the Year Ended December&#160;31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:40.97%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Customer</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2019</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:40.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Customer A</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.47%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 14</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 15</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:40.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Customer B</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span 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style="vertical-align:bottom;white-space:nowrap;width:8.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:40.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Customer C</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.47%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 12</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:40.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Customer D</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 10</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:40.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Customer E</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.47%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times 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Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 13</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New 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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of the extent of the entity's reliance on its major customers, if revenues from transactions with a single external customer amount to 10 percent or more of entity revenues, including the disclosure of that fact, the total amount of revenues from each such customer, and the identity of the reportable segment or segments reporting the revenues. The entity need not disclose the identity of a major customer or the amount of revenues that each segment reports from that customer. For these purposes, a group of companies known to the entity to be under common control is considered a single customer, and the federal government, a state government, a local government such as a county or municipality, or a foreign government is each considered a single customer.</p></div>
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<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConvertibleDebtTableTextBlock', window );">Schedule of carrying value of Convertible Senior Notes</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:21.23%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:1.13%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:1.07%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:10.77%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:10.88%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:11.05%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:10.88%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:10.88%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:10.83%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:21.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="7" style="vertical-align:bottom;white-space:nowrap;width:37.22%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, 2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="7" style="vertical-align:bottom;white-space:nowrap;width:37.11%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, 2020</b></p></td></tr><tr><td style="vertical-align:bottom;width:21.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-family:'Calibri','Helvetica','sans-serif';font-weight:bold;">&#160;&#160;</b></p></td><td style="vertical-align:bottom;width:1.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:10.77%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Principal Amount</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:10.88%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Unamortized </b><b style="font-weight:bold;"><br/></b><b style="font-weight:bold;">debt discount/</b><b style="font-weight:bold;"><br/></b><b style="font-weight:bold;">transaction costs</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:11.05%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Net carrying value</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:10.88%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Principal Amount</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:10.88%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Unamortized </b><b style="font-weight:bold;"><br/></b><b style="font-weight:bold;">debt discount/</b><b style="font-weight:bold;"><br/></b><b style="font-weight:bold;">transaction costs</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:10.83%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Net carrying value</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="19" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:21.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="16" style="vertical-align:bottom;white-space:nowrap;width:76.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:21.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2023 Notes</p></td><td style="vertical-align:bottom;width:1.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.77%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 20,173</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.88%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (967)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 19,206</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.88%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 131,695</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.88%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (11,925)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 119,770</p></td></tr><tr><td style="vertical-align:bottom;width:21.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2025 Notes</p></td><td style="vertical-align:bottom;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 132,500</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (17,302)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 115,198</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 132,500</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (22,097)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 110,403</p></td></tr><tr><td style="vertical-align:bottom;width:21.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2027 Notes</p></td><td style="vertical-align:bottom;width:1.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.77%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 125,000</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.88%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (29,966)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.05%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 95,034</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.88%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 125,000</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.88%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (34,058)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.83%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 90,942</p></td></tr><tr><td style="vertical-align:bottom;width:21.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><b style="font-weight:bold;">Net carrying value</b></p></td><td style="vertical-align:bottom;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 0pt 12pt;"><span style="font-size:10pt;font-weight:bold;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.77%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 277,673</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.88%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (48,235)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.05%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 229,438</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.88%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 389,195</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.88%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (68,080)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.83%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 321,115</p></td></tr></table><span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_InterestIncomeAndInterestExpenseDisclosureTableTextBlock', window );">Schedule of interest expense related to Convertible Senior Notes</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:52.87%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:12.68%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:12.68%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:12.68%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:52.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:43.94%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">For&#160;the year ended&#160;December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:52.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.71%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.71%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.71%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2019</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="11" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:52.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:43.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:52.87%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Cash Interest Expense</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.68%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.68%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.68%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:52.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Coupon interest expense - 2023 Notes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.68%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 3,138</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.68%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 7,390</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.68%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 9,315</p></td></tr><tr><td style="vertical-align:bottom;width:52.87%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Coupon interest expense - 2025 Notes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.68%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 4,637</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.68%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 554</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.68%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td></tr><tr><td style="vertical-align:bottom;width:52.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Coupon interest expense - 2027 Notes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.68%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 4,688</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.68%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 2,904</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.68%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td></tr><tr><td style="vertical-align:bottom;width:52.87%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Non-cash Interest Expense</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.68%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.68%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.68%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:52.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Amortization of debt discount/transaction costs- 2023 Notes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.68%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 4,932</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.68%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 10,887</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.68%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 12,676</p></td></tr><tr><td style="vertical-align:bottom;width:52.87%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Amortization of debt discount/transaction costs- 2025 Notes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.68%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 4,795</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.68%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 546</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.68%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td></tr><tr><td style="vertical-align:bottom;width:52.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Amortization of debt discount/transaction costs- 2027 Notes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.68%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 4,092</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.68%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 2,359</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.68%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td></tr><tr><td style="vertical-align:bottom;width:52.87%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><b style="font-weight:bold;">Total Interest Expense</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.68%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 26,282</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.68%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 24,640</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.68%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 21,991</p></td></tr></table><span></span>
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<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674062423048">
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<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Stockholders' Equity (Tables)<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
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<tr><th class="th"><div>Dec. 31, 2021</div></th></tr>
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<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:63.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.57%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:63.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New 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Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Gains&#160;(Losses)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:63.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Foreign</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">on Available</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:63.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Currency</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">for&#160;Sale&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:63.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.64%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Translation</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Securities</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.6%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Total</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="10" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:63.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:34.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:63.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Balance - December&#160;31, 2018</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.44%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 1,836</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.57%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.67%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (16)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.44%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 1,820</p></td></tr><tr><td style="vertical-align:bottom;width:63.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Other comprehensive income (loss)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 25</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.57%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.67%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 49</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 74</p></td></tr><tr><td style="vertical-align:bottom;width:63.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Balance - December&#160;31, 2019</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.44%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 1,861</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.57%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.67%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 33</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.44%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 1,894</p></td></tr><tr><td style="vertical-align:bottom;width:63.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Other comprehensive income (loss)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 5</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.57%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.67%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (53)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (48)</p></td></tr><tr><td style="vertical-align:bottom;width:63.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Balance - December&#160;31, 2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.44%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 1,866</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.57%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.67%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (20)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.44%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 1,846</p></td></tr><tr><td style="vertical-align:bottom;width:63.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Other comprehensive income (loss)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (52)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.57%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.67%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (311)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (363)</p></td></tr><tr><td style="vertical-align:bottom;width:63.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Balance - December&#160;31, 2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.44%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 1,814</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.57%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.67%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (331)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.44%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 1,483</p></td></tr></table><span></span>
</td>
</tr>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of the components of accumulated other comprehensive income (loss).</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 830<br> -SubTopic 30<br> -Section 50<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=6450520&amp;loc=d3e32583-110901<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section 45<br> -Paragraph 14A<br> -URI http://asc.fasb.org/extlink&amp;oid=124509347&amp;loc=SL7669686-108580<br><br>Reference 3: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 830<br> -SubTopic 30<br> -Section 45<br> -Paragraph 20<br> -URI http://asc.fasb.org/extlink&amp;oid=118261656&amp;loc=d3e32211-110900<br></p></div>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
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<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
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<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674062563192">
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<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Stock Plans (Tables)<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2021</div></th></tr>
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<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract', window );"><strong>Stock Plans</strong></a></td>
<td class="text">&#160;<span></span>
</td>
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<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ScheduleOfEmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsTextBlock', window );">Schedule of share-based compensation expense</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:61.97%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.62%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.65%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:61.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:33.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">For the year ended December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:61.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.91%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.92%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.94%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2019</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="11" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:61.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:33.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:61.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Cost of sales</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 2,373</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 1,870</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.65%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 1,903</p></td></tr><tr><td style="vertical-align:bottom;width:61.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Research and development</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 3,850</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 2,900</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 3,340</p></td></tr><tr><td style="vertical-align:bottom;width:61.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Selling, general, and administrative</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 9,026</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 7,933</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.65%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 9,630</p></td></tr><tr><td style="vertical-align:bottom;width:61.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Restructuring</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.62%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.64%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.65%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 397</p></td></tr><tr><td style="vertical-align:bottom;width:61.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.62%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 15,249</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.64%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 12,703</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.65%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 15,270</p></td></tr></table><span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ScheduleOfUnrecognizedCompensationCostNonvestedAwardsTableTextBlock', window );">Summary of unrecognized share-based compensation costs</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:69.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Unrecognized</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Weighted</b></p></td></tr><tr><td style="vertical-align:bottom;width:69.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Share-Based</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Average&#160;Period</b></p></td></tr><tr><td style="vertical-align:bottom;width:69.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Compensation</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Expected&#160;to&#160;be</b></p></td></tr><tr><td style="vertical-align:bottom;width:69.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.71%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Costs</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.67%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Recognized</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="6" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:69.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="3" style="vertical-align:bottom;white-space:nowrap;width:14.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in years)</i></p></td></tr><tr><td style="vertical-align:bottom;width:69.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Restricted stock units</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 2,064</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.67%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="font-size:10pt;"> 1.9</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Restricted stock awards</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 16,791</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="font-size:10pt;"> 1.9</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Performance share units</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.3%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 5,363</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.67%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="font-size:10pt;"> 2.1</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Total unrecognized share-based compensation cost</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.3%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 24,218</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="font-size:10pt;"> 1.9</span></p></td></tr></table><span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock', window );">Summary of stock option activity</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:71.5%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.6%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:10.92%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:71.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Weighted&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:71.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Number&#160;of</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Average</b></p></td></tr><tr><td style="vertical-align:bottom;width:71.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Shares</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.53%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Exercise&#160;Price</b></p></td></tr><tr><td style="vertical-align:bottom;width:71.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:71.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;white-space:pre-wrap;">Balance -  December&#160;31, 2018</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 1,222</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.6%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.92%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 34.80</p></td></tr><tr><td style="vertical-align:bottom;width:71.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Expired</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (103)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 33.97</p></td></tr><tr><td style="vertical-align:bottom;width:71.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;white-space:pre-wrap;">Balance -  December&#160;31, 2019</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 1,119</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.6%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.92%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 34.88</p></td></tr><tr><td style="vertical-align:bottom;width:71.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Expired</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (389)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 34.15</p></td></tr><tr><td style="vertical-align:bottom;width:71.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;white-space:pre-wrap;">Balance -  December&#160;31, 2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 730</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.6%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.92%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 35.26</p></td></tr><tr><td style="vertical-align:bottom;width:71.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Exercised</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (2)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 23.36</p></td></tr><tr><td style="vertical-align:bottom;width:71.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Expired</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (285)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.6%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.92%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 40.16</p></td></tr><tr><td style="vertical-align:bottom;width:71.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;white-space:pre-wrap;">Balance -  December&#160;31, 2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 443</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 32.15</p></td></tr></table><span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ScheduleOfShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeTextBlock', window );">Summary of information about stock option information</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:25.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.79%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:16.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:25.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="9" style="vertical-align:bottom;white-space:nowrap;width:71.09%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Options&#160;Outstanding and Exercisable</b></p></td></tr><tr><td style="vertical-align:bottom;width:25.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.79%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:16.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Weighted</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:15.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:25.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Aggregate</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:16.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Average</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:15.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Weighted</b></p></td></tr><tr><td style="vertical-align:bottom;width:25.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Intrinsic</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:16.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Remaining</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:15.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Average</b></p></td></tr><tr><td style="vertical-align:bottom;width:25.48%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;margin:0pt;"><b style="font-weight:bold;">Range&#160;of&#160;Exercise&#160;Prices</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Shares</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.87%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Value</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:16.7%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Contractual&#160;Life</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:15.48%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Exercise&#160;Price</b></p></td></tr><tr><td style="vertical-align:bottom;width:25.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:16.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;years)</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:15.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:25.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$20.00 - $30.00</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 12</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.79%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:16.7%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"><span style="font-size:8pt;"> 1.6</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="-sec-ix-hidden:Hidden_fJ7s2Z2xnEqsdcmd3aYg7g;"><span style="font-family:'Times New Roman','Times','serif';font-size:8pt;font-style:normal;font-weight:normal;">$</span></span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 29.26</p></td></tr><tr><td style="vertical-align:bottom;width:25.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$30.01 - $40.00</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 431</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.79%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:16.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"><span style="-sec-ix-hidden:Hidden_Od6T0xFOwEWWIugp-IBsQQ;"><span style="font-family:'Times New Roman','Times','serif';font-size:8pt;font-style:normal;font-weight:normal;"> 0.9</span></span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 32.22</p></td></tr><tr><td style="vertical-align:bottom;width:25.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.13%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 443</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.79%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:16.7%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"><span style="-sec-ix-hidden:Hidden_wySSYfbG00Wt32ljky0kfw;"><span style="font-family:'Times New Roman','Times','serif';font-size:8pt;font-style:normal;font-weight:normal;"> 1.0</span></span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 32.15</p></td></tr></table><span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_ScheduleOfStockOptionExercisedTableTextBlock', window );">Summary of stock options exercised</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:69.29%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:69.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:28.64%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Year ended December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:69.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.17%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.17%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2019</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="10" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:69.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:28.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:69.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Cash received from options exercised</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 37</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td></tr><tr><td style="vertical-align:bottom;width:69.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Intrinsic value of options exercised</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 6</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td></tr></table><span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ScheduleOfSharebasedCompensationRestrictedStockAndRestrictedStockUnitsActivityTableTextBlock', window );">Summary of non-vested restricted and performance shares activity</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:74.01%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.71%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:74.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Weighted</b></p></td></tr><tr><td style="vertical-align:bottom;width:74.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Average</b></p></td></tr><tr><td style="vertical-align:bottom;width:74.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Number&#160;of</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Grant&#160;Date</b></p></td></tr><tr><td style="vertical-align:bottom;width:74.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Shares</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.01%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Fair&#160;Value</b></p></td></tr><tr><td style="vertical-align:bottom;width:74.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:74.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;white-space:pre-wrap;">Balance -  December&#160;31, 2018</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 2,218</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 20.74</p></td></tr><tr><td style="vertical-align:bottom;width:74.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Granted</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 1,107</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 11.53</p></td></tr><tr><td style="vertical-align:bottom;width:74.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Performance award adjustments</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (25)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 28.91</p></td></tr><tr><td style="vertical-align:bottom;width:74.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Vested</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (768)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 21.77</p></td></tr><tr><td style="vertical-align:bottom;width:74.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Forfeited</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (275)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 18.48</p></td></tr><tr><td style="vertical-align:bottom;width:74.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;white-space:pre-wrap;">Balance -  December&#160;31, 2019</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 2,257</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 16.20</p></td></tr><tr><td style="vertical-align:bottom;width:74.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Granted</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 1,054</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 9.53</p></td></tr><tr><td style="vertical-align:bottom;width:74.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Performance award adjustments</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (51)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 30.94</p></td></tr><tr><td style="vertical-align:bottom;width:74.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Vested</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (798)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 16.01</p></td></tr><tr><td style="vertical-align:bottom;width:74.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Forfeited</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (422)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 14.87</p></td></tr><tr><td style="vertical-align:bottom;width:74.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;white-space:pre-wrap;">Balance -  December&#160;31, 2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 2,040</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 12.73</p></td></tr><tr><td style="vertical-align:bottom;width:74.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Granted</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 1,031</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 24.26</p></td></tr><tr><td style="vertical-align:bottom;width:74.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Performance award adjustments</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 159</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 18.38</p></td></tr><tr><td style="vertical-align:bottom;width:74.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Vested</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (1,014)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 15.50</p></td></tr><tr><td style="vertical-align:bottom;width:74.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Forfeited</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (133)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 15.08</p></td></tr><tr><td style="vertical-align:bottom;width:74.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;white-space:pre-wrap;">Balance -  December&#160;31, 2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 2,083</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 17.33</p></td></tr></table><span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_ScheduleOfShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsValuationAssumptionsTableTextBlock', window );">Summary of valuation assumptions for performance awards</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:67.07%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.71%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:6.33%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:6.33%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:6.48%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:67.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:28.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Year ended December&#160;31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:7.36%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;width:7.37%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;width:8.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2019</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Weighted average fair value</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;width:6.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 27.81</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;width:6.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 10.59</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;width:6.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 16.45</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Dividend yield</p></td><td style="vertical-align:bottom;width:1.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 0</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 0</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 0</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td></tr><tr><td style="vertical-align:bottom;width:67.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Expected volatility factor<sup style="font-family:'Calibri','Helvetica','sans-serif';font-size:8.25pt;line-height:100%;top:0pt;vertical-align:top;">(1)</sup></p></td><td style="vertical-align:bottom;width:1.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 63</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 60</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;width:1.72%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 53</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td></tr></table><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr><td style="vertical-align:bottom;width:67.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Risk-free interest rate<sup style="font-family:'Calibri','Helvetica','sans-serif';font-size:8.25pt;line-height:100%;top:0pt;vertical-align:top;">(2)</sup></p></td><td style="vertical-align:bottom;width:1.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 0.34</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 0.54</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 2.37</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td></tr><tr><td style="vertical-align:bottom;width:67.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Expected life (in years)<sup style="font-family:'Calibri','Helvetica','sans-serif';font-size:8.25pt;line-height:100%;top:0pt;vertical-align:top;">(3)</sup></p></td><td style="vertical-align:bottom;width:1.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="font-size:10pt;"> 3.0</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="font-size:10pt;"> 3.0</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;width:1.72%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="font-size:10pt;"> 2.8</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr></table><div style="font-family:'Times New Roman','Times','serif';font-size:9.0pt;margin-bottom:0pt;margin-top:0pt;min-height:1.19em;position:relative;width:100%;"><div style="background-color:#000000;height:1pt;position:relative;top:0.6em;width:25.0%;border:none;margin:0 auto 0 0;"/></div><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Times New Roman','Times','serif';font-size:9pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">(1)</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:9pt;font-style:normal;font-weight:normal;">Expected volatility is measured using historical daily price changes of the Company&#8217;s stock over the respective expected term.</span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Times New Roman','Times','serif';font-size:9pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">(2)</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:9pt;font-style:normal;font-weight:normal;">The risk-free rate for periods within the contractual term is based on the U.S. Treasury yield curve in effect at the time of grant.</span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Times New Roman','Times','serif';font-size:9pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">(3)</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:9pt;font-style:normal;font-weight:normal;">The expected life is the number of years the Company estimates that the awards will be outstanding prior to exercise. </span></td></tr></table><span></span>
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<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ScheduleOfShareBasedPaymentAwardEmployeeStockPurchasePlanValuationAssumptionsTableTextBlock', window );">Summary of valuation assumptions for employee stock purchase plan</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;min-height:0.0pt;margin:0pt;"><span style="font-size:0pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:67.21%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.35%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:6.14%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:3.43%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:6.15%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:3.43%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:6.15%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:67.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:29.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Year ended December&#160;31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:67.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:7.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;width:7.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;width:7.53%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2019</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:67.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Weighted average fair value</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.35%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;width:6.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 5.90</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;width:6.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 4.81</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.37%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;width:6.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 2.96</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Dividend yield</p></td><td style="vertical-align:bottom;width:1.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 0</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 0</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;width:1.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 0</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%</p></td></tr><tr><td style="vertical-align:bottom;width:67.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Expected volatility factor<sup style="font-size:7.5pt;line-height:100%;top:0pt;vertical-align:top;">(1)</sup></p></td><td style="vertical-align:bottom;width:1.35%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 52</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 70</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;width:1.37%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 60</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%</p></td></tr><tr><td style="vertical-align:bottom;width:67.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Risk-free interest rate<sup style="font-size:7.5pt;line-height:100%;top:0pt;vertical-align:top;">(2)</sup></p></td><td style="vertical-align:bottom;width:1.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 0.07</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 0.95</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;width:1.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 2.41</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%</p></td></tr><tr><td style="vertical-align:bottom;width:67.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Expected life (in years)<sup style="font-size:7.5pt;line-height:100%;top:0pt;vertical-align:top;">(3)</sup></p></td><td style="vertical-align:bottom;width:1.35%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="font-size:10pt;"> 0.5</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="font-size:10pt;"> 0.5</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;width:1.37%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="font-size:10pt;"> 0.5</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr></table><span></span>
</td>
</tr>
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<div style="display: none;">
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<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ScheduleOfEmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of allocation of amount expensed and capitalized for award under share-based payment arrangement to statement of income or comprehensive income and statement of financial position. Includes, but is not limited to, corresponding line item in financial statement.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (h)(1)<br> -URI http://asc.fasb.org/extlink&amp;oid=120381028&amp;loc=d3e5070-113901<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SAB Topic 14.F)<br> -URI http://asc.fasb.org/extlink&amp;oid=122041274&amp;loc=d3e301413-122809<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=120381028&amp;loc=d3e5047-113901<br></p></div>
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<tr>
<td><strong> Name:</strong></td>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure for stock option plans. Includes, but is not limited to, outstanding awards at beginning and end of year, grants, exercises, forfeitures, and weighted-average grant date fair value.</p></div>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of the significant assumptions used during the year to estimate the fair value of employee stock purchase plans, including, but not limited to: (a) expected term, (b) expected volatility of the entity's shares, (c) expected dividends, (d) risk-free rate(s), and (e) discount for post-vesting restrictions.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (f)(2)<br> -URI http://asc.fasb.org/extlink&amp;oid=120381028&amp;loc=d3e5070-113901<br></p></div>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Disclosure of the number and weighted-average grant date fair value for restricted stock and restricted stock units that were outstanding at the beginning and end of the year, and the number of restricted stock and restricted stock units that were granted, vested, or forfeited during the year.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (i)<br> -URI http://asc.fasb.org/extlink&amp;oid=120381028&amp;loc=d3e5070-113901<br></p></div>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
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<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674062339544">
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<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Dispositions (Tables)<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
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<tr><th class="th"><div>Dec. 31, 2021</div></th></tr>
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<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;min-height:0.0pt;margin:0pt;"><span style="font-size:0pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:85.52%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:80.53%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New 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style="vertical-align:bottom;width:80.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:80.53%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Net assets sold:</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';">&#160;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:16.08%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td></tr><tr><td style="vertical-align:top;width:80.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Inventories</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 6,311</p></td></tr><tr><td style="vertical-align:top;width:80.53%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Property, plant, and equipment, net</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 372</p></td></tr><tr><td style="vertical-align:top;width:80.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Intangible assets, net</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 6,546</p></td></tr><tr><td style="vertical-align:top;width:80.53%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Goodwill</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 2,359</p></td></tr><tr><td style="vertical-align:top;width:80.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Deferred revenue</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.05%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.02%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (59)</p></td></tr><tr><td style="vertical-align:top;width:80.53%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;white-space:pre-wrap;">    Total net assets sold</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 15,529</p></td></tr><tr><td style="vertical-align:top;width:80.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Net proceeds after costs to sell</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.05%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.02%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (11,228)</p></td></tr><tr><td style="vertical-align:top;width:80.53%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;white-space:pre-wrap;">    Total impairment on sale of disposal group</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.05%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.02%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 4,301</p></td></tr></table><span></span>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of information related to a disposal group. Includes, but is not limited to, a discontinued operation, disposal classified as held-for-sale or disposed of by means other than sale or disposal of an individually significant component.</p></div>
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<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674064010680">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Income Taxes (Tables)<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2021</div></th></tr>
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<td class="text">&#160;<span></span>
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<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:62.38%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.45%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.45%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:62.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:35.55%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Year ended December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:62.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.95%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2019</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="10" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:62.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:35.55%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:62.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Domestic</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 23,561</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (10,292)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (78,486)</p></td></tr><tr><td style="vertical-align:bottom;width:62.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Foreign</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 2,119</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.45%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 1,828</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.45%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 530</p></td></tr><tr><td style="vertical-align:bottom;width:62.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Total</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 25,680</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.45%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (8,464)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.45%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (77,956)</p></td></tr></table><span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ScheduleOfComponentsOfIncomeTaxExpenseBenefitTableTextBlock', window );">Schedule of components of the expense (benefit) for income taxes</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:69.23%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.89%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:69.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:28.7%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Year ended December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:69.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.17%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.19%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.21%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2019</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="10" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:69.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:28.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:69.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Current:</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.89%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Federal</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td></tr><tr><td style="vertical-align:bottom;width:69.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Foreign</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.89%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 183</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 22</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 304</p></td></tr><tr><td style="vertical-align:bottom;width:69.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">State and local</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 110</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 204</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 113</p></td></tr><tr><td style="vertical-align:bottom;width:69.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;">Total current expense (benefit) for income taxes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.89%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 293</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 226</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 417</p></td></tr><tr><td style="vertical-align:bottom;width:69.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Deferred:</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Federal</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.89%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 119</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 136</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 162</p></td></tr><tr><td style="vertical-align:bottom;width:69.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Foreign</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (507)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (320)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 116</p></td></tr><tr><td style="vertical-align:bottom;width:69.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">State and local</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.89%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (263)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (115)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 82</p></td></tr><tr><td style="vertical-align:bottom;width:69.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;">Total deferred expense (benefit) for income taxes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (651)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (299)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 360</p></td></tr><tr><td style="vertical-align:bottom;width:69.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Total expense (benefit) for income taxes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.89%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (358)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (73)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 777</p></td></tr></table><span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ScheduleOfEffectiveIncomeTaxRateReconciliationTableTextBlock', window );">Schedule of reconciliation of the income tax expense computed using the Federal statutory rate to actual income tax provision</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;min-height:0.0pt;margin:0pt;"><span style="font-size:0pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"><tr style="height:1pt;"><td style="vertical-align:middle;width:64.17%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:50%;transform:translate(0,-50%);width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.45%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:64.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:33.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Year ended December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:64.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.45%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.45%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2019</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="10" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:64.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:33.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:middle;width:64.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Income tax expense (benefit) at U.S. statutory rates</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 5,393</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (1,777)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (16,396)</p></td></tr><tr><td style="vertical-align:middle;width:64.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">State taxes, net of U.S. federal impact</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (607)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (121)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (835)</p></td></tr><tr><td style="vertical-align:middle;width:64.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Effect of international operations</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 609</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (131)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 785</p></td></tr><tr><td style="vertical-align:middle;width:64.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Research and development tax credit</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (3,964)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 726</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (1,692)</p></td></tr><tr><td style="vertical-align:middle;width:64.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Net change in valuation allowance</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (2,389)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 388</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 15,098</p></td></tr><tr><td style="vertical-align:middle;width:64.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Change in accrual for unrecognized tax benefits</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 398</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (6)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 1,232</p></td></tr><tr><td style="vertical-align:middle;width:64.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Share-based compensation</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 1,208</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 2,248</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 1,947</p></td></tr><tr><td style="vertical-align:middle;width:64.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Asset impairment</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 728</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 495</p></td></tr><tr><td style="vertical-align:middle;width:64.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Partial extinguishment of 2023 Notes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (1,090)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (2,292)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td></tr><tr><td style="vertical-align:middle;width:64.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Other</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 84</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 164</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.45%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 143</p></td></tr><tr><td style="vertical-align:middle;width:64.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Total expense (benefit) for income taxes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (358)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (73)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.45%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 777</p></td></tr></table><span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ScheduleOfDeferredTaxAssetsAndLiabilitiesTableTextBlock', window );">Schedule of deferred tax assets and liabilities</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;min-height:0.0pt;margin:0pt;"><span style="font-size:0pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"><tr style="height:1pt;"><td style="vertical-align:middle;width:71.8%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:50%;transform:translate(0,-50%);width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:71.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:26.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:71.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.02%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.04%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="7" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:71.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:26.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td></tr><tr><td style="vertical-align:middle;width:71.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Deferred tax assets:&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:middle;width:71.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Inventory valuation</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 11,822</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 10,949</p></td></tr><tr><td style="vertical-align:middle;width:71.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Net operating losses</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 38,816</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 51,260</p></td></tr><tr><td style="vertical-align:middle;width:71.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Credit carry forwards</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 57,810</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 54,160</p></td></tr><tr><td style="vertical-align:middle;width:71.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Warranty and installation accruals</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 1,730</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 1,045</p></td></tr><tr><td style="vertical-align:middle;width:71.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Share-based compensation</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 4,033</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 4,587</p></td></tr><tr><td style="vertical-align:middle;width:71.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Customer deposits and deferred revenue</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 9,908</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 10,982</p></td></tr><tr><td style="vertical-align:middle;width:71.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Operating leases</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 8,464</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 2,281</p></td></tr><tr><td style="vertical-align:middle;width:71.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Other</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 5,880</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 4,741</p></td></tr><tr><td style="vertical-align:middle;width:71.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Total deferred tax assets</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 138,463</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 140,005</p></td></tr><tr><td style="vertical-align:middle;width:71.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Valuation allowance</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (116,054)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (118,443)</p></td></tr><tr><td style="vertical-align:middle;width:71.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Net deferred tax assets</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 22,409</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 21,562</p></td></tr><tr><td style="vertical-align:middle;width:71.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:middle;width:71.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Deferred tax liabilities:&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:middle;width:71.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Purchased intangible assets</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 6,633</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 7,227</p></td></tr><tr><td style="vertical-align:middle;width:71.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Convertible Senior Notes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 10,018</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 13,674</p></td></tr><tr><td style="vertical-align:middle;width:71.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Operating leases</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 6,539</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 2,241</p></td></tr><tr><td style="vertical-align:middle;width:71.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Depreciation</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 2,372</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 2,220</p></td></tr><tr><td style="vertical-align:middle;width:71.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Total deferred tax liabilities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 25,562</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 25,362</p></td></tr><tr><td style="vertical-align:middle;width:71.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Net deferred taxes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (3,153)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.75%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (3,800)</p></td></tr></table><span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SummaryOfIncomeTaxContingenciesTextBlock', window );">Schedule of reconciliation of beginning and ending amount of uncertain tax positions</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;min-height:0.0pt;margin:0pt;"><span style="font-size:0pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:63.94%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.67%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:63.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:33.99%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:63.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.95%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.95%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2019</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="10" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:63.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:33.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:63.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Balance at beginning of year</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 12,363</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.67%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 12,369</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 11,137</p></td></tr><tr><td style="vertical-align:bottom;width:63.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Additions for tax positions related to current year</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 2,642</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 1,217</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 3,075</p></td></tr><tr><td style="vertical-align:bottom;width:63.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Additions for tax positions related to prior years</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 50</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.67%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 47</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 21</p></td></tr><tr><td style="vertical-align:bottom;width:63.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Reductions for tax positions related to prior years</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (1,196)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (1,166)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (1,814)</p></td></tr><tr><td style="vertical-align:bottom;width:63.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Reductions due to the lapse of the statute of limitations</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.67%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td></tr><tr><td style="vertical-align:bottom;width:63.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Settlements</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (1,098)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.67%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (104)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (50)</p></td></tr><tr><td style="vertical-align:bottom;width:63.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Balance at end of year</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 12,761</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.67%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 12,363</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 12,369</p></td></tr></table><span></span>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of the components of income tax expense attributable to continuing operations for each year presented including, but not limited to: current tax expense (benefit), deferred tax expense (benefit), investment tax credits, government grants, the benefits of operating loss carryforwards, tax expense that results from allocating certain tax benefits either directly to contributed capital or to reduce goodwill or other noncurrent intangible assets of an acquired entity, adjustments of a deferred tax liability or asset for enacted changes in tax laws or rates or a change in the tax status of the entity, and adjustments of the beginning-of-the-year balances of a valuation allowance because of a change in circumstances that causes a change in judgment about the realizability of the related deferred tax asset in future years.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 9<br> -URI http://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32639-109319<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of the components of net deferred tax asset or liability recognized in an entity's statement of financial position, including the following: the total of all deferred tax liabilities, the total of all deferred tax assets, the total valuation allowance recognized for deferred tax assets.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -URI http://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32537-109319<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of the reconciliation using percentage or dollar amounts of the reported amount of income tax expense attributable to continuing operations for the year to the amount of income tax expense that would result from applying domestic federal statutory tax rates to pretax income from continuing operations.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 12<br> -URI http://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32687-109319<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of income before income tax between domestic and foreign jurisdictions.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(h)(1)(Note 1))<br> -URI http://asc.fasb.org/extlink&amp;oid=120395691&amp;loc=d3e23780-122690<br></p></div>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure for tax positions taken in the tax returns filed or to be filed for which it is more likely than not that the tax position will not be sustained upon examination by taxing authorities and other income tax contingencies. Includes, but is not limited to, interest and penalties, reconciliation of unrecognized tax benefits, unrecognized tax benefits that would affect the effective tax rate, tax years that remain subject to examination by tax jurisdictions, and information about positions for which it is reasonably possible that amounts unrecognized will significantly change within 12 months.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 15A<br> -URI http://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=SL6600010-109319<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 15<br> -Subparagraph (d)<br> -URI http://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32718-109319<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 19<br> -URI http://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32840-109319<br></p></div>
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<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674063628536">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Segment Reporting and Geographic Information (Tables)<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2021</div></th></tr>
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<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SegmentReportingAbstract', window );"><strong>Segment Reporting and Geographic Information</strong></a></td>
<td class="text">&#160;<span></span>
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<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ScheduleOfEntityWideInformationRevenueFromExternalCustomersByProductsAndServicesTextBlock', window );">Schedule of sales by end-market</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;min-height:0.0pt;margin:0pt;"><span style="font-size:0pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80.72%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:58.5%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.82%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.82%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.84%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:58.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:37.4%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">For&#160;the year ended December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:58.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.1%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.1%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.11%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2019</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="11" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:58.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:37.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:58.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Sales by end-market</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:58.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Semiconductor</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 247,051</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 165,909</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 175,608</p></td></tr><tr><td style="vertical-align:bottom;width:58.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Compound Semiconductor</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 106,972</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 107,922</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 85,877</p></td></tr><tr><td style="vertical-align:bottom;width:58.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Data Storage</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 168,760</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 123,288</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 84,075</p></td></tr><tr><td style="vertical-align:bottom;width:58.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Scientific &amp; Other</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.82%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 60,494</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.82%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 57,044</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.84%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 73,789</p></td></tr><tr><td style="vertical-align:bottom;width:58.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.82%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 583,277</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.82%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 454,163</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.84%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 419,349</p></td></tr></table><span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsByGeographicalAreasTableTextBlock', window );">Schedule of sales by geographic region</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:39.34%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.94%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:39.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:30.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Net&#160;Sales&#160;to&#160;Unaffiliated Customers</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:27.16%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Long-lived&#160;Tangible&#160;Assets</b></p></td></tr><tr><td style="vertical-align:bottom;width:39.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2019</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.98%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2019</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="19" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:39.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="17" style="vertical-align:bottom;white-space:nowrap;width:59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:39.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">United States</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 217,209</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 145,353</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 126,160</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 99,220</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 64,967</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 75,187</p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:39.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">EMEA<sup style="font-family:'Calibri','Helvetica','sans-serif';font-size:8.25pt;line-height:100%;top:0pt;vertical-align:top;">(1)</sup></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 55,129</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 73,124</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 57,351</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 94</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 120</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 143</p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:39.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">China</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 105,998</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 57,589</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 71,078</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 67</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 84</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 130</p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:39.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Rest of APAC</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 204,633</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 177,569</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 164,363</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 362</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 100</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 251</p></td></tr><tr><td style="vertical-align:bottom;width:39.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Rest of World</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 308</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 528</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 397</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.94%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td></tr><tr><td style="vertical-align:bottom;width:39.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Total </p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 583,277</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 454,163</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 419,349</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 99,743</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 65,271</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.94%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 75,711</p></td></tr></table><div style="font-family:'Times New Roman','Times','serif';font-size:9.0pt;margin-bottom:0pt;margin-top:0pt;min-height:1.19em;position:relative;width:100%;"><div style="background-color:#000000;height:1pt;position:relative;top:0.6em;width:25.0%;border:none;margin:0 auto 0 0;"/></div><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Times New Roman','Times','serif';font-size:9pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">(1)</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:9pt;font-style:normal;font-weight:normal;">EMEA consists of Europe, the Middle East, and Africa</span></td></tr></table><span></span>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of entity-wide revenues from external customers for each product or service or each group of similar products or services if the information is not provided as part of the reportable operating segment information.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 40<br> -URI http://asc.fasb.org/extlink&amp;oid=123359005&amp;loc=d3e9031-108599<br></p></div>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of information concerning material long-lived assets (excluding financial instruments, customer relationships with financial institutions, mortgage and other servicing rights, deferred policy acquisition costs, and deferred taxes assets) located in identified geographic areas and/or the amount of revenue from external customers attributed to that country from which revenue is material.  An entity may also provide subtotals of geographic information about groups of countries.</p></div>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
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<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Significant Accounting Policies - Description of Business (Details) - segment<br></strong></div></th>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Number of operating segments. An operating segment is a component of an enterprise: (a) that engages in business activities from which it may earn revenues and incur expenses (including revenues and expenses relating to transactions with other components of the same enterprise), (b) whose operating results are regularly reviewed by the enterprise's chief operating decision maker to make decisions about resources to be allocated to the segment and assess its performance, and (c) for which discrete financial information is available. An operating segment may engage in business activities for which it has yet to earn revenues, for example, start-up operations may be operating segments before earning revenues.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 18<br> -URI http://asc.fasb.org/extlink&amp;oid=123359005&amp;loc=d3e8672-108599<br></p></div>
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<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RevenuePracticalExpedientIncrementalCostOfObtainingContract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Indicates (true false) whether practical expedient was elected to recognize incremental cost of obtaining contract as expense when incurred if amortization period would have been one year or less.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 340<br> -SubTopic 40<br> -Section 50<br> -Paragraph 5<br> -URI http://asc.fasb.org/extlink&amp;oid=123353750&amp;loc=SL51790836-203054<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 606<br> -SubTopic 10<br> -Section 50<br> -Paragraph 22<br> -URI http://asc.fasb.org/extlink&amp;oid=123351226&amp;loc=SL49130569-203045<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RevenuePracticalExpedientIncrementalCostOfObtainingContract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:booleanItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
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<DOCUMENT>
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<html>
<head>
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<link rel="stylesheet" type="text/css" href="report.css">
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<body>
<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674062396696">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Significant Accounting Policies - Warranty Costs (Details)<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2021</div></th></tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract', window );"><strong>Significant Accounting Policies</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_ProductWarrantyPeriod', window );">Warranty period</a></td>
<td class="text">1 year<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_ProductWarrantyPeriod">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Represents the warranty period from the date of final acceptance on the products purchased by customers.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_ProductWarrantyPeriod</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
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<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
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<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674060507112">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Significant Accounting Policies - Advertising Expense (Details) - USD ($)<br> $ in Millions</strong></div></th>
<th class="th" colspan="3">12 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2021</div></th>
<th class="th"><div>Dec. 31, 2020</div></th>
<th class="th"><div>Dec. 31, 2019</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract', window );"><strong>Significant Accounting Policies</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AdvertisingExpense', window );">Advertising expense</a></td>
<td class="nump">$ 0.3<span></span>
</td>
<td class="nump">$ 0.4<span></span>
</td>
<td class="nump">$ 0.5<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AdvertisingExpense">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount charged to advertising expense for the period, which are expenses incurred with the objective of increasing revenue for a specified brand, product or product line.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 720<br> -SubTopic 35<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=6420018&amp;loc=d3e36677-107848<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AdvertisingExpense</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
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<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
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<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
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<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674062412520">
<tr>
<th class="tl" colspan="1" rowspan="1"><div style="width: 200px;"><strong>Significant Accounting Policies - Accounting for Share-Based Compensation (Details)<br></strong></div></th>
<th class="th">
<div>Dec. 31, 2021 </div>
<div>item</div>
</th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract', window );"><strong>Significant Accounting Policies</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardServiceConditionsAndGradedVestingNumberOfAwards', window );">Number of awards with which entity has elected to treat awards with only service conditions and with graded vesting</a></td>
<td class="nump">1<span></span>
</td>
</tr>
</table>
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<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardServiceConditionsAndGradedVestingNumberOfAwards">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Number of awards with which entity has elected to treat awards with only service conditions and with graded vesting.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardServiceConditionsAndGradedVestingNumberOfAwards</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:integerItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
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<html>
<head>
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<link rel="stylesheet" type="text/css" href="report.css">
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<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674063874632">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Significant Accounting Policies - Concentration of Credit Risk (Details) - USD ($)<br> $ in Millions</strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
<th class="th" colspan="1"></th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2021</div></th>
<th class="th"><div>Dec. 31, 2020</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract', window );"><strong>Significant Accounting Policies</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent', window );">Allowance for doubtful accounts receivable</a></td>
<td class="nump">$ 0.7<span></span>
</td>
<td class="nump">$ 0.7<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_IrrevocableLettersOfCreditMaturityPeriodMinimum', window );">Maturity period of irrevocable letters of credit, minimum</a></td>
<td class="text">0 days<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_IrrevocableLettersOfCreditMaturityPeriodMaximum', window );">Maturity period of irrevocable letters of credit, maximum</a></td>
<td class="text">90 days<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of allowance for credit loss on accounts receivable, classified as current.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(4)<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 310<br> -SubTopic 10<br> -Section 50<br> -Paragraph 4<br> -URI http://asc.fasb.org/extlink&amp;oid=123577603&amp;loc=d3e5074-111524<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 326<br> -SubTopic 20<br> -Section 45<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=124255206&amp;loc=SL82895884-210446<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
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<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
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<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Represents the maximum period over which irrevocable letters of credit mature.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Represents the minimum period over which irrevocable letters of credit mature.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
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<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674060316104">
<tr>
<th class="tl" colspan="1" rowspan="1"><div style="width: 200px;"><strong>Significant Accounting Policies - Cash, Cash Equivalents, and Short-term Investments (Details) - USD ($)<br> $ in Millions</strong></div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
<th class="th"><div>Dec. 31, 2020</div></th>
</tr>
<tr class="re">
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</tr>
<tr class="ro">
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<tr class="re">
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</td>
<td class="nump">31.00%<span></span>
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</tr>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of short-term, highly liquid investments that are both readily convertible to known amounts of cash and so near their maturity that they present insignificant risk of changes in value because of changes in interest rates. Excludes cash and cash equivalents within disposal group and discontinued operation.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.1)<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Represents the percentage of cash and cash equivalents maintained outside of the United States by subsidiaries.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
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<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674062336664">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Significant Accounting Policies - Goodwill and Indefinite-Lived Intangibles (Details)<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2021</div></th></tr>
<tr class="re">
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<td class="text">&#160;<span></span>
</td>
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<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_NumberOfTradingDaysConsideredToCalculateMarketCapitalization', window );">Number of trading days used in adjusted market capitalization calculation</a></td>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
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<td><strong> Name:</strong></td>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Number of trading days for calculating the average share price of the Company's common stock prior to the measurement date used in adjusted market capitalization calculation.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
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<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674068553848">
<tr>
<th class="tl" colspan="1" rowspan="1"><div style="width: 200px;"><strong>Significant Accounting Policies - Change in Accounting Policy (Details)<br></strong></div></th>
<th class="th"><div>Apr. 01, 2020</div></th>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Indicates (true false) whether accounting standards update was adopted.</p></div>
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<th class="th"><div>Jan. 01, 2022</div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount, after unamortized (discount) premium and debt issuance costs, of long-term debt. Includes, but not limited to, notes payable, bonds payable, debentures, mortgage loans and commercial paper. Excludes capital lease obligations.</p></div>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Total of all stockholders' equity (deficit) items, net of receivables from officers, directors, owners, and affiliates of the entity which are attributable to the parent. The amount of the economic entity's stockholders' equity attributable to the parent excludes the amount of stockholders' equity which is allocable to that ownership interest in subsidiary equity which is not attributable to the parent (noncontrolling interest, minority interest). This excludes temporary equity and is sometimes called permanent equity.</p></div>
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<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674060933672">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Income (Loss) Per Share - Basic and Diluted (Details) - USD ($)<br> $ / shares in Units, shares in Thousands, $ in Thousands</strong></div></th>
<th class="th" colspan="3">12 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2021</div></th>
<th class="th"><div>Dec. 31, 2020</div></th>
<th class="th"><div>Dec. 31, 2019</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EarningsPerShareAbstract', window );"><strong>Income (Loss) Per Share</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic', window );">Net income (loss), Basic</a></td>
<td class="nump">$ 26,038<span></span>
</td>
<td class="num">$ (8,391)<span></span>
</td>
<td class="num">$ (78,733)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_NetIncomeLossAvailableToCommonStockholdersDiluted', window );">Net income (loss), Diluted</a></td>
<td class="nump">$ 26,038<span></span>
</td>
<td class="num">$ (8,391)<span></span>
</td>
<td class="num">$ (78,733)<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EarningsPerShareBasicAndDilutedAbstract', window );"><strong>Net income (loss) per common share:</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EarningsPerShareBasic', window );">Basic (in dollars per share)</a></td>
<td class="nump">$ 0.53<span></span>
</td>
<td class="num">$ (0.17)<span></span>
</td>
<td class="num">$ (1.66)<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EarningsPerShareDiluted', window );">Diluted (in dollars per share)</a></td>
<td class="nump">$ 0.49<span></span>
</td>
<td class="num">$ (0.17)<span></span>
</td>
<td class="num">$ (1.66)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_WeightedAverageNumberOfSharesOutstandingDilutedDisclosureItemsAbstract', window );"><strong>Weighted average shares reconciliation</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_WeightedAverageNumberOfSharesOutstandingBasic', window );">Basic weighted average shares outstanding</a></td>
<td class="nump">49,073<span></span>
</td>
<td class="nump">48,362<span></span>
</td>
<td class="nump">47,482<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_WeightedAverageNumberDilutedSharesOutstandingAdjustment', window );">Effect of potentially dilutive share-based awards</a></td>
<td class="nump">1,090<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncrementalCommonSharesAttributableToConversionOfDebtSecurities', window );">Dilutive effect of convertible notes</a></td>
<td class="nump">3,480<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding', window );">Diluted weighted average shares outstanding</a></td>
<td class="nump">53,643<span></span>
</td>
<td class="nump">48,362<span></span>
</td>
<td class="nump">47,482<span></span>
</td>
</tr>
</table>
<div style="display: none;">
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<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EarningsPerShareAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
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<td><strong> Balance Type:</strong></td>
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<td><strong> Period Type:</strong></td>
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</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EarningsPerShareBasic">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The amount of net income (loss) for the period per each share of common stock or unit outstanding during the reporting period.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 815<br> -SubTopic 40<br> -Section 65<br> -Paragraph 1<br> -Subparagraph (e)(4)<br> -URI http://asc.fasb.org/extlink&amp;oid=123482062&amp;loc=SL123482106-238011<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -URI http://asc.fasb.org/extlink&amp;oid=124431687&amp;loc=d3e22583-107794<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 11<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=124431687&amp;loc=d3e22694-107794<br><br>Reference 4: 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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EarningsPerShareBasic</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
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<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:perShareItemType</td>
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<td><strong> Balance Type:</strong></td>
<td>na</td>
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<td><strong> Period Type:</strong></td>
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<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EarningsPerShareBasicAndDilutedAbstract</td>
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<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
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<td><strong> Balance Type:</strong></td>
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<td><strong> Period Type:</strong></td>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The amount of net income (loss) for the period available to each share of common stock or common unit outstanding during the reporting period and to each share or unit that would have been outstanding assuming the issuance of common shares or units for all dilutive potential common shares or units outstanding during the reporting period.</p></div>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EarningsPerShareDiluted</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
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<tr>
<td><strong> Data Type:</strong></td>
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<td><strong> Balance Type:</strong></td>
<td>na</td>
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<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncrementalCommonSharesAttributableToConversionOfDebtSecurities">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Additional shares included in the calculation of diluted EPS as a result of the potentially dilutive effect of convertible debt securities using the if-converted method.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 40<br> -Subparagraph (c)<br> -URI http://asc.fasb.org/extlink&amp;oid=125511455&amp;loc=d3e1930-109256<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 42<br> -URI http://asc.fasb.org/extlink&amp;oid=125511455&amp;loc=d3e2029-109256<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=124432515&amp;loc=d3e3550-109257<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncrementalCommonSharesAttributableToConversionOfDebtSecurities</td>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount, after deduction of tax, noncontrolling interests, dividends on preferred stock and participating securities; of income (loss) available to common shareholders.</p></div>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic</td>
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<td>xbrli:monetaryItemType</td>
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<td><strong> Period Type:</strong></td>
<td>duration</td>
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<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_NetIncomeLossAvailableToCommonStockholdersDiluted">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount, after deduction of tax, noncontrolling interests, dividends on preferred stock and participating securities, and addition from assumption of issuance of common shares for dilutive potential common shares; of income (loss) available to common shareholders.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 40<br> -Subparagraph (b)(2)<br> -URI http://asc.fasb.org/extlink&amp;oid=125511455&amp;loc=d3e1930-109256<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 40<br> -Subparagraph (b)(3)<br> -URI http://asc.fasb.org/extlink&amp;oid=125511455&amp;loc=d3e1930-109256<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 60B<br> -Subparagraph (c)<br> -URI http://asc.fasb.org/extlink&amp;oid=125511455&amp;loc=SL5780133-109256<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=124432515&amp;loc=d3e3550-109257<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 40<br> -Subparagraph (b)(1)<br> -URI http://asc.fasb.org/extlink&amp;oid=125511455&amp;loc=d3e1930-109256<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 16<br> -URI http://asc.fasb.org/extlink&amp;oid=125511455&amp;loc=d3e1505-109256<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 40<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=125511455&amp;loc=d3e1930-109256<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_NetIncomeLossAvailableToCommonStockholdersDiluted</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
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<td>xbrli:monetaryItemType</td>
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<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The sum of dilutive potential common shares or units used in the calculation of the diluted per-share or per-unit computation.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=124432515&amp;loc=d3e3550-109257<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_WeightedAverageNumberDilutedSharesOutstandingAdjustment</td>
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<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The average number of shares or units issued and outstanding that are used in calculating diluted EPS or earnings per unit (EPU), determined based on the timing of issuance of shares or units in the period.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=124432515&amp;loc=d3e3550-109257<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 16<br> -URI http://asc.fasb.org/extlink&amp;oid=125511455&amp;loc=d3e1505-109256<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding</td>
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<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Number of [basic] shares or units, after adjustment for contingently issuable shares or units and other shares or units not deemed outstanding, determined by relating the portion of time within a reporting period that common shares or units have been outstanding to the total time in that period.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=124432515&amp;loc=d3e3550-109257<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 10<br> -URI http://asc.fasb.org/extlink&amp;oid=125511455&amp;loc=d3e1448-109256<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_WeightedAverageNumberOfSharesOutstandingBasic</td>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
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<td style="white-space:nowrap;">us-gaap_WeightedAverageNumberOfSharesOutstandingDilutedDisclosureItemsAbstract</td>
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<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674063904888">
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<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Income (Loss) Per Share - Shares Excluded from EPS (Details) - shares<br> shares in Thousands</strong></div></th>
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<th class="th"><div>Dec. 31, 2021</div></th>
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</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis=us-gaap_ConvertibleDebtMember', window );">Convertible Notes</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EarningsPerShareDilutedOtherDisclosuresAbstract', window );"><strong>Diluted income (loss) per share</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount', window );">Securities excluded from the diluted calculation as their effect would be antidilutive</a></td>
<td class="nump">8,421<span></span>
</td>
<td class="nump">17,753<span></span>
</td>
<td class="nump">8,618<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Securities (including those issuable pursuant to contingent stock agreements) that could potentially dilute basic earnings per share (EPS) or earnings per unit (EPU) in the future that were not included in the computation of diluted EPS or EPU because to do so would increase EPS or EPU amounts or decrease loss per share or unit amounts for the period presented.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (c)<br> -URI http://asc.fasb.org/extlink&amp;oid=124432515&amp;loc=d3e3550-109257<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
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<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
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<td><strong> Balance Type:</strong></td>
<td>na</td>
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<tr>
<td><strong> Period Type:</strong></td>
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<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EarningsPerShareDilutedOtherDisclosuresAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EarningsPerShareDilutedOtherDisclosuresAbstract</td>
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<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
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<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis=veco_CommonStockEquivalentsMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis=veco_CommonStockEquivalentsMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
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<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
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<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis=veco_PotentiallyDilutiveSharesMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis=veco_PotentiallyDilutiveSharesMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
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<td><strong> Period Type:</strong></td>
<td></td>
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<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis=us-gaap_ConvertibleDebtMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
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<tr>
<td><strong> Period Type:</strong></td>
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<DOCUMENT>
<TYPE>XML
<SEQUENCE>67
<FILENAME>R53.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
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<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674060181368">
<tr>
<th class="tl" colspan="1" rowspan="1"><div style="width: 200px;"><strong>Fair Value Measurements (Details) - Assets and liabilities measured on a recurring basis - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
<th class="th"><div>Dec. 31, 2020</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CashAndCashEquivalentsAbstract', window );"><strong>Cash equivalents</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_CashEquivalentsFairValueDisclosure', window );">Total Cash equivalents</a></td>
<td class="nump">$ 41,665<span></span>
</td>
<td class="nump">$ 86,165<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShortTermInvestmentsAbstract', window );"><strong>Short-term investments</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_InvestmentsFairValueDisclosure', window );">Total Short-term investments</a></td>
<td class="nump">104,181<span></span>
</td>
<td class="nump">189,771<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FairValueByMeasurementFrequencyAxis=us-gaap_FairValueMeasurementsRecurringMember', window );">U.S. treasuries</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShortTermInvestmentsAbstract', window );"><strong>Short-term investments</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_InvestmentsFairValueDisclosure', window );">Total Short-term investments</a></td>
<td class="nump">51,095<span></span>
</td>
<td class="nump">149,219<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FairValueByMeasurementFrequencyAxis=us-gaap_FairValueMeasurementsRecurringMember', window );">Government agency securities</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShortTermInvestmentsAbstract', window );"><strong>Short-term investments</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_InvestmentsFairValueDisclosure', window );">Total Short-term investments</a></td>
<td class="nump">12,052<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FairValueByMeasurementFrequencyAxis=us-gaap_FairValueMeasurementsRecurringMember', window );">Corporate debt</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShortTermInvestmentsAbstract', window );"><strong>Short-term investments</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_InvestmentsFairValueDisclosure', window );">Total Short-term investments</a></td>
<td class="nump">40,035<span></span>
</td>
<td class="nump">32,554<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FairValueByMeasurementFrequencyAxis=us-gaap_FairValueMeasurementsRecurringMember', window );">Commercial paper</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShortTermInvestmentsAbstract', window );"><strong>Short-term investments</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_InvestmentsFairValueDisclosure', window );">Total Short-term investments</a></td>
<td class="nump">999<span></span>
</td>
<td class="nump">7,998<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FairValueByMeasurementFrequencyAxis=us-gaap_FairValueMeasurementsRecurringMember', window );">Certificate of deposits and time deposits</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CashAndCashEquivalentsAbstract', window );"><strong>Cash equivalents</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_CashEquivalentsFairValueDisclosure', window );">Total Cash equivalents</a></td>
<td class="nump">41,544<span></span>
</td>
<td class="nump">59,168<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FairValueByMeasurementFrequencyAxis=us-gaap_FairValueMeasurementsRecurringMember', window );">Commercial paper</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CashAndCashEquivalentsAbstract', window );"><strong>Cash equivalents</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_CashEquivalentsFairValueDisclosure', window );">Total Cash equivalents</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">2,000<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FairValueByMeasurementFrequencyAxis=us-gaap_FairValueMeasurementsRecurringMember', window );">U.S. treasuries</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CashAndCashEquivalentsAbstract', window );"><strong>Cash equivalents</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_CashEquivalentsFairValueDisclosure', window );">Total Cash equivalents</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">24,997<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FairValueByMeasurementFrequencyAxis=us-gaap_FairValueMeasurementsRecurringMember', window );">Money market cash</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CashAndCashEquivalentsAbstract', window );"><strong>Cash equivalents</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_CashEquivalentsFairValueDisclosure', window );">Total Cash equivalents</a></td>
<td class="nump">121<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FairValueByMeasurementFrequencyAxis=us-gaap_FairValueMeasurementsRecurringMember', window );">Level 1</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CashAndCashEquivalentsAbstract', window );"><strong>Cash equivalents</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_CashEquivalentsFairValueDisclosure', window );">Total Cash equivalents</a></td>
<td class="nump">41,665<span></span>
</td>
<td class="nump">84,165<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShortTermInvestmentsAbstract', window );"><strong>Short-term investments</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_InvestmentsFairValueDisclosure', window );">Total Short-term investments</a></td>
<td class="nump">51,095<span></span>
</td>
