# Filing Detail

Form 10-Q - Quarterly report [Sections 13 or 15(d)]:
SEC Accession No. 0001558370-22-007845
Filing Date
2022-05-09
Accepted
2022-05-09 16:31:58
Documents
84
Period of Report
2022-03-31

Document Format Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
1 | 10-Q | veco-20220331x10q.htm iXBRL | 10-Q | 1820158
2 | EX-10.1 | veco-20220331xex10d1.htm | EX-10.1 | 102109
3 | EX-10.2 | veco-20220331xex10d2.htm | EX-10.2 | 92907
4 | EX-31.1 | veco-20220331xex31d1.htm | EX-31.1 | 15016
5 | EX-31.2 | veco-20220331xex31d2.htm | EX-31.2 | 13144
6 | EX-32.1 | veco-20220331xex32d1.htm | EX-32.1 | 8971
7 | EX-32.2 | veco-20220331xex32d2.htm | EX-32.2 | 8820
8 | GRAPHIC | veco-20220331xex10d1001.jpg | GRAPHIC | 4686
9 | GRAPHIC | veco-20220331xex10d2001.jpg | GRAPHIC | 4368
| Complete submission text file | 0001558370-22-007845.txt |  | 9455846

Data Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
10 | EX-101.SCH | veco-20220331.xsd | EX-101.SCH | 52779
11 | EX-101.CAL | veco-20220331_cal.xml | EX-101.CAL | 71643
12 | EX-101.DEF | veco-20220331_def.xml | EX-101.DEF | 219336
13 | EX-101.LAB | veco-20220331_lab.xml | EX-101.LAB | 539038
14 | EX-101.PRE | veco-20220331_pre.xml | EX-101.PRE | 391421
78 | EXTRACTED XBRL INSTANCE DOCUMENT | veco-20220331x10q_htm.xml | XML | 2045184

Mailing Address TERMINAL DRIVE PLAINVIEW NY 11803
Business Address TERMINAL DRIVE PLAINVIEW NY 11803 516 677-0200
VEECO INSTRUMENTS INC (Filer) CIK: 0000103145 (see all company filings)

EIN.: 112989601 | State of Incorp.: DE | Fiscal Year End: 1231
Type: 10-Q | Act: 34 | File No.: 000-16244 | Film No.: 22905556
SIC: 3559 Special Industry Machinery, NEC