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Business Combination - Costs and contingent consideration (Details) $ in Thousands | 12 Months Ended |
--- | --- | ---
Dec. 31, 2024 USD ($) | Dec. 31, 2023 USD ($) | Jan. 31, 2023 USD ($)
Business Combination |  |  |
Increase (decrease) in contingent consideration | $ (21,242) | $ 701 |
Contingent consideration payment | $ 1,818 | 2,500 |
Epiluvac AB |  |  |
Business Combination |  |  |
Acquisition related costs |  | $ 1,100 |
Contingent consideration measurement input | 0.054 |  | 0.0554
Business Combination, Contingent Consideration, Liability, Measurement Input | us-gaap:MeasurementInputDiscountRateMember |  | us-gaap:MeasurementInputDiscountRateMember
Increase (decrease) in contingent consideration | $ (21,200) |  |
Contingent consideration payment | 1,800 |  |
Contingent consideration | 1,200 |  | $ 26,100
Epiluvac AB | Accrued expenses and other current liabilities |  |  |
Business Combination |  |  |
Contingent consideration | 700 |  |
Epiluvac AB | Other liabilities. |  |  |
Business Combination |  |  |
Contingent consideration | $ 500 |  |

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