EX-21.1 2 veco-20231231xex21d1.htm EX-21.1

Exhibit 21.1

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Subsidiaries of the Registrant

As of December 31, 2023

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​ | ​ | ​ | ​ | ​
Subsidiary |  | Jurisdiction of Organization |  | Percentage Ownership(A)
​ | ​ | ​ | ​ | ​
U.S. Subsidiaries | ​ | ​ | ​ | ​
Ultratech International Inc. | ​ | DE | ​ | 100%
Veeco APAC LLC | ​ | DE | ​ | 100%
Veeco Process Equipment Inc. | ​ | DE | ​ | 100%
​ | ​ | ​ | ​ | ​
Foreign Subsidiaries | ​ | ​ | ​ | ​
Veeco Asia Pte. Ltd. | ​ | Singapore | ​ | 100%
Veeco GmbH | ​ | Germany | ​ | 100%
Veeco Instruments Limited | ​ | England | ​ | 100%
Veeco Instruments (Shanghai) Co. Ltd. | ​ | China | ​ | 100%
Veeco Japan Ltd. | ​ | Japan | ​ | 100%
Veeco Korea LLC | ​ | South Korea | ​ | 100%
Veeco Malaysia Sdn. Bhd. | ​ | Malaysia | ​ | 100%
Veeco Netherlands BV | ​ | Netherlands | ​ | 100%
Veeco SiC CVD Systems AB | ​ | Sweden | ​ | 100%
Veeco Taiwan Inc. | ​ | Taiwan | ​ | 100%
Ultra-Tech Technologies Israel Ltd. | ​ | Israel | ​ | 100%

(A) | Includes direct and indirect ownership.