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Discontinued Operations - Financial Results (Details) - USD ($) $ in Thousands | 12 Months Ended
--- | ---
Sep. 30, 2022 | Sep. 30, 2021 | Sep. 30, 2020
Disposal Group, Including Discontinued Operation, Income Statement Disclosures [Abstract] |  |  |
Net income from discontinued operations | $ 2,144,145 | $ 139,616 | $ 91,215
Discontinued Operations, Disposed of by Sale | Semiconductor Automation Business |  |  |
Disposal Group, Including Discontinued Operation, Income Statement Disclosures [Abstract] |  |  |
Total revenue | 264,430 | 680,056 | 508,736
Total cost of revenue | 152,324 | 384,536 | 300,861
Gross profit | 112,106 | 295,520 | 207,875
Research and development | 18,486 | 48,647 | 41,245
Selling, general and administrative | 30,622 | 70,634 | 50,881
Restructuring charges |  | 230 | 692
Total operating expenses | 49,108 | 119,511 | 92,818
Operating income | 62,998 | 176,009 | 115,057
Gain on divestiture | 2,561,820 | 133 | 207
Income before income taxes | 2,624,818 | 176,142 | 115,264
Income tax provision | 480,673 | 35,357 | 23,867
Net income from discontinued operations | 2,144,145 | 140,785 | 91,397
Discontinued Operations, Disposed of by Sale | Semiconductor Automation Business | Products |  |  |
Disposal Group, Including Discontinued Operation, Income Statement Disclosures [Abstract] |  |  |
Total revenue | 244,962 | 624,358 | 463,309
Total cost of revenue | 141,165 | 354,786 | 274,727
Discontinued Operations, Disposed of by Sale | Semiconductor Automation Business | Services |  |  |
Disposal Group, Including Discontinued Operation, Income Statement Disclosures [Abstract] |  |  |
Total revenue | 19,468 | 55,698 | 45,427
Total cost of revenue | $ 11,159 | $ 29,750 | $ 26,134

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