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Commitments and Contingencies - Contingencies (Details) - Edwards Vacuum LLC, Indemnification, Definitive Agreement, Third-party Warranty Claim - USD ($) $ in Millions | 1 Months Ended | 3 Months Ended |  |
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Apr. 30, 2023 | Jan. 31, 2023 | Jun. 30, 2023 | Mar. 31, 2024 | Mar. 31, 2023
Loss Contingency, Information about Litigation Matters [Abstract] |  |  |  |  |
Loss contingency, damages sought, value |  | $ 1.0 |  |  |
Loss Contingency Accrual, Disclosures [Abstract] |  |  |  |  |
Loss contingency accrual |  |  |  |  | $ 2.5
Settled Litigation |  |  |  |  |
Loss Contingency Accrual, Disclosures [Abstract] |  |  |  |  |
Loss contingency accrual |  |  |  | $ 1.7 |
Loss contingency payment | $ 0.8 |  | $ 0.8 |  |

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- Definition Amount of loss contingency liability. + References Reference 1: http://www.xbrl.org/2003/role/disclosureRef -Topic 450 -SubTopic 20 -Name Accounting Standards Codification -Section 50 -Paragraph 1 -Publisher FASB -URI https://asc.fasb.org//1943274/2147483076/450-20-50-1 Reference 2: http://www.xbrl.org/2003/role/recommendedDisclosureRef -Topic 450 -SubTopic 20 -Name Accounting Standards Codification -Section 50 -Paragraph 10 -Publisher FASB -URI https://asc.fasb.org//1943274/2147483076/450-20-50-10 + Details
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- Definition Amount of cash outflow reducing loss contingency liability. + References Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef -Topic 450 -SubTopic 20 -Name Accounting Standards Codification -Section 50 -Paragraph 1 -Publisher FASB -URI https://asc.fasb.org//1943274/2147483076/450-20-50-1 + Details
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