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Pay vs Performance Disclosure
pure in Millions
 12 Months Ended
Dec. 31, 2024
USD ($)
Dec. 31, 2023
USD ($)
Dec. 31, 2022
USD ($)
Dec. 31, 2021
USD ($)
Pay vs Performance Disclosure        
Pay vs Performance Disclosure, Table

PAY VERSUS PERFORMANCE

As required by Section 953(a) of the Dodd-Frank Wall Street Reform and Consumer Protection Act, and Item 402(v) of Regulation S-K we are providing the following information about the relationship between executive Compensation Actually Paid (“CAP”) for our Chief Executive Officer, also referred to as our principal executive officer (“PEO”), and our other Named Executive Officers (“NEOs”) and certain financial performance metrics of the Company for the fiscal years listed below. The Compensation Committee did not consider the pay versus performance disclosure below in making its pay decisions for any of the years shown. For further information on the Company’s pay for performance philosophy and how the Company aligns executive compensation with the Company’s performance, please refer to “Compensation Discussion and Analysis.”

Pay Versus Performance

Year
(a)

  

Summary
compensation
table total
for PEO
(b)

  

Compensation
actually paid
to PEO
(c)

  

Average
summary
compensation
table total
for non-PEO
named
executive
officers
(d)

  

Average
compensation
actually paid
to non-PEO
named
executive
officers
(e)

  

Value of initial fixed $100
investment based on:

  

Net income
($ Million)
(h)

  

Revenue
($ Million)
(i)

Total
Shareholder
return
(f)

  

MSCI US
Semi &
Semi
Equipment
GICS Index
(g)

  
   

(1)

  

(2)

  

(3)

  

(4)

  

(5)

                    

2024

  

4,926,253

  

—

  

5,450,366

  

—

  

1,673,424

  

1,571,964

  

233.85

  

152.70

  

130.7

  

866.9

2023

  

4,061,200

  

—

  

4,458,400

  

—

  

1,455,630

  

1,650,789

  

188.31

  

113.71

  

125.5

  

892.1

2022

  

2,924,350

  

2,470,279

  

3,238,267

  

388,101

  

1,606,992

  

1,850,223

  

166.36

  

102.40

  

118.8

  

824.5

2021

  

—

  

2,006,994

  

—

  

2,638,843

  

1,119,162

  

1,439,535

  

132.93

  

125.01

  

55.4

  

663.8

____________

(1)      Amounts shown reflect the total compensation reported for Dr. Lee, our CEO effective 2022, as set forth in the Summary Compensation Table (SCT) or prior year tables.

(2)      Amounts shown reflect the total compensation reported for Dr. Kirlin, our former CEO through 2022, as set forth in the SCT or prior year tables.

(3)      Amounts shown reflect the compensation actually paid to Dr. Lee, our CEO effective 2022, as set forth in the table below.

(4)      Amounts shown reflect the compensation actually paid to Dr. Kirlin, our former CEO through 2022, as set forth in the table below.

(5)     Non-PEO executives include the following individuals:

•        2024: H.K. Park, Christopher J. Progler, Eric Rivera, David Wang, Richelle Burr, John P. Jordan

•        2023: H.K. Park, Christopher J. Progler, Richelle Burr, John P. Jordan

•        2022: Christopher J. Progler, Richelle Burr, John P. Jordan

•        2021: Frank Lee, Christopher J. Progler, Richelle Burr, John P. Jordan

Compensation actually paid to PEO

Year

  

Summary
Comp Table
Total

  

Deduct
Reported
Grant Date
Fair Value
of Equity
Awards(1)

  

The fair
value as of
the end of
the covered
year for
all stock
and option
awards
that were
granted
during the
year and
remain
unvested as
of the end of
the covered
year.

  

The change
in fair value
(whether
positive or
negative) as
of the end of
the covered
year for
any awards
granted in
any prior
fiscal year
that remain
outstanding
and
unvested as
of the end of
the covered year.

  

The fair value as of the vesting date for any awards that were granted and vested in the covered fiscal
year.

  

Forfeitures

  

The change in fair value (whether positive or negative) as of the vesting date of any awards granted in any prior year for which all applicable vesting conditions were satisfied during the covered year.

