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Discontinued Operations - Acquisitions (Details) - USD ($) $ in Thousands |  | 3 Months Ended |  |
--- | --- | --- | --- | ---
Apr. 29, 2021 | Mar. 31, 2022 | Jun. 30, 2022 | Sep. 30, 2021
Business Combination, Recognized Identifiable Assets Acquired, Goodwill, and Liabilities Assumed, Net [Abstract] |  |  |  |
Goodwill |  |  | $ 464,885 | $ 469,356
Discontinued Operations, Held-for-sale | Semiconductor Automation Business | Precise Automation, Inc. |  |  |  |
Business Acquisition, Date of Acquisition [Abstract] |  |  |  |
Business acquisition, effective date of acquisition | Apr. 29, 2021 |  |  |
Business Combination, Consideration Transferred [Abstract] |  |  |  |
Total purchase price | $ 69,800 |  |  |
Business Combination, Recognized Identifiable Assets Acquired, Goodwill, and Liabilities Assumed, Net [Abstract] |  |  |  |
Goodwill | 33,100 |  |  |
Deferred tax liabilities | $ 6,200 |  |  |
Weighted average useful life of intangible assets | 11 years |  |  |
Business combination, option to purchase certain technology assets, exercised |  | $ 4,000 |  |
Business Combination, Goodwill [Abstract] |  |  |  |
Goodwill deductible for tax purposes | $ 0 |  |  |
Discontinued Operations, Held-for-sale | Semiconductor Automation Business | Precise Automation, Inc. | Completed Technology |  |  |  |
Business Combination, Recognized Identifiable Assets Acquired, Goodwill, and Liabilities Assumed, Net [Abstract] |  |  |  |
Intangible assets | 38,700 |  |  |
Discontinued Operations, Held-for-sale | Semiconductor Automation Business | Precise Automation, Inc. | Customer Relationships |  |  |  |
Business Combination, Recognized Identifiable Assets Acquired, Goodwill, and Liabilities Assumed, Net [Abstract] |  |  |  |
Intangible assets | $ 2,500 |  |  |

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