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Commitments and Contingencies - Contingencies (Details) - Edwards Vacuum LLC, Indemnification, Definitive Agreement, Third-party Warranty Claim - USD ($) $ in Millions	1 Months Ended		3 Months Ended
	Apr. 30, 2023	Jan. 31, 2023	Jun. 30, 2023	Mar. 31, 2023
Loss Contingency, Information about Litigation Matters [Abstract]
Loss contingency, damages sought, value		$ 1.0
Loss Contingency Accrual, Disclosures [Abstract]
Loss contingency accrual				$ 2.5
Settled Litigation
Loss Contingency Accrual, Disclosures [Abstract]
Payment of Litigation Expense	$ 0.8		$ 0.8

X

- Definition

The amount of payment of litigation expense during the period.

+ References

No definition available.

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- Definition

Amount of loss contingency liability.

+ References

Reference 1: http://www.xbrl.org/2003/role/disclosureRef
-Topic 450
-SubTopic 20
-Name Accounting Standards Codification
-Section 50
-Paragraph 1
-Publisher FASB
-URI https://asc.fasb.org//1943274/2147483076/450-20-50-1

Reference 2: http://www.xbrl.org/2003/role/recommendedDisclosureRef
-Topic 450
-SubTopic 20
-Name Accounting Standards Codification
-Section 50
-Paragraph 10
-Publisher FASB
-URI https://asc.fasb.org//1943274/2147483076/450-20-50-10

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- Definition

The value (monetary amount) of the award the plaintiff seeks in the legal matter.

+ References

Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef
-Topic 450
-SubTopic 20
-Name Accounting Standards Codification
-Section 50
-Paragraph 1
-Publisher FASB
-URI https://asc.fasb.org//1943274/2147483076/450-20-50-1

Reference 2: http://www.xbrl.org/2009/role/commonPracticeRef
-Topic 450
-SubTopic 20
-Name Accounting Standards Codification
-Section 50
-Paragraph 4
-Subparagraph (a)
-Publisher FASB
-URI https://asc.fasb.org//1943274/2147483076/450-20-50-4

Reference 3: http://www.xbrl.org/2009/role/commonPracticeRef
-Topic 450
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-Section 50
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-URI https://asc.fasb.org//1943274/2147483076/450-20-50-9

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