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Business Combination - Assets acquired and liabilities assumed (Details) - USD ($) $ in Thousands | Dec. 31, 2023 | Jan. 31, 2023 | Dec. 31, 2022
--- | --- | --- | ---
Fair values of the assets acquired and liabilities assumed |  |  |
Goodwill | $ 214,964 |  | $ 181,943
Epiluvac AB |  |  |
Fair values of the assets acquired and liabilities assumed |  |  |
Accounts receivable |  | $ 247 |
Inventories |  | 391 |
Prepaid expense and other current assets |  | 381 |
Property, plant, and equipment |  | 736 |
Intangible assets |  | 28,540 |
Total identifiable assets acquired |  | 30,295 |
Accounts payable and accrued expenses |  | 656 |
Contract liabilities |  | 429 |
Deferred income taxes |  | 5,723 |
Other liabilities |  | 80 |
Total liabilities assumed |  | 6,888 |
Net identifiable assets acquired |  | 23,407 |
Goodwill |  | 33,021 |
Net assets acquired |  | $ 56,428 |

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