<td class="nump">149,219<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FairValueByMeasurementFrequencyAxis=us-gaap_FairValueMeasurementsRecurringMember', window );">Level 1 | U.S. treasuries</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShortTermInvestmentsAbstract', window );"><strong>Short-term investments</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_InvestmentsFairValueDisclosure', window );">Total Short-term investments</a></td>
<td class="nump">51,095<span></span>
</td>
<td class="nump">149,219<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FairValueByMeasurementFrequencyAxis=us-gaap_FairValueMeasurementsRecurringMember', window );">Level 1 | Certificate of deposits and time deposits</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CashAndCashEquivalentsAbstract', window );"><strong>Cash equivalents</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_CashEquivalentsFairValueDisclosure', window );">Total Cash equivalents</a></td>
<td class="nump">41,544<span></span>
</td>
<td class="nump">59,168<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FairValueByMeasurementFrequencyAxis=us-gaap_FairValueMeasurementsRecurringMember', window );">Level 1 | U.S. treasuries</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CashAndCashEquivalentsAbstract', window );"><strong>Cash equivalents</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_CashEquivalentsFairValueDisclosure', window );">Total Cash equivalents</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">24,997<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FairValueByMeasurementFrequencyAxis=us-gaap_FairValueMeasurementsRecurringMember', window );">Level 1 | Money market cash</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CashAndCashEquivalentsAbstract', window );"><strong>Cash equivalents</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_CashEquivalentsFairValueDisclosure', window );">Total Cash equivalents</a></td>
<td class="nump">121<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FairValueByMeasurementFrequencyAxis=us-gaap_FairValueMeasurementsRecurringMember', window );">Level 2</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CashAndCashEquivalentsAbstract', window );"><strong>Cash equivalents</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_CashEquivalentsFairValueDisclosure', window );">Total Cash equivalents</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">2,000<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShortTermInvestmentsAbstract', window );"><strong>Short-term investments</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_InvestmentsFairValueDisclosure', window );">Total Short-term investments</a></td>
<td class="nump">53,086<span></span>
</td>
<td class="nump">40,552<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FairValueByMeasurementFrequencyAxis=us-gaap_FairValueMeasurementsRecurringMember', window );">Level 2 | Government agency securities</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShortTermInvestmentsAbstract', window );"><strong>Short-term investments</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_InvestmentsFairValueDisclosure', window );">Total Short-term investments</a></td>
<td class="nump">12,052<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FairValueByMeasurementFrequencyAxis=us-gaap_FairValueMeasurementsRecurringMember', window );">Level 2 | Corporate debt</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShortTermInvestmentsAbstract', window );"><strong>Short-term investments</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_InvestmentsFairValueDisclosure', window );">Total Short-term investments</a></td>
<td class="nump">40,035<span></span>
</td>
<td class="nump">32,554<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FairValueByMeasurementFrequencyAxis=us-gaap_FairValueMeasurementsRecurringMember', window );">Level 2 | Commercial paper</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShortTermInvestmentsAbstract', window );"><strong>Short-term investments</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_InvestmentsFairValueDisclosure', window );">Total Short-term investments</a></td>
<td class="nump">$ 999<span></span>
</td>
<td class="nump">7,998<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FairValueByMeasurementFrequencyAxis=us-gaap_FairValueMeasurementsRecurringMember', window );">Level 2 | Commercial paper</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CashAndCashEquivalentsAbstract', window );"><strong>Cash equivalents</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_CashEquivalentsFairValueDisclosure', window );">Total Cash equivalents</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 2,000<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CashAndCashEquivalentsAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CashAndCashEquivalentsAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_InvestmentsFairValueDisclosure">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Fair value portion of investment securities, including, but not limited to, marketable securities, derivative financial instruments, and investments accounted for under the equity method.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 820<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=123874694&amp;loc=d3e19207-110258<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_InvestmentsFairValueDisclosure</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShortTermInvestmentsAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShortTermInvestmentsAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_CashEquivalentsFairValueDisclosure">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Fair value portion of short-term, highly liquid investments that are both readily convertible to known amounts of cash and so near their maturity that they present insignificant risk of changes in value because of changes in interest rates.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_CashEquivalentsFairValueDisclosure</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FairValueByMeasurementFrequencyAxis=us-gaap_FairValueMeasurementsRecurringMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FairValueByMeasurementFrequencyAxis=us-gaap_FairValueMeasurementsRecurringMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FinancialInstrumentAxis=us-gaap_USTreasurySecuritiesMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FinancialInstrumentAxis=us-gaap_USTreasurySecuritiesMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FinancialInstrumentAxis=us-gaap_USGovernmentCorporationsAndAgenciesSecuritiesMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FinancialInstrumentAxis=us-gaap_USGovernmentCorporationsAndAgenciesSecuritiesMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FinancialInstrumentAxis=us-gaap_CorporateDebtSecuritiesMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FinancialInstrumentAxis=us-gaap_CorporateDebtSecuritiesMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FinancialInstrumentAxis=us-gaap_CommercialPaperMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FinancialInstrumentAxis=us-gaap_CommercialPaperMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CashAndCashEquivalentsAxis=veco_CertificateOfDepositsAndTimeDepositsMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CashAndCashEquivalentsAxis=veco_CertificateOfDepositsAndTimeDepositsMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CashAndCashEquivalentsAxis=us-gaap_CommercialPaperMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CashAndCashEquivalentsAxis=us-gaap_CommercialPaperMember</td>
</tr>
<tr>
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<td>na</td>
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<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CashAndCashEquivalentsAxis=us-gaap_USTreasurySecuritiesMember</td>
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<td style="white-space:nowrap;">us-gaap_CashAndCashEquivalentsAxis=us-gaap_MoneyMarketFundsMember</td>
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<DOCUMENT>
<TYPE>XML
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<DESCRIPTION>IDEA: XBRL DOCUMENT
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<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
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<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674056326776">
<tr>
<th class="tl" colspan="1" rowspan="1"><div style="width: 200px;"><strong>Investments - Available-For-Sale Securities (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
<th class="th"><div>Dec. 31, 2020</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ScheduleOfAvailableForSaleSecuritiesLineItems', window );"><strong>Total available-for-sale securities</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AvailableForSaleDebtSecuritiesAmortizedCostBasis', window );">Amortized Cost</a></td>
<td class="nump">$ 104,512<span></span>
</td>
<td class="nump">$ 189,791<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AvailableForSaleDebtSecuritiesAccumulatedGrossUnrealizedGainBeforeTax', window );">Gross Unrealized Gains</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">15<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AvailableForSaleDebtSecuritiesAccumulatedGrossUnrealizedLossBeforeTax', window );">Gross Unrealized Losses</a></td>
<td class="num">(331)<span></span>
</td>
<td class="num">(35)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AvailableForSaleSecuritiesDebtSecurities', window );">Estimated Fair Value</a></td>
<td class="nump">104,181<span></span>
</td>
<td class="nump">189,771<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AvailableForSaleSecuritiesAbstract', window );"><strong>Available-for-sale securities in a loss position</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtSecuritiesAvailableForSaleUnrealizedLossPosition', window );">Estimated Fair Value</a></td>
<td class="nump">103,182<span></span>
</td>
<td class="nump">52,545<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtSecuritiesAvailableForSaleUnrealizedLossPositionAccumulatedLoss', window );">Gross Unrealized Losses</a></td>
<td class="num">(331)<span></span>
</td>
<td class="num">(35)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPosition12MonthsOrLonger', window );">Investments that had been in a continuous loss position for more than 12 months</a></td>
<td class="nump">0<span></span>
</td>
<td class="nump">0<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AvailableForSaleSecuritiesDebtMaturitiesSingleMaturityDateAmortizedCostBasisRollingMaturityAbstract', window );"><strong>Contractual maturities - Amortized Cost</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AvailableForSaleSecuritiesDebtMaturitiesNextRollingTwelveMonthsAmortizedCostBasis', window );">Amortized Cost, Due in one year or less</a></td>
<td class="nump">53,617<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_DebtSecuritiesAvailableForSaleMaturityAllocatedAndSingleMaturityDateRollingAfterOneThroughTwoYearsAmortizedCost', window );">Amortized Cost, Due after one year through two years</a></td>
<td class="nump">50,895<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AvailableForSaleDebtSecuritiesAmortizedCostBasis', window );">Amortized Cost</a></td>
<td class="nump">104,512<span></span>
</td>
<td class="nump">189,791<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AvailableForSaleSecuritiesDebtMaturitiesSingleMaturityDateRollingMaturityAbstract', window );"><strong>Contractual maturities - Estimated Fair Value</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AvailableForSaleSecuritiesDebtMaturitiesNextRollingTwelveMonthsFairValue', window );">Estimated Fair Value, Due in one year or less</a></td>
<td class="nump">53,550<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_DebtSecuritiesAvailableForSaleMaturityAllocatedAndSingleMaturityDateRollingAfterOneThroughTwoYearsFairValue', window );">Estimated Fair Value, Due after one year through two years</a></td>
<td class="nump">50,631<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AvailableForSaleSecuritiesDebtSecurities', window );">Available-for-sale Securities, Debt Securities, Total</a></td>
<td class="nump">104,181<span></span>
</td>
<td class="nump">189,771<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FinancialInstrumentAxis=us-gaap_USTreasurySecuritiesMember', window );">U.S. treasuries</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ScheduleOfAvailableForSaleSecuritiesLineItems', window );"><strong>Total available-for-sale securities</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AvailableForSaleDebtSecuritiesAmortizedCostBasis', window );">Amortized Cost</a></td>
<td class="nump">51,269<span></span>
</td>
<td class="nump">149,206<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AvailableForSaleDebtSecuritiesAccumulatedGrossUnrealizedGainBeforeTax', window );">Gross Unrealized Gains</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">14<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AvailableForSaleDebtSecuritiesAccumulatedGrossUnrealizedLossBeforeTax', window );">Gross Unrealized Losses</a></td>
<td class="num">(174)<span></span>
</td>
<td class="num">(1)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AvailableForSaleSecuritiesDebtSecurities', window );">Estimated Fair Value</a></td>
<td class="nump">51,095<span></span>
</td>
<td class="nump">149,219<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AvailableForSaleSecuritiesAbstract', window );"><strong>Available-for-sale securities in a loss position</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtSecuritiesAvailableForSaleUnrealizedLossPosition', window );">Estimated Fair Value</a></td>
<td class="nump">51,095<span></span>
</td>
<td class="nump">19,991<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtSecuritiesAvailableForSaleUnrealizedLossPositionAccumulatedLoss', window );">Gross Unrealized Losses</a></td>
<td class="num">(174)<span></span>
</td>
<td class="num">(1)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AvailableForSaleSecuritiesDebtMaturitiesSingleMaturityDateAmortizedCostBasisRollingMaturityAbstract', window );"><strong>Contractual maturities - Amortized Cost</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AvailableForSaleDebtSecuritiesAmortizedCostBasis', window );">Amortized Cost</a></td>
<td class="nump">51,269<span></span>
</td>
<td class="nump">149,206<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AvailableForSaleSecuritiesDebtMaturitiesSingleMaturityDateRollingMaturityAbstract', window );"><strong>Contractual maturities - Estimated Fair Value</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AvailableForSaleSecuritiesDebtSecurities', window );">Available-for-sale Securities, Debt Securities, Total</a></td>
<td class="nump">51,095<span></span>
</td>
<td class="nump">149,219<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FinancialInstrumentAxis=us-gaap_USGovernmentCorporationsAndAgenciesSecuritiesMember', window );">Government agency securities</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ScheduleOfAvailableForSaleSecuritiesLineItems', window );"><strong>Total available-for-sale securities</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AvailableForSaleDebtSecuritiesAmortizedCostBasis', window );">Amortized Cost</a></td>
<td class="nump">12,075<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AvailableForSaleDebtSecuritiesAccumulatedGrossUnrealizedLossBeforeTax', window );">Gross Unrealized Losses</a></td>
<td class="num">(23)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AvailableForSaleSecuritiesDebtSecurities', window );">Estimated Fair Value</a></td>
<td class="nump">12,052<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AvailableForSaleSecuritiesAbstract', window );"><strong>Available-for-sale securities in a loss position</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtSecuritiesAvailableForSaleUnrealizedLossPosition', window );">Estimated Fair Value</a></td>
<td class="nump">12,052<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtSecuritiesAvailableForSaleUnrealizedLossPositionAccumulatedLoss', window );">Gross Unrealized Losses</a></td>
<td class="num">(23)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AvailableForSaleSecuritiesDebtMaturitiesSingleMaturityDateAmortizedCostBasisRollingMaturityAbstract', window );"><strong>Contractual maturities - Amortized Cost</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AvailableForSaleDebtSecuritiesAmortizedCostBasis', window );">Amortized Cost</a></td>
<td class="nump">12,075<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AvailableForSaleSecuritiesDebtMaturitiesSingleMaturityDateRollingMaturityAbstract', window );"><strong>Contractual maturities - Estimated Fair Value</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AvailableForSaleSecuritiesDebtSecurities', window );">Available-for-sale Securities, Debt Securities, Total</a></td>
<td class="nump">12,052<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FinancialInstrumentAxis=us-gaap_CorporateDebtSecuritiesMember', window );">Corporate debt</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ScheduleOfAvailableForSaleSecuritiesLineItems', window );"><strong>Total available-for-sale securities</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AvailableForSaleDebtSecuritiesAmortizedCostBasis', window );">Amortized Cost</a></td>
<td class="nump">40,169<span></span>
</td>
<td class="nump">32,588<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AvailableForSaleDebtSecuritiesAccumulatedGrossUnrealizedLossBeforeTax', window );">Gross Unrealized Losses</a></td>
<td class="num">(134)<span></span>
</td>
<td class="num">(34)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AvailableForSaleSecuritiesDebtSecurities', window );">Estimated Fair Value</a></td>
<td class="nump">40,035<span></span>
</td>
<td class="nump">32,554<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AvailableForSaleSecuritiesAbstract', window );"><strong>Available-for-sale securities in a loss position</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtSecuritiesAvailableForSaleUnrealizedLossPosition', window );">Estimated Fair Value</a></td>
<td class="nump">40,035<span></span>
</td>
<td class="nump">32,554<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtSecuritiesAvailableForSaleUnrealizedLossPositionAccumulatedLoss', window );">Gross Unrealized Losses</a></td>
<td class="num">(134)<span></span>
</td>
<td class="num">(34)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AvailableForSaleSecuritiesDebtMaturitiesSingleMaturityDateAmortizedCostBasisRollingMaturityAbstract', window );"><strong>Contractual maturities - Amortized Cost</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AvailableForSaleDebtSecuritiesAmortizedCostBasis', window );">Amortized Cost</a></td>
<td class="nump">40,169<span></span>
</td>
<td class="nump">32,588<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AvailableForSaleSecuritiesDebtMaturitiesSingleMaturityDateRollingMaturityAbstract', window );"><strong>Contractual maturities - Estimated Fair Value</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AvailableForSaleSecuritiesDebtSecurities', window );">Available-for-sale Securities, Debt Securities, Total</a></td>
<td class="nump">40,035<span></span>
</td>
<td class="nump">32,554<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FinancialInstrumentAxis=us-gaap_CommercialPaperMember', window );">Commercial paper</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ScheduleOfAvailableForSaleSecuritiesLineItems', window );"><strong>Total available-for-sale securities</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AvailableForSaleDebtSecuritiesAmortizedCostBasis', window );">Amortized Cost</a></td>
<td class="nump">999<span></span>
</td>
<td class="nump">7,997<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AvailableForSaleDebtSecuritiesAccumulatedGrossUnrealizedGainBeforeTax', window );">Gross Unrealized Gains</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">1<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AvailableForSaleSecuritiesDebtSecurities', window );">Estimated Fair Value</a></td>
<td class="nump">999<span></span>
</td>
<td class="nump">7,998<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AvailableForSaleSecuritiesDebtMaturitiesSingleMaturityDateAmortizedCostBasisRollingMaturityAbstract', window );"><strong>Contractual maturities - Amortized Cost</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AvailableForSaleDebtSecuritiesAmortizedCostBasis', window );">Amortized Cost</a></td>
<td class="nump">999<span></span>
</td>
<td class="nump">7,997<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AvailableForSaleSecuritiesDebtMaturitiesSingleMaturityDateRollingMaturityAbstract', window );"><strong>Contractual maturities - Estimated Fair Value</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AvailableForSaleSecuritiesDebtSecurities', window );">Available-for-sale Securities, Debt Securities, Total</a></td>
<td class="nump">$ 999<span></span>
</td>
<td class="nump">$ 7,998<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AvailableForSaleDebtSecuritiesAccumulatedGrossUnrealizedGainBeforeTax">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount, before tax, of unrealized gain in accumulated other comprehensive income (AOCI) on investment in debt security measured at fair value with change in fair value recognized in other comprehensive income (available-for-sale).</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 320<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=123581744&amp;loc=d3e27161-111563<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AvailableForSaleDebtSecuritiesAccumulatedGrossUnrealizedGainBeforeTax</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AvailableForSaleDebtSecuritiesAccumulatedGrossUnrealizedLossBeforeTax">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount, before tax, of unrealized loss in accumulated other comprehensive income (AOCI) on investment in debt security measured at fair value with change in fair value recognized in other comprehensive income (available-for-sale).</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 320<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)<br> -URI http://asc.fasb.org/extlink&amp;oid=123581744&amp;loc=d3e27161-111563<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AvailableForSaleDebtSecuritiesAccumulatedGrossUnrealizedLossBeforeTax</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AvailableForSaleDebtSecuritiesAmortizedCostBasis">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amortized cost of investment in debt security measured at fair value with change in fair value recognized in other comprehensive income (available-for-sale).</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 320<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=123581744&amp;loc=d3e27161-111563<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 326<br> -SubTopic 30<br> -Section 45<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=124258926&amp;loc=SL82898722-210454<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AvailableForSaleDebtSecuritiesAmortizedCostBasis</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AvailableForSaleSecuritiesAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AvailableForSaleSecuritiesAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AvailableForSaleSecuritiesDebtMaturitiesNextRollingTwelveMonthsAmortizedCostBasis">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amortized cost of investment in debt security measured at fair value with change in fair value recognized in other comprehensive income (available-for-sale), with single maturity date and allocated without single maturity date, maturing in next rolling fiscal year following latest fiscal year. For interim and annual periods when interim period is reported on rolling approach, from latest statement of financial position date.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AvailableForSaleSecuritiesDebtMaturitiesNextRollingTwelveMonthsAmortizedCostBasis</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
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<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Fair value of investment in debt security measured at fair value with change in fair value recognized in other comprehensive income (available-for-sale), with single maturity date and allocated without single maturity date, maturing in next rolling fiscal year following latest fiscal year. For interim and annual periods when interim period is reported on rolling approach, from latest statement of financial position date.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AvailableForSaleSecuritiesDebtMaturitiesNextRollingTwelveMonthsFairValue</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
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<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AvailableForSaleSecuritiesDebtMaturitiesSingleMaturityDateAmortizedCostBasisRollingMaturityAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AvailableForSaleSecuritiesDebtMaturitiesSingleMaturityDateAmortizedCostBasisRollingMaturityAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AvailableForSaleSecuritiesDebtMaturitiesSingleMaturityDateRollingMaturityAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AvailableForSaleSecuritiesDebtMaturitiesSingleMaturityDateRollingMaturityAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AvailableForSaleSecuritiesDebtSecurities">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of investment in debt security measured at fair value with change in fair value recognized in other comprehensive income (available-for-sale).</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 942<br> -SubTopic 210<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-03(6))<br> -URI http://asc.fasb.org/extlink&amp;oid=120398452&amp;loc=d3e534808-122878<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 326<br> -SubTopic 30<br> -Section 45<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=124258926&amp;loc=SL82898722-210454<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 320<br> -SubTopic 10<br> -Section 45<br> -Paragraph 1<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=124260329&amp;loc=d3e26610-111562<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 320<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (aa)<br> -URI http://asc.fasb.org/extlink&amp;oid=123581744&amp;loc=d3e27161-111563<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AvailableForSaleSecuritiesDebtSecurities</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
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<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPosition12MonthsOrLonger">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of investment in debt security measured at fair value with change in fair value recognized in other comprehensive income (available-for-sale), in continuous unrealized loss position for more than 12 months, without allowance for credit loss. Includes beneficial interest in securitized financial asset.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 326<br> -SubTopic 30<br> -Section 50<br> -Paragraph 5<br> -URI http://asc.fasb.org/extlink&amp;oid=124269663&amp;loc=SL82922890-210455<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 320<br> -SubTopic 10<br> -Section 50<br> -Paragraph 7<br> -URI http://asc.fasb.org/extlink&amp;oid=123581744&amp;loc=d3e27337-111563<br><br>Reference 3: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 326<br> -SubTopic 30<br> -Section 55<br> -Paragraph 8<br> -URI http://asc.fasb.org/extlink&amp;oid=121590138&amp;loc=SL82922954-210456<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPosition12MonthsOrLonger</td>
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<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
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<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
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<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
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<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
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<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DebtSecuritiesAvailableForSaleUnrealizedLossPosition">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of investment in debt security measured at fair value with change in fair value recognized in other comprehensive income (available-for-sale), in unrealized loss position without allowance for credit loss.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 320<br> -SubTopic 10<br> -Section 50<br> -Paragraph 6<br> -Subparagraph (a)(1)<br> -URI http://asc.fasb.org/extlink&amp;oid=123581744&amp;loc=d3e27290-111563<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 326<br> -SubTopic 30<br> -Section 50<br> -Paragraph 4<br> -Subparagraph (a)(1)<br> -URI http://asc.fasb.org/extlink&amp;oid=124269663&amp;loc=SL82922888-210455<br><br>Reference 3: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 326<br> -SubTopic 30<br> -Section 55<br> -Paragraph 8<br> -URI http://asc.fasb.org/extlink&amp;oid=121590138&amp;loc=SL82922954-210456<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DebtSecuritiesAvailableForSaleUnrealizedLossPosition</td>
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<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
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<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
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<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
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<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
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<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DebtSecuritiesAvailableForSaleUnrealizedLossPositionAccumulatedLoss">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of accumulated unrealized loss on investment in debt security measured at fair value with change in fair value recognized in other comprehensive income (available-for-sale), in unrealized loss position, without allowance for credit loss. Includes beneficial interest in securitized financial asset.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 320<br> -SubTopic 10<br> -Section 50<br> -Paragraph 6<br> -Subparagraph (a)(2)<br> -URI http://asc.fasb.org/extlink&amp;oid=123581744&amp;loc=d3e27290-111563<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 326<br> -SubTopic 30<br> -Section 50<br> -Paragraph 4<br> -Subparagraph (a)(2)<br> -URI http://asc.fasb.org/extlink&amp;oid=124269663&amp;loc=SL82922888-210455<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DebtSecuritiesAvailableForSaleUnrealizedLossPositionAccumulatedLoss</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
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<td><strong> Period Type:</strong></td>
<td>instant</td>
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<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ScheduleOfAvailableForSaleSecuritiesLineItems</td>
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<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
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<td><strong> Data Type:</strong></td>
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<td><strong> Balance Type:</strong></td>
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<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_DebtSecuritiesAvailableForSaleMaturityAllocatedAndSingleMaturityDateRollingAfterOneThroughTwoYearsAmortizedCost">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amortized cost of investment in debt security measured at fair value with change in fair value recognized in other comprehensive income (available-for-sale), with single maturity date and allocated without single maturity date, maturing in next rolling fiscal year through second year following latest fiscal year. For interim and annual periods when interim period is reported on rolling approach, from latest statement of financial position date.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_DebtSecuritiesAvailableForSaleMaturityAllocatedAndSingleMaturityDateRollingAfterOneThroughTwoYearsAmortizedCost</td>
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<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
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<td><strong> Data Type:</strong></td>
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<td><strong> Balance Type:</strong></td>
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<td><strong> Period Type:</strong></td>
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<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Fair value of investment in debt security, measured at fair value with change in fair value recognized in other comprehensive income (available-for-sale), with single maturity date and allocated without single maturity date, maturing in rolling second through third year following latest fiscal year. For interim and annual periods when interim period is reported on rolling approach, from latest statement of financial position date.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_DebtSecuritiesAvailableForSaleMaturityAllocatedAndSingleMaturityDateRollingAfterOneThroughTwoYearsFairValue</td>
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<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
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<td><strong> Data Type:</strong></td>
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<td><strong> Period Type:</strong></td>
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<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FinancialInstrumentAxis=us-gaap_USTreasurySecuritiesMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
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<td><strong> Balance Type:</strong></td>
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<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FinancialInstrumentAxis=us-gaap_USGovernmentCorporationsAndAgenciesSecuritiesMember</td>
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<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FinancialInstrumentAxis=us-gaap_CorporateDebtSecuritiesMember</td>
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<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
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<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FinancialInstrumentAxis=us-gaap_CommercialPaperMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FinancialInstrumentAxis=us-gaap_CommercialPaperMember</td>
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<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674060132440">
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<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Investments - Other Investment (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="1">3 Months Ended</th>
<th class="th" colspan="2">12 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2019</div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
<th class="th"><div>Dec. 31, 2019</div></th>
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<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EquitySecuritiesWithoutReadilyDeterminableFairValueLineItems', window );"><strong>Other Investment</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
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<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ImpairmentOfInvestments', window );">Impairment of equity investments</a></td>
<td class="text">&#160;<span></span>
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<td class="nump">$ 980<span></span>
</td>
<td class="nump">$ 20,973<span></span>
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<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_srt_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis=veco_KateevaIncMember', window );">Kateeva | Other income (expense), net</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EquitySecuritiesWithoutReadilyDeterminableFairValueLineItems', window );"><strong>Other Investment</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
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<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ImpairmentOfInvestments', window );">Impairment of equity investments</a></td>
<td class="nump">$ 21,000<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
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<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_srt_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis=veco_KateevaIncMember', window );">Kateeva | Maximum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EquitySecuritiesWithoutReadilyDeterminableFairValueLineItems', window );"><strong>Other Investment</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_CostMethodInvestmentsOwnershipPercentage', window );">Percentage ownership of cost method investee</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">20.00%<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_srt_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis=veco_OtherNonMarketableInvestmentMember', window );">Separate non-marketable investment</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EquitySecuritiesWithoutReadilyDeterminableFairValueLineItems', window );"><strong>Other Investment</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EquitySecuritiesWithoutReadilyDeterminableFairValueAmount', window );">Carrying value of investment</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 2,000<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_srt_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis=veco_OtherNonMarketableInvestmentMember', window );">Separate non-marketable investment | Other income (expense), net</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EquitySecuritiesWithoutReadilyDeterminableFairValueLineItems', window );"><strong>Other Investment</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ImpairmentOfInvestments', window );">Impairment of equity investments</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 1,000<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_srt_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis=veco_OtherNonMarketableInvestmentMember', window );">Separate non-marketable investment | Maximum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EquitySecuritiesWithoutReadilyDeterminableFairValueLineItems', window );"><strong>Other Investment</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_CostMethodInvestmentsOwnershipPercentage', window );">Percentage ownership of cost method investee</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">20.00%<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EquitySecuritiesWithoutReadilyDeterminableFairValueAmount">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of investment in equity security without readily determinable fair value.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 321<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=123583765&amp;loc=SL75117539-209714<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EquitySecuritiesWithoutReadilyDeterminableFairValueAmount</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EquitySecuritiesWithoutReadilyDeterminableFairValueLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EquitySecuritiesWithoutReadilyDeterminableFairValueLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ImpairmentOfInvestments">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The amount by which the fair value of an investment is less than the amortized cost basis or carrying amount of that investment at the balance sheet date and the decline in fair value is deemed to be other than temporary, before considering whether or not such amount is recognized in earnings or other comprehensive income.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 320<br> -SubTopic 10<br> -Section 45<br> -Paragraph 8A<br> -URI http://asc.fasb.org/extlink&amp;oid=124260329&amp;loc=SL6284422-111562<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ImpairmentOfInvestments</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_CostMethodInvestmentsOwnershipPercentage">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The percentage of ownership in the investee accounted for under the cost method of accounting.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_CostMethodInvestmentsOwnershipPercentage</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis=veco_KateevaIncMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis=veco_KateevaIncMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeStatementLocationAxis=us-gaap_OtherNonoperatingIncomeExpenseMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeStatementLocationAxis=us-gaap_OtherNonoperatingIncomeExpenseMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_RangeAxis=srt_MaximumMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_RangeAxis=srt_MaximumMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis=veco_OtherNonMarketableInvestmentMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis=veco_OtherNonMarketableInvestmentMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
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<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
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<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674068052776">
<tr>
<th class="tl" colspan="1" rowspan="1"><div style="width: 200px;"><strong>Inventories (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
<th class="th"><div>Dec. 31, 2020</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_InventoryNetAbstract', window );"><strong>Inventories</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_InventoryRawMaterialsNetOfReserves', window );">Materials</a></td>
<td class="nump">$ 96,027<span></span>
</td>
<td class="nump">$ 82,679<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_InventoryWorkInProcessNetOfReserves', window );">Work-in-process</a></td>
<td class="nump">54,128<span></span>
</td>
<td class="nump">53,979<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_InventoryFinishedGoodsNetOfReserves', window );">Finished goods</a></td>
<td class="nump">20,703<span></span>
</td>
<td class="nump">9,248<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_InventoryNet', window );">Total</a></td>
<td class="nump">$ 170,858<span></span>
</td>
<td class="nump">$ 145,906<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_InventoryFinishedGoodsNetOfReserves">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Carrying amount, net of valuation reserves and adjustments, as of the balance sheet date of merchandise or goods held by the company that are readily available for sale.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 330<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SAB Topic 5.BB)<br> -URI http://asc.fasb.org/extlink&amp;oid=27011343&amp;loc=d3e100047-122729<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(6)(a)(1))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_InventoryFinishedGoodsNetOfReserves</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_InventoryNet">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount after valuation and LIFO reserves of inventory expected to be sold, or consumed within one year or operating cycle, if longer.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section 45<br> -Paragraph 1<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=124098289&amp;loc=d3e6676-107765<br><br>Reference 2: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 852<br> -SubTopic 10<br> -Section 55<br> -Paragraph 10<br> -URI http://asc.fasb.org/extlink&amp;oid=84165509&amp;loc=d3e56426-112766<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.6(a))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_InventoryNet</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_InventoryNetAbstract</td>
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<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
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<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
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<td><strong> Balance Type:</strong></td>
<td>na</td>
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<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_InventoryRawMaterialsNetOfReserves">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Carrying amount, net of valuation reserves and adjustments, as of the balance sheet date of unprocessed items to be consumed in the manufacturing or production process.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 330<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SAB Topic 5.BB)<br> -URI http://asc.fasb.org/extlink&amp;oid=27011343&amp;loc=d3e100047-122729<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(6)(a)(4))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_InventoryRawMaterialsNetOfReserves</td>
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<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
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<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
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<td><strong> Balance Type:</strong></td>
<td>debit</td>
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<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
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<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_InventoryWorkInProcessNetOfReserves">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Carrying amount, net of reserves and adjustments, as of the balance sheet date of merchandise or goods which are partially completed. This inventory is generally comprised of raw materials, labor and factory overhead costs, which require further materials, labor and overhead to be converted into finished goods, and which generally require the use of estimates to determine percentage complete and pricing.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 330<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SAB Topic 5.BB)<br> -URI http://asc.fasb.org/extlink&amp;oid=27011343&amp;loc=d3e100047-122729<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(6)(a)(3))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_InventoryWorkInProcessNetOfReserves</td>
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<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
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<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
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<td><strong> Balance Type:</strong></td>
<td>debit</td>
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<td><strong> Period Type:</strong></td>
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<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674060220520">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Property, Plant, and Equipment - Property and Equipment (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="3">12 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2021</div></th>
<th class="th"><div>Dec. 31, 2020</div></th>
<th class="th"><div>Dec. 31, 2019</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentLineItems', window );"><strong>Property, plant, and equipment</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentGross', window );">Gross property, plant and equipment</a></td>
<td class="nump">$ 260,642<span></span>
</td>
<td class="nump">$ 215,090<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment', window );">Less: accumulated depreciation and amortization</a></td>
<td class="nump">160,899<span></span>
</td>
<td class="nump">149,819<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentNet', window );">Net property, plant, and equipment</a></td>
<td class="nump">99,743<span></span>
</td>
<td class="nump">65,271<span></span>
</td>
<td class="nump">$ 75,711<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_Depreciation', window );">Depreciation expense</a></td>
<td class="nump">13,800<span></span>
</td>
<td class="nump">15,400<span></span>
</td>
<td class="nump">17,300<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ProceedsFromSaleOfLandHeldForUse', window );">Proceeds from sale of land</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 600<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_LandMember', window );">Land</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentLineItems', window );"><strong>Property, plant, and equipment</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentGross', window );">Gross property, plant and equipment</a></td>
<td class="nump">5,061<span></span>
</td>
<td class="nump">5,061<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_BuildingAndBuildingImprovementsMember', window );">Building and improvements</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentLineItems', window );"><strong>Property, plant, and equipment</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentGross', window );">Gross property, plant and equipment</a></td>
<td class="nump">$ 63,946<span></span>
</td>
<td class="nump">62,865<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_BuildingAndBuildingImprovementsMember', window );">Building and improvements | Minimum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentLineItems', window );"><strong>Property, plant, and equipment</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentUsefulLife', window );">Average Useful Life</a></td>
<td class="text">10 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_BuildingAndBuildingImprovementsMember', window );">Building and improvements | Maximum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentLineItems', window );"><strong>Property, plant, and equipment</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentUsefulLife', window );">Average Useful Life</a></td>
<td class="text">40 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_MachineryAndEquipmentMember', window );">Machinery and equipment</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentLineItems', window );"><strong>Property, plant, and equipment</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentGross', window );">Gross property, plant and equipment</a></td>
<td class="nump">$ 145,656<span></span>
</td>
<td class="nump">140,493<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_MachineryAndEquipmentMember', window );">Machinery and equipment | Minimum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentLineItems', window );"><strong>Property, plant, and equipment</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentUsefulLife', window );">Average Useful Life</a></td>
<td class="text">3 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_MachineryAndEquipmentMember', window );">Machinery and equipment | Maximum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentLineItems', window );"><strong>Property, plant, and equipment</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentUsefulLife', window );">Average Useful Life</a></td>
<td class="text">10 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_LeaseholdImprovementsMember', window );">Leaseholds improvements</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentLineItems', window );"><strong>Property, plant, and equipment</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentGross', window );">Gross property, plant and equipment</a></td>
<td class="nump">$ 45,979<span></span>
</td>
<td class="nump">$ 6,671<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_LeaseholdImprovementsMember', window );">Leaseholds improvements | Minimum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentLineItems', window );"><strong>Property, plant, and equipment</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentUsefulLife', window );">Average Useful Life</a></td>
<td class="text">3 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_LeaseholdImprovementsMember', window );">Leaseholds improvements | Maximum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentLineItems', window );"><strong>Property, plant, and equipment</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentUsefulLife', window );">Average Useful Life</a></td>
<td class="text">17 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
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<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of accumulated depreciation, depletion and amortization for physical assets used in the normal conduct of business to produce goods and services.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 360<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (c)<br> -URI http://asc.fasb.org/extlink&amp;oid=6391035&amp;loc=d3e2868-110229<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.14)<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment</td>
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<tr>
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<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The amount of expense recognized in the current period that reflects the allocation of the cost of tangible assets over the assets' useful lives. Includes production and non-production related depreciation.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 360<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=6391035&amp;loc=d3e2868-110229<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 28<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=123570139&amp;loc=d3e3602-108585<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_Depreciation</td>
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<td><strong> Balance Type:</strong></td>
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<td><strong> Period Type:</strong></td>
<td>duration</td>
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<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProceedsFromSaleOfLandHeldForUse">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The cash inflow from the sale of land held for use; excludes sales of land held as inventory or investments.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 12<br> -Subparagraph (c)<br> -URI http://asc.fasb.org/extlink&amp;oid=123570139&amp;loc=d3e3179-108585<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ProceedsFromSaleOfLandHeldForUse</td>
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<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
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<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PropertyPlantAndEquipmentGross">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount before accumulated depreciation, depletion and amortization of physical assets used in the normal conduct of business and not intended for resale. Examples include, but are not limited to, land, buildings, machinery and equipment, office equipment, and furniture and fixtures.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 360<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=6391035&amp;loc=d3e2868-110229<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.13)<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PropertyPlantAndEquipmentGross</td>
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<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
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<td>xbrli:monetaryItemType</td>
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<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
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<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
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</div></td></tr>
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<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PropertyPlantAndEquipmentLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PropertyPlantAndEquipmentLineItems</td>
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<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
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<td><strong> Data Type:</strong></td>
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</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
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<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
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<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PropertyPlantAndEquipmentNet">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount after accumulated depreciation, depletion and amortization of physical assets used in the normal conduct of business to produce goods and services and not intended for resale. Examples include, but are not limited to, land, buildings, machinery and equipment, office equipment, and furniture and fixtures.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(14))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 360<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=6391035&amp;loc=d3e2868-110229<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 210<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-03(a)(8))<br> -URI http://asc.fasb.org/extlink&amp;oid=120400017&amp;loc=d3e572229-122910<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 942<br> -SubTopic 360<br> -Section 50<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=124429447&amp;loc=SL124453093-239630<br><br>Reference 5: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(13))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 6: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 852<br> -SubTopic 10<br> -Section 55<br> -Paragraph 10<br> -URI http://asc.fasb.org/extlink&amp;oid=84165509&amp;loc=d3e56426-112766<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PropertyPlantAndEquipmentNet</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PropertyPlantAndEquipmentUsefulLife">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Useful life of long lived, physical assets used in the normal conduct of business and not intended for resale, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days. Examples include, but not limited to, land, buildings, machinery and equipment, office equipment, furniture and fixtures, and computer equipment.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PropertyPlantAndEquipmentUsefulLife</td>
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<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
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<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_LandMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_LandMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
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<td><strong> Data Type:</strong></td>
<td>na</td>
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<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
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<tr>
<td><strong> Period Type:</strong></td>
<td></td>
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<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_BuildingAndBuildingImprovementsMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
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<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
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<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_RangeAxis=srt_MinimumMember</td>
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<td></td>
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<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
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<td></td>
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<td></td>
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<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_MachineryAndEquipmentMember</td>
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<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
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<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
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<tr>
<td><strong> Period Type:</strong></td>
<td></td>
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<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_LeaseholdImprovementsMember</td>
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<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
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<td><strong> Balance Type:</strong></td>
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<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674063984504">
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<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Goodwill and Intangible Assets - Goodwill (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="2">12 Months Ended</th>
<th class="th" colspan="1"></th>
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<tr>
<th class="th"><div>Dec. 31, 2020</div></th>
<th class="th"><div>Dec. 31, 2011</div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_GoodwillRollForward', window );"><strong>Goodwill</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_GoodwillPeriodIncreaseDecrease', window );">Change in goodwill</a></td>
<td class="nump">$ 0<span></span>
</td>
<td class="nump">$ 0<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_GoodwillGross', window );">Gross carrying Amount</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 430,331<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_GoodwillImpairedAccumulatedImpairmentLoss', window );">Accumulated Impairment</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">248,388<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_Goodwill', window );">Net amount</a></td>
<td class="nump">$ 181,943<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 181,943<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_Goodwill">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount after accumulated impairment loss of an asset representing future economic benefits arising from other assets acquired in a business combination that are not individually identified and separately recognized.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 942<br> -SubTopic 210<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-03(10)(1))<br> -URI http://asc.fasb.org/extlink&amp;oid=120398452&amp;loc=d3e534808-122878<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 350<br> -SubTopic 20<br> -Section 45<br> -Paragraph 5<br> -URI http://asc.fasb.org/extlink&amp;oid=120320667&amp;loc=SL49117168-202975<br><br>Reference 3: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 852<br> -SubTopic 10<br> -Section 55<br> -Paragraph 10<br> -URI http://asc.fasb.org/extlink&amp;oid=84165509&amp;loc=d3e56426-112766<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 350<br> -SubTopic 20<br> -Section 45<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=99380562&amp;loc=d3e13770-109266<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_Goodwill</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
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<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_GoodwillGross">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount before accumulated impairment loss of an asset representing future economic benefits arising from other assets acquired in a business combination that are not individually identified and separately recognized.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 350<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=121556970&amp;loc=d3e13816-109267<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 350<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (h)<br> -URI http://asc.fasb.org/extlink&amp;oid=121556970&amp;loc=d3e13816-109267<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_GoodwillGross</td>
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<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
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<td><strong> Data Type:</strong></td>
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</tr>
<tr>
<td><strong> Balance Type:</strong></td>
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<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
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<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_GoodwillImpairedAccumulatedImpairmentLoss">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of accumulated impairment loss for an asset representing future economic benefits arising from other assets acquired in a business combination that are not individually identified and separately recognized.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 350<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (h)<br> -URI http://asc.fasb.org/extlink&amp;oid=121556970&amp;loc=d3e13816-109267<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 350<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=121556970&amp;loc=d3e13816-109267<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_GoodwillImpairedAccumulatedImpairmentLoss</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_GoodwillPeriodIncreaseDecrease">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of increase (decrease) of an asset representing future economic benefits arising from other assets acquired in a business combination that are not individually identified and separately recognized.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 350<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=121556970&amp;loc=d3e13816-109267<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_GoodwillPeriodIncreaseDecrease</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
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<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_GoodwillRollForward">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>A roll forward is a reconciliation of a concept from the beginning of a period to the end of a period.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_GoodwillRollForward</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
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<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
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<td><strong> Balance Type:</strong></td>
<td>na</td>
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<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
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<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674059899864">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Goodwill and Intangible Assets - Intangible Assets (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
<th class="th" colspan="1"></th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2021</div></th>
<th class="th"><div>Dec. 31, 2020</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_FiniteLivedAndIndefiniteLivedIntangibleAssetsByMajorClassLineItems', window );"><strong>Intangible assets</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsRemainingAmortizationPeriod1', window );">Average Remaining Amortization Period</a></td>
<td class="text">5 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsNet', window );">Total definite-lived intangible assets</a></td>
<td class="nump">$ 33,905<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IntangibleAssetsGrossExcludingGoodwill', window );">Total Gross Intangible Assets</a></td>
<td class="nump">508,969<span></span>
</td>
<td class="nump">$ 508,969<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_IntangibleAssetsExcludingGoodwillAccumulatedAmortizationAndImpairment', window );">Accumulated Amortization and Impairment</a></td>
<td class="nump">475,064<span></span>
</td>
<td class="nump">462,784<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IntangibleAssetsNetExcludingGoodwill', window );">Total Net Intangible Assets</a></td>
<td class="nump">$ 33,905<span></span>
</td>
<td class="nump">46,185<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis=us-gaap_TechnologyBasedIntangibleAssetsMember', window );">Technology</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_FiniteLivedAndIndefiniteLivedIntangibleAssetsByMajorClassLineItems', window );"><strong>Intangible assets</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsRemainingAmortizationPeriod1', window );">Average Remaining Amortization Period</a></td>
<td class="text">3 years 7 months 6 days<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsGross', window );">Gross Carrying Amount, Definite-lived intangible assets</a></td>
<td class="nump">$ 327,908<span></span>
</td>
<td class="nump">327,908<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_FiniteLivedIntangibleAssetsAccumulatedAmortizationAndImpairment', window );">Accumulated Amortization and Impairment, Definite-lived intangible assets</a></td>
<td class="nump">310,551<span></span>
</td>
<td class="nump">302,358<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsNet', window );">Total definite-lived intangible assets</a></td>
<td class="nump">$ 17,357<span></span>
</td>
<td class="nump">25,550<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis=us-gaap_CustomerRelationshipsMember', window );">Customer relationship</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_FiniteLivedAndIndefiniteLivedIntangibleAssetsByMajorClassLineItems', window );"><strong>Intangible assets</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsRemainingAmortizationPeriod1', window );">Average Remaining Amortization Period</a></td>
<td class="text">7 years 3 months 18 days<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsGross', window );">Gross Carrying Amount, Definite-lived intangible assets</a></td>
<td class="nump">$ 146,465<span></span>
</td>
<td class="nump">146,465<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_FiniteLivedIntangibleAssetsAccumulatedAmortizationAndImpairment', window );">Accumulated Amortization and Impairment, Definite-lived intangible assets</a></td>
<td class="nump">132,970<span></span>
</td>
<td class="nump">130,131<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsNet', window );">Total definite-lived intangible assets</a></td>
<td class="nump">$ 13,495<span></span>
</td>
<td class="nump">16,334<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis=us-gaap_TrademarksAndTradeNamesMember', window );">Trademarks and tradenames</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_FiniteLivedAndIndefiniteLivedIntangibleAssetsByMajorClassLineItems', window );"><strong>Intangible assets</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsRemainingAmortizationPeriod1', window );">Average Remaining Amortization Period</a></td>
<td class="text">2 years 6 months<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsGross', window );">Gross Carrying Amount, Definite-lived intangible assets</a></td>
<td class="nump">$ 30,910<span></span>
</td>
<td class="nump">30,910<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_FiniteLivedIntangibleAssetsAccumulatedAmortizationAndImpairment', window );">Accumulated Amortization and Impairment, Definite-lived intangible assets</a></td>
<td class="nump">27,857<span></span>
</td>
<td class="nump">26,614<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsNet', window );">Total definite-lived intangible assets</a></td>
<td class="nump">3,053<span></span>
</td>
<td class="nump">4,296<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis=us-gaap_OtherIntangibleAssetsMember', window );">Other Intangible Assets</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_FiniteLivedAndIndefiniteLivedIntangibleAssetsByMajorClassLineItems', window );"><strong>Intangible assets</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsGross', window );">Gross Carrying Amount, Definite-lived intangible assets</a></td>
<td class="nump">3,686<span></span>
</td>
<td class="nump">3,686<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_FiniteLivedIntangibleAssetsAccumulatedAmortizationAndImpairment', window );">Accumulated Amortization and Impairment, Definite-lived intangible assets</a></td>
<td class="nump">$ 3,686<span></span>
</td>
<td class="nump">3,681<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsNet', window );">Total definite-lived intangible assets</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 5<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FiniteLivedIntangibleAssetsGross">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount before amortization of assets, excluding financial assets and goodwill, lacking physical substance with a finite life.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 928<br> -SubTopic 340<br> -Section 50<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=6473545&amp;loc=d3e61844-108004<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 350<br> -SubTopic 30<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (a)(1)<br> -URI http://asc.fasb.org/extlink&amp;oid=66006027&amp;loc=d3e16323-109275<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FiniteLivedIntangibleAssetsGross</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FiniteLivedIntangibleAssetsNet">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount after amortization of assets, excluding financial assets and goodwill, lacking physical substance with a finite life.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 926<br> -SubTopic 20<br> -Section 50<br> -Paragraph 5<br> -URI http://asc.fasb.org/extlink&amp;oid=120154696&amp;loc=d3e54445-107959<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 350<br> -SubTopic 30<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (a)(1)<br> -URI http://asc.fasb.org/extlink&amp;oid=66006027&amp;loc=d3e16323-109275<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FiniteLivedIntangibleAssetsNet</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FiniteLivedIntangibleAssetsRemainingAmortizationPeriod1">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Remaining amortization period of finite-lived intangible assets, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 926<br> -SubTopic 20<br> -Section 50<br> -Paragraph 5<br> -URI http://asc.fasb.org/extlink&amp;oid=120154696&amp;loc=d3e54445-107959<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FiniteLivedIntangibleAssetsRemainingAmortizationPeriod1</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IntangibleAssetsGrossExcludingGoodwill">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount before accumulated amortization of intangible assets, excluding goodwill.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IntangibleAssetsGrossExcludingGoodwill</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IntangibleAssetsNetExcludingGoodwill">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Sum of the carrying amounts of all intangible assets, excluding goodwill, as of the balance sheet date, net of accumulated amortization and impairment charges.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 350<br> -SubTopic 30<br> -Section 50<br> -Paragraph 2<br> -Subparagraph ((a)(1),(b))<br> -URI http://asc.fasb.org/extlink&amp;oid=66006027&amp;loc=d3e16323-109275<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 350<br> -SubTopic 30<br> -Section 45<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=6388964&amp;loc=d3e16212-109274<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IntangibleAssetsNetExcludingGoodwill</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_FiniteLivedAndIndefiniteLivedIntangibleAssetsByMajorClassLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_FiniteLivedAndIndefiniteLivedIntangibleAssetsByMajorClassLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_FiniteLivedIntangibleAssetsAccumulatedAmortizationAndImpairment">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Accumulated amount of amortization and impairment of assets, excluding financial assets and goodwill, lacking physical substance with a finite life.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_FiniteLivedIntangibleAssetsAccumulatedAmortizationAndImpairment</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_IntangibleAssetsExcludingGoodwillAccumulatedAmortizationAndImpairment">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Accumulated amount of amortization and impairment of assets, excluding financial assets and goodwill, lacking physical substance.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_IntangibleAssetsExcludingGoodwillAccumulatedAmortizationAndImpairment</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis=us-gaap_TechnologyBasedIntangibleAssetsMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis=us-gaap_TechnologyBasedIntangibleAssetsMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis=us-gaap_CustomerRelationshipsMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis=us-gaap_CustomerRelationshipsMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis=us-gaap_TrademarksAndTradeNamesMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis=us-gaap_TrademarksAndTradeNamesMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
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<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis=us-gaap_OtherIntangibleAssetsMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis=us-gaap_OtherIntangibleAssetsMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
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<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674060909832">
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<th class="tl" colspan="1" rowspan="1"><div style="width: 200px;"><strong>Goodwill and Intangible Assets - Amortization (Details)<br> $ in Thousands</strong></div></th>
<th class="th">
<div>Dec. 31, 2021 </div>
<div>USD ($)</div>
</th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsFutureAmortizationExpenseAbstract', window );"><strong>Estimated aggregate amortization expense</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseNextTwelveMonths', window );">2022</a></td>
<td class="nump">$ 10,018<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearTwo', window );">2023</a></td>
<td class="nump">8,347<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearThree', window );">2024</a></td>
<td class="nump">6,708<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearFour', window );">2025</a></td>
<td class="nump">3,136<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearFive', window );">2026</a></td>
<td class="nump">2,134<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseAfterYearFive', window );">Thereafter</a></td>
<td class="nump">3,562<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsNet', window );">Total definite-lived intangible assets</a></td>
<td class="nump">$ 33,905<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseAfterYearFive">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of amortization for asset, excluding financial asset and goodwill, lacking physical substance with finite life expected to be recognized after fifth fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseAfterYearFive</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseNextTwelveMonths">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of amortization for assets, excluding financial assets and goodwill, lacking physical substance with finite life expected to be recognized in next fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 350<br> -SubTopic 30<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (a)(3)<br> -URI http://asc.fasb.org/extlink&amp;oid=66006027&amp;loc=d3e16323-109275<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseNextTwelveMonths</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearFive">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of amortization for assets, excluding financial assets and goodwill, lacking physical substance with finite life expected to be recognized in fifth fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 350<br> -SubTopic 30<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (a)(3)<br> -URI http://asc.fasb.org/extlink&amp;oid=66006027&amp;loc=d3e16323-109275<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearFive</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearFour">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of amortization for assets, excluding financial assets and goodwill, lacking physical substance with finite life expected to be recognized in fourth fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 350<br> -SubTopic 30<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (a)(3)<br> -URI http://asc.fasb.org/extlink&amp;oid=66006027&amp;loc=d3e16323-109275<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearFour</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearThree">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of amortization for assets, excluding financial assets and goodwill, lacking physical substance with finite life expected to be recognized in third fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 350<br> -SubTopic 30<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (a)(3)<br> -URI http://asc.fasb.org/extlink&amp;oid=66006027&amp;loc=d3e16323-109275<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearThree</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
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<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearTwo">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of amortization for assets, excluding financial assets and goodwill, lacking physical substance with finite life expected to be recognized in second fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 350<br> -SubTopic 30<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (a)(3)<br> -URI http://asc.fasb.org/extlink&amp;oid=66006027&amp;loc=d3e16323-109275<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearTwo</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FiniteLivedIntangibleAssetsFutureAmortizationExpenseAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FiniteLivedIntangibleAssetsFutureAmortizationExpenseAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FiniteLivedIntangibleAssetsNet">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount after amortization of assets, excluding financial assets and goodwill, lacking physical substance with a finite life.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 926<br> -SubTopic 20<br> -Section 50<br> -Paragraph 5<br> -URI http://asc.fasb.org/extlink&amp;oid=120154696&amp;loc=d3e54445-107959<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 350<br> -SubTopic 30<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (a)(1)<br> -URI http://asc.fasb.org/extlink&amp;oid=66006027&amp;loc=d3e16323-109275<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FiniteLivedIntangibleAssetsNet</td>
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<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
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<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
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<td><strong> Period Type:</strong></td>
<td>instant</td>
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<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674063624632">
<tr>
<th class="tl" colspan="1" rowspan="1"><div style="width: 200px;"><strong>Accrued Expenses and Other Liabilities - Components (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
<th class="th"><div>Dec. 31, 2020</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AccruedLiabilitiesCurrentAbstract', window );"><strong>Accrued expenses and other current liabilities</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EmployeeRelatedLiabilitiesCurrent', window );">Payroll and related benefits</a></td>
<td class="nump">$ 35,712<span></span>
</td>
<td class="nump">$ 26,630<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ProductWarrantyAccrualClassifiedCurrent', window );">Warranty</a></td>
<td class="nump">7,878<span></span>
</td>
<td class="nump">5,058<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OperatingLeaseLiabilityCurrent', window );">Operating lease liabilities</a></td>
<td class="nump">4,437<span></span>
</td>
<td class="nump">4,148<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_InterestPayableCurrent', window );">Interest</a></td>
<td class="nump">2,757<span></span>
</td>
<td class="nump">2,574<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AccruedProfessionalFeesCurrent', window );">Professional fees</a></td>
<td class="nump">1,467<span></span>
</td>
<td class="nump">1,112<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LossContingencyAccrualCarryingValueCurrent', window );">Legal settlement</a></td>
<td class="nump">15,000<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_TaxesPayableCurrent', window );">Sales, use, and other taxes</a></td>
<td class="nump">4,889<span></span>
</td>
<td class="nump">2,658<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OtherAccruedLiabilitiesCurrent', window );">Other</a></td>
<td class="nump">7,612<span></span>
</td>
<td class="nump">2,696<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_AccruedAndOtherLiabilitiesCurrent', window );">Total</a></td>
<td class="nump">$ 79,752<span></span>
</td>
<td class="nump">$ 44,876<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OperatingLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList', window );">Operating Lease, Liability, Current, Statement of Financial Position</a></td>
<td class="text">Total<span></span>
</td>
<td class="text">Total<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AccruedLiabilitiesCurrentAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AccruedLiabilitiesCurrentAbstract</td>
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<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
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<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
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<td><strong> Balance Type:</strong></td>
<td>na</td>
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<td><strong> Period Type:</strong></td>
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<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AccruedProfessionalFeesCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Carrying value as of the balance sheet date of obligations incurred through that date and payable for professional fees, such as for legal and accounting services received. Used to reflect the current portion of the liabilities (due within one year or within the normal operating cycle if longer).</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section 45<br> -Paragraph 6<br> -URI http://asc.fasb.org/extlink&amp;oid=124098289&amp;loc=d3e6911-107765<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.20)<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section 45<br> -Paragraph 8<br> -URI http://asc.fasb.org/extlink&amp;oid=124098289&amp;loc=d3e6935-107765<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AccruedProfessionalFeesCurrent</td>
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<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
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<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Total of the carrying values as of the balance sheet date of obligations incurred through that date and payable for obligations related to services received from employees, such as accrued salaries and bonuses, payroll taxes and fringe benefits. Used to reflect the current portion of the liabilities (due within one year or within the normal operating cycle if longer).</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.20)<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EmployeeRelatedLiabilitiesCurrent</td>
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<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
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<td><strong> Balance Type:</strong></td>
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<td><strong> Period Type:</strong></td>
<td>instant</td>
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<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Carrying value as of the balance sheet date of [accrued] interest payable on all forms of debt, including trade payables, that has been incurred and is unpaid. Used to reflect the current portion of the liabilities (due within one year or within the normal operating cycle if longer).</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section 45<br> -Paragraph 9<br> -URI http://asc.fasb.org/extlink&amp;oid=124098289&amp;loc=d3e7018-107765<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section 45<br> -Paragraph 8<br> -URI http://asc.fasb.org/extlink&amp;oid=124098289&amp;loc=d3e6935-107765<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.20)<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_InterestPayableCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LossContingencyAccrualCarryingValueCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of loss contingency liability expected to be resolved within one year or the normal operating cycle, if longer.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 450<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=121557415&amp;loc=d3e14326-108349<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LossContingencyAccrualCarryingValueCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
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<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
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<td><strong> Balance Type:</strong></td>
<td>credit</td>
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<td><strong> Period Type:</strong></td>
<td>instant</td>
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<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OperatingLeaseLiabilityCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Present value of lessee's discounted obligation for lease payments from operating lease, classified as current.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 45<br> -Paragraph 1<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=123391704&amp;loc=SL77918627-209977<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OperatingLeaseLiabilityCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OperatingLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Indicates line item in statement of financial position that includes current operating lease liability.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 45<br> -Paragraph 2<br> -URI http://asc.fasb.org/extlink&amp;oid=123391704&amp;loc=SL77918631-209977<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OperatingLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>enum2:enumerationSetItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OtherAccruedLiabilitiesCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of expenses incurred but not yet paid classified as other, due within one year or the normal operating cycle, if longer.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.20)<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section 45<br> -Paragraph 6<br> -URI http://asc.fasb.org/extlink&amp;oid=124098289&amp;loc=d3e6911-107765<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section 45<br> -Paragraph 9<br> -URI http://asc.fasb.org/extlink&amp;oid=124098289&amp;loc=d3e7018-107765<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section 45<br> -Paragraph 8<br> -URI http://asc.fasb.org/extlink&amp;oid=124098289&amp;loc=d3e6935-107765<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OtherAccruedLiabilitiesCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
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<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
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<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
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<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
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<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProductWarrantyAccrualClassifiedCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Carrying value as of the balance sheet date of obligations incurred through that date and payable for estimated claims under standard and extended warranty protection rights granted to customers. For classified balance sheets, represents the current portion of the liabilities (due within one year or within the normal operating cycle if longer).</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 460<br> -SubTopic 10<br> -Section 50<br> -Paragraph 7<br> -URI http://asc.fasb.org/extlink&amp;oid=123368208&amp;loc=d3e12524-110249<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.20)<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 460<br> -SubTopic 10<br> -Section 25<br> -Paragraph 5<br> -URI http://asc.fasb.org/extlink&amp;oid=123377177&amp;loc=d3e11281-110244<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ProductWarrantyAccrualClassifiedCurrent</td>
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<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
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<td><strong> Balance Type:</strong></td>
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<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Carrying value as of the balance sheet date of obligations incurred and payable for statutory income, sales, use, payroll, excise, real, property and other taxes. Used to reflect the current portion of the liabilities (due within one year or within the normal operating cycle if longer).</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.19,20)<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_TaxesPayableCurrent</td>
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<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
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<tr>
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<td>instant</td>
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<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Carrying value as of the balance sheet date of obligations incurred and payable, pertaining to costs that are statutory in nature, are incurred on contractual obligations, or accumulate over time and for which invoices have not yet been received or will not be rendered. Examples include taxes, interest, rent and utilities. Used to reflect the current portion of the liabilities (due within one year or within the normal operating cycle if longer). Also includes amount of liabilities classified as other, due within one year or the normal operating cycle, if longer.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_AccruedAndOtherLiabilitiesCurrent</td>
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<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
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<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Accrued Expenses and Other Liabilities - Customer deposits and deferred revenue (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
<th class="th" colspan="1"></th>
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<tr>
<th class="th"><div>Dec. 31, 2021</div></th>
<th class="th"><div>Dec. 31, 2020</div></th>
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<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_MovementInDeferredRevenueRollForward', window );"><strong>Changes in deferred revenue</strong></a></td>
<td class="text">&#160;<span></span>
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<td class="text">&#160;<span></span>
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</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ContractWithCustomerLiability', window );">Beginning balance</a></td>
<td class="nump">17,985<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncreaseDecreaseInContractWithCustomerLiability', window );">Deferral of revenue</a></td>
<td class="nump">6,782<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ContractWithCustomerLiabilityRevenueRecognized', window );">Recognition of previously deferred revenue</a></td>
<td class="num">(8,491)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ContractWithCustomerLiability', window );">Ending balance</a></td>
<td class="nump">$ 16,276<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ContractWithCustomerLiability">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of obligation to transfer good or service to customer for which consideration has been received or is receivable.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 606<br> -SubTopic 10<br> -Section 45<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=123360276&amp;loc=SL49130531-203044<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 606<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=123351226&amp;loc=SL49130549-203045<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 606<br> -SubTopic 10<br> -Section 45<br> -Paragraph 2<br> -URI http://asc.fasb.org/extlink&amp;oid=123360276&amp;loc=SL49130532-203044<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ContractWithCustomerLiability</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ContractWithCustomerLiabilityRevenueRecognized">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of revenue recognized that was previously included in balance of obligation to transfer good or service to customer for which consideration from customer has been received or is due.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 606<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=123351226&amp;loc=SL49130549-203045<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ContractWithCustomerLiabilityRevenueRecognized</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ContractWithCustomerRefundLiabilityAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ContractWithCustomerRefundLiabilityAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ContractWithCustomerRefundLiabilityCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of liability for consideration received or receivable from customer which is not included in transaction price, when consideration is expected to be refunded to customer, classified as current.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 606<br> -SubTopic 10<br> -Section 55<br> -Paragraph 27<br> -URI http://asc.fasb.org/extlink&amp;oid=123410239&amp;loc=SL49130611-203046-203046<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ContractWithCustomerRefundLiabilityCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncreaseDecreaseInContractWithCustomerLiability">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of increase (decrease) in obligation to transfer good or service to customer for which consideration has been received or is receivable.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 28<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=123570139&amp;loc=d3e3602-108585<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 912<br> -SubTopic 310<br> -Section 45<br> -Paragraph 11<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=123371682&amp;loc=d3e55415-109406<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncreaseDecreaseInContractWithCustomerLiability</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_MovementInDeferredRevenueRollForward">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>A roll forward is a reconciliation of a concept from the beginning of a period to the end of a period.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_MovementInDeferredRevenueRollForward</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
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<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
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<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674060146648">
<tr>
<th class="tl" colspan="1" rowspan="1"><div style="width: 200px;"><strong>Accrued Expenses and Other Liabilities - Performance Obligation Amount (Details)<br> $ in Millions</strong></div></th>
<th class="th">
<div>Dec. 31, 2021 </div>
<div>USD ($)</div>
</th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PayablesAndAccrualsAbstract', window );"><strong>Accrued Expenses and Other Liabilities</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_RevenueRemainingPerformanceObligation', window );">Remaining performance obligations</a></td>
<td class="nump">$ 33.6<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionStartDateAxis=2022-01-01', window );">Revenue, Remaining Performance Obligation, Expected Timing of Satisfaction, Start Date [Axis]: 2022-01-01</a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionLineItems', window );"><strong>Performance obligations</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_RevenueRemainingPerformanceObligationExpectedTimingPercentage', window );">Percentage of remaining performance obligation expected to be recognized</a></td>
<td class="nump">94.00%<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PayablesAndAccrualsAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PayablesAndAccrualsAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
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<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
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<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RevenueRemainingPerformanceObligation">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of transaction price allocated to performance obligation that has not been recognized as revenue.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 606<br> -SubTopic 10<br> -Section 50<br> -Paragraph 13<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=123351226&amp;loc=SL49130556-203045<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RevenueRemainingPerformanceObligation</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
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<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
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<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
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<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_RevenueRemainingPerformanceObligationExpectedTimingPercentage">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Percentage of remaining performance obligation expected to be recognized.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_RevenueRemainingPerformanceObligationExpectedTimingPercentage</td>
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<td>dtr-types:percentItemType</td>
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<td>na</td>
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<td><strong> Period Type:</strong></td>
<td>instant</td>
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<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionStartDateAxis=2022-01-01</td>
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<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
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<td><strong> Data Type:</strong></td>
<td>na</td>
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<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
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<tr>
<td><strong> Period Type:</strong></td>
<td></td>
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<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674068473144">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Accrued Expenses and Other Liabilities - Performance Obligation Timing (Details)<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
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<td class="text">&#160;<span></span>
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<td class="text">&#160;<span></span>
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<td class="text">&#160;<span></span>
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<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionLineItems', window );"><strong>Performance obligations</strong></a></td>
<td class="text">&#160;<span></span>
</td>
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<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionPeriod1', window );">Remaining performance obligations, expected timing of satisfaction</a></td>
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<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionStartDateAxis=2023-01-01', window );">Revenue, Remaining Performance Obligation, Expected Timing of Satisfaction, Start Date [Axis]: 2023-01-01</a></td>
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</td>
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<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionLineItems', window );"><strong>Performance obligations</strong></a></td>
<td class="text">&#160;<span></span>
</td>
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<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionPeriod1', window );">Remaining performance obligations, expected timing of satisfaction</a></td>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Indicates (true false) whether optional exemption was applied not to disclose amount of transaction price allocated to and explanation of expected timing of revenue recognition for remaining performance obligation, when contract has expected duration of one year or less or right to consideration corresponds directly to performance completed.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 606<br> -SubTopic 10<br> -Section 50<br> -Paragraph 15<br> -URI http://asc.fasb.org/extlink&amp;oid=123351226&amp;loc=SL49130558-203045<br></p></div>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Period in which remaining performance obligation is expected to be recognized as revenue, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents reported fact of one year, five months, and thirteen days.</p></div>
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<tr>
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<th class="tl" colspan="1" rowspan="1"><div style="width: 200px;"><strong>Accrued Expenses and Other Liabilities - Other liabilities (Details) - USD ($)<br> $ in Millions</strong></div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
<th class="th"><div>Dec. 31, 2020</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OtherLiabilitiesAbstract', window );"><strong>Other liabilities</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DepositLiabilitiesAccruedInterest', window );">Accrued and deferred deposit payments</a></td>
<td class="text">&#160;<span></span>
</td>
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<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_BalanceSheetLocationAxis=us-gaap_OtherAssetsMember', window );">Other Assets</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OtherLiabilitiesAbstract', window );"><strong>Other liabilities</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
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<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DeferredCompensationPlanAssets', window );">Deferred compensation plan assets</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">2.4<span></span>
</td>
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<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_BalanceSheetLocationAxis=veco_AccruedExpensesAndOtherCurrentLiabilitiesMember', window );">Accrued Expenses and Other Current Liabilities</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
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<tr class="re">
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<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
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<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DepositLiabilitiesAccruedInterest', window );">Accrued and deferred deposit payments</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">1.8<span></span>
</td>
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<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AccruedPayrollTaxesCurrent', window );">Deferred payroll taxes</a></td>
<td class="nump">$ 1.7<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_BalanceSheetLocationAxis=us-gaap_OtherLiabilitiesMember', window );">Other Liabilities</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
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<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DeferredCompensationLiabilityClassifiedNoncurrent', window );">Deferred compensation plan liabilities</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">2.5<span></span>
</td>
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<tr class="re">
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<td class="nump">2.8<span></span>
</td>
<td class="nump">2.7<span></span>
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<td class="nump">0.4<span></span>
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<td class="nump">1.4<span></span>
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<td class="nump">$ 1.8<span></span>
</td>
<td class="nump">1.9<span></span>
</td>
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<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DepositLiabilitiesAccruedInterest', window );">Accrued and deferred deposit payments</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 1.8<span></span>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Carrying amount as of the balance sheet date of the unpaid sum of the known and estimated amounts payable to satisfy all domestic and foreign income tax obligations due beyond one year or the operating cycle, whichever is longer. Alternate captions include income taxes payable, noncurrent.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 210<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-03(a)(15)(b)(1))<br> -URI http://asc.fasb.org/extlink&amp;oid=120400017&amp;loc=d3e572229-122910<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 942<br> -SubTopic 210<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-03(15)(1))<br> -URI http://asc.fasb.org/extlink&amp;oid=120398452&amp;loc=d3e534808-122878<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(24))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
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<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AccruedPayrollTaxesCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Carrying value as of the balance sheet date of obligations incurred and payable for statutory payroll taxes incurred through that date and withheld from employees pertaining to services received from them, including entity's matching share of the employees FICA taxes and contributions to the state and federal unemployment insurance programs. Used to reflect the current portion of the liabilities (due within one year or within the normal operating cycle if longer).</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.20)<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section 45<br> -Paragraph 8<br> -URI http://asc.fasb.org/extlink&amp;oid=124098289&amp;loc=d3e6935-107765<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AccruedPayrollTaxesCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AssetRetirementObligationsNoncurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Noncurrent portion of the carrying amount of a liability for an asset retirement obligation. An asset retirement obligation is a legal obligation associated with the disposal or retirement of a tangible long-lived asset that results from the acquisition, construction or development, or the normal operations of a long-lived asset, except for certain obligations of lessees.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 410<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (c)<br> -URI http://asc.fasb.org/extlink&amp;oid=6392692&amp;loc=d3e7535-110849<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AssetRetirementObligationsNoncurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredCompensationLiabilityClassifiedNoncurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Aggregate carrying value as of the balance sheet date of the liabilities for all deferred compensation arrangements payable beyond one year (or the operating cycle, if longer).</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DeferredCompensationLiabilityClassifiedNoncurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredCompensationPlanAssets">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Carrying amount as of the balance sheet date of assets held under deferred compensation agreements.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.17)<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DeferredCompensationPlanAssets</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DepositLiabilitiesAccruedInterest">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of accrued but unpaid interest on deposit liabilities.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 942<br> -SubTopic 210<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-03.15(5))<br> -URI http://asc.fasb.org/extlink&amp;oid=120398452&amp;loc=d3e534808-122878<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DepositLiabilitiesAccruedInterest</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OtherLiabilitiesAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OtherLiabilitiesAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_MedicalAndDentalBenefitLiabilitiesNoncurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of liabilities for medical and dental benefits classified as other, due after one year or the normal operating cycle, if longer</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_MedicalAndDentalBenefitLiabilitiesNoncurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_BalanceSheetLocationAxis=us-gaap_OtherAssetsMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_BalanceSheetLocationAxis=us-gaap_OtherAssetsMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_BalanceSheetLocationAxis=veco_AccruedExpensesAndOtherCurrentLiabilitiesMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_BalanceSheetLocationAxis=veco_AccruedExpensesAndOtherCurrentLiabilitiesMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
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<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_BalanceSheetLocationAxis=us-gaap_OtherLiabilitiesMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_BalanceSheetLocationAxis=us-gaap_OtherLiabilitiesMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
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<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674063361688">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Commitments and Contingencies - Warranty (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="3">12 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2021</div></th>
<th class="th"><div>Dec. 31, 2020</div></th>
<th class="th"><div>Dec. 31, 2019</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ProductWarrantiesDisclosuresAbstract', window );"><strong>Warranty</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ProductWarrantyAccrual', window );">Balance, beginning of the period</a></td>
<td class="nump">$ 5,058<span></span>
</td>
<td class="nump">$ 7,067<span></span>
</td>
<td class="nump">$ 7,852<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ProductWarrantyAccrualWarrantiesIssued', window );">Warranties issued</a></td>
<td class="nump">7,102<span></span>
</td>
<td class="nump">4,626<span></span>
</td>
<td class="nump">5,865<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ProductWarrantyAccrualPayments', window );">Consumption of reserves</a></td>
<td class="num">(5,784)<span></span>
</td>
<td class="num">(6,691)<span></span>
</td>
<td class="num">(6,242)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ProductWarrantyAccrualPreexistingIncreaseDecrease', window );">Changes in estimate</a></td>
<td class="nump">1,502<span></span>
</td>
<td class="nump">56<span></span>
</td>
<td class="num">(408)<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ProductWarrantyAccrual', window );">Balance, end of the period</a></td>
<td class="nump">$ 7,878<span></span>
</td>
<td class="nump">$ 5,058<span></span>
</td>
<td class="nump">$ 7,067<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProductWarrantiesDisclosuresAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ProductWarrantiesDisclosuresAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
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<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProductWarrantyAccrual">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Carrying value as of the balance sheet date of obligations incurred through that date and payable for estimated claims under standard and extended warranty protection rights granted to customers.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 942<br> -SubTopic 210<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-03.15(5))<br> -URI http://asc.fasb.org/extlink&amp;oid=120398452&amp;loc=d3e534808-122878<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 460<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -Subparagraph (c)(1)<br> -URI http://asc.fasb.org/extlink&amp;oid=123368208&amp;loc=d3e12565-110249<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 460<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -Subparagraph (c)(5)<br> -URI http://asc.fasb.org/extlink&amp;oid=123368208&amp;loc=d3e12565-110249<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ProductWarrantyAccrual</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProductWarrantyAccrualPayments">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of decrease in the standard and extended product warranty accrual from payments made in cash or in kind to satisfy claims under the terms of the standard and extended product warranty.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 460<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -Subparagraph ((c)(2))<br> -URI http://asc.fasb.org/extlink&amp;oid=123368208&amp;loc=d3e12565-110249<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ProductWarrantyAccrualPayments</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProductWarrantyAccrualPreexistingIncreaseDecrease">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of increase (decrease) in the standard and extended product warranty accrual from changes in estimates attributable to preexisting product warranties.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 460<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -Subparagraph ((c)(4))<br> -URI http://asc.fasb.org/extlink&amp;oid=123368208&amp;loc=d3e12565-110249<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ProductWarrantyAccrualPreexistingIncreaseDecrease</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProductWarrantyAccrualWarrantiesIssued">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of increase in the standard and extended product warranty accrual from warranties issued.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 460<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -Subparagraph ((c)(3))<br> -URI http://asc.fasb.org/extlink&amp;oid=123368208&amp;loc=d3e12565-110249<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ProductWarrantyAccrualWarrantiesIssued</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
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<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
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<body>
<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674067942136">
<tr>
<th class="tl" colspan="1" rowspan="1"><div style="width: 200px;"><strong>Commitments and Contingencies - Lease terms (Details)<br></strong></div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LesseeOperatingLeaseDescriptionAbstract', window );"><strong>Leases</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LesseeOperatingLeaseRenewalTerm', window );">Lease renewal term</a></td>
<td class="text">5 years<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OperatingLeaseWeightedAverageRemainingLeaseTerm1', window );">Remaining lease term</a></td>
<td class="text">12 years<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LesseeOperatingLeaseDiscountRate', window );">Weighted average discount rate (as a percent)</a></td>
