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Note 3 - Discontinued Operations (Details Textual) - USD ($) $ in Millions |  |  | 1 Months Ended | 3 Months Ended |  |
--- | --- | --- | --- | --- | --- | ---
Feb. 01, 2022 | Jul. 01, 2019 | Apr. 30, 2023 | Jan. 31, 2023 | Jun. 30, 2024 | Dec. 31, 2024 | Dec. 31, 2020
Loss Contingency Accrual |  |  |  |  |  | $ 1.7 |
Edwards Vacuum LLC Warranty Claim [Member] |  |  |  |  |  |  |
Loss Contingency, Damages Sought, Value |  |  |  | $ 1.0 |  |  |
Loss Contingency Accrual |  |  |  |  |  |  | $ 2.5
Edwards Vacuum LLC Warranty Claim [Member] | Settled Litigation [Member] |  |  |  |  |  |  |
Loss Contingency Accrual, Payments |  |  | $ 0.8 |  | $ 0.8 |  |
Edwards Vacuum LLC Warranty Claim [Member] | Settled Litigation [Member] | Indemnification Agreement [Member] |  |  |  |  |  |  |
Loss Contingency, Receivable, Proceeds |  |  | $ 1.0 |  |  |  |
Discontinued Operations, Disposed of by Sale [Member] | Semiconductor Automation Business [Member] |  |  |  |  |  |  |
Proceeds from Divestiture of Businesses | $ 2,900.0 |  |  |  |  |  |
Discontinued Operations, Disposed of by Sale [Member] | Semiconductor Cryogenics Business [Member] |  |  |  |  |  |  |
Proceeds from Divestiture of Businesses |  | $ 659.8 |  |  |  |  |

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