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Business Combination - Intangible assets acquired (Details) - Epiluvac AB - USD ($) $ in Thousands		12 Months Ended
	Jan. 31, 2023	Dec. 31, 2023
Intangible assets
Intangible assets acquired, Amount	$ 28,540
Acquisition related costs		$ 1,100
Technology
Intangible assets
Intangible assets acquired, Amount	$ 28,020
Intangible assets acquired, Useful life	15 years
Customer relationship
Intangible assets
Intangible assets acquired, Amount	$ 460
Intangible assets acquired, Useful life	5 years
Backlog
Intangible assets
Intangible assets acquired, Amount	$ 60
Intangible assets acquired, Useful life	1 year 6 months

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- Definition

Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.

+ References

No definition available.

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- Definition

Weighted average amortization period of finite-lived intangible assets acquired either individually or as part of a group of assets, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days.

+ References

Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef
-Topic 350
-SubTopic 30
-Name Accounting Standards Codification
-Section 50
-Paragraph 1
-Subparagraph (a)(3)
-Publisher FASB
-URI https://asc.fasb.org//1943274/2147482665/350-30-50-1

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- Definition

This element represents acquisition-related costs incurred to effect a business combination which costs have been expensed during the period. Such costs include finder's fees; advisory, legal, accounting, valuation, and other professional or consulting fees; general administrative costs, including the costs of maintaining an internal acquisitions department; and may include costs of registering and issuing debt and equity securities.

+ References

Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef
-Name Accounting Standards Codification
-Topic 805
-SubTopic 10
-Section 25
-Paragraph 23
-Publisher FASB
-URI https://asc.fasb.org//1943274/2147479405/805-10-25-23

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- Definition

Amount of increase in assets, excluding financial assets, lacking physical substance with a definite life, from an acquisition.

+ References

Reference 1: http://www.xbrl.org/2003/role/disclosureRef
-Topic 350
-SubTopic 30
-Name Accounting Standards Codification
-Section 50
-Paragraph 1
-Subparagraph (a)(1)
-Publisher FASB
-URI https://asc.fasb.org//1943274/2147482665/350-30-50-1

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