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Discontinued Operations - Non-cash Items and Capital Expenditures (Details) - Discontinued Operations, Disposed of by Sale - Semiconductor Automation Business - USD ($) $ in Thousands | 3 Months Ended | 9 Months Ended
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Jun. 30, 2021 | Jun. 30, 2022 | Jun. 30, 2021
Discontinued Operation, Alternative Cash Flow Information [Abstract] |  |  |
Depreciation and amortization | $ 2,697 |  | $ 6,393
Capital expenditures | 903 | $ 2,862 | 3,634
Stock-based compensation | $ 1,742 | $ 8,032 | $ 7,705

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