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Business Combination - Consideration (Details) $ in Thousands | Jan. 31, 2023 USD ($) | Mar. 31, 2023 USD ($)
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Business Combination |  |
Contingent consideration, Accrued expenses and other current liabilities |  | $ 9,606
Other liabilities |  |
Business Combination |  |
Contingent consideration, Other liabilities |  | $ 16,500
Epiluvac AB |  |
Business Combination |  |
Cash paid, net of cash acquired | $ 30,373 |
Contingent consideration | 26,055 |
Acquisition date fair value | $ 56,428 |
Contingent consideration measurement input | 0.0554 |
Business Combination, Contingent Consideration, Liability, Measurement Input | us-gaap:MeasurementInputDiscountRateMember |
Epiluvac AB | Accrued expenses and other current liabilities |  |
Business Combination |  |
Contingent consideration, Accrued expenses and other current liabilities | $ 9,600 |
Epiluvac AB | Other liabilities |  |
Business Combination |  |
Contingent consideration, Other liabilities | 16,500 |
Epiluvac AB | Completion of certain defined milestones |  |
Business Combination |  |
Contingent consideration payments, High end of range | 15,000 |
Epiluvac AB | Percentage of orders received during defined Earn-out period |  |
Business Combination |  |
Contingent consideration payments, High end of range | $ 20,000 |
Maximum earn-out period | 4 years |

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- Definition Amount of consideration transferred, consisting of acquisition-date fair value of assets transferred by the acquirer, liabilities incurred by the acquirer, and equity interest issued by the acquirer. + References Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef -Publisher FASB -Name Accounting Standards Codification -Topic 805 -SubTopic 30 -Section 30 -Paragraph 8 -URI https://asc.fasb.org/extlink&oid=126966197&loc=d3e6613-128477 Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef -Publisher FASB -Name Accounting Standards Codification -Topic 805 -SubTopic 30 -Section 50 -Paragraph 1 -Subparagraph (b) -URI https://asc.fasb.org/extlink&oid=126975305&loc=d3e6927-128479 Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef -Publisher FASB -Name Accounting Standards Codification -Topic 805 -SubTopic 30 -Section 30 -Paragraph 7 -URI https://asc.fasb.org/extlink&oid=126966197&loc=d3e6578-128477 + Details
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- Definition For contingent consideration arrangements recognized in connection with a business combination, this element represents an estimate of the high-end of the potential range (undiscounted) of the consideration which may be paid. + References Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef -Publisher FASB -Name Accounting Standards Codification -Topic 805 -SubTopic 30 -Section 50 -Paragraph 1 -Subparagraph (c)(3) -URI https://asc.fasb.org/extlink&oid=126975305&loc=d3e6927-128479 + Details
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- Definition Amount of liability recognized arising from contingent consideration in a business combination, expected to be settled within one year or the normal operating cycle, if longer. + References Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef -Publisher FASB -Name Accounting Standards Codification -Topic 805 -SubTopic 30 -Section 25 -Paragraph 6 -URI https://asc.fasb.org/extlink&oid=6911189&loc=d3e6408-128476 Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef -Publisher FASB -Name Accounting Standards Codification -Topic 805 -SubTopic 30 -Section 35 -Paragraph 1 -Subparagraph b -URI https://asc.fasb.org/extlink&oid=126966325&loc=d3e6819-128478 + Details
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- Definition The cash outflow associated with the acquisition of business during the period. The cash portion only of the acquisition price. + References Reference 1: http://www.xbrl.org/2003/role/disclosureRef -Publisher FASB -Name Accounting Standards Codification -Topic 805 -SubTopic 30 -Section 50 -Paragraph 1 -Subparagraph (b)(1) -URI https://asc.fasb.org/extlink&oid=126975305&loc=d3e6927-128479 Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef -Publisher FASB -Name Accounting Standards Codification -Topic 230 -SubTopic 10 -Section 45 -Paragraph 13 -Subparagraph (b) -URI https://asc.fasb.org/extlink&oid=126954810&loc=d3e3213-108585 + Details
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