  

Total Compensation Actually Paid (CAP)

(a)

  

(b)

  

(c)

  

(d)

  

(e)

  

(f)

      

(h)

  

(i)

2024 (Lee)(2)

  

4,926,253

  

(3,572,400

)

  

2,736,000

  

604,950

  

0

    

 

  

755,563

  

5,450,366

 

2023 (Lee)

  

4,061,200

  

(2,011,200

)

  

2,203,200

  

176,550

  

0

    

 

  

28,650

  

4,458,400

 

2022 (Lee)

  

2,924,350

  

(1,310,550

)

  

1,216,500

  

173,613

  

0

    

 

  

234,354

  

3,238,267

 

2022 (Kirlin)(3)

  

2,470,279

  

(1,735,200

)

  

0

  

0

  

0

  

(1,623,750

)

  

500,570

  

(388,101

)

2021 (Kirlin)

  

2,006,994

  

(932,450

)

  

1,104,150

  

382,667

  

0

    

 

  

77,482

  

2,638,843

 

(1)      The grant date fair value of equity awards in column (c) represents the total of the amounts reported in the “Stock Awards” and “Option Awards” columns in the Summary Compensation Table for the applicable year.

(2)      Amounts shown include the compensation actually paid to Dr. Lee, our CEO.

(3)      Amounts shown include amounts actually paid to Dr. Kirlin, our former CEO.

Average Compensation actually paid to Non-PEO NEO(s)(1)

Year

  

Summary
Comp Table
Total
Average

  

Deduct
Average
Reported
Grant Date
Fair Value
of Equity
Awards(2)

  

The fair value as of the end of the covered year for all stock and option awards that were granted during the year and remain unvested as of the end of the covered year.

  

The change in fair value (whether positive or negative) as of the end of the covered year for any awards granted in any prior fiscal year that remain outstanding and unvested as of the end of the covered year.

  

The fair value as of the vesting date for any awards that were granted and vested in the covered fiscal
year.

  

Forfeitures

  

The change in fair value (whether positive or negative) as of the vesting date of any awards granted in any prior year for which all applicable vesting conditions were satisfied during the covered year.

  

Average
Total Compensation Actually Paid (CAP)

(a)

  

(b)

  

(c)

  

(d)

  

(e)

  

(f)

      

(h)

  

(i)

2024

  

1,673,424

  

(1,057,310

)

  

657,400

  

139,095

  

0

  

(206,550

)

  

365,905

  

1,571,964

2023

  

1,455,630

  

(670,400

)

  

734,400

  

113,688

  

0

    

 

  

17,471

  

1,650,789

2022

  

1,606,992

  

(848,250

)

  

729,900

  

166,883

  

0

    

 

  

194,698

  

1,850,223

2021

  

1,119,162

  

(448,270

)

  

474,135

  

158,104

  

58,455

    

 

  

77,949

  

1,439,535

(1)      The ‘Compensation Actually Paid’ to Non-PEO NEOs reflects amounts for all individuals who served as Non-PEO Named Executive Officers at any point during the year, including those who served only part of the year due to executive transitions. Non-PEO executives include the following individuals:

•        2024: H.K. Park, Christopher J. Progler, Eric Rivera, David Wang, Richelle Burr, John P. Jordan

•        2023: H.K. Park, Christopher J. Progler, Richelle Burr, John P. Jordan

•        2022: Christopher J. Progler, Richelle Burr, John P. Jordan

•        2021: Frank Lee, Christopher J. Progler, Richelle Burr, John P. Jordan

(2)      The grant date fair value of equity awards in column (c) represents the average of the amounts reported in the ‘Stock Awards’ and ‘Option Awards’ columns in the Summary Compensation Table for all Non-PEO NEOs for the applicable year.

      
Company Selected Measure Name Revenue      
Named Executive Officers, Footnote

•        2024: H.K. Park, Christopher J. Progler, Eric Rivera, David Wang, Richelle Burr, John P. Jordan

•        2023: H.K. Park, Christopher J. Progler, Richelle Burr, John P. Jordan

•        2022: Christopher J. Progler, Richelle Burr, John P. Jordan

•        2021: Frank Lee, Christopher J. Progler, Richelle Burr, John P. Jordan

      
Adjustment To PEO Compensation, Footnote

Compensation actually paid to PEO

Year

  

Summary
Comp Table
Total

  

Deduct
Reported
Grant Date
Fair Value
of Equity
Awards(1)

  

The fair
value as of
the end of
the covered
year for
all stock
and option
awards
that were
granted
during the
year and
remain
unvested as
of the end of
the covered
year.