<td class="nump">5.70%<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LesseeOperatingLeaseDescriptionAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LesseeOperatingLeaseDescriptionAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LesseeOperatingLeaseDiscountRate">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Discount rate used by lessee to determine present value of operating lease payments.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (c)(3)<br> -URI http://asc.fasb.org/extlink&amp;oid=123408670&amp;loc=SL77918673-209980<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LesseeOperatingLeaseDiscountRate</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LesseeOperatingLeaseRenewalTerm">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Term of lessee's operating lease renewal, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents reported fact of one year, five months, and thirteen days.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (a)(3)<br> -URI http://asc.fasb.org/extlink&amp;oid=123408670&amp;loc=SL77918673-209980<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LesseeOperatingLeaseRenewalTerm</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OperatingLeaseWeightedAverageRemainingLeaseTerm1">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Weighted average remaining lease term for operating lease, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents reported fact of one year, five months, and thirteen days.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 55<br> -Paragraph 53<br> -URI http://asc.fasb.org/extlink&amp;oid=123414884&amp;loc=SL77918982-209971<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 50<br> -Paragraph 4<br> -Subparagraph (g)(3)<br> -URI http://asc.fasb.org/extlink&amp;oid=123408670&amp;loc=SL77918686-209980<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OperatingLeaseWeightedAverageRemainingLeaseTerm1</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>82
<FILENAME>R68.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
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							e.nextSibling.style.display='block';
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</head>
<body>
<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674060930872">
<tr>
<th class="tl" colspan="1" rowspan="1"><div style="width: 200px;"><strong>Commitments and Contingencies - Minimum lease commitments (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
<th class="th"><div>Dec. 31, 2020</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract', window );"><strong>Minimum lease commitments, Payments due by period:</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths', window );">2022</a></td>
<td class="nump">$ 4,901<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearTwo', window );">2023</a></td>
<td class="nump">3,979<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearThree', window );">2024</a></td>
<td class="nump">3,769<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFour', window );">2025</a></td>
<td class="nump">3,309<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFive', window );">2026</a></td>
<td class="nump">3,496<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFive', window );">Thereafter</a></td>
<td class="nump">35,960<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue', window );">Total future minimum lease payments</a></td>
<td class="nump">55,414<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LesseeOperatingLeaseLiabilityUndiscountedExcessAmount', window );">Less: Imputed interest</a></td>
<td class="num">(18,143)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OperatingLeaseLiability', window );">Total operating lease liabilities</a></td>
<td class="nump">37,271<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OperatingLeaseLiabilityCurrent', window );">Operating lease liability, current</a></td>
<td class="nump">$ 4,437<span></span>
</td>
<td class="nump">$ 4,148<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OperatingLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList', window );">Operating Lease, Liability, Current, Statement of Financial Position</a></td>
<td class="text">Accrued expenses and other current liabilities<span></span>
</td>
<td class="text">Accrued expenses and other current liabilities<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OperatingLeaseLiabilityNoncurrent', window );">Long-term operating lease liabilities</a></td>
<td class="nump">$ 32,834<span></span>
</td>
<td class="nump">$ 6,305<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OperatingLeaseLiability', window );">Total operating lease liabilities</a></td>
<td class="nump">$ 37,271<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OperatingLeaseLiabilityStatementOfFinancialPositionExtensibleList', window );">Operating Lease, Liability, Statement of Financial Position</a></td>
<td class="text">Long-term operating lease liabilities, Accrued expenses and other current liabilities<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of lessee's undiscounted obligation for lease payment for operating lease.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 50<br> -Paragraph 6<br> -URI http://asc.fasb.org/extlink&amp;oid=123408670&amp;loc=SL77918701-209980<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFive">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of lessee's undiscounted obligation for lease payment for operating lease due after fifth fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 50<br> -Paragraph 6<br> -URI http://asc.fasb.org/extlink&amp;oid=123408670&amp;loc=SL77918701-209980<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFive</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of lessee's undiscounted obligation for lease payment for operating lease to be paid in next fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 50<br> -Paragraph 6<br> -URI http://asc.fasb.org/extlink&amp;oid=123408670&amp;loc=SL77918701-209980<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFive">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of lessee's undiscounted obligation for lease payment for operating lease to be paid in fifth fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 50<br> -Paragraph 6<br> -URI http://asc.fasb.org/extlink&amp;oid=123408670&amp;loc=SL77918701-209980<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFive</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFour">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of lessee's undiscounted obligation for lease payment for operating lease to be paid in fourth fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 50<br> -Paragraph 6<br> -URI http://asc.fasb.org/extlink&amp;oid=123408670&amp;loc=SL77918701-209980<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFour</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearThree">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of lessee's undiscounted obligation for lease payment for operating lease to be paid in third fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 50<br> -Paragraph 6<br> -URI http://asc.fasb.org/extlink&amp;oid=123408670&amp;loc=SL77918701-209980<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearThree</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearTwo">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of lessee's undiscounted obligation for lease payment for operating lease to be paid in second fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 50<br> -Paragraph 6<br> -URI http://asc.fasb.org/extlink&amp;oid=123408670&amp;loc=SL77918701-209980<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearTwo</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LesseeOperatingLeaseLiabilityUndiscountedExcessAmount">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of lessee's undiscounted obligation for lease payments in excess of discounted obligation for lease payments for operating lease.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 50<br> -Paragraph 6<br> -URI http://asc.fasb.org/extlink&amp;oid=123408670&amp;loc=SL77918701-209980<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LesseeOperatingLeaseLiabilityUndiscountedExcessAmount</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OperatingLeaseLiability">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Present value of lessee's discounted obligation for lease payments from operating lease.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 45<br> -Paragraph 1<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=123391704&amp;loc=SL77918627-209977<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OperatingLeaseLiability</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OperatingLeaseLiabilityCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Present value of lessee's discounted obligation for lease payments from operating lease, classified as current.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 45<br> -Paragraph 1<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=123391704&amp;loc=SL77918627-209977<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OperatingLeaseLiabilityCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OperatingLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Indicates line item in statement of financial position that includes current operating lease liability.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 45<br> -Paragraph 2<br> -URI http://asc.fasb.org/extlink&amp;oid=123391704&amp;loc=SL77918631-209977<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OperatingLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>enum2:enumerationSetItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OperatingLeaseLiabilityNoncurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Present value of lessee's discounted obligation for lease payments from operating lease, classified as noncurrent.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 45<br> -Paragraph 1<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=123391704&amp;loc=SL77918627-209977<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OperatingLeaseLiabilityNoncurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OperatingLeaseLiabilityStatementOfFinancialPositionExtensibleList">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Indicates line item in statement of financial position that includes operating lease liability.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 45<br> -Paragraph 2<br> -URI http://asc.fasb.org/extlink&amp;oid=123391704&amp;loc=SL77918631-209977<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OperatingLeaseLiabilityStatementOfFinancialPositionExtensibleList</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>enum2:enumerationSetItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
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<DOCUMENT>
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<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
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<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674063819880">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Commitments and Contingencies - Lease costs (Details) - USD ($)<br> $ in Millions</strong></div></th>
<th class="th" colspan="3">12 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2021</div></th>
<th class="th"><div>Dec. 31, 2020</div></th>
<th class="th"><div>Dec. 31, 2019</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LeaseCostAbstract', window );"><strong>Lease cost</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OperatingLeaseCost', window );">Operating lease cost</a></td>
<td class="nump">$ 6.6<span></span>
</td>
<td class="nump">$ 5.4<span></span>
</td>
<td class="nump">$ 5.5<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_VariableLeaseCost', window );">Variable lease cost</a></td>
<td class="nump">1.7<span></span>
</td>
<td class="nump">1.7<span></span>
</td>
<td class="nump">1.7<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LeaseCost', window );">Lease expense</a></td>
<td class="nump">8.4<span></span>
</td>
<td class="nump">7.1<span></span>
</td>
<td class="nump">7.2<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OperatingLeasePayments', window );">Operating cash flows from operating leases</a></td>
<td class="nump">6.6<span></span>
</td>
<td class="nump">$ 6.9<span></span>
</td>
<td class="nump">$ 7.2<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_ReimbursementForLeaseholdImprovements', window );">Amount of reimbursement for leasehold improvements</a></td>
<td class="nump">$ 6.1<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LeaseCost">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of lease cost recognized by lessee for lease contract.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 50<br> -Paragraph 4<br> -URI http://asc.fasb.org/extlink&amp;oid=123408670&amp;loc=SL77918686-209980<br><br>Reference 2: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 55<br> -Paragraph 53<br> -URI http://asc.fasb.org/extlink&amp;oid=123414884&amp;loc=SL77918982-209971<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LeaseCost</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LeaseCostAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LeaseCostAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
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<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
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<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
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<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OperatingLeaseCost">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of single lease cost, calculated by allocation of remaining cost of lease over remaining lease term. Includes, but is not limited to, single lease cost, after impairment of right-of-use asset, calculated by amortization of remaining right-of-use asset and accretion of lease liability.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 55<br> -Paragraph 53<br> -URI http://asc.fasb.org/extlink&amp;oid=123414884&amp;loc=SL77918982-209971<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 50<br> -Paragraph 4<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=123408670&amp;loc=SL77918686-209980<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OperatingLeaseCost</td>
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<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
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<td><strong> Data Type:</strong></td>
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<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
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<td><strong> Period Type:</strong></td>
<td>duration</td>
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</table></div>
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<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OperatingLeasePayments">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of cash outflow from operating lease, excluding payments to bring another asset to condition and location necessary for its intended use.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 45<br> -Paragraph 5<br> -Subparagraph (c)<br> -URI http://asc.fasb.org/extlink&amp;oid=123391704&amp;loc=SL77918643-209977<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 50<br> -Paragraph 4<br> -Subparagraph (g)(1)<br> -URI http://asc.fasb.org/extlink&amp;oid=123408670&amp;loc=SL77918686-209980<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OperatingLeasePayments</td>
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<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
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<td><strong> Balance Type:</strong></td>
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<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
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<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_VariableLeaseCost">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of variable lease cost, excluded from lease liability, recognized when obligation for payment is incurred for finance and operating leases.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 50<br> -Paragraph 4<br> -Subparagraph (d)<br> -URI http://asc.fasb.org/extlink&amp;oid=123408670&amp;loc=SL77918686-209980<br><br>Reference 2: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 55<br> -Paragraph 53<br> -URI http://asc.fasb.org/extlink&amp;oid=123414884&amp;loc=SL77918982-209971<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_VariableLeaseCost</td>
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<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
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<tr>
<td><strong> Data Type:</strong></td>
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<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
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<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_ReimbursementForLeaseholdImprovements">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of reimbursement from landlord for leasehold improvements as a reduction to cash outflow,</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_ReimbursementForLeaseholdImprovements</td>
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<td>debit</td>
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<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
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</div>
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<DOCUMENT>
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<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
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<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674068075880">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Commitments and Contingencies - Legal Proceedings (Details)<br> $ in Millions</strong></div></th>
<th class="th" colspan="1"></th>
<th class="th" colspan="1">1 Months Ended</th>
</tr>
<tr>
<th class="th">
<div>Aug. 08, 2018 </div>
<div>case</div>
</th>
<th class="th">
<div>Oct. 31, 2021 </div>
<div>USD ($)</div>
</th>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_srt_LitigationCaseAxis=veco_UltratechAcquisitionLitigationMember', window );">Ultratech acquisition litigation</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LossContingenciesLineItems', window );"><strong>Legal Proceedings</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LossContingencyNewClaimsFiledNumber', window );">Number of purported class action complaints filed | case</a></td>
<td class="nump">2<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_srt_LitigationCaseAxis=veco_WoltherActionMember', window );">Wolther Action</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LossContingenciesLineItems', window );"><strong>Legal Proceedings</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LitigationSettlementAmountAwardedToOtherParty', window );">Settlement amount | $</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 15.0<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LitigationSettlementAmountAwardedToOtherParty">
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount awarded to other party in judgment or settlement of litigation.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LitigationSettlementAmountAwardedToOtherParty</td>
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<td><strong> Period Type:</strong></td>
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<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LossContingenciesLineItems</td>
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<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
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<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LossContingencyNewClaimsFiledNumber">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The total number of new claims filed pertaining to a loss contingency during the period.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 450<br> -SubTopic 20<br> -Section 50<br> -Paragraph 4<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=121557415&amp;loc=d3e14435-108349<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
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<td><strong> Name:</strong></td>
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<td style="white-space:nowrap;">srt_LitigationCaseAxis=veco_UltratechAcquisitionLitigationMember</td>
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<tr>
<td><strong> Name:</strong></td>
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<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674063403160">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Commitments and Contingencies - Concentration of Credit Risk (Details) - customer<br></strong></div></th>
<th class="th" colspan="3">12 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2021</div></th>
<th class="th"><div>Dec. 31, 2020</div></th>
<th class="th"><div>Dec. 31, 2019</div></th>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskByBenchmarkAxis=us-gaap_AccountsReceivableMember', window );">Accounts Receivable | Credit Concentration Risk | Top Ten Customers</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskLineItems', window );"><strong>Concentration of Credit Risk</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_NumberOfCustomers', window );">Number of customers</a></td>
<td class="nump">10<span></span>
</td>
<td class="nump">10<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskPercentage1', window );">Concentration Risk (as a percent)</a></td>
<td class="nump">65.00%<span></span>
</td>
<td class="nump">62.00%<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
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<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskByBenchmarkAxis=us-gaap_AccountsReceivableMember', window );">Accounts Receivable | Credit Concentration Risk | Customer A</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskLineItems', window );"><strong>Concentration of Credit Risk</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskPercentage1', window );">Concentration Risk (as a percent)</a></td>
<td class="nump">14.00%<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskByBenchmarkAxis=us-gaap_AccountsReceivableMember', window );">Accounts Receivable | Credit Concentration Risk | Customer C</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskLineItems', window );"><strong>Concentration of Credit Risk</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskPercentage1', window );">Concentration Risk (as a percent)</a></td>
<td class="nump">12.00%<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
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<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskByBenchmarkAxis=us-gaap_AccountsReceivableMember', window );">Accounts Receivable | Credit Concentration Risk | Customer D</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
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<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskLineItems', window );"><strong>Concentration of Credit Risk</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
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<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskPercentage1', window );">Concentration Risk (as a percent)</a></td>
<td class="nump">10.00%<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
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<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskByBenchmarkAxis=us-gaap_SalesMember', window );">Net Sales | Customer Concentration Risk | Customer A</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
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<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskLineItems', window );"><strong>Concentration of Credit Risk</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
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<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskPercentage1', window );">Concentration Risk (as a percent)</a></td>
<td class="nump">15.00%<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
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<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskByBenchmarkAxis=us-gaap_SalesMember', window );">Net Sales | Customer Concentration Risk | Customer B</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskLineItems', window );"><strong>Concentration of Credit Risk</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskPercentage1', window );">Concentration Risk (as a percent)</a></td>
<td class="nump">10.00%<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
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<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskByBenchmarkAxis=us-gaap_SalesMember', window );">Net Sales | Customer Concentration Risk | Customer E</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
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<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskLineItems', window );"><strong>Concentration of Credit Risk</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
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<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskPercentage1', window );">Concentration Risk (as a percent)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">13.00%<span></span>
</td>
<td class="nump">11.00%<span></span>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>For an entity that discloses a concentration risk in relation to quantitative amount, which serves as the "benchmark" (or denominator) in the equation, this concept represents the concentration percentage derived from the division.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 42<br> -URI http://asc.fasb.org/extlink&amp;oid=123359005&amp;loc=d3e9054-108599<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 275<br> -SubTopic 10<br> -Section 50<br> -Paragraph 18<br> -URI http://asc.fasb.org/extlink&amp;oid=99393423&amp;loc=d3e6351-108592<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 825<br> -SubTopic 10<br> -Section 50<br> -Paragraph 20<br> -URI http://asc.fasb.org/extlink&amp;oid=123594938&amp;loc=d3e13531-108611<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 825<br> -SubTopic 10<br> -Section 50<br> -Paragraph 21<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=123594938&amp;loc=d3e13537-108611<br><br>Reference 5: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 275<br> -SubTopic 10<br> -Section 50<br> -Paragraph 20<br> -URI http://asc.fasb.org/extlink&amp;oid=99393423&amp;loc=d3e6404-108592<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ConcentrationRiskPercentage1</td>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Number of customers.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
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<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
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<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ConcentrationRiskByBenchmarkAxis=us-gaap_AccountsReceivableMember</td>
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<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
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<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ConcentrationRiskByTypeAxis=us-gaap_CreditConcentrationRiskMember</td>
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<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
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<td><strong> Data Type:</strong></td>
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<td><strong> Balance Type:</strong></td>
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<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
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<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_MajorCustomersAxis=veco_TopTenCustomersMember</td>
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<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
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<td><strong> Data Type:</strong></td>
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<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
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<td><strong> Name:</strong></td>
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<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_MajorCustomersAxis=veco_CustomerCMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_MajorCustomersAxis=veco_CustomerCMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
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</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_MajorCustomersAxis=veco_CustomerDMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_MajorCustomersAxis=veco_CustomerDMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ConcentrationRiskByBenchmarkAxis=us-gaap_SalesMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ConcentrationRiskByBenchmarkAxis=us-gaap_SalesMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ConcentrationRiskByTypeAxis=us-gaap_CustomerConcentrationRiskMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ConcentrationRiskByTypeAxis=us-gaap_CustomerConcentrationRiskMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_MajorCustomersAxis=veco_CustomerBMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_MajorCustomersAxis=veco_CustomerBMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_MajorCustomersAxis=veco_CustomerEMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_MajorCustomersAxis=veco_CustomerEMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
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</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>86
<FILENAME>R72.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
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<body>
<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674068520616">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Commitments and Contingencies - Receivables (Details)<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2021</div></th></tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_srt_RangeAxis=srt_MinimumMember', window );">Minimum | Geographic location, One</a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskLineItems', window );"><strong>Concentration of Credit Risk</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_AccountsReceivableCreditPeriod', window );">Credit period for accounts receivable</a></td>
<td class="text">30 days<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_srt_RangeAxis=srt_MaximumMember', window );">Maximum | Geographic location, One</a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskLineItems', window );"><strong>Concentration of Credit Risk</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_AccountsReceivableCreditPeriod', window );">Credit period for accounts receivable</a></td>
<td class="text">90 days<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_srt_RangeAxis=srt_MaximumMember', window );">Maximum | Geographic location, Two</a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskLineItems', window );"><strong>Concentration of Credit Risk</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_AccountsReceivableCreditPeriod', window );">Credit period for accounts receivable</a></td>
<td class="text">150 days<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ConcentrationRiskLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ConcentrationRiskLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_AccountsReceivableCreditPeriod">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The credit period for accounts receivable.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_AccountsReceivableCreditPeriod</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_RangeAxis=srt_MinimumMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_RangeAxis=srt_MinimumMember</td>
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<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
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<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_StatementGeographicalAxis=veco_GeographicLocationOneMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_StatementGeographicalAxis=veco_GeographicLocationOneMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_RangeAxis=srt_MaximumMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_RangeAxis=srt_MaximumMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_StatementGeographicalAxis=veco_GeographicLocationTwoMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_StatementGeographicalAxis=veco_GeographicLocationTwoMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>87
<FILENAME>R73.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
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							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
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</head>
<body>
<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674064050424">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Commitments and Contingencies - Receivable Purchase Agreement (Details) - USD ($)<br> $ in Millions</strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
<th class="th" colspan="1"></th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2020</div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CommitmentsAndContingenciesDisclosureAbstract', window );"><strong>Commitments and Contingencies</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_ReceivablePurchaseAgreementMaximumAmount', window );">Maximum amount of trade receivables to be sold under agreement</a></td>
<td class="nump">$ 15.0<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_TradeReceivablesSoldUnderReceivablePurchaseAgreement', window );">Receivables sold</a></td>
<td class="nump">11.6<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_TradeReceivablesUnderReceivablePurchaseAgreementOutstanding', window );">Receivables sold remaining outstanding</a></td>
<td class="nump">$ 5.9<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_ReceivablePurchaseAgreementAmountAvailable', window );">Amount of trade receivables available to be sold under agreement</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 15.0<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CommitmentsAndContingenciesDisclosureAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CommitmentsAndContingenciesDisclosureAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
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<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
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<td><strong> Balance Type:</strong></td>
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<tr>
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<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_ReceivablePurchaseAgreementAmountAvailable">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of trade receivables available to be sold from customers without recourse under the terms of the receivable purchase agreement.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_ReceivablePurchaseAgreementAmountAvailable</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_ReceivablePurchaseAgreementMaximumAmount">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Maximum amount of trade receivables from customers to be sold without recourse under the terms of the receivable purchase agreement.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_ReceivablePurchaseAgreementMaximumAmount</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_TradeReceivablesSoldUnderReceivablePurchaseAgreement">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of accounts receivable that has been sold to other entities.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_TradeReceivablesSoldUnderReceivablePurchaseAgreement</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_TradeReceivablesUnderReceivablePurchaseAgreementOutstanding">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of accounts receivable sold under receivable purchase agreement that remains outstanding.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_TradeReceivablesUnderReceivablePurchaseAgreementOutstanding</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>88
<FILENAME>R74.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
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							e.nextSibling.style.display='block';
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</head>
<body>
<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674067924696">
<tr>
<th class="tl" colspan="1" rowspan="1"><div style="width: 200px;"><strong>Commitments and Contingencies - Suppliers (Details) - USD ($)<br> $ in Millions</strong></div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
<th class="th"><div>Dec. 31, 2020</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PurchaseObligationFiscalYearMaturityAbstract', window );"><strong>Purchase Commitments</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DepositAssets', window );">Deposits with suppliers</a></td>
<td class="nump">$ 3.9<span></span>
</td>
<td class="nump">$ 7.2<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DepositAssets">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The carrying amount of the asset transferred to a third party to serve as a deposit, which typically serves as security against failure by the transferor to perform under terms of an agreement.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.8,17)<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DepositAssets</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PurchaseObligationFiscalYearMaturityAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PurchaseObligationFiscalYearMaturityAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>89
<FILENAME>R75.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674060417032">
<tr>
<th class="tl" colspan="1" rowspan="1"><div style="width: 200px;"><strong>Commitments and Contingencies - Purchase Commitments and Bank Guarantees (Details)<br> $ in Millions</strong></div></th>
<th class="th">
<div>Dec. 31, 2021 </div>
<div>USD ($)</div>
</th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PurchaseObligationFiscalYearMaturityAbstract', window );"><strong>Purchase commitments</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_UnrecordedUnconditionalPurchaseObligationDueInNextRollingTwelveMonths', window );">Purchase commitments due within one year</a></td>
<td class="nump">$ 193.0<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_GuaranteesAbstract', window );"><strong>Bank guarantees</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_GuaranteeObligationsCurrentCarryingValue', window );">Bank guarantees and letters of credit outstanding</a></td>
<td class="nump">2.7<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LineOfCreditFacilityRemainingBorrowingCapacity', window );">Unused bank guarantees and letters of credit</a></td>
<td class="nump">$ 15.2<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_GuaranteeObligationsCurrentCarryingValue">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The current carrying amount of the liability for the freestanding or embedded guarantor's obligations under the guarantee or each group of similar guarantees.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 460<br> -SubTopic 10<br> -Section 50<br> -Paragraph 4<br> -Subparagraph (c)<br> -URI http://asc.fasb.org/extlink&amp;oid=124440162&amp;loc=d3e12069-110248<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_GuaranteeObligationsCurrentCarryingValue</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_GuaranteesAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_GuaranteesAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LineOfCreditFacilityRemainingBorrowingCapacity">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of borrowing capacity currently available under the credit facility (current borrowing capacity less the amount of borrowings outstanding).</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.19(b),22(b))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LineOfCreditFacilityRemainingBorrowingCapacity</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PurchaseObligationFiscalYearMaturityAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PurchaseObligationFiscalYearMaturityAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_UnrecordedUnconditionalPurchaseObligationDueInNextRollingTwelveMonths">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of the fixed and determinable portion of the unrecorded unconditional purchase obligation maturing in the next rolling twelve months following the latest balance sheet. For interim and annual periods when interim periods are reported on a rolling approach, from latest balance sheet date.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_UnrecordedUnconditionalPurchaseObligationDueInNextRollingTwelveMonths</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>90
<FILENAME>R76.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674060659528">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Debt - 2023. 2025 and 2027 Notes (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="1"></th>
<th class="th" colspan="1"></th>
<th class="th" colspan="1"></th>
<th class="th" colspan="1"></th>
<th class="th" colspan="2">12 Months Ended</th>
<th class="th" colspan="1"></th>
</tr>
<tr>
<th class="th"><div>Nov. 05, 2021</div></th>
<th class="th"><div>Nov. 11, 2020</div></th>
<th class="th"><div>May 18, 2020</div></th>
<th class="th"><div>Jan. 10, 2017</div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
<th class="th"><div>Dec. 31, 2020</div></th>
<th class="th"><div>Nov. 17, 2020</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentLineItems', window );"><strong>Debt</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentFaceAmount', window );">Principal amount</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 277,673<span></span>
</td>
<td class="nump">$ 389,195<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ProceedsFromConvertibleDebt', window );">Proceeds, net of issuance costs</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">120,095<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_RepaymentsOfUnsecuredDebt', window );">Cash paid for repurchase of notes</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">115,604<span></span>
</td>
<td class="nump">81,240<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_GainsLossesOnExtinguishmentOfDebt', window );">Loss on extinguishment of debt</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(4,029)<span></span>
</td>
<td class="num">(7,841)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PaymentsForDerivativeInstrumentFinancingActivities', window );">Purchase of capped calls</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 10,300<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">10,313<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_AdjustmentsToAdditionalPaidInCapitalExtinguishmentEquityComponentOfNotesRepurchased', window );">Reduction of additional paid-in capital for extinguishment of equity component of note repurchased/exchanged</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">6,080<span></span>
</td>
<td class="nump">14,714<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentAxis=veco_ConvertibleSeniorUnsecuredNotesDue2023Member', window );">2023 Notes</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentLineItems', window );"><strong>Debt</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentFaceAmount', window );">Principal amount</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 345,000<span></span>
</td>
<td class="nump">20,173<span></span>
</td>
<td class="nump">131,695<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentInterestRateStatedPercentage', window );">Interest rate (as a percent)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">2.70%<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ProceedsFromConvertibleDebt', window );">Proceeds, net of issuance costs</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 335,800<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ExtinguishmentOfDebtAmount', window );">Repurchased and retired amount</a></td>
<td class="nump">$ 111,500<span></span>
</td>
<td class="nump">$ 125,000<span></span>
</td>
<td class="nump">88,300<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_DebtInstrumentCarryingAmountDebtExtinguished', window );">Carrying amount of debt extinguished</a></td>
<td class="nump">105,500<span></span>
</td>
<td class="nump">113,100<span></span>
</td>
<td class="nump">78,100<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_RepaymentsOfUnsecuredDebt', window );">Cash paid for repurchase of notes</a></td>
<td class="nump">115,600<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">81,200<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_InterestPayableCurrentAndNoncurrent', window );">Accrued and unpaid interest</a></td>
<td class="nump">1,000<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_AdjustmentsToAdditionalPaidInCapitalExtinguishmentEquityComponentOfNotesRepurchased', window );">Reduction of additional paid-in capital for extinguishment of equity component of note repurchased/exchanged</a></td>
<td class="nump">6,100<span></span>
</td>
<td class="nump">14,600<span></span>
</td>
<td class="nump">100<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentAxis=veco_ConvertibleSeniorUnsecuredNotesDue2023Member', window );">2023 Notes | Other income (expense), net</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentLineItems', window );"><strong>Debt</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_GainsLossesOnExtinguishmentOfDebt', window );">Loss on extinguishment of debt</a></td>
<td class="nump">$ 4,000<span></span>
</td>
<td class="nump">$ 4,800<span></span>
</td>
<td class="nump">3,000<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentAxis=veco_ConvertibleSeniorUnsecuredNotesDue2025Member', window );">2025 Notes</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentLineItems', window );"><strong>Debt</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentFaceAmount', window );">Principal amount</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">132,500<span></span>
</td>
<td class="nump">132,500<span></span>
</td>
<td class="nump">$ 132,500<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentInterestRateStatedPercentage', window );">Interest rate (as a percent)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">3.50%<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentAxis=veco_ConvertibleSeniorUnsecuredNotesDue2027Member', window );">2027 Notes</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentLineItems', window );"><strong>Debt</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentFaceAmount', window );">Principal amount</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 125,000<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 125,000<span></span>
</td>
<td class="nump">$ 125,000<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentInterestRateStatedPercentage', window );">Interest rate (as a percent)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">3.75%<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ProceedsFromConvertibleDebt', window );">Proceeds, net of issuance costs</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 121,900<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DebtInstrumentFaceAmount">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Face (par) amount of debt instrument at time of issuance.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1B<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=123466505&amp;loc=SL123495323-112611<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 835<br> -SubTopic 30<br> -Section 45<br> -Paragraph 2<br> -URI http://asc.fasb.org/extlink&amp;oid=124435984&amp;loc=d3e28551-108399<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 835<br> -SubTopic 30<br> -Section 55<br> -Paragraph 8<br> -URI http://asc.fasb.org/extlink&amp;oid=114775985&amp;loc=d3e28878-108400<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 835<br> -SubTopic 30<br> -Section 50<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=124429444&amp;loc=SL124452920-239629<br><br>Reference 5: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 20<br> -Section 55<br> -Paragraph 69C<br> -URI http://asc.fasb.org/extlink&amp;oid=123466577&amp;loc=SL123495737-112612<br><br>Reference 6: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 20<br> -Section 55<br> -Paragraph 69B<br> -URI http://asc.fasb.org/extlink&amp;oid=123466577&amp;loc=SL123495735-112612<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DebtInstrumentFaceAmount</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DebtInstrumentInterestRateStatedPercentage">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Contractual interest rate for funds borrowed, under the debt agreement.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1B<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=123466505&amp;loc=SL123495323-112611<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.22(a)(1))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DebtInstrumentInterestRateStatedPercentage</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
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<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
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</tr>
</table></div>
</div></td></tr>
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<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DebtInstrumentLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DebtInstrumentLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
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</table></div>
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<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ExtinguishmentOfDebtAmount">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Gross amount of debt extinguished.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ExtinguishmentOfDebtAmount</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
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<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
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<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_GainsLossesOnExtinguishmentOfDebt">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Difference between the fair value of payments made and the carrying amount of debt which is extinguished prior to maturity.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 50<br> -Section 40<br> -Paragraph 4<br> -URI http://asc.fasb.org/extlink&amp;oid=123467658&amp;loc=d3e12355-112629<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 50<br> -Section 40<br> -Paragraph 2<br> -URI http://asc.fasb.org/extlink&amp;oid=123467658&amp;loc=d3e12317-112629<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 28<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=123570139&amp;loc=d3e3602-108585<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_GainsLossesOnExtinguishmentOfDebt</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_InterestPayableCurrentAndNoncurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of interest payable on debt, including, but not limited to, trade payables.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 942<br> -SubTopic 210<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-03.15(5))<br> -URI http://asc.fasb.org/extlink&amp;oid=120398452&amp;loc=d3e534808-122878<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 210<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-03.15(a))<br> -URI http://asc.fasb.org/extlink&amp;oid=120400017&amp;loc=d3e572229-122910<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_InterestPayableCurrentAndNoncurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PaymentsForDerivativeInstrumentFinancingActivities">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The cash outflow for derivative instruments during the period, which are classified as financing activities, excluding those designated as hedging instruments.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 15<br> -Subparagraph (d)<br> -URI http://asc.fasb.org/extlink&amp;oid=123570139&amp;loc=d3e3291-108585<br><br>Reference 2: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 23<br> -URI http://asc.fasb.org/extlink&amp;oid=123570139&amp;loc=d3e3505-108585<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PaymentsForDerivativeInstrumentFinancingActivities</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProceedsFromConvertibleDebt">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The cash inflow from the issuance of a long-term debt instrument which can be exchanged for a specified amount of another security, typically the entity's common stock, at the option of the issuer or the holder.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 14<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=123570139&amp;loc=d3e3255-108585<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ProceedsFromConvertibleDebt</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RepaymentsOfUnsecuredDebt">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The cash outflow to repay long-term debt that is not secured by collateral. Excludes repayments of tax exempt unsecured debt.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 15<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=123570139&amp;loc=d3e3291-108585<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RepaymentsOfUnsecuredDebt</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_AdjustmentsToAdditionalPaidInCapitalExtinguishmentEquityComponentOfNotesRepurchased">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of adjustment to additional paid in capital (APIC) resulting from extinguishment of equity component of repurchased or exchanged notes.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_AdjustmentsToAdditionalPaidInCapitalExtinguishmentEquityComponentOfNotesRepurchased</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_DebtInstrumentCarryingAmountDebtExtinguished">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Carrying amount of debt extinguished (decrease in carrying amount of debt).</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_DebtInstrumentCarryingAmountDebtExtinguished</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DebtInstrumentAxis=veco_ConvertibleSeniorUnsecuredNotesDue2023Member">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DebtInstrumentAxis=veco_ConvertibleSeniorUnsecuredNotesDue2023Member</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
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<tr>
<td><strong> Balance Type:</strong></td>
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<tr>
<td><strong> Period Type:</strong></td>
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</tr>
</table></div>
</div></td></tr>
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<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeStatementLocationAxis=us-gaap_OtherNonoperatingIncomeExpenseMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeStatementLocationAxis=us-gaap_OtherNonoperatingIncomeExpenseMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
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<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DebtInstrumentAxis=veco_ConvertibleSeniorUnsecuredNotesDue2025Member">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DebtInstrumentAxis=veco_ConvertibleSeniorUnsecuredNotesDue2025Member</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
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<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
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<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DebtInstrumentAxis=veco_ConvertibleSeniorUnsecuredNotesDue2027Member">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DebtInstrumentAxis=veco_ConvertibleSeniorUnsecuredNotesDue2027Member</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
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<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674059688696">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Debt - Convertible Senior Notes (Details)<br></strong></div></th>
<th class="th" colspan="1"></th>
<th class="th" colspan="1"></th>
<th class="th" colspan="1"></th>
<th class="th" colspan="1"></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr>
<th class="th">
<div>Nov. 17, 2020 </div>
<div>USD ($) </div>
<div>$ / shares</div>
</th>
<th class="th">
<div>May 18, 2020 </div>
<div>USD ($) </div>
<div>$ / shares</div>
</th>
<th class="th">
<div>May 13, 2020 </div>
<div>USD ($) </div>
<div>$ / shares</div>
</th>
<th class="th">
<div>Jan. 10, 2017 </div>
<div>USD ($) </div>
<div>$ / shares</div>
</th>
<th class="th">
<div>Dec. 31, 2021 </div>
<div>USD ($) </div>
<div>D</div>
</th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentLineItems', window );"><strong>Debt</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LongTermDebtMeasurementInputExtensibleList', window );">Long-term Debt, Measurement Input</a></td>
<td class="text">us-gaap:MeasurementInputDiscountRateMember<span></span>
</td>
<td class="text">us-gaap:MeasurementInputDiscountRateMember<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">us-gaap:MeasurementInputDiscountRateMember<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PaymentsOfDebtIssuanceCosts', window );">Transaction costs</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 835,000<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DerivativeInstrumentRiskAxis=veco_DerivativeContractCappedCallMember', window );">Capped Call Transactions</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentLineItems', window );"><strong>Debt</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_CappedCallTransactionsPrice', window );">Aggregate price of capped call transaction</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 10,300,000<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_CappedCallTransactionsCapPrice', window );">Cap price of the capped call transactions (in dollars per share) | $ / shares</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 18.46<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentAxis=us-gaap_ConvertibleDebtMember', window );">Convertible Notes</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentLineItems', window );"><strong>Debt</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_DebtInstrumentPrincipalAmountDenominationForConversionIntoCommonStock', window );">Multiples of principal holders may convert</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">1,000<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentConvertibleThresholdConsecutiveTradingDays1', window );">Consecutive trading days | D</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">30<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentConvertibleThresholdPercentageOfStockPriceTrigger', window );">Stock price trigger (as a percent)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">130.00%<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_DebtInstrumentNumberOfConsecutiveBusinessDays', window );">Number of consecutive business days</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">5 days<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentConvertibleThresholdTradingDays', window );">Trading days</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">5<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_DebtInstrumentsConvertibleFeaturesMaximumPercentageOfCommonStockCouldBeConverted', window );">Maximum percentage of common stock conversion</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">98.00%<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentAxis=us-gaap_ConvertibleDebtMember', window );">Convertible Notes | Minimum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentLineItems', window );"><strong>Debt</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentConvertibleThresholdTradingDays', window );">Trading days | D</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">20<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentAxis=veco_ConvertibleSeniorUnsecuredNotesDue2023Member', window );">2023 Notes</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentLineItems', window );"><strong>Debt</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentConvertibleConversionRatio1', window );">Conversion rate</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">0.0249800<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentConvertibleConversionPrice1', window );">Conversion price (in dollars per share) | $ / shares</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 40.03<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LongTermDebtMeasurementInput', window );">Measurement input</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">7.0<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentUnamortizedDiscount', window );">Debt discount</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 72,500,000<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PaymentsOfDebtIssuanceCosts', window );">Transaction costs</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">9,200,000<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_DebtIssuanceCostsTransactionCostsAllocatedToEquityComponent', window );">Transaction costs allocated to the equity component</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 1,900,000<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentAxis=veco_ConvertibleSeniorUnsecuredNotesDue2025Member', window );">2025 Notes</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentLineItems', window );"><strong>Debt</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentConvertibleConversionRatio1', window );">Conversion rate</a></td>
<td class="nump">0.0416667<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentConvertibleConversionPrice1', window );">Conversion price (in dollars per share) | $ / shares</a></td>
<td class="nump">$ 24.00<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LongTermDebtMeasurementInput', window );">Measurement input</a></td>
<td class="nump">8.0<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentUnamortizedDiscount', window );">Debt discount</a></td>
<td class="nump">$ 21,000,000.0<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PaymentsOfDebtIssuanceCosts', window );">Transaction costs</a></td>
<td class="nump">1,900,000<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_DebtIssuanceCostsTransactionCostsAllocatedToEquityComponent', window );">Transaction costs allocated to the equity component</a></td>
<td class="nump">$ 300,000<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentAxis=veco_ConvertibleSeniorUnsecuredNotesDue2027Member', window );">2027 Notes</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentLineItems', window );"><strong>Debt</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentConvertibleConversionRatio1', window );">Conversion rate</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">0.0715372<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentConvertibleConversionPrice1', window );">Conversion price (in dollars per share) | $ / shares</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 13.98<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LongTermDebtMeasurementInput', window );">Measurement input</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">9.1<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentUnamortizedDiscount', window );">Debt discount</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 34,200,000<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PaymentsOfDebtIssuanceCosts', window );">Transaction costs</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">3,100,000<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_DebtIssuanceCostsTransactionCostsAllocatedToEquityComponent', window );">Transaction costs allocated to the equity component</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 800,000<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DebtInstrumentConvertibleConversionPrice1">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The price per share of the conversion feature embedded in the debt instrument.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 20<br> -Section 50<br> -Paragraph 5<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=123466204&amp;loc=SL6031898-161870<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1B<br> -Subparagraph (c)<br> -URI http://asc.fasb.org/extlink&amp;oid=123466505&amp;loc=SL123495323-112611<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DebtInstrumentConvertibleConversionPrice1</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DebtInstrumentConvertibleConversionRatio1">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Ratio applied to the conversion of debt instrument into equity with equity shares divided by debt principal amount.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1B<br> -Subparagraph (c)<br> -URI http://asc.fasb.org/extlink&amp;oid=123466505&amp;loc=SL123495323-112611<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section 50<br> -Paragraph 7<br> -URI http://asc.fasb.org/extlink&amp;oid=123467817&amp;loc=d3e21521-112644<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section 50<br> -Paragraph 6<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=123467817&amp;loc=d3e21506-112644<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.22(a)(5))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 5: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -URI http://asc.fasb.org/extlink&amp;oid=123467817&amp;loc=d3e21475-112644<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DebtInstrumentConvertibleConversionRatio1</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:pureItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DebtInstrumentConvertibleThresholdConsecutiveTradingDays1">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Threshold period of specified consecutive trading days within which common stock price to conversion price of convertible debt instrument must exceed threshold percentage for specified number of trading days to trigger conversion feature.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DebtInstrumentConvertibleThresholdConsecutiveTradingDays1</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:integerItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DebtInstrumentConvertibleThresholdPercentageOfStockPriceTrigger">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Minimum percentage of common stock price to conversion price of convertible debt instruments to determine eligibility of conversion.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DebtInstrumentConvertibleThresholdPercentageOfStockPriceTrigger</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DebtInstrumentConvertibleThresholdTradingDays">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Threshold number of specified trading days that common stock price to conversion price of convertible debt instruments must exceed threshold percentage within a specified consecutive trading period to trigger conversion feature.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DebtInstrumentConvertibleThresholdTradingDays</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:integerItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DebtInstrumentLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DebtInstrumentLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DebtInstrumentUnamortizedDiscount">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount, after accumulated amortization, of debt discount.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 835<br> -SubTopic 30<br> -Section 45<br> -Paragraph 1A<br> -URI http://asc.fasb.org/extlink&amp;oid=124435984&amp;loc=d3e28541-108399<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 835<br> -SubTopic 30<br> -Section 55<br> -Paragraph 8<br> -URI http://asc.fasb.org/extlink&amp;oid=114775985&amp;loc=d3e28878-108400<br><br>Reference 3: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1D<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=123466505&amp;loc=SL123495340-112611<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DebtInstrumentUnamortizedDiscount</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LongTermDebtMeasurementInput">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Value of input used to measure long-term debt.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 820<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (bbb)(2)<br> -URI http://asc.fasb.org/extlink&amp;oid=123874694&amp;loc=d3e19207-110258<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LongTermDebtMeasurementInput</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:decimalItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LongTermDebtMeasurementInputExtensibleList">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Indicates measurement input for long-term debt.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 820<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (bbb)(1)<br> -URI http://asc.fasb.org/extlink&amp;oid=123874694&amp;loc=d3e19207-110258<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LongTermDebtMeasurementInputExtensibleList</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>enum2:enumerationSetItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PaymentsOfDebtIssuanceCosts">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The cash outflow paid to third parties in connection with debt origination, which will be amortized over the remaining maturity period of the associated long-term debt.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 15<br> -Subparagraph (e)<br> -URI http://asc.fasb.org/extlink&amp;oid=123570139&amp;loc=d3e3291-108585<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PaymentsOfDebtIssuanceCosts</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_CappedCallTransactionsCapPrice">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Cap price of the capped call transactions.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_CappedCallTransactionsCapPrice</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_CappedCallTransactionsPrice">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Aggregate price of capped call transaction.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_CappedCallTransactionsPrice</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_DebtInstrumentNumberOfConsecutiveBusinessDays">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Period of time between issuance and maturity of debt instrument, in PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_DebtInstrumentNumberOfConsecutiveBusinessDays</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_DebtInstrumentPrincipalAmountDenominationForConversionIntoCommonStock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Represents the multiples of the principal amount of debt that holders may convert at their option under circumstances specified under the agreement.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_DebtInstrumentPrincipalAmountDenominationForConversionIntoCommonStock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:decimalItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_DebtInstrumentsConvertibleFeaturesMaximumPercentageOfCommonStockCouldBeConverted">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Maximum percentage of common stock converted.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_DebtInstrumentsConvertibleFeaturesMaximumPercentageOfCommonStockCouldBeConverted</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_DebtIssuanceCostsTransactionCostsAllocatedToEquityComponent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The amount of Transaction costs allocated to the equity component .</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_DebtIssuanceCostsTransactionCostsAllocatedToEquityComponent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DerivativeInstrumentRiskAxis=veco_DerivativeContractCappedCallMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DerivativeInstrumentRiskAxis=veco_DerivativeContractCappedCallMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DebtInstrumentAxis=us-gaap_ConvertibleDebtMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DebtInstrumentAxis=us-gaap_ConvertibleDebtMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_RangeAxis=srt_MinimumMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_RangeAxis=srt_MinimumMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DebtInstrumentAxis=veco_ConvertibleSeniorUnsecuredNotesDue2023Member">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DebtInstrumentAxis=veco_ConvertibleSeniorUnsecuredNotesDue2023Member</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DebtInstrumentAxis=veco_ConvertibleSeniorUnsecuredNotesDue2025Member">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DebtInstrumentAxis=veco_ConvertibleSeniorUnsecuredNotesDue2025Member</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DebtInstrumentAxis=veco_ConvertibleSeniorUnsecuredNotesDue2027Member">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DebtInstrumentAxis=veco_ConvertibleSeniorUnsecuredNotesDue2027Member</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>92
<FILENAME>R78.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
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<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674059671432">
<tr>
<th class="tl" colspan="1" rowspan="1"><div style="width: 200px;"><strong>Debt - Carrying Value (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
<th class="th"><div>Dec. 31, 2020</div></th>
<th class="th"><div>Nov. 17, 2020</div></th>
<th class="th"><div>May 18, 2020</div></th>
<th class="th"><div>Jan. 10, 2017</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentLineItems', window );"><strong>Debt</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentFaceAmount', window );">Principal amount</a></td>
<td class="nump">$ 277,673<span></span>
</td>
<td class="nump">$ 389,195<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentUnamortizedDiscountPremiumAndDebtIssuanceCostsNet', window );">Unamortized debt discount/transaction costs</a></td>
<td class="num">(48,235)<span></span>
</td>
<td class="num">(68,080)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LongTermDebt', window );">Net carrying value</a></td>
<td class="nump">229,438<span></span>
</td>
<td class="nump">321,115<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentAxis=veco_ConvertibleSeniorUnsecuredNotesDue2023Member', window );">2023 Notes</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentLineItems', window );"><strong>Debt</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentFaceAmount', window );">Principal amount</a></td>
<td class="nump">20,173<span></span>
</td>
<td class="nump">131,695<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 345,000<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentUnamortizedDiscountPremiumAndDebtIssuanceCostsNet', window );">Unamortized debt discount/transaction costs</a></td>
<td class="num">(967)<span></span>
</td>
<td class="num">(11,925)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LongTermDebt', window );">Net carrying value</a></td>
<td class="nump">19,206<span></span>
</td>
<td class="nump">119,770<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentAxis=veco_ConvertibleSeniorUnsecuredNotesDue2025Member', window );">2025 Notes</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentLineItems', window );"><strong>Debt</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentFaceAmount', window );">Principal amount</a></td>
<td class="nump">132,500<span></span>
</td>
<td class="nump">132,500<span></span>
</td>
<td class="nump">$ 132,500<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentUnamortizedDiscountPremiumAndDebtIssuanceCostsNet', window );">Unamortized debt discount/transaction costs</a></td>
<td class="num">(17,302)<span></span>
</td>
<td class="num">(22,097)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LongTermDebt', window );">Net carrying value</a></td>
<td class="nump">115,198<span></span>
</td>
<td class="nump">110,403<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentAxis=veco_ConvertibleSeniorUnsecuredNotesDue2027Member', window );">2027 Notes</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentLineItems', window );"><strong>Debt</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentFaceAmount', window );">Principal amount</a></td>
<td class="nump">125,000<span></span>
</td>
<td class="nump">125,000<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 125,000<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentUnamortizedDiscountPremiumAndDebtIssuanceCostsNet', window );">Unamortized debt discount/transaction costs</a></td>
<td class="num">(29,966)<span></span>
</td>
<td class="num">(34,058)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LongTermDebt', window );">Net carrying value</a></td>
<td class="nump">$ 95,034<span></span>
</td>
<td class="nump">$ 90,942<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DebtInstrumentFaceAmount">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Face (par) amount of debt instrument at time of issuance.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1B<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=123466505&amp;loc=SL123495323-112611<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 835<br> -SubTopic 30<br> -Section 45<br> -Paragraph 2<br> -URI http://asc.fasb.org/extlink&amp;oid=124435984&amp;loc=d3e28551-108399<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 835<br> -SubTopic 30<br> -Section 55<br> -Paragraph 8<br> -URI http://asc.fasb.org/extlink&amp;oid=114775985&amp;loc=d3e28878-108400<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 835<br> -SubTopic 30<br> -Section 50<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=124429444&amp;loc=SL124452920-239629<br><br>Reference 5: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 20<br> -Section 55<br> -Paragraph 69C<br> -URI http://asc.fasb.org/extlink&amp;oid=123466577&amp;loc=SL123495737-112612<br><br>Reference 6: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 20<br> -Section 55<br> -Paragraph 69B<br> -URI http://asc.fasb.org/extlink&amp;oid=123466577&amp;loc=SL123495735-112612<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DebtInstrumentFaceAmount</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
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<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DebtInstrumentLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DebtInstrumentLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
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<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
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<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
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<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DebtInstrumentUnamortizedDiscountPremiumAndDebtIssuanceCostsNet">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of unamortized debt discount (premium) and debt issuance costs.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 20<br> -Section 55<br> -Paragraph 69C<br> -URI http://asc.fasb.org/extlink&amp;oid=123466577&amp;loc=SL123495737-112612<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 20<br> -Section 50<br> -Paragraph 4<br> -Subparagraph (b)(2)<br> -URI http://asc.fasb.org/extlink&amp;oid=123466204&amp;loc=SL6031897-161870<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1D<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=123466505&amp;loc=SL123495340-112611<br><br>Reference 4: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 20<br> -Section 55<br> -Paragraph 69B<br> -URI http://asc.fasb.org/extlink&amp;oid=123466577&amp;loc=SL123495735-112612<br><br>Reference 5: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 835<br> -SubTopic 30<br> -Section 45<br> -Paragraph 3<br> -URI http://asc.fasb.org/extlink&amp;oid=124435984&amp;loc=d3e28555-108399<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DebtInstrumentUnamortizedDiscountPremiumAndDebtIssuanceCostsNet</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LongTermDebt">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount, after unamortized (discount) premium and debt issuance costs, of long-term debt. Includes, but not limited to, notes payable, bonds payable, debentures, mortgage loans and commercial paper. Excludes capital lease obligations.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 20<br> -Section 50<br> -Paragraph 4<br> -Subparagraph (b)(3)<br> -URI http://asc.fasb.org/extlink&amp;oid=123466204&amp;loc=SL6031897-161870<br><br>Reference 2: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 20<br> -Section 55<br> -Paragraph 69C<br> -URI http://asc.fasb.org/extlink&amp;oid=123466577&amp;loc=SL123495737-112612<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 210<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-03(a)(16))<br> -URI http://asc.fasb.org/extlink&amp;oid=120400017&amp;loc=d3e572229-122910<br><br>Reference 4: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 20<br> -Section 55<br> -Paragraph 69B<br> -URI http://asc.fasb.org/extlink&amp;oid=123466577&amp;loc=SL123495735-112612<br><br>Reference 5: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 942<br> -SubTopic 210<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-03(16))<br> -URI http://asc.fasb.org/extlink&amp;oid=120398452&amp;loc=d3e534808-122878<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1D<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=123466505&amp;loc=SL123495340-112611<br><br>Reference 7: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(22))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LongTermDebt</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
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<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
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<td><strong> Balance Type:</strong></td>
<td>credit</td>
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<td><strong> Period Type:</strong></td>
<td>instant</td>
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</div></td></tr>
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<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DebtInstrumentAxis=veco_ConvertibleSeniorUnsecuredNotesDue2023Member</td>
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<td><strong> Period Type:</strong></td>
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<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DebtInstrumentAxis=veco_ConvertibleSeniorUnsecuredNotesDue2025Member</td>
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<td><strong> Data Type:</strong></td>
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<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DebtInstrumentAxis=veco_ConvertibleSeniorUnsecuredNotesDue2027Member</td>
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<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674063376600">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Debt - Interest Expense (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="3">12 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2021</div></th>
<th class="th"><div>Dec. 31, 2020</div></th>
<th class="th"><div>Dec. 31, 2019</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_NonCashInterestExpenseAbstract', window );"><strong>Non-Cash Interest Expense</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AmortizationOfFinancingCostsAndDiscounts', window );">Amortization of debt discount/transaction costs</a></td>
<td class="nump">$ 13,819<span></span>
</td>
<td class="nump">$ 13,792<span></span>
</td>
<td class="nump">$ 12,676<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_InterestExpenseDebt', window );">Total Interest Expense</a></td>
<td class="nump">26,282<span></span>
</td>
<td class="nump">24,640<span></span>
</td>
<td class="nump">21,991<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentAxis=veco_ConvertibleSeniorUnsecuredNotesDue2023Member', window );">2023 Notes</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_CashInterestExpenseAbstract', window );"><strong>Cash Interest Expense</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_InterestExpenseDebtExcludingAmortization', window );">Coupon interest expense</a></td>
<td class="nump">3,138<span></span>
</td>
<td class="nump">7,390<span></span>
</td>
<td class="nump">9,315<span></span>
</td>
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<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_NonCashInterestExpenseAbstract', window );"><strong>Non-Cash Interest Expense</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AmortizationOfFinancingCostsAndDiscounts', window );">Amortization of debt discount/transaction costs</a></td>
<td class="nump">4,932<span></span>
</td>
<td class="nump">10,887<span></span>
</td>
<td class="nump">$ 12,676<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConvertibleDebtFairValueDisclosures', window );">Estimated fair value</a></td>
<td class="nump">$ 20,400<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConvertibleDebtFairValueByFairValueHierarchyLevelExtensibleList', window );">Convertible Debt, Fair Value by Fair Value Hierarchy Level</a></td>
<td class="text">Level 2<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentAxis=veco_ConvertibleSeniorUnsecuredNotesDue2025Member', window );">2025 Notes</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_CashInterestExpenseAbstract', window );"><strong>Cash Interest Expense</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_InterestExpenseDebtExcludingAmortization', window );">Coupon interest expense</a></td>
<td class="nump">$ 4,637<span></span>
</td>
<td class="nump">554<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_NonCashInterestExpenseAbstract', window );"><strong>Non-Cash Interest Expense</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AmortizationOfFinancingCostsAndDiscounts', window );">Amortization of debt discount/transaction costs</a></td>
<td class="nump">4,795<span></span>
</td>
<td class="nump">546<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
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<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConvertibleDebtFairValueDisclosures', window );">Estimated fair value</a></td>
<td class="nump">$ 175,000<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConvertibleDebtFairValueByFairValueHierarchyLevelExtensibleList', window );">Convertible Debt, Fair Value by Fair Value Hierarchy Level</a></td>
<td class="text">Level 2<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentAxis=veco_ConvertibleSeniorUnsecuredNotesDue2027Member', window );">2027 Notes</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_CashInterestExpenseAbstract', window );"><strong>Cash Interest Expense</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_InterestExpenseDebtExcludingAmortization', window );">Coupon interest expense</a></td>
<td class="nump">$ 4,688<span></span>
</td>
<td class="nump">2,904<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_NonCashInterestExpenseAbstract', window );"><strong>Non-Cash Interest Expense</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AmortizationOfFinancingCostsAndDiscounts', window );">Amortization of debt discount/transaction costs</a></td>
<td class="nump">4,092<span></span>
</td>
<td class="nump">$ 2,359<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConvertibleDebtFairValueDisclosures', window );">Estimated fair value</a></td>
<td class="nump">$ 258,900<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConvertibleDebtFairValueByFairValueHierarchyLevelExtensibleList', window );">Convertible Debt, Fair Value by Fair Value Hierarchy Level</a></td>
<td class="text">Level 2<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AmortizationOfFinancingCostsAndDiscounts">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of amortization expense attributable to debt discount (premium) and debt issuance costs.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 28<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=123570139&amp;loc=d3e3602-108585<br><br>Reference 2: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 20<br> -Section 55<br> -Paragraph 69E<br> -URI http://asc.fasb.org/extlink&amp;oid=123466577&amp;loc=SL123495743-112612<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 835<br> -SubTopic 30<br> -Section 45<br> -Paragraph 3<br> -URI http://asc.fasb.org/extlink&amp;oid=124435984&amp;loc=d3e28555-108399<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1F<br> -Subparagraph (b)(2)<br> -URI http://asc.fasb.org/extlink&amp;oid=123466505&amp;loc=SL123495355-112611<br><br>Reference 5: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 20<br> -Section 55<br> -Paragraph 69F<br> -URI http://asc.fasb.org/extlink&amp;oid=123466577&amp;loc=SL123495745-112612<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AmortizationOfFinancingCostsAndDiscounts</td>
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<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
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<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ConvertibleDebtFairValueByFairValueHierarchyLevelExtensibleList">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Indicates level within fair value hierarchy of convertible debt.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 820<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=123874694&amp;loc=d3e19207-110258<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1D<br> -Subparagraph (c)<br> -URI http://asc.fasb.org/extlink&amp;oid=123466505&amp;loc=SL123495340-112611<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ConvertibleDebtFairValueByFairValueHierarchyLevelExtensibleList</td>
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<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
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<td><strong> Data Type:</strong></td>
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<td><strong> Balance Type:</strong></td>
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<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Fair value portion of borrowing which can be exchanged for a specified number of another security at the option of the issuer or the holder, for example, but not limited to, the entity's common stock.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ConvertibleDebtFairValueDisclosures</td>
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<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
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<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_InterestExpenseDebt">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of the cost of borrowed funds accounted for as interest expense for debt.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 20<br> -Section 50<br> -Paragraph 6<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=123466204&amp;loc=SL6036836-161870<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SX 210.5-03.8)<br> -URI http://asc.fasb.org/extlink&amp;oid=123367319&amp;loc=SL114868664-224227<br><br>Reference 3: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 20<br> -Section 55<br> -Paragraph 69F<br> -URI http://asc.fasb.org/extlink&amp;oid=123466577&amp;loc=SL123495745-112612<br><br>Reference 4: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 20<br> -Section 55<br> -Paragraph 69E<br> -URI http://asc.fasb.org/extlink&amp;oid=123466577&amp;loc=SL123495743-112612<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1F<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=123466505&amp;loc=SL123495355-112611<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_InterestExpenseDebt</td>
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<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
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<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
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<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
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</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_InterestExpenseDebtExcludingAmortization">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Represents the portion of interest incurred in the period on debt arrangements that was charged against earnings, excluding amortization of debt discount (premium) and financing costs.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 20<br> -Section 55<br> -Paragraph 69E<br> -URI http://asc.fasb.org/extlink&amp;oid=123466577&amp;loc=SL123495743-112612<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1F<br> -Subparagraph (b)(1)<br> -URI http://asc.fasb.org/extlink&amp;oid=123466505&amp;loc=SL123495355-112611<br><br>Reference 3: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 20<br> -Section 55<br> -Paragraph 69F<br> -URI http://asc.fasb.org/extlink&amp;oid=123466577&amp;loc=SL123495745-112612<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph 8<br> -URI http://asc.fasb.org/extlink&amp;oid=123367319&amp;loc=SL114868664-224227<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_InterestExpenseDebtExcludingAmortization</td>
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<td><strong> Balance Type:</strong></td>
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<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_CashInterestExpenseAbstract</td>
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<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
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<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
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<td><strong> Name:</strong></td>
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<td></td>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DebtInstrumentAxis=veco_ConvertibleSeniorUnsecuredNotesDue2025Member</td>
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<td>na</td>
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<td></td>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
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<td style="white-space:nowrap;">us-gaap_DebtInstrumentAxis=veco_ConvertibleSeniorUnsecuredNotesDue2027Member</td>
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<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674056254504">
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<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Debt - Revolving Credit Facility (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="1"></th>
<th class="th" colspan="1">12 Months Ended</th>
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<tr>
<th class="th"><div>Dec. 16, 2021</div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentAxis=veco_RevolvingCreditFacilityDecember2021Member', window );">Credit Facility</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentLineItems', window );"><strong>Debt Instrument [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LineOfCreditFacilityMaximumBorrowingCapacity', window );">Borrowing capacity</a></td>
<td class="nump">$ 150,000<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentTerm', window );">Debt instrument term</a></td>
<td class="text">5 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_LineOfCreditFacilityContingentIncreaseAdditionalBorrowingCapacity', window );">Additional increase in borrowing subject to certain conditions</a></td>
<td class="nump">$ 75,000<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LineOfCreditFacilityMaximumAmountOutstandingDuringPeriod', window );">Outstanding amount</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 0<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentAxis=veco_RevolvingCreditFacilityDecember2021Member', window );">Credit Facility | Minimum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentLineItems', window );"><strong>Debt Instrument [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LineOfCreditFacilityUnusedCapacityCommitmentFeePercentage', window );">Unused commitment fee percentage (as a percent)</a></td>
<td class="nump">0.25%<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_DebtInstrumentInterestCoverageRatio', window );">Interest coverage ratio</a></td>
<td class="nump">3.00<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentAxis=veco_RevolvingCreditFacilityDecember2021Member', window );">Credit Facility | Maximum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentLineItems', window );"><strong>Debt Instrument [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LineOfCreditFacilityUnusedCapacityCommitmentFeePercentage', window );">Unused commitment fee percentage (as a percent)</a></td>
<td class="nump">0.35%<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_DebtInstrumentTotalNetLeverageRatio', window );">Total net leverage ratio</a></td>
<td class="nump">4.50<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_DebtInstrumentSecuredNetLeverageRatio', window );">Secured net leverage ratio</a></td>
<td class="nump">2.50<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentAxis=veco_RevolvingCreditFacilityDecember2021Member', window );">Credit Facility | Base rate | Minimum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentLineItems', window );"><strong>Debt Instrument [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentBasisSpreadOnVariableRate1', window );">Basis spread on base rate (as a percent)</a></td>
<td class="nump">0.50%<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentAxis=veco_RevolvingCreditFacilityDecember2021Member', window );">Credit Facility | Base rate | Maximum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentLineItems', window );"><strong>Debt Instrument [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentBasisSpreadOnVariableRate1', window );">Basis spread on base rate (as a percent)</a></td>
<td class="nump">1.25%<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentAxis=veco_RevolvingCreditFacilityDecember2021Member', window );">Credit Facility | SOFR Overnight Index Swap Rate</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentLineItems', window );"><strong>Debt Instrument [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_DebtInstrumentFloorRate', window );">Floor rate on debt instrument (as a percent)</a></td>
<td class="nump">0.00%<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentAxis=veco_RevolvingCreditFacilityDecember2021Member', window );">Credit Facility | SOFR Overnight Index Swap Rate | Minimum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentLineItems', window );"><strong>Debt Instrument [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentBasisSpreadOnVariableRate1', window );">Basis spread on base rate (as a percent)</a></td>
<td class="nump">1.50%<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentAxis=veco_RevolvingCreditFacilityDecember2021Member', window );">Credit Facility | SOFR Overnight Index Swap Rate | Maximum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentLineItems', window );"><strong>Debt Instrument [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentBasisSpreadOnVariableRate1', window );">Basis spread on base rate (as a percent)</a></td>
<td class="nump">2.25%<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentAxis=veco_RevolvingCreditFacilityDecember2021LetterOfCreditMember', window );">Credit Facility, Letter of Credit</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentLineItems', window );"><strong>Debt Instrument [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LineOfCreditFacilityMaximumBorrowingCapacity', window );">Borrowing capacity</a></td>
<td class="nump">$ 15,000<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DebtInstrumentBasisSpreadOnVariableRate1">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Percentage points added to the reference rate to compute the variable rate on the debt instrument.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DebtInstrumentBasisSpreadOnVariableRate1</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DebtInstrumentLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DebtInstrumentLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DebtInstrumentTerm">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Period of time between issuance and maturity of debt instrument, in PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DebtInstrumentTerm</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LineOfCreditFacilityMaximumAmountOutstandingDuringPeriod">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Maximum amount borrowed under the credit facility at any time during the period.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LineOfCreditFacilityMaximumAmountOutstandingDuringPeriod</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LineOfCreditFacilityMaximumBorrowingCapacity">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Maximum borrowing capacity under the credit facility without consideration of any current restrictions on the amount that could be borrowed or the amounts currently outstanding under the facility.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.19(b),22(b))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LineOfCreditFacilityMaximumBorrowingCapacity</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LineOfCreditFacilityUnusedCapacityCommitmentFeePercentage">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The fee, expressed as a percentage of the line of credit facility, for available but unused credit capacity under the credit facility.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LineOfCreditFacilityUnusedCapacityCommitmentFeePercentage</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_DebtInstrumentFloorRate">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Floor rate on debt instrument.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_DebtInstrumentFloorRate</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_DebtInstrumentInterestCoverageRatio">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Interest coverage ratio, as defined by the agreement.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_DebtInstrumentInterestCoverageRatio</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:pureItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_DebtInstrumentSecuredNetLeverageRatio">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Secured net leverage ratio, as defined by the agreement.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_DebtInstrumentSecuredNetLeverageRatio</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:pureItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_DebtInstrumentTotalNetLeverageRatio">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Total net leverage ratio, as defined by the agreement.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_DebtInstrumentTotalNetLeverageRatio</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:pureItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_LineOfCreditFacilityContingentIncreaseAdditionalBorrowingCapacity">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The contingent increase above the maximum borrowing capacity under the credit facility, if any one or more of the existing banks or new banks agree to provide such increased commitment amount.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_LineOfCreditFacilityContingentIncreaseAdditionalBorrowingCapacity</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DebtInstrumentAxis=veco_RevolvingCreditFacilityDecember2021Member">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DebtInstrumentAxis=veco_RevolvingCreditFacilityDecember2021Member</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_RangeAxis=srt_MinimumMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_RangeAxis=srt_MinimumMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_RangeAxis=srt_MaximumMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_RangeAxis=srt_MaximumMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_VariableRateAxis=us-gaap_BaseRateMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_VariableRateAxis=us-gaap_BaseRateMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_VariableRateAxis=us-gaap_SecuredOvernightFinancingRateSofrOvernightIndexSwapRateMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_VariableRateAxis=us-gaap_SecuredOvernightFinancingRateSofrOvernightIndexSwapRateMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DebtInstrumentAxis=veco_RevolvingCreditFacilityDecember2021LetterOfCreditMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DebtInstrumentAxis=veco_RevolvingCreditFacilityDecember2021LetterOfCreditMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>95
<FILENAME>R81.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
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<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674063941128">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Stockholders' Equity - AOCI Rollforward (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="3">12 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2021</div></th>
<th class="th"><div>Dec. 31, 2020</div></th>
<th class="th"><div>Dec. 31, 2019</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AOCIAttributableToParentNetOfTaxRollForward', window );"><strong>Changes in the balances of each component of AOCI</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockholdersEquity', window );">Balance at the beginning of the period</a></td>
<td class="nump">$ 408,374<span></span>
</td>
<td class="nump">$ 374,512<span></span>
</td>
<td class="nump">$ 437,775<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent', window );">Other comprehensive income (loss)</a></td>
<td class="num">(363)<span></span>
</td>
<td class="num">(48)<span></span>
</td>
<td class="nump">74<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockholdersEquity', window );">Balance at the end of the period</a></td>
<td class="nump">437,628<span></span>
</td>
<td class="nump">408,374<span></span>
</td>
<td class="nump">374,512<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StatementEquityComponentsAxis=us-gaap_AccumulatedOtherComprehensiveIncomeMember', window );">Accumulated Other Comprehensive Income</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AOCIAttributableToParentNetOfTaxRollForward', window );"><strong>Changes in the balances of each component of AOCI</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockholdersEquity', window );">Balance at the beginning of the period</a></td>
<td class="nump">1,846<span></span>
</td>
<td class="nump">1,894<span></span>
</td>
<td class="nump">1,820<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent', window );">Other comprehensive income (loss)</a></td>
<td class="num">(363)<span></span>
</td>
<td class="num">(48)<span></span>
</td>
<td class="nump">74<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockholdersEquity', window );">Balance at the end of the period</a></td>
<td class="nump">1,483<span></span>
</td>
<td class="nump">1,846<span></span>
</td>
<td class="nump">1,894<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StatementEquityComponentsAxis=us-gaap_AccumulatedTranslationAdjustmentMember', window );">Translation adjustment</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AOCIAttributableToParentNetOfTaxRollForward', window );"><strong>Changes in the balances of each component of AOCI</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockholdersEquity', window );">Balance at the beginning of the period</a></td>
<td class="nump">1,866<span></span>
</td>
<td class="nump">1,861<span></span>
</td>
<td class="nump">1,836<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent', window );">Other comprehensive income (loss)</a></td>
<td class="num">(52)<span></span>
</td>
<td class="nump">5<span></span>
</td>
<td class="nump">25<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockholdersEquity', window );">Balance at the end of the period</a></td>
<td class="nump">1,814<span></span>
</td>
<td class="nump">1,866<span></span>
</td>
<td class="nump">1,861<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StatementEquityComponentsAxis=us-gaap_AccumulatedNetUnrealizedInvestmentGainLossMember', window );">Unrealized gain on available for sale securities</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AOCIAttributableToParentNetOfTaxRollForward', window );"><strong>Changes in the balances of each component of AOCI</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockholdersEquity', window );">Balance at the beginning of the period</a></td>
<td class="num">(20)<span></span>
</td>
<td class="nump">33<span></span>
</td>
<td class="num">(16)<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent', window );">Other comprehensive income (loss)</a></td>
<td class="num">(311)<span></span>
</td>
<td class="num">(53)<span></span>
</td>
<td class="nump">49<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockholdersEquity', window );">Balance at the end of the period</a></td>
<td class="num">$ (331)<span></span>
</td>
<td class="num">$ (20)<span></span>
</td>
<td class="nump">$ 33<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AOCIAttributableToParentNetOfTaxRollForward">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>A roll forward is a reconciliation of a concept from the beginning of a period to the end of a period.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AOCIAttributableToParentNetOfTaxRollForward</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
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<tr>
<td><strong> Data Type:</strong></td>
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</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent">
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<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount after tax of other comprehensive income (loss) attributable to parent entity.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section 45<br> -Paragraph 1B<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=124509347&amp;loc=SL7669625-108580<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1A<br> -Subparagraph (c)(3)<br> -URI http://asc.fasb.org/extlink&amp;oid=109239629&amp;loc=SL4573702-111684<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 45<br> -Paragraph 20<br> -URI http://asc.fasb.org/extlink&amp;oid=123454820&amp;loc=SL4569643-111683<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section 45<br> -Paragraph 1A<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=124509347&amp;loc=SL7669619-108580<br><br>Reference 5: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 45<br> -Paragraph 19<br> -URI http://asc.fasb.org/extlink&amp;oid=123454820&amp;loc=SL4569616-111683<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
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<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StockholdersEquity">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Total of all stockholders' equity (deficit) items, net of receivables from officers, directors, owners, and affiliates of the entity which are attributable to the parent. The amount of the economic entity's stockholders' equity attributable to the parent excludes the amount of stockholders' equity which is allocable to that ownership interest in subsidiary equity which is not attributable to the parent (noncontrolling interest, minority interest). This excludes temporary equity and is sometimes called permanent equity.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(g)(1)(ii))<br> -URI http://asc.fasb.org/extlink&amp;oid=120395691&amp;loc=d3e23780-122690<br><br>Reference 2: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 852<br> -SubTopic 10<br> -Section 55<br> -Paragraph 10<br> -URI http://asc.fasb.org/extlink&amp;oid=84165509&amp;loc=d3e56426-112766<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 310<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SAB Topic 4.E)<br> -URI http://asc.fasb.org/extlink&amp;oid=122038336&amp;loc=d3e74512-122707<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(31))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 5: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(29))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 6: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(30))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 7: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 825<br> -SubTopic 10<br> -Section 50<br> -Paragraph 28<br> -Subparagraph (f)<br> -URI http://asc.fasb.org/extlink&amp;oid=123596393&amp;loc=d3e14064-108612<br><br>Reference 8: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 323<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (c)<br> -URI http://asc.fasb.org/extlink&amp;oid=114001798&amp;loc=d3e33918-111571<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StockholdersEquity</td>
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<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StatementEquityComponentsAxis=us-gaap_AccumulatedOtherComprehensiveIncomeMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StatementEquityComponentsAxis=us-gaap_AccumulatedOtherComprehensiveIncomeMember</td>
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<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
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</table></div>
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<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StatementEquityComponentsAxis=us-gaap_AccumulatedTranslationAdjustmentMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StatementEquityComponentsAxis=us-gaap_AccumulatedTranslationAdjustmentMember</td>
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<td><strong> Balance Type:</strong></td>
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<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
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<td></td>
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<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674063670568">
<tr>
<th class="tl" colspan="1" rowspan="1"><div style="width: 200px;"><strong>Stockholders' Equity - Preferred Stock (Details) - $ / shares<br></strong></div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
<th class="th"><div>Dec. 31, 2020</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockholdersEquityNoteAbstract', window );"><strong>Stockholders' Equity</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
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<td class="nump">$ 0.01<span></span>
</td>
<td class="nump">$ 0.01<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PreferredStockSharesIssued', window );">Preferred stock, shares issued</a></td>
<td class="nump">0<span></span>
</td>
<td class="nump">0<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PreferredStockParOrStatedValuePerShare">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Face amount or stated value per share of preferred stock nonredeemable or redeemable solely at the option of the issuer.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(28))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section 50<br> -Paragraph 13<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=123467817&amp;loc=SL123496158-112644<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PreferredStockParOrStatedValuePerShare</td>
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<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
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<tr>
<td><strong> Data Type:</strong></td>
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<td><strong> Balance Type:</strong></td>
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<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PreferredStockSharesIssued">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Total number of nonredeemable preferred shares (or preferred stock redeemable solely at the option of the issuer) issued to shareholders (includes related preferred shares that were issued, repurchased, and remain in the treasury). May be all or portion of the number of preferred shares authorized. Excludes preferred shares that are classified as debt.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(28))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section 50<br> -Paragraph 13<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=123467817&amp;loc=SL123496158-112644<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PreferredStockSharesIssued</td>
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<tr>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
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<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674062487560">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Stockholders' Equity - Treasury Stock (Details) - USD ($)<br> $ in Millions</strong></div></th>
<th class="th" colspan="1">24 Months Ended</th>
<th class="th" colspan="1"></th>
</tr>
<tr>
<th class="th"><div>Dec. 11, 2019</div></th>
<th class="th"><div>Dec. 11, 2017</div></th>
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<td class="text">&#160;<span></span>
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<td class="text">&#160;<span></span>
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<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 100.0<span></span>
</td>
</tr>
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<td class="nump">$ 14.3<span></span>
</td>
<td class="text">&#160;<span></span>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of stock repurchase plan authorized.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
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</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_TreasuryStockTransactionsExcludingValueOfSharesReissuedAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_TreasuryStockTransactionsExcludingValueOfSharesReissuedAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_TreasuryStockValueAcquiredCostMethod">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Equity impact of the cost of common and preferred stock that were repurchased during the period. Recorded using the cost method.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -URI http://asc.fasb.org/extlink&amp;oid=123467817&amp;loc=d3e21463-112644<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 30<br> -Section 45<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=6405813&amp;loc=d3e23239-112655<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.3-04)<br> -URI http://asc.fasb.org/extlink&amp;oid=120397183&amp;loc=d3e187085-122770<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_TreasuryStockValueAcquiredCostMethod</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
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<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674060879784">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Stock Plans - 2019 Plan (Details) - shares<br></strong></div></th>
<th class="th" colspan="2">12 Months Ended</th>
<th class="th" colspan="1"></th>
<th class="th" colspan="1"></th>
<th class="th" colspan="1"></th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2021</div></th>
<th class="th"><div>Dec. 31, 2013</div></th>
<th class="th"><div>Dec. 31, 2020</div></th>
<th class="th"><div>Dec. 31, 2019</div></th>
<th class="th"><div>Dec. 31, 2018</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems', window );"><strong>Share-based compensation</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber', window );">Number of options outstanding (in shares)</a></td>
<td class="nump">443,000<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">730,000<span></span>
</td>
<td class="nump">1,119,000<span></span>
</td>
