XML 77 R60.htm IDEA: XBRL DOCUMENT v3.25.0.1
Inventories (Details) - USD ($)
$ in Thousands
Dec. 31, 2024
Dec. 31, 2023
Inventories    
Materials $ 129,178 $ 139,884
Work-in-process 88,361 71,278
Finished goods 3,016 6,183
Evaluation inventory 26,180 20,290
Total $ 246,735 $ 237,635