  

The change
in fair value
(whether
positive or
negative) as
of the end of
the covered
year for
any awards
granted in
any prior
fiscal year
that remain
outstanding
and
unvested as
of the end of
the covered year.

  

The fair value as of the vesting date for any awards that were granted and vested in the covered fiscal
year.

  

Forfeitures

  

The change in fair value (whether positive or negative) as of the vesting date of any awards granted in any prior year for which all applicable vesting conditions were satisfied during the covered year.

  

Total Compensation Actually Paid (CAP)

(a)

  

(b)

  

(c)

  

(d)

  

(e)

  

(f)

      

(h)

  

(i)

2024 (Lee)(2)

  

4,926,253

  

(3,572,400

)

  

2,736,000

  

604,950

  

0

    

 

  

755,563

  

5,450,366

 

2023 (Lee)

  

4,061,200

  

(2,011,200

)

  

2,203,200

  

176,550

  

0

    

 

  

28,650

  

4,458,400

 

2022 (Lee)

  

2,924,350

  

(1,310,550

)

  

1,216,500

  

173,613

  

0

    

 

  

234,354

  

3,238,267

 

2022 (Kirlin)(3)

  

2,470,279

  

(1,735,200

)

  

0

  

0

  

0

  

(1,623,750

)

  

500,570

  

(388,101

)

2021 (Kirlin)

  

2,006,994

  

(932,450

)

  

1,104,150

  

382,667

  

0

    

 

  

77,482

  

2,638,843

 

(1)      The grant date fair value of equity awards in column (c) represents the total of the amounts reported in the “Stock Awards” and “Option Awards” columns in the Summary Compensation Table for the applicable year.

(2)      Amounts shown include the compensation actually paid to Dr. Lee, our CEO.

(3)      Amounts shown include amounts actually paid to Dr. Kirlin, our former CEO.

      
Non-PEO NEO Average Total Compensation Amount [1] $ 1,673,424 $ 1,455,630 [2] $ 1,606,992 [2] $ 1,119,162 [2]
Non-PEO NEO Average Compensation Actually Paid Amount $ 1,571,964 [1] 1,650,789 [3] 1,850,223 [1] 1,439,535 [3]
Compensation Actually Paid vs. Total Shareholder Return

The following chart sets forth the relationship between Compensation Actually Paid to our PEO, the average of Compensation Actually Paid to our Non-PEO NEOs, the Company’s cumulative TSR, and our Peer Group TSR, in each case, over the four most recently completed fiscal years.

      
Compensation Actually Paid vs. Net Income

The following chart sets forth the relationship between Compensation Actually Paid to our PEO, the average of Compensation Actually Paid to our Non-PEO NEOs, our Net Income and our Revenue, in each case, during the four most recently completed fiscal years.

      
Compensation Actually Paid vs. Company Selected Measure

The following chart sets forth the relationship between Compensation Actually Paid to our PEO, the average of Compensation Actually Paid to our Non-PEO NEOs, our Net Income and our Revenue, in each case, during the four most recently completed fiscal years.

      
Total Shareholder Return Vs Peer Group

The following chart sets forth the relationship between Compensation Actually Paid to our PEO, the average of Compensation Actually Paid to our Non-PEO NEOs, the Company’s cumulative TSR, and our Peer Group TSR, in each case, over the four most recently completed fiscal years.

      
Tabular List, Table

Tabular List of Financial Performance Measures

The Company considers the following to be the most important financial performance measures it uses to link actual compensation paid to its Named Executive Officers, for the periods fiscal 2021, 2022, 2023 and 2024 as set forth in the graphs above.

