# Filing Detail

Form 10-Q - Quarterly report [Sections 13 or 15(d)]:
SEC Accession No. 0001558370-22-012648
Filing Date
2022-08-08
Accepted
2022-08-08 16:32:12
Documents
80
Period of Report
2022-06-30

Document Format Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
1 | 10-Q | veco-20220630x10q.htm iXBRL | 10-Q | 2247897
2 | EX-31.1 | veco-20220630xex31d1.htm | EX-31.1 | 15018
3 | EX-31.2 | veco-20220630xex31d2.htm | EX-31.2 | 13146
4 | EX-32.1 | veco-20220630xex32d1.htm | EX-32.1 | 8885
5 | EX-32.2 | veco-20220630xex32d2.htm | EX-32.2 | 8822
| Complete submission text file | 0001558370-22-012648.txt |  | 10483230

Data Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
6 | EX-101.SCH | veco-20220630.xsd | EX-101.SCH | 54150
7 | EX-101.CAL | veco-20220630_cal.xml | EX-101.CAL | 71364
8 | EX-101.DEF | veco-20220630_def.xml | EX-101.DEF | 216328
9 | EX-101.LAB | veco-20220630_lab.xml | EX-101.LAB | 535717
10 | EX-101.PRE | veco-20220630_pre.xml | EX-101.PRE | 385862
74 | EXTRACTED XBRL INSTANCE DOCUMENT | veco-20220630x10q_htm.xml | XML | 2515128

Mailing Address TERMINAL DRIVE PLAINVIEW NY 11803
Business Address TERMINAL DRIVE PLAINVIEW NY 11803 516 677-0200
VEECO INSTRUMENTS INC (Filer) CIK: 0000103145 (see all company filings)

EIN.: 112989601 | State of Incorp.: DE | Fiscal Year End: 1231
Type: 10-Q | Act: 34 | File No.: 000-16244 | Film No.: 221144878
SIC: 3559 Special Industry Machinery, NEC