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Commitments and Contingencies - Legal Proceedings (Details) $ in Millions |  | 1 Months Ended |
--- | --- | --- | ---
Aug. 08, 2018 case | Oct. 31, 2021 USD ($) | Apr. 30, 2022 USD ($)
Ultratech acquisition litigation |  |  |
Legal Proceedings |  |  |
Number of purported class action complaints filed | case | 2 |  |
Ultratech acquisition litigation | Subsequent event |  |  |
Legal Proceedings |  |  |
Amount plaintiff will receive for fees and expenses |  |  | $ 0.3
Wolther Action |  |  |
Legal Proceedings |  |  |
Settlement amount |  | $ 15.0 |

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