•        Revenue

•        Gross Margin

•        Operating Income

•        Net Income

      
Total Shareholder Return Amount $ 233.85 188.31 166.36 132.93
Peer Group Total Shareholder Return Amount 152.7 113.71 102.4 125.01
Net Income (Loss) $ 130,700,000 $ 125,500,000 $ 118,800,000 $ 55,400,000
Company Selected Measure Amount 866.9 892.1 824.5 663.8
Measure:: 1        
Pay vs Performance Disclosure        
Name Revenue      
Measure:: 2        
Pay vs Performance Disclosure        
Name Gross Margin      
Measure:: 3        
Pay vs Performance Disclosure        
Name Operating Income      
Measure:: 4        
Pay vs Performance Disclosure        
Name Net Income      
The change in fair value (whether positive or negative) as of the vesting date of any awards granted in any prior year for which all applicable vesting conditions were satisfied during the covered year [Member]        
Pay vs Performance Disclosure        
Adjustment to Compensation, Amount [1] $ 365,905      
Dr. Lee [Member]        
Pay vs Performance Disclosure        
PEO Total Compensation Amount [5] 4,926,253 [4] $ 4,061,200 $ 2,924,350
PEO Actually Paid Compensation Amount [6] 5,450,366 [4] 4,458,400 3,238,267
Dr. Kirlin [Member]        
Pay vs Performance Disclosure        
PEO Total Compensation Amount [7] 2,470,279 [8] 2,006,994
PEO Actually Paid Compensation Amount [3] $ 388,101 [8] $ 2,638,843
PEO | Dr. Lee [Member]        
Pay vs Performance Disclosure        
PEO Name Dr. Lee Dr. Lee Dr. Lee Dr. Lee
PEO | Dr. Lee [Member] | Deduct Reported Grant Date Fair Value of Equity Awards [Member]        
Pay vs Performance Disclosure        
Adjustment to Compensation, Amount [9] $ (3,572,400) [4] $ (2,011,200) $ (1,310,550)  
PEO | Dr. Lee [Member] | The fair value as of the end of the covered year for all stock and option awards that were granted during the year and remain unvested as of the end of the covered year [Member]        
Pay vs Performance Disclosure        
Adjustment to Compensation, Amount 2,736,000 [4] 2,203,200 1,216,500  
PEO | Dr. Lee [Member] | The change in fair value (whether positive or negative) as of the vesting date of any awards granted in any prior year for which all applicable vesting conditions were satisfied during the covered year [Member]        
Pay vs Performance Disclosure        
Adjustment to Compensation, Amount 604,950 [4] 176,550 234,354  
PEO | Dr. Lee [Member] | The fair value as of the vesting date for any awards that were granted and vested in the covered fiscal year [Member]        
Pay vs Performance Disclosure        
Adjustment to Compensation, Amount 0 [4] 0 0  
PEO | Dr. Lee [Member] | The change in fair value (whether positive or negative) as of the end of the covered year for any awards granted in any prior fiscal year that remain outstanding and unvested as of the end of the covered year [Member]        
Pay vs Performance Disclosure        
Adjustment to Compensation, Amount $ 755,563 [4] $ 28,650 $ 173,613  
PEO | Dr. Kirlin [Member]        
Pay vs Performance Disclosure        
PEO Name Dr. Kirlin Dr. Kirlin Dr. Kirlin Dr. Kirlin
PEO | Dr. Kirlin [Member] | Deduct Reported Grant Date Fair Value of Equity Awards [Member]        
Pay vs Performance Disclosure        
Adjustment to Compensation, Amount [9]     $ (1,735,200) [8] $ (932,450)
PEO | Dr. Kirlin [Member] | The fair value as of the end of the covered year for all stock and option awards that were granted during the year and remain unvested as of the end of the covered year [Member]        
Pay vs Performance Disclosure        
Adjustment to Compensation, Amount     0 [8] 0
PEO | Dr. Kirlin [Member] | The change in fair value (whether positive or negative) as of the vesting date of any awards granted in any prior year for which all applicable vesting conditions were satisfied during the covered year [Member]        
Pay vs Performance Disclosure        
Adjustment to Compensation, Amount     500,570 [8] 77,482
PEO | Dr. Kirlin [Member] | The fair value as of the vesting date for any awards that were granted and vested in the covered fiscal year [Member]        
Pay vs Performance Disclosure        
Adjustment to Compensation, Amount     0 [8] 382,667
PEO | Dr. Kirlin [Member] | The change in fair value (whether positive or negative) as of the end of the covered year for any awards granted in any prior fiscal year that remain outstanding and unvested as of the end of the covered year [Member]        
Pay vs Performance Disclosure        
Adjustment to Compensation, Amount     0 [8] 1,104,150
PEO | Dr. Kirlin [Member] | Forfeitures [Member]        
Pay vs Performance Disclosure        
Adjustment to Compensation, Amount [8]     (1,623,750)  
Non-PEO NEO | Deduct Reported Grant Date Fair Value of Equity Awards [Member]        
Pay vs Performance Disclosure        
Adjustment to Compensation, Amount [1],[10]   $ (670,400)    
Non-PEO NEO | The fair value as of the end of the covered year for all stock and option awards that were granted during the year and remain unvested as of the end of the covered year [Member]        
Pay vs Performance Disclosure        
Adjustment to Compensation, Amount [1] $ 657,400 734,400 729,900 474,135
Non-PEO NEO | The change in fair value (whether positive or negative) as of the vesting date of any awards granted in any prior year for which all applicable vesting conditions were satisfied during the covered year [Member]        
Pay vs Performance Disclosure        
Adjustment to Compensation, Amount [1]   17,471 194,698 77,949
Non-PEO NEO | The fair value as of the vesting date for any awards that were granted and vested in the covered fiscal year [Member]        
Pay vs Performance Disclosure        
Adjustment to Compensation, Amount [1] 0 0 0 58,455
Non-PEO NEO | The change in fair value (whether positive or negative) as of the end of the covered year for any awards granted in any prior fiscal year that remain outstanding and unvested as of the end of the covered year [Member]        
Pay vs Performance Disclosure        
Adjustment to Compensation, Amount [1] 139,095 $ 113,688 166,883 158,104
Non-PEO NEO | Forfeitures [Member]        
Pay vs Performance Disclosure        
Adjustment to Compensation, Amount [1] (206,550)      
Non-PEO NEO | Deduct Average Reported Grant Date Fair Value of Equity Awards [Member]        
Pay vs Performance Disclosure        
Adjustment to Compensation, Amount [1],[10] $ (1,057,310)   $ (848,250) $ (448,270)
[1] The ‘Compensation Actually Paid’ to Non-PEO NEOs reflects amounts for all individuals who served as Non-PEO Named Executive Officers at any point during the year, including those who served only part of the year due to executive transitions. Non-PEO executives include the following individuals:

