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Business Combination - Consideration (Details)
$ in Thousands
Jan. 31, 2023
USD ($)
Mar. 31, 2023
USD ($)
Business Combination    
Contingent consideration, Accrued expenses and other current liabilities   $ 9,606
Other liabilities    
Business Combination    
Contingent consideration, Other liabilities   $ 16,500
Epiluvac AB    
Business Combination    
Cash paid, net of cash acquired $ 30,373  
Contingent consideration 26,055  
Acquisition date fair value $ 56,428  
Contingent consideration measurement input 0.0554  
Business Combination, Contingent Consideration, Liability, Measurement Input us-gaap:MeasurementInputDiscountRateMember  
Epiluvac AB | Accrued expenses and other current liabilities    
Business Combination    
Contingent consideration, Accrued expenses and other current liabilities $ 9,600  
Epiluvac AB | Other liabilities    
Business Combination    
Contingent consideration, Other liabilities 16,500  
Epiluvac AB | Completion of certain defined milestones    
Business Combination    
Contingent consideration payments, High end of range 15,000  
Epiluvac AB | Percentage of orders received during defined Earn-out period    
Business Combination    
Contingent consideration payments, High end of range $ 20,000  
Maximum earn-out period 4 years