<td class="nump">1,222,000<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PlanNameAxis=veco_InducementStockIncentivePlan2013Member', window );">Inducement Plan</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems', window );"><strong>Share-based compensation</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAvailableForGrant', window );">Awards available for grant (in shares)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">0<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PlanNameAxis=veco_StockIncentivePlan2010Member', window );">2019 Plan</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems', window );"><strong>Share-based compensation</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAuthorized', window );">Number of shares authorized</a></td>
<td class="nump">13,300,000<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AwardTypeAxis=us-gaap_EmployeeStockOptionMember', window );">Stock options | Inducement Plan</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems', window );"><strong>Share-based compensation</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriod', window );">Awards granted (in shares)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">124,500<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1', window );">Vesting period</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">3 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod', window );">Expiration term</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">10 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber', window );">Number of options outstanding (in shares)</a></td>
<td class="nump">2,000<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AwardTypeAxis=us-gaap_EmployeeStockOptionMember', window );">Stock options | 2019 Plan</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems', window );"><strong>Share-based compensation</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1', window );">Vesting period</a></td>
<td class="text">3 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber', window );">Number of options outstanding (in shares)</a></td>
<td class="nump">400,000<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AwardTypeAxis=us-gaap_EmployeeStockOptionMember', window );">Stock options | 2019 Plan | Minimum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems', window );"><strong>Share-based compensation</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod', window );">Expiration term</a></td>
<td class="text">7 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AwardTypeAxis=us-gaap_EmployeeStockOptionMember', window );">Stock options | 2019 Plan | Maximum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems', window );"><strong>Share-based compensation</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod', window );">Expiration term</a></td>
<td class="text">10 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AwardTypeAxis=veco_RestrictedStockAwardsAndRestrictedStockUnitsMember', window );">Restricted Stock Awards and Restricted Stock Units | 2019 Plan | Minimum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems', window );"><strong>Share-based compensation</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1', window );">Vesting period</a></td>
<td class="text">1 year<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AwardTypeAxis=veco_RestrictedStockAwardsAndRestrictedStockUnitsMember', window );">Restricted Stock Awards and Restricted Stock Units | 2019 Plan | Maximum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems', window );"><strong>Share-based compensation</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1', window );">Vesting period</a></td>
<td class="text">5 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AwardTypeAxis=us-gaap_RestrictedStockUnitsRSUMember', window );">Restricted stock units | Inducement Plan</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems', window );"><strong>Share-based compensation</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod', window );">Awards granted (in shares)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">87,000<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNonOptionEquityInstrumentsOutstandingNumber', window );">Number of awards outstanding (in shares)</a></td>
<td class="nump">0<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AwardTypeAxis=us-gaap_RestrictedStockUnitsRSUMember', window );">Restricted stock units | Inducement Plan | Minimum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems', window );"><strong>Share-based compensation</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1', window );">Vesting period</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">2 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AwardTypeAxis=us-gaap_RestrictedStockUnitsRSUMember', window );">Restricted stock units | Inducement Plan | Maximum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems', window );"><strong>Share-based compensation</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1', window );">Vesting period</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">4 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AwardTypeAxis=veco_RsuAndPsuAwardsMember', window );">RSUs and PSUs | 2019 Plan</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems', window );"><strong>Share-based compensation</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNonOptionEquityInstrumentsOutstandingNumber', window );">Number of awards outstanding (in shares)</a></td>
<td class="nump">700,000<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Period over which grantee's right to exercise award under share-based payment arrangement is no longer contingent on satisfaction of service or performance condition, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents reported fact of one year, five months, and thirteen days. Includes, but is not limited to, combination of market, performance or service condition.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (a)(1)<br> -URI http://asc.fasb.org/extlink&amp;oid=120381028&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The number of grants made during the period on other than stock (or unit) option plans (for example, phantom stock or unit plan, stock or unit appreciation rights plan, performance target plan).</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(2)(iii)(1)<br> -URI http://asc.fasb.org/extlink&amp;oid=120381028&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNonOptionEquityInstrumentsOutstandingNumber">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Number of equity instruments other than options outstanding, including both vested and non-vested instruments.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(1)(ii)<br> -URI http://asc.fasb.org/extlink&amp;oid=120381028&amp;loc=d3e5070-113901<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(1)(i)<br> -URI http://asc.fasb.org/extlink&amp;oid=120381028&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNonOptionEquityInstrumentsOutstandingNumber</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAuthorized">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Number of shares authorized for issuance under share-based payment arrangement.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (a)(3)<br> -URI http://asc.fasb.org/extlink&amp;oid=120381028&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAuthorized</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAvailableForGrant">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The difference between the maximum number of shares (or other type of equity) authorized for issuance under the plan (including the effects of amendments and adjustments), and the sum of: 1) the number of shares (or other type of equity) already issued upon exercise of options or other equity-based awards under the plan; and 2) shares (or other type of equity) reserved for issuance on granting of outstanding awards, net of cancellations and forfeitures, if applicable.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -URI http://asc.fasb.org/extlink&amp;oid=120381028&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAvailableForGrant</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriod">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Net number of share options (or share units) granted during the period.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(1)(iv)(1)<br> -URI http://asc.fasb.org/extlink&amp;oid=120381028&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriod</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Number of options outstanding, including both vested and non-vested options.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -URI http://asc.fasb.org/extlink&amp;oid=120381028&amp;loc=d3e5070-113901<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(1)(i)-(ii)<br> -URI http://asc.fasb.org/extlink&amp;oid=120381028&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Period from grant date that an equity-based award expires, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (a)(2)<br> -URI http://asc.fasb.org/extlink&amp;oid=120381028&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PlanNameAxis=veco_InducementStockIncentivePlan2013Member">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PlanNameAxis=veco_InducementStockIncentivePlan2013Member</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
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<tr>
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</table></div>
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</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PlanNameAxis=veco_StockIncentivePlan2010Member">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PlanNameAxis=veco_StockIncentivePlan2010Member</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
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<tr>
<td><strong> Period Type:</strong></td>
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</table></div>
</div></td></tr>
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<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AwardTypeAxis=us-gaap_EmployeeStockOptionMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AwardTypeAxis=us-gaap_EmployeeStockOptionMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
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</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
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<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_RangeAxis=srt_MinimumMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_RangeAxis=srt_MinimumMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
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<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_RangeAxis=srt_MaximumMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_RangeAxis=srt_MaximumMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AwardTypeAxis=veco_RestrictedStockAwardsAndRestrictedStockUnitsMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AwardTypeAxis=veco_RestrictedStockAwardsAndRestrictedStockUnitsMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
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<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AwardTypeAxis=us-gaap_RestrictedStockUnitsRSUMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AwardTypeAxis=us-gaap_RestrictedStockUnitsRSUMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
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<tr>
<td><strong> Period Type:</strong></td>
<td></td>
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</table></div>
</div></td></tr>
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<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AwardTypeAxis=veco_RsuAndPsuAwardsMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AwardTypeAxis=veco_RsuAndPsuAwardsMember</td>
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<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
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<tr>
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<td></td>
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<tr>
<td><strong> Period Type:</strong></td>
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</div></td></tr>
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</body>
</html>
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</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>99
<FILENAME>R85.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
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<body>
<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674063459928">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Stock Plans - ESPP (Details) - ESPP<br> shares in Thousands</strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th">
<div>Dec. 31, 2016 </div>
<div>shares</div>
</th></tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems', window );"><strong>Share-based compensation</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAuthorized', window );">Number of shares authorized</a></td>
<td class="nump">2,250<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardPurchasePriceOfCommonStockPercent', window );">Share price (as a percent)</a></td>
<td class="nump">85.00%<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardOfferPeriod', window );">Offer period</a></td>
<td class="text">6 months<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAuthorized">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Number of shares authorized for issuance under share-based payment arrangement.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (a)(3)<br> -URI http://asc.fasb.org/extlink&amp;oid=120381028&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAuthorized</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardPurchasePriceOfCommonStockPercent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Purchase price of common stock expressed as a percentage of its fair value.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardPurchasePriceOfCommonStockPercent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardOfferPeriod">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Duration of offer period under the plan, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days. Includes, but not limited to, weeks in a year or quarter.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardOfferPeriod</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
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<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
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<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PlanNameAxis=veco_EmployeeStockPurchasePlan2016Member">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PlanNameAxis=veco_EmployeeStockPurchasePlan2016Member</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>100
<FILENAME>R86.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
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</head>
<body>
<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674064086264">
<tr>
<th class="tl" colspan="1" rowspan="1"><div style="width: 200px;"><strong>Stock Plans - Shares Reserved for Future Issuance (Details)<br> shares in Millions</strong></div></th>
<th class="th">
<div>Dec. 31, 2021 </div>
<div>shares</div>
</th>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PlanNameAxis=veco_StockIncentivePlan2010Member', window );">2019 Plan</a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_SharesReservedForFutureIssuanceAbstract', window );"><strong>Shares reserved for future issuance</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CommonStockCapitalSharesReservedForFutureIssuance', window );">Total shares reserved</a></td>
<td class="nump">3.4<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PlanNameAxis=veco_EmployeeStockPurchasePlan2016Member', window );">ESPP</a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_SharesReservedForFutureIssuanceAbstract', window );"><strong>Shares reserved for future issuance</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CommonStockCapitalSharesReservedForFutureIssuance', window );">Total shares reserved</a></td>
<td class="nump">0.8<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CommonStockCapitalSharesReservedForFutureIssuance">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Aggregate number of common shares reserved for future issuance.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.29)<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CommonStockCapitalSharesReservedForFutureIssuance</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_SharesReservedForFutureIssuanceAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Shares Reserved For Future Issuance</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_SharesReservedForFutureIssuanceAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PlanNameAxis=veco_StockIncentivePlan2010Member">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PlanNameAxis=veco_StockIncentivePlan2010Member</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PlanNameAxis=veco_EmployeeStockPurchasePlan2016Member">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PlanNameAxis=veco_EmployeeStockPurchasePlan2016Member</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>101
<FILENAME>R87.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
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							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
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</head>
<body>
<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674059865384">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Stock Plans - Recognized Share-based Compensation (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="3">12 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2021</div></th>
<th class="th"><div>Dec. 31, 2020</div></th>
<th class="th"><div>Dec. 31, 2019</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EmployeeServiceShareBasedCompensationAggregateDisclosuresAbstract', window );"><strong>Recognized share-based compensation</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AllocatedShareBasedCompensationExpense', window );">Total share-based compensation expense</a></td>
<td class="nump">$ 15,249<span></span>
</td>
<td class="nump">$ 12,703<span></span>
</td>
<td class="nump">$ 15,270<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncomeStatementLocationAxis=us-gaap_CostOfSalesMember', window );">Cost of sales</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EmployeeServiceShareBasedCompensationAggregateDisclosuresAbstract', window );"><strong>Recognized share-based compensation</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AllocatedShareBasedCompensationExpense', window );">Total share-based compensation expense</a></td>
<td class="nump">2,373<span></span>
</td>
<td class="nump">1,870<span></span>
</td>
<td class="nump">1,903<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncomeStatementLocationAxis=us-gaap_ResearchAndDevelopmentExpenseMember', window );">Research and development</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EmployeeServiceShareBasedCompensationAggregateDisclosuresAbstract', window );"><strong>Recognized share-based compensation</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AllocatedShareBasedCompensationExpense', window );">Total share-based compensation expense</a></td>
<td class="nump">3,850<span></span>
</td>
<td class="nump">2,900<span></span>
</td>
<td class="nump">3,340<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncomeStatementLocationAxis=us-gaap_SellingGeneralAndAdministrativeExpensesMember', window );">Selling, general and administrative</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EmployeeServiceShareBasedCompensationAggregateDisclosuresAbstract', window );"><strong>Recognized share-based compensation</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AllocatedShareBasedCompensationExpense', window );">Total share-based compensation expense</a></td>
<td class="nump">$ 9,026<span></span>
</td>
<td class="nump">$ 7,933<span></span>
</td>
<td class="nump">9,630<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncomeStatementLocationAxis=us-gaap_RestructuringChargesMember', window );">Restructuring</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EmployeeServiceShareBasedCompensationAggregateDisclosuresAbstract', window );"><strong>Recognized share-based compensation</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AllocatedShareBasedCompensationExpense', window );">Total share-based compensation expense</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 397<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AllocatedShareBasedCompensationExpense">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of expense for award under share-based payment arrangement. Excludes amount capitalized.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=120381028&amp;loc=d3e5047-113901<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SAB Topic 14.F)<br> -URI http://asc.fasb.org/extlink&amp;oid=122041274&amp;loc=d3e301413-122809<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (h)(1)(i)<br> -URI http://asc.fasb.org/extlink&amp;oid=120381028&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AllocatedShareBasedCompensationExpense</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EmployeeServiceShareBasedCompensationAggregateDisclosuresAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EmployeeServiceShareBasedCompensationAggregateDisclosuresAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeStatementLocationAxis=us-gaap_CostOfSalesMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeStatementLocationAxis=us-gaap_CostOfSalesMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeStatementLocationAxis=us-gaap_ResearchAndDevelopmentExpenseMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeStatementLocationAxis=us-gaap_ResearchAndDevelopmentExpenseMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeStatementLocationAxis=us-gaap_SellingGeneralAndAdministrativeExpensesMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeStatementLocationAxis=us-gaap_SellingGeneralAndAdministrativeExpensesMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeStatementLocationAxis=us-gaap_RestructuringChargesMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeStatementLocationAxis=us-gaap_RestructuringChargesMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>102
<FILENAME>R88.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674059723304">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Stock Plans - Unrecognized Share-based Compensation Costs (Details)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th">
<div>Dec. 31, 2021 </div>
<div>USD ($)</div>
</th></tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedAbstract', window );"><strong>Unrecognized share-based compensation costs</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognized', window );">Unrecognized Share-Based Compensation Costs</a></td>
<td class="nump">$ 24,218<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1', window );">Weighted Average Period Expected to be Recognized</a></td>
<td class="text">1 year 10 months 24 days<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AwardTypeAxis=us-gaap_RestrictedStockUnitsRSUMember', window );">Restricted stock units</a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedAbstract', window );"><strong>Unrecognized share-based compensation costs</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognized', window );">Unrecognized Share-Based Compensation Costs</a></td>
<td class="nump">$ 2,064<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1', window );">Weighted Average Period Expected to be Recognized</a></td>
<td class="text">1 year 10 months 24 days<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AwardTypeAxis=veco_RestrictedStockAwardMember', window );">Restricted Stock Awards</a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedAbstract', window );"><strong>Unrecognized share-based compensation costs</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognized', window );">Unrecognized Share-Based Compensation Costs</a></td>
<td class="nump">$ 16,791<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1', window );">Weighted Average Period Expected to be Recognized</a></td>
<td class="text">1 year 10 months 24 days<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AwardTypeAxis=veco_PerformanceShareUnitsMember', window );">Performance Share Units</a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedAbstract', window );"><strong>Unrecognized share-based compensation costs</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognized', window );">Unrecognized Share-Based Compensation Costs</a></td>
<td class="nump">$ 5,363<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1', window );">Weighted Average Period Expected to be Recognized</a></td>
<td class="text">2 years 1 month 6 days<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognized">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of cost not yet recognized for nonvested award under share-based payment arrangement.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (i)<br> -URI http://asc.fasb.org/extlink&amp;oid=120381028&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognized</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Weighted-average period over which cost not yet recognized is expected to be recognized for award under share-based payment arrangement, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents reported fact of one year, five months, and thirteen days.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (i)<br> -URI http://asc.fasb.org/extlink&amp;oid=120381028&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
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<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
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<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AwardTypeAxis=us-gaap_RestrictedStockUnitsRSUMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AwardTypeAxis=us-gaap_RestrictedStockUnitsRSUMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AwardTypeAxis=veco_RestrictedStockAwardMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AwardTypeAxis=veco_RestrictedStockAwardMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
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<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
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<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AwardTypeAxis=veco_PerformanceShareUnitsMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AwardTypeAxis=veco_PerformanceShareUnitsMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
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<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
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<td><strong> Balance Type:</strong></td>
<td></td>
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<tr>
<td><strong> Period Type:</strong></td>
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<html>
<head>
<title></title>
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<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674059748040">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Stock Plans - Stock Option Activity (Details) - $ / shares<br> shares in Thousands</strong></div></th>
<th class="th" colspan="3">12 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2021</div></th>
<th class="th"><div>Dec. 31, 2020</div></th>
<th class="th"><div>Dec. 31, 2019</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward', window );"><strong>Number of Shares</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber', window );">Outstanding at the beginning of the period (in shares)</a></td>
<td class="nump">730<span></span>
</td>
<td class="nump">1,119<span></span>
</td>
<td class="nump">1,222<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised', window );">Exercised (in shares)</a></td>
<td class="num">(2)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresAndExpirationsInPeriod', window );">Expired (in shares)</a></td>
<td class="num">(285)<span></span>
</td>
<td class="num">(389)<span></span>
</td>
<td class="num">(103)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber', window );">Outstanding at the end of the period (in shares)</a></td>
<td class="nump">443<span></span>
</td>
<td class="nump">730<span></span>
</td>
<td class="nump">1,119<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAdditionalDisclosuresAbstract', window );"><strong>Weighted Average Exercise Price</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice', window );">Outstanding at the beginning of the period (in dollars per share)</a></td>
<td class="nump">$ 35.26<span></span>
</td>
<td class="nump">$ 34.88<span></span>
</td>
<td class="nump">$ 34.80<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice', window );">Exercised (in dollars per share)</a></td>
<td class="nump">23.36<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresAndExpirationsInPeriodWeightedAverageExercisePrice', window );">Expired or forfeited (in dollars per share)</a></td>
<td class="nump">40.16<span></span>
</td>
<td class="nump">34.15<span></span>
</td>
<td class="nump">33.97<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice', window );">Outstanding at the end of the period (in dollars per share)</a></td>
<td class="nump">$ 32.15<span></span>
</td>
<td class="nump">$ 35.26<span></span>
</td>
<td class="nump">$ 34.88<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAdditionalDisclosuresAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAdditionalDisclosuresAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
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<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresAndExpirationsInPeriod">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>For presentations that combine terminations, the number of shares under options that were cancelled during the reporting period as a result of occurrence of a terminating event specified in contractual agreements pertaining to the stock option plan or that expired.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(1)(iv)(3)-(4)<br> -URI http://asc.fasb.org/extlink&amp;oid=120381028&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresAndExpirationsInPeriod</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresAndExpirationsInPeriodWeightedAverageExercisePrice">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Weighted average price of options that were either forfeited or expired.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(1)(iv)(3)-(4)<br> -URI http://asc.fasb.org/extlink&amp;oid=120381028&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresAndExpirationsInPeriodWeightedAverageExercisePrice</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Number of options outstanding, including both vested and non-vested options.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -URI http://asc.fasb.org/extlink&amp;oid=120381028&amp;loc=d3e5070-113901<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(1)(i)-(ii)<br> -URI http://asc.fasb.org/extlink&amp;oid=120381028&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>A roll forward is a reconciliation of a concept from the beginning of a period to the end of a period.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Weighted average price at which grantees can acquire the shares reserved for issuance under the stock option plan.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(1)(i)<br> -URI http://asc.fasb.org/extlink&amp;oid=120381028&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Weighted average price at which option holders acquired shares when converting their stock options into shares.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Number of share options (or share units) exercised during the current period.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(1)(iv)(2)<br> -URI http://asc.fasb.org/extlink&amp;oid=120381028&amp;loc=d3e5070-113901<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.3-04)<br> -URI http://asc.fasb.org/extlink&amp;oid=120397183&amp;loc=d3e187085-122770<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(28))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(29))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 5: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -URI http://asc.fasb.org/extlink&amp;oid=123467817&amp;loc=d3e21463-112644<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
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<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674060552008">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Stock Plans - Option Exercise Ranges (Details)<br> shares in Thousands</strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th">
<div>Dec. 31, 2021 </div>
<div>$ / shares </div>
<div>shares</div>
</th></tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsAbstract', window );"><strong>Options Outstanding</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfOutstandingOptions', window );">Outstanding (in shares) | shares</a></td>
<td class="nump">443<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsWeightedAverageRemainingContractualTerm2', window );">Weighted Average Remaining Contractual Life</a></td>
<td class="text">1 year<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsWeightedAverageExercisePriceBeginningBalance1', window );">Weighted-Average Exercise Price (in dollars per share)</a></td>
<td class="nump">$ 32.15<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsAbstract', window );"><strong>Options Exercisable</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfExercisableOptions', window );">Outstanding (in shares) | shares</a></td>
<td class="nump">443<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsWeightedAverageRemainingContractualTerm2', window );">Weighted Average Remaining Contractual life</a></td>
<td class="text">1 year<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsWeightedAverageExercisePrice1', window );">Weighted Average Exercise Price (in dollars per share)</a></td>
<td class="nump">$ 32.15<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsNonvestedNumberOfShares', window );">Unvested options outstanding (in shares) | shares</a></td>
<td class="nump">0<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis=veco_RangeOfExercisePricesRangeOneMember', window );">$20.00 - $30.00</a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeLineItems', window );"><strong>Stock plans</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeLowerRangeLimit', window );">Exercise price, low end of range (in dollars per share)</a></td>
<td class="nump">$ 20.00<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeUpperRangeLimit', window );">Exercise price, high end of range (in dollars per share)</a></td>
<td class="nump">$ 30.00<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsAbstract', window );"><strong>Options Outstanding</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfOutstandingOptions', window );">Outstanding (in shares) | shares</a></td>
<td class="nump">12<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsWeightedAverageRemainingContractualTerm2', window );">Weighted Average Remaining Contractual Life</a></td>
<td class="text">1 year 7 months 6 days<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsWeightedAverageExercisePriceBeginningBalance1', window );">Weighted-Average Exercise Price (in dollars per share)</a></td>
<td class="nump">$ 29.26<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsAbstract', window );"><strong>Options Exercisable</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfExercisableOptions', window );">Outstanding (in shares) | shares</a></td>
<td class="nump">12<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsWeightedAverageRemainingContractualTerm2', window );">Weighted Average Remaining Contractual life</a></td>
<td class="text">1 year 7 months 6 days<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsWeightedAverageExercisePrice1', window );">Weighted Average Exercise Price (in dollars per share)</a></td>
<td class="nump">$ 29.26<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis=veco_RangeOfExercisePricesRangeTwoMember', window );">$30.01 - $40.00</a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeLineItems', window );"><strong>Stock plans</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeLowerRangeLimit', window );">Exercise price, low end of range (in dollars per share)</a></td>
<td class="nump">30.01<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeUpperRangeLimit', window );">Exercise price, high end of range (in dollars per share)</a></td>
<td class="nump">$ 40.00<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsAbstract', window );"><strong>Options Outstanding</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfOutstandingOptions', window );">Outstanding (in shares) | shares</a></td>
<td class="nump">431<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsWeightedAverageRemainingContractualTerm2', window );">Weighted Average Remaining Contractual Life</a></td>
<td class="text">10 months 24 days<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsWeightedAverageExercisePriceBeginningBalance1', window );">Weighted-Average Exercise Price (in dollars per share)</a></td>
<td class="nump">$ 32.22<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsAbstract', window );"><strong>Options Exercisable</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfExercisableOptions', window );">Outstanding (in shares) | shares</a></td>
<td class="nump">431<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsWeightedAverageRemainingContractualTerm2', window );">Weighted Average Remaining Contractual life</a></td>
<td class="text">10 months 24 days<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsWeightedAverageExercisePrice1', window );">Weighted Average Exercise Price (in dollars per share)</a></td>
<td class="nump">$ 32.22<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
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<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
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<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
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<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeLowerRangeLimit">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The floor of a customized range of exercise prices for purposes of disclosing shares potentially issuable under outstanding stock option awards on all stock option plans and other required information pertaining to awards in the customized range.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (g)<br> -URI http://asc.fasb.org/extlink&amp;oid=120381028&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeLowerRangeLimit</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
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<td><strong> Data Type:</strong></td>
<td>dtr-types:perShareItemType</td>
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<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfExercisableOptions">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The number of shares reserved for issuance pertaining to the outstanding exercisable stock options as of the balance sheet date in the customized range of exercise prices for which the market and performance vesting condition has been satisfied.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(iii)<br> -URI http://asc.fasb.org/extlink&amp;oid=120381028&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfExercisableOptions</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
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<td>xbrli:sharesItemType</td>
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<tr>
<td><strong> Balance Type:</strong></td>
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<td><strong> Period Type:</strong></td>
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</tr>
</table></div>
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</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfOutstandingOptions">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The number of shares reserved for issuance pertaining to the outstanding stock options as of the balance sheet date for all option plans in the customized range of exercise prices.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(1)(i)-(ii)<br> -URI http://asc.fasb.org/extlink&amp;oid=120381028&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfOutstandingOptions</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
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</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeUpperRangeLimit">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The ceiling of a customized range of exercise prices for purposes of disclosing shares potentially issuable under outstanding stock option awards on all stock option plans and other required information pertaining to awards in the customized range.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (g)<br> -URI http://asc.fasb.org/extlink&amp;oid=120381028&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeUpperRangeLimit</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
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<td><strong> Data Type:</strong></td>
<td>dtr-types:perShareItemType</td>
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<td><strong> Balance Type:</strong></td>
<td>na</td>
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<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsNonvestedNumberOfShares">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Number of non-vested options outstanding.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsNonvestedNumberOfShares</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
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<td><strong> Balance Type:</strong></td>
<td>na</td>
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<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsWeightedAverageExercisePrice1">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Weighted average exercise price as of the balance sheet date for those equity-based payment arrangements exercisable and outstanding.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(1)(iii)<br> -URI http://asc.fasb.org/extlink&amp;oid=120381028&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsWeightedAverageExercisePrice1</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
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<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:perShareItemType</td>
</tr>
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<td><strong> Balance Type:</strong></td>
<td>na</td>
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<td><strong> Period Type:</strong></td>
<td>instant</td>
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<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Weighted average remaining contractual term of exercisable stock options, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (e)(2)<br> -URI http://asc.fasb.org/extlink&amp;oid=120381028&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsWeightedAverageRemainingContractualTerm2</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
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</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
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<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsWeightedAverageExercisePriceBeginningBalance1">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The weighted average price as of the balance sheet date at which grantees could acquire the underlying shares with respect to all outstanding stock options which are in the customized range of exercise prices.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(1)(i)-(ii)<br> -URI http://asc.fasb.org/extlink&amp;oid=120381028&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsWeightedAverageExercisePriceBeginningBalance1</td>
</tr>
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<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
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<td><strong> Balance Type:</strong></td>
<td>na</td>
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<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
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<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Weighted average remaining contractual term of outstanding stock options, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (e)(1)<br> -URI http://asc.fasb.org/extlink&amp;oid=120381028&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsWeightedAverageRemainingContractualTerm2</td>
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<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsAbstract</td>
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<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsAbstract</td>
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<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis=veco_RangeOfExercisePricesRangeOneMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis=veco_RangeOfExercisePricesRangeTwoMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis=veco_RangeOfExercisePricesRangeTwoMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
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<DOCUMENT>
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<SEQUENCE>105
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<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
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<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674062385256">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Stock Plans - Stock options exercised (Details)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th">
<div>Dec. 31, 2021 </div>
<div>USD ($)</div>
</th></tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract', window );"><strong>Stock Plans</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ProceedsFromStockOptionsExercised', window );">Cash received from options exercised</a></td>
<td class="nump">$ 37<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisesInPeriodTotalIntrinsicValue', window );">Intrinsic value of options exercised</a></td>
<td class="nump">$ 6<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract">
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<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProceedsFromStockOptionsExercised">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of cash inflow from exercise of option under share-based payment arrangement.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2A<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=120381028&amp;loc=SL79508275-113901<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 14<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=123570139&amp;loc=d3e3255-108585<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ProceedsFromStockOptionsExercised</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisesInPeriodTotalIntrinsicValue">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of accumulated difference between fair value of underlying shares on dates of exercise and exercise price on options exercised (or share units converted) into shares.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (d)(2)<br> -URI http://asc.fasb.org/extlink&amp;oid=120381028&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisesInPeriodTotalIntrinsicValue</td>
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<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
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<td><strong> Data Type:</strong></td>
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<td><strong> Balance Type:</strong></td>
<td>debit</td>
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<td><strong> Period Type:</strong></td>
<td>duration</td>
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</table></div>
</div></td></tr>
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<DOCUMENT>
<TYPE>XML
<SEQUENCE>106
<FILENAME>R92.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
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</head>
<body>
<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674060593112">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Stock Plans - RSAs, RSUs, PSAs and PSUs (Details) - RSAs, RSUs, PSAs and PSUs - USD ($)<br> $ / shares in Units, shares in Thousands, $ in Millions</strong></div></th>
<th class="th" colspan="3">12 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2021</div></th>
<th class="th"><div>Dec. 31, 2020</div></th>
<th class="th"><div>Dec. 31, 2019</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward', window );"><strong>Number of Shares</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber', window );">Outstanding at the beginning of the period (in shares)</a></td>
<td class="nump">2,040<span></span>
</td>
<td class="nump">2,257<span></span>
</td>
<td class="nump">2,218<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod', window );">Granted (in shares)</a></td>
<td class="nump">1,031<span></span>
</td>
<td class="nump">1,054<span></span>
</td>
<td class="nump">1,107<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsPerformanceAwardAdjustmentsInPeriod', window );">Performance award adjustments (in shares)</a></td>
<td class="nump">159<span></span>
</td>
<td class="num">(51)<span></span>
</td>
<td class="num">(25)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod', window );">Vested (in shares)</a></td>
<td class="num">(1,014)<span></span>
</td>
<td class="num">(798)<span></span>
</td>
<td class="num">(768)<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeitedInPeriod', window );">Forfeited (in shares)</a></td>
<td class="num">(133)<span></span>
</td>
<td class="num">(422)<span></span>
</td>
<td class="num">(275)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber', window );">Outstanding at the end of the period (in shares)</a></td>
<td class="nump">2,083<span></span>
</td>
<td class="nump">2,040<span></span>
</td>
<td class="nump">2,257<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsAdditionalDisclosuresAbstract', window );"><strong>Weighted Average Grant Date Fair Value</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue', window );">Outstanding at the beginning of the period (in dollars per share)</a></td>
<td class="nump">$ 12.73<span></span>
</td>
<td class="nump">$ 16.20<span></span>
</td>
<td class="nump">$ 20.74<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue', window );">Granted (in dollars per share)</a></td>
<td class="nump">24.26<span></span>
</td>
<td class="nump">9.53<span></span>
</td>
<td class="nump">11.53<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsPerformanceAwardAdjustmentsWeightedAverageGrantDateFairValue', window );">Performance award adjustments (in dollars per share)</a></td>
<td class="nump">18.38<span></span>
</td>
<td class="nump">30.94<span></span>
</td>
<td class="nump">28.91<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue', window );">Vested (in dollars per share)</a></td>
<td class="nump">15.50<span></span>
</td>
<td class="nump">16.01<span></span>
</td>
<td class="nump">21.77<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeituresWeightedAverageGrantDateFairValue', window );">Forfeited (in dollars per share)</a></td>
<td class="nump">15.08<span></span>
</td>
<td class="nump">14.87<span></span>
</td>
<td class="nump">18.48<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue', window );">Outstanding at the end of the period (in dollars per share)</a></td>
<td class="nump">$ 17.33<span></span>
</td>
<td class="nump">$ 12.73<span></span>
</td>
<td class="nump">$ 16.20<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodTotalFairValue', window );">Total fair value of shares vested</a></td>
<td class="nump">$ 22.8<span></span>
</td>
<td class="nump">$ 9.0<span></span>
</td>
<td class="nump">$ 8.8<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AwardTypeAxis=veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember', window );">Minimum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsAdditionalDisclosuresAbstract', window );"><strong>Weighted Average Grant Date Fair Value</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1', window );">Vesting period</a></td>
<td class="text">1 year<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AwardTypeAxis=veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember', window );">Maximum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsAdditionalDisclosuresAbstract', window );"><strong>Weighted Average Grant Date Fair Value</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1', window );">Vesting period</a></td>
<td class="text">4 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Period over which grantee's right to exercise award under share-based payment arrangement is no longer contingent on satisfaction of service or performance condition, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents reported fact of one year, five months, and thirteen days. Includes, but is not limited to, combination of market, performance or service condition.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (a)(1)<br> -URI http://asc.fasb.org/extlink&amp;oid=120381028&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsAdditionalDisclosuresAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsAdditionalDisclosuresAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeitedInPeriod">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The number of equity-based payment instruments, excluding stock (or unit) options, that were forfeited during the reporting period.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(1)(iv)(3)<br> -URI http://asc.fasb.org/extlink&amp;oid=120381028&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeitedInPeriod</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeituresWeightedAverageGrantDateFairValue">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Weighted average fair value as of the grant date of equity-based award plans other than stock (unit) option plans that were not exercised or put into effect as a result of the occurrence of a terminating event.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(2)(iii)(3)<br> -URI http://asc.fasb.org/extlink&amp;oid=120381028&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeituresWeightedAverageGrantDateFairValue</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The number of grants made during the period on other than stock (or unit) option plans (for example, phantom stock or unit plan, stock or unit appreciation rights plan, performance target plan).</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(2)(iii)(1)<br> -URI http://asc.fasb.org/extlink&amp;oid=120381028&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The weighted average fair value at grant date for nonvested equity-based awards issued during the period on other than stock (or unit) option plans (for example, phantom stock or unit plan, stock or unit appreciation rights plan, performance target plan).</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(2)(iii)(1)<br> -URI http://asc.fasb.org/extlink&amp;oid=120381028&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The number of non-vested equity-based payment instruments, excluding stock (or unit) options, that validly exist and are outstanding as of the balance sheet date.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(2)(i)-(ii)<br> -URI http://asc.fasb.org/extlink&amp;oid=120381028&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>A roll forward is a reconciliation of a concept from the beginning of a period to the end of a period.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Per share or unit weighted-average fair value of nonvested award under share-based payment arrangement. Excludes share and unit options.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(2)(i)-(ii)<br> -URI http://asc.fasb.org/extlink&amp;oid=120381028&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The number of equity-based payment instruments, excluding stock (or unit) options, that vested during the reporting period.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(2)(iii)(2)<br> -URI http://asc.fasb.org/extlink&amp;oid=120381028&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodTotalFairValue">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Fair value of share-based awards for which the grantee gained the right by satisfying service and performance requirements, to receive or retain shares or units, other instruments, or cash.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (d)(2)<br> -URI http://asc.fasb.org/extlink&amp;oid=120381028&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodTotalFairValue</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The weighted average fair value as of grant date pertaining to an equity-based award plan other than a stock (or unit) option plan for which the grantee gained the right during the reporting period, by satisfying service and performance requirements, to receive or retain shares or units, other instruments, or cash in accordance with the terms of the arrangement.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(2)(iii)(2)<br> -URI http://asc.fasb.org/extlink&amp;oid=120381028&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsPerformanceAwardAdjustmentsInPeriod">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The number of performance award adjustments made during the period on other than stock (or unit) option plans resulting in decrease in awards outstanding.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsPerformanceAwardAdjustmentsInPeriod</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsPerformanceAwardAdjustmentsWeightedAverageGrantDateFairValue">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The weighted average fair value of performance award adjustments during the period for nonvested equity-based awards other than stock (or unit) option plans.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsPerformanceAwardAdjustmentsWeightedAverageGrantDateFairValue</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
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<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AwardTypeAxis=veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AwardTypeAxis=veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
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<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
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<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_RangeAxis=srt_MinimumMember</td>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
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<DOCUMENT>
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<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
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<body>
<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674068676248">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Stock Plans - Performance Awards Assumptions (Details) - Performance awards with market conditions - $ / shares<br></strong></div></th>
<th class="th" colspan="3">12 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2021</div></th>
<th class="th"><div>Dec. 31, 2020</div></th>
<th class="th"><div>Dec. 31, 2019</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract', window );"><strong>Assumptions</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue', window );">Weighted average fair value (in dollars per share)</a></td>
<td class="nump">$ 27.81<span></span>
</td>
<td class="nump">$ 10.59<span></span>
</td>
<td class="nump">$ 16.45<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate', window );">Dividend yield (as a percent)</a></td>
<td class="nump">0.00%<span></span>
</td>
<td class="nump">0.00%<span></span>
</td>
<td class="nump">0.00%<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsWeightedAverageVolatilityRate', window );">Expected volatility factor (as a percent)</a></td>
<td class="nump">63.00%<span></span>
</td>
<td class="nump">60.00%<span></span>
</td>
<td class="nump">53.00%<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate', window );">Risk-free interest rate (as a percent)</a></td>
<td class="nump">0.34%<span></span>
</td>
<td class="nump">0.54%<span></span>
</td>
<td class="nump">2.37%<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1', window );">Expected life (in years)</a></td>
<td class="text">3 years<span></span>
</td>
<td class="text">3 years<span></span>
</td>
<td class="text">2 years 9 months 18 days<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The weighted average fair value at grant date for nonvested equity-based awards issued during the period on other than stock (or unit) option plans (for example, phantom stock or unit plan, stock or unit appreciation rights plan, performance target plan).</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(2)(iii)(1)<br> -URI http://asc.fasb.org/extlink&amp;oid=120381028&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
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<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract</td>
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<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
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<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
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<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
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<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The estimated dividend rate (a percentage of the share price) to be paid (expected dividends) to holders of the underlying shares over the option's term.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (f)(2)(iii)<br> -URI http://asc.fasb.org/extlink&amp;oid=120381028&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
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<td><strong> Data Type:</strong></td>
<td>dtr-types:percentItemType</td>
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<td><strong> Balance Type:</strong></td>
<td>na</td>
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<td><strong> Period Type:</strong></td>
<td>duration</td>
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<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The risk-free interest rate assumption that is used in valuing an option on its own shares.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (f)(2)(iv)<br> -URI http://asc.fasb.org/extlink&amp;oid=120381028&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
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<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:percentItemType</td>
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<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsWeightedAverageVolatilityRate">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Rate of weighted-average expected volatility for award under share-based payment arrangement.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (f)(2)(ii)<br> -URI http://asc.fasb.org/extlink&amp;oid=120381028&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsWeightedAverageVolatilityRate</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Expected term of award under share-based payment arrangement, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents reported fact of one year, five months, and thirteen days.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (f)(2)(i)<br> -URI http://asc.fasb.org/extlink&amp;oid=120381028&amp;loc=d3e5070-113901<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SAB Topic 14.D.2)<br> -URI http://asc.fasb.org/extlink&amp;oid=122041274&amp;loc=d3e301413-122809<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
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<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
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<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AwardTypeAxis=veco_PerformanceShareUnitsMarketConditionsMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AwardTypeAxis=veco_PerformanceShareUnitsMarketConditionsMember</td>
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<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
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<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
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</table></div>
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</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>108
<FILENAME>R94.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
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<body>
<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674059860728">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Stock Plans - ESPP FV Assumptions (Details) - ESPP - USD ($)<br> $ / shares in Units, $ in Millions</strong></div></th>
<th class="th" colspan="3">12 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2021</div></th>
<th class="th"><div>Dec. 31, 2020</div></th>
<th class="th"><div>Dec. 31, 2019</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems', window );"><strong>Share-based compensation</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ProceedsFromIssuanceOfSharesUnderIncentiveAndShareBasedCompensationPlans', window );">Cash proceeds</a></td>
<td class="nump">$ 3.4<span></span>
</td>
<td class="nump">$ 2.9<span></span>
</td>
<td class="nump">$ 3.1<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans', window );">Number of shares issued</a></td>
<td class="nump">196,024<span></span>
</td>
<td class="nump">254,703<span></span>
</td>
<td class="nump">395,941<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract', window );"><strong>Assumptions</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue', window );">Weighted average fair value (in dollars per share)</a></td>
<td class="nump">$ 5.90<span></span>
</td>
<td class="nump">$ 4.81<span></span>
</td>
<td class="nump">$ 2.96<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate', window );">Dividend yield (as a percent)</a></td>
<td class="nump">0.00%<span></span>
</td>
<td class="nump">0.00%<span></span>
</td>
<td class="nump">0.00%<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsWeightedAverageVolatilityRate', window );">Expected volatility factor (as a percent)</a></td>
<td class="nump">52.00%<span></span>
</td>
<td class="nump">70.00%<span></span>
</td>
<td class="nump">60.00%<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate', window );">Risk-free interest rate (as a percent)</a></td>
<td class="nump">0.07%<span></span>
</td>
<td class="nump">0.95%<span></span>
</td>
<td class="nump">2.41%<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1', window );">Expected life (in years)</a></td>
<td class="text">6 months<span></span>
</td>
<td class="text">6 months<span></span>
</td>
<td class="text">6 months<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProceedsFromIssuanceOfSharesUnderIncentiveAndShareBasedCompensationPlans">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of cash inflow from issuance of shares under share-based payment arrangement. Excludes option exercised.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 14<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=123570139&amp;loc=d3e3255-108585<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2A<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=120381028&amp;loc=SL79508275-113901<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ProceedsFromIssuanceOfSharesUnderIncentiveAndShareBasedCompensationPlans</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The weighted average fair value at grant date for nonvested equity-based awards issued during the period on other than stock (or unit) option plans (for example, phantom stock or unit plan, stock or unit appreciation rights plan, performance target plan).</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(2)(iii)(1)<br> -URI http://asc.fasb.org/extlink&amp;oid=120381028&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The estimated dividend rate (a percentage of the share price) to be paid (expected dividends) to holders of the underlying shares over the option's term.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (f)(2)(iii)<br> -URI http://asc.fasb.org/extlink&amp;oid=120381028&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The risk-free interest rate assumption that is used in valuing an option on its own shares.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (f)(2)(iv)<br> -URI http://asc.fasb.org/extlink&amp;oid=120381028&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsWeightedAverageVolatilityRate">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Rate of weighted-average expected volatility for award under share-based payment arrangement.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (f)(2)(ii)<br> -URI http://asc.fasb.org/extlink&amp;oid=120381028&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsWeightedAverageVolatilityRate</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Expected term of award under share-based payment arrangement, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents reported fact of one year, five months, and thirteen days.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (f)(2)(i)<br> -URI http://asc.fasb.org/extlink&amp;oid=120381028&amp;loc=d3e5070-113901<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SAB Topic 14.D.2)<br> -URI http://asc.fasb.org/extlink&amp;oid=122041274&amp;loc=d3e301413-122809<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Number of shares issued during the period as a result of an employee stock purchase plan.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -URI http://asc.fasb.org/extlink&amp;oid=123467817&amp;loc=d3e21463-112644<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.3-04)<br> -URI http://asc.fasb.org/extlink&amp;oid=120397183&amp;loc=d3e187085-122770<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(28))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(29))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PlanNameAxis=veco_EmployeeStockPurchasePlan2016Member">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PlanNameAxis=veco_EmployeeStockPurchasePlan2016Member</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
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<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674063879832">
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<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Retirement Plans - Defined Contribution Plan (Details) - USD ($)<br> $ in Millions</strong></div></th>
<th class="th" colspan="3">12 Months Ended</th>
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<tr>
<th class="th"><div>Dec. 31, 2021</div></th>
<th class="th"><div>Dec. 31, 2020</div></th>
<th class="th"><div>Dec. 31, 2019</div></th>
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<td class="text">&#160;<span></span>
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<td class="text">&#160;<span></span>
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<td class="text">&#160;<span></span>
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</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DefinedContributionPlanEmployerMatchingContributionPercentOfMatch', window );">Employer's matching contribution for every dollar the employees contribute (as a percent)</a></td>
<td class="nump">50.00%<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_DefinedContributionPlanEmployerMatchingContributionVestingPeriod', window );">Employer's matching contribution, vesting period (in years)</a></td>
<td class="text">5 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DefinedContributionPlanCostRecognized', window );">Aggregate employer's contribution to pension plans</a></td>
<td class="nump">$ 2.6<span></span>
</td>
<td class="nump">$ 2.4<span></span>
</td>
<td class="nump">$ 2.4<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_srt_RangeAxis=srt_MaximumMember', window );">Maximum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DefinedContributionPlanDisclosureLineItems', window );"><strong>Defined contribution plan disclosures</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DefinedContributionPlanEmployerMatchingContributionPercent', window );">Employer's contribution as a percentage of employee's eligible compensation</a></td>
<td class="nump">3.00%<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DefinedContributionPlanCostRecognized">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of cost for defined contribution plan.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 715<br> -SubTopic 70<br> -Section 50<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=49170846&amp;loc=d3e28014-114942<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DefinedContributionPlanCostRecognized</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DefinedContributionPlanDisclosureLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DefinedContributionPlanDisclosureLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DefinedContributionPlanEmployerMatchingContributionPercent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Percentage of employees' gross pay for which the employer contributes a matching contribution to a defined contribution plan.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DefinedContributionPlanEmployerMatchingContributionPercent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DefinedContributionPlanEmployerMatchingContributionPercentOfMatch">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Percentage employer matches of the employee's percentage contribution matched.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DefinedContributionPlanEmployerMatchingContributionPercentOfMatch</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_DefinedContributionPlanEmployerMatchingContributionVestingPeriod">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Represents the vesting period for employer's matching contribution.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_DefinedContributionPlanEmployerMatchingContributionVestingPeriod</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_RangeAxis=srt_MaximumMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_RangeAxis=srt_MaximumMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>110
<FILENAME>R96.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
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<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674064758488">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Dispositions (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="1">3 Months Ended</th>
<th class="th" colspan="2">12 Months Ended</th>
<th class="th" colspan="1">24 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Jun. 30, 2020</div></th>
<th class="th"><div>Dec. 31, 2020</div></th>
<th class="th"><div>Dec. 31, 2019</div></th>
<th class="th"><div>Dec. 31, 2020</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsLineItems', window );"><strong>Dispositions</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AssetImpairmentCharges', window );">Asset impairment</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 281<span></span>
</td>
<td class="nump">$ 4,020<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsAxis=veco_OneNonCoreProductLineMember', window );">One non-core product line | Assets sold</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsLineItems', window );"><strong>Dispositions</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DisposalGroupIncludingDiscontinuedOperationConsideration', window );">Consideration</a></td>
<td class="nump">$ 11,400<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_PercentageOfTransactionPrice', window );">Transaction price due upon closing (as a percent)</a></td>
<td class="nump">85.00%<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_PercentageOfAmountHeldInEscrow', window );">Amount held in escrow (as a percent)</a></td>
<td class="nump">15.00%<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_TermOfAmountToBeHeldInEscrow', window );">Period over which portion of transaction price is held in escrow</a></td>
<td class="text">18 months<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AssetImpairmentCharges', window );">Asset impairment</a></td>
<td class="nump">$ 300<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AssetsOfDisposalGroupIncludingDiscontinuedOperationAbstract', window );"><strong>Major classes of assets sold</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DisposalGroupIncludingDiscontinuedOperationInventory1', window );">Inventories</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">6,311<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 6,311<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DisposalGroupIncludingDiscontinuedOperationPropertyPlantAndEquipment', window );">Property, plant, and equipment, net</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">372<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">372<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DisposalGroupIncludingDiscontinuedOperationIntangibleAssets', window );">Intangible assets, net</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">6,546<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">6,546<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DisposalGroupIncludingDiscontinuedOperationGoodwill1', window );">Goodwill</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">2,359<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">2,359<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DisposalGroupIncludingDiscontinuedOperationDeferredRevenue', window );">Deferred revenue</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(59)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(59)<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AssetsOfDisposalGroupIncludingDiscontinuedOperation', window );">Total net assets sold</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">15,529<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">15,529<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_DisposalGroupIncludingDiscontinuedOperationConsiderationNet', window );">Net proceeds after costs to sell</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="num">$ (11,228)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(11,228)<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DisposalGroupNotDiscontinuedOperationLossGainOnWriteDown', window );">Total impairment on sale of disposal group</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 4,301<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsAxis=veco_OneNonCoreProductLineMember', window );">One non-core product line | Asset held for sale</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsLineItems', window );"><strong>Dispositions</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AssetImpairmentCharges', window );">Asset impairment</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 4,000<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AssetImpairmentCharges">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of write-down of assets recognized in the income statement. Includes, but is not limited to, losses from tangible assets, intangible assets and goodwill.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 28<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=123570139&amp;loc=d3e3602-108585<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 360<br> -SubTopic 10<br> -Section 45<br> -Paragraph 4<br> -URI http://asc.fasb.org/extlink&amp;oid=123351718&amp;loc=d3e2420-110228<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AssetImpairmentCharges</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AssetsOfDisposalGroupIncludingDiscontinuedOperation">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount classified as assets attributable to disposal group held for sale or disposed of.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 205<br> -SubTopic 20<br> -Section 45<br> -Paragraph 10<br> -URI http://asc.fasb.org/extlink&amp;oid=109222160&amp;loc=d3e1107-107759<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 360<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (e)<br> -URI http://asc.fasb.org/extlink&amp;oid=109226691&amp;loc=d3e2941-110230<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 205<br> -SubTopic 20<br> -Section 50<br> -Paragraph 5B<br> -Subparagraph (e)<br> -URI http://asc.fasb.org/extlink&amp;oid=109222650&amp;loc=SL51721673-107760<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 205<br> -SubTopic 20<br> -Section 45<br> -Paragraph 11<br> -URI http://asc.fasb.org/extlink&amp;oid=109222160&amp;loc=SL51721533-107759<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 205<br> -SubTopic 20<br> -Section 50<br> -Paragraph 7<br> -URI http://asc.fasb.org/extlink&amp;oid=109222650&amp;loc=SL51721683-107760<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 205<br> -SubTopic 20<br> -Section 50<br> -Paragraph 5C<br> -Subparagraph (a)(2)<br> -URI http://asc.fasb.org/extlink&amp;oid=109222650&amp;loc=SL51721675-107760<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AssetsOfDisposalGroupIncludingDiscontinuedOperation</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AssetsOfDisposalGroupIncludingDiscontinuedOperationAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AssetsOfDisposalGroupIncludingDiscontinuedOperationAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DisposalGroupIncludingDiscontinuedOperationConsideration">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of consideration received or receivable for the disposal of assets and liabilities, including discontinued operation.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DisposalGroupIncludingDiscontinuedOperationConsideration</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DisposalGroupIncludingDiscontinuedOperationDeferredRevenue">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount classified as deferred revenue attributable to disposal group held for sale or disposed of.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 205<br> -SubTopic 20<br> -Section 45<br> -Paragraph 11<br> -URI http://asc.fasb.org/extlink&amp;oid=109222160&amp;loc=SL51721533-107759<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 205<br> -SubTopic 20<br> -Section 45<br> -Paragraph 10<br> -URI http://asc.fasb.org/extlink&amp;oid=109222160&amp;loc=d3e1107-107759<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 205<br> -SubTopic 20<br> -Section 50<br> -Paragraph 5B<br> -Subparagraph (e)<br> -URI http://asc.fasb.org/extlink&amp;oid=109222650&amp;loc=SL51721673-107760<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 360<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (e)<br> -URI http://asc.fasb.org/extlink&amp;oid=109226691&amp;loc=d3e2941-110230<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DisposalGroupIncludingDiscontinuedOperationDeferredRevenue</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DisposalGroupIncludingDiscontinuedOperationGoodwill1">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount classified as goodwill attributable to disposal group held for sale or disposed of.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 205<br> -SubTopic 20<br> -Section 45<br> -Paragraph 11<br> -URI http://asc.fasb.org/extlink&amp;oid=109222160&amp;loc=SL51721533-107759<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 360<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (e)<br> -URI http://asc.fasb.org/extlink&amp;oid=109226691&amp;loc=d3e2941-110230<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 205<br> -SubTopic 20<br> -Section 45<br> -Paragraph 10<br> -URI http://asc.fasb.org/extlink&amp;oid=109222160&amp;loc=d3e1107-107759<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 205<br> -SubTopic 20<br> -Section 50<br> -Paragraph 5B<br> -Subparagraph (e)<br> -URI http://asc.fasb.org/extlink&amp;oid=109222650&amp;loc=SL51721673-107760<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DisposalGroupIncludingDiscontinuedOperationGoodwill1</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DisposalGroupIncludingDiscontinuedOperationIntangibleAssets">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount classified as intangible assets, excluding goodwill, attributable to disposal group held for sale or disposed of.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 205<br> -SubTopic 20<br> -Section 45<br> -Paragraph 11<br> -URI http://asc.fasb.org/extlink&amp;oid=109222160&amp;loc=SL51721533-107759<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 205<br> -SubTopic 20<br> -Section 50<br> -Paragraph 5B<br> -Subparagraph (e)<br> -URI http://asc.fasb.org/extlink&amp;oid=109222650&amp;loc=SL51721673-107760<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 205<br> -SubTopic 20<br> -Section 45<br> -Paragraph 10<br> -URI http://asc.fasb.org/extlink&amp;oid=109222160&amp;loc=d3e1107-107759<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 360<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (e)<br> -URI http://asc.fasb.org/extlink&amp;oid=109226691&amp;loc=d3e2941-110230<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DisposalGroupIncludingDiscontinuedOperationIntangibleAssets</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DisposalGroupIncludingDiscontinuedOperationInventory1">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount classified as inventory attributable to disposal group held for sale or disposed of.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 205<br> -SubTopic 20<br> -Section 45<br> -Paragraph 10<br> -URI http://asc.fasb.org/extlink&amp;oid=109222160&amp;loc=d3e1107-107759<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 360<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (e)<br> -URI http://asc.fasb.org/extlink&amp;oid=109226691&amp;loc=d3e2941-110230<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 205<br> -SubTopic 20<br> -Section 50<br> -Paragraph 5B<br> -Subparagraph (e)<br> -URI http://asc.fasb.org/extlink&amp;oid=109222650&amp;loc=SL51721673-107760<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 205<br> -SubTopic 20<br> -Section 45<br> -Paragraph 11<br> -URI http://asc.fasb.org/extlink&amp;oid=109222160&amp;loc=SL51721533-107759<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DisposalGroupIncludingDiscontinuedOperationInventory1</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DisposalGroupIncludingDiscontinuedOperationPropertyPlantAndEquipment">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount classified as property, plant and equipment attributable to disposal group held for sale or disposed of.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 360<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (e)<br> -URI http://asc.fasb.org/extlink&amp;oid=109226691&amp;loc=d3e2941-110230<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 205<br> -SubTopic 20<br> -Section 45<br> -Paragraph 10<br> -URI http://asc.fasb.org/extlink&amp;oid=109222160&amp;loc=d3e1107-107759<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 205<br> -SubTopic 20<br> -Section 45<br> -Paragraph 11<br> -URI http://asc.fasb.org/extlink&amp;oid=109222160&amp;loc=SL51721533-107759<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 205<br> -SubTopic 20<br> -Section 50<br> -Paragraph 5B<br> -Subparagraph (e)<br> -URI http://asc.fasb.org/extlink&amp;oid=109222650&amp;loc=SL51721673-107760<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DisposalGroupIncludingDiscontinuedOperationPropertyPlantAndEquipment</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DisposalGroupNotDiscontinuedOperationLossGainOnWriteDown">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount, before tax, of (gain) loss recognized for the (reversal of write-down) write-down to fair value, less cost to sell, of a disposal group. Excludes discontinued operations.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 360<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (c)<br> -URI http://asc.fasb.org/extlink&amp;oid=109226691&amp;loc=d3e2941-110230<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 28<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=123570139&amp;loc=d3e3602-108585<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 360<br> -SubTopic 10<br> -Section 45<br> -Paragraph 5<br> -URI http://asc.fasb.org/extlink&amp;oid=123351718&amp;loc=d3e2443-110228<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DisposalGroupNotDiscontinuedOperationLossGainOnWriteDown</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_DisposalGroupIncludingDiscontinuedOperationConsiderationNet">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of consideration, net of costs to sell, received or receivable for the disposal of assets and liabilities, including discontinued operation.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_DisposalGroupIncludingDiscontinuedOperationConsiderationNet</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_PercentageOfAmountHeldInEscrow">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Percentage of amount held in escrow.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_PercentageOfAmountHeldInEscrow</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_PercentageOfTransactionPrice">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Percentage of transaction price due upon closing.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_PercentageOfTransactionPrice</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
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<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_TermOfAmountToBeHeldInEscrow">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Period over which portion of transaction price is held in escrow.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_TermOfAmountToBeHeldInEscrow</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
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<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
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<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsAxis=veco_OneNonCoreProductLineMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsAxis=veco_OneNonCoreProductLineMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DisposalGroupClassificationAxis=us-gaap_DisposalGroupDisposedOfBySaleNotDiscontinuedOperationsMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DisposalGroupClassificationAxis=us-gaap_DisposalGroupDisposedOfBySaleNotDiscontinuedOperationsMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DisposalGroupClassificationAxis=us-gaap_DisposalGroupHeldforsaleNotDiscontinuedOperationsMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DisposalGroupClassificationAxis=us-gaap_DisposalGroupHeldforsaleNotDiscontinuedOperationsMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
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<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674064705560">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Income Taxes - Income Attributable to Domestic and Foreign Operations (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="3">12 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2021</div></th>
<th class="th"><div>Dec. 31, 2020</div></th>
<th class="th"><div>Dec. 31, 2019</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestmentsAbstract', window );"><strong>Income (loss) from continuing operations before income taxes</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic', window );">Domestic</a></td>
<td class="nump">$ 23,561<span></span>
</td>
<td class="num">$ (10,292)<span></span>
</td>
<td class="num">$ (78,486)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesForeign', window );">Foreign</a></td>
<td class="nump">2,119<span></span>
</td>
<td class="nump">1,828<span></span>
</td>
<td class="nump">530<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest', window );">Income (loss) before income taxes</a></td>
<td class="nump">$ 25,680<span></span>
</td>
<td class="num">$ (8,464)<span></span>
</td>
<td class="num">$ (77,956)<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The portion of earnings or loss from continuing operations before income taxes that is attributable to domestic operations.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(h)(1))<br> -URI http://asc.fasb.org/extlink&amp;oid=120395691&amp;loc=d3e23780-122690<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SAB Topic 6.I.Fact.3)<br> -URI http://asc.fasb.org/extlink&amp;oid=122134291&amp;loc=d3e330036-122817<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
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<td><strong> Data Type:</strong></td>
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<td><strong> Balance Type:</strong></td>
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<td><strong> Period Type:</strong></td>
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<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of income (loss) from continuing operations, including income (loss) from equity method investments, before deduction of income tax expense (benefit), and income (loss) attributable to noncontrolling interest.</p></div>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
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</div></td></tr>
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<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesForeign">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The portion of earnings or loss from continuing operations before income taxes that is attributable to foreign operations, which is defined as Income or Loss generated from operations located outside the entity's country of domicile.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(h)(1))<br> -URI http://asc.fasb.org/extlink&amp;oid=120395691&amp;loc=d3e23780-122690<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SAB Topic 6.I.Fact.3)<br> -URI http://asc.fasb.org/extlink&amp;oid=122134291&amp;loc=d3e330036-122817<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
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<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestmentsAbstract">
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestmentsAbstract</td>
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<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674056285560">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Income Taxes - Components of Expense (Benefit) (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="3">12 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2021</div></th>
<th class="th"><div>Dec. 31, 2020</div></th>
<th class="th"><div>Dec. 31, 2019</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CurrentIncomeTaxExpenseBenefitContinuingOperationsAbstract', window );"><strong>Current:</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CurrentForeignTaxExpenseBenefit', window );">Foreign</a></td>
<td class="nump">$ 183<span></span>
</td>
<td class="nump">$ 22<span></span>
</td>
<td class="nump">$ 304<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CurrentStateAndLocalTaxExpenseBenefit', window );">State and local</a></td>
<td class="nump">110<span></span>
</td>
<td class="nump">204<span></span>
</td>
<td class="nump">113<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CurrentIncomeTaxExpenseBenefit', window );">Total current expense (benefit) for income taxes</a></td>
<td class="nump">293<span></span>
</td>
<td class="nump">226<span></span>
</td>
<td class="nump">417<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DeferredIncomeTaxExpenseBenefitContinuingOperationsAbstract', window );"><strong>Deferred:</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DeferredFederalIncomeTaxExpenseBenefit', window );">Federal</a></td>
<td class="nump">119<span></span>
</td>
<td class="nump">136<span></span>
</td>
<td class="nump">162<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DeferredForeignIncomeTaxExpenseBenefit', window );">Foreign</a></td>
<td class="num">(507)<span></span>
</td>
<td class="num">(320)<span></span>
</td>
<td class="nump">116<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DeferredStateAndLocalIncomeTaxExpenseBenefit', window );">State and local</a></td>
<td class="num">(263)<span></span>
</td>
<td class="num">(115)<span></span>
</td>
<td class="nump">82<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DeferredIncomeTaxExpenseBenefit', window );">Total deferred expense (benefit) for income taxes</a></td>
<td class="num">(651)<span></span>
</td>
<td class="num">(299)<span></span>
</td>
<td class="nump">360<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncomeTaxExpenseBenefit', window );">Total expense (benefit) for income taxes</a></td>
<td class="num">$ (358)<span></span>
</td>
<td class="num">$ (73)<span></span>
</td>
<td class="nump">$ 777<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CurrentForeignTaxExpenseBenefit">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of current foreign income tax expense (benefit) pertaining to income (loss) from continuing operations.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(h)(1)(Note 1))<br> -URI http://asc.fasb.org/extlink&amp;oid=120395691&amp;loc=d3e23780-122690<br><br>Reference 2: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 9<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32639-109319<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CurrentForeignTaxExpenseBenefit</td>
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<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
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<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
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<td><strong> Balance Type:</strong></td>
<td>debit</td>
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<td><strong> Period Type:</strong></td>
<td>duration</td>
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</table></div>
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<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CurrentIncomeTaxExpenseBenefit">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of current income tax expense (benefit) pertaining to taxable income (loss) from continuing operations.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SAB Topic 6.I.7)<br> -URI http://asc.fasb.org/extlink&amp;oid=122134291&amp;loc=d3e330036-122817<br><br>Reference 2: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(h)(1)(Note 1))<br> -URI http://asc.fasb.org/extlink&amp;oid=120395691&amp;loc=d3e23780-122690<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 9<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32639-109319<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SAB Topic 6.I.Fact.2)<br> -URI http://asc.fasb.org/extlink&amp;oid=122134291&amp;loc=d3e330036-122817<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CurrentIncomeTaxExpenseBenefit</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
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<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
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<td><strong> Balance Type:</strong></td>
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<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
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<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CurrentIncomeTaxExpenseBenefitContinuingOperationsAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CurrentIncomeTaxExpenseBenefitContinuingOperationsAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
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<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
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<td><strong> Balance Type:</strong></td>
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<td><strong> Period Type:</strong></td>
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<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CurrentStateAndLocalTaxExpenseBenefit">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of current state and local tax expense (benefit) pertaining to income (loss) from continuing operations.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SAB Topic 6.I.7)<br> -URI http://asc.fasb.org/extlink&amp;oid=122134291&amp;loc=d3e330036-122817<br><br>Reference 2: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(h)(1)(Note 1))<br> -URI http://asc.fasb.org/extlink&amp;oid=120395691&amp;loc=d3e23780-122690<br><br>Reference 3: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 9<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32639-109319<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CurrentStateAndLocalTaxExpenseBenefit</td>
</tr>
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<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
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<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredFederalIncomeTaxExpenseBenefit">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of deferred federal income tax expense (benefit) pertaining to income (loss) from continuing operations.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(h)(1)(Note 1))<br> -URI http://asc.fasb.org/extlink&amp;oid=120395691&amp;loc=d3e23780-122690<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SAB Topic 6.I.7)<br> -URI http://asc.fasb.org/extlink&amp;oid=122134291&amp;loc=d3e330036-122817<br><br>Reference 3: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 9<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32639-109319<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DeferredFederalIncomeTaxExpenseBenefit</td>
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<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
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<td><strong> Balance Type:</strong></td>
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<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredForeignIncomeTaxExpenseBenefit">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of deferred foreign income tax expense (benefit) pertaining to income (loss) from continuing operations.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SAB Topic 6.I.7)<br> -URI http://asc.fasb.org/extlink&amp;oid=122134291&amp;loc=d3e330036-122817<br><br>Reference 2: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(h)(1)(Note 1))<br> -URI http://asc.fasb.org/extlink&amp;oid=120395691&amp;loc=d3e23780-122690<br><br>Reference 3: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 9<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32639-109319<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DeferredForeignIncomeTaxExpenseBenefit</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
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<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
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<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of deferred income tax expense (benefit) pertaining to income (loss) from continuing operations.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SAB Topic 6.I.7)<br> -URI http://asc.fasb.org/extlink&amp;oid=122134291&amp;loc=d3e330036-122817<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SAB Topic 6.I.Fact.1)<br> -URI http://asc.fasb.org/extlink&amp;oid=122134291&amp;loc=d3e330036-122817<br><br>Reference 3: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(h)(1)(Note 1))<br> -URI http://asc.fasb.org/extlink&amp;oid=120395691&amp;loc=d3e23780-122690<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SAB Topic 6.I.Fact.2)<br> -URI http://asc.fasb.org/extlink&amp;oid=122134291&amp;loc=d3e330036-122817<br><br>Reference 5: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 28<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=123570139&amp;loc=d3e3602-108585<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 9<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32639-109319<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
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<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of deferred state and local tax expense (benefit) pertaining to income (loss) from continuing operations.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 9<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32639-109319<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SAB Topic 6.I.7)<br> -URI http://asc.fasb.org/extlink&amp;oid=122134291&amp;loc=d3e330036-122817<br><br>Reference 3: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(h)(1)(Note 1))<br> -URI http://asc.fasb.org/extlink&amp;oid=120395691&amp;loc=d3e23780-122690<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of current income tax expense (benefit) and deferred income tax expense (benefit) pertaining to continuing operations.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SAB TOPIC 6.I.7)<br> -URI http://asc.fasb.org/extlink&amp;oid=122134291&amp;loc=d3e330036-122817<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 10<br> -URI http://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32672-109319<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 22<br> -Subparagraph (h)<br> -URI http://asc.fasb.org/extlink&amp;oid=123359005&amp;loc=d3e8736-108599<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(h))<br> -URI http://asc.fasb.org/extlink&amp;oid=120395691&amp;loc=d3e23780-122690<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 9<br> -URI http://asc.fasb.org/extlink&amp;oid=124431687&amp;loc=d3e22663-107794<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 20<br> -Section 45<br> -Paragraph 2<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=123586238&amp;loc=d3e38679-109324<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 220<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-04(9))<br> -URI http://asc.fasb.org/extlink&amp;oid=120400993&amp;loc=SL114874131-224263<br><br>Reference 8: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -URI http://asc.fasb.org/extlink&amp;oid=124431687&amp;loc=d3e22658-107794<br></p></div>
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<tr>
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<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674064760984">
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<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Income Taxes - Reconciliation to Statutory Tax Expense (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="3">12 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2021</div></th>
<th class="th"><div>Dec. 31, 2020</div></th>
<th class="th"><div>Dec. 31, 2019</div></th>
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<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncomeTaxDisclosureAbstract', window );"><strong>Income Taxes</strong></a></td>
<td class="text">&#160;<span></span>
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<td class="text">&#160;<span></span>
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<td class="text">&#160;<span></span>
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<td class="nump">$ 5,393<span></span>
</td>
<td class="num">$ (1,777)<span></span>
</td>
<td class="num">$ (16,396)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncomeTaxReconciliationStateAndLocalIncomeTaxes', window );">State taxes, net of U.S. federal impact</a></td>
<td class="num">(607)<span></span>
</td>
<td class="num">(121)<span></span>
</td>
<td class="num">(835)<span></span>
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<tr class="ro">
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<td class="nump">609<span></span>
</td>
<td class="num">(131)<span></span>
</td>
<td class="nump">785<span></span>
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<td class="num">(3,964)<span></span>
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<td class="nump">726<span></span>
</td>
<td class="num">(1,692)<span></span>
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<td class="num">(2,389)<span></span>
</td>
<td class="nump">388<span></span>
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<td class="nump">15,098<span></span>
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<td class="nump">398<span></span>
</td>
<td class="num">(6)<span></span>
</td>
<td class="nump">1,232<span></span>
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<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncomeTaxReconciliationNondeductibleExpenseShareBasedCompensationCost', window );">Share-based compensation</a></td>
<td class="nump">1,208<span></span>
</td>
<td class="nump">2,248<span></span>
</td>
<td class="nump">1,947<span></span>
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<td class="text">&#160;<span></span>
</td>
<td class="nump">728<span></span>
</td>
<td class="nump">495<span></span>
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<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_EffectiveIncomeTaxRateReconciliationPartialExtinguishmentOfDebtAmount', window );">Partial extinguishment of 2023 Notes</a></td>
<td class="num">(1,090)<span></span>
</td>
<td class="num">(2,292)<span></span>
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<td class="text">&#160;<span></span>
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<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncomeTaxReconciliationOtherAdjustments', window );">Other</a></td>
<td class="nump">84<span></span>
</td>
<td class="nump">164<span></span>
</td>
<td class="nump">143<span></span>
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<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncomeTaxExpenseBenefit', window );">Total expense (benefit) for income taxes</a></td>
<td class="num">$ (358)<span></span>
</td>
<td class="num">$ (73)<span></span>
</td>
<td class="nump">$ 777<span></span>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of current income tax expense (benefit) and deferred income tax expense (benefit) pertaining to continuing operations.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SAB TOPIC 6.I.7)<br> -URI http://asc.fasb.org/extlink&amp;oid=122134291&amp;loc=d3e330036-122817<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 10<br> -URI http://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32672-109319<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 22<br> -Subparagraph (h)<br> -URI http://asc.fasb.org/extlink&amp;oid=123359005&amp;loc=d3e8736-108599<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(h))<br> -URI http://asc.fasb.org/extlink&amp;oid=120395691&amp;loc=d3e23780-122690<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 9<br> -URI http://asc.fasb.org/extlink&amp;oid=124431687&amp;loc=d3e22663-107794<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 20<br> -Section 45<br> -Paragraph 2<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=123586238&amp;loc=d3e38679-109324<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 220<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-04(9))<br> -URI http://asc.fasb.org/extlink&amp;oid=120400993&amp;loc=SL114874131-224263<br><br>Reference 8: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -URI http://asc.fasb.org/extlink&amp;oid=124431687&amp;loc=d3e22658-107794<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
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<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeTaxReconciliationChangeInDeferredTaxAssetsValuationAllowance">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of the difference between reported income tax expense (benefit) and expected income tax expense (benefit) computed by applying the domestic federal statutory income tax rates to pretax income (loss) from continuing operations attributable to increase (decrease) in the valuation allowance for deferred tax assets.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 12<br> -URI http://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32687-109319<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeTaxReconciliationChangeInDeferredTaxAssetsValuationAllowance</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeTaxReconciliationForeignIncomeTaxRateDifferential">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of the difference between reported income tax expense (benefit) and expected income tax expense (benefit) computed by applying the domestic federal statutory income tax rates to pretax income (loss) from continuing operations attributable to foreign income tax expense (benefit).</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 12<br> -URI http://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32687-109319<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeTaxReconciliationForeignIncomeTaxRateDifferential</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeTaxReconciliationIncomeTaxExpenseBenefitAtFederalStatutoryIncomeTaxRate">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The amount of income tax expense or benefit for the period computed by applying the domestic federal statutory tax rates to pretax income from continuing operations.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 12<br> -URI http://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32687-109319<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeTaxReconciliationIncomeTaxExpenseBenefitAtFederalStatutoryIncomeTaxRate</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
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<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeTaxReconciliationNondeductibleExpenseImpairmentLosses">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of the difference between reported income tax expense (benefit) and expected income tax expense (benefit) computed by applying the domestic federal statutory income tax rates to pretax income (loss) from continuing operations attributable to nondeductible impairment loss.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 12<br> -URI http://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32687-109319<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeTaxReconciliationNondeductibleExpenseImpairmentLosses</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeTaxReconciliationNondeductibleExpenseShareBasedCompensationCost">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of reported income tax expense (benefit) in excess of (less than) expected income tax expense (benefit) computed by applying domestic federal statutory income tax rate to pretax income (loss) from continuing operation, attributable to nondeductible expense for award under share-based payment arrangement. Includes, but is not limited to, expense determined to be nondeductible upon grant or after for award under share-based payment arrangement.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 12<br> -URI http://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32687-109319<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeTaxReconciliationNondeductibleExpenseShareBasedCompensationCost</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeTaxReconciliationOtherAdjustments">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of the difference between reported income tax expense (benefit) and expected income tax expense (benefit) computed by applying the domestic federal statutory income tax rates to pretax income (loss) from continuing operations attributable to other adjustments.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 12<br> -URI http://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32687-109319<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeTaxReconciliationOtherAdjustments</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeTaxReconciliationStateAndLocalIncomeTaxes">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of the difference between reported income tax expense (benefit) and expected income tax expense (benefit) computed by applying the domestic federal statutory income tax rates to pretax income (loss) from continuing operations attributable to state and local income tax expense (benefit).</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 12<br> -URI http://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32687-109319<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeTaxReconciliationStateAndLocalIncomeTaxes</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeTaxReconciliationTaxCreditsResearch">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of the difference between reported income tax expense (benefit) and expected income tax expense (benefit) computed by applying the domestic federal statutory income tax rates to pretax income (loss) from continuing operations attributable to research tax credit.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 12<br> -URI http://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32687-109319<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeTaxReconciliationTaxCreditsResearch</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_EffectiveIncomeTaxRateReconciliationPartialExtinguishmentOfDebtAmount">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of the difference between reported income tax expense (benefit) and expected income tax expense (benefit) computed by applying the domestic federal statutory income tax rates to pretax income (loss) from continuing operations attributable to partial extinguishment of debt.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_EffectiveIncomeTaxRateReconciliationPartialExtinguishmentOfDebtAmount</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_IncomeTaxReconciliationChangeInAccrualForUnrecognizedTaxBenefits">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Represents the change in accrual for unrecognized tax benefits.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_IncomeTaxReconciliationChangeInAccrualForUnrecognizedTaxBenefits</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
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<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674063904632">
<tr>
<th class="tl" colspan="1" rowspan="1"><div style="width: 200px;"><strong>Income Taxes - Deferred Taxes (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
<th class="th"><div>Dec. 31, 2020</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ComponentsOfDeferredTaxAssetsAbstract', window );"><strong>Deferred tax assets:</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DeferredTaxAssetsInventory', window );">Inventory valuation</a></td>
<td class="nump">$ 11,822<span></span>
</td>
<td class="nump">$ 10,949<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DeferredTaxAssetsOperatingLossCarryforwards', window );">Net operating losses</a></td>
<td class="nump">38,816<span></span>
</td>
<td class="nump">51,260<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DeferredTaxAssetsTaxCreditCarryforwards', window );">Credit carry forwards</a></td>
<td class="nump">57,810<span></span>
</td>
<td class="nump">54,160<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReserves', window );">Warranty and installation accruals</a></td>
<td class="nump">1,730<span></span>
</td>
<td class="nump">1,045<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsShareBasedCompensationCost', window );">Share-based compensation</a></td>
<td class="nump">4,033<span></span>
</td>
<td class="nump">4,587<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DeferredTaxAssetsDeferredIncome', window );">Customer deposits and deferred revenue</a></td>
<td class="nump">9,908<span></span>
</td>
<td class="nump">10,982<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_DeferredTaxAssetsOperatingLeases', window );">Operating leases</a></td>
<td class="nump">8,464<span></span>
</td>
<td class="nump">2,281<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DeferredTaxAssetsOther', window );">Other</a></td>
<td class="nump">5,880<span></span>
</td>
<td class="nump">4,741<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DeferredTaxAssetsGross', window );">Total deferred tax assets</a></td>
<td class="nump">138,463<span></span>
</td>
<td class="nump">140,005<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DeferredTaxAssetsValuationAllowance', window );">Valuation allowance</a></td>
<td class="num">(116,054)<span></span>
</td>
<td class="num">(118,443)<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DeferredTaxAssetsNet', window );">Net deferred tax assets</a></td>
<td class="nump">22,409<span></span>
</td>