•        2024: H.K. Park, Christopher J. Progler, Eric Rivera, David Wang, Richelle Burr, John P. Jordan

•        2023: H.K. Park, Christopher J. Progler, Richelle Burr, John P. Jordan

•        2022: Christopher J. Progler, Richelle Burr, John P. Jordan

•        2021: Frank Lee, Christopher J. Progler, Richelle Burr, John P. Jordan
[2] -PEO executives include the following individuals:

•        2024: H.K. Park, Christopher J. Progler, Eric Rivera, David Wang, Richelle Burr, John P. Jordan

•        2023: H.K. Park, Christopher J. Progler, Richelle Burr, John P. Jordan

•        2022: Christopher J. Progler, Richelle Burr, John P. Jordan

•        2021: Frank Lee, Christopher J. Progler, Richelle Burr, John P. Jordan
[3] Amounts shown reflect the compensation actually paid to Dr. Kirlin, our former CEO through 2022, as set forth in the table below.
[4] Amounts shown include the compensation actually paid to Dr. Lee, our CEO.
[5] Amounts shown reflect the total compensation reported for Dr. Lee, our CEO effective 2022, as set forth in the Summary Compensation Table (SCT) or prior year tables.
[6] Amounts shown reflect the compensation actually paid to Dr. Lee, our CEO effective 2022, as set forth in the table below.
[7] Amounts shown reflect the total compensation reported for Dr. Kirlin, our former CEO through 2022, as set forth in the SCT or prior year tables.
[8] Amounts shown include amounts actually paid to Dr. Kirlin, our former CEO.
[9] The grant date fair value of equity awards in column (c) represents the total of the amounts reported in the “Stock Awards” and “Option Awards” columns in the Summary Compensation Table for the applicable year.
[10] The grant date fair value of equity awards in column (c) represents the average of the amounts reported in the ‘Stock Awards’ and ‘Option Awards’ columns in the Summary Compensation Table for all Non-PEO NEOs for the applicable year.