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Discontinued Operations - Financial Results (Details) - USD ($) $ in Thousands | 3 Months Ended | 9 Months Ended
--- | --- | ---
Jun. 30, 2022 | Jun. 30, 2021 | Jun. 30, 2022 | Jun. 30, 2021
Disposal Group, Including Discontinued Operation, Income Statement Disclosures [Abstract] |  |  |  |
Net (loss) income from discontinued operations | $ (2,555) | $ 41,008 | $ 2,159,597 | $ 95,414
Discontinued Operations, Disposed of by Sale | Semiconductor Automation Business |  |  |  |
Disposal Group, Including Discontinued Operation, Income Statement Disclosures [Abstract] |  |  |  |
Total revenue |  | 186,262 | 264,430 | 474,674
Total cost of revenue |  | 104,293 | 152,324 | 267,538
Gross profit |  | 81,969 | 112,106 | 207,136
Research and development |  | 12,795 | 18,486 | 35,497
Selling, general and administrative | 480 | 18,058 | 30,622 | 49,998
Restructuring charges |  |  |  | 126
Total operating expenses | 480 | 30,853 | 49,108 | 85,621
Operating (loss) income | (480) | 51,116 | 62,998 | 121,515
Other income, net |  | 26 |  | (1,300)
(Loss) gain on divestiture | (990) |  | 2,560,384 |
(Loss) income before income taxes | (1,470) | 51,142 | 2,623,382 | 120,215
Income tax provision | 1,085 | 10,134 | 463,785 | 24,801
Net (loss) income from discontinued operations | $ (2,555) | 41,008 | 2,159,597 | 95,414
Discontinued Operations, Disposed of by Sale | Semiconductor Automation Business | Products |  |  |  |
Disposal Group, Including Discontinued Operation, Income Statement Disclosures [Abstract] |  |  |  |
Total revenue |  | 171,674 | 244,962 | 433,964
Total cost of revenue |  | 96,784 | 141,165 | 248,288
Discontinued Operations, Disposed of by Sale | Semiconductor Automation Business | Services |  |  |  |
Disposal Group, Including Discontinued Operation, Income Statement Disclosures [Abstract] |  |  |  |
Total revenue |  | 14,588 | 19,468 | 40,710
Total cost of revenue |  | $ 7,509 | $ 11,159 | $ 19,250

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