Subsequent Events (Details)	9 Months Ended
Sep. 30, 2025 USD ($) director
Axcelis Technologies, Inc
Subsequent Events
Ownership percentage, noncontrolling owner	41.60%
Axcelis Technologies, Inc \| Axcelis Technologies, Inc
Subsequent Events
Ownership percentage	58.40%
Veeco Instruments Inc \| Axcelis Technologies, Inc
Subsequent Events
Number of director who serves on the Axcelis board \| director	1
Share exchange ratio of new shares to be received	0.3575
Fixed expense reimbursement amount	$ 15,000,000
Termination fee, Threshold period for competing proposal	12 months
Acquisition related costs	$ 2,600,000
Veeco Instruments Inc \| Axcelis Technologies, Inc \| Non Terminating Party, Axcelis Technologies Inc
Subsequent Events
Termination fee	108,700,000
Veeco Instruments Inc \| Axcelis Technologies, Inc \| Non-Terminating Party, Veeco Instruments Inc
Subsequent Events
Termination fee	$ 77,500,000

Amount of expense for acquisition-related cost incurred to effect business combination. Includes, but is not limited to, finder's fee; advisory, legal, accounting, valuation, and other professional and consulting fees; and general administrative cost, including cost of maintaining internal acquisition department.

Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef
-Topic 805
-SubTopic 10
-Name Accounting Standards Codification
-Section 50
-Paragraph 7
-Publisher FASB
-URI https://asc.fasb.org/1943274/2147479328/805-10-50-7

Reference 2: http://www.xbrl.org/2009/role/commonPracticeRef
-Topic 805
-SubTopic 10
-Name Accounting Standards Codification
-Section 25
-Paragraph 23
-Publisher FASB
-URI https://asc.fasb.org/1943274/2147479405/805-10-25-23

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Detail information of subsequent event by type. User is expected to use existing line items from elsewhere in the taxonomy as the primary line items for this disclosure, which is further associated with dimension and member elements pertaining to a subsequent event.

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Reference 1: http://www.xbrl.org/2003/role/disclosureRef
-Topic 830
-SubTopic 30
-Name Accounting Standards Codification
-Section 50
-Paragraph 2
-Publisher FASB
-URI https://asc.fasb.org/1943274/2147481674/830-30-50-2

Reference 2: http://www.xbrl.org/2003/role/disclosureRef
-Topic 855
-SubTopic 10
-Name Accounting Standards Codification
-Section 50
-Paragraph 2
-Publisher FASB
-URI https://asc.fasb.org/1943274/2147483399/855-10-50-2

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The amount of fixed expense reimbursement amount to be paid by the non-terminating party, if the merger agreement is terminated by a party as a result of the other party's failure to obtain stockholder approval, or is terminated by a party due to the other party's breach of the merger agreement that would result in a failure of an applicable closing condition (subject to the applicable cure period set forth in the merger agreement).

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