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Business Combination - Intangible assets acquired (Details) - Epiluvac AB - USD ($) $ in Thousands |  | 12 Months Ended
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Jan. 31, 2023 | Dec. 31, 2023
Intangible assets |  |
Intangible assets acquired, Amount | $ 28,540 |
Acquisition related costs |  | $ 1,100
Technology |  |
Intangible assets |  |
Intangible assets acquired, Amount | $ 28,020 |
Intangible assets acquired, Useful life | 15 years |
Customer relationship |  |
Intangible assets |  |
Intangible assets acquired, Amount | $ 460 |
Intangible assets acquired, Useful life | 5 years |
Backlog |  |
Intangible assets |  |
Intangible assets acquired, Amount | $ 60 |
Intangible assets acquired, Useful life | 1 year 6 months |

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- Definition Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table. + References No definition available. + Details
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- Definition Weighted average amortization period of finite-lived intangible assets acquired either individually or as part of a group of assets, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days. + References Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef -Topic 350 -SubTopic 30 -Name Accounting Standards Codification -Section 50 -Paragraph 1 -Subparagraph (a)(3) -Publisher FASB -URI https://asc.fasb.org//1943274/2147482665/350-30-50-1 + Details
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- Definition This element represents acquisition-related costs incurred to effect a business combination which costs have been expensed during the period. Such costs include finder's fees; advisory, legal, accounting, valuation, and other professional or consulting fees; general administrative costs, including the costs of maintaining an internal acquisitions department; and may include costs of registering and issuing debt and equity securities. + References Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef -Name Accounting Standards Codification -Topic 805 -SubTopic 10 -Section 25 -Paragraph 23 -Publisher FASB -URI https://asc.fasb.org//1943274/2147479405/805-10-25-23 + Details
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- Definition Amount of increase in assets, excluding financial assets, lacking physical substance with a definite life, from an acquisition. + References Reference 1: http://www.xbrl.org/2003/role/disclosureRef -Topic 350 -SubTopic 30 -Name Accounting Standards Codification -Section 50 -Paragraph 1 -Subparagraph (a)(1) -Publisher FASB -URI https://asc.fasb.org//1943274/2147482665/350-30-50-1 + Details
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