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Discontinued Operations - Financial Results (Details) - USD ($) $ in Thousands | 12 Months Ended
--- | ---
Sep. 30, 2023 | Sep. 30, 2022 | Sep. 30, 2021
Disposal Group, Including Discontinued Operation, Income Statement Disclosures [Abstract] |  |  |
Net income from discontinued operations | $ (1,374) | $ 2,144,145 | $ 139,616
Discontinued Operations, Disposed of by Sale | Semiconductor Automation Business |  |  |
Disposal Group, Including Discontinued Operation, Income Statement Disclosures [Abstract] |  |  |
Total revenue |  | 264,430 | 680,056
Total cost of revenue |  | 152,324 | 384,536
Gross profit |  | 112,106 | 295,520
Research and development |  | 18,486 | 48,647
Selling, general and administrative |  | 30,622 | 70,634
Restructuring charges |  |  | 230
Total operating expenses |  | 49,108 | 119,511
Operating income |  | 62,998 | 176,009
Gain on divestiture |  | 2,561,820 | 133
Income before income taxes |  | 2,624,818 | 176,142
Income tax expense |  | 480,673 | 35,357
Net income from discontinued operations | $ (1,400) | 2,144,145 | 140,785
Discontinued Operations, Disposed of by Sale | Semiconductor Automation Business | Products |  |  |
Disposal Group, Including Discontinued Operation, Income Statement Disclosures [Abstract] |  |  |
Total revenue |  | 244,962 | 624,358
Total cost of revenue |  | 141,165 | 354,786
Discontinued Operations, Disposed of by Sale | Semiconductor Automation Business | Services |  |  |
Disposal Group, Including Discontinued Operation, Income Statement Disclosures [Abstract] |  |  |
Total revenue |  | 19,468 | 55,698
Total cost of revenue |  | $ 11,159 | $ 29,750

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