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Note 3 - Discontinued Operations (Details Textual) - USD ($) $ in Millions			1 Months Ended		3 Months Ended
	Feb. 01, 2022	Jul. 01, 2019	Apr. 30, 2023	Jan. 31, 2023	Jun. 30, 2024	Dec. 31, 2024	Dec. 31, 2020
Loss Contingency Accrual						$ 1.7
Edwards Vacuum LLC Warranty Claim [Member]
Loss Contingency, Damages Sought, Value				$ 1.0
Loss Contingency Accrual							$ 2.5
Edwards Vacuum LLC Warranty Claim [Member] \| Settled Litigation [Member]
Loss Contingency Accrual, Payments			$ 0.8		$ 0.8
Edwards Vacuum LLC Warranty Claim [Member] \| Settled Litigation [Member] \| Indemnification Agreement [Member]
Loss Contingency, Receivable, Proceeds			$ 1.0
Discontinued Operations, Disposed of by Sale [Member] \| Semiconductor Automation Business [Member]
Proceeds from Divestiture of Businesses	$ 2,900.0
Discontinued Operations, Disposed of by Sale [Member] \| Semiconductor Cryogenics Business [Member]
Proceeds from Divestiture of Businesses		$ 659.8