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Discontinued Operations - Non-cash Items and Capital Expenditures (Details) - Discontinued Operations, Disposed of by Sale - Semiconductor Automation Business - USD ($) $ in Thousands | 3 Months Ended | 6 Months Ended
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Mar. 31, 2022 | Mar. 31, 2022
Discontinued Operation, Alternative Cash Flow Information [Abstract] |  |
Capital expenditures | $ 579 | $ 2,862
Stock-based compensation | $ 3,109 | $ 8,032

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