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Subsequent Events (Details) - USD ($) $ in Thousands | 1 Months Ended | 12 Months Ended |  |  |  |  |  |  |  |
--- | --- | --- | --- | --- | --- | --- | --- | --- | --- | ---
Jan. 31, 2022 | Jan. 31, 2021 | Dec. 31, 2021 | Dec. 31, 2020 | Nov. 30, 2021 | Oct. 31, 2021 | Sep. 30, 2021 | Jun. 30, 2021 | Sep. 30, 2020 | Feb. 05, 2020 | Aug. 09, 2019 | Nov. 06, 2018
Subsequent Event |  |  |  |  |  |  |  |  |  |  |  |
Increase in redeemable noncontrolling interests due to issuance of Tongmei's common stock |  |  | $ 1,514 | $ 48,102 |  |  |  |  |  |  |  |
Wells Fargo Bank | Secured Debt |  |  |  |  |  |  |  |  |  |  |  |
Subsequent Event |  |  |  |  |  |  |  |  |  |  |  |
Maximum borrowing capacity |  |  |  |  |  |  |  |  |  | $ 7,000 |  | $ 10,000
Beijing Tongmei Xtal Technology | Bank of Communications | Secured Debt |  |  |  |  |  |  |  |  |  |  |  |
Subsequent Event |  |  |  |  |  |  |  |  |  |  |  |
Maximum borrowing capacity |  |  |  |  | $ 1,600 |  | $ 3,100 |  |  |  |  |
Interest rate |  |  |  |  |  |  | 4.00% |  |  |  |  |
Beijing Tongmei Xtal Technology | Bank Of China | Secured Debt |  |  |  |  |  |  |  |  |  |  |  |
Subsequent Event |  |  |  |  |  |  |  |  |  |  |  |
Maximum borrowing capacity |  |  |  |  |  |  |  |  | $ 3,100 |  | $ 5,800 |
Interest rate |  |  |  |  |  |  | 3.85% | 4.70% |  |  |  |
Subsequent Event [Member] | ChaoYang XinMei High Purity Semiconductor Materials Co., Ltd |  |  |  |  |  |  |  |  |  |  |  |
Subsequent Event |  |  |  |  |  |  |  |  |  |  |  |
Noncontrolling interest increased | $ 2,200 |  |  |  |  |  |  |  |  |  |  |
Increase in redeemable noncontrolling interests due to issuance of Tongmei's common stock | $ 200 |  |  |  |  |  |  |  |  |  |  |
Percentage of ownership, equity method | 58.50% |  |  |  |  |  |  |  |  |  |  |
Subsequent Event [Member] | Beijing Tongmei Xtal Technology | Bank of Communications | Secured Debt |  |  |  |  |  |  |  |  |  |  |  |
Subsequent Event |  |  |  |  |  |  |  |  |  |  |  |
Maximum borrowing capacity | $ 3,100 |  |  |  |  |  |  |  |  |  |  |
Interest rate | 3.30% |  |  |  |  |  |  |  |  |  |  |
Subsequent Event [Member] | Beijing Tongmei Xtal Technology | Bank Of China | Secured Debt |  |  |  |  |  |  |  |  |  |  |  |
Subsequent Event |  |  |  |  |  |  |  |  |  |  |  |
Maximum borrowing capacity | $ 4,400 |  |  |  |  |  |  |  |  |  |  |
Interest rate | 4.55% |  |  |  |  |  |  |  |  |  |  |
Beijing Tongmei Xtal Technology |  |  |  |  |  |  |  |  |  |  |  |
Subsequent Event |  |  |  |  |  |  |  |  |  |  |  |
Increase in redeemable noncontrolling interests due to issuance of Tongmei's common stock |  | $ 1,500 |  | $ 48,100 |  |  |  |  |  |  |  |
Beijing Tongmei Xtal Technology | ChaoYang XinMei High Purity Semiconductor Materials Co., Ltd |  |  |  |  |  |  |  |  |  |  |  |
Subsequent Event |  |  |  |  |  |  |  |  |  |  |  |
Loan amount |  |  | $ 1,400 |  |  |  |  |  |  |  |  |
Beijing Tongmei Xtal Technology | ChaoYang XinMei High Purity Semiconductor Materials Co., Ltd | Subsequent Event [Member] |  |  |  |  |  |  |  |  |  |  |  |
Subsequent Event |  |  |  |  |  |  |  |  |  |  |  |
Loan amount | $ 1,400 |  |  |  |  |  |  |  |  |  |  |
Loan from related party | ChaoYang Xinshuo | ChaoYang XinMei High Purity Semiconductor Materials Co., Ltd |  |  |  |  |  |  |  |  |  |  |  |
Subsequent Event |  |  |  |  |  |  |  |  |  |  |  |
Loan amount |  |  |  |  |  | $ 1,000 | $ 900 |  |  |  |  |

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