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Note 3 - Discontinued Operations (Details Textual) - USD ($) $ in Thousands |  |  | 1 Months Ended | 3 Months Ended | 6 Months Ended | 9 Months Ended |
--- | --- | --- | --- | --- | --- | --- | ---
Feb. 01, 2022 | Jul. 01, 2019 | Apr. 30, 2023 | Jan. 31, 2023 | Jun. 30, 2025 | Mar. 31, 2025 | Jun. 30, 2024 | Jun. 30, 2025 | Jun. 30, 2025 | Jun. 30, 2024 | Dec. 31, 2020
Impairment of Long-Lived Assets to be Disposed of |  |  |  |  | $ 68,800 | $ 24,000 |  |  | $ 93,025 | $ 0 |
Loss Contingency Accrual |  |  |  |  | $ 2,100 |  |  | $ 2,100 | $ 2,100 |  |
Edwards Vacuum LLC Warranty Claim [Member] |  |  |  |  |  |  |  |  |  |  |
Loss Contingency, Damages Sought, Value |  |  |  | $ 1,000 |  |  |  |  |  |  |
Loss Contingency Accrual |  |  |  |  |  |  |  |  |  |  | $ 2,500
Loss Contingency Accrual, Provision |  |  |  |  |  |  |  | $ 400 |  |  |
Edwards Vacuum LLC Warranty Claim [Member] | Settled Litigation [Member] |  |  |  |  |  |  |  |  |  |  |
Loss Contingency Accrual, Payments |  |  | $ 800 |  |  |  | $ 800 |  |  |  |
Edwards Vacuum LLC Warranty Claim [Member] | Settled Litigation [Member] | Indemnification Agreement [Member] |  |  |  |  |  |  |  |  |  |  |
Loss Contingency, Receivable, Proceeds |  |  | $ 1,000 |  |  |  |  |  |  |  |
Discontinued Operations, Disposed of by Sale [Member] | Semiconductor Automation Business [Member] |  |  |  |  |  |  |  |  |  |  |
Proceeds from Divestiture of Businesses | $ 2,900,000 |  |  |  |  |  |  |  |  |  |
Discontinued Operations, Disposed of by Sale [Member] | Semiconductor Cryogenics Business [Member] |  |  |  |  |  |  |  |  |  |  |
Proceeds from Divestiture of Businesses |  | $ 659,800 |  |  |  |  |  |  |  |  |
Revision of Prior Period, Error Correction, Adjustment [Member] |  |  |  |  |  |  |  |  |  |  |
Impairment of Long-Lived Assets to be Disposed of |  |  |  |  |  | $ 5,600 |  |  |  |  |

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