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Note 3 - Discontinued Operations (Details Textual) - USD ($) $ in Thousands			1 Months Ended		3 Months Ended			6 Months Ended	9 Months Ended
	Feb. 01, 2022	Jul. 01, 2019	Apr. 30, 2023	Jan. 31, 2023	Jun. 30, 2025	Mar. 31, 2025	Jun. 30, 2024	Jun. 30, 2025	Jun. 30, 2025	Jun. 30, 2024	Dec. 31, 2020
Impairment of Long-Lived Assets to be Disposed of					$ 68,800	$ 24,000			$ 93,025	$ 0
Loss Contingency Accrual					$ 2,100			$ 2,100	$ 2,100
Edwards Vacuum LLC Warranty Claim [Member]
Loss Contingency, Damages Sought, Value				$ 1,000
Loss Contingency Accrual											$ 2,500
Loss Contingency Accrual, Provision								$ 400
Edwards Vacuum LLC Warranty Claim [Member] | Settled Litigation [Member]
Loss Contingency Accrual, Payments			$ 800				$ 800
Edwards Vacuum LLC Warranty Claim [Member] | Settled Litigation [Member] | Indemnification Agreement [Member]
Loss Contingency, Receivable, Proceeds			$ 1,000
Discontinued Operations, Disposed of by Sale [Member] | Semiconductor Automation Business [Member]
Proceeds from Divestiture of Businesses	$ 2,900,000
Discontinued Operations, Disposed of by Sale [Member] | Semiconductor Cryogenics Business [Member]
Proceeds from Divestiture of Businesses		$ 659,800
Revision of Prior Period, Error Correction, Adjustment [Member]
Impairment of Long-Lived Assets to be Disposed of						$ 5,600

X

- Definition

The aggregate amount of write-downs for impairments recognized during the period for long-lived assets held for abandonment, exchange or sale.

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