<td class="nump">21,562<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ComponentsOfDeferredTaxLiabilitiesAbstract', window );"><strong>Deferred tax liabilities:</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DeferredTaxLiabilitiesGoodwillAndIntangibleAssetsIntangibleAssets', window );">Purchased intangible assets</a></td>
<td class="nump">6,633<span></span>
</td>
<td class="nump">7,227<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DeferredTaxLiabilitiesFinancingArrangements', window );">Convertible Senior Notes</a></td>
<td class="nump">10,018<span></span>
</td>
<td class="nump">13,674<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DeferredTaxLiabilitiesLeasingArrangements', window );">Operating leases</a></td>
<td class="nump">6,539<span></span>
</td>
<td class="nump">2,241<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DeferredTaxLiabilitiesPropertyPlantAndEquipment', window );">Depreciation</a></td>
<td class="nump">2,372<span></span>
</td>
<td class="nump">2,220<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DeferredIncomeTaxLiabilities', window );">Total deferred tax liabilities</a></td>
<td class="nump">25,562<span></span>
</td>
<td class="nump">25,362<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DeferredTaxLiabilities', window );">Net deferred taxes</a></td>
<td class="num">(3,153)<span></span>
</td>
<td class="num">$ (3,800)<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DeferredTaxLiabilityNotRecognizedUndistributedEarningsOfForeignSubsidiariesAbstract', window );"><strong>Undistributed earnings of foreign subsidiaries</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_UndistributedEarningsOfForeignSubsidiaries', window );">Undistributed earnings of foreign subsidiaries</a></td>
<td class="nump">$ 800<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ComponentsOfDeferredTaxAssetsAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ComponentsOfDeferredTaxAssetsAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ComponentsOfDeferredTaxLiabilitiesAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ComponentsOfDeferredTaxLiabilitiesAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredIncomeTaxLiabilities">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of deferred tax liability attributable to taxable temporary differences.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(26)(b))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32537-109319<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 210<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-03(15)(b)(2))<br> -URI http://asc.fasb.org/extlink&amp;oid=120400017&amp;loc=d3e572229-122910<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 942<br> -SubTopic 210<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-03(15)(2))<br> -URI http://asc.fasb.org/extlink&amp;oid=120398452&amp;loc=d3e534808-122878<br><br>Reference 5: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(26)(a))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DeferredIncomeTaxLiabilities</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredTaxAssetsDeferredIncome">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount before allocation of valuation allowances of deferred tax asset attributable to deductible temporary differences from deferred income.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -URI http://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32632-109319<br><br>Reference 2: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 6<br> -URI http://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32621-109319<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DeferredTaxAssetsDeferredIncome</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredTaxAssetsGross">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount before allocation of valuation allowances of deferred tax asset attributable to deductible temporary differences and carryforwards.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32537-109319<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DeferredTaxAssetsGross</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredTaxAssetsInventory">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount before allocation of valuation allowances of deferred tax asset attributable to deductible temporary differences from inventory.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -URI http://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32632-109319<br><br>Reference 2: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 6<br> -URI http://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32621-109319<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DeferredTaxAssetsInventory</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredTaxAssetsNet">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount after allocation of valuation allowances of deferred tax asset attributable to deductible temporary differences and carryforwards.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -URI http://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32537-109319<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DeferredTaxAssetsNet</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredTaxAssetsOperatingLossCarryforwards">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount before allocation of valuation allowances of deferred tax asset attributable to deductible operating loss carryforwards.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -URI http://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32632-109319<br><br>Reference 2: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 6<br> -URI http://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32621-109319<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DeferredTaxAssetsOperatingLossCarryforwards</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredTaxAssetsOther">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount, before allocation of valuation allowance, of deferred tax asset attributable to deductible temporary differences, classified as other.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 6<br> -URI http://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32621-109319<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -URI http://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32632-109319<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DeferredTaxAssetsOther</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredTaxAssetsTaxCreditCarryforwards">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount, before allocation of a valuation allowances, of deferred tax assets attributable to deductible tax credit carryforwards including, but not limited to, research, foreign, general business, alternative minimum tax, and other deductible tax credit carryforwards.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -URI http://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32632-109319<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32559-109319<br><br>Reference 3: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 6<br> -URI http://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32621-109319<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DeferredTaxAssetsTaxCreditCarryforwards</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsShareBasedCompensationCost">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount before allocation of valuation allowances of deferred tax asset attributable to deductible temporary differences from share-based compensation.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 6<br> -URI http://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32621-109319<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -URI http://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32632-109319<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsShareBasedCompensationCost</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReserves">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount before allocation of valuation allowances of deferred tax asset attributable to deductible temporary differences from warranty reserves.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -URI http://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32632-109319<br><br>Reference 2: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 6<br> -URI http://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32621-109319<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReserves</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredTaxAssetsValuationAllowance">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of deferred tax assets for which it is more likely than not that a tax benefit will not be realized.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)<br> -URI http://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32537-109319<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DeferredTaxAssetsValuationAllowance</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredTaxLiabilities">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount, after deferred tax asset, of deferred tax liability attributable to taxable differences without jurisdictional netting.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 45<br> -Paragraph 6<br> -URI http://asc.fasb.org/extlink&amp;oid=123427490&amp;loc=d3e31931-109318<br><br>Reference 2: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -URI http://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32537-109319<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DeferredTaxLiabilities</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredTaxLiabilitiesFinancingArrangements">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of deferred tax liability attributable to taxable temporary differences from financing arrangements.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 6<br> -URI http://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32621-109319<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -URI http://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32632-109319<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DeferredTaxLiabilitiesFinancingArrangements</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredTaxLiabilitiesGoodwillAndIntangibleAssetsIntangibleAssets">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of deferred tax liability attributable to taxable temporary differences from intangible assets other than goodwill.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 6<br> -URI http://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32621-109319<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -URI http://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32632-109319<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DeferredTaxLiabilitiesGoodwillAndIntangibleAssetsIntangibleAssets</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredTaxLiabilitiesLeasingArrangements">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of deferred tax liability attributable to taxable temporary differences from leasing arrangements.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -URI http://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32632-109319<br><br>Reference 2: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 6<br> -URI http://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32621-109319<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DeferredTaxLiabilitiesLeasingArrangements</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredTaxLiabilitiesPropertyPlantAndEquipment">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of deferred tax liability attributable to taxable temporary differences from property, plant, and equipment.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 6<br> -URI http://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32621-109319<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -URI http://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32632-109319<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DeferredTaxLiabilitiesPropertyPlantAndEquipment</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredTaxLiabilityNotRecognizedUndistributedEarningsOfForeignSubsidiariesAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DeferredTaxLiabilityNotRecognizedUndistributedEarningsOfForeignSubsidiariesAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_UndistributedEarningsOfForeignSubsidiaries">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of undistributed earnings of foreign subsidiaries intended to be permanently reinvested outside the country of domicile.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 740<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=6487024&amp;loc=d3e29054-158556<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 30<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=6424122&amp;loc=d3e41874-109331<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 942<br> -SubTopic 740<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=6479915&amp;loc=d3e66715-112838<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 25<br> -Paragraph 3<br> -Subparagraph (a)(1)<br> -URI http://asc.fasb.org/extlink&amp;oid=123452999&amp;loc=d3e28200-109314<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_UndistributedEarningsOfForeignSubsidiaries</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_DeferredTaxAssetsOperatingLeases">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>a</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_DeferredTaxAssetsOperatingLeases</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>115
<FILENAME>R101.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674068234008">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Income Taxes - Operating Loss Carryforwards (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
<th class="th" colspan="1"></th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2021</div></th>
<th class="th"><div>Dec. 31, 2020</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OperatingLossCarryforwardsLineItems', window );"><strong>Operating loss carryforwards disclosures</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DeferredTaxAssetsOperatingLossCarryforwards', window );">Net deferred tax asset</a></td>
<td class="nump">$ 38,816<span></span>
</td>
<td class="nump">$ 51,260<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncomeTaxAuthorityAxis=us-gaap_DomesticCountryMember', window );">Federal</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OperatingLossCarryforwardsLineItems', window );"><strong>Operating loss carryforwards disclosures</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OperatingLossCarryforwards', window );">Net operating loss carryforwards</a></td>
<td class="nump">165,800<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_veco_OperatingLossCarryforwardsIndefinite', window );">Net operating loss carryforwards, Indefinite carryforward period</a></td>
<td class="nump">6,900<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncomeTaxAuthorityAxis=us-gaap_StateAndLocalJurisdictionMember', window );">State and local</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OperatingLossCarryforwardsLineItems', window );"><strong>Operating loss carryforwards disclosures</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OperatingLossCarryforwards', window );">Net operating loss carryforwards</a></td>
<td class="nump">104,700<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DeferredTaxAssetsOperatingLossCarryforwards', window );">Net deferred tax asset</a></td>
<td class="nump">$ 6,800<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredTaxAssetsOperatingLossCarryforwards">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount before allocation of valuation allowances of deferred tax asset attributable to deductible operating loss carryforwards.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -URI http://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32632-109319<br><br>Reference 2: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 6<br> -URI http://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32621-109319<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DeferredTaxAssetsOperatingLossCarryforwards</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OperatingLossCarryforwards">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of operating loss carryforward, before tax effects, available to reduce future taxable income under enacted tax laws.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32559-109319<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OperatingLossCarryforwards</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OperatingLossCarryforwardsLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OperatingLossCarryforwardsLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_OperatingLossCarryforwardsIndefinite">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of operating loss carryforward, before tax effects, available to reduce future taxable income under enacted tax laws, with indefinite carryforward period.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_OperatingLossCarryforwardsIndefinite</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeTaxAuthorityAxis=us-gaap_DomesticCountryMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeTaxAuthorityAxis=us-gaap_DomesticCountryMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeTaxAuthorityAxis=us-gaap_StateAndLocalJurisdictionMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeTaxAuthorityAxis=us-gaap_StateAndLocalJurisdictionMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>116
<FILENAME>R102.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
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</head>
<body>
<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674059905032">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Income Taxes - Tax Credit Carryforwards (Details)<br> $ in Millions</strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th">
<div>Dec. 31, 2021 </div>
<div>USD ($)</div>
</th></tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ValuationAllowanceAbstract', window );"><strong>Valuation allowance</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ValuationAllowanceDeferredTaxAssetChangeInAmount', window );">Increase (decrease) in valuation allowance</a></td>
<td class="num">$ (2.4)<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncomeTaxAuthorityAxis=us-gaap_DomesticCountryMember', window );">Federal | Research and development tax credit carryforward</a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_TaxCreditCarryforwardLineItems', window );"><strong>Tax credit carryforward</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_TaxCreditCarryforwardAmount', window );">Tax credit carry forwards</a></td>
<td class="nump">32.1<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncomeTaxAuthorityAxis=us-gaap_StateAndLocalJurisdictionMember', window );">State and local</a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_TaxCreditCarryforwardLineItems', window );"><strong>Tax credit carryforward</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_TaxCreditCarryforwardAmount', window );">Tax credit carry forwards</a></td>
<td class="nump">30.6<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncomeTaxAuthorityAxis=us-gaap_ForeignCountryMember', window );">Foreign tax</a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_TaxCreditCarryforwardLineItems', window );"><strong>Tax credit carryforward</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_TaxCreditCarryforwardAmount', window );">Tax credit carry forwards</a></td>
<td class="nump">$ 9.4<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_TaxCreditCarryforwardAmount">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The amount of the tax credit carryforward, before tax effects, available to reduce future taxable income under enacted tax laws.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32559-109319<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_TaxCreditCarryforwardAmount</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_TaxCreditCarryforwardLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_TaxCreditCarryforwardLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ValuationAllowanceAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ValuationAllowanceAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ValuationAllowanceDeferredTaxAssetChangeInAmount">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of increase (decrease) in the valuation allowance for a specified deferred tax asset.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -URI http://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32537-109319<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ValuationAllowanceDeferredTaxAssetChangeInAmount</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeTaxAuthorityAxis=us-gaap_DomesticCountryMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeTaxAuthorityAxis=us-gaap_DomesticCountryMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
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<td><strong> Data Type:</strong></td>
<td>na</td>
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<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
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<tr>
<td><strong> Period Type:</strong></td>
<td></td>
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</table></div>
</div></td></tr>
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<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_TaxCreditCarryforwardAxis=us-gaap_ResearchMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_TaxCreditCarryforwardAxis=us-gaap_ResearchMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
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<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
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<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
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<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeTaxAuthorityAxis=us-gaap_StateAndLocalJurisdictionMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeTaxAuthorityAxis=us-gaap_StateAndLocalJurisdictionMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
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<td><strong> Data Type:</strong></td>
<td>na</td>
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<td><strong> Balance Type:</strong></td>
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<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeTaxAuthorityAxis=us-gaap_ForeignCountryMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeTaxAuthorityAxis=us-gaap_ForeignCountryMember</td>
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<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
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<td><strong> Data Type:</strong></td>
<td>na</td>
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<td><strong> Balance Type:</strong></td>
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<DOCUMENT>
<TYPE>XML
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<html>
<head>
<title></title>
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<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674060647544">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Income Taxes - Uncertain Tax Positions (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="3">12 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2021</div></th>
<th class="th"><div>Dec. 31, 2020</div></th>
<th class="th"><div>Dec. 31, 2019</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ReconciliationOfUnrecognizedTaxBenefitsExcludingAmountsPertainingToExaminedTaxReturnsRollForward', window );"><strong>Change in unrecognized tax benefits</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_UnrecognizedTaxBenefits', window );">Balance at beginning of year</a></td>
<td class="nump">$ 12,363<span></span>
</td>
<td class="nump">$ 12,369<span></span>
</td>
<td class="nump">$ 11,137<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_UnrecognizedTaxBenefitsIncreasesResultingFromCurrentPeriodTaxPositions', window );">Additions for tax positions related to current year</a></td>
<td class="nump">2,642<span></span>
</td>
<td class="nump">1,217<span></span>
</td>
<td class="nump">3,075<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_UnrecognizedTaxBenefitsIncreasesResultingFromPriorPeriodTaxPositions', window );">Additions for tax positions relating to prior years</a></td>
<td class="nump">50<span></span>
</td>
<td class="nump">47<span></span>
</td>
<td class="nump">21<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_UnrecognizedTaxBenefitsDecreasesResultingFromPriorPeriodTaxPositions', window );">Reductions for tax positions relating to prior years</a></td>
<td class="num">(1,196)<span></span>
</td>
<td class="num">(1,166)<span></span>
</td>
<td class="num">(1,814)<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_UnrecognizedTaxBenefitsDecreasesResultingFromSettlementsWithTaxingAuthorities', window );">Settlements</a></td>
<td class="num">(1,098)<span></span>
</td>
<td class="num">(104)<span></span>
</td>
<td class="num">(50)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_UnrecognizedTaxBenefits', window );">Balance at end of year</a></td>
<td class="nump">12,761<span></span>
</td>
<td class="nump">12,363<span></span>
</td>
<td class="nump">$ 12,369<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_UnrecognizedTaxBenefitsThatWouldImpactEffectiveTaxRate', window );">Unrecognized tax benefits that would impact effective tax rate if recognized</a></td>
<td class="nump">400<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestAccrued', window );">Accrued interest and penalties related to unrecognized tax benefits</a></td>
<td class="nump">$ 400<span></span>
</td>
<td class="nump">$ 400<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ReconciliationOfUnrecognizedTaxBenefitsExcludingAmountsPertainingToExaminedTaxReturnsRollForward">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>A roll forward is a reconciliation of a concept from the beginning of a period to the end of a period.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ReconciliationOfUnrecognizedTaxBenefitsExcludingAmountsPertainingToExaminedTaxReturnsRollForward</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_UnrecognizedTaxBenefits">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of unrecognized tax benefits.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 45<br> -Paragraph 10B<br> -URI http://asc.fasb.org/extlink&amp;oid=123427490&amp;loc=SL37586934-109318<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 15A<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=SL6600010-109319<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_UnrecognizedTaxBenefits</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_UnrecognizedTaxBenefitsDecreasesResultingFromPriorPeriodTaxPositions">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of decrease in unrecognized tax benefits resulting from tax positions taken in prior period tax returns.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 15A<br> -Subparagraph (a)(1)<br> -URI http://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=SL6600010-109319<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_UnrecognizedTaxBenefitsDecreasesResultingFromPriorPeriodTaxPositions</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_UnrecognizedTaxBenefitsDecreasesResultingFromSettlementsWithTaxingAuthorities">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of decrease in unrecognized tax benefits resulting from settlements with taxing authorities.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 15A<br> -Subparagraph (a)(3)<br> -URI http://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=SL6600010-109319<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_UnrecognizedTaxBenefitsDecreasesResultingFromSettlementsWithTaxingAuthorities</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestAccrued">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount accrued for interest on an underpayment of income taxes and penalties related to a tax position claimed or expected to be claimed in the tax return.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 15<br> -Subparagraph (c)<br> -URI http://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32718-109319<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestAccrued</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_UnrecognizedTaxBenefitsIncreasesResultingFromCurrentPeriodTaxPositions">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of increase in unrecognized tax benefits resulting from tax positions that have been or will be taken in current period tax return.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 15A<br> -Subparagraph (a)(2)<br> -URI http://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=SL6600010-109319<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_UnrecognizedTaxBenefitsIncreasesResultingFromCurrentPeriodTaxPositions</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
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<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
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</table></div>
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<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_UnrecognizedTaxBenefitsIncreasesResultingFromPriorPeriodTaxPositions">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of increase in unrecognized tax benefits resulting from tax positions taken in prior period tax returns.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 15A<br> -Subparagraph (a)(1)<br> -URI http://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=SL6600010-109319<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_UnrecognizedTaxBenefitsIncreasesResultingFromPriorPeriodTaxPositions</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
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<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
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<td><strong> Balance Type:</strong></td>
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<td>duration</td>
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<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_UnrecognizedTaxBenefitsThatWouldImpactEffectiveTaxRate">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The total amount of unrecognized tax benefits that, if recognized, would affect the effective tax rate.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 15A<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=SL6600010-109319<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_UnrecognizedTaxBenefitsThatWouldImpactEffectiveTaxRate</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
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<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
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<td><strong> Balance Type:</strong></td>
<td>credit</td>
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<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674060253608">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Segment Reporting and Geographic Information - Segment (Details)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="3">12 Months Ended</th>
</tr>
<tr>
<th class="th">
<div>Dec. 31, 2021 </div>
<div>USD ($) </div>
<div>segment</div>
</th>
<th class="th">
<div>Dec. 31, 2020 </div>
<div>USD ($)</div>
</th>
<th class="th">
<div>Dec. 31, 2019 </div>
<div>USD ($)</div>
</th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SegmentReportingInformationLineItems', window );"><strong>Revenue reporting by end-market and geographic region</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_NumberOfOperatingSegments', window );">Number of operating segments | segment</a></td>
<td class="nump">1<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_NumberOfReportableSegments', window );">Number of reportable segments | segment</a></td>
<td class="nump">1<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_RevenueFromContractWithCustomerIncludingAssessedTax', window );">Net sales</a></td>
<td class="nump">$ 583,277<span></span>
</td>
<td class="nump">$ 454,163<span></span>
</td>
<td class="nump">$ 419,349<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_srt_ProductOrServiceAxis=veco_SemiconductorMember', window );">Semiconductor</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SegmentReportingInformationLineItems', window );"><strong>Revenue reporting by end-market and geographic region</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_RevenueFromContractWithCustomerIncludingAssessedTax', window );">Net sales</a></td>
<td class="nump">247,051<span></span>
</td>
<td class="nump">165,909<span></span>
</td>
<td class="nump">175,608<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_srt_ProductOrServiceAxis=veco_CompoundSemiconductorMember', window );">Compound Semiconductor</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SegmentReportingInformationLineItems', window );"><strong>Revenue reporting by end-market and geographic region</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_RevenueFromContractWithCustomerIncludingAssessedTax', window );">Net sales</a></td>
<td class="nump">106,972<span></span>
</td>
<td class="nump">107,922<span></span>
</td>
<td class="nump">85,877<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_srt_ProductOrServiceAxis=veco_DataStorageMember', window );">Data Storage</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SegmentReportingInformationLineItems', window );"><strong>Revenue reporting by end-market and geographic region</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_RevenueFromContractWithCustomerIncludingAssessedTax', window );">Net sales</a></td>
<td class="nump">168,760<span></span>
</td>
<td class="nump">123,288<span></span>
</td>
<td class="nump">84,075<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_srt_ProductOrServiceAxis=veco_ScientificAndOtherMember', window );">Scientific &amp; Other</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SegmentReportingInformationLineItems', window );"><strong>Revenue reporting by end-market and geographic region</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_RevenueFromContractWithCustomerIncludingAssessedTax', window );">Net sales</a></td>
<td class="nump">$ 60,494<span></span>
</td>
<td class="nump">$ 57,044<span></span>
</td>
<td class="nump">$ 73,789<span></span>
</td>
</tr>
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<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_NumberOfOperatingSegments">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Number of operating segments. An operating segment is a component of an enterprise: (a) that engages in business activities from which it may earn revenues and incur expenses (including revenues and expenses relating to transactions with other components of the same enterprise), (b) whose operating results are regularly reviewed by the enterprise's chief operating decision maker to make decisions about resources to be allocated to the segment and assess its performance, and (c) for which discrete financial information is available. An operating segment may engage in business activities for which it has yet to earn revenues, for example, start-up operations may be operating segments before earning revenues.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 18<br> -URI http://asc.fasb.org/extlink&amp;oid=123359005&amp;loc=d3e8672-108599<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_NumberOfOperatingSegments</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:integerItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
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<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
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<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_NumberOfReportableSegments">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Number of segments reported by the entity. A reportable segment is a component of an entity for which there is an accounting requirement to report separate financial information on that component in the entity's financial statements.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 18<br> -URI http://asc.fasb.org/extlink&amp;oid=123359005&amp;loc=d3e8672-108599<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_NumberOfReportableSegments</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:integerItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
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<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
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<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RevenueFromContractWithCustomerIncludingAssessedTax">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount, including tax collected from customer, of revenue from satisfaction of performance obligation by transferring promised good or service to customer. Tax collected from customer is tax assessed by governmental authority that is both imposed on and concurrent with specific revenue-producing transaction, including, but not limited to, sales, use, value-added and excise.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 41<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=123359005&amp;loc=d3e9038-108599<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 606<br> -SubTopic 10<br> -Section 50<br> -Paragraph 5<br> -URI http://asc.fasb.org/extlink&amp;oid=123351226&amp;loc=SL49130545-203045<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 32<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=123359005&amp;loc=d3e8933-108599<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 32<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=123359005&amp;loc=d3e8933-108599<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 30<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=123359005&amp;loc=d3e8906-108599<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 22<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=123359005&amp;loc=d3e8736-108599<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 22<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=123359005&amp;loc=d3e8736-108599<br><br>Reference 8: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 606<br> -SubTopic 10<br> -Section 50<br> -Paragraph 4<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=123351226&amp;loc=SL49130543-203045<br><br>Reference 9: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 42<br> -URI http://asc.fasb.org/extlink&amp;oid=123359005&amp;loc=d3e9054-108599<br><br>Reference 10: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 40<br> -URI http://asc.fasb.org/extlink&amp;oid=123359005&amp;loc=d3e9031-108599<br><br>Reference 11: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 924<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SAB Topic 11.L)<br> -URI http://asc.fasb.org/extlink&amp;oid=6472922&amp;loc=d3e499488-122856<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RevenueFromContractWithCustomerIncludingAssessedTax</td>
</tr>
<tr>
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<td><strong> Balance Type:</strong></td>
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<td><strong> Period Type:</strong></td>
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<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_SegmentReportingInformationLineItems</td>
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<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
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</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_ProductOrServiceAxis=veco_SemiconductorMember</td>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_ProductOrServiceAxis=veco_CompoundSemiconductorMember</td>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
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<td style="white-space:nowrap;">srt_ProductOrServiceAxis=veco_DataStorageMember</td>
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<td style="white-space:nowrap;">srt_ProductOrServiceAxis=veco_ScientificAndOtherMember</td>
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<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674059593304">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Segment Reporting and Geographic Information - Geographic (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="3">12 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2021</div></th>
<th class="th"><div>Dec. 31, 2020</div></th>
<th class="th"><div>Dec. 31, 2019</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SegmentReportingInformationLineItems', window );"><strong>Revenue reporting by end-market and geographic region</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_RevenueFromContractWithCustomerIncludingAssessedTax', window );">Net sales</a></td>
<td class="nump">$ 583,277<span></span>
</td>
<td class="nump">$ 454,163<span></span>
</td>
<td class="nump">$ 419,349<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentNet', window );">Long-lived tangible assets</a></td>
<td class="nump">99,743<span></span>
</td>
<td class="nump">65,271<span></span>
</td>
<td class="nump">75,711<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_srt_StatementGeographicalAxis=country_US', window );">United States</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SegmentReportingInformationLineItems', window );"><strong>Revenue reporting by end-market and geographic region</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_RevenueFromContractWithCustomerIncludingAssessedTax', window );">Net sales</a></td>
<td class="nump">217,209<span></span>
</td>
<td class="nump">145,353<span></span>
</td>
<td class="nump">126,160<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentNet', window );">Long-lived tangible assets</a></td>
<td class="nump">99,220<span></span>
</td>
<td class="nump">64,967<span></span>
</td>
<td class="nump">75,187<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_srt_StatementGeographicalAxis=us-gaap_EMEAMember', window );">EMEA</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SegmentReportingInformationLineItems', window );"><strong>Revenue reporting by end-market and geographic region</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_RevenueFromContractWithCustomerIncludingAssessedTax', window );">Net sales</a></td>
<td class="nump">55,129<span></span>
</td>
<td class="nump">73,124<span></span>
</td>
<td class="nump">57,351<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentNet', window );">Long-lived tangible assets</a></td>
<td class="nump">94<span></span>
</td>
<td class="nump">120<span></span>
</td>
<td class="nump">143<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_srt_StatementGeographicalAxis=country_CN', window );">China</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
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<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SegmentReportingInformationLineItems', window );"><strong>Revenue reporting by end-market and geographic region</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_RevenueFromContractWithCustomerIncludingAssessedTax', window );">Net sales</a></td>
<td class="nump">105,998<span></span>
</td>
<td class="nump">57,589<span></span>
</td>
<td class="nump">71,078<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentNet', window );">Long-lived tangible assets</a></td>
<td class="nump">67<span></span>
</td>
<td class="nump">84<span></span>
</td>
<td class="nump">130<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_srt_StatementGeographicalAxis=veco_AsiaPacificExcludingChinaMember', window );">Rest of APAC</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
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<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SegmentReportingInformationLineItems', window );"><strong>Revenue reporting by end-market and geographic region</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_RevenueFromContractWithCustomerIncludingAssessedTax', window );">Net sales</a></td>
<td class="nump">204,633<span></span>
</td>
<td class="nump">177,569<span></span>
</td>
<td class="nump">164,363<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentNet', window );">Long-lived tangible assets</a></td>
<td class="nump">362<span></span>
</td>
<td class="nump">100<span></span>
</td>
<td class="nump">251<span></span>
</td>
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<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_srt_StatementGeographicalAxis=veco_RestOfWorldMember', window );">Rest Of World</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SegmentReportingInformationLineItems', window );"><strong>Revenue reporting by end-market and geographic region</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_RevenueFromContractWithCustomerIncludingAssessedTax', window );">Net sales</a></td>
<td class="nump">$ 308<span></span>
</td>
<td class="nump">$ 528<span></span>
</td>
<td class="nump">$ 397<span></span>
</td>
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<div style="display: none;">
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<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount after accumulated depreciation, depletion and amortization of physical assets used in the normal conduct of business to produce goods and services and not intended for resale. Examples include, but are not limited to, land, buildings, machinery and equipment, office equipment, and furniture and fixtures.</p></div>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PropertyPlantAndEquipmentNet</td>
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<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
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<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
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</div></td></tr>
</table>
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<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount, including tax collected from customer, of revenue from satisfaction of performance obligation by transferring promised good or service to customer. Tax collected from customer is tax assessed by governmental authority that is both imposed on and concurrent with specific revenue-producing transaction, including, but not limited to, sales, use, value-added and excise.</p></div>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
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<span style="display: none;">v3.22.0.1</span><table class="report" border="0" cellspacing="2" id="idm139674059566584">
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<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Schedule II - Valuation and Qualifying Accounts (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="3">12 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2021</div></th>
<th class="th"><div>Dec. 31, 2020</div></th>
<th class="th"><div>Dec. 31, 2019</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_srt_ValuationAndQualifyingAccountsDisclosureLineItems', window );"><strong>Valuation and Qualifying Accounts</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
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<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ValuationAllowancesAndReservesBalance', window );">Balance at Beginning of Period</a></td>
<td class="nump">$ 119,179<span></span>
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<td class="nump">$ 130,655<span></span>
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<td class="nump">$ 115,225<span></span>
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<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ValuationAllowancesAndReservesChargedToCostAndExpense', window );">Charged (Credited) to Costs and Expenses</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">653<span></span>
</td>
<td class="nump">15,490<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ValuationAllowancesAndReservesDeductions', window );">Deductions</a></td>
<td class="num">(2,389)<span></span>
</td>
<td class="num">(12,129)<span></span>
</td>
<td class="num">(60)<span></span>
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<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ValuationAllowancesAndReservesBalance', window );">Balance at End of Period</a></td>
<td class="nump">116,790<span></span>
</td>
<td class="nump">119,179<span></span>
</td>
<td class="nump">130,655<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ValuationAllowancesAndReservesTypeAxis=us-gaap_AllowanceForCreditLossMember', window );">Allowance for doubtful accounts</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_srt_ValuationAndQualifyingAccountsDisclosureLineItems', window );"><strong>Valuation and Qualifying Accounts</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ValuationAllowancesAndReservesBalance', window );">Balance at Beginning of Period</a></td>
<td class="nump">736<span></span>
</td>
<td class="nump">602<span></span>
</td>
<td class="nump">270<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ValuationAllowancesAndReservesChargedToCostAndExpense', window );">Charged (Credited) to Costs and Expenses</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">140<span></span>
</td>
<td class="nump">392<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ValuationAllowancesAndReservesDeductions', window );">Deductions</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(6)<span></span>
</td>
<td class="num">(60)<span></span>
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<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ValuationAllowancesAndReservesBalance', window );">Balance at End of Period</a></td>
<td class="nump">736<span></span>
</td>
<td class="nump">736<span></span>
</td>
<td class="nump">602<span></span>
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<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ValuationAllowancesAndReservesTypeAxis=us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember', window );">Valuation allowance in net deferred tax assets</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_srt_ValuationAndQualifyingAccountsDisclosureLineItems', window );"><strong>Valuation and Qualifying Accounts</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
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<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ValuationAllowancesAndReservesBalance', window );">Balance at Beginning of Period</a></td>
<td class="nump">118,443<span></span>
</td>
<td class="nump">130,053<span></span>
</td>
<td class="nump">114,955<span></span>
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<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ValuationAllowancesAndReservesChargedToCostAndExpense', window );">Charged (Credited) to Costs and Expenses</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">513<span></span>
</td>
<td class="nump">15,098<span></span>
</td>
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<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ValuationAllowancesAndReservesDeductions', window );">Deductions</a></td>
<td class="num">(2,389)<span></span>
</td>
<td class="num">(12,123)<span></span>
</td>
<td class="text">&#160;<span></span>
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<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ValuationAllowancesAndReservesBalance', window );">Balance at End of Period</a></td>
<td class="nump">$ 116,054<span></span>
</td>
<td class="nump">$ 118,443<span></span>
</td>
<td class="nump">$ 130,053<span></span>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_ValuationAndQualifyingAccountsDisclosureLineItems</td>
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<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of valuation and qualifying accounts and reserves.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section S99<br> -Paragraph 4<br> -Subparagraph (SX 210.12-09(Column B))<br> -URI http://asc.fasb.org/extlink&amp;oid=120395691&amp;loc=d3e24092-122690<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section S99<br> -Paragraph 4<br> -Subparagraph (SX 210.12-09(Column E))<br> -URI http://asc.fasb.org/extlink&amp;oid=120395691&amp;loc=d3e24092-122690<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
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      id="Tb_74Ye32wcL0KnWzB_jM7GZQ">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Note 1 &#x2014; Significant Accounting Policies&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(a) Description of Business&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;"&gt;Veeco Instruments Inc. (together with its consolidated subsidiaries, &#x201c;Veeco,&#x201d; or the &#x201c;Company&#x201d;) operates in a &lt;/span&gt;&lt;span style="-sec-ix-hidden:Hidden_GMHOS9YmP0ixHp5ywkdWDQ;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt;single&lt;/span&gt;&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; segment: the development, manufacture, sales, and support of semiconductor and thin film process equipment primarily sold to make electronic devices.&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(b) Basis of Presentation&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;"&gt;The accompanying audited Consolidated Financial Statements of the Company have been prepared in accordance with United States generally accepted accounting principles (&#x201c;GAAP&#x201d;). The Company reports interim quarters on a &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;13&lt;/span&gt;&lt;span style="font-size:10pt;"&gt;-week basis ending on the last Sunday of each period, which is determined at the start of each year. The Company&#x2019;s fourth quarter always ends on the last day of the calendar year, December 31. During 2021 the interim quarters ended on April 4, July 4, and October 3, and during 2020 the interim quarters ended on March 29, June 28, and September 27. The Company reports these interim quarters as March 31, June 30, and September 30 in its interim consolidated financial statements.&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(c) Use of Estimates&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The preparation of financial statements in conformity with GAAP requires management to make estimates and assumptions that affect the amounts reported in the financial statements and accompanying notes. Although these estimates are based on management&#x2019;s knowledge of current events and actions it may undertake in the future, these estimates may ultimately differ from actual results. Significant items subject to such estimates and assumptions include: (i) stand-alone selling prices for the Company&#x2019;s products and services; (ii) allowances for doubtful accounts; (iii) inventory obsolescence; (iv) the useful lives and expected future cash flows of property, plant, and equipment and identifiable intangible assets; (v) the fair value of the Company&#x2019;s reporting unit and related goodwill; (vi) investment valuations and the valuation of derivatives, deferred tax assets, and assets acquired in business combinations; (vii) the recoverability of long-lived assets; (viii) liabilities for product warranty and legal contingencies; (ix) share-based compensation; (x) lease term and incremental borrowing rates used in determining operating lease assets and liabilities; and (xi) income tax uncertainties.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(d) Principles of Consolidation&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The Consolidated Financial Statements include the accounts of the Company and its subsidiaries. Intercompany balances and transactions have been eliminated in consolidation. Companies acquired during each reporting period are reflected in the results of the Company effective from their respective dates of acquisition through the end of the reporting period.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(e) Foreign Currencies&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Assets and liabilities of the Company&#x2019;s foreign subsidiaries that operate using functional currencies other than the U.S. dollar are translated using the exchange rates in effect at the balance sheet date. Results of operations are translated using monthly average exchange rates. Adjustments arising from the translation of the foreign currency financial statements of the Company&#x2019;s subsidiaries into U.S. dollars, including intercompany transactions of a long-term nature, are reported as currency translation adjustments in &#x201c;Accumulated other comprehensive income&#x201d; in the Consolidated Balance Sheets. Foreign currency transaction gains or losses are included in &#x201c;Other operating expense (income), net&#x201d; in the Consolidated Statements of Operations.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(f) Revenue Recognition&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Revenue is recognized upon the transfer of control of the promised product or service to the customer in an amount that reflects the consideration the Company expects to receive in exchange for such product or service. The Company&#x2019;s contracts with customers generally do not contain variable consideration. In the rare instances where variable &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;consideration is included, the Company estimates the amount of variable consideration and determines what portion of that, if any, has a high probability of significant subsequent revenue reversal, and if so, that amount is excluded from the transaction price. The Company&#x2019;s contracts with customers frequently contain multiple deliverables, such as systems, upgrades, components, spare parts, installation, maintenance, and service plans. Judgment is required to properly identify the performance obligations within a contract and to determine how the revenue should be allocated among the performance obligations. The Company also evaluates whether multiple transactions with the same customer or related parties should be considered part of a single contract based on an assessment of whether the contracts or agreements are negotiated or executed within a short time frame of each other or if there are indicators that the contracts are negotiated in contemplation of one another. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160; &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;When there are separate units of accounting, the Company allocates revenue to each performance obligation on a relative stand-alone selling price basis. The stand-alone selling prices are determined based on the prices at which the Company separately sells the systems, upgrades, components, spare parts, installation, maintenance, and service plans. For items that are not sold separately, the Company estimates stand-alone selling prices generally using an expected cost plus margin approach. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160; &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Most of the Company&#x2019;s revenue is recognized at a point in time when the performance obligation is satisfied. The Company considers many facts when evaluating each of its sales arrangements to determine the timing of revenue recognition, including its contractual obligations and the nature of the customer&#x2019;s post-delivery acceptance provisions. The Company&#x2019;s system sales arrangements, including certain upgrades, generally include field acceptance provisions that may include functional or mechanical test procedures. For many of these arrangements, a customer source inspection of the system is performed in the Company&#x2019;s facility, test data is sent to the customer documenting that the system is functioning to the agreed upon specifications prior to delivery, or other quality assurance testing is performed internally to ensure system functionality prior to shipment. Historically, such source inspection or test data replicates the field acceptance provisions that are performed at the customer&#x2019;s site prior to final acceptance of the system. When the Company objectively demonstrates that the criteria specified in the contractual acceptance provisions are achieved prior to delivery either through customer testing or the Company&#x2019;s historical experience of its tools meeting specifications, transfer of control of the product to the customer is considered to have occurred and revenue is recognized upon system delivery since there is no substantive contingency remaining related to the acceptance provisions at that date. For new products, new applications of existing products, or for products with substantive customer acceptance provisions where the Company cannot objectively demonstrate that the criteria specified in the contractual acceptance provisions have been achieved prior to delivery, revenue and the associated costs are deferred. The Company recognizes such revenue and costs upon obtaining objective evidence that the acceptance provisions can be achieved, assuming all other revenue recognition criteria have been met. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160; &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;In certain cases, the Company&#x2019;s contracts with customers contain a billing retention, which is billed by the Company and payable by the customer when field acceptance provisions are completed. Revenue recognized in advance of the amount that has been billed is recorded as a contract asset on the Consolidated Balance Sheets. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160; &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The Company recognizes revenue related to maintenance and service contracts over time based upon the respective contract term. Installation revenue is recognized over time as the installation services are performed. The Company recognizes revenue from the sales of components, spare parts, and specified service engagements at a point in time, which is typically consistent with the time of delivery in accordance with the terms of the applicable sales arrangement. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160; &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;"&gt;The Company may receive customer deposits on system transactions. The timing of the transfer of goods or services related to the deposits is either at the discretion of the customer or expected to be within one year from the deposit receipt. As such, the Company does not adjust transaction prices for the time value of money. Incremental direct costs incurred related to the acquisition of a customer contract, such as sales commissions, are expensed as incurred since the expected performance period is &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;one&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; year or less. &lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160; &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The Company has elected to treat shipping and handling costs, including those costs incurred to move, package, and prepare the Company&#x2019;s products for shipment and to move the products to a customer&#x2019;s designated location, as a fulfillment activity, and the Company includes such costs in &#x201c;Cost of sales&#x201d; in the Consolidated Statements of Operations as incurred. These costs are generally comprised of payments to third-party shippers. Taxes assessed by governmental authorities that are collected by the Company from a customer are excluded from revenue. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(g) Warranty Costs&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;"&gt;The Company typically provides standard warranty coverage on its systems for &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;one year&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; from the date of final acceptance by providing labor and parts necessary to repair the systems during the warranty period. The Company records the estimated warranty cost when revenue is recognized on the related system. Warranty cost is included in &#x201c;Cost of sales&#x201d; in the Consolidated Statements of Operations. The estimated warranty cost is based on the Company&#x2019;s historical experience with its systems and regional labor costs. The Company calculates the average service hours by region and parts expense per system utilizing actual service records to determine the estimated warranty charge. The Company updates its warranty estimates on a quarterly basis when the actual product performance or field expense differs from original estimates.&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(h) Research and Development Costs&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Research and development costs are expensed as incurred and include charges for the development of new technology and the transition of existing technology into new products or services.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(i) Advertising Expense&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The cost of advertising is expensed as incurred and totaled $0.3 million, $0.4 million, and $0.5 million for the years ended December 31, 2021, 2020, and 2019, respectively.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(j) Accounting for Share-based Compensation&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Share-based awards exchanged for employee services are accounted for under the fair value method. Accordingly, share-based compensation cost is measured at the grant date based on the estimated fair value of the award. The expense for awards is recognized over the employee&#x2019;s requisite service period (generally the vesting period of the award). The Company has elected to treat awards with only service conditions and with graded vesting as one award. Consequently, the total compensation expense is recognized straight-line over the entire vesting period, so long as the compensation cost recognized at any date at least equals the portion of the grant date fair value of the award that is vested at that date.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;In addition to stock options, restricted share awards (&#x201c;RSAs&#x201d;) and restricted stock units (&#x201c;RSUs&#x201d;) with time-based vesting, the Company grants performance share units and awards (&#x201c;PSUs&#x201d; and &#x201c;PSAs&#x201d;) that have either performance or market conditions. Compensation cost for PSUs and PSAs with performance conditions is recognized over the requisite service period based on the timing and expected level of achievement of the performance targets. A change in the assessment of performance attainment prior to the conclusion of the performance period is recognized in the period of the change in estimate. Compensation cost for PSUs and PSAs with market conditions is recognized over the requisite service period regardless of the expected level of achievement. For all PSUs and PSAs, the number of shares issued to the employee at the conclusion of the service period may vary from the original target based upon the level of attainment of the performance or market conditions.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The Company uses the Black-Scholes option-pricing model to compute the estimated fair value of option awards and purchase rights under the Employee Stock Purchase Plan. The Company uses a Monte Carlo simulation to compute the estimated fair value of awards with market conditions. The Black-Scholes model and Monte Carlo simulation include assumptions regarding dividend yields, expected volatility, expected option term, and risk-free interest rates. See Note 13, &#x201c;Stock Plans,&#x201d; for additional information. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(k) Income Taxes&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Income taxes are accounted for under the asset and liability method. Deferred tax assets and liabilities are recognized for the future tax consequences attributable to differences between the financial statement carrying amounts of existing assets and liabilities and their respective tax bases and operating loss and tax credit carryforwards. Deferred tax assets and liabilities are measured using enacted tax rates expected to apply to taxable income in the years in which those temporary differences are expected to be recovered or settled. The effect on deferred tax assets and liabilities from a change in tax rate is recognized in income in the period that includes the enactment date. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(l) Concentration of Credit Risk&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Financial instruments that potentially subject the Company to concentrations of credit risk consist primarily of cash and cash equivalents, investments, derivative financial instruments used in hedging activities, and accounts receivable. The Company invests in a variety of financial instruments and, by policy, limits the amount of credit exposure with any one financial institution or commercial issuer. Historically, the Company has not experienced any material credit losses on its investments. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The Company maintains an allowance reserve for potentially uncollectible accounts for estimated losses resulting from the inability of its customers to make required payments. The Company evaluates its allowance for doubtful accounts based on a combination of factors. In circumstances where specific invoices are deemed to be uncollectible, the Company provides a specific allowance for bad debt against the amount due to reduce the net recognized receivable to the amount reasonably expected to be collected. The Company also provides allowances based on its write-off history. Finally, the Company also considers its current expectations of future economic conditions, including the impact of COVID-19, when estimating its allowance for doubtful accounts. The allowance for doubtful accounts totaled $0.7 million at both December 31, 2021 and 2020.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;"&gt;To further mitigate the Company&#x2019;s exposure to uncollectable accounts, the Company may request certain customers provide a negotiable irrevocable letter of credit drawn on a reputable financial institution. These irrevocable letters of credit are typically issued to mature between &lt;/span&gt;&lt;span style="-sec-ix-hidden:Hidden_lLLL67cC-kS_kJateyYGvg;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt;zero&lt;/span&gt;&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; and &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;90 days&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; from the date the documentation requirements are met, typically when a system ships or upon receipt of final acceptance from the customer. The Company, at its discretion, may monetize these letters of credit on a non-recourse basis after they become negotiable but before maturity. The fees associated with the monetization are included in &#x201c;Selling, general, and administrative&#x201d; in the Consolidated Statements of Operations and were immaterial for the years ended December 31, 2021, 2020, and 2019.&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(m) Fair Value of Financial Instruments&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The carrying amounts of financial instruments, including cash equivalents, accounts receivable, accounts payable, and accrued expenses reflected in the consolidated financial statements approximate fair value due to their short-term maturities. The fair value of debt for footnote disclosure purposes, including current maturities, if any, is estimated using recently quoted market prices of the instrument, or if not available, a discounted cash flow analysis based on the estimated current incremental borrowing rates for similar types of instruments.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(n) Cash, Cash Equivalents, and Short-term Investments&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;All financial instruments purchased with an original maturity of three months or less at the time of purchase are considered cash equivalents. Such items may include liquid money market funds, certificate of deposit and time deposit accounts, U.S. treasuries, government agency securities, and corporate debt. Investments that are classified as cash equivalents are carried at cost, which approximates fair value. The Company&#x2019;s cash and cash equivalents includes $41.7 million and $86.2 million of cash equivalents at December 31, 2021 and 2020, respectively.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;A portion of the Company&#x2019;s cash and cash equivalents is held by its subsidiaries throughout the world, frequently in each subsidiary&#x2019;s respective functional currency, which is typically the U.S. dollar. Approximately 32% and 31% of cash and cash equivalents were maintained outside the United States at December 31, 2021 and 2020, respectively.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Short-term investments consist of marketable debt securities, and are generally classified as available-for-sale for use in current operations, if required, and are reported at fair value, with unrealized gains and losses, net of tax, presented as a separate component of stockholders&#x2019; equity under the caption &#x201c;Accumulated other comprehensive income&#x201d; on the Consolidated Balance Sheets. These securities can include U.S. treasuries, government agency securities, corporate debt, and commercial paper, all with maturities of greater than three months when purchased. All realized gains and losses and unrealized losses resulting from declines in fair value that are other than temporary are included in &#x201c;Other operating expense (income), net&#x201d; in the Consolidated Statements of Operations. The specific identification method is used to determine the realized gains and losses on investments. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Non-marketable equity securities are equity securities without readily observable market prices and are included in &#x201c;Other assets&#x201d; in the Consolidated Balance Sheets. Non-marketable securities are measured at cost, adjusted for changes in observable prices minus impairment. Changes in fair value and impairment charges are included in &#x201c;Other income (expense), net&#x201d; in the Consolidated Statements of Operations.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(o) Inventories&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Inventories are stated at the lower of cost or net realizable value, with cost determined on a first-in, first-out basis. Each quarter the Company assesses the valuation and recoverability of all inventories: materials (raw materials, spare parts, and service inventory); work-in-process; and finished goods. Obsolete inventory or inventory in excess of management&#x2019;s estimated usage requirement is written down to its estimated net realizable value if less than cost. The Company evaluates usage requirements by analyzing historical usage, anticipated demand, alternative uses of materials, and other qualitative factors. Unanticipated changes in demand for the Company&#x2019;s products may require a write down of inventory, which would be reflected in cost of sales in the period the revision is made. Inventory acquired as part of a business combination is recorded at fair value on the date of acquisition.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(p) Business Combinations&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The Company allocates the fair value of the purchase consideration of the Company&#x2019;s acquisitions to the tangible assets, intangible assets, including in-process research and development (&#x201c;IPR&amp;amp;D&#x201d;), if any, and liabilities assumed, based on estimated fair values. The excess of the fair value of purchase consideration over the fair values of these identifiable assets and liabilities is recorded as goodwill. Acquisition-related expenses are recognized separately from the business combination and are expensed as incurred. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(q) Goodwill and Indefinite-Lived Intangible Assets&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Goodwill is an asset representing the future economic benefits arising from assets acquired in a business combination that are not individually identified and separately recognized. Goodwill is measured as the excess of the consideration transferred over the net fair value of identifiable assets acquired and liabilities assumed. Intangible assets with indefinite useful lives are measured at their respective fair values on the acquisition date. Intangible assets related to IPR&amp;amp;D projects are considered to be indefinite-lived until the completion or abandonment of the associated research and development (&#x201c;R&amp;amp;D&#x201d;) efforts. If and when development is complete, the associated assets would be deemed long-lived and would then be amortized based on their respective estimated useful lives at that point in time. Goodwill and indefinite-lived intangibles are not amortized into results of operations but instead are evaluated for impairment. The Company performs the evaluation in the beginning of the fourth quarter of each year or more frequently if impairment indicators arise.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;In testing goodwill for impairment, the Company may first perform a qualitative assessment of whether it is more likely than not that the reporting unit&#x2019;s fair value is less than its carrying amount, and, if so, the Company then quantitatively compares the fair value of the reporting unit to its carrying amount. If the fair value exceeds the carrying amount, goodwill is not impaired. If the carrying amount exceeds fair value, the Company then records an impairment loss equal to the difference, up to the carrying value of goodwill.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;"&gt;The Company determines the fair value of its reporting unit based on a reconciliation of the fair value of the reporting unit to the Company&#x2019;s adjusted market capitalization. The adjusted market capitalization is calculated by multiplying the average share price of the Company&#x2019;s common stock for the last &lt;/span&gt;&lt;span style="-sec-ix-hidden:Hidden_zAaerYZD70-O1b7vxibxZA;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt;ten&lt;/span&gt;&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; trading days prior to the measurement date by the number of outstanding common shares and adding a control premium. The control premium is estimated using historical transactions in similar industries.&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;In testing indefinite-lived intangible assets for impairment, the Company may first perform a qualitative assessment of whether it is more likely than not that the fair value of the indefinite-lived intangible asset is less than its carrying amount, and, if so, the Company then quantitatively compares the fair value of the indefinite-lived intangible asset to its carrying amount. The Company determines the fair value of its indefinite-lived intangible assets using a discounted cash flow method.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(r) Long-lived Assets&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Long-lived intangible assets consist of purchased technology, customer relationships, patents, trademarks and tradenames, and backlog and are initially recorded at fair value. Long-lived intangible assets are amortized over their estimated useful lives in a method reflecting the pattern in which the economic benefits are consumed or straight-lined if such pattern cannot be reliably determined.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Property, plant, and equipment are recorded at cost. Depreciation expense is calculated based on the estimated useful lives of the assets by using the straight-line method. Amortization of leasehold improvements is recognized using the straight-line method over the shorter of the remaining lease term or the estimated useful lives of the improvements.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Long-lived assets are reviewed for impairment whenever events or changes in circumstances indicate that the carrying amount of an asset may not be recoverable. If circumstances require a long-lived asset or asset group be tested for possible impairment, a recoverability test is performed utilizing undiscounted cash flows expected to be generated by that asset or asset group compared to its carrying amount. If the carrying amount of the long-lived asset or asset group is not recoverable on an undiscounted cash flow basis, impairment is recognized to the extent the carrying amount exceeds its fair value. Fair value is determined through various valuation techniques including discounted cash flow models or, when available, quoted market values and third-party appraisals.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(s) Leases&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Upon the adoption of ASC Topic 842, &lt;i style="font-style:italic;"&gt;Leases&lt;/i&gt; (&#x201c;ASC 842&#x201d;) as of January 1, 2019, the Company determines at contract inception if an arrangement is a lease, or contains a lease, of an identified asset for which the Company has the right to obtain substantially all of the economic benefits from its use and the right to direct its use. Right-of-use (&#x201c;ROU&#x201d;) assets represent the Company&#x2019;s right to use an underlying asset for the lease term, while lease liabilities represent the Company&#x2019;s obligation to make lease payments arising from the lease. Operating lease ROU assets and liabilities are recognized at lease commencement date based on the present value of lease payments over the lease term. The implicit discount rate in the Company&#x2019;s leases generally cannot readily be determined, and therefore the Company uses its incremental borrowing rate based on information available at lease commencement date in determining the present value of future payments. The Company has options to renew or terminate certain leases. These options are included in the determination of lease term when it is reasonably certain that the Company will exercise such options. The Company does not separate lease and non-lease components in determining ROU assets or lease liabilities for real estate leases. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Additionally, the Company does not recognize ROU assets or lease liabilities for leases with original terms or renewals of one year or less.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(t) Recently Adopted Accounting Standards&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;"&gt;The Company &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;adopted&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; ASU 2019-12:&#160;&lt;/span&gt;&lt;i style="font-size:10pt;font-style:italic;"&gt;Income Taxes (Topic 740): Simplifying the Accounting for Income Taxes &lt;/i&gt;&lt;span style="font-size:10pt;"&gt;in the second quarter of 2020, effective as of the beginning of fiscal year 2020. 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The adoption did not have a material impact on the Company&#x2019;s consolidated financial statements as of the date of adoption.&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(u) Recent Accounting Pronouncements Not Yet Adopted&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;"&gt;In August 2020, the FASB issued ASU 2020-06:&#160;&lt;/span&gt;&lt;i style="font-size:10pt;font-style:italic;"&gt;Debt &#x2013; Debt with Conversion and Other Options (Subtopic 470-20) and Derivatives and Hedging &#x2013; Contracts in Entity&#x2019;s Own Equity (Subtopic 815-40): Accounting for Convertible Instruments and Contracts in an Entity&#x2019;s Own Equity&lt;/i&gt;&lt;span style="font-size:10pt;"&gt;. This standard simplifies the accounting for convertible debt instruments by removing the separation models for convertible debt with a cash conversion feature, as well as convertible instruments with a beneficial conversion feature. As a result, entities will account for a convertible debt instrument wholly as debt, unless certain other conditions are met. The elimination of these models will reduce non-cash interest expense for entities that have issued a convertible instrument that was within the scope of those models before the adoption of ASU 2020-06. Additionally, ASU 2020-06&#160;requires the application of the if-converted method for calculating diluted earnings per share, and precludes the use of the treasury stock method for certain debt instruments. The provisions of ASU 2020-06&#160;are applicable for fiscal years beginning after December 15, 2021.&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;The Company&#x2019;s 2023 Notes, 2025 Notes, and 2027 Notes all are currently accounted for using the separation models for convertible debt with a cash conversion feature, and therefore upon &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;adoption&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; of ASU 2020-06 in the first quarter of 2022, the Company expects a decrease in non-cash interest expense. Additionally, the Company will be required to use the if-converted method for its current convertible debt when calculating diluted earnings (loss) per share, which will result in an increase in income available to common shareholders, as well as an increase in diluted shares outstanding. 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    <us-gaap:ShareBasedCompensationOptionAndIncentivePlansPolicy
      contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw"
      id="Tb_lRt__98nx0CI0sFUBkhhLg">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(j) Accounting for Share-based Compensation&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Share-based awards exchanged for employee services are accounted for under the fair value method. Accordingly, share-based compensation cost is measured at the grant date based on the estimated fair value of the award. The expense for awards is recognized over the employee&#x2019;s requisite service period (generally the vesting period of the award). The Company has elected to treat awards with only service conditions and with graded vesting as one award. Consequently, the total compensation expense is recognized straight-line over the entire vesting period, so long as the compensation cost recognized at any date at least equals the portion of the grant date fair value of the award that is vested at that date.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;In addition to stock options, restricted share awards (&#x201c;RSAs&#x201d;) and restricted stock units (&#x201c;RSUs&#x201d;) with time-based vesting, the Company grants performance share units and awards (&#x201c;PSUs&#x201d; and &#x201c;PSAs&#x201d;) that have either performance or market conditions. Compensation cost for PSUs and PSAs with performance conditions is recognized over the requisite service period based on the timing and expected level of achievement of the performance targets. A change in the assessment of performance attainment prior to the conclusion of the performance period is recognized in the period of the change in estimate. Compensation cost for PSUs and PSAs with market conditions is recognized over the requisite service period regardless of the expected level of achievement. For all PSUs and PSAs, the number of shares issued to the employee at the conclusion of the service period may vary from the original target based upon the level of attainment of the performance or market conditions.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The Company uses the Black-Scholes option-pricing model to compute the estimated fair value of option awards and purchase rights under the Employee Stock Purchase Plan. The Company uses a Monte Carlo simulation to compute the estimated fair value of awards with market conditions. The Black-Scholes model and Monte Carlo simulation include assumptions regarding dividend yields, expected volatility, expected option term, and risk-free interest rates. See Note 13, &#x201c;Stock Plans,&#x201d; for additional information. &lt;/p&gt;</us-gaap:ShareBasedCompensationOptionAndIncentivePlansPolicy>
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      id="Tb_Q3pLf96YQUaxByeaukObGw">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(k) Income Taxes&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Income taxes are accounted for under the asset and liability method. Deferred tax assets and liabilities are recognized for the future tax consequences attributable to differences between the financial statement carrying amounts of existing assets and liabilities and their respective tax bases and operating loss and tax credit carryforwards. Deferred tax assets and liabilities are measured using enacted tax rates expected to apply to taxable income in the years in which those temporary differences are expected to be recovered or settled. The effect on deferred tax assets and liabilities from a change in tax rate is recognized in income in the period that includes the enactment date. &lt;/p&gt;</us-gaap:IncomeTaxPolicyTextBlock>
    <us-gaap:ConcentrationRiskCreditRisk
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      id="Tb_ArnD36ypLkiJ6UrOAwz5qw">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(l) Concentration of Credit Risk&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Financial instruments that potentially subject the Company to concentrations of credit risk consist primarily of cash and cash equivalents, investments, derivative financial instruments used in hedging activities, and accounts receivable. The Company invests in a variety of financial instruments and, by policy, limits the amount of credit exposure with any one financial institution or commercial issuer. Historically, the Company has not experienced any material credit losses on its investments. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The Company maintains an allowance reserve for potentially uncollectible accounts for estimated losses resulting from the inability of its customers to make required payments. The Company evaluates its allowance for doubtful accounts based on a combination of factors. In circumstances where specific invoices are deemed to be uncollectible, the Company provides a specific allowance for bad debt against the amount due to reduce the net recognized receivable to the amount reasonably expected to be collected. The Company also provides allowances based on its write-off history. Finally, the Company also considers its current expectations of future economic conditions, including the impact of COVID-19, when estimating its allowance for doubtful accounts. The allowance for doubtful accounts totaled $0.7 million at both December 31, 2021 and 2020.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;"&gt;To further mitigate the Company&#x2019;s exposure to uncollectable accounts, the Company may request certain customers provide a negotiable irrevocable letter of credit drawn on a reputable financial institution. These irrevocable letters of credit are typically issued to mature between &lt;/span&gt;&lt;span style="-sec-ix-hidden:Hidden_lLLL67cC-kS_kJateyYGvg;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt;zero&lt;/span&gt;&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; and &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;90 days&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; from the date the documentation requirements are met, typically when a system ships or upon receipt of final acceptance from the customer. The Company, at its discretion, may monetize these letters of credit on a non-recourse basis after they become negotiable but before maturity. The fees associated with the monetization are included in &#x201c;Selling, general, and administrative&#x201d; in the Consolidated Statements of Operations and were immaterial for the years ended December 31, 2021, 2020, and 2019.&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;</us-gaap:ConcentrationRiskCreditRisk>
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    <us-gaap:FairValueOfFinancialInstrumentsPolicy
      contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw"
      id="Tb_zg8dr-B9VkS-_uHPFiQ2TA">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(m) Fair Value of Financial Instruments&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The carrying amounts of financial instruments, including cash equivalents, accounts receivable, accounts payable, and accrued expenses reflected in the consolidated financial statements approximate fair value due to their short-term maturities. The fair value of debt for footnote disclosure purposes, including current maturities, if any, is estimated using recently quoted market prices of the instrument, or if not available, a discounted cash flow analysis based on the estimated current incremental borrowing rates for similar types of instruments.&lt;/p&gt;</us-gaap:FairValueOfFinancialInstrumentsPolicy>
    <veco:CashCashEquivalentsAndShortTermInvestmentsPolicyTextBlock
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      id="Tb_E5lQhRb5yUuf-yyzeLrbyw">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(n) Cash, Cash Equivalents, and Short-term Investments&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;All financial instruments purchased with an original maturity of three months or less at the time of purchase are considered cash equivalents. Such items may include liquid money market funds, certificate of deposit and time deposit accounts, U.S. treasuries, government agency securities, and corporate debt. Investments that are classified as cash equivalents are carried at cost, which approximates fair value. The Company&#x2019;s cash and cash equivalents includes $41.7 million and $86.2 million of cash equivalents at December 31, 2021 and 2020, respectively.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;A portion of the Company&#x2019;s cash and cash equivalents is held by its subsidiaries throughout the world, frequently in each subsidiary&#x2019;s respective functional currency, which is typically the U.S. dollar. Approximately 32% and 31% of cash and cash equivalents were maintained outside the United States at December 31, 2021 and 2020, respectively.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Short-term investments consist of marketable debt securities, and are generally classified as available-for-sale for use in current operations, if required, and are reported at fair value, with unrealized gains and losses, net of tax, presented as a separate component of stockholders&#x2019; equity under the caption &#x201c;Accumulated other comprehensive income&#x201d; on the Consolidated Balance Sheets. These securities can include U.S. treasuries, government agency securities, corporate debt, and commercial paper, all with maturities of greater than three months when purchased. All realized gains and losses and unrealized losses resulting from declines in fair value that are other than temporary are included in &#x201c;Other operating expense (income), net&#x201d; in the Consolidated Statements of Operations. The specific identification method is used to determine the realized gains and losses on investments. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Non-marketable equity securities are equity securities without readily observable market prices and are included in &#x201c;Other assets&#x201d; in the Consolidated Balance Sheets. Non-marketable securities are measured at cost, adjusted for changes in observable prices minus impairment. Changes in fair value and impairment charges are included in &#x201c;Other income (expense), net&#x201d; in the Consolidated Statements of Operations.&lt;/p&gt;</veco:CashCashEquivalentsAndShortTermInvestmentsPolicyTextBlock>
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      unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA">41700000</us-gaap:CashEquivalentsAtCarryingValue>
    <us-gaap:CashEquivalentsAtCarryingValue
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    <us-gaap:InventoryPolicyTextBlock
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      id="Tb_7dxXr1StikKXQf150pgFyg">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(o) Inventories&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Inventories are stated at the lower of cost or net realizable value, with cost determined on a first-in, first-out basis. Each quarter the Company assesses the valuation and recoverability of all inventories: materials (raw materials, spare parts, and service inventory); work-in-process; and finished goods. Obsolete inventory or inventory in excess of management&#x2019;s estimated usage requirement is written down to its estimated net realizable value if less than cost. The Company evaluates usage requirements by analyzing historical usage, anticipated demand, alternative uses of materials, and other qualitative factors. Unanticipated changes in demand for the Company&#x2019;s products may require a write down of inventory, which would be reflected in cost of sales in the period the revision is made. Inventory acquired as part of a business combination is recorded at fair value on the date of acquisition.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;</us-gaap:InventoryPolicyTextBlock>
    <us-gaap:BusinessCombinationsPolicy
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      id="Tb_QtoS7IgEsEe264FHpIxL8w">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(p) Business Combinations&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The Company allocates the fair value of the purchase consideration of the Company&#x2019;s acquisitions to the tangible assets, intangible assets, including in-process research and development (&#x201c;IPR&amp;amp;D&#x201d;), if any, and liabilities assumed, based on estimated fair values. The excess of the fair value of purchase consideration over the fair values of these identifiable assets and liabilities is recorded as goodwill. Acquisition-related expenses are recognized separately from the business combination and are expensed as incurred. &lt;/p&gt;</us-gaap:BusinessCombinationsPolicy>
    <us-gaap:GoodwillAndIntangibleAssetsIntangibleAssetsIndefiniteLivedPolicy
      contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw"
      id="Tb_IUeTSNCt90qiukWt-rSzog">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(q) Goodwill and Indefinite-Lived Intangible Assets&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Goodwill is an asset representing the future economic benefits arising from assets acquired in a business combination that are not individually identified and separately recognized. Goodwill is measured as the excess of the consideration transferred over the net fair value of identifiable assets acquired and liabilities assumed. Intangible assets with indefinite useful lives are measured at their respective fair values on the acquisition date. Intangible assets related to IPR&amp;amp;D projects are considered to be indefinite-lived until the completion or abandonment of the associated research and development (&#x201c;R&amp;amp;D&#x201d;) efforts. If and when development is complete, the associated assets would be deemed long-lived and would then be amortized based on their respective estimated useful lives at that point in time. Goodwill and indefinite-lived intangibles are not amortized into results of operations but instead are evaluated for impairment. The Company performs the evaluation in the beginning of the fourth quarter of each year or more frequently if impairment indicators arise.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;In testing goodwill for impairment, the Company may first perform a qualitative assessment of whether it is more likely than not that the reporting unit&#x2019;s fair value is less than its carrying amount, and, if so, the Company then quantitatively compares the fair value of the reporting unit to its carrying amount. If the fair value exceeds the carrying amount, goodwill is not impaired. If the carrying amount exceeds fair value, the Company then records an impairment loss equal to the difference, up to the carrying value of goodwill.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;"&gt;The Company determines the fair value of its reporting unit based on a reconciliation of the fair value of the reporting unit to the Company&#x2019;s adjusted market capitalization. The adjusted market capitalization is calculated by multiplying the average share price of the Company&#x2019;s common stock for the last &lt;/span&gt;&lt;span style="-sec-ix-hidden:Hidden_zAaerYZD70-O1b7vxibxZA;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt;ten&lt;/span&gt;&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; trading days prior to the measurement date by the number of outstanding common shares and adding a control premium. The control premium is estimated using historical transactions in similar industries.&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;In testing indefinite-lived intangible assets for impairment, the Company may first perform a qualitative assessment of whether it is more likely than not that the fair value of the indefinite-lived intangible asset is less than its carrying amount, and, if so, the Company then quantitatively compares the fair value of the indefinite-lived intangible asset to its carrying amount. The Company determines the fair value of its indefinite-lived intangible assets using a discounted cash flow method.&lt;/p&gt;</us-gaap:GoodwillAndIntangibleAssetsIntangibleAssetsIndefiniteLivedPolicy>
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      id="Tb_tzQBPaL3JkWDz7KbrGvybg">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(r) Long-lived Assets&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Long-lived intangible assets consist of purchased technology, customer relationships, patents, trademarks and tradenames, and backlog and are initially recorded at fair value. Long-lived intangible assets are amortized over their estimated useful lives in a method reflecting the pattern in which the economic benefits are consumed or straight-lined if such pattern cannot be reliably determined.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Property, plant, and equipment are recorded at cost. Depreciation expense is calculated based on the estimated useful lives of the assets by using the straight-line method. Amortization of leasehold improvements is recognized using the straight-line method over the shorter of the remaining lease term or the estimated useful lives of the improvements.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Long-lived assets are reviewed for impairment whenever events or changes in circumstances indicate that the carrying amount of an asset may not be recoverable. If circumstances require a long-lived asset or asset group be tested for possible impairment, a recoverability test is performed utilizing undiscounted cash flows expected to be generated by that asset or asset group compared to its carrying amount. If the carrying amount of the long-lived asset or asset group is not recoverable on an undiscounted cash flow basis, impairment is recognized to the extent the carrying amount exceeds its fair value. Fair value is determined through various valuation techniques including discounted cash flow models or, when available, quoted market values and third-party appraisals.&lt;/p&gt;</veco:LongLivedAssetsAndCostMethodInvestmentsPolicyTextBlock>
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      id="Tb_u10Y4UJ-zUCONfqR5X2RYw">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(s) Leases&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Upon the adoption of ASC Topic 842, &lt;i style="font-style:italic;"&gt;Leases&lt;/i&gt; (&#x201c;ASC 842&#x201d;) as of January 1, 2019, the Company determines at contract inception if an arrangement is a lease, or contains a lease, of an identified asset for which the Company has the right to obtain substantially all of the economic benefits from its use and the right to direct its use. Right-of-use (&#x201c;ROU&#x201d;) assets represent the Company&#x2019;s right to use an underlying asset for the lease term, while lease liabilities represent the Company&#x2019;s obligation to make lease payments arising from the lease. Operating lease ROU assets and liabilities are recognized at lease commencement date based on the present value of lease payments over the lease term. The implicit discount rate in the Company&#x2019;s leases generally cannot readily be determined, and therefore the Company uses its incremental borrowing rate based on information available at lease commencement date in determining the present value of future payments. The Company has options to renew or terminate certain leases. These options are included in the determination of lease term when it is reasonably certain that the Company will exercise such options. The Company does not separate lease and non-lease components in determining ROU assets or lease liabilities for real estate leases. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Additionally, the Company does not recognize ROU assets or lease liabilities for leases with original terms or renewals of one year or less.&lt;/p&gt;</us-gaap:LesseeLeasesPolicyTextBlock>
    <us-gaap:NewAccountingPronouncementsPolicyPolicyTextBlock
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      id="Tb_zfe3sEOdM0qbYgHp5cux7w">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(t) Recently Adopted Accounting Standards&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;"&gt;The Company &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;adopted&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; ASU 2019-12:&#160;&lt;/span&gt;&lt;i style="font-size:10pt;font-style:italic;"&gt;Income Taxes (Topic 740): Simplifying the Accounting for Income Taxes &lt;/i&gt;&lt;span style="font-size:10pt;"&gt;in the second quarter of 2020, effective as of the beginning of fiscal year 2020. This ASU simplifies the accounting for income taxes by eliminating certain exceptions to the general principles and simplifying several aspects of ASC 740,&#160;&lt;/span&gt;&lt;i style="font-size:10pt;font-style:italic;"&gt;Income Taxes,&#160;&lt;/i&gt;&lt;span style="font-size:10pt;"&gt;including, but not limited to, requirements related to the following: a) exception to the incremental approach for intraperiod tax allocation; b) the tax basis step-up in goodwill obtained in a transaction that is not a business combination; c) ownership changes in investments - changes from a subsidiary to an equity method investment; d) separate financial statements of entities not subject to tax; e) interim-period accounting for enacted changes in tax law; and f) the year-to-date loss limitation in interim-period tax accounting. The adoption did not have a material impact on the Company&#x2019;s consolidated financial statements as of the date of adoption.&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(u) Recent Accounting Pronouncements Not Yet Adopted&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;"&gt;In August 2020, the FASB issued ASU 2020-06:&#160;&lt;/span&gt;&lt;i style="font-size:10pt;font-style:italic;"&gt;Debt &#x2013; Debt with Conversion and Other Options (Subtopic 470-20) and Derivatives and Hedging &#x2013; Contracts in Entity&#x2019;s Own Equity (Subtopic 815-40): Accounting for Convertible Instruments and Contracts in an Entity&#x2019;s Own Equity&lt;/i&gt;&lt;span style="font-size:10pt;"&gt;. This standard simplifies the accounting for convertible debt instruments by removing the separation models for convertible debt with a cash conversion feature, as well as convertible instruments with a beneficial conversion feature. As a result, entities will account for a convertible debt instrument wholly as debt, unless certain other conditions are met. The elimination of these models will reduce non-cash interest expense for entities that have issued a convertible instrument that was within the scope of those models before the adoption of ASU 2020-06. Additionally, ASU 2020-06&#160;requires the application of the if-converted method for calculating diluted earnings per share, and precludes the use of the treasury stock method for certain debt instruments. The provisions of ASU 2020-06&#160;are applicable for fiscal years beginning after December 15, 2021.&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;The Company&#x2019;s 2023 Notes, 2025 Notes, and 2027 Notes all are currently accounted for using the separation models for convertible debt with a cash conversion feature, and therefore upon &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;adoption&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; of ASU 2020-06 in the first quarter of 2022, the Company expects a decrease in non-cash interest expense. Additionally, the Company will be required to use the if-converted method for its current convertible debt when calculating diluted earnings (loss) per share, which will result in an increase in income available to common shareholders, as well as an increase in diluted shares outstanding. The Company expects to use the modified retrospective method of adoption, which will result in an increase in the carrying value of long-term debt of approximately &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;$44.3&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; million as of January 1, 2022, with a corresponding decrease in &lt;/span&gt;&lt;span style="-sec-ix-hidden:Hidden_4-EcM48rokawiYfmorI9eQ;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt;stockholders&#x2019; equity&lt;/span&gt;&lt;/span&gt;&lt;span style="font-size:10pt;"&gt;.&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The Company is evaluating other pronouncements recently issued but not yet adopted. The adoption of these pronouncements is not expected to have a material impact on our consolidated financial statements.&lt;/p&gt;</us-gaap:NewAccountingPronouncementsPolicyPolicyTextBlock>
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      id="Tb_TRT1ITtaNkaj_unZQ2OAvg">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Note 2 &#x2014; Income (Loss) Per Share&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Basic income (loss) per share is calculated by dividing net income (loss) by the weighted average number of shares outstanding during the period. Diluted income per share is calculated by dividing net income by the weighted average number of shares used to calculate basic income per share plus the weighted average number of common share equivalents outstanding during the period. The dilutive effect of outstanding options to purchase common stock and non-participating share-based awards is considered in diluted income per share by application of the treasury stock method. The dilutive effect of performance share units is included in diluted income per common share in the periods the performance targets have been achieved, or would have been achieved if the reporting date was the end of the contingency period. The Company has determined that it has the ability and intent to settle the principal amount of its convertible senior notes in cash, and the excess of the principal portion in shares of its common stock. As such, the Company accounts for the conversion spread using the treasury stock method, and the shares issuable upon conversion of the Notes are not included in the calculation of diluted earnings per share except to the extent that the conversion &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;value of the Notes exceeds their principal amount and if the effect would be dilutive. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The computations of basic and diluted income (loss) per share for the years ended December 31, 2021, 2020, and 2019 are as follows:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:61.83%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.83%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:33.36%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;For the year ended December&#160;31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.83%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.51%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.51%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.51%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2019&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="11" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.83%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:33.36%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in thousands, except per share amounts)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.83%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Net income (loss)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="-sec-ix-hidden:Hidden_Qk9Z5GG2gU2eiypiuu7Caw;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt;$&lt;/span&gt;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 26,038&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="-sec-ix-hidden:Hidden_E-eaVTHWMk6C3GCtkGb3ZA;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt;$&lt;/span&gt;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (8,391)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="-sec-ix-hidden:Hidden_PpBtoGgI3k6DXC5KpPJQgw;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt;$&lt;/span&gt;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (78,733)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.83%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Net income (loss) per common share:&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.83%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Basic&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 0.53&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (0.17)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (1.66)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.83%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Diluted&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 0.49&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (0.17)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (1.66)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.83%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.83%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Basic weighted average shares outstanding&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 49,073&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 48,362&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 47,482&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.83%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Effect of potentially dilutive share-based awards&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 1,090&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.83%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Dilutive effect of convertible notes &lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 3,480&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.83%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Diluted weighted average shares outstanding&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 53,643&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 48,362&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 47,482&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.83%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:61.83%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Common share equivalents excluded from the diluted weighted average shares outstanding since the Company incurred a net loss and their effect would be antidilutive&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 947&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 531&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.83%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Potentially dilutive shares excluded from the diluted calculation as their effect would be antidilutive&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 456&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 923&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 1,689&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:61.83%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Maximum potential shares to be issued for settlement of the 2023, 2025, and 2027 Notes excluded from the diluted calculation as their effect would be antidilutive due to a net loss or the fact that the conversion value of the Notes did not exceed their principal amount&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 8,421&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 17,753&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 8,618&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;</us-gaap:EarningsPerShareTextBlock>
    <us-gaap:ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock
      contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw"
      id="Tb_B5yXtaxfZkKy88irDkMyew">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:61.83%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.83%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:33.36%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;For the year ended December&#160;31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.83%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.51%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.51%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.51%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2019&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="11" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.83%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:33.36%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in thousands, except per share amounts)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.83%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Net income (loss)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="-sec-ix-hidden:Hidden_Qk9Z5GG2gU2eiypiuu7Caw;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt;$&lt;/span&gt;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 26,038&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="-sec-ix-hidden:Hidden_E-eaVTHWMk6C3GCtkGb3ZA;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt;$&lt;/span&gt;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (8,391)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="-sec-ix-hidden:Hidden_PpBtoGgI3k6DXC5KpPJQgw;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt;$&lt;/span&gt;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (78,733)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.83%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Net income (loss) per common share:&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.83%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Basic&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 0.53&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (0.17)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (1.66)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.83%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Diluted&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 0.49&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (0.17)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (1.66)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.83%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.83%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Basic weighted average shares outstanding&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 49,073&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 48,362&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 47,482&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.83%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Effect of potentially dilutive share-based awards&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 1,090&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.83%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Dilutive effect of convertible notes &lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 3,480&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.83%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Diluted weighted average shares outstanding&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 53,643&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 48,362&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 47,482&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.83%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:61.83%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Common share equivalents excluded from the diluted weighted average shares outstanding since the Company incurred a net loss and their effect would be antidilutive&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 947&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 531&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.83%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Potentially dilutive shares excluded from the diluted calculation as their effect would be antidilutive&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 456&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 923&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 1,689&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:61.83%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Maximum potential shares to be issued for settlement of the 2023, 2025, and 2027 Notes excluded from the diluted calculation as their effect would be antidilutive due to a net loss or the fact that the conversion value of the Notes did not exceed their principal amount&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 8,421&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 17,753&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 8,618&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;</us-gaap:ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock>
