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Business Combination - Assets acquired and liabilities assumed (Details) - USD ($) $ in Thousands | Dec. 31, 2024 | Dec. 31, 2023 | Jan. 31, 2023
--- | --- | --- | ---
Fair values of the assets acquired and liabilities assumed |  |  |
Goodwill | $ 214,964 | $ 214,964 |
Epiluvac AB |  |  |
Fair values of the assets acquired and liabilities assumed |  |  |
Accounts receivable |  |  | $ 247
Inventories |  |  | 391
Prepaid expense and other current assets |  |  | 381
Property, plant, and equipment |  |  | 736
Intangible assets |  |  | 28,540
Total identifiable assets acquired |  |  | 30,295
Accounts payable and accrued expenses |  |  | 656
Contract liabilities |  |  | 429
Deferred income taxes |  |  | 5,723
Other liabilities |  |  | 80
Total liabilities assumed |  |  | 6,888
Net identifiable assets acquired |  |  | 23,407
Goodwill |  |  | 33,021
Net assets acquired |  |  | $ 56,428

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