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Note 3 - Discontinued Operations - Schedule of Disposal Groups (Details) - USD ($) $ in Thousands	12 Months Ended
	Sep. 30, 2024	Sep. 30, 2023	Sep. 30, 2022
Net income from discontinued operations	$ 0	$ (1,374)	$ 2,144,145
Discontinued Operations, Disposed of by Sale [Member] | Semiconductor Automation Business [Member]
Disposal group, revenue			264,430
Disposal group, cost of revenue			152,324
Gross profit			112,106
Research and development			18,486
Selling, general and administrative			30,622
Restructuring charges			0
Total operating expenses			49,108
Operating income			62,998
Gain on divestiture			2,561,820
Income before income taxes			2,624,818
Income tax expense			480,673
Net income from discontinued operations	$ (1,400)		2,144,145
Capital expenditures			2,862
Discontinued Operations, Disposed of by Sale [Member] | Semiconductor Automation Business [Member] | Product [Member]
Disposal group, revenue			244,962
Disposal group, cost of revenue			141,165
Discontinued Operations, Disposed of by Sale [Member] | Semiconductor Automation Business [Member] | Service [Member]
Disposal group, revenue			19,468
Disposal group, cost of revenue			$ 11,159

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