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Commitments and Contingencies - Warranty (Details) - USD ($) $ in Thousands	12 Months Ended
	Dec. 31, 2024	Dec. 31, 2023	Dec. 31, 2022
Warranty
Balance, beginning of the period	$ 8,864	$ 8,601	$ 7,878
Warranties issued	6,160	6,479	8,304
Addition from Epiluvac acquisition		49
Consumption of reserves	(6,148)	(7,029)	(7,527)
Changes in estimate	864	764	(54)
Balance, end of the period	$ 9,740	$ 8,864	$ 8,601

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Carrying value as of the balance sheet date of obligations incurred through that date and payable for estimated claims under standard and extended warranty protection rights granted to customers.

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Amount of increase in the standard and extended product warranty accrual from a business acquisition.

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Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef
-Topic 460
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Amount of decrease in the standard and extended product warranty accrual from payments made in cash or in kind to satisfy claims under the terms of the standard and extended product warranty.

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Reference 1: http://www.xbrl.org/2003/role/disclosureRef
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Amount of increase (decrease) in the standard and extended product warranty accrual from changes in estimates attributable to preexisting product warranties.

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Reference 1: http://www.xbrl.org/2003/role/disclosureRef
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Amount of increase in the standard and extended product warranty accrual from warranties issued.

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