    <us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic
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      id="Tb__oD41Z9BdkuC5kiKVFQKIw">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Note 3 &#x2014; Fair Value Measurements&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Fair value is the price that would be received for an asset or the amount paid to transfer a liability in an orderly transaction between market participants. The Company is required to classify certain assets and liabilities based on the following fair value hierarchy:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"&gt;&lt;tr&gt;&lt;td style="width:18pt;"/&gt;&lt;td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;"&gt;&#x25cf;&lt;/td&gt;&lt;td style="padding:0pt;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt;Level 1: Quoted prices in active markets that are unadjusted and accessible at the measurement date for identical, unrestricted assets or liabilities;&lt;/span&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"&gt;&lt;tr&gt;&lt;td style="width:18pt;"/&gt;&lt;td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;"&gt;&#x25cf;&lt;/td&gt;&lt;td style="padding:0pt;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt;Level 2: Quoted prices for identical assets and liabilities in markets that are not active, quoted prices for similar assets and liabilities in active markets or financial instruments for which significant inputs are observable, either directly or indirectly; and&lt;/span&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"&gt;&lt;tr&gt;&lt;td style="width:18pt;"/&gt;&lt;td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;"&gt;&#x25cf;&lt;/td&gt;&lt;td style="padding:0pt;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt;Level 3: Prices or valuations that require inputs that are both significant to the fair value measurement and unobservable.&lt;/span&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;A financial instrument&#x2019;s level within the fair value hierarchy is based on the lowest level of any input that is significant to the fair value measurement. The Company has evaluated the estimated fair value of financial instruments using available market information and valuations as provided by third-party sources. The use of different market assumptions or estimation methodologies could have a significant effect on the estimated fair value amounts.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The following table presents the Company&#x2019;s assets that were measured at fair value on a recurring basis at December 31, 2021 and 2020:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:57.29%;margin:0pt;padding:0pt;"&gt;&lt;div 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style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:9.17%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Level&#160;1&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Level&#160;2&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.75%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Level&#160;3&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.19%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Total&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="13" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:40.6%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in&#160;thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December&#160;31, 2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.5%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;&lt;b style="font-weight:bold;"&gt;Cash equivalents&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Certificate of deposits and time deposits&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 41,544&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.5%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 41,544&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Money market cash&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 121&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 121&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"&gt;&lt;b style="font-weight:bold;"&gt;Total&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 41,665&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.5%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 41,665&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;&lt;b style="font-weight:bold;"&gt;Short-term investments&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;U.S. treasuries&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 51,095&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.5%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 51,095&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Government agency securities&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 12,052&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 12,052&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Corporate debt&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 40,035&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.5%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 40,035&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Commercial paper&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 999&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 999&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"&gt;&lt;b style="font-weight:bold;"&gt;Total&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 51,095&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 53,086&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.5%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 104,181&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 0pt 18pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;margin-left:0pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December&#160;31, 2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.5%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;&lt;b style="font-weight:bold;"&gt;Cash equivalents&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Certificate of deposits and time deposits&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 59,168&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.5%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 59,168&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Commercial paper&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 2,000&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 2,000&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;U.S. treasuries&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 24,997&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.5%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 24,997&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"&gt;&lt;b style="font-weight:bold;"&gt;Total&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 84,165&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 2,000&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.5%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 86,165&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;&lt;b style="font-weight:bold;"&gt;Short-term investments&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.5%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;U.S. treasuries&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 149,219&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 149,219&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Corporate debt&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 32,554&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.5%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 32,554&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Commercial paper&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 7,998&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 7,998&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"&gt;&lt;b style="font-weight:bold;"&gt;Total&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 149,219&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 40,552&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.5%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 189,771&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The Company&#x2019;s investments classified as Level 1 are based on quoted prices that are available in active markets, as well as certificates of deposits and time deposits that are classified as Level 1 due to their short-term nature. The Company&#x2019;s investments classified as Level 2 are valued using observable inputs to quoted market prices, benchmark yields, reported trades, broker/dealer quotes, or alternative pricing sources with reasonable levels of price transparency.&lt;/p&gt;</us-gaap:FairValueDisclosuresTextBlock>
    <us-gaap:FairValueAssetsMeasuredOnRecurringBasisTextBlock
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      id="Tb_tL34aIywZkyFnypAX9H-tw">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:57.29%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.5%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:9.17%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Level&#160;1&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Level&#160;2&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.75%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Level&#160;3&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.19%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Total&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="13" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:40.6%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in&#160;thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December&#160;31, 2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.5%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;&lt;b style="font-weight:bold;"&gt;Cash equivalents&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Certificate of deposits and time deposits&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 41,544&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.5%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 41,544&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Money market cash&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 121&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 121&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"&gt;&lt;b style="font-weight:bold;"&gt;Total&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 41,665&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.5%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 41,665&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;&lt;b style="font-weight:bold;"&gt;Short-term investments&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;U.S. treasuries&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 51,095&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.5%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 51,095&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Government agency securities&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 12,052&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 12,052&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Corporate debt&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 40,035&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.5%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 40,035&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Commercial paper&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 999&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 999&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"&gt;&lt;b style="font-weight:bold;"&gt;Total&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 51,095&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 53,086&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.5%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 104,181&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 0pt 18pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;margin-left:0pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December&#160;31, 2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.5%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;&lt;b style="font-weight:bold;"&gt;Cash equivalents&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Certificate of deposits and time deposits&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 59,168&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.5%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 59,168&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Commercial paper&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 2,000&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 2,000&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;U.S. treasuries&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 24,997&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.5%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 24,997&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"&gt;&lt;b style="font-weight:bold;"&gt;Total&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 84,165&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 2,000&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.5%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 86,165&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;&lt;b style="font-weight:bold;"&gt;Short-term investments&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.5%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;U.S. treasuries&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 149,219&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 149,219&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Corporate debt&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 32,554&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.5%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 32,554&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Commercial paper&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 7,998&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 7,998&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"&gt;&lt;b style="font-weight:bold;"&gt;Total&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 149,219&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 40,552&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.5%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New 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      id="Tb_AzoJG4sweUeLbO0x9Uddnw">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Note 4 &#x2014; Investments&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;At December 31, 2021 and 2020 the amortized cost and fair value of marketable securities, which are included in &#x201c;Short-term investments&#x201d; on the Consolidated Balance Sheets, were as follows:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.03%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.52%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Gross&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.52%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Gross&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.19%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Amortized&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.52%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Unrealized&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.52%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Unrealized&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Estimated&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.19%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Cost&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Gains&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Losses&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Fair&#160;Value&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="13" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:41.96%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in&#160;thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.91%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December&#160;31, 2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;U.S. treasuries&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 51,269&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (174)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 51,095&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.91%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Government agency securities&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 12,075&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (23)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 12,052&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Corporate debt&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 40,169&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (134)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 40,035&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.91%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Commercial paper&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 999&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.03%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 999&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:55.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;&lt;b style="font-weight:bold;"&gt;Total &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 104,512&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (331)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.03%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 104,181&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:55.91%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 0pt 12pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;margin-left:0pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December&#160;31, 2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.91%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;U.S. treasuries&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 149,206&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 14&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (1)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 149,219&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Corporate debt&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 32,588&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (34)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 32,554&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.91%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Commercial paper&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 7,997&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 1&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.03%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 7,998&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:55.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;&lt;b style="font-weight:bold;"&gt;Total&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 189,791&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 15&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (35)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.03%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 189,771&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Available-for-sale securities in a loss position at December 31, 2021 and 2020 were as follows:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:56.39%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.31%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.31%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.24%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:56.39%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:19.97%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December&#160;31, 2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:19.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December&#160;31, 2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:56.39%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.59%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Gross&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.59%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.54%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Gross&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:56.39%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.22%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Estimated&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.59%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Unrealized&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.59%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Estimated&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.54%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Unrealized&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:56.39%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.22%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Fair&#160;Value&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.59%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Losses&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.59%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Fair Value&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.54%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Losses&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="13" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:56.39%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="10" style="vertical-align:bottom;white-space:nowrap;width:40.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:56.39%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;U.S. treasuries&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.16%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 51,095&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.16%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.31%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (174)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.16%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.31%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 19,991&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.16%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.24%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (1)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:56.39%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Government agency securities&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 12,052&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (23)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:56.39%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Corporate debt&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.16%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 40,035&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.16%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.31%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (134)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.16%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.31%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 32,554&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.16%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.24%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (34)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:56.39%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;&lt;b style="font-weight:bold;"&gt;Total&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 103,182&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.31%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (331)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.31%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 52,545&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.24%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (35)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;At December 31, 2021 and 2020, there were no short-term investments that had been in a continuous loss position for more than 12 months.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;background:#ffff00;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="background:#ffffff;"&gt;The contractual maturities of securities classified as available-for-sale at December 31, 2021 were as follows:&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;background:#ffffff;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:72.18%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.41%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.39%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:72.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:25.01%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December&#160;31, 2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:72.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.11%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Amortized&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.09%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Estimated&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:72.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.11%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Cost&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.09%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Fair&#160;Value&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="7" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:72.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="4" style="vertical-align:bottom;white-space:nowrap;width:23.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:72.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Due in one year or less&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.8%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.41%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 53,617&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.8%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.39%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 53,550&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:72.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Due after one year through two years&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.41%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 50,895&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.39%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 50,631&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:72.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;&lt;b style="font-weight:bold;"&gt;Total&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.8%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.41%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 104,512&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.8%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.39%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 104,181&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;background:#ffffff;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;background:#ffffff;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Actual maturities may differ from contractual maturities because borrowers may have the right to call or prepay obligations with or without call or prepayment penalties. The realized gains or losses for the years ended December 31, 2021, 2020, and 2019 were immaterial.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;Other Investments&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Veeco has an ownership interest of less than 20% in a non-marketable investment, Kateeva, Inc. (&#x201c;Kateeva&#x201d;), over which Veeco does not exert significant influence. Additionally, the Company has a separate, non-marketable investment in another entity, with a carrying value of $2.0 million at December 31, 2021. The Company does not exert significant influence over this investment and its ownership interest is also less than 20%. Neither equity investment has a readily observable market price, and therefore the Company has elected to measure these investments at cost, adjusted for changes in observable market prices minus impairment. The investments are included in &#x201c;Other assets&#x201d; on the Consolidated Balance Sheets. These investments are subject to periodic impairment reviews which require judgment. The analyses include assessments of the companies&#x2019; financial condition, the business outlooks for their products and technologies, their projected results and cash flows, business valuation indications from recent rounds of financing, the likelihood of obtaining subsequent rounds of financing, and the impact of equity preferences held by Veeco relative to other investors. During the year ended December 31, 2019, the Company identified impairment indicators on the Company&#x2019;s investment in Kateeva, and as a result of a valuation analysis, concluded that its investment in Kateeva is fully impaired, and recorded a non-cash impairment charge of $21.0 million. During the year ended December 31, 2021, the Company identified impairment indicators on the Company&#x2019;s other investment, and recorded a non-cash impairment charge of $1.0 million. Both impairment charges were included in &#x201c;Other income (expense), net&#x201d; in the Consolidated Statement of Operations. &lt;/p&gt;</us-gaap:InvestmentsInDebtAndMarketableEquitySecuritiesAndCertainTradingAssetsDisclosureTextBlock>
    <us-gaap:ScheduleOfAvailableForSaleSecuritiesReconciliationTableTextBlock
      contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw"
      id="Tb_qWE4OTT9dUeI9s2Ug4WQzw">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.03%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.52%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Gross&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.52%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Gross&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.19%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Amortized&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.52%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Unrealized&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.52%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Unrealized&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Estimated&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.19%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Cost&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Gains&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Losses&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Fair&#160;Value&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="13" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:41.96%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in&#160;thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.91%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December&#160;31, 2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;U.S. treasuries&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 51,269&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (174)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 51,095&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.91%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Government agency securities&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 12,075&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (23)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 12,052&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Corporate debt&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 40,169&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (134)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 40,035&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.91%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Commercial paper&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 999&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.03%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 999&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:55.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;&lt;b style="font-weight:bold;"&gt;Total &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 104,512&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (331)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.03%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 104,181&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:55.91%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 0pt 12pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;margin-left:0pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December&#160;31, 2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.91%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;U.S. treasuries&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 149,206&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 14&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (1)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 149,219&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Corporate debt&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 32,588&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (34)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 32,554&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.91%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Commercial paper&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 7,997&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 1&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.03%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 7,998&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:55.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;&lt;b style="font-weight:bold;"&gt;Total&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 189,791&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 15&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td 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Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.31%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.31%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.24%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:56.39%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:19.97%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December&#160;31, 2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:19.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December&#160;31, 2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:56.39%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.59%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Gross&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.59%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.54%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Gross&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:56.39%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.22%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Estimated&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.59%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Unrealized&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.59%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Estimated&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.54%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Unrealized&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:56.39%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.22%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Fair&#160;Value&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.59%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Losses&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.59%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Fair Value&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.54%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Losses&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="13" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:56.39%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="10" style="vertical-align:bottom;white-space:nowrap;width:40.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:56.39%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;U.S. treasuries&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.16%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 51,095&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.16%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.31%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (174)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.16%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.31%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 19,991&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.16%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.24%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (1)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:56.39%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Government agency securities&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 12,052&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (23)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span 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style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:56.39%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Corporate debt&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.16%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 40,035&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.16%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.31%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (134)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.16%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.31%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 32,554&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.16%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.24%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (34)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:56.39%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;&lt;b style="font-weight:bold;"&gt;Total&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 103,182&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.31%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (331)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.31%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 52,545&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;border-bottom:3px double 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Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.39%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:72.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:25.01%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December&#160;31, 2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:72.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.11%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Amortized&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.09%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Estimated&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:72.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.11%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Cost&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.09%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Fair&#160;Value&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="7" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:72.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="4" style="vertical-align:bottom;white-space:nowrap;width:23.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:72.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Due in one year or less&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.8%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.41%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 53,617&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.8%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.39%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 53,550&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:72.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Due after one year through two years&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.41%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 50,895&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.39%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 50,631&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:72.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;&lt;b style="font-weight:bold;"&gt;Total&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.8%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.41%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 104,512&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.8%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.39%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 104,181&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;</us-gaap:InvestmentsClassifiedByContractualMaturityDateTableTextBlock>
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      id="Tb_et4xeeIlsUyTor4eq-tjww">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Note 5 &#x2014; Inventories&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Inventories are stated at the lower of cost or net realizable value, with cost determined on a first-in, first-out basis. Inventories consist of the following:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:81.99%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:65.08%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.52%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.54%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.35%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.52%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.54%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.41%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.52%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December&#160;31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.52%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December&#160;31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.52%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.52%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="7" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.52%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:32.39%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.08%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Materials&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.52%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.54%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.35%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 96,027&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.52%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.54%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.41%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 82,679&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Work-in-process&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.52%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.54%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.35%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 54,128&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.52%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.54%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.41%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 53,979&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.08%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Finished goods&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.52%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.54%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.35%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 20,703&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.52%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.54%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.41%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 9,248&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;&lt;b style="font-weight:bold;"&gt;Total&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.52%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.54%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.35%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 170,858&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.52%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.54%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.41%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 145,906&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;</us-gaap:InventoryDisclosureTextBlock>
    <us-gaap:ScheduleOfInventoryCurrentTableTextBlock
      contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw"
      id="Tb_Q1RvXtw9Tki7Xo9EQg89cA">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:81.99%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:65.08%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.52%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.54%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.35%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.52%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.54%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.41%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.52%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December&#160;31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.52%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December&#160;31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.52%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.52%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="7" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.52%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:32.39%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.08%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Materials&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.52%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.54%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.35%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 96,027&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.52%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.54%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.41%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 82,679&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Work-in-process&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.52%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.54%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.35%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 54,128&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.52%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.54%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.41%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 53,979&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.08%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Finished goods&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.52%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.54%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.35%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 20,703&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.52%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.54%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.41%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 9,248&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;&lt;b style="font-weight:bold;"&gt;Total&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.52%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.54%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.35%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 170,858&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.52%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.54%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.41%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 145,906&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;</us-gaap:ScheduleOfInventoryCurrentTableTextBlock>
    <us-gaap:InventoryRawMaterialsNetOfReserves
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      unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA">96027000</us-gaap:InventoryRawMaterialsNetOfReserves>
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      unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA">82679000</us-gaap:InventoryRawMaterialsNetOfReserves>
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      unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA">54128000</us-gaap:InventoryWorkInProcessNetOfReserves>
    <us-gaap:InventoryWorkInProcessNetOfReserves
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      unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA">53979000</us-gaap:InventoryWorkInProcessNetOfReserves>
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      unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA">20703000</us-gaap:InventoryFinishedGoodsNetOfReserves>
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      unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA">9248000</us-gaap:InventoryFinishedGoodsNetOfReserves>
    <us-gaap:InventoryNet
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      unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA">170858000</us-gaap:InventoryNet>
    <us-gaap:InventoryNet
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      unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA">145906000</us-gaap:InventoryNet>
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      id="Tb_ZWOP0yHEX0CQ4F5V-KzE1w">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Note 6 &#x2014; Property, Plant, and Equipment&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Property, plant, and equipment, net, consist of the following:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:55.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.17%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:middle;width:14.02%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="position:absolute;top:50%;transform:translate(0,-50%);width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.36%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December&#160;31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.4%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December&#160;31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.36%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.4%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.02%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Average&#160;Useful&#160;Life&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="9" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:26.82%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Land&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.17%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 5,061&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 5,061&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:middle;width:14.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;N/A&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Building and improvements&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.17%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 63,946&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 62,865&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:middle;width:14.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="-sec-ix-hidden:Hidden_nSraNxv3HkCjw8_FEiVHAA;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt;10&lt;/span&gt;&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; &#x2013; &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;40 years&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Machinery and equipment &lt;sup style="font-size:7.5pt;line-height:100%;top:0pt;vertical-align:top;"&gt;(1)&lt;/sup&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.17%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 145,656&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 140,493&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:middle;width:14.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="-sec-ix-hidden:Hidden_iMDzi6_cyUWyqGYEL7nS2g;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt;3&lt;/span&gt;&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; &#x2013; &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;10 years&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Leasehold improvements&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.17%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 45,979&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 6,671&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:middle;width:14.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="-sec-ix-hidden:Hidden_j9fzviGGIkepS8REL9n-aQ;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt;3&lt;/span&gt;&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; &#x2013; &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;17 years&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Gross property, plant, and equipment&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.17%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 260,642&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 215,090&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Less: accumulated depreciation and amortization&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.17%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 160,899&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 149,819&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;&lt;b style="font-weight:bold;"&gt;Net property, plant, and equipment&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.17%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 99,743&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 65,271&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;div style="font-family:'Times New Roman','Times','serif';font-size:9.0pt;margin-bottom:0pt;margin-top:0pt;min-height:1.19em;position:relative;width:100%;"&gt;&lt;div style="background-color:#000000;height:1pt;position:relative;top:0.6em;width:25.0%;border:none;margin:0 auto 0 0;"/&gt;&lt;/div&gt;&lt;table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"&gt;&lt;tr&gt;&lt;td style="font-family:'Times New Roman','Times','serif';font-size:9pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;"&gt;(1)&lt;/td&gt;&lt;td style="padding:0pt;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:9pt;font-style:normal;font-weight:normal;"&gt;Machinery and equipment also includes software, furniture, and fixtures&lt;/span&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Depreciation expense was $13.8 million, $15.4 million, and $17.3 million for the years ended December 31, 2021, 2020, and 2019, respectively. &lt;span style="background:#ffffff;"&gt;During the year ended December 31, 2019, the Company classified vacant land in St. Paul, &lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="background:#ffffff;"&gt;Minnesota as held for sale, and subsequently sold the land for approximately &lt;/span&gt;&lt;span style="background:#ffffff;"&gt;$0.6&lt;/span&gt;&lt;span style="background:#ffffff;"&gt;&#160;million, which approximated its carrying value.&lt;/span&gt;&lt;/p&gt;</us-gaap:PropertyPlantAndEquipmentDisclosureTextBlock>
    <us-gaap:PropertyPlantAndEquipmentTextBlock
      contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw"
      id="Tb_zOClGA3Td0q4I_VyibNOqg">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:55.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.17%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:middle;width:14.02%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="position:absolute;top:50%;transform:translate(0,-50%);width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.36%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December&#160;31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.4%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December&#160;31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.36%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.4%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.02%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Average&#160;Useful&#160;Life&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="9" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:26.82%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Land&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.17%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 5,061&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 5,061&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:middle;width:14.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;N/A&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Building and improvements&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.17%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 63,946&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 62,865&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:middle;width:14.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="-sec-ix-hidden:Hidden_nSraNxv3HkCjw8_FEiVHAA;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt;10&lt;/span&gt;&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; &#x2013; &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;40 years&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Machinery and equipment &lt;sup style="font-size:7.5pt;line-height:100%;top:0pt;vertical-align:top;"&gt;(1)&lt;/sup&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.17%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 145,656&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 140,493&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:middle;width:14.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="-sec-ix-hidden:Hidden_iMDzi6_cyUWyqGYEL7nS2g;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt;3&lt;/span&gt;&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; &#x2013; &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;10 years&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Leasehold improvements&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.17%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 45,979&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 6,671&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:middle;width:14.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="-sec-ix-hidden:Hidden_j9fzviGGIkepS8REL9n-aQ;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt;3&lt;/span&gt;&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; &#x2013; &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;17 years&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Gross property, plant, and equipment&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.17%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 260,642&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 215,090&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Less: accumulated depreciation and amortization&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.17%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 160,899&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 149,819&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;&lt;b style="font-weight:bold;"&gt;Net property, plant, and equipment&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.17%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 99,743&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 65,271&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;div style="font-family:'Times New Roman','Times','serif';font-size:9.0pt;margin-bottom:0pt;margin-top:0pt;min-height:1.19em;position:relative;width:100%;"&gt;&lt;div style="background-color:#000000;height:1pt;position:relative;top:0.6em;width:25.0%;border:none;margin:0 auto 0 0;"/&gt;&lt;/div&gt;&lt;table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"&gt;&lt;tr&gt;&lt;td style="font-family:'Times New Roman','Times','serif';font-size:9pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;"&gt;(1)&lt;/td&gt;&lt;td style="padding:0pt;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:9pt;font-style:normal;font-weight:normal;"&gt;Machinery and equipment also includes software, furniture, and fixtures&lt;/span&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;</us-gaap:PropertyPlantAndEquipmentTextBlock>
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      id="Tb_xrgFvKf6OkGCXAkDJLiQqQ">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Note 7 &#x2014; Goodwill and Intangible Assets&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Goodwill represents the future economic benefits arising from assets acquired in a business combination that are not individually identified and separately recognized. There were no changes in goodwill balances during the years ended December 31, 2021 or 2020, while the below table reflects the gross carrying amounts and accumulated impairments as of the respective periods:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:52.19%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2.45%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.94%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2.46%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.94%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2.46%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.04%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:52.19%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Gross&#160;carrying&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:13.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Accumulated&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:13.54%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:52.19%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;amount&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;impairment&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.54%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Net amount&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:52.19%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:45.35%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:52.19%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Balance at December&#160;31, 2021 and 2020&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2.45%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.49%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 430,331&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 248,388&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 181,943&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The Company performs its annual goodwill impairment test at the beginning of the fourth quarter each year. As the Company maintains a single goodwill reporting unit, it determines the fair value of its reporting unit based upon the Company&#x2019;s adjusted market capitalization. The annual test performed at the beginning of the fourth quarter of fiscal 2021, 2020, and 2019 did not result in any potential impairment as the fair value of the reporting unit was determined to exceed the carrying amount of the reporting unit.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The valuation of goodwill will continue to be subject to changes in the Company&#x2019;s market capitalization and observable market control premiums. This analysis is sensitive to changes in the Company&#x2019;s stock price and absent other qualitative factors, the Company may be required to record goodwill impairment charges in future periods if the stock price declines and remains depressed for an extended period of time.&#160; &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The components of purchased intangible assets were as follows:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:26.35%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:middle;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:middle;white-space:nowrap;width:9.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.32%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.32%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:26.35%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:29.63%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December&#160;31, 2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:29.63%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December&#160;31, 2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:26.35%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Average&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Accumulated&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Accumulated&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:26.35%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Remaining&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.96%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Gross&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Amortization&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.96%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Gross&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Amortization&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:26.35%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Amortization&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.96%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Carrying&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;and&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Net &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.96%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Carrying&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;and&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Net&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:26.35%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:9.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Period&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Amount&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:9.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Impairment&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Amount&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Amount&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:9.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Impairment&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Amount&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="21" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:26.35%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in years)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="17" style="vertical-align:bottom;white-space:nowrap;width:60.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in&#160;thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:26.35%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Technology&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:middle;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:middle;white-space:nowrap;width:9.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;"&gt; 3.6&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 327,908&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.32%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 310,551&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 17,357&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 327,908&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.32%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 302,358&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 25,550&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:26.35%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Customer relationships&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:middle;white-space:nowrap;width:9.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;"&gt; 7.3&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 146,465&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.32%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 132,970&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 13,495&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 146,465&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.32%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 130,131&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 16,334&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:26.35%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Trademarks and tradenames&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:middle;white-space:nowrap;width:9.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;"&gt; 2.5&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 30,910&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.32%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 27,857&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 3,053&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 30,910&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.32%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 26,614&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 4,296&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:26.35%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Other&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:middle;white-space:nowrap;width:9.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt; -&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 3,686&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.32%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.1%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 3,686&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 3,686&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.32%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.1%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 3,681&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 5&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:26.35%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;&lt;b style="font-weight:bold;"&gt;Total&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 0pt 12pt;"&gt;&lt;span style="font-size:10pt;margin-left:0pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:middle;white-space:nowrap;width:9.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;"&gt; 5.0&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 508,969&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.32%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.1%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 475,064&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 33,905&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 508,969&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.32%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.1%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 462,784&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 46,185&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Other intangible assets primarily consist of patents, licenses, and backlog.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Based on the intangible assets recorded at December 31, 2021, and assuming no subsequent additions to or impairment of the underlying assets, the remaining estimated annual amortization expense, is expected to be as follows:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:46%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:75.65%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.58%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.65%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:17.11%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:75.65%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.58%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:20.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Amortization&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:75.65%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.58%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&#160;&#160;&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:20.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in&#160;thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:75.65%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;2022&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.58%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.65%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:17.11%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 10,018&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:75.65%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;2023&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.58%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.65%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:17.11%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 8,347&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:75.65%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;2024&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.58%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.65%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:17.11%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 6,708&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:75.65%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;2025&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.58%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.65%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:17.11%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 3,136&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:75.65%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;2026&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.58%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.65%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:17.11%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 2,134&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:75.65%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Thereafter&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.58%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.65%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:17.11%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 3,562&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:75.65%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Total&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.58%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.65%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:17.11%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 33,905&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;</us-gaap:GoodwillAndIntangibleAssetsDisclosureTextBlock>
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style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.94%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2.46%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.94%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2.46%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.04%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:52.19%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Gross&#160;carrying&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:13.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Accumulated&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:13.54%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:52.19%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;amount&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;impairment&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.54%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Net amount&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:52.19%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:45.35%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:52.19%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Balance at December&#160;31, 2021 and 2020&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2.45%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.49%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 430,331&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 248,388&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 181,943&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;</us-gaap:ScheduleOfGoodwillTextBlock>
    <us-gaap:GoodwillGross
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      unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA">430331000</us-gaap:GoodwillGross>
    <us-gaap:GoodwillImpairedAccumulatedImpairmentLoss
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      unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA">248388000</us-gaap:GoodwillImpairedAccumulatedImpairmentLoss>
    <us-gaap:Goodwill
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      unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA">181943000</us-gaap:Goodwill>
    <veco:ScheduleOfIntangibleAssetsExcludingGoodwillTableTextBlock
      contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw"
      id="Tb_qj_TA_lOiUKa2E95HvQy3A">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:26.35%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:middle;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:middle;white-space:nowrap;width:9.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.32%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.32%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:26.35%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:29.63%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December&#160;31, 2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:29.63%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December&#160;31, 2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:26.35%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Average&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Accumulated&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Accumulated&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:26.35%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Remaining&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.96%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Gross&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Amortization&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.96%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Gross&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Amortization&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:26.35%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Amortization&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.96%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Carrying&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;and&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Net &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.96%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Carrying&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;and&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Net&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:26.35%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:9.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Period&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Amount&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:9.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Impairment&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Amount&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Amount&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:9.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Impairment&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Amount&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="21" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:26.35%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in years)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="17" style="vertical-align:bottom;white-space:nowrap;width:60.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in&#160;thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:26.35%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Technology&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:middle;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:middle;white-space:nowrap;width:9.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;"&gt; 3.6&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 327,908&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.32%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 310,551&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 17,357&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 327,908&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.32%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 302,358&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 25,550&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:26.35%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Customer relationships&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:middle;white-space:nowrap;width:9.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;"&gt; 7.3&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 146,465&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.32%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 132,970&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 13,495&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 146,465&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.32%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 130,131&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 16,334&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:26.35%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Trademarks and tradenames&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:middle;white-space:nowrap;width:9.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;"&gt; 2.5&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 30,910&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.32%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 27,857&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 3,053&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 30,910&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.32%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 26,614&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 4,296&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:26.35%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Other&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:middle;white-space:nowrap;width:9.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt; -&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 3,686&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.32%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.1%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 3,686&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 3,686&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.32%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.1%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 3,681&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 5&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:26.35%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;&lt;b style="font-weight:bold;"&gt;Total&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 0pt 12pt;"&gt;&lt;span style="font-size:10pt;margin-left:0pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:middle;white-space:nowrap;width:9.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;"&gt; 5.0&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 508,969&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.32%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.1%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 475,064&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 33,905&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 508,969&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.32%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.1%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 462,784&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 46,185&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;</veco:ScheduleOfIntangibleAssetsExcludingGoodwillTableTextBlock>
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      id="Tb_ldrIo0D7TUariY5m8zn4ug">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:46%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:75.65%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.58%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.65%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:17.11%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:75.65%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.58%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:20.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Amortization&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:75.65%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.58%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&#160;&#160;&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:20.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in&#160;thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:75.65%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;2022&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.58%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.65%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:17.11%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 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6,708&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:75.65%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;2025&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.58%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.65%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:17.11%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 3,136&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:75.65%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;2026&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.58%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.65%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:17.11%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 2,134&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:75.65%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Thereafter&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.58%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.65%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:17.11%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 3,562&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:75.65%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Total&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.58%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.65%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:17.11%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 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      id="Tb_iz2WE_1hnU2Ke_A6umshsQ">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Note 8 &#x2014; Accrued Expenses and Other Liabilities&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The components of accrued expenses and other current liabilities were as follows:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:70.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:70.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.49%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December&#160;31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.49%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December&#160;31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:70.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.49%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.49%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="7" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:70.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:27.09%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in&#160;thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:70.8%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Payroll and related benefits&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 35,712&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 26,630&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:70.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Warranty&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 7,878&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 5,058&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:70.8%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="-sec-ix-hidden:Hidden_F6hpkcy7sk2smVu90Wpo7g;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt;Operating lease liabilities&lt;/span&gt;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 4,437&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 4,148&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:70.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Interest&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 2,757&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 2,574&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:70.8%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Professional fees&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 1,467&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 1,112&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:70.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Legal settlement&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 15,000&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:70.8%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Sales, use, and other taxes&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 4,889&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 2,658&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:70.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Other&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 7,612&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 2,696&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:70.8%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;&lt;b style="font-weight:bold;"&gt;Total&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 79,752&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 44,876&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;Customer deposits and deferred revenue&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Customer deposits totaled $46.9 million and $49.3 million at December 31, 2021 and 2020, respectively, which are included in &#x201c;Customer deposits and deferred revenue&#x201d; in the Consolidated Balance Sheets. Deferred revenue represents amounts billed, other than deposits, in excess of the revenue that can be recognized on a particular contract at the balance sheet date. Changes in deferred revenue were as follows:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:80.14%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.57%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.57%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.7%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:80.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.57%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:17.27%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in&#160;thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:80.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Balance - December&#160;31, 2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.57%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.57%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.7%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 17,985&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:80.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Deferral of revenue&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.57%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.57%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.7%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 6,782&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:80.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Recognition of unearned revenue&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.57%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.57%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.7%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (8,491)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:80.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Balance - December&#160;31, 2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.57%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.57%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.7%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 16,276&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;"&gt;As of December&#160;31, 2021, the Company has approximately &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;$33.6&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; million of remaining performance obligations on contracts with an original estimated duration of &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;one year&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; or more, of which approximately &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;94%&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; is expected to be recognized within &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;one year&lt;/span&gt;&lt;span style="font-size:10pt;"&gt;, with the remaining amounts expected to be recognized between &lt;/span&gt;&lt;span style="-sec-ix-hidden:Hidden_T3SVPFAPMEGRt2ljwcbEMQ;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt;one to three years&lt;/span&gt;&lt;/span&gt;&lt;span style="font-size:10pt;"&gt;. The Company has elected to exclude disclosures regarding remaining performance obligations that have an original expected duration of &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;one&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; year or less.&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;Other liabilities&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;As part of a prior acquisition, the Company assumed an executive non-qualified deferred compensation plan that allowed qualifying executives to defer cash compensation. The plan was frozen at the time of acquisition and no further contributions have been made. &lt;span style="background:#ffffff;"&gt;The plan was terminated and fully liquidated during 2021.&lt;/span&gt; At December 31, 2020, plan assets approximated $2.4 million, representing the cash surrender value of life insurance policies and is included within &#x201c;Other assets&#x201d; in the Consolidated Balance Sheets, while plan liabilities approximated $2.5&lt;span style="white-space:pre-wrap;"&gt; million  and is included within &#x201c;Other liabilities&#x201d; in the Consolidated Balance Sheets. &lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;At December 31, 2021 and 2020, other liabilities also included (i) asset retirement obligations of $2.8 million and $2.7 million, respectively; (ii) income tax payables of $0.4 million and $1.4 million, respectively; and (iii) medical and dental benefits for former executives of $1.8 million and $1.9 million, respectively. Additionally, as a result of the Coronavirus, Aid, Relief, and Economic Security Act, the Company has accrued for and deferred the deposit and payment of its share of social security taxes, resulting in a liability of $3.6 million at December 31, 2020, of which $1.8 million is included within &#x201c;Accrued expenses and other current liabilities&#x201d;, and $1.8 million is included within &#x201c;Other liabilities&#x201d; in the Consolidated Balance Sheets. At December 31, 2021, a $1.7 million liability remains for these deferred payroll taxes, which is included within &#x201c;Accrued expenses and other current liabilities.&#x201d;&lt;/p&gt;</us-gaap:AccountsPayableAndAccruedLiabilitiesDisclosureTextBlock>
    <us-gaap:ScheduleOfAccruedLiabilitiesTableTextBlock
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      id="Tb_fsw7Vk6cfUaouPcOydy6Fw">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:70.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:70.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.49%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December&#160;31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.49%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December&#160;31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:70.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.49%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.49%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="7" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:70.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:27.09%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in&#160;thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:70.8%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Payroll and related benefits&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 35,712&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 26,630&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:70.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Warranty&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 7,878&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 5,058&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:70.8%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="-sec-ix-hidden:Hidden_F6hpkcy7sk2smVu90Wpo7g;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt;Operating lease liabilities&lt;/span&gt;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 4,437&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 4,148&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:70.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Interest&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 2,757&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 2,574&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:70.8%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Professional fees&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 1,467&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 1,112&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:70.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Legal settlement&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 15,000&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:70.8%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Sales, use, and other taxes&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 4,889&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 2,658&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:70.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Other&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 7,612&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 2,696&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:70.8%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;&lt;b style="font-weight:bold;"&gt;Total&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 79,752&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 44,876&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;</us-gaap:ScheduleOfAccruedLiabilitiesTableTextBlock>
    <us-gaap:EmployeeRelatedLiabilitiesCurrent
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      id="Tc_Je8x30JDr0uMTx97MYOmXg_4_6"
      unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA">26630000</us-gaap:EmployeeRelatedLiabilitiesCurrent>
    <us-gaap:ProductWarrantyAccrualClassifiedCurrent
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      id="Tc_WWa80EyqoEa-xP6QI5dfPw_5_3"
      unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA">7878000</us-gaap:ProductWarrantyAccrualClassifiedCurrent>
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      id="Tc_Ug2vutjLbEirimGQmiOgug_5_6"
      unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA">5058000</us-gaap:ProductWarrantyAccrualClassifiedCurrent>
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      id="Tc_YEiz1scxMUiypS6Iio4ZBA_6_3"
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      id="Tc_I9ri9rY8b0O-WotxmKLuuA_6_6"
      unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA">4148000</us-gaap:OperatingLeaseLiabilityCurrent>
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      id="Tc__Kc2GAqjUEmtY-smPaBXlQ_7_3"
      unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA">2757000</us-gaap:InterestPayableCurrent>
    <us-gaap:InterestPayableCurrent
      contextRef="As_Of_12_31_2020_OfWUD9GrcUazazk4eyTvgQ"
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      id="Tc_h6yJwp1QEE-5LL6a2LZunw_7_6"
      unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA">2574000</us-gaap:InterestPayableCurrent>
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      id="Tc_jAXGI3EjWEaE0Jn3-yZBEg_8_3"
      unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA">1467000</us-gaap:AccruedProfessionalFeesCurrent>
    <us-gaap:AccruedProfessionalFeesCurrent
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      id="Tc_PENCswShmUSQC3fjxpCpFQ_8_6"
      unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA">1112000</us-gaap:AccruedProfessionalFeesCurrent>
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      unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA">15000000</us-gaap:LossContingencyAccrualCarryingValueCurrent>
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      unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA">4889000</us-gaap:TaxesPayableCurrent>
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      unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA">2658000</us-gaap:TaxesPayableCurrent>
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      id="Tc_RvHOHZ_JjkyFYC4IiqgG1w_11_3"
      unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA">7612000</us-gaap:OtherAccruedLiabilitiesCurrent>
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      unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA">2696000</us-gaap:OtherAccruedLiabilitiesCurrent>
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      id="Tc_ozV6eqCFd0C7bp5u2GsAdQ_12_3"
      unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA">79752000</veco:AccruedAndOtherLiabilitiesCurrent>
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      id="Tc_HUR2KYypWECAWBIm59oIuw_12_6"
      unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA">44876000</veco:AccruedAndOtherLiabilitiesCurrent>
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      unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA">46900000</us-gaap:ContractWithCustomerRefundLiabilityCurrent>
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      id="Tb_zbjwTnGRqU6pUruZ5vsBNw">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:80.14%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.57%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.57%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.7%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:80.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.57%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:17.27%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in&#160;thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:80.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Balance - December&#160;31, 2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.57%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.57%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.7%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 17,985&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:80.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Deferral of revenue&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.57%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.57%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.7%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 6,782&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:80.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Recognition of unearned revenue&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.57%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.57%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.7%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (8,491)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:80.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Balance - December&#160;31, 2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.57%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.57%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.7%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 16,276&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;</veco:ScheduleOfDeferredRevenueTableTextBlock>
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      id="Tb_-kF6sSUt8kG92s23V3MiJQ">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Note 9 &#x2014; Commitments and Contingencies&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;Warranty&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Changes in the Company&#x2019;s product warranty reserves were as follows:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:61.6%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.43%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.45%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.45%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.6%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:36.32%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December&#160;31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.6%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.72%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2019&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="10" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.6%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:bottom;white-space:nowrap;width:35.04%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.6%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Balance - beginning of the year&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 5,058&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.45%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 7,067&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.45%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 7,852&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.6%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Warranties issued&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 7,102&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.45%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 4,626&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.45%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 5,865&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.6%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Consumption of reserves&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (5,784)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.45%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (6,691)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.45%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (6,242)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.6%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Changes in estimate&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 1,502&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.45%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 56&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.45%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (408)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.6%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Balance - end of the year&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.43%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 7,878&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.45%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 5,058&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.45%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 7,067&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;Minimum Lease Commitments&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;"&gt;The Company&#x2019;s operating leases primarily include real estate leases for properties used for manufacturing, R&amp;amp;D activities, sales and service, and administration, as well as certain equipment leases. Some leases may include options to renew for a period of up to&#160;&lt;/span&gt;&lt;span style="font-size:10pt;"&gt;5 years&lt;/span&gt;&lt;span style="font-size:10pt;"&gt;, while others may include options to terminate the lease. The weighted average remaining lease term of the Company&#x2019;s operating leases as of December 31, 2021 was&#160;&lt;/span&gt;&lt;span style="font-size:10pt;"&gt;12 years&lt;/span&gt;&lt;span style="font-size:10pt;"&gt;, and the weighted average discount rate used in determining the present value of future lease payments was&#160;&lt;/span&gt;&lt;span style="font-size:10pt;"&gt;5.7%&lt;/span&gt;&lt;span style="font-size:10pt;"&gt;.&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The following table provides the maturities of lease liabilities at December 31, 2021: &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:15.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Operating&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:15.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Leases&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:15.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:82.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Payments due by period:&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;2022&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 4,901&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:82.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;2023&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 3,979&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;2024&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 3,769&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:82.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;2025&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 3,309&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;2026&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 3,496&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:82.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Thereafter&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.3%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 35,960&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Total future minimum lease payments&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 55,414&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:82.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Less: Imputed interest&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.3%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (18,143)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Total&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.95%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.3%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 37,271&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:82.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:82.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Reported as of December&#160;31, 2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:82.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="-sec-ix-hidden:Hidden_SwFqQXYgBEak5kXP8askZQ;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt;Accrued expenses and other current liabilities&lt;/span&gt;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 4,437&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Long-term operating lease liabilities&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.95%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 32,834&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:82.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 0pt 12pt;"&gt;&lt;span style="-sec-ix-hidden:Hidden_zFxbRdmFCE2TWUV1wQrYUA;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt;Total&lt;/span&gt;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.3%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 37,271&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Operating lease cost for the years ended December 31, 2021, 2020, and 2019 was $6.6 million, $5.4 million, and $5.5 million, respectively. Variable lease cost for all years ended December 31, 2021, 2020, and 2019 was $1.7 million. Additionally, the Company has an immaterial amount of short-term leases. Lease expense, which includes operating lease costs and variable lease costs, was $8.4&#160;million, $7.1&#160;million, and $7.2&#160;million for the years ended December 31, 2021, 2020, and 2019, respectively. In addition, the Company is obligated under such leases for certain other expenses, including real estate taxes and insurance. Operating cash outflows from operating leases for the year ended December 31, 2021, 2020, and 2019 were $6.6&#160;million (excluding landlord reimbursements for leasehold improvements of $6.1 million included within &#x201c;Other, net&#x201d; in the Consolidated Statements of Cash Flows), $6.9 million, and $7.2&#160;million, respectively.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;Legal Proceedings&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;On June 8, 2018, an Ultratech shareholder who received Veeco stock as part of the consideration for the Ultratech acquisition filed a purported class action complaint in the Superior Court of the State of California, County of Santa Clara, captioned Wolther v. Maheshwari et al., Case No. 18CV329690, on behalf of himself and others who purchased or acquired shares of Veeco pursuant to the registration statement and prospectus which Veeco filed with the SEC in connection with the Ultratech acquisition (the &#x201c;Wolther Action&#x201d;). On August 2 and August 8, 2018, two purported class action complaints substantially similar to the Wolther Action were filed on behalf of different plaintiffs in the same court as the Wolther Action. These cases have been consolidated with the Wolther Action, and a consolidated complaint was filed on December 11, 2018. The consolidated complaint seeks to recover damages and fees under Sections 11, 12, and 15 of the Securities Act of 1933 for, among other things, alleged false/misleading statements in the registration statement and prospectus relating to the Ultratech acquisition, relating primarily to the alleged failure to disclose delays in the advanced packaging business, increased MOCVD competition in China, and an intellectual property dispute. In October 2021, Veeco and the court-appointed class representatives signed an agreement to settle the Wolther Action on a class-wide basis for $15.0&lt;span style="white-space:pre-wrap;"&gt; million, subject to court approval and class members&#x2019; opportunity to object and opt-out, which is included within &#x201c;Accrued expenses and other current liabilities&#x201d; in the Consolidated Balance Sheets as of December 31, 2021. The settlement amount will be funded by insurance carriers, the receivable for which is included in &#x201c;Prepaid expenses and other current assets&#x201d; in the Consolidated Balance Sheets as of December 31, 2021.  &lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;On December 21, 2018, a purported Veeco stockholder filed a derivative action in the Superior Court of the State of California, County of Santa Clara, captioned Vladimir Gusinsky Revocable Trust v. Peeler, et al., Case No. 18CV339925, on behalf of nominal defendant Veeco. The complaint seeks to assert claims for breach of fiduciary duty, waste of corporate assets, and unjust enrichment against current and former Veeco directors premised on purported misstatements and omissions in the registration statement relating to the Ultratech acquisition. Veeco is defending this matter vigorously. On January 25, 2021, the court granted the defendants&#x2019; demurrer without leave to amend effecting the dismissal of the case. Plaintiff is appealing the dismissal of its case. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The Company is involved in various other legal proceedings arising in the normal course of business. The Company does not believe that the ultimate resolution of these matters will have a material adverse effect on its consolidated financial position, results of operations, or cash flows.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;Concentrations of Credit Risk&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The Company depends on purchases from its ten largest customers, which accounted for 65% and 62% of net accounts receivable at December 31, 2021 and 2020, respectively.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Customers who accounted for more than 10% of net accounts receivable or net sales are as follows:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:40.97%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.47%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.59%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.59%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.49%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.59%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.59%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.66%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:40.97%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;white-space:nowrap;width:19.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Accounts&#160;Receivable&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:31.37%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Net&#160;Sales&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:40.97%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;white-space:nowrap;width:19.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December&#160;31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:31.37%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;For the Year Ended December&#160;31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:40.97%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Customer&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.59%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.59%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.59%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.59%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.66%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2019&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:40.97%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Customer A&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.47%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.59%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 14&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.59%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt;*&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.49%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.59%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 15&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.59%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt;*&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.66%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt;*&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:40.97%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Customer B&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.59%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt;*&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.59%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt;*&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.59%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 10&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.59%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt;*&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt;*&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:40.97%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Customer C&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.47%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.59%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 12&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.59%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt;*&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.49%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.59%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt;*&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.59%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt;*&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.66%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt;*&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:40.97%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Customer D&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.59%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 10&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.59%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt;*&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.59%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt;*&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.59%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt;*&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt;*&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:40.97%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Customer E&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.47%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.59%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt;*&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.59%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt;*&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.49%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.59%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt;*&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.59%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 13&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.66%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New 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style="font-size:10pt;"&gt;*&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;"&gt;&lt;span style="font-size:9pt;"&gt;Less than 10% of aggregate accounts receivable or net sales&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;"&gt;The Company manufactures and sells its products to companies in different geographic locations. Refer to Note 17, &#x201c;Segment Reporting and Geographic Information,&#x201d; for additional information. In certain instances, the Company requires deposits from its customers for a portion of the sales price in advance of shipment and performs periodic credit evaluations on its customers. Where appropriate, the Company requires letters of credit on certain non-U.S. sales arrangements. Receivables generally are due within &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;30&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; to &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;90 days&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; from the date of invoice.&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;In some geographies, receivables may be payable up to &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;150 days&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; from the date of the invoice.&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;Receivable Purchase Agreement&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;In December&#160;2020, the Company entered into a receivable purchase agreement with a financial institution to sell certain of its trade receivables from customers without recourse, up to $15.0 million at any point in time. Pursuant to this agreement, the Company sold $11.6&#160;million of receivables during the year ended December&#160;31, 2020, of which $5.9 million was outstanding at December 31, 2020, and subsequently settled during 2021. There were no further sales of receivables under this agreement during 2021, and therefore the full $15.0 million is available under the agreement for additional sales of receivables as of December&#160;31, 2021. The Company did not sell any receivables under this agreement during 2021. The net sale of accounts receivable under the agreement is reflected as a reduction of accounts receivable in the Company&#x2019;s Consolidated Balance Sheet at the time of sale and any fees for the sale of trade receivables were not material for the periods presented.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;Suppliers&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The Company outsources certain functions to third parties, including the manufacture of several of its systems. While the Company relies on its outsourcing partners to perform their contracted functions, the Company maintains some level of internal manufacturing capability for these systems. In addition, certain of the components and sub-assemblies included in the Company&#x2019;s products are obtained from a single source or a limited group of suppliers. The failure of the Company&#x2019;s present outsourcing partners and suppliers to meet their contractual obligations and the Company&#x2019;s inability to make alternative arrangements or resume the manufacture of these systems could have a material adverse effect on the Company&#x2019;s revenues, profitability, cash flows, and relationships with its customers.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The Company had deposits with its suppliers of $3.9 million and $7.2 million at December 31, 2021 and 2020, respectively, that were included in &#x201c;Prepaid expenses and other current assets&#x201d; on the Consolidated Balance Sheets.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;Purchase Commitments&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The Company had purchase commitments of $193.0 million at December 31, 2021, substantially all of which will come due within one year. Purchase commitments are primarily for inventory used in manufacturing products and are partially offset by existing deposits with suppliers. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;Bank Guarantees&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The Company has bank guarantees and letters of credit issued by a financial institution on its behalf as needed. At December 31, 2021, outstanding bank guarantees and letters of credit totaled $2.7&#160;million and unused bank guarantees and letters of credit of $15.2&lt;span style="font-size:12pt;"&gt; &lt;/span&gt;million were available to be drawn upon.&lt;/p&gt;</us-gaap:CommitmentsAndContingenciesDisclosureTextBlock>
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style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.43%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.45%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.45%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.6%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:36.32%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December&#160;31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.6%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.72%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2019&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="10" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.6%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:bottom;white-space:nowrap;width:35.04%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.6%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Balance - beginning of the year&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 5,058&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.45%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 7,067&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.45%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 7,852&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.6%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Warranties issued&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 7,102&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.45%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 4,626&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.45%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 5,865&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.6%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Consumption of reserves&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (5,784)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.45%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (6,691)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.45%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (6,242)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.6%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Changes in estimate&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 1,502&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.45%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 56&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.45%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (408)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.6%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Balance - end of the year&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.43%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 7,878&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New 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      id="Tb_zdMJ061Lokm61R66cV7WXw">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:15.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Operating&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:15.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Leases&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:15.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:82.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Payments due by period:&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;2022&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 4,901&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:82.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;2023&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 3,979&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;2024&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 3,769&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:82.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;2025&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 3,309&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;2026&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 3,496&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:82.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Thereafter&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.3%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 35,960&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Total future minimum lease payments&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 55,414&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:82.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Less: Imputed interest&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.3%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (18,143)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Total&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.95%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.3%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 37,271&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:82.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:82.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Reported as of December&#160;31, 2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:82.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="-sec-ix-hidden:Hidden_SwFqQXYgBEak5kXP8askZQ;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt;Accrued expenses and other current liabilities&lt;/span&gt;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 4,437&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Long-term operating lease liabilities&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.95%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 32,834&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:82.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 0pt 12pt;"&gt;&lt;span style="-sec-ix-hidden:Hidden_zFxbRdmFCE2TWUV1wQrYUA;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt;Total&lt;/span&gt;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.3%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 37,271&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;</us-gaap:LesseeOperatingLeaseLiabilityMaturityTableTextBlock>
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      unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA">3769000</us-gaap:LesseeOperatingLeaseLiabilityPaymentsDueYearThree>
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      unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA">37271000</us-gaap:OperatingLeaseLiability>
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      unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA">8400000</us-gaap:LeaseCost>
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      unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA">6600000</us-gaap:OperatingLeasePayments>
    <veco:ReimbursementForLeaseholdImprovements
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      id="Tb_YvMQJMxTo0-OjyyJ6MV0ag">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:40.97%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.47%;margin:0pt;padding:0pt;"&gt;&lt;div 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style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.59%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.49%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.59%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.59%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.66%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:40.97%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;white-space:nowrap;width:19.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Accounts&#160;Receivable&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:31.37%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Net&#160;Sales&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:40.97%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;white-space:nowrap;width:19.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December&#160;31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:31.37%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;For the Year Ended December&#160;31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:40.97%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Customer&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.59%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.59%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.59%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.59%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.66%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2019&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:40.97%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Customer A&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.47%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.59%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 14&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.59%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt;*&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.49%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.59%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 15&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.59%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt;*&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.66%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt;*&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:40.97%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Customer B&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New 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      id="Tb_igQg8xi23Eqb4U9ihDlqtA">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Note 10 &#x2014; Debt&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;Convertible Senior Notes&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;2023 Notes&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;On January 10, 2017, the Company issued $345.0 million of 2.70% convertible senior unsecured notes due 2023 (the &#x201c;2023 Notes&#x201d;). The Company received net proceeds, after deducting underwriting discounts and fees and expenses payable by the Company, of approximately $335.8 million. The 2023 Notes bear interest at a rate of 2.70% per year, payable semiannually in arrears on January 15 and July 15 of each year, commencing on July 15, 2017. The 2023 Notes mature on January 15, 2023, unless earlier purchased by the Company, redeemed, or converted.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;background:#ffffff;margin:0pt;"&gt;On May 18, 2020, in connection with the completion of a private offering of $125.0&#160;million aggregate principal amount of&#160;3.75% convertible senior notes due 2027 described below, the Company repurchased and retired approximately $88.3&#160;million in aggregate principal amount of its outstanding 2023 Notes, with a carrying amount of $78.1&#160;million, for approximately $81.2&#160;million of cash. The Company accounted for the partial settlement of the 2023 Notes as an extinguishment, and as such, recorded a loss on extinguishment of approximately $3.0&#160;million for the year ended December 31, 2020, which is included in &#x201c;Other income (expense), net&#x201d; in the Consolidated Statements of Operations, as well as a reduction of additional paid-in capital of $0.1 million for the repurchase of the conversion feature.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;background:#ffffff;margin:0pt;"&gt;Additionally, on November 11, 2020, the Company entered into a privately negotiated exchange agreement with a holder of its outstanding 2023 Notes, under which the Company agreed to retire $125.0 million in aggregate original principal amount of the 2023 Notes, with a carrying amount of $113.1 million, in exchange for the issuance of $132.5 million in aggregate principal amount of new 3.50% convertible senior notes due 2025 described below, which had a fair value that approximated the principal amount of notes issued. The Company accounted for the partial settlement of the 2023 Notes as an extinguishment, and as such, recorded a loss on extinguishment of approximately $4.8&#160;million for the year ended &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;background:#ffffff;margin:0pt;"&gt;December 31, 2020, which is included in &#x201c;Other income (expense), net&#x201d; in the Consolidated Statements of Operations, as well as a reduction of additional paid-in capital of $14.6 million for the exchange of the conversion feature.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;background:#ffffff;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;background:#ffffff;margin:0pt;"&gt;Finally, on November 5, 2021, the Company entered into a privately negotiated note purchase agreement with a holder of its outstanding 2023 Notes, under which the Company agreed to repurchase and retire approximately $111.5 million in aggregate original principal amount of the 2023 Notes, with a carrying amount of $105.5 million, for cash consideration of approximately $115.6 million, and approximately $1.0 million of accrued and unpaid interest. The Company accounted for the partial settlement of the 2023 Notes as an extinguishment, and as such, recorded a loss on extinguishment of approximately $4.0&#160;million for the year ended December 31, 2021, which is included in &#x201c;Other income (expense), net&#x201d; in the Consolidated Statements of Operations, as well as a reduction of additional paid-in capital of $6.1 million for the repurchase of the conversion feature.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;2025 Notes&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;background:#ffffff;margin:0pt;"&gt;On November 17, 2020, as part of the privately negotiated exchange agreement described above, the Company issued $132.5 million of 3.50% convertible senior notes due 2025 (the &#x201c;2025 Notes&#x201d;). The 2025 Notes bear interest at a rate of&#160;3.50% per year, payable semiannually in arrears on January 15 and July 15 of each year, commencing on July 15, 2021. The 2025 Notes mature on January 15, 2025, unless earlier purchased by the Company, redeemed, or converted.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;background:#ffffff;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;2027 Notes&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;background:#ffffff;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;background:#ffffff;margin:0pt;"&gt;On May 18, 2020, the Company completed a private offering of $125.0&#160;million of&#160;3.75% convertible senior notes due 2027 (the &#x201c;2027 Notes&#x201d;). The Company received net proceeds of approximately $121.9&#160;million, after deducting underwriting discounts and fees and expenses payable by the Company. Additionally, the Company used approximately $10.3&#160;million of cash to purchase capped calls, discussed below. The 2027 Notes bear interest at a rate of&#160;3.75% per year, payable semiannually in arrears on June 1 and December 1 of each year, commencing on December 1, 2020. The 2027 Notes mature on June 1, 2027, unless earlier purchased by the Company, redeemed, or converted.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The 2023 Notes, 2025 Notes, and 2027 Notes (collectively, the &#x201c;Notes&#x201d;) are unsecured obligations of Veeco and rank senior in right of payment to any of Veeco&#x2019;s subordinated indebtedness; equal in right of payment to all of Veeco&#x2019;s unsecured indebtedness that is not subordinated; effectively subordinated in right of payment to any of Veeco&#x2019;s secured indebtedness to the extent of the value of the assets securing such indebtedness; and structurally subordinated to all indebtedness and other liabilities (including trade payables) of Veeco&#x2019;s subsidiaries.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The Notes are convertible into cash, shares of the Company&#x2019;s common stock, or a combination thereof, at the Company&#x2019;s election, upon the satisfaction of specified conditions and during certain periods as described below. The initial conversion rates are 24.9800, 41.6667, and 71.5372 shares of the Company&#x2019;s common stock per $1,000 principal amount of the 2023 Notes, 2025 Notes, and 2027 Notes, respectively, representing initial effective conversion prices of $40.03, $24.00, and $13.98 per share of common stock, respectively. The conversion rates may be subject to adjustment upon the occurrence of certain specified events.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Holders may convert all or any portion of their notes, in multiples of one thousand dollar principal amount, at their option at any time prior to the close of business on the business day immediately preceding October 15, 2022 with respect to the 2023 Notes, October 15, 2024 with respect to the 2025 Notes, and October 1, 2027 with respect to the 2027 Notes, only under the following circumstances: &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"&gt;&lt;tr&gt;&lt;td style="width:36pt;"/&gt;&lt;td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:25.2pt;padding:0pt;"&gt;(i)&lt;/td&gt;&lt;td style="padding:0pt;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt;During any calendar quarter (and only during such calendar quarter), if the last reported sale price of the common stock for at least &lt;/span&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt;20&lt;/span&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt; trading days (whether or not consecutive) during a period of &lt;/span&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt;30&lt;/span&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt; consecutive trading days ending on the last trading day of the immediately preceding calendar quarter is greater than or equal to &lt;/span&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt;130%&lt;/span&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt; of the conversion price on each applicable trading day;&lt;/span&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:25.2pt;text-indent:-25.2pt;margin:0pt 0pt 0pt 36pt;"&gt;&lt;span style="font-size:10pt;margin-left:0pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"&gt;&lt;tr&gt;&lt;td style="width:36pt;"/&gt;&lt;td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:25.2pt;padding:0pt;"&gt;(ii)&lt;/td&gt;&lt;td style="padding:0pt;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt;During the &lt;/span&gt;&lt;span style="-sec-ix-hidden:Hidden_MoI4F52lpkK6zktkVWVp9Q;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt;five&lt;/span&gt;&lt;/span&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt; consecutive business day period after any &lt;/span&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt;five&lt;/span&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt; consecutive trading day period (the &#x201c;measurement period&#x201d;) in which the trading price per &lt;/span&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt;one&lt;/span&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt; thousand dollar principal amount of Notes for each trading day of the measurement period was less than &lt;/span&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt;98%&lt;/span&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt; of the product of the last reported sale price of Veeco&#x2019;s common stock and the conversion rate on each such trading day;&lt;/span&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:25.2pt;text-indent:-25.2pt;margin:0pt 0pt 0pt 36pt;"&gt;&lt;span style="font-size:10pt;margin-left:0pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"&gt;&lt;tr&gt;&lt;td style="width:36pt;"/&gt;&lt;td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:25.2pt;padding:0pt;"&gt;(iii)&lt;/td&gt;&lt;td style="padding:0pt;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt;If the Company calls any or all of applicable series of the Notes for redemption at any time prior to the close of business on the scheduled trading day immediately preceding the redemption date; or&lt;/span&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:25.2pt;text-indent:-25.2pt;margin:0pt 0pt 0pt 36pt;"&gt;&lt;span style="font-size:10pt;margin-left:0pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"&gt;&lt;tr&gt;&lt;td style="width:36pt;"/&gt;&lt;td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:25.2pt;padding:0pt;"&gt;(iv)&lt;/td&gt;&lt;td style="padding:0pt;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt;Upon the occurrence of specified corporate events. &lt;/span&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;For the calendar quarter ended December 31, 2021, the last reported sales price of common stock during the 30 consecutive trading days, based on the criteria outlined in (i) above, was greater than 130% of the conversion price of the 2027 Notes, and as such the 2027 Notes are convertible by the holders until March 31, 2022.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Holders may convert their notes at any time, regardless of the foregoing circumstances, on or after October 15, 2022 with respect to the 2023 Notes, October 15, 2024 with respect to the 2025 Notes, and October 1, 2026 with respect to the 2027 Notes, until the close of business on the business day immediately preceding the respective maturity date. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;"&gt;Upon conversion by the holders, the Company may elect to settle such conversion in shares of its common stock, cash, or a combination thereof. As a result of its cash conversion options, the Company segregated the liability component of the instruments from the equity components. The liability components were measured by estimating the fair value of a non-convertible debt instrument that is similar in its terms to the Notes. The calculation of the fair value of the debt components required the use of Level 3 inputs, including utilization of convertible investors&#x2019; credit assumptions and high yield bond indices. Fair value was estimated through discounting future interest and principal payments, an income approach, due under the Notes at a discount rate equal to the estimated borrowing rate for similar non-convertible debt, or &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;7.0%&lt;/span&gt;&lt;span style="font-size:10pt;"&gt;, &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;8.0%&lt;/span&gt;&lt;span style="font-size:10pt;"&gt;, and &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;9.1%&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; with respect to the &lt;/span&gt;&lt;span style="-sec-ix-hidden:Hidden_MKg7QyI-Vkiu_E8BwX71ww;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt;2023&lt;/span&gt;&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; Notes, &lt;/span&gt;&lt;span style="-sec-ix-hidden:Hidden_rTmcThG5O0-ZHrYEBDPNfA;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt;2025&lt;/span&gt;&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; Notes, and &lt;/span&gt;&lt;span style="-sec-ix-hidden:Hidden_KBc9K9UzVkSijqFS6jnqXQ;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt;2027&lt;/span&gt;&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; Notes, respectively. The excess of the aggregate face values of the Notes over the estimated fair values of the liability components of &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;$72.5&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; million, &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;$21.0&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; million, and &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;$34.2&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; million with respect to the 2023 Notes, 2025 Notes, and 2027 Notes, respectively, were recognized as debt discounts and recorded as an increase to additional paid-in capital and will be amortized over the expected lives of the Notes using the effective interest rate method. Amortization of the debt discounts are recognized as non-cash interest expense.&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The transaction costs of $9.2 million, $1.9 million, and $3.1 million incurred in connection with the issuance of the 2023 Notes, 2025 Notes, and 2027 Notes, respectively, were allocated to the liability and equity components based on their relative values. Transaction costs allocated to the liability component are being amortized using the effective interest rate method and recognized as non-cash interest expense over the expected terms of the Notes. Transaction costs allocated to the equity component of $1.9 million, $0.3 million, and $0.8 million with respect to the 2023 Notes, 2025 Notes, and 2027 Notes, respectively, reduced the value of the equity components recognized in stockholders' equity.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;background:#ffffff;margin:0pt;"&gt;In connection with the offering of the 2027 Notes, on May&#160;13, 2020, the Company entered into privately negotiated capped call transactions (the &#x201c;Capped Call Transactions&#x201d;), pursuant to capped call confirmations, covering the total principal amount of the 2027 Notes for an aggregate premium of $10.3&#160;million. The Capped Call Transactions are expected generally to reduce the potential dilution to the Company&#x2019;s common stock upon any conversion of the 2027 Notes and/or offset any cash payments the Company is required to make in excess of the aggregate principal amount of converted 2027 Notes, as the case may be, with such reduction and/or offset subject to a cap based on the capped price of the Capped Call Transactions. The Capped Call Transactions exercise price is equal to the initial conversion price of the 2027 Notes, and the capped price of the Capped Call Transactions is approximately $18.46&#160;per share and is subject to certain adjustments under the terms of the capped call confirmations.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;background:#ffffff;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;background:#ffffff;margin:0pt;"&gt;The Capped Call Transactions are separate transactions entered into by the Company with the capped call counterparties, are not part of the terms of the 2027 Notes and do not change the holders&#x2019; rights under the 2027 Notes. Holders of the &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;background:#ffffff;margin:0pt;"&gt;2027 Notes do not have any rights with respect to the Capped Call Transactions. The cost of the Capped Call Transactions is not expected to be tax-deductible as the Company did not elect to integrate the Capped Call Transactions into the 2027 Notes for tax purposes. The Company used a portion of the net proceeds from the offering of the 2027 Notes to pay for the Capped Call Transactions, and the cost of the Capped Call Transactions was recorded as a reduction of the Company&#x2019;s additional paid-in capital in the accompanying consolidated financial statements.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The carrying values of the Notes are as follows:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:21.23%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.13%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.07%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:10.77%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:10.88%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:11.05%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:10.88%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:10.88%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:10.83%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:21.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.07%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:bottom;white-space:nowrap;width:37.22%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December&#160;31, 2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:bottom;white-space:nowrap;width:37.11%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December&#160;31, 2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:21.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-family:'Calibri','Helvetica','sans-serif';font-weight:bold;"&gt;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.07%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:10.77%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Principal Amount&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:10.88%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Unamortized &lt;/b&gt;&lt;b style="font-weight:bold;"&gt;&lt;br/&gt;&lt;/b&gt;&lt;b style="font-weight:bold;"&gt;debt discount/&lt;/b&gt;&lt;b style="font-weight:bold;"&gt;&lt;br/&gt;&lt;/b&gt;&lt;b style="font-weight:bold;"&gt;transaction costs&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:11.05%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Net carrying value&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:10.88%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Principal Amount&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:10.88%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Unamortized &lt;/b&gt;&lt;b style="font-weight:bold;"&gt;&lt;br/&gt;&lt;/b&gt;&lt;b style="font-weight:bold;"&gt;debt discount/&lt;/b&gt;&lt;b style="font-weight:bold;"&gt;&lt;br/&gt;&lt;/b&gt;&lt;b style="font-weight:bold;"&gt;transaction costs&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:10.83%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Net carrying value&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="19" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:21.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.07%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="16" style="vertical-align:bottom;white-space:nowrap;width:76.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in&#160;thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:21.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;2023 Notes&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.13%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.77%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 20,173&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.88%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (967)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 19,206&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.88%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 131,695&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.88%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (11,925)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.83%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 119,770&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:21.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;2025 Notes&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.77%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 132,500&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.88%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (17,302)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.05%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 115,198&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.88%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 132,500&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.88%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (22,097)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.83%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 110,403&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:21.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;2027 Notes&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.13%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.77%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 125,000&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.14%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.88%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (29,966)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.05%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 95,034&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.88%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 125,000&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.14%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.88%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (34,058)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.83%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 90,942&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:21.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;&lt;b style="font-weight:bold;"&gt;Net carrying value&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 0pt 12pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;margin-left:0pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.77%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 277,673&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.14%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.88%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (48,235)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.05%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 229,438&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.88%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 389,195&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.14%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.88%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (68,080)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.83%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 321,115&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Total interest expense related to the Notes is as follows:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:52.87%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.68%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.68%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.68%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:52.87%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:43.94%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;For&#160;the year ended&#160;December&#160;31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:52.87%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.71%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.71%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.71%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2019&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="11" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:52.87%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:43.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in&#160;thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:52.87%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Cash Interest Expense&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.53%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.68%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.68%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.68%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:52.87%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Coupon interest expense - 2023 Notes&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.68%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 3,138&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.68%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 7,390&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.68%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 9,315&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:52.87%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Coupon interest expense - 2025 Notes&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.53%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.68%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 4,637&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.68%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 554&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.68%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:52.87%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Coupon interest expense - 2027 Notes&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.68%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 4,688&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.68%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 2,904&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.68%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:52.87%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Non-cash Interest Expense&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.53%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.68%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.68%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.68%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:52.87%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Amortization of debt discount/transaction costs- 2023 Notes&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.68%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 4,932&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.68%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 10,887&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.68%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 12,676&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:52.87%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Amortization of debt discount/transaction costs- 2025 Notes&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.53%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.68%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 4,795&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.68%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 546&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.68%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:52.87%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Amortization of debt discount/transaction costs- 2027 Notes&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.68%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 4,092&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.68%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 2,359&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.68%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:52.87%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;&lt;b style="font-weight:bold;"&gt;Total Interest Expense&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.53%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.68%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 26,282&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.68%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 24,640&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.68%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 21,991&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;"&gt;The Company determined the Notes are Level 2 liabilities in the fair value hierarchy and estimated their fair values as &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;$20.4&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; million, &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;$175.0&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; million, and &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;$258.9&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; million at December 31, 2021 for the &lt;/span&gt;&lt;span style="-sec-ix-hidden:Hidden_v7FrO6gR5k6m5-7DQ1kckQ;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt;2023&lt;/span&gt;&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; Notes, &lt;/span&gt;&lt;span style="-sec-ix-hidden:Hidden_iDUGabx5SEm91tvdRE9icA;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt;2025&lt;/span&gt;&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; Notes, and &lt;/span&gt;&lt;span style="-sec-ix-hidden:Hidden_vVG8kbaS3Euyrx-tkSC52A;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt;2027&lt;/span&gt;&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; Notes, respectively.&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;Revolving Credit Facility&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;"&gt;On December 16, 2021, the Company entered into a loan and security agreement providing for a senior secured revolving credit facility in an aggregate principal amount of &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;$150&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; million (the &#x201c;Credit Facility&#x201d;), including a &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;$15&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; million letter of credit sublimit. The Credit Facility is guaranteed by the Company&#x2019;s direct material U.S. subsidiaries, subject to customary exceptions. Borrowings under the Credit Facility are secured by a first-priority lien on substantially all of the assets of the Company, subject to customary exceptions. &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;The Credit Facility has a term of &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;five years&lt;/span&gt;&lt;span style="font-size:10pt;"&gt;, maturing on December 16, 2026, or earlier if certain liquidity measures are not met prior to the 2025 Notes maturing. &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;Subject to certain conditions and the receipt of commitments from the lenders, the Loan and Security Agreement allows for revolving commitments under the Credit Facility to be increased by up to &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;$75&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; million. The existing lenders under the Credit Facility are entitled, but not obligated, to provide such incremental commitments.&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Borrowings will bear interest at a floating rate which can be, at the Company&#x2019;s option, either (a) an alternate base rate plus an applicable rate ranging from 0.50% to 1.25% or (b) a SOFR rate (with a floor of 0.00%) for the specified interest &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;period plus an applicable rate ranging from 1.50% to 2.25%, in each case, depending on the Company&#x2019;s Secured Net Leverage Ratio (as defined in the Loan and Security Agreement). The Company will pay an unused commitment fee ranging from 0.25% to 0.35% based on unused capacity under the Credit Facility and the Company&#x2019;s Secured Net Leverage Ratio. The Company may use the proceeds of borrowings under the Credit Facility to pay transaction fees and expenses, provide for its working capital needs and reimburse drawings under letters of credit and for other general corporate purposes.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The Loan and Security Agreement contains customary affirmative covenants for transactions of this type, including, among others, the provision of financial and other information to the administrative agent, notice to the administrative agent upon the occurrence of certain material events, preservation of existence, maintenance of properties and insurance, compliance with laws, including environmental laws, the provision of additional guarantees, and an affiliate transactions covenant, subject to certain exceptions. The Loan and Security Agreement contains customary negative covenants, including, among others, restrictions on the ability to merge and consolidate with other companies, incur indebtedness, refinance our existing convertible notes, grant liens or security interests on assets, make investments, acquisitions, loans, or advances, pay dividends, and sell or otherwise transfer assets.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The Loan and Security Agreement contains financial maintenance covenants that require the Borrower to maintain an Interest Coverage Ratio (as defined in the Loan and Security Agreement) of not less than 3.00 to 1.00, a Total Net Leverage Ratio (as defined in the Loan and Security Agreement) of not more than 4.50 to 1.00, and a Secured Net Leverage Ratio (as defined in the Loan and Security Agreement) of not more than 2.50 to 1.00, in each case, tested at the end of each fiscal quarter commencing with the fiscal quarter ending March 31, 2022. 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style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:10.88%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:11.05%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:10.88%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:10.88%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:10.83%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:21.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.07%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:bottom;white-space:nowrap;width:37.22%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December&#160;31, 2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:bottom;white-space:nowrap;width:37.11%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December&#160;31, 2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:21.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-family:'Calibri','Helvetica','sans-serif';font-weight:bold;"&gt;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.07%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:10.77%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Principal Amount&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:10.88%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Unamortized &lt;/b&gt;&lt;b style="font-weight:bold;"&gt;&lt;br/&gt;&lt;/b&gt;&lt;b style="font-weight:bold;"&gt;debt discount/&lt;/b&gt;&lt;b style="font-weight:bold;"&gt;&lt;br/&gt;&lt;/b&gt;&lt;b style="font-weight:bold;"&gt;transaction costs&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:11.05%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Net carrying value&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:10.88%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Principal Amount&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:10.88%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Unamortized &lt;/b&gt;&lt;b style="font-weight:bold;"&gt;&lt;br/&gt;&lt;/b&gt;&lt;b style="font-weight:bold;"&gt;debt discount/&lt;/b&gt;&lt;b style="font-weight:bold;"&gt;&lt;br/&gt;&lt;/b&gt;&lt;b style="font-weight:bold;"&gt;transaction costs&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:10.83%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Net carrying value&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="19" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:21.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.07%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="16" style="vertical-align:bottom;white-space:nowrap;width:76.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in&#160;thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:21.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;2023 Notes&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.13%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.77%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 20,173&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.88%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (967)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 19,206&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.88%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 131,695&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.88%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (11,925)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.83%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 119,770&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:21.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;2025 Notes&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.77%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 132,500&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.88%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (17,302)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.05%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 115,198&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.88%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 132,500&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.88%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (22,097)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.83%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 110,403&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:21.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;2027 Notes&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.13%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.77%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 125,000&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.14%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.88%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (29,966)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.05%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 95,034&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.88%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 125,000&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.14%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.88%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (34,058)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.83%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 90,942&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:21.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;&lt;b style="font-weight:bold;"&gt;Net carrying value&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 0pt 12pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;margin-left:0pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.77%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 277,673&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.14%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.88%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (48,235)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.05%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 229,438&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.88%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 389,195&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.14%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.88%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (68,080)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.83%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 321,115&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;</us-gaap:ConvertibleDebtTableTextBlock>
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Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.68%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.68%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:52.87%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Coupon interest expense - 2023 Notes&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.68%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 3,138&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.68%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 7,390&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.68%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 9,315&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:52.87%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Coupon interest expense - 2025 Notes&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.53%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.68%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 4,637&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.68%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 554&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.68%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:52.87%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Coupon interest expense - 2027 Notes&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.68%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 4,688&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.68%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 2,904&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.68%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:52.87%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Non-cash Interest Expense&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.53%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.68%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.68%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.68%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:52.87%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Amortization of debt discount/transaction costs- 2023 Notes&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.68%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 4,932&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.68%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 10,887&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.68%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 12,676&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:52.87%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Amortization of debt discount/transaction costs- 2025 Notes&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.53%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.68%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 4,795&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.68%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 546&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.68%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:52.87%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Amortization of debt discount/transaction costs- 2027 Notes&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.68%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 4,092&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.68%;border-bottom:1px solid 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Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:52.87%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;&lt;b style="font-weight:bold;"&gt;Total Interest Expense&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.53%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span 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    <us-gaap:DerivativeInstrumentsAndHedgingActivitiesDisclosureTextBlock
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      id="Tb_BXXLll_iOU-NnVEyJJjy0A">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Note 11 &#x2014; Derivative Financial Instruments&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The Company is exposed to financial market risks arising from changes in currency exchange rates. Changes in currency exchange rates could affect the Company&#x2019;s foreign currency denominated monetary assets and liabilities and forecasted cash flows. The Company sometimes enters into monthly forward derivative contracts with the intent of mitigating a portion of this risk. The Company only used derivative financial instruments in the context of hedging and not for speculative purposes and had not designated its foreign exchange derivatives as hedges. Accordingly, changes in fair value from these contracts were recorded as &#x201c;Other operating expense (income), net&#x201d; in the Company&#x2019;s Consolidated Statements of Operations. The Company executed derivative transactions with highly rated financial institutions to mitigate counterparty risk.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:1pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;"&gt;The Company did not have any outstanding derivative contracts at December 31, 2021 and 2020. &lt;/span&gt; &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;</us-gaap:DerivativeInstrumentsAndHedgingActivitiesDisclosureTextBlock>
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      id="Tb_715HRdJwWkCII1iopvcuxg">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Note 12 &#x2014; Stockholders&#x2019; Equity&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;Accumulated Other Comprehensive Income (&#x201c;AOCI&#x201d;)&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The following table presents the changes in the balances of each component of AOCI, net of tax:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:63.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.57%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.67%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:63.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Unrealized&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:63.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.25%;margin:0pt;padding:0pt;"&gt;&lt;p 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style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:63.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Foreign&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;on Available&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New 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style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Currency&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;for&#160;Sale&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td 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Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.64%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Translation&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Securities&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.6%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Total&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="10" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:63.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:34.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in&#160;thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:63.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Balance - December&#160;31, 2018&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.44%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 1,836&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.57%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.67%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (16)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.44%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 1,820&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:63.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Other comprehensive income (loss)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 25&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.57%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.67%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 49&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 74&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:63.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Balance - December&#160;31, 2019&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.44%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 1,861&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.57%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.67%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 33&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.44%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 1,894&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:63.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Other comprehensive income (loss)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 5&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.57%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.67%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (53)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (48)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:63.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Balance - December&#160;31, 2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.44%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 1,866&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.57%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.67%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (20)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.44%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 1,846&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:63.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Other comprehensive income (loss)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (52)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.57%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.67%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (311)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (363)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:63.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Balance - December&#160;31, 2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.44%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.2%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 1,814&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.57%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.67%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (331)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.44%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.15%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 1,483&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The Company did not allocate additional tax expense (benefit) to other comprehensive income (loss) for all years presented as the Company is in a full valuation allowance position such that a deferred tax asset related to amounts recognized in other comprehensive income is not regarded as realizable on a more-likely-than-not basis.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;Preferred Stock&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The Board of Directors has authority under the Company&#x2019;s Certificate of Incorporation to issue shares of preferred stock, par value $0.01, with voting and economic rights to be determined by the Board of Directors. As of December 31, 2021, no preferred shares have been issued.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;Treasury Stock&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;On December 11, 2017, the Company&#x2019;s Board of Directors authorized a program to repurchase up to $100 million of the Company&#x2019;s common stock to be completed through December 11, 2019. At the end of the program, $14.3 million of the $100 million had been utilized. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The Company records treasury stock purchases under the cost method using the first-in, first-out (&#x201c;FIFO&#x201d;) method. Upon reissuance of treasury stock, amounts in excess of the acquisition cost are credited to additional paid-in capital. If the Company reissues treasury stock at an amount below its acquisition cost and if additional paid-in capital associated with prior treasury stock transactions is insufficient to cover the difference between the acquisition cost and the reissue price, this difference is charged to accumulated deficit.&lt;/p&gt;</us-gaap:StockholdersEquityNoteDisclosureTextBlock>
    <us-gaap:ScheduleOfAccumulatedOtherComprehensiveIncomeLossTableTextBlock
      contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw"
      id="Tb_-M_11h5tnUqpUYMqkqzmJA">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:63.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.57%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.67%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:63.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Unrealized&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:63.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Gains&#160;(Losses)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:63.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Foreign&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;on Available&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:63.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Currency&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;for&#160;Sale&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:63.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.64%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Translation&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Securities&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.6%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Total&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="10" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:63.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:34.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in&#160;thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:63.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Balance - December&#160;31, 2018&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.44%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 1,836&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.57%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.67%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (16)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.44%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 1,820&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:63.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Other comprehensive income (loss)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 25&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.57%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.67%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 49&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 74&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:63.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Balance - December&#160;31, 2019&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.44%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 1,861&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.57%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.67%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 33&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.44%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 1,894&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:63.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Other comprehensive income (loss)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 5&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.57%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.67%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (53)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (48)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:63.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Balance - December&#160;31, 2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.44%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 1,866&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.57%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.67%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (20)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.44%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 1,846&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:63.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Other comprehensive income (loss)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (52)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.57%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.67%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (311)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.44%;border-bottom:1px solid 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      id="Tb_eC9sVnwayUW0ayuz_6WYMw">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Note 13 &#x2014; Stock Plans&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Share-based incentive awards are provided to employees under the terms of the Company&#x2019;s equity incentive compensation plans (the &#x201c;Plans&#x201d;), which are administered by the Compensation Committee of the Board of Directors. The 2019 Plan originated as the 2010 Stock Incentive Plan and was originally approved by the Company&#x2019;s shareholders in May 2010. This Plan was subsequently amended, as approved by shareholders, in 2013, 2016, and 2019 (at which time the Plan was renamed the 2019 Stock Incentive Plan (as amended to date, the &#x201c;2019 Plan&#x201d;)). The Company&#x2019;s employees, non-employee directors, and consultants are eligible to receive awards under the 2019 Plan, which can include non-qualified stock options, incentive stock options, RSAs, RSUs, PSAs, PSUs, share appreciation rights, &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;dividend equivalent rights, or any combination thereof. The Company settles awards under the Plans with newly issued shares or with shares held in treasury.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;"&gt;In 2013, the Board of Directors granted equity awards to certain employees under the Company&#x2019;s 2013 Inducement Stock Incentive Plan (the &#x201c;Inducement Plan&#x201d;). The Company issued &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;124,500&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; stock option shares and &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;87,000&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; RSUs under this plan. Stock options under this plan vest over a &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;three year&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; period and have a &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;10-year&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; term, and RSUs under this plan vest over a &lt;/span&gt;&lt;span style="-sec-ix-hidden:Hidden_djJaia4sV0eMPU_iBjU1ow;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt;two&lt;/span&gt;&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; or &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;four year&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; period. At December 31, 2013, the Inducement Plan was merged into the 2019 Plan and is considered an inactive plan with &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;no&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; further shares available for grant. At December 31, 2021, there are &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;2,000&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; option shares and &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;no&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; RSUs outstanding under the Inducement Plan.&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;"&gt;The Company is authorized to issue up to &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;13.3&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; million shares under the 2019 Plan. Option awards are granted with an exercise price equal to the closing price of the Company&#x2019;s common stock on the trading day prior to the date of grant; option awards generally vest over a &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;three year&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; period and have a &lt;/span&gt;&lt;span style="-sec-ix-hidden:Hidden_MjZTm5D10UiD7Ewg4_02Ew;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt;seven&lt;/span&gt;&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; or &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;ten year&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; term. RSAs and RSUs generally vest over &lt;/span&gt;&lt;span style="-sec-ix-hidden:Hidden_xrGOZ4M_GkODaWr_-MAcEg;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt;one&lt;/span&gt;&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; to &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;five years&lt;/span&gt;&lt;span style="font-size:10pt;"&gt;. Certain option and share awards provide for accelerated vesting if there is a change in control, as defined in the 2019 Plan. At December 31, 2021, there are &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;0.4&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; million option shares and &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;0.7&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; million RSUs and PSUs outstanding under the 2019 Plan.&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;"&gt;The Company is authorized to issue up to &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;2.25&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; million shares under the approved 2016 employee stock purchase plan (&#x201c;ESPP&#x201d;), including additional shares authorized under plan amendments approved by shareholders in 2019 and 2021. Under the ESPP, substantially all employees in the U.S. may purchase the Company&#x2019;s common stock through payroll deductions at a price equal to &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;85&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; percent of the lower of the fair market value of the Company&#x2019;s common stock at the beginning or end of each &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;six-month&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; offer period, as defined in the ESPP, and subject to certain limits. The ESPP was approved by the Company&#x2019;s shareholders. &lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;Shares Reserved for Future Issuance&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;At December 31, 2021, the Company has 3.4 million shares reserved to cover exercises of outstanding stock options, vesting of RSUs, and additional grants under the 2019 Plan.&lt;span style="font-size:12pt;"&gt; &lt;/span&gt;At December 31, 2021, the Company has 0.8 million shares reserved to cover future issuances under the ESPP Plan.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;Share-Based Compensation&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The Company recognized share-based compensation in the following line items in the Consolidated Statements of Operations for the periods indicated:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:61.97%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.62%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.64%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.65%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.97%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:33.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;For the year ended December&#160;31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.97%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.91%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.92%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.94%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2019&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="11" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.97%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:33.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.97%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Cost of sales&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.62%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 2,373&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 1,870&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.65%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 1,903&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.97%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Research and development&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 3,850&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 2,900&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.65%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 3,340&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.97%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Selling, general, and administrative&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.62%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 9,026&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 7,933&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.65%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 9,630&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.97%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Restructuring&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.62%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.64%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.65%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 397&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.97%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;&lt;b style="font-weight:bold;"&gt;Total&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.62%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 15,249&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.64%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 12,703&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.65%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 15,270&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The Company did not realize any tax benefits associated with share-based compensation for the years ended December 31, 2021, 2020, and 2019 due to the full valuation allowance on its U.S. deferred tax assets. See Note 16, &#x201c;Income Taxes&#x201d; for additional information. The Company capitalized an immaterial amount of share-based compensation into inventory for the years ended December 31, 2021, 2020, and 2019.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Unrecognized share-based compensation costs at December 31, 2021 are summarized below:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:69.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.67%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.71%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Unrecognized&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.67%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Weighted&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.71%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Share-Based&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.67%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Average&#160;Period&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.71%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Compensation&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.67%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Expected&#160;to&#160;be&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.71%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Costs&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.67%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Recognized&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="6" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;white-space:nowrap;width:14.77%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.67%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in years)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.49%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Restricted stock units&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 2,064&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.67%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt;&lt;span style="font-size:10pt;"&gt; 1.9&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Restricted stock awards&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 16,791&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.67%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt;&lt;span style="font-size:10pt;"&gt; 1.9&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.49%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Performance share units&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.4%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.3%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 5,363&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.67%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt;&lt;span style="font-size:10pt;"&gt; 2.1&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Total unrecognized share-based compensation cost&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.4%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.3%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 24,218&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.67%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt;&lt;span style="font-size:10pt;"&gt; 1.9&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;Stock Option Awards&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Stock options are awards issued to employees that entitle the holder to purchase shares of the Company&#x2019;s stock at a fixed price. The following table summarizes the equity activity related to stock options:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:71.5%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.6%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.92%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:71.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.53%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Weighted&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:71.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Number&#160;of&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.53%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Average&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:71.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&#160;&#160;&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Shares&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&#160;&#160;&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.53%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Exercise&#160;Price&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:71.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.6%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.92%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:71.5%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;white-space:pre-wrap;"&gt;Balance -  December&#160;31, 2018&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 1,222&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.6%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.92%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 34.80&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:71.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Expired&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (103)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.6%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.92%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 33.97&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:71.5%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;white-space:pre-wrap;"&gt;Balance -  December&#160;31, 2019&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 1,119&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.6%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.92%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 34.88&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:71.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Expired&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (389)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.6%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.92%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 34.15&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:71.5%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;white-space:pre-wrap;"&gt;Balance -  December&#160;31, 2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 730&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.6%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.92%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 35.26&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:71.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Exercised&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (2)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.6%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.92%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 23.36&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:71.5%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Expired&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (285)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.6%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.92%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 40.16&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:71.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;white-space:pre-wrap;"&gt;Balance -  December&#160;31, 2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 443&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.6%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.92%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 32.15&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The following table summarizes stock option information at December 31, 2021:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:25.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.79%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:16.7%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:25.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="9" style="vertical-align:bottom;white-space:nowrap;width:71.09%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Options&#160;Outstanding and Exercisable&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:25.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:7pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:7pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.79%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:7pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:16.7%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Weighted&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:7pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:15.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:25.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.87%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Aggregate&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:16.7%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Average&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:15.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Weighted&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:25.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.87%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Intrinsic&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:16.7%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Remaining&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:15.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Average&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:25.48%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:7pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Range&#160;of&#160;Exercise&#160;Prices&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Shares&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.87%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Value&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:16.7%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Contractual&#160;Life&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:15.48%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Exercise&#160;Price&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:25.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in&#160;thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.87%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in&#160;thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:16.7%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in&#160;years)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:15.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:25.48%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$20.00 - $30.00&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.13%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 12&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.08%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.79%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:16.7%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt;&lt;span style="font-size:8pt;"&gt; 1.6&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.08%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="-sec-ix-hidden:Hidden_fJ7s2Z2xnEqsdcmd3aYg7g;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:8pt;font-style:normal;font-weight:normal;"&gt;$&lt;/span&gt;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 29.26&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:25.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$30.01 - $40.00&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 431&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.79%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:16.7%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt;&lt;span style="-sec-ix-hidden:Hidden_Od6T0xFOwEWWIugp-IBsQQ;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:8pt;font-style:normal;font-weight:normal;"&gt; 0.9&lt;/span&gt;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 32.22&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:25.48%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.13%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 443&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.08%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.79%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:16.7%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt;&lt;span style="-sec-ix-hidden:Hidden_wySSYfbG00Wt32ljky0kfw;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:8pt;font-style:normal;font-weight:normal;"&gt; 1.0&lt;/span&gt;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.08%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 32.15&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="background:#ffffff;"&gt;There were&#160;&lt;/span&gt;&lt;span style="background:#ffffff;"&gt;no&lt;/span&gt;&lt;span style="background:#ffffff;"&gt;&#160;unvested options outstanding as of December 31, 2021.&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;background:#ffffff;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The following table summarizes information on options exercised for the periods indicated:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:69.29%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.92%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.92%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:28.64%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Year ended December&#160;31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.17%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.17%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2019&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="10" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:28.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Cash received from options exercised&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.92%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 37&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.92%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Intrinsic value of options exercised&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.92%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 6&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.92%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;RSAs, RSUs, PSAs, PSUs&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;"&gt;RSAs are stock awards issued to employees and directors that are subject to specified restrictions and a risk of forfeiture. RSUs are stock awards issued to employees that entitle the holder to receive shares of common stock as the awards vest. PSAs and PSUs are awards that result in an issuance of shares of common stock to employees if certain performance or market conditions are achieved. All of these awards typically vest over &lt;/span&gt;&lt;span style="-sec-ix-hidden:Hidden_4XeCJSX0U0my8ezkiVd-YA;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt;one&lt;/span&gt;&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; to &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;four years&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; and vesting is subject to the employee's continued service with the Company and, in the case of performance awards, meeting certain performance or market conditions. The fair value of the awards is determined and fixed based on the closing price of the Company&#x2019;s common stock on the trading day prior to the date of grant, or, in the case of performance awards with market conditions, fair value is determined using a Monte Carlo simulation. &lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The following table summarizes the equity activity of non-vested restricted shares and performance shares:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:74.01%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.71%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:74.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&#160;&#160;&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&#160;&#160;&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Weighted&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:74.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Average&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:74.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Number&#160;of&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Grant&#160;Date&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:74.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Shares&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.01%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Fair&#160;Value&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:74.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in&#160;thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.71%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:74.01%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;white-space:pre-wrap;"&gt;Balance -  December&#160;31, 2018&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 2,218&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.71%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 20.74&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:74.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Granted&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 1,107&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.71%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 11.53&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:74.01%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Performance award adjustments&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (25)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.71%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 28.91&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:74.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Vested&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (768)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.71%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 21.77&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:74.01%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Forfeited&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (275)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.71%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 18.48&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:74.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;white-space:pre-wrap;"&gt;Balance -  December&#160;31, 2019&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 2,257&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.71%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 16.20&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:74.01%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Granted&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 1,054&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.71%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 9.53&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:74.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Performance award adjustments&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (51)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.71%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 30.94&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:74.01%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Vested&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (798)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.71%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 16.01&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:74.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Forfeited&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (422)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.71%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 14.87&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:74.01%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;white-space:pre-wrap;"&gt;Balance -  December&#160;31, 2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 2,040&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.71%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 12.73&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:74.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Granted&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 1,031&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.71%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 24.26&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:74.01%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Performance award adjustments&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 159&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.71%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 18.38&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:74.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Vested&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (1,014)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.71%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 15.50&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:74.01%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Forfeited&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (133)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.71%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 15.08&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:74.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;white-space:pre-wrap;"&gt;Balance -  December&#160;31, 2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 2,083&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.71%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 17.33&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The total fair value of shares that vested during the years ended December 31, 2021, 2020, and 2019 was $22.8 million, $9.0 million, and $8.8 million, respectively. For performance awards, the final number of shares earned will vary depending on the achievement of the actual results relative to the performance or market conditions. Each performance award is included in the table above at the grant date target share amount until the end of the performance period if not previously forfeited. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The fair value of performance awards with market conditions is estimated on the date of grant using a Monte Carlo simulation. Estimates of fair value are not intended to predict actual future events or the value ultimately realized by employees who receive these awards. The weighted average fair value and the assumptions used in calculating such values during fiscal years 2021, 2020, and 2019 for performance awards with market conditions were based on estimates at the date of grant as follows:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:67.07%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.71%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.33%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.33%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.48%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.07%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.71%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:28.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Year ended December&#160;31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.07%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.71%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:7.36%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:7.37%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:8.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2019&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.07%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Weighted average fair value&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.71%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.33%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 27.81&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.33%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 10.59&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.72%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.48%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 16.45&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.07%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Dividend yield&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.71%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.33%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 0&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.33%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 0&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.72%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 0&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.07%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Expected volatility factor&lt;sup style="font-family:'Calibri','Helvetica','sans-serif';font-size:8.25pt;line-height:100%;top:0pt;vertical-align:top;"&gt;(1)&lt;/sup&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.71%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.33%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 63&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.33%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 60&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.72%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.48%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 53&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.07%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Risk-free interest rate&lt;sup style="font-family:'Calibri','Helvetica','sans-serif';font-size:8.25pt;line-height:100%;top:0pt;vertical-align:top;"&gt;(2)&lt;/sup&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.71%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.33%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 0.34&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.33%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 0.54&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.72%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 2.37&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.07%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Expected life (in years)&lt;sup style="font-family:'Calibri','Helvetica','sans-serif';font-size:8.25pt;line-height:100%;top:0pt;vertical-align:top;"&gt;(3)&lt;/sup&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.71%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.33%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt;&lt;span style="font-size:10pt;"&gt; 3.0&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.33%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt;&lt;span style="font-size:10pt;"&gt; 3.0&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.72%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.48%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt;&lt;span style="font-size:10pt;"&gt; 2.8&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;div style="font-family:'Times New Roman','Times','serif';font-size:9.0pt;margin-bottom:0pt;margin-top:0pt;min-height:1.19em;position:relative;width:100%;"&gt;&lt;div style="background-color:#000000;height:1pt;position:relative;top:0.6em;width:25.0%;border:none;margin:0 auto 0 0;"/&gt;&lt;/div&gt;&lt;table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"&gt;&lt;tr&gt;&lt;td style="font-family:'Times New Roman','Times','serif';font-size:9pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;"&gt;(1)&lt;/td&gt;&lt;td style="padding:0pt;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:9pt;font-style:normal;font-weight:normal;"&gt;Expected volatility is measured using historical daily price changes of the Company&#x2019;s stock over the respective expected term.&lt;/span&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"&gt;&lt;tr&gt;&lt;td style="font-family:'Times New Roman','Times','serif';font-size:9pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;"&gt;(2)&lt;/td&gt;&lt;td style="padding:0pt;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:9pt;font-style:normal;font-weight:normal;"&gt;The risk-free rate for periods within the contractual term is based on the U.S. Treasury yield curve in effect at the time of grant.&lt;/span&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"&gt;&lt;tr&gt;&lt;td style="font-family:'Times New Roman','Times','serif';font-size:9pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;"&gt;(3)&lt;/td&gt;&lt;td style="padding:0pt;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:9pt;font-style:normal;font-weight:normal;"&gt;The expected life is the number of years the Company estimates that the awards will be outstanding prior to exercise. &lt;/span&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;Employee Stock Purchase Plan&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;For the years ended December 31, 2021, 2020, and 2019 the Company received cash proceeds of $3.4 million, $2.9 million, and $3.1 million, and issued shares of 196,024, 254,703, and 395,941, respectively, under the ESPP Plan. The weighted average estimated values of employee purchase rights as well as the weighted average assumptions that were used in calculating such values during fiscal years 2021, 2020, and 2019 were based on estimates at the date of grant as follows:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;min-height:0.0pt;margin:0pt;"&gt;&lt;span style="font-size:0pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:67.21%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.35%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.14%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.43%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.15%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.43%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.15%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.35%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:29.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Year ended December&#160;31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.35%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:7.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:7.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:7.53%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2019&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Weighted average fair value&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.35%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 5.90&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 4.81&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.37%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 2.96&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Dividend yield&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.35%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 0&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 0&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.37%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 0&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Expected volatility factor&lt;sup style="font-size:7.5pt;line-height:100%;top:0pt;vertical-align:top;"&gt;(1)&lt;/sup&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.35%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 52&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 70&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.37%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 60&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Risk-free interest rate&lt;sup style="font-size:7.5pt;line-height:100%;top:0pt;vertical-align:top;"&gt;(2)&lt;/sup&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.35%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 0.07&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 0.95&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.37%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 2.41&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Expected life (in years)&lt;sup style="font-size:7.5pt;line-height:100%;top:0pt;vertical-align:top;"&gt;(3)&lt;/sup&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.35%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt;&lt;span style="font-size:10pt;"&gt; 0.5&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt;&lt;span style="font-size:10pt;"&gt; 0.5&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.37%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt;&lt;span style="font-size:10pt;"&gt; 0.5&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;div style="font-family:'Times New Roman','Times','serif';font-size:9.0pt;margin-bottom:0pt;margin-top:0pt;min-height:1.19em;position:relative;width:100%;"&gt;&lt;div style="background-color:#000000;height:1pt;position:relative;top:0.6em;width:25.0%;border:none;margin:0 auto 0 0;"/&gt;&lt;/div&gt;&lt;table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"&gt;&lt;tr&gt;&lt;td style="font-family:'Times New Roman','Times','serif';font-size:9pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;"&gt;(1)&lt;/td&gt;&lt;td style="padding:0pt;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:9pt;font-style:normal;font-weight:normal;"&gt;Expected volatility is measured using historical daily price changes of the Company&#x2019;s stock over the respective expected term.&lt;/span&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"&gt;&lt;tr&gt;&lt;td style="font-family:'Times New Roman','Times','serif';font-size:9pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;"&gt;(2)&lt;/td&gt;&lt;td style="padding:0pt;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:9pt;font-style:normal;font-weight:normal;"&gt;The risk-free rate for periods within the contractual term is based on the U.S. Treasury yield curve in effect at the time of grant.&lt;/span&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"&gt;&lt;tr&gt;&lt;td style="font-family:'Times New Roman','Times','serif';font-size:9pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;"&gt;(3)&lt;/td&gt;&lt;td style="padding:0pt;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:9pt;font-style:normal;font-weight:normal;"&gt;The expected life is the number of years the Company estimates that the purchase rights will be outstanding prior to exercise. &lt;/span&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;</us-gaap:DisclosureOfCompensationRelatedCostsShareBasedPaymentsTextBlock>
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style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New 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style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.64%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span 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style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.65%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.97%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:33.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;For the year ended December&#160;31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.97%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.91%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.92%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.94%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2019&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="11" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.97%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:33.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.97%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Cost of sales&lt;/p&gt;&lt;/td&gt;&lt;td 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style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.65%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 1,903&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.97%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Research and development&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 3,850&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 2,900&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.65%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 3,340&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.97%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Selling, general, and administrative&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.62%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 9,026&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 7,933&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.65%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 9,630&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.97%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Restructuring&lt;/p&gt;&lt;/td&gt;&lt;td 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style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.64%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.65%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 397&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td 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Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.64%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 12,703&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td 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style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.71%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Share-Based&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.67%;margin:0pt;padding:0pt;"&gt;&lt;p 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Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Compensation&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.67%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Expected&#160;to&#160;be&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.71%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Costs&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.67%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Recognized&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="6" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;white-space:nowrap;width:14.77%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.67%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in years)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.49%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Restricted stock units&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 2,064&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.67%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt;&lt;span style="font-size:10pt;"&gt; 1.9&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Restricted stock awards&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 16,791&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.67%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt;&lt;span style="font-size:10pt;"&gt; 1.9&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.49%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Performance share units&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.4%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.3%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 5,363&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.67%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt;&lt;span style="font-size:10pt;"&gt; 2.1&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Total unrecognized share-based compensation cost&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.4%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.3%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 24,218&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span 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style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.6%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.92%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:71.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.53%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Weighted&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:71.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Number&#160;of&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.53%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Average&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:71.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&#160;&#160;&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Shares&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&#160;&#160;&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.53%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Exercise&#160;Price&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:71.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.6%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.92%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:71.5%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;white-space:pre-wrap;"&gt;Balance -  December&#160;31, 2018&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 1,222&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.6%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.92%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 34.80&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:71.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Expired&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (103)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.6%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.92%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 33.97&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:71.5%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;white-space:pre-wrap;"&gt;Balance -  December&#160;31, 2019&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 1,119&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.6%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.92%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 34.88&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:71.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Expired&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (389)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.6%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.92%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 34.15&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:71.5%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;white-space:pre-wrap;"&gt;Balance -  December&#160;31, 2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 730&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.6%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.92%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 35.26&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:71.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Exercised&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (2)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.6%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.92%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 23.36&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:71.5%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Expired&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (285)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.6%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.92%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 40.16&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:71.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;white-space:pre-wrap;"&gt;Balance -  December&#160;31, 2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 443&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.6%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.92%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 32.15&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;</us-gaap:ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock>
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style="vertical-align:bottom;white-space:nowrap;width:14.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.79%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New 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style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.79%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:7pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:16.7%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Weighted&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:7pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:15.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:25.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.87%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Aggregate&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:16.7%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Average&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:15.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Weighted&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:25.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.87%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Intrinsic&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:16.7%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Remaining&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:15.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Average&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:25.48%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:7pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Range&#160;of&#160;Exercise&#160;Prices&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Shares&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.87%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Value&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:16.7%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Contractual&#160;Life&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:15.48%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Exercise&#160;Price&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:25.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in&#160;thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.87%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in&#160;thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:16.7%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in&#160;years)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:15.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:25.48%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$20.00 - $30.00&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.13%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 12&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.08%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.79%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:16.7%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt;&lt;span style="font-size:8pt;"&gt; 1.6&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.08%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="-sec-ix-hidden:Hidden_fJ7s2Z2xnEqsdcmd3aYg7g;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:8pt;font-style:normal;font-weight:normal;"&gt;$&lt;/span&gt;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 29.26&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:25.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$30.01 - $40.00&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 431&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.79%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:16.7%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt;&lt;span style="-sec-ix-hidden:Hidden_Od6T0xFOwEWWIugp-IBsQQ;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:8pt;font-style:normal;font-weight:normal;"&gt; 0.9&lt;/span&gt;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 32.22&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:25.48%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.13%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 443&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.08%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.79%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:16.7%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt;&lt;span style="-sec-ix-hidden:Hidden_wySSYfbG00Wt32ljky0kfw;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:8pt;font-style:normal;font-weight:normal;"&gt; 1.0&lt;/span&gt;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.08%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 32.15&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;</us-gaap:ScheduleOfShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeTextBlock>
    <us-gaap:ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeLowerRangeLimit
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style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:28.64%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Year ended December&#160;31, 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style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.17%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.15%;border-bottom:1px solid 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style="vertical-align:bottom;white-space:nowrap;width:28.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Cash received from options exercised&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New 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style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td 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      id="Tb_ajD_tX9aM0CZhYtTsVnGBA">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:74.01%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.71%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:74.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&#160;&#160;&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&#160;&#160;&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Weighted&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:74.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Average&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:74.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Number&#160;of&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Grant&#160;Date&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:74.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Shares&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.01%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Fair&#160;Value&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:74.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in&#160;thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.71%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:74.01%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;white-space:pre-wrap;"&gt;Balance -  December&#160;31, 2018&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 2,218&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.71%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 20.74&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:74.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Granted&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 1,107&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.71%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 11.53&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:74.01%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Performance award adjustments&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (25)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.71%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 28.91&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:74.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Vested&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (768)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.71%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 21.77&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:74.01%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Forfeited&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (275)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.71%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 18.48&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:74.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;white-space:pre-wrap;"&gt;Balance -  December&#160;31, 2019&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 2,257&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.71%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 16.20&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:74.01%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Granted&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 1,054&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.71%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 9.53&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:74.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Performance award adjustments&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (51)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.71%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 30.94&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:74.01%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Vested&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (798)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.71%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 16.01&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:74.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Forfeited&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (422)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.71%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 14.87&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:74.01%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;white-space:pre-wrap;"&gt;Balance -  December&#160;31, 2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 2,040&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.71%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 12.73&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:74.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Granted&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 1,031&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.71%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 24.26&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:74.01%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Performance award adjustments&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 159&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.71%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 18.38&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:74.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Vested&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (1,014)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.71%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 15.50&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:74.01%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Forfeited&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (133)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.71%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 15.08&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:74.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;white-space:pre-wrap;"&gt;Balance -  December&#160;31, 2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 2,083&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.71%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 17.33&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;</us-gaap:ScheduleOfSharebasedCompensationRestrictedStockAndRestrictedStockUnitsActivityTableTextBlock>
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style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.33%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.33%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.48%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.07%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.71%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:28.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Year ended December&#160;31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.07%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.71%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:7.36%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:7.37%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:8.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2019&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.07%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Weighted average fair value&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.71%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.33%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 27.81&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.33%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 10.59&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.72%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.48%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 16.45&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.07%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Dividend yield&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.71%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.33%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 0&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.33%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 0&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.72%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 0&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.07%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Expected volatility factor&lt;sup style="font-family:'Calibri','Helvetica','sans-serif';font-size:8.25pt;line-height:100%;top:0pt;vertical-align:top;"&gt;(1)&lt;/sup&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.71%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.33%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 63&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.33%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 60&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.72%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.48%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 53&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.07%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Risk-free interest rate&lt;sup style="font-family:'Calibri','Helvetica','sans-serif';font-size:8.25pt;line-height:100%;top:0pt;vertical-align:top;"&gt;(2)&lt;/sup&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.71%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.33%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 0.34&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.33%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 0.54&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.72%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 2.37&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.07%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Expected life (in years)&lt;sup style="font-family:'Calibri','Helvetica','sans-serif';font-size:8.25pt;line-height:100%;top:0pt;vertical-align:top;"&gt;(3)&lt;/sup&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.71%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span 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style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.43%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.15%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.43%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.15%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.35%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:29.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Year ended December&#160;31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.35%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:7.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:7.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:7.53%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2019&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Weighted average fair value&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.35%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 5.90&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 4.81&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.37%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 2.96&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Dividend yield&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.35%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 0&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 0&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.37%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 0&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Expected volatility factor&lt;sup style="font-size:7.5pt;line-height:100%;top:0pt;vertical-align:top;"&gt;(1)&lt;/sup&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.35%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 52&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 70&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.37%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 60&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Risk-free interest rate&lt;sup style="font-size:7.5pt;line-height:100%;top:0pt;vertical-align:top;"&gt;(2)&lt;/sup&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.35%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 0.07&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 0.95&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.37%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 2.41&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Expected life (in years)&lt;sup style="font-size:7.5pt;line-height:100%;top:0pt;vertical-align:top;"&gt;(3)&lt;/sup&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.35%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt;&lt;span style="font-size:10pt;"&gt; 0.5&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt;&lt;span style="font-size:10pt;"&gt; 0.5&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.37%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span 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style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.02%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:80.53%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.05%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:top;width:80.53%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Net assets sold:&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.38%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';"&gt;&#160;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:16.08%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:top;width:80.53%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Inventories&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.05%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 6,311&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:top;width:80.53%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Property, plant, and equipment, net&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.38%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 372&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:top;width:80.53%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Intangible assets, net&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.05%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 6,546&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:top;width:80.53%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Goodwill&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.38%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 2,359&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:top;width:80.53%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Deferred revenue&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.05%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.02%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (59)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:top;width:80.53%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;white-space:pre-wrap;"&gt;    Total net assets sold&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.38%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 15,529&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:top;width:80.53%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Net proceeds after costs to sell&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.05%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.02%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (11,228)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:top;width:80.53%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;white-space:pre-wrap;"&gt;    Total impairment on sale of disposal group&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.38%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.05%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.02%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 4,301&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;</us-gaap:DisposalGroupsIncludingDiscontinuedOperationsDisclosureTextBlock>
    <us-gaap:DisposalGroupIncludingDiscontinuedOperationConsideration
      contextRef="As_Of_6_30_2020_us-gaap_DisposalGroupClassificationAxis_us-gaap_DisposalGroupDisposedOfBySaleNotDiscontinuedOperationsMember_us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsAxis_veco_OneNonCoreProductLineMember_1W_Sk4RRp0y9FYxrPesEPA"
      decimals="-5"
      id="Narr_WusmUe52PUS9ocG-FHkOIg"
      unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA">11400000</us-gaap:DisposalGroupIncludingDiscontinuedOperationConsideration>
    <veco:PercentageOfTransactionPrice
      contextRef="Duration_4_1_2020_To_6_30_2020_us-gaap_DisposalGroupClassificationAxis_us-gaap_DisposalGroupDisposedOfBySaleNotDiscontinuedOperationsMember_us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsAxis_veco_OneNonCoreProductLineMember_E_Hoa4TLYUeFEyooKL-HCA"
      decimals="2"
      id="Narr_dgkIcGkJ8UGWXWBMO3LuTA"
      unitRef="Unit_Standard_pure_60KFN_p23EC7YcClApV5TA">0.85</veco:PercentageOfTransactionPrice>
    <veco:PercentageOfAmountHeldInEscrow
      contextRef="Duration_4_1_2020_To_6_30_2020_us-gaap_DisposalGroupClassificationAxis_us-gaap_DisposalGroupDisposedOfBySaleNotDiscontinuedOperationsMember_us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsAxis_veco_OneNonCoreProductLineMember_E_Hoa4TLYUeFEyooKL-HCA"
      decimals="2"
      id="Narr_T3C61hbMrkmeOsLRdpFndg"
      unitRef="Unit_Standard_pure_60KFN_p23EC7YcClApV5TA">0.15</veco:PercentageOfAmountHeldInEscrow>
    <veco:TermOfAmountToBeHeldInEscrow
      contextRef="Duration_4_1_2020_To_6_30_2020_us-gaap_DisposalGroupClassificationAxis_us-gaap_DisposalGroupDisposedOfBySaleNotDiscontinuedOperationsMember_us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsAxis_veco_OneNonCoreProductLineMember_E_Hoa4TLYUeFEyooKL-HCA"
      id="Narr_bPwtx-kCJkeadinVhrJ-hg">P18M</veco:TermOfAmountToBeHeldInEscrow>
    <us-gaap:AssetImpairmentCharges
      contextRef="Duration_1_1_2019_To_12_31_2019_us-gaap_DisposalGroupClassificationAxis_us-gaap_DisposalGroupHeldforsaleNotDiscontinuedOperationsMember_us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsAxis_veco_OneNonCoreProductLineMember_4mBXnVd5skWSFKyoDQXvfQ"
      decimals="-5"
      id="Narr_PUG7NjQI80-Pej5CxSCWhA"
      unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA">4000000.0</us-gaap:AssetImpairmentCharges>
    <us-gaap:AssetImpairmentCharges
      contextRef="Duration_4_1_2020_To_6_30_2020_us-gaap_DisposalGroupClassificationAxis_us-gaap_DisposalGroupDisposedOfBySaleNotDiscontinuedOperationsMember_us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsAxis_veco_OneNonCoreProductLineMember_E_Hoa4TLYUeFEyooKL-HCA"
      decimals="-5"
      id="Narr_YDq4nJcXw0mTg-rKOR27AA"
      unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA">300000</us-gaap:AssetImpairmentCharges>
    <us-gaap:ScheduleOfDisposalGroupsIncludingDiscontinuedOperationsIncomeStatementBalanceSheetAndAdditionalDisclosuresTextBlock
      contextRef="Duration_1_1_2021_To_12_31_2021_jPYwO1bigkaSYICw23Cduw"
      id="Tb_BTzHQwUGUE-9PXw8jYMsyQ">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;min-height:0.0pt;margin:0pt;"&gt;&lt;span style="font-size:0pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:85.52%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:80.53%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.05%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.02%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:80.53%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.05%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:top;width:80.53%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Net assets sold:&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.38%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';"&gt;&#160;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:16.08%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:top;width:80.53%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Inventories&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.05%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 6,311&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:top;width:80.53%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Property, plant, and equipment, net&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.38%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 372&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:top;width:80.53%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Intangible assets, net&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.05%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 6,546&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:top;width:80.53%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Goodwill&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.38%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 2,359&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:top;width:80.53%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Deferred revenue&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.05%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.02%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (59)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:top;width:80.53%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;white-space:pre-wrap;"&gt;    Total net assets sold&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.38%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 15,529&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:top;width:80.53%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Net proceeds after costs to sell&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.05%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.02%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (11,228)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:top;width:80.53%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;white-space:pre-wrap;"&gt;    Total impairment on sale of disposal group&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.38%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.05%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.02%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 4,301&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;</us-gaap:ScheduleOfDisposalGroupsIncludingDiscontinuedOperationsIncomeStatementBalanceSheetAndAdditionalDisclosuresTextBlock>
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      unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA">15529000</us-gaap:AssetsOfDisposalGroupIncludingDiscontinuedOperation>
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      unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA">4301000</us-gaap:DisposalGroupNotDiscontinuedOperationLossGainOnWriteDown>
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      id="Tb_hP3MUG3gOE6N7pz9Oh1ATw">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Note 16 &#x2014; Income Taxes &lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The amounts of income (loss) before income taxes attributable to domestic and foreign operations were as follows:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:62.38%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.66%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.45%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.45%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:62.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:35.55%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Year ended December&#160;31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:62.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.95%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2019&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="10" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:62.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:35.55%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in&#160;thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:62.38%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Domestic&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.66%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 23,561&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.45%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (10,292)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.45%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (78,486)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:62.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Foreign&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.66%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 2,119&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.45%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 1,828&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.45%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 530&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:62.38%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Total&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.66%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 25,680&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.45%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (8,464)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.45%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (77,956)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Significant components of the expense (benefit) for income taxes consisted of the following:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:69.23%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.89%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.92%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:28.7%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Year ended December&#160;31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.17%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.19%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.21%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2019&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="10" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:28.7%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in&#160;thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Current:&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.89%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.92%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Federal&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.89%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.92%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Foreign&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.89%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 183&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 22&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.92%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 304&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;State and local&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 110&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 204&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.92%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 113&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"&gt;Total current expense (benefit) for income taxes&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.89%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 293&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 226&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.92%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 417&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Deferred:&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.89%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.92%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Federal&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.89%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 119&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 136&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.92%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 162&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Foreign&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.89%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (507)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (320)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.92%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 116&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;State and local&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.89%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (263)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (115)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.92%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 82&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"&gt;Total deferred expense (benefit) for income taxes&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (651)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (299)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.92%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 360&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Total expense (benefit) for income taxes&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.89%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (358)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (73)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.92%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 777&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The income tax expense (benefit) was reconciled to the tax expense computed at the U.S. federal statutory tax rate as follows:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;min-height:0.0pt;margin:0pt;"&gt;&lt;span style="font-size:0pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:middle;width:64.17%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="position:absolute;top:50%;transform:translate(0,-50%);width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.16%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.16%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.45%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.17%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:33.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Year ended December&#160;31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.17%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.45%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.45%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2019&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="10" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.17%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:33.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in&#160;thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:64.17%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Income tax expense (benefit) at U.S. statutory rates&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.16%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 5,393&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.16%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (1,777)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.45%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (16,396)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:64.17%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;State taxes, net of U.S. federal impact&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (607)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (121)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.45%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (835)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:64.17%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Effect of international operations&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.16%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 609&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.16%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (131)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.45%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 785&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:64.17%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Research and development tax credit&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (3,964)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 726&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.45%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (1,692)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:64.17%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Net change in valuation allowance&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.16%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (2,389)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.16%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 388&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.45%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 15,098&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:64.17%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Change in accrual for unrecognized tax benefits&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 398&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (6)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.45%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 1,232&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:64.17%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Share-based compensation&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.16%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 1,208&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.16%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 2,248&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.45%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 1,947&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:64.17%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Asset impairment&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 728&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.45%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 495&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:64.17%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Partial extinguishment of 2023 Notes&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.16%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (1,090)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.16%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (2,292)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.45%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:64.17%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Other&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.16%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 84&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.16%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 164&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.45%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 143&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:64.17%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Total expense (benefit) for income taxes&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.16%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (358)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.16%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (73)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.45%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 777&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Deferred income taxes reflect the effect of temporary differences between the carrying amounts of assets and liabilities recognized for financial reporting purposes and the amounts recognized for tax purposes. The tax effects of the temporary differences were as follows:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;min-height:0.0pt;margin:0pt;"&gt;&lt;span style="font-size:0pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:middle;width:71.8%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="position:absolute;top:50%;transform:translate(0,-50%);width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.75%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:71.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:26.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December&#160;31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:71.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&#160;&#160;&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.02%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&#160;&#160;&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.04%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="7" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:71.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:26.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:71.8%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Deferred tax assets:&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.75%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:71.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Inventory valuation&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 11,822&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.75%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 10,949&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:71.8%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Net operating losses&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 38,816&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.75%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 51,260&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:71.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Credit carry forwards&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 57,810&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.75%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 54,160&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:71.8%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Warranty and installation accruals&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 1,730&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.75%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 1,045&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:71.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Share-based compensation&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 4,033&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.75%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 4,587&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:71.8%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Customer deposits and deferred revenue&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 9,908&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.75%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 10,982&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:71.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Operating leases&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 8,464&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.75%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 2,281&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:71.8%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Other&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 5,880&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.75%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 4,741&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:71.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Total deferred tax assets&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 138,463&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.75%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 140,005&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:71.8%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Valuation allowance&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (116,054)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.75%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (118,443)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:71.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Net deferred tax assets&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 22,409&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.75%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 21,562&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:71.8%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.75%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:71.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Deferred tax liabilities:&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.75%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:71.8%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Purchased intangible assets&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 6,633&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.75%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 7,227&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:71.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Convertible Senior Notes&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 10,018&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.75%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 13,674&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:71.8%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Operating leases&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 6,539&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.75%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 2,241&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:71.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Depreciation&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 2,372&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.75%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 2,220&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:71.8%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Total deferred tax liabilities&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 25,562&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.75%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 25,362&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:71.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Net deferred taxes&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (3,153)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.75%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (3,800)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The Company is no longer permanently reinvesting future earnings from certain foreign jurisdictions and has accrued for foreign tax withholdings of $0.8 million on its unremitted earnings as of December 31, 2021.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;At December 31, 2021, the Company had U.S. federal NOL carryforwards of approximately $165.8 million, of which $6.9 million have an indefinite carryforward period, with the remaining expiring in 2036, if not utilized. At December 31, 2021, the Company had U.S. federal research and development credits of $32.1 million that will expire between 2022 and 2041. The Company also has $9.4 million of foreign tax credits that expire in 2027. Additionally, the Company has state and local NOL carryforwards of approximately $104.7 million (a net deferred tax asset of $6.8 million, net of &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;federal tax benefits and before the valuation allowance) that will expire between 2022 and 2040. Finally, the Company has state credits of $30.6 million, some of which are indefinite and others that will expire between 2024 and 2036.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The Company makes assessments to estimate if sufficient taxable income will be generated in the future to use existing deferred tax assets. As of December 31, 2021, the Company continued to have a cumulative loss in recent years with respect to its U.S. operations. Based on this negative objective evidence, the Company continues to maintain a valuation allowance against its U.S. deferred tax assets. During 2021, the Company&#x2019;s valuation allowance decreased by approximately $2.4 million.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;A roll-forward of the Company&#x2019;s uncertain tax positions for all U.S. federal, state, and foreign tax jurisdictions was as follows:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;min-height:0.0pt;margin:0pt;"&gt;&lt;span style="font-size:0pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:63.94%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.66%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.67%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.66%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:63.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:33.99%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December&#160;31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:63.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.95%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.95%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2019&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="10" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:63.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:33.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in&#160;thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:63.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Balance at beginning of year&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.66%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 12,363&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.67%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 12,369&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.66%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 11,137&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:63.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Additions for tax positions related to current year&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 2,642&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.67%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 1,217&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 3,075&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:63.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Additions for tax positions related to prior years&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.66%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 50&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.67%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 47&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.66%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 21&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:63.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Reductions for tax positions related to prior years&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (1,196)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.67%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (1,166)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (1,814)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:63.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Reductions due to the lapse of the statute of limitations&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.66%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.67%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.66%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:63.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Settlements&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.66%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (1,098)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.67%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (104)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.66%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (50)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:63.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Balance at end of year&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.66%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 12,761&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.67%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 12,363&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.66%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 12,369&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;If the amount of unrecognized tax benefits at December 31, 2021 were recognized, the Company&#x2019;s income tax provision would decrease by $0.4 million. The gross amount of interest and penalties accrued in income tax payable in the Consolidated Balance Sheets was approximately $0.4 million at both December 31, 2021 and 2020.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The Company, or one of its subsidiaries, files income tax returns in the United States federal jurisdiction, and various state, local, and foreign jurisdictions. All material consolidated federal income tax matters have been concluded for years through 2017 subject to subsequent utilization of NOLs generated in such years. All material state and local income tax matters have been reviewed through 2012. The majority of the Company&#x2019;s foreign jurisdictions have been reviewed through 2015. The Company&#x2019;s major foreign jurisdictions&#x2019; statutes of limitation remain open with respect to the tax years 2015 through 2020 for Germany, 2017 through 2020 for China, and 2020 for Taiwan and Singapore. The Company does not anticipate that its uncertain tax position will change significantly within the next twelve months subject to the completion of the ongoing tax audits and any resultant settlement. &lt;/p&gt;</us-gaap:IncomeTaxDisclosureTextBlock>
    <us-gaap:ScheduleOfIncomeBeforeIncomeTaxDomesticAndForeignTableTextBlock
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      id="Tb_1Gsrr9Ti5kmxUaflejltKg">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:62.38%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div 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style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.45%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.45%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:62.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:35.55%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Year ended December&#160;31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:62.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.95%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2019&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="10" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:62.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:35.55%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in&#160;thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:62.38%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Domestic&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.66%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 23,561&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.45%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (10,292)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.45%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (78,486)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:62.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Foreign&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.66%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 2,119&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.45%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 1,828&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.45%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 530&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:62.38%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Total&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.66%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 25,680&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.45%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (8,464)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.45%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (77,956)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;</us-gaap:ScheduleOfIncomeBeforeIncomeTaxDomesticAndForeignTableTextBlock>
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      id="Tb_1W4l_6I55E2uJWcsKHyhqg">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:69.23%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.89%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.92%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:28.7%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Year ended December&#160;31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.17%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.19%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.21%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2019&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="10" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:28.7%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in&#160;thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Current:&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.89%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.92%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Federal&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.89%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.92%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Foreign&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.89%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 183&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 22&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.92%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 304&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;State and local&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 110&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 204&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.92%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 113&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"&gt;Total current expense (benefit) for income taxes&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.89%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 293&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 226&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.92%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 417&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Deferred:&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.89%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.92%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Federal&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.89%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 119&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 136&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.92%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 162&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Foreign&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.89%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (507)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (320)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.92%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 116&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;State and local&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.89%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (263)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (115)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.92%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 82&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"&gt;Total deferred expense (benefit) for income taxes&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (651)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (299)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.92%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 360&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Total expense (benefit) for income taxes&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.89%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (358)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (73)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.92%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 777&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;</us-gaap:ScheduleOfComponentsOfIncomeTaxExpenseBenefitTableTextBlock>
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style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.16%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 5,393&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.16%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (1,777)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.45%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (16,396)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:64.17%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;State taxes, net of U.S. federal impact&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (607)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (121)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.45%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (835)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:64.17%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Effect of international operations&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.16%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 609&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.16%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (131)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.45%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 785&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:64.17%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Research and development tax credit&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (3,964)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 726&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.45%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (1,692)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:64.17%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Net change in valuation allowance&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.16%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (2,389)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.16%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 388&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.45%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 15,098&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:64.17%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Change in accrual for unrecognized tax benefits&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 398&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (6)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.45%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 1,232&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:64.17%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Share-based compensation&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.16%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 1,208&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.16%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 2,248&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.45%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 1,947&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:64.17%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Asset impairment&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 728&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.45%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 495&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:64.17%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 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style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.16%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (358)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p 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      id="Tb_J8OXsoNZ5UyEYwo6oWRSsQ">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;min-height:0.0pt;margin:0pt;"&gt;&lt;span style="font-size:0pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:middle;width:71.8%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="position:absolute;top:50%;transform:translate(0,-50%);width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.75%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:71.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:26.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December&#160;31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:71.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&#160;&#160;&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.02%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&#160;&#160;&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.04%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="7" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:71.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:26.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:71.8%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Deferred tax assets:&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.75%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:71.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Inventory valuation&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 11,822&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.75%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 10,949&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:71.8%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Net operating losses&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 38,816&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.75%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 51,260&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:71.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Credit carry forwards&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 57,810&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.75%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 54,160&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:71.8%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Warranty and installation accruals&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 1,730&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.75%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 1,045&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:71.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Share-based compensation&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 4,033&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.75%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 4,587&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:71.8%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Customer deposits and deferred revenue&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 9,908&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.75%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 10,982&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:71.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Operating leases&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 8,464&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.75%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 2,281&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:71.8%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Other&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 5,880&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.75%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 4,741&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:71.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Total deferred tax assets&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 138,463&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.75%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 140,005&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:71.8%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Valuation allowance&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (116,054)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.75%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (118,443)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:71.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Net deferred tax assets&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 22,409&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.75%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 21,562&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:71.8%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.75%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:71.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Deferred tax liabilities:&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.75%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:71.8%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Purchased intangible assets&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 6,633&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.75%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 7,227&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:71.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Convertible Senior Notes&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 10,018&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.75%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 13,674&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:71.8%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Operating leases&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 6,539&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.75%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 2,241&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:71.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Depreciation&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 2,372&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.75%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 2,220&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:71.8%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Total deferred tax liabilities&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 25,562&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.75%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 25,362&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:71.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Net deferred taxes&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (3,153)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.75%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (3,800)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;</us-gaap:ScheduleOfDeferredTaxAssetsAndLiabilitiesTableTextBlock>
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      unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA">38816000</us-gaap:DeferredTaxAssetsOperatingLossCarryforwards>
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      unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA">51260000</us-gaap:DeferredTaxAssetsOperatingLossCarryforwards>
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      unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA">57810000</us-gaap:DeferredTaxAssetsTaxCreditCarryforwards>
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      unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA">54160000</us-gaap:DeferredTaxAssetsTaxCreditCarryforwards>
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      unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA">1730000</us-gaap:DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReserves>
    <us-gaap:DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReserves
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      unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA">1045000</us-gaap:DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReserves>
    <us-gaap:DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsShareBasedCompensationCost
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      unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA">4033000</us-gaap:DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsShareBasedCompensationCost>
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      unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA">4587000</us-gaap:DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsShareBasedCompensationCost>
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      unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA">9908000</us-gaap:DeferredTaxAssetsDeferredIncome>
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      unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA">10982000</us-gaap:DeferredTaxAssetsDeferredIncome>
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      unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA">8464000</veco:DeferredTaxAssetsOperatingLeases>
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      unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA">2281000</veco:DeferredTaxAssetsOperatingLeases>
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      unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA">5880000</us-gaap:DeferredTaxAssetsOther>
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      unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA">4741000</us-gaap:DeferredTaxAssetsOther>
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      unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA">138463000</us-gaap:DeferredTaxAssetsGross>
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      unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA">140005000</us-gaap:DeferredTaxAssetsGross>
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      unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA">116054000</us-gaap:DeferredTaxAssetsValuationAllowance>
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      unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA">118443000</us-gaap:DeferredTaxAssetsValuationAllowance>
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      unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA">22409000</us-gaap:DeferredTaxAssetsNet>
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      unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA">21562000</us-gaap:DeferredTaxAssetsNet>
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      unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA">6633000</us-gaap:DeferredTaxLiabilitiesGoodwillAndIntangibleAssetsIntangibleAssets>
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      unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA">7227000</us-gaap:DeferredTaxLiabilitiesGoodwillAndIntangibleAssetsIntangibleAssets>
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      unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA">10018000</us-gaap:DeferredTaxLiabilitiesFinancingArrangements>
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      unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA">13674000</us-gaap:DeferredTaxLiabilitiesFinancingArrangements>
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      unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA">6539000</us-gaap:DeferredTaxLiabilitiesLeasingArrangements>
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      unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA">2241000</us-gaap:DeferredTaxLiabilitiesLeasingArrangements>
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      unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA">2372000</us-gaap:DeferredTaxLiabilitiesPropertyPlantAndEquipment>
    <us-gaap:DeferredTaxLiabilitiesPropertyPlantAndEquipment
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      unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA">2220000</us-gaap:DeferredTaxLiabilitiesPropertyPlantAndEquipment>
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style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New 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style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.66%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:63.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:33.99%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December&#160;31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:63.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.95%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.95%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2019&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="10" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:63.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:33.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in&#160;thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:63.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Balance at beginning of year&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.66%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 12,363&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.67%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 12,369&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.66%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 11,137&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:63.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Additions for tax positions related to current year&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 2,642&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.67%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 1,217&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 3,075&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:63.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Additions for tax positions related to prior years&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.66%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 50&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.67%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 47&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.66%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 21&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:63.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Reductions for tax positions related to prior years&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (1,196)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.67%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (1,166)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (1,814)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:63.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Reductions due to the lapse of the statute of limitations&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.66%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.67%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.66%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:63.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Settlements&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.66%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (1,098)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.67%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (104)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.66%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (50)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:63.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Balance at end of year&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.66%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 12,761&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.67%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 12,363&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.66%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 12,369&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;</us-gaap:SummaryOfIncomeTaxContingenciesTextBlock>
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      unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA">11137000</us-gaap:UnrecognizedTaxBenefits>
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      unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA">1814000</us-gaap:UnrecognizedTaxBenefitsDecreasesResultingFromPriorPeriodTaxPositions>
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      unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA">1098000</us-gaap:UnrecognizedTaxBenefitsDecreasesResultingFromSettlementsWithTaxingAuthorities>
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      unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA">12761000</us-gaap:UnrecognizedTaxBenefits>
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      unitRef="Unit_Standard_USD_hOe4eGg0SUWrnbEGc8MJfA">12363000</us-gaap:UnrecognizedTaxBenefits>
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      id="Tb_LoJcQvWFYU6NIN8FqHauLA">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Note 17 &#x2014; Segment Reporting and Geographic Information&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The Company operates and measures its results in one operating segment and therefore has one reportable segment: the development, manufacture, sales, and support of semiconductor and thin film process equipment primarily sold to make electronic devices. The Company&#x2019;s Chief Operating Decision Maker, the Chief Executive Officer, evaluates performance of the Company and makes decisions regarding the allocation of resources based on total Company results.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Sales by end-market is as follows:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;min-height:0.0pt;margin:0pt;"&gt;&lt;span style="font-size:0pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80.72%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:58.5%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.82%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.82%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.84%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:58.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:37.4%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;For&#160;the year ended December&#160;31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:58.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.1%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.1%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.11%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2019&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="11" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:58.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:37.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in&#160;thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:58.5%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Sales by end-market&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.82%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.82%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.84%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:58.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Semiconductor&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.82%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 247,051&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.82%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 165,909&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 175,608&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:58.5%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Compound Semiconductor&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.82%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 106,972&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.82%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 107,922&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.84%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 85,877&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:58.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Data Storage&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.82%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 168,760&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.82%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 123,288&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 84,075&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:58.5%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Scientific &amp;amp; Other&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.82%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 60,494&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.82%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 57,044&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.84%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 73,789&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:58.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;&lt;b style="font-weight:bold;"&gt;Total&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.82%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 583,277&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.82%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 454,163&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.84%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 419,349&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The Company&#x2019;s significant operations outside the United States include sales and service offices in China, Europe, and Rest of APAC. For geographic reporting, sales are attributed to the location in which the customer facility is located. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Sales and long-lived tangible assets by geographic region are as follows:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:39.34%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.94%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:39.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:30.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Net&#160;Sales&#160;to&#160;Unaffiliated Customers&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:27.16%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Long-lived&#160;Tangible&#160;Assets&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:39.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2019&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.98%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2019&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="19" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:39.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="17" style="vertical-align:bottom;white-space:nowrap;width:59%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in&#160;thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:39.34%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;United States&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 217,209&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 145,353&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 126,160&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 99,220&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 64,967&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 75,187&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:39.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;EMEA&lt;sup style="font-family:'Calibri','Helvetica','sans-serif';font-size:8.25pt;line-height:100%;top:0pt;vertical-align:top;"&gt;(1)&lt;/sup&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 55,129&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 73,124&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 57,351&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 94&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 120&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 143&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:39.34%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;China&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 105,998&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 57,589&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 71,078&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 67&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 84&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 130&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:39.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Rest of APAC&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 204,633&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 177,569&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 164,363&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 362&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 100&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 251&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:39.34%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Rest of World&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 308&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 528&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 397&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.94%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:39.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Total &lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 583,277&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 454,163&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 419,349&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 99,743&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 65,271&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.94%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 75,711&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;div style="font-family:'Times New Roman','Times','serif';font-size:9.0pt;margin-bottom:0pt;margin-top:0pt;min-height:1.19em;position:relative;width:100%;"&gt;&lt;div style="background-color:#000000;height:1pt;position:relative;top:0.6em;width:25.0%;border:none;margin:0 auto 0 0;"/&gt;&lt;/div&gt;&lt;table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"&gt;&lt;tr&gt;&lt;td style="font-family:'Times New 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      id="Tb_IiZAF5LTSk-18q1umv013A">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;min-height:0.0pt;margin:0pt;"&gt;&lt;span style="font-size:0pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80.72%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:58.5%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.82%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.82%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.84%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:58.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:37.4%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;For&#160;the year ended December&#160;31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:58.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.1%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.1%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.11%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2019&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="11" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:58.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:37.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in&#160;thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:58.5%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Sales by end-market&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.82%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.82%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.84%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:58.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Semiconductor&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.82%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 247,051&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.82%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 165,909&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 175,608&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:58.5%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Compound Semiconductor&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.82%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 106,972&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.82%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 107,922&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.84%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 85,877&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:58.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Data Storage&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.82%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 168,760&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.82%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 123,288&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 84,075&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:58.5%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Scientific &amp;amp; Other&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.82%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 60,494&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.82%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 57,044&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.84%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 73,789&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:58.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;&lt;b style="font-weight:bold;"&gt;Total&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.82%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 583,277&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.82%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New 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      id="Tb_KNcfufnkrE-33y-eTxVT7g">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:39.34%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New 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style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.94%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:39.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:30.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Net&#160;Sales&#160;to&#160;Unaffiliated Customers&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:27.16%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Long-lived&#160;Tangible&#160;Assets&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:39.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2019&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.98%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2019&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="19" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:39.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="17" style="vertical-align:bottom;white-space:nowrap;width:59%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in&#160;thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:39.34%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;United States&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 217,209&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 145,353&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 126,160&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 99,220&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 64,967&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 75,187&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:39.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;EMEA&lt;sup style="font-family:'Calibri','Helvetica','sans-serif';font-size:8.25pt;line-height:100%;top:0pt;vertical-align:top;"&gt;(1)&lt;/sup&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 55,129&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 73,124&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 57,351&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 94&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 120&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 143&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:39.34%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;China&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 105,998&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 57,589&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 71,078&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 67&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 84&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 130&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:39.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Rest of APAC&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 204,633&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 177,569&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 164,363&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 362&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 100&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 251&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:39.34%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Rest of World&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 308&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 528&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 397&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.94%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:39.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Total &lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 583,277&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 454,163&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 419,349&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 99,743&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 65,271&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.94%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 75,711&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;div style="font-family:'Times New Roman','Times','serif';font-size:9.0pt;margin-bottom:0pt;margin-top:0pt;min-height:1.19em;position:relative;width:100%;"&gt;&lt;div style="background-color:#000000;height:1pt;position:relative;top:0.6em;width:25.0%;border:none;margin:0 auto 0 0;"/&gt;&lt;/div&gt;&lt;table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"&gt;&lt;tr&gt;&lt;td style="font-family:'Times New Roman','Times','serif';font-size:9pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;"&gt;(1)&lt;/td&gt;&lt;td style="padding:0pt;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:9pt;font-style:normal;font-weight:normal;"&gt;EMEA consists of Europe, the Middle East, and Africa&lt;/span&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;</us-gaap:ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsByGeographicalAreasTableTextBlock>
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style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:45.33%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.22%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:19.22%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Additions&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.67%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:45.33%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.22%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span 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style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.83%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.67%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:45.33%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.19%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Balance&#160;at&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.11%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(Credited)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.07%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Charged&#160;to&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.67%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Balance&#160;at&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:45.33%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.19%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Beginning&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.11%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;to&#160;Costs&#160;and&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.07%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Other&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.67%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;End&#160;of&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:45.33%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Deducted from asset accounts:&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.19%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;of&#160;Period&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.11%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Expenses&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.07%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Accounts&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.91%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Deductions&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Period&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="16" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:45.33%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="14" style="vertical-align:bottom;white-space:nowrap;width:52.63%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in&#160;thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:45.33%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Year ended December&#160;31, 2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.22%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.83%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.24%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.83%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.67%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:45.33%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Allowance for doubtful accounts&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.22%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 736&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.83%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.83%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.67%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 736&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:45.33%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Valuation allowance in net deferred tax assets&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.22%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 118,443&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.83%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.24%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.83%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.67%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (2,389)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 116,054&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:45.33%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.22%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.96%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 119,179&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.83%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.24%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.83%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.67%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (2,389)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.96%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 116,790&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:45.33%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.22%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.83%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.24%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.83%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.67%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:45.33%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Year ended December&#160;31, 2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.22%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.83%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.83%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.67%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:45.33%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Allowance for doubtful accounts&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.22%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 602&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.83%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 140&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.24%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.83%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.67%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (6)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 736&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:45.33%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Valuation allowance in net deferred tax assets&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.22%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 130,053&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.83%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 513&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.24%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.83%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.67%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (12,123)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 118,443&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:45.33%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.22%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 130,655&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.83%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 653&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.24%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.83%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.67%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (12,129)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 119,179&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:45.33%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.22%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.83%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.83%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.67%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:45.33%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Year ended December&#160;31, 2019&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.22%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.83%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.24%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.83%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.67%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:45.33%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Allowance for doubtful accounts&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.22%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 270&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.83%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 392&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.83%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.67%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (60)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 602&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:45.33%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Valuation allowance in net deferred tax assets&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.22%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 114,955&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.83%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 15,098&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.24%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.83%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.67%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 130,053&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:45.33%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.22%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.96%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 115,225&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.83%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 15,490&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.24%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.83%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.67%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (60)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.96%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 130,655&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;</srt:ScheduleOfValuationAndQualifyingAccountsDisclosureTextBlock>
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end
</TEXT>
</DOCUMENT>
</SEC-DOCUMENT>
