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Discontinued Operations - Non-cash Items and Capital Expenditures (Details) - Discontinued Operations, Disposed of by Sale - Semiconductor Automation Business - USD ($) $ in Thousands | 12 Months Ended
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Sep. 30, 2022 | Sep. 30, 2021 | Sep. 30, 2020
Discontinued Operation, Alternative Cash Flow Information [Abstract] |  |  |
Depreciation and amortization |  | $ 8,472 | $ 11,374
Capital expenditures | $ 2,862 | 6,414 | 4,815
Stock-based compensation |  | $ 7,405 | $